TW202138622A - Method for producing fluorine gas and device for producing fluorine gas - Google Patents

Method for producing fluorine gas and device for producing fluorine gas Download PDF

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TW202138622A
TW202138622A TW109145915A TW109145915A TW202138622A TW 202138622 A TW202138622 A TW 202138622A TW 109145915 A TW109145915 A TW 109145915A TW 109145915 A TW109145915 A TW 109145915A TW 202138622 A TW202138622 A TW 202138622A
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fluid
electrolysis
fluorine gas
electrolytic cell
mist
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TWI753718B (en
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三神克己
福地陽介
楠元希
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日商昭和電工股份有限公司
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    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
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    • C25B9/00Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
    • C25B9/17Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof
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    • C25B9/00Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
    • C25B9/17Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof
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Abstract

Provided is a method for producing fluorine gas, the method making it possible to suppress blockage of piping or valves caused by mist. According to the present invention, fluorine gas is produced through a method comprising: an electrolysis step for electrolyzing a liquid electrolyte inside an electrolysis tank; an electricity conduction measurement step for measuring an integral electricity conduction amount after the liquid electrolyte has been charged into the electorlysis tank and the electrolysis has been started; and an air supply step for supplying, from inside the electrolysis tank to an external section via a flow path, a fluid generated inside the electrolysis tank during electrolysis of the liquid electrolyte. In the air supply step, the flow path through which the fluid is channeled is switched in accordance with the electricity conduction amount measured in the electricity conduction measurement step. The air supply step is configured so that: when the electricity conduction amount measured in the electricity conduction measurement step is equal to or greater than a preset reference value, the fluid is supplied to a first flow path for supplying the fluid from inside the electrolysis tank to a first external section; when said electricity conduction amount is less than the preset reference value, the fluid is supplied to a second flow path for supplying the fluid from inside the electrolysis tank to a second external section. The preset reference value is equal to or greater than 40 kAh per 1000 L of the liquid electrolyte.

Description

氟氣之製造方法及氟氣製造裝置Fluorine gas production method and fluorine gas production device

本發明涉及氟氣之製造方法及氟氣製造裝置。The present invention relates to a fluorine gas production method and a fluorine gas production device.

氟氣可透過將含有氟化氫及金屬氟化物的電解液進行電解從而合成(電解合成)。由於電解液的電解使得與氟氣一起亦產生霧滴(例如電解液的霧滴),故於從電解槽送出的氟氣伴隨著霧滴。伴隨於氟氣的霧滴為粉體,存在令使用於氟氣的供氣的配管、閥發生阻塞的風險。為此,有時不得不使製造氟氣的運轉中斷或停止,成為透過電解法之氟氣的製造中的連續運轉的障礙。 為了抑制霧滴致使的配管、閥的阻塞,於專利文獻1已揭露將伴隨著霧滴的氟氣或該氣體通過的配管加熱至電解液的熔點以上的技術。另外,於專利文獻2已揭露一氣體生成裝置,其具有作為將霧滴進行粗加工的空間之氣體擴散部及收容使霧滴吸附用的填充材的填充材收容部。 [先前技術文獻] [專利文獻]Fluorine gas can be synthesized by electrolyzing an electrolyte containing hydrogen fluoride and metal fluoride (electrolytic synthesis). Since the electrolysis of the electrolyte causes mist droplets (for example, mist droplets of the electrolyte solution) to be generated together with the fluorine gas, the mist droplets are accompanied by the fluorine gas sent from the electrolytic cell. The mist accompanying the fluorine gas is powder, and there is a risk of clogging the pipes and valves used for the fluorine gas supply. For this reason, sometimes the operation of producing fluorine gas has to be interrupted or stopped, which becomes an obstacle to continuous operation in the production of fluorine gas by the electrolysis method. In order to suppress clogging of piping and valves caused by mist droplets, Patent Document 1 discloses a technique of heating the fluorine gas accompanying mist droplets or the piping through which the gas passes above the melting point of the electrolyte. In addition, Patent Document 2 discloses a gas generating device having a gas diffusion part as a space for rough processing of mist droplets, and a filling material accommodating part accommodating a filling material for adsorbing mist droplets. [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本特許公報第5584904號 [專利文獻2]日本特許公報第5919824號[Patent Document 1] Japanese Patent Publication No. 5584904 [Patent Document 2] Japanese Patent Publication No. 5919824

[發明所欲解決之問題][The problem to be solved by the invention]

然而,可更有效地抑制霧滴致使的配管、閥的阻塞的技術受到期望。 本發明課題在於提供可抑制霧滴致使的配管、閥的阻塞的氟氣之製造方法及氟氣製造裝置。 [解決問題之技術手段]However, technology that can more effectively suppress clogging of pipes and valves caused by mist is expected. The subject of the present invention is to provide a fluorine gas production method and a fluorine gas production device that can suppress clogging of pipes and valves caused by mist droplets. [Technical means to solve the problem]

為了解決前述課題,本發明的一態樣為如以下的[1]~[5]。 [1]一種氟氣之製造方法,其為將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣者, 其具備: 在電解槽內進行前述電解的電解程序、 測定從將前述電解液裝填至前述電解槽內並開始前述電解起算的積算的通電量的通電量測定程序、及 將在前述電解液的電解時在前述電解槽的內部產生的流體從前述電解槽的內部往外部經由流道而輸送的供氣程序, 其中,於前述供氣程序,依在前述通電量測定程序進行了測定的前述通電量而切換使前述流體流通的流道,在前述通電量測定程序進行了測定的前述通電量為預先設定的基準值以上的情況下,對從前述電解槽的內部往第1外部輸送前述流體的第1流道輸送前述流體,比前述預先設定的基準值小的情況下,對從前述電解槽的內部往第2外部輸送前述流體的第2流道輸送前述流體, 前述預先設定的基準值為前述電解液每1000L為40kAh以上的範圍內的數值。In order to solve the aforementioned problems, one aspect of the present invention is as follows [1] to [5]. [1] A method of producing fluorine gas by electrolyzing an electrolyte solution containing hydrogen fluoride and metal fluoride to produce fluorine gas, It has: Perform the electrolysis procedure of the aforementioned electrolysis in an electrolytic cell, The energization amount measurement program for measuring the accumulated energization amount since the electrolytic solution is filled into the electrolytic cell and the electrolysis is started, and A gas supply process in which the fluid generated inside the electrolytic cell during the electrolysis of the electrolytic solution is transported from the inside of the electrolytic cell to the outside via a flow channel, Wherein, in the air supply program, the flow path through which the fluid circulates is switched according to the energization amount measured in the energization amount measurement program, and the energization amount measured in the energization amount measurement program is a preset reference If the value is greater than the value, the fluid is fed to the first flow path that feeds the fluid from the inside of the electrolytic cell to the first outside. If the fluid is smaller than the preset reference value, 2 The second flow channel for externally transporting the aforementioned fluid transports the aforementioned fluid, The aforementioned predetermined reference value is a value within the range of 40 kAh or more per 1000 L of the aforementioned electrolyte.

[2]如[1]的氟氣之製造方法,其中,前述金屬氟化物為從鉀、銫、銣及鋰中選擇的至少一種的金屬的氟化物。 [3]如[1]或[2]的氟氣之製造方法,其中,於前述電解使用的陽極為以從鑽石、類鑽碳、非晶碳、石墨及玻璃碳中選擇的至少一種的碳材料而形成的碳質電極。 [4]如[1]~[3]中任一項的氟氣之製造方法,其中,前述電解槽具有在使用於前述電解的陽極或陰極產生的氣泡在前述電解液中上升於鉛直方向並可到達於前述電解液的液面的構造。[2] The method for producing fluorine gas according to [1], wherein the metal fluoride is at least one metal fluoride selected from potassium, cesium, rubidium, and lithium. [3] The method for producing fluorine gas according to [1] or [2], wherein the anode used in the aforementioned electrolysis is a carbon made of at least one selected from diamond, diamond-like carbon, amorphous carbon, graphite, and glassy carbon The carbon electrode formed by the material. [4] The method for producing fluorine gas according to any one of [1] to [3], wherein the electrolytic cell has air bubbles generated at the anode or cathode used in the electrolysis and rises in the vertical direction in the electrolytic solution. A structure that can reach the liquid surface of the aforementioned electrolyte.

[5]一種氟氣製造裝置,其為將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣者, 其具備: 收容前述電解液並進行前述電解的電解槽、 測定從將前述電解液裝填於前述電解槽內並開始前述電解起算的積算的通電量的通電量測定部、及 將在前述電解液的電解時在前述電解槽的內部產生的流體從前述電解槽的內部往外部輸送的流道, 其中,前述流道具有從前述電解槽的內部往第1外部輸送前述流體的第1流道與從前述電解槽的內部往第2外部輸送前述流體的第2流道,同時具有依在前述通電量測定部進行了測定的前述通電量將使前述流體流通的流道切換為前述第1流道或前述第2流道的流道切換部, 前述流道切換部在以前述通電量測定部進行了測定的前述通電量為預先設定的基準值以上的情況下,從前述電解槽的內部對前述第1流道輸送前述流體,比前述預先設定的基準值小的情況下,從前述電解槽的內部對前述第2流道輸送前述流體, 前述預先設定的基準值為前述電解液每1000L為40kAh以上的範圍內的數值。 [對照先前技術之功效][5] A fluorine gas production device that produces fluorine gas by electrolyzing an electrolyte solution containing hydrogen fluoride and metal fluoride, It has: An electrolytic cell that contains the foregoing electrolyte and performs the foregoing electrolysis, A energization amount measuring unit that measures the accumulated energization amount since the electrolytic solution is filled in the electrolytic cell and the electrolysis is started, and A flow channel that transports the fluid generated inside the electrolytic cell during the electrolysis of the electrolytic solution from the inside of the electrolytic cell to the outside, Among them, the flow channel has a first flow channel that transports the fluid from the inside of the electrolytic cell to the first outside and a second flow channel that transports the fluid from the inside of the electrolytic cell to the second outside, and also has a energization dependent on the above. The energization amount measured by the quantity measuring section switches the flow path through which the fluid flows to the flow path switching section for the first flow path or the second flow path, In the case where the energization amount measured by the energization amount measuring unit is equal to or greater than a preset reference value, the flow path switching unit transports the fluid from the inside of the electrolytic cell to the first flow path, which is higher than the preset value. When the reference value of is small, transport the fluid from the inside of the electrolytic cell to the second flow path, The aforementioned predetermined reference value is a value within the range of 40 kAh or more per 1000 L of the aforementioned electrolyte. [Compared with the effect of the previous technology]

依本發明時,可在將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣之際抑制霧滴致使的配管、閥的阻塞。According to the present invention, it is possible to suppress clogging of pipes and valves caused by mist droplets when electrolyzing an electrolyte solution containing hydrogen fluoride and metal fluoride to produce fluorine gas.

就本發明的一實施方式在以下進行說明。另外,本實施方式為示出本發明的一例者,本發明非限定於本實施方式者。另外,對本實施方式可施予各種的變更或改良,施加了如此之變更或改良的方式亦可包括於本發明中。An embodiment of the present invention will be described below. In addition, this embodiment is an example of this invention, and this invention is not limited to this embodiment. In addition, various changes or improvements can be added to this embodiment, and an aspect in which such changes or improvements are added may also be included in the present invention.

本發明人就在氟氣的電解合成中引起配管、閥的阻塞的霧滴銳意進行檢討。本發明中的「霧滴(mist)」指由於電解液的電解使得在電解槽與氟氣一起產生的液體的微粒子、固體的微粒子。具體而言,指電解液的微粒子、電解液的微粒子發生相變化的固體的微粒子、及構成電解槽的構件(形成電解槽的金屬、電解槽用的墊料、碳電極等)與氟氣發生反應而產生的固體的微粒子。The present inventors intensively conducted a review on the droplets that cause clogging of piping and valves in the electrolytic synthesis of fluorine gas. The "mist" in the present invention refers to liquid particles and solid particles that are generated together with fluorine gas in the electrolytic cell due to the electrolysis of the electrolyte. Specifically, it refers to the particles of the electrolyte, the solid particles in which the particles of the electrolyte are phase-changeable, and the components that constitute the electrolytic cell (the metal that forms the electrolytic cell, the gasket for the electrolytic cell, the carbon electrode, etc.) and the fluorine gas generation Solid particles produced by the reaction.

本發明人就包括於在電解液的電解時在電解槽的內部產生的流體中的霧滴的平均粒徑進行測定,確認到霧滴的平均粒徑隨時間發生變化。此外,銳意檢討的結果,發現霧滴的平均粒徑與電解中的積算的通電量之間存在相關性,再者發現霧滴的平均粒徑與輸送流體的配管、閥的阻塞的發生容易度之間存在相關性。並且,發現可透過依電解中的積算的通電量就用於輸送在電解槽的內部產生的流體的流道下工夫,從而抑制配管、閥的阻塞,可減低製造氟氣的運轉之中斷、停止的頻率,因而完成本發明。本發明的一實施方式方面,在以下進行說明。The inventors of the present invention measured the average particle size of the mist droplets included in the fluid generated inside the electrolytic cell during the electrolysis of the electrolytic solution, and confirmed that the average particle size of the mist droplets changed with time. In addition, as a result of intensive review, it was found that there is a correlation between the average particle size of the mist droplets and the accumulated energization amount during electrolysis, and the average particle size of the mist droplets and the susceptibility to clogging of the piping and valves of the conveying fluid There is a correlation between. In addition, it has been discovered that the accumulated energization amount during electrolysis can be used to transport the fluid generated in the inside of the electrolytic cell, thereby suppressing clogging of piping and valves, and reducing the interruption and stoppage of the operation of producing fluorine gas. Frequency, thus completing the present invention. One embodiment of the present invention will be described below.

本實施方式的氟氣之製造方法為一種氟氣之製造方法,其為將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣者,其具備在電解槽內進行電解的電解程序、測定從將電解液裝填於電解槽內並開始電解起算的積算的通電量的通電量測定程序、及將在電解液的電解時在電解槽的內部產生的流體從電解槽的內部往外部經由流道而輸送的供氣程序。The method for producing fluorine gas in this embodiment is a method for producing fluorine gas, which is a method for producing fluorine gas by electrolyzing an electrolyte containing hydrogen fluoride and metal fluoride, and is equipped with an electrolysis procedure and measurement for electrolysis in an electrolytic cell. The energization measurement program of the accumulated energization amount calculated from the time when the electrolyte is filled in the electrolytic cell and the electrolysis is started, and the fluid generated inside the electrolytic cell during the electrolysis of the electrolyte is passed from the inside of the electrolytic cell to the outside through the flow channel And the gas supply program of the transportation.

於供氣程序,依在通電量測定程序測定的通電量而切換使流體流通的流道。亦即,在通電量測定程序進行了測定的通電量為預先設定的基準值以上的情況下,將流體送至從電解槽的內部往第1外部輸送流體的第1流道,比預先設定的基準值小的情況下,將流體送至從電解槽的內部往第2外部輸送流體的第2流道。並且,預先設定的基準值方面,電解液每1000L設為40kAh以上的範圍內的數值。In the air supply program, the flow channel through which the fluid flows is switched according to the energization amount measured in the energization amount measurement program. That is, when the energization amount measured by the energization amount measurement program is more than the preset reference value, the fluid is sent to the first flow channel that transports the fluid from the inside of the electrolytic cell to the first outside, which is higher than the preset reference value. When the reference value is small, the fluid is sent to the second flow path that sends the fluid from the inside of the electrolytic cell to the second outside. In addition, regarding the preset reference value, the electrolytic solution is set to a value within the range of 40 kAh or more per 1000 L.

此外,本實施方式的氟氣製造裝置為將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣的氟氣製造裝置,其具備收容電解液並進行電解的電解槽、測定從將電解液裝填於電解槽內並開始電解起算的積算的通電量的通電量測定部、及將在電解液的電解時在電解槽的內部產生的流體從電解槽的內部往外部輸送的流道。In addition, the fluorine gas production device of this embodiment is a fluorine gas production device that produces fluorine gas by electrolyzing an electrolyte solution containing hydrogen fluoride and metal fluoride. The energization amount measuring unit for the accumulated energization amount from the start of electrolysis is loaded in the electrolytic cell, and a flow channel that conveys the fluid generated inside the electrolytic cell during the electrolysis of the electrolytic solution from the inside of the electrolytic cell to the outside.

上述流道具有從電解槽的內部往第1外部輸送流體的第1流道、及從電解槽的內部往第2外部輸送流體的第2流道。另外,此流道具有依以通電量測定部測定的通電量而將使流體流通的流道切換為第1流道或第2流道的流道切換部。 流道切換部在以通電量測定部進行了測定的通電量為預先設定的基準值以上的情況下,將流體從電解槽的內部送至第1流道,比預先設定的基準值小的情況下,將流體從電解槽的內部送至第2流道。並且,預先設定的基準值方面,電解液每1000L設為40kAh以上的範圍內的數值。The flow channel has a first flow channel that transports fluid from the inside of the electrolytic cell to the first outside, and a second flow channel that transports fluid from the inside of the electrolytic cell to the second outside. In addition, this flow channel has a flow channel switching section that switches the flow channel through which the fluid flows in accordance with the energization amount measured by the energization amount measurement section to the first flow channel or the second flow channel. When the energization amount measured by the energization amount measuring unit is greater than or equal to the preset reference value, the flow channel switching unit sends the fluid from the inside of the electrolytic cell to the first flow path, which is smaller than the preset reference value Next, the fluid is sent from the inside of the electrolytic cell to the second flow channel. In addition, regarding the preset reference value, the electrolytic solution is set to a value within the range of 40 kAh or more per 1000 L.

於本實施方式的氟氣之製造方法及氟氣製造裝置,依從將電解液裝填於電解槽內並開始電解起算的積算的通電量(以下,有時僅記為「通電量」或「積算的通電量」),將使流體流通的流道切換為第1流道或第2流道,故結果而言為依霧滴的平均粒徑將流道切換為第1流道或第2流道,不易發生霧滴導致的流道的阻塞。為此,本實施方式的氟氣之製造方法及氟氣製造裝置可在將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣之際抑制霧滴致使的配管、閥的阻塞。因此,可減低製造氟氣的運轉之中斷、停止的頻率,容易進行連續運轉。為此,可節約地製造氟氣。In the fluorine gas production method and the fluorine gas production apparatus of this embodiment, the energization amount calculated from the time when the electrolyte is filled in the electrolytic cell and electrolysis is started (hereinafter, sometimes simply referred to as "energization amount" or "accumulated amount" Electricity"), the flow channel through which the fluid flows is switched to the first flow channel or the second flow channel, so the result is that the flow channel is switched to the first flow channel or the second flow channel according to the average particle size of the droplets , It is not prone to blockage of the flow channel caused by mist droplets. For this reason, the fluorine gas production method and fluorine gas production apparatus of the present embodiment can suppress clogging of pipes and valves caused by mist droplets when electrolyzing an electrolyte containing hydrogen fluoride and metal fluoride to produce fluorine gas. Therefore, the frequency of interruption and stoppage of the operation of producing fluorine gas can be reduced, and continuous operation can be easily performed. For this reason, fluorine gas can be produced economically.

另外,於本實施方式的氟氣之製造方法及氟氣製造裝置,「從將電解液裝填於電解槽內並開始電解起算的積算的通電量」表示「僅將未曾供於電解的新的電解液裝填於電解槽內而開始電解的情況下的從電解的開始時起算的積算的通電量」。此外,第1流道與第2流道雖為個別的流道,惟第1外部與第2外部可為個別的地方,亦可相同的地方。In addition, in the fluorine gas production method and the fluorine gas production apparatus of this embodiment, "the accumulated energization amount from the time when the electrolytic solution is filled in the electrolytic cell and the electrolysis is started" means "only new electrolysis that has not been supplied to the electrolysis The accumulated energization amount from the start of electrolysis when the liquid is filled in the electrolytic cell and electrolysis is started". In addition, although the first runner and the second runner are separate runners, the first exterior and the second exterior may be separate places or the same place.

此處示出本實施方式的氟氣之製造方法及氟氣製造裝置的一例。第1流道為從電解槽的內部經由從流體除去霧滴的霧滴除去部將流體往從流體挑選而取出氟氣的氟氣挑選部輸送的流道。第2流道為不經由霧滴除去部而從電解槽的內部往氟氣挑選部輸送流體的流道。亦即,通電量為預先設定的基準值以上的情況下,流體被送至具備於第1流道的霧滴除去部,比預先設定的基準值小的情況下,流體不被送至霧滴除去部。於本例,雖氟氣挑選部相當於第1外部及第2外部,第1外部與第2外部為相同的地方,惟第1外部與第2外部亦可為個別的地方。Here, an example of the fluorine gas production method and the fluorine gas production apparatus of this embodiment is shown. The first flow path is a flow path through which the fluid is transported from the inside of the electrolytic cell to the fluorine gas sorting part which selects and extracts fluorine gas from the fluid via the mist removal part which removes mist from the fluid. The second flow path is a flow path that transports fluid from the inside of the electrolytic cell to the fluorine gas selection part without passing through the mist removal part. That is, when the energization amount is greater than or equal to the preset reference value, the fluid is sent to the mist removal part provided in the first flow channel, and if the value is smaller than the preset reference value, the fluid is not sent to the mist. Remove the department. In this example, although the fluorine gas selection part is equivalent to the first exterior and the second exterior, the first exterior and the second exterior are the same place, but the first exterior and the second exterior may be separate locations.

並且,第2流道具有抑制霧滴致使的第2流道的阻塞的阻塞抑制機構。阻塞抑制機構雖只要為可抑制霧滴致使的第2流道的阻塞者則不特別限定,惟舉例如下述者。亦即,可例示大徑的配管、傾斜的配管、旋轉螺桿、氣流產生裝置,此等亦可組合進行使用。 詳述時,可透過將第2流道的至少一部分以比第1流道大徑的配管而構成,從而抑制霧滴致使的第2流道的阻塞。另外,可透過將第2流道的至少一部分以相對於水平方向傾斜且延伸於從上游側朝下游側下降的方向的配管而構成,從而抑制霧滴致使的第2流道的阻塞。In addition, the second flow path has a clogging suppression mechanism that suppresses clogging of the second flow path caused by mist droplets. The clogging suppression mechanism is not particularly limited as long as it is capable of suppressing the clogging of the second flow path caused by mist droplets, but examples include the following. That is, large-diameter pipes, inclined pipes, rotary screws, and air flow generators can be exemplified, and these can also be used in combination. In detail, it is possible to suppress clogging of the second flow channel due to mist droplets by configuring at least a part of the second flow channel with a pipe having a larger diameter than the first flow channel. In addition, it is possible to suppress clogging of the second flow channel due to mist droplets by forming at least a part of the second flow channel with a pipe that is inclined with respect to the horizontal direction and extends in a direction descending from the upstream side to the downstream side.

再者,可透過將朝上游側或下游側輸送堆積於第2流道的內部的霧滴的旋轉螺桿設置於第2流道的內部,從而抑制霧滴致使的第2流道的阻塞。再者,可透過將流放用於使流於第2流道內的流體的流速上升的氣流的氣流產生裝置設於第2流道,從而抑制霧滴致使的第2流道的阻塞。另外,亦可將與具備於第1流道的霧滴除去部為個別的霧滴除去部設於第2流道作為阻塞抑制機構。Furthermore, it is possible to suppress the clogging of the second flow channel due to the mist droplets by providing a rotary screw that transports the mist accumulated in the second flow channel toward the upstream or downstream side in the second flow channel. Furthermore, it is possible to suppress the clogging of the second flow channel caused by the mist droplets by providing the air flow generating device for the air flow for increasing the flow velocity of the fluid flowing in the second flow channel in the second flow channel. In addition, a mist removing section separate from the mist removing section provided in the first flow path may be provided in the second flow path as the clogging suppression mechanism.

第1流道透過霧滴除去部從流體除去霧滴故不易發生霧滴致使的阻塞,第2流道設置阻塞抑制機構故不易發生霧滴致使的阻塞。為此,本實施方式的氟氣之製造方法及氟氣製造裝置可在將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣之際抑制霧滴致使的配管、閥的阻塞。另外,即使不具備霧滴除去部、阻塞抑制機構,雖僅透過將使流體流通的流道切換為個別的流道(第1流道或第2流道)從而仍發揮抑制霧滴致使的配管、閥的阻塞的功效,惟具備霧滴除去部、阻塞抑制機構時上述效果為優異。The first flow channel removes the droplets from the fluid through the droplet removal part, so clogging caused by fog droplets is less likely to occur, and the second flow channel is provided with a clogging suppression mechanism so that clogging caused by droplets is less likely to occur. For this reason, the fluorine gas production method and fluorine gas production apparatus of the present embodiment can suppress clogging of pipes and valves caused by mist droplets when electrolyzing an electrolyte containing hydrogen fluoride and metal fluoride to produce fluorine gas. In addition, even if there is no droplet removal unit and clogging suppression mechanism, the piping that suppresses droplets can still be achieved by only switching the flow path through which the fluid flows to a separate flow path (first flow path or second flow path). , The clogging effect of the valve, but the above-mentioned effect is excellent when the mist removal part and the clogging suppression mechanism are provided.

在以下,就本實施方式的氟氣之製造方法及氟氣製造裝置,更詳細進行說明。 [電解槽] 電解槽的態樣方面無特別限制,只要可將含有氟化氫及金屬氟化物的電解液進行電解而予以產生氟氣,則任何電解槽皆可使用。 一般而言,電解槽的內部透過阻隔壁等的分隔構件區劃為配置陽極的陽極室與配置陰極的陰極室,在陽極產生的氟氣與在陰極產生的氫氣不混合。In the following, the fluorine gas production method and the fluorine gas production apparatus of the present embodiment will be described in more detail. [Electrolyzer] The aspect of the electrolytic cell is not particularly limited, and any electrolytic cell can be used as long as the electrolytic solution containing hydrogen fluoride and metal fluoride can be electrolyzed to generate fluorine gas. Generally, the inside of the electrolytic cell is partitioned into an anode chamber where the anode is placed and a cathode chamber where the cathode is placed through a partition member such as a barrier wall. The fluorine gas generated at the anode and the hydrogen gas generated at the cathode are not mixed.

陽極方面,可使用例如以鑽石、類鑽碳、非晶碳、石墨、玻璃碳、無定形碳等的碳材料而形成的碳質電極。另外,陽極方面,除上述碳材料以外,亦可使用以例如鎳、莫內爾合金(商標)等的金屬而形成的金屬電極。陰極方面,可使用例如以鐵、銅、鎳、莫內爾合金(商標)等的金屬而形成的金屬電極。For the anode, a carbon electrode formed of carbon materials such as diamond, diamond-like carbon, amorphous carbon, graphite, glassy carbon, and amorphous carbon can be used. In addition, for the anode, in addition to the above-mentioned carbon material, a metal electrode formed of a metal such as nickel and Monel (trademark) can also be used. As for the cathode, for example, a metal electrode formed of a metal such as iron, copper, nickel, and Monel (trademark) can be used.

電解液含有氟化氫及金屬氟化物,此金屬氟化物的種類非特別限定者,優選上為從鉀、銫、銣及鋰中選擇的至少一種金屬的氟化物。電解液中含有銫或銣時,電解液的比重變大,故電解時的霧滴的產生量受到抑制。The electrolytic solution contains hydrogen fluoride and metal fluoride, and the type of the metal fluoride is not particularly limited. Preferably, it is a fluoride of at least one metal selected from potassium, cesium, rubidium, and lithium. When cesium or rubidium is contained in the electrolyte, the specific gravity of the electrolyte becomes larger, so the generation of mist droplets during electrolysis is suppressed.

電解液方面,例如可使用氟化氫(HF)與氟化鉀(KF)的混合熔鹽。氟化氫與氟化鉀的混合熔鹽中的氟化氫與氟化鉀的莫耳比,可設為例如氟化氫:氟化鉀=1.5~2.5:1。氟化氫:氟化鉀=2:1的情況下的KF・2HF為代表性的電解液,此混合熔鹽的熔點為約72℃。此電解液具有腐蝕性,故電解槽的內面等電解液的相接的部位優選上以鐵、鎳、莫內爾合金(商標)等的金屬而形成。As for the electrolyte, for example, a mixed molten salt of hydrogen fluoride (HF) and potassium fluoride (KF) can be used. The molar ratio of hydrogen fluoride to potassium fluoride in the mixed molten salt of hydrogen fluoride and potassium fluoride can be set to, for example, hydrogen fluoride: potassium fluoride=1.5 to 2.5:1. Hydrogen fluoride: Potassium fluoride = KF·2HF in the case of 2:1 is a representative electrolyte, and the melting point of this mixed molten salt is about 72°C. Since this electrolyte is corrosive, it is preferable that the place where the electrolyte solution contacts, such as the inner surface of an electrolytic cell, is formed of metal, such as iron, nickel, and Monel alloy (trademark).

於電解液的電解時,於陽極與陰極施加直流電流,含有氟氣的氣體在陽極產生,含有氫氣的氣體在陰極產生。另外,在電解液的氟化氫存在蒸氣壓,故在陽極及陰極產生的氣體中,分別伴隨著氟化氫。再者,透過電解液的電解之氟氣的製造中,因電解而產生的氣體中含有電解液的霧滴。因此,電解槽的氣相部分由因電解而產生的氣體、氟化氫及電解液的霧滴所成。因此,從電解槽的內部往外部送出者由因電解而產生的氣體、氟化氫及電解液的霧滴所成,本發明中將此稱為「流體」。During the electrolysis of the electrolyte, a direct current is applied to the anode and the cathode, a gas containing fluorine gas is generated at the anode, and a gas containing hydrogen is generated at the cathode. In addition, there is a vapor pressure of hydrogen fluoride in the electrolyte, so the gases generated at the anode and cathode are accompanied by hydrogen fluoride, respectively. Furthermore, in the production of electrolyzed fluorine gas that permeates the electrolyte, the gas generated by the electrolysis contains mist of the electrolyte. Therefore, the gas phase part of the electrolytic cell is formed by the gas, hydrogen fluoride, and the mist droplets of the electrolytic solution generated by the electrolysis. Therefore, what is sent from the inside of the electrolytic cell to the outside is formed by the mist of gas, hydrogen fluoride, and electrolytic solution generated by electrolysis, and this is referred to as "fluid" in the present invention.

另外,電解液中的氟化氫因電解的進行而被消耗,故亦可將連續地或斷續地對電解槽供應而補給氟化氫用的配管連接於電解槽。氟化氫的供應可供應至電解槽的陰極室側,亦可供應至陽極室側。 在電解液的電解時產生霧滴的主要理由如以下。電解時的電解液的溫度調整為例如80~100℃。KF・2HF的熔點為71.7℃,故調整為上述溫度的情況下電解液為液態。在電解槽的兩電極產生的氣體的氣泡在電解液中上升,在電解液的液面破裂。此時,電解液的一部分被放出至氣相中。In addition, since the hydrogen fluoride in the electrolyte is consumed by the progress of electrolysis, a pipe for supplying hydrogen fluoride by continuously or intermittently supplying hydrogen fluoride to the electrolytic cell may be connected to the electrolytic cell. The supply of hydrogen fluoride can be supplied to the cathode chamber side of the electrolytic cell or to the anode chamber side. The main reasons for the generation of mist during the electrolysis of the electrolyte are as follows. The temperature of the electrolytic solution during electrolysis is adjusted to, for example, 80 to 100°C. The melting point of KF・2HF is 71.7°C, so the electrolyte is liquid when adjusted to the above temperature. The gas bubbles generated at the two electrodes of the electrolytic cell rise in the electrolyte and burst at the surface of the electrolyte. At this time, a part of the electrolyte is released into the gas phase.

氣相的溫度比電解液的熔點低,故此放出的電解液相變化為如極微小的粉體的狀態。此粉體應為氟化鉀與氟化氫的混合物KF・nHF。此粉體乘著其他產生的氣體的流動而成為霧滴,形成在電解槽產生的流體。如此的霧滴由於具有黏著性等的理由,使得以過濾器的設置等的一般的對策難以有效地加以除去。The temperature of the gas phase is lower than the melting point of the electrolytic solution, so the released electrolytic liquid phase changes into a state like an extremely fine powder. The powder should be KF·nHF, a mixture of potassium fluoride and hydrogen fluoride. This powder is formed into mist droplets by the flow of other generated gas, and forms the fluid generated in the electrolytic cell. Such mist droplets have adhesiveness and other reasons, making it difficult to effectively remove them by general countermeasures such as the installation of filters.

另外,產生量方面雖為少量,惟有時亦由於作為陽極的碳質電極與在電解產生的氟氣的反應而使得有機化合物的微粉末產生為霧滴。詳述時,往碳質電極的電流的供電部分產生接觸電阻的情形多,有時因焦耳熱而成為比電解液的溫度高的溫度。為此,形成碳質電極的碳與氟氣產生反應,使得有時煤狀的有機化合物CFx產生為霧滴。In addition, although the amount of generation is small, the fine powder of the organic compound is sometimes generated as mist droplets due to the reaction between the carbonaceous electrode as the anode and the fluorine gas generated during electrolysis. In detail, there are many cases where contact resistance is generated in the power supply portion of the electric current to the carbonaceous electrode, and the temperature may be higher than the temperature of the electrolyte due to Joule heat. For this reason, the carbon forming the carbonaceous electrode reacts with fluorine gas, so that the coal-like organic compound CFx may be produced as mist droplets.

另外,電解槽優選上具有在使用於電解的陽極或陰極產生的氣泡在電解液中上升於鉛直方向而可到達於電解液的液面的構造。具有氣泡不易在電解液中上升於鉛直方向且上升於相對於鉛直方向而傾斜的方向的構造時,容易複數個氣泡集合而生成大的氣泡。其結果,大的氣泡到達於電解液的液面而破裂,故霧滴的產生量趨於變多。具有氣泡在電解液中上升於鉛直方向即可到達於電解液的液面的構造時,小的氣泡到達於電解液的液面而破裂,故霧滴的產生量趨於變少。In addition, the electrolytic cell preferably has a structure in which bubbles generated at the anode or cathode used for electrolysis rise in the vertical direction in the electrolytic solution to reach the liquid surface of the electrolytic solution. When it has a structure in which the bubbles are difficult to rise in the vertical direction in the electrolyte and rise in a direction inclined with respect to the vertical direction, it is easy for a plurality of bubbles to gather to generate large bubbles. As a result, the large bubbles reach the liquid surface of the electrolyte and burst, so the amount of mist droplets tends to increase. When the bubbles rise in the vertical direction in the electrolyte to reach the liquid surface of the electrolyte, the small bubbles reach the liquid surface of the electrolyte and break, so the amount of mist tends to decrease.

[平均粒徑測定部] 本實施方式的氟氣製造裝置可具備就包括於流體中的霧滴的平均粒徑進行測定的平均粒徑測定部,此平均粒徑測定部亦能以利用光散射方式測定平均粒徑的光散射檢測器而構成。光散射檢測器可一面使氟氣製造裝置連續運轉一面測定流於流道的流體中的霧滴的平均粒徑,故作為平均粒徑測定部屬優選。[Average particle size measurement department] The fluorine gas production apparatus of the present embodiment may be provided with an average particle diameter measuring unit that measures the average particle diameter of the mist droplets included in the fluid, and this average particle diameter measuring unit can also measure the average particle diameter of light by using a light scattering method. The scatter detector is constructed. The light scattering detector can measure the average particle size of the mist droplets in the fluid flowing in the flow channel while continuously operating the fluorine gas production device, so it is preferable as the average particle size measuring section.

就光散射檢測器的一例,一面參照圖1一面進行說明。圖1的光散射檢測器為在本實施方式的氟氣製造裝置(例如,後述的圖2及圖4~13的氟氣製造裝置)中可用作為平均粒徑測定部的光散射檢測器。亦即,為在將含有氟化氫及金屬氟化物的電解液在氟氣製造裝置的電解槽的內部進行電解而製造氟氣之際就包括於在電解槽的內部產生的流體中的霧滴的平均粒徑進行測定的光散射檢測器。 可將光散射檢測器連接於氟氣製造裝置,將流體從電解槽的內部送至光散射檢測器而測定霧滴的平均粒徑,亦可在不將光散射檢測器與氟氣製造裝置連接之下,從電解槽的內部取出流體並導入於光散射檢測器而測定霧滴的平均粒徑。An example of a light scattering detector will be described with reference to FIG. 1. The light scattering detector of FIG. 1 is a light scattering detector that can be used as an average particle diameter measuring part in the fluorine gas production apparatus of this embodiment (for example, the fluorine gas production apparatus of FIGS. 2 and 4 to 13 described later). That is, when electrolyzing the electrolyte containing hydrogen fluoride and metal fluoride in the inside of the electrolytic cell of the fluorine gas production device to produce fluorine gas, the average of the droplets included in the fluid generated in the inside of the electrolytic cell Light scattering detector for particle size measurement. The light scattering detector can be connected to the fluorine gas production device, and the fluid is sent from the inside of the electrolytic cell to the light scattering detector to measure the average particle size of the droplets. It is also possible to connect the light scattering detector to the fluorine gas production device Next, the fluid was taken out from the inside of the electrolytic cell and introduced into a light scattering detector to measure the average particle size of the mist droplets.

圖1的光散射檢測器具備收容流體F的樣品室1、將光散射測定用光L照射於樣品室1中的流體F的光源2、就光散射測定用光L因流體F中的霧滴M發生散射而產生的散射光S進行檢測的散射光檢測部3、設置於樣品室1而與流體F接觸且光散射測定用光L穿透的透明窗4A、及設置於樣品室1而與流體F接觸且散射光S穿透的透明窗4B。透明窗4A、4B以從鑽石、氟化鈣(CaF2 )、氟化鉀(KF)、氟化銀(AgF)、氟化鋇(BaF2 )及溴化鉀(KBr)中選擇的至少一種而形成。The light scattering detector of Fig. 1 includes a sample chamber containing a fluid F 1. A light source that irradiates the fluid F in the sample chamber 1 with the light L for light scattering measurement 2. The light L for light scattering measurement is caused by the droplets in the fluid F. The scattered light detector 3 for detecting the scattered light S generated by the scattering of M, the transparent window 4A provided in the sample chamber 1 and in contact with the fluid F through which the light L for light scattering measurement penetrates, and the transparent window 4A provided in the sample chamber 1 to communicate with The transparent window 4B through which the fluid F contacts and the scattered light S penetrates. Transparent windows 4A, 4B are made of at least one selected from diamond, calcium fluoride (CaF 2 ), potassium fluoride (KF), silver fluoride (AgF), barium fluoride (BaF 2 ), and potassium bromide (KBr) And formed.

從光源2予以發出的光散射測定用光L(例如雷射光)穿透聚光透鏡6及樣品室1的透明窗4A而進入至樣品室1內,照射在收容於樣品室1的流體F。此時,在流體F中存在如霧滴M的將光反射的物質時,光散射測定用光L反射而散射。光散射測定用光L因霧滴M發生散射而產生的散射光S的一部分穿透樣品室1的透明窗4B而從樣品室1取出至外部,經由聚光透鏡7及光圈8進入至散射光檢測部3。此時,可根據從散射光S獲得的資訊而得知霧滴M的平均粒徑。另外,此處獲得的平均粒徑為個數平均粒徑。散射光檢測部3方面,例如可使用PALAS公司製的氣溶膠分光儀welas(註冊商標) digital 2000。The light scattering measurement light L (for example, laser light) emitted from the light source 2 penetrates the condenser lens 6 and the transparent window 4A of the sample chamber 1, enters the sample chamber 1, and irradiates the fluid F contained in the sample chamber 1. At this time, when a substance that reflects light such as the mist M is present in the fluid F, the light L for light scattering measurement is reflected and scattered. Part of the scattered light S generated by the light scattering measurement light L due to the scattering of the mist droplets M penetrates the transparent window 4B of the sample chamber 1 and is taken out from the sample chamber 1 to the outside, and enters the scattered light through the condenser lens 7 and the aperture 8 Detection section 3. At this time, the average particle size of the mist M can be known from the information obtained from the scattered light S. In addition, the average particle diameter obtained here is a number average particle diameter. As for the scattered light detection unit 3, for example, an aerosol spectrometer welas (registered trademark) digital 2000 manufactured by PALAS Corporation can be used.

透明窗4A、4B接觸於流體F,惟於流體F含有反應性高的氟氣,故需要以不易受氟氣腐蝕的材質形成透明窗4A、4B。形成透明窗4A、4B的材質方面,舉例從鑽石、氟化鈣、氟化鉀、氟化銀、氟化鋇及溴化鉀中選擇的至少一種。透明窗4A、4B以上述的材質而形成時,可抑制與流體F接觸所致的劣化。The transparent windows 4A, 4B are in contact with the fluid F, but the fluid F contains highly reactive fluorine gas, so it is necessary to form the transparent windows 4A, 4B with a material that is not easily corroded by the fluorine gas. Regarding the material for forming the transparent windows 4A, 4B, for example, at least one selected from diamond, calcium fluoride, potassium fluoride, silver fluoride, barium fluoride, and potassium bromide. When the transparent windows 4A and 4B are formed of the above-mentioned material, deterioration due to contact with the fluid F can be suppressed.

另外,透明窗4A、4B方面亦可使用將由上述的材質所成的被膜塗佈於石英等的玻璃的表面者。與流體F接觸的部分被以由上述的材質所成的被膜進行塗佈,故可一面降低成本一面抑制與流體F接觸所致的劣化。透明窗4A、4B亦可為以上述的材質形成與流體F接觸之面且其以外的部分以石英等的一般的玻璃而形成的層積體。 光散射檢測器之中透明窗4A、4B以外的部分的材質,只要為對於氟氣具有耐蝕性的材質則非特別限定者,優選上使用例如為銅-鎳合金之莫內爾合金(商標)、赫史特合金(商標)、不鏽鋼等的金屬材料。In addition, for the transparent windows 4A and 4B, a coating film made of the above-mentioned material may be applied to the surface of glass such as quartz. The part in contact with the fluid F is coated with a film made of the above-mentioned material. Therefore, it is possible to suppress deterioration due to contact with the fluid F while reducing the cost. The transparent windows 4A and 4B may be a laminated body in which the surface in contact with the fluid F is formed of the above-mentioned material, and the other parts are formed of general glass such as quartz. The material of the light scattering detector other than the transparent windows 4A and 4B is not particularly limited as long as it is a material having corrosion resistance to fluorine gas. It is preferable to use, for example, a copper-nickel alloy Monel alloy (trademark) , Herst alloy (trademark), stainless steel and other metal materials.

[霧滴的平均粒徑與通電量] 本發明人就在透過電解液的電解的氟氣之製造之際產生的霧滴的平均粒徑,使用光散射檢測器進行了測定。說明該結果的一例。將氟氣製造裝置的陽極交換為新的陽極、在電解槽內填充新的電解液後開始電解,就緊接著電解開始後在一定期間在陽極產生的流體中的霧滴的平均粒徑進行了測定。其結果,霧滴的平均粒徑為0.5~2.0μm。之後,繼續電解且經過充分的時間時電解開始穩定,此穩定電解時的流體中的霧滴的平均粒徑為約0.2μm。 如此般,在從緊接著電解開始後至穩定電解時之前的期間,產生相對大的粒徑的霧滴。在緊接著電解開始後的含有大的霧滴的流體流過配管、閥內的情況下,霧滴吸附於配管、閥的內面而容易引起配管、閥的阻塞。[Average particle size and energization amount of mist droplets] The inventors of the present invention measured the average particle diameter of the mist droplets generated during the production of the electrolyzed fluorine gas permeating the electrolyte solution using a light scattering detector. Illustrate an example of this result. The anode of the fluorine gas production device was exchanged with a new anode, the electrolysis cell was filled with new electrolyte, and electrolysis was started. The average particle size of the mist droplets in the fluid generated at the anode during a certain period of time immediately after the start of electrolysis was performed. Determination. As a result, the average particle size of the mist droplets was 0.5 to 2.0 μm. After that, the electrolysis is continued and after a sufficient time has passed, the electrolysis starts to stabilize, and the average particle diameter of the mist droplets in the fluid during this stable electrolysis is about 0.2 μm. In this way, during the period from immediately after the start of electrolysis to before the time of stable electrolysis, mist droplets with a relatively large particle size are generated. When the fluid containing large droplets immediately after the start of electrolysis flows through the pipes or valves, the droplets are adsorbed on the inner surfaces of the pipes and valves, and the pipes and valves are likely to be clogged.

相對於此,在穩定電解時,產生的霧滴的粒徑相對小。如此的小的霧滴在流體中不易發生沉降、堆積等,故可不斷地穩定流過配管、閥。為此,在穩定電解時,由霧滴與在電極產生的氣體所成的流體引起配管、閥的阻塞的可能性相對低。另外,從緊接著電解開始後至穩定電解時之前的時間,一般為25小時以上200小時以下。另外,在從緊接著電解開始後至穩定電解時之前,電解液每1000L需要大致上40kAh以上的通電。In contrast, during stable electrolysis, the particle size of the mist droplets generated is relatively small. Such small droplets are not easy to settle or accumulate in the fluid, so they can flow stably through piping and valves. For this reason, during stable electrolysis, the possibility of clogging of piping and valves caused by the fluid formed by the mist droplets and the gas generated on the electrode is relatively low. In addition, the time from immediately after the start of electrolysis to the time of stable electrolysis is generally 25 hours or more and 200 hours or less. In addition, from immediately after the start of electrolysis to before the time of stable electrolysis, the electrolytic solution needs to be energized approximately 40 kAh or more per 1000 L.

此外,本發明人發現在霧滴的平均粒徑與通電量之間存在密切的關係。一般而言,僅將未曾供給於電解的新的電解液裝填於電解槽內而開始電解的情況下,電解開始時(亦即,從電解的開始時的積算的通電量小時)的霧滴的平均粒徑比0.4μm大。之後,隨著繼續電解(亦即,隨著從電解的開始時的積算的通電量增加),霧滴的平均粒徑變小,通電量在電解液每1000L超過例如60kAh時成為0.4μm以下。In addition, the inventors found that there is a close relationship between the average particle size of the mist droplets and the amount of energization. Generally speaking, when only new electrolyte that has not been supplied to the electrolysis is filled in the electrolysis cell and the electrolysis is started, the mist droplets at the beginning of the electrolysis (that is, the amount of electricity accumulated from the beginning of the electrolysis is small) The average particle size is larger than 0.4 μm. After that, as the electrolysis continues (that is, as the accumulated energization amount from the beginning of the electrolysis increases), the average particle size of the mist droplets becomes smaller, and the energization amount becomes 0.4 μm or less when the electrolytic solution exceeds, for example, 60 kAh per 1000 L.

如此般,霧滴的平均粒徑與通電量之間存在相關性,故可在電解時代替霧滴的平均粒徑而測定通電量,將該測定結果利用於流道的切換。亦即,只要從電解的開始時常時測定積算的通電量,在電解中的既定的時點利用通電量的測定結果,即可依該測定結果適切地切換使在上述既定的時點因電解而產生的流體流通的流道。In this way, there is a correlation between the average particle size of the mist droplets and the energization amount. Therefore, the energization amount can be measured instead of the average particle size of the mist droplets during electrolysis, and the measurement result can be used to switch the flow channel. That is, as long as the accumulated energization amount is constantly measured from the beginning of electrolysis, and the result of the energization amount measurement is used at a predetermined point in the electrolysis, it is possible to appropriately switch based on the measurement result so that the amount of electricity generated by the electrolysis at the predetermined time point The flow path through which the fluid circulates.

本發明人基於如此的見解而發明具有可依電解時的通電量切換使流體流通的流道的構造的上述氟氣之製造方法及氟氣製造裝置。本實施方式的氟氣製造裝置可採取具有第1流道與第2流道並使用流道切換部(例如切換閥)從兩個流道之中選擇使用於流體的搬送的流道。Based on such findings, the inventors invented the above-mentioned fluorine gas production method and fluorine gas production apparatus having a structure that can switch the flow path through which the fluid flows in accordance with the amount of energization during electrolysis. The fluorine gas production apparatus of the present embodiment may have a first flow channel and a second flow channel, and a flow channel switching unit (for example, a switching valve) can be used to select a flow channel used for conveyance of the fluid from the two flow channels.

或者,本實施方式的氟氣製造裝置亦可採取具有兩個流道與進行電解槽的移動及切換的移動切換機構,從兩個流道之中選擇使用於流體的搬送的流道,使電解槽移動至該流道的附近而進行連接,從而切換流道。 如上述般具有第1流道與第2流道,故在將其中一個流道進行遮斷而清潔的期間,仍可打開另一個流道而使氟氣製造裝置持續運轉。Alternatively, the fluorine gas production device of the present embodiment may also adopt a movement switching mechanism having two flow passages and movement and switching of the electrolytic cell, and the flow passage used for fluid transport is selected from the two flow passages to make the electrolysis The groove is moved to the vicinity of the flow channel and connected, thereby switching the flow channel. It has a first flow channel and a second flow channel as described above, so while one of the flow channels is blocked and cleaned, the other flow channel can still be opened to keep the fluorine gas production device operating.

在本發明人的檢討下,從緊接著電解開始後至穩定電解時之前的期間,產生平均粒徑相對大的霧滴,故在此時可將流體送至具有阻塞抑制機構的第2流道。時間經過,到達穩定電解時,產生平均粒徑相對小的霧滴,故在此時可將流道切換為將流體送至具有霧滴除去部的第1流道。 如此的流道的切換雖依測定的電解時的通電量而進行,惟根據預先設定的基準值而進行流道的切換。在陽極產生的霧滴的平均粒徑方面的適切的基準值雖因裝置而異,惟例如為0.1μm以上1.0μm以下,優選上為0.2μm以上0.8μm以下,更優選上為0.4μm。Under the review of the present inventors, from immediately after the start of electrolysis to before the time of stable electrolysis, mist droplets with a relatively large average particle size are generated. Therefore, at this time, the fluid can be sent to the second flow channel with a clogging suppression mechanism. . As time elapses, when stable electrolysis is reached, mist droplets with a relatively small average particle size are generated, so at this time, the flow channel can be switched to send the fluid to the first flow channel with the mist removal part. Such switching of the flow channel is performed in accordance with the measured energization amount during electrolysis, but the switching of the flow channel is performed based on a preset reference value. The appropriate reference value for the average particle diameter of the mist droplets generated on the anode varies depending on the device, but is, for example, 0.1 μm or more and 1.0 μm or less, preferably 0.2 μm or more and 0.8 μm or less, and more preferably 0.4 μm.

因此,根據霧滴的平均粒徑與通電量的相關性,通電量方面的適切的基準值的下限方面,電解液每1000L為40kAh以上,優選上為50kAh以上。另外,上述基準值之上限方面,優選上為100kAh以下,較優選上為80kAh以下。通電量的最適切的基準值為60kAh。通電量比基準值小的情況下,可將流體送至第2流道,為基準值以上的情況下,可將流體送至第1流道。Therefore, based on the correlation between the average particle diameter of the mist droplets and the energization amount, the lower limit of the appropriate reference value for the energization amount is 40 kAh or more per 1000 L of the electrolyte, preferably 50 kAh or more. In addition, the upper limit of the above-mentioned reference value is preferably 100 kAh or less, and more preferably 80 kAh or less. The most appropriate reference value of the energization amount is 60kAh. When the energization amount is smaller than the reference value, the fluid can be sent to the second flow channel, and when the energization amount is greater than the reference value, the fluid can be sent to the first flow channel.

通電量為電流值與時間的積,故電解時的積算的通電量可使用例如電流計、計時裝置及計算裝置而測定。亦即,透過電流計測定為了電解而對電極供應的電流,同時透過時鐘等的計時裝置測定從開始電解起算的總電解時間,將此等數值透過電腦等的計算裝置相乘,即可獲得電解時的積算的通電量。此外,透過庫侖計亦可測定電解時的積算的通電量。 另外,在陰極產生的流體(主成分為氫氣)之中,例如每單位體積(1升)含有20~50μg(霧滴的比重假定為1.0g/mL而算出)的粉體,此粉體的平均粒徑為約0.1μm,具有±0.05μm的分布。The energization amount is the product of the current value and the time, so the cumulative energization amount during electrolysis can be measured using, for example, an ammeter, a timing device, and a calculation device. That is, the current supplied to the electrode for electrolysis is measured by an ammeter, and the total electrolysis time from the start of electrolysis is measured by a timekeeping device such as a clock, and these values are multiplied by a calculation device such as a computer to obtain the electrolysis. The accumulated energization amount at the time. In addition, a coulometer can also be used to measure the accumulated energization amount during electrolysis. In addition, in the fluid generated at the cathode (the main component is hydrogen gas), for example, the powder contains 20-50μg per unit volume (1 liter) (the specific gravity of the mist droplets is calculated assuming 1.0g/mL). The average particle size is about 0.1 μm, with a distribution of ±0.05 μm.

於在陰極產生的流體,在產生的粉體的粒徑分布方面未確認到取決於通電量之大的差。在陰極產生的包括於流體中的霧滴平均粒徑比在陽極產生的包括於流體中的霧滴小,故比起在陽極產生的包括於流體中的霧滴,不易予以發生配管、閥的阻塞。因此,在陰極產生的包括於流體中的霧滴,使用適當的除去方法從流體予以除去即可。Regarding the fluid generated at the cathode, a large difference in the particle size distribution of the generated powder has not been confirmed depending on the amount of energization. The average particle size of the mist droplets contained in the fluid generated at the cathode is smaller than the mist droplets contained in the fluid generated at the anode. Therefore, compared with the mist droplets contained in the fluid generated at the anode, it is not easy to cause piping and valve damage. block. Therefore, the mist contained in the fluid generated at the cathode can be removed from the fluid using an appropriate removal method.

就本實施方式的氟氣製造裝置的一例,一面參照圖2一面詳細進行說明。圖2的氟氣製造裝置,雖為具有2座電解槽之例,惟電解槽亦可為1座,亦可為3座以上,亦可為例如10~15座。 示於圖2的氟氣製造裝置具備在內部收容電解液10並進行電解的電解槽11、11、配於電解槽11的內部而浸漬於電解液10的陽極13、及配於電解槽11的內部而浸漬於電解液10且被相向於陽極13而配置的陰極15。An example of the fluorine gas production apparatus of this embodiment will be described in detail with reference to FIG. 2. Although the fluorine gas production apparatus of FIG. 2 is an example with two electrolytic cells, the electrolytic cell may be one, three or more, or, for example, 10-15. The fluorine gas production apparatus shown in FIG. 2 includes electrolytic cells 11, 11 that contain an electrolytic solution 10 inside and perform electrolysis, an anode 13 that is arranged in the electrolytic cell 11 and is immersed in the electrolytic solution 10, and an anode 13 that is arranged in the electrolytic cell 11 The inside is a cathode 15 immersed in the electrolytic solution 10 and arranged to face the anode 13.

電解槽11的內部由從電解槽11的內部的頂面朝鉛直方向下方延伸且其下端浸漬於電解液10的阻隔壁17區劃為陽極室22與陰極室24。並且,在陽極室22內配置陽極13,在陰極室24內配置陰極15。其中,電解液10的液面上的空間,由阻隔壁17分離為陽極室22內的空間與陰極室24內的空間,電解液10之中比阻隔壁17的下端靠上方側的部分方面由阻隔壁17分離,而比電解液10之中阻隔壁17的下端靠下方側的部分方面未由阻隔壁17直接地分離而呈現連續。The inside of the electrolytic cell 11 is partitioned into an anode chamber 22 and a cathode chamber 24 by a barrier wall 17 extending vertically downward from the top surface of the inside of the electrolytic cell 11 and immersed in the electrolyte 10 at the lower end. In addition, the anode 13 is arranged in the anode chamber 22 and the cathode 15 is arranged in the cathode chamber 24. Among them, the space on the liquid surface of the electrolyte 10 is separated into the space in the anode chamber 22 and the space in the cathode chamber 24 by the barrier wall 17, and the portion of the electrolyte 10 above the lower end of the barrier wall 17 is increased by The barrier rib 17 is separated, and the portion below the lower end of the barrier rib 17 in the electrolytic solution 10 is not directly separated by the barrier rib 17 but is continuous.

另外,示於圖2的氟氣製造裝置具備就在電解液10的電解時在電解槽11的內部產生的包括於流體中的霧滴的平均粒徑進行測定的第1平均粒徑測定部31、從流體除去霧滴的第1霧滴除去部32、從流體挑選氟氣而取出的氟氣挑選部(未圖示)、及將流體從電解槽11的內部送往氟氣挑選部的流道。In addition, the fluorine gas production apparatus shown in FIG. 2 is provided with a first average particle diameter measuring unit 31 that measures the average particle diameter of the mist droplets contained in the fluid generated in the electrolytic cell 11 during the electrolysis of the electrolyte 10 , The first droplet removal section 32 that removes the droplets from the fluid, the fluorine gas selection section (not shown) that selects the fluorine gas from the fluid and the fluorine gas selection section (not shown), and the flow that sends the fluid from the inside of the electrolytic cell 11 to the fluorine gas selection section road.

再者,示於圖2的氟氣製造裝置具備測定為了電解對陽極13及陰極15供應的電流的電流計(未圖示)、測定從開始電解起算的總電解時間的計時裝置(未圖示)、及將以電流計進行了測定的電流值與以計時裝置進行了測定的總電解時間相乘而算出電解時的積算的通電量的計算裝置(未圖示)。由此等電流計、計時裝置及計算裝置構成作為本發明的構成要件之通電量測定部。In addition, the fluorine gas production device shown in FIG. 2 includes an ammeter (not shown) that measures the current supplied to the anode 13 and the cathode 15 for electrolysis, and a timer (not shown) that measures the total electrolysis time since the start of electrolysis. ), and a calculation device (not shown) that multiplies the current value measured with an ammeter by the total electrolysis time measured with a timepiece to calculate the accumulated energization amount during electrolysis. Such an ammeter, a timekeeping device, and a calculation device constitute the energization amount measuring unit which is a constituent element of the present invention.

再者,上述的流道具有將流體經由第1霧滴除去部32從電解槽11的內部送往氟氣挑選部的第1流道、及將流體不經由第1霧滴除去部32從電解槽11的內部送往氟氣挑選部的第2流道。另外,此流道具有依以上述通電量測定部測定的通電量而將使流體流通的流道切換為第1流道或第2流道的流道切換部。亦即,在從電解槽11延伸的流道的中途設置流道切換部,可透過流道切換部變更使流體流通的流道。In addition, the above-mentioned flow channel has a first flow channel that sends fluid from the inside of the electrolytic cell 11 to the fluorine gas selection section through the first droplet removal section 32, and removes the fluid from the electrolysis without passing through the first droplet removal section 32. The inside of the tank 11 is sent to the second flow path of the fluorine gas selection unit. In addition, this flow channel has a flow channel switching unit that switches the flow channel through which the fluid flows to the first flow channel or the second flow channel in accordance with the energization amount measured by the aforementioned energization amount measuring unit. That is, a flow channel switching section is provided in the middle of the flow channel extending from the electrolytic cell 11, and the flow channel through which the fluid flows can be changed by the flow channel switching section.

此流道切換部在以上述通電量測定部進行了測定的通電量為預先設定的基準值以上的情況下,將流體從電解槽11的內部送至第1流道,比預先設定的基準值小的情況下,將流體從電解槽11的內部送至第2流道。並且,第2流道具有抑制第2流道的霧滴致使的阻塞的阻塞抑制機構。This channel switching unit sends fluid from the inside of the electrolytic cell 11 to the first channel when the energization amount measured by the energization amount measuring unit is greater than or equal to the preset reference value. When it is small, the fluid is sent from the inside of the electrolytic cell 11 to the second flow path. In addition, the second flow path has a clogging suppression mechanism that suppresses clogging caused by droplets of the second flow path.

亦即,以上述通電量測定部進行了測定的通電量為基準值以上的情況下,將電解槽11與氟氣挑選部連結且流體被送至設置有第1霧滴除去部32的第1流道,以上述通電量測定部進行了測定的通電量比基準值小的情況下,將電解槽11與氟氣挑選部連結且流體被送至設置有阻塞抑制機構的第2流道。That is, in the case where the energization amount measured by the energization amount measuring unit is equal to or greater than the reference value, the electrolytic cell 11 is connected to the fluorine gas selection unit and the fluid is sent to the first mist removal unit 32 provided. In the flow path, when the energization amount measured by the energization amount measuring unit is smaller than the reference value, the electrolytic cell 11 is connected to the fluorine gas selection unit and the fluid is sent to the second flow path provided with the clogging suppression mechanism.

第1霧滴除去部32方面,使用例如可將平均粒徑0.4μm以下的霧滴從流體除去的霧滴除去裝置。霧滴除去裝置的種類亦即除去霧滴的方式方面非特別限定者,惟霧滴的平均粒徑小,故可使用例如靜電集塵裝置、文式洗滌器、過濾器作為霧滴除去裝置。For the first mist removing section 32, for example, a mist removing device capable of removing mist having an average particle diameter of 0.4 μm or less from the fluid is used. The type of mist removing device, that is, the method of removing mist is not particularly limited. However, the average particle size of the mist is small, so that, for example, an electrostatic dust collector, a vent scrubber, and a filter can be used as the mist removing device.

上述的霧滴除去裝置之中優選上使用示於圖3的霧滴除去裝置。示於圖3的霧滴除去裝置為使用液體的氟化氫作為循環液的洗滌器式的霧滴除去裝置。示於圖3的霧滴除去裝置可效率佳地將平均粒徑0.4μm以下的霧滴從流體除去。另外,雖使用液體的氟化氫作為循環液,惟優選上為了降低氟氣中的氟化氫的濃度而冷卻循環液,故可透過冷卻溫度的控制從而調整氟氣中的氟化氫的濃度。Among the above-mentioned mist removing devices, the mist removing device shown in FIG. 3 is preferably used. The mist removing device shown in FIG. 3 is a scrubber-type mist removing device using liquid hydrogen fluoride as a circulating liquid. The mist removing device shown in FIG. 3 can efficiently remove mist drops having an average particle diameter of 0.4 μm or less from the fluid. In addition, although liquid hydrogen fluoride is used as the circulating fluid, it is preferable to cool the circulating fluid in order to reduce the concentration of hydrogen fluoride in the fluorine gas. Therefore, the concentration of hydrogen fluoride in the fluorine gas can be adjusted by controlling the cooling temperature.

就示於圖2的氟氣製造裝置,更詳細進行說明。將在電解槽11的陽極室22產生的流體(以下,有時稱為「陽極氣體」)送至外部的第1配管41將電解槽11與第4配管44連通,從兩個電解槽11、11送出的陽極氣體透過第1配管41送至第4配管44而被混合。另外,陽極氣體的主成分為氟氣,副成分為霧滴、氟化氫、四氟化碳、氧氣、水。The fluorine gas production apparatus shown in FIG. 2 will be described in more detail. The first piping 41 that sends the fluid generated in the anode chamber 22 of the electrolytic cell 11 (hereinafter, sometimes referred to as "anode gas") to the outside connects the electrolytic cell 11 and the fourth piping 44, from the two electrolytic cells 11, The anode gas sent by 11 passes through the first pipe 41 and is sent to the fourth pipe 44 to be mixed. In addition, the main component of the anode gas is fluorine gas, and the secondary components are droplets, hydrogen fluoride, carbon tetrafluoride, oxygen, and water.

第4配管44連接於第1霧滴除去部32,陽極氣體透過第4配管44被送至第1霧滴除去部32,故陽極氣體中的霧滴及氟化氫透過第1霧滴除去部32被從陽極氣體除去。被除去霧滴及氟化氫的陽極氣體透過連接於第1霧滴除去部32的第6配管46從第1霧滴除去部32被往未圖示的氟氣挑選部送出。並且,透過氟氣挑選部,氟氣被從陽極氣體挑選而取出。The fourth pipe 44 is connected to the first droplet removal section 32, and the anode gas is sent to the first droplet removal section 32 through the fourth pipe 44, so the droplets and hydrogen fluoride in the anode gas are passed through the first droplet removal section 32. Remove the gas from the anode. The anode gas from which the mist droplets and hydrogen fluoride are removed passes through the sixth pipe 46 connected to the first mist droplet removal section 32 and is sent from the first mist droplet removal section 32 to a fluorine gas selection section not shown. Then, the fluorine gas is selected and taken out from the anode gas through the fluorine gas selection unit.

另外,於第1霧滴除去部32連接著第8配管48,作為循環液之液體的氟化氫透過第8配管48被供應至第1霧滴除去部32。再者,於第1霧滴除去部32連接著第9配管49。第9配管49經由第3配管43連接於電解槽11、11,在第1霧滴除去部32使用於霧滴的除去而含有霧滴的循環液(液體的氟化氫)被從第1霧滴除去部32返回至電解槽11、11。In addition, an eighth pipe 48 is connected to the first mist removing section 32, and hydrogen fluoride as a liquid of the circulating fluid is supplied to the first mist removing section 32 through the eighth pipe 48. In addition, a ninth pipe 49 is connected to the first mist removal unit 32. The ninth pipe 49 is connected to the electrolytic cells 11 and 11 via the third pipe 43, and is used for the removal of mist in the first mist removal part 32, and the circulating fluid (liquid hydrogen fluoride) containing mist is removed from the first mist. The part 32 returns to the electrolytic cells 11,11.

電解槽11的陰極室24方面亦如同陽極室22。亦即,將在電解槽11的陰極室24產生的流體(以下,有時稱為「陰極氣體」)送至外部的第2配管42將電解槽11與第5配管45連通,從兩個電解槽11、11送出的陰極氣體透過第2配管42送至第5配管45而被混合。另外,陰極氣體的主成分為氫氣,副成分為霧滴、氟化氫、水。The cathode chamber 24 of the electrolytic cell 11 is also the same as the anode chamber 22. In other words, the second pipe 42 that sends the fluid generated in the cathode chamber 24 of the electrolytic cell 11 (hereinafter, sometimes referred to as "cathode gas") to the outside connects the electrolytic cell 11 and the fifth pipe 45, from the two electrolytic cells The cathode gas sent from the tanks 11 and 11 passes through the second pipe 42 and is sent to the fifth pipe 45 to be mixed. In addition, the main component of the cathode gas is hydrogen, and the secondary components are droplets, hydrogen fluoride, and water.

陰極氣體含有細的霧滴與5~10體積%的氟化氫,故直接排出至大氣並非優選。為此,第5配管45連接於第2霧滴除去部33,陰極氣體經由第5配管45被送至第2霧滴除去部33,陰極氣體中的霧滴及氟化氫透過第2霧滴除去部33被從陰極氣體除去。被除去霧滴及氟化氫的陰極氣體透過連接於第2霧滴除去部33的第7配管47被從第2霧滴除去部33排出至大氣。第2霧滴除去部33的種類亦即除去霧滴的方式方面非特別限定者,惟可使用在循環液方面使用鹼性水溶液的洗滌器式的霧滴除去裝置。The cathode gas contains fine mist droplets and 5-10% by volume of hydrogen fluoride, so it is not preferable to discharge it directly into the atmosphere. For this reason, the fifth pipe 45 is connected to the second mist removal section 33, the cathode gas is sent to the second mist removal section 33 through the fifth pipe 45, and the mist and hydrogen fluoride in the cathode gas pass through the second mist removal section 33 is removed from the cathode gas. The cathode gas from which the mist and hydrogen fluoride are removed passes through the seventh pipe 47 connected to the second mist removal section 33 and is discharged from the second mist removal section 33 to the atmosphere. The type of the second mist removing unit 33, that is, the method of removing mist is not particularly limited, but a scrubber-type mist removing device using an alkaline aqueous solution for the circulating liquid can be used.

第1配管41、第2配管42、第4配管44、第5配管45的管徑、設置方向(表示配管延伸的方向為例如鉛直方向、水平方向)雖非特別限定者,惟第1配管41及第2配管42優選上以從電解槽11沿著鉛直方向延伸的方式設置,設為流過第1配管41及第2配管42的流體的流速在標準狀態下成為30cm/sec以下的管徑。如此一來,即使包括於流體中的霧滴因自重而落下的情況下,霧滴仍沉降至電解槽11內,故不易發生粉體所致的第1配管41及第2配管42的內部的阻塞。 另外,第4配管44及第5配管45優選上以沿著水平方向延伸的方式設置,設為流過第4配管44及第5配管45的流體的流速變快為第1配管41及第2配管42的情況下的1倍~10倍程度的管徑。Although the pipe diameters and installation directions of the first pipe 41, the second pipe 42, the fourth pipe 44, and the fifth pipe 45 (the direction in which the pipe extends are, for example, the vertical direction or the horizontal direction) are not particularly limited, the first pipe 41 is The second pipe 42 and the second pipe 42 are preferably arranged to extend in the vertical direction from the electrolytic cell 11. The flow velocity of the fluid flowing through the first pipe 41 and the second pipe 42 is set to a pipe diameter of 30 cm/sec or less in the standard state. . In this way, even if the mist included in the fluid falls due to its own weight, the mist still sinks into the electrolytic cell 11. Therefore, it is unlikely that the powder may cause internal damage to the first pipe 41 and the second pipe 42. block. In addition, the fourth pipe 44 and the fifth pipe 45 are preferably provided so as to extend in the horizontal direction, and it is assumed that the flow velocity of the fluid flowing through the fourth pipe 44 and the fifth pipe 45 becomes faster as the first pipe 41 and the second pipe 41 and the second pipe. The pipe diameter is about 1 to 10 times the pipe diameter in the case of the pipe 42.

再者,將陽極氣體送至電解槽11的外部用的第2旁通配管52被與第1配管41個別設置。亦即,第2旁通配管52將電解槽11與第1旁通配管51連通,從兩個電解槽11、11送出的陽極氣體透過第2旁通配管52被送至第1旁通配管51而混合。再者,透過第1旁通配管51,陽極氣體被往未圖示的氟氣挑選部送出。並且,透過氟氣挑選部,氟氣被從陽極氣體挑選而取出。另外,連接於第1旁通配管51的氟氣挑選部與連接於第6配管46的氟氣挑選部可為相同者,亦可為不同者。In addition, the second bypass pipe 52 for sending the anode gas to the outside of the electrolytic cell 11 is provided separately from the first pipe 41. That is, the second bypass pipe 52 communicates the electrolytic cell 11 with the first bypass pipe 51, and the anode gas sent from the two electrolytic cells 11, 11 is sent to the first bypass pipe 51 through the second bypass pipe 52 And mixed. Furthermore, through the first bypass pipe 51, the anode gas is sent to a fluorine gas selection unit (not shown). Then, the fluorine gas is selected and taken out from the anode gas through the fluorine gas selection unit. In addition, the fluorine gas selection part connected to the first bypass pipe 51 and the fluorine gas selection part connected to the sixth pipe 46 may be the same or different.

第2旁通配管52的管徑、設置方向雖非特別限定者,惟第2旁通配管52優選上以從電解槽11沿著鉛直方向延伸的方式設置,設為流過第2旁通配管52的流體的流速在標準狀態下為30cm/sec以下的管徑。Although the pipe diameter and installation direction of the second bypass pipe 52 are not particularly limited, the second bypass pipe 52 is preferably installed so as to extend in the vertical direction from the electrolytic cell 11 and is set to flow through the second bypass pipe. The flow rate of the fluid of 52 is a pipe diameter of 30 cm/sec or less in the standard state.

另外,第1旁通配管51以沿著水平方向延伸的方式設置。並且,第1旁通配管51設為比第4配管44大徑的管徑的配管,第1旁通配管51的管徑為粉體的堆積所致的第1旁通配管51的阻塞不易發生的大小。第1旁通配管51為比第4配管44大徑的管徑的配管,從而構成阻塞抑制機構。 第1旁通配管51的管徑優選上為第4配管44的超過1.0倍3.2倍以下,更優選上1.05倍以上1.5倍以下。亦即,第1旁通配管51的流道剖面積優選上為第4配管44的10倍以下。In addition, the first bypass pipe 51 is provided so as to extend in the horizontal direction. In addition, the first bypass pipe 51 is a pipe having a larger diameter than the fourth pipe 44, and the pipe diameter of the first bypass pipe 51 is such that clogging of the first bypass pipe 51 due to the accumulation of powder is unlikely to occur. the size of. The first bypass pipe 51 is a pipe having a larger diameter than the fourth pipe 44 and constitutes a clogging suppression mechanism. The diameter of the first bypass pipe 51 is preferably more than 1.0 times and 3.2 times or less than that of the fourth pipe 44, and more preferably 1.05 times or more and 1.5 times or less. That is, the cross-sectional area of the flow passage of the first bypass pipe 51 is preferably 10 times or less that of the fourth pipe 44.

從以上的說明可得知,由第1配管41及第4配管44構成上述的第1流道,由第1旁通配管51及第2旁通配管52構成上述的第2流道。並且,在構成第2流道的第1旁通配管51設置阻塞抑制機構。As can be understood from the above description, the first pipe 41 and the fourth pipe 44 constitute the above-mentioned first flow passage, and the first bypass pipe 51 and the second bypass pipe 52 constitute the above-mentioned second flow passage. In addition, a clogging suppression mechanism is provided in the first bypass pipe 51 constituting the second flow path.

接著,就流道切換部進行說明。於第1配管41分別設置第1配管閥61。並且,可透過將第1配管閥61切換為開狀態或閉狀態,從而控制從電解槽11往第1霧滴除去部32的陽極氣體的供氣的可否。另外,於第2旁通配管52分別設置旁通閥62。並且,可透過將旁通閥62切換為開狀態或閉狀態,從而控制從電解槽11往第1旁通配管51的陽極氣體的供氣的可否。Next, the flow channel switching unit will be described. The first piping 41 is provided with a first piping valve 61, respectively. In addition, by switching the first piping valve 61 to the open state or the closed state, it is possible to control the availability of anode gas supply from the electrolytic cell 11 to the first mist removal unit 32. In addition, a bypass valve 62 is provided in the second bypass pipe 52, respectively. In addition, by switching the bypass valve 62 to the open state or the closed state, it is possible to control whether the anode gas can be supplied from the electrolytic cell 11 to the first bypass pipe 51.

再者,電解槽11與第1霧滴除去部32之間,詳述時在為第4配管44之中間部且比與第1配管41的連結部靠下游側,設置第1平均粒徑測定部31。並且,透過第1平均粒徑測定部31測定包括於流過第4配管44的陽極氣體中的霧滴的平均粒徑。另外,分析包括於測定霧滴的平均粒徑後的陽極氣體中的氟氣與氮氣,使得可測定氟氣之製造中的電流效率。In addition, between the electrolytic cell 11 and the first mist removal part 32, in the middle part of the fourth pipe 44 and downstream of the connection part with the first pipe 41, a first average particle size measurement is provided.部31. Then, the average particle diameter of the mist included in the anode gas flowing through the fourth pipe 44 is measured by the first average particle diameter measuring unit 31. In addition, the fluorine gas and nitrogen gas included in the anode gas after measuring the average particle diameter of the mist droplets are analyzed, so that the current efficiency in the production of the fluorine gas can be measured.

另外,在第1旁通配管51之中間部且比與第2旁通配管52的連結部靠下游側亦設置同樣的第2平均粒徑測定部34,透過第2平均粒徑測定部34測定包括於流過第1旁通配管51的陽極氣體中的霧滴的平均粒徑。其中,示於圖2的氟氣製造裝置亦可不具備第1平均粒徑測定部31及第2平均粒徑測定部34。In addition, the same second average particle size measuring part 34 is also provided in the middle part of the first bypass pipe 51 and downstream of the connecting part with the second bypass pipe 52, and the same second average particle size measuring part 34 is measured through the second average particle size measuring part 34. The average particle diameter of the mist droplets included in the anode gas flowing through the first bypass pipe 51. However, the fluorine gas production apparatus shown in FIG. 2 may not include the first average particle diameter measuring unit 31 and the second average particle diameter measuring unit 34.

再者,示於圖2的氟氣製造裝置如前述般具備通電量測定部。通電量測定部的設置處不特別限定,例如雖可設置於電解槽11,惟只要可測定為了電解對陽極13及陰極15供應的電流與從開始電解起算的總電解時間,算出電解時的積算的通電量,則亦可設置於氟氣製造裝置的任一處。此外,構成通電量測定部的電流計、計時裝置及計算裝置可為一體,亦可個別為不同形體。In addition, the fluorine gas production apparatus shown in FIG. 2 includes a energization amount measuring unit as described above. The location of the energization measuring unit is not particularly limited. For example, it can be installed in the electrolytic cell 11, but as long as it can measure the current supplied to the anode 13 and the cathode 15 for electrolysis and the total electrolysis time since the start of electrolysis, and calculate the total amount of electrolysis. The amount of energization can also be set anywhere in the fluorine gas production device. In addition, the ammeter, the timing device, and the calculation device that constitute the energization amount measurement unit may be integrated, or may be of different shapes individually.

透過通電量測定部測定電解時的積算的通電量,該測定結果比預先設定的基準值小的情況下,使旁通閥62為開狀態,將陽極氣體從電解槽11送往第1旁通配管51,同時使第1配管閥61為閉狀態,陽極氣體不被送往第4配管44及第1霧滴除去部32。亦即,將陽極氣體送至第2流道。The energization amount measurement unit measures the cumulative energization amount during electrolysis. If the measurement result is less than the preset reference value, the bypass valve 62 is opened to send the anode gas from the electrolytic cell 11 to the first bypass. In the piping 51, the first piping valve 61 is closed at the same time, so that the anode gas is not sent to the fourth piping 44 and the first mist removal unit 32. That is, the anode gas is sent to the second flow channel.

另一方面,測定結果為預先設定的基準值以上的情況下,使第1配管閥61為開狀態,將陽極氣體送往第4配管44及第1霧滴除去部32,同時使旁通閥62為閉狀態,使陽極氣體不被從電解槽11送往第1旁通配管51。亦即,將陽極氣體送至第1流道。 從以上的說明可得知,由第1配管閥61及旁通閥62構成上述的流道切換部。 如上述般,依電解時的積算的通電量一面切換流道一面進行氟氣製造裝置的運轉,使得可一面抑制霧滴致使的配管、閥的阻塞一面圓滑地進行連續運轉。因此,依示於圖2的氟氣製造裝置時,可節約地製造氟氣。On the other hand, when the measurement result is greater than or equal to the preset reference value, the first piping valve 61 is opened, the anode gas is sent to the fourth piping 44 and the first droplet removal part 32, and the bypass valve 62 is in the closed state so that anode gas is not sent from the electrolytic cell 11 to the first bypass pipe 51. That is, the anode gas is sent to the first flow channel. As can be understood from the above description, the first piping valve 61 and the bypass valve 62 constitute the above-mentioned flow path switching section. As described above, the fluorine gas production apparatus is operated while switching the flow channel according to the accumulated energization amount during electrolysis, so that the smooth continuous operation can be performed while suppressing clogging of the pipes and valves caused by mist droplets. Therefore, when the fluorine gas production apparatus shown in FIG. 2 is followed, fluorine gas can be produced economically.

例如,霧滴除去部方面,準備複數個設置有過濾器的配管,一面酌情切換,一面交換過濾器,一面實施電解亦無妨。 再者,可根據電解時的積算的通電量的測定而判斷應頻繁進行過濾器的交換的期間與不需頻繁進行過濾器的交換的期間。並且,根據上述判斷而適切地調整使流體流通的配管的切換頻率時,可效率佳地持續進行氟氣製造裝置的運轉。For example, in the mist removal part, it is okay to prepare a plurality of piping provided with filters, switch them as appropriate, exchange the filters, and perform electrolysis. Furthermore, it is possible to determine the period during which the filter should be frequently exchanged and the period during which the filter should not be frequently exchanged based on the measurement of the accumulated energization amount during the electrolysis. In addition, when the switching frequency of the pipe through which the fluid flows is appropriately adjusted based on the above judgment, the operation of the fluorine gas production apparatus can be continued efficiently.

接著,就示於圖2的氟氣製造裝置的變形例進行說明。 [第1變形例] 就第1變形例,一面參照圖4一面進行說明。在示於圖2的氟氣製造裝置,相對於第2旁通配管52將電解槽11與第1旁通配管51連結,在示於圖4的第1變形例的氟氣製造裝置,第2旁通配管52將第1配管41與第1旁通配管51連結。第1變形例的氟氣製造裝置的構成除上述的點以外與圖2的氟氣製造裝置大致上相同,故相同的部分的說明省略。Next, a modification example of the fluorine gas production apparatus shown in FIG. 2 will be described. [First Modification] The first modification will be described with reference to FIG. 4. In the fluorine gas production apparatus shown in FIG. 2, the electrolytic cell 11 and the first bypass pipe 51 are connected to the second bypass pipe 52. In the fluorine gas production apparatus of the first modification shown in FIG. 4, the second The bypass pipe 52 connects the first pipe 41 and the first bypass pipe 51. The configuration of the fluorine gas production apparatus of the first modification example is substantially the same as that of the fluorine gas production apparatus of FIG. 2 except for the above-mentioned points, so the description of the same parts is omitted.

[第2變形例] 就第2變形例,一面參照圖5一面進行說明。示於圖5的第2變形例的氟氣製造裝置為具備一座電解槽11之例。第1平均粒徑測定部31設於第1配管41而非第4配管44,且設於第1配管閥61之上游側。另外,不具有第2旁通配管52,第1旁通配管51不經由第2旁通配管52而直接連接於電解槽11。[Second Modification] The second modification will be described with reference to FIG. 5. The fluorine gas production apparatus of the second modification example shown in FIG. 5 is an example provided with one electrolytic cell 11. The first average particle size measuring unit 31 is provided in the first pipe 41 instead of the fourth pipe 44 and is provided on the upstream side of the first pipe valve 61. In addition, the second bypass pipe 52 is not provided, and the first bypass pipe 51 is directly connected to the electrolytic cell 11 without passing through the second bypass pipe 52.

並且,第1旁通配管51比起第4配管44為大徑,故作用為阻塞抑制機構。再者,例如可透過在第1旁通配管51的下游側末端設置霧滴積累用的空間,從而進一步使阻塞抑制的功效增大。此霧滴積累用的空間方面,舉例如將第1旁通配管51的下游側末端部分形成於比設置方向中央部分大的管徑(設置方向中央部分之例如4倍以上的管徑)而成的空間、將第1旁通配管51的下游側末端部分形成為如容器的形狀而成的空間,可透過霧滴積累用的空間從而抑制第1旁通配管51的阻塞。此為以因流道剖面積大而生的阻塞防止的功效與利用了氣體流動的線速度的降低所致的霧滴的重力落下的阻塞防止的功效為目的者。 再者,旁通閥62設於將第1旁通配管51與未圖示氟氣挑選部進行連接的第3旁通配管53。第2變形例的氟氣製造裝置的構成除上述的點以外與圖2的氟氣製造裝置大致上相同,故相同的部分的說明省略。In addition, since the first bypass pipe 51 has a larger diameter than the fourth pipe 44, it functions as a clogging suppression mechanism. Furthermore, for example, by providing a space for mist accumulation at the downstream end of the first bypass pipe 51, the effect of suppressing clogging can be further increased. As for the space for the accumulation of mist droplets, for example, the downstream end portion of the first bypass pipe 51 is formed in a pipe diameter larger than the central portion in the installation direction (for example, the pipe diameter of the central portion in the installation direction is 4 times or more). The space formed by forming the downstream end portion of the first bypass pipe 51 into a container-shaped space can pass through the space for mist accumulation, thereby suppressing clogging of the first bypass pipe 51. This is for the purpose of the blocking prevention effect due to the large cross-sectional area of the flow channel and the blocking prevention effect using the gravity drop of the mist due to the decrease in the linear velocity of the gas flow. In addition, the bypass valve 62 is provided in the third bypass pipe 53 that connects the first bypass pipe 51 and the fluorine gas selection unit not shown. The configuration of the fluorine gas production apparatus of the second modification example is substantially the same as that of the fluorine gas production apparatus of FIG. 2 except for the above-mentioned points, so the description of the same parts is omitted.

[第3變形例] 就第3變形例,一面參照圖6一面進行說明。於第3變形例的氟氣製造裝置,第1平均粒徑測定部31設於電解槽11,電解槽11的內部的陽極氣體直接導入至第1平均粒徑測定部31,被進行霧滴的平均粒徑的測定。第3變形例的氟氣製造裝置不具有第2平均粒徑測定部34。第3變形例的氟氣製造裝置的構成除上述的點以外與第2變形例的氟氣製造裝置大致上相同,故相同的部分的說明省略。[3rd Modification] The third modification will be described with reference to FIG. 6. In the fluorine gas production apparatus of the third modification example, the first average particle size measuring section 31 is provided in the electrolytic cell 11, and the anode gas inside the electrolytic cell 11 is directly introduced into the first average particle size measuring section 31, and the mist is removed. Determination of average particle size. The fluorine gas production apparatus of the third modification example does not include the second average particle size measuring unit 34. The configuration of the fluorine gas production apparatus of the third modification example is substantially the same as that of the fluorine gas production apparatus of the second modification example except for the above-mentioned points, so the description of the same parts is omitted.

[第4變形例] 就第4變形例,一面參照圖7一面進行說明。第4變形例的氟氣製造裝置為相對於示於圖5的第2變形例在阻塞抑制機構方面不同之例。於第2變形例的氟氣製造裝置,第1旁通配管51以沿著水平方向延伸的方式設置,於第4變形例的氟氣製造裝置,第1旁通配管51相對於水平方向傾斜,且延伸於從上游側朝下游側下降的方向。透過此傾斜從而抑制粉體堆積於第1旁通配管51的內部。此傾斜越大的,抑制粉體的堆積的作用越大。[4th Modification] The fourth modification will be described with reference to FIG. 7. The fluorine gas production apparatus of the fourth modification example is a different example from the second modification example shown in FIG. 5 in the clogging suppression mechanism. In the fluorine gas production apparatus of the second modification example, the first bypass pipe 51 is provided so as to extend in the horizontal direction. In the fluorine gas production apparatus of the fourth modification example, the first bypass pipe 51 is inclined with respect to the horizontal direction. And it extends in the descending direction from the upstream side to the downstream side. Due to this inclination, the accumulation of powder in the first bypass pipe 51 is suppressed. The greater the inclination, the greater the effect of suppressing the accumulation of powder.

第1旁通配管51的傾斜角度,在從水平面的俯角比90度小的範圍內優選上為30度以上,40度以上60度以下較優選。在可能會發生第1旁通配管51的阻塞時,只要鎚擊傾斜的第1旁通配管51,第1旁通配管51的內部的堆積物即容易移動,故可避免阻塞。 第4變形例的氟氣製造裝置的構成除上述的點以外與第2變形例的氟氣製造裝置大致上相同,故相同的部分的說明省略。The inclination angle of the first bypass pipe 51 is preferably 30 degrees or more within a range where the depression angle from the horizontal plane is smaller than 90 degrees, and more preferably 40 degrees or more and 60 degrees or less. When clogging of the first bypass pipe 51 may occur, by hammering the inclined first bypass pipe 51, the deposits in the first bypass pipe 51 can easily move, and the clogging can be avoided. The configuration of the fluorine gas production apparatus of the fourth modification example is substantially the same as that of the fluorine gas production apparatus of the second modification example except for the above-mentioned points, so the description of the same parts is omitted.

[第5變形例] 就第5變形例,一面參照圖8一面進行說明。第5變形例的氟氣製造裝置為相對於示於圖6的第3變形例在阻塞抑制機構方面不同之例。於第3變形例的氟氣製造裝置,第1旁通配管51以沿著水平方向延伸的方式設置,於第5變形例的氟氣製造裝置,第1旁通配管51相對於水平方向傾斜,且延伸於從上游側朝下游側下降的方向。透過此傾斜從而抑制粉體堆積於第1旁通配管51的內部。第1旁通配管51的優選傾斜角度如同上述第4變形例的情況。第5變形例的氟氣製造裝置的構成除上述的點以外與第3變形例的氟氣製造裝置大致上相同,故相同的部分的說明省略。[Fifth Modification] The fifth modification will be described with reference to FIG. 8. The fluorine gas production apparatus of the fifth modification is an example that is different from the third modification shown in FIG. 6 in the clogging suppression mechanism. In the fluorine gas production apparatus of the third modification, the first bypass pipe 51 is provided so as to extend in the horizontal direction. In the fluorine gas production device of the fifth modification, the first bypass pipe 51 is inclined with respect to the horizontal direction. And it extends in the descending direction from the upstream side to the downstream side. Due to this inclination, the accumulation of powder in the first bypass pipe 51 is suppressed. The preferable inclination angle of the first bypass pipe 51 is the same as in the case of the fourth modification described above. The configuration of the fluorine gas production apparatus of the fifth modification example is substantially the same as that of the fluorine gas production apparatus of the third modification example except for the above-mentioned points, so the description of the same parts is omitted.

[第6變形例] 就第6變形例,一面參照圖9一面進行說明。第6變形例的氟氣製造裝置為相對於示於圖5的第2變形例在電解槽11的構造方面不同之例。電解槽11具有一個陽極13與兩個陰極15、15,且透過包圍一個陽極13的筒狀的阻隔壁17而區劃為一個陽極室22與一個陰極室24。陽極室22被延伸至比電解槽11之上表面靠上方而形成,第1旁通配管51連接於電解槽11的陽極室22之上端部分。第6變形例的氟氣製造裝置的構成除上述的點以外與第2變形例的氟氣製造裝置大致上相同,故相同的部分的說明省略。[6th Modification] The sixth modification will be described with reference to FIG. 9. The fluorine gas production apparatus of the sixth modification example is a different example in the structure of the electrolytic cell 11 from the second modification example shown in FIG. 5. The electrolytic cell 11 has an anode 13 and two cathodes 15 and 15, and is partitioned into an anode compartment 22 and a cathode compartment 24 through a cylindrical barrier wall 17 surrounding one anode 13. The anode chamber 22 is formed to extend above the upper surface of the electrolytic cell 11, and the first bypass pipe 51 is connected to the upper end portion of the anode chamber 22 of the electrolytic cell 11. The configuration of the fluorine gas production apparatus of the sixth modification example is substantially the same as that of the fluorine gas production apparatus of the second modification example except for the above-mentioned points, so the description of the same parts is omitted.

[第7變形例] 就第7變形例,一面參照圖10一面進行說明。第7變形例的氟氣製造裝置為相對於示於圖9的第6變形例在第1旁通配管51的構造方面不同之例。亦即,於第7變形例的氟氣製造裝置,第1旁通配管51如同第4變形例及第5變形例般相對於水平方向傾斜,且延伸於從上游側朝下游側下降的方向。第1旁通配管51的優選傾斜角度如同上述第4變形例的情況。第7變形例的氟氣製造裝置的構成除上述的點以外與第6變形例的氟氣製造裝置大致上相同,故相同的部分的說明省略。[7th Modification] The seventh modification will be described with reference to FIG. 10. The fluorine gas production apparatus of the seventh modification is an example that is different from the sixth modification shown in FIG. 9 in the structure of the first bypass pipe 51. That is, in the fluorine gas production apparatus of the seventh modification, the first bypass pipe 51 is inclined with respect to the horizontal direction as in the fourth modification and the fifth modification, and extends in a direction descending from the upstream side to the downstream side. The preferable inclination angle of the first bypass pipe 51 is the same as in the case of the fourth modification described above. The configuration of the fluorine gas production device of the seventh modification example is substantially the same as that of the fluorine gas production device of the sixth modification example except for the above-mentioned points, so the description of the same parts is omitted.

[第8變形例] 就第8變形例,一面參照圖11一面進行說明。第8變形例的氟氣製造裝置為相對於示於圖5的第2變形例在阻塞抑制機構方面不同之例。於第8變形例的氟氣製造裝置,構成阻塞抑制機構的旋轉螺桿71設置於第1旁通配管51的內部。此旋轉螺桿71使其旋轉軸相對於第1旁通配管51的長邊方向為平行而設置。[Eighth Modification] The eighth modification will be described with reference to FIG. 11. The fluorine gas production apparatus of the eighth modification is an example that is different from the second modification shown in FIG. 5 in the clogging suppression mechanism. In the fluorine gas production apparatus of the eighth modification, the rotary screw 71 constituting the clogging suppression mechanism is provided inside the first bypass pipe 51. This rotating screw 71 is arranged such that its rotating shaft is parallel to the longitudinal direction of the first bypass pipe 51.

並且,可透過馬達72使旋轉螺桿71旋轉從而將堆積於第1旁通配管51的內部的霧滴送至上游側或下游側。據此,抑制粉體堆積於第1旁通配管51的內部。第8變形例的氟氣製造裝置的構成除上述的點以外與第2變形例的氟氣製造裝置大致上相同,故相同的部分的說明省略。In addition, the motor 72 can rotate the rotary screw 71 to send the mist accumulated in the first bypass pipe 51 to the upstream side or the downstream side. According to this, the accumulation of powder in the first bypass pipe 51 is suppressed. The configuration of the fluorine gas production apparatus of the eighth modification example is substantially the same as that of the fluorine gas production apparatus of the second modification example except for the above-mentioned points, so the description of the same parts is omitted.

[第9變形例] 就第9變形例,一面參照圖12一面進行說明。第9變形例的氟氣製造裝置為相對於示於圖5的第2變形例在阻塞抑制機構方面不同之例。於第9變形例的氟氣製造裝置,構成阻塞抑制機構的氣流產生裝置73設置於第1旁通配管51。氣流產生裝置73從第1旁通配管51之上游側朝下游側發送氣流(例如氮氣的氣流),使流過第1旁通配管51內的陽極氣體的流速上升。據此,抑制粉體堆積於第1旁通配管51的內部。[Ninth Modification] The ninth modification will be described with reference to FIG. 12. The fluorine gas production apparatus of the ninth modification is an example different from the second modification shown in FIG. 5 in the clogging suppression mechanism. In the fluorine gas production apparatus of the ninth modification, the air flow generating device 73 constituting the clogging suppression mechanism is provided in the first bypass pipe 51. The gas flow generator 73 sends a gas flow (for example, a gas flow of nitrogen) from the upstream side of the first bypass pipe 51 to the downstream side, and increases the flow velocity of the anode gas flowing in the first bypass pipe 51. According to this, the accumulation of powder in the first bypass pipe 51 is suppressed.

此時的流過第1旁通配管51內的陽極氣體的優選流速為1m/sec以上10m/sec以下。雖亦可使流速比10m/sec大,惟該情況下在第1旁通配管51內的配管阻力所致的壓力損失變大,電解槽11的陽極室22內的壓力變高。陽極室22內的壓力與陰極室24內的壓力優選上為大致上相同程度,陽極室22內的壓力與陰極室24內的壓力之差變過大時,陽極氣體超過阻隔壁17而流入陰極室24,發生氟氣與氫氣的反應,有時會對氟氣的發生造成障礙。 第9變形例的氟氣製造裝置的構成除上述的點以外與第2變形例的氟氣製造裝置大致上相同,故相同的部分的說明省略。The preferred flow velocity of the anode gas flowing in the first bypass pipe 51 at this time is 1 m/sec or more and 10 m/sec or less. Although the flow velocity may be greater than 10 m/sec, in this case, the pressure loss due to the pipe resistance in the first bypass pipe 51 increases, and the pressure in the anode chamber 22 of the electrolytic cell 11 increases. The pressure in the anode chamber 22 and the pressure in the cathode chamber 24 are preferably approximately the same. When the difference between the pressure in the anode chamber 22 and the pressure in the cathode chamber 24 becomes too large, the anode gas exceeds the barrier wall 17 and flows into the cathode chamber. 24. The reaction between fluorine gas and hydrogen gas may sometimes cause obstacles to the generation of fluorine gas. The configuration of the fluorine gas production apparatus of the ninth modification example is substantially the same as that of the fluorine gas production apparatus of the second modification example except for the above-mentioned points, so the description of the same parts is omitted.

[第10變形例] 就第10變形例,一面參照圖13一面進行說明。於第10變形例的氟氣製造裝置,第1平均粒徑測定部31設於電解槽11,電解槽11的內部的陽極氣體直接導入至第1平均粒徑測定部31,被進行霧滴的平均粒徑的測定。第10變形例的氟氣製造裝置不具有第2平均粒徑測定部34。第10變形例的氟氣製造裝置的構成在上述的點以外與示於圖12的第9變形例的氟氣製造裝置大致上相同,故相同的部分的說明省略。 [實施例][Tenth Modification] The tenth modification will be described with reference to FIG. 13. In the fluorine gas production apparatus of the tenth modification, the first average particle size measuring unit 31 is provided in the electrolytic cell 11, and the anode gas inside the electrolytic cell 11 is directly introduced into the first average particle size measuring unit 31, and the mist Determination of average particle size. The fluorine gas production apparatus of the tenth modification does not include the second average particle size measuring unit 34. The configuration of the fluorine gas production apparatus of the tenth modification example is substantially the same as that of the fluorine gas production apparatus of the ninth modification example shown in FIG. 12 except for the above-mentioned points, so the description of the same parts is omitted. [Example]

在以下示出實施例及比較例,更具體說明本發明。 [參考例1] 將電解液進行電解,製造出氟氣。電解液方面,使用氟化氫434kg與氟化鉀630kg的混合熔鹽(560L)。陽極方面使用SGL Carbon公司製的非晶碳電極(橫30cm、縱45cm、厚7cm),將16個陽極設置於電解槽。另外,陰極方面使用莫內爾合金(商標)製的沖壓板,設置於電解槽。2個陰極相向於1個陽極,1個陽極之中相向於陰極的部分的合計的面積為1736cm2Examples and comparative examples are shown below to describe the present invention more specifically. [Reference Example 1] The electrolytic solution was electrolyzed to produce fluorine gas. For the electrolyte, a mixed molten salt (560L) of 434kg of hydrogen fluoride and 630kg of potassium fluoride was used. For the anode, an amorphous carbon electrode (30 cm wide, 45 cm long, 7 cm thick) manufactured by SGL Carbon was used, and 16 anodes were installed in the electrolytic cell. In addition, a stamped plate made of Monel alloy (trademark) was used for the cathode, and it was installed in the electrolytic cell. Two cathodes face one anode, and the total area of the part of one anode facing the cathode is 1736 cm 2 .

電解溫度控制於85~95℃。首先,使電解液溫度為85℃,以電流密度0.036A/cm2 施加1000A的直流電流,開始電解。此時的電解液中的水分濃度為1.0質量%。另外,水分濃度為透過Karl Fischer分析法而測定者。 開始在上述的條件的電解,在從緊接著電解開始後積算的通電量到達10kAh前的期間,在陽極室內的陽極的附近觀測到小的塞音。此塞音應為因產生的氟氣與電解液中的水分發生反應而產生者。The electrolysis temperature is controlled at 85~95℃. First, the temperature of the electrolyte was set to 85°C, and a direct current of 1000 A was applied at a current density of 0.036 A/cm 2 to start electrolysis. The water concentration in the electrolyte at this time was 1.0% by mass. In addition, the water concentration is measured by Karl Fischer analysis method. The electrolysis under the above-mentioned conditions was started, and a small plug noise was observed in the vicinity of the anode in the anode chamber during the period from immediately after the start of the electrolysis before the accumulated energization amount reached 10 kAh. This stop sound should be caused by the reaction between the generated fluorine gas and the moisture in the electrolyte.

此狀態下將在陽極產生的流體從電解槽的陽極室送出至外部而進行提取,分析包括於流體中的霧滴。其結果,在陽極產生的流體每1L含有5.0~9.0mg(霧滴的比重假定為1.0g/mL而算出,以下亦同)的粉體,此粉體的平均粒徑為1.0~2.0μm。將此粉體以光學顯微鏡進行觀察的結果,主要觀察到具有如將球的內部挖空的形狀之粉體。另外,此時的氟氣生成的電流效率為0~15%。In this state, the fluid generated at the anode is sent from the anode chamber of the electrolytic cell to the outside for extraction, and the mist included in the fluid is analyzed. As a result, the fluid generated at the anode contains 5.0 to 9.0 mg of powder per 1 L (the specific gravity of the mist is calculated assuming 1.0 g/mL, and the same applies hereinafter), and the average particle size of the powder is 1.0 to 2.0 μm. As a result of observing this powder with an optical microscope, the powder having a shape that hollowed out the inside of a ball was mainly observed. In addition, the current efficiency of fluorine gas generation at this time is 0 to 15%.

再者,持續電解直到積算的通電量到達30kAh為止時,在陽極室的內部產生塞音的頻率逐漸減低。此時的電解液中的水分濃度為0.7質量%。另外,此狀態下將在陽極產生的流體從電解槽的陽極室送出至外部而進行提取,分析包括於流體中的霧滴。其結果,在陽極產生的流體每1L含有0.4~1.0mg的霧滴,此霧滴的平均粒徑為0.5~0.7μm。再者,此時的氟氣生成的電流效率為15~55%。使電解開始至迄今為止的電解的階段為「階段(1)」。Furthermore, when the electrolysis is continued until the accumulated energization amount reaches 30 kAh, the frequency of the plug sound generated in the anode chamber gradually decreases. The water concentration in the electrolyte at this time was 0.7% by mass. In addition, in this state, the fluid generated at the anode is sent from the anode chamber of the electrolytic cell to the outside for extraction, and the mist included in the fluid is analyzed. As a result, the fluid generated at the anode contains 0.4 to 1.0 mg of mist droplets per 1 L, and the average particle size of the mist droplets is 0.5 to 0.7 μm. Furthermore, the current efficiency of fluorine gas generation at this time is 15 to 55%. The stage from the start of electrolysis to the previous electrolysis is referred to as "stage (1)".

再者,接續階段(1)繼續電解液的電解。此時,氟化氫被消耗而電解液的水平降低,故從氟化氫槽對電解槽酌情補給氟化氫。補給的氟化氫中的水分濃度為500質量ppm以下。 再者,繼續電解而積算的通電量超過60kAh時,在陽極產生的流體中含有的霧滴的平均粒徑為0.36μm(亦即0.4μm以下)。在此時點,在陽極室的內部完全未產生塞音。另外,此時的電解液中的水分濃度為0.2質量%(亦即0.3質量%以下)。再者,此時的氟氣生成的電流效率為65%。使階段(1)的結束時點至迄今為止的電解的階段為「階段(2)」。Furthermore, the subsequent stage (1) continues the electrolysis of the electrolyte. At this time, the hydrogen fluoride is consumed and the level of the electrolyte is reduced, so the hydrogen fluoride is supplied from the hydrogen fluoride tank to the electrolytic tank as appropriate. The water concentration in the supplied hydrogen fluoride is 500 mass ppm or less. Furthermore, when the accumulated energization amount exceeds 60 kAh by continuing the electrolysis, the average particle diameter of the mist droplets contained in the fluid generated at the anode is 0.36 μm (that is, 0.4 μm or less). At this point, no plosive sound was generated in the anode chamber at all. In addition, the water concentration in the electrolyte solution at this time is 0.2% by mass (that is, 0.3% by mass or less). Furthermore, the current efficiency of fluorine gas generation at this time is 65%. The end point of stage (1) to the stage of electrolysis so far is referred to as "stage (2)".

再者,將電流增加至3500A,將電流密度增加至0.126A/cm2 ,接續階段(2)繼續電解液的電解。此狀態下將在陽極產生的流體從電解槽的陽極室送出至外部而進行提取,分析包括於流體中的霧滴。其結果,在陽極產生的流體每1L含有0.03~0.06mg的粉體,此粉體的平均粒徑為約0.2μm(0.15~0.25μm),粒徑具有約0.1~0.5μm的分布。於圖14,示出此粉體的粒徑分布的測定結果。再者,此時的氟氣生成的電流效率為94%。使階段(2)的結束時點至迄今為止的電解的階段為「穩定階段」。Furthermore, the current is increased to 3500A, the current density is increased to 0.126A/cm 2 , and the subsequent stage (2) continues the electrolysis of the electrolyte. In this state, the fluid generated at the anode is sent from the anode chamber of the electrolytic cell to the outside for extraction, and the mist included in the fluid is analyzed. As a result, the fluid generated at the anode contains 0.03 to 0.06 mg of powder per 1 L. The average particle size of the powder is about 0.2 μm (0.15 to 0.25 μm), and the particle size has a distribution of about 0.1 to 0.5 μm. Fig. 14 shows the measurement result of the particle size distribution of this powder. Furthermore, the current efficiency of fluorine gas generation at this time was 94%. The end of stage (2) to the stage of electrolysis up to now is the "stable stage".

將如上述般進行的參考例1的電解的內容總結示於表1。於表1,併同電流、電解經過時間、通電量、電解液中的水分濃度、含有於在陽極產生的流體(表1中記為「陽極氣體」)1L中的霧滴的質量、霧滴的平均粒徑、電流效率,亦示出在陽極產生的流體(含有氟氣、氧氣、霧滴)的量、在陽極產生的霧滴的量、塞音的強度、及在陰極生成的流體中的水分濃度(表1中記為「陰極氣體中的水分濃度」)。Table 1 summarizes the contents of the electrolysis of Reference Example 1 performed as described above. In Table 1, the same current, electrolysis elapsed time, energization amount, water concentration in the electrolyte, and the mass of droplets contained in the fluid generated at the anode (denoted as "anode gas" in Table 1) 1L, droplets The average particle size and current efficiency also show the amount of fluid (containing fluorine gas, oxygen, and droplets) generated at the anode, the amount of droplets generated at the anode, the intensity of the stop sound, and the amount of fluid generated at the cathode Water concentration (denoted as "water concentration in cathode gas" in Table 1).

另外,將就霧滴的平均粒徑與在陽極產生的霧滴的量的關係進行繪示的圖形示於圖15。從圖15的圖形,得知在霧滴的平均粒徑與在陽極產生的霧滴的量之間存在相關性。霧滴的產生量越多越容易發生配管、閥的阻塞,另外,產生平均粒徑比0.4μm大的霧滴的情況下,霧滴的產生量增加,再者因重力的作用而沉積,故可謂示於圖15的圖形的關係表示霧滴的平均粒徑與配管、閥的阻塞的發生容易度的相關性。 再者,將顯示霧滴的平均粒徑與積算的通電量的關係之圖形示於圖16。霧滴的平均粒徑越大越容易引起配管、閥的阻塞,故可謂示於圖16的圖形的關係表示積算的通電量與配管、閥的阻塞的發生容易度的相關性。In addition, a graph plotting the relationship between the average particle size of the mist droplets and the amount of mist droplets generated at the anode is shown in FIG. 15. From the graph of FIG. 15, it is known that there is a correlation between the average particle size of the mist droplets and the amount of mist droplets generated at the anode. The larger the amount of mist droplets, the more likely it is that pipes and valves will be clogged. In addition, when mist droplets with an average particle size larger than 0.4 μm are generated, the amount of mist droplets generated will increase, and the amount of mist will be deposited due to gravity. It can be said that the relationship of the graph shown in FIG. 15 shows the correlation between the average particle size of the mist droplets and the ease of occurrence of clogging of piping and valves. In addition, a graph showing the relationship between the average particle size of the mist droplets and the accumulated energization amount is shown in FIG. 16. The larger the average particle diameter of the mist droplets, the more likely it is to cause clogging of piping and valves. Therefore, the relationship of the graph shown in FIG. 16 can be said to indicate the correlation between the cumulative amount of energization and the ease of occurrence of clogging of piping and valves.

Figure 02_image001
Figure 02_image001

[實施例1] 使用示於圖2的氟氣製造裝置進行如同參考例1的電解。於階段(1)的電解,使在陽極產生的流體經由第2旁通配管、旁通閥、第1旁通配管而流通。階段(1)的電解結束後暫時停止電解,進行氟氣製造裝置的內部的檢查。其結果,僅管在第1旁通配管內霧滴堆積,惟使配管的直徑為粗故配管的阻塞未發生。[Example 1] The electrolysis as in Reference Example 1 was performed using the fluorine gas production apparatus shown in FIG. 2. In the electrolysis in the stage (1), the fluid generated at the anode is circulated through the second bypass pipe, the bypass valve, and the first bypass pipe. After the electrolysis of stage (1) is completed, the electrolysis is temporarily stopped, and the inside of the fluorine gas production apparatus is inspected. As a result, only the pipe was deposited with mist in the first bypass pipe, but the pipe diameter was made thick, so that the pipe clogging did not occur.

變成霧滴的平均粒徑為基準值的0.4μm以下(積算的通電量為基準值的60kAh)之階段(2)的電解,故使在陽極產生的流體經由第1配管、第1配管閥、第4配管、第1霧滴除去部而流通。於第1配管、第1配管閥、第4配管未發生霧滴的堆積、阻塞,在陽極產生的流體供應至第1霧滴除去部,故霧滴於第1霧滴除去部被除去。第1霧滴除去部為噴出液體的氟化氫而除去霧滴等的微粒子的洗滌器式的除去部,霧滴的除去率為98%以上。The average particle size of the droplets becomes 0.4μm or less (the accumulated energization amount is 60kAh of the reference value) of electrolysis in stage (2), so the fluid generated at the anode passes through the first pipe, the first pipe valve, The fourth pipe and the first mist removal part circulate. No accumulation or clogging of droplets occurred in the first pipe, the first pipe valve, and the fourth pipe, and the fluid generated at the anode was supplied to the first droplet removal section, so the droplets were removed in the first droplet removal section. The first mist removing section is a scrubber-type removing section that ejects liquid hydrogen fluoride to remove fine particles such as mist droplets, and the mist droplet removal rate is 98% or more.

[比較例1] 於階段(1)的電解使在陽極產生的流體經由第1配管、第1配管閥、第4配管、第1霧滴除去部而流通的點以外,與實施例1同樣地進行電解。 階段(1)的電解中,安裝於電解槽的陽極側及陰極側的壓力計之中陽極側的壓力計的計測值逐漸變高,與陰極側的壓力的差壓成為90mmH2 O,故停止電解。停止的理由如以下。電解槽內的阻隔壁之中浸漬於電解液的部分的鉛直方向長度(浸漬深度)為5cm,故陽極側的壓力變比陰極側的壓力高約100mmH2 O時,陽極側的電解液的液面變比阻隔壁的下端低。其結果,氟氣越過阻隔壁而與陰極側的氫氣混合,引起氟氣與氫氣的急遽的反應,故非常危險。[Comparative Example 1] In the electrolysis of stage (1), except for the point where the fluid generated at the anode circulates through the first piping, the first piping valve, the fourth piping, and the first droplet removal part, it is the same as in Example 1 Perform electrolysis. In the electrolysis of stage (1), the measured value of the pressure gauge on the anode side among the pressure gauges installed on the anode side and the cathode side of the electrolytic cell gradually increases, and the pressure difference with the cathode side becomes 90mmH 2 O, so stop electrolysis. The reasons for the suspension are as follows. The vertical length (immersion depth) of the part of the barrier wall in the electrolytic cell that is immersed in the electrolyte is 5 cm. Therefore, when the pressure on the anode side becomes about 100 mmH 2 O higher than the pressure on the cathode side, the liquid of the electrolyte on the anode side The surface change is lower than the lower end of the barrier wall. As a result, the fluorine gas crosses the barrier wall and mixes with the hydrogen gas on the cathode side, causing a rapid reaction between the fluorine gas and the hydrogen gas, which is very dangerous.

在將系統內以氮氣等進行淨化後,檢查第1配管、第1配管閥、第4配管的內部的結果,第1配管為延伸於鉛直方向的配管故未發生阻塞。於第1配管閥存在少量的粉的附著,第1配管閥的下游側的配管亦即往第4配管的入口部分被粉阻塞。於第4配管亦存在粉的堆積,惟非為使配管阻塞之程度的量。After purging the system with nitrogen gas, etc., the internals of the first pipe, the first pipe valve, and the fourth pipe were inspected. As a result, the first pipe was a pipe extending in the vertical direction, so it was not clogged. A small amount of powder adheres to the first piping valve, and the downstream piping of the first piping valve, that is, the inlet to the fourth piping is blocked by the powder. There is also accumulation of powder in the fourth piping, but it is not the amount that blocks the piping.

1:樣品室 2:光源 3:散射光檢測部 4A,4B:透明窗 10:電解液 11:電解槽 13:陽極 15:陰極 22:陽極室 24:陰極室 31:第1平均粒徑測定部 32:第1霧滴除去部 33:第2霧滴除去部 34:第2平均粒徑測定部 41:第1配管 42:第2配管 43:第3配管 44:第4配管 45:第5配管 46:第6配管 47:第7配管 48:第8配管 49:第9配管 51:第1旁通配管 52:第2旁通配管 61:第1配管閥 62:旁通閥 F:流體 L:光散射測定用光 M:霧滴 S:散射光1: Sample room 2: light source 3: Scattered light detection section 4A, 4B: transparent window 10: Electrolyte 11: Electrolyzer 13: anode 15: Cathode 22: anode chamber 24: Cathode chamber 31: The first average particle size measurement section 32: The first mist removal part 33: The second droplet removal part 34: The second average particle size measurement section 41: The first piping 42: 2nd piping 43: 3rd piping 44: 4th piping 45: 5th piping 46: 6th piping 47: No. 7 piping 48: 8th piping 49: 9th piping 51: 1st bypass pipe 52: 2nd bypass pipe 61: The first piping valve 62: Bypass valve F: fluid L: Light for light scattering measurement M: fog drop S: scattered light

[圖1]為就在本發明的涉及一實施方式的氟氣製造裝置中用作為平均粒徑測定部的光散射檢測器的一例進行說明的示意圖。 [圖2]為就涉及本發明的一實施方式的氟氣製造裝置的一例進行說明的示意圖。 [圖3]為就在圖2的氟氣製造裝置中用作為霧滴除去部的霧滴除去裝置的一例進行說明的示意圖。 [圖4]為就圖2的氟氣製造裝置的第1變形例進行說明的示意圖。 [圖5]為就圖2的氟氣製造裝置的第2變形例進行說明的示意圖。 [圖6]為就圖2的氟氣製造裝置的第3變形例進行說明的示意圖。 [圖7]為就圖2的氟氣製造裝置的第4變形例進行說明的示意圖。 [圖8]為就圖2的氟氣製造裝置的第5變形例進行說明的示意圖。 [圖9]為就圖2的氟氣製造裝置的第6變形例進行說明的示意圖。 [圖10]為就圖2的氟氣製造裝置的第7變形例進行說明的示意圖。 [圖11]為就圖2的氟氣製造裝置的第8變形例進行說明的示意圖。 [圖12]為就圖2的氟氣製造裝置的第9變形例進行說明的示意圖。 [圖13]為就圖2的氟氣製造裝置的第10變形例進行說明的示意圖。 [圖14]為就在參考例1中包括於在陽極產生的流體中的霧滴的粒徑分布進行繪示的圖形。 [圖15]為就在參考例1中霧滴的平均粒徑與在陽極產生的霧滴的量的相關性進行繪示的圖形。 [圖16]為在參考例1中就霧滴的平均粒徑與通電量的關係進行繪示的圖形。Fig. 1 is a schematic diagram for explaining an example of a light scattering detector used as an average particle size measuring unit in a fluorine gas production apparatus according to an embodiment of the present invention. [Fig. 2] Fig. 2 is a schematic diagram for explaining an example of a fluorine gas production apparatus according to an embodiment of the present invention. [Fig. 3] Fig. 3 is a schematic diagram for explaining an example of a mist removing device used as a mist removing section in the fluorine gas production apparatus of Fig. 2. Fig. 4 is a schematic diagram explaining a first modification of the fluorine gas production apparatus of Fig. 2. [Fig. 5] Fig. 5 is a schematic diagram for explaining a second modification of the fluorine gas production apparatus of Fig. 2. [Fig. 6] Fig. 6 is a schematic diagram for explaining a third modification of the fluorine gas production apparatus of Fig. 2. [Fig. 7] Fig. 7 is a schematic diagram for explaining a fourth modification of the fluorine gas production apparatus of Fig. 2. [Fig. 8] Fig. 8 is a schematic diagram for explaining a fifth modification of the fluorine gas production apparatus of Fig. 2. [Fig. 9] Fig. 9 is a schematic diagram for explaining a sixth modification of the fluorine gas production apparatus of Fig. 2. [Fig. 10] Fig. 10 is a schematic diagram for explaining a seventh modification of the fluorine gas production apparatus of Fig. 2. Fig. 11 is a schematic diagram explaining an eighth modification of the fluorine gas production apparatus of Fig. 2. [Fig. 12] Fig. 12 is a schematic diagram for explaining a ninth modification of the fluorine gas production apparatus of Fig. 2. Fig. 13 is a schematic diagram for explaining a tenth modification of the fluorine gas production apparatus of Fig. 2. [Fig. 14] is a graph showing the particle size distribution of the mist droplets included in the fluid generated at the anode in Reference Example 1. [Fig. [Figure 15] is a graph showing the correlation between the average particle size of the mist droplets and the amount of mist droplets generated at the anode in Reference Example 1. [Fig. 16] is a graph showing the relationship between the average particle size of the droplets and the energization amount in Reference Example 1. [Fig.

10:電解液 10: Electrolyte

11:電解槽 11: Electrolyzer

13:陽極 13: anode

15:陰極 15: Cathode

17:阻隔壁 17: Barrier

22:陽極室 22: anode chamber

24:陰極室 24: Cathode chamber

31:第1平均粒徑測定部 31: The first average particle size measurement section

32:第1霧滴除去部 32: The first mist removal part

33:第2霧滴除去部 33: The second droplet removal part

34:第2平均粒徑測定部 34: The second average particle size measurement section

41:第1配管 41: The first piping

42:第2配管 42: 2nd piping

43:第3配管 43: 3rd piping

44:第4配管 44: 4th piping

45:第5配管 45: 5th piping

46:第6配管 46: 6th piping

47:第7配管 47: No. 7 piping

48:第8配管 48: 8th piping

49:第9配管 49: 9th piping

51:第1旁通配管 51: 1st bypass pipe

52:第2旁通配管 52: 2nd bypass pipe

61:第1配管閥 61: The first piping valve

62:旁通閥 62: Bypass valve

Claims (5)

一種氟氣之製造方法,其為將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣者, 其具備: 在電解槽內進行前述電解的電解程序、 測定從將前述電解液裝填至前述電解槽內並開始前述電解起算的積算的通電量的通電量測定程序、及 將在前述電解液的電解時在前述電解槽的內部產生的流體從前述電解槽的內部往外部經由流道而輸送的供氣程序, 其中,於前述供氣程序,依在前述通電量測定程序進行了測定的前述通電量而切換使前述流體流通的流道,在前述通電量測定程序進行了測定的前述通電量為預先設定的基準值以上的情況下,對從前述電解槽的內部往第1外部輸送前述流體的第1流道輸送前述流體,比前述預先設定的基準值小的情況下,對從前述電解槽的內部往第2外部輸送前述流體的第2流道輸送前述流體, 前述預先設定的基準值為前述電解液每1000L為40kAh以上的範圍內的數值。A method for producing fluorine gas by electrolyzing an electrolyte containing hydrogen fluoride and metal fluoride to produce fluorine gas, It has: Perform the electrolysis procedure of the aforementioned electrolysis in an electrolytic cell, The energization amount measurement program for measuring the accumulated energization amount since the electrolytic solution is filled into the electrolytic cell and the electrolysis is started, and A gas supply process in which the fluid generated inside the electrolytic cell during the electrolysis of the electrolytic solution is transported from the inside of the electrolytic cell to the outside via a flow channel, Wherein, in the air supply program, the flow path through which the fluid circulates is switched according to the energization amount measured in the energization amount measurement program, and the energization amount measured in the energization amount measurement program is a preset reference If the value is greater than the value, the fluid is fed to the first flow path that feeds the fluid from the inside of the electrolytic cell to the first outside. If the fluid is smaller than the preset reference value, 2 The second flow channel for externally transporting the aforementioned fluid transports the aforementioned fluid, The aforementioned predetermined reference value is a value within the range of 40 kAh or more per 1000 L of the aforementioned electrolyte. 如請求項1的氟氣之製造方法,其中,前述金屬氟化物為從鉀、銫、銣及鋰中選擇的至少一種的金屬的氟化物。The method for producing fluorine gas according to claim 1, wherein the metal fluoride is at least one metal fluoride selected from potassium, cesium, rubidium, and lithium. 如請求項1或2的氟氣之製造方法,其中,於前述電解使用的陽極為以從鑽石、類鑽碳、非晶碳、石墨及玻璃碳中選擇的至少一種的碳材料而形成的碳質電極。The method for producing fluorine gas according to claim 1 or 2, wherein the anode used in the aforementioned electrolysis is a carbon formed of at least one carbon material selected from diamond, diamond-like carbon, amorphous carbon, graphite, and glassy carbon质electrode. 如請求項1~3中任一項的氟氣之製造方法,其中,前述電解槽具有在使用於前述電解的陽極或陰極產生的氣泡在前述電解液中上升於鉛直方向並可到達於前述電解液的液面的構造。The method for producing fluorine gas according to any one of claims 1 to 3, wherein the electrolytic cell has air bubbles generated at the anode or cathode used in the electrolysis rising in the vertical direction in the electrolytic solution and reaching the electrolysis The structure of the liquid surface. 一種氟氣製造裝置,其為將含有氟化氫及金屬氟化物的電解液進行電解而製造氟氣者, 其具備: 收容前述電解液並進行前述電解的電解槽、 測定從將前述電解液裝填於前述電解槽內並開始前述電解起算的積算的通電量的通電量測定部、及 將在前述電解液的電解時在前述電解槽的內部產生的流體從前述電解槽的內部往外部輸送的流道, 其中,前述流道具有從前述電解槽的內部往第1外部輸送前述流體的第1流道與從前述電解槽的內部往第2外部輸送前述流體的第2流道,同時具有依在前述通電量測定部進行了測定的前述通電量將使前述流體流通的流道切換為前述第1流道或前述第2流道的流道切換部, 前述流道切換部在以前述通電量測定部進行了測定的前述通電量為預先設定的基準值以上的情況下,從前述電解槽的內部對前述第1流道輸送前述流體,比前述預先設定的基準值小的情況下,從前述電解槽的內部對前述第2流道輸送前述流體, 前述預先設定的基準值為前述電解液每1000L為40kAh以上的範圍內的數值。A fluorine gas production device that produces fluorine gas by electrolyzing an electrolyte solution containing hydrogen fluoride and metal fluoride, It has: An electrolytic cell that contains the foregoing electrolyte and performs the foregoing electrolysis, A energization amount measuring unit that measures the accumulated energization amount since the electrolytic solution is filled in the electrolytic cell and the electrolysis is started, and A flow channel that transports the fluid generated inside the electrolytic cell during the electrolysis of the electrolytic solution from the inside of the electrolytic cell to the outside, Among them, the flow channel has a first flow channel that transports the fluid from the inside of the electrolytic cell to the first outside and a second flow channel that transports the fluid from the inside of the electrolytic cell to the second outside, and also has a energization dependent on the above. The energization amount measured by the quantity measuring section switches the flow path through which the fluid flows to the flow path switching section for the first flow path or the second flow path, In the case where the energization amount measured by the energization amount measuring unit is equal to or greater than a preset reference value, the flow path switching unit transports the fluid from the inside of the electrolytic cell to the first flow path, which is higher than the preset value. When the reference value of is small, transport the fluid from the inside of the electrolytic cell to the second flow path, The aforementioned predetermined reference value is a value within the range of 40 kAh or more per 1000 L of the aforementioned electrolyte.
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