TW202223321A - Thin-type two-phase fluid device - Google Patents

Thin-type two-phase fluid device Download PDF

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TW202223321A
TW202223321A TW109142209A TW109142209A TW202223321A TW 202223321 A TW202223321 A TW 202223321A TW 109142209 A TW109142209 A TW 109142209A TW 109142209 A TW109142209 A TW 109142209A TW 202223321 A TW202223321 A TW 202223321A
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thin
plate
plate body
phase flow
layer
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TWI798604B (en
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謝國俊
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奇鋐科技股份有限公司
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Abstract

A thin-type two-phase fluid device includes a first plate body, a second plate body and a polymer layer. The first plate body has a first face, a second face and multiple bosses. The bosses are disposed on the first face and raised therefrom. The second plate body has a nanometer capillary layer on one face. The nanometer capillary layer is formed from a mixture of multiple kinds of powders with different sizes. The nanometer capillary layer is attached to a surface of the second plate body opposite to the first face of the first plate body. The polymer layer is selectively connected with the first plate body or the second plate body. The total thickness of the thin-type two-phase fluid device is equal to or smaller than 0.25mm, whereby the object of thinning the heat dissipation device is achieved.

Description

薄型兩相流裝置Low Profile Two-Phase Flow Device

一種薄型兩相流裝置,尤指一種薄型化的薄型兩相流裝置。A thin two-phase flow device, especially a thin two-phase flow device.

為了達到更佳的熱傳效果,散熱領域應用兩相流之熱交換原理的散熱裝置作為熱傳導元件使用,其中以均溫板及熱管最為普及,而均溫板與熱管為應用兩相流熱交換原理,必須以熱傳導效率較佳的材質作為該均溫板及熱管之主體結構,其中又以銅最為常見,主體內部必須具有一真空氣密的腔室以及腔室內部表面設置有毛細結構以及填充有工作液體,使得以透過真空環境下工作液體沸點降低而在該真空氣密的腔室內部進行兩相流(汽體與液體)循環,藉此提供較佳的熱傳導效率。 習知均溫板係在至少一板體上設置有毛細結構後再與另一板體蓋合構成主體,其後再該主體上進行封邊及填水(液態工作流體)與抽真空等作業,進而構成所述之均溫板;前述之毛細結構在均溫板中主要係用來作為液態工作流體從冷凝區回流至蒸發區以及將液態工作流體儲存於蒸發區的作用,而毛細結構通常以燒結體、網格體、纖維體、溝槽等型態可提供毛細力的結構作為使用。 其中燒結體主要係於板體之一側披覆有金屬粉末,再透過燒結之方式將該等粉末燒結附著於該板體上而形成多孔隙性質的毛細結構,以燒結方式所形成的燒結體型態之毛細結構係為毛細力最佳的毛細結構,而燒結工作必須將兩兩相鄰之粉末加熱至半固融狀態下使粉末間相互連結並形成具有多孔特性的毛細結構,為保持燒結粉末之毛細結構能保持多孔性之特質,則該燒結粉末之粒度具有一定的限制,因當燒結粉末的粒度過小時會造成該等粉末燒結產生固熔彼此之間幾乎沒有孔隙,以致於無法形成具多孔性的毛細結構,也就是說該毛細結構無法提供毛細力。如此,現有的燒結體使用燒結粉末之粒度是無法選用太細小的粉末,使得現有透過燒結之方式所形成的毛細結構中,該燒結粉末必須選用顆粒大小適中的尺寸才得以在各顆粒間形成有孔隙且具有毛細力之功效,但相對的該燒結結構厚度也會隨之增厚,這也就是目前現有燒結體無法應用於極薄型化的均溫板結構上。此外,目前現有使用燒結體的均溫板是無法彎折(彎曲)或撓折,因該均溫板受彎折(彎曲)後,會造成腔室內的燒結體破損脫落並崩壞,導致板體上之毛細結構失能而失去均溫散熱的功效。 所以業者為了解決上述現有燒結體無法使用在極薄型化的均溫板結構上的問題,便朝向該毛細結構中毛細力功效較差的溝槽, 或是毛細結構中毛細力係亞於燒結粉末的網格體或編織網試著使用,其中該網格體或編織網雖在設置上方便且可使用於需進行彎折之部位,但網格體或編織網在設置在均溫板內時必須與殼壁或管壁完全貼合,才能令工作液體得以於網格體或編織網中受毛細作用擴散,但當網格體或編織網沒有完整貼設或舖設於該殼壁或管壁表面時,則會產生間隙無法提供毛細力供給工作液體進行擴散汽液循環的功效,另外還有就是所述網格體與編織網主要由複數絲狀單體相互交織或編織而組成,因每單一根絲狀單體(如絲狀金屬線)的線徑粗細度受到目前加工機械及材料限制而無法變更細,所以使得該複數根絲狀單體全部相互交織(或編織)組成的網格體(或編織網)的整體厚度並無法再降低,所以現有網格體與編織網同樣也是無法應用於極薄型化的均溫板結構上。 便退而求其次,則改用毛細力較差的所述溝槽,而所述溝槽主要是在均溫板之殼壁面透過機械加工等方式開設形成,藉此作為毛細結構使用,但卻延伸出另一問題,就是在該均溫板內開設溝槽勢必會造成該均溫板的殼壁變薄,不僅會影響整體結構強度,且還會造成殼壁破裂的情事發生,進而導致其內工作液體外漏而失去均溫散熱效果,因設置溝槽將令殼壁變薄進而降低了整體結構強度,若再對該均溫版進行彎折捲區等工作時,則容易由設置該溝槽的位置處破裂 ,基於這些考量使得業者怯步而不敢在具有極薄殼壁的熱管或均溫板以設置溝槽作為毛細結構使用。 所以隨著極薄型化的設置,均溫板整體厚度受到相當大的限制,不僅除了管壁厚度為符合極薄型化之尺寸限制,其內部氣密腔室及內部毛細結構也必須進一步縮減,故由上述各毛細結構之使用及設置方式可知,當在進行極薄型化設計時,毛細結構的選用以及製造則成為一種難題。 故如何實現極薄型化,同時又兼具毛細力及可彎折或撓曲之特性,實為該項技藝之人士首重之改善目標。 In order to achieve a better heat transfer effect, the heat dissipation device that applies the heat exchange principle of two-phase flow in the heat dissipation field is used as the heat conduction element. Among them, the vapor chamber and the heat pipe are the most popular, and the vapor chamber and the heat pipe are the two-phase flow heat exchange. In principle, a material with better thermal conductivity must be used as the main structure of the vapor chamber and heat pipe. Among them, copper is the most common. The inside of the main body must have a vacuum air-tight chamber and the inner surface of the chamber is provided with capillary structures and fillers. There is a working liquid, so that the two-phase flow (vapor and liquid) circulates inside the vacuum airtight chamber by reducing the boiling point of the working liquid in a vacuum environment, thereby providing better heat conduction efficiency. In the prior art, a capillary structure is arranged on at least one plate body, and then the main body is covered with another plate body, and then the main body is subjected to edge sealing, water filling (liquid working fluid) and vacuuming and other operations. , and then constitute the above-mentioned vapor chamber; the aforementioned capillary structure in the vapor chamber is mainly used as the liquid working fluid to flow back from the condensation zone to the evaporation zone and to store the liquid working fluid in the evaporation zone, and the capillary structure is usually It can be used as a structure that can provide capillary force in the form of sintered body, mesh body, fiber body, groove, etc. The sintered body is mainly covered with metal powder on one side of the plate body, and then the powder is sintered and attached to the plate body by sintering to form a porous capillary structure. The sintered body formed by sintering The capillary structure of the type is the capillary structure with the best capillary force, and the sintering work must heat the adjacent powders to a semi-solid state to connect the powders to each other and form a capillary structure with porous characteristics. The capillary structure of the powder can maintain the characteristics of porosity, so the particle size of the sintered powder has a certain limit, because when the particle size of the sintered powder is too small, the powders will be sintered and melted and have almost no pores between each other, so that it cannot be formed. Porous capillary structure, that is, the capillary structure cannot provide capillary force. In this way, the particle size of the sintered powder used in the existing sintered body cannot be too fine, so that in the capillary structure formed by the existing sintering method, the sintered powder must be selected to have a moderate particle size in order to form particles between the particles. Pores and have the effect of capillary force, but the thickness of the sintered structure will also increase accordingly, which means that the existing sintered body cannot be applied to the extremely thin vapor chamber structure. In addition, the existing vapor chambers using sintered bodies cannot be bent (bent) or flexed. After the vapor chambers are bent (bent), the sintered bodies in the chamber will be damaged and fall off and collapse, resulting in the plate The capillary structure on the body is disabled and loses the effect of temperature uniformity and heat dissipation. Therefore, in order to solve the above-mentioned problem that the existing sintered body cannot be used in the ultra-thin vapor chamber structure, the industry has turned to the groove with poor capillary force in the capillary structure, or the capillary force in the capillary structure is inferior to that of the sintered powder. Try to use the mesh body or woven mesh. Although the mesh body or woven mesh is convenient to set up and can be used for the parts that need to be bent, the mesh body or woven mesh must be installed in the temperature equalizing plate. The working fluid can be diffused by capillary action in the mesh body or woven mesh, but when the mesh body or woven mesh is not completely attached or laid on the surface of the shell or tube wall When the gap is formed, the gap can not provide the capillary force to supply the working liquid to diffuse the vapor-liquid circulation. In addition, the mesh body and the woven mesh are mainly composed of a plurality of filamentous monomers intertwined or woven, because each single The wire diameter and thickness of a filamentary monomer (such as a filamentary metal wire) cannot be changed due to the limitation of current processing machinery and materials, so the mesh body composed of all the filamentous monomers intertwined (or woven) The overall thickness of the mesh (or the woven mesh) cannot be reduced any more, so the existing mesh body and the woven mesh cannot be applied to the ultra-thin vapor chamber structure. Then the next step is to use the groove with poor capillary force, and the groove is mainly formed on the shell wall of the vapor chamber by machining, etc., so as to be used as a capillary structure, but it extends Another problem is that the opening of grooves in the temperature chamber will inevitably lead to the thinning of the shell wall of the temperature chamber, which will not only affect the overall structural strength, but also cause the shell wall to rupture, which will lead to internal damage. The working liquid leaks out and loses the heat dissipation effect of temperature uniformity. The setting of the groove will make the shell wall thinner and reduce the overall structural strength. If the uniform temperature plate is bent and rolled again, it is easy to set the groove Because of these considerations, the industry is afraid to set up grooves as capillary structures in heat pipes or vapor chambers with extremely thin shell walls. Therefore, with the ultra-thin configuration, the overall thickness of the vapor chamber is subject to considerable restrictions. Not only is the thickness of the tube wall conforming to the ultra-thin size limitation, but also its internal airtight chamber and internal capillary structure must be further reduced. Therefore, It can be seen from the use and arrangement of the above capillary structures that the selection and manufacture of capillary structures become a difficult problem when ultra-thin designs are carried out. Therefore, how to achieve ultra-thin, and at the same time have both capillary force and the characteristics of bending or flexing, is actually the most important improvement goal for those skilled in the art.

爰此,為有效解決上述之問題,本發明之主要目的,係提供一種實現薄型化並且可彎折的薄型兩相流裝置。 為達上述之目的,本發明係提供一種薄型兩相流裝置,係包含:一第一板體、一第二板體、一聚合物層; 所述第一板體具有一第一側面及一第二側面及複數凸體,該等凸體凸設於該第一側面;所述第二板體一側具有一奈米毛細層,所述奈米毛細層係由複數種不同顆粒大小的粉末混和而成並附著於該第二板體相對第一板體第一側面的一側表面;所述聚合物層選擇與前述第一、二板體其中任一結合,並所述第一、二板體與該聚合物層總厚度係為等於或小於0.25MM。 藉由本發明係可實現將散熱裝置薄型化且可彎折,同時保有內部毛細結構的毛細力,進而解決習知散熱裝置薄型化之缺失。 Therefore, in order to effectively solve the above-mentioned problems, the main purpose of the present invention is to provide a thin two-phase flow device that can achieve thinning and can be bent. In order to achieve the above object, the present invention provides a thin two-phase flow device, which comprises: a first plate body, a second plate body, and a polymer layer; The first plate body has a first side surface, a second side surface and a plurality of convex bodies, and the convex bodies are protruded on the first side surface; one side of the second plate body has a nanocapillary layer, and the The nanocapillary layer is formed by mixing a plurality of powders with different particle sizes and is attached to the side surface of the second plate body opposite to the first side surface of the first plate body; the polymer layer is selected from the first and second plates mentioned above. Any one of the body is combined, and the total thickness of the first and second plate bodies and the polymer layer is equal to or less than 0.25MM. The invention can realize the thinning and bending of the heat dissipation device, while maintaining the capillary force of the internal capillary structure, thereby solving the lack of thinning of the conventional heat dissipation device.

本發明之上述目的及其結構與功能上的特性,將依據所附圖式之較佳實施例予以說明。 請參閱第1、2圖,係為本發明之薄型兩相流裝置第一實施例之立體分解及組合剖視圖,所述薄型兩相流裝置1,係包含:一第一板體11、一第二板體12、一聚合物層13; 所述第一板體11具有一第一側面111及一第二側面112及複數凸體113,該等凸體113凸設於該第一側面111;所述第二板體12一側具有一奈米毛細層14,所述奈米毛細層14係由複數種不同顆粒大小的粉末混合而成,並吸附附著於該第二板體12相對該第一板體11之第一側面111的一側表面,所述第一、二板體11、12相互疊合共同界定一氣密腔室15,並該奈米毛細層14設置於該氣密腔室15內,並該氣密腔室15內填充有一工作液體(圖中未示)。 所述聚合物層13選擇與前述第一、二板體11、12其中任一結合,並所述薄型兩相流裝置總厚度係等於或小於0.25MM。 所述聚合物層13選擇為塗佈或印刷或黏合之方式選擇與該第一、二板體11、12其中任一的表面結合。 本實施例之散熱裝置係以均溫板作為說明實施,但並不引以為限,亦可為薄型平板熱管,本實施例之第一、二板體11、12材質係為銅、鋁、不銹鋼、商業純鈦其中任一,並該第一、二板體11、12厚度分別約為0.1MM。 所述奈米毛細層14具有複數第一粉末141及複數第二粉末142,所述第一粉末141顆粒粒徑大於該第二粉末142顆粒粒徑,所述第一、二粉末141、142混合並透過燒結、黏合、噴塗、印刷等方式形成於該第二板體12相對該第一板體11的一側,又或者奈米毛細層14透過膠體(液態狀或固態狀)將複數種不同大小顆粒的粉末黏合佈設於該第二板體12之表面,當該液態狀之膠體風乾後將會令複數種不同大小顆粒的粉末附著於該第二板體12之表面而形成該奈米毛細層14。 請參閱第3圖,係為本發明之薄型兩相流裝置之第二實施例之剖視圖,如圖所示,本實施例與前述第一實施例部分結構相同故在此將不再贅述,惟本實施例與前述第一實施例之不同處在於所述第一板體11係為複數板體11a相互疊合所組成,該等板體11a夾持所述聚合物層13組成該第一板體11,即表示該第一板體11係由複數個板體11a相互疊合而成,而該等板體11a間又設置有該聚合物層13,該聚合物層13受該等板體11a夾持疊合並封閉後結合為一體而構型成該第一板體11,反之,該第二板體12相同於前述第一板體11之結構,該聚合物層13設置於該第二板體12內部相互疊合為一體,本實施例係以前者作為說明實施,但並不引以為限。 請參閱第4圖,係為本發明之薄型兩相流裝置之第三實施例之剖視圖,如圖所示,本實施例與前述第一實施例部分結構相同故在此將不再贅述,惟本實施例與前述第一實施例之不同處在於該等凸體113係由所述第二側面112向該第一側面111凹陷後凸伸出該第一側面111,並選擇接觸或不接觸該奈米毛細層14。 請參閱第5圖,係為本發明之薄型兩相流裝置之第四實施例之剖視圖,如圖所示,本實施例與前述第一實施例部分結構相同故在此將不再贅述,惟本實施例與前述第一實施例之不同處在於本實施例更具有一親水層2,所述親水層2係選擇設於前述第一板體11之第一側面111或該第二板體12相對該第一板體11之第一側面111之一側或所述奈米毛細層14表面。 當然亦可同時於前述第一板體11之第一側面111及該第二板體12相對該第一板體11之第一側面111之一側及所述奈米毛細層14表面同時設置該親水層2,本實施例係以由其中任一部位擇其一設置,但並不引以為限。 本案主要係為提供一種薄型兩相流裝置,尤其為均溫板或扁平熱管,由於先前技術所應用之各種毛細結構當應用在薄型化時皆會受到限制,進而無法順利令該均溫板及扁平熱管順利薄型化,故本案改善了均溫板及熱管在薄型化製程中毛細結構無法薄型化產生之缺失,順利將複數種不同粒徑的粉末混合後,再透過噴塗、黏合、沾黏、印刷、靜電吸附等方式設置於薄型板體上,藉此除了縮減了毛細結構之厚度達到薄型化之效果外,同時仍保有毛細力以及令該薄型兩相流裝置具有可彎折之功效,故實現了保留毛細力最佳的多孔性粉末毛細結構,同時再搭配聚合物層13之設計,可達成毛細結構薄型化之效果且受彎折後亦不破壞毛細結構之毛細力,並兼具彎折撓曲的特性,進而令散熱裝置整體可大幅薄型化甚至可達到整體厚度到達等於或小於0.25MM,則本發明改良了傳統習知毛細結構無法薄型化的缺失,透過改良的技術手段及結構進一步達到傳統習知所無法製造成型的結構者。 The above-mentioned objects of the present invention and their structural and functional characteristics will be described with reference to the preferred embodiments of the accompanying drawings. Please refer to Figures 1 and 2, which are three-dimensional exploded and combined cross-sectional views of the first embodiment of the thin two-phase flow device of the present invention. The thin two-phase flow device 1 includes: a first plate body 11, a first Two plate bodies 12, a polymer layer 13; The first plate body 11 has a first side surface 111, a second side surface 112 and a plurality of protrusions 113, the protrusions 113 are protruded from the first side surface 111; one side of the second plate body 12 has a The nanocapillary layer 14 is formed by mixing a plurality of powders with different particle sizes, and is adsorbed and attached to a side of the second plate 12 opposite to the first side 111 of the first plate 11 . On the side surface, the first and second plates 11 and 12 overlap each other to define an airtight chamber 15 , and the nanocapillary layer 14 is disposed in the airtight chamber 15 and inside the airtight chamber 15 Filled with a working liquid (not shown). The polymer layer 13 is selected to be combined with any one of the first and second plate bodies 11 and 12, and the total thickness of the thin two-phase flow device is equal to or less than 0.25MM. The polymer layer 13 is selected to be combined with the surface of any one of the first and second plate bodies 11 and 12 by coating, printing or bonding. The heat dissipating device in this embodiment is implemented with a temperature equalizing plate as an illustration, but it is not limited, and can also be a thin plate heat pipe. The first and second plate bodies 11 and 12 in this embodiment are made of copper, aluminum, Either stainless steel or commercial pure titanium, and the thicknesses of the first and second plate bodies 11 and 12 are respectively about 0.1MM. The nanocapillary layer 14 has a plurality of first powders 141 and a plurality of second powders 142, the particle size of the first powder 141 is larger than the particle size of the second powder 142, and the first and second powders 141 and 142 are mixed And formed on the side of the second plate body 12 opposite to the first plate body 11 by sintering, bonding, spraying, printing, etc., or the nano-capillary layer 14 passes through a colloid (liquid or solid) The powders of different sizes are adhered and arranged on the surface of the second plate body 12 , when the liquid colloid is air-dried, a plurality of powders of different size particles will be attached to the surface of the second plate body 12 to form the nanocapillary Layer 14. Please refer to FIG. 3, which is a cross-sectional view of the second embodiment of the thin two-phase flow device of the present invention. As shown in the figure, the structure of this embodiment is the same as that of the first embodiment, so it will not be repeated here. The difference between this embodiment and the aforementioned first embodiment is that the first plate body 11 is composed of a plurality of plate bodies 11a superimposed on each other, and the plate bodies 11a sandwich the polymer layer 13 to form the first plate The body 11 means that the first plate body 11 is formed by overlapping a plurality of plate bodies 11a, and the polymer layer 13 is arranged between the plate bodies 11a, and the polymer layer 13 is supported by the plate bodies. 11a is sandwiched, stacked and closed to form the first plate body 11. On the contrary, the second plate body 12 has the same structure as the first plate body 11. The polymer layer 13 is disposed on the second plate body 11. The insides of the plate bodies 12 are superimposed and integrated with each other. This embodiment is implemented as an illustration of the former, but it is not limited thereto. Please refer to FIG. 4 , which is a cross-sectional view of the third embodiment of the thin two-phase flow device of the present invention. As shown in the figure, the structure of this embodiment is the same as that of the first embodiment, so it will not be repeated here. The difference between this embodiment and the aforementioned first embodiment is that the protruding bodies 113 are recessed from the second side surface 112 to the first side surface 111 and then protrude out of the first side surface 111 , and are selected to contact or not contact the first side surface 111 . Nanocapillary layer 14 . Please refer to FIG. 5, which is a cross-sectional view of the fourth embodiment of the thin two-phase flow device of the present invention. As shown in the figure, the structure of this embodiment is the same as that of the first embodiment, so it will not be repeated here. The difference between this embodiment and the aforementioned first embodiment is that this embodiment further has a hydrophilic layer 2 , and the hydrophilic layer 2 is selectively disposed on the first side surface 111 of the aforementioned first plate body 11 or the second plate body 12 Opposite to one side of the first side surface 111 of the first plate body 11 or the surface of the nanocapillary layer 14 . Of course, the above-mentioned first side 111 of the first board 11 and the side of the second board 12 opposite to the first side 111 of the first board 11 and the surface of the nanocapillary layer 14 can also be provided at the same time. The hydrophilic layer 2, in this embodiment, is set by selecting any one of the positions, but it is not limited thereto. The main purpose of this case is to provide a thin two-phase flow device, especially a vapor chamber or a flat heat pipe. Since various capillary structures applied in the prior art are limited when applied in thinning, it is impossible to smoothly make the vapor chamber and the flat heat pipe. The flat heat pipe is successfully thinned, so this case improves the lack of capillary structure that cannot be thinned in the thinning process of the vaporizing plate and the heat pipe. Printing, electrostatic adsorption, etc. are arranged on the thin plate, so that in addition to reducing the thickness of the capillary structure to achieve the effect of thinning, the capillary force is still maintained and the thin two-phase flow device has the effect of being bendable, so The porous powder capillary structure with the best retention of capillary force is realized. At the same time, with the design of the polymer layer 13, the effect of thinning the capillary structure can be achieved, and the capillary force of the capillary structure will not be damaged after being bent. The characteristic of bending and bending, so that the overall thickness of the heat dissipation device can be greatly reduced, and even the overall thickness can reach equal to or less than 0.25MM. The present invention improves the traditional capillary structure that cannot be thinned. Through improved technical means and structure Further achieve a structure that cannot be manufactured by conventional knowledge.

11:第一板體 11a:板體 111:第一側面 112:第二側面 113:凸體 12:第二板體 13:聚合物層 14:奈米毛細層 141:第一粉末 142:第二粉末 15:氣密腔室 2:親水層 11: The first board body 11a: Board body 111: The first side 112: Second side 113: Convex 12: Second board body 13: Polymer layer 14: Nanocapillary layer 141: First Powder 142: Second Powder 15: Airtight Chamber 2: Hydrophilic layer

第1圖係為本發明之薄型兩相流裝置第一實施例之立體分解圖; 第2圖係為本發明之薄型兩相流裝置第一實施例之組合剖視圖; 第3圖係為本發明之薄型兩相流裝置之第二實施例之剖視圖; 第4圖係為本發明之薄型兩相流裝置之第三實施例之剖視圖; 第5圖係為本發明之薄型兩相流裝置之第四實施例之剖視圖。 Figure 1 is an exploded perspective view of the first embodiment of the thin two-phase flow device of the present invention; Fig. 2 is a combined cross-sectional view of the first embodiment of the thin two-phase flow device of the present invention; Figure 3 is a cross-sectional view of the second embodiment of the thin two-phase flow device of the present invention; FIG. 4 is a cross-sectional view of the third embodiment of the thin two-phase flow device of the present invention; FIG. 5 is a cross-sectional view of the fourth embodiment of the thin two-phase flow device of the present invention.

11:第一板體 11: The first board body

113:凸體 113: Convex

12:第二板體 12: Second board body

13:聚合物層 13: Polymer layer

14:奈米毛細層 14: Nanocapillary layer

141:第一粉末 141: First Powder

142:第二粉末 142: Second Powder

15:氣密腔室 15: Airtight Chamber

Claims (8)

一種薄型兩相流裝置,係包含: 一第一板體,具有一第一側面及一第二側面及複數凸體,該等凸體凸設於該第一側面; 一第二板體,一側具有一奈米毛細層,所述奈米毛細層係由複數種不同顆粒大小的粉末混和而成並附著於該第二板體相對該第一板體第一側面的一側表面; 一聚合物層,選擇與前述第一、二板體其中任一結合,並所述薄型兩相流裝置總厚度係為等於或小於0.25MM。 A thin two-phase flow device, comprising: a first plate body with a first side surface, a second side surface and a plurality of protrusions, the protrusions are protruded on the first side surface; A second plate with a nanocapillary layer on one side, the nanocapillary layer is formed by mixing a plurality of powders with different particle sizes and attached to the first side of the second plate opposite to the first plate one side surface; A polymer layer is selected to be combined with any one of the first and second plate bodies, and the total thickness of the thin two-phase flow device is equal to or less than 0.25MM. 如請求項第1項所述之薄型兩相流裝置,其中所述第一板體係為複數板體相互疊合所組成,該等板體夾持所述聚合物層組成該第一板體。The thin two-phase flow device according to claim 1, wherein the first plate system is composed of a plurality of plates superimposed on each other, and the plates sandwich the polymer layer to form the first plate. 如請求項第1項所述之薄型兩相流裝置,其中所述第二板體係為複數板體相互疊合所組成,該等板體夾持所述聚合物層組成該第二板體。The thin two-phase flow device according to claim 1, wherein the second plate system is composed of a plurality of plates superimposed on each other, and the plates sandwich the polymer layer to form the second plate. 如請求項第1項所述之薄型兩相流裝置,其中所述奈米毛細層具有複數第一粉末及複數第二粉末,所述第一粉末顆粒粒徑大於該第二粉末顆粒粒徑,所述第一、二粉末混合並透過燒結、黏合、噴塗、印刷等方式形成於該第二板體相對該第一板體的一側。The thin two-phase flow device according to claim 1, wherein the nanocapillary layer has a plurality of first powders and a plurality of second powders, and the particle size of the first powder is larger than the particle size of the second powder, The first and second powders are mixed and formed on the side of the second plate body opposite to the first plate body by means of sintering, bonding, spraying, printing and the like. 如請求項第1項所述之薄型兩相流裝置,其中所述聚合物層,係為透過塗佈、印刷、黏合之方式選擇成型於該第一、二板體其中任一的表面上。The thin two-phase flow device according to claim 1, wherein the polymer layer is selectively formed on the surface of any one of the first and second plates by means of coating, printing and bonding. 如請求項第1項所述之薄型兩相流裝置,其中該等凸體係由所述第二側面向該第一側面凹陷後凸伸出該第一側面。The thin two-phase flow device according to claim 1, wherein the convex systems are recessed from the second side surface to the first side surface and then protrude out of the first side surface. 如請求項第1項所述之薄型兩相流裝置,其中更具有一親水層,所述親水層係選擇設於前述第一板體之第一側面或該第二板體相對該第一板體之第一側面之一側或所述奈米毛細層表面。The thin two-phase flow device according to claim 1, further comprising a hydrophilic layer, and the hydrophilic layer is selectively disposed on the first side of the first plate body or the second plate body is opposite to the first plate One side of the first side of the body or the surface of the nanocapillary layer. 如請求項第1項所述之薄型兩相流裝置,其中所述第一、二板體相互疊合共同界定一氣密腔室,並該奈米毛細層設置於該氣密腔室內,並該氣密腔室內填充有一工作液體。The thin two-phase flow device according to claim 1, wherein the first and second plates are superimposed on each other to define an airtight chamber, and the nanocapillary layer is disposed in the airtight chamber, and the The airtight chamber is filled with a working liquid.
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