TW202141148A - 紫外線照射裝置 - Google Patents
紫外線照射裝置 Download PDFInfo
- Publication number
- TW202141148A TW202141148A TW110104596A TW110104596A TW202141148A TW 202141148 A TW202141148 A TW 202141148A TW 110104596 A TW110104596 A TW 110104596A TW 110104596 A TW110104596 A TW 110104596A TW 202141148 A TW202141148 A TW 202141148A
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- emitting element
- ultraviolet rays
- ultraviolet
- irradiation unit
- Prior art date
Links
Images
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Led Device Packages (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020077969A JP2021171712A (ja) | 2020-04-27 | 2020-04-27 | 紫外線照射装置 |
JP2020-077969 | 2020-04-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW202141148A true TW202141148A (zh) | 2021-11-01 |
Family
ID=78233196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110104596A TW202141148A (zh) | 2020-04-27 | 2021-02-08 | 紫外線照射裝置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2021171712A (ja) |
CN (1) | CN214515789U (ja) |
TW (1) | TW202141148A (ja) |
-
2020
- 2020-04-27 JP JP2020077969A patent/JP2021171712A/ja active Pending
-
2021
- 2021-02-03 CN CN202120303451.8U patent/CN214515789U/zh active Active
- 2021-02-08 TW TW110104596A patent/TW202141148A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JP2021171712A (ja) | 2021-11-01 |
CN214515789U (zh) | 2021-10-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8441612B2 (en) | LED light source, its manufacturing method, and LED-based photolithography apparatus and method | |
CN106773549B (zh) | 一种高均匀性led平行光紫外曝光机光源系统 | |
TWI740892B (zh) | 光照射裝置 | |
TWI633376B (zh) | 光源裝置及紫外線照射裝置 | |
KR20060121264A (ko) | Led 변형 장치 및 방법 | |
JP6094663B2 (ja) | 発光装置 | |
TWI608309B (zh) | 曝光用光源模組單元及具備該光源模組單元的曝光裝置 | |
KR20130092224A (ko) | 노광용 자외선 발광다이오드 램프 및 이를 이용한 주변장치 | |
JP2007026517A (ja) | 紫外線照射装置 | |
CN104423176A (zh) | 光学系统及曝光机 | |
KR20070066846A (ko) | 주변 노광용 광원 장치 | |
TW202141148A (zh) | 紫外線照射裝置 | |
KR101219323B1 (ko) | 노광 장치 | |
US9625119B2 (en) | Non-uniform lens array for illumination profile modification | |
CN214515788U (zh) | 紫外线照射装置 | |
JP2022055654A (ja) | 紫外線照射装置 | |
KR101591859B1 (ko) | Led 광원 노광장치 | |
KR101731241B1 (ko) | 자외선 조사 장치 | |
JP7135316B2 (ja) | 光照射装置 | |
KR20160093415A (ko) | 발광장치 및 이를 가지는 노광장치 | |
KR20140025661A (ko) | 자외선 발광다이오드 램프 및 이를 이용한 주변장치 | |
TWM577515U (zh) | Light source assembly and light source system of parallel light exposure machine | |
KR20150121512A (ko) | Led를 이용한 자외선 경화기 | |
TW202338258A (zh) | 紫外線照射裝置 | |
JP2016194992A (ja) | 照射ランプ及び照射装置 |