TW202212235A - Ceiling transport vehicle, teaching unit, and transfer position learning method in ceiling transport vehicle - Google Patents

Ceiling transport vehicle, teaching unit, and transfer position learning method in ceiling transport vehicle Download PDF

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Publication number
TW202212235A
TW202212235A TW110116052A TW110116052A TW202212235A TW 202212235 A TW202212235 A TW 202212235A TW 110116052 A TW110116052 A TW 110116052A TW 110116052 A TW110116052 A TW 110116052A TW 202212235 A TW202212235 A TW 202212235A
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teaching
unit
transfer
ceiling
teaching board
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TW110116052A
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Chinese (zh)
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衣川知孝
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日商大福股份有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
    • G09B19/00—Teaching not covered by other main groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Business, Economics & Management (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Educational Administration (AREA)
  • Educational Technology (AREA)
  • Theoretical Computer Science (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control And Safety Of Cranes (AREA)

Abstract

The present invention provides a ceiling transport vehicle which transports a wafer transfer cassette or the like along a travel rail and transfers the wafer transfer cassette or the like to a wafer loading table. The lifting unit can lift the teaching unit. The teaching unit is provided with a unit main body, a teaching board, a first distance meter and the like. The teaching unit can learn the transfer position of the wafer transfer cassette or the like with respect to the wafer loading table on the basis of the position of the teaching board. The unit main body can support the teaching board, and support of the teaching board is released by transferring the teaching board to the wafer loading table.

Description

天花板搬運車、教導單元以及在天花板搬運車之移載位置學習方法Ceiling truck, teaching unit, and method of learning at the transfer position of the ceiling truck

本發明是有關於一種天花板搬運車，且特別是有關於一種用於使天花板搬運車學習被搬運物相對於設備內的移載部的移載位置的教導單元、搭載該教導單元的天花板搬運車、使用該教導單元的在天花板搬運車之移載位置學習方法。The present invention relates to a ceiling truck, and more particularly, to a teaching unit for allowing the ceiling truck to learn the transfer position of an object to be conveyed relative to a transfer unit in a facility, and a ceiling truck equipped with the teaching unit . Use this teaching unit to learn the method of transferring the loading position of the ceiling truck.

以往，作為此種天花板搬運車，有WO2018/186021所示般的天花板搬運車。在WO2018/186021的天花板搬運車中，為了使天花板搬運車學習被搬運物相對於裝載埠等（移載部）的移載位置，而使用教導單元及定位構件（教導板）。 在WO2018/186021的天花板搬運車中，在對天花板搬運車進行教導（被搬運物相對於裝載埠等（移載部）的移載位置的學習）時，教導單元搭載於天花板搬運車且定位構件設置於設備內的裝載埠等。而且，教導單元的單元本體與定位構件接觸來進行定位構件的位置檢測，藉此使天花板搬運車學習被搬運物相對於裝載埠等的移載位置。 Conventionally, as such a ceiling truck, there is a ceiling truck as shown in WO2018/186021. In the ceiling transport vehicle of WO2018/186021, a teaching unit and a positioning member (teaching board) are used in order for the ceiling transport vehicle to learn the transfer position of the object to be transported with respect to the loading port or the like (transfer section). In the ceiling truck of WO2018/186021, when teaching the ceiling truck (learning of the transfer position of the object to be transported with respect to the loading port or the like (transfer part)), the teaching unit is mounted on the ceiling truck and the positioning member Load ports, etc. provided in the device. Then, the unit body of the teaching unit is brought into contact with the positioning member to detect the position of the positioning member, whereby the ceiling truck learns the transfer position of the object to be transported relative to the loading port or the like.

[發明所欲解決之課題][The problem to be solved by the invention]

然而，在WO2018/186021的天花板搬運車中，在對天花板搬運車進行教導時，作業者需要將教導板預先設置於裝載埠等，因此產生了將教導板設置於裝載埠等的作業，至開始對天花板搬運車的教導之前需要時間。特別是，在使天花板搬運車學習被搬運物相對於設置於高處的天花板減震器（天花板保管架）的移載位置的情況下，需要將教導板預先設置於天花板減震器，因此作業者要在高處進行教導板的設置作業，而導致教導板的設置作業變得繁雜。另外，在結束對天花板搬運車的教導後，需要自裝載埠等撤除教導板。因此，在WO2018/186021的天花板搬運車中，存在對天花板搬運車實施教導需要時間且繁雜的問題。However, in the ceiling truck of WO2018/186021, when teaching the ceiling truck, the operator needs to install the teaching board in the loading port in advance, so the work of installing the teaching board in the loading port and the like occurs. It will take time before the teaching of ceiling vans. In particular, in order to make the ceiling truck learn the transfer position of the object relative to the ceiling damper (ceiling storage rack) installed at a high place, it is necessary to install the teaching board on the ceiling damper in advance, so the work It is necessary to perform the setting work of the teaching board at a high place, which makes the setting work of the teaching board complicated. In addition, it is necessary to remove the teaching board from the loading port or the like after completing the teaching of the ceiling truck. Therefore, in the ceiling truck of WO2018/186021, there is a problem that it takes time and trouble to teach the ceiling truck.

本發明解決所述課題，其目的在於提供一種可縮短對天花板搬運車的教導（被搬運物相對於移載部的移載位置的學習）的實施時間，且能夠容易地實施對天花板搬運車的教導的天花板搬運車、教導單元以及在天花板搬運車之移載位置學習方法。 [解決課題之手段] The present invention solves the above-mentioned problems, and an object of the present invention is to provide a method that can shorten the implementation time of teaching (learning of the transfer position of the object to be conveyed relative to the transfer unit) to the ceiling truck, and can easily implement the teaching of the ceiling truck. Teach ceiling trucks, teaching units, and learning methods at the transfer position of the ceiling truck. [Means of Solving Problems]

為了解決所述課題，本發明的天花板搬運車包括：行進部，沿著鋪設於設備內的天花板的行進軌道行進自如；本體部，支撐於所述行進部而與所述行進部一體行進；以及昇降部，能夠支撐被搬運物且能夠相對於所述本體部昇降，在由所述昇降部支撐所述被搬運物的狀態下，藉由所述行進部的行進將所述被搬運物沿著所述行進軌道搬運，並能夠藉由所述昇降部的昇降將所述被搬運物移載至所述設備內的移載部，所述天花板搬運車中，所述昇降部構成為支撐教導單元並能夠相對於所述本體部昇降，所述教導單元用於學習所述被搬運物相對於所述移載部的移載位置，所述教導單元包括：單元本體，由所述昇降部支撐；教導板，設置於所述移載部；以及檢測部，由所述單元本體支撐並且檢測所述教導板的位置，所述教導單元能夠基於由所述檢測部檢測出的所述教導板的位置來學習所述被搬運物相對於所述移載部的移載位置，所述單元本體構成為能夠支撐所述教導板，藉由將所述教導板移載至所述移載部來解除對所述教導板的支撐。 在所述結構中，在行進部的行進時及昇降部的昇降時，單元本體與教導板為一體，在使天花板搬運車學習被搬運物相對於移載部的移載位置時，藉由將教導板移載至移載部，教導板自單元本體分離。 In order to solve the above-mentioned problems, the ceiling transport vehicle of the present invention includes: a traveling part that freely travels along a traveling rail of a ceiling installed in a facility; a main body part that is supported by the traveling part and travels integrally with the traveling part; and The lifting portion is capable of supporting the object to be conveyed and can be raised and lowered relative to the main body portion, and in a state where the object to be transported is supported by the lifting portion, the object to be transported is moved along the movement of the traveling portion in a state of being supported by the lifting portion. The traveling rail is conveyed, and the object to be conveyed can be transferred to the transfer portion in the facility by the lifting and lowering of the lifting portion, and in the ceiling transport vehicle, the lifting portion is configured to support a teaching unit and can be raised and lowered relative to the body part, the teaching unit is used to learn the transfer position of the object to be carried relative to the transfer part, and the teaching unit includes: a unit body supported by the lifting part; a teaching board provided on the transfer unit; and a detection section supported by the unit body and detecting the position of the teaching board, the teaching unit being capable of detecting the position of the teaching board based on the detection section To learn the transfer position of the object to be conveyed relative to the transfer part, the unit body is configured to support the teaching board, and the teaching board is transferred to the transfer part to release the pairing. the support of the teaching board. In the above configuration, the unit body and the teaching board are integrated when the traveling portion is traveling and the lifting portion is being lifted. The teaching board is transferred to the transfer part, and the teaching board is separated from the unit body.

本發明的天花板搬運車中，所述單元本體包括與所述教導板嵌合的嵌合部，藉由將所述教導板載置於所述移載部來解除所述嵌合部與所述教導板的嵌合。 在所述結構中，在行進部的行進時及昇降部的昇降時，單元本體的嵌合部與教導板嵌合，在使天花板搬運車學習被搬運物相對於移載部的移載位置時，教導板自單元本體分離。 In the ceiling transport vehicle of the present invention, the unit body includes a fitting portion to be fitted with the teaching board, and the fitting portion and the teaching board are released by placing the teaching board on the transfer portion. Fitting of the teaching board. In the above configuration, the fitting portion of the unit body is fitted with the teaching board when the traveling portion is traveling and the lifting portion is being raised and lowered, and when the ceiling truck is made to learn the transfer position of the object relative to the transfer portion , the teaching board is separated from the unit body.

本發明的教導單元用於使天花板搬運車學習被搬運物相對於移載部的移載位置，所述天花板搬運車包括：行進部，沿著鋪設於設備內的天花板的行進軌道行進自如；本體部，支撐於所述行進部而與所述行進部一體行進；以及昇降部，能夠支撐所述被搬運物且能夠相對於所述本體部昇降，且所述天花板搬運車在由所述昇降部支撐所述被搬運物的狀態下，藉由所述行進部的行進將所述被搬運物沿著所述行進軌道搬運，並能夠藉由所述昇降部的昇降將所述被搬運物移載至所述設備內的所述移載部，所述教導單元構成為由所述昇降部支撐並能夠相對於所述本體部昇降，且包括：單元本體，由所述昇降部支撐；教導板，設置於所述移載部；以及檢測部，由所述單元本體支撐並且檢測所述教導板的位置，所述教導單元能夠使所述天花板搬運車基於由所述檢測部檢測出的所述教導板的位置來學習所述被搬運物相對於所述移載部的移載位置，所述單元本體構成為能夠支撐所述教導板，藉由將所述教導板移載至所述移載部來解除對所述教導板的支撐。 在所述結構中，在行進部的行進時及昇降部的昇降時，單元本體與教導板為一體，在使天花板搬運車學習被搬運物相對於移載部的移載位置時，藉由將教導板移載至移載部，教導板自單元本體分離。 The teaching unit of the present invention is used to make the ceiling truck learn the transfer position of the object to be conveyed relative to the transfer part, and the ceiling truck includes: a traveling part that can travel freely along a traveling track laid on a ceiling in the equipment; a main body a part, which is supported by the traveling part and travels integrally with the traveling part; and an elevating part that can support the object to be conveyed and is capable of raising and lowering relative to the main body part, and the ceiling transport vehicle is moved by the elevating part In a state where the object to be conveyed is supported, the object to be conveyed is conveyed along the traveling rail by the traveling of the traveling portion, and the object to be conveyed can be transferred by the lifting and lowering of the lifting portion To the transfer part in the equipment, the teaching unit is configured to be supported by the lifting part and can be raised and lowered relative to the main body part, and includes: a unit body supported by the lifting part; a teaching board, provided on the transfer unit; and a detection unit supported by the unit body and detecting the position of the teaching board, the teaching unit capable of causing the ceiling truck to be based on the teaching detected by the detection unit The transfer position of the object to be conveyed relative to the transfer section is learned by the position of the board, the unit body is configured to support the teaching board, and the teaching board is transferred to the transfer section by transferring the teaching board. to unsupport the teaching board. In the above configuration, the unit body and the teaching board are integrated when the traveling portion is traveling and the lifting portion is being lifted. The teaching board is transferred to the transfer part, and the teaching board is separated from the unit body.

本發明的教導單元中，所述單元本體包括與所述教導板嵌合的嵌合部，藉由將所述教導板載置於所述移載部來解除所述嵌合部與所述教導板的嵌合。 在所述結構中，在行進部的行進時及昇降部的昇降時，單元本體的嵌合部與教導板嵌合，在使天花板搬運車學習被搬運物相對於移載部的移載位置時，教導板自單元本體分離。 In the teaching unit of the present invention, the unit body includes a fitting portion to be fitted with the teaching board, and the fitting portion and the teaching board are released by placing the teaching board on the transfer portion. Board fit. In the above configuration, the fitting portion of the unit body is fitted with the teaching board when the traveling portion is traveling and the lifting portion is being raised and lowered, and when the ceiling truck is made to learn the transfer position of the object relative to the transfer portion , the teaching board is separated from the unit body.

本發明的在天花板搬運車之移載位置學習方法用於使天花板搬運車學習被搬運物相對於移載部的移載位置，所述天花板搬運車包括：行進部，沿著鋪設於設備內的天花板的行進軌道行進自如；本體部，支撐於所述行進部而與所述行進部一體行進；以及昇降部，能夠支撐所述被搬運物且能夠相對於所述本體部昇降，且所述天花板搬運車在由所述昇降部支撐所述被搬運物的狀態下，藉由所述行進部的行進將所述被搬運物沿著所述行進軌道搬運，並能夠藉由所述昇降部的昇降將所述被搬運物移載至所述設備內的所述移載部，所述在天花板搬運車之移載位置學習方法中，藉由所述昇降部將教導單元支撐為能夠相對於所述本體部昇降，所述教導單元包括：單元本體，由所述昇降部支撐；教導板，設置於所述移載部；以及檢測部，由所述單元本體支撐並且檢測所述教導板的位置，藉由將所述教導板移載至所述移載部來解除所述單元本體對所述教導板的支撐，在解除所述單元本體對所述教導板的支撐後，使所述天花板台車基於由所述檢測部檢測出的所述教導板的位置來學習所述被搬運物相對於所述移載部的移載位置。 在所述方法中，在行進部的行進時及昇降部的昇降時，使教導板與單元本體成為一體，在使天花板搬運車學習被搬運物相對於移載部的移載位置時，使教導板與單元本體分離。 [發明的效果] The method for learning the transfer position of the ceiling truck of the present invention is used for the ceiling truck to learn the transfer position of the object to be transported relative to the transfer part. A traveling rail of the ceiling can travel freely; a main body part is supported by the traveling part and travels integrally with the traveling part; In a state where the object to be conveyed is supported by the elevating part, the conveying vehicle conveys the object to be conveyed along the traveling rail by the traveling of the traveling part, and can be raised and lowered by the elevating part In the transfer part for transferring the object to be carried into the equipment, in the method for learning the transfer position of a ceiling truck, the teaching unit is supported by the elevating part so as to be able to be relative to the The body part is lifted and lowered, and the teaching unit includes: a unit body supported by the lifting part; a teaching board provided on the transfer part; and a detection part supported by the unit body and detecting the position of the teaching board, The support of the teaching board by the unit body is released by transferring the teaching board to the transfer portion, and after the support of the teaching board by the unit body is released, the ceiling cart is made to be based on the The transfer position of the object to be conveyed relative to the transfer unit is learned from the position of the teaching board detected by the detection unit. In the above-mentioned method, the teaching board is integrated with the unit body when the traveling part is traveling and the lifting and lowering part is raised and lowered, and when the ceiling truck is made to learn the transfer position of the object to be transferred relative to the transfer part, the teaching board is made to be taught. The plate is separated from the unit body. [Effect of invention]

根據本發明的天花板搬運車、教導單元以及天花板搬運車的移載位置學習方法，在對天花板搬運車進行教導（被搬運物相對於移載部的移載位置的學習）時，教導板藉由天花板搬運車而設置於移載部且自移載部撤除，因此作業者無需進行在移載部設置教導板的作業或自移載部撤除教導板的作業。因此，可在短時間內容易地對天花板搬運車進行教導。According to the ceiling truck, the teaching unit, and the method for learning the transfer position of the ceiling truck of the present invention, when teaching (learning of the transfer position of the object to be transported relative to the transfer unit) to the ceiling truck, the teaching board uses Since the ceiling truck is installed in the transfer unit and removed from the transfer unit, the operator does not need to install the teaching board in the transfer section or remove the teaching board from the transfer section. Therefore, the ceiling truck can be easily taught in a short time.

首先，對本發明的天花板搬運車10進行說明。First, the ceiling carrier 10 of this invention is demonstrated.

如圖1所示，天花板搬運車10例如沿著在半導體基板的製造工廠的潔淨室90（「設備」的一例）內的天花板91鋪設的行進軌道92，對收容有半導體基板的環箍（「被搬運物」的一例，未圖示）等或後述的教導單元20進行搬運。另外，天花板搬運車10將所述環箍等或教導單元20移載至對半導體基板進行規定的處理的處理裝置93的裝載埠94（「移載部」的一例）或暫時保管所述環箍等的天花板減震器（天花板保管架、「移載部」的一例，未圖示）。再者，以下，將天花板搬運車10移載所述環箍等的移載部及在對天花板搬運車10進行教導（被搬運物相對於移載部的移載位置的學習）時移載教導單元20的移載部作為處理裝置93的裝載埠94進行說明。As shown in FIG. 1 , the ceiling transport vehicle 10 , for example, moves along a traveling rail 92 laid on a ceiling 91 in a clean room 90 (an example of "equipment") of a semiconductor substrate manufacturing plant, and aligns a hoop ("equipment") containing a semiconductor substrate. An example of the object to be transported" (not shown) or the like or the teaching unit 20 to be described later is transported. In addition, the ceiling transport vehicle 10 transfers the hoop or the like or the teaching unit 20 to the loading port 94 (an example of the "transfer unit") of the processing device 93 that performs predetermined processing on the semiconductor substrate, or temporarily stores the hoop Ceiling shock absorbers such as (ceiling storage rack, an example of "transfer part", not shown). In the following, the ceiling truck 10 is transferred to the transfer part such as the hoop, and the transfer teaching is performed when teaching the ceiling truck 10 (learning of the transfer position of the object relative to the transfer part). The transfer portion of the unit 20 will be described as the loading port 94 of the processing device 93 .

如圖1所示，天花板搬運車10包括：行進部11，沿著行進軌道92行進自如；本體部14，支撐於行進部11而與行進部11一體行進；以及昇降部15，能夠支撐所述環箍等且能夠相對於本體部14昇降。天花板搬運車10藉由行進部11的行進將由昇降部15支撐的狀態下的所述環箍等沿著行進軌道92搬運至裝載埠94的上方的規定位置。天花板搬運車10藉由昇降部15的昇降將利用行進部11的行進而被搬運至規定位置的所述環箍等移載至裝載埠94。 行進部11包括在行進軌道92上轉動的一對行進車輪12、及驅動一對行進車輪12的行進驅動部13。 本體部14以懸掛狀態支撐於行進部11，並且在其內部將昇降部15支撐為能夠昇降。 昇降部15包括：握持部16，以懸掛狀態握持所述環箍等；以及昇降驅動部（未圖示），固定於本體部14的內部並對握持部16進行昇降驅動。該昇降驅動部藉由卷取或送出與握持部16的一端連接的線17來使握持部16昇降。 As shown in FIG. 1 , the ceiling truck 10 includes: a traveling portion 11 that can freely travel along a traveling rail 92; a main body portion 14 that is supported by the traveling portion 11 and travels integrally with the traveling portion 11; and an elevating portion 15 that can support the The hoop and the like can be raised and lowered relative to the body portion 14 . The ceiling transport vehicle 10 transports the hoop and the like in the state supported by the lifting section 15 along the running rail 92 to a predetermined position above the loading port 94 by the running of the running section 11 . The ceiling transport vehicle 10 transfers, to the loading port 94 , the hoop and the like conveyed to a predetermined position by the traveling of the traveling portion 11 by the lifting and lowering of the lifting portion 15 . The traveling portion 11 includes a pair of traveling wheels 12 that rotate on the traveling rail 92 , and a traveling driving portion 13 that drives the pair of traveling wheels 12 . The main body portion 14 is supported by the traveling portion 11 in a suspended state, and supports the elevating portion 15 inside the elevating portion 15 so as to be able to ascend and descend. The lift portion 15 includes a grip portion 16 that holds the hoop and the like in a suspended state, and a lift drive portion (not shown) that is fixed inside the body portion 14 and drives the grip portion 16 to lift and lower. The raising and lowering driving unit moves up and down the gripping portion 16 by winding or feeding out the wire 17 connected to one end of the gripping portion 16 .

在天花板搬運車10中，為了使天花板搬運車10學習所述環箍等（被搬運物）相對於裝載埠94的移載位置，而對天花板搬運車10進行教導。此處，所謂對天花板搬運車10的教導，是指使天花板搬運車10儲存應進行的動作，以使握持部16可在不偏離目標位置的位置處進行所述環箍等（被搬運物）向裝載埠94的移載動作，在使行進部11停止在行進軌道92的規定位置且使昇降部15的握持部16下降規定距離的狀態下，檢測握持部16的位置偏離了目標位置多少，基於該檢測結果將握持部16的位置補正為目標位置並儲存至天花板搬運車10中。 對天花板搬運車10的教導是使用教導單元20來進行，且藉由使天花板搬運車10的行進部11停止在作為目標的裝載埠94的上方，並使由昇降部15的握持部16握持的狀態下的教導單元20下降至作為目標的裝載埠94來進行。 In the ceiling truck 10 , the ceiling truck 10 is taught in order to make the ceiling truck 10 learn the transfer position of the hoop or the like (object to be transported) with respect to the loading port 94 . Here, the teaching of the ceiling truck 10 refers to making the ceiling truck 10 store operations to be performed so that the grip portion 16 can perform the hoop or the like (object to be conveyed) at a position that does not deviate from the target position. The transfer operation to the loading port 94 detects that the position of the gripping portion 16 deviates from the target position in a state where the traveling portion 11 is stopped at a predetermined position of the traveling rail 92 and the gripping portion 16 of the lifting portion 15 is lowered by a predetermined distance. Based on the detection result, the position of the grip portion 16 is corrected to the target position and stored in the ceiling truck 10 . The teaching of the ceiling truck 10 is performed using the teaching unit 20, and the traveling portion 11 of the ceiling truck 10 is stopped above the target loading port 94 and held by the grip portion 16 of the lift portion 15. The teaching unit 20 in the holding state is lowered to the target load port 94 to perform.

教導單元20由天花板搬運車10的昇降部15支撐，並藉由昇降部15的昇降而相對於本體部14昇降。更具體而言，教導單元20在由昇降部15的握持部16握持的狀態下相對於本體部14昇降。 教導單元20以其重量及重心位置與所述環箍等（被搬運物）一致的方式形成。如圖2、圖3A、圖3B所示，教導單元20主要由單元本體21、教導板31、測距儀40、測距儀41、測距儀42（「檢測部」的一例）、及角度計43（「檢測部」的一例）構成。 The teaching unit 20 is supported by the elevating part 15 of the ceiling transport vehicle 10 , and moves up and down with respect to the main body part 14 by the elevating and lowering of the elevating part 15 . More specifically, the teaching unit 20 ascends and descends with respect to the main body portion 14 while being held by the holding portion 16 of the ascending and descending portion 15 . The teaching unit 20 is formed so that the weight and the position of the center of gravity correspond to the hoop or the like (object to be conveyed). As shown in FIGS. 2 , 3A and 3B , the teaching unit 20 mainly consists of a unit body 21 , a teaching board 31 , a range finder 40 , a range finder 41 , a range finder 42 (an example of a “detection unit”), and an angle 43 (an example of "detection part") is constituted.

如圖3A所示，單元本體21為箱狀的框體。單元本體21以其左右方向A成為與搬運教導單元20時的天花板搬運車10的行進方向相同方向的方式由昇降部15支撐。單元本體21主要由底板22、分別豎立設置於底板22的四個角部的支柱23、及設置於四根支柱23的頂部的上面板24構成。 在四根支柱23中的、在單元本體21的左右方向A的兩側相鄰的兩根支柱23間設置有橫框25。在設置於單元本體21的左右方向A的兩側的橫框25間設置有支撐框26。在上面板24的中央設置有供昇降部15的握持部16握持單元本體21的凸緣27。 As shown in FIG. 3A , the unit body 21 is a box-shaped frame. The unit main body 21 is supported by the elevating part 15 so that the left-right direction A becomes the same direction as the traveling direction of the ceiling truck 10 when the teaching unit 20 is conveyed. The unit main body 21 is mainly composed of a bottom plate 22 , pillars 23 erected on four corners of the bottom plate 22 , and an upper panel 24 provided on tops of the four pillars 23 . A horizontal frame 25 is provided between two pillars 23 adjacent to both sides in the left-right direction A of the unit main body 21 among the four pillars 23 . A support frame 26 is provided between the horizontal frames 25 provided on both sides in the left-right direction A of the unit body 21 . A flange 27 for holding the unit body 21 by the holding portion 16 of the lifting portion 15 is provided in the center of the upper panel 24 .

在橫框25的中央部設置有向單元本體21的左右方向A的外側突出的基台28。基台28是自橫框25的外側面水平地突出的板材。在基台28固定有用於支撐教導板31的第一突起部29及一對第二突起部30。 第一突起部29設置於基台28的突出側（與固定於橫框25的一側為相反側）的中央部，藉由與教導板31卡合來進行教導板31的前後方向B的定位。第一突起部29包括自基台28的上表面朝上方突出的第一輥支撐體29A、及能夠轉動地軸支承於第一輥支撐體29A的前端側的第一輥29B（「嵌合部」的一例）。第一輥29B以其輥面朝向前後方向B的方式支撐於第一輥支撐體29A。第一輥29B藉由其輥面與教導板31抵接並嵌合於教導板31來進行教導板31的前後方向B的定位。 第二突起部30以隔著第一突起部29的方式設置於基台28的前後兩側，藉由與教導板31抵接來進行教導板31的左右方向A的定位。第二突起部30包括自基台28的上表面朝上方突出的第二輥支撐體30A、及能夠轉動地軸支承於第二輥支撐體30A的前端側的第二輥30B。第二輥30B以其輥面朝向左右方向A的方式支撐於第二輥支撐體30A。第二輥30B藉由其輥面與教導板31抵接來進行教導板31的左右方向A的定位。 A base 28 protruding outward in the left-right direction A of the unit main body 21 is provided in the center portion of the horizontal frame 25 . The base 28 is a plate that protrudes horizontally from the outer surface of the horizontal frame 25 . A first protrusion 29 and a pair of second protrusions 30 are fixed to the base 28 for supporting the teaching board 31 . The first protruding portion 29 is provided at the center portion of the protruding side of the base 28 (the side opposite to the side fixed to the horizontal frame 25 ), and is engaged with the teaching board 31 to position the teaching board 31 in the front-rear direction B . The first projection portion 29 includes a first roller support body 29A protruding upward from the upper surface of the base 28, and a first roller 29B (“fitting portion”) pivotally supported on the front end side of the first roller support body 29A so as to be rotatable. an example). The first roller 29B is supported by the first roller support body 29A so that the roller surface thereof faces the front-rear direction B. As shown in FIG. The first roller 29B is positioned in the front-rear direction B of the teaching board 31 by the roller surface of the first roller 29B being in contact with the teaching board 31 and being fitted to the teaching board 31 . The second protrusions 30 are provided on the front and rear sides of the base 28 so as to sandwich the first protrusions 29 , and are positioned in the left-right direction A of the teaching board 31 by contacting the teaching board 31 . The second protrusion 30 includes a second roller support body 30A protruding upward from the upper surface of the base 28 , and a second roller 30B pivotally supported on the front end side of the second roller support body 30A so as to be rotatable. The 2nd roll 30B is supported by 30 A of 2nd roll supports so that the roll surface may face the left-right direction A. The second roller 30B performs the positioning in the left-right direction A of the teaching board 31 when the roll surface of the second roller 30B is in contact with the teaching board 31 .

如圖3B所示，教導板31是能夠嵌合於單元本體21的下部的凹狀的構件。教導板31以其左右方向A成為與搬運教導單元20時的天花板搬運車10的行進方向相同方向的方式由單元本體21支撐。教導板31主要由板本體32及分別設置於板本體32的左右兩側的側壁36構成。As shown in FIG. 3B , the teaching board 31 is a concave member that can be fitted into the lower part of the unit body 21 . The teaching board 31 is supported by the unit main body 21 so that the left-right direction A becomes the same direction as the traveling direction of the ceiling transport vehicle 10 when the teaching unit 20 is transported. The teaching board 31 is mainly composed of a board body 32 and side walls 36 respectively disposed on the left and right sides of the board body 32 .

板本體32由板材形成，是在將教導板31移載至裝載埠94時抵接於裝載埠94的部分。 當將教導板31移載至裝載埠94時，在板本體32形成有供設置於裝載埠94的銷95（參照圖1）插入的孔部33。孔部33形成於與裝載埠94的銷95的位置對應的板本體32的規定位置（圖3B中為三處）。在孔部33的上部（板本體32的上表面），以自上方覆蓋孔部33的開口部分的方式設置有接觸感測器34。接觸感測器34構成為能夠與插入至孔部33的銷95的頂部接觸。接觸感測器34藉由與銷95接觸而將檢測訊號發送至天花板搬運車10的控制部（未圖示）。天花板搬運車10的控制部基於來自接觸感測器34的檢測訊號，判斷為教導板31載置於裝載埠94的規定位置。 在板本體32的左右方向A的兩側部，豎立設置有用於反射第二測距儀41所照射的雷射光的反射板35。反射板35以其壁面朝向教導板31的前後方向B的方式設置。 The board body 32 is formed of a plate, and is a portion that abuts on the loading port 94 when the teaching board 31 is transferred to the loading port 94 . When the teaching board 31 is transferred to the loading port 94 , the board body 32 is formed with a hole portion 33 into which a pin 95 (see FIG. 1 ) provided in the loading port 94 is inserted. The hole portions 33 are formed at predetermined positions (three positions in FIG. 3B ) of the plate body 32 corresponding to the positions of the pins 95 of the loading port 94 . A touch sensor 34 is provided on the upper portion of the hole portion 33 (the upper surface of the plate body 32 ) so as to cover the opening portion of the hole portion 33 from above. The contact sensor 34 is configured to be able to come into contact with the top of the pin 95 inserted into the hole portion 33 . The contact sensor 34 transmits a detection signal to a control unit (not shown) of the ceiling truck 10 by contacting the pin 95 . The control unit of the ceiling truck 10 determines that the teaching board 31 is placed at a predetermined position of the loading port 94 based on the detection signal from the touch sensor 34 . On both sides of the plate body 32 in the left-right direction A, reflecting plates 35 for reflecting the laser light irradiated by the second range finder 41 are erected. The reflection plate 35 is provided so that the wall surface thereof faces the front-rear direction B of the teaching board 31 .

側壁36由板材形成，沿著前後方向B豎立設置於板本體32的左右方向A的兩側端部。側壁36是在教導板31支撐於單元本體21時與單元本體21的基台28、第一突起部29及第二突起部30卡合的部分。側壁36在其上半部的區域形成有開口部37。開口部37以單元本體21的基台28、第一突起部29及第二突起部30能夠插通的程度的開口高度及開口寬度開口。 在開口部37的上部中央形成有槽部38。槽部38由能夠與單元本體21的第一突起部29的第一輥29B嵌合的彎曲狀（半圓狀）的切口形成。藉由使第一輥29B與槽部38嵌合，來進行教導板31的前後方向B的定位。 在槽部38的兩側形成有突出部39。突出部39是自開口部37的上部向下方突出的三角形的突出部分。當教導板31支撐於單元本體21時，突出部39載置於單元本體21的基台28。藉由將突出部39載置於基台28，教導板31在懸掛於單元本體21的狀態下被支撐。 The side walls 36 are formed of a plate material, and are erected along the front-rear direction B on both side end portions in the left-right direction A of the plate body 32 . The side wall 36 is a portion that engages with the base 28 , the first protruding portion 29 and the second protruding portion 30 of the unit body 21 when the teaching board 31 is supported by the unit body 21 . The side wall 36 is formed with an opening 37 in the region of the upper half. The opening portion 37 is opened with an opening height and an opening width that allow the base 28 , the first protrusion portion 29 , and the second protrusion portion 30 of the unit body 21 to be inserted therethrough. A groove portion 38 is formed in the center of the upper portion of the opening portion 37 . The groove portion 38 is formed by a curved (semi-circular) cutout that can be fitted into the first roller 29B of the first protrusion portion 29 of the unit body 21 . The positioning in the front-rear direction B of the teaching board 31 is performed by fitting the first roller 29B with the groove portion 38 . Protrusions 39 are formed on both sides of the groove portion 38 . The protruding portion 39 is a triangular protruding portion protruding downward from the upper portion of the opening portion 37 . When the teaching board 31 is supported by the unit body 21 , the protruding portion 39 is placed on the base 28 of the unit body 21 . By placing the protruding portion 39 on the base 28 , the teaching board 31 is supported in a state of being suspended from the unit body 21 .

如圖2及圖3A所示，第一測距儀40是雷射測距儀，在對天花板搬運車10教導時，檢測自單元本體21的規定位置至教導板31的規定位置為止的左右方向A的距離。第一測距儀40安裝於在單元本體21的底板22豎立設置的框體22A。第一測距儀40藉由向教導板31的其中一個側壁36的內側面照射雷射光，檢測自單元本體21的規定位置至教導板31的規定位置為止的左右方向A的距離。第一測距儀40在單元本體21設置有一台。在教導單元20中，藉由一台第一測距儀40在教導板31的一點進行自單元本體21的規定位置至教導板31的規定位置為止的左右方向A的距離的檢測。 第二測距儀41是雷射測距儀，在對天花板搬運車10教導時，檢測自單元本體21的規定位置至教導板31的規定位置為止的前後方向B的距離。第二測距儀41安裝於單元本體21的底板22。第二測距儀41藉由向教導板31的反射板35照射雷射光，檢測自單元本體21的規定位置至教導板31的規定位置為止的前後方向B的距離。第二測距儀41在單元本體21設置有兩台。在教導單元20中，藉由兩台第二測距儀41在教導板31的兩點進行自單元本體21的規定位置至教導板31的規定位置為止的前後方向B的距離的檢測。 第三測距儀42是雷射測距儀，在對天花板搬運車10教導時，檢測自單元本體21的規定位置至教導板31的規定位置為止的上下方向C（高度方向）的距離。第三測距儀42安裝於單元本體21的支柱23或支撐框26。第三測距儀42藉由向教導板31的板本體32的上表面照射雷射光，檢測自單元本體21的規定位置至教導板31的規定位置為止的上下方向C（高度方向）的距離。在教導單元20中，藉由三台第三測距儀42在教導板31的三點進行自單元本體21的規定位置至教導板31的規定位置為止的上下方向C（高度方向）的距離的檢測。 角度計43檢測單元本體21相對於教導板31的傾斜。角度計43安裝於單元本體21的凸緣27的下部。 As shown in FIGS. 2 and 3A , the first rangefinder 40 is a laser rangefinder, and detects the left-right direction from the predetermined position of the unit body 21 to the predetermined position of the teaching board 31 when teaching the ceiling truck 10 . A's distance. The first range finder 40 is attached to the frame body 22A erected on the bottom plate 22 of the unit body 21 . The first rangefinder 40 detects the distance in the left-right direction A from the predetermined position of the unit body 21 to the predetermined position of the teaching board 31 by irradiating the inner surface of one of the side walls 36 of the teaching board 31 with laser light. One of the first rangefinders 40 is provided in the unit body 21 . In the teaching unit 20 , the distance in the left-right direction A from the predetermined position of the unit main body 21 to the predetermined position of the teaching pad 31 is detected at one point of the teaching pad 31 by one first range finder 40 . The second range finder 41 is a laser range finder, and detects the distance in the front-rear direction B from a predetermined position of the unit main body 21 to a predetermined position of the teaching board 31 when teaching the ceiling truck 10 . The second range finder 41 is mounted on the bottom plate 22 of the unit body 21 . The second distance meter 41 detects the distance in the front-rear direction B from the predetermined position of the unit body 21 to the predetermined position of the teaching board 31 by irradiating the reflector 35 of the teaching board 31 with laser light. Two second rangefinders 41 are provided in the unit body 21 . In the teaching unit 20 , the distance in the front-rear direction B from the predetermined position of the unit body 21 to the predetermined position of the teaching pad 31 is detected at two points of the teaching pad 31 by two second rangefinders 41 . The third rangefinder 42 is a laser rangefinder, and detects the distance in the vertical direction C (height direction) from a predetermined position of the unit body 21 to a predetermined position of the teaching board 31 when teaching the ceiling truck 10 . The third range finder 42 is mounted on the pillar 23 or the support frame 26 of the unit body 21 . The third rangefinder 42 detects the distance in the vertical direction C (height direction) from the predetermined position of the unit main body 21 to the predetermined position of the teaching board 31 by irradiating the upper surface of the board body 32 of the teaching board 31 with laser light. In the teaching unit 20 , the distance in the vertical direction C (height direction) from the predetermined position of the unit main body 21 to the predetermined position of the teaching board 31 is measured at three points of the teaching board 31 by three third rangefinders 42 . detection. The goniometer 43 detects the inclination of the unit body 21 with respect to the teaching board 31 . The goniometer 43 is attached to the lower part of the flange 27 of the unit body 21 .

繼而，說明對天花板搬運車10的教導（在天花板搬運車10之移載位置學習方法）以及對天花板搬運車10教導時的教導單元20的作用。 在對天花板搬運車10的教導中，使用在搭載於天花板搬運車10的教導單元20的單元本體21設置的測距儀40、測距儀41、測距儀42、以及角度計43，對單元本體21相對於教導板31在左右方向A、前後方向B、上下方向C及旋轉方向上的位置以及單元本體21相對於教導板31的傾斜量進行測定，根據測定出的各個結果計算昇降部15的握持部16相對於教導板31的偏差，並在將計算出的該偏差反映至天花板搬運車10的學習值之後使天花板搬運車10學習所述環箍等（被搬運物）相對於裝載埠94的移載位置。 Next, the teaching of the ceiling-mounted transporter 10 (the method of learning the transfer position of the ceiling-mounted transporter 10 ) and the role of the teaching unit 20 when teaching the ceiling-mounted transporter 10 will be described. In the teaching of the ceiling truck 10, the distance meter 40, the distance meter 41, the distance meter 42, and the angle meter 43 provided in the unit main body 21 of the teaching unit 20 mounted on the ceiling truck 10 are used. The position of the main body 21 relative to the teaching board 31 in the left-right direction A, the front-rear direction B, the vertical direction C, and the rotation direction, and the inclination of the unit body 21 relative to the teaching board 31 are measured, and the lifting portion 15 is calculated based on the measured results. The deviation of the grip portion 16 relative to the teaching board 31 is reflected, and after reflecting the calculated deviation to the learning value of the ceiling truck 10, the ceiling truck 10 is made to learn the hoop etc. Port 94's transfer position.

如圖1及圖4A至圖4C所示，在對天花板搬運車10進行教導時，首先，將教導單元20搭載於天花板搬運車10。此時，天花板搬運車10在藉由昇降部15的握持部16握持教導單元20（單元本體21的凸緣27）的狀態下，上昇至相對於本體部14的規定位置並保持。 天花板搬運車10在藉由握持部16握持單元本體21的凸緣27的狀態下將教導單元20搬運至作為目標的裝載埠94（用於對天花板搬運車10進行教導的裝載埠（學習站））的上方位置。此時，教導板31藉由利用握持部16握持的單元本體21支撐，與單元本體21一體地由天花板搬運車10進行搬運。此處，如圖3A及圖3B所示，在單元本體21與教導板31中，單元本體21的第一突起部29的第一輥29B與教導板31的槽部38嵌合，並且教導板31的突出部39載置於單元本體21的基台28。 As shown in FIGS. 1 and 4A to 4C , when teaching the ceiling transport vehicle 10 , first, the teaching unit 20 is mounted on the ceiling transport vehicle 10 . At this time, the ceiling truck 10 ascends to a predetermined position with respect to the main body 14 and holds the teaching unit 20 (the flange 27 of the unit main body 21 ) while being held by the holding part 16 of the elevating part 15 . The ceiling transporter 10 transports the teaching unit 20 to the target loading port 94 (loading port for teaching the ceiling transporter 10 (learning station)) in the upper position. At this time, the teaching board 31 is supported by the unit main body 21 held by the holding portion 16 , and is conveyed by the ceiling truck 10 integrally with the unit main body 21 . Here, as shown in FIGS. 3A and 3B , in the unit body 21 and the teaching board 31, the first roller 29B of the first protrusion 29 of the unit body 21 is fitted into the groove 38 of the teaching board 31, and the teaching board The protruding portion 39 of 31 is placed on the base 28 of the unit body 21 .

天花板搬運車10在將教導單元20搬運至作為目標的裝載埠94的上方位置時，使行進部11停止在行進軌道92的規定位置。進而，天花板搬運車10使握持部16橫行及旋轉，使握持部16移動至用於對天花板搬運車10進行教導的基準位置（學習的基準位置）。如圖4A所示，天花板搬運車10在使握持部16移動至所述基準位置時，藉由使握持部16下降而使教導單元20下降至裝載埠94。藉此，如圖4B所示，教導板31接近裝載埠94的銷95，板本體32的孔部33以嵌入裝載埠94的銷95的方式載置於裝載埠94。此時，教導板31在藉由利用握持部16握持的單元本體21支撐的狀態下載置於裝載埠94。When the ceiling transport vehicle 10 transports the teaching unit 20 to a position above the target loading port 94 , the traveling portion 11 is stopped at a predetermined position of the traveling rail 92 . Furthermore, the ceiling transport vehicle 10 traverses and rotates the grip portion 16 to move the grip portion 16 to a reference position (a learned reference position) for teaching the ceiling transport vehicle 10 . As shown in FIG. 4A , when moving the grip portion 16 to the reference position, the ceiling truck 10 lowers the grip portion 16 to lower the teaching unit 20 to the loading port 94 . Thereby, as shown in FIG. 4B , the teaching board 31 approaches the pins 95 of the loading port 94 , and the holes 33 of the board body 32 are placed on the loading port 94 so as to fit into the pins 95 of the loading port 94 . At this time, the teaching board 31 is loaded into the loading port 94 in a state supported by the unit body 21 held by the holding portion 16 .

如圖3A、圖3B及圖4C所示，天花板搬運車10在將教導板31載置於裝載埠94之後仍繼續持續握持部16的下降動作。此時，單元本體21的第一突起部29的第一輥29B遠離教導板31的槽部38，並且單元本體21的基台28遠離教導板31的突出部39，使得單元本體21與教導板31分離。即，單元本體21的第一突起部29的第一輥29B與教導板31的槽部38的嵌合被解除，單元本體21相對於教導板31的支撐被解除。 天花板搬運車10在第三測距儀42下降至學習位置時停止握持部16的下降動作。此處，天花板搬運車10藉由設置於板本體32的所有接觸感測器34是否檢測到裝載埠94的銷95，來判斷教導板31是否載置於裝載埠94的適當位置（板本體32的所有孔部33嵌入裝載埠94的所有銷95的位置）。在判斷為教導板31未載置於裝載埠94的適當位置的情況下，天花板搬運車10藉由重覆握持部16的上昇及下降動作，將教導板31載置於裝載埠94的適當位置。 As shown in FIGS. 3A , 3B and 4C , the ceiling truck 10 continues the downward movement of the grip portion 16 after the teaching board 31 is placed on the loading port 94 . At this time, the first roller 29B of the first protruding portion 29 of the unit body 21 is away from the groove portion 38 of the teaching board 31, and the base 28 of the unit body 21 is away from the protruding portion 39 of the teaching board 31, so that the unit body 21 and the teaching board 31 are separated from each other. 31 Separation. That is, the engagement of the first roller 29B of the first protrusion 29 of the unit body 21 with the groove 38 of the teaching board 31 is released, and the support of the unit body 21 with respect to the teaching board 31 is released. The ceiling truck 10 stops the lowering operation of the grip portion 16 when the third rangefinder 42 is lowered to the learning position. Here, the ceiling truck 10 judges whether the teaching board 31 is placed in the proper position of the loading port 94 by whether all the contact sensors 34 provided on the board body 32 detect the pins 95 of the loading port 94 (the board body 32 all the holes 33 of the loading port 94 are inserted into all the pins 95 of the position). When it is determined that the teaching board 31 is not placed in the proper position of the loading port 94 , the ceiling truck 10 repeats the ascending and descending motion of the grip portion 16 to place the teaching board 31 on the proper position of the loading port 94 . Location.

當第三測距儀42下降至學習位置，且教導板31被載置於裝載埠94的適當位置時，在天花板搬運車10中，藉由測距儀40、測距儀41檢測自單元本體21的規定位置至教導板31的規定位置為止的左右方向A及前後方向B的距離。而且，在天花板搬運車10中，基於測距儀40、測距儀41的檢測結果，測定以教導板31為基準的單元本體21的左右方向A、前後方向B及旋轉方向的位置，並基於測定出的單元本體21的左右方向A、前後方向B及旋轉方向的位置，計算出以教導板31為基準的握持部16的行進方向、橫行方向及旋轉方向的位置。When the third range finder 42 is lowered to the learning position and the teaching board 31 is placed in the proper position of the loading port 94 , in the ceiling truck 10 , the self-unit body is detected by the range finder 40 and the range finder 41 The distance in the left-right direction A and the front-rear direction B from the predetermined position of 21 to the predetermined position of the teaching board 31 . Furthermore, in the ceiling transport vehicle 10, based on the detection results of the range finder 40 and the range finder 41, the positions in the left-right direction A, the front-rear direction B, and the rotation direction of the unit body 21 with respect to the teaching board 31 are measured, and based on the The measured positions of the unit body 21 in the left-right direction A, the front-rear direction B, and the rotation direction are used to calculate the position of the grip portion 16 in the advancing direction, the transverse direction, and the rotation direction with respect to the teaching board 31 .

具體而言，在天花板搬運車10中，基於第一測距儀40的檢測結果，計算出以教導板31的位置為基準的握持部16的行進方向的位置。另外，在天花板搬運車10中，基於第二測距儀41的檢測結果，計算出以教導板31的位置為基準的握持部16的橫行方向的位置及旋轉方向的位置。此處，教導板31在裝載埠94中載置於用於對天花板搬運車10進行教導的基準位置（學習的基準位置），因此藉由以教導板31為基準計算握持部16的位置，可計算出握持部16的位置相對於學習的基準位置的偏差。因此，在握持部16的位置偏離作為學習的基準位置的教導板31的情況下，測距儀40、測距儀41檢測與預先設定的值（距離）之間的偏差值（距離）。Specifically, in the ceiling truck 10 , based on the detection result of the first range finder 40 , the position of the grip portion 16 in the traveling direction with respect to the position of the teaching board 31 is calculated. In addition, in the ceiling truck 10 , based on the detection result of the second range finder 41 , the position in the lateral direction and the position in the rotation direction of the grip portion 16 with reference to the position of the teaching board 31 are calculated. Here, since the teaching board 31 is placed in the loading port 94 at a reference position for teaching the ceiling truck 10 (a reference position for learning), the position of the grip portion 16 is calculated using the teaching board 31 as a reference. The deviation of the position of the grip portion 16 from the learned reference position can be calculated. Therefore, when the position of the grip portion 16 deviates from the teaching pad 31 serving as the reference position for learning, the rangefinder 40 and the rangefinder 41 detect a deviation value (distance) from a preset value (distance).

在天花板搬運車10中，當計算出握持部16的位置時，判斷計算出的握持部16的位置是否為預先設定的範圍內的位置。在計算出的握持部16的位置並非預先設定的範圍內的位置的情況下，天花板搬運車10使握持部16橫行及旋轉，將握持部16的位置補正為預先設定的範圍內的位置，再次測定握持部16的行進方向、橫行方向及旋轉方向的位置。在天花板搬運車10中，反覆進行握持部16的位置的補正及測定，直至握持部16的位置成為預先設定的範圍內的位置。 在握持部16的位置為預先設定的範圍內的位置的情況下，在天花板搬運車10中，藉由三台第三測距儀42或一台第三測距儀42及角度計43來檢測單元本體21相對於教導板31的傾斜。而且，在天花板搬運車10中，基於三台第三測距儀42或一台第三測距儀42及角度計43的檢測結果，測定單元本體21相對於教導板31在左右方向A及前後方向B上的傾斜量，並基於測定出的單元本體21在左右方向A及前後方向B上的傾斜量，計算出握持部16相對於教導板31在行進方向及橫行方向上的傾斜量。 當計算出握持部16相對於教導板31在行進方向及橫行方向上的傾斜量後，天花板搬運車10將到此為止測定及計算出的數據作為學習數據儲存。進而，如圖4C所示，天花板搬運車10藉由使握持部16上昇，從而使教導單元20自裝載埠94上昇。藉此，首先，僅處於由握持部16握持的狀態下的單元本體21上昇。如圖4B所示，藉由單元本體21上昇，單元本體21的基台28抵接於板本體32的突出部39，並且單元本體21的第一突起部29的第一輥29B與教導板31的槽部38嵌合，教導板31由單元本體21支撐。然後，如圖4B所示，藉由單元本體21進一步上昇，教導板31被單元本體21抬起，教導板31與單元本體21一體地上昇。藉此，單元本體21與教導板31成為一體的教導單元20在由握持部16握持的狀態下上昇至相對於本體部14的規定位置。然後，對天花板搬運車10的教導結束。 In the ceiling truck 10, when the position of the grip portion 16 is calculated, it is determined whether or not the calculated position of the grip portion 16 is within a predetermined range. When the calculated position of the grip portion 16 is not within the preset range, the ceiling truck 10 traverses and rotates the grip portion 16 to correct the position of the grip portion 16 within the preset range. position, and the positions of the grip portion 16 in the advancing direction, the lateral direction, and the rotational direction are measured again. In the ceiling truck 10, the correction and measurement of the position of the grip portion 16 are repeatedly performed until the position of the grip portion 16 becomes a position within a predetermined range. When the position of the grip portion 16 is within a predetermined range, in the ceiling truck 10 , three third rangefinders 42 or one third rangefinder 42 and the angle meter 43 are used for detection. The inclination of the unit body 21 with respect to the teaching board 31 . Furthermore, in the ceiling truck 10 , based on the detection results of the three third rangefinders 42 or the one third rangefinder 42 and the angle meter 43 , the measurement unit main body 21 is positioned in the left-right direction A and the front-rear direction with respect to the teaching board 31 . The amount of inclination in the direction B is calculated based on the amount of inclination of the unit body 21 in the left-right direction A and the front-rear direction B, and the inclination amount of the grip portion 16 relative to the teaching board 31 in the traveling direction and the lateral direction is calculated. After calculating the inclination amounts of the grip portion 16 with respect to the teaching board 31 in the traveling direction and the lateral direction, the ceiling truck 10 stores the data measured and calculated so far as learning data. Furthermore, as shown in FIG. 4C , by raising the grip portion 16 of the ceiling truck 10 , the teaching unit 20 is raised from the loading port 94 . Thereby, first, only the unit main body 21 in the state gripped by the grip portion 16 is lifted. As shown in FIG. 4B , when the unit body 21 is raised, the base 28 of the unit body 21 abuts against the protrusion 39 of the board body 32 , and the first roller 29B of the first protrusion 29 of the unit body 21 and the teaching board 31 The groove portion 38 of the unit body 31 is fitted, and the teaching board 31 is supported by the unit body 21 . Then, as shown in FIG. 4B , when the unit body 21 is further raised, the teaching board 31 is lifted by the unit body 21 , and the teaching board 31 and the unit body 21 are raised integrally. Thereby, the teaching unit 20 in which the unit main body 21 and the teaching board 31 are integrated is raised to a predetermined position with respect to the main body portion 14 in a state held by the holding portion 16 . Then, the teaching of the ceiling truck 10 ends.

如此，在對天花板搬運車10的教導中，單元本體21與教導板31成為一體的教導單元20被搬運至目標裝載埠94（學習站），將教導板31載置於作為目標的裝載埠94，藉此單元本體21與教導板31分離而成為能對天花板搬運車10進行教導的狀態。 另外，在結束對天花板搬運車10的教導時，藉由天花板搬運車10使單元本體21上昇，與單元本體21分離的教導板31即在被單元本體21抬起的狀態下與單元本體21成為一體，且成為能夠由天花板搬運車10進行搬運的狀態。 In this way, in the teaching of the ceiling truck 10, the teaching unit 20 in which the unit body 21 and the teaching board 31 are integrated is transported to the target loading port 94 (learning station), and the teaching board 31 is placed on the target loading port 94. , the unit body 21 is separated from the teaching board 31 and the ceiling truck 10 can be taught. In addition, when the teaching of the ceiling truck 10 is completed, the unit body 21 is raised by the ceiling truck 10, and the teaching board 31 separated from the unit body 21 becomes the unit body 21 in a state of being lifted by the unit body 21. It becomes a state which can be conveyed by the ceiling conveyance vehicle 10 as a whole.

如上所述，在天花板搬運車10、教導單元20以及在天花板搬運車10之移載位置學習方法中，在對天花板搬運車10進行教導（被搬運物相對於裝載埠94的移載位置的學習）時，教導板31藉由天花板搬運車10設置於裝載埠94且自裝載埠94撤除，因此作業者無需進行在裝載埠94設置教導板31的作業或自裝載埠94撤除教導板31的作業。因此，可在短時間內容易地對天花板搬運車10進行教導。As described above, in the ceiling truck 10, the teaching unit 20, and the method for learning the transfer position on the ceiling truck 10, the ceiling truck 10 is taught (learning of the transfer position of the object to be transported relative to the loading port 94). ), the teaching board 31 is installed in the loading port 94 by the ceiling truck 10 and removed from the loading port 94, so the operator does not need to perform the operation of setting the teaching board 31 in the loading port 94 or removing the teaching board 31 from the loading port 94. . Therefore, the ceiling truck 10 can be easily taught in a short time.

再者，在本實施方式中，藉由測距儀40、測距儀41、測距儀42及角度計43檢測教導板31相對於單元本體21的距離及傾斜，但並不限定於此，亦可藉由照相機的圖像進行檢測。 在本實施形態中，由第一輥29B構成與教導板31的槽部38嵌合的單元本體21的嵌合部，但並不限定於此，亦可由輥以外的構件構成。 在本實施形態中，在教導板31的槽部38的兩側形成有突出部39，但並不限定於此，亦可不設置自開口部37的上部向下方突出的部分而平坦地構成。 Furthermore, in the present embodiment, the distance and inclination of the teaching board 31 relative to the unit body 21 are detected by the range finder 40 , the range finder 41 , the range finder 42 and the angle meter 43 , but it is not limited to this. It can also be detected by the image of the camera. In the present embodiment, the first roller 29B constitutes the fitting portion of the unit body 21 to be fitted into the groove portion 38 of the teaching board 31, but it is not limited to this, and may be constituted by a member other than the roller. In the present embodiment, the protrusions 39 are formed on both sides of the groove 38 of the teaching board 31 , but the present invention is not limited to this, and may be formed flat without providing a portion protruding downward from the upper portion of the opening 37 .

10:天花板搬運車 11:行進部 12:行進車輪 13:行進驅動部 14:本體部 15:昇降部 16:握持部 17:線 20:教導單元 21:單元本體 22:底板 22A:框體 23:支柱 24:上面板 25:橫框 26:支撐框 27:凸緣 28:基台 29:第一突起部 29A:第一輥支撐體 29B:第一輥（嵌合部） 30:第二突起部 30A:第二輥支撐體 30B:第二輥 31:教導板 32:板本體 33:孔部 34:接觸感測器 35:反射板 36:側壁 37:開口部 38:槽部 39:突出部 40:第一測距儀（檢測部、測距儀） 41:第二測距儀（檢測部、測距儀） 42:第三測距儀（檢測部、測距儀） 43:角度計（檢測部） 90:潔淨室（設備） 91:天花板 92:行進軌道 93:處理裝置 94:裝載埠（載置部） 95:銷 A:左右方向 B:前後方向 C:上下方向（高度方向） 10: Ceiling van 11: Marching Department 12: Travel Wheels 13: Travel drive part 14: Main body 15: Lifting part 16: Grip 17: Line 20: Teaching Unit 21: Unit body 22: Bottom plate 22A: Frame 23: Pillars 24: Upper panel 25: Horizontal frame 26: Support frame 27: Flange 28: Abutment 29: The first protrusion 29A: First Roll Support 29B: The first roller (fitting part) 30: Second protrusion 30A: Second Roll Support 30B: Second Roll 31: Teaching Board 32: Board body 33: Hole 34: Touch Sensor 35: Reflector 36: Sidewall 37: Opening 38: Groove 39: Protrusions 40: The first rangefinder (detection part, rangefinder) 41: Second rangefinder (detection part, rangefinder) 42: The third rangefinder (detection part, rangefinder) 43: Angle meter (detection part) 90: Clean room (equipment) 91: Ceiling 92: Marching track 93: Processing device 94: Loading port (loading part) 95: pin A: Left and right direction B: Front and rear direction C: Up and down direction (height direction)

圖1是本發明的實施形態的天花板搬運車及包括其的半導體基板的處理設備的概略圖。 圖2是搭載於所述天花板搬運車的教導單元的立體圖。 圖3A是構成所述教導單元的單元本體的立體圖。 圖3B是構成所述教導單元的教導板的立體圖。 圖4A是所述教導單元相對於裝載埠昇降時的所述教導單元的正面圖。 圖4B是教導板載置於裝載埠時的所述教導單元的正面圖。 圖4C是對天花板搬運車進行教導時的所述教導單元的正面圖。 FIG. 1 is a schematic diagram of a ceiling truck according to an embodiment of the present invention and a processing facility for semiconductor substrates including the same. 2 is a perspective view of a teaching unit mounted on the ceiling transport vehicle. 3A is a perspective view of a unit body constituting the teaching unit. 3B is a perspective view of a teaching board constituting the teaching unit. 4A is a front view of the teaching unit when the teaching unit is raised and lowered relative to the loading port. 4B is a front view of the teaching unit when the teaching board is placed in the loading port. 4C is a front view of the teaching unit when teaching the ceiling truck.

15:昇降部 15: Lifting part

16:握持部 16: Grip

17:線 17: Line

20:教導單元 20: Teaching Unit

21:單元本體 21: Unit body

27:凸緣 27: Flange

28:基台 28: Abutment

31:教導板 31: Teaching Board

33:孔部 33: Hole

35:反射板 35: Reflector

37:開口部 37: Opening

40:第一測距儀(檢測部、測距儀) 40: The first rangefinder (detection part, rangefinder)

42:第三測距儀(檢測部、測距儀) 42: The third rangefinder (detection part, rangefinder)

43:角度計(檢測部) 43: Angle meter (detection part)

94:裝載埠(載置部) 94: Loading port (loading part)

95:銷 95: pin

Claims (5)

一種天花板搬運車，包括：行進部，沿著鋪設於設備內的天花板的行進軌道行進自如；本體部，支撐於所述行進部而與所述行進部一體行進；以及昇降部，能夠支撐被搬運物且能夠相對於所述本體部昇降，在由所述昇降部支撐所述被搬運物的狀態下，藉由所述行進部的行進將所述被搬運物沿著所述行進軌道搬運，並能夠藉由所述昇降部的昇降將所述被搬運物移載至所述設備內的移載部，所述天花板搬運車的特徵在於， 所述昇降部構成為支撐教導單元並能夠相對於所述本體部昇降，所述教導單元用於學習所述被搬運物相對於所述移載部的移載位置， 所述教導單元包括： 單元本體，由所述昇降部支撐； 教導板，設置於所述移載部；以及 檢測部，由所述單元本體支撐，並且檢測所述教導板的位置， 且所述教導單元能夠基於由所述檢測部檢測出的所述教導板的位置來學習所述被搬運物相對於所述移載部的移載位置， 所述單元本體構成為能夠支撐所述教導板，藉由將所述教導板移載至所述移載部來解除對所述教導板的支撐。 A ceiling transport vehicle, comprising: a traveling part that can travel freely along a traveling track of a ceiling laid in equipment; a main body part that is supported by the traveling part and travels integrally with the traveling part; and an elevating part that can support the conveyed The object can be raised and lowered relative to the main body, and the object to be conveyed is conveyed along the traveling rail by the traveling of the traveling portion in a state where the object to be conveyed is supported by the elevating portion, and The object to be transported can be transferred to the transfer section in the facility by the lifting and lowering of the lifting section, and the ceiling transport vehicle is characterized in that: The elevating portion is configured to support a teaching unit that can be lifted and lowered relative to the main body portion, and the teaching unit is configured to learn a transfer position of the object to be conveyed relative to the transfer portion, The teaching unit includes: a unit body, supported by the lifting part; a teaching board, arranged on the transfer part; and a detection part, which is supported by the unit body and detects the position of the teaching board, and the teaching unit can learn the transfer position of the object relative to the transfer section based on the position of the teaching board detected by the detection section, The unit body is configured to be able to support the teaching board, and the support of the teaching board is released by transferring the teaching board to the transfer portion. 如請求項1所述的天花板搬運車，其中 所述單元本體包括： 嵌合部，與所述教導板嵌合， 藉由將所述教導板載置於所述移載部來解除所述嵌合部與所述教導板的嵌合。 The ceiling truck of claim 1, wherein The unit body includes: The fitting part is fitted with the teaching board, The fitting of the fitting portion and the teaching pad is released by placing the teaching pad on the transfer portion. 一種教導單元，用於使天花板搬運車學習被搬運物相對於移載部的移載位置，所述天花板搬運車包括：行進部，沿著鋪設於設備內的天花板的行進軌道行進自如；本體部，支撐於所述行進部而與所述行進部一體行進；以及昇降部，能夠支撐所述被搬運物且能夠相對於所述本體部昇降，且所述天花板搬運車在由所述昇降部支撐所述被搬運物的狀態下，藉由所述行進部的行進將所述被搬運物沿著所述行進軌道搬運，並能夠藉由所述昇降部的昇降將所述被搬運物移載至所述設備內的所述移載部，所述教導單元的特徵在於， 所述教導單元構成為由所述昇降部支撐並能夠相對於所述本體部昇降， 且所述教導單元包括： 單元本體，由所述昇降部支撐； 教導板，設置於所述移載部；以及 檢測部，由所述單元本體支撐，並且檢測所述教導板的位置， 所述教導單元能夠使所述天花板搬運車基於由所述檢測部檢測出的所述教導板的位置來學習所述被搬運物相對於所述移載部的移載位置， 所述單元本體構成為能夠支撐所述教導板，藉由將所述教導板移載至所述移載部來解除對所述教導板的支撐。 A teaching unit for learning a transfer position of a to-be-transported object relative to a transfer part for a ceiling-mounted truck, the ceiling-mounted truck comprising: a traveling part that can travel freely along a traveling track of a ceiling laid in a device; a main body part , which is supported by the traveling portion and travels integrally with the traveling portion; and an elevating portion that can support the object to be conveyed and is capable of ascending and descending relative to the main body portion, and the ceiling transport vehicle is supported by the elevating portion. In the state of the object to be conveyed, the object to be conveyed is conveyed along the traveling rail by the traveling of the traveling part, and the object to be conveyed can be transferred to the moving part by the lifting and lowering of the elevating part. The transfer unit in the apparatus, the teaching unit is characterized in that: The teaching unit is configured to be supported by the elevating portion and capable of raising and lowering relative to the main body portion, And the teaching unit includes: a unit body, supported by the lifting part; a teaching board, arranged on the transfer part; and a detection part, which is supported by the unit body and detects the position of the teaching board, The teaching unit can cause the ceiling transport vehicle to learn the transfer position of the object relative to the transfer section based on the position of the teaching board detected by the detection section, The unit body is configured to be able to support the teaching board, and the support of the teaching board is released by transferring the teaching board to the transfer portion. 如請求項3所述的教導單元，其中 所述單元本體包括： 嵌合部，與所述教導板嵌合， 藉由將所述教導板載置於所述移載部來解除所述嵌合部與所述教導板的嵌合。 The teaching unit of claim 3, wherein The unit body includes: The fitting part is fitted with the teaching board, The fitting of the fitting portion and the teaching pad is released by placing the teaching pad on the transfer portion. 一種在天花板搬運車之移載位置學習方法，用於使天花板搬運車學習被搬運物相對於移載部的移載位置，所述天花板搬運車包括：行進部，沿著鋪設於設備內的天花板的行進軌道行進自如；本體部，支撐於所述行進部而與所述行進部一體行進；以及昇降部，能夠支撐所述被搬運物且能夠相對於所述本體部昇降，且所述天花板搬運車在由所述昇降部支撐所述被搬運物的狀態下，藉由所述行進部的行進將所述被搬運物沿著所述行進軌道搬運，並能夠藉由所述昇降部的昇降將所述被搬運物移載至所述設備內的所述移載部，所述在天花板搬運車之移載位置學習方法的特徵在於， 藉由所述昇降部將教導單元支撐為能夠相對於所述本體部昇降，所述教導單元包括：單元本體，由所述昇降部支撐；教導板，設置於所述移載部；以及檢測部，由所述單元本體支撐，並且檢測所述教導板的位置， 藉由將所述教導板移載至所述移載部來解除所述單元本體對所述教導板的支撐， 在解除所述單元本體對所述教導板的支撐後，使所述天花板台車基於由所述檢測部檢測出的所述教導板的位置來學習所述被搬運物相對於所述移載部的移載位置。 A method for learning the transfer position of a ceiling truck, which is used for the ceiling truck to learn the transfer position of the object to be transported relative to the transfer part, the ceiling truck comprising: a traveling part along a ceiling laid in the equipment The traveling rail can travel freely; the main body part is supported by the traveling part and travels integrally with the traveling part; In a state where the object to be conveyed is supported by the elevating part, the vehicle conveys the object to be conveyed along the traveling rail by the traveling of the traveling part, and can lift the object by the elevating and lowering of the elevating part. The said object to be conveyed is transferred to the said transfer part in the said facility, and the said method of learning the transfer position of the ceiling truck is characterized in that: The teaching unit is supported by the elevating part so as to be able to move up and down relative to the main body part, and the teaching unit includes: a unit body supported by the elevating part; a teaching board provided on the transfer part; and a detection part , supported by the unit body, and detects the position of the teaching board, By transferring the teaching board to the transfer part, the support of the unit body to the teaching board is released, After the support of the teaching board by the unit body is released, the ceiling cart is caused to learn the position of the conveyed object relative to the transfer section based on the position of the teaching board detected by the detection section. Transfer location.
TW110116052A 2020-05-26 2021-05-04 Ceiling transport vehicle, teaching unit, and transfer position learning method in ceiling transport vehicle TW202212235A (en)

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