TW202227203A - Mold component for processing amorphous alloy plate and method for processing amorphous alloy plate - Google Patents

Abstract

A mold component for shearing or fracturing an amorphous alloy plate, which intends to decrease wears of a cutting edge and to extends its service life. The mold component includes a substrate made of metals and a hard metal compound, and a hard coating forming on a region on the surface for processing. The hard coating has a first hard layer containing Ti, Si, and N.

Description

Die parts for processing amorphous alloy sheet and method for processing amorphous alloy sheet

The present invention relates to a mold part for processing an amorphous alloy plate and a method for processing the amorphous alloy plate.

In order to ensure the output force of a rotating electric machine used as a motor of an electric vehicle or a hybrid vehicle, it is required to reduce the high-frequency loss of the alternating magnetic flux generated by high-speed rotation and to operate with high efficiency. Up to now, high efficiency of rotating electrical machines has been achieved by using inverters, applying rare earth magnets, optimizing structural design, etc. However, in order to further improve efficiency, it is necessary to reduce the iron loss of the laminated core used for the magnetic poles . Therefore, to replace the traditional silicon steel plate used for laminated iron core, low-loss magnetic materials such as amorphous alloy, Fe crystal phase with fine bcc structure, nanocrystalline soft magnetic alloy containing FeSi crystal phase and amorphous phase, etc. application requirements are increasing.

As an amorphous alloy, for example, a soft magnetic alloy such as Fe-Si-B is known, and a molten metal adjusted to a predetermined composition is super-quenched by a single roller liquid quenching technique, etc. Amorphous ribbon. Metglas (registered trademark) 2605HB1M, 2605SA1 or 2605SA3 such as Fe-Si-B-Cr from METGLAS, Inc. are commercially available.

In addition, the nanocrystalline soft magnetic alloy is obtained by subjecting an amorphous ribbon obtained in the same manner as the amorphous alloy to a heat treatment to precipitate (nanocrystallize) an Fe crystal phase or a FeSi crystal phase. For example, Fe-Si-B-Cu-Nb-based Finemet (registered trademark) FT-3M of Japan Hitachi Metals Co., Ltd., VITOPERM (registered trademark) 800 of KG of VACUUMSCHMELZE GmbH & Co., and Fe-B -NANOPERM (registered trademark) of MAGNETEC Gesellschaft fur Magnettechnologie mbH of Zr-Cu type.

Those are usually tens to tens of microns thick and are supplied in long thin strips, also known as strips, ribbons, films or foils. In the following description, in addition to these single-layer thin strips, there are also multi-layer products in which a plurality of thin strips are stacked together, composite products including adhesive layers, and multi-layer products formed by superimposing other materials such as electromagnetic steel sheets. Collectively referred to as amorphous alloy sheets.

Amorphous alloys are usually ideal elastic-plastic materials that do not undergo strain hardening, and have large plastic deformation capacity and toughness. Elongation does not easily occur. Disadvantages of amorphous alloy sheets having such properties are that they are very hard and not as good in workability as crystalline silicon steel sheets, which are factors hindering the progress of application of laminated cores that require processing of sheets into predetermined shapes.

Against such a background, various processing techniques for obtaining thin sheets or iron cores having a predetermined shape from an amorphous alloy sheet material have been studied. One of them is to use a die part composed of a punch and a die and punch it by a press device, but the traditional die part has the cutting edge used for machining and is prone to wear and chipping. Moreover, the cutting edge needs to be maintained frequently, the mold parts need to be replaced frequently, the productivity is low, and the application in mass production has not progressed.

It is generally believed that the main reasons for the wear of the cutting edge of die parts are fatigue fracture caused by repeated impact or shearing work, and wear caused by friction with the sheared plate. As a countermeasure, a hard coating, such as DLC (Diamond-like carbon), AlCrN type, CrN type, TiN type, etc., is formed on the cutting edge. Japanese Patent Laid-Open No. 2018-164936 discloses a die part used for punching, which has a hard film coated with Al, Cr, and N on the surface.

However, although the mold parts in the above-mentioned documents are suitable for the punching of electromagnetic soft iron, there is still room for improvement in the wear of the cutting edge when the amorphous alloy sheet is punched. Similarly, improvements are also required for the mold parts for forming the other hard films described above.

Therefore, the present invention preferably provides a mold part which can improve the wear of the cutting edge and prolong the service life when the amorphous alloy sheet is sheared or fractured. In addition, it is preferable to provide a method of processing an amorphous alloy sheet material which improves wear of the cutting edge of a die part and prolongs the life.

The present invention provides a mold part for shearing or fracturing an amorphous alloy plate. The mold part includes a base material made of metal and a hard metal compound, and a hard film formed on a region of the surface thereof used for the processing, the hard film having a first composition comprising Ti, Si, N hard layer.

In the present invention, the hard coating is a multilayer, and preferably has a second hard layer including Ti, Al, and N between the first hard layer and the substrate. Moreover, in this invention, it is preferable that this metal compound contains tungsten carbide whose average particle diameter is 5 micrometers or less as a main component.

In addition, in the present invention, the die part includes a punch member and a die member having a hole into which the punch member is inserted, and the hard coating is preferably formed in the punch member for the punch member The part where the component is inserted.

Further, in the present invention, the side surface of the punch member has a portion where the hard coating is formed and a portion where the hard coating is not formed, and at least the portion inserted into the die member is preferably formed with a hard coating.

In addition, in the present invention, it is preferable that the hard film is not formed on the surface of the punch member in contact with the amorphous alloy plate material. In addition, in the present invention, the hard coating is preferably formed on the surface of the hole in the die member into which the punch member is inserted.

In addition, in the present invention, it is preferable that the hole surface of the die has a portion where the hard coating is not formed. In addition, the present invention provides a method of processing an amorphous alloy sheet material. The method uses a die part including a punch member and a die member having a hole into which the punch member is inserted, and punches an amorphous alloy plate material arranged on the die member using the punch member, wherein the punch member Contains a base material made of metal and a hard metal compound, and a hard coating formed on the surface, the hard coating having a first hard layer containing Ti, Si, N, the hard coating formed in the punch member for supplying The part into which the die member is inserted.

In the present invention, the side surface of the punch member has a portion where the hard coating is formed and a portion where the hard coating is not formed, and the hard coating is formed at least at the portion inserted into the die member.

In addition, in the present invention, it is preferable that the hard film is not formed on the surface of the punch member in contact with the amorphous alloy plate material. In addition, in the present invention, it is preferable that the die member includes a base material made of metal and a hard metal compound, and a hard film formed on the surface thereof, the hard film having a first material including Ti, Si, and N. A hard layer formed on the surface of the hole in the die member into which the punch member is inserted.

Further, in the present invention, it is preferable that the surface of the hole of the die member has a portion where the hard coating is not formed. Moreover, in this invention, this hard coating is a multilayer, and has a 2nd hard layer containing Ti, Al, and N between this 1st hard layer and this base material.

In addition, in the present invention, the metal compound is mainly composed of tungsten carbide having an average particle diameter of 5 μm or less. [Inventive effect]

According to the present invention, in shearing or fracturing an amorphous alloy sheet, a die part can be provided which can improve the wear of the cutting edge and prolong the service life. In addition, it is possible to provide a method of processing an amorphous alloy sheet that improves wear of the cutting edge of the die part and prolongs the service life.

Hereinafter, the embodiments of the present invention will be specifically described, but the present invention is not limited thereto. In addition, in some or all of the drawings, parts that do not need to be explained are omitted, and for convenience of explanation, parts shown in enlarged or reduced figures are shown. In this specification, the numerical range represented by "~" means the range which includes the numerical value before and after "~" as a lower limit value and an upper limit value.

1 and 2 are schematic views of a mold part according to an embodiment of the present invention. The mold part 1 shown in FIG. 1 includes a hard film 21 having a first hard layer containing Ti, Si, and N on the surface of a base material 20 in the shape of a rectangular prism. The hard film 21 is formed on the surface including the entire bottom surface and side surfaces not shown. In the example shown in the figure, the hard film 21 is formed only on the lower side of the base material 20, but as long as it is formed at least in the area for processing Can. When the die part 1 is used as a punch for punching, for example, the die part 2 shown in FIG. 2 can be used as a pair of punches. In the base material 20 having the rectangular hole (through hole) into which the die part 1 (punch) can be inserted, at least the surface on the upper side of the through hole has a hard coating 21 having a hard coating 21 containing Ti, Si, and N. The first hard layer.

In the die part 1 (punch member) shown in FIG. 1 , the hard coating 21 is formed on the lower side among the side surfaces, and the hard coating 21 is not formed on the upper side. The portion where the hard coating 21 is formed on the lower side includes a portion to be inserted into the hole of the die part 2 (die member) shown in FIG. 2 . In this way, by forming the hard coating 21 only on a part of the punch member, it is possible to effectively reduce the man-hours, materials, and the like for forming the hard coating 21 . In addition, this point is the same also about the mold part 2 (die member).

Preferably, both of the mold parts 1 and 2 are provided with a hard film 21 having a first hard layer containing Ti, Si, and N, but at least one mold part may have a hard film 21, and the other mold part may use the above-mentioned hard film 21. Known hard film formation. In addition, mold parts include those formed by combining separate parts.

3 is a schematic cross-sectional view showing a mold part according to an embodiment of the present invention. The hard film 21 is provided on the base material 20 in a two-layer structure, and has a first hard layer 22 containing Ti, Si, and N on the outermost surface of the hard film 21 .

The first hard layer according to the present invention contains at least Ti, Si, and N, and serves as a hard coating having excellent wear resistance and durability, which protects the substrate 20 and suppresses wear to increase the service life. When the first hard layer 22 is formed in a chamber in which nitrogen gas is introduced and is formed by vapor deposition using a Ti-Si target, the hardness increases as the Si content increases. Therefore, when x is the atomic ratio when only metal elements are considered and represented by Tix Si1-x, x<0.90 is preferable. The structure of the first hard layer is preferably nanocrystals with an average particle size of 25 nm or less.

Furthermore, a second hard layer 23 is provided between the base material 20 and the first hard layer 22 . The second hard layer 23 contains at least Ti, Al, and N. The role of the second hard layer 23 is to improve the adhesion and peel strength. Therefore, the second hard layer 23 is preferably provided, but may not be provided. When y is the atomic ratio of the second hard layer 23 when only metal elements are considered, and is represented by Ty Al1-y, preferably 0.25<y<0.75, more preferably 0.30<y<0.50.

In addition, the hard coating 21 may include a plurality of hard layers as long as it has a first hard layer containing Ti, Si, and N on the surface layer. For example, a hard layer containing Ti, Si, and N as main components may be formed. In addition, a hard coating having three or more layers of hard layers containing Ti, Al, and N as main components is alternately formed and laminated, and a hard layer having other components may be provided. In addition, the case where a film for temporarily protecting the first hard layer 22 is formed is also included in the present invention.

The first hard layer 22 and the second hard layer 23 can be formed by a known film forming method. For example, liquid phase methods such as electroplating and electroless plating can be used; physical vapor deposition methods such as vacuum evaporation, molecular beam epitaxy, sputtering, ion plating, etc.; chemical vapor deposition methods such as Thermal CVD, Optical CVD, Plasma CVD, etc. In addition, the base material 20 may be subjected to nitriding treatment or carburizing treatment before forming the hard film 21 . The film-forming method can be selected according to the composition or thickness of the amorphous alloy sheet material, or the presence or absence of a single layer, a multilayer, or an adhesive layer.

When the hard film 21 is a single layer of the first hard layer 22, the film thickness is preferably in the range of 0.1 to 60 μm in consideration of the wear allowance and peel strength. The film thickness of the hard coating 21 is more preferably 0.2 to 20 μm, and still more preferably 0.5 to 10 μm. However, the optimum film thickness can be selected according to the composition and thickness of the amorphous alloy sheet, and is not limited to this range.

When the hard film 21 is a multilayer, the film thickness of the first hard layer 22 on the surface is preferably in the range of 0.1 to 30 μm. The thickness of the second hard layer 23 is preferably in the range of 0.1 to 30 μm. The film thickness of the first hard layer 22 is more preferably 0.2 to 10 μm, and still more preferably 0.5 to 5 μm. The film thickness of the second hard layer 23 is more preferably 0.2 to 10 μm, and still more preferably 0.5 to 5 μm.

The substrate 20 is composed of a material made of metal and a hard metal compound. As the base material 20, for example, in the material classification described in JISB4053 2013, materials classified into HW, HF, and HT can be used. When a material classified as HW or HF is used, for example, a hard phase mainly composed of tungsten carbide and a binder phase mainly composed of an iron group metal such as Co are preferable. A solid solution composed of at least one selected from transition metal elements selected from Groups 4a, 5a, and 6a of the periodic table and at least one selected from carbon, nitrogen, oxygen, and boron may be contained. When a substance classified as HT is used, for example, a composition consisting of at least one element selected from transition metal elements selected from Groups 4a, 5a and 6a of the periodic table, and at least one element selected from carbon, nitrogen, oxygen and boron can be used The solid solution phase, and the combined phase consisting of more than one iron-based metal component, and the substance consisting of unavoidable impurities. In addition, the metal compound contains tungsten carbide having an average particle diameter of 5 μm or less as a main component, so that the strength of the base material 20 can be improved and the wear resistance can be further improved. In addition, the average particle diameter of the metal compound is more preferably 2 μm or less. In addition, in order to suppress cracking due to a decrease in the toughness of the base material 20 , the average particle diameter of the metal compound is preferably 0.5 μm or more, and more preferably 0.7 μm or more.

FIG. 4 shows an example of an amorphous alloy sheet to which a mold part according to the present invention is sheared or fractured. The amorphous alloy plate 11 includes at least one layer of an amorphous alloy sheet 12 . As the amorphous alloy sheet 12 , for example, Fe-based amorphous alloys, Co-based amorphous alloys, Ni-based amorphous alloys, or the like can be used. In addition, this also includes amorphous alloys that are precursors of nanocrystalline soft magnetic alloys.

The widely used amorphous alloy thin plate 12 usually has a thickness of several tens of μm per layer. When the amorphous alloy sheet 11 is composed of a single layer of the amorphous alloy thin plate 12, the workability for shearing or breaking is poor.

In addition, there are disadvantages such as low production efficiency per stroke (number of punches) during punching, and difficulty in adjusting the gap between the die and punch when combining multiple die parts. Therefore, the amorphous alloy plate 11 can be a stack of a plurality of amorphous alloy thin plates 12 . The plurality of amorphous alloy sheets 12 may be a combination of amorphous alloys having different compositions or different sheet thicknesses. In addition, the thin plates 13 made of different materials may be stacked. As the thin plate 13 made of a different material, for example, a soft magnetic material such as electromagnetic steel sheet, electromagnetic soft iron, permalloy, or permendur can be used, but it may vary depending on the production process. The best material is chosen and is not limited to these examples.

The amorphous alloy sheet 11 may have an adhesive layer 14 between each layer of the plurality of amorphous alloy sheets 12 or between sheets 13 made of different materials. If the material of the adhesive layer 14 is thermoplastic, for example, engineering plastics such as PPS (polyphenylene sulfide), PC (polycarbonate), PET (polyethylene terephthalate), etc. can be used. As curable resin, epoxy resin or unsaturated polyester can be used, but it is not limited to these examples. Additionally, the adhesive layer 14 may not be hardened when machined from the mold part.

FIG. 5 shows an example in which the amorphous alloy plate 11 is punched using the die part 1 as the punch and the die part 2 as the punch die. For example, in the case of blanking processing, shearing and fracture usually occur in the processing section. The form of shearing or breaking will vary depending on the gap between the punch and die, the shape of the cutting edge, and the configuration of the amorphous alloy sheet 11, but it can be applied not only to punching but also to at least General processing where shearing or breaking occurs.

In the present invention, the amorphous alloy sheet 11 is preferably a single amorphous alloy ribbon, or 2 to 6 amorphous alloy sheets 12 are stacked.

Further, in the present invention, the thickness of the amorphous alloy plate material 11 is preferably 10 μm to 200 μm, and more preferably 14 μm to 150 μm.

Further, in the present invention, the thickness of the amorphous alloy thin plate 12 constituting the amorphous alloy plate material 11 is preferably 10 to 50 μm, more preferably 14 to 40 μm.

Furthermore, in the present invention, the gap between the punch and the die is preferably 2% to 10% of the thickness of the amorphous alloy plate.

[Example] As an amorphous alloy sheet, Metglas (registered trademark) 2605HB1M was prepared. The amorphous alloy plate is a long, single-layer thin strip with a thickness of 25 μm and a width of 30 mm. The amorphous alloy sheet was sheared and fractured using a blanking die (die part 1, die part 2 in FIG. 5) to prepare a blanking material having the shape shown in FIG. Material). The size of the blanking material is a rectangle of 15 mm × 5 mm, and the corner R (the chamfer of the curvature radius R) is 0.3 mm.

The base material of the blanking die part according to the present invention is mainly composed of tungsten carbide, the punch uses ultra-fine cemented carbide with an average particle size of 0.7 μm, and the punch uses coarse-grained mixed cemented carbide with an average particle size of 0.5 μm and 5.0 μm. alloy. The punch size is a cuboid of 5mm×15mm×44mm, the die size is a cuboid of 75mm×40mm×8mm, and a rectangular hole of 5mm×15mm is set. High-speed tool steel and the like are mainly used as parts other than die parts (punch or die) of the punching die according to the present invention.

The hard layer of the hard coating was formed in a nitrogen gas-introduced chamber using BALIQ (registered trademark) TISINOS of OC Oerlikon Balzers AG as a TiSi target. In the process of forming the hard layer on the hard film, a sputtering HiPIMS (High Power Impact Magnetron Sputtering) is used. In this method, a high-output pulse voltage is applied to the target material to generate high-density plasma, which has excellent adhesion and can obtain a uniform and smooth film quality.

First, TiAlN was formed as an intermediate layer (corresponding to the example of the second hard layer) on the base material of each punch and die, and then TiSiN was formed on the outermost surface (corresponding to the example of the first hard layer). The film-forming portion is an end portion with a circumference of 5 mm×15 mm, has a punched shape, and extends about 1 cm from the cutting edge 24 of the punch and the cutting edge 25 of the die. It is applied to the surface perpendicular to the sliding direction of the punch (corresponding to the up-down direction in FIG. 5 ) and to the surface parallel to it. After film formation, both the punch and die are polished on the surface perpendicular to the sliding direction, leaving only the part of the hard film that is parallel to the sliding direction of the punch (the side of the punch, the surface of the die hole). A punch and a die may be used without polishing the surface perpendicular to the sliding direction, but the cutting edge can be sharpened by polishing the surface perpendicular to the sliding direction. During punching, the sliding length after contact with the amorphous alloy sheet is 105 μm from the cutting edge, and the amorphous alloy sheet does not contact the part where the hard coating is not formed on the surface parallel to the sliding direction of the punch.

In addition, the hard film will be abraded by repeated punching with punches and dies. The hard film of the present invention has higher durability than the conventional hard film, but when the number of repeated punching increases, the hard film of the present invention is also subject to wear. When the degree of abrasion of the hard coating increases, the effect of the hard coating cannot be exhibited. When the degree of wear of the hard film becomes large, the cutting edge of the punch or die can be modified into a sharp shape by polishing (polishing the surface perpendicular to the sliding direction of the punch or die) of the cutting edge of the punch or die. As a result, this allows the punch or die to be reused. The width of the film-forming portion can be determined in consideration of the number of such polishing operations. The width of the film-forming portion is preferably three times or more the sliding length. In addition, the width is preferably 10 times or more the sliding length.

The total thickness of the hard coating formed on the punch and die from the base material to the outermost surface was about 2 μm, and each of the second hard layer of TiAlN and the first hard layer of TiSiN was about 1 μm. The thickness of the hard coating was measured from a photograph obtained with an optical microscope. In addition, when a hard coating is provided, each member is assembled so that the gap between the punch and the die is 10% of the plate thickness of the plate, that is, 2.5 μm.

The composition of the second hard layer is Ti0.20 Al0.25 N0.55 in atomic ratio, and the composition of the first hard layer is Ti0.34 Si0.12 N0.54 in atomic ratio. These compositions are determined by composition analysis by wavelength-dispersive X-ray spectrometry and removal of inevitable impurities.

The punching machine used in this example is MPS405UD manufactured by Nippon Electric Discharge Precision Machining Research Institute Co., Ltd. In addition to the thickness of the amorphous alloy sheet of 25 μm, the bottom dead center was set at a position 80 μm lower than the position where the punch tip and the upper end of the die were flush with the height at break in consideration of the elongation at break. That is, the bottom dead center is the point where the punch surface slides by 105 μm after contacting the amorphous alloy plate material. The punching speed was set to 31 mm/s. Punching speed The value of a linear scale mounted on a 4-axis servo punch was read with a sequencer with a sampling rate of 0.2 ms to calculate the speed at the position where the punch and the amorphous alloy plate contact each other.

In consideration of productivity, the punching speed is preferably 10 mm/s or more, more preferably 30 mm/s or more. In addition, the punching speed is preferably not more than 800 mm/s, more preferably not more than 600 mm/s, in order to avoid sudden heating of the parts due to friction.

As a method of evaluating the shape of the punched material, first, 14 points of the edge of the punched material were imaged using a laser microscope VK-X1000 manufactured by Japan Keyence. For the imaging points, fixed point observation was performed at points 110 to 123 shown in FIG. 6 , and an area of 270 μm×202 μm was set as the imaging range of each point. The magnification of the lens is 50 times. Viewed from a direction perpendicular to the surface of the blanked material in contact with the punch. That is, when an image is captured from the negative direction of the z-axis toward the positive direction shown in FIG. 7 , the deformation height 40 is detected in the negative direction of the z-axis.

8 is an example of an observation image in which at least 50% or more of the imaging range is used as the punching material 11 and the position is adjusted and observed so that the deformation height 40 can be imaged. The inclination is obtained within the correction range 130 so that the flat portion other than the end of the punched material becomes the reference plane, and the entire image is subjected to one-time plane correction. For the corrected image, five contour lines 131 perpendicular to the ends of the blanked material are drawn at intervals of about 60 μm, and the deformed height 40 of each is obtained from each contour line. That is, for one imaging point, data of five deformation heights 40 can be obtained. The measurement was performed on 14 imaged points, resulting in 5 × 14 = 70 contours. That is, data for 70 deformed heights 40 can be obtained for a specific amount of blanked material. Obtain the average, maximum and minimum values of the 70 deformed height 40 data. The above-mentioned evaluation was performed for each 100,000 punched materials.

As for the cross section of the punched material, as shown in the schematic diagram of FIG. 7 , a shear-drooped 44 , a sheared surface 43 , a fractured surface 42 and a burr 41 can be generally confirmed. With proper punching, a cross section containing two modes of shear plane 43 and fracture plane 42 can usually be observed. As the die wears, the shear surface will decrease, the fracture surface ratio will increase, and the height of the shear sag 44 and burr 41 will also increase.

As Comparative Example 1, a mold having an AlCrSiN hard coating was prepared, and an amorphous alloy plate was punched out. In Comparative Example 1, the film was formed by an arc ion plating method (Arc Ion Plat-ing). Conditions such as substrate, plate, punching speed, etc. are not changed from the examples.

Table 1 shows the difference in constitution between Example 1 and Comparative Example 1. 9 is a graph showing the amount of punched material on the horizontal axis and the deformation height of the punched material on the vertical axis. The average is plotted, and the range of maximum and minimum values is displayed as error bars.

[Table 1] Substrate 20 Hard coating 21 Amorphous alloy sheet 11 Blanking speed(mm/s) shower die shower Die Film formation Comparative Example 1 superfine carbide Coarse Grain Mixed Carbide AlCrSiN AlCrSiN Arc Ion Plat-ing 2605HB1M 31 Example 1 superfine carbide Coarse Grain Mixed Carbide TiSiN/TiAlN TiSiN/TiAlN HiPIMS 2605HB1M 31

In Comparative Example 1, only 20,000 punching times resulted in a maximum deformation of about 23 μm. In Example 1, the base material of the mold was protected by a hard film containing the first hard layer TiSiN, and the deformation height 40 was within the implementation range of not more than 20 μm. From this, it was confirmed that the hard coating of Example 1 is advantageous for the processing of the amorphous alloy and can improve the life.

1: Die Parts (Punches) 2: Die parts (die) 11: Amorphous alloy sheet 12: Amorphous alloy sheet 13: Sheets made of different materials 14: Adhesive layer 20: Substrate 21: Hard film 22: The first hard layer 23: Second hard layer 24: Cutting edge of the punch 25: Cutting edge of the die 40: Deformation Height 41: Glitch 42: fracture surface 43: Cut plane 44: Shear Sag 110-123: Imaging Locations 130: Correction range 131: Outline

Hereinafter, examples of embodiments of the present invention are described with the drawings. FIG. 1 is a schematic diagram showing a die part (punch) according to one embodiment of the present invention. Figure 2 is a schematic diagram showing a mold part (die) according to one embodiment of the present invention. 3 is a schematic cross-sectional view showing a mold part according to an embodiment of the present invention. FIG. 4 is a schematic diagram of the cross-sectional structure of the shown amorphous alloy sheet. FIG. 5 is a schematic diagram for explaining blanking according to an embodiment of the present invention. FIG. 6 is a schematic diagram of a blanking material blanked from an amorphous alloy sheet using a die part. 7 is a partial cross-sectional view of a blanked material blanked from a die part in accordance with one embodiment of the present invention. FIG. 8 is an image of the blanked material observed with a laser microscope. FIG. 9 is a graph comparing the variation of the deformation height of the shown blanking material with respect to the number of blankings.

1: Die Parts (Punches)

20: Substrate

21: Hard film

24: Cutting edge of the punch

Claims (15)

A mold part for processing an amorphous alloy plate, which is a mold part for shearing or fracture processing an amorphous alloy plate, and the mold part includes: a substrate made of a metal and a hard metal compound; and a hard film formed on the area of its surface used for these processes, Wherein, the hard film has a first hard layer including Ti, Si, and N. The mold part for processing an amorphous alloy sheet as claimed in claim 1, wherein the hard coating is a multi-layered layer, and a second hard film comprising Ti, Al, and N is provided between the first hard layer and the base material. Floor. The mold part for processing an amorphous alloy sheet according to claim 1, wherein the metal compound is mainly composed of tungsten carbide having an average particle size of 5 μm or less. The die part for processing an amorphous alloy sheet as claimed in claim 1, wherein the die part comprises a punch member and a die member having a hole into which the punch member is inserted, In addition, the hard coating is formed in a portion of the punch member into which the die member is inserted. The die part for processing an amorphous alloy sheet according to claim 4, wherein the side surface of the punch member has a portion where the hard coating is formed and a portion where the hard coating is not formed, and at least the portion inserted into the die member A hard coating is formed. The die part for processing an amorphous alloy sheet according to claim 4, wherein the hard film is not formed on the surface of the punch member in contact with the amorphous alloy sheet. The die part for processing an amorphous alloy sheet according to any one of claims 4 to 6, wherein the hard coating is formed on the surface of the hole in the die member into which the punch member is inserted. The die part for processing an amorphous alloy sheet according to claim 7, wherein the surface of the hole of the die has a portion where the hard coating is not formed. A processing method of an amorphous alloy sheet, comprising: using one of the die parts including a punch member and a die member having a hole into which the punch member is inserted, and punching out an amorphous alloy plate material arranged in the die member using the punch member, The punch member includes a base material made of metal and a hard metal compound, and a hard film formed on its surface, The hard coating has a first hard layer containing Ti, Si, and N, and the hard coating is formed in a portion of the punch member into which the die member is inserted. The method for processing an amorphous alloy sheet according to claim 9, wherein the side surface of the punch member has a portion where the hard coating is formed and a portion where the hard coating is not formed, and at least a portion inserted into the die member is formed with a hard coating skin. The method for processing an amorphous alloy sheet according to claim 9, wherein the hard film is not formed on the surface of the punch member in contact with the amorphous alloy sheet. The method for processing an amorphous alloy sheet according to claim 9, wherein the die member comprises a base material made of a metal and a hard metal compound, and a hard film formed on the surface thereof, the hard The film has a first hard layer including Ti, Si, and N, And, the hard coating is formed on the surface of the hole in the die member into which the punch member is inserted. The method for processing an amorphous alloy sheet according to claim 12, wherein the surface of the hole of the die member has a portion where the hard coating is not formed. The method for processing an amorphous alloy sheet according to any one of claims 9 to 13, wherein the hard coating is a multi-layered layer, and between the first hard layer and the base material, there is a material comprising Ti, Al, and N. a second hard layer. The method for processing an amorphous alloy sheet according to any one of claims 9 to 13, wherein the metal compound is mainly composed of tungsten carbide having an average particle size of 5 μm or less.

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