TW202139341A - Processing device and processing method characterized by easily restarting from the unprocessed processing when processing is resumed from replacing the cassette receiving a workpiece therein - Google Patents

Abstract

Provided is a processing device and a processing method, which can easily restart from the unprocessed processing when processing is resumed from replacing the cassette receiving a workpiece therein. [Solution] A processing device is at least equipped with a reader used to read the information transmission medium of a workpiece received in a cassette; a processing history recording part used to link and record the processing history and the workpiece information read by the reader; and a control unit used to control each mechanism. The control unit interrupts the processing when the first cassette receives an unprocessed workpiece and the processing of the second cassette has executed. Then, the first cassette is put on the cassette carrying table again for restarting the processing, and the following processing will be carried out: based on the workpiece information read by the reader, the corresponding processing history is called from the processing history recording part and the processing is resumed from the unprocessed workpiece.

Description

Processing device and processing method

The invention relates to a processing device and a processing method.

The following devices are known: when an abnormality of the device is confirmed, the processing is suspended, and then the processing is executed: the processing for solving the confirmed abnormality and the subsequent processing (refer to Patent Documents 1 and 2). Prior art literature Patent literature

Patent Document 1: Japanese Patent Application Publication No. 2006-203145 Patent Document 2: Japanese Patent Application Publication No. 2004-319961

The problem to be solved by the invention

Usually, multiple processed objects of the same batch are contained in one cassette, and automatic processing is performed that automatically repeats transportation and processing. However, when a certain problem occurs during processing, the fully automatic processing may be temporarily stopped. At this time, since the device becomes inoperative and wasteful, there may be cases in which another cassette is processed. However, although the processing history is obtained during the continuous processing of fully automatic processing, the processing history for fully automatic processing will be reset when the cassette is replaced and the processing of the new cassette is started. ) Once, so when restarting, the operator must confirm to what extent the processed object originally being processed has been processed, or which layer of the cassette is unprocessed, etc., and restart the fully automatic processing from the middle, so There are doubts about making mistakes.

The present invention was made in view of the above-mentioned problems, and its object is to provide a processing device and a processing method that can easily restart processing when the cassette containing the object to be processed is replaced Restart from unprocessed processing. Means to solve the problem

In order to solve the above-mentioned problems and achieve the objective, the processing device of the present invention at least has: a holding table to hold the object to be processed; a processing unit to process the object to be processed that has been held on the holding table; A film cassette containing a plurality of processed objects; a transport arm, which conveys the processed object between the cassette and the processing area that has been placed on the cassette placing table; a reader, which reads and displays the processed object The information transmission medium of the information, and the aforementioned processed object is contained in the cassette; the processing history recording unit establishes and records the information of the processed object read from the information transmission medium and the processing history; and the control unit, Control various agencies, The aforementioned processing device is characterized by: The control unit interrupts processing in a state where the first cassette contains unprocessed objects, and after the processing of the second cassette has been performed, the first cassette is placed on the cassette mounting table again and restarted. When processing is started, the following processing is performed: according to the information of the processed object read by the reader, the corresponding processing history is called from the processing history recording unit, and the processing is performed from the unprocessed object.

In addition, in order to solve the above-mentioned problems and achieve the objective, the processing method of the present invention is characterized by having the following steps: In the reading step, the information transmission medium that displays the information of the processed object is read, and the processed object is contained in a first cassette containing a plurality of processed objects; A cassette setting step: setting the first cassette in the processing device; In the processing step, the processed object contained in the first cassette is transported to the holding table and processed by the processing unit; The processing history recording step is to establish a connection and record the processing history of the processed object and the information of the processed object; In the processing suspension step, processing is interrupted for some reason and the first cassette is removed from the processing device; In the cassette replacement step, a second cassette containing a different processed object is set in the processing device, and the processing of the processed object already contained in the second cassette is started; When restarting the barcode reading step, set the first cassette in the processing device again, and read the information transmission medium; and The processing restart step is to restart processing from the unprocessed object according to the read processing history. Invention effect

The present invention can easily restart the unprocessed processing when the processing is restarted when the cassette accommodating the processed object is replaced.

The form used to implement the invention

The form (embodiment) for implementing the present invention will be described in detail with reference to the drawings. This invention is not limited by the content described in the following embodiment. In addition, the constituent elements described below include constituent elements that can be easily imagined by a person having ordinary knowledge in the technical field, and constituent elements that are substantially the same. In addition, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

[Embodiment 1] The processing device 1 of the first embodiment and the processing method of the first embodiment of the present invention will be explained based on the drawings. Fig. 1 is a perspective view showing a configuration example of a processing apparatus 1 according to the first embodiment. As shown in FIG. 1, the processing apparatus 1 of the first embodiment includes: a holding table 10, a processing unit 20, an imaging unit 30, a cassette mounting table 40, a transport arm 50, a reader 60, a display unit 65, and an input unit 66 , The processing history recording unit 70, the control unit 80, and the cleaning unit 90.

The processing device 1 sequentially transfers a batch of workpieces 100 (25 sheets in the embodiment 1) contained in a cassette 200 that has been placed on the cassette mounting table 40 to the holding table by the transport arm 50 10. It is held by the holding table 10, and the upper surface of the workpiece 100 held on the holding table 10 is processed by the processing unit 20, and after the processing is cleaned by the cleaning unit 90, the conveying arm 50 moved into the cassette 200.

In Embodiment 1, as shown in FIG. 1, the workpiece 100 processed by the processing device 1 is, for example, a disc-shaped semiconductor wafer using silicon, sapphire, silicon carbide (SiC), gallium arsenide, etc. as a base material. Or wafers such as optical device wafers. The workpiece 100 has a device 103 formed on a flat front surface 101 in an area delimited by a plurality of planned dividing lines 102. The planned dividing lines 102 are along the first direction and intersecting with the first direction. It is formed in the second direction. In the first embodiment, the workpiece 100 is further formed in a lattice shape on the front surface 101 such that the first direction and the second direction forming the plurality of planned dividing lines 102 are orthogonal to each other. However, the present invention is not limited to this.

The to-be-processed object 100 is attached with an adhesive tape 105 on the back side 104 of the back side of the front surface 101, and a ring frame 106 is installed on the outer edge of the adhesive tape 105. Furthermore, in the present invention, the workpiece 100 may be a rectangular package substrate, a ceramic plate, a glass plate, or the like having a plurality of devices sealed by resin.

The holding table 10 holds the workpiece 100 on the holding surface 11 so that the front surface 101 side faces the upper side, and the back surface 104 side is held. The holding table 10 has a disk shape with a disk-shaped suction part and a frame. The suction part has a flat holding surface 11 on the upper surface that holds the workpiece 100 and is provided with a large number of porous (porous) It is made of porous ceramics with pores, and the frame body has the suction part inserted and fixed in the recessed part of the central part of the upper surface. The holding surface 11 is formed parallel to the horizontal plane, that is, the XY plane. The holding table 10 is movably installed in one of the horizontal directions, that is, in the X-axis direction by an X-axis moving unit not shown, and is rotatably installed around the Z-axis by a rotation drive source not shown. . The holding table 10 connects the suction part and a vacuum suction source (not shown) through a vacuum suction path (not shown), and sucks and holds the workpiece 100 by the entire holding surface 11.

The processing unit 20 processes the workpiece 100 held on the holding table 10. The processing unit 20 is a cutting processing unit in the first embodiment, and has a cutting insert 21. The cutting insert 21 is applied with a rotating motion around an axis parallel to the other horizontal direction, that is, the Y axis direction orthogonal to the X axis direction, to cut the workpiece 100 held on the holding table 10. The processing unit 20 is movably installed in the Y-axis direction by a Y-axis moving unit (not shown) with respect to the workpiece 100 held on the holding table 10, and is provided by a Z-axis moving unit (not shown) It is installed freely in the vertical direction, that is, in the Z-axis direction.

The processing device 1 rotates the cutting blade 21 while using the X-axis moving unit, Y-axis moving unit, and Z-axis moving unit (not shown) to move the cutting blade 21 relative to the workpiece 100 held on the holding table 10. By relatively moving along the planned dividing line 102, the workpiece 100 is cut to form a cutting groove along the planned dividing line 102.

The photographing unit 30 photographs the front surface 101 of the to-be-processed object 100 held on the holding table 10. In the first embodiment, the imaging unit 30 is fixed to the processing unit 20 so as to move integrally with the processing unit 20. The imaging unit 30 is provided with imaging elements. The imaging elements are the planned dividing line 102 of the workpiece 100 before the cutting process held on the holding table 10, and the machining traces of the workpiece 100 after the cutting process, that is, the cutting groove. Take a shot. The imaging element may be, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element.

The photographing unit 30 photographs the front surface 101 of the workpiece 100 that has been held on the holding table 10 before cutting processing, to obtain an image for completing calibration, etc., and output the obtained image to the control unit 80, The aforementioned calibration is to align the workpiece 100 and the cutting insert 21. In addition, the imaging unit 30 photographs the front surface 101 of the workpiece 100 after the cutting process that has been held on the holding table 10 to obtain an image for completing the so-called tool mark inspection, etc., and the obtained image It is output to the control unit 80, and the aforementioned tool mark inspection is to automatically confirm whether the cutting groove falls within the planned dividing line 102 and whether there is no major defect or the like.

The cassette mounting table 40 is a mounting table on which the cassette 200 is placed as a container for accommodating a plurality of workpieces 100, and the cassette 200 to be placed is raised and lowered in the Z-axis direction. The cassette 200 is provided through the opening 201 on the near side in FIG. 1 to allow the workpiece 100 to enter and exit, and is provided with a plurality of grooves 202 for holding the workpiece 100 at intervals in the Z-axis direction. In the processing device 1, the processed object 100 contained in the cassette 200 can be managed, distinguished, and processed one by one according to the number of layers of the groove 202 contained therein. The cassette 200 is placed on the upper surface of the cassette mounting table 40 with the opening 201 facing the carry-in/out area 53.

A barcode 210 is provided on the upper surface of the cassette 200, and the aforementioned barcode 210 is an information transmission medium for displaying information of the processed object 100 contained in the cassette 200. Here, the information of the to-be-processed object 100 contained in the cassette 200 may be, for example, a lot number attached to a group of the plurality of to-be-processed objects 100. Furthermore, although the barcode 210 is a one-dimensional code as shown in FIG. 1 in the first embodiment, the present invention is not limited to this, and it may be a so-called QR (Quick Response) of a matrix-type two-dimensional code. code. Moreover, in the present invention, the information transmission medium is not limited to the barcode 210, and may also be an RFID (Radio Frequency IDentifier) tag. In addition, the information transmission medium may not be provided in the cassette, but may be provided in the ring frame 106 holding the workpiece 100 or the workpiece 100 itself.

The transport arm 50 transports the workpiece 100 between the cassette 200 placed on the cassette mounting table 40 and the holding surface 11 of the holding table 10 that is the processing area. In the first embodiment, the transfer arm 50 includes a transfer arm 51 and a transfer arm 52. The transport arm 51 transports the workpiece 100 before cutting processing from the cassette 200 to the carry-in/out area 53. The transport arm 51 transports the workpiece 100 after cutting processing from the carry-in/out area 53 to the cassette 200. The conveying arm 52 conveys the workpiece 100 before cutting which is conveyed by the conveying arm 51 to the holding table 10. The conveying arm 52 conveys the workpiece 100 after cutting processing from the holding table 10 to the washing unit 90, and conveys it from the washing unit 90 toward the carry-in/out area 53. The cleaning unit 90 cleans the workpiece 100 after the cutting process, and removes foreign matter such as cutting chips adhering to the workpiece 100.

The reader 60 reads the information transmission medium that displays the information of the processed object 100 contained in the cassette 200. The reader 60 is a barcode reader that reads the barcode 210 in the first embodiment. The reader 60 reads the barcode 210 to obtain information of the processed object 100 contained in the cassette 200, and outputs the obtained information to the control unit 80.

The display unit 65 displays an image captured by the imaging unit 30, a screen for setting processing conditions of the processing device 1, a screen for results of calibration or tool mark inspection, and the like. In the first embodiment, the display unit 65 is constituted by a liquid crystal display device or the like. The input unit 66 can be used when the operator inputs information about the processing conditions of the processing device 1 and the like. In this embodiment, the input unit 66 is constituted by at least one of a touch panel and a keyboard provided on the display unit 65.

The control unit 80 is a unit that controls each mechanism (each component) of the processing device 1 and causes the processing device 1 to perform cutting processing on the workpiece 100. The control unit 80 interrupts the processing in the state where the unprocessed workpiece 100 is contained in the first cassette 200, and after the processing of the second cassette 200 has been performed, sets the first cassette 200 on the cassette mounting table again 40 and when the processing is restarted, the following processing will be performed: according to the information of the processing object 100 read by the reader 60, the corresponding processing history is called from the processing history recording unit 70, and the processed object that has not been processed Processing starts from 100. Here, the unprocessed object 100 refers to the object 100 in any state that has not yet completed all the processing, including, for example, the object 100 that has not been processed on any of the planned dividing lines 102, and also includes The processing process has progressed to the workpiece 100 for which all processing processes are completed as long as the processing process is performed on one planned dividing line 102 again. In addition, in the first embodiment, the state in which all the processing treatments have been completed for a certain workpiece 100 refers to the state in which all the planned dividing lines 102 have been cut to complete the formation of cutting grooves.

In Embodiment 1, the control unit 80 includes a computer system. The control unit 80 has an arithmetic processing device, a memory device, and an input/output interface device. The arithmetic processing device has a microprocessor such as a CPU (Central Processing Unit), and the memory device has a ROM (Read Only Memory). Only Memory) or RAM (Random Access Memory) memory. The arithmetic processing device implements arithmetic processing in accordance with a computer program stored in the memory device, and outputs a control signal for controlling the processing device 1 to various components of the processing device 1 through an input and output interface device.

FIG. 2 is a diagram showing an example of processing history data 71 recorded by the processing history recording unit 70 of the processing device 1 in FIG. 1. The processing history recording unit 70 establishes a connection between the information of the processed object 100 contained in the cassette 200 read by the reader 60 from the barcode 210 and the processing history, and records the processing history data 71 as shown in FIG. 2 .

Specifically, as shown in FIG. 2, the processing history recording unit 70 is the information (lot number in the example of FIG. 2) of the processed objects 100 contained in the cassette 200, and the grooves in which the processed objects 100 are stored. The layer number of 02, the date and time of processing each workpiece 100, and the processing history (processing completion status) of each workpiece 100 are established corresponding to each workpiece 100 and recorded as processing history data 71.

The processing history data 71 in the example shown in FIG. 2 shows the following situation: In the cassette 200 with the batch number "DS150-000001" attached, the processing object 100 accommodated in the slot 202 numbered 1 to 6 is : The cutting process is completed along all the planned dividing lines 102; the workpiece 100 accommodated in the groove 202 numbered 7 is: the cutting will be cut from the planned dividing line 102 in the first direction to the fifth The machining is completed, and all the planned dividing lines 102 along the 6th and later along the second direction among the planned dividing lines 102 along the first direction have not been cut; The to-be-processed object 100 of the groove 202 of the number and subsequent numbers is such that cutting processing is not performed along all the planned dividing lines 102. As shown in FIG.

Whenever the processing unit 20 performs processing of the workpiece 100, the processing history recording unit 70 records and updates the processing history data 71 in a real-time manner. After the processing of all the processed objects 100 contained in the cassette 200 is completed, the processing history recording unit 70 will eliminate the processing history data 71 that has been compared with the information of the processed objects 100 contained in the cassette 200. .

The processing history recording section 70 includes RAM, ROM, flash memory, EPROM (Erasable Programmable Read Only Memory), EEPROM (registered trademark) (Electronic Erasable Programmable Read Only Memory) Memory, Non-volatile or volatile semiconductor memory such as Electrically Erasable Programmable Read Only Memory). Furthermore, the processing history recording unit 70 can also be integrated with the control unit 80 to serve as a computer system.

Next, this specification describes the processing method of the first embodiment, which is an example of the operation of the processing device 1 of the first embodiment, based on the drawings. Fig. 3 is a flowchart showing an example of the processing procedure of the processing method of the first embodiment. As shown in Figure 3, the processing method of Embodiment 1 includes a reading step 1001, a cassette placement step 1002, a processing step 1003, a processing history recording step 1004, a processing stop step 1005, a cassette replacement step 1006, and a barcode when restarting Reading step 1007 and processing restart step 1008.

The reading step 1001 is a step of reading the information transmission medium displaying the information of the processed object 100, and the aforementioned processed object 100 is accommodated in the first cassette 200 containing a plurality of processed objects 100. In the reading step 1001, the reader 60 faces the barcode 210 on the upper surface of the cassette 200 to read the barcode 210, thereby obtaining the information of the processed object 100 contained in the first cassette 200, and obtaining The information of the processed object 100 contained in the first cassette 200 is output to the control unit 80.

The cassette placing step 1002 is a step of setting the first cassette 200 in the processing apparatus 1. In the cassette placement step 1002, the first cassette 200 provided with the barcode 210 read in the reading step 1001 is placed on the upper surface of the cassette placement table 40.

In Embodiment 1, although the cassette mounting step 1002 is performed after the reading step 1001 is performed, the present invention is not limited to this, and the reading step 1001 may be performed after the cassette mounting step 1002 is performed.

In the processing step 1003, after the reading step 1001 and the cassette placement step 1002 are implemented, the workpiece 100 contained in the first cassette 200 is transferred to the holding table 10 and processed by the processing unit 20的步。 The steps. In the processing step 1003, the control unit 80 controls the various mechanisms of the processing device 1, and the transport arm 50 transports the workpiece 100 contained in the first cassette 200 to the holding table 10, and the holding table 10 is The holding surface 11 sucks and holds the conveyed object 100, and the processing unit 20 processes the object 100 on the holding table 10.

In the first embodiment, in the processing step 1003, the control unit 80 controls the various mechanisms of the processing device 1, and allows the rotating cutting blade 21 to follow the workpiece 100 held on the holding table 10 The planned dividing line 102 relatively moves, thereby cutting the workpiece 100 and forming a cutting groove along the planned dividing line 102.

In addition, in the first embodiment, in the processing step 1003, the workpiece 100 is sequentially cut one by one according to the number of the groove 202 in which the workpiece 100 is accommodated. Specifically, in the processing step 1003, first, the workpiece 100 accommodated in the groove 202 with the number 1 is cut one by one along all the planned dividing lines 102 to form cutting grooves, and then , The workpiece 100 contained in the slot 202 numbered 2 is similarly cut, and the workpiece 100 contained in the slot 202 numbered 3, 4, ... is cut one by one in the order of the numbers Processing.

The processing history recording step 1004 is a step in which the processing history of the workpiece 100 and the information of the workpiece 100 are linked and recorded. In the processing history recording step 1004, the processing history recording unit 70 records the processing history data 71 of the workpiece 100. The processing history data 71 of the workpiece 100 is the content that has been read and obtained in the reading step 1001. The information of the to-be-processed object 100 placed in the first cassette 200 establishes the linked data. In the processing history recording step 1004, every time the workpiece 100 is processed in the processing step 1003, the processing history recording unit 70 records and updates the processing history data 71 in real time.

The processing suspension step 1005 is a step in which the fully automatic processing is interrupted for some reason. Here, in the first embodiment, the so-called certain cause is an error or abnormality generated in the processing device 1 and the processing performed by the processing device 1, and may be, for example, a tool mark inspection performed in the implementation of the processing step 1003. The frequency of errors is more than usual.

The cassette replacement step 1006 is to remove the first cassette 200 from the processing device 1, and set the second cassette 200 containing the different to-be-processed objects 100 in the processing device 1, and start the process of opposing the second cassette 200. A step of fully automatic processing of the processed object 100 of the cassette 200. The processing of the to-be-processed object 100 implemented in the cassette replacement step 1006 is the same as the processing of the to-be-processed object 100 implemented in the processing step 1003, except for the point that the to-be-processed object 100 accommodated in the second cassette 200 is used as a processing object. The processing is the same. Also, in the case of processing the to-be-processed object 100 contained in the second cassette 200 in the cassette replacement step 1006, and in the case of processing the to-be-processed object 100 contained in the first cassette 200 Similarly, the processing history recording process similar to the processing history recording step 1004 is also implemented together. Furthermore, if the cause of the trouble can be solved in a relatively short time after the execution of the processing suspension step 1005 and the fully automatic processing can be restarted, that is, the operations after the cassette replacement step 1006 are not performed. In this case, since the processing history for the fully automatic processing of the workpiece 100 contained in the first cassette 200 has not been reset, the fully automatic processing will be restarted, and The processing step 1003 is implemented to process all the to-be-processed objects 100 by the processing unit 20, and the processing is completed.

After the processing stop step 1005, the operator may, for example, carefully observe the workpiece 100 with a microscope to investigate some cause of the interruption of the processing. In this case, it will be wasted if the processing device 1 is not operating. Therefore, a cassette replacement step 1006 is performed, and a second cassette 200 different from the first cassette 200 is placed on the cassette mounting table 40. The upper surface of the processing device 100 is processed on the workpiece 100 that has been accommodated in the second cassette 200, so that the processing device 1 is continuously operating.

When restarting, the barcode reading step 1007 is a step of setting the first cassette 200 in the processing device 1 again, and reading the information transmission medium that displays the information of the processed object 100, and the aforementioned processed object 100 is accommodated in the first Film cassette 200. In the barcode reading step 1007 when restarting, the reader 60 stops the processing in the previous processing stop step 1005, and performs the processing of the second cassette 200 in the cassette replacement step 1006, and then reads the cassette again. The barcode 210 of the first cassette 200 that the cassette placing table 40 tries to restart processing. Therefore, in the barcode reading step 1007 when restarting, the control unit 80 calls the processing history recording unit 70 corresponding to the processing of the first cassette 200 based on the information of the processing object 100 read by the reader 60 The history is the processing history data 71, and the information of the unprocessed workpiece 100 contained in the first cassette 200 is obtained.

The processing restart step 1008 is a step of restarting processing from the unprocessed workpiece 100 based on the read processing history. In the processing restart step 1008, the control unit 80 uses the processing history data 71 called and obtained in the barcode reading step 1007 when restarting, from the unprocessed processed materials that have not been processed in the previous processing step 1003. From 100 objects for processing.

The processing of the to-be-processed object 100 performed in the processing restart step 1008 is the same as the processing of the to-be-processed object 100 performed in the processing step 1003. In addition, when the workpiece 100 is processed in the processing restart step 1008, the processing history recording process similar to the processing history recording step 1004 is also performed together.

Furthermore, in the processing method of Embodiment 1, in the processing history recording process of the processing history recording step 1004, including the case where the cassette replacement step 1006 or the processing restart step 1008 is performed together, if the content is completed After the processing of all the processed objects 100 placed in the cassette 200, the processing history recording unit 70 eliminates the processing history data 71 that has been compared with the information of the processed objects 100 contained in the cassette 200. Therefore, the processing history recording unit 70 will be in a state in which only processing history data 71 that has been linked with the processing object 100 contained in the cassette 200 whose processing has been suspended in the processing suspension step 1005 is recorded.

Thereby, the processing history recording section 70 can be regarded as the processing history data 71 that has been linked with the information of the processed object 100 contained in the cassette 200 read by the reader 60. All the to-be-processed objects 100 contained in the cassette 200 are processed as unprocessed, and the reading process is treated as a reading step 1001. On the other hand, if the processing history recording section 70 has processing history data 71 that has been linked with the information of the workpiece 100 contained in the cassette 200 read by the reader 60, it can be regarded as The processed object 100 contained in the cassette 200 is processed by the processing suspension in the processing suspension step 1005, and the reading processing is treated as the barcode reading step 1007 when restarting.

The processing device 1 of the first embodiment and the processing method of the first embodiment having the above-mentioned configuration are that the reader 60 reads the barcode 210 which is the information transmission medium of the processed object 100 contained in the cassette 200, and records the processing history The part 70 connects and records the information of the processed object 100 read by the reader 60 with the processing history, and when the control unit 80 restarts processing, it is based on the processed object 100 read by the reader 60 The processing history recorded by the processing history recording unit 70 is called, and the processing is restarted according to the called processing history. Therefore, the processing device 1 of the first embodiment and the processing method of the first embodiment have the following effects: when the cassette 200 containing the workpiece 100 is replaced, even if the operator does not confirm the unprocessed workpiece 100. It is still possible to easily restart from unprocessed processing when processing is restarted. In addition, the processing device 1 of the first embodiment and the processing method of the first embodiment can prevent the following doubts when the cassette 200 accommodating the workpiece 100 is replaced: because the operator has not confirmed it, the unprocessed ones are skipped The processing of the to-be-processed object 100 leads directly to the next step in a state where the to-be-processed object 100 is unprocessed.

[Embodiment 2] The processing device 1-2 of the second embodiment and the processing method of the second embodiment of the present invention will be explained based on the drawings. Fig. 4 is a perspective view showing a configuration example of the processing apparatus 1-2 of the second embodiment. In FIG. 4, the same reference numerals are assigned to the same parts as in the first embodiment, and the description thereof will be omitted.

As shown in FIG. 4, the processing device 1-2 of the second embodiment is equipped with a reader 61 in the processing device 1 of the first embodiment instead of the reader 60, and instead of the cassette 200, the cassette 200-2 is loaded Placed on the cassette mounting table 40.

As shown in FIG. 4, the cassette 200-2 is installed in the cassette 200 of the processing apparatus 1 of the first embodiment. Instead of the barcode 210, an RFID tag 220 is installed on the side. The information transmission medium of the information of the processed object 100 of the box 200.

The reader 61 is installed at a position facing the RFID tag 220 of the cassette 200-2 when the cassette 200-2 is placed on the cassette mounting table 40. The reader 61 reads the RFID tag 220 when the cassette 200-2 is placed on the cassette mounting table 40. In the second embodiment, the reader 61 is an RFID reader.

Next, this specification describes the processing method of the second embodiment which is an example of the operation of the processing device 1-2 of the second embodiment based on the drawings. The processing method of Embodiment 2 is the following processing method: In the processing method of Embodiment 1, the reading step 1001 and the barcode reading step 1007 when restarting are changed.

The reading step 1001 of the second embodiment is carried out after the cassette mounting step 1002 is carried out. In the reading step 1001 of the second embodiment and the barcode reading step 1007 when restarting, in either step, the reader 61 reads the RFID when the cassette 200-2 has been placed on the cassette mounting table 40. Label 220. Regarding the other parts, the reading step 1001 of the second embodiment and the barcode reading step 1007 when restarting are the same as those of the first embodiment.

The processing device 1-2 of the second embodiment having the above configuration is the following processing device: the processing device 1 of the first embodiment is provided with a reader 61 instead of the reader 60, and instead of the barcode 210 provided The cassette 200 is changed to place the cassette 200-2 provided with the RFID tag 220 on the cassette mounting table 40. In addition, the processing method of the second embodiment is the following processing method: in the processing method of the first embodiment, instead of reading the barcode 210 with the reader 60, the RFID tag 220 is read by the reader 61 instead. Therefore, the processing device 1-2 of the second embodiment and the processing method of the second embodiment have the same functions and effects as the processing device 1 of the first embodiment and the processing method of the first embodiment.

In addition, the processing device 1-2 of the second embodiment and the processing method of the second embodiment can automatically read the RFID by the reader 61 by placing the cassette 200-2 on the cassette mounting table 40. The tag 220 therefore further exerts the effect of preventing the RFID tag 220 from forgetting to read.

[Embodiment 3] The processing device 1-3 of the third embodiment and the processing method of the third embodiment of the present invention will be explained based on the drawings. Fig. 5 is a perspective view showing a configuration example of the processing apparatus 1-3 of the third embodiment. In FIG. 5, the same reference numerals are assigned to the same parts as in the first embodiment and the second embodiment, and the description thereof is omitted.

As shown in Figure 5, the processing device 1-3 of the third embodiment is the following processing device: In the processing device 1 of the first embodiment, a processing unit 20-3 is provided instead of the processing unit 20, and is changed accordingly. The arrangement of each mechanism, or the relative movement mechanism between the processing unit 20-3 and the holding table 10, etc. The processing device 1-3 of the third embodiment is provided with the imaging unit 30, the transport arm 50, the display unit 65, and the input unit 66 similar to the processing device 1 of the first embodiment, but its illustration is omitted in FIG. 5.

The processing unit 20-3 is a laser processing unit in the third embodiment, and includes a laser beam irradiation unit 24. The laser beam irradiation part 24 irradiates the laser beam to the workpiece 100 held on the holding table 10 to perform laser processing. In Embodiment 3, the imaging unit 30 is fixed to the processing unit 20-3 so as to move integrally with the processing unit 20-3.

The processing device 1-3 of the third embodiment is irradiated with the laser beam by the laser beam irradiating unit 24, while being held in the X-axis direction and the Y-axis direction by the X-axis moving unit and the Y-axis moving unit, respectively The workpiece 100 holding the table 10 relatively moves with respect to the laser beam irradiation portion 24, thereby performing laser processing on the workpiece 100 along the planned dividing line 102, and forming laser processing along the planned dividing line 102 ditch.

The processing device 1-3 of Embodiment 3 and the processing method of Embodiment 3 having the above-mentioned configuration are the following processing device and processing method: In the processing device 1 of Embodiment 1 and the processing method of Embodiment 1, replace with The processing unit 20 performs cutting processing on the workpiece 100, and is changed to laser processing the workpiece 100 by the processing unit 20-3. Therefore, the processing device 1-3 of the third embodiment and the processing method of the third embodiment have the same function and effect as the processing device 1 of the first embodiment and the processing method of the first embodiment.

Furthermore, the processing device 1-3 of the third embodiment and the processing method of the third embodiment can adopt the following forms: instead of using the reader 60 to read the bar code 210, the processing device 1-2 and the processing device 1-2 of the second embodiment The reader 61 similar to the processing method of the second embodiment reads the RFID tag 220.

[Embodiment 4] The processing device 1-4 of the fourth embodiment and the processing method of the fourth embodiment of the present invention will be explained based on the drawings. Fig. 6 is a perspective view showing a configuration example of a processing device 1-4 of the fourth embodiment. In FIG. 6, the same reference numerals are assigned to the same parts as those in the first embodiment 1, the second embodiment, and the third embodiment, and the description thereof will be omitted.

As shown in Fig. 6, the processing device 1-4 of the fourth embodiment is the following processing device: In the processing device 1 of the first embodiment, instead of the processing unit 20, processing units 20-4 and 20-5 are provided, and are accompanied by As a result, the arrangement of each mechanism, the relative movement mechanism of the processing units 20-4 and 20-5 and the holding table 10, etc. are changed. The processing device 1-4 of the fourth embodiment omits the imaging unit 30 that is the same as the processing device 1 of the first embodiment. The processing device 1-4 of the fourth embodiment is provided with the same display unit 65 and input unit 66 as the processing device 1 of the first embodiment, but its illustration is omitted in FIG. 6.

As shown in FIG. 6, the processing apparatus 1-4 of the fourth embodiment includes a temporary table 13 and a turntable 15. The temporary workbench 13 is a workbench for temporarily placing the processed object 100 that has been taken out of the cassette 200 and performing center alignment.

As shown in FIG. 6, three holding workbenches 10 are provided on the turntable 15. These three holding tables 10 are installed on the turntable 15 so as to be independent of the turntable 15 and rotatable in a substantially horizontal plane (XY plane). As shown in FIG. 6, the turntable 15 is a disc-shaped worktable, and is set to be rotatable in a horizontal plane and can be driven to rotate in a predetermined time sequence. The three holding tables 10 are arranged on the turntable 15 at equal intervals at a phase angle of, for example, 120°. These three holding tables 10 can be sequentially moved to the loading/unloading position, the rough grinding position, the fine grinding position, and the loading/unloading position by the rotation of the turntable 15.

As shown in Fig. 6, the processing unit 20-4 includes a spindle 25-4 and a grinding wheel 26-4. The grinding wheel 26-4 has a grinding stone 27-4 arranged in a ring shape. The grinding wheel 26-4 is installed at the lower end of the main shaft 25-4. The processing unit 20-4 is the following rough grinding processing unit: While rotating the grinding wheel 26-4 around the Z axis by the spindle 25-4, it is pressed along the Z axis direction to the rough grinding position that has been positioned The workpiece 100 held by the holding surface 11 of the table 10 is held, thereby rough grinding the workpiece 100.

As shown in Fig. 6, the processing unit 20-5 includes a spindle 25-5 and a grinding wheel 26-5. The grinding wheel 26-5 has a grinding stone 27-5 arranged in a ring shape. The processing unit 20-5 is the following finishing grinding processing unit: while rotating the grinding wheel 26-5 around the Z axis by the spindle 25-5, it is pressed along the Z axis direction to the position which has been positioned at the finishing grinding position The workpiece 100 held by the holding surface 11 of the table 10 is held, and the workpiece 100 is subjected to finish grinding.

As shown in FIG. 6, the processing apparatus 1-4 of Embodiment 4 is equipped with the cassette mounting base 40-4 instead of the cassette mounting base 40 in Embodiment 1. As shown in FIG. In the example shown in FIG. 6, although the processing device 1-4 of the fourth embodiment has the cassette mounting table 40-4 installed at two locations, the present invention is not limited to this, and may be installed at one location. Can be installed in more than 3 locations. The cassette mounting table 40-4 has a structure in which the cassette mounting table 40 of the first embodiment does not have a function of raising and lowering in the Z-axis direction.

In the fourth embodiment, the transfer arm 50 includes a transfer arm 56, a transfer arm 57, and a transfer arm 58. The transport arm 56 transports the workpiece 100 before cutting processing from the cassette 200 to the temporary table 13. The transport arm 56 transports the workpiece 100 after the cutting process from the cleaning unit 90 to the cassette 200. The transport arm 56 can change the slot 202 for carrying the workpiece 100 out and in by raising and lowering the transport height of the workpiece 100 in the Z-axis direction. The transfer arm 57 transfers the workpiece 100 before the cutting process that has been carried out by the transfer arm 56 from the temporary table 13 to the holding table 10 that has been positioned at the carry-in/out position. The conveying arm 58 conveys the workpiece 100 after the cutting process to the cleaning unit 90 from the holding table 10 that has been positioned at the loading and unloading position.

The processing device 1-4 of the fourth embodiment and the processing method of the fourth embodiment having the above-mentioned configuration are the following processing device and processing method: in the processing device 1 of the first embodiment and the processing method of the first embodiment, replace with The machining unit 20 performs cutting processing on the workpiece 100, and is changed to use the machining units 20-4 and 20-5 to perform rough grinding and finishing grinding on the workpiece 100. Therefore, the processing device 1-4 of the fourth embodiment and the processing method of the fourth embodiment have the same functions and effects as the processing device 1 of the first embodiment and the processing method of the first embodiment.

Furthermore, the processing device 1-4 of the fourth embodiment and the processing method of the fourth embodiment can adopt the following forms: instead of using the reader 60 to read the bar code 210, the processing device 1-2 and the processing device 1-2 of the second embodiment The reader 61 similar to the processing method of the second embodiment reads the RFID tag 220.

In addition, the present invention is not limited to the above-mentioned embodiment. That is, various modifications can be made and implemented without departing from the gist of the present invention.

1,1-2,1-3,1-4: processing device 10: Keep the workbench 11: Keep the noodles 13: Temporary workbench 15: Turntable 20, 20-3, 20-4, 20-5: processing unit 21: Cutting blade 24: Laser beam irradiation part 25-4, 25-5: Spindle 26-4, 26-5: Grinding wheel 27-4, 27-5: Grinding stone 30: Shooting unit 40, 40-4: cassette table 50, 51, 52, 56, 57, 58: transfer arm 53: Moving in and out of the area 60, 61: Reader 65: display unit 66: input unit 70: Processing History Recording Department 71: Processing history data 80: control unit 90: Washing unit 100: processed objects 101: front 102: Divide the pre-determined line 103: Device 104: back 105: Adhesive tape 106: ring frame 200, 200-2: cassette 201: opening 202: Slot 210: Barcode 220: RFID tag X, Y, Z: direction 1001: Reading step 1002: Cassette placement steps 1003: processing steps 1004: Processing history recording steps 1005: Processing abort step 1006: Cartridge replacement steps 1007: Barcode reading step when restarting 1008: Processing restart step

Fig. 1 is a perspective view showing a configuration example of the processing apparatus of the first embodiment. Fig. 2 is a diagram showing an example of processing history data recorded by a processing history recording unit of the processing device of Fig. 1. Fig. 3 is a flowchart showing an example of the processing procedure of the processing apparatus of the first embodiment. Fig. 4 is a perspective view showing a configuration example of the processing apparatus of the second embodiment. Fig. 5 is a perspective view showing a configuration example of the processing apparatus of the third embodiment. Fig. 6 is a perspective view showing a configuration example of the processing apparatus of the fourth embodiment.

1: Processing device

10: Keep the workbench

11: Keep the noodles

20: Processing unit

21: Cutting blade

30: Shooting unit

40: Cassette mounting table

50, 51, 52: transfer arm

53: Moving in and out of the area

60: Reader

65: display unit

66: input unit

70: Processing History Recording Department

80: control unit

90: Washing unit

100: processed objects

101: front

102: Divide the pre-determined line

103: Device

104: back

105: Adhesive tape

106: ring frame

200: film cassette

201: opening

202: Slot

210: Barcode

X, Y, Z: direction

Claims (2)

A processing device with at least: Keep the workbench and keep the processed objects; The processing unit processes the processed objects that have been held on the holding table; Cassette loading table, allowing multiple cassettes to be processed to be placed; The transport arm transports the processed object between the cassette that has been placed on the cassette mounting table and the processing area; The reader reads the information transmission medium that displays the information of the processed object, and the aforementioned processed object is contained in a cassette; The processing history recording department establishes and records the information of the processed object read from the information transmission medium and the processing history; and The control unit, controls each mechanism, The aforementioned processing device is characterized by: The control unit interrupts processing in a state where the first cassette contains unprocessed objects, and after the processing of the second cassette has been performed, the first cassette is placed on the cassette mounting table again and restarted. When processing is started, the following processing is performed: according to the information of the processed object read by the reader, the corresponding processing history is called from the processing history recording unit, and the processing is performed from the unprocessed object. A processing method characterized by the following steps: In the reading step, the information transmission medium displaying the information of the processed object is read, and the processed object is contained in a first cassette containing a plurality of processed objects; A cassette setting step: setting the first cassette in the processing device; In the processing step, the processed object contained in the first cassette is transported to the holding table and processed by the processing unit; The processing history recording step is to establish a connection and record the processing history of the processed object and the information of the processed object; In the processing suspension step, processing is interrupted for some reason and the first cassette is removed from the processing device; In the cassette replacement step, a second cassette containing a different processed object is set in the processing device, and the processing of the processed object already contained in the second cassette is started; When restarting the barcode reading step, set the first cassette in the processing device again, and read the information transmission medium; and The processing restart step is to restart processing from the unprocessed object according to the read processing history.

Images