TW202143345A - Chip packing method, chip package array and chip package - Google Patents

Chip packing method, chip package array and chip package Download PDF

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TW202143345A
TW202143345A TW109115359A TW109115359A TW202143345A TW 202143345 A TW202143345 A TW 202143345A TW 109115359 A TW109115359 A TW 109115359A TW 109115359 A TW109115359 A TW 109115359A TW 202143345 A TW202143345 A TW 202143345A
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chip
supporting
conductive
packaging material
circuit structure
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TW109115359A
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TWI738325B (en
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張文遠
陳偉政
宮振越
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大陸商上海兆芯集成電路有限公司
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Priority to TW109115359A priority Critical patent/TWI738325B/en
Priority to CN202010517093.0A priority patent/CN111682010B/en
Priority to CN202010516757.1A priority patent/CN111668106B/en
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Publication of TWI738325B publication Critical patent/TWI738325B/en
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Abstract

A chip package includes the following components. A supporting structure is formed of the same material as a whole and has an opening. A plurality of supporting conductive holes run through the supporting structure. A chip is located in the opening. A packaging material is located on the support structure and the chip, and is filled between the opening of the support structure and the chip. A plurality of conductive vias are located in the packaging material and connected to the supporting conductive vias, respectively. A material patterned conductive layer is located on the packaging material and connects the material conductive vias. A first redistribution circuit structure is located on the packaging material and the material patterned conductive layer. A second redistribution circuit structure is located on the support structure, the chip, and the packaging material. An chip package array and a method for packaging chip are also provided.

Description

晶片封裝方法、晶片封裝體陣列及晶片封裝體Chip packaging method, chip packaging body array and chip packaging body

本發明是有關於一種晶片封裝技術，且特別是有關於晶片封裝體、晶片封裝陣列及晶片封裝方法。The present invention relates to a chip packaging technology, and in particular to a chip package body, a chip package array and a chip packaging method.

已發展出的扇出型（Fan-out）晶圓級封裝（Wafer Level Package, WLP）具有較小的封裝尺寸及改善的電氣性能，因而可在不增加晶片封裝尺寸的情況下提供更多個接點。在一般的晶圓級封裝製程中，通過模造方式（die molding）將裸晶片（die）以封裝材料包覆，而暴露出裸晶片的主動面（active surface），以在裸晶片及封裝材料上形成介電層及圖案化導電層來製作出重佈線路，其用於提供用於連接下一層級裝置的多個接點。然而，由於上述晶圓級封裝的不平衡結構，模具固化及其他後續製程可能發生翹曲問題（warpage issue），因而影響對位精度。The fan-out wafer level package (WLP) that has been developed has a smaller package size and improved electrical performance, so it can provide more packages without increasing the chip package size. contact. In the general wafer-level packaging process, die molding is used to cover the bare chip with packaging material, and the active surface of the bare chip is exposed, so that the bare chip and the packaging material are exposed. A dielectric layer and a patterned conductive layer are formed to make a redistributed circuit, which is used to provide multiple contacts for connecting to the next level of devices. However, due to the unbalanced structure of the above-mentioned wafer-level packaging, warpage issues may occur during mold curing and other subsequent processes, which affects the alignment accuracy.

本發明提供一種晶片封裝方法，用於減少翹曲問題，並可增加訊號路徑。The present invention provides a chip packaging method for reducing warpage problems and increasing signal paths.

本發明提供一種晶片封裝陣列，用於減少翹曲問題，並可增加訊號路徑。The present invention provides a chip package array, which is used to reduce the warpage problem and increase the signal path.

本發明提供一種晶片封裝體，用於減少翹曲問題，並可增加訊號路徑。The present invention provides a chip package, which is used to reduce the warpage problem and increase the signal path.

本發明的晶片封裝方法包括下列步驟。提供一支撐結構，其中該支撐結構整體由相同材料形成，且該支撐結構具有一第一支撐面、相對於該第一支撐面的一第二支撐面及連接該第一支撐面及該第二支撐面的多個開口。形成多個支撐導電孔道貫穿該支撐結構，以連接該支撐結構的該第一支撐面及該第二支撐面。暫時地固定該支撐結構及多個晶片至一載板，其中這些晶片分別位於該支撐結構的這些開口內，各該晶片具有一第一晶片面及相對於該第一晶片面的一第二晶片面，且該支撐結構的該第一支撐面與各該晶片的該第一晶片面齊平。形成一封裝材料在該載板上，其中該封裝材料覆蓋該支撐結構的第一支撐面及這些晶片的這些第一晶片面，並填充在該支撐結構的該開口與該晶片之間。形成多個材料導電孔道及一材料圖案化導電層，其中這些材料導電孔道位於該封裝材料內並分別連接這些支撐導電孔道，而該材料圖案化導電層位於該封裝材料上並連接這些材料導電孔道。形成一第一重佈線路結構在該封裝材料及該材料圖案化導電層上，其中該第一重佈線路結構經由該材料圖案化導電層及這些材料導電孔道與該晶片及這些支撐導電孔道相電性連接。移離該載板。形成一第二重佈線路結構在該第二支撐面、該第二晶片面及該封裝材料上。The chip packaging method of the present invention includes the following steps. A supporting structure is provided, wherein the supporting structure is entirely formed of the same material, and the supporting structure has a first supporting surface, a second supporting surface opposite to the first supporting surface, and connecting the first supporting surface and the second supporting surface Multiple openings on the support surface. A plurality of supporting conductive holes are formed to penetrate the supporting structure to connect the first supporting surface and the second supporting surface of the supporting structure. Temporarily fix the support structure and a plurality of wafers to a carrier, wherein the wafers are respectively located in the openings of the support structure, and each of the wafers has a first wafer surface and a second wafer opposite to the first wafer surface The first support surface of the support structure is flush with the first wafer surface of each wafer. A packaging material is formed on the carrier plate, wherein the packaging material covers the first supporting surface of the supporting structure and the first chip surfaces of the chips, and is filled between the opening of the supporting structure and the chip. A plurality of material conductive channels and a material patterned conductive layer are formed, wherein the material conductive channels are located in the packaging material and are respectively connected to the supporting conductive channels, and the material patterned conductive layer is located on the packaging material and connected to the material conductive channels . A first redistributed circuit structure is formed on the packaging material and the material patterned conductive layer, wherein the first redistributed circuit structure is in phase with the chip and the supporting conductive channels via the material patterned conductive layer and the conductive channels of the material Electrical connection. Remove the carrier board. A second redistributed circuit structure is formed on the second supporting surface, the second chip surface and the packaging material.

本發明的晶片封裝陣列包括多個晶片封裝體，其於陣列排列以形成該晶片封裝陣列，各該晶片封裝體包括一支撐結構、多個撐導電孔道、一晶片、一封裝材料、多個材料導電孔道、一材料圖案化導電層、一第一重佈線路結構及一第二重佈線路結構。支撐結構整體由相同材料形成，並具有一第一支撐面、相對於該第一支撐面的一第二支撐面及連接該第一支撐面及該第二支撐面的一開口。這些支撐導電孔道貫穿該支撐結構，以連接該支撐結構的該第一支撐面及該第二支撐面。晶片位於該開口內並具有一第一晶片面及相對於該第一晶片面的一第二晶片面。支撐結構的第一支撐面與晶片的第一晶片面齊平。封裝材料位在該支撐結構的第一支撐面及該晶片的該第一晶片面上，並填充在該支撐結構的該開口與該晶片之間。這些材料導電孔道位於該封裝材料內，並分別連接這些支撐導電孔道。材料圖案化導電層位於該封裝材料上，並連接這些材料導電孔道。第一重佈線路結構位於該封裝材料及該材料圖案化導電層上，其中該第一重佈線路結構經由該材料圖案化導電層及這些材料導電孔道與該晶片及這些支撐導電孔道相電性連接。第二重佈線路結構位於第二支撐面及該第二晶片面及該封裝材料上。The chip package array of the present invention includes a plurality of chip packages arranged in an array to form the chip package array. Each chip package includes a supporting structure, a plurality of conductive vias, a chip, a packaging material, and a plurality of materials Conductive channels, a material patterned conductive layer, a first re-distributed circuit structure and a second re-distributed circuit structure. The supporting structure is formed of the same material as a whole, and has a first supporting surface, a second supporting surface opposite to the first supporting surface, and an opening connecting the first supporting surface and the second supporting surface. The supporting conductive holes penetrate the supporting structure to connect the first supporting surface and the second supporting surface of the supporting structure. The chip is located in the opening and has a first chip surface and a second chip surface opposite to the first chip surface. The first supporting surface of the supporting structure is flush with the first wafer surface of the wafer. The packaging material is located on the first supporting surface of the supporting structure and the first chip surface of the chip, and is filled between the opening of the supporting structure and the chip. The conductive holes of these materials are located in the packaging material, and are respectively connected to the supporting conductive holes. The material patterned conductive layer is located on the packaging material and connects the conductive channels of these materials. The first redistributed circuit structure is located on the packaging material and the material patterned conductive layer, wherein the first redistributed circuit structure is electrically connected to the chip and the supporting conductive channels via the material patterned conductive layer and the conductive channels of the material connect. The second re-distributed circuit structure is located on the second supporting surface, the second chip surface and the packaging material.

本發明的晶片封裝體包括一支撐結構、多個撐導電孔道、一晶片、一封裝材料、多個材料導電孔道、一材料圖案化導電層、一第一重佈線路結構及一第二重佈線路結構。支撐結構整體由相同材料形成，並具有一第一支撐面、相對於該第一支撐面的一第二支撐面及連接該第一支撐面及該第二支撐面的一開口。這些支撐導電孔道貫穿該支撐結構，以連接該支撐結構的該第一支撐面及該第二支撐面。晶片位於該開口內並具有一第一晶片面及相對於該第一晶片面的一第二晶片面。支撐結構的第一支撐面與晶片的第一晶片面齊平。封裝材料位在該支撐結構的第一支撐面及該晶片的該第一晶片面上，並填充在該支撐結構的該開口與該晶片之間。這些導電孔道位於該封裝材料內，並分別連接這些支撐導電孔道。材料圖案化導電層位於該封裝材料上，並連接這些材料導電孔道。第一重佈線路結構位於該封裝材料及該材料圖案化導電層上，其中該第一重佈線路結構經由該材料圖案化導電層及這些材料導電孔道與該晶片及這些支撐導電孔道相電性連接。第一重佈線路結構包括多個介電層及多個圖案化導電層，這些介電層與該些圖案化導電層交錯疊合，介電層的材質剛性較低於封裝材料的材質剛性，介電層的熱膨脹係數較高於封裝材料的熱膨脹係數。第二重佈線路結構位於第二支撐面及該第二晶片面及該封裝材料上。The chip package of the present invention includes a supporting structure, a plurality of supporting conductive holes, a chip, a packaging material, a plurality of material conductive holes, a material patterned conductive layer, a first redistribution circuit structure and a second redistribution Road structure. The supporting structure is formed of the same material as a whole, and has a first supporting surface, a second supporting surface opposite to the first supporting surface, and an opening connecting the first supporting surface and the second supporting surface. The supporting conductive holes penetrate the supporting structure to connect the first supporting surface and the second supporting surface of the supporting structure. The chip is located in the opening and has a first chip surface and a second chip surface opposite to the first chip surface. The first supporting surface of the supporting structure is flush with the first wafer surface of the wafer. The packaging material is located on the first supporting surface of the supporting structure and the first chip surface of the chip, and is filled between the opening of the supporting structure and the chip. The conductive vias are located in the packaging material and are respectively connected to the supporting conductive vias. The material patterned conductive layer is located on the packaging material and connects the conductive channels of these materials. The first redistributed circuit structure is located on the packaging material and the material patterned conductive layer, wherein the first redistributed circuit structure is electrically connected to the chip and the supporting conductive channels via the material patterned conductive layer and the conductive channels of the material connect. The first redistributed circuit structure includes a plurality of dielectric layers and a plurality of patterned conductive layers. The dielectric layers and the patterned conductive layers are alternately laminated. The material rigidity of the dielectric layer is lower than that of the packaging material. The thermal expansion coefficient of the dielectric layer is higher than the thermal expansion coefficient of the packaging material. The second re-distributed circuit structure is located on the second supporting surface, the second chip surface and the packaging material.

基於上述，在本發明中，支撐結構的使用可減少翹曲問題，因而降低對位不準的風險。通過內設於支撐結構的支撐導電孔道可作為晶片封裝體的雙面電性內連接通道。Based on the above, in the present invention, the use of the support structure can reduce the warpage problem, thereby reducing the risk of misalignment. The supporting conductive holes arranged in the supporting structure can be used as double-sided electrical internal connection channels of the chip package.

請參考圖1A，依照本發明的一實施例的晶片封裝方法，首先，提供一支撐結構110。支撐結構110整體由相同材料、一體成形而形成，且支撐結構110具有一第一支撐面110a、相對於第一支撐面110a的一第二支撐面110b及連接第一支撐面110a及第二支撐面110b的多個開口110c。在本實施例中，支撐結構110的材質例如是金屬。此外，支撐結構110可以是具有以陣列排列的多個開口110c的網狀金屬結構，如圖2所示，而各個開口110c可以容納對應的一或多個晶片。1A, according to the chip packaging method of an embodiment of the present invention, first, a supporting structure 110 is provided. The supporting structure 110 is entirely formed of the same material and integrally formed, and the supporting structure 110 has a first supporting surface 110a, a second supporting surface 110b opposite to the first supporting surface 110a, and connecting the first supporting surface 110a and the second supporting A plurality of openings 110c of the face 110b. In this embodiment, the material of the support structure 110 is, for example, metal. In addition, the support structure 110 may be a mesh metal structure having a plurality of openings 110c arranged in an array, as shown in FIG. 2, and each opening 110c may accommodate one or more corresponding wafers.

接著，進行形成多個支撐導電孔道114的步驟（完成圖如後述圖1E所示）。支撐導電孔道114會貫穿支撐結構110，以連接支撐結構110的第一支撐面110a及第二支撐面110b。換言之，對具有以陣列排列的多個開口110c的網狀金屬的支撐結構110而言，這些支撐導電孔道114會配置在支撐結構110之圍繞開口110c的部分內。在一實施例中，整體來看，網狀的支撐結構110是具有多開口的矩形支撐結構。在本實施例中，如圖1B所示，移除支撐結構110的多個部分，以形成多個支撐貫孔110d。各支撐貫孔110d連接第一支撐面110a及第二支撐面110b。接著，請參考圖1C，形成絕緣材料112a在這些支撐貫孔110d內，以形成多個絕緣柱體。接著，請參考圖1D，移除各絕緣柱體的一部分，以形成多個絕緣貫孔112b，而各絕緣柱體的剩餘部分構成一絕緣層112。接著，請參考圖1E，形成導電材料在這些絕緣貫孔112b內，以形成這些支撐導電孔道114，而絕緣層112位於支撐結構110及對應的支撐導電孔道114之間。當支撐結構110的材質採用金屬時，絕緣層112可避免對應的支撐導電孔道與支撐結構110相互電性導通。值得一提的是，本實施例是先準備好具有多個支撐導電孔道的支撐結構，再進行後續晶片封裝的步驟，與封裝過程中或封裝完成再形成導電通道（類似本案的支撐導電孔道）的步驟相比，若支撐結構良率不佳，可以提早發現，不會導致整個封裝結構不能使用的問題。除此之外，開口110c兩側的支撐結構110具有對稱性，例如：開口110c兩側的支撐結構110中的支撐導電孔道114在數量上相同，在位置上兩側對稱。換言之，支撐結構110分別在開口110c的兩側的兩個部分具有對稱性。另外，在本實施例中，支撐導電孔道114是形成在支撐結構110中，相較於有些實施例將導電路徑形成在開口110c的開口壁上，本實施例可以節省導電路徑的設計空間，而具有更彈性的訊號布局。Next, a step of forming a plurality of supporting conductive vias 114 is performed (the completed drawing is shown in FIG. 1E described later). The supporting conductive hole 114 penetrates the supporting structure 110 to connect the first supporting surface 110 a and the second supporting surface 110 b of the supporting structure 110. In other words, for a mesh metal support structure 110 having a plurality of openings 110c arranged in an array, these supporting conductive vias 114 will be arranged in the portion of the support structure 110 surrounding the opening 110c. In one embodiment, as a whole, the net-like support structure 110 is a rectangular support structure with multiple openings. In this embodiment, as shown in FIG. 1B, multiple parts of the supporting structure 110 are removed to form a plurality of supporting through holes 110d. Each supporting through hole 110d connects the first supporting surface 110a and the second supporting surface 110b. Next, referring to FIG. 1C, an insulating material 112a is formed in the supporting through holes 110d to form a plurality of insulating pillars. Next, referring to FIG. 1D, a part of each insulating pillar is removed to form a plurality of insulating through holes 112b, and the remaining part of each insulating pillar constitutes an insulating layer 112. Next, referring to FIG. 1E, a conductive material is formed in the insulating through holes 112b to form the supporting conductive holes 114, and the insulating layer 112 is located between the supporting structure 110 and the corresponding supporting conductive holes 114. When the material of the supporting structure 110 is metal, the insulating layer 112 can prevent the corresponding supporting conductive via and the supporting structure 110 from being electrically connected to each other. It is worth mentioning that in this embodiment, a support structure with a plurality of supporting conductive holes is first prepared, and then the subsequent chip packaging steps are performed, and the conductive channels are formed during the packaging process or after the packaging is completed (similar to the supporting conductive holes in this case) Compared with the steps, if the yield rate of the support structure is not good, it can be found early, and it will not cause the problem that the entire package structure cannot be used. In addition, the supporting structures 110 on both sides of the opening 110c have symmetry. For example, the supporting conductive holes 114 in the supporting structures 110 on both sides of the opening 110c are the same in number and symmetrical in position. In other words, the two parts of the supporting structure 110 on both sides of the opening 110c have symmetry. In addition, in this embodiment, the supporting conductive via 114 is formed in the supporting structure 110. Compared with some embodiments where the conductive path is formed on the opening wall of the opening 110c, this embodiment can save the design space of the conductive path, and It has a more flexible signal layout.

請參考圖1F，暫時地固定支撐結構110及多個晶片120至一載板300。這些晶片120分別位於支撐結構110的這些開口110c內。在本實施例中，各開口110c配置一個晶片120。另外，在本實施例中，支撐結構110及多個晶片120通過可剝除層300a（peelable layer）暫時地固定至載板300。此外，以剝除層300a為參考面，支撐結構110與晶片120等高，意即支撐結構110的第一支撐面110a與晶片120的第一晶片面120a齊平，如此在後續步驟中，在縱向空間配置重佈線路結構或是其他元件，可以使受力更均勻，而強化整體結構的剛性。Please refer to FIG. 1F to temporarily fix the support structure 110 and the plurality of chips 120 to a carrier 300. The wafers 120 are respectively located in the openings 110 c of the supporting structure 110. In this embodiment, each opening 110c is configured with a wafer 120. In addition, in this embodiment, the support structure 110 and the plurality of wafers 120 are temporarily fixed to the carrier board 300 through a peelable layer 300 a (peelable layer). In addition, taking the stripping layer 300a as the reference plane, the support structure 110 and the wafer 120 have the same height, which means that the first support surface 110a of the support structure 110 is flush with the first wafer surface 120a of the wafer 120. The re-arranged line structure or other components in the longitudinal space can make the force more uniform and strengthen the rigidity of the overall structure.

請參考圖1G，形成一封裝材料130在載板300上，其中封裝材料130完整覆蓋支撐結構110的第一支撐面110a及這些晶片120的這些第一晶片面120a（第一晶片面120a例如是主動面（active surface）），並填充在支撐結構110的開口與晶片120之間。更進一步說，封裝材料130覆蓋住露出於第一支撐面110a的絕緣層112和支撐導電孔道114，並且填滿於網狀的支撐結構110的每一開口110c與對應的晶片120之間的空隙，封裝材料130的頂面高於晶片120的第一晶片面120a和支撐結構110的第一支撐面110a。在本實施例中，封裝材料130的材質不同於支撐導電孔道114外圍的絕緣層112的材質，且封裝材料130的材質不同於支撐結構110的材質。在本實施例中，封裝材料130具有高剛性（Modulus），低熱膨脹係數（CTE）的特性，例如是環氧樹脂（epoxy），如此可以避免因外力、因熱而影響晶片、支撐結構等結構。在一實施例中，封裝材料130的剛性係數例如是22000MPa、熱膨脹係數例如是8.4*10-6 /°C。1G, a packaging material 130 is formed on the carrier 300, wherein the packaging material 130 completely covers the first supporting surface 110a of the supporting structure 110 and the first chip surfaces 120a of the chips 120 (the first chip surface 120a is, for example, The active surface is filled between the opening of the support structure 110 and the wafer 120. Furthermore, the packaging material 130 covers the insulating layer 112 exposed on the first supporting surface 110a and the supporting conductive holes 114, and fills the gap between each opening 110c of the mesh-shaped supporting structure 110 and the corresponding chip 120 The top surface of the packaging material 130 is higher than the first wafer surface 120a of the wafer 120 and the first support surface 110a of the support structure 110. In this embodiment, the material of the packaging material 130 is different from the material of the insulating layer 112 that supports the periphery of the conductive via 114, and the material of the packaging material 130 is different from the material of the support structure 110. In this embodiment, the packaging material 130 has the characteristics of high rigidity (Modulus) and low coefficient of thermal expansion (CTE), such as epoxy resin (epoxy), which can avoid the influence of external force and heat on the chip, support structure and other structures. . In one embodiment, the rigidity coefficient of the packaging material 130 is, for example, 22000 MPa, and the thermal expansion coefficient is, for example, 8.4*10 -6 /°C.

接著，進行形成多個材料導電孔道及一材料圖案化導電層的步驟，以得到如圖1J所示的結構。這些材料導電孔道位於封裝材料內並分別實質上、電性上連接這些支撐導電孔道。材料圖案化導電層位於封裝材料上並實質上、電性上連接這些材料導電孔道142，詳細說明如下。請參考圖1H，移除封裝材料130的多個部分，以形成多個材料貫孔130a，其分別暴露出這些支撐導電孔道114及晶片120的在第一晶片面120a的多個部分（例如主動面的電性連接點）。接著，請參考圖1I，形成一種子層140在封裝材料130的表面及各材料貫孔130a的內面。接著，請參考圖1J，利用圖案化罩幕（未繪示）配合電鍍及蝕刻，在材料貫孔130a內形成這些材料導電孔道142，並在封裝材料130上形成材料圖案化導電層144。此時，除了晶片120上的材料導電孔道142和材料圖案化導電層144之外，支撐導電孔道114、材料導電孔道142和材料圖案化導電層144彼此在實質上、電性上相互連接。晶片120上的材料導電孔道142和材料圖案化導電層144則與部分的第一晶片面120a（例如主動面的電性連接點）實質上、電性上連接。在本實施例中，材料導電孔道142的投影會落在露出於第一支撐面110a的支撐導電孔道114的裸露面上。更詳細的說，由於材料導電孔道142形成於封裝材料130中，而此封裝材料130具有高剛性，低熱膨脹係數的特性，所以材料導電孔道142的橫向剖面尺寸可以小於支撐導電孔道114的橫向剖面尺寸，材料導電孔道142的橫向剖面尺寸可以小於材料圖案化導電層144的橫向剖面尺寸。也就是說，材料導電孔道142的橫向剖面尺寸雖然較小，但是因為周圍有封裝材料130，所以仍可保有良好的結構強度。Next, the steps of forming a plurality of material conductive holes and a material patterned conductive layer are performed to obtain the structure as shown in FIG. 1J. The conductive vias of these materials are located in the packaging material and are respectively substantially and electrically connected to the supporting conductive vias. The material patterned conductive layer is located on the packaging material and is substantially and electrically connected to the conductive holes 142 of these materials, as described in detail below. 1H, multiple parts of the packaging material 130 are removed to form a plurality of material through holes 130a, which respectively expose these supporting conductive vias 114 and multiple parts of the chip 120 on the first chip surface 120a (for example, active The electrical connection point of the surface). Next, referring to FIG. 1I, a sub-layer 140 is formed on the surface of the packaging material 130 and the inner surface of the through holes 130a of each material. Next, referring to FIG. 1J, a patterned mask (not shown) is used in conjunction with electroplating and etching to form these material conductive holes 142 in the material through holes 130 a, and a material patterned conductive layer 144 is formed on the packaging material 130. At this time, in addition to the material conductive via 142 and the material patterned conductive layer 144 on the wafer 120, the support conductive via 114, the material conductive via 142 and the material patterned conductive layer 144 are substantially and electrically connected to each other. The material conductive via 142 and the material patterned conductive layer 144 on the chip 120 are substantially and electrically connected to a part of the first chip surface 120a (for example, the electrical connection point of the active surface). In this embodiment, the projection of the material conductive via 142 will fall on the exposed surface of the supporting conductive via 114 exposed on the first supporting surface 110a. In more detail, since the material conductive hole 142 is formed in the packaging material 130, and the packaging material 130 has the characteristics of high rigidity and low thermal expansion coefficient, the transverse cross-sectional size of the material conductive hole 142 can be smaller than that of the supporting conductive hole 114 The size, the transverse cross-sectional size of the material conductive hole 142 may be smaller than the transverse cross-sectional size of the material patterned conductive layer 144. In other words, although the size of the transverse cross-section of the material conductive via 142 is small, it can still maintain good structural strength because of the encapsulation material 130 surrounding it.

請參考圖1K，形成一第一重佈線路結構150在封裝材料130及材料圖案化導電層144上，用以重新分布訊號輸出或輸入的位置。第一重佈線路結構150經由材料圖案化導電層144及這些材料導電孔道142與晶片120及這些支撐導電孔道114相互電性連接。第一重佈線路結構150可藉由增層法（build-up process）來製作，其詳細的製作方式可從相關領域的通常知識中獲致足夠教示、建議與實施說明，故在此不再贅述。在本實施例中，第一重佈線路結構150包括多個第一介電層152、多個第一圖案化導電層154及多個第一導電孔道156。這些第一介電層152與這些第一圖案化導電層154交錯疊合。這些第一導電孔道156位於對應的第一介電層152內。這些第一圖案化導電層154經由這些第一導電孔道156彼此電性連接。最靠近材料圖案化導電層144的第一圖案化導電層154亦經由這些第一導電孔道156與晶片120及材料圖案化導電層144相連接。在本實施例中，第一重佈線路結構150的第一介電層152的材質不同於封裝材料130的材質。詳細的說明是，封裝材料130的材質具有高剛性，低熱膨脹係數的特性，封裝材料130的材質例如是環氧樹脂（epoxy）；第一介電層152的材質剛性較低於封裝材料130的材質剛性，第一介電層152的熱膨脹係數較高於封裝材料130的熱膨脹係數，第一介電層152的材質例如是聚醯亞胺（PI）。在一實施例中，封裝材料130的剛性係數例如是22000MPa、熱膨脹係數例如是8.4*10-6 /°C，第一介電層152的剛性係數例如是2500MPa、熱膨脹係數例如是60*10-6 /°C。因此，相較之下，位於封裝材料130中的材料導電孔道142，會比位於第一介電層152中的第一導電孔道156，在結構上更為穩固。1K, a first redistributed circuit structure 150 is formed on the packaging material 130 and the material patterned conductive layer 144 for redistributing signal output or input positions. The first redistributed circuit structure 150 is electrically connected to the chip 120 and the supporting conductive holes 114 via the material patterned conductive layer 144 and the conductive holes 142 of these materials. The first re-distributed circuit structure 150 can be made by a build-up process, and its detailed manufacturing method can be obtained from the general knowledge in the relevant field with sufficient teachings, suggestions and implementation instructions, so I will not repeat it here. . In this embodiment, the first redistributed circuit structure 150 includes a plurality of first dielectric layers 152, a plurality of first patterned conductive layers 154 and a plurality of first conductive vias 156. The first dielectric layers 152 and the first patterned conductive layers 154 are overlapped alternately. The first conductive vias 156 are located in the corresponding first dielectric layer 152. The first patterned conductive layers 154 are electrically connected to each other through the first conductive holes 156. The first patterned conductive layer 154 closest to the material patterned conductive layer 144 is also connected to the wafer 120 and the material patterned conductive layer 144 through these first conductive holes 156. In this embodiment, the material of the first dielectric layer 152 of the first redistributed circuit structure 150 is different from the material of the packaging material 130. The detailed description is that the material of the packaging material 130 has the characteristics of high rigidity and low coefficient of thermal expansion. The material of the packaging material 130 is, for example, epoxy; the material of the first dielectric layer 152 has lower rigidity than that of the packaging material 130. The material is rigid, the thermal expansion coefficient of the first dielectric layer 152 is higher than that of the packaging material 130, and the material of the first dielectric layer 152 is, for example, polyimide (PI). In an embodiment, the rigidity coefficient of the packaging material 130 is, for example, 22000 MPa, the thermal expansion coefficient is, for example, 8.4*10 -6 /°C, the rigidity coefficient of the first dielectric layer 152 is, for example, 2500 MPa, and the thermal expansion coefficient is, for example, 60*10 − 6 /°C. Therefore, in comparison, the material conductive via 142 in the packaging material 130 is structurally more stable than the first conductive via 156 in the first dielectric layer 152.

另一方面，封裝材料130是配置在支撐結構110與第一重佈線路結構150之間，並且封裝材料130是配置在晶片120與第一重佈線路結構150之間，彼此以材料導電孔道142電性連接。也就是說，支撐結構110透過包覆於封裝材料130中的材料導電孔道142與第一重佈線路結構150電性連接。此外，相較於在單一的封裝材料130上配置第一重佈線路結構150，本實施例透過支撐結構110與具有高剛性的封裝材料130一同配置，可以使整個晶片封裝的結構更加穩固。而且，金屬材質的支撐結構110也可以做為雜訊的屏蔽之用。此外，本實施例的支撐導電孔道114與材料導電孔道142的尺寸不相同，會有不同的電流密度效果，提高了訊號設計的彈性。值得一提的是，對於晶片封裝體來說，金屬材質的支撐結構110有較佳的散熱效果。On the other hand, the packaging material 130 is arranged between the support structure 110 and the first redistributed circuit structure 150, and the packaging material 130 is arranged between the wafer 120 and the first redistributed circuit structure 150, and the conductive vias 142 are mutually conductive. Electrical connection. In other words, the support structure 110 is electrically connected to the first redistributed circuit structure 150 through the conductive holes 142 covered in the packaging material 130. In addition, compared to arranging the first redistributed circuit structure 150 on a single packaging material 130, in this embodiment, the supporting structure 110 is configured together with the packaging material 130 with high rigidity to make the entire chip package structure more stable. Moreover, the metal supporting structure 110 can also be used for noise shielding. In addition, the sizes of the supporting conductive holes 114 and the material conductive holes 142 of this embodiment are different, and there will be different current density effects, which improves the flexibility of the signal design. It is worth mentioning that for the chip package, the metal support structure 110 has a better heat dissipation effect.

請參考圖1L，移離載板300以及剝除層300a。此時，支撐結構110的第二支撐面110b、晶片120的第二晶片面120b和裸露的封裝材料130共平面。Please refer to FIG. 1L to remove the carrier board 300 and peel off the layer 300a. At this time, the second support surface 110b of the support structure 110, the second wafer surface 120b of the wafer 120, and the exposed packaging material 130 are coplanar.

請參考圖1M，形成一第二重佈線路結構160在第二支撐面110b、第二晶片面120b及封裝材料130上，用以重新分布訊號輸出或輸入的位置。第二重佈線路結構160亦可藉由增層法來製作，其詳細的製作方式可從相關領域的通常知識中獲致足夠教示、建議與實施說明，故在此不再贅述。在本實施例中，第二重佈線路結構160包括多個第二介電層162、多個第二圖案化導電層164及多個第二導電孔道166。這些第二介電層162與這些第二圖案化導電層164交錯疊合。這些第二導電孔道166位於對應的第二介電層162內。這些第二圖案化導電層164經由這些第二導電孔道166彼此電性連接。最靠近材料圖案化導電層144的第二圖案化導電層164亦經由這些第二導電孔道166與晶片120及材料圖案化導電層144相連接。在本實施例中，晶片120的第一晶片面120a（例如主動面）配置有多個第一電性連接點121，其與第一重佈線路結構150電性連接；晶片120的第二晶片面120b（例如晶背）配置有多個第二電性連接點122，其與第二重佈線路結構160電性連接。在其他未繪示的實施例中，晶片120的第二晶片面120b沒有配置第二電性連接點122與第二重佈線路結構160電性連接，即晶片120的訊號都是透過第一晶片面120a進行傳輸。相較之下，晶片120的兩面（第一晶片面120a、第二晶片面120b）都配置有電性連接點（第一電性連接點121、第二電性連接點122），可以使其分別電性連接第一重佈線路結構150與第二重佈線路結構160，如此可以增加訊號的設計彈性。換言之，可以將與第一重佈線路結構150的連接訊號設計於第一晶片面120a，可以將與第二重佈線路結構160的連接訊號設計於第二晶片面120b。此外，相較於在單一的封裝材料130上配置第一重佈線路結構150與第二重佈線路結構160，本實施例透過支撐結構110與高剛性的封裝材料130的一同配置，可以使整個晶片封裝的結構（第一重佈線路結構150、晶片120與第二重佈線路結構160）更加穩固。1M, a second redistributed circuit structure 160 is formed on the second supporting surface 110b, the second chip surface 120b and the packaging material 130 to redistribute the signal output or input positions. The second re-distributed circuit structure 160 can also be fabricated by the build-up method, and the detailed fabrication method can obtain sufficient teaching, suggestion and implementation description from the general knowledge in the related field, so it will not be repeated here. In this embodiment, the second redistributed circuit structure 160 includes a plurality of second dielectric layers 162, a plurality of second patterned conductive layers 164, and a plurality of second conductive vias 166. The second dielectric layers 162 and the second patterned conductive layers 164 are overlapped alternately. The second conductive vias 166 are located in the corresponding second dielectric layer 162. The second patterned conductive layers 164 are electrically connected to each other through the second conductive holes 166. The second patterned conductive layer 164 closest to the material patterned conductive layer 144 is also connected to the wafer 120 and the material patterned conductive layer 144 through these second conductive holes 166. In this embodiment, the first chip surface 120a (for example, the active surface) of the chip 120 is provided with a plurality of first electrical connection points 121 which are electrically connected to the first redistributed circuit structure 150; the second chip of the chip 120 The surface 120 b (for example, the crystal back) is provided with a plurality of second electrical connection points 122, which are electrically connected to the second redistributed circuit structure 160. In other non-illustrated embodiments, the second chip surface 120b of the chip 120 is not provided with the second electrical connection point 122 to be electrically connected to the second redistributed circuit structure 160, that is, the signal of the chip 120 is transmitted through the first chip The surface 120a is transmitted. In contrast, both sides of the wafer 120 (first wafer surface 120a, second wafer surface 120b) are equipped with electrical connection points (first electrical connection point 121, second electrical connection point 122), which can make it The first redistributed circuit structure 150 and the second redistributed circuit structure 160 are electrically connected, respectively, so that the design flexibility of the signal can be increased. In other words, the connection signal with the first redistributed circuit structure 150 can be designed on the first chip surface 120a, and the connection signal with the second redistributed circuit structure 160 can be designed on the second chip surface 120b. In addition, compared to arranging the first re-distributed circuit structure 150 and the second re-distributed circuit structure 160 on a single packaging material 130, in this embodiment, the supporting structure 110 and the high-rigidity packaging material 130 are configured together to make the entire The structure of the chip package (the first redistributed circuit structure 150, the chip 120, and the second redistributed circuit structure 160) is more stable.

請參考圖1N，單顆化各晶片120及與其封裝有關的結構，即沿切割線L來切割目前的結構，以形成多個晶片封裝體100。在單顆化步驟之後，如圖1N所示，晶片封裝體100包含支撐結構110（即切割後的支撐結構110的一部分）、封裝材料130（即切割後的封裝材料130的一部分）、對應的多個材料導電孔道142，材料圖案化導電層144（即切割後的材料圖案化導電層144的一部分）。此時，支撐結構110、封裝材料130、第一重佈線路結構150、第二重佈線路結構160的側面，沿著切割線L切齊。此外，在單顆化步驟之前或單顆化步驟之後，可以依照實際需求，形成多個導電接點158（例如導電球）連接至第一重佈線路結構150。在其他未繪示的實施例中，更可以在第二重佈線路結構160上配置其他的晶片或是晶片封裝體，使得圖1N中的晶片封裝體100透過第二重佈線路結構160與其他的晶片或是晶片封裝體晶片電性連接。如此一來，透過晶片封裝體的雙面電性內連接通道，可以實現三維（3D）上的晶片封裝體。以晶片120為例，其可以透過第一重佈線路結構150、第二重佈線路結構160分別連接導電接點158或是其他的晶片/晶片封裝體。另外，第一重佈線路結構150、第二重佈線路結構160的訊號，可以透過晶片120或是支撐結構110的導電柱114進行傳遞，特別是導電柱114配置於支撐結構110中，更可避免導電柱114受到外力的破壞，而影響訊號傳遞。此外，在此三維的晶片封裝體中，以封裝材料130與支撐結構110的一同配置，取代了原本的封裝材料130的單一配置，可以使整個三維的晶片封裝體的結構更加穩固。除此之外，在其他的實施例中，會在單顆化各晶片120及與其封裝有關的結構之後，才在支撐結構的側壁形成導電通道，取代本發明的預先準備好具有多個支撐導電孔道的支撐結構，但是如此會導致位於支撐結構側壁的導電通道距離晶片太遠，傳遞路徑太長，可能造成訊號衰減問題。此外，如果最後才進行側壁的導電通道，也可能造成製程失敗，導致整個封裝體無法使用的問題。1N, each chip 120 and the structure related to the package are singulated, that is, the current structure is cut along the cutting line L to form a plurality of chip packages 100. After the singulation step, as shown in FIG. 1N, the chip package 100 includes a support structure 110 (that is, a part of the support structure 110 after cutting), a packaging material 130 (that is, a part of the packaging material 130 after cutting), and the corresponding A plurality of material conductive holes 142, and the material patterned conductive layer 144 (that is, a part of the material patterned conductive layer 144 after cutting). At this time, the side surfaces of the supporting structure 110, the packaging material 130, the first redistributed circuit structure 150, and the second redistributed circuit structure 160 are aligned along the cutting line L. In addition, before the singulation step or after the singulation step, a plurality of conductive contacts 158 (for example, conductive balls) can be formed to connect to the first redistributed circuit structure 150 according to actual requirements. In other non-illustrated embodiments, other chips or chip packages may be disposed on the second redistributed circuit structure 160, so that the chip package 100 in FIG. 1N passes through the second redistributed circuit structure 160 and other The chip or the chip package chip is electrically connected. In this way, through the double-sided electrical internal connection channels of the chip package, a three-dimensional (3D) chip package can be realized. Taking the chip 120 as an example, it can be connected to the conductive contacts 158 or other chip/chip packages through the first redistributed circuit structure 150 and the second redistributed circuit structure 160, respectively. In addition, the signals of the first and second redistributed circuit structures 150 and 160 can be transmitted through the chip 120 or the conductive pillars 114 of the support structure 110. In particular, the conductive pillars 114 are arranged in the support structure 110. Prevent the conductive pillar 114 from being damaged by external forces and affecting signal transmission. In addition, in the three-dimensional chip package, the packaging material 130 and the supporting structure 110 are configured together instead of the original single configuration of the packaging material 130, which can make the structure of the entire three-dimensional chip package more stable. In addition, in other embodiments, the conductive channels are formed on the sidewalls of the supporting structure after each chip 120 and the structure related to its packaging are singulated, instead of preparing a plurality of supporting conductive channels in advance in the present invention. The support structure of the channel, but this will cause the conductive channel on the side wall of the support structure to be too far away from the chip, and the transmission path is too long, which may cause signal attenuation problems. In addition, if the conductive channels on the sidewalls are carried out last, it may also cause the process to fail, resulting in the problem that the entire package cannot be used.

當以批次方式來生產多個晶片封裝體100時，將多個晶片120配置在載板300上。因此，請參考圖1N，在形成這些導電接點158之前，可先執行單顆化的步驟，即沿如圖1M所是的切割線L來切割晶片120周圍的結構，以分離這些晶片封裝體100。同樣地，當以批次方式來生產多個晶片封裝體100時，支撐結構110具有以陣列排列的多個開口110c，如圖2所示，而各個開口110c容納對應的晶片120，如圖1F所示。When a plurality of chip packages 100 are produced in a batch manner, the plurality of chips 120 are arranged on the carrier 300. Therefore, referring to FIG. 1N, before forming these conductive contacts 158, a singulation step may be performed, that is, the structure around the chip 120 is cut along the cutting line L as shown in FIG. 1M to separate the chip packages. 100. Similarly, when multiple chip packages 100 are produced in a batch manner, the support structure 110 has a plurality of openings 110c arranged in an array, as shown in FIG. 2, and each opening 110c accommodates a corresponding chip 120, as shown in FIG. 1F Shown.

在本實施例中，以陣列排列且尚未切割的多個晶片封裝體100可構成一晶片封裝陣列50，如圖1M所示。換句話說，晶片封裝陣列50包括以陣列排列且尚未切割的多個晶片封裝體100。具體而言，各晶片封裝體100包括一支撐結構110、多個支撐導電孔道114、一晶片120、一封裝材料130、多個材料導電孔道142、一材料圖案化導電層144、一第一重佈線路結構150及一第二重佈線路結構160。支撐結構110整體由相同材料形成，並具有一第一支撐面110a、相對於第一支撐面110a的一第二支撐面110b及連接第一支撐面110a及第二支撐面110b的一開口110c。在本實施例中，支撐結構110的材質例如是金屬。此外，支撐結構110可以是具有以陣列排列的多個開口110c的網狀金屬結構，如圖2所示，而各個開口110c可以容納對應的一或多個晶片晶片。金屬材質的支撐結構110具有穩定封裝體結構及遮蔽雜訊的功能。另一方面，對具有以陣列排列的多個開口110c的網狀金屬的支撐結構110而言，這些支撐導電孔道114會配置在支撐結構110之圍繞開口110c的部分內。在一實施例中，其整體來看，網狀的支撐結構110是具有多開口的矩形支撐結構。此外，開口110c兩側的支撐結構110具有對稱性，例如：開口110c兩側的支撐結構110中的支撐導電孔道114在數量上相同，在位置上兩側對稱。換言之，支撐結構110分別在開口110c的兩側的兩個部分具有對稱性。In this embodiment, a plurality of chip packages 100 arranged in an array and not yet cut can form a chip package array 50, as shown in FIG. 1M. In other words, the chip package array 50 includes a plurality of chip packages 100 arranged in an array and not yet cut. Specifically, each chip package 100 includes a supporting structure 110, a plurality of supporting conductive holes 114, a chip 120, a packaging material 130, a plurality of material conductive holes 142, a material patterned conductive layer 144, and a first layer. The wiring structure 150 and a second rewiring structure 160. The supporting structure 110 is entirely formed of the same material, and has a first supporting surface 110a, a second supporting surface 110b opposite to the first supporting surface 110a, and an opening 110c connecting the first supporting surface 110a and the second supporting surface 110b. In this embodiment, the material of the support structure 110 is, for example, metal. In addition, the support structure 110 may be a mesh metal structure having a plurality of openings 110c arranged in an array, as shown in FIG. 2, and each opening 110c may accommodate one or more corresponding wafers. The support structure 110 made of metal has the functions of stabilizing the structure of the package body and shielding noise. On the other hand, for a mesh metal support structure 110 having a plurality of openings 110c arranged in an array, these supporting conductive vias 114 will be arranged in the portion of the support structure 110 surrounding the opening 110c. In one embodiment, as a whole, the net-like support structure 110 is a rectangular support structure with multiple openings. In addition, the supporting structures 110 on both sides of the opening 110c have symmetry. For example, the supporting conductive holes 114 in the supporting structures 110 on both sides of the opening 110c are the same in number and symmetrical in position. In other words, the two parts of the supporting structure 110 on both sides of the opening 110c have symmetry.

這些支撐導電孔道114貫穿支撐結構110，以連接支撐結構110的第一支撐面110a及第二支撐面110b。晶片120位於開口110c內並具有一第一晶片面120a（例如主動面）及相對於第一晶片面120a的一第二晶片面120b（例如晶背）。在本實施例中，支撐導電孔道114是形成在支撐結構110中，相較於有些實施例將導電路徑形成在開口110c的開口壁上，本實施例可以節省導電路徑的設計空間，而具有更彈性的訊號布局。另外，支撐結構110與晶片120等高，意即支撐結構110的第一支撐面110a與晶片120的第一晶片面120a齊平，所以，若在縱向空間配置重佈線路結構或是其他元件，可以使受力更均勻，而強化整體結構的剛性。These supporting conductive holes 114 penetrate the supporting structure 110 to connect the first supporting surface 110 a and the second supporting surface 110 b of the supporting structure 110. The wafer 120 is located in the opening 110c and has a first wafer surface 120a (such as an active surface) and a second wafer surface 120b (such as a wafer back) opposite to the first wafer surface 120a. In this embodiment, the supporting conductive via 114 is formed in the supporting structure 110. Compared with some embodiments where the conductive path is formed on the opening wall of the opening 110c, this embodiment can save the design space of the conductive path, and has more advantages. Flexible signal layout. In addition, the support structure 110 and the wafer 120 are of the same height, which means that the first support surface 110a of the support structure 110 is flush with the first wafer surface 120a of the wafer 120. Therefore, if the redistributed circuit structure or other components are arranged in the longitudinal space, It can make the force more uniform and strengthen the rigidity of the overall structure.

封裝材料130位在支撐結構110的第一支撐面110a及晶片120的第一晶片面120a上，並填充在支撐結構110的開口與晶片120之間。這些材料導電孔道142位於封裝材料130內，並分別連接這些支撐導電孔道114。在本實施例中，封裝材料130的材質不同於支撐結構110的材質。在本實施例中，封裝材料130具有高剛性（Modulus），低熱膨脹係數（CTE）的特性，例如是環氧樹脂（epoxy），如此可以避免因外力、因熱而影響晶片、支撐結構等結構。在一實施例中，封裝材料130的剛性係數例如是22000MPa、熱膨脹係數例如是8.4*10-6 /°C。The packaging material 130 is located on the first supporting surface 110 a of the supporting structure 110 and the first chip surface 120 a of the chip 120, and is filled between the opening of the supporting structure 110 and the chip 120. The conductive vias 142 of these materials are located in the packaging material 130 and are connected to the support conductive vias 114 respectively. In this embodiment, the material of the packaging material 130 is different from the material of the support structure 110. In this embodiment, the packaging material 130 has the characteristics of high rigidity (Modulus) and low coefficient of thermal expansion (CTE), such as epoxy resin, which can avoid the influence of external force and heat on the chip, support structure and other structures. . In one embodiment, the rigidity coefficient of the packaging material 130 is, for example, 22000 MPa, and the thermal expansion coefficient is, for example, 8.4*10 -6 /°C.

材料圖案化導電層144位於封裝材料130上，並連接這些材料導電孔道142。值得一提的是，由於材料導電孔道142形成於封裝材料130中，而此封裝材料130具有高剛性，低熱膨脹係數的特性，所以材料導電孔道142的橫向剖面尺寸可以小於支撐導電孔道114的橫向剖面尺寸，材料導電孔道142的橫向剖面尺寸可以小於材料圖案化導電層144的橫向剖面尺寸。也就是說，材料導電孔道142的橫向剖面尺寸雖然較小，但是因為周圍有封裝材料130，所以仍可保有良好的結構強度。The material-patterned conductive layer 144 is located on the packaging material 130 and connects the conductive vias 142 of these materials. It is worth mentioning that because the material conductive holes 142 are formed in the packaging material 130, and the packaging material 130 has the characteristics of high rigidity and low thermal expansion coefficient, the transverse cross-sectional size of the material conductive holes 142 can be smaller than that of the supporting conductive holes 114. The cross-sectional size, the cross-sectional size of the material conductive hole 142 may be smaller than the cross-sectional size of the material patterned conductive layer 144. In other words, although the size of the transverse cross-section of the material conductive via 142 is small, it can still maintain good structural strength because of the encapsulation material 130 surrounding it.

第一重佈線路結構150位於封裝材料130及材料圖案化導電層144上，其中第一重佈線路結構150經由材料圖案化導電層144及這些材料導電孔道142與晶片120及這些支撐導電孔道相電性連接。在本實施例中，第一重佈線路結構150的第一介電層152的材質不同於封裝材料130的材質。詳細的說明是，封裝材料130的材質具有高剛性，低熱膨脹係數的特性，封裝材料130的材質例如是環氧樹脂（epoxy）；第一介電層152的材質剛性較低於封裝材料130的材質剛性，第一介電層152的熱膨脹係數較高於封裝材料130的熱膨脹係數，第一介電層152的材質例如是聚醯亞胺（PI）。在一實施例中，封裝材料130的剛性係數例如是22000MPa、熱膨脹係數例如是8.4*10-6 /°C，第一介電層152的剛性係數例如是2500MPa、熱膨脹係數例如是60*10-6 /°C。因此，相較之下，位於封裝材料130中的材料導電孔道142，會比位於第一介電層152中的第一導電孔道156，在結構上更為穩固。另一方面，封裝材料130是配置在支撐結構110與第一重佈線路結構150之間，並且封裝材料130是配置在晶片120與第一重佈線路結構150之間，彼此以材料導電孔道142電性連接。也就是說，支撐結構110透過包覆於封裝材料130中的材料導電孔道142與第一重佈線路結構150電性連接。此外，相較於在單一的封裝材料130上配置第一重佈線路結構150，本實施例透過支撐結構110與具有高剛性的封裝材料130一同配置，可以使整個晶片封裝的結構更加穩固。而且，金屬材質的支撐結構110也可以做為雜訊的屏蔽之用。此外，本實施例的支撐導電孔道114與材料導電孔道142的尺寸不相同，會有不同的電流密度效果，提高了訊號設計的彈性。值得一提的是，對於晶片封裝體來說，金屬材質的支撐結構110有較佳的散熱效果。The first redistributed circuit structure 150 is located on the packaging material 130 and the material patterned conductive layer 144, wherein the first redistributed circuit structure 150 corresponds to the chip 120 and these supporting conductive channels via the material patterned conductive layer 144 and these material conductive channels 142 Electrical connection. In this embodiment, the material of the first dielectric layer 152 of the first redistributed circuit structure 150 is different from the material of the packaging material 130. The detailed description is that the material of the packaging material 130 has the characteristics of high rigidity and low coefficient of thermal expansion. The material of the packaging material 130 is, for example, epoxy; the material of the first dielectric layer 152 has lower rigidity than that of the packaging material 130. The material is rigid, the thermal expansion coefficient of the first dielectric layer 152 is higher than that of the packaging material 130, and the material of the first dielectric layer 152 is, for example, polyimide (PI). In one embodiment, the rigidity coefficient of the packaging material 130 is, for example, 22000 MPa, the thermal expansion coefficient is, for example, 8.4*10 -6 /°C, the rigidity coefficient of the first dielectric layer 152 is, for example, 2500 MPa, and the thermal expansion coefficient is, for example, 60*10 − 6 /°C. Therefore, in comparison, the material conductive via 142 located in the packaging material 130 is structurally more stable than the first conductive via 156 located in the first dielectric layer 152. On the other hand, the encapsulation material 130 is arranged between the support structure 110 and the first redistribution circuit structure 150, and the encapsulation material 130 is arranged between the wafer 120 and the first redistribution circuit structure 150, and the conductive vias 142 are mutually conductive. Electrical connection. In other words, the support structure 110 is electrically connected to the first redistributed circuit structure 150 through the conductive holes 142 covered in the packaging material 130. In addition, compared to arranging the first rewired circuit structure 150 on a single encapsulating material 130, in this embodiment, the supporting structure 110 is configured together with the encapsulating material 130 with high rigidity to make the entire chip package structure more stable. Moreover, the metal supporting structure 110 can also be used for noise shielding. In addition, the size of the supporting conductive hole 114 and the material conductive hole 142 of this embodiment are different, and there will be different current density effects, which improves the flexibility of the signal design. It is worth mentioning that for the chip package, the metal support structure 110 has a better heat dissipation effect.

第二重佈線路結構160位於第二支撐面110b及第二晶片面120b及封裝材料130上。在本實施例中，晶片120的第一晶片面120a（例如主動面）配置有多個第一電性連接點121，其與第一重佈線路結構150電性連接；晶片120的第二晶片面120b（例如晶背）配置有第二電性連接點122，其與第二重佈線路結構160電性連接。在其他未繪示的實施例中，晶片120的第二晶片面120b沒有配置電性連接點與第二重佈線路結構160電性連接，即晶片120的訊號都是透過第一晶片面120a進行傳輸。相較之下，晶片120的兩面（第一晶片面120a、第二晶片面120b）都配置有電性連接點（第一電性連接點121、第二電性連接點122），可以使其分別電性連接第一重佈線路結構150與第二重佈線路結構160，如此可以增加訊號的設計彈性。換言之，可以將與第一重佈線路結構150的連接訊號設計於第一晶片面120a，可以將與第二重佈線路結構160的連接訊號設計於第二晶片面120b。此外，相較於在單一的封裝材料130上配置第一重佈線路結構150與第二重佈線路結構160，本實施例透過支撐結構110與高剛性的封裝材料130的一同配置，可以使整個晶片封裝的結構（第一重佈線路結構150、晶片120與第二重佈線路結構160）更加穩固。The second redistributed circuit structure 160 is located on the second supporting surface 110 b and the second chip surface 120 b and the packaging material 130. In this embodiment, the first chip surface 120a (for example, the active surface) of the chip 120 is provided with a plurality of first electrical connection points 121 which are electrically connected to the first redistributed circuit structure 150; the second chip of the chip 120 The surface 120 b (for example, the crystal back) is provided with a second electrical connection point 122, which is electrically connected to the second redistributed circuit structure 160. In other embodiments not shown, the second chip surface 120b of the chip 120 is not provided with electrical connection points to be electrically connected to the second redistributed circuit structure 160, that is, the signals of the chip 120 are all conducted through the first chip surface 120a transmission. In contrast, both sides of the wafer 120 (first wafer surface 120a, second wafer surface 120b) are equipped with electrical connection points (first electrical connection point 121, second electrical connection point 122), which can make it The first redistributed circuit structure 150 and the second redistributed circuit structure 160 are electrically connected, respectively, so that the design flexibility of the signal can be increased. In other words, the connection signal with the first redistributed circuit structure 150 can be designed on the first chip surface 120a, and the connection signal with the second redistributed circuit structure 160 can be designed on the second chip surface 120b. In addition, compared to arranging the first re-distributed circuit structure 150 and the second re-distributed circuit structure 160 on a single packaging material 130, in this embodiment, the supporting structure 110 and the high-rigidity packaging material 130 are configured together to make the entire The structure of the chip package (the first redistributed circuit structure 150, the chip 120, and the second redistributed circuit structure 160) is more stable.

在上述實施例中，各晶片封裝體100可包括多個絕緣層112。各絕緣層112位於對應的導電柱114與支撐結構110之間，以使這些導電柱114與支撐結構110彼此絕緣。在本實施例中，各絕緣層112例如是包覆住對應的導電柱114。In the above embodiment, each chip package 100 may include a plurality of insulating layers 112. Each insulating layer 112 is located between the corresponding conductive pillar 114 and the supporting structure 110 to insulate the conductive pillars 114 and the supporting structure 110 from each other. In this embodiment, each insulating layer 112 covers the corresponding conductive pillar 114, for example.

相較於圖1A至圖1N的實施例的支撐結構110可採用金屬，在圖3A至圖3L的另一實施例的支撐結構110採用了非金屬的材質，例如陶瓷、玻璃等。Compared with the supporting structure 110 in the embodiment of FIGS. 1A to 1N, metal may be used. In another embodiment of FIGS. 3A to 3L, the supporting structure 110 uses non-metallic materials, such as ceramics, glass, etc.

請參考圖3A，依照本發明的另一實施例的晶片封裝方法，首先，提供一支撐結構210。支撐結構210整體由相同材料、一體成形而形成，且支撐結構210具有一第一支撐面210a、相對於第一支撐面210a的一第二支撐面210b及連接第一支撐面210a及第二支撐面210b的多個開口210c。在本實施例中，支撐結構210的材質例如是陶瓷、玻璃。此外，支撐結構210可以是具有以陣列排列的多個開口的網狀金屬結構（類似如圖2所示的具有多個開口110c的支撐結構110），而各個開口210c可以容納對應的一或多個晶片。3A, according to another embodiment of the chip packaging method of the present invention, first, a supporting structure 210 is provided. The supporting structure 210 is entirely formed of the same material and integrally formed, and the supporting structure 210 has a first supporting surface 210a, a second supporting surface 210b opposite to the first supporting surface 210a, and connecting the first supporting surface 210a and the second supporting A plurality of openings 210c of the face 210b. In this embodiment, the material of the support structure 210 is, for example, ceramic or glass. In addition, the support structure 210 may be a mesh metal structure with a plurality of openings arranged in an array (similar to the support structure 110 with a plurality of openings 110c as shown in FIG. 2), and each opening 210c may accommodate one or more corresponding openings. A chip.

接著，進行形成多個支撐導電孔道214的步驟（完成圖如後述圖3E所示），支撐導電孔道214會貫穿支撐結構210，以連接支撐結構210的第一支撐面210a及第二支撐面210b。換言之，對具有以陣列排列的多個開口210c的網狀非金屬的支撐結構210而言，這些支撐導電孔道214會配置在支撐結構210之圍繞開口210c的部分內。在一實施例中，其整體來看，網狀的支撐結構210是具有多開口的矩形支撐結構。在本實施例中，如圖3B所示，移除支撐結構210的多個部分，以形成多個支撐貫孔210d。各支撐貫孔210d連接第一支撐面210a及第二支撐面210b。接著，請參考圖3C，形成導電材料在這些支撐貫孔210d內，以形成這些支撐導電孔道214。當支撐結構210的材質採用陶瓷或玻璃時，支撐結構210可避免這些支撐導電孔道214相互電性導通。值得一提的是，本實施例是先準備好具有多個支撐導電孔道的支撐結構，再進行後續晶片封裝的步驟，與封裝過程中或封裝完成再形成支撐導電孔道244的步驟相比，若支撐結構210的良率不佳，可以提早發現，不會導致整個封裝結構不能使用的問題。除此之外，開口210c兩側的支撐結構210具有對稱性，例如：開口210c兩側的支撐結構210中的支撐導電孔道214在數量上相同，在位置上兩側對稱。換言之，支撐結構210分別在開口210c的兩側的兩個部分具有對稱性。另外，在本實施例中，支撐導電孔道214是形成在支撐結構210中，相較於有些實施例將導電路徑形成在開口210c的開口壁上，本實施例可以節省導電路徑的設計空間，而具有更彈性的訊號布局。Next, a step of forming a plurality of supporting conductive holes 214 is performed (the completed figure is shown in FIG. 3E described later). The supporting conductive holes 214 penetrate the supporting structure 210 to connect the first supporting surface 210a and the second supporting surface 210b of the supporting structure 210 . In other words, for a net-like non-metallic support structure 210 having a plurality of openings 210c arranged in an array, these support conductive vias 214 are arranged in the portion of the support structure 210 surrounding the opening 210c. In one embodiment, as a whole, the net-like support structure 210 is a rectangular support structure with multiple openings. In this embodiment, as shown in FIG. 3B, a plurality of parts of the supporting structure 210 are removed to form a plurality of supporting through holes 210d. Each supporting through hole 210d connects the first supporting surface 210a and the second supporting surface 210b. Next, referring to FIG. 3C, a conductive material is formed in the supporting through holes 210d to form the supporting conductive holes 214. When the material of the supporting structure 210 is ceramic or glass, the supporting structure 210 can prevent the supporting conductive holes 214 from being electrically connected to each other. It is worth mentioning that, in this embodiment, a supporting structure with a plurality of supporting conductive vias is prepared first, and then the subsequent chip packaging step is performed. Compared with the step of forming the supporting conductive vias 244 during the packaging process or after the packaging is completed, if The poor yield rate of the support structure 210 can be detected early and will not cause the problem that the entire package structure cannot be used. In addition, the supporting structures 210 on both sides of the opening 210c have symmetry. For example, the supporting conductive holes 214 in the supporting structures 210 on both sides of the opening 210c are the same in number and symmetrical in position. In other words, the supporting structure 210 has symmetry at two parts on both sides of the opening 210c. In addition, in this embodiment, the supporting conductive via 214 is formed in the supporting structure 210. Compared with some embodiments where the conductive path is formed on the opening wall of the opening 210c, this embodiment can save the design space of the conductive path. It has a more flexible signal layout.

請參考圖3D，暫時地固定支撐結構210及多個晶片220至一載板300。這些晶片220分別位於支撐結構210的這些開口210c內。在本實施例中，各開口210c配置一個晶片220。另外，在本實施例中，支撐結構210及多個晶片220通過可剝除層300a暫時地固定至載板300。此外，以剝除層300a為參考面，支撐結構210與晶片220等高，意即支撐結構210的第一支撐面210a與晶片220的第一晶片面220a齊平，如此在後續步驟中，在縱向空間配置重佈線路結構或是其他元件，可以使受力更均勻，而強化整體結構的剛性。Please refer to FIG. 3D to temporarily fix the supporting structure 210 and a plurality of chips 220 to a carrier 300. The wafers 220 are respectively located in the openings 210 c of the supporting structure 210. In this embodiment, each opening 210c is configured with a wafer 220. In addition, in this embodiment, the support structure 210 and the plurality of wafers 220 are temporarily fixed to the carrier 300 through the peelable layer 300a. In addition, taking the stripping layer 300a as the reference plane, the support structure 210 and the wafer 220 have the same height, which means that the first support surface 210a of the support structure 210 is flush with the first wafer surface 220a of the wafer 220. The re-arranged line structure or other components in the longitudinal space can make the force more uniform and strengthen the rigidity of the overall structure.

請參考圖3E，形成一封裝材料230在載板300上，其中封裝材料230完整覆蓋支撐結構210的第一支撐面210a及這些晶片220的這些第一晶片面220a（第一晶片面220a例如是主動面），並填充在支撐結構210的開口與晶片220之間，並且填滿於網狀的支撐結構210的每一開口210c與對應的晶片220之間的空隙，封裝材料230的頂面高於晶片220的第一晶片面220a和支撐結構210的第一支撐面210a。更進一步說，封裝材料230覆蓋住露出於第一支撐面210a的支撐導電孔道214。在本實施例中，封裝材料230的材質不同於支撐結構210的材質。在本實施例中，封裝材料230具有高剛性（Modulus），低熱膨脹係數（CTE）的特性，例如是環氧樹脂（epoxy），如此可以避免因外力、因熱而影響晶片、支撐結構等結構。在一實施例中，封裝材料230的剛性係數例如是22000MPa、熱膨脹係數例如是8.4*10-6 /°C。3E, a packaging material 230 is formed on the carrier 300, wherein the packaging material 230 completely covers the first supporting surface 210a of the supporting structure 210 and the first chip surfaces 220a of the chips 220 (the first chip surface 220a is, for example, Active surface), and filled between the opening of the support structure 210 and the chip 220, and filled in the gap between each opening 210c of the net-shaped support structure 210 and the corresponding chip 220, the top surface of the packaging material 230 is high On the first wafer surface 220a of the wafer 220 and the first support surface 210a of the support structure 210. Furthermore, the packaging material 230 covers the supporting conductive holes 214 exposed on the first supporting surface 210a. In this embodiment, the material of the packaging material 230 is different from the material of the support structure 210. In this embodiment, the packaging material 230 has the characteristics of high rigidity (Modulus) and low coefficient of thermal expansion (CTE), such as epoxy resin, which can avoid the influence of external force and heat on the chip, support structure and other structures. . In one embodiment, the rigidity coefficient of the packaging material 230 is, for example, 22000 MPa, and the thermal expansion coefficient is, for example, 8.4*10 -6 /°C.

接著，進行形成多個材料導電孔道及一材料圖案化導電層的步驟，以得到如圖3H所示的結構。這些材料導電孔道位於封裝材料內並分別實質上、電性上連接這些支撐導電孔道。材料圖案化導電層位於封裝材料上並實質上、電性上連接這些材料導電孔道242，詳細說明如下。請參考圖3F，移除封裝材料230的多個部分，以形成多個材料貫孔230a，其分別暴露出這些支撐導電孔道214及晶片220的在第一晶片面220a的多個部分（例如主動面上的電性連接點）。接著，請參考圖3G，形成一種子層240在封裝材料230的表面及各材料貫孔230a的內面。接著，請參考圖3H，利用圖案化罩幕（未繪示）配合電鍍及蝕刻，在材料貫孔230a內形成這些材料導電孔道242，並在封裝材料230上形成材料圖案化導電層244。此時，除了晶片220上的材料導電孔道242和材料圖案化導電層244之外，支撐導電孔道214、材料導電孔道242和材料圖案化導電層244彼此在實質上、電性上相互連接。晶片220上的材料導電孔道242和材料圖案化導電層244則與部分的第一晶片面220a（例如主動面的電性連接點）實質上、電性上連接。在本實施例中，材料導電孔道242的投影會落在露出於第一支撐面210a的支撐導電孔道214的裸露面上。更詳細的說，由於材料導電孔道242形成於封裝材料230中，而此封裝材料230具有高剛性，低熱膨脹係數的特性，所以材料導電孔道242的橫向剖面尺寸可以小於支撐導電孔道214的橫向剖面尺寸，材料導電孔道242的橫向剖面尺寸可以小於材料圖案化導電層244的橫向剖面尺寸。也就是說，材料導電孔道242的橫向剖面尺寸雖然較小，但是因為周圍有封裝材料230，所以仍可保有良好的結構強度。Next, the steps of forming a plurality of material conductive holes and a material patterned conductive layer are performed to obtain the structure as shown in FIG. 3H. The conductive vias of these materials are located in the packaging material and are respectively substantially and electrically connected to the supporting conductive vias. The material patterned conductive layer is located on the packaging material and is substantially and electrically connected to the conductive holes 242 of these materials, as described in detail below. 3F, multiple parts of the packaging material 230 are removed to form a plurality of material through holes 230a, which respectively expose these supporting conductive vias 214 and multiple parts of the chip 220 on the first chip surface 220a (for example, active Electrical connection points on the surface). Next, referring to FIG. 3G, a sub-layer 240 is formed on the surface of the packaging material 230 and the inner surface of each material through hole 230a. Next, referring to FIG. 3H, a patterned mask (not shown) is used in conjunction with electroplating and etching to form these material conductive holes 242 in the material through holes 230a, and a material patterned conductive layer 244 is formed on the packaging material 230. At this time, in addition to the material conductive via 242 and the material patterned conductive layer 244 on the wafer 220, the support conductive via 214, the material conductive via 242, and the material patterned conductive layer 244 are substantially and electrically connected to each other. The material conductive via 242 and the material patterned conductive layer 244 on the chip 220 are substantially and electrically connected to a part of the first chip surface 220a (for example, the electrical connection point of the active surface). In this embodiment, the projection of the material conductive via 242 will fall on the exposed surface of the supporting conductive via 214 exposed on the first supporting surface 210a. In more detail, since the material conductive hole 242 is formed in the packaging material 230, and the packaging material 230 has the characteristics of high rigidity and low coefficient of thermal expansion, the transverse cross-sectional size of the material conductive hole 242 can be smaller than the lateral cross-section of the supporting conductive hole 214 The size, the transverse cross-sectional size of the material conductive hole 242 may be smaller than the transverse cross-sectional size of the material patterned conductive layer 244. In other words, although the size of the transverse cross-section of the material conductive via 242 is small, it can still maintain good structural strength because of the encapsulation material 230 surrounding it.

請參考圖3I，形成一第一重佈線路結構250在封裝材料230及材料圖案化導電層244上，用以重新分布訊號輸出或輸入的位置。第一重佈線路結構250經由材料圖案化導電層244及這些材料導電孔道242與晶片220及這些支撐導電孔道214相互電性連接。第一重佈線路結構250可藉由增層法來製作，其詳細的製作方式可從相關領域的通常知識中獲致足夠教示、建議與實施說明，故在此不再贅述。在本實施例中，第一重佈線路結構250包括多個第一介電層252、多個第一圖案化導電層254及多個第一導電孔道256。這些第一介電層252與這些第一圖案化導電層254交錯疊合。這些第一導電孔道256位於對應的第一介電層252內。這些第一圖案化導電層254經由這些第一導電孔道256彼此電性連接。最靠近材料圖案化導電層244的第一圖案化導電層254亦經由這些第一導電孔道256與晶片220及材料圖案化導電層244相連接。在本發明中，第一重佈線路結構250的第一介電層252的材質不同於封裝材料230的材質。詳細的說明是，封裝材料230的材質具有高剛性，低熱膨脹係數的特性，其例如是環氧樹脂（epoxy）；第一介電層252的材質剛性較低於封裝材料230的材質剛性，第一介電層252的熱膨脹係數較高於封裝材料230的熱膨脹係數，第一介電層252的材質例如是聚醯亞胺（PI）。在一實施例中，封裝材料230的剛性係數例如是22000MPa、熱膨脹係數例如是8.4*10-6 /°C，第一介電層252的剛性係數例如是2500MPa、熱膨脹係數例如是60*10-6 /°C。因此，相較之下，位於封裝材料230中的材料導電孔道242，會比位於第一介電層252中的第一導電孔道256，在結構上更為穩固。Please refer to FIG. 3I to form a first redistributed circuit structure 250 on the packaging material 230 and the material patterned conductive layer 244 to redistribute the signal output or input positions. The first redistributed circuit structure 250 is electrically connected to the chip 220 and the supporting conductive holes 214 through the material patterned conductive layer 244 and the conductive holes 242 of these materials. The first re-distributed circuit structure 250 can be fabricated by a layer build-up method, and the detailed fabrication method can obtain sufficient teachings, suggestions and implementation instructions from the general knowledge in the related field, so it will not be repeated here. In this embodiment, the first redistributed circuit structure 250 includes a plurality of first dielectric layers 252, a plurality of first patterned conductive layers 254, and a plurality of first conductive vias 256. The first dielectric layers 252 and the first patterned conductive layers 254 are overlapped alternately. The first conductive vias 256 are located in the corresponding first dielectric layer 252. The first patterned conductive layers 254 are electrically connected to each other through the first conductive holes 256. The first patterned conductive layer 254 closest to the material patterned conductive layer 244 is also connected to the wafer 220 and the material patterned conductive layer 244 through these first conductive holes 256. In the present invention, the material of the first dielectric layer 252 of the first redistributed circuit structure 250 is different from the material of the packaging material 230. The detailed description is that the material of the packaging material 230 has the characteristics of high rigidity and low thermal expansion coefficient, such as epoxy; the material rigidity of the first dielectric layer 252 is lower than that of the packaging material 230. The thermal expansion coefficient of a dielectric layer 252 is higher than that of the packaging material 230, and the material of the first dielectric layer 252 is, for example, polyimide (PI). In one embodiment, the rigidity coefficient of the packaging material 230 is, for example, 22000 MPa, the thermal expansion coefficient is, for example, 8.4*10 -6 /°C, the rigidity coefficient of the first dielectric layer 252 is, for example, 2500 MPa, and the thermal expansion coefficient is, for example, 60*10 − 6 /°C. Therefore, in comparison, the material conductive via 242 located in the packaging material 230 is structurally more stable than the first conductive via 256 located in the first dielectric layer 252.

另一方面，封裝材料230是配置在支撐結構210與第一重佈線路結構250之間，並且封裝材料230是配置在晶片220與第一重佈線路結構250之間，彼此以材料導電孔道242電性連接。也就是說，支撐結構210透過包覆於封裝材料230中的材料導電孔道242與第一重佈線路結構250電性連接。此外，相較於在單一的封裝材料230上配置第一重佈線路結構250，本實施例透過支撐結構210與具有高剛性的封裝材料230一同配置，可以使整個晶片封裝的結構更加穩固。而且，非金屬材質的支撐結構210也可以做為雜訊的屏蔽之用。此外，本實施例的支撐導電孔道214與材料導電孔道242的尺寸不相同，會有不同的電流密度效果，提高了訊號設計的彈性。On the other hand, the packaging material 230 is disposed between the support structure 210 and the first re-distributed circuit structure 250, and the packaging material 230 is disposed between the wafer 220 and the first re-distributed circuit structure 250, and the conductive vias 242 are used for each other. Electrical connection. In other words, the support structure 210 is electrically connected to the first redistributed circuit structure 250 through the conductive holes 242 covered in the packaging material 230. In addition, compared to arranging the first redistributed circuit structure 250 on a single packaging material 230, in this embodiment, the supporting structure 210 and the packaging material 230 having high rigidity are arranged together to make the structure of the entire chip package more stable. Moreover, the non-metallic support structure 210 can also be used for noise shielding. In addition, the size of the supporting conductive hole 214 and the material conductive hole 242 of this embodiment are different, and there will be different current density effects, which improves the flexibility of the signal design.

請參考圖3J，移離載板300以及剝除層300a。此時，支撐結構210的第二支撐面210b、晶片220的第二晶片面220b和裸露的封裝材料230共平面。Please refer to FIG. 3J to remove the carrier board 300 and peel off the layer 300a. At this time, the second support surface 210b of the support structure 210, the second wafer surface 220b of the wafer 220, and the exposed packaging material 230 are coplanar.

請參考圖3K，形成一第二重佈線路結構260在第二支撐面210b、第二晶片面220b及封裝材料230上，用以重新分布訊號輸出或輸入的位置。第二重佈線路結構260亦可藉由增層法來製作，其詳細的製作方式可從相關領域的通常知識中獲致足夠教示、建議與實施說明，故在此不再贅述。在本實施例中，第二重佈線路結構260包括多個第二介電層262、多個第二圖案化導電層264及多個第二導電孔道266。這些第二介電層262與這些第二圖案化導電層264交錯疊合。這些第二導電孔道266位於對應的第二介電層262內。這些第二圖案化導電層264經由這些第二導電孔道266彼此電性連接。最靠近材料圖案化導電層244的第二圖案化導電層264亦經由這些第二導電孔道266與晶片220及材料圖案化導電層244相連接。在本實施例中，晶片220的第一晶片面220a（例如主動面）配置有多個第一電性連接點221，其與第一重佈線路結構250電性連接；晶片220的第二晶片面220b（例如晶背）配置有第二電性連接點222，其與第二重佈線路結構260電性連接。在其他未繪示的實施例中，晶片220的第二晶片面220b沒有配置電性連接點與第二重佈線路結構260電性連接，即晶片220的訊號都是透過第一晶片面220a進行傳輸。相較之下，晶片220的兩面（第一晶片面220a、第二晶片面220b）都配置有電性連接點（第一電性連接點221、第二電性連接點222），可以使其分別電性連接第一重佈線路結構250與第二重佈線路結構260，如此可以增加訊號的設計彈性。換言之，可以將與第一重佈線路結構250的連接訊號設計於第一晶片面220a，可以將與第二重佈線路結構260的連接訊號設計於第二晶片面220b。此外，相較於在單一的封裝材料230上配置第一重佈線路結構250與第二重佈線路結構260，本實施例透過支撐結構210與高剛性的封裝材料230的一同配置，可以使整個晶片封裝的結構（第一重佈線路結構250、晶片220與第二重佈線路結構260）更加穩固。Please refer to FIG. 3K to form a second redistributed circuit structure 260 on the second supporting surface 210b, the second chip surface 220b and the packaging material 230 to redistribute the signal output or input positions. The second re-distributed circuit structure 260 can also be fabricated by the build-up method, and the detailed fabrication method can obtain sufficient teachings, suggestions and implementation instructions from the general knowledge in the related field, so it will not be repeated here. In this embodiment, the second redistributed circuit structure 260 includes a plurality of second dielectric layers 262, a plurality of second patterned conductive layers 264, and a plurality of second conductive vias 266. The second dielectric layers 262 and the second patterned conductive layers 264 are overlapped alternately. These second conductive vias 266 are located in the corresponding second dielectric layer 262. The second patterned conductive layers 264 are electrically connected to each other through the second conductive holes 266. The second patterned conductive layer 264 closest to the material patterned conductive layer 244 is also connected to the wafer 220 and the material patterned conductive layer 244 through these second conductive holes 266. In this embodiment, the first chip surface 220a (for example, the active surface) of the chip 220 is provided with a plurality of first electrical connection points 221 which are electrically connected to the first redistributed circuit structure 250; the second chip of the chip 220 The surface 220 b (for example, the crystal back) is provided with a second electrical connection point 222, which is electrically connected to the second redistributed circuit structure 260. In other embodiments that are not shown, the second chip surface 220b of the chip 220 is not provided with electrical connection points and is electrically connected to the second redistributed circuit structure 260, that is, the signals of the chip 220 are all conducted through the first chip surface 220a transmission. In contrast, both sides of the chip 220 (first chip surface 220a, second chip surface 220b) are equipped with electrical connection points (first electrical connection point 221, second electrical connection point 222), which can make it The first re-routed structure 250 and the second re-routed structure 260 are electrically connected respectively, so that the flexibility of signal design can be increased. In other words, the connection signal with the first redistributed circuit structure 250 can be designed on the first chip surface 220a, and the connection signal with the second redistributed circuit structure 260 can be designed on the second chip surface 220b. In addition, compared to arranging the first re-distributed circuit structure 250 and the second re-distributed circuit structure 260 on a single packaging material 230, in this embodiment, the supporting structure 210 and the high-rigidity packaging material 230 can be configured together to make the entire The structure of the chip package (the first redistributed circuit structure 250, the chip 220, and the second redistributed circuit structure 260) is more stable.

請參考圖3L，單顆化各晶片220及與其封裝有關的結構，即沿切割線L來切割目前的結構，以形成多個晶片封裝體200。在單顆化步驟之後，如圖3N所示，晶片封裝體200包含支撐結構210（即切割後的支撐結構210的一部分）、封裝材料230（即切割後的封裝材料230的一部分）、對應的多個材料導電孔道242，材料圖案化導電層244（即切割後的材料圖案化導電層244的一部分）。此時，支撐結構210、封裝材料230、第一重佈線路結構250、第二重佈線路結構260的側面，沿著切割線L切齊。此外，在單顆化步驟之前或單顆化步驟之後，可以依照實際需求，形成多個導電接點258（例如導電球）連接至第一重佈線路結構250。在其他未繪示的實施例中，更可以在第二重佈線路結構260上配置其他的晶片或是晶片封裝體，使得圖3L中的晶片封裝體200透過第二重佈線路結構260與其他的晶片或是晶片封裝體晶片電性連接。如此一來，透過晶片封裝體的雙面電性內連接通道，可以實現三維（3D）上的晶片封裝體。以晶片220為例，其可以透過第一重佈線路結構250、第二重佈線路結構260分別連接導電接點258或是其他的晶片/晶片封裝體。另外，第一重佈線路結構250、第二重佈線路結構260的訊號，可以透過晶片220或是支撐結構210的導電柱214進行傳遞，特別是導電柱214配置於支撐結構210中，更可避免導電柱214受到外力的破壞，而影響訊號傳遞。此外，在此三維的晶片封裝體中，以封裝材料230與支撐結構210的一同配置，取代了原本的封裝材料230的單一配置，可以使整個三維的晶片封裝體的結構更加穩固。除此之外，在其他的實施例中，會在單顆化各晶片220及與其封裝有關的結構之後，才在支撐結構的側壁形成導電通道，取代本發明的預先準備好具有多個支撐導電孔道的支撐結構，但是如此會導致位於支撐結構側壁的導電通道距離晶片太遠，傳遞路徑太長，可能造成訊號衰減，此外，如果最後才進行側壁的導電通道，也可能造成製程失敗，導致整個封裝體無法使用的問題。Referring to FIG. 3L, each chip 220 and the structure related to its packaging are singulated, that is, the current structure is cut along the cutting line L to form a plurality of chip packages 200. After the singulation step, as shown in FIG. 3N, the chip package 200 includes a support structure 210 (that is, a part of the support structure 210 after cutting), a packaging material 230 (that is, a part of the packaging material 230 after cutting), and the corresponding A plurality of material conductive holes 242, and the material patterned conductive layer 244 (that is, a part of the material patterned conductive layer 244 after cutting). At this time, the side surfaces of the supporting structure 210, the packaging material 230, the first redistributed circuit structure 250, and the second redistributed circuit structure 260 are aligned along the cutting line L. In addition, before the singulation step or after the singulation step, a plurality of conductive contacts 258 (for example, conductive balls) can be formed to connect to the first redistributed circuit structure 250 according to actual requirements. In other embodiments not shown, other chips or chip packages may be disposed on the second redistribution circuit structure 260, so that the chip package 200 in FIG. 3L penetrates the second redistribution circuit structure 260 and other The chip or the chip package chip is electrically connected. In this way, through the double-sided electrical internal connection channels of the chip package, a three-dimensional (3D) chip package can be realized. Taking the chip 220 as an example, it can be connected to the conductive contacts 258 or other chip/chip packages through the first redistributed circuit structure 250 and the second redistributed circuit structure 260, respectively. In addition, the signals of the first re-distributed circuit structure 250 and the second re-distributed circuit structure 260 can be transmitted through the chip 220 or the conductive pillars 214 of the support structure 210. In particular, the conductive pillars 214 are arranged in the support structure 210. Prevent the conductive pillars 214 from being damaged by external forces and affecting signal transmission. In addition, in the three-dimensional chip package, the packaging material 230 and the supporting structure 210 are arranged together instead of the original single configuration of the packaging material 230, which can make the structure of the entire three-dimensional chip package more stable. In addition, in other embodiments, the conductive channels are formed on the sidewalls of the supporting structure after each chip 220 and the structure related to its packaging are singulated, instead of preparing a plurality of supporting conductive materials in advance in the present invention. The support structure of the channel, but this will cause the conductive channel on the side wall of the support structure to be too far away from the chip, and the transmission path is too long, which may cause signal attenuation. In addition, if the conductive channel on the side wall is carried out last, it may also cause the process to fail and cause the entire The problem that the package body cannot be used.

當以批次方式來生產多個晶片封裝體200時，將多個晶片220配置在載板300上。因此，請參考圖3L，在形成這些導電接點258之前，可先執行單顆化的步驟，即沿如圖3M所是的切割線L來切割晶片220周圍的結構，以分離這些晶片封裝體200。同樣地，當以批次方式來生產多個晶片封裝體200時，支撐結構210具有以陣列排列的多個開口210c，如圖2所示，而各個開口210c容納對應的晶片220，如圖3D所示。When a plurality of chip packages 200 are produced in a batch manner, the plurality of chips 220 are arranged on the carrier 300. Therefore, please refer to FIG. 3L. Before forming these conductive contacts 258, a singulation step may be performed, that is, the structure around the chip 220 is cut along the cutting line L as shown in FIG. 3M to separate the chip packages. 200. Similarly, when multiple chip packages 200 are produced in batches, the support structure 210 has a plurality of openings 210c arranged in an array, as shown in FIG. 2, and each opening 210c accommodates a corresponding chip 220, as shown in FIG. 3D Shown.

在本實施例中，以陣列排列且尚未切割的多個晶片封裝體200可構成一晶片封裝陣列50，如圖3K所示。換句話說，晶片封裝陣列50包括以陣列排列且尚未切割的多個晶片封裝體200。具體而言，各晶片封裝體200包括一支撐結構220、多個支撐導電孔道224、一晶片220、一封裝材料230、多個材料導電孔道242、一材料圖案化導電層244、一第一重佈線路結構250及一第二重佈線路結構260。支撐結構210整體由相同材料形成，並具有一第一支撐面210a、相對於第一支撐面210a的一第二支撐面210b及連接第一支撐面210a及第二支撐面210b的一開口210c。在本實施例中，支撐結構210的材質例如是非金屬的玻璃或是陶瓷。此外，支撐結構210可以是具有以陣列排列的多個開口210c的網狀非金屬結構，如圖2所示，而各個開口210c可以容納對應一或多個晶片。非金屬材質的支撐結構210具有穩定封裝體結構及絕緣的功能。另一方面，對具有以陣列排列的多個開口210c的網狀金屬的支撐結構210而言，這些支撐導電孔道214會配置在支撐結構210之圍繞開口210c的部分內。在一實施例中，其整體來看，網狀的支撐結構210是具有多開口的矩形支撐結構。此外，開口210c兩側的支撐結構210具有對稱性，例如：開口210c兩側的支撐結構210中的支撐導電孔道214在數量上相同，在位置上兩側對稱。換言之，支撐結構210分別在開口210c的兩側的兩個部分具有對稱性。In this embodiment, a plurality of chip packages 200 arranged in an array and not yet cut can form a chip package array 50, as shown in FIG. 3K. In other words, the chip package array 50 includes a plurality of chip packages 200 that are arranged in an array and have not been diced. Specifically, each chip package 200 includes a supporting structure 220, a plurality of supporting conductive holes 224, a chip 220, a packaging material 230, a plurality of material conductive holes 242, a material patterned conductive layer 244, and a first layer. Route structure 250 and a second reroute structure 260. The supporting structure 210 is entirely formed of the same material, and has a first supporting surface 210a, a second supporting surface 210b opposite to the first supporting surface 210a, and an opening 210c connecting the first supporting surface 210a and the second supporting surface 210b. In this embodiment, the material of the support structure 210 is, for example, non-metallic glass or ceramic. In addition, the support structure 210 may be a net-like non-metal structure having a plurality of openings 210c arranged in an array, as shown in FIG. 2, and each opening 210c may accommodate one or more corresponding wafers. The support structure 210 made of non-metallic material has the functions of stabilizing the structure of the package body and insulating. On the other hand, for the support structure 210 of mesh metal having a plurality of openings 210c arranged in an array, these support conductive vias 214 will be arranged in the part of the support structure 210 surrounding the opening 210c. In one embodiment, as a whole, the net-like support structure 210 is a rectangular support structure with multiple openings. In addition, the supporting structures 210 on both sides of the opening 210c have symmetry. For example, the supporting conductive holes 214 in the supporting structures 210 on both sides of the opening 210c are the same in number and symmetrical in position. In other words, the supporting structure 210 has symmetry at two parts on both sides of the opening 210c.

這些支撐導電孔道214貫穿支撐結構210，以連接支撐結構210的第一支撐面210a及第二支撐面210b。晶片220位於開口210c內並具有一第一晶片面220a（例如主動面）及相對於第一晶片面120a的一第二晶片面120b（例如晶背）。在本實施例中，支撐導電孔道214是形成在支撐結構210中，相較於有些實施例將導電路徑形成在開口210c的開口壁上，本實施例可以節省導電路徑的設計空間，而具有更彈性的訊號布局。另外，支撐結構210與晶片220等高，意即支撐結構210的第一支撐面210a與晶片220的第一晶片面220a齊平，所以，若在縱向空間配置重佈線路結構或是其他元件，可以使受力更均勻，而強化整體結構的剛性。These supporting conductive holes 214 penetrate the supporting structure 210 to connect the first supporting surface 210 a and the second supporting surface 210 b of the supporting structure 210. The chip 220 is located in the opening 210c and has a first chip surface 220a (for example, an active surface) and a second chip surface 120b (for example, a crystal back) opposite to the first chip surface 120a. In this embodiment, the supporting conductive via 214 is formed in the supporting structure 210. Compared with some embodiments where the conductive path is formed on the opening wall of the opening 210c, this embodiment can save the design space of the conductive path and has more advantages. Flexible signal layout. In addition, the support structure 210 and the wafer 220 are of the same height, which means that the first support surface 210a of the support structure 210 is flush with the first wafer surface 220a of the wafer 220. Therefore, if the redistributed circuit structure or other components are arranged in the longitudinal space, It can make the force more uniform and strengthen the rigidity of the overall structure.

封裝材料230位在支撐結構210的第一支撐面210a及晶片220的第一晶片面220a上，並填充在支撐結構210的開口與晶片220之間。這些材料導電孔道242位於封裝材料230內，並分別連接這些支撐導電孔道214。在本實施例中，封裝材料230的材質不同於支撐結構210的材質。在本實施例中，封裝材料230具有高剛性（Modulus），低熱膨脹係數（CTE）的特性，例如是環氧樹脂（epoxy），如此可以避免因外力、因熱而影響晶片、支撐結構等結構。在一實施例中，封裝材料230的剛性係數例如是22000MPa、熱膨脹係數例如是8.4*10-6 /°C。The packaging material 230 is located on the first supporting surface 210 a of the supporting structure 210 and the first chip surface 220 a of the chip 220, and is filled between the opening of the supporting structure 210 and the chip 220. The conductive vias 242 of these materials are located in the packaging material 230 and are connected to the supporting conductive vias 214 respectively. In this embodiment, the material of the packaging material 230 is different from the material of the support structure 210. In this embodiment, the packaging material 230 has the characteristics of high rigidity (Modulus) and low coefficient of thermal expansion (CTE), such as epoxy resin (epoxy), which can avoid the influence of external force and heat on the chip, support structure and other structures. . In one embodiment, the rigidity coefficient of the packaging material 230 is, for example, 22000 MPa, and the thermal expansion coefficient is, for example, 8.4*10 -6 /°C.

材料圖案化導電層244位於封裝材料230上，並連接這些材料導電孔道242。值得一提的是，由於材料導電孔道242形成於封裝材料230中，而此封裝材料230具有高剛性，低熱膨脹係數的特性，所以材料導電孔道242的橫向剖面尺寸可以小於支撐導電孔道214的橫向剖面尺寸，材料導電孔道242的橫向剖面尺寸可以小於材料圖案化導電層244的橫向剖面尺寸。也就是說，材料導電孔道242的橫向剖面尺寸雖然較小，但是因為周圍有封裝材料230，所以仍可保有良好的結構強度。The material-patterned conductive layer 244 is located on the packaging material 230 and connects the conductive vias 242 of these materials. It is worth mentioning that because the material conductive holes 242 are formed in the packaging material 230, and the packaging material 230 has the characteristics of high rigidity and low thermal expansion coefficient, the transverse cross-sectional size of the material conductive holes 242 can be smaller than the lateral size of the supporting conductive holes 214. The cross-sectional size, the cross-sectional size of the material conductive hole 242 may be smaller than the cross-sectional size of the material patterned conductive layer 244. In other words, although the size of the transverse cross-section of the material conductive via 242 is small, it can still maintain good structural strength because of the encapsulation material 230 surrounding it.

第一重佈線路結構250位於封裝材料230及材料圖案化導電層244上，其中第一重佈線路結構250經由材料圖案化導電層244及這些材料導電孔道242與晶片220及這些支撐導電孔道相電性連接。在本實施例中，第一重佈線路結構250的第一介電層252的材質不同於封裝材料230的材質。詳細的說明是，封裝材料230的材質具有高剛性，低熱膨脹係數的特性，封裝材料230的材質例如是環氧樹脂（epoxy）；第一介電層252的材質剛性較低於封裝材料230的材質剛性，第一介電層252的熱膨脹係數較高於封裝材料230的熱膨脹係數，第一介電層252的材質例如是聚醯亞胺（PI）。在一實施例中，封裝材料230的剛性係數例如是22000MPa、熱膨脹係數例如是8.4*10-6 /°C，第一介電層252的剛性係數例如是2500MPa、熱膨脹係數例如是60*10-6 /°C。因此，相較之下，位於封裝材料230中的材料導電孔道242，會比位於第一介電層252中的第一導電孔道256，在結構上更為穩固。另一方面，封裝材料230是配置在支撐結構210與第一重佈線路結構250之間，並且封裝材料230是配置在晶片220與第一重佈線路結構250之間，彼此以材料導電孔道242電性連接。也就是說，支撐結構210透過包覆於封裝材料230中的材料導電孔道242與第一重佈線路結構250電性連接。此外，相較於在單一的封裝材料230上配置第一重佈線路結構250，本實施例透過支撐結構210與具有高剛性的封裝材料230一同配置，可以使整個晶片封裝的結構更加穩固。而且，金屬材質的支撐結構210也可以做為雜訊的屏蔽之用。此外，本實施例的支撐導電孔道214與材料導電孔道242的尺寸不相同，會有不同的電流密度效果，提高了訊號設計的彈性。值得一提的是，對於晶片封裝體來說，金屬材質的支撐結構210有較佳的散熱效果。The first redistributed circuit structure 250 is located on the encapsulation material 230 and the material patterned conductive layer 244, wherein the first redistributed circuit structure 250 corresponds to the chip 220 and these supporting conductive channels via the material patterned conductive layer 244 and the conductive channels 242 of these materials. Electrical connection. In this embodiment, the material of the first dielectric layer 252 of the first redistributed circuit structure 250 is different from the material of the packaging material 230. The detailed description is that the material of the packaging material 230 has the characteristics of high rigidity and low thermal expansion coefficient. The material of the packaging material 230 is, for example, epoxy; the material of the first dielectric layer 252 has lower rigidity than that of the packaging material 230. The material is rigid. The thermal expansion coefficient of the first dielectric layer 252 is higher than that of the packaging material 230. The material of the first dielectric layer 252 is, for example, polyimide (PI). In one embodiment, the rigidity coefficient of the packaging material 230 is, for example, 22000 MPa, the thermal expansion coefficient is, for example, 8.4*10 -6 /°C, the rigidity coefficient of the first dielectric layer 252 is, for example, 2500 MPa, and the thermal expansion coefficient is, for example, 60*10 − 6 /°C. Therefore, in comparison, the material conductive via 242 located in the packaging material 230 is structurally more stable than the first conductive via 256 located in the first dielectric layer 252. On the other hand, the packaging material 230 is disposed between the support structure 210 and the first re-distributed circuit structure 250, and the packaging material 230 is disposed between the wafer 220 and the first re-distributed circuit structure 250, and the conductive vias 242 are used for each other. Electrical connection. In other words, the support structure 210 is electrically connected to the first redistributed circuit structure 250 through the conductive holes 242 covered in the packaging material 230. In addition, compared to arranging the first redistributed circuit structure 250 on a single packaging material 230, in this embodiment, the supporting structure 210 and the packaging material 230 having high rigidity are arranged together to make the structure of the entire chip package more stable. Moreover, the metal supporting structure 210 can also be used for noise shielding. In addition, the size of the supporting conductive hole 214 and the material conductive hole 242 of this embodiment are different, and there will be different current density effects, which improves the flexibility of the signal design. It is worth mentioning that, for the chip package, the metal supporting structure 210 has a better heat dissipation effect.

第二重佈線路結構260位於第二支撐面210b及第二晶片面220b及封裝材料230上。在本實施例中，晶片220的第一晶片面220a（例如主動面）配置有多個第一電性連接點221，其與第一重佈線路結構250電性連接；晶片220的第二晶片面220b（例如晶背）配置有多個第二電性連接點222，其與第二重佈線路結構260電性連接。在其他未繪示的實施例中，晶片220的第二晶片面220b沒有配置電性連接點與第二重佈線路結構260電性連接，即晶片220的訊號都是透過第一晶片面220a進行傳輸。相較之下，晶片220的兩面（第一晶片面220a、第二晶片面220b）都配置有電性連接點（第一電性連接點221、第二電性連接點222），可以使其分別電性連接第一重佈線路結構250與第二重佈線路結構260，如此可以增加訊號的設計彈性。換言之，可以將與第一重佈線路結構250的連接訊號設計於第一晶片面220a，可以將與第二重佈線路結構260的連接訊號設計於第二晶片面220b。此外，相較於在單一的封裝材料230上配置第一重佈線路結構250與第二重佈線路結構260，本實施例透過支撐結構210與高剛性的封裝材料230的一同配置，可以使整個晶片封裝的結構（第一重佈線路結構250、晶片220與第二重佈線路結構260）更加穩固。The second redistributed circuit structure 260 is located on the second supporting surface 210 b and the second chip surface 220 b and the packaging material 230. In this embodiment, the first chip surface 220a (for example, the active surface) of the chip 220 is provided with a plurality of first electrical connection points 221 which are electrically connected to the first redistributed circuit structure 250; the second chip of the chip 220 The surface 220 b (for example, the crystal back) is provided with a plurality of second electrical connection points 222, which are electrically connected to the second redistributed circuit structure 260. In other embodiments that are not shown, the second chip surface 220b of the chip 220 is not provided with electrical connection points and is electrically connected to the second redistributed circuit structure 260, that is, the signals of the chip 220 are all conducted through the first chip surface 220a transmission. In contrast, both sides of the chip 220 (first chip surface 220a, second chip surface 220b) are equipped with electrical connection points (first electrical connection point 221, second electrical connection point 222), which can make it The first re-routed structure 250 and the second re-routed structure 260 are electrically connected respectively, so that the flexibility of signal design can be increased. In other words, the connection signal with the first redistributed circuit structure 250 can be designed on the first chip surface 220a, and the connection signal with the second redistributed circuit structure 260 can be designed on the second chip surface 220b. In addition, compared to arranging the first re-distributed circuit structure 250 and the second re-distributed circuit structure 260 on a single packaging material 230, in this embodiment, the supporting structure 210 and the high-rigidity packaging material 230 can be configured together to make the entire The structure of the chip package (the first redistributed circuit structure 250, the chip 220, and the second redistributed circuit structure 260) is more stable.

綜上所述，在本發明的上述實施例中，支撐結構的使用可減少翹曲問題，因而降低對位不準的風險。通過內設於支撐結構的支撐導電孔道可作為晶片封裝體的雙面電性內連接通道，增加訊號設計的彈性。採用金屬作為材質的支撐結構可提供良好的散熱能力。In summary, in the above-mentioned embodiments of the present invention, the use of the supporting structure can reduce the warpage problem, thereby reducing the risk of misalignment. The supporting conductive holes arranged in the supporting structure can be used as double-sided electrical internal connection channels of the chip package, thereby increasing the flexibility of signal design. The support structure using metal as the material can provide good heat dissipation capacity.

50:晶片封裝陣列 100、200:晶片封裝體 110、210:支撐結構 110a、210a:第一支撐面 110b、210b:第二支撐面 110c、210c:開口 110d、210d:支撐貫孔 112:絕緣層 112a:絕緣材料 112b:絕緣貫孔 114、214:導電柱 120、220:晶片 120a、220a:第一晶片面 120b、220b:第二晶片面 121、221:第一電性連接點 122、222:第二電性連接點 130、230:封裝材料 130a、230a:材料貫孔 140、240:種子層 142、242:材料導電孔道 144、244:材料圖案化導電層 150、250:第一重佈線路結構 152、252:第一介電層 154、254:第一圖案化導電層 156、256:第一導電孔道 158、258:導電接點 160、260:第二重佈線路結構 162、262:第二介電層 164、264:第二圖案化導電層 166、266:第二導電孔道 300、400:載板 300a、400a:可剝除層 L:切割線50: chip package array 100, 200: chip package 110, 210: supporting structure 110a, 210a: the first supporting surface 110b, 210b: the second supporting surface 110c, 210c: opening 110d, 210d: Support through hole 112: Insulation layer 112a: insulating material 112b: Insulation through hole 114, 214: conductive pillar 120, 220: chip 120a, 220a: the first wafer surface 120b, 220b: second wafer surface 121, 221: the first electrical connection point 122, 222: second electrical connection point 130, 230: Packaging materials 130a, 230a: material through hole 140, 240: seed layer 142, 242: Material conductive channel 144, 244: Material patterned conductive layer 150, 250: The first heavy route structure 152, 252: first dielectric layer 154, 254: first patterned conductive layer 156, 256: the first conductive channel 158, 258: conductive contacts 160, 260: the second re-distribution line structure 162, 262: second dielectric layer 164, 264: second patterned conductive layer 166, 266: second conductive channel 300, 400: carrier board 300a, 400a: peelable layer L: Cutting line

圖1A至圖1N是依照本發明的一實施例的一種晶片封裝方法的剖面示意圖。 圖2是圖1A的支撐結構包括多個開口的立體圖。 圖3A至圖3L是依照本發明的另一實施例的一種晶片封裝方法的剖面示意圖。1A to 1N are schematic cross-sectional views of a chip packaging method according to an embodiment of the present invention. Fig. 2 is a perspective view of the supporting structure of Fig. 1A including a plurality of openings. 3A to 3L are schematic cross-sectional views of a chip packaging method according to another embodiment of the present invention.

100:晶片封裝體100: chip package

110:支撐結構110: Supporting structure

110a:第一支撐面110a: The first supporting surface

110b:第二支撐面110b: second support surface

110c:開口110c: opening

112:絕緣層112: Insulation layer

114:導電柱114: Conductive column

120:晶片120: chip

120a:第一晶片面120a: first wafer surface

120b:第二晶片面120b: second wafer surface

121:第一電性連接點121: The first electrical connection point

122:第二電性連接點122: second electrical connection point

130:封裝材料130: Packaging materials

142:材料導電孔道142: Material conductive channel

144:材料圖案化導電層144: Material patterned conductive layer

150:第一重佈線路結構150: The first heavy line structure

152:第一介電層152: first dielectric layer

154:第一圖案化導電層154: first patterned conductive layer

156:第一導電孔道156: The first conductive channel

158:導電接點158: Conductive contact

160:第二重佈線路結構160: The second heavy line structure

162:第二介電層162: second dielectric layer

164:第二圖案化導電層164: second patterned conductive layer

166:第二導電孔道166: second conductive channel

Claims (33)

一種晶片封裝方法，包括： 提供一支撐結構，其中該支撐結構整體由相同材料形成，且該支撐結構具有一第一支撐面、相對於該第一支撐面的一第二支撐面及連接該第一支撐面及該第二支撐面的多個開口； 形成多個支撐導電孔道貫穿該支撐結構，以連接該支撐結構的該第一支撐面及該第二支撐面； 暫時地固定該支撐結構及多個晶片至一載板，其中該些晶片分別位於該支撐結構的該些開口內，各該晶片具有一第一晶片面及相對於該第一晶片面的一第二晶片面，且該支撐結構的該第一支撐面與各該晶片的該第一晶片面齊平； 形成一封裝材料在該載板上，其中該封裝材料覆蓋該支撐結構的第一支撐面及該些晶片的該些第一晶片面，並填充在該支撐結構的該開口與該晶片之間； 形成多個材料導電孔道及一材料圖案化導電層，其中這些材料導電孔道位於該封裝材料內並分別連接該些支撐導電孔道，而該材料圖案化導電層位於該封裝材料上並連接該些材料導電孔道； 形成一第一重佈線路結構在該封裝材料及該材料圖案化導電層上，其中該第一重佈線路結構經由該材料圖案化導電層及該些材料導電孔道與該晶片及該些支撐導電孔道相電性連接； 移離該載板； 形成一第二重佈線路結構在該第二支撐面、該第二晶片面及該封裝材料上。A chip packaging method includes: A supporting structure is provided, wherein the supporting structure is entirely formed of the same material, and the supporting structure has a first supporting surface, a second supporting surface opposite to the first supporting surface, and connecting the first supporting surface and the second supporting surface Multiple openings on the supporting surface; Forming a plurality of supporting conductive holes penetrating the supporting structure to connect the first supporting surface and the second supporting surface of the supporting structure; Temporarily fix the support structure and a plurality of wafers to a carrier, wherein the wafers are respectively located in the openings of the support structure, and each wafer has a first wafer surface and a first wafer surface opposite to the first wafer surface. Two wafer surfaces, and the first support surface of the support structure is flush with the first wafer surface of each wafer; Forming a packaging material on the carrier, wherein the packaging material covers the first supporting surface of the supporting structure and the first chip surfaces of the chips, and fills between the opening of the supporting structure and the chip; A plurality of material conductive channels and a material patterned conductive layer are formed, wherein the material conductive channels are located in the packaging material and are respectively connected to the supporting conductive channels, and the material patterned conductive layer is located on the packaging material and connected to the materials Conductive channel A first redistributed circuit structure is formed on the packaging material and the material patterned conductive layer, wherein the first redistributed circuit structure conducts electricity with the chip and the support via the material patterned conductive layer and the material conductive channels The channels are electrically connected; Remove the carrier board; A second redistributed circuit structure is formed on the second supporting surface, the second chip surface and the packaging material. 如請求項1所述的晶片封裝方法，其中形成該些支撐導電孔道的步驟包括： 移除該支撐結構的多個部分，以形成多個支撐貫孔，其中各該支撐貫孔連接該第一支撐面及該第二支撐面； 形成絕緣材料在該些支撐貫孔內，以形成多個絕緣柱體； 移除各該絕緣柱體的一部分，以形成多個絕緣貫孔，其中各該絕緣柱體的剩餘部分構成一絕緣層；以及 形成導電材料在該些絕緣貫孔內，以形成該些支撐導電孔道。The chip packaging method according to claim 1, wherein the step of forming the supporting conductive vias includes: Removing multiple parts of the supporting structure to form multiple supporting through holes, wherein each supporting through hole connects the first supporting surface and the second supporting surface; Forming an insulating material in the supporting through holes to form a plurality of insulating pillars; Removing a part of each of the insulating pillars to form a plurality of insulating through holes, wherein the remaining part of each of the insulating pillars constitutes an insulating layer; and A conductive material is formed in the insulating through holes to form the supporting conductive holes. 如請求項2所述的晶片封裝方法，其中該支撐結構的材質採用金屬。The chip packaging method according to claim 2, wherein the material of the support structure is metal. 如請求項1所述的晶片封裝方法，其中形成該些支撐導電孔道的步驟包括： 移除該支撐結構的多個部分，以形成多個支撐貫孔，其中各該支撐貫孔連接該第一支撐面及該第二支撐面；以及 形成導電材料在該些支撐貫孔，以形成該些支撐導電孔道。The chip packaging method according to claim 1, wherein the step of forming the supporting conductive vias includes: Removing multiple parts of the supporting structure to form multiple supporting through holes, wherein each supporting through hole connects the first supporting surface and the second supporting surface; and A conductive material is formed in the supporting through holes to form the supporting conductive holes. 如請求項4所述的晶片封裝方法，其中該支撐結構的材質採用陶瓷或玻璃。The chip packaging method according to claim 4, wherein the material of the support structure is ceramic or glass. 如請求項1所述的晶片封裝方法，更包括： 單顆化各該晶片及與其封裝有關的結構，以形成多個晶片封裝體。The chip packaging method as described in claim 1, further including: Each chip and its packaging related structures are singulated to form multiple chip packages. 如請求項1所述的晶片封裝方法，更包括： 形成多個導電接點連接至該第一重佈線路結構。The chip packaging method as described in claim 1, further including: A plurality of conductive contacts are formed to connect to the first redistributed circuit structure. 如請求項1所述的晶片封裝方法，其中該晶片具有多個第一電性連接點及多個第二電性連接點，該些第一電性連接點配置在該第一晶片面並與第一重佈線路結構電性連接，且該些第二電性連接點配置在該第二晶片面並與第二重佈線路結構電性連接。The chip packaging method according to claim 1, wherein the chip has a plurality of first electrical connection points and a plurality of second electrical connection points, and the first electrical connection points are arranged on the surface of the first chip and connected with each other. The first redistributed circuit structure is electrically connected, and the second electrical connection points are arranged on the second chip surface and are electrically connected to the second redistributed circuit structure. 如請求項1所述的晶片封裝方法，其中該材料導電孔道的橫向剖面尺寸小於該支撐導電孔道的橫向剖面尺寸。The chip packaging method according to claim 1, wherein the transverse cross-sectional size of the conductive via of the material is smaller than the transverse cross-sectional size of the supporting conductive via. 如請求項1所述的晶片封裝方法，其中該支撐結構分別在該開口的兩側的兩個部分具有對稱性。The chip packaging method according to claim 1, wherein the supporting structure has symmetry in two parts on both sides of the opening. 如請求項1所述的晶片封裝方法，其中該支撐結構是網狀結構。The chip packaging method according to claim 1, wherein the supporting structure is a mesh structure. 如請求項1所述的晶片封裝方法，更包括： 將另一晶片或另一晶片封裝體配置在該第二重佈線路結構上。The chip packaging method as described in claim 1, further including: Another chip or another chip package is arranged on the second redistribution circuit structure. 如請求項1所述的晶片封裝方法，其中該支撐結構的該第二支撐面、該晶片的該第二晶片面和裸露的該封裝材料共平面。The chip packaging method according to claim 1, wherein the second supporting surface of the supporting structure, the second chip surface of the chip and the exposed packaging material are coplanar. 一種晶片封裝陣列，包括： 多個晶片封裝體，適於陣列排列以形成該晶片封裝陣列，各該晶片封裝體包括： 一支撐結構，整體由相同材料形成，並具有一第一支撐面、相對於該第一支撐面的一第二支撐面及連接該第一支撐面及該第二支撐面的一開口； 多個支撐導電孔道，貫穿該支撐結構，以連接該支撐結構的該第一支撐面及該第二支撐面； 一晶片，位於該開口內並具有一第一晶片面及相對於該第一晶片面的一第二晶片面，其中該支撐結構的該第一支撐面與該晶片的該第一晶片面齊平； 一封裝材料，位在該支撐結構的第一支撐面及該晶片的該第一晶片面上，並填充在該支撐結構的該開口與該晶片之間； 多個材料導電孔道，位於該封裝材料內，並分別連接該些支撐導電孔道； 一材料圖案化導電層，位於該封裝材料上，並連接該些材料導電孔道； 一第一重佈線路結構，位於該封裝材料及該材料圖案化導電層上，其中該第一重佈線路結構經由該材料圖案化導電層及該些材料導電孔道與該晶片及該些支撐導電孔道相電性連接；以及 一第二重佈線路結構，位於第二支撐面及該第二晶片面及該封裝材料上。A chip package array includes: A plurality of chip packages are suitable for array arrangement to form the chip package array, and each chip package includes: A supporting structure formed entirely of the same material and having a first supporting surface, a second supporting surface opposite to the first supporting surface, and an opening connecting the first supporting surface and the second supporting surface; A plurality of supporting conductive holes penetrating the supporting structure to connect the first supporting surface and the second supporting surface of the supporting structure; A wafer located in the opening and having a first wafer surface and a second wafer surface opposite to the first wafer surface, wherein the first support surface of the support structure is flush with the first wafer surface of the wafer ； A packaging material located on the first supporting surface of the supporting structure and the first chip surface of the chip, and filling between the opening of the supporting structure and the chip; A plurality of material conductive holes are located in the packaging material, and are respectively connected to the support conductive holes; A material patterned conductive layer, located on the packaging material, and connected to the conductive holes of the materials; A first redistributed circuit structure is located on the packaging material and the material patterned conductive layer, wherein the first redistributed circuit structure conducts electricity with the chip and the support via the material patterned conductive layer and the material conductive channels The channels are electrically connected; and A second re-distributed circuit structure is located on the second supporting surface, the second chip surface and the packaging material. 如請求項14所述的晶片封裝陣列，更包括： 多個絕緣層，各該絕緣層位於對應的該導電柱與該支撐結構之間，以使該些導電柱與該支撐結構彼此絕緣。The chip package array according to claim 14, further including: A plurality of insulating layers, each of the insulating layers is located between the corresponding conductive pillar and the supporting structure, so that the conductive pillars and the supporting structure are insulated from each other. 如請求項14所述的晶片封裝陣列，其中該支撐結構的材質為金屬。The chip package array according to claim 14, wherein the material of the support structure is metal. 如請求項14所述的晶片封裝陣列，其中該支撐結構的材質為陶瓷或玻璃。The chip package array according to claim 14, wherein the material of the support structure is ceramic or glass. 如請求項14所述的晶片封裝陣列，其中該晶片具有多個第一電性連接點及多個第二電性連接點，該些第一電性連接點配置在該第一晶片面並與第一重佈線路結構電性連接，且該些第二電性連接點配置在該第二晶片面並與第二重佈線路結構電性連接。The chip package array according to claim 14, wherein the chip has a plurality of first electrical connection points and a plurality of second electrical connection points, and the first electrical connection points are arranged on the first chip surface and are connected to The first redistributed circuit structure is electrically connected, and the second electrical connection points are arranged on the second chip surface and are electrically connected to the second redistributed circuit structure. 如請求項14所述的晶片封裝陣列，其中該材料導電孔道的橫向剖面尺寸小於該支撐導電孔道的橫向剖面尺寸。The chip package array according to claim 14, wherein the transverse cross-sectional size of the conductive vias of the material is smaller than the transverse cross-sectional size of the supporting conductive vias. 如請求項14所述的晶片封裝陣列，其中該支撐結構分別在該開口的兩側的兩個部分具有對稱性。The chip package array according to claim 14, wherein the two parts of the supporting structure on both sides of the opening have symmetry. 如請求項14所述的晶片封裝陣列，其中該支撐結構是網狀結構。The chip package array according to claim 14, wherein the supporting structure is a mesh structure. 如請求項14所述的晶片封裝陣列，更包括： 另一晶片或另一晶片封裝體，配置在該第二重佈線路結構上。The chip package array according to claim 14, further including: Another chip or another chip package is arranged on the second redistribution circuit structure. 如請求項14所述的晶片封裝陣列，其中該支撐結構的該第二支撐面、該晶片的該第二晶片面和裸露的該封裝材料共平面。The chip package array according to claim 14, wherein the second supporting surface of the supporting structure, the second chip surface of the chip and the exposed packaging material are coplanar. 一種晶片封裝體，包括： 一支撐結構，整體由相同材料形成，並具有一第一支撐面、相對於該第一支撐面的一第二支撐面及連接該第一支撐面及該第二支撐面的一開口； 多個支撐導電孔道，貫穿該支撐結構，以連接該支撐結構的該第一支撐面及該第二支撐面； 一晶片，位於該開口內並具有一第一晶片面及相對於該第一晶片面的一第二晶片面，其中該支撐結構的該第一支撐面與該晶片的該第一晶片面齊平； 一封裝材料，位在該支撐結構的第一支撐面及該晶片的該第一晶片面上，並填充在該支撐結構的該開口與該晶片之間； 多個材料導電孔道，位於該封裝材料內，並分別連接該些支撐導電孔道； 一材料圖案化導電層，位於該封裝材料上，並連接該些材料導電孔道； 一第一重佈線路結構，位於該封裝材料及該材料圖案化導電層上，其中該第一重佈線路結構經由該材料圖案化導電層及該些材料導電孔道與該晶片及該些支撐導電孔道相電性連接，該第一重佈線路結構包括多個介電層及多個圖案化導電層，該些介電層與該些圖案化導電層交錯疊合，該介電層的材質剛性較低於該封裝材料的材質剛性，該介電層的熱膨脹係數較高於該封裝材料的熱膨脹係數；以及 一第二重佈線路結構，位於第二支撐面及該第二晶片面及該封裝材料上。A chip package includes: A supporting structure formed entirely of the same material and having a first supporting surface, a second supporting surface opposite to the first supporting surface, and an opening connecting the first supporting surface and the second supporting surface; A plurality of supporting conductive holes penetrating the supporting structure to connect the first supporting surface and the second supporting surface of the supporting structure; A wafer located in the opening and having a first wafer surface and a second wafer surface opposite to the first wafer surface, wherein the first support surface of the support structure is flush with the first wafer surface of the wafer ； A packaging material located on the first supporting surface of the supporting structure and the first chip surface of the chip, and filling between the opening of the supporting structure and the chip; A plurality of material conductive holes are located in the packaging material, and are respectively connected to the support conductive holes; A material patterned conductive layer, located on the packaging material, and connected to the conductive holes of the materials; A first redistributed circuit structure is located on the packaging material and the material patterned conductive layer, wherein the first redistributed circuit structure conducts electricity with the chip and the support via the material patterned conductive layer and the material conductive channels The channels are electrically connected. The first redistributed circuit structure includes a plurality of dielectric layers and a plurality of patterned conductive layers. The dielectric layers and the patterned conductive layers are alternately stacked, and the material of the dielectric layer is rigid Lower than the material rigidity of the packaging material, the thermal expansion coefficient of the dielectric layer is higher than the thermal expansion coefficient of the packaging material; and A second re-distributed circuit structure is located on the second supporting surface, the second chip surface and the packaging material. 如請求項24所述的晶片封裝體，更包括： 多個絕緣層，各該絕緣層位於對應的該導電柱與該支撐結構之間，以使該些導電柱與該支撐結構彼此絕緣。The chip package according to claim 24 further includes: A plurality of insulating layers, and each insulating layer is located between the corresponding conductive pillar and the supporting structure, so that the conductive pillars and the supporting structure are insulated from each other. 如請求項24所述的晶片封裝體，其中該支撐結構的材質為金屬。The chip package according to claim 24, wherein the material of the support structure is metal. 如請求項24所述的晶片封裝體，其中該支撐結構的材質為陶瓷或玻璃。The chip package according to claim 24, wherein the material of the support structure is ceramic or glass. 如請求項24所述的晶片封裝體，更包括： 多個導電接點，連接至該第一重佈線路結構。The chip package according to claim 24 further includes: A plurality of conductive contacts are connected to the first redistributed circuit structure. 如請求項24所述的晶片封裝體，其中該晶片具有多個第一電性連接點及多個第二電性連接點，該些第一電性連接點配置在該第一晶片面並與第一重佈線路結構電性連接，該些第二電性連接點配置在該第二晶片面並與第二重佈線路結構電性連接。The chip package according to claim 24, wherein the chip has a plurality of first electrical connection points and a plurality of second electrical connection points, and the first electrical connection points are arranged on the surface of the first chip and are connected with The first redistributed circuit structure is electrically connected, and the second electrical connection points are arranged on the second chip surface and are electrically connected to the second redistributed circuit structure. 如請求項24所述的晶片封裝體，其中該材料導電孔道的橫向剖面尺寸小於該支撐導電孔道的橫向剖面尺寸。The chip package according to claim 24, wherein the lateral cross-sectional size of the conductive via of the material is smaller than the lateral cross-sectional size of the supporting conductive via. 如請求項24所述的晶片封裝體，其中該支撐結構分別在該開口的兩側的兩個部分具有對稱性。The chip package according to claim 24, wherein the two parts of the supporting structure on both sides of the opening have symmetry. 如請求項24所述的晶片封裝體，更包括： 另一晶片或另一晶片封裝體，配置在該第二重佈線路結構上。The chip package according to claim 24 further includes: Another chip or another chip package is arranged on the second redistribution circuit structure. 如請求項24所述的晶片封裝體，其中該支撐結構的該第二支撐面、該晶片的該第二晶片面和裸露的該封裝材料共平面。The chip package according to claim 24, wherein the second supporting surface of the supporting structure, the second chip surface of the chip and the exposed packaging material are coplanar.
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