TW202216430A - Optical film with antifouling layer - Google Patents

Optical film with antifouling layer Download PDF

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TW202216430A
TW202216430A TW110125720A TW110125720A TW202216430A TW 202216430 A TW202216430 A TW 202216430A TW 110125720 A TW110125720 A TW 110125720A TW 110125720 A TW110125720 A TW 110125720A TW 202216430 A TW202216430 A TW 202216430A
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layer
antifouling layer
antifouling
optical film
film
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TW110125720A
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Chinese (zh)
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宮本幸大
梨木智剛
角田豊
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日商日東電工股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • B32B7/022Mechanical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • B32B7/023Optical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14Protective coatings, e.g. hard coatings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/18Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films

Abstract

An optical film (F) with an antifouling layer according to the present invention comprises a transparent substrate (11), a hard-coat layer (12), an inorganic oxide underlayer (13), and an antifouling layer (14), in this order. The antifouling layer (14) is a dry coating film disposed on the inorganic oxide underlayer (13). A surface (14a) of the antifouling layer (14) which is opposite to the inorganic oxide underlayer (13) has a hardness of 1.05 GPa or more at 25 DEG C as measured by a nanoindentation method.

Description

附防污層之光學膜Optical film with antifouling layer

本發明係關於一種附防污層之光學膜。The present invention relates to an optical film with an antifouling layer.

就防污性之觀點而言,於觸控面板顯示器等顯示器之圖像顯示側之外表面,例如貼合有附防污層之光學膜。附防污層之光學膜具備透明基材、及配置於該透明基材之一面側之最外表面之防污層。藉由防污層,抑制手部油脂等污染物質附著於顯示器表面,又,使附著之污染物質容易被去除。例如下述專利文獻1中記載有與此種附防污層之光學膜相關之技術。 [先前技術文獻] [專利文獻] From the viewpoint of antifouling properties, for example, an optical film with an antifouling layer is attached to the outer surface on the image display side of a display such as a touch panel display. The optical film with an antifouling layer includes a transparent substrate and an antifouling layer disposed on the outermost surface of one surface side of the transparent substrate. The antifouling layer prevents contaminants such as hand grease from adhering to the display surface, and makes it easy to remove the adhering contaminants. For example, Patent Document 1 below discloses a technique related to such an antifouling layer-attached optical film. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2020-52221號公報[Patent Document 1] Japanese Patent Laid-Open No. 2020-52221

[發明所欲解決之問題][Problems to be Solved by Invention]

使用附防污層之光學膜時,例如藉由擦拭作業去除附著於防污層之污染物質。然而,對防污層反覆進行擦拭作業會導致防污層之防污性下降,又,會導致防污層剝離。就附防污層之光學膜之防污功能之觀點而言,不希望出現防污層之防污性下降及防污層剝離。When an optical film with an antifouling layer is used, the contaminants attached to the antifouling layer are removed, for example, by wiping. However, the repeated wiping operation of the antifouling layer causes the antifouling property of the antifouling layer to decrease, and also causes the antifouling layer to peel off. From the viewpoint of the antifouling function of the antifouling layer-attached optical film, the deterioration of the antifouling property of the antifouling layer and the peeling of the antifouling layer are not desirable.

本發明提供一種適於確保防污層之耐剝離性並且抑制防污性下降的附防污層之光學膜。 [解決問題之技術手段] The present invention provides an antifouling layer-attached optical film suitable for ensuring the peeling resistance of the antifouling layer and suppressing the deterioration of the antifouling property. [Technical means to solve problems]

本發明[1]包含附防污層之光學膜,其依序具備透明基材、硬塗層、無機氧化物基底層及防污層,上述防污層係配置於上述無機氧化物基底層上之乾式塗佈膜,藉由奈米壓痕法測定上述防污層之與上述無機氧化物基底層為相反側之表面,所得之25℃下之硬度為1.05 GPa以上。The present invention [1] includes an optical film with an antifouling layer, comprising a transparent substrate, a hard coat layer, an inorganic oxide base layer and an antifouling layer in this order, and the antifouling layer is disposed on the inorganic oxide base layer For the dry coating film, the surface of the antifouling layer on the opposite side to the inorganic oxide base layer was measured by a nanoindentation method, and the obtained hardness at 25°C was 1.05 GPa or more.

本發明[2]包含如上述[1]所記載之附防污層之光學膜,其中藉由奈米壓痕法測定上述防污層之上述表面,所得之25℃下之彈性回復率與上述硬度(GPa)之積為0.8以上。The present invention [2] comprises the optical film with an antifouling layer according to the above [1], wherein the surface of the antifouling layer is measured by a nanoindentation method, and the obtained elastic recovery rate and the hardness at 25°C are obtained The product of (GPa) is 0.8 or more.

本發明[3]包含如上述[1]或[2]所記載之附防污層之光學膜,其中藉由奈米壓痕法測定上述防污層之上述表面,所得之25℃下之彈性回復率為0.76以上。The present invention [3] comprises the optical film with an antifouling layer according to the above [1] or [2], wherein the elastic recovery at 25° C. is measured on the surface of the antifouling layer by a nanoindentation method. The rate is above 0.76.

本發明[4]包含如上述[1]至[3]中任一項所記載之附防污層之光學膜,其中上述防污層具有1 nm以上25 nm以下之厚度。The present invention [4] includes the antifouling layer-attached optical film according to any one of the above [1] to [3], wherein the antifouling layer has a thickness of 1 nm or more and 25 nm or less.

本發明[5]包含如上述[1]至[4]中任一項所記載之附防污層之光學膜,其中上述無機氧化物基底層包含二氧化矽。The present invention [5] includes the optical film with an antifouling layer according to any one of the above [1] to [4], wherein the inorganic oxide base layer contains silicon dioxide.

本發明[6]包含如上述[1]至[5]中任一項所記載之附防污層之光學膜,其中上述無機氧化物基底層具有50 nm以上之厚度。The present invention [6] includes the optical film with an antifouling layer according to any one of the above [1] to [5], wherein the inorganic oxide base layer has a thickness of 50 nm or more.

本發明[7]包含如上述[1]至[6]中任一項所記載之附防污層之光學膜,其中上述硬塗層具有1 μm以上50 μm以下之厚度。 [發明之效果] The present invention [7] includes the antifouling layer-attached optical film according to any one of the above [1] to [6], wherein the hard coat layer has a thickness of 1 μm or more and 50 μm or less. [Effect of invention]

如上所述,本發明之附防污層之光學膜係於無機氧化物基底層上配置有防污層之乾式塗佈膜。此種構成適於確保附防污層之光學膜之防污層具有高接合力,因此,適於確保防污層之耐剝離性。又,對於附防污層之光學膜,藉由奈米壓痕法測定防污層之與無機氧化物基底層為相反側之表面,所得之25℃下之硬度為1.05 GPa以上。此種構成適於抵抗對防污層之擦拭作業之影響,抑制防污層之防污性下降。As described above, the optical film with antifouling layer of the present invention is a dry coating film in which the antifouling layer is disposed on the inorganic oxide base layer. Such a configuration is suitable for ensuring that the antifouling layer of the antifouling layer-attached optical film has a high bonding force, and therefore, is suitable for ensuring the peeling resistance of the antifouling layer. In addition, for the optical film with the antifouling layer, the surface of the antifouling layer on the opposite side to the inorganic oxide base layer was measured by a nanoindentation method, and the obtained hardness at 25°C was 1.05 GPa or more. Such a configuration is suitable for resisting the influence of the wiping operation of the antifouling layer, and suppressing the deterioration of the antifouling property of the antifouling layer.

如圖1所示,光學膜F作為本發明之附防污層之光學膜之一實施方式,朝向厚度方向T之一側依序具備透明基材11、硬塗層12、無機氧化物基底層13及防污層14。於本實施方式中,光學膜F朝向厚度方向T之一側依序具備具備透明基材11、硬塗層12、密接層15、無機氧化物基底層13及防污層14。又,光學膜F具有於與厚度方向T正交之方向(面方向)上擴展之形狀。As shown in FIG. 1 , as an embodiment of the optical film with antifouling layer of the present invention, the optical film F includes a transparent substrate 11 , a hard coat layer 12 , and an inorganic oxide base layer in this order toward one side in the thickness direction T 13 and antifouling layer 14. In the present embodiment, the optical film F includes a transparent substrate 11 , a hard coat layer 12 , an adhesive layer 15 , an inorganic oxide base layer 13 , and an antifouling layer 14 in this order toward one side in the thickness direction T. As shown in FIG. Moreover, the optical film F has the shape which spreads in the direction (plane direction) orthogonal to the thickness direction T.

透明基材11係具有可撓性之透明樹脂膜。作為透明基材11之材料,例如可例舉聚酯樹脂、聚烯烴樹脂、聚苯乙烯樹脂、丙烯酸樹脂、聚碳酸酯樹脂、聚醚碸樹脂、聚碸樹脂、聚醯胺樹脂、聚醯亞胺樹脂、纖維素樹脂、降莰烯樹脂、聚芳酯樹脂及聚乙烯醇樹脂。作為聚酯樹脂,例如可例舉聚對苯二甲酸乙二酯(PET)、聚對苯二甲酸丁二酯、及聚萘二甲酸乙二酯。作為聚烯烴樹脂,例如可例舉聚乙烯、聚丙烯及環烯烴聚合物(COP)。作為纖維素樹脂,例如可例舉三乙醯纖維素(TAC)。該等材料可單獨使用,亦可併用兩種以上。作為透明基材11之材料,就透明性及強度之觀點而言,可使用選自由聚酯樹脂、聚烯烴樹脂、及纖維素樹脂所組成之群中之一種,更佳為使用選自由PET、COP、及TAC所組成之群中之一種。The transparent substrate 11 is a flexible transparent resin film. As the material of the transparent substrate 11, for example, polyester resin, polyolefin resin, polystyrene resin, acrylic resin, polycarbonate resin, polyether resin, polyamide resin, polyamide resin, polyamide resin can be mentioned. Amine resin, cellulose resin, norbornene resin, polyarylate resin and polyvinyl alcohol resin. As polyester resin, polyethylene terephthalate (PET), polybutylene terephthalate, and polyethylene naphthalate are mentioned, for example. As a polyolefin resin, polyethylene, a polypropylene, and a cycloolefin polymer (COP) are mentioned, for example. As a cellulose resin, triacetyl cellulose (TAC) is mentioned, for example. These materials may be used alone or in combination of two or more. As the material of the transparent base material 11, from the viewpoint of transparency and strength, one selected from the group consisting of polyester resin, polyolefin resin, and cellulose resin can be used, and it is more preferable to use one selected from PET, One of the groups consisting of COP and TAC.

亦可對透明基材11之硬塗層12側表面進行表面改質處理。作為表面改質處理,例如可例舉電暈處理、電漿處理、臭氧處理、底塗處理、輝光處理、及偶合劑處理。Surface modification treatment may also be performed on the side surface of the hard coat layer 12 of the transparent substrate 11 . As the surface modification treatment, for example, corona treatment, plasma treatment, ozone treatment, primer treatment, glow treatment, and coupling agent treatment may be mentioned.

就強度之觀點而言,透明基材11之厚度較佳為5 μm以上,更佳為10 μm以上,進而較佳為20 μm以上。就操作性之觀點而言,透明基材11之厚度較佳為300 μm以下,更佳為200 μm以下。From the viewpoint of strength, the thickness of the transparent substrate 11 is preferably 5 μm or more, more preferably 10 μm or more, and still more preferably 20 μm or more. From the viewpoint of workability, the thickness of the transparent base material 11 is preferably 300 μm or less, and more preferably 200 μm or less.

透明基材11之全光線透過率(JIS K 7375-2008)較佳為80%以上,更佳為90%以上,進而較佳為95%以上。於觸控面板顯示器等顯示器之表面具備光學膜F情形時,此種構成適於確保對該光學膜F要求之透明性。透明基材11之全光線透過率例如為100%以下。The total light transmittance (JIS K 7375-2008) of the transparent substrate 11 is preferably 80% or more, more preferably 90% or more, and still more preferably 95% or more. When the optical film F is provided on the surface of a display such as a touch panel display, such a configuration is suitable for ensuring the transparency required for the optical film F. The total light transmittance of the transparent substrate 11 is, for example, 100% or less.

硬塗層12配置於透明基材11之厚度方向T之一面上。硬塗層12係用以使光學膜F之露出表面(圖1中為上表面)不易形成擦傷之層。The hard coat layer 12 is arranged on one surface in the thickness direction T of the transparent substrate 11 . The hard coat layer 12 is used to make the exposed surface (the upper surface in FIG. 1 ) of the optical film F difficult to form scratches.

硬塗層12係硬化性樹脂組合物之硬化物。作為硬化性樹脂組合物所含有之硬化性樹脂,例如可例舉聚酯樹脂、丙烯酸樹脂、胺基甲酸酯樹脂、胺基甲酸酯丙烯酸酯樹脂、醯胺樹脂、聚矽氧樹脂、環氧樹脂、及三聚氰胺樹脂。該等硬化性樹脂可單獨使用,亦可併用兩種以上。就確保硬塗層12之高硬度之觀點而言,作為硬化性樹脂,較佳為使用胺基甲酸酯丙烯酸酯樹脂。The hard coat layer 12 is a cured product of the curable resin composition. Examples of the curable resin contained in the curable resin composition include polyester resins, acrylic resins, urethane resins, urethane acrylate resins, amide resins, polysiloxane resins, cyclic resins Oxygen resin, and melamine resin. These curable resins may be used alone or in combination of two or more. From the viewpoint of securing high hardness of the hard coat layer 12, it is preferable to use a urethane acrylate resin as the curable resin.

又,作為硬化性樹脂組合物,例如可例舉紫外線硬化型樹脂組合物、及熱硬化型樹脂組合物。作為硬化性樹脂組合物,較佳為使用紫外線硬化型樹脂組合物,因其無須進行高溫加熱便可硬化,故而有助於提昇光學膜F之製造效率。紫外線硬化型樹脂組合物包括選自由紫外線硬化型單體、紫外線硬化型低聚物、及紫外線硬化型聚合物所組成之群中之至少一種。作為紫外線硬化型樹脂組合物之具體例,可例舉日本專利特開2016-179686號公報所記載之硬塗層形成用組合物。Moreover, as a curable resin composition, an ultraviolet curable resin composition and a thermosetting resin composition are mentioned, for example. As a curable resin composition, it is preferable to use an ultraviolet curable resin composition, and since it can harden|cure without high temperature heating, it contributes to the improvement of the manufacturing efficiency of the optical film F. The UV-curable resin composition includes at least one selected from the group consisting of UV-curable monomers, UV-curable oligomers, and UV-curable polymers. As a specific example of an ultraviolet curable resin composition, the composition for hard-coat layer formation described in Unexamined-Japanese-Patent No. 2016-179686 is mentioned.

硬化性樹脂組合物亦可含有微粒子。於硬化性樹脂組合物中調配微粒子,有助於調整硬塗層12之硬度、表面粗糙度、折射率,以及對硬塗層12賦予防眩性。作為微粒子,例如可例舉金屬氧化物粒子、玻璃粒子及有機粒子。作為金屬氧化物粒子之材料,例如可例舉氧化矽、氧化鋁、氧化鈦、氧化鋯、氧化鈣、氧化錫、氧化銦、氧化鎘、及氧化銻。作為有機粒子之材料,例如可例舉聚甲基丙烯酸甲酯、聚苯乙烯、聚胺基甲酸酯、丙烯酸系樹脂-苯乙烯共聚物、苯并胍胺、三聚氰胺、及聚碳酸酯。The curable resin composition may contain fine particles. The preparation of fine particles in the curable resin composition helps to adjust the hardness, surface roughness, and refractive index of the hard coat layer 12 , and to impart anti-glare properties to the hard coat layer 12 . As the fine particles, for example, metal oxide particles, glass particles, and organic particles may be mentioned. As the material of the metal oxide particles, for example, silicon oxide, aluminum oxide, titanium oxide, zirconium oxide, calcium oxide, tin oxide, indium oxide, cadmium oxide, and antimony oxide can be mentioned. As a material of an organic particle, polymethyl methacrylate, polystyrene, polyurethane, acrylic resin-styrene copolymer, benzoguanamine, melamine, and polycarbonate are mentioned, for example.

為了確保硬塗層12之硬度從而以此確保防污層14表面之硬度,硬塗層12之厚度較佳為1 μm以上,更佳為3 μm以上,進而較佳為5 μm以上。就確保光學膜F之柔軟性之觀點而言,硬塗層12之厚度較佳為50 μm以下,更佳為40 μm以下,進而較佳為35 μm以下,尤其較佳為30 μm以下。In order to ensure the hardness of the hard coat layer 12 and thus the hardness of the surface of the antifouling layer 14, the thickness of the hard coat layer 12 is preferably 1 μm or more, more preferably 3 μm or more, and more preferably 5 μm or more. From the viewpoint of securing the flexibility of the optical film F, the thickness of the hard coat layer 12 is preferably 50 μm or less, more preferably 40 μm or less, still more preferably 35 μm or less, and particularly preferably 30 μm or less.

亦可對硬塗層12之密接層15側表面進行表面改質處理。作為表面改質處理,例如可例舉電漿處理、電暈處理、臭氧處理、底塗處理、輝光處理、及偶合劑處理。為了於硬塗層12與密接層15之間確保高密接力,較佳為對硬塗層12之密接層15側表面進行電漿處理。Surface modification treatment may also be performed on the side surface of the adhesive layer 15 of the hard coat layer 12 . As the surface modification treatment, for example, plasma treatment, corona treatment, ozone treatment, primer treatment, glow treatment, and coupling agent treatment may be mentioned. In order to ensure high adhesion between the hard coat layer 12 and the adhesive layer 15 , it is preferable to perform plasma treatment on the side surface of the adhesive layer 15 of the hard coat layer 12 .

密接層15係用以確保無機氧化物層(於本實施方式中為無機氧化物基底層13)對於透明基材11之密接力的層。密接層15配置於硬塗層12之厚度方向T之一面上。作為密接層15之材料,例如可例舉矽、銦、鎳、鉻、鋁、錫、金、銀、鉑、鋅、鈦、鎢、鋯、鈀等金屬、該等金屬之2種以上之合金、及該等金屬之氧化物。為了兼具對於有機層(具體而言為硬塗層12)及無機氧化物層(於本實施方式中,具體而言為無機氧化物基底層13)雙方之密接性、以及密接層15之透明性,作為密接層15之材料,較佳為使用銦錫氧化物(ITO)或氧化矽(SiOx)。於使用氧化矽作為密接層15之材料之情形時,較佳為使用氧量少於化學計量組成之SiOx,更佳為使用x為1.2以上1.9以下之SiOx。The adhesion layer 15 is a layer for ensuring the adhesion of the inorganic oxide layer (in this embodiment, the inorganic oxide base layer 13 ) to the transparent substrate 11 . The adhesion layer 15 is arranged on one surface in the thickness direction T of the hard coat layer 12 . Examples of the material of the adhesion layer 15 include metals such as silicon, indium, nickel, chromium, aluminum, tin, gold, silver, platinum, zinc, titanium, tungsten, zirconium, and palladium, and alloys of two or more of these metals. , and oxides of these metals. In order to have both adhesiveness to both the organic layer (specifically, the hard coat layer 12 ) and the inorganic oxide layer (specifically, the inorganic oxide base layer 13 in this embodiment), and the transparency of the adhesive layer 15 As the material of the adhesion layer 15, indium tin oxide (ITO) or silicon oxide (SiOx) is preferably used. When silicon oxide is used as the material of the adhesion layer 15, it is preferable to use SiOx whose oxygen content is less than the stoichiometric composition, and it is more preferable to use SiOx whose x is 1.2 or more and 1.9 or less.

為了確保硬塗層12與無機氧化物基底層13之間之密接力,同時實現密接層15之透明性,密接層15之厚度較佳為1 nm以上10 nm以下。In order to ensure the adhesion between the hard coat layer 12 and the inorganic oxide base layer 13 and to achieve the transparency of the adhesion layer 15, the thickness of the adhesion layer 15 is preferably 1 nm or more and 10 nm or less.

無機氧化物基底層13係用以於防污層14中確保耐剝離性之層。作為無機氧化物基底層13之材料,例如可例舉二氧化矽(SiO 2)及氟化鎂,較佳為使用二氧化矽。 The inorganic oxide base layer 13 is a layer for securing peeling resistance in the antifouling layer 14 . As the material of the inorganic oxide base layer 13 , for example, silicon dioxide (SiO 2 ) and magnesium fluoride can be exemplified, and silicon dioxide is preferably used.

就確保防污層14之耐剝離性之觀點而言,無機氧化物基底層13之厚度較佳為50 nm以上,更佳為65 nm以上,進而較佳為80 nm以上,尤其較佳為90 nm以上。無機氧化物基底層13之厚度例如為300 nm以下。From the viewpoint of ensuring the peeling resistance of the antifouling layer 14, the thickness of the inorganic oxide base layer 13 is preferably 50 nm or more, more preferably 65 nm or more, more preferably 80 nm or more, particularly preferably 90 nm or more. nm and above. The thickness of the inorganic oxide base layer 13 is, for example, 300 nm or less.

防污層14係具有防污功能之層。防污層14配置於無機氧化物基底層13之厚度方向T之一面上。防污層14於厚度方向T之一側具有表面14a(外表面)。防污層14之防污功能包括抑制使用光學膜F時手部油脂等污染物質附著於膜露出面之功能,以及使附著之污染物質容易被去除之功能。The antifouling layer 14 is a layer having an antifouling function. The antifouling layer 14 is disposed on one surface in the thickness direction T of the inorganic oxide base layer 13 . The antifouling layer 14 has a surface 14a (outer surface) on one side in the thickness direction T. As shown in FIG. The antifouling function of the antifouling layer 14 includes a function of preventing contaminants such as hand grease from adhering to the exposed surface of the film when the optical film F is used, and a function of making the adhered contaminants easily removed.

作為作為防污層14之材料,例如可例舉含氟基之有機化合物。作為含氟基之有機化合物,較佳為使用具有全氟聚醚基之烷氧基矽烷化合物。作為具有全氟聚醚基之烷氧基矽烷化合物,例如可例舉下述通式(1)所示之化合物。As a material of the antifouling layer 14, a fluorine group-containing organic compound can be mentioned, for example. As the organic compound containing a fluorine group, an alkoxysilane compound having a perfluoropolyether group is preferably used. As an alkoxysilane compound which has a perfluoropolyether group, the compound represented by following general formula (1) is mentioned, for example.

R 1-R 2-X-(CH 2) m-Si(OR 3) 3(1) R 1 -R 2 -X-(CH 2 ) m -Si(OR 3 ) 3 (1)

通式(1)中,R 1表示烷基中之一個以上之氫原子被氟原子取代之直鏈狀或支鏈狀之氟化烷基(碳數為例如1以上20以下),較佳為表示烷基之所有氫原子被氟原子取代之全氟烷基。 In the general formula (1), R 1 represents a linear or branched fluorinated alkyl group in which one or more hydrogen atoms in the alkyl group are substituted with a fluorine atom (the number of carbon atoms is, for example, 1 to 20), preferably Represents a perfluoroalkyl group in which all hydrogen atoms of an alkyl group are replaced by fluorine atoms.

R 2表示包含至少一個全氟聚醚(PFPE)基之重複結構的結構,較佳為表示包含兩個PFPE基之重複結構的結構。作為PFPE基之重複結構,例如可例舉直鏈狀PFPE基之重複結構及支鏈狀PFPE基之重複結構。作為直鏈狀PFPE基之重複結構,例如可例舉-(OC nF 2n) p-所示之結構(n表示1以上20以下之整數,p表示1以上50以下之整數。下同)。作為支鏈狀PFPE基之重複結構,例如可例舉-(OC(CF 3) 2) p-所示之結構及-(OCF 2CF(CF 3)CF 2) p-所示之結構。作為PFPE基之重複結構,較佳為可例舉直鏈狀PFPE基之重複結構,更佳為可例舉-(OCF 2) p-及-(OC 2F 4) p-。 R 2 represents a structure containing a repeating structure of at least one perfluoropolyether (PFPE) group, preferably a structure containing a repeating structure containing two PFPE groups. As a repeating structure of a PFPE group, the repeating structure of a linear PFPE group and the repeating structure of a branched PFPE group are mentioned, for example. The repeating structure of the linear PFPE group may, for example, be the structure represented by -(OC n F 2n ) p - (n represents an integer of 1 or more and 20 or less, and p represents an integer of 1 or more and 50 or less. The same applies hereinafter). Examples of the repeating structure of the branched PFPE group include a structure represented by -(OC(CF 3 ) 2 ) p - and a structure represented by -(OCF 2 CF(CF 3 )CF 2 ) p -. As the repeating structure of the PFPE group, the repeating structure of the linear PFPE group is preferably exemplified, and -(OCF 2 ) p - and -(OC 2 F 4 ) p - are more preferred.

R 3表示碳數1以上4以下烷基,較佳為表示甲基。 R 3 represents an alkyl group having 1 to 4 carbon atoms, preferably a methyl group.

X表示醚基、羰基、胺基或醯胺基,較佳為表示醚基。X represents an ether group, a carbonyl group, an amino group or an amide group, preferably an ether group.

m表示1以上之整數。又,m表示較佳為20以下、更佳為10以下、進而較佳為5以下之整數。m represents an integer of 1 or more. Moreover, m represents an integer which is preferably 20 or less, more preferably 10 or less, and still more preferably 5 or less.

此種具有全氟聚醚基之烷氧基矽烷化合物中,較佳為使用下述通式(2)所示之化合物。Among the alkoxysilane compounds having such a perfluoropolyether group, those represented by the following general formula (2) are preferably used.

CF 3-(OCF 2) q-(OC 2F 4) r-O-(CH 2) 3-Si(OCH 3) 3(2) CF 3 -(OCF 2 ) q -(OC 2 F 4 ) r -O-(CH 2 ) 3 -Si(OCH 3 ) 3 (2)

通式(2)中,q表示1以上50以下之整數,r表示1以上50以下之整數。In the general formula (2), q represents an integer of 1 or more and 50 or less, and r represents an integer of 1 or more and 50 or less.

又,具有全氟聚醚基之烷氧基矽烷化合物可單獨使用,亦可併用兩種以上。Moreover, the alkoxysilane compound which has a perfluoropolyether group may be used individually, and may use 2 or more types together.

防污層14係藉由乾式塗佈法形成之膜(乾式塗佈膜)。作為乾式塗佈法,可例舉濺鍍法、真空蒸鍍法、及CVD(Chemical Vapor Deposition,化學氣相沈積)。防污層14較佳為藉由真空蒸鍍法形成之膜(真空蒸鍍膜)。The antifouling layer 14 is a film (dry coating film) formed by a dry coating method. As a dry coating method, a sputtering method, a vacuum vapor deposition method, and CVD (Chemical Vapor Deposition, chemical vapor deposition) are mentioned. The antifouling layer 14 is preferably a film formed by a vacuum deposition method (vacuum deposition film).

防污層14之材料含有具有全氟聚醚基之烷氧基矽烷化合物,且防污層14為乾式塗佈膜(較佳為真空蒸鍍膜),此構成適於確保防污層14對無機氧化物基底層13具有高接合力,因此適於確保防污層14之耐剝離性。防污層14之耐剝離性較高,有助於維持防污層14之防污功能。The material of the antifouling layer 14 contains an alkoxysilane compound having a perfluoropolyether group, and the antifouling layer 14 is a dry coating film (preferably a vacuum evaporation film), which is suitable for ensuring that the antifouling layer 14 is resistant to inorganic substances. The oxide base layer 13 has high bonding force, and thus is suitable for ensuring the peeling resistance of the antifouling layer 14 . The antifouling layer 14 has high peeling resistance, which helps to maintain the antifouling function of the antifouling layer 14 .

藉由奈米壓痕法測定防污層14之表面14a,所得之25℃下之硬度(表面硬度H)為1.05 GPa以上,較佳為1.1 GPa以上,更佳為1.15 GPa以上,進而較佳為1.2 GPa以上,進而更佳為1.25 GPa以上,尤其較佳為1.3 GPa以上。此種構成適於抵抗擦拭作業對防污層14之影響,抑制防污層14之防污性下降。藉由奈米壓痕法測定防污層14之表面14a,所得之25℃下之硬度(表面硬度H)較佳為30 GPa以下,更佳為20 GPa以下,進而較佳為15 GPa以下。此種構成適於確保防污層14之彎曲性,因此,適於確保光學膜F之彎曲性。The surface 14a of the antifouling layer 14 is measured by a nanoindentation method, and the obtained hardness (surface hardness H) at 25° C. is 1.05 GPa or more, preferably 1.1 GPa or more, more preferably 1.15 GPa or more, and more preferably 1.2 GPa or more, more preferably 1.25 GPa or more, particularly preferably 1.3 GPa or more. Such a configuration is suitable for resisting the influence of the wiping operation on the antifouling layer 14 and suppressing the deterioration of the antifouling property of the antifouling layer 14 . The surface 14a of the antifouling layer 14 is measured by a nanoindentation method, and the obtained hardness at 25°C (surface hardness H) is preferably 30 GPa or less, more preferably 20 GPa or less, and still more preferably 15 GPa or less. Such a configuration is suitable for securing the flexibility of the antifouling layer 14 and, therefore, suitable for securing the flexibility of the optical film F.

奈米壓痕法係以奈米級測定試樣之各種物性之技術。於本實施方式中,奈米壓痕係依照ISO14577實施。奈米壓痕法要實施將壓頭壓入設置於平台上之試樣之過程(負荷施加過程),以及於其後實施自試樣拔出壓頭之過程(負荷去除過程),一連串過程中,測定作用於壓頭-試樣間之負荷、及壓頭相對於試樣之相對位移(負荷-位移測定)。藉此,可獲得負荷-位移曲線。根據該負荷-位移曲線,可對測定試樣求出基於奈米級測定之硬度、彈性模數等物性。藉由奈米壓痕法進行之防污層表面之負荷-位移測定例如可使用奈米壓痕儀(商品名「Triboindenter」,Hysitron公司製造)。於該測定中,測定模式設為單一壓入測定,測定溫度設為25℃,使用壓頭設為Berkovich(三角錐)型金剛石壓頭,負荷施加過程中壓頭對測定試樣之最大壓入深度(最大位移H1)設為200 nm,該壓頭之壓入速度設為20 nm/秒,負荷去除過程中自測定試樣拔出壓頭之速度設為20 nm/秒。基於本測定所得之負荷-位移曲線,可獲得最大負荷Pmax(最大位移H1時作用於壓頭之負荷)、接觸投影面積Ap(最大負荷時壓頭與試樣間之接觸區域之投影面積)、及負荷去除過程後試樣表面之塑性變形量H2(壓頭離開試樣表面後維持於該試樣表面之凹部之深度)。然後,可根據最大負荷Pmax與接觸投影面積Ap計算出防污層表面之硬度(=Pmax/Ap)。又,可根據最大位移H1與塑性變形量H2計算出經歷負荷施加及其後之負荷去除後,防污層表面之後述彈性回復率(=(H1-H2)/H1)。Nanoindentation is a technique for measuring various physical properties of samples at the nanoscale. In this embodiment, the nanoindentation is implemented in accordance with ISO14577. In the nanoindentation method, the process of pressing the indenter into the sample set on the platform (load application process), and then the process of pulling out the indenter from the sample (load removal process), in a series of processes, The load acting between the indenter and the sample and the relative displacement of the indenter with respect to the sample were measured (load-displacement measurement). Thereby, a load-displacement curve can be obtained. From this load-displacement curve, physical properties such as hardness and elastic modulus by nanoscale measurement can be obtained for the measurement sample. For the load-displacement measurement of the surface of the antifouling layer by the nanoindentation method, for example, a nanoindenter (trade name "Triboindenter", manufactured by Hysitron Corporation) can be used. In this measurement, the measurement mode was set to single indentation measurement, the measurement temperature was set to 25°C, the indenter used was a Berkovich (triangular pyramid) type diamond indenter, and the maximum indenter pressed into the measurement sample during the load application process. The depth (maximum displacement H1) was set to 200 nm, the indenter's indentation speed was set to 20 nm/sec, and the speed of pulling out the indenter from the measurement sample during the load removal process was set to 20 nm/sec. Based on the load-displacement curve obtained by this measurement, the maximum load Pmax (the load acting on the indenter at the maximum displacement H1), the contact projected area Ap (the projected area of the contact area between the indenter and the sample at the maximum load), and the amount of plastic deformation H2 on the surface of the sample after the load removal process (the depth of the concave portion that the indenter maintains on the surface of the sample after it leaves the surface of the sample). Then, the hardness of the surface of the antifouling layer (=Pmax/Ap) can be calculated according to the maximum load Pmax and the contact projected area Ap. In addition, the elastic recovery rate (=(H1-H2)/H1) of the surface of the antifouling layer after load application and subsequent load removal can be calculated from the maximum displacement H1 and the plastic deformation amount H2.

作為調整防污層14之表面硬度H之方法,例如可例舉調整硬塗層12之硬度及厚度,以及調整對於防污層14而言之基底層之硬度及厚度。As a method of adjusting the surface hardness H of the antifouling layer 14 , for example, adjusting the hardness and thickness of the hard coat layer 12 and adjusting the hardness and thickness of the base layer for the antifouling layer 14 can be exemplified.

藉由奈米壓痕法測定防污層14之表面14a,所得之25℃下之彈性回復率(彈性回復率R)較佳為0.76以上,更佳為0.80以上,進而較佳為0.815以上,尤其較佳為0.85以上。此種構成適於抵抗擦拭作業對防污層14之影響,抑制防污層14之防污性下降。藉由奈米壓痕法測定防污層14之表面14a,所得之25℃下之彈性回復率(彈性回復率R)較佳為1.0以下,更佳為0.95以下。此種構成適於確保防污層14之彎曲性,因此,適於確保光學膜F之彎曲性。作為調整防污層14之彈性回復率R之方法,例如可例舉調整硬塗層12之硬度及彈性模數,以及調整對於防污層14而言之基底層之硬度及彈性模數。The surface 14a of the antifouling layer 14 is measured by a nanoindentation method, and the obtained elastic recovery rate (elastic recovery rate R) at 25° C. is preferably 0.76 or more, more preferably 0.80 or more, and more preferably 0.815 or more, especially Preferably it is 0.85 or more. Such a configuration is suitable for resisting the influence of the wiping operation on the antifouling layer 14 and suppressing the deterioration of the antifouling property of the antifouling layer 14 . The surface 14a of the antifouling layer 14 is measured by a nanoindentation method, and the obtained elastic recovery ratio (elastic recovery ratio R) at 25° C. is preferably 1.0 or less, more preferably 0.95 or less. Such a configuration is suitable for securing the flexibility of the antifouling layer 14 and, therefore, suitable for securing the flexibility of the optical film F. As a method of adjusting the elastic recovery rate R of the antifouling layer 14 , for example, adjusting the hardness and elastic modulus of the hard coat layer 12 , and adjusting the hardness and elastic modulus of the base layer for the antifouling layer 14 .

防污層14之表面硬度H(GPa)與彈性回復率R之積較佳為0.8以上,更佳為0.9以上,進而較佳為1.0以上,尤其較佳為1.1以上。此種構成適於抵抗擦拭作業對防污層14之影響,抑制防污層14之防污性下降。防污層14之表面硬度H(GPa)與彈性回復率R之積較佳為2.0以下,更佳為1.7以下,進而較佳為1.5以下。此種構成適於確保防污層14之彎曲性,因此,適於確保光學膜F之彎曲性。The product of the surface hardness H (GPa) and the elastic recovery rate R of the antifouling layer 14 is preferably 0.8 or more, more preferably 0.9 or more, still more preferably 1.0 or more, particularly preferably 1.1 or more. Such a configuration is suitable for resisting the influence of the wiping operation on the antifouling layer 14 and suppressing the deterioration of the antifouling property of the antifouling layer 14 . The product of the surface hardness H (GPa) of the antifouling layer 14 and the elastic recovery rate R is preferably 2.0 or less, more preferably 1.7 or less, and still more preferably 1.5 or less. Such a configuration is suitable for securing the flexibility of the antifouling layer 14 and, therefore, suitable for securing the flexibility of the optical film F.

防污層14之表面14a之水接觸角(純水接觸角)較佳為110°以上,較佳為111°以上,更佳為112°以上,進而較佳為113°以上,尤其較佳為114°以上。表面14a之水接觸角如此高之構成適於實現防污層14之高防污性。該水接觸角例如為130°以下。藉由於防污層14之表面14a(露出表面)形成直徑2 mm以下之水滴(純水之液滴),測定該水滴相對於表面14a之接觸角而求出水接觸角。例如藉由調整防污層14之組成、表面14a之粗糙度、硬塗層12之組成、及硬塗層12之防污層14側表面之粗糙度可調整表面14a之水接觸角。The water contact angle (pure water contact angle) of the surface 14a of the antifouling layer 14 is preferably 110° or more, preferably 111° or more, more preferably 112° or more, further preferably 113° or more, especially preferably Above 114°. The constitution that the water contact angle of the surface 14 a is so high is suitable for realizing the high antifouling property of the antifouling layer 14 . The water contact angle is, for example, 130° or less. The water contact angle was obtained by measuring the contact angle of the water droplet with respect to the surface 14a by forming a water droplet (droplet of pure water) with a diameter of 2 mm or less on the surface 14a (exposed surface) of the antifouling layer 14 . For example, the water contact angle of the surface 14a can be adjusted by adjusting the composition of the antifouling layer 14, the roughness of the surface 14a, the composition of the hard coat layer 12, and the roughness of the side surface of the antifouling layer 14 of the hard coat layer 12.

防污層14之厚度較佳為1 nm以上,更佳為3 nm以上,進而較佳為5 nm以上,尤其較佳為7 nm以上。此種構成適於實現防污層14之上述之表面硬度。防污層14之厚度較佳為25 nm以下,更佳為20 nm以下,進而較佳為18 nm以下。此種構成適於防污層14之上述水接觸角。The thickness of the antifouling layer 14 is preferably 1 nm or more, more preferably 3 nm or more, further preferably 5 nm or more, particularly preferably 7 nm or more. Such a configuration is suitable for realizing the above-mentioned surface hardness of the antifouling layer 14 . The thickness of the antifouling layer 14 is preferably 25 nm or less, more preferably 20 nm or less, and still more preferably 18 nm or less. Such a configuration is suitable for the above-mentioned water contact angle of the antifouling layer 14 .

準備透明基材11後,例如以輥對輥方式於透明基材11上依序形成硬塗層12、密接層15及防污層14,藉此可製作光學膜F。After preparing the transparent base material 11 , the optical film F can be produced by forming the hard coat layer 12 , the adhesive layer 15 , and the antifouling layer 14 on the transparent base material 11 in this order by, for example, a roll-to-roll method.

例如於透明基材11上塗佈硬化性樹脂組合物形成塗膜後,使該塗膜硬化,藉此可形成硬塗層12。於硬化性樹脂組合物含有紫外線化型樹脂之情形時,藉由照射紫外線使上述塗膜硬化。於硬化性樹脂組合物含有熱硬化型樹脂之情形時,藉由加熱使上述塗膜硬化。For example, after coating a curable resin composition on the transparent base material 11 to form a coating film, the hard coating layer 12 can be formed by curing the coating film. When the curable resin composition contains an ultraviolet ray resin, the above-mentioned coating film is cured by irradiating ultraviolet rays. When the curable resin composition contains a thermosetting resin, the coating film is cured by heating.

視需要對形成於透明基材11上之硬塗層12之露出表面進行表面改質處理。於進行電漿處理作為表面改質處理之情形時,例如使用氬氣作為惰性氣體。又,電漿處理時之放電功率例如為10 W以上,且例如為10000 W以下。The exposed surface of the hard coat layer 12 formed on the transparent substrate 11 is subjected to surface modification treatment as necessary. In the case of performing the plasma treatment as the surface modification treatment, for example, argon gas is used as the inert gas. In addition, the discharge power at the time of plasma treatment is, for example, 10 W or more, and, for example, 10,000 W or less.

藉由以乾式塗佈法成膜材料而形成無機氧化物基底層13。作為乾式塗佈法,可例舉濺鍍法、真空蒸鍍法及CVD,較佳為使用濺鍍法。The inorganic oxide base layer 13 is formed by forming a film material by a dry coating method. As a dry coating method, a sputtering method, a vacuum vapor deposition method, and CVD are mentioned, Preferably, a sputtering method is used.

濺鍍法係於濺鍍室內在真空條件下一面導入氣體,一面對配置於陰極上之靶施加負電壓。藉此,產生輝光放電,使氣體原子離子化,使該氣體離子高速碰撞靶表面,使靶材料自靶表面彈出,使彈出之靶材料沈積於規定面上。就成膜速度之觀點而言,作為濺鍍法較佳為反應性濺鍍。反應性濺鍍係使用金屬靶作為靶,使用氬氣等惰性氣體與氧氣(反應性氣體)之混合氣體作為上述氣體。藉由調整惰性氣體與氧氣之流量比(sccm),可調整成膜之無機氧化物所含之氧之比率。In the sputtering method, a gas is introduced into a sputtering chamber under vacuum conditions, and a negative voltage is applied to a target arranged on a cathode. Thereby, a glow discharge is generated, gas atoms are ionized, the gas ions collide with the target surface at a high speed, the target material is ejected from the target surface, and the ejected target material is deposited on a predetermined surface. From the viewpoint of the film formation rate, reactive sputtering is preferable as the sputtering method. In reactive sputtering, a metal target is used as a target, and a mixed gas of an inert gas such as argon and oxygen (reactive gas) is used as the gas. By adjusting the flow ratio (sccm) of the inert gas and the oxygen gas, the ratio of the oxygen contained in the inorganic oxide of the film can be adjusted.

作為用以實施濺鍍法之電源,例如可例舉DC(Direct Current,直流)電源、AC(Alternating Current,交流)電源、RF(Radio Frequency,射頻)電源、及MFAC(Medium Frequency Alternating Current,中波交流)電源(頻帶為數kHz~數MHz之AC電源)。濺鍍法之放電電壓例如為200 V以上,且例如為1000 V以下。又,實施濺鍍法之濺鍍室內之成膜氣壓較佳為0.01 Pa以上,更佳為0.05 Pa以上,進而較佳為0.1 Pa以上。此種構成適於形成材料緻密沈積之防污層14,因此較佳。又,就放電穩定性之觀點而言,成膜氣壓例如為2 Pa以下。As a power source for implementing the sputtering method, for example, a DC (Direct Current) power source, an AC (Alternating Current, alternating current) power source, an RF (Radio Frequency, radio frequency) power source, and an MFAC (Medium Frequency Alternating Current) power source can be exemplified. Wave AC) power supply (AC power supply with a frequency band of several kHz to several MHz). The discharge voltage of the sputtering method is, for example, 200 V or more and, for example, 1000 V or less. Moreover, the film-forming pressure in the sputtering chamber in which the sputtering method is performed is preferably 0.01 Pa or more, more preferably 0.05 Pa or more, and still more preferably 0.1 Pa or more. This configuration is suitable for forming the antifouling layer 14 in which the material is densely deposited, so it is preferable. In addition, from the viewpoint of discharge stability, the film-forming gas pressure is, for example, 2 Pa or less.

於無機氧化物基底層13上,例如以乾式塗佈法成膜含氟基之有機化合物,藉此形成防污層14。作為乾式塗佈法,例如可例舉真空蒸鍍法、濺鍍法及CVD,較佳為使用真空蒸鍍法。On the inorganic oxide base layer 13 , a film of an organic compound containing a fluorine group is formed by, for example, a dry coating method, thereby forming an antifouling layer 14 . As a dry coating method, a vacuum vapor deposition method, a sputtering method, and CVD are mentioned, for example, Preferably, a vacuum vapor deposition method is used.

例如可以如上方式製造光學膜F。例如經由黏著劑將透明基材11側貼合於被黏著體來使用光學膜F。作為被黏著體,例如可例舉觸控面板顯示器等顯示器之圖像顯示側配置的透明罩。For example, the optical film F can be manufactured as described above. For example, the optical film F is used by bonding the transparent base material 11 side to the adherend via an adhesive. As a to-be-adhered body, the transparent cover arrange|positioned at the image display side of displays, such as a touch panel display, is mentioned, for example.

如上所述,光學膜F中,防污層14係配置於無機氧化物基底層13上之乾式塗佈膜。此種構成適於確保光學膜F之防污層14之高接合力,因此,適於確保防污層14之耐剝離性。防污層14之耐剝離性較高,有助於維持防污層14之防污功能。As described above, in the optical film F, the antifouling layer 14 is a dry coating film disposed on the inorganic oxide base layer 13 . Such a configuration is suitable for ensuring high bonding strength of the antifouling layer 14 of the optical film F, and therefore suitable for ensuring the peeling resistance of the antifouling layer 14 . The antifouling layer 14 has high peeling resistance, which helps to maintain the antifouling function of the antifouling layer 14 .

如上所述,光學膜F中,藉由奈米壓痕法測定防污層14之表面14a(防污層14之與無機氧化物基底層13為相反側之表面),所得之25℃下之表面硬度H為1.05 GPa以上,較佳為1.1 GPa以上,更佳為1.15 GPa以上,進而較佳為1.2 GPa以上,進而更佳為1.25 GPa以上,尤其較佳為1.3 GPa以上。此種構成適於抵抗擦拭作業對防污層14之影響,抑制防污層14之防污性下降。As described above, in the optical film F, the surface 14a of the antifouling layer 14 (the surface on the opposite side of the antifouling layer 14 and the inorganic oxide base layer 13) is measured by the nanoindentation method, and the obtained surface at 25° C. The hardness H is 1.05 GPa or more, preferably 1.1 GPa or more, more preferably 1.15 GPa or more, still more preferably 1.2 GPa or more, still more preferably 1.25 GPa or more, particularly preferably 1.3 GPa or more. Such a configuration is suitable for resisting the influence of the wiping operation on the antifouling layer 14 and suppressing the deterioration of the antifouling property of the antifouling layer 14 .

另外,如上所述,光學膜F中,藉由奈米壓痕法測定防污層14之表面14a,所得之25℃下之彈性回復率R較佳為0.76以上,更佳為0.80以上,進而較佳為0.815以上,尤其較佳為0.85以上。此種構成適於抵抗擦拭作業對防污層14之影響,抑制防污層14之防污性下降。In addition, as described above, in the optical film F, the surface 14a of the antifouling layer 14 is measured by the nanoindentation method, and the obtained elastic recovery rate R at 25° C. is preferably 0.76 or more, more preferably 0.80 or more, and more 0.815 or more is preferable, and 0.85 or more is especially preferable. Such a configuration is suitable for resisting the influence of the wiping operation on the antifouling layer 14 and suppressing the deterioration of the antifouling property of the antifouling layer 14 .

進而,如上所述,光學膜F中,防污層14之表面硬度H與彈性回復率R之積較佳為0.8以上,更佳為0.9以上,進而較佳為1.0以上,尤其較佳為1.1以上。此種構成適於抵抗擦拭作業對防污層14之影響,抑制防污層14之防污性下降。Furthermore, as described above, in the optical film F, the product of the surface hardness H of the antifouling layer 14 and the elastic recovery rate R is preferably 0.8 or more, more preferably 0.9 or more, still more preferably 1.0 or more, particularly preferably 1.1 above. Such a configuration is suitable for resisting the influence of the wiping operation on the antifouling layer 14 and suppressing the deterioration of the antifouling property of the antifouling layer 14 .

如上所述,光學膜F適於確保防污層14之耐剝離性,並且抑制防污性下降。As described above, the optical film F is suitable for ensuring the peeling resistance of the antifouling layer 14 and suppressing the deterioration of the antifouling properties.

光學膜F亦可具備具有規定光學功能之層(光學功能層)。於光學功能層包含複數層之情形時,此種光學功能層之防污層14側表面之層較佳為兼作為上述無機氧化物基底層13。The optical film F may have a layer (optical function layer) having a predetermined optical function. When the optical functional layer includes a plurality of layers, the layer on the side surface of the antifouling layer 14 of the optical functional layer is preferably also used as the above-mentioned inorganic oxide base layer 13 .

圖2表示光學膜F於密接層15與防污層14之間具備光學功能層20之情形。如下所述,該光學功能層20於防污層14側表面具有兼作為無機氧化物基底層13之層。FIG. 2 shows the case where the optical film F includes the optical functional layer 20 between the adhesive layer 15 and the antifouling layer 14 . As described below, the optical functional layer 20 has a layer on the surface of the antifouling layer 14 that also serves as the inorganic oxide base layer 13 .

光學功能層20係配置於密接層15之厚度方向T之一面上。本變化例中,光學功能層20係用以抑制外界光之反射強度之抗反射層。即,於本變化例中,光學膜F係附防污層之抗反射膜。The optical functional layer 20 is disposed on one surface in the thickness direction T of the adhesive layer 15 . In this modification, the optical functional layer 20 is an anti-reflection layer used to suppress the reflection intensity of external light. That is, in this modification, the optical film F is an antireflection film with an antifouling layer attached.

光學功能層20(抗反射層)於厚度方向上交替具有折射率相對較大之高折射率層、及折射率相對較小之低折射率層。於抗反射層,藉由該層所包含之複數個薄層(高折射率層、低折射率層)之複數個界面產生之反射光間之干涉作用,使淨反射光強度衰減。又,於抗反射層,藉由調整各薄層之光學膜厚(折射率與厚度之積),可表現出使反射光強度衰減之干涉作用。於本實施方式中,具體而言,此種作為抗反射層之光學功能層20朝向厚度方向T之一側依序具有第1高折射率層21、第1低折射率層22、第2高折射率層23、兼作為上述無機氧化物基底層13之第2低折射率層24。The optical function layer 20 (anti-reflection layer) alternately has a high refractive index layer with a relatively large refractive index and a low refractive index layer with a relatively small refractive index in the thickness direction. In the anti-reflection layer, the net reflected light intensity is attenuated by the interference between the reflected light generated by the multiple interfaces of the multiple thin layers (high-refractive index layer, low-refractive index layer) contained in the layer. In addition, in the antireflection layer, by adjusting the optical film thickness (the product of the refractive index and the thickness) of each thin layer, the interference effect of attenuating the reflected light intensity can be exhibited. In this embodiment, specifically, the optical function layer 20 serving as an anti-reflection layer has a first high refractive index layer 21, a first low refractive index layer 22, a second high refractive index layer 21, and a second high refractive index layer in sequence toward one side of the thickness direction T. The refractive index layer 23 also serves as the second low refractive index layer 24 of the above-mentioned inorganic oxide base layer 13 .

第1高折射率層21及第2高折射率層23分別包含波長550 nm下之折射率較佳為1.9以上之高折射率材料。要兼具高折射率與可見光之低吸收性,作為高折射率材料,例如可例舉氧化鈮(Nb 2O 5)、氧化鈦、氧化鋯、摻錫氧化銦(ITO)、及摻銻氧化錫(ATO),較佳為使用氧化鈮。 The first high-refractive index layer 21 and the second high-refractive index layer 23 each contain a high-refractive-index material whose refractive index at a wavelength of 550 nm is preferably 1.9 or more. In order to have both high refractive index and low absorption of visible light, examples of high refractive index materials include niobium oxide (Nb 2 O 5 ), titanium oxide, zirconium oxide, tin-doped indium oxide (ITO), and antimony-doped oxide. Tin (ATO), preferably niobium oxide is used.

第1高折射率層21之光學膜厚(折射率與厚度之積)例如為20 nm以上,且例如為55 nm以下。第2高折射率層23之光學膜厚例如為60 nm以上,且例如為330 nm以下。The optical film thickness (the product of the refractive index and the thickness) of the first high refractive index layer 21 is, for example, 20 nm or more and, for example, 55 nm or less. The optical film thickness of the second high refractive index layer 23 is, for example, 60 nm or more and, for example, 330 nm or less.

第1低折射率層22及第2低折射率層24分別包含波長550 nm下之折射率較佳為1.6以下之低折射率材料。要兼具低折射率與可見光之低吸收性,作為低折射率材料,例如可例舉二氧化矽(SiO 2)及氟化鎂,較佳為使用二氧化矽。如上所述,SiO 2及氟化鎂亦適宜用作無機氧化物基底層13之材料。 The first low-refractive index layer 22 and the second low-refractive index layer 24 each contain a low-refractive-index material whose refractive index at a wavelength of 550 nm is preferably 1.6 or less. In order to have both low refractive index and low absorption of visible light, as the low refractive index material, for example, silicon dioxide (SiO 2 ) and magnesium fluoride can be exemplified, and silicon dioxide is preferably used. As mentioned above, SiO 2 and magnesium fluoride are also suitable as materials for the inorganic oxide base layer 13 .

第1低折射率層22之光學膜厚例如為15 nm以上,且例如為70 nm以下。第2低折射率層24之光學膜厚例如為100 nm以上,且例如為160 nm以下。The optical film thickness of the first low refractive index layer 22 is, for example, 15 nm or more and, for example, 70 nm or less. The optical film thickness of the second low refractive index layer 24 is, for example, 100 nm or more and, for example, 160 nm or less.

可藉由分別以乾式塗佈法成膜材料而形成第1高折射率層21、第1低折射率層22及第2高折射率層23。可藉由以乾式塗佈法成膜材料而形成兼作為無機氧化物基底層13之第2低折射率層24。作為乾式塗佈法,可例舉濺鍍法、真空蒸鍍法及CVD,較佳為使用濺鍍法。就成膜速度之觀點而言,作為濺鍍法,較佳為反應性濺鍍。濺鍍法之條件中,與無機氧化物基底層13之形成相關之濺鍍法之條件與上述相同。The first high refractive index layer 21 , the first low refractive index layer 22 , and the second high refractive index layer 23 can be formed by forming a film of material by a dry coating method, respectively. The second low-refractive-index layer 24 that also serves as the inorganic oxide base layer 13 can be formed by forming a material by a dry coating method. As a dry coating method, a sputtering method, a vacuum vapor deposition method, and CVD are mentioned, Preferably, a sputtering method is used. From the viewpoint of the film-forming speed, reactive sputtering is preferable as the sputtering method. Among the conditions of the sputtering method, the conditions of the sputtering method related to the formation of the inorganic oxide base layer 13 are the same as those described above.

圖2所示之光學膜F中,防污層14係配置於第2低折射率層24(無機氧化物基底層13)上之乾式塗佈膜。對於圖2所示之光學膜F,藉由奈米壓痕法測定防污層14之表面14a,所得之25℃下之硬度(表面硬度H)為1.05 GPa以上,較佳為1.1 GPa以上,更佳為1.15 GPa以上,進而較佳為1.2 GPa以上,進而更佳為1.25 GPa以上,尤其較佳為1.3 GPa以上。對於圖2所示之光學膜F,藉由奈米壓痕法測定防污層14之表面14a,所得之25℃下之彈性回復率(彈性回復率R)較佳為0.76以上,更佳為0.80以上,進而較佳為0.815以上,尤其較佳為0.85以上。圖2所示之光學膜F中,防污層14之表面硬度H(GPa)與彈性回復率R之積較佳為0.8以上,更佳為0.9以上,進而較佳為1.0以上,尤其較佳為1.1以上。此種光學膜F適於確保防污層14之耐剝離性,並且抑制防污性下降。 [實施例] In the optical film F shown in FIG. 2, the antifouling layer 14 is a dry coating film disposed on the second low refractive index layer 24 (inorganic oxide base layer 13). For the optical film F shown in FIG. 2, the surface 14a of the antifouling layer 14 is measured by a nanoindentation method, and the obtained hardness (surface hardness H) at 25°C is 1.05 GPa or more, preferably 1.1 GPa or more, more It is preferably 1.15 GPa or more, more preferably 1.2 GPa or more, still more preferably 1.25 GPa or more, and particularly preferably 1.3 GPa or more. For the optical film F shown in FIG. 2, the surface 14a of the antifouling layer 14 is measured by a nanoindentation method, and the obtained elastic recovery rate (elastic recovery rate R) at 25°C is preferably 0.76 or more, more preferably 0.80 The above, more preferably 0.815 or more, particularly preferably 0.85 or more. In the optical film F shown in FIG. 2 , the product of the surface hardness H (GPa) of the antifouling layer 14 and the elastic recovery rate R is preferably 0.8 or more, more preferably 0.9 or more, further preferably 1.0 or more, particularly preferably is 1.1 or more. Such an optical film F is suitable for securing the peeling resistance of the antifouling layer 14 and suppressing the deterioration of the antifouling properties. [Example]

以下示出實施例對本發明進行具體說明。本發明並不限定於實施例。又,以下記載之調配量(含量)、物性值、參數等具體數值可替換為上述「實施方式」中記載之與其對應之調配量(含量)、物性值、參數等相當記載之上限(定義為「以下」或「未達」之數值)或下限(定義為「以上」或「超過」之數值)。The present invention will be specifically described below with reference to Examples. The present invention is not limited to the Examples. In addition, the specific numerical values such as the compounding amount (content), physical property value, parameter, etc. described below can be replaced by the corresponding compounding amount (content), physical property value, parameter, etc. described in the above-mentioned "Embodiment". "under" or "under" value) or lower limit (defined as "above" or "over" value).

[實施例1] 首先,於作為透明基材之聚對苯二甲酸乙二酯(PET)膜(商品名「50U48」,厚度50 μm,東麗公司製造)之單面形成硬塗層(硬塗層形成步驟)。具體而言,首先,將以下成分混合而獲得混合液:紫外線硬化型單體及低聚物之混合物(包含胺基甲酸酯丙烯酸酯作為主成分)之乙酸丁酯溶液(商品名「UNIDIC17-806」,固形物成分濃度80質量%,DIC公司製造)100質量份(固形物成分換算)、光聚合起始劑(商品名「IRGACURE906」,BASF公司製造)5質量份、調平劑(商品名「GRANDICPC4100」,DIC公司製造)0.01質量份。其次,藉由添加環戊酮(CPN)與丙二醇單甲醚(PGM)之混合溶劑(CPN與PGM之質量比為45:55),將混合液之固形物成分濃度調整為36%。藉此,製備紫外線硬化性之樹脂組合物(清漆)。其次,於上述PET膜之單面塗佈樹脂組合物而形成塗膜。其次,藉由加熱使該塗膜乾燥後,藉由照射紫外線使其硬化。加熱溫度設為90℃,加熱時間設為60秒。照射紫外線時,使用高壓水銀燈作為光源,使用波長365 nm之紫外線,累計照射光量設為300 mJ/cm 2。藉此,於PET膜上形成厚度5 μm之硬塗層(HC)。 [Example 1] First, a hard coat layer (hard coat layer) was formed on one side of a polyethylene terephthalate (PET) film (trade name "50U48", thickness 50 μm, manufactured by Toray Industries, Ltd.) as a transparent substrate. coating formation step). Specifically, first, the following components were mixed to obtain a mixed solution: a butyl acetate solution (trade name "UNIDIC17- 806", solid content concentration 80% by mass, manufactured by DIC Corporation) 100 parts by mass (in terms of solid content), photopolymerization initiator (trade name "IRGACURE 906", manufactured by BASF Corporation) 5 mass parts, leveling agent (trade name "IRGACURE906", manufactured by BASF Corporation) Name "GRANDICPC4100", manufactured by DIC Corporation) 0.01 part by mass. Next, the solid content concentration of the mixed solution was adjusted to 36% by adding a mixed solvent of cyclopentanone (CPN) and propylene glycol monomethyl ether (PGM) (the mass ratio of CPN to PGM was 45:55). Thereby, an ultraviolet curable resin composition (varnish) was prepared. Next, the resin composition was applied to one side of the PET film to form a coating film. Next, after drying this coating film by heating, it hardens by irradiating an ultraviolet-ray. The heating temperature was set to 90° C., and the heating time was set to 60 seconds. When irradiating ultraviolet rays, a high-pressure mercury lamp was used as a light source, and ultraviolet rays with a wavelength of 365 nm were used, and the cumulative irradiation light amount was set to 300 mJ/cm 2 . Thereby, a hard coat layer (HC) with a thickness of 5 μm was formed on the PET film.

其次,藉由輥對輥方式之電漿處理裝置,於1.0 Pa之真空環境下對附HC層之PET膜之HC層表面進行電漿處理。該電漿處理使用氬氣作為惰性氣體,放電功率設為780 W。Next, plasma treatment was performed on the surface of the HC layer of the HC layer-attached PET film under a vacuum environment of 1.0 Pa by means of a roll-to-roll plasma treatment device. The plasma treatment used argon as the inert gas, and the discharge power was set to 780 W.

其次,於電漿處理後之附HC層之PET膜之HC層上,依序形成密接層及無機氧化物基底層(濺鍍成膜步驟)。具體而言,藉由輥對輥方式之濺鍍成膜裝置,於附HC層之PET膜之HC層上,依序形成作為密接層之厚度2.0 nm之銦錫氧化物(ITO)層、及作為無機氧化物基底層之厚度165 nm之SiO 2層。形成密接層時,使用ITO靶,使用氬氣作為惰性氣體,使用相對於氬氣100體積份為10體積份之氧氣作為反應性氣體,將放電電壓設為350 V,將成膜室內之氣壓(成膜氣壓)設為0.4 Pa,藉由MFAC濺鍍成膜ITO層。形成無機氧化物基底層時,使用Si靶,使用100體積份之氬氣及30體積份之氧氣,將放電電壓設為350 V,將成膜氣壓設為0.3 Pa,藉由MFAC濺鍍形成SiO 2層。 Next, on the HC layer of the HC layer-attached PET film after plasma treatment, an adhesion layer and an inorganic oxide base layer are sequentially formed (sputtering film forming step). Specifically, an indium tin oxide (ITO) layer with a thickness of 2.0 nm as an adhesive layer was sequentially formed on the HC layer of the HC layer-attached PET film by a roll-to-roll sputtering film forming apparatus, and A SiO 2 layer with a thickness of 165 nm as an inorganic oxide base layer. When forming the adhesive layer, an ITO target was used, argon gas was used as an inert gas, 10 parts by volume of oxygen gas was used as a reactive gas with respect to 100 parts by volume of argon gas, the discharge voltage was set to 350 V, and the pressure in the film-forming chamber ( The film forming pressure) was set to 0.4 Pa, and the ITO layer was formed by MFAC sputtering. When forming the inorganic oxide base layer, a Si target was used, 100 parts by volume of argon gas and 30 parts by volume of oxygen gas were used, the discharge voltage was set to 350 V, and the film formation pressure was set to 0.3 Pa, and SiO was formed by MFAC sputtering. 2 floors.

其次,形成防污層(防污層形成步驟)。具體而言,藉由使用含全氟聚醚基之烷氧基矽烷化合物作為蒸鍍源之真空蒸鍍法,於無機氧化物基底層上形成厚度12 nm之防污層。蒸鍍源係將信越化學工業公司製造之「KY1903-1」(含全氟聚醚基之烷氧基矽烷化合物,固形物成分濃度20質量%)乾燥所得之固形物成分。又,真空蒸鍍法之蒸鍍源之加熱溫度設為260℃。Next, an antifouling layer is formed (antifouling layer forming step). Specifically, an antifouling layer with a thickness of 12 nm was formed on the inorganic oxide base layer by a vacuum evaporation method using an alkoxysilane compound containing a perfluoropolyether group as an evaporation source. The vapor deposition source was a solid content obtained by drying "KY1903-1" (perfluoropolyether group-containing alkoxysilane compound, solid content concentration: 20 mass %) manufactured by Shin-Etsu Chemical Co., Ltd. In addition, the heating temperature of the vapor deposition source of the vacuum vapor deposition method was made into 260 degreeC.

以如上方式製作實施例1之光學膜。實施例1之光學膜朝向厚度方向一側依序具備透明基材(樹脂膜)、硬塗層、密接層、無機氧化物基底層及防污層。The optical film of Example 1 was produced in the above manner. The optical film of Example 1 includes a transparent base material (resin film), a hard coat layer, an adhesive layer, an inorganic oxide base layer, and an antifouling layer in this order toward one side in the thickness direction.

[實施例2] 將HC層之厚度改為10 μm來代替5 μm,除此以外,以與實施例1之光學膜同樣之方式製作實施例2之光學膜。 [Example 2] The optical film of Example 2 was produced in the same manner as the optical film of Example 1, except that the thickness of the HC layer was changed to 10 μm instead of 5 μm.

[實施例3] 將HC層之厚度改為10 μm來代替5 μm,且將無機氧化物基底層之厚度改為100 nm來代替165 nm,除此以外,以與實施例1之光學膜同樣之方式製作實施例3之光學膜。 [Example 3] Examples were produced in the same manner as the optical film of Example 1, except that the thickness of the HC layer was changed to 10 μm instead of 5 μm, and the thickness of the inorganic oxide base layer was changed to 100 nm instead of 165 nm 3 Optical film.

[實施例4] 將形成無機氧化物基底層時之成膜氣壓改為0.1 Pa來代替0.3 Pa,除此以外,以與實施例1之光學膜同樣之方式製作實施例4之光學膜。 [Example 4] The optical film of Example 4 was produced in the same manner as the optical film of Example 1, except that the film-forming gas pressure at the time of forming the inorganic oxide base layer was changed to 0.1 Pa instead of 0.3 Pa.

[實施例5] 將HC層之厚度改為10 μm來代替5 μm,且將形成無機氧化物基底層時之成膜氣壓改為0.1 Pa來代替0.3 Pa,除此以外,以與實施例1之光學膜同樣之方式製作實施例5之光學膜。 [Example 5] The thickness of the HC layer was changed to 10 μm instead of 5 μm, and the film-forming pressure when forming the inorganic oxide base layer was changed to 0.1 Pa instead of 0.3 Pa, except that the same procedure as the optical film of Example 1 was carried out. The optical film of Example 5 was produced in the same manner.

[實施例6] 將防污層之厚度改為8 nm來代替12 nm,除此以外,以與實施例1之光學膜同樣之方式製作實施例6之光學膜。 [Example 6] The optical film of Example 6 was produced in the same manner as the optical film of Example 1, except that the thickness of the antifouling layer was changed to 8 nm instead of 12 nm.

[實施例7] 將防污層之厚度改為6 nm來代替12 nm,除此以外,以與實施例1之光學膜同樣之方式製作實施例7之光學膜。 [Example 7] The optical film of Example 7 was produced in the same manner as the optical film of Example 1, except that the thickness of the antifouling layer was changed to 6 nm instead of 12 nm.

[實施例8] 將防污層之厚度改為16 nm來代替12 nm,除此以外,以與實施例1之光學膜同樣之方式製作實施例8之光學膜。 [Example 8] The optical film of Example 8 was produced in the same manner as the optical film of Example 1, except that the thickness of the antifouling layer was changed to 16 nm instead of 12 nm.

[實施例9] 首先,於作為透明基材之PET膜(商品名「50U48」,厚度50 μm,東麗公司製造)之單面形成硬塗層。具體而言,首先,將以下成分混合,獲得混合液:紫外線硬化型多官能丙烯酸酯樹脂(商品名「Z-850-50H-D」,固形物成分濃度44質量%,Aica Kogyo公司製造)100質量份(固形物成分換算)、光聚合起始劑(商品名「OMNIRAD2959」,BASF公司製造)4質量份、調平劑(商品名「LE-303」,共榮社化學公司製造)0.05質量份。其次,藉由向該混合液中添加甲基異丁基酮,將混合液之固形物成分濃度調整為40%。藉此,製備紫外線硬化性之樹脂組合物(清漆)。其次,於上述PET膜之單面塗佈樹脂組合物,形成塗膜。其次,藉由加熱使該塗膜乾燥後,藉由照射紫外線使其硬化。加熱溫度設為80℃,加熱時間設為60秒。照射紫外線時,使用高壓水銀燈作為光源,使用波長365 nm之紫外線,累計照射光量設為300 mJ/cm 2。藉此,於PET膜上形成厚度5 μm之硬塗層(HC)。 [Example 9] First, a hard coat layer was formed on one side of a PET film (trade name "50U48", thickness 50 μm, manufactured by Toray Industries, Ltd.) as a transparent substrate. Specifically, first, the following components were mixed to obtain a mixed solution: UV-curable polyfunctional acrylate resin (trade name "Z-850-50H-D", solid content concentration 44% by mass, manufactured by Aica Kogyo Corporation) 100 Parts by mass (in terms of solid content), 4 parts by mass of a photopolymerization initiator (trade name "OMNIRAD2959", manufactured by BASF Corporation), 0.05 mass of a leveling agent (trade name "LE-303", manufactured by Kyoeisha Chemical Co., Ltd. share. Next, by adding methyl isobutyl ketone to the mixed solution, the solid content concentration of the mixed solution was adjusted to 40%. Thereby, an ultraviolet curable resin composition (varnish) was prepared. Next, the resin composition was coated on one side of the PET film to form a coating film. Next, after drying this coating film by heating, it hardens by irradiating an ultraviolet-ray. The heating temperature was 80° C., and the heating time was 60 seconds. When irradiating ultraviolet rays, a high-pressure mercury lamp was used as a light source, and ultraviolet rays with a wavelength of 365 nm were used, and the cumulative irradiation light amount was set to 300 mJ/cm 2 . Thereby, a hard coat layer (HC) with a thickness of 5 μm was formed on the PET film.

其次,藉由輥對輥方式之電漿處理裝置,於1.0 Pa之真空環境下對附HC層之PET膜之HC層表面進行電漿處理。該電漿處理中,使用氬氣作為惰性氣體,將放電功率設為150 W。Next, plasma treatment was performed on the surface of the HC layer of the HC layer-attached PET film under a vacuum environment of 1.0 Pa by means of a roll-to-roll plasma treatment device. In this plasma treatment, argon gas was used as an inert gas, and the discharge power was set to 150 W.

其次,於電漿處理後之附HC層之PET膜之HC層上,依序形成密接層及抗反射層。具體而言,藉由輥對輥方式之濺鍍成膜裝置,於電漿處理後之附HC層之PET膜之HC層上,依序形成作為密接層之厚度1.5 nm之銦錫氧化物(ITO)層、作為第1高折射率層之厚度12 nm之Nb 2O 5層、作為第1低折射率層之厚度28 nm之SiO 2層、作為第2高折射率層之厚度100 nm之Nb 2O 5層、作為第2低折射率層之厚度85 nm之SiO 2層。形成密接層時,使用ITO靶,使用氬氣作為惰性氣體,使用相對於氬氣100體積份為10體積份之氧氣作為反應性氣體,將放電電壓設為400 V,將成膜室內之氣壓(成膜氣壓)設為0.2 Pa,藉由MFAC濺鍍成膜ITO層。形成第1高折射率層時,使用Nb靶,使用100體積份之氬氣及5體積份之氧氣,將放電電壓設為415 V,將成膜氣壓設為0.7 Pa,藉由MFAC濺鍍成膜Nb 2O 5層。形成第1低折射率層時,使用Si靶,使用100體積份之氬氣及30體積份之氧氣,將放電電壓設為350 V,將成膜氣壓設為0.7 Pa,藉由MFAC濺鍍成膜SiO 2層。形成第2高折射率層時,使用Nb靶,使用100體積份之氬氣及13體積份之氧氣,將放電電壓設為460 V,將成膜氣壓設為0.7 Pa,藉由MFAC濺鍍成膜Nb 2O 5層。形成第2低折射率層時,使用Si靶,使用100體積份之氬氣及30體積份之氧氣,將放電電壓設為340 V,將成膜氣壓設為0.7 Pa,藉由MFAC濺鍍成膜SiO 2層。以如上方式,於附HC層之PET膜之HC層上,經由密接層積層形成抗反射層(第1高折射率層、第1低折射率層、第2高折射率層、第2低折射率層)。於本實施例中,第2低折射率層為對防污層而言之無機氧化物基底層。 Next, on the HC layer of the HC layer-attached PET film after plasma treatment, an adhesive layer and an anti-reflection layer are formed in sequence. Specifically, by means of a roll-to-roll sputtering film forming apparatus, on the HC layer of the HC layer-attached PET film after plasma treatment, indium tin oxide ( ITO) layer, Nb 2 O 5 layer with a thickness of 12 nm as the first high refractive index layer, SiO 2 layer with a thickness of 28 nm as the first low refractive index layer, and a thickness of 100 nm as the second high refractive index layer Nb 2 O 5 layer, SiO 2 layer with a thickness of 85 nm as the second low refractive index layer. When forming the adhesion layer, an ITO target was used, argon gas was used as an inert gas, 10 parts by volume of oxygen gas was used as a reactive gas relative to 100 parts by volume of argon gas, the discharge voltage was set to 400 V, and the pressure in the film-forming chamber ( The film forming pressure) was set to 0.2 Pa, and the ITO layer was formed by MFAC sputtering. When forming the first high-refractive index layer, a Nb target was used, 100 parts by volume of argon gas and 5 parts by volume of oxygen gas were used, the discharge voltage was set to 415 V, and the film formation pressure was set to 0.7 Pa, and sputtered by MFAC. Membrane Nb2O5 layer. When forming the first low refractive index layer, a Si target was used, 100 parts by volume of argon gas and 30 parts by volume of oxygen gas were used, the discharge voltage was set to 350 V, and the film-forming pressure was set to 0.7 Pa, and sputtered by MFAC. film SiO 2 layer. When forming the second high refractive index layer, a Nb target was used, 100 parts by volume of argon gas and 13 parts by volume of oxygen gas were used, the discharge voltage was set to 460 V, and the film-forming gas pressure was set to 0.7 Pa, and sputtered by MFAC. Membrane Nb2O5 layer. When forming the second low refractive index layer, a Si target was used, 100 parts by volume of argon gas and 30 parts by volume of oxygen gas were used, the discharge voltage was set to 340 V, and the film-forming pressure was set to 0.7 Pa, and sputtered by MFAC. film SiO 2 layer. In the above manner, on the HC layer of the PET film with the HC layer, an anti-reflection layer (the first high refractive index layer, the first low refractive index layer, the second high refractive index layer, the second low refractive index layer) is formed through the adhesion layer. rate layer). In this embodiment, the second low refractive index layer is an inorganic oxide base layer for the antifouling layer.

其次,於形成之抗反射層上(即第2低折射率層上)形成防污層。具體而言,與實施例1中之防污層形成步驟相同。Next, an antifouling layer is formed on the formed antireflection layer (ie, on the second low refractive index layer). Specifically, the steps of forming the antifouling layer in Example 1 are the same.

以如上方式製作實施例9之光學膜。實施例9之光學膜朝向厚度方向一側依序具備透明基材(樹脂膜)、硬塗層、密接層、抗反射層(包含作為無機氧化物基底層之第2低折射率層)及防污層。The optical film of Example 9 was produced in the above manner. The optical film of Example 9 is provided with a transparent substrate (resin film), a hard coat layer, an adhesive layer, an antireflection layer (including the second low refractive index layer as an inorganic oxide base layer) and an antireflection layer in this order toward one side in the thickness direction. dirt layer.

[比較例1] 將HC層之厚度改為10 μm來代替5 μm,且將無機氧化物基底層之厚度改為30 nm來代替165 nm,除此以外,以與實施例1之光學膜同樣之方式製作比較例1之光學膜。 [Comparative Example 1] A comparative example was produced in the same manner as the optical film of Example 1, except that the thickness of the HC layer was changed to 10 μm instead of 5 μm, and the thickness of the inorganic oxide base layer was changed to 30 nm instead of 165 nm 1 Optical film.

〈防污層表面之硬度與彈性回復率〉 對於實施例1~9及比較例1之各光學膜之防污層表面,藉由奈米壓痕法進行負荷-位移測定。具體而言,首先,自光學膜切出測定試樣(5 mm×5 mm)。其次,使用奈米壓痕儀(商品名「Triboindenter」,Hysitron公司製造),依照ISO14577進行測定試樣之防污層表面之負荷-位移測定,獲得負荷-位移曲線。本測定中,測定模式設為單一壓入測定,測定溫度設為25℃,使用壓頭設為Berkovich(三角錐)型金剛石壓頭,負荷施加過程中壓頭對測定試樣之最大壓入深度(最大位移H1)設為200 nm,該壓頭之壓入速度設為20 nm/秒,負荷去除過程中壓頭自測定試樣之拔出速度設為20 nm/秒。基於所得之負荷-位移曲線,獲得最大負荷Pmax(最大位移H1時作用於壓頭之負荷)、接觸投影面積Ap(最大負荷時壓頭與試樣間之接觸區域之投影面積)、及負荷去除過程後試樣表面之塑性變形量H2(壓頭離開試樣表面後維持於該試樣表面之凹部之深度)。然後,根據最大負荷Pmax與接觸投影面積Ap,計算出防污層之表面硬度(=Pmax/Ap)。又,根據最大位移H1與塑性變形量H2,計算出經過負荷施加與其後之去除負荷後防污層表面之彈性回復率(=(H1-H2)/H1)。該等表面硬度(GPa)及彈性回復率(%)示於表1中。 <Hardness and elastic recovery rate of the surface of the antifouling layer> With respect to the antifouling layer surfaces of the optical films of Examples 1 to 9 and Comparative Example 1, load-displacement measurement was performed by a nanoindentation method. Specifically, first, a measurement sample (5 mm×5 mm) was cut out from the optical film. Next, a nanoindenter (trade name "Triboindenter", manufactured by Hysitron Corporation) was used to perform load-displacement measurement on the surface of the antifouling layer of the measurement sample in accordance with ISO14577, and a load-displacement curve was obtained. In this measurement, the measurement mode is set to single indentation measurement, the measurement temperature is set to 25°C, the indenter is set to a Berkovich (triangular pyramid) type diamond indenter, and the maximum indentation depth of the indenter to the measurement sample during the load application process (Maximum displacement H1) was set to 200 nm, the indenter’s indentation speed was set to 20 nm/sec, and the indenter’s pull-out speed from the measurement sample during the load removal process was set to 20 nm/sec. Based on the obtained load-displacement curve, obtain the maximum load Pmax (the load acting on the indenter at the maximum displacement H1), the contact projected area Ap (the projected area of the contact area between the indenter and the sample at the maximum load), and the load removal The amount of plastic deformation H2 on the surface of the sample after the process (the depth of the concave portion of the surface of the sample maintained by the indenter after it leaves the surface of the sample). Then, the surface hardness of the antifouling layer (=Pmax/Ap) was calculated according to the maximum load Pmax and the contact projected area Ap. Furthermore, from the maximum displacement H1 and the amount of plastic deformation H2, the elastic recovery rate (=(H1-H2)/H1) of the surface of the antifouling layer after the load was applied and the load was removed was calculated. These surface hardness (GPa) and elastic recovery rate (%) are shown in Table 1.

〈水接觸角〉 對於實施例1~9及比較例1之各光學膜,調查防污層表面之水接觸角。首先,藉由對光學膜之防污層表面滴加約1 μL之純水而形成水滴。其次,測定防污層表面上之水滴之表面與防污層表面所成之角度。測定時使用接觸角計(商品名「DMo-501」,協和界面科學公司製造)。將其測定結果作為初始水接觸角θ 0表示於表1中。 <Water Contact Angle> For each of the optical films of Examples 1 to 9 and Comparative Example 1, the water contact angle of the surface of the antifouling layer was investigated. First, water droplets were formed by dropping about 1 μL of pure water on the surface of the antifouling layer of the optical film. Next, the angle formed by the surface of the water droplet on the surface of the antifouling layer and the surface of the antifouling layer was measured. A contact angle meter (trade name "DMo-501", manufactured by Kyowa Interface Science Co., Ltd.) was used for the measurement. The measurement results are shown in Table 1 as the initial water contact angle θ 0 .

〈橡皮擦劃擦試驗〉 對於實施例1~9及比較例1之各光學膜,調查經過橡皮擦劃擦試驗後防污層表面之防污性下降之程度。具體而言,首先,使橡皮擦於光學膜之防污層表面往返移動進行劃擦,實施劃擦試驗(第1橡皮擦劃擦試驗)。該試驗使用Minoan公司製造之橡皮擦(Φ6 mm),將橡皮擦對防污層表面之負荷設為1 kg/6 mmΦ,將橡皮擦於防污層表面上之劃擦距離(往返移動之單程)設為20 mm,將橡皮擦之劃擦速度設為40 rpm,將橡皮擦在防污層表面往返移動之次數設為3000次往返。其次,以與初始水接觸角θ 0之測定方法相同之方法測定光學膜之防污層表面橡皮擦劃擦部位之水接觸角。將其測定結果作為第1橡皮擦劃擦試驗後之水接觸角θ 1示於表1中。 <Eraser Scratch Test> For each of the optical films of Examples 1 to 9 and Comparative Example 1, the degree to which the antifouling properties of the antifouling layer surface decreased after the eraser scratch test was investigated. Specifically, first, an eraser was moved back and forth on the surface of the antifouling layer of the optical film to scratch, and a scratch test (first eraser scratch test) was carried out. In this test, an eraser (Φ6 mm) manufactured by Minoan Company was used, the load of the eraser on the surface of the antifouling layer was set to 1 kg/6 mmΦ, and the scratching distance of the eraser on the surface of the antifouling layer (one-way reciprocating movement) ) was set to 20 mm, the scratching speed of the eraser was set to 40 rpm, and the number of times the eraser moved back and forth on the surface of the antifouling layer was set to 3000 times. Next, the water contact angle at the portion scratched by the eraser on the surface of the antifouling layer of the optical film was measured by the same method as the measurement method of the initial water contact angle θ 0 . The measurement results are shown in Table 1 as the water contact angle θ1 after the first eraser scratch test.

其次,再次使橡皮擦往返移動劃擦光學膜之防污層表面,實施劃擦試驗(第2橡皮擦劃擦試驗)。劃擦條件與第1橡皮擦劃擦試驗相同(使橡皮擦往返移動之次數設為第1橡皮擦劃擦試驗與其後之第2橡皮擦劃擦試驗合計6000次往返)。其次,以與初始水接觸角θ 0之測定方法相同之方法測定光學膜之防污層表面橡皮擦劃擦部位之水接觸角。將其測定結果作為第2橡皮擦劃擦試驗後之水接觸角θ 2示於表1中。圖3係繪製有實施例1~9及比較例1之各光學膜之表面硬度H及水接觸角θ 2之圖表。圖3之圖表中,橫軸表示表面硬度H(GPa),縱軸表示水接觸角θ 2(°)。圖3中,點圖E1~E9表示實施例1~9之測定結果,點圖C1表示比較例1之測定結果。 Next, the eraser was moved back and forth again to scratch the surface of the antifouling layer of the optical film, and a scratch test (second eraser scratch test) was performed. The scratch conditions are the same as those of the first eraser scratch test (the number of times the eraser is moved back and forth is set as a total of 6000 round trips in the first eraser scratch test and the subsequent second eraser scratch test). Next, the water contact angle at the portion scratched by the eraser on the surface of the antifouling layer of the optical film was measured by the same method as the measurement method of the initial water contact angle θ 0 . The measurement results are shown in Table 1 as the water contact angle θ2 after the second eraser scratch test. 3 is a graph in which the surface hardness H and the water contact angle θ 2 of each of the optical films of Examples 1 to 9 and Comparative Example 1 are drawn. In the graph of FIG. 3 , the horizontal axis represents the surface hardness H (GPa), and the vertical axis represents the water contact angle θ 2 (°). In FIG. 3 , the dot graphs E1 to E9 show the measurement results of Examples 1 to 9, and the dot graph C1 shows the measurement results of Comparative Example 1.

〈評估〉 實施例1~9之各光學膜與比較例1之光學膜相比,經過橡皮擦劃擦試驗(第1橡皮擦劃擦試驗、第2橡皮擦劃擦試驗)後防污層表面之水接觸角下降之程度明顯更小,因此,防污性下降明顯更少(於防污層表面,水接觸角下降越少,則防污性下降越少)。 <Evaluate> The optical films of Examples 1 to 9 are compared with the optical films of Comparative Example 1, and the water on the surface of the antifouling layer after the eraser scratch test (the first eraser scratch test, the second eraser scratch test) The degree of angular drop is significantly smaller and, therefore, the antifouling property drops significantly less (at the surface of the antifouling layer, the less the water contact angle drops, the less the antifouling property drops).

[表1]    HC層之厚度 (μm) 無機氧化物基底層 防污層 厚度 (nm) 成膜氣壓 (Pa) 厚度 (nm) 表面硬度H (GPa) 彈性回復率R (%) H×R 水接觸角θ 0(°) 水接觸角θ 1(°) 水接觸角θ 2(°) 實施例1 5 165 0.3 12 1.19 0.819 0.975 113.9 101.8 100.0 實施例2 10 165 0.3 12 1.25 0.828 1.035 114.7 101.9 101.0 實施例3 10 100 0.3 12 1.07 0.808 0.865 115.3 102.0 96.1 實施例4 5 165 0.1 12 1.29 0.861 1.111 115.1 101.5 100.8 實施例5 10 165 0.1 12 1.33 0.861 1.145 117.1 103.0 102.5 實施例6 5 165 0.3 8 1.19 0.819 0.975 115.1 101.4 100.7 實施例7 5 165 0.3 6 1.18 0.819 0.966 116.3 96.3 92.4 實施例8 5 165 0.3 16 1.19 0.819 0.975 111.7 101.1 98.5 實施例9 5 85 0.7 12 1.59 0.710 1.129 119.6 108.0 100.8 比較例1 10 30 0.3 12 1.01 0.750 0.758 115.4 83.5 70.0 [Table 1] Thickness of HC layer (μm) Inorganic oxide base layer Antifouling layer Thickness (nm) Film forming pressure (Pa) Thickness (nm) Surface hardness H (GPa) Elastic recovery rate R (%) H×R Water contact angle θ 0 (°) Water contact angle θ 1 (°) Water contact angle θ 2 (°) Example 1 5 165 0.3 12 1.19 0.819 0.975 113.9 101.8 100.0 Example 2 10 165 0.3 12 1.25 0.828 1.035 114.7 101.9 101.0 Example 3 10 100 0.3 12 1.07 0.808 0.865 115.3 102.0 96.1 Example 4 5 165 0.1 12 1.29 0.861 1.111 115.1 101.5 100.8 Example 5 10 165 0.1 12 1.33 0.861 1.145 117.1 103.0 102.5 Example 6 5 165 0.3 8 1.19 0.819 0.975 115.1 101.4 100.7 Example 7 5 165 0.3 6 1.18 0.819 0.966 116.3 96.3 92.4 Example 8 5 165 0.3 16 1.19 0.819 0.975 111.7 101.1 98.5 Example 9 5 85 0.7 12 1.59 0.710 1.129 119.6 108.0 100.8 Comparative Example 1 10 30 0.3 12 1.01 0.750 0.758 115.4 83.5 70.0

11:透明基材 12:硬塗層 13:無機氧化物基底層 14:防污層 14a:表面 15:密接層 20:光學功能層 21:第1高折射率層 22:第1低折射率層 23:第2高折射率層 24:第2低折射率層 F:光學膜(附防污層之光學膜) 11: Transparent substrate 12: Hard coating 13: Inorganic oxide base layer 14: Antifouling layer 14a: Surface 15: Adhesive layer 20: Optical functional layer 21: 1st high refractive index layer 22: 1st low refractive index layer 23: Second high refractive index layer 24: Second low refractive index layer F: Optical film (optical film with antifouling layer)

圖1係本發明之光學膜之一實施方式之剖視模式圖。 圖2係本發明之光學膜之變化例之剖視模式圖(本變化例中,光學膜具備抗反射層)。 圖3係繪製有對實施例1~9及比較例1之各光學膜測定之表面硬度H(橫軸)及第2橡皮擦劃擦試驗後之水接觸角θ 2(縱軸)之測定結果的圖表。 FIG. 1 is a schematic cross-sectional view of one embodiment of the optical film of the present invention. 2 is a schematic cross-sectional view of a modification of the optical film of the present invention (in this modification, the optical film is provided with an antireflection layer). 3 is a graph plotting the measurement results of the surface hardness H (horizontal axis) and the water contact angle θ 2 (vertical axis) after the second eraser scratch test for the optical films of Examples 1 to 9 and Comparative Example 1 chart.

11:透明基材 11: Transparent substrate

12:硬塗層 12: Hard coating

13:無機氧化物基底層 13: Inorganic oxide base layer

14:防污層 14: Antifouling layer

14a:表面 14a: Surface

15:密接層 15: Adhesive layer

F:光學膜(附防污層之光學膜) F: Optical film (optical film with antifouling layer)

Claims (7)

一種附防污層之光學膜,其依序具備透明基材、硬塗層、無機氧化物基底層及防污層, 上述防污層係配置於上述無機氧化物基底層上之乾式塗佈膜, 藉由奈米壓痕法測定上述防污層之與上述無機氧化物基底層為相反側之表面,所得之25℃下之硬度為1.05 GPa以上。 An optical film with an antifouling layer, comprising a transparent substrate, a hard coat layer, an inorganic oxide base layer and an antifouling layer in sequence, The antifouling layer is a dry coating film disposed on the inorganic oxide base layer, The surface of the antifouling layer on the opposite side to the inorganic oxide base layer was measured by a nanoindentation method, and the obtained hardness at 25° C. was 1.05 GPa or more. 如請求項1之附防污層之光學膜,其中藉由奈米壓痕法測定上述防污層之上述表面,所得之25℃下之彈性回復率與上述硬度(GPa)之積為0.8以上。The optical film with an antifouling layer according to claim 1, wherein the surface of the antifouling layer is measured by a nanoindentation method, and the product of the obtained elastic recovery rate at 25°C and the hardness (GPa) is 0.8 or more. 如請求項1之附防污層之光學膜,其中藉由奈米壓痕法測定上述防污層之上述表面,所得之25℃下之彈性回復率為0.76以上。The optical film with an antifouling layer according to claim 1, wherein the surface of the antifouling layer is measured by a nanoindentation method, and the obtained elastic recovery rate at 25°C is 0.76 or more. 如請求項1至3中任一項之附防污層之光學膜,其中上述防污層具有1 nm以上25 nm以下之厚度。The optical film with an antifouling layer according to any one of claims 1 to 3, wherein the antifouling layer has a thickness of not less than 1 nm and not more than 25 nm. 如請求項1至3中任一項之附防污層之光學膜,其中上述無機氧化物基底層包含二氧化矽。The optical film with an antifouling layer according to any one of claims 1 to 3, wherein the inorganic oxide base layer comprises silicon dioxide. 如請求項1至3中任一項之附防污層之光學膜,其中上述無機氧化物基底層具有50 nm以上之厚度。The optical film with an antifouling layer according to any one of claims 1 to 3, wherein the inorganic oxide base layer has a thickness of 50 nm or more. 如請求項1至3中任一項之附防污層之光學膜,其中上述硬塗層具有1 μm以上50 μm以下之厚度。The optical film with an antifouling layer according to any one of claims 1 to 3, wherein the hard coat layer has a thickness of 1 μm or more and 50 μm or less.
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