TW202227373A - Sintering aid for buffer layer, resistor including buffer layer, and method for manufacturing resistor including boron-barium-zinc-silicon-aluminum-vanadium based glass frits which is capable of increasing adhesion of a resistor layer to a substrate - Google Patents

Sintering aid for buffer layer, resistor including buffer layer, and method for manufacturing resistor including boron-barium-zinc-silicon-aluminum-vanadium based glass frits which is capable of increasing adhesion of a resistor layer to a substrate Download PDF

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TW202227373A
TW202227373A TW109147187A TW109147187A TW202227373A TW 202227373 A TW202227373 A TW 202227373A TW 109147187 A TW109147187 A TW 109147187A TW 109147187 A TW109147187 A TW 109147187A TW 202227373 A TW202227373 A TW 202227373A
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TWI742979B (en
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朱立文
黃意舜
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華新科技股份有限公司
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Abstract

The present invention provides a sintering aid for a buffer layer, which includes boron-barium-zinc-silicon-aluminum-vanadium based glass frits. The present invention also provides a resistor including a buffer layer, because the buffer layer includes the boron-barium-zinc-silicon-aluminum-vanadium based glass frits, the resistor layer can increase its adhesion to a substrate through the buffer layer sandwiched between the substrate and the resistor layer, and the increased adhesion can further prevent the resistor layer from being deformed, so that the resistance exhibits good momentary load, resistance tolerance and resistance temperature coefficient. The present invention further provides a method for manufacturing the resistor, which has the advantage of improving the cost-effectiveness of production.

Description

緩衝層用助燒結劑、包含緩衝層之電阻及電阻製法Sintering aid for buffer layer, resistor including buffer layer, and method for making resistor

本發明關於一種助燒劑,尤其是指一種用於晶片電阻器的助燒劑。本發明還有關於一種晶片電阻器及其製法。The present invention relates to a sintering aid, especially a sintering aid for chip resistors. The present invention also relates to a chip resistor and a manufacturing method thereof.

晶片電阻器(chip resistor)一般用於限制電流或降低電壓,其製法係於氧化鋁陶瓷基板上印製金屬厚膜導體,並於外層塗佈保護層而得。隨著科技進步,電路板組裝漸趨複雜,對於晶片電阻器中各層體的層間附著力、瞬間負載(Short-time overload, STOL)、電阻公差(COV%)和電阻溫度係數皆有更嚴格之要求。Chip resistors are generally used to limit current or reduce voltage, and are produced by printing metal thick film conductors on an alumina ceramic substrate and coating the outer layer with a protective layer. With the advancement of technology, the assembly of circuit boards has become more and more complicated, and there are stricter requirements for the interlayer adhesion, short-time overload (STOL), resistance tolerance (COV%) and temperature coefficient of resistance of each layer in chip resistors. Require.

美國發明專利第6943662號揭露上述將電阻層直接設於基板之製法,但有電阻層容易變形之問題;另,其揭示採用銀鈀電極膏,而有高成本問題。美國發明專利申請公開案第20110089025號和美國發明專利第5680092號皆揭露氣相沉積法之製法,但此等製法所需的材料與製程設備不僅昂貴,更有工序複雜及產能較小之製造成本問題。US Patent No. 6943662 discloses the above-mentioned method of directly disposing the resistance layer on the substrate, but the resistance layer is easily deformed; in addition, it discloses the use of silver-palladium electrode paste, which has a problem of high cost. U.S. Patent Application Publication No. 20110089025 and U.S. Patent No. 5680092 both disclose the vapor deposition method, but the materials and process equipment required for these methods are not only expensive, but also have complex processes and low production capacity. question.

綜上可知,兼顧晶片電阻器生產的成本效益以及電阻層不易變形之製程仍有待開發。To sum up, it can be seen that a process that takes into account the cost-effectiveness of chip resistor production and the resistance to deformation of the resistance layer remains to be developed.

為解決上述問題,本發明提供一種緩衝層用助燒結劑,其包含第一硼鋇鋅矽鋁釩系玻璃料,該第一硼鋇鋅矽鋁釩系玻璃料包含B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5,並以B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5的總莫耳數為基準,B 2O 3之含量為14.01 mol%至34 mol%,BaO之含量為1.5 mol%至8.44 mol%,ZnO之含量為20.06 mol%至34.6 mol%,SiO 2之含量為23 mol%至49.11 mol%,Al 2O 3之含量為4.9 mol%至7.60 mol%,以及V 2O 5之含量為0.77 mol%至1.85 mol%。 In order to solve the above problems, the present invention provides a sintering aid for a buffer layer, which comprises a first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit, and the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit includes B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 and based on the total moles of B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , B 2 O 3 The content of ZnO is 14.01 mol% to 34 mol%, the content of BaO is 1.5 mol% to 8.44 mol%, the content of ZnO is 20.06 mol% to 34.6 mol%, the content of SiO 2 is 23 mol% to 49.11 mol%, the content of Al 2 The content of O 3 is 4.9 mol % to 7.60 mol %, and the content of V 2 O 5 is 0.77 mol % to 1.85 mol %.

上述第一硼鋇鋅矽鋁釩系玻璃料可以B 2O 3-BaO-ZnO-SiO 2-Al 2O 3-V 2O 5之方式表示。 The above-mentioned first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit can be expressed in the form of B 2 O 3 -BaO-ZnO-SiO 2 -Al 2 O 3 -V 2 O 5 .

本發明之緩衝層用助燒結劑藉由包含特定成分及其各自之特定含量範圍,讓使用其作為主要成分的緩衝層應用於電阻時,除了電阻層可借助夾置於基板和電阻層的緩衝層提升電阻層對基板之附著力,並可在以雷射切割修正電阻層之電阻值時,降低破壞電阻層之機率及提升電阻層的生產良率,進一步避免電阻層變形或減少不同層體(例如基板和電阻層)之間的應力差造成的層裂風險,使電阻展現良好的瞬間負載、電阻公差和電阻溫度係數。The sintering aid for buffer layer of the present invention contains specific components and their respective specific content ranges, so that when the buffer layer using the buffer layer as the main component is applied to the resistor, in addition to the buffer layer sandwiched between the substrate and the resistor layer, the resistor layer can be used. It can improve the adhesion of the resistance layer to the substrate, and can reduce the probability of destroying the resistance layer and improve the production yield of the resistance layer when the resistance value of the resistance layer is corrected by laser cutting, and further avoid the deformation of the resistance layer or reduce the number of different layers. The risk of spalling due to stress differences (eg between the substrate and the resistive layer) allows the resistors to exhibit good transient loads, resistance tolerances and temperature coefficients of resistance.

較佳的,於該第一硼鋇鋅矽鋁釩系玻璃料中,以B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5的總莫耳數為基準,B 2O 3之含量為17 mol%至34 mol%,BaO之含量為1.5 mol%至7.5 mol%,ZnO之含量為22 mol%至34.6 mol%,SiO 2之含量為23 mol%至45 mol%,Al 2O 3之含量為4.9 mol%至7.2 mol%,以及V 2O 5之含量為0.9 mol%至1.85 mol%。 Preferably, in the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit, based on the total moles of B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , B The content of 2 O 3 is 17 mol% to 34 mol%, the content of BaO is 1.5 mol% to 7.5 mol%, the content of ZnO is 22 mol% to 34.6 mol%, and the content of SiO2 is 23 mol% to 45 mol% , the content of Al 2 O 3 is 4.9 mol % to 7.2 mol %, and the content of V 2 O 5 is 0.9 mol % to 1.85 mol %.

更佳的,於該第一硼鋇鋅矽鋁釩系玻璃料中,以B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5的總莫耳數為基準,B 2O 3之含量為19.88 mol%至31.39 mol%,BaO之含量為2.55 mol%至6.45 mol%,ZnO之含量為24.30 mol%至32.61 mol%,SiO 2之含量為26.50 mol%至41.47 mol%,Al 2O 3之含量為5.25 mol%至6.80 mol%,以及V 2O 5之含量為1.09 mol%至1.72 mol%。 More preferably, in the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit, based on the total moles of B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , B The content of 2 O 3 is 19.88 mol % to 31.39 mol %, the content of BaO is 2.55 mol % to 6.45 mol %, the content of ZnO is 24.30 mol % to 32.61 mol %, and the content of SiO 2 is 26.50 mol % to 41.47 mol % , the content of Al 2 O 3 is 5.25 mol % to 6.80 mol %, and the content of V 2 O 5 is 1.09 mol % to 1.72 mol %.

在一些實施態樣中,該第一硼鋇鋅矽鋁釩系玻璃料之玻璃軟化溫度(glass softening temperature,Ts)為586℃至739℃。In some embodiments, the glass softening temperature (Ts) of the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 586°C to 739°C.

較佳的,該第一硼鋇鋅矽鋁釩系玻璃料之玻璃軟化溫度為586℃至717℃,例如:586℃、590℃、600℃、620℃、640℃、660℃、680℃、700℃、710℃或717℃;更佳的,該第一硼鋇鋅矽鋁釩系玻璃料之玻璃軟化溫度為608℃至695℃。Preferably, the glass softening temperature of the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 586°C to 717°C, for example: 586°C, 590°C, 600°C, 620°C, 640°C, 660°C, 680°C, 700°C, 710°C or 717°C; more preferably, the glass softening temperature of the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 608°C to 695°C.

較佳的,該第一硼鋇鋅矽鋁釩系玻璃料的平均粒徑為1微米至5微米。Preferably, the average particle size of the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 1 to 5 microns.

本發明另提供一種電阻,其包含一複合層狀結構和二側面電極,該二側面電極分別設置於該複合層狀結構的相對兩側面;以及該複合層狀結構依序包含一基板、一緩衝層和一電阻層,其中該緩衝層由一緩衝層用組成物所形成,且該緩衝層用組成物包含上述之緩衝層用助燒結劑、一填料、一第一樹脂和一第一有機溶劑。The present invention further provides a resistor, which includes a composite layered structure and two side electrodes, the two side electrodes are respectively disposed on opposite sides of the composite layered structure; and the composite layered structure sequentially includes a substrate, a buffer layer and a resistance layer, wherein the buffer layer is formed by a composition for a buffer layer, and the composition for a buffer layer comprises the above-mentioned sintering aid for a buffer layer, a filler, a first resin and a first organic solvent .

本發明藉由設置前述緩衝層,除了使印刷後之電阻層圖形於燒結後所生之圖形形變量縮小,即形變量在5%以下外,並可在降低電阻層之玻璃料添加量之條件下,使電阻層仍可借助夾置於基板和電阻層中的緩衝層來提升其與基板之間的附著力,從而避免產生較大電阻公差之問題,及改善瞬間負載,有效提升產能與電阻之可靠性。In the present invention, by providing the aforementioned buffer layer, in addition to reducing the shape deformation amount of the printed resistance layer pattern after sintering, that is, the deformation amount is less than 5%, it can also reduce the amount of glass frit added in the resistance layer. Therefore, the resistance layer can still use the buffer layer sandwiched between the substrate and the resistance layer to improve the adhesion between it and the substrate, so as to avoid the problem of large resistance tolerance, improve the instantaneous load, and effectively improve the production capacity and resistance. of reliability.

本發明之緩衝層用助燒結劑於燒結過程中形成液相,可提升電阻層與緩衝層接觸介面的接著強度,並調控電阻層與基材之熱膨脹與燒結收縮之差異。The buffer layer sintering aid of the present invention forms a liquid phase during the sintering process, which can improve the bonding strength of the contact interface between the resistance layer and the buffer layer, and regulate the difference between thermal expansion and sintering shrinkage between the resistance layer and the substrate.

在一些實施態樣中,該填料包含鋁氧化物、鋅氧化物、矽氧化物、鈦氧化物之任一或其組合。In some embodiments, the filler comprises any one or a combination of aluminum oxide, zinc oxide, silicon oxide, titanium oxide.

在一些實施態樣中,該第一樹脂包含乙基纖維素系樹脂和丙烯酸系樹脂之任一或其組合。本發明採用第一樹脂使緩衝層用組成物可採用網版印刷。In some embodiments, the first resin comprises any one or a combination of an ethyl cellulose-based resin and an acrylic resin. In the present invention, the first resin is used so that the composition for a buffer layer can be screen-printed.

在一些實施態樣中,該第一有機溶劑包含:松油醇類、醚類、酯類之任一或其組合。本發明之有機溶劑係作為稀釋劑。In some embodiments, the first organic solvent comprises: any one or a combination of terpineols, ethers, esters. The organic solvent of the present invention is used as a diluent.

在一些實施態樣中,該基板為陶瓷基板。In some embodiments, the substrate is a ceramic substrate.

在一些實施態樣中,於該緩衝層用組成物中,該緩衝層用助燒劑與該填料之重量比為0.4:0.6至0.75:0.25,但不限於此;較佳的,該緩衝層用助燒劑與該填料之重量比為0.45:0.55至0.75:0.25,例如,0.45:0.25、0.55:0.45、0.60:0.45、或0.65:0.35。更佳的,該緩衝層用助燒劑與該填料之重量比為0.50:0.50至0.70:0.30。本發明藉由調整兩者之重量比例來控制電阻層與基材之熱膨脹係數與燒結收縮之差異,避免電阻層變形及避免電阻層脫落,以確保電阻的複合層狀結構具有良好的層間附著力,並展現低電阻、良好的電阻公差、電阻溫度係數和瞬間負載。In some embodiments, in the composition for the buffer layer, the weight ratio of the sintering aid for the buffer layer to the filler is 0.4:0.6 to 0.75:0.25, but not limited thereto; preferably, the buffer layer The weight ratio of sintering aid to the filler is from 0.45:0.55 to 0.75:0.25, eg, 0.45:0.25, 0.55:0.45, 0.60:0.45, or 0.65:0.35. More preferably, the weight ratio of the sintering aid for the buffer layer to the filler is 0.50:0.50 to 0.70:0.30. The present invention controls the difference in thermal expansion coefficient and sintering shrinkage between the resistance layer and the base material by adjusting the weight ratio of the two, avoids deformation of the resistance layer and prevents the resistance layer from falling off, so as to ensure that the composite layered structure of the resistance has good interlayer adhesion , and exhibit low resistance, good resistance tolerance, temperature coefficient of resistance and transient load.

在一些實施態樣中,於該緩衝層用組成物中,以該緩衝層用助燒結劑、該填料、該第一樹脂和該第一有機溶劑之總重為基準,該緩衝層用助燒結劑之含量為25.6重量百分比至48重量百分比;該填料之含量為16重量百分比至38.4重量百分比;該第一樹脂之含量為1重量百分比至2重量百分比;以及該第一有機溶劑之含量為30重量百分比至40重量百分比。In some embodiments, in the buffer layer composition, based on the total weight of the buffer layer sintering aid, the filler, the first resin and the first organic solvent, the buffer layer sintering aid The content of the agent is 25.6 to 48 percent by weight; the content of the filler is 16 to 38.4 percent by weight; the content of the first resin is 1 to 2 percent by weight; and the content of the first organic solvent is 30 Weight percent to 40 weight percent.

較佳的,於該緩衝層用組成物中,以該緩衝層用助燒結劑、該填料、該第一樹脂和該第一有機溶劑之總重為基準,該緩衝層用助燒結劑之含量為29重量百分比至48重量百分比,例如:29重量百分比、31重量百分比、33重量百分比、35重量百分比、37重量百分比、39重量百分比、41重量百分比、43重量百分比、45重量百分比、47重量百分比或48重量百分比;該填料之含量為16重量百分比至35重量百分比,例如:16重量百分比、18重量百分比、20重量百分比、22重量百分比、24重量百分比、26重量百分比、28重量百分比、30重量百分比、32重量百分比、34重量百分比或35重量百分比;該第一樹脂之含量為1重量百分比至2重量百分比,例如:1重量百分比、1.2重量百分比、1.4重量百分比、1.6重量百分比、1.8重量百分比或2重量百分比;以及該第一有機溶劑之含量為30重量百分比至40重量百分比,例如:30重量百分比、32重量百分比、34重量百分比、36重量百分比、38重量百分比或40重量百分比。Preferably, in the composition for the buffer layer, the content of the sintering aid for the buffer layer is based on the total weight of the sintering aid for the buffer layer, the filler, the first resin and the first organic solvent 29 to 48 percent by weight, for example: 29 percent by weight, 31 percent by weight, 33 percent by weight, 35 percent by weight, 37 percent by weight, 39 percent by weight, 41 percent by weight, 43 percent by weight, 45 percent by weight, 47 percent by weight Or 48 weight percent; the filler content is 16 weight percent to 35 weight percent, for example: 16 weight percent, 18 weight percent, 20 weight percent, 22 weight percent, 24 weight percent, 26 weight percent, 28 weight percent, 30 weight percent percentage, 32 weight percent, 34 weight percent or 35 weight percent; the content of the first resin is 1 weight percent to 2 weight percent, for example: 1 weight percent, 1.2 weight percent, 1.4 weight percent, 1.6 weight percent, 1.8 weight percent or 2 weight percent; and the content of the first organic solvent is 30 weight percent to 40 weight percent, for example: 30 weight percent, 32 weight percent, 34 weight percent, 36 weight percent, 38 weight percent or 40 weight percent.

在一些實施態樣中,該電阻層由一電阻膏所形成,且該電阻膏包含一金屬粉、一電阻層用助燒結劑、一第二樹脂和一第二溶劑。In some embodiments, the resistive layer is formed of a resistive paste, and the resistive paste includes a metal powder, a sintering aid for the resistive layer, a second resin and a second solvent.

較佳的,該第二樹脂包含乙基纖維素系樹脂和丙烯酸系樹脂之任一或其組合;更佳的,該第二樹脂與該第一樹脂相同。Preferably, the second resin comprises either ethyl cellulose resin and acrylic resin or a combination thereof; more preferably, the second resin is the same as the first resin.

較佳的,該第二有機溶劑包含:松油醇類、醚類、酯類之任一或其組合;更佳的,該第二有機溶劑與該第一有機溶劑相同。Preferably, the second organic solvent comprises: any one or a combination of terpineols, ethers, esters; more preferably, the second organic solvent is the same as the first organic solvent.

上述電阻層用助燒結劑包含第二硼鋇鋅矽鋁釩系玻璃料,並可以B 2O 3-BaO-ZnO-SiO 2-Al 2O 3-V 2O 5之方式表示。 The above-mentioned sintering aid for the resistance layer contains the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit, and can be expressed in the form of B 2 O 3 -BaO-ZnO-SiO 2 -Al 2 O 3 -V 2 O 5 .

在一些實施態樣中,於該第二硼鋇鋅矽鋁釩系玻璃料中,該第二硼鋇鋅矽鋁釩系玻璃料包含B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5,並以B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5的總莫耳數為基準,B 2O 3之含量為26.70 mol%至29.1 mol%,BaO之含量為10.1 mol%至12.64 mol%,ZnO之含量為15.39 mol%至19.9 mol%,SiO 2之含量為37.2 mol%至42.36 mol%,Al 2O 3之含量為2.68 mol%至3 mol%,以及 V 2O 5之含量為0.22 mol%至0.6 mol%。 In some embodiments, in the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit, the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit comprises B 2 O 3 , BaO, ZnO, SiO 2 , and Al 2 O 3 and V 2 O 5 , and based on the total moles of B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , the content of B 2 O 3 is 26.70 mol% to 29.1 mol%, BaO content is 10.1 mol% to 12.64 mol%, ZnO content is 15.39 mol% to 19.9 mol%, SiO2 content is 37.2 mol% to 42.36 mol%, Al 2 O3 content is 2.68 mol% to 3 mol %, and the content of V 2 O 5 is 0.22 mol % to 0.6 mol %.

較佳的,於該第二硼鋇鋅矽鋁釩系玻璃料中,該第二硼鋇鋅矽鋁釩系玻璃料包含B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5,並以B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5的總莫耳數為基準,B 2O 3之含量為27 mol%至29.1 mol%,BaO之含量為10.1 mol%至12.2 mol%,ZnO之含量為16.1 mol%至19.9 mol%,SiO 2之含量為37.2 mol%至41.5 mol%,Al 2O 3之含量為2.73 mol%至3 mol%,以及 V 2O 5之含量為0.28 mol%至0.6 mol%。 Preferably, in the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit, the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit comprises B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , and based on the total moles of B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , the content of B 2 O 3 is 27 mol % to 29.1 mol %, The content of BaO is 10.1 mol% to 12.2 mol%, the content of ZnO is 16.1 mol% to 19.9 mol%, the content of SiO2 is 37.2 mol% to 41.5 mol%, and the content of Al2O3 is 2.73 mol% to 3 mol% %, and the content of V 2 O 5 is 0.28 mol % to 0.6 mol %.

更佳的,於該第二硼鋇鋅矽鋁釩系玻璃料中,以B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5的總莫耳數為基準,B 2O 3之含量為27.40 mol%至28.79 mol%,BaO之含量為10.48 mol%至11.92 mol%,ZnO之含量為16.69 mol%至19.26 mol%,SiO 2之含量為37.98 mol%至40.89 mol%,Al 2O 3之含量為2.77 mol%至2.95 mol%,以及V 2O 5之含量為0.33 mol%至0.55 mol%。 More preferably, in the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit, based on the total moles of B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , B The content of 2 O 3 is 27.40 mol % to 28.79 mol %, the content of BaO is 10.48 mol % to 11.92 mol %, the content of ZnO is 16.69 mol % to 19.26 mol %, and the content of SiO 2 is 37.98 mol % to 40.89 mol % , the content of Al 2 O 3 is 2.77 mol % to 2.95 mol %, and the content of V 2 O 5 is 0.33 mol % to 0.55 mol %.

在一些實施態樣中,該第二硼鋇鋅矽鋁釩系玻璃料之玻璃軟化溫度為565℃至690℃。In some embodiments, the glass softening temperature of the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 565°C to 690°C.

較佳的,該第二硼鋇鋅矽鋁釩系玻璃料之玻璃軟化溫度為565℃至675℃,例如:565℃、570℃、580℃、590℃、600℃、610℃、620℃、630℃、640℃、650℃、660℃、670℃或675℃;更佳的,該第二硼鋇鋅矽鋁釩系玻璃料之玻璃軟化溫度為585℃至655℃。本發明藉由調整緩衝層用助燒結劑與電阻層用助燒結劑之玻璃軟化點之溫度差異,可降低電阻層在燒結過程中的收縮形變與殘留應力。Preferably, the glass softening temperature of the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 565°C to 675°C, for example: 565°C, 570°C, 580°C, 590°C, 600°C, 610°C, 620°C, 630°C, 640°C, 650°C, 660°C, 670°C or 675°C; more preferably, the glass softening temperature of the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 585°C to 655°C. By adjusting the temperature difference of the glass softening point of the sintering aid for the buffer layer and the sintering aid for the resistance layer, the invention can reduce the shrinkage deformation and residual stress of the resistance layer during the sintering process.

依據本發明,電阻層用助燒結劑中的第二硼鋇鋅矽鋁釩系玻璃料因具有特定玻璃軟化點範圍,而可更進一步地避免電阻層變形及脫落,以確保電阻層具有良好的附著力,並展現低電阻、良好的電阻公差、電阻溫度係數和瞬間負載。According to the present invention, the second boron-barium-zinc-silicon-alumina-vanadium-based glass frit in the sintering aid for the resistance layer has a specific glass softening point range, which can further prevent the resistance layer from being deformed and peeled off, so as to ensure that the resistance layer has good properties. adhesion, and exhibits low resistance, good resistance tolerance, temperature coefficient of resistance, and transient loads.

較佳的,該第二硼鋇鋅矽鋁釩系玻璃料為粉末;更佳的,該第二硼鋇鋅矽鋁釩系玻璃料之平均粒徑為1微米至5微米。Preferably, the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is powder; more preferably, the average particle size of the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 1 to 5 microns.

在一些實施態樣中,該金屬粉包含銅和鎳,且該銅和鎳之重量比例為0.35:0.65至0.8:0.2。較佳的,該銅和鎳之重量比例為0.35:0.65至0.65:0.35,例如,0.40:0.60、0.45:0.55、0.50:0.50、0.55:0.45、或0.60:0.40。本發明之電阻層非採用銀鈀合金電阻膏,故可有效降低生產成本。In some embodiments, the metal powder includes copper and nickel, and the weight ratio of the copper and nickel is 0.35:0.65 to 0.8:0.2. Preferably, the weight ratio of the copper and nickel is 0.35:0.65 to 0.65:0.35, for example, 0.40:0.60, 0.45:0.55, 0.50:0.50, 0.55:0.45, or 0.60:0.40. The resistance layer of the present invention does not use silver-palladium alloy resistance paste, so the production cost can be effectively reduced.

在一些實施態樣中,該金屬粉包含銅粉和鎳粉,或銅鎳合金粉。In some embodiments, the metal powder includes copper powder and nickel powder, or copper-nickel alloy powder.

依據本發明,控制銅和鎳之重量比例可進一步避免電阻溫度係數過高。According to the present invention, controlling the weight ratio of copper and nickel can further prevent the temperature coefficient of resistance from being too high.

在一些實施態樣中,於該電極膏中,以該金屬粉、該電阻層用助燒結劑、該第二樹脂和該第二溶劑之總重為基金屬粉之含量為67重量百分比至79重量百分比;該電阻層用助燒結劑之含量為2重量百分比至6重量百分比;該第二樹脂之含量為1重量百分比至3重量百分比;以及該第二有機溶劑之含量為17重量百分比至25重量百分比。In some embodiments, in the electrode paste, the total weight of the metal powder, the sintering aid for the resistance layer, the second resin and the second solvent is the content of the base metal powder in the range of 67 to 79 percent by weight. The content of the sintering aid for the resistance layer is 2 to 6 percent by weight; the content of the second resin is 1 to 3 percent by weight; and the content of the second organic solvent is 17 to 25 percent by weight weight percent.

較佳的,於該電極膏中,以該金屬粉、該電阻層用助燒結劑、該第二樹脂和該第二溶劑之總重為基準,該金屬粉之含量為67重量百分比至79重量百分比,例如:67重量百分比、70重量百分比、73重量百分比、76重量百分比或79重量百分比;該電阻層用助燒結劑之含量為2.5重量百分比至5.5重量百分比,例如:2.5重量百分比、3重量百分比、3.5重量百分比、4重量百分比、4.5重量百分比、5重量百分比或5.5重量百分比;該第二樹脂之含量為1重量百分比至3重量百分比,例如:1重量百分比、1.5重量百分比、2重量百分比、2.5重量百分比或3重量百分比、;以及該第二有機溶劑之含量為17重量百分比至25重量百分比,例如:17重量百分比、19重量百分比、21重量百分比、23重量百分比或25重量百分比。Preferably, in the electrode paste, based on the total weight of the metal powder, the sintering aid for the resistance layer, the second resin and the second solvent, the content of the metal powder is 67% to 79% by weight Percentage, for example: 67% by weight, 70% by weight, 73% by weight, 76% by weight or 79% by weight; the content of the sintering aid for the resistance layer is 2.5% by weight to 5.5% by weight, such as: 2.5% by weight, 3% by weight percentage, 3.5 weight percent, 4 weight percent, 4.5 weight percent, 5 weight percent or 5.5 weight percent; the content of the second resin is 1 weight percent to 3 weight percent, for example: 1 weight percent, 1.5 weight percent, 2 weight percent , 2.5 weight percent or 3 weight percent, and the content of the second organic solvent is 17 weight percent to 25 weight percent, for example: 17 weight percent, 19 weight percent, 21 weight percent, 23 weight percent or 25 weight percent.

依據本發明,控制電阻層用助燒結劑之含量可避免電阻升高及避免電阻層脫落。According to the present invention, controlling the content of the sintering aid for the resistance layer can prevent the resistance from rising and the resistance layer from falling off.

較佳的,該金屬粉為球形粉末。Preferably, the metal powder is spherical powder.

較佳的,該金屬粉平均粒徑為0.3微米至10微米。當金屬粉的粒徑在前述範圍時,可提升金屬粉的堆疊密度和網版印刷之操作性。Preferably, the average particle size of the metal powder is 0.3 microns to 10 microns. When the particle size of the metal powder is within the aforementioned range, the stacking density of the metal powder and the operability of screen printing can be improved.

在一些實施態樣中,該複合層狀結構更進一步包含一背面電極和一正面電極;其中,該背面電極設於該基板的底面;該緩衝層的頂面之面積小於該基板的頂面之面積,該電阻層的頂面之面積小於該緩衝層的頂面之面積,且該基板的頂面和緩衝層的頂面設置該正面電極,且該正面電極的頂面與該電阻層的頂面切齊,以形成一共平面。In some embodiments, the composite layered structure further includes a back electrode and a front electrode; wherein, the back electrode is disposed on the bottom surface of the substrate; the area of the top surface of the buffer layer is smaller than the area of the top surface of the substrate area, the area of the top surface of the resistance layer is smaller than the area of the top surface of the buffer layer, and the top surface of the substrate and the top surface of the buffer layer are provided with the front electrode, and the top surface of the front electrode and the top surface of the resistance layer Cut the faces flush to form a common plane.

較佳的,該基板、該緩衝層、該電阻層和該背面電極各自之頂面面積與底面面積之大小相同。Preferably, the area of the top surface and the area of the bottom surface of the substrate, the buffer layer, the resistance layer and the back electrode are the same in size.

在另一些實施態樣中,該電阻進一步包含一保護層,且該保護層設於該複合層狀結構的頂面(即最外表面),以保護電阻層,該複合層狀結構的頂面即指正面電極的頂面與該電阻層的頂面所共同形成的表面。In other embodiments, the resistor further includes a protective layer, and the protective layer is disposed on the top surface (ie the outermost surface) of the composite layered structure to protect the resistor layer, and the top surface of the composite layered structure That is, it refers to the surface jointly formed by the top surface of the front electrode and the top surface of the resistive layer.

本發明再提供一種電阻之製法,其包括以下步驟:步驟(a):在一基板之表面形成一緩衝層;步驟(b):在該緩衝層之表面形成一電阻層,其中,該緩衝層夾設於該基板和該電阻層之間,獲得一複合層狀結構;步驟(c):在該複合層狀結構之相對兩側面分別設置一側面電極,以獲得一電阻胚;以及步驟(d):燒結該電阻胚,以獲得該電阻;其中該緩衝層由一緩衝層用組成物所形成,且該緩衝層用組成物包含如前述之緩衝層用助燒結劑、一填料、一第一樹脂和一第一有機溶劑。The present invention further provides a method for making a resistor, which comprises the following steps: step (a): forming a buffer layer on the surface of a substrate; step (b): forming a resistance layer on the surface of the buffer layer, wherein the buffer layer sandwiched between the substrate and the resistance layer to obtain a composite layered structure; step (c): respectively setting a side electrode on two opposite sides of the composite layered structure to obtain a resistance embryo; and step (d) ): sintering the resistor blank to obtain the resistor; wherein the buffer layer is formed from a composition for a buffer layer, and the composition for a buffer layer includes the aforementioned sintering aid for a buffer layer, a filler, a first resin and a first organic solvent.

較佳的,該步驟(a)形成緩衝層之方式和該步驟(b)形成電阻層之方式皆係以網版印刷法形成,相較於採用氣相沉積法的形成方式,採用網版印刷法具有較高之生產效率。Preferably, the method of forming the buffer layer in the step (a) and the method of forming the resistance layer in the step (b) are both formed by screen printing. The method has higher production efficiency.

較佳的,該步驟(a)、該步驟(b)和該步驟(c)可各自包含烘乾步驟,且烘乾溫度為100℃至150℃。Preferably, the step (a), the step (b) and the step (c) may each include a drying step, and the drying temperature is 100°C to 150°C.

較佳的,該步驟(a)、該步驟(b)和該步驟(c)各自之烘乾時間為10分鐘至15分鐘。Preferably, the drying time of each of the step (a), the step (b) and the step (c) is 10 minutes to 15 minutes.

較佳的,該步驟(d)之燒結溫度為880℃至920℃。Preferably, the sintering temperature in step (d) is 880°C to 920°C.

較佳的,該步驟(d)之燒結時間為10分鐘至15分鐘。Preferably, the sintering time of the step (d) is 10 minutes to 15 minutes.

較佳的,在步驟(a)之前,該基板之底面可先形成一背面電極。更佳的,該複合層狀結構包含該背面電極、該基板、該緩衝層、該電阻層和一正面電極;該緩衝層的頂面面積小於該基板的頂面面積,該電阻層的頂面面積小於該緩衝層的頂面面積,以及該步驟(b)進一步包括:在該基板的頂面和緩衝層的頂面形成該正面電極,且該正面電極的頂面與該電阻層的頂面切齊,以形成一共平面。Preferably, before step (a), a back electrode may be formed on the bottom surface of the substrate. More preferably, the composite layered structure includes the back electrode, the substrate, the buffer layer, the resistance layer and a front electrode; the top surface area of the buffer layer is smaller than the top surface area of the substrate, and the top surface area of the resistance layer is The area is smaller than the top surface area of the buffer layer, and the step (b) further comprises: forming the front electrode on the top surface of the substrate and the top surface of the buffer layer, and the top surface of the front electrode and the top surface of the resistance layer Cut flush to form a common plane.

較佳的,在該步驟(d)之燒結該電阻胚之後,進一步於該電阻胚或該複合層狀結構的頂面形成一保護層,接著再進行燒結步驟及電極電鍍步驟形成外電極層,最終得到該電阻。Preferably, after the resistor blank is sintered in the step (d), a protective layer is further formed on the top surface of the resistor blank or the composite layered structure, and then a sintering step and an electrode electroplating step are performed to form an outer electrode layer, Finally got this resistor.

在一些實施態樣中,該保護層之材料包含玻璃之材料。較佳的,該保護層之燒結溫度為400℃至500℃。較佳的,該保護層之燒結時間為10分鐘至15分鐘。In some embodiments, the material of the protective layer includes the material of glass. Preferably, the sintering temperature of the protective layer is 400°C to 500°C. Preferably, the sintering time of the protective layer is 10 minutes to 15 minutes.

在一些實施態樣中,該保護層之材料包含環氧樹脂類之材料。較佳的,該保護層之熱固化溫度為150℃至300℃。較佳的,該保護層之熱固化時間為10分鐘至30分鐘。In some embodiments, the material of the protective layer includes epoxy resin. Preferably, the thermal curing temperature of the protective layer is 150°C to 300°C. Preferably, the thermal curing time of the protective layer is 10 minutes to 30 minutes.

較佳的,上述電極電鍍步驟係指於該側面電極、該正面電極和該背面電極之表面再進行銅、鎳和/或錫之電鍍;在一些實施例中,該電極電鍍步驟可先於該側面電極、該正面電極和該背面電極之表面進行銅電鍍,以形成銅外電極層;再於銅外電極層之表面進行鎳電鍍,以形成鎳外電極層;以及於鎳外電極層之表面進行錫電鍍,以形成錫外電極層,即由銅外電極層、鎳外電極層和錫外電極層形成一組三層結構的外電極包覆於側面電極、該正面電極和該背面電極之外表面。本發明之電極不以採用銀鈀等貴金屬為限,故有助於降低生產成本。Preferably, the above-mentioned electrode electroplating step refers to the electroplating of copper, nickel and/or tin on the surface of the side electrode, the front electrode and the back electrode; in some embodiments, the electrode electroplating step may precede the electrode plating step. Copper plating is performed on the surface of the side electrode, the front electrode and the back electrode to form a copper outer electrode layer; then nickel plating is performed on the surface of the copper outer electrode layer to form a nickel outer electrode layer; and the surface of the nickel outer electrode layer is Carry out tin electroplating to form a tin outer electrode layer, that is, a set of three-layered outer electrodes formed by a copper outer electrode layer, a nickel outer electrode layer and a tin outer electrode layer are wrapped around the side electrode, the front electrode and the back electrode. The outer surface. The electrode of the present invention is not limited to the use of precious metals such as silver and palladium, so it is helpful to reduce the production cost.

在本說明書中,平均粒徑是指於所述粒子的粒徑分布百分比統計中,累計粒徑分布百分比達到50%時所對應的粒徑,即D 50In this specification, the average particle size refers to the particle size corresponding to the cumulative particle size distribution percentage reaching 50% in the particle size distribution percentage statistics of the particles, namely D 50 .

綜上,本發明之電阻藉由增設緩衝層,使得電阻層可增加與基板之附著力,還可避免電阻層變形,使電阻展現良好的瞬間負載、電阻公差和電阻溫度係數,進而提升電阻之生產成本效益,故具有市場競爭力。To sum up, by adding a buffer layer to the resistor of the present invention, the resistance layer can increase the adhesion to the substrate, and can also avoid the deformation of the resistance layer, so that the resistor exhibits good instantaneous load, resistance tolerance and resistance temperature coefficient, thereby improving the resistance of the resistance. Cost-effective production, so it has market competitiveness.

以下列舉數種實施例及比較例說明本發明之實施方式,熟習此技藝者可經由本說明書之內容輕易地了解本發明所能達成之優點與功效,並且於不悖離本發明之精神下進行各種修飾與變更,以施行或應用本發明之內容。Several examples and comparative examples are listed below to illustrate the embodiments of the present invention. Those skilled in the art can easily understand the advantages and effects that the present invention can achieve through the content of this specification, and proceed without departing from the spirit of the present invention. Various modifications and alterations to carry out or apply the teachings of the present invention.

實施例1:電阻Example 1: Resistance

如圖1所示,電阻1包含一複合層狀結構10、二側面電極20和一保護層30,該二側面電極20分別設置於該複合層狀結構10的相對兩側面100,該保護層30設於該複合層狀結構10的頂面110;以及該複合層狀結構10包含二背面電極120、一基板130、一緩衝層140、一電阻層150和二正面電極160;其中,該二背面電極120對稱設於該基板130的底面131,該緩衝層140的頂面141之面積小於該基板130的頂面132之面積,該電阻層150的頂面151之面積小於該緩衝層140的頂面141之面積,且該基板130的頂面132和緩衝層140的頂面141進一步對稱設有該二正面電極160,且該二正面電極160的頂面161與電阻層150的頂面151切齊,以形成一共平面。其中,該緩衝層140由一緩衝層用組成物所形成,且該緩衝層用組成物包含緩衝層用助燒結劑、填料、第一樹脂和第一有機溶劑。As shown in FIG. 1 , the resistor 1 includes a composite layered structure 10 , two side electrodes 20 and a protective layer 30 . The two side electrodes 20 are respectively disposed on two opposite sides 100 of the composite layered structure 10 , and the protective layer 30 is disposed on the top surface 110 of the composite layered structure 10; and the composite layered structure 10 includes two back electrodes 120, a substrate 130, a buffer layer 140, a resistance layer 150 and two front electrodes 160; wherein, the two back surfaces The electrodes 120 are symmetrically disposed on the bottom surface 131 of the substrate 130 , the area of the top surface 141 of the buffer layer 140 is smaller than the area of the top surface 132 of the substrate 130 , and the area of the top surface 151 of the resistive layer 150 is smaller than that of the top surface of the buffer layer 140 and the top surface 132 of the substrate 130 and the top surface 141 of the buffer layer 140 are further symmetrically provided with the two front electrodes 160 , and the top surfaces 161 of the two front electrodes 160 are cut from the top surface 151 of the resistance layer 150 aligned to form a common plane. Wherein, the buffer layer 140 is formed by a composition for a buffer layer, and the composition for a buffer layer includes a sintering aid for a buffer layer, a filler, a first resin and a first organic solvent.

實施例2:電阻之製造方法Example 2: Manufacturing method of resistor

1.製備複合層狀結構:1. Preparation of composite layered structure:

(1)製備背面電極:於氧化鋁基板之底面以網版印刷方式印刷背面電極,其材料為銅,並以100℃至150℃進行烘乾10分鐘至15分鐘。(1) Preparation of back electrode: The back electrode is printed on the bottom surface of the alumina substrate by screen printing, the material is copper, and dried at 100°C to 150°C for 10 to 15 minutes.

(2)製備緩衝層:混合緩衝層用助燒結劑、填料、第一樹脂和第一有機溶劑後製成緩衝層用組成物,並藉由網版印刷方式印刷於氧化鋁基板的頂面,以100℃至150℃進行烘乾10分鐘至15分鐘後,形成緩衝層。(2) Preparation of buffer layer: after mixing the sintering aid for buffer layer, filler, first resin and first organic solvent, a composition for buffer layer is made, and printed on the top surface of the alumina substrate by screen printing, After drying at 100°C to 150°C for 10 to 15 minutes, a buffer layer is formed.

(3)製備電阻層:混合金屬粉、電阻層用助燒結劑、第二樹脂和第二溶劑後,製成電阻膏,並藉由網版印刷方式印刷於緩衝層的頂面,以100℃至150℃進行烘乾10分鐘至15分鐘,形成電阻層。(3) Preparation of the resistance layer: after mixing the metal powder, the sintering aid for the resistance layer, the second resin and the second solvent, a resistance paste is made, and it is printed on the top surface of the buffer layer by screen printing at 100° C. Dry at 150° C. for 10 minutes to 15 minutes to form a resistance layer.

(4)製備正面電極:將正面電極以網版印刷方式印刷於氧化鋁基板的頂面和緩衝層的頂面,其材料為銅,使正面電極的頂面與電阻層的頂面齊平,以形成一水平共平面,再以100℃至150℃進行烘乾10分鐘至15分鐘。(4) Preparation of front electrode: The front electrode is printed on the top surface of the alumina substrate and the top surface of the buffer layer by screen printing, and the material is copper, so that the top surface of the front electrode is flush with the top surface of the resistance layer, To form a horizontal co-planar, drying is performed at 100°C to 150°C for 10 to 15 minutes.

2.製備側面電極:2. Preparation of side electrodes:

以滾沾方式在複合層狀結構的相對兩側面(即由正面電極、基板和背面電極的側面所構成的側面)分別塗覆側面電極,其材料為銅,以形成電阻胚,再以880℃至920℃進行共同燒結10分鐘至15分鐘。The opposite sides of the composite layered structure (that is, the sides formed by the front electrode, the substrate and the back electrode) are coated with side electrodes respectively by rolling and dipping. Co-sintering is carried out to 920°C for 10 minutes to 15 minutes.

3.製備保護層:3. Preparation of protective layer:

該電阻層經雷射切割以調整電阻值後,將保護層以網版印刷方式印刷於正面電極與電阻層所形成之共平面,即複合層狀結構的最外表面,以避免電阻層接觸外界空氣造成氧化和硫化;其中,該保護層採用環氧樹脂,保護層之熱固化溫度為150℃至300℃,熱固化時間為10分鐘至30分鐘。After the resistance layer is laser-cut to adjust the resistance value, the protective layer is screen-printed on the coplanar surface formed by the front electrode and the resistance layer, that is, the outermost surface of the composite layered structure, so as to prevent the resistance layer from contacting the outside world. Air causes oxidation and vulcanization; wherein, the protective layer is made of epoxy resin, the thermal curing temperature of the protective layer is 150°C to 300°C, and the thermal curing time is 10 minutes to 30 minutes.

4.製備外電極層:先於該側面電極、該正面電極和該背面電極之表面進行銅電鍍,以形成銅外電極層;再於銅外電極層之表面進行鎳電鍍,以形成鎳外電極層;以及於鎳外電極層之表面進行錫電鍍,以形成錫外電極層,即由銅外電極層、鎳外電極層和錫外電極層形成一組三層結構的外電極包覆於側面電極、該正面電極和該背面電極之外表面。4. Preparation of external electrode layer: copper electroplating is performed on the surface of the side electrode, the front electrode and the back electrode to form a copper external electrode layer; then nickel electroplating is performed on the surface of the copper external electrode layer to form a nickel external electrode and tin electroplating on the surface of the nickel outer electrode layer to form a tin outer electrode layer, that is, a set of three-layered outer electrodes formed by the copper outer electrode layer, the nickel outer electrode layer and the tin outer electrode layer are covered on the side. electrode, the front electrode and the outer surface of the back electrode.

測試例1:採用不同緩衝層用助燒結劑配方之電阻功效比較Test Example 1: Comparison of Resistance Efficacy Using Different Buffer Layer Sintering Auxiliary Formulations

各組依實施例2所述方式製成電阻,但未設置保護層;其中,Ts點係於製程開始前先行量測,並於燒結完成後觀察電阻層之形變量,其餘功效測試(即附著力、電阻率、COV%、TCR和STOL)皆於前述電鍍外電極後進行,進一步說明如下:Each group was fabricated into resistors according to the method described in Example 2, but no protective layer was provided; wherein, the Ts point was measured before the start of the process, and the deformation of the resistor layer was observed after the sintering was completed. force, resistivity, COV%, TCR and STOL) are all carried out after the aforementioned electroplating of the outer electrodes, and are further explained as follows:

(一) 緩衝層用組成物(1) Composition for buffer layer

各組緩衝層用助燒結劑之配方如表1所示,填料皆為Al 2O 3,第一樹脂皆為乙基纖維素,第一有機溶劑皆為松油醇。以緩衝層用助燒結劑、填料、第一樹脂和第一有機溶劑之總重為基準,各組採用相同比例:緩衝層用助燒結劑之含量為38.40重量百分比;填料之含量為25.60重量百分比;第一樹脂之含量為1.5重量百分比;以及第一有機溶劑之含量為34.50重量百分比。 The formulations of the sintering aids for each group of buffer layers are shown in Table 1. The fillers are all Al 2 O 3 , the first resins are all ethyl cellulose, and the first organic solvents are all terpineol. Based on the total weight of the sintering aid for the buffer layer, the filler, the first resin and the first organic solvent, each group adopts the same ratio: the content of the sintering aid for the buffer layer is 38.40 weight percent; the content of the filler is 25.60 weight percent ; The content of the first resin is 1.5 weight percent; and the content of the first organic solvent is 34.50 weight percent.

表1:各組緩衝層用助燒結劑配方(單位:mol%) 組別編號 B 2O 3 BaO ZnO SiO 2 Al 2O 3 V 2O 5 實施例3-1 14.01 8.44 20.06 49.11 7.60 0.77 實施例3-2 實施例3-3 19.88 6.45 24.30 41.47 6.80 1.09 實施例3-4 實施例3-5 25.67 4.48 28.48 33.93 6.02 1.40 實施例3-6 實施例3-7 31.39 2.55 32.61 26.50 5.25 1.72 實施例3-8 比較例3-1 37.02 0.63 36.68 19.16 4.49 2.02 比較例3-2 Table 1: Formulations of sintering aids for each group of buffer layers (unit: mol%) group number B 2 O 3 BaO ZnO SiO2 Al 2 O 3 V 2 O 5 Example 3-1 14.01 8.44 20.06 49.11 7.60 0.77 Example 3-2 Example 3-3 19.88 6.45 24.30 41.47 6.80 1.09 Example 3-4 Example 3-5 25.67 4.48 28.48 33.93 6.02 1.40 Examples 3-6 Examples 3-7 31.39 2.55 32.61 26.50 5.25 1.72 Examples 3-8 Comparative Example 3-1 37.02 0.63 36.68 19.16 4.49 2.02 Comparative Example 3-2

(二)電阻膏(2) Resistor paste

各組電阻層用助燒結劑之配方皆相同,所述電阻層用助燒結劑包含:B 2O 3之含量為28.09 mol%、BaO之含量為11.20 mol%、ZnO之含量為17.98 mol%、SiO 2之含量為39.43 mol%、Al 2O 3之含量為2.86 mol%以及V 2O 5之含量為0.44 mol%。於電阻膏中,以金屬粉、電阻層助燒結劑、第二樹脂和第二有機溶劑之總重為基準,各組採用相同比例如下:銅之含量為43.80重量百分比;鎳之含量為29.20重量百分比;電阻層助燒結劑之含量為4.00重量百分比;第二樹脂之含量為2.00重量百分比;和第二有機溶劑之含量為21.00重量百分比;其中,第二樹脂與第一樹脂相同,第二有機溶劑與第一有機溶劑相同。 The formulations of the sintering aids for each group of resistance layers are the same, and the sintering aids for the resistance layers include: the content of B 2 O 3 is 28.09 mol %, the content of BaO is 11.20 mol %, the content of ZnO is 17.98 mol %, The content of SiO 2 was 39.43 mol %, the content of Al 2 O 3 was 2.86 mol %, and the content of V 2 O 5 was 0.44 mol %. In the resistive paste, based on the total weight of the metal powder, the resistive layer sintering aid, the second resin and the second organic solvent, the same proportions for each group are as follows: the content of copper is 43.80 weight percent; the content of nickel is 29.20 weight percent The content of the resistance layer sintering aid is 4.00% by weight; the content of the second resin is 2.00% by weight; and the content of the second organic solvent is 21.00% by weight; wherein, the second resin is the same as the first resin, and the second organic solvent The solvent is the same as the first organic solvent.

(三)燒結溫度(3) Sintering temperature

各組標號之尾碼為單數(即N-1、N-3、N-5和N-7,N為實施例之編號)時,燒結溫度為880℃;各組標號之尾碼為雙數(即N-2、N-4、N-6和N-8)時,燒結溫度為920℃。When the suffix of each group of labels is odd (i.e. N-1, N-3, N-5 and N-7, N is the number of the example), the sintering temperature is 880°C; the suffix of each group of labels is an even number ( Namely N-2, N-4, N-6 and N-8), the sintering temperature is 920 ℃.

(四)功效測試(4) Efficacy test

1.玻璃軟化點:依據ASTM E1545之規範,利用熱機械熱分析儀 (Thermomechanical Analysis,TMA)量測各緩衝層用助燒結劑之Ts。1. Glass softening point: According to the specification of ASTM E1545, the Ts of the sintering aid used for each buffer layer was measured by a thermomechanical thermal analyzer (Thermomechanical Analysis, TMA).

2. 電阻層形變量:電阻層形變量之計算公式:[(最大寬度-最小寬度)/最大寬度]*100%,即(△W/W)*100%,當電阻層形變量大於5%時,於認定時,將判定該電阻層屬明顯變形,如圖2A所示;當電阻層形變量為5%以下時,則判定該電阻層屬未變形,例如圖2B所示。2. Resistance layer deformation: the calculation formula of resistance layer deformation: [(maximum width-minimum width)/maximum width]*100%, ie (△W/W)*100%, when the resistance layer deformation is greater than 5% When the resistance layer is determined, it will be determined that the resistance layer is obviously deformed, as shown in FIG. 2A ; when the deformation amount of the resistance layer is less than 5%, it will be determined that the resistance layer is not deformed, such as shown in FIG. 2B .

3. 附著力:依ISO 2409之規範進行測試,其中第0級(ISO class 0)表示「切割邊緣平滑完整,塗膜完全沒有剝落」;第1級(ISO class 1)表示「切割線交叉點有小碎屑,剝落區域少於總面積5%」;第2級(ISO class 2)表示「切割線邊緣及交叉點都有小碎屑,剝落區域占總面積5%至小於15%」;第3級(ISO class 3)表示「切割線邊緣、小方格有部分或全部剝落,剝落區域占總面積15%至小於35%」;第4級(ISO class 4)表示「切割線邊緣、小方格有部分或全部剝落,剝落區域占總面積35%至小於65%」;以及第5級(ISO class 5)表示「切割線邊緣、小方格有部分或全部剝落,剝落區域占總面積65%以上」。3. Adhesion: Tested according to ISO 2409, in which grade 0 (ISO class 0) means "the cutting edge is smooth and complete, and the coating film is not peeled at all"; grade 1 (ISO class 1) means "the intersection of the cutting line" There are small chips, and the peeling area is less than 5% of the total area"; Class 2 (ISO class 2) means "there are small chips at the edge and intersection of the cutting line, and the peeling area accounts for 5% to less than 15% of the total area"; Level 3 (ISO class 3) means "the edge of the cutting line and small squares are partially or completely peeled off, and the peeling area accounts for 15% to less than 35% of the total area"; level 4 (ISO class 4) means "the edge of the cutting line, Part or all of the small squares peeled off, and the peeled area accounts for 35% to less than 65% of the total area; more than 65% of the area.”

4. 電阻率:依 IEC 60115-1 / JIS C 5201-1 第4.5條之規範進行電阻量測。4. Resistivity: measure the resistance according to IEC 60115-1 / JIS C 5201-1 Clause 4.5.

5. 電阻公差(COV%):電阻標準差/電阻均值,電阻公差大於3%者,將影響電阻良率。5. Resistance tolerance (COV%): resistance standard deviation/resistance mean, resistance tolerance greater than 3% will affect the resistance yield.

6.電阻溫度係數(Temperature Coefficient of Resistance,TCR):依IEC 60115-1第4.8條之規範進行TCR(±100ppm/°C)之量測與計算;其中,測試溫度為T1(25℃)至T2(155℃),R2為T2點之量測電阻值,R1為T1點之量測電阻值,計算公式為TCR(ppm/℃) = (R2-R1)/R1×1 / (T2-T1)×10 6。此外,當TCR超過±100ppm/°C之範圍時,將影響電阻在環境溫度改變下之電阻穩定性。因市售電組之TCR可超過±100ppm/°C,故TCR是否介於±100ppm/°C,非本發明判定電阻及格與否之依據。 6. Temperature Coefficient of Resistance (TCR): TCR (±100ppm/°C) is measured and calculated in accordance with IEC 60115-1 Clause 4.8; the test temperature is from T1 (25°C) to T2(155℃), R2 is the measured resistance value of T2 point, R1 is the measured resistance value of T1 point, the calculation formula is TCR(ppm/℃) = (R2-R1)/R1×1 / (T2-T1 )×10 6 . In addition, when the TCR exceeds the range of ±100ppm/°C, the resistance stability of the resistor under ambient temperature changes will be affected. Since the TCR of commercially available power packs can exceed ±100ppm/°C, whether the TCR is within ±100ppm/°C is not the basis for the present invention to determine whether the resistance is qualified or not.

7. 瞬間負載(Short-time overload,STOL):依IEC 60115-1第4.13條之規範,並定額5倍5秒過載,以進行STOL量測。7. Short-time overload (STOL): According to the specification of Article 4.13 of IEC 60115-1, and the rated overload is 5 times for 5 seconds, STOL is measured.

表2:各電阻的Ts、形變量、附著力、電阻率、COV%、TCR和STOL測試結果 組別編號 Ts (℃) 電阻層 形變量 附著力 電阻率 (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) 實施例3-1 739 第2級 2.52E-05 1.7 45 0.23 實施例3-2 第1級 1.23E-05 1.5 42 0.17 實施例3-3 695 第0級 2.51E-05 1.7 43 0.10 實施例3-4 第0級 1.22E-05 1.4 41 0.02 實施例3-5 652 第0級 2.50E-05 1.7 45 0.02 實施例3-6 第0級 1.20E-05 1.3 40 0.01 實施例3-7 608 第0級 2.48E-05 1.5 43 0.04 實施例3-8 第0級 1.18E-05 1.2 42 0.08 比較例3-1 565 變形 第0級 N/A N/A N/A N/A 比較例3-2 變形 第0級 N/A N/A N/A N/A Table 2: Ts, deformation, adhesion, resistivity, COV%, TCR and STOL test results of each resistor group number Ts (°C) Resistive layer deformation adhesion Resistivity (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) Example 3-1 739 none Level 2 2.52E-05 1.7 45 0.23 Example 3-2 none Level 1 1.23E-05 1.5 42 0.17 Example 3-3 695 none Level 0 2.51E-05 1.7 43 0.10 Example 3-4 none Level 0 1.22E-05 1.4 41 0.02 Example 3-5 652 none Level 0 2.50E-05 1.7 45 0.02 Examples 3-6 none Level 0 1.20E-05 1.3 40 0.01 Examples 3-7 608 none Level 0 2.48E-05 1.5 43 0.04 Examples 3-8 none Level 0 1.18E-05 1.2 42 0.08 Comparative Example 3-1 565 deformation Level 0 N/A N/A N/A N/A Comparative Example 3-2 deformation Level 0 N/A N/A N/A N/A

從表2的測試結果可知,比較例3-1和比較例3-2之緩衝層用助燒結劑中之B 2O 3含量為 37.02 mol%,高於34 mol%,BaO含量為0.63 mol%,低於1.5 mol%,ZnO含量為36.68 mol%,高於34.6 mol%,SiO 2含量為19.16 mol%,低於23 mol%,Al 2O 3含量為4.49 mol%,低於4.9 mol%,以及V 2O 5含量為2.02 mol%,高於1.85 mol%,故其所具有的玻璃軟化點僅為565℃。此外,因比較例3-1和比較例3-2之電阻層外觀變形過大之問題,故無法進行後續測試。 From the test results in Table 2, it can be seen that the content of B 2 O 3 in the sintering aid for buffer layer of Comparative Example 3-1 and Comparative Example 3-2 is 37.02 mol%, which is higher than 34 mol%, and the content of BaO is 0.63 mol% , below 1.5 mol%, ZnO content is 36.68 mol%, above 34.6 mol%, SiO2 content is 19.16 mol%, below 23 mol%, Al2O3 content is 4.49 mol%, below 4.9 mol%, And the content of V 2 O 5 is 2.02 mol%, which is higher than 1.85 mol%, so its glass softening point is only 565℃. In addition, due to the problem that the external appearance of the resistance layer of Comparative Example 3-1 and Comparative Example 3-2 was deformed too much, subsequent tests could not be carried out.

實施例3-1和實施例3-2之緩衝層用助燒結劑中之B 2O 3含量為 14.01 mol%,BaO含量為8.44 mol%,ZnO含量為20.06 mol%,SiO 2含量為49.11 mol%,Al 2O 3含量為7.60 mol%,以及V 2O 5含量為0.77 mol%,其玻璃軟化點溫度為739℃,可知所示含量比例及軟化點可使電阻層不變形,使電阻層結構明顯獲有改善。 The content of B 2 O 3 in the sintering aid for buffer layers of Examples 3-1 and 3-2 is 14.01 mol %, the content of BaO is 8.44 mol %, the content of ZnO is 20.06 mol %, and the content of SiO 2 is 49.11 mol % %, the content of Al 2 O 3 is 7.60 mol%, and the content of V 2 O 5 is 0.77 mol%, and the glass softening point temperature is 739℃. The structure has been significantly improved.

最後,實施例3-3至實施例3-8之緩衝層用助燒結劑中之B 2O 3含量介於17 mol%至34 mol%,BaO含量介於1.5 mol%至7.5 mol%,ZnO含量介於22 mol%至34.6 mol%,SiO 2含量介於23 mol%至45 mol%,Al 2O 3含量介於4.9 mol%至7.2 mol%,以及V 2O 5含量介於0.9 mol%至1.85 mol%,且玻璃軟化點之溫度介於608℃至695℃,從而不僅電阻層之形變量皆低於5%,且具有更佳的附著力(皆屬第0級),同時展現低電阻、良好的電阻公差、電阻溫度係數和瞬間負載。 Finally, the content of B 2 O 3 in the sintering aids for buffer layers of Examples 3-3 to 3-8 ranges from 17 mol % to 34 mol %, the content of BaO ranges from 1.5 mol % to 7.5 mol %, and the content of ZnO The content ranges from 22 mol% to 34.6 mol%, the SiO2 content ranges from 23 mol% to 45 mol%, the Al2O3 content ranges from 4.9 mol% to 7.2 mol%, and the V2O5 content ranges from 0.9 mol% to 1.85 mol%, and the temperature of the glass softening point is between 608 °C and 695 °C, so that not only the deformation of the resistive layer is less than 5%, but also has better adhesion (both are in the 0th grade), while showing low resistance, good resistance tolerance, temperature coefficient of resistance and transient loads.

測試例2:採用不同緩衝層用助燒結劑與填料重量比例之電阻功效比較Test Example 2: Comparison of resistance efficacy with different weight ratios of sintering aid and filler for buffer layer

各組依實施例2所述方式製成電阻,但未設置保護層;其中,Ts點係於製程開始前先行量測,並於燒結完成後觀察電阻層之形變量,其餘功效測試(即附著力、電阻率、COV%、TCR和STOL)皆於前述電鍍外電極後進行,進一步說明如下:Each group was fabricated into resistors according to the method described in Example 2, but no protective layer was provided; wherein, the Ts point was measured before the start of the process, and the deformation of the resistor layer was observed after the sintering was completed. force, resistivity, COV%, TCR and STOL) are all carried out after the aforementioned electroplating of the outer electrodes, and are further explained as follows:

(一) 緩衝層用組成物(1) Composition for buffer layer

緩衝層用助燒結劑之配方同實施例3-5和實施例3-6:B 2O 3含量皆為 25.67 mol%,BaO含量皆為4.48 mol%,ZnO含量皆為28.48 mol%,SiO 2含量皆為33.93 mol%,Al 2O 3含量皆為6.02 mol%,以及V 2O 5含量皆為1.40 mol%,而緩衝層用組成物之配方如表3所示,其中填料為Al 2O 3,第一樹脂為乙基纖維素,第一有機溶劑為松油醇。 The formula of the sintering aid for the buffer layer is the same as that of Example 3-5 and Example 3-6: the content of B 2 O 3 is all 25.67 mol%, the content of BaO is all 4.48 mol%, the content of ZnO is all 28.48 mol%, and the content of SiO 2 The content of the buffer layer is 33.93 mol%, the content of Al 2 O 3 is 6.02 mol %, and the content of V 2 O 5 is 1.40 mol %, and the formula of the composition for the buffer layer is shown in Table 3, wherein the filler is Al 2 O 3. The first resin is ethyl cellulose, and the first organic solvent is terpineol.

表3:各組緩衝層用組成物配方(單位:重量百分比) 組別編號 緩衝層用助燒結劑與填料之重量比 緩衝層用 助燒結劑 填料 第一樹脂 第一有機溶劑 實施例4-1 0.70 0.30 44.80 19.20 1.50 34.50 實施例4-2 實施例3-5 0.60 0.40 38.40 25.60 1.50 34.50 實施例3-6 實施例4-3 0.50 0.50 32.00 32.00 1.50 34.50 實施例4-4 實施例4-5 0.40 0.60 25.60 38.40 1.50 34.50 Table 3: Composition formula for each group of buffer layers (unit: weight percentage) group number Weight ratio of sintering aid to filler for buffer layer Sintering aid for buffer layer filler first resin first organic solvent Example 4-1 0.70 0.30 44.80 19.20 1.50 34.50 Example 4-2 Example 3-5 0.60 0.40 38.40 25.60 1.50 34.50 Examples 3-6 Example 4-3 0.50 0.50 32.00 32.00 1.50 34.50 Example 4-4 Example 4-5 0.40 0.60 25.60 38.40 1.50 34.50

(二)電阻膏:同測試例1。(2) Resistor paste: same as Test Example 1.

(三)燒結溫度:同測試例1,惟實施例4-5之燒結溫度為920℃。(3) Sintering temperature: the same as in Test Example 1, except that the sintering temperature in Examples 4-5 was 920°C.

(四)功效測試:同測試例1所述的測試方式進行,並將各測試結果記載於表4中。(4) Efficacy test: carry out with the test method described in Test Example 1, and each test result is recorded in Table 4.

表4:各電阻的Ts、形變量、附著力、電阻率、COV%、TCR和STOL測試結果 組別編號 Ts (℃) 電阻層 形變量 附著力 電阻率 (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) 實施例4-1 652 第0級 2.42E-05 1.8 48 0.06 實施例4-2 第0級 1.56E-05 1.4 42 0.10 實施例3-5 652 第0級 2.50E-05 1.7 45 0.02 實施例3-6 第0級 1.20E-05 1.3 40 0.01 實施例4-3 652 第0級 2.53E-05 1.8 44 0.12 實施例4-4 第0級 1.30E-05 1.5 42 0.05 實施例4-5 652 第2級 1.31E-05 1.4 42 0.30 Table 4: Ts, deformation, adhesion, resistivity, COV%, TCR and STOL test results of each resistor group number Ts (°C) Resistive layer deformation adhesion Resistivity (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) Example 4-1 652 none Level 0 2.42E-05 1.8 48 0.06 Example 4-2 none Level 0 1.56E-05 1.4 42 0.10 Example 3-5 652 none Level 0 2.50E-05 1.7 45 0.02 Examples 3-6 none Level 0 1.20E-05 1.3 40 0.01 Example 4-3 652 none Level 0 2.53E-05 1.8 44 0.12 Example 4-4 none Level 0 1.30E-05 1.5 42 0.05 Example 4-5 652 none Level 2 1.31E-05 1.4 42 0.30

從表4可知,實施例3-5、實施例3-6、實施例4-1至實施例4-5因使用本發明之緩衝層用助燒結劑,故各組電阻的電阻層之形變量皆低於5%,並具有良好的瞬間負載、電阻公差和電阻溫度係數。As can be seen from Table 4, since the sintering aid for the buffer layer of the present invention is used in Examples 3-5, 3-6, and 4-1 to 4-5, the deformation of the resistance layer of each group of resistors is All are less than 5%, and have good transient load, resistance tolerance and resistance temperature coefficient.

更進一步地,相較於實施例4-5,由於實施例3-5、實施例3-6、實施例4-1至實施例4-4之緩衝層用助燒結劑與填料之重量比例介於0.45:0.55至0.75:0.25,且緩衝層用助燒結劑之含量介於29重量百分比至48重量百分比;填料之含量介於16重量百分比至35重量百分比;第一樹脂之含量介於1重量百分比至2重量百分比;以及第一有機溶劑之含量為30重量百分比至40重量百分比,,故可具有更佳的附著力(皆屬第0級),同時展現低電阻、良好的電阻公差、電阻溫度係數和瞬間負載。Furthermore, compared with Example 4-5, since the weight ratio of the sintering aid for buffer layer and the filler in Example 3-5, Example 3-6, Example 4-1 to Example 4-4 is different, At 0.45:0.55 to 0.75:0.25, and the content of the sintering aid for the buffer layer is between 29 and 48 weight percent; the filler content is between 16 and 35 weight percent; the first resin is between 1 weight percent percentage to 2 weight percent; and the content of the first organic solvent is 30 to 40 weight percent, so it can have better adhesion (all belong to grade 0), and at the same time exhibit low resistance, good resistance tolerance, resistance temperature coefficient and transient load.

測試例3:採用不同填料種類之電阻功效比較Test Example 3: Comparison of Resistance Efficacy Using Different Filler Types

各組依實施例2所述方式製成電阻,但未設置保護層;其中,Ts點係於製程開始前先行量測,並於燒結完成後觀察電阻層之形變量,其餘功效測試(即附著力、電阻率、COV%、TCR和STOL)皆於前述電鍍外電極後進行,進一步說明如下:Each group was fabricated into resistors according to the method described in Example 2, but no protective layer was provided; wherein, the Ts point was measured before the start of the process, and the deformation of the resistor layer was observed after the sintering was completed. force, resistivity, COV%, TCR and STOL) are all carried out after the aforementioned electroplating of the outer electrodes, and are further explained as follows:

(一) 緩衝層用組成物(1) Composition for buffer layer

各組除填料種類如表5所示而有不同外,其餘條件皆相同,說明如下:Except for the different types of fillers shown in Table 5, the other conditions are the same for each group, and the descriptions are as follows:

各組緩衝層用助燒結劑之配方同實施例3-5和實施例3-6:B 2O 3含量皆為 25.67 mol%,BaO含量皆為4.48 mol%,ZnO含量皆為28.48 mol%,SiO 2含量皆為33.93 mol%,Al 2O 3含量皆為6.02 mol%,以及V 2O 5含量皆為1.40 mol%。 The formula of each group of buffer layer sintering aids is the same as that of Example 3-5 and Example 3-6: B 2 O 3 content is all 25.67 mol%, BaO content is all 4.48 mol%, ZnO content is all 28.48 mol%, The content of SiO 2 is all 33.93 mol%, the content of Al 2 O 3 is all 6.02 mol %, and the content of V 2 O 5 is all 1.40 mol %.

各組第一樹脂皆為乙基纖維素,第一有機溶劑皆為松油醇,且緩衝層用組成物之比例同實施例3-5和實施例3-6:以緩衝層用助燒結劑、填料、第一樹脂和第一有機溶劑之總重為基準,緩衝層用助燒結劑之含量為38.40重量百分比;填料之含量為25.60重量百分比;第一樹脂之含量為1.5重量百分比;以及第一有機溶劑之含量為34.50重量百分比。The first resin of each group is ethyl cellulose, the first organic solvent is terpineol, and the ratio of the composition for the buffer layer is the same as that of Example 3-5 and Example 3-6: the buffer layer is used as a sintering aid Based on the total weight of the filler, the first resin and the first organic solvent, the content of the sintering aid for the buffer layer is 38.40% by weight; the content of the filler is 25.60% by weight; the content of the first resin is 1.5% by weight; The content of an organic solvent is 34.50 weight percent.

表5:各組填料種類 組別編號 填料 實施例3-5 Al 2O 3 實施例3-6 實施例5-1 ZnO 實施例5-2 實施例5-3 SiO 2 實施例5-4 實施例5-5 TiO 2 實施例5-6 Table 5: Types of fillers in each group group number filler Example 3-5 Al 2 O 3 Examples 3-6 Example 5-1 ZnO Example 5-2 Example 5-3 SiO2 Example 5-4 Example 5-5 TiO 2 Embodiment 5-6

(二)電阻膏:同測試例1。(2) Resistor paste: same as Test Example 1.

(三)燒結溫度:同測試例1。(3) Sintering temperature: same as Test Example 1.

(四)功效測試:同測試例1所述的測試方式進行,並將各測試結果記載於表6中。(4) Efficacy test: carry out with the test method described in Test Example 1, and each test result is recorded in Table 6.

表6:各電阻的Ts、形變量、附著力、電阻率、COV%、TCR和STOL測試結果   Ts (℃) 電阻層 形變量 附著力 電阻率 (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) 實施例3-5 652 第0級 2.50E-05 1.7 45 0.02 實施例3-6 第0級 1.20E-05 1.3 40 0.01 實施例5-1 652 第0級 2.53E-05 1.8 44 0.03 實施例5-2 第0級 1.21E-05 1.4 41 0.02 實施例5-3 652 第0級 2.48E-05 1.6 43 0.02 實施例5-4 第0級 1.22E-05 1.3 41 0.01 實施例5-5 652 第0級 2.49E-05 1.6 45 0.03 實施例5-6 第0級 1.24E-05 1.3 42 0.02 Table 6: Ts, deformation, adhesion, resistivity, COV%, TCR and STOL test results of each resistor Ts (°C) Resistive layer deformation adhesion Resistivity (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) Example 3-5 652 none Level 0 2.50E-05 1.7 45 0.02 Examples 3-6 none Level 0 1.20E-05 1.3 40 0.01 Example 5-1 652 none Level 0 2.53E-05 1.8 44 0.03 Example 5-2 none Level 0 1.21E-05 1.4 41 0.02 Example 5-3 652 none Level 0 2.48E-05 1.6 43 0.02 Example 5-4 none Level 0 1.22E-05 1.3 41 0.01 Example 5-5 652 none Level 0 2.49E-05 1.6 45 0.03 Embodiment 5-6 none Level 0 1.24E-05 1.3 42 0.02

實施例3-5、實施例3-6、實施例5-1至實施例5-6填料分別選用鋁氧化物、鋅氧化物、矽氧化物和鈦氧化物,其電阻層之形變量皆低於5%,且附著力皆屬第0級,並展現低電阻、良好的電阻公差、電阻溫度係數和瞬間負載。The fillers of Examples 3-5, 3-6, 5-1 to 5-6 were selected from aluminum oxide, zinc oxide, silicon oxide and titanium oxide, respectively, and the deformation of the resistance layer was low. At 5%, the adhesion is all class 0, and exhibits low resistance, good resistance tolerance, temperature coefficient of resistance and transient load.

測試例4:未採用緩衝層之電阻功效比較Test Example 4: Comparison of Resistor Efficiency Without Buffer Layer

(一)本測試之比較例則皆未印刷緩衝層,並採用不同電阻層用助燒結劑之重量百分比,其餘步驟均相同。(1) In the comparative examples of this test, no buffer layer was printed, and different weight percentages of sintering aids for resistance layers were used, and the rest of the steps were the same.

(二)電阻膏之配方如表7所示,其中電阻層用助燒結劑之配方同同測試例1,第二樹脂為乙基纖維素,第二有機溶劑為松油醇。(2) The formulation of the resistance paste is shown in Table 7, wherein the formulation of the sintering aid for the resistance layer is the same as that of Test Example 1, the second resin is ethyl cellulose, and the second organic solvent is terpineol.

表7:電阻膏配方(單位:重量百分比) 組別編號 電阻層用 助燒結劑 第二樹脂 第二有機溶劑 比較例6-1 4.00 43.80 29.20 2.00 21.00 比較例6-2 比較例6-3 6.00 42.60 28.40 2.00 21.00 比較例6-4 比較例6-5 8.00 41.40 27.60 2.00 21.00 比較例6-6 Table 7: Resistor paste formula (unit: weight percentage) group number Sintering aid for resistance layer copper nickel second resin second organic solvent Comparative Example 6-1 4.00 43.80 29.20 2.00 21.00 Comparative Example 6-2 Comparative Example 6-3 6.00 42.60 28.40 2.00 21.00 Comparative Example 6-4 Comparative Example 6-5 8.00 41.40 27.60 2.00 21.00 Comparative Example 6-6

(三)燒結溫度:同測試例1。(3) Sintering temperature: same as Test Example 1.

(四)功效測試:同測試例1所述的測試方式進行,並將各測試結果記載於表8中。(4) Efficacy test: carry out with the test method described in Test Example 1, and each test result is recorded in Table 8.

表8:各電阻的形變量、附著力、電阻率、COV%、TCR和STOL測試結果 組別編號 電阻層 形變量 附著力 電阻率 (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) 比較例6-1 第4級 2.63E-05 1.7 53 0.48 比較例6-2 第3級 1.30E-05 1.3 46 0.36 比較例6-3 第3級 9.56E-05 3.5 95 0.29 比較例6-4 第2級 8.74E-05 3.1 87 0.15 比較例6-5 變形 第0級 N/A N/A N/A N/A 比較例6-6 變形 第0級 N/A N/A N/A N/A Table 8: Deformation, adhesion, resistivity, COV%, TCR and STOL test results of each resistor group number Resistive layer deformation adhesion Resistivity (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) Comparative Example 6-1 none Level 4 2.63E-05 1.7 53 0.48 Comparative Example 6-2 none Level 3 1.30E-05 1.3 46 0.36 Comparative Example 6-3 none Level 3 9.56E-05 3.5 95 0.29 Comparative Example 6-4 none Level 2 8.74E-05 3.1 87 0.15 Comparative Example 6-5 deformation Level 0 N/A N/A N/A N/A Comparative Example 6-6 deformation Level 0 N/A N/A N/A N/A

從表8可知,當電阻在未設置緩衝層(即比較例6-1和比較例6-2),且電阻層用助燒結劑之含量為4重量百分比時,附著力測試結果明顯較差,僅有第3級或第4級。As can be seen from Table 8, when the resistor is not provided with a buffer layer (ie, Comparative Example 6-1 and Comparative Example 6-2), and the content of the sintering aid for the resistor layer is 4 weight percent, the adhesion test results are obviously poor, only There is either level 3 or level 4.

更進一步者,在同樣未設置緩衝層之條件下,當比較例6-3和比較例6-4提高電阻層用助燒結劑之含量為6重量百分比時,雖可提升電阻層之附著力,但卻導致電阻升高至少3倍,電阻公差升高約2倍,以及電阻溫度係數升高約2倍。Furthermore, under the same conditions without a buffer layer, when the content of the sintering aid for the resistance layer is increased to 6 weight percent in Comparative Examples 6-3 and 6-4, although the adhesion of the resistance layer can be improved, But it results in at least 3 times higher resistance, about 2 times higher resistance tolerance, and about 2 times higher temperature coefficient of resistance.

最後,當比較例6-5和比較例6-6的電阻層用助燒結劑之含量達8重量百分比,雖附著力測試結果佳,但卻有電阻層外觀變形過大之問題,且無法進行後續測試。Finally, when the content of the sintering aid for the resistance layer in Comparative Examples 6-5 and 6-6 reaches 8 weight percent, although the adhesion test results are good, there is a problem that the appearance of the resistance layer is deformed too much, and the follow-up cannot be carried out. test.

測試例5:採用不同電阻層用助燒結劑比例之電阻功效比較Test Example 5: Comparison of resistance efficacy with different ratios of sintering aids for resistance layers

各組依實施例2所述方式製成電阻,但未設置保護層;其中,Ts點係於製程開始前先行量測,並於燒結完成後觀察電阻層之形變量,其餘功效測試(即附著力、電阻率、COV%、TCR和STOL)皆於前述電鍍外電極後進行,進一步說明如下:Each group was fabricated into resistors according to the method described in Example 2, but no protective layer was provided; wherein, the Ts point was measured before the start of the process, and the deformation of the resistor layer was observed after the sintering was completed. force, resistivity, COV%, TCR and STOL) are all carried out after the aforementioned electroplating of the outer electrodes, and are further explained as follows:

(一) 緩衝層用組成物:(1) Composition for buffer layer:

各組緩衝層用助燒結劑同實施例3-5和實施例3-6:B 2O 3含量皆為 25.67 mol%,BaO含量皆為4.48 mol%,ZnO含量皆為28.48 mol%,SiO 2含量皆為33.93 mol%,Al 2O 3含量皆為6.02 mol%,以及V 2O 5含量皆為1.40 mol%。 The sintering aids used in each group of buffer layers are the same as those in Example 3-5 and Example 3-6: the content of B 2 O 3 is 25.67 mol%, the content of BaO is 4.48 mol%, the content of ZnO is 28.48 mol%, and the content of SiO 2 The contents are all 33.93 mol%, the Al 2 O 3 contents are all 6.02 mol %, and the V 2 O 5 contents are all 1.40 mol %.

此外,填料皆為Al 2O 3,第一樹脂皆為乙基纖維素,第一有機溶劑皆為松油醇,且緩衝層用組成物之比例同實施例3-5和實施例3-6:以緩衝層用助燒結劑、填料、第一樹脂和第一有機溶劑之總重為基準,各組採用相同比例:緩衝層用助燒結劑之含量為38.40重量百分比;該填料之含量為25.60重量百分比;該第一樹脂之含量為1.5重量百分比;以及該第一有機溶劑之含量為34.50重量百分比。 In addition, the fillers are all Al 2 O 3 , the first resins are all ethyl cellulose, the first organic solvents are all terpineol, and the ratio of the composition for the buffer layer is the same as that of Example 3-5 and Example 3-6 : Based on the total weight of the sintering aid for the buffer layer, the filler, the first resin and the first organic solvent, each group adopts the same ratio: the content of the sintering aid for the buffer layer is 38.40 weight percent; the content of the filler is 25.60 weight percent; the content of the first resin is 1.5 weight percent; and the content of the first organic solvent is 34.50 weight percent.

(二)電阻膏:(2) Resistor paste:

各組電阻層用助燒結劑之配方如表9所示。以金屬粉、電阻層助燒結劑、第二樹脂和第二有機溶劑之總重為基準,各組採用相同比例:銅之含量為43.80重量百分比;鎳之含量為29.20重量百分比;電阻層助燒結劑之含量為4.00重量百分比;第二樹脂之含量為2.00重量百分比;第二有機溶劑之含量為21.00重量百分比;其中,第二樹脂與第二樹脂相同,第二有機溶劑與第一有機溶劑相同。The formulations of the sintering aids for each group of resistance layers are shown in Table 9. Based on the total weight of metal powder, resistance layer sintering aid, second resin and second organic solvent, each group adopts the same ratio: copper content is 43.80 weight percent; nickel content is 29.20 weight percent; resistance layer sintering aid The content of the agent is 4.00% by weight; the content of the second resin is 2.00% by weight; the content of the second organic solvent is 21.00% by weight; the second resin is the same as the second resin, and the second organic solvent is the same as the first organic solvent. .

表9:各組電阻層用助燒結劑配方(單位:mol%) 組別編號 B 2O 3 BaO ZnO SiO 2 Al 2O 3 V 2O 5 實施例7-1 28.79 10.48 19.26 37.98 2.95 0.55 實施例7-2 實施例3-5 28.09 11.20 17.98 39.43 2.86 0.44 實施例3-6 實施例7-3 27.40 11.92 16.69 40.89 2.77 0.33 實施例7-4 實施例7-5 26.70 12.64 15.39 42.36 2.68 0.22 實施例7-6 Table 9: Formulation of sintering aid for each group of resistance layers (unit: mol%) group number B 2 O 3 BaO ZnO SiO2 Al 2 O 3 V 2 O 5 Example 7-1 28.79 10.48 19.26 37.98 2.95 0.55 Example 7-2 Example 3-5 28.09 11.20 17.98 39.43 2.86 0.44 Examples 3-6 Example 7-3 27.40 11.92 16.69 40.89 2.77 0.33 Example 7-4 Example 7-5 26.70 12.64 15.39 42.36 2.68 0.22 Example 7-6

(三)燒結溫度:同測試例1。(3) Sintering temperature: same as Test Example 1.

(四)功效測試:同測試例1所述的測試方式進行,並將各測試結果記載於表10中,其中Ts為電阻層用助燒結劑之玻璃軟化點。(4) Efficacy test: Carry out the same test method described in Test Example 1, and record the test results in Table 10, where Ts is the glass softening point of the sintering aid for the resistance layer.

表10:各電阻的Ts、形變量、附著力、電阻率、COV%、TCR和STOL測試結果 組別編號 Ts (℃) 電阻層 形變量 附著力 電阻率 (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) 實施例7-1 585   第0級 2.60E-05 1.6 46 0.04 實施例7-2 第0級 2.00E-05 1.8 43 0.05 實施例3-5 620   第0級 2.50E-05 1.7 45 0.02 實施例3-6 第0級 1.20E-05 1.3 40 0.01 實施例7-3 655   第0級 2.70E-05 1.7 47 0.09 實施例7-4 第0級 2.50E-05 1.5 42 0.06 實施例7-5 690 第2級 3.10E-05 1.6 49 0.40 實施例7-6 第1級 2.90E-05 1.4 43 0.33 Table 10: Ts, deformation, adhesion, resistivity, COV%, TCR and STOL test results of each resistor group number Ts (°C) Resistive layer deformation adhesion Resistivity (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) Example 7-1 585 none Level 0 2.60E-05 1.6 46 0.04 Example 7-2 none Level 0 2.00E-05 1.8 43 0.05 Example 3-5 620 none Level 0 2.50E-05 1.7 45 0.02 Examples 3-6 none Level 0 1.20E-05 1.3 40 0.01 Example 7-3 655 none Level 0 2.70E-05 1.7 47 0.09 Example 7-4 none Level 0 2.50E-05 1.5 42 0.06 Example 7-5 690 none Level 2 3.10E-05 1.6 49 0.40 Example 7-6 none Level 1 2.90E-05 1.4 43 0.33

從表10可知,實施例7-5和實施例7-6之緩衝層用助燒結劑中之B 2O 3含量為 26.70 mol%,BaO含量為12.64 mol%,ZnO含量為15.39 mol%,SiO 2含量為42.36 mol%,Al 2O 3含量為2.68 mol%,以及V 2O 5含量為0.22 mol%,且玻璃軟化點為690℃時,電阻層無變形,且附著力可達第1級或第2級。 It can be seen from Table 10 that the content of B 2 O 3 in the sintering aids for buffer layers of Examples 7-5 and 7-6 is 26.70 mol %, the content of BaO is 12.64 mol %, the content of ZnO is 15.39 mol %, and the content of SiO When the content of 2 is 42.36 mol%, the content of Al 2 O 3 is 2.68 mol%, and the content of V 2 O 5 is 0.22 mol%, and the glass softening point is 690 ℃, the resistance layer is not deformed, and the adhesion can reach the first level or level 2.

更進一步地,相較於實施例7-5和實施例7-6,由於實施例3-5、實施例3-6、實施例7-1至實施例7-4之緩衝層用助燒結劑中之B 2O 3含量介於27 mol%至29.1 mol%,BaO含量介於10.1 mol%至12.2 mol%,ZnO含量介於16.1 mol%至19.9 mol%,SiO 2含量介於37.2 mol%至41.5 mol%,Al 2O 3含量介於2.73 mol%至3 mol%,以及V 2O 5含量介於0.28 mol%至0.6 mol%,故可具有更佳的附著力(皆屬第0級),更展現低電阻、良好的電阻公差、電阻溫度係數和瞬間負載。 Further, compared with Example 7-5 and Example 7-6, since the sintering aid for buffer layer in Example 3-5, Example 3-6, Example 7-1 to Example 7-4 The B 2 O 3 content ranges from 27 mol% to 29.1 mol %, the BaO content ranges from 10.1 mol % to 12.2 mol %, the ZnO content ranges from 16.1 mol % to 19.9 mol %, and the SiO 2 content ranges from 37.2 mol % to 12.2 mol %. 41.5 mol%, Al 2 O 3 content ranging from 2.73 mol% to 3 mol%, and V 2 O 5 content ranging from 0.28 mol% to 0.6 mol%, so it can have better adhesion (all are grade 0) , and show low resistance, good resistance tolerance, temperature coefficient of resistance and instantaneous load.

測試例6:電阻層採用不同銅鎳比例之電阻功效比較Test Example 6: Comparison of Resistor Efficacy with Different Copper-Nickel Ratios in Resistor Layer

各組依實施例2所述方式製成電阻,但未設置保護層;其中,Ts點係於製程開始前先行量測,並於燒結完成後觀察電阻層之形變量,其餘功效測試(即附著力、電阻率、COV%、TCR和STOL)皆於前述電鍍外電極後進行,進一步說明如下:Each group was fabricated into resistors according to the method described in Example 2, but no protective layer was provided; wherein, the Ts point was measured before the start of the process, and the deformation of the resistor layer was observed after the sintering was completed. force, resistivity, COV%, TCR and STOL) are all carried out after the aforementioned electroplating of the outer electrodes, and are further explained as follows:

(一) 緩衝層用組成物:同實施例3-5和實施例3-6。(1) Composition for buffer layer: the same as Example 3-5 and Example 3-6.

(二)電阻膏:(2) Resistor paste:

各組電阻層用助燒結劑之配方皆相同,且同實施例3-5和實施例3-6:B 2O 3之含量為28.09 mol%、BaO之含量為11.20 mol%、ZnO之含量為17.98 mol%、SiO 2之含量為39.43 mol%、Al 2O 3之含量為2.86 mol%以及V 2O 5之含量為0.44 mol%。電阻膏之配方如表11所示,其中第二樹脂為乙基纖維素,第二有機溶劑為松油醇。 The formulations of the sintering aids used in the resistance layers of each group are the same, and are the same as in Examples 3-5 and 3-6: the content of B 2 O 3 is 28.09 mol%, the content of BaO is 11.20 mol%, and the content of ZnO is 17.98 mol %, SiO 2 content of 39.43 mol %, Al 2 O 3 content of 2.86 mol %, and V 2 O 5 content of 0.44 mol %. The formula of the resistance paste is shown in Table 11, wherein the second resin is ethyl cellulose, and the second organic solvent is terpineol.

表11:電阻膏配方(單位:重量百分比) 組別編號 銅/鎳之重量比 電阻層用 助燒結劑 第二樹脂 第二有機溶劑 實施例8-1 0.80 0.20 4.00 58.40 14.60 2.00 21.00 實施例8-2 實施例8-3 0.70 0.30 4.00 51.10 21.90 2.00 21.00 實施例8-4 實施例3-5 0.60 0.40 4.00 43.80 29.20 2.00 21.00 實施例3-6 實施例8-5 0.50 0.50 4.00 36.50 36.50 2.00 21.00 實施例8-6 實施例8-7 0.40 0.60 4.00 29.20 43.80 2.00 21.00 實施例8-8 Table 11: Resistor paste formula (unit: weight percentage) group number Copper/Nickel Weight Ratio Sintering aid for resistance layer copper nickel second resin second organic solvent Example 8-1 0.80 0.20 4.00 58.40 14.60 2.00 21.00 Example 8-2 Example 8-3 0.70 0.30 4.00 51.10 21.90 2.00 21.00 Example 8-4 Example 3-5 0.60 0.40 4.00 43.80 29.20 2.00 21.00 Examples 3-6 Example 8-5 0.50 0.50 4.00 36.50 36.50 2.00 21.00 Example 8-6 Example 8-7 0.40 0.60 4.00 29.20 43.80 2.00 21.00 Example 8-8

(三)燒結溫度:同測試例1。(3) Sintering temperature: same as Test Example 1.

(四)功效測試:同測試例1所述的測試方式進行,並將各測試結果記載於表12中,其中Ts為電阻層用助燒結劑之玻璃軟化點。(4) Efficacy test: The test method is the same as that described in Test Example 1, and the test results are recorded in Table 12, wherein Ts is the glass softening point of the sintering aid for the resistance layer.

表12:各電阻的Ts、形變量、附著力、電阻率、COV%、TCR和STOL測試結果 組別編號 Ts (℃) 電阻層 形變量 附著力 電阻率 (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) 實施例8-1 620 第0級 9.80E-06 1.3 290 0.38 實施例8-2 第0級 9.50E-06 1.1 284 0.35 實施例8-3 620 第0級 2.20E-05 1.6 157 0.17 實施例8-4 第0級 1.10E-05 1.5 165 0.19 實施例3-5 620 第0級 2.50E-05 1.7 45 0.02 實施例3-6 第0級 1.20E-05 1.3 40 0.01 實施例8-5 620 第0級 3.00E-05 1.7 69 0.03 實施例8-6 第0級 2.50E-05 1.5 66 0.02 實施例8-7 620 第3級 3.30E-05 1.9 92 0.05 實施例8-8 第2級 2.60E-05 1.6 90 0.03 Table 12: Ts, deformation, adhesion, resistivity, COV%, TCR and STOL test results for each resistor group number Ts (°C) Resistive layer deformation adhesion Resistivity (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) Example 8-1 620 none Level 0 9.80E-06 1.3 290 0.38 Example 8-2 none Level 0 9.50E-06 1.1 284 0.35 Example 8-3 620 none Level 0 2.20E-05 1.6 157 0.17 Example 8-4 none Level 0 1.10E-05 1.5 165 0.19 Example 3-5 620 none Level 0 2.50E-05 1.7 45 0.02 Examples 3-6 none Level 0 1.20E-05 1.3 40 0.01 Example 8-5 620 none Level 0 3.00E-05 1.7 69 0.03 Example 8-6 none Level 0 2.50E-05 1.5 66 0.02 Example 8-7 620 none Level 3 3.30E-05 1.9 92 0.05 Example 8-8 none Level 2 2.60E-05 1.6 90 0.03

從表12可知,實施例3-5、實施例3-6、實施例8-1至實施例8-8的電阻層皆無變形,且具有適當的附著力。It can be seen from Table 12 that the resistance layers of Examples 3-5, 3-6, and 8-1 to 8-8 are not deformed and have appropriate adhesion.

更進一步地,從實施例3-5、實施例3-6、實施例8-5至實施例8-8可知,當銅和鎳之重量比例介於0.35:0.65至0.65:0.35,且以金屬粉、電阻層用助燒結劑、第二樹脂和第二溶劑之總重為基準,金屬粉之含量為67重量百分比至79重量百分比時,可明顯改善電阻之電阻溫度係數。Further, it can be seen from Examples 3-5, 3-6, 8-5 to 8-8 that when the weight ratio of copper and nickel is between 0.35:0.65 and 0.65:0.35, and the metal Based on the total weight of the powder, the sintering aid for the resistance layer, the second resin and the second solvent, when the content of the metal powder is 67% to 79% by weight, the temperature coefficient of resistance of the resistor can be significantly improved.

測試例7:不同電阻層用助燒結劑添加量之電阻功效比較Test Example 7: Comparison of Resistance Efficacy with Different Amounts of Sintering Auxiliary Additives for Resistive Layers

各組依實施例2所述方式製成電阻,但未設置保護層;其中,Ts點係於製程開始前先行量測,並於燒結完成後觀察電阻層之形變量,其餘功效測試(即附著力、電阻率、COV%、TCR和STOL)皆於前述電鍍外電極後進行,進一步說明如下:Each group was fabricated into resistors according to the method described in Example 2, but no protective layer was provided; wherein, the Ts point was measured before the start of the process, and the deformation of the resistor layer was observed after the sintering was completed. force, resistivity, COV%, TCR and STOL) are all carried out after the aforementioned electroplating of the outer electrodes, and are further explained as follows:

(一) 緩衝層用組成物:同實施例3-5和實施例3-6。(1) Composition for buffer layer: same as Example 3-5 and Example 3-6.

(二)電阻膏:(2) Resistor paste:

各組電阻層用助燒結劑之配方皆相同,並同實施例3-5和實施例3-6:B 2O 3之含量為28.09 mol%、BaO之含量為11.20 mol%、ZnO之含量為17.98 mol%、SiO 2之含量為39.43 mol%、Al 2O 3之含量為2.86 mol%以及V 2O 5之含量為0.44 mol%。電阻膏之配方如表13所示,其中第二樹脂為乙基纖維素,第二有機溶劑為松油醇。 The formulations of the sintering aids used in the resistance layers of each group are the same, and are the same as those in Examples 3-5 and 3-6: the content of B 2 O 3 is 28.09 mol%, the content of BaO is 11.20 mol%, and the content of ZnO is 17.98 mol %, SiO 2 content of 39.43 mol %, Al 2 O 3 content of 2.86 mol %, and V 2 O 5 content of 0.44 mol %. The formula of the resistance paste is shown in Table 13, wherein the second resin is ethyl cellulose, and the second organic solvent is terpineol.

表13:電阻膏配方(單位:重量百分比) 組別編號 電阻層用 助燒結劑 第二樹脂 第二有機溶劑 實施例9-1 6.00 42.60 28.40 2.00 21.00 實施例9-2 實施例9-3 5.00 43.20 28.80 2.00 21.00 實施例9-4 實施例3-5 4.00 43.80 29.20 2.00 21.00 實施例3-6 實施例9-5 3.00 44.40 29.60 2.00 21.00 實施例9-6 實施例9-7 2.00 45.00 30.00 2.00 21.00 實施例9-8 Table 13: Resistor paste formula (unit: weight percentage) group number Sintering aid for resistance layer copper nickel second resin second organic solvent Example 9-1 6.00 42.60 28.40 2.00 21.00 Example 9-2 Example 9-3 5.00 43.20 28.80 2.00 21.00 Example 9-4 Example 3-5 4.00 43.80 29.20 2.00 21.00 Examples 3-6 Example 9-5 3.00 44.40 29.60 2.00 21.00 Example 9-6 Example 9-7 2.00 45.00 30.00 2.00 21.00 Example 9-8

(三)燒結溫度:同測試例1。(3) Sintering temperature: same as Test Example 1.

(四)功效測試:同測試例1所述的測試方式進行,並將各測試結果記載於表14中,其中Ts為電阻層用助燒結劑之玻璃軟化點。(4) Efficacy test: The test method is the same as that described in Test Example 1, and the test results are recorded in Table 14, wherein Ts is the glass softening point of the sintering aid for the resistance layer.

表14:各電阻的Ts、形變量、附著力、電阻率、COV%、TCR和STOL測試結果 組別編號 Ts (℃) 電阻層 形變量 附著力 電阻率 (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) 實施例9-1 620 第0級 4.20E-05 1.3 88 0.09 實施例9-2 第0級 5.00E-05 1.5 95 0.12 實施例9-3 620 第0級 3.10E-05 15 65 0.06 實施例9-4 第0級 3.20E-05 1.3 71 0.07 實施例3-5 620 第0級 2.50E-05 1.7 45 0.02 實施例3-6 第0級 1.20E-05 1.3 40 0.01 實施例9-5 620 第0級 2.60E-05 1.4 55 0.06 實施例9-6 第0級 2.00E-05 1.5 46 0.02 實施例9-7 620 第2級 3.20E-05 1.9 57 0.06 實施例9-8 第1級 2.50E-05 1.6 48 0.03 Table 14: Ts, deformation, adhesion, resistivity, COV%, TCR and STOL test results for each resistor group number Ts (°C) Resistive layer deformation adhesion Resistivity (Ω.cm) COV% (%) TCR (ppm/℃) STOL (Ω) Example 9-1 620 none Level 0 4.20E-05 1.3 88 0.09 Example 9-2 none Level 0 5.00E-05 1.5 95 0.12 Example 9-3 620 none Level 0 3.10E-05 15 65 0.06 Example 9-4 none Level 0 3.20E-05 1.3 71 0.07 Example 3-5 620 none Level 0 2.50E-05 1.7 45 0.02 Examples 3-6 none Level 0 1.20E-05 1.3 40 0.01 Example 9-5 620 none Level 0 2.60E-05 1.4 55 0.06 Example 9-6 none Level 0 2.00E-05 1.5 46 0.02 Example 9-7 620 none Level 2 3.20E-05 1.9 57 0.06 Example 9-8 none Level 1 2.50E-05 1.6 48 0.03

從表14可知,實施例9-1和實施例9-2所含電阻層用助燒結劑為6重量百分比時,電阻層無變形,且附著力可達第0級,然而,因電阻層中的玻璃成分提高,導致電阻率偏高,並超過4x10 -5Ω.cm。 It can be seen from Table 14 that when the sintering aid for the resistance layer contained in Examples 9-1 and 9-2 is 6% by weight, the resistance layer is not deformed, and the adhesion can reach the 0th level. The glass composition is increased, resulting in a high resistivity, which exceeds 4x10 -5 Ω.cm.

實施例9-7和實施例9-8所含電阻層用助燒結劑則為2重量百分比,因電阻層中的玻璃成分較低,導致電阻層與緩衝層間之附著力降低(第1級或第2級)。The sintering aid for the resistance layer contained in Examples 9-7 and 9-8 is 2 weight percent, because the glass composition in the resistance layer is low, resulting in a decrease in the adhesion between the resistance layer and the buffer layer (grade 1 or level 2).

由上可知,以金屬粉、電阻層用助燒結劑、第二樹脂和第二溶劑之總重為基準,電阻層用助燒結劑之含量介於2.5重量百分比至5.5重量百分比時,可更進一步改善電阻層與緩衝層間之附著力,且可更進一步提升電阻率。From the above, it can be seen that, based on the total weight of the metal powder, the sintering aid for the resistance layer, the second resin and the second solvent, when the content of the sintering aid for the resistance layer is between 2.5% by weight and 5.5% by weight, it can be further The adhesion between the resistance layer and the buffer layer is improved, and the resistivity can be further improved.

綜上,本發明藉由設置採用具有特定成分及其含量的緩層用助燒結劑所形成的緩衝層,除電阻層可借助夾置於基板和電阻層中的緩衝層提升其與基板之間的附著力,更可進一步避免電阻層變形,使電阻展現良好的瞬間負載、電阻公差和電阻溫度係數。To sum up, in the present invention, by providing a buffer layer formed with a sintering aid for a buffer layer having a specific composition and its content, the resistance-removing layer can be raised between the substrate and the substrate by means of the buffer layer sandwiched between the substrate and the resistance layer. The excellent adhesion can further avoid the deformation of the resistance layer, so that the resistance exhibits good instantaneous load, resistance tolerance and resistance temperature coefficient.

1:電阻 10:複合層狀結構 20:側面電極 30:保護層 100:側面 110:頂面 120:背面電極 130:基板 131:底面 132:頂面 140:緩衝層 141:頂面 150:電阻層 151:頂面 160:正面電極 161:頂面 1: Resistor 10: Composite Laminated Structure 20: Side electrodes 30: Protective layer 100: side 110: top surface 120: back electrode 130: Substrate 131: Bottom 132: top surface 140: Buffer layer 141: Top surface 150: Resistive layer 151: top surface 160: front electrode 161: top surface

圖1為本發明之電阻的剖面結構示意圖。FIG. 1 is a schematic cross-sectional structure diagram of a resistor of the present invention.

圖2A和圖2B為電阻之俯視照片。2A and 2B are top-view photos of the resistor.

none

1:電阻 1: Resistor

10:複合層狀結構 10: Composite Laminated Structure

20:側面電極 20: Side electrodes

30:保護層 30: Protective layer

100:側面 100: side

110:頂面 110: Top surface

120:背面電極 120: back electrode

130:基板 130: Substrate

131:底面 131: Bottom

132:頂面 132: top surface

140:緩衝層 140: Buffer layer

141:頂面 141: Top surface

150:電阻層 150: Resistive layer

151:頂面 151: top surface

160:正面電極 160: front electrode

161:頂面 161: top surface

Claims (15)

一種緩衝層用助燒結劑,其包含第一硼鋇鋅矽鋁釩系玻璃料,該第一硼鋇鋅矽鋁釩系玻璃料包含B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5,並以B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5的總莫耳數為基準,B 2O 3之含量為14.01 mol%至34 mol%,BaO之含量為1.5 mol%至8.44 mol%,ZnO之含量為20.06 mol%至34.6 mol%,SiO 2之含量為23 mol%至49.11 mol%,Al 2O 3之含量為4.9 mol%至7.60 mol%,以及V 2O 5之含量為0.77 mol%至1.85 mol%。 A sintering aid for a buffer layer, comprising a first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit, the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit comprising B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , and based on the total moles of B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , the content of B 2 O 3 ranges from 14.01 mol% to 34 mol%, BaO content is 1.5 mol% to 8.44 mol%, ZnO content is 20.06 mol% to 34.6 mol%, SiO 2 content is 23 mol% to 49.11 mol%, Al 2 O 3 content is 4.9 mol% to 7.60 mol%, and the content of V 2 O 5 is 0.77 mol % to 1.85 mol %. 一種電阻,其包含一複合層狀結構和二側面電極,該二側面電極分別設置於該複合層狀結構的相對兩側面;以及該複合層狀結構依序包含一基板、一緩衝層和一電阻層;其中,該緩衝層由一緩衝層用組成物所形成,且該緩衝層用組成物包含如請求項1所述之緩衝層用助燒結劑、一填料、一第一樹脂和一第一有機溶劑。A resistor comprising a composite layered structure and two side electrodes, the two side electrodes are respectively arranged on opposite sides of the composite layered structure; and the composite layered structure sequentially comprises a substrate, a buffer layer and a resistor layer; wherein, the buffer layer is formed by a composition for a buffer layer, and the composition for a buffer layer comprises the sintering aid for a buffer layer as described in claim 1, a filler, a first resin and a first Organic solvents. 如請求項2所述之電阻,其中,該第一硼鋇鋅矽鋁釩系玻璃料之玻璃軟化溫度為586℃至739℃。The resistor according to claim 2, wherein the glass softening temperature of the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 586°C to 739°C. 如請求項2所述之電阻,其中,該第一硼鋇鋅矽鋁釩系玻璃料之平均粒徑為1微米至5微米。The resistor according to claim 2, wherein the average particle size of the first boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 1 to 5 microns. 如請求項2所述之電阻,其中,該填料包含鋁氧化物、鋅氧化物、矽氧化物、鈦氧化物之任一或其組合。The resistor of claim 2, wherein the filler comprises any one of aluminum oxide, zinc oxide, silicon oxide, and titanium oxide or a combination thereof. 如請求項2所述之電阻,其中,該緩衝層用助燒劑與該填料之重量比為0.4:0.6至0.75:0.25。The resistor according to claim 2, wherein the weight ratio of the sintering aid for the buffer layer to the filler is 0.4:0.6 to 0.75:0.25. 如請求項2所述之電阻,其中,於該緩衝層用組成物中,以該緩衝層用助燒結劑、該填料、該第一樹脂和該第一有機溶劑之總重為基準,該緩衝層用助燒結劑之含量為25.6重量百分比至48重量百分比;該填料之含量為16重量百分比至38.4重量百分比;該第一樹脂之含量為1重量百分比至2重量百分比;以及該第一有機溶劑之含量為30重量百分比至40重量百分比。The resistor according to claim 2, wherein, in the buffer layer composition, the buffer layer is based on the total weight of the buffer layer sintering aid, the filler, the first resin and the first organic solvent. The content of the sintering aid for the layer is 25.6 to 48 percent by weight; the content of the filler is 16 to 38.4 percent by weight; the content of the first resin is 1 to 2 percent by weight; and the first organic solvent The content is 30 weight percent to 40 weight percent. 如請求項2所述之電阻,其中,該電阻層係由一電阻膏所形成,且該電阻膏包含一金屬粉、一電阻層用助燒結劑、一第二樹脂和一第二溶劑。The resistor of claim 2, wherein the resistor layer is formed of a resistor paste, and the resistor paste includes a metal powder, a sintering aid for the resistor layer, a second resin and a second solvent. 如請求項8所述之電阻,其中,該電阻層用助燒結劑包含第二硼鋇鋅矽鋁釩系玻璃料,該第二硼鋇鋅矽鋁釩系玻璃料包含B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5,並以B 2O 3、BaO、ZnO、SiO 2、Al 2O 3和V 2O 5的總莫耳數為基準,B 2O 3之含量為26.70 mol%至29.1 mol%,BaO之含量為10.1 mol%至12.64 mol%,ZnO之含量為15.39 mol%至19.9 mol%,SiO 2之含量為37.2 mol%至42.36 mol%,Al 2O 3之含量為2.68 mol%至3 mol%,以及 V 2O 5之含量為0.22 mol%至0.6 mol%。 The resistor according to claim 8, wherein the sintering aid for the resistance layer comprises a second boron-barium-zinc-alumina-vanadium-based glass frit, and the second boron-barium-zinc-silicon-alumina-vanadium-based glass frit comprises B 2 O 3 and BaO , ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , and based on the total moles of B 2 O 3 , BaO, ZnO, SiO 2 , Al 2 O 3 and V 2 O 5 , B 2 O The content of 3 is 26.70 mol% to 29.1 mol%, the content of BaO is 10.1 mol% to 12.64 mol%, the content of ZnO is 15.39 mol% to 19.9 mol%, the content of SiO2 is 37.2 mol% to 42.36 mol%, the content of Al The content of 2 O 3 is 2.68 mol % to 3 mol %, and the content of V 2 O 5 is 0.22 mol % to 0.6 mol %. 如請求項9所述之電阻,其中,該第二硼鋇鋅矽鋁釩系玻璃料之玻璃軟化溫度為565℃至690℃。The resistor according to claim 9, wherein the glass softening temperature of the second boron-barium-zinc-silicon-aluminum-vanadium-based glass frit is 565°C to 690°C. 如請求項8所述之電阻,其中,該金屬粉包含銅和鎳,且銅和鎳之重量比為0.35:0.65至0.8:0.2。The resistor of claim 8, wherein the metal powder comprises copper and nickel, and the weight ratio of copper and nickel is 0.35:0.65 to 0.8:0.2. 如請求項8所述之電阻,其中,於該電阻膏中,以該金屬粉、該電阻層用助燒結劑、該第二樹脂和該第二溶劑之總重為基準,該金屬粉之含量為67重量百分比至79重量百分比;該電阻層用助燒結劑之含量為2重量百分比至6重量百分比;該第二樹脂之含量為1重量百分比至3重量百分比;以及該第二有機溶劑之含量為17重量百分比至25重量百分比。The resistor according to claim 8, wherein, in the resistor paste, the content of the metal powder is based on the total weight of the metal powder, the sintering aid for the resistor layer, the second resin and the second solvent The content of the sintering aid for the resistance layer is 2 to 6 weight percent; the content of the second resin is 1 to 3 weight percent; and the content of the second organic solvent 17 to 25 weight percent. 如請求項8所述之電阻,其中,該金屬粉的平均粒徑為0.3微米至10微米。The resistor according to claim 8, wherein the average particle size of the metal powder is 0.3 to 10 microns. 一種電阻之製法,其包括以下步驟: 步驟(a):在一基板之表面形成一緩衝層; 步驟(b):在該緩衝層之表面形成一電阻層,其中,該緩衝層夾設於該基板和該電阻層之間,獲得一複合層狀結構; 步驟(c):在該複合層狀結構之相對兩側面分別設置一側面電極,以獲得一電阻胚;以及 步驟(d):燒結該電阻胚,以獲得該電阻; 其中該緩衝層由一緩衝層用組成物所形成,且該緩衝層用組成物包含如請求項1所述之緩衝層用助燒結劑、一填料、一第一樹脂和一第一有機溶劑。 A method for making a resistor, comprising the following steps: Step (a): forming a buffer layer on the surface of a substrate; Step (b): forming a resistance layer on the surface of the buffer layer, wherein the buffer layer is sandwiched between the substrate and the resistance layer to obtain a composite layered structure; Step (c): Disposing a side electrode on two opposite sides of the composite layered structure to obtain a resistor embryo; and Step (d): sintering the resistor blank to obtain the resistor; Wherein the buffer layer is formed by a composition for a buffer layer, and the composition for a buffer layer comprises the sintering aid for a buffer layer as described in claim 1, a filler, a first resin and a first organic solvent. 如請求項14所述之製法,其中,該步驟(d)之燒結溫度為880℃至920℃,燒結時間為10分鐘至15分鐘。The production method according to claim 14, wherein the sintering temperature in step (d) is 880°C to 920°C, and the sintering time is 10 minutes to 15 minutes.
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