TW202210786A - Linear displacement calibration method and inspection apparatus using the same - Google Patents

Linear displacement calibration method and inspection apparatus using the same Download PDF

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TW202210786A
TW202210786A TW109131337A TW109131337A TW202210786A TW 202210786 A TW202210786 A TW 202210786A TW 109131337 A TW109131337 A TW 109131337A TW 109131337 A TW109131337 A TW 109131337A TW 202210786 A TW202210786 A TW 202210786A
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measurement
displacement
distances
calibration
processing module
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TW109131337A
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Chinese (zh)
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TWI735337B (en
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鄒嘉駿
王人傑
林佳民
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由田新技股份有限公司
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Priority to CN202110598294.2A priority patent/CN114166163A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042Calibration or calibration artifacts

Abstract

A linear displacement calibration method includes the following steps: measuring the displacement of a moving member in a linear direction through a displacement sensor to obtain a plurality of first measuring distances, measuring the displacement of the moving member in the linear direction through a calibration measuring device to obtain a plurality of second measuring distances, establishing a relative relationship comparison table based on the first measuring distances and the second measuring distances, so that the first measuring distances correspond to the second measuring distances respectively, and obtaining the second measuring distance corresponding to each of the first measuring distances from the relative relationship comparison table as a calibration distance. Therefore, the speed and the efficiency of calibration can be improved. The present disclosure also provides an inspection apparatus using the above-mentioned linear displacement calibration method.

Description

線性位移校正方法及使用其方法的檢測設備Linear displacement correction method and detection equipment using the same

本發明是有關於一種線性位移校正方法,特別是指一種用以校正移動件線性位移大小的線性位移校正方法及使用其方法的檢測設備。The present invention relates to a linear displacement correction method, in particular to a linear displacement correction method for correcting the magnitude of the linear displacement of a moving part and a detection device using the method.

現有光學檢測設備透過一驅動機構驅動一載台直線移動,使得載台能帶動所承載的一待測物通過一光學攝影機,以供光學攝影機擷取待測物的影像。光學檢測設備還會透過一線性編碼器的一讀取頭讀取一光學尺的刻度並反饋至一控制器,使控制器依據刻度控制驅動機構驅動載台移動的速度及行程。The existing optical inspection equipment drives a stage to move linearly through a driving mechanism, so that the stage can drive an object to be measured carried by the stage to pass through an optical camera, so that the optical camera can capture the image of the object to be measured. The optical detection device also reads the scale of an optical scale through a read head of a linear encoder and feeds it back to a controller, so that the controller controls the speed and stroke of the drive mechanism to drive the stage to move according to the scale.

然而,驅動機構的細部元件之間的組裝公差、驅動機構與載台之間的組裝公差、讀取頭與光學尺之間的組裝公差,或者是光學尺的多個刻度之間的公差等皆會影響線性編碼器量測載台移動距離的準確性,使得控制器驅動載台移動的速度會產生過慢或過快的情形,從而導致光學攝影機擷取到的待測物影像產生形變,在後續要進行拼接時,會造成影像失真甚至是無法拼接等問題。However, the assembly tolerances between the detailed elements of the drive mechanism, the assembly tolerances between the drive mechanism and the stage, the assembly tolerances between the read head and the optical scale, or the tolerances between multiple scales of the optical scale, etc. It will affect the accuracy of the linear encoder to measure the moving distance of the stage, so that the controller drives the stage to move too slowly or too fast, which will cause the image of the object to be measured captured by the optical camera to be deformed. When stitching is performed later, it will cause problems such as image distortion or even inability to stitch.

因此,本發明之其中一目的,即在提供一種能夠克服先前技術的至少一個缺點的線性位移校正方法。Accordingly, one of the objectives of the present invention is to provide a linear displacement correction method that overcomes at least one of the disadvantages of the prior art.

於是,本發明的線性位移校正方法在一些實施態樣中,包含下述步驟:透過一位移感測器量測一移動件沿一直線方向移動的位移,以獲得多個第一量測距離,透過一校正量測裝置量測移動件沿直線方向移動的位移,以獲得多個第二量測距離;根據第一量測距離及第二量測距離建立一相對關係對照表,以使第一量測距離分別與第二量測距離相對應;及由相對關係對照表中獲得各第一量測距離所對應的第二量測距離作為一校正距離。Therefore, in some embodiments, the linear displacement correction method of the present invention includes the following steps: measuring the displacement of a moving member moving in a linear direction through a displacement sensor, so as to obtain a plurality of first measurement distances; A calibration measuring device measures the displacement of the moving piece moving in the linear direction to obtain a plurality of second measuring distances; establishes a relative relation table according to the first measuring distances and the second measuring distances, so that the first measuring distances The measurement distances are respectively corresponding to the second measurement distances; and the second measurement distances corresponding to the first measurement distances are obtained from the relative relationship comparison table as a calibration distance.

於是,本發明的線性位移校正方法在另一些實施態樣中,包含下述步驟:透過一驅動機構驅動一移動件沿一直線方向移動;透過一位移感測器量測移動件沿直線方向移動的位移,透過一校正量測裝置量測移動件沿直線方向移動的位移,藉由一運算處理模組接收位移感測器所反饋的電子訊號以運算出多個第一量測距離,以及接收校正量測裝置所反饋的電子訊號以運算出多個第二量測距離;運算處理模組根據第一量測距離及第二量測距離建立一相對關係對照表,以使第一量測距離分別與第二量測距離相對應;及運算處理模組由相對關係對照表中獲得各第一量測距離所對應的第二量測距離作為一校正距離。Therefore, in other embodiments, the linear displacement correction method of the present invention includes the following steps: driving a moving member to move in a linear direction through a driving mechanism; Displacement, measure the displacement of the moving piece moving in the linear direction through a calibration measuring device, receive the electronic signal fed back by the displacement sensor through an arithmetic processing module to calculate a plurality of first measurement distances, and receive the calibration The electronic signal fed back by the measurement device is used to calculate a plurality of second measurement distances; the calculation processing module establishes a relative relationship table according to the first measurement distance and the second measurement distance, so that the first measurement distances are respectively corresponding to the second measurement distance; and the arithmetic processing module obtains the second measurement distance corresponding to each first measurement distance from the relative relationship comparison table as a correction distance.

本發明之另一目的,即在提供一種能夠克服先前技術的至少一個缺點的檢測設備。Another object of the present invention is to provide a detection device that overcomes at least one of the disadvantages of the prior art.

於是,本發明的檢測設備在一些實施態樣中,包含一移動件、一驅動機構、一位移感測器、一校正量測裝置及一運算處理模組。驅動機構用以驅動移動件沿一直線方向移動。位移感測器用以量測移動件沿直線方向移動的位移。校正量測裝置用以量測移動件沿直線方向移動的位移。運算處理模組電性連接於位移感測器及校正量測裝置,運算處理模組用以接收位移感測器所反饋的電子訊號以運算出多個第一量測距離,以及用以接收校正量測裝置所反饋的電子訊號以運算出多個第二量測距離,運算處理模組根據第一量測距離及第二量測距離建立一相對關係對照表。Therefore, in some embodiments, the detection apparatus of the present invention includes a moving element, a driving mechanism, a displacement sensor, a calibration and measurement device, and an arithmetic processing module. The driving mechanism is used for driving the moving member to move in a linear direction. The displacement sensor is used to measure the displacement of the moving piece moving along the linear direction. The calibration measuring device is used to measure the displacement of the moving piece moving along the linear direction. The arithmetic processing module is electrically connected to the displacement sensor and the calibration measurement device, and the arithmetic processing module is used for receiving the electronic signals fed back by the displacement sensor to calculate a plurality of first measurement distances, and for receiving calibration The electronic signal fed back by the measuring device is used to calculate a plurality of second measuring distances, and the calculation processing module establishes a relative relation table according to the first measuring distance and the second measuring distance.

本發明至少具有以下功效:藉由校正量測裝置量測移動件沿直線方向移動的位移,以獲得第二量測距離的方式,使得運算處理模組能建立第一量測距離與第二量測距離的相對關係對照表,並在實際進行光學檢測時使用查表法進行線性位移校正,藉以提升校正的速度及效率。藉由將作為校正距離的第二量測距離輸入至影像處理模組作為運算參數,使得影像處理模組能將區域影像拼接為不失真的完整影像。將校正量測裝置組裝於機台、移動件及地面,在不需調整或變更檢測設備的相關組成結構的前提下,便能使檢測設備進行校正程序,藉以提升組裝及使用上的便利性。檢測設備不需採用高階且價格昂貴的編碼器就能達到線性位移校正的功效,因此,能降低檢測設備的製造成本。The present invention has at least the following effects: by correcting the measuring device to measure the displacement of the moving piece moving in the linear direction to obtain the second measuring distance, so that the arithmetic processing module can establish the first measuring distance and the second measuring distance The relative relationship of the distance measurement is compared with the table, and the look-up table method is used to perform linear displacement correction in the actual optical detection, so as to improve the speed and efficiency of the correction. By inputting the second measurement distance, which is the correction distance, into the image processing module as an operation parameter, the image processing module can stitch the regional images into an undistorted complete image. By assembling the calibration measuring device on the machine, moving parts and the ground, the inspection equipment can be calibrated without adjusting or changing the relevant components of the inspection equipment, thereby improving the convenience of assembly and use. The detection device can achieve the effect of linear displacement correction without using a high-order and expensive encoder, so the manufacturing cost of the detection device can be reduced.

參閱圖1及圖2,本發明線性位移校正方法之第一實施例,包含下述校正步驟。步驟S1:驅動移動件移動、步驟S2:量測移動件位移、步驟S3:建立對照表、及步驟S4:獲得校正距離。線性位移校正方法用於校正一檢測設備100的線性位移,在本案第一實施例中,檢測設備100是以一光學檢測設備為例,檢測設備100也可以是其他任何需要校正線性位移的設備,不以光學檢測用途為限。Referring to FIG. 1 and FIG. 2 , the first embodiment of the linear displacement calibration method of the present invention includes the following calibration steps. Step S1: driving the moving member to move, step S2: measuring the displacement of the moving member, step S3: establishing a comparison table, and step S4: obtaining the correction distance. The linear displacement correction method is used to correct the linear displacement of a detection device 100. In the first embodiment of this case, the detection device 100 is an optical detection device as an example. The detection device 100 can also be any other device that needs to correct linear displacement. Not limited to optical detection applications.

參閱圖2、圖3及圖4,在本案第一實施例中,檢測設備100包含一機台1、一移動件2、一驅動機構3、一影像擷取裝置4、一位移感測器5、一校正量測裝置6、一運算處理模組7及一影像處理模組8。機台1包括一頂面11、一設置於頂面11的導軌12、一前端13,及一相反於前端13的後端14。導軌12沿一由前朝後的直線方向D延伸。移動件2是以一用以承載一待測物(圖未示)的載台為例,其能滑動地連接於導軌12並可被操作而沿直線方向D移動。驅動機構3包括一馬達31、一螺桿32及一聯軸器33。馬達31設置於機台1的頂面11。螺桿32連接於馬達31並能被其驅動而旋轉,螺桿32沿直線方向D延伸且位於導軌12一側。聯軸器33設置於移動件2一側且螺接於螺桿32。藉此,馬達31驅動螺桿32旋轉時,螺桿32能透過聯軸器33帶動移動件2於導軌12上移動。Referring to FIG. 2 , FIG. 3 and FIG. 4 , in the first embodiment of the present application, the detection apparatus 100 includes a machine table 1 , a moving part 2 , a driving mechanism 3 , an image capturing device 4 , and a displacement sensor 5 , a calibration measuring device 6 , an arithmetic processing module 7 and an image processing module 8 . The machine table 1 includes a top surface 11 , a guide rail 12 disposed on the top surface 11 , a front end 13 , and a rear end 14 opposite to the front end 13 . The guide rail 12 extends in a linear direction D from front to rear. The moving member 2 is an example of a stage for carrying an object to be tested (not shown in the figure), which can be slidably connected to the guide rail 12 and can be operated to move along a linear direction D. The driving mechanism 3 includes a motor 31 , a screw 32 and a coupling 33 . The motor 31 is disposed on the top surface 11 of the machine table 1 . The screw 32 is connected to the motor 31 and can be driven to rotate by the motor 31 . The screw 32 extends along the linear direction D and is located on the side of the guide rail 12 . The coupling 33 is disposed on one side of the moving member 2 and is screwed to the screw rod 32 . Therefore, when the motor 31 drives the screw 32 to rotate, the screw 32 can drive the moving member 2 to move on the guide rail 12 through the coupling 33 .

在本案第一實施例中,影像擷取裝置4是以一線掃描攝影機(Line-Scan Camera)為例,但不以此為限,其設置於機台1的導軌12上方,用以擷取被移動件2所承載而移動的待測物的影像。位移感測器5是以一線性編碼器為例,但不以此為限,其用以量測移動件2沿直線方向D移動的位移。位移感測器5包括一光學尺51及一讀取頭52。光學尺51設置於機台1的頂面11且位在導軌12相反於螺桿32的一側。讀取頭52設置於移動件2相反於聯軸器33的一側且位於光學尺51上方,讀取頭52用以讀取光學尺51的多個刻度(圖未示)中的對應刻度,以將其轉換成對應的電子訊號。在本案第一實施例的其他實施方式中,位移感測器5相對於其他元件的配置位置不以上述為限,可依設計需求而變更。In the first embodiment of the present application, the image capturing device 4 is a line-scan camera (Line-Scan Camera) as an example, but not limited to this, which is disposed above the guide rail 12 of the machine 1 for capturing images The image of the object to be tested carried and moved by the moving part 2 . The displacement sensor 5 is a linear encoder for example, but not limited thereto, and is used to measure the displacement of the moving member 2 moving along the linear direction D. The displacement sensor 5 includes an optical scale 51 and a reading head 52 . The optical scale 51 is disposed on the top surface 11 of the machine table 1 and is located on the side of the guide rail 12 opposite to the screw rod 32 . The reading head 52 is arranged on the side of the moving member 2 opposite to the coupling 33 and above the optical scale 51. The reading head 52 is used to read the corresponding scales among the multiple scales (not shown) of the optical scale 51, to convert it into a corresponding electronic signal. In other implementations of the first embodiment of the present application, the arrangement position of the displacement sensor 5 relative to other components is not limited to the above, and can be changed according to design requirements.

在本案第一實施例中,校正量測裝置6是以一雷射干涉儀為例,但不以此為限,其用以量測移動件2沿直線方向D移動的位移。校正量測裝置6包括一校正光束收發模組61、一第一光學模組62及一第二光學模組63。校正光束收發模組61包含一支架611及一校正光束收發頭612。支架611是以一用以撐立於一地面9上的三腳架為例,但不以此為限。支架611與機台1的前端13相間隔一段適當距離。校正光束收發頭612設置於支架611,用以發射及接收如雷射的校正光束。第一光學模組62包括一第一導磁金屬片621、一第一磁吸架622、一分光鏡623及一第一反射鏡624。第一導磁金屬片621例如透過螺絲鎖固於機台1的頂面11且鄰近於前端13。第一磁吸架622透過磁力吸附於第一導磁金屬片621以固定於其上。分光鏡623設置於第一磁吸架622一側且鄰近其頂端,分光鏡623對齊於校正光束收發頭612後方用以將校正光束收發頭612所射出的校正光束分成兩束校正光。第一反射鏡624設置於第一分光鏡623相反於第一磁吸架622的一側,用以將分光鏡623所分出的其中一束校正光反射回分光鏡623。In the first embodiment of the present application, the calibration and measurement device 6 is a laser interferometer as an example, but not limited thereto, which is used to measure the displacement of the moving member 2 moving in the linear direction D. The calibration measurement device 6 includes a calibration beam transceiver module 61 , a first optical module 62 and a second optical module 63 . The correction beam transceiver module 61 includes a bracket 611 and a correction beam transceiver head 612 . The bracket 611 is an example of a tripod used to stand on a ground 9, but not limited thereto. The bracket 611 is spaced at an appropriate distance from the front end 13 of the machine table 1 . The correction beam transceiver head 612 is disposed on the bracket 611 for emitting and receiving correction beams such as lasers. The first optical module 62 includes a first magnetic conductive metal sheet 621 , a first magnetic holder 622 , a beam splitter 623 and a first reflection mirror 624 . The first magnetic conductive metal sheet 621 is fastened to the top surface 11 of the machine table 1 and is adjacent to the front end 13 , for example, through screws. The first magnetic holder 622 is magnetically attracted to the first magnetic conductive metal sheet 621 to be fixed thereon. The beam splitter 623 is disposed on one side of the first magnetic holder 622 and adjacent to its top. The beam splitter 623 is aligned behind the correction beam transceiver head 612 for dividing the correction beam emitted by the correction beam transceiver head 612 into two correction beams. The first reflecting mirror 624 is disposed on a side of the first beam splitter 623 opposite to the first magnetic holder 622 , and is used to reflect one of the beams of correction light split by the beam splitter 623 back to the beam splitter 623 .

第二光學模組63包括一第二導磁金屬片631、一第二磁吸架632及一第二反射鏡633。第二導磁金屬片631例如透過螺絲鎖固於移動件2頂面。第二磁吸架632透過磁力吸附於第二導磁金屬片631以固定於其上。第二反射鏡633設置於第二磁吸架632前側且鄰近其頂端、並對齊於分光鏡623後方,使得校正光束收發頭612、分光鏡623及第二反射鏡633沿直線方向D相間隔排列。第二反射鏡633用以將分光鏡623所分出的另一束校正光反射回分光鏡623。校正光束收發頭612用以接收反射至分光鏡623並且通過分光鏡623的校正光束,以將其轉換成對應的電子訊號。The second optical module 63 includes a second magnetic conductive metal sheet 631 , a second magnetic holder 632 and a second reflection mirror 633 . The second magnetic conductive metal sheet 631 is fastened to the top surface of the moving member 2 by, for example, screws. The second magnetic holder 632 is magnetically attracted to the second magnetic conductive metal sheet 631 to be fixed thereon. The second reflector 633 is disposed on the front side of the second magnetic holder 632 and adjacent to its top, and is aligned behind the beam splitter 623 , so that the correction beam transceiver 612 , the beam splitter 623 and the second reflector 633 are spaced apart along the linear direction D . The second reflecting mirror 633 is used for reflecting another beam of correction light split by the beam splitter 623 back to the beam splitter 623 . The corrected beam transceiver 612 is used for receiving the corrected beam reflected to the beam splitter 623 and passing through the beam splitter 623 to convert it into a corresponding electronic signal.

值得注意的是,在本案第一實施例中,第一光學模組62以及第二光學模組63是利用磁吸方式分別固定於機台1與移動件2上,在其他實施方式中,第一光學模組62以及第二光學模組63可利用其他方式固定於機台1與移動件2上,不以前述磁吸方式為限。It is worth noting that in the first embodiment of the present case, the first optical module 62 and the second optical module 63 are respectively fixed on the machine table 1 and the moving part 2 by means of magnetic attraction. An optical module 62 and a second optical module 63 can be fixed on the machine table 1 and the moving part 2 by other means, which are not limited to the aforementioned magnetic attraction means.

運算處理模組7電性連接於位移感測器5的讀取頭52以及校正量測裝置6的校正光束收發頭612。運算處理模組7用以接收讀取頭52所反饋的電子訊號以及校正光束收發頭612所反饋的電子訊號。影像處理模組8電性連接於影像擷取裝置4及運算處理模組7,用以接收影像擷取裝置4所擷取的待測物的多個區域影像,以將其拼接為一完整影像。The arithmetic processing module 7 is electrically connected to the read head 52 of the displacement sensor 5 and the calibration beam transceiver head 612 of the calibration measurement device 6 . The arithmetic processing module 7 is used for receiving the electronic signal fed back by the reading head 52 and the electronic signal fed back by the correction beam transceiver 612 . The image processing module 8 is electrically connected to the image capture device 4 and the arithmetic processing module 7, and is used for receiving a plurality of regional images of the object to be tested captured by the image capture device 4, so as to be spliced into a complete image .

以下針對檢測設備100使用本案第一實施例的線性位移校正方法來運作進行詳細說明:The following describes the operation of the detection device 100 using the linear displacement correction method of the first embodiment of the present application in detail:

參閱圖1、圖2及圖5,在步驟S1中,透過驅動機構3的馬達31驅動螺桿32旋轉,使螺桿32透過聯軸器33帶動移動件2由一初始位置(如圖2所示)沿直線方向D移動至一臨界位置(如圖5所示)。1, 2 and 5, in step S1, the screw 32 is driven to rotate through the motor 31 of the driving mechanism 3, so that the screw 32 drives the moving member 2 from an initial position through the coupling 33 (as shown in FIG. 2) Move along the linear direction D to a critical position (as shown in FIG. 5 ).

參閱圖1、圖4及圖5,在移動件2移動的過程中進行步驟S2,透過位移感測器5量測移動件2沿直線方向D移動的位移。藉由讀取頭52讀取光學尺51的對應刻度以將其轉換成對應的電子訊號,並將電子訊號反饋至運算處理模組7。同時,透過校正量測裝置6量測移動件2沿直線方向D移動的位移。校正光束收發頭612所射出的校正光束通過分光鏡623並分成兩束校正光,校正光分別被固定的第一反射鏡624及移動的第二反射鏡633反射回來並會合在分光鏡623上而產生干涉條紋。第二反射鏡633移動時,校正光束收發頭612會將干涉條紋的光強變化轉換成電子訊號並反饋至運算處理模組7。運算處理模組7接收讀取頭52所反饋的電子訊號以運算出對應的一第一量測距離,接收校正光束收發頭612所反饋的電子訊號以運算出對應的一第二量測距離。Referring to FIG. 1 , FIG. 4 and FIG. 5 , step S2 is performed during the movement of the moving member 2 , and the displacement of the moving member 2 moving in the linear direction D is measured through the displacement sensor 5 . The corresponding scale of the optical scale 51 is read by the reading head 52 to convert it into a corresponding electronic signal, and the electronic signal is fed back to the arithmetic processing module 7 . At the same time, the displacement of the moving member 2 moving along the linear direction D is measured through the calibration measuring device 6 . The correction beam emitted by the correction beam transceiver 612 passes through the beam splitter 623 and is divided into two beams of correction light. produce interference fringes. When the second reflecting mirror 633 moves, the correction beam transceiver head 612 converts the light intensity variation of the interference fringes into electronic signals and feeds them back to the arithmetic processing module 7 . The arithmetic processing module 7 receives the electronic signal fed back by the reading head 52 to calculate a corresponding first measurement distance, and receives the electronic signal fed back by the calibration beam transceiver 612 to calculate a corresponding second measurement distance.

移動件2移動的過程中,影像擷取裝置4會依序地擷取待測物的多個區域影像並將其反饋至影像處理模組8。當移動件2移動到臨界位置時,驅動機構3即停止驅動移動件2移動。在移動件2由初始位置移動至臨界位置的過程中,運算處理模組7藉由讀取頭52所反饋的電子訊號運算出多個第一量測距離d1~dn(如圖6所示),並且藉由校正光束收發頭612所反饋的電子訊號運算出多個第二量測距離D1~Dn(如圖6所示)。During the movement of the moving member 2 , the image capturing device 4 sequentially captures images of multiple regions of the object to be measured and feeds them back to the image processing module 8 . When the moving member 2 moves to the critical position, the driving mechanism 3 stops driving the moving member 2 to move. During the process of moving the movable member 2 from the initial position to the critical position, the arithmetic processing module 7 calculates a plurality of first measurement distances d1 ˜dn (as shown in FIG. 6 ) by using the electronic signals fed back by the reading head 52 . , and calculates a plurality of second measurement distances D1 to Dn (as shown in FIG. 6 ) by correcting the electronic signals fed back by the beam transceiver 612 .

參閱圖1、圖4及圖6,隨後進行步驟S3,運算處理模組7根據第一量測距離d1~dn及第二量測距離D1~Dn建立一相對關係對照表71,相對關係對照表71具有一第一量測距離欄位711,及一第二量測距離欄位712。第一量測距離欄位711用以顯示出第一量測距離d1~dn,而第二量測距離欄位712用以顯示出第二量測距離D1~Dn。藉此,使得第一量測距離d1~dn分別與第二量測距離D1~Dn相對應。在相對關係對照表71建立後,運算處理模組7即儲存相對關係對照表71。Referring to FIG. 1 , FIG. 4 and FIG. 6 , step S3 is performed subsequently, and the arithmetic processing module 7 establishes a relative relationship comparison table 71 according to the first measurement distances d1˜dn and the second measurement distances D1˜Dn, and the relative relationship comparison table 71 has a first measurement distance field 711 and a second measurement distance field 712 . The first measurement distance field 711 is used for displaying the first measurement distances d1 ˜dn, and the second measurement distance field 712 is used for displaying the second measurement distances D1 ˜Dn. Thereby, the first measurement distances d1 ˜dn are respectively corresponding to the second measurement distances D1 ˜Dn. After the relative relationship comparison table 71 is established, the arithmetic processing module 7 stores the relative relationship comparison table 71 .

在步驟S4中,運算處理模組7例如使用查表法由相對關係對照表71中獲得各第一量測距離d1~dn所對應定的第二量測距離D1~Dn。例如當運算處理模組7所得到的第一量測距離為d2時,使用查表法獲得對應的第二量測距離為D2,並以第二量測距離D2作為一校正距離,其為一用以輸入至影像處理模組8的運算參數。運算處理模組7藉由查表法獲得校正距離的方式,能降低運算時間及負載,以提升校正的速度及效率。In step S4, the arithmetic processing module 7 obtains the second measurement distances D1-Dn corresponding to the first measurement distances d1-dn from the relative relationship comparison table 71, for example, by using a table look-up method. For example, when the first measurement distance obtained by the arithmetic processing module 7 is d2, the corresponding second measurement distance is obtained as D2 by using a table look-up method, and the second measurement distance D2 is used as a correction distance, which is a The operation parameters used to input to the image processing module 8 . The arithmetic processing module 7 obtains the correction distance through a table look-up method, which can reduce the computing time and load, so as to improve the speed and efficiency of the correction.

由於影像處理模組8將影像擷取裝置4所擷取的區域影像進行拼接時,區域影像之間的相對位置及距離是影響拼接後的完整影像是否失真的重要因素,因此,藉由將作為校正距離的對應的第二量測距離D1~Dn輸入至影像處理模組8作為運算參數,使得區域影像之間的相對位置及距離不會受到位移感測器5的量測準確性影響,藉此,使得影像處理模組8能將區域影像拼接為不失真的完整影像。When the image processing module 8 splices the regional images captured by the image capture device 4, the relative positions and distances between the regional images are important factors that affect whether the spliced complete image is distorted. The second measurement distances D1 to Dn corresponding to the correction distances are input to the image processing module 8 as operation parameters, so that the relative positions and distances between the regional images will not be affected by the measurement accuracy of the displacement sensor 5 . Therefore, the image processing module 8 can stitch the regional images into an undistorted complete image.

參閱圖7及圖8,本發明線性位移校正方法之第二實施例的步驟流程與第一實施例大致相同,不同處在於校正量測裝置6的組裝方式。Referring to FIG. 7 and FIG. 8 , the steps of the second embodiment of the linear displacement calibration method of the present invention are substantially the same as those of the first embodiment, and the difference lies in the assembling method of the calibration measuring device 6 .

在本案第二實施例中,第一光學模組62的第一導磁金屬片621透過螺絲鎖固於移動件2頂面,使得第一光學模組62設置於移動件2上。第二光學模組63的第二導磁金屬片631透過螺絲鎖固於機台1的頂面11且鄰近於後端14,使得第二光學模組63設置於機台1上。藉此,第一光學模組62能被移動件2帶動而相對於校正光束收發模組61及第二光學模組63移動。In the second embodiment of the present case, the first magnetic conductive metal sheet 621 of the first optical module 62 is fastened to the top surface of the moving member 2 through screws, so that the first optical module 62 is disposed on the moving member 2 . The second magnetic conductive metal sheet 631 of the second optical module 63 is fastened to the top surface 11 of the machine table 1 and is adjacent to the rear end 14 through screws, so that the second optical module 63 is disposed on the machine table 1 . Thereby, the first optical module 62 can be driven by the moving member 2 to move relative to the correction beam transceiver module 61 and the second optical module 63 .

綜上所述,各實施例的線性位移校正方法,藉由校正量測裝置6量測移動件2沿直線方向D移動的位移,以獲得第二量測距離D1~Dn的方式,使得運算處理模組7能建立相對關係對照表71並使用查表法獲得各第一量測距離d1~dn所對應定的第二量測距離D1~Dn,並以將其作為校正距離。藉此,能提升校正的速度及效率。藉由將作為校正距離的對應的第二量測距離D1~Dn輸入至影像處理模組8作為運算參數,使得影像處理模組8能將區域影像拼接為不失真的完整影像。此外,將校正量測裝置6組裝於機台1、移動件2及地面9,在不需調整或變更檢測設備100的相關組成結構的前提下,便能使檢測設備100進行線性位移校正,藉此,能提升組裝及使用上的便利性。再者,檢測設備100不需採用高階且價格昂貴的編碼器就能達到線性位移校正的功效,因此,能降低檢測設備100的製造成本,故確實能達成本發明之目的。To sum up, the linear displacement correction method of each embodiment uses the correction measuring device 6 to measure the displacement of the moving member 2 moving in the linear direction D to obtain the second measurement distances D1 to Dn, so that the arithmetic processing is performed. The module 7 can establish a relative relationship comparison table 71 and use the table look-up method to obtain the second measurement distances D1-Dn corresponding to the first measurement distances d1-dn, and use them as the correction distances. Thereby, the speed and efficiency of the calibration can be improved. By inputting the corresponding second measurement distances D1 to Dn as correction distances to the image processing module 8 as operation parameters, the image processing module 8 can stitch the regional images into an undistorted complete image. In addition, by assembling the calibration measuring device 6 on the machine table 1 , the moving part 2 and the ground 9 , the detection device 100 can perform linear displacement correction without adjusting or changing the relevant components of the detection device 100 . Therefore, the convenience of assembly and use can be improved. Furthermore, the detection device 100 can achieve the effect of linear displacement correction without using a high-end and expensive encoder. Therefore, the manufacturing cost of the detection device 100 can be reduced, and thus the object of the present invention can be achieved.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above are only examples of the present invention, and should not limit the scope of the present invention. Any simple equivalent changes and modifications made according to the scope of the application for patent of the present invention and the content of the patent specification are still within the scope of the present invention. within the scope of the invention patent.

100:檢測設備 1:機台 11:頂面 12:導軌 13:前端 14:後端 2:移動件 3:驅動機構 31:馬達 32:螺桿 33:聯軸器 4:影像擷取裝置 5:位移感測器 51:光學尺 52:讀取頭 6:校正量測裝置 61:校正光束收發模組 611:支架 612:校正光束收發頭 62:第一光學模組 621:第一導磁金屬片 622:第一磁吸架 623:分光鏡 624:第一反射鏡 63:第二光學模組 631:第二導磁金屬片 632:第二磁吸架 633:第二反射鏡 7:運算處理模組 71:相對關係對照表 711:第一量測距離欄位 712:第二量測距離欄位 8:影像處理模組 9:地面 D:直線方向 S1~S4:校正步驟100: Testing equipment 1: Machine 11: Top surface 12: Rails 13: Front end 14: Backend 2: Moving parts 3: drive mechanism 31: Motor 32: Screw 33: Coupling 4: Image capture device 5: Displacement sensor 51: Optical ruler 52: read head 6: Calibration measuring device 61: Correction beam transceiver module 611: Bracket 612: Corrected beam transceiver head 62: The first optical module 621: The first magnetic conductive metal sheet 622: The first magnetic holder 623: Beamsplitter 624: First reflector 63: The second optical module 631: The second magnetic conductive metal sheet 632: Second Magnetic Holder 633: Second reflector 7: Operation processing module 71: Relative relationship comparison table 711: First measurement distance field 712: Second measurement distance field 8: Image processing module 9: Ground D: Straight line direction S1~S4: Calibration steps

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1是本發明線性位移校正方法之第一實施例的一校正步驟流程圖; 圖2是使用第一實施例的一檢測設備的一俯視圖; 圖3是使用第一實施例的檢測設備的一側視圖; 圖4是使用第一實施例的檢測設備的一連接關係方塊圖; 圖5是使用第一實施例的檢測設備的另一俯視圖; 圖6是使用第一實施例所建立的一相對關係對照表; 圖7是使用本發明線性位移校正方法之第二實施例的檢測設備的一俯視圖;及 圖8是使用第二實施例的檢測設備的一側視圖。Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: 1 is a flow chart of a calibration step of the first embodiment of the linear displacement calibration method of the present invention; 2 is a top view of a detection device using the first embodiment; 3 is a side view of the detection apparatus using the first embodiment; 4 is a block diagram of a connection relationship using the detection device of the first embodiment; 5 is another top view of the detection apparatus using the first embodiment; Fig. 6 is a relative relation comparison table established using the first embodiment; FIG. 7 is a top view of the detection apparatus using the second embodiment of the linear displacement correction method of the present invention; and FIG. 8 is a side view of the detection apparatus using the second embodiment.

S1~S4:校正步驟S1~S4: Calibration steps

Claims (13)

一種線性位移校正方法,包含下述步驟: 透過一位移感測器量測一移動件沿一直線方向移動的位移,以獲得多個第一量測距離; 透過一校正量測裝置量測該移動件沿該直線方向移動的位移,以獲得多個第二量測距離; 根據該等第一量測距離及該等第二量測距離建立一相對關係對照表,以使該等第一量測距離分別與該等第二量測距離相對應;及 由該相對關係對照表中獲得各該第一量測距離所對應的該第二量測距離作為一校正距離。A linear displacement correction method, comprising the following steps: measuring the displacement of a moving element moving along a linear direction through a displacement sensor to obtain a plurality of first measurement distances; measuring the displacement of the moving piece along the linear direction through a calibration measuring device to obtain a plurality of second measuring distances; establishing a relative relationship comparison table according to the first measurement distances and the second measurement distances, so that the first measurement distances correspond to the second measurement distances respectively; and The second measurement distance corresponding to each of the first measurement distances is obtained from the relative relationship comparison table as a calibration distance. 如請求項1所述的線性位移校正方法,其中,該校正量測裝置包括一雷射干涉儀。The linear displacement correction method according to claim 1, wherein the correction and measurement device comprises a laser interferometer. 如請求項1或2所述的線性位移校正方法,其中,使用查表法由該相對關係對照表中獲得各該第一量測距離所對應的該第二量測距離。The linear displacement correction method according to claim 1 or 2, wherein the second measurement distance corresponding to each of the first measurement distances is obtained from the relative relationship comparison table using a look-up table method. 一種線性位移校正方法,包含下述步驟: 透過一驅動機構驅動一移動件沿一直線方向移動; 透過一位移感測器量測該移動件沿該直線方向移動的位移,透過一校正量測裝置量測該移動件沿該直線方向移動的位移,藉由一運算處理模組接收該位移感測器所反饋的電子訊號以運算出多個第一量測距離,以及接收該校正量測裝置所反饋的電子訊號以運算出多個第二量測距離; 該運算處理模組根據該等第一量測距離及該等第二量測距離建立一相對關係對照表,以使該等第一量測距離分別與該等第二量測距離相對應;及 該運算處理模組由該相對關係對照表中獲得各該第一量測距離所對應的該第二量測距離作為一校正距離。A linear displacement correction method, comprising the following steps: A moving member is driven to move in a linear direction through a driving mechanism; A displacement sensor is used to measure the displacement of the moving piece along the linear direction, a calibration measuring device is used to measure the displacement of the moving piece along the linear direction, and an arithmetic processing module is used to receive the displacement sensing The electronic signal fed back by the device is used to calculate a plurality of first measurement distances, and the electronic signal fed back by the calibration measurement device is received to calculate a plurality of second measurement distances; The arithmetic processing module establishes a relative relationship comparison table according to the first measurement distances and the second measurement distances, so that the first measurement distances correspond to the second measurement distances respectively; and The arithmetic processing module obtains the second measurement distance corresponding to each of the first measurement distances from the relative relationship comparison table as a correction distance. 如請求項4所述的線性位移校正方法,其中,該校正量測裝置包括一雷射干涉儀。The linear displacement correction method according to claim 4, wherein the correction measurement device comprises a laser interferometer. 如請求項4所述的線性位移校正方法,其中,該位移感測器包括一線性編碼器。The linear displacement correction method of claim 4, wherein the displacement sensor includes a linear encoder. 如請求項4至6其中任一項所述的線性位移校正方法,其中,該運算處理模組使用查表法由該相對關係對照表中獲得各該第一量測距離所對應的該第二量測距離。The linear displacement correction method according to any one of claims 4 to 6, wherein the arithmetic processing module obtains the second corresponding to each of the first measured distances from the relative relationship comparison table using a look-up table method Measure distance. 一種檢測設備,包含: 一移動件; 一驅動機構,用以驅動該移動件沿一直線方向移動; 一位移感測器,用以量測該移動件沿該直線方向移動的位移; 一校正量測裝置,用以量測該移動件沿該直線方向移動的位移;及 一運算處理模組,電性連接於該位移感測器及該校正量測裝置,該運算處理模組用以接收該位移感測器所反饋的電子訊號以運算出多個第一量測距離,以及用以接收該校正量測裝置所反饋的電子訊號以運算出多個第二量測距離; 其中該運算處理模組根據該等第一量測距離及該等第二量測距離建立一相對關係對照表。A detection device comprising: a moving part; a driving mechanism for driving the moving member to move in a linear direction; a displacement sensor for measuring the displacement of the moving element moving along the linear direction; a calibration measuring device for measuring the displacement of the moving member along the linear direction; and An arithmetic processing module is electrically connected to the displacement sensor and the calibration measurement device, and the arithmetic processing module is used for receiving electronic signals fed back by the displacement sensor to calculate a plurality of first measurement distances , and is used for receiving the electronic signal fed back by the calibration measuring device to calculate a plurality of second measuring distances; Wherein, the arithmetic processing module establishes a relative relationship comparison table according to the first measurement distances and the second measurement distances. 如請求項8所述的檢測設備,其中,該位移感測器包括一線性編碼器。The detection apparatus of claim 8, wherein the displacement sensor includes a linear encoder. 如請求項8所述的檢測設備,其中,該校正量測裝置包括一雷射干涉儀。The detection device according to claim 8, wherein the calibration measurement device comprises a laser interferometer. 如請求項10所述的檢測設備,其中,該校正量測裝置包括沿該直線方向相間隔排列的一校正光束收發模組、一第一光學模組及一第二光學模組,該第二光學模組設置於該移動件上並能被其帶動而相對於該校正光束收發模組及該第一光學模組移動。The detection device according to claim 10, wherein the calibration and measurement device comprises a calibration beam transceiver module, a first optical module and a second optical module arranged at intervals along the linear direction, the second optical module The optical module is arranged on the moving member and can be driven by it to move relative to the correction beam transceiver module and the first optical module. 如請求項10所述的檢測設備,其中,該校正量測裝置包括沿該直線方向相間隔排列的一校正光束收發模組、一第一光學模組及一第二光學模組,該第一光學模組設置於該移動件上並能被其帶動而相對於該校正光束收發模組及該第二光學模組移動。The detection device according to claim 10, wherein the calibration and measurement device comprises a calibration beam transceiver module, a first optical module and a second optical module arranged at intervals along the linear direction, the first optical module The optical module is arranged on the moving member and can be driven by it to move relative to the correction beam transceiver module and the second optical module. 如請求項8至12其中任一項所述的檢測設備,還包含一電性連接於該運算處理模組的影像處理模組,該運算處理模組能使用查表法由該相對關係對照表中獲得各該第一量測距離所對應的該第二量測距離,作為一用以輸入至該影像處理模組的運算參數。The detection device according to any one of claims 8 to 12, further comprising an image processing module electrically connected to the arithmetic processing module, and the arithmetic processing module can use a look-up table method to compare the table from the relative relationship The second measurement distance corresponding to each of the first measurement distances is obtained as an operation parameter for inputting to the image processing module.
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