TW202214389A - Cutting device Capable of reducing the possibility of occurrence of cutting defects in subsequent cutting steps even if cutting defects occur temporarily - Google Patents

Abstract

To provide a cutting device capable of reducing the possibility of occurrence of cutting defects in subsequent cutting steps even if cutting defects occur temporarily. [Solution] To provide a cutting device comprising a table, a cutting unit, a camera unit, a sub table, and a control unit, wherein the control unit includes a photographing instruction unit for photographing a first cutting trace of a workpiece to obtain the cutting result image; the measuring unit obtains measured values of a plurality of measurement items that have been predetermined for the cutting traces and each has an allowable range based on the first cutting traces of the cutting result image; trimming instruction part: when the measured value of at least one of the plurality of measurement items exceeds the allowable range, the cutting insert is trimmed; and the notification part restarts cutting after trimming, and has been formed in a different place from the first cutting mark. When the measurement value of at least one measurement item of the plurality of measurement items of the second cutting traces exceeds the allowable range, the cutting device issued an alarm.

Description

Cutting device

The present invention relates to a cutting device for cutting a workpiece held by a work chuck.

There is known a cutting device in which various plate-shaped workpieces, such as semiconductor wafers, sapphire substrates, silicon carbide substrates, glass substrates, resin-encapsulated substrates, etc., are cut along the front surface of the workpieces with a cutting blade. The cutting grooves (cutting marks) are formed in the workpiece by cutting along the planned dividing line.

When the cutting trace of the workpiece after cutting is observed with a camera unit, a fine defect (crack) is usually observed. However, if a cutting defect occurs for some reason during cutting, the size of the defect may become abnormally large.

Then, a so-called tool mark inspection is performed. The tool mark inspection is performed by photographing the cutting marks at an appropriate point in the cutting, and measuring a plurality of predetermined items (for example, the width of the cutting marks, the size of the defect, etc.) The measurement is performed to automatically determine whether or not cutting defects have occurred (see, for example, Patent Document 1). prior art literature Patent Literature

Patent Document 1: Japanese Patent Laid-Open No. 2013-74198

The problem to be solved by the invention

As a result of the tool mark inspection, it is possible to request to eliminate the cause of the poor cutting when the occurrence of the poor cutting has been identified, but the operator with less experience may not eliminate the cause of the poor cutting. Indicates the continuation of cutting. However, if cutting is continued in this state, there is a fear that cutting defects will occur in all the workpieces that follow.

The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a cutting device which can reduce the possibility of occurrence of poor cutting in subsequent cutting steps even if poor cutting occurs temporarily. means of solving problems

According to an aspect of the present invention, there is provided a cutting device comprising: a work chuck for holding a workpiece; and a cutting unit having a main shaft, and a cutting insert mounted on the main shaft is used to clamp the work clamp. The workpiece held by the table is cut along the predetermined dividing line set on the workpiece; the camera unit is used to photograph the workpiece held by the work table; the auxiliary table is held for a dressing plate for dressing the cutting insert; and a control unit having a memory and a processor, The control unit includes a photographing instruction unit that causes the camera unit to photograph the first cutting marks of the workpiece that has been cut by the cutting unit to obtain a cutting result image; and a measuring unit that obtains a cutting result image based on the cutting result image For the first cutting marks, the measurement values of a plurality of measurement items that have been predetermined for the cutting marks and each have an allowable range are obtained; the trimming indicator is for at least one measurement item among the plurality of measurement items for the first cutting marks When the measured value exceeds the allowable range, the trimming plate held by the sub-table is made to trim the cutting insert; and the notification unit restarts the cutting of the workpiece after the trimming of the cutting insert , and when the measurement value of at least one measurement item of the plurality of measurement items of the second cutting mark formed at a place different from the first cutting mark exceeds the allowable range, the cutting device issues an alarm.

Preferably, the plurality of measurement items include the width of the knife mark, the size of the defect, and the area of the defect. Invention effect

In the trimming instruction part of the cutting device according to one aspect of the present invention, when the measurement value of at least one measurement item among the plurality of measurement items of the first cutting marks exceeds the allowable range, trimming is performed by the trimming held by the sub-table. plate to dress cutting inserts.

In this way, even if a cutting defect occurs temporarily, the cutting insert can be automatically trimmed by the cutting device to attempt to eliminate the cutting defect, so that the possibility of occurrence of the cutting defect in the subsequent cutting steps can be reduced.

In addition, after the dressing of the cutting insert, the cutting of the workpiece is resumed, and the second cutting marks are automatically formed in places different from the first cutting marks. In addition, when the measurement value of at least one measurement item among the plurality of measurement items of the second cutting marks exceeds the allowable range, the notification unit causes the cutting device to issue an alarm.

In this way, when the cutting failure cannot be eliminated even if the cutting device performs trimming, the cutting device can issue an alarm to urge the operator to eliminate the cause of the cutting failure. Therefore, even a relatively inexperienced operator, for example, can call an experienced operator or the like to eliminate cutting defects. Therefore, the possibility of poor cutting can be reduced in the subsequent cutting steps.

Form for carrying out the invention

An embodiment of one aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of the cutting device 2 . In addition, in FIG. 1, some components of the cutting device 2 are shown as functional blocks. In addition, in the following description, the X-axis direction (processing feed direction), the Y-axis direction (indexing feed direction), and the Z-axis direction (up-down direction, height direction) are perpendicular to each other.

The cutting device 2 includes a base 4 that supports or accommodates each component. An opening 4a is formed at the front corner of the base 4, and a cassette lifter 6 that is raised and lowered by a lift mechanism (not shown) is provided in the opening 4a.

A cassette 8 for accommodating a plurality of workpieces 11 can be placed on the upper surface of the cassette lifter 6 . Here, the workpiece 11 will be described with reference to FIGS. 2 and 3 . The workpiece 11 is, for example, a disk-shaped wafer formed of a semiconductor material such as silicon.

On the front surface 11a (see FIG. 2 ) side of the workpiece 11, a plurality of planned dividing lines 13 (also referred to as scribe lines, see FIG. 3 ) orthogonal to each other are set. A device 15 such as an IC (Integrated Circuit) is formed in each region demarcated by a plurality of planned dividing lines 13 (see FIG. 3 ).

A dicing tape 17 having a larger area than the workpiece 11 is attached to the back surface 11 b (see FIG. 2 ) side of the workpiece 11 . In addition, a ring-shaped frame 19 formed of metal is attached to the outer peripheral portion of the dicing tape 17 .

As shown in FIG. 1 , the workpiece 11 is accommodated in the cassette 8 in a state of being supported by the workpiece unit 21 of the frame 19 through the dicing tape 17 . In addition, the material, shape, structure, size, etc. of the workpiece 11 are not limited.

A rectangular opening 4b is formed on the side of the cassette lifter 6, and the opening 4b has a long side along the X-axis direction. In the lower part of the opening 4b, a ball screw type X-axis moving mechanism (processing feed unit) (not shown) is arranged.

A rectangular table cover 12 is arranged above the X-axis moving mechanism, and accordion-shaped covers 14 are arranged on both sides of the table cover 12 in the X-axis direction. The table cover 12 is provided with a table 16 for holding the workpiece 11 .

A θ table (not shown) is connected to the lower part of the work chuck 16 , and the θ table has a rotational drive source such as a motor. The θ table rotates the table 16 in a predetermined angle range around a rotation axis substantially parallel to the Z-axis direction.

A suction path (not shown) is formed inside the table 16, and one end of the suction path is connected to a suction source (not shown) such as a vacuum pump. The negative pressure generated by the suction source is transmitted to the upper surface of the work table 16 .

The upper surface of the table 16 is substantially parallel to the X-Y plane, and functions as a holding surface 16 a for sucking and holding the workpiece 11 . Further, around the work clamp table 16, four clamps 16b for fixing the frame 19 from four directions are provided.

A sub-table 18 is arranged at a corner of the table cover 12 . In FIG. 1 , two sub-tables 18 are arranged so as to be spaced apart in the Y-axis direction at two corners on one side in the X-axis direction of the table cover 12 .

Each of the auxiliary work clamps 18 is smaller than the work clamps 16 and has a rectangular shape in a top view. The flow path formed in the sub table 18 is connected to the above-mentioned suction source, and the upper surface of the sub table 18 is a holding surface for sucking and holding the trimming plate 18a in the shape of a rectangular plate.

The dressing plate 18a is formed using, for example, a mixed material in which abrasive grains such as vitrified (vitrified), thermosetting resin (resinoid), etc. are mixed with abrasive grains such as alumina (WA), green silicon carbide (GC), and the like. The dressing plate 18a is used for dressing (sharpening) of the cutting blade 44 to be described later.

A first conveyance unit (not shown) that conveys the workpiece unit 21 to the table 16 is arranged above the opening 4b. A door-shaped support structure 20 is arranged on the side and above of the opening 4b so as to extend over the opening 4b.

Two cutting unit moving mechanisms 22 are provided on the upper part of the front surface of the support structure 20 , and the cutting unit moving mechanisms 22 each include an index feeding unit and a plunging feeding unit. Each of the cutting unit moving mechanisms 22 is a pair of Y-axis guide rails 24 that are commonly arranged on the front surface of the support structure 20 and are substantially parallel to the Y-axis direction.

The Y-axis moving plate 26 is slidably attached to the Y-axis guide rail 24 . One nut part (not shown) is provided on the back surface (rear surface) side of one Y-axis moving plate 26, and one nut part substantially parallel to the Y-axis direction is rotatably coupled to the one nut part Y-axis ball screw 28.

One Y-axis pulse motor 30 is connected to one end of one Y-axis ball screw 28 . When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor 30 , one Y-axis moving plate 26 moves along the Y-axis guide rail 24 .

A pair of Z-axis guide rails 32 that are substantially parallel to the Z-axis direction are provided on the front surface (front surface) of each Y-axis moving plate 26 . A Z-axis moving plate 34 is slidably attached to the Z-axis guide rail 32 .

A nut portion (not shown) is provided on the back side (rear surface side) of the Z-axis moving plate 34 , and a Z-axis ball screw 36 substantially parallel to the Z-axis direction is rotatably coupled to the nut portion. A Z-axis pulse motor 38 is connected to the upper end of the Z-axis ball screw 36 .

As long as the Z-axis ball screw 36 is rotated by the Z-axis pulse motor 38 , the Z-axis moving plate 34 moves in the Z-axis direction. The cutting unit 40 is connected to the lower part of the Z-axis moving plate 34 . The cutting unit 40 has a cylindrical spindle housing.

In the spindle housing, a part of the cylindrical spindle 42 (see FIG. 2 ) is rotatably accommodated. A rotational drive source (not shown) such as a servo motor is connected to one end of the main shaft 42 .

An annular cutting insert 44 is mounted on the other end of the main shaft 42 . Although the cutting insert 44 shown in FIG. 2 is a so-called hubless type (also called a washer type), the cutting insert 44 may also be a so-called hub type.

Return to Figure 1 again. A camera unit 46 is provided adjacent to each cutting unit 40 . The camera unit 46 includes a microscope camera including an image sensor such as CMOS (Complementary Metal-Oxide-Semiconductor), CCD (Charge-Coupled Device), and a predetermined optical system. with lens.

The camera unit 46 photographs the front surface 11a side of the workpiece 11 held by the holding surface 16a on the back surface 11b side. The image on the front surface 11a side captured by the camera unit 46 can be used, for example, for calibration of the workpiece 11, analysis of the cutting result of the workpiece 11, and the like.

A circular opening 4c is provided at a position opposite to the opening 4a with respect to the opening 4b. A cleaning unit 48 for cleaning the cut workpiece 11 and the like is arranged in the opening 4c. The workpiece 11 after cutting can be transferred from the table 16 to the cleaning unit 48 by a second transfer unit (not shown).

Here, the procedure of cutting the workpiece 11 will be briefly described. FIG. 2 is a partial cross-sectional side view showing a state in which the workpiece 11 is cut. When cutting the workpiece 11, first, one workpiece unit 21 is taken out from the cassette 8, and the back surface 11b side of the workpiece 11 is held by the holding surface 16a.

Next, the front 11a side is photographed by one camera unit 46, and the direction of the work chuck 16 is adjusted by the θ stage so that the dividing line 13 is approximately the same as the X-axis direction based on the obtained image of the front 11a side. parallel.

Then, the cutting insert 44 that has been rotated at high speed is positioned on an extension of one planned dividing line 13, and the lower end of the cutting insert 44 is positioned between the holding surface 16a and the back surface 11b.

In this state, when the cutting insert 44 is moved in the X-axis direction relative to the table 16 by the X-axis moving mechanism, the workpiece 11 is cut along one planned dividing line 13 to form a cut. Traces (cutting grooves) 13a.

After the cutting marks 13a are formed on all the planned dividing lines 13 in one direction, the table 16 is rotated 90 degrees, and the planned dividing lines 13 in the other direction are set substantially parallel to the X-axis direction. After that, cutting traces 13a are formed along all the planned dividing lines 13 in the other direction.

In this way, in the process of cutting the workpiece 11, in order to perform the tool scratch inspection when, for example, the length cut by the cutting insert 44 reaches the tool scratch inspection conditions described later, first, the camera unit 46 examines the cutting scratches. 13a for photography. Thereby, the cutting result image 50 (see FIG. 3 ) of the workpiece 11 can be obtained.

FIG. 3 is a diagram showing an example of the cutting result image 50 . The cutting result image 50 can be used to obtain the measured values of the cutting marks 13 a (cut marks 25 ) in a plurality of predetermined measurement items such as the size of the cracks (defects) 23 .

Here, return to FIG. 1 again. The cutting device 2 is provided with a display device 52 for displaying the image captured by the camera unit 46, the above-mentioned measurement value, and the like. The display device 52 of this example is, for example, a touch panel that functions as a display unit and an input unit.

The cutting device 2 may display on the display device 52 an alarm indicating that an error has occurred when a problem has occurred in the cutting step. An indicator lamp 54 for visually indicating the state of the cutting device 2 is provided on the upper portion of the cutting device 2 .

The display lamp 54 is lit in green, for example, when the cutting step is in progress without a problem, and is lit in red, for example, when a problem has occurred in the cutting step. This red light is an alarm issued by the cutting device 2 to the operator or the like. In addition, the cutting device 2 may be provided with a speaker (not shown), which generates a predetermined warning sound (alarm) when a problem occurs in the cutting step.

The display device 52, the display lamp 54, and the speaker function as a notification unit that notifies the operator that a problem has occurred in the cutting step. The cutting device 2 is provided with a control unit 56 that controls the operation of each component.

The control unit 56 controls the operations of the following components: the cassette lifter 6, the X-axis moving mechanism, the work chuck 16, the first and second conveying units, the cutting unit moving mechanism 22, the cutting unit 40, the camera unit 46, and the cleaning unit 48. Display device 52, display lamp 54, speaker, etc.

The control unit 56 is constituted by a computer. The computer includes a processor 58 represented by a CPU (Central Processing Unit), for example, and a memory 60. The memory 60 includes a DRAM (Dynamic Random Access Memory, Dynamic Random Access Memory), SRAM (Static Random Access Memory, Static Random Access Memory), ROM (Read Only Memory, Read Only Memory) and other main memory devices, as well as flash memory, hard disk drives, solid-state Auxiliary memory devices such as hard disks.

Software including predetermined programs is stored in the auxiliary memory device of the memory 60 . The function of the control unit 56 can be realized by operating the processor 58 according to this software.

In the memory 60, predetermined conditions input by the operator through the display device 52 or predetermined conditions determined in advance in accordance with the type of the workpiece 11 and the like are stored. The predetermined conditions include cutting conditions such as the number of rotations of the cutting insert 44 and the machining feed rate of the table 16 .

The predetermined condition further includes a knife mark inspection condition. The tool mark inspection conditions are conditions for checking whether there is no problem with the cutting marks 13a, and can be determined to perform the tool mark inspection when, for example, the workpiece 11 has been cut by a predetermined cutting length.

Furthermore, instead of the predetermined length, it may be determined that the tool mark inspection is performed when the workpiece 11 has been cut by a predetermined number of pieces. The tool mark inspection conditions can be appropriately set or changed by the operator through the display device 52 .

In the memory 60, in addition to the above-mentioned cutting and tool mark inspection conditions, allowable ranges of a plurality of measurement items predetermined for the cutting marks 13a are stored. FIG. 4 is a diagram showing an example of images of a plurality of measurement items displayed on a part of the display device 52 .

The measurement value of each measurement item can be obtained by the following process implemented by the program stored in the memory 60 : The measurement unit 62 performs the image detection of the edge 13 b (see FIGS. 3 and 5 ) on the cutting result image 50 . Process, or calculate the dimensions of feature regions in an image.

For example, when the edge 13b of the cutting trace 13a is detected by image processing, the measurement unit 62 calculates the difference in luminance between adjacent pixels in the cutting result image 50 . Furthermore, the cutting marks 13a are displayed darker than the non-cutting area in the planned dividing line 13 .

In the cutting result image 50 , since one pixel corresponds to, for example, 1 μm, the width of the knife mark 25 and the size of the crack 23 can be measured by counting the number of pixels constituting the knife mark 25 or the crack 23 .

The plurality of measurement items include: the comparison value 58a, the deviation amount 58b of the center position, the width 58c of the knife mark 25 excluding the crack 23, the width 58d of the knife mark 25 including the crack 23, the distance from the center of the hair line to The maximum distance 58e to the outer edge of the rupture 23, the size 58f of the largest rupture 23, the total area 58g of the rupture 23, and the deviation amount 58h in the Y-axis direction (see FIG. 4).

The contrast value 58a is a numerical value of the contrast between the planned dividing line 13 and the cutting trace 13a displayed in the cutting result image 50 . In the image shown in FIG. 4, the contrast value 58a is shown as the score of the knife marks.

The lower limit of the comparison value 58a is displayed to the right of the text of the knife mark score. The higher the numerical value of the contrast value 58a, the larger the difference in density between the planned dividing line 13 and the image of the cutting marks 13a, and thus more accurate measurement becomes possible.

The deviation amount 58b of the center position means the center line (not shown) of the fine reticle (reference line in the camera of the camera unit 46) in the cutting result image 50 and the center line 13c (see FIG. 5 ) of the cutting trace 13a. position deviation.

When the deviation amount 58b exceeds the upper limit value shown to the right of the text (call), the control unit 56 notifies the operator of an error. Furthermore, the upper limit value shown on the right side of the (call) character is larger than the upper limit value shown on the right side of the (adjustment) character.

In the case where the deviation amount 58b exceeds the upper limit value shown on the right side of the (adjusted) character and is smaller than the upper limit value shown on the right side of the (call) character, the control unit 56 automatically executes the alignment mark and correct the cutting position.

The width 58 c (see FIG. 5 ) of the knife mark 25 excluding the cracks 23 means the width of the knife mark 25 excluding the plurality of cracks 23 to be formed on both sides of the knife mark 25 in the cutting result image 50 . In addition, the upper limit value and the lower limit value of the width 58c are displayed on the right side of the characters of the upper limit and the lower limit, respectively.

The width 58d (see FIG. 5 ) of the knife mark 25 including the crack 23 means that among the plurality of cracks 23 formed on both sides of the knife mark 25 in the cutting result image 50 , the width direction of the knife mark 25 includes the largest The size (length) of the fracture 23 is the sum of the cutting marks 13a and the width of the fracture 23 . The upper limit value of the width 58d is displayed on the right side of the text (including cracks).

The maximum distance 58e from the center of the fine reticle to the outer edge of the crack 23 means the outer side of the largest crack 23 in the width direction of the knife mark 25 from the center line of the fine line in the cutting result image 50 distance to the end. The upper limit of the maximum distance 58e is displayed to the right of the text (center ~ rupture).

The size 58f of the largest crack 23 (see FIG. 5 ) means the size (length) of the largest crack 23 in the width direction of the knife mark 25 in the cutting result image 50 . The upper limit value of the dimension 58f is displayed to the right of the text of the rupture tolerance value.

The total area 58g of the cracks 23 means the area of the cracks 23 surrounded by the outer edges of the respective cracks 23 protruding outward from the width 58c and two virtual straight lines that define the knife marks 25 in the cutting result image 50 (areas blacked out in Figure 5). The upper limit value of the total area of 58g is shown to the right of the text of the rupture area.

The deviation amount 58h in the Y-axis direction means the indexing feed between the target position on the actual image in the cutting result image 50 and the target position calculated from the indexing movement amount set in the device data The position in the direction deviates.

The so-called target is a target pattern used in calibration or the like, and is also referred to as a key pattern, an alignment mark, or the like. The upper limit value of the deviation amount 58h in the Y-axis direction is displayed to the right of the character of the Y tolerance value (depending on the target) in the image.

In addition, in FIG. 4, the allowable value when the measurement part 62 processes the cutting result image 50 obtained by one camera unit 46 is displayed on the Z1-axis line. In addition, the allowable value when the measurement unit 62 processes the cutting result image 50 obtained by the other camera unit 46 is displayed on the line of the Z2 axis.

Each measured value is memorized in the memory 60, and is checked by the control unit 56 whether the allowable range has been exceeded. When the measured value exceeds the allowable range (that is, when an error occurs), the operator selects in advance from "CALL (call)", "DRESS (dressing)", and "RETRY (retry)".

"CALL" means that an alarm is issued through the display device 52, the display lamp 54, the speaker, etc., thereby notifying the operator of the error of the cutting device 2. "DRESS" means that the cutting insert 44 is trimmed using the trim plate 18a.

"RETRY" means that the measurement unit 62 performs image processing on the cutting result image 50 acquired by the camera unit 46 again, calculation of the size of the characteristic region in the image, and the like. In the example shown in FIG. 4, when the comparison value 58a is smaller than the lower limit value, the processing of "CALL" is performed. In addition, when the width 58c is smaller than the lower limit value, the processing of "RETRY (retry)" is performed.

On the other hand, when the widths 58c, 58d, the maximum distance 58e, the size 58f, and the total area 58g are larger than the respective upper limit values, the process of "DRESS (dressing)" is performed. In addition, the selection of "CALL (call)", "DRESS (dressing)" and "RETRY (retry)" for each measurement item is not limited to the example shown in FIG. 4 .

FIG. 5 is an image 50a corresponding to the cutting result image 50, and is a diagram for explaining the measurement value. In the image 50a, the edge 13b of the cutting trace 13a, the center line 13c of the cutting trace 13a, and the like are superimposed and displayed on the line 13 to be divided. In addition, hatching is attached to the device 15 .

Here, returning to FIG. 1 again, the configuration of the control unit 56 will be further described. The memory 60 includes a photographing instruction unit 64 that causes the camera unit 46 to photograph the cutting marks 13 a of the workpiece 11 .

The photographing instruction unit 64 instructs the camera unit 46 to photograph the cutting marks 13a when the above-mentioned cutting marks inspection conditions are met. The measurement value can be obtained by calculating each measurement item with respect to the cutting result image 50 obtained by the photography by the measurement unit 62 .

When the measurement value of at least one measurement item exceeds the allowable range among the measurement values of each measurement item (that is, when a cutting defect has occurred), the control unit 56 causes the cutting unit 40 and the cutting unit moving mechanism 22. The X-axis moving mechanism, the work clamp table 16, etc. are actuated, and the cutting insert 44 is trimmed with the trimming plate 18a.

In this way, an instruction to automatically perform trimming of the cutting insert 44 can be performed by the trimming instruction unit 66 in the control unit 56 . The trimming instruction unit 66 is, for example, a program stored in the memory 60 .

In the dressing of the cutting insert 44, for example, the rotating cutting insert 44 is positioned on the outer side in the X-axis direction of the dressing plate 18a, and the lower end of the cutting insert 44 is positioned at a predetermined depth from the upper surface of the dressing plate 18a . In this state, the cutting insert 44 and the dressing plate 18a are relatively moved in the X-axis direction by the X-axis moving mechanism.

Since dullness, clogging, etc. of the cutting edge of the cutting insert 44 can be eliminated by trimming, it becomes possible to reduce the size of the crack 23 and the frequency of occurrence of the crack 23 during cutting. In addition, when performing trimming, a single groove may be formed in the trimming plate 18a by the cutting blade 44, or a plurality of grooves may be formed.

In this way, in the present embodiment, when the measured value of at least one measurement item exceeds the allowable range, the cutting insert 44 is automatically dressed, so even if a cutting defect temporarily occurs, the cutting device 2 can still attempt to cut. Bad elimination. Therefore, it is possible to reduce the possibility of poor cutting in subsequent cutting steps.

After the trimming of the cutting insert 44, the cutting of the workpiece 11 can be resumed. When the trimmed cutting is resumed, the cutting marks 13a formed immediately before may be located at different positions in the indexing feed direction, or on the workpiece 11 which is different from the workpiece 11 to which the cutting has been performed immediately before. , and a predetermined number (for example, one) of cutting traces 13a are newly formed.

Furthermore, one cutting trace 13 a can be formed on one planned dividing line 13 . Then, the cutting result image 50 of the newly formed cutting marks 13a can be acquired by the instruction of the photographing instruction unit 64, and the measurement unit 62 can calculate the measurement values for a plurality of measurement items of the newly formed cutting marks 13a.

At this time, when the measured value of at least one measurement item exceeds the allowable range, the notification unit 68 of the control unit 56 issues an alarm through the display device 52, the display lamp 54, the speaker, etc. to notify the operator. The intention of poor cutting has occurred.

The notification unit 68 can be realized by, for example, a program stored in the memory 60 . When the notification unit 68 has caused the cutting device 2 to issue an alarm, the operator can perform the replacement of the cutting insert 44, the change of cutting conditions such as the machining feed rate and the number of revolutions of the cutting insert 44, and the permission of a plurality of measurement items. The relaxation of the range, etc., is used to cancel the alarm (warning).

In this way, when the cutting device 2 cannot automatically eliminate the cutting failure, the cutting device 2 can issue an alarm to urge the operator to eliminate the cause of the cutting failure. Therefore, even a relatively inexperienced operator, for example, can call an experienced operator or the like to eliminate cutting defects. Therefore, in the subsequent cutting step, the possibility of occurrence of cutting defects can be reduced.

Next, a cutting method using the cutting device 2 will be described with reference to FIG. 6 . FIG. 6 is a flowchart of a cutting method using the cutting device 2 . When starting cutting of a predetermined number of pieces of the workpiece 11 , the operator touches the button of “full automatic start” displayed on the display device 52 .

When cutting a plurality of workpieces 11 by the cutting device 2, in the case of cutting the first workpiece 11 (NO in S2), the workpiece 11 is held by the holding surface 16a, Then, calibration is performed, and the workpiece 11 is cut with the cutting insert 44 (cutting step S4).

If the workpiece 11 is sequentially cut along each planned dividing line 13 and the tool mark inspection conditions are not met (NO in S6 ), the process returns to the cutting step S4 . On the other hand, when the conditions for the inspection of tool marks have been reached (YES in S6 ), the process proceeds to the first step of inspection of tool marks S8 .

In the first tool mark inspection step S8 , the camera unit 46 photographs, for example, the cutting marks (first cutting marks) 13 a that have been machined just before by the photographing instructing unit 64 to obtain a cutting result image 50 , and the measuring unit 62 According to the cutting result image 50, the measurement value of each measurement item is obtained.

When all the measured values are within the allowable range about the cutting marks 13a (NO in S10), the process returns to S2. On the other hand, when at least one measured value exceeds the allowable range with respect to the cutting trace 13a (YES in S10), the process proceeds to the trimming step S12.

In the dressing step S12 , the dressing of the cutting insert 44 can be automatically performed by the instruction of the dressing instruction unit 66 . Therefore, in the subsequent cutting step S4, the possibility of occurrence of cutting defects can be reduced.

After the trimming step S12, the cutting step S14 for confirmation can be performed. In the cutting step S14 for confirmation, the cutting mark 13a formed just before is at a different position in the indexing feed direction, or on the workpiece 11 that is different from the workpiece 11 that has been cut just before. , and a predetermined number (for example, one) of cutting traces 13a are newly formed.

In addition, the cutting result image 50 of the newly formed cutting marks 13 a can be acquired by the instruction of the photographing instruction unit 64 , and the measurement section 62 can measure a plurality of items of the newly formed cutting marks (second cutting marks) 13 a The measured value is calculated (step S16 of the second tool mark inspection).

Then, when all the measured values are within the allowable range (NO in S18), the process returns to S2. On the other hand, when at least one of the measured values exceeds the allowable range (YES in S18), the notification unit 68 causes the display device 52, the display lamp 54, the speaker, etc. to issue an alarm (notification step S20).

When the control unit 56 has proceeded to the notification step S20, the control unit 56 temporarily stops the automatic cutting of the workpiece 11 by the cutting device 2. Furthermore, as long as the cause of the abnormality is not eliminated and the alarm is cleared, automatic cutting cannot be performed even if the button of "Automatic Start" is touched.

Therefore, when the alarm is not released (NO in S22), the cutting ends. On the other hand, when the cause of the abnormality has been eliminated and the alarm has been released (YES in S22 ), the control unit 56 activates the button of “full automatic start”, so when the operator touches the “full automatic start” button When the "Auto Start" button is pressed, automatic cutting will be restarted (return to S2).

In this way, when the cutting device 2 cannot automatically eliminate the cutting failure, the cutting device 2 can issue an alarm to urge the operator to eliminate the cause of the cutting failure. Therefore, even a relatively inexperienced operator, for example, can call an experienced operator or the like to eliminate cutting defects. Therefore, in the subsequent cutting step S4, the possibility of occurrence of cutting defects can be reduced.

In addition, the structure, method, etc. of the above-mentioned embodiment can be suitably changed and implemented in the range which does not deviate from the objective of this invention.

2: Cutting device 4: Abutment 4a, 4b, 4c: Opening 6: Cassette lift 8: film cassette 11: Processed objects 11a: Front 11b: Back 12: Workbench cover 13: Divide the predetermined line 13a: Cutting marks 13b: Edge 13c: Centerline 14: Corrugated cover 15: Devices 16: Work clamp table 16a: Keep Faces 16b: Fixtures 17: Cutting Tape 18: Deputy work clamping table 18a: Trim Plate 19: Frames 20: Support structure 21: Processed object unit 22: Cutting unit moving mechanism 23: Rupture 24: Y-axis guide 25: Knife Marks 26: Y-axis moving board 28: Y-axis ball screw 30: Y-axis pulse motor 32: Z-axis guide 34: Z-axis moving board 36: Z-axis ball screw 38: Z-axis pulse motor 40: Cutting unit 42: Spindle 44: Cutting inserts 46: Camera unit 48: Wash unit 50: Cutting result image 50a: Image 52: Display device 54: Display light 56: Control unit 58: Processor 58a: Contrast value 58b, 58h: Deviation 58c, 58d: width 58e: maximum distance 58f: size 58g: total area 60: memory 62: Measurement Department 64: Photography Instruction Department 66: Trimming the indicator 68: Notification Department X,Y,Z: direction S2, S4, S6, S8, S10, S12, S14, S16, S18, S20, S22: Steps

FIG. 1 is a perspective view of a cutting device. FIG. 2 is a partial cross-sectional side view showing a state of cutting a workpiece. FIG. 3 is a diagram showing an example of a cutting result image. FIG. 4 is a diagram showing an example of an image of a plurality of measurement items. FIG. 5 is a diagram for explaining measurement values. FIG. 6 is a flowchart of a cutting method using a cutting device.

2: Cutting device

4: Abutment

4a, 4b, 4c: Opening

6: Cassette lift

8: film cassette

11: Processed objects

12: Workbench cover

14: Corrugated cover

16: Work clamp table

16a: Keep Faces

16b: Fixtures

17: Cutting Tape

18: Deputy work clamping table

18a: Trim Plate

19: Frames

20: Support structure

21: Processed object unit

22: Cutting unit moving mechanism

24: Y-axis guide

26: Y-axis moving board

28: Y-axis ball screw

30: Y-axis pulse motor

32: Z-axis guide

34: Z-axis moving board

36: Z-axis ball screw

38: Z-axis pulse motor

40: Cutting unit

46: Camera unit

48: Wash unit

52: Display device

54: Display light

56: Control unit

58: Processor

60: memory

62: Measurement Department

64: Photography Instruction Department

66: Trimming the indicator

68: Notification Department

X,Y,Z: direction

Claims (2)

A cutting device, characterized in that: have: Work clamping table to keep the processed objects; A cutting unit having a main shaft, and cutting the workpiece held by the work chuck with a cutting blade installed on the main shaft along a predetermined dividing line set on the workpiece; a camera unit for photographing the processed object held by the work jig; a secondary table holding a dressing plate for dressing the cutting insert; and control unit with memory and processor, The control unit has: a photographing instruction unit for causing the camera unit to photograph the first cutting marks of the workpiece that has been cut by the cutting unit to obtain a cutting result image; a measurement unit for obtaining measurement values of a plurality of measurement items, each of which has an allowable range, predetermined for the cutting trace, based on the first cutting trace in the cutting result image; Dressing instructing part, when the measured value of at least one measurement item of the plurality of measurement items of the first cutting trace exceeds the allowable range, the dressing plate held by the sub-table is used to dress the cutting insert ;and The notification unit restarts the cutting of the workpiece after the dressing of the cutting insert, and at least one of the plurality of measurement items of the second cutting marks formed in a place different from the first cutting marks When the measured value of the measurement item exceeds the allowable range, the cutting device will issue an alarm. The cutting device of claim 1, wherein the plurality of measurement items include: the width of the tool mark, the size of the defect, and the area of the defect.

Images