TW202134473A - Artificial diamond production apparatus and microwave emitting module thereof emitting microwaves to a diamond platform in a reaction chamber - Google Patents

Abstract

This invention relates to an artificial diamond production apparatus and a microwave emitting module thereof. The microwave emitting module is used for emitting microwaves to a diamond platform in a reaction chamber; the reaction chamber is provided with a microwave window; a focusing area is formed in the side, facing the microwave window, of the diamond platform; the microwave emitting module is located outside the reaction chamber and includes a microwave generator, a focusing lens and a focusing mechanism; the microwave generator emits microwaves to the diamond platform through the microwave window; the focusing lens is located between the diamond platform and the microwave generator and converges the microwaves generated by the microwave generator; and the focusing mechanism is connected with the focusing lens and may change a spacing distance between the focusing lens and the microwave generator, so that the microwaves from the microwave emitting module are kept to be converged in the focusing area of the diamond platform, thereby increasing the production efficiency of the artificial diamond.

Description

Artificial diamond production device and its microwave emission module

The invention relates to an artificial diamond production device and a microwave emission module thereof, in particular to a microwave emission module in a device for producing artificial diamonds by using a microwave plasma chemical vapor deposition method.

The artificial diamond production device in the prior art puts the diamond seed crystals in a reaction chamber with high concentration of methane, and then uses 2.45GHz microwaves to place the diamond seed crystals at the strong electric field of the regional standing wave formed in the reaction chamber. Station, where the energy of the microwave standing wave heats the hydrocarbon reaction gas (such as methane) around the seed crystal to an extremely high temperature and forms a plasma ball, so that the carbon atoms of the hydrocarbon gas are attached to the diamond crystal by the action of the plasma. Planting, so that the diamond seed crystal gradually grows into a man-made diamond.

However, the location of the strong regional standing wave electric field of microwave is easily disturbed by the reaction gas, so it is difficult to focus stably on the stage of the diamond seed crystal, resulting in the inability to form a stable plasma ball around the diamond seed crystal, which in turn causes time-consuming production of artificial diamonds. And consumes energy.

Therefore, the prior art artificial diamond production device really needs to be improved.

In view of the aforementioned shortcomings and deficiencies of the prior art, the present invention provides an artificial diamond production device and a microwave emitting module thereof. The focus position of microwaves generated by the microwave emitting module can be adjusted, thereby improving the production efficiency of artificial diamonds.

In order to achieve the above-mentioned purpose of the invention, the technical means adopted by the present invention is to design a microwave emitting module of an artificial diamond production device, which is used to emit microwaves to a diamond carrier in a reaction chamber; the reaction chamber has a microwave Window; the diamond carrier has a focusing area on the side facing the microwave window; the microwave emitting module is located outside the reaction chamber, and includes: A microwave generator having a launch port, and the microwave generator launches microwaves toward the diamond carrier through the launch port; A focusing lens, which is located between the diamond stage and the launch port, and concentrates the microwaves of the microwave generator; A focusing mechanism is connected with the focusing lens and changing the separation distance between the focusing lens and the emission port, so that the microwaves of the microwave generator are concentrated on the focusing area of the diamond stage.

In order to achieve the above-mentioned object of the invention, the present invention further provides an artificial diamond production device, which comprises: A reaction chamber, which has: A microwave window through which external microwaves can penetrate into the reaction chamber; A diamond carrier, which is set in the reaction chamber, and the diamond carrier has a focusing area on the side facing the microwave window; A microwave emission module, which is located outside the reaction chamber and includes: A microwave generator having a launch port, and the microwave generator launches microwaves toward the diamond carrier through the launch port; A focusing lens, which is located between the diamond stage and the launch port, and concentrates the microwaves of the microwave generator; A focusing mechanism is connected with the focusing lens and changing the separation distance between the focusing lens and the emission port, so that the microwaves of the microwave generator are concentrated on the focusing area of the diamond stage.

The advantage of the present invention is that a focusing mechanism is further designed in the microwave transmitting module, which is connected to the focusing lens and can change the separation distance between the focusing lens and the transmitting port. Thereby, the focused microwave excites the plasma ball more easily and more uniformly, and when the focus position of the microwave is disturbed and shifted, the focusing mechanism can correct the focus position of the microwave, so that the microwave is continuously concentrated on the diamond stage The focus area of the diamond seed crystal can stably form a plasma ball around the diamond seed crystal to improve the production efficiency of man-made diamonds.

Further, in the microwave transmitting module, the focusing mechanism has: a motor; a screw assembly having; a rotating part connected to the motor; a displacement part connected to the rotating part and fixed The focusing lens is provided; wherein, the rotation of the rotating member causes the displacement member to move linearly relative to the rotating member.

Furthermore, in the said microwave transmitting module, wherein: the rotating part is a set of tubes, the inner wall of which has internal threads; one end of the rotating part is connected to the motor; the displacement part is an externally threaded rod with two opposite The ends are respectively a lens end and a sleeve tube end, the lens end is fixedly arranged with the focusing lens, and the sleeve end passes through the rotating part and is screwed with the rotating part.

Furthermore, the microwave transmitting module further has a microwave absorbing shell, which is connected to the microwave generator and the reaction chamber, and is formed with: an accommodating space; and an inlet, which communicates with each other The accommodating space and the launching port of the microwave generator; an outlet, which communicates with the accommodating space, and the outer periphery of the outlet abuts on the outer side of the reaction chamber and surrounds the microwave window; wherein, the focus The lens is located in the accommodating space, the focusing mechanism is located outside the microwave absorbing housing, and the displacement member of the screw assembly of the focusing mechanism slidably penetrates the microwave absorbing housing.

Furthermore, the microwave transmitting module further has a linear component, which has: a fixing member whose position is fixed relative to the transmitting port; and a sliding member which slidably connects the fixing member and fixes the fixing member. Focusing lens; wherein, the direct-moving assembly and the focusing mechanism are respectively connected to opposite ends of the focusing lens.

Furthermore, the said microwave transmitting module, wherein: the fixing part is a linear bearing, and the microwave absorbing shell is fixed; the sliding part is a straight rod body, and slidably penetrates the fixing part and the microwave absorbing shell Shell; one end of the sliding member is located in the accommodating space and the focusing lens is fixed, and the other end is located outside the microwave absorbing shell.

Furthermore, the microwave transmitting module further has a polarizing tube, and one end of the polarizing tube facing the diamond stage opens as the transmitting port, and the polarizing tube has at least one elongated pole. The at least one polarization plate extends along the traveling path of the microwave, and the thickness of the plate body at the opposite ends of the at least one polarization plate is tapered. In this way, the polarizing tube can convert the linearly polarized electric field at its upper end into a circularly polarized electric field at the lower end. Furthermore, in the microwave emitting module, the focusing lens is a dielectric convex lens.

In the following, in conjunction with the drawings and the preferred embodiments of the present invention, the technical means adopted by the present invention to achieve the predetermined creative purpose are further described.

Please refer to FIG. 1 to FIG. 4, the present invention provides a microwave emitting module of an artificial diamond production device. The artificial diamond production device includes a reaction chamber 10, a reaction gas control module 20, and a diamond carrier 30. (Shown in Figure 4) and the microwave transmitter module. The microwave emitting module is located outside the reaction chamber 10 and includes a microwave generator 40, a focusing lens 50 and a focusing mechanism 60; and in this embodiment, it further includes a linear component 70 and a microwave absorbing shell体80。 Body 80.

The aforementioned reaction chamber 10 forms a plasma action space 11 (as shown in FIG. 4), and has a microwave window 12. The material of the microwave window 12 is preferably quartz, so that external microwaves can pass through the microwave window 12. Into the plasma action space 11.

The aforementioned reactive gas control module 20 communicates with the plasma action space 11 of the reaction chamber 10, and specifically, the reactive gas control module 20 includes a hydrocarbon gas source 21, a helium gas source 22, a hydrogen source 23, and a The vacuum pumps 24 are directly connected to the plasma working space 11 to control the gas composition of the plasma working space 11.

The aforementioned diamond stage 30 is disposed in the plasma action space 11 of the reaction chamber 10, and the diamond stage 30 has a focusing area 31 on the side facing the microwave window (as shown in FIG. 4).

The aforementioned microwave generator 40 is located outside the reaction chamber 10 and has a launch port 41 (as shown in FIG. 4 ). The microwave generated by the microwave generator 40 is emitted from the launch port 41 and is emitted toward the diamond stage 30. The microwave generator 40 in this embodiment has a linearly polarized electric field microwave source 44 and a polarized tube 42, the launch port 41 is an end of the polarized tube 42 that opens toward the diamond stage 30; the linearly polarized electric field microwave source 44 is connected The polarizing tube 42 is opposite to one end of the transmitting port 41 and emits line-polarized electric field microwaves toward the polarizing tube 42. The polarizing tube 42 has two long strips of polarizing plates 43 (as shown in FIG. 3), the two polarizing plates 43 are arranged opposite to each other, and each polarizing plate 43 extends along the traveling path of the microwave; thereby, the two polarizing plates 43 makes the microwave in the polarizing tube 42 convert from the linearly polarized electric field microwave entering the upper end of the polarizing tube 42 to the circularly polarized electric field microwave leaving the lower end, and then the launch port 41 emits the circularly polarized electric field microwave toward the diamond carrier 30, In order to improve the production quality of man-made diamonds, the microwave generator 40 is not limited to emitting circularly polarized electric field microwaves.

The thickness of the plates at the opposite ends of the polarizing plate 43 is stepped and tapered, so that the impedance of the microwave entering the upper end of the polarizing tube 42 and leaving the lower end of the polarizing tube 42 is matched, and the amount of microwave reflection is reduced. In other preferred embodiments, the thickness of the plate body at the opposite ends of the polarizing plate 43 can also be linearly tapered (that is, the stepped surface is replaced by an inclined surface) or arc-shaped (that is, the stepped surface is replaced by an arc surface). Or multiple breakpoints are tapered (that is, the stepped surface is replaced with a plurality of connected inclined surfaces); in addition, the number of polarizing plates 43 can be only one.

The aforementioned focusing lens 50 is located between the diamond stage 30 and the emission port 41 of the microwave generator 40 and can concentrate the circularly polarized electric field microwaves of the microwave generator 40. In this embodiment, the transmitting port 41, the microwave window 12, the focusing lens 50, and the focusing area 31 of the diamond stage 30 are sequentially arranged along a straight line. The focusing lens 50 is a dielectric convex lens in this embodiment, and the material of the focusing lens 50 is preferably ceramic or high-density polyethylene (HDPE).

The aforementioned microwave absorbing shell 80 is connected to the microwave generator 40 and the reaction chamber 10, and forms an accommodating space 81, an inlet 82, and an outlet 83 (as shown in FIG. 4); the inlet 82 communicates with the accommodating space 81 and the microwave The emission port 41 of the generator 40; the outlet 83 communicates with the accommodating space 81, and the outer periphery of the outlet 83 is close to the outer side of the reaction chamber 10 and surrounds the microwave window 12. The aforementioned focusing lens 50 is located in the accommodating space 81. The material of the microwave absorbing shell 80 is a material with high dielectric loss (or hysteresis loss), which can absorb the electric field component (or magnetic field component) of the microwave to avoid multiple reflections of microwaves in the microwave absorbing shell 80, and even from the microwave absorbing shell The body 80 and other matching parts leak out from the joints, so the microwave absorbing shell 80 has the effect of reducing the amount of microwave leakage of the microwave emitting module.

The aforementioned focusing mechanism 60 is connected to the focusing lens 50, and the separation distance D between the focusing lens 50 and the emission port 41 can be changed (as shown in FIG. 4), so that the circularly polarized electric field microwaves of the microwave generator 40 are concentrated on the diamond stage 30's focus area 31. In this embodiment, the focusing mechanism 60 has a motor 61 and a screw assembly 62. The screw assembly has a rotating part 621 and a displacement part 622; the rotating part 621 is connected to the motor 61, and the displacement part 622 is connected to the rotating part 621 and is fixed. Set the focusing lens 50; the motor 61 can drive the rotating member 621 to rotate, and the rotating member 621 drives the displacement member 622 to move linearly relative to the rotating member 621.

More specifically, the focusing mechanism 60 is located outside the microwave absorbing housing 80, the rotating member 621 is a set of tubes, the inner wall of which has internal threads, and one end of the rotating member 621 is sleeved with the rotating shaft of the motor 61; the displacement member 622 is an outer tube. A threaded rod slidably penetrates the microwave absorbing housing 80; the opposite ends of the displacement member 622 are a lens end 6221 and a sleeve end 6222 respectively. The lens end 6221 is fixedly provided with the focusing lens 50, and the sleeve end 6222 is penetrated through The rotating member 621 is screwed into the rotating member 621. When the motor 61 drives the rotating member 621 to rotate, the rotation of the rotating member 621 can drive the displacement member 622 by screwing the inner thread of the rotating member 621 and the outer thread of the displacement member 622 The relative rotating member 621 moves linearly, and further changes the separation distance between the focusing lens 50 and the emission port 41. In addition, by arranging the focusing mechanism 60 outside the microwave absorbing housing 80, only the rod-shaped displacement member 622 penetrates the microwave absorbing housing 80, and the gap between the displacement member 622 and the microwave absorbing housing 80 can be designed. It is smaller to reduce the leakage of microwaves, and at the same time, the focusing mechanism 60 is exposed for easy adjustment and maintenance. However, the specific structure of the focusing mechanism 60 is not limited to this. For example, the rotating member 621 and the displacement member 622 may also be respectively An externally threaded rod and a set of tubes, and even the focusing mechanism 60 can also be other types of actuators or manual adjustment mechanisms.

The aforementioned linear motion assembly 70 has a fixing piece 71 and a sliding piece 72. The fixing piece 71 is fixed to the microwave absorbing housing 80, the sliding piece 72 is slidably connected to the fixing piece 71, and the focusing lens 50 is fixed. The linear motion assembly 70 and the focusing mechanism 60 are respectively connected to opposite ends of the focusing lens 50 to enhance the stability of the focusing lens 50. The fixing member 71 is not limited to fixing the microwave absorbing housing 80, and only the position of the fixing member 71 is fixed relative to the transmitting port 41. For example, the fixing member 71 can also be fixed with the microwave generator 40. In this embodiment, the linear assembly 70 is a ball guide assembly, that is, the fixing member 71 is a linear bearing, and the sliding member 72 is a straight rod body that slidably penetrates the fixing member 71, and the sliding member 72 and The displacement members 622 are parallel to each other.

When this creation is used, the diamond seed crystal A is placed in the focus area 31 of the diamond stage 30, and the focusing lens 50 focuses the circularly polarized electric field microwave emitted by the microwave generator 40 on the focus area 31 of the diamond stage 30 to make artificial diamond. When the focus position of the circularly polarized electric field microwaves deviates from the focus area 31, the focusing mechanism 60 can adjust the separation distance between the focusing lens 50 and the emission port 41 to keep the circularly polarized electric field microwaves concentrated in the focus area 31.

In summary, by further providing the focusing mechanism 60 in the present invention, the separation distance between the focusing lens 50 and the emission port 41 can be changed, thereby correcting the focus position of the microwave, so that a plasma ball can be formed stably around the diamond seed A. In order to improve the production efficiency of man-made diamonds.

The above are only the preferred embodiments of the present invention, and do not limit the present invention in any form. Although the present invention has been disclosed as above in preferred embodiments, it is not intended to limit the present invention. Any technical field has The general knowledgeable person, without departing from the scope of the technical solution of the present invention, can use the technical content disclosed above to make slight changes or modifications into equivalent embodiments with equivalent changes. However, any content that does not deviate from the technical solution of the present invention is based on the present invention. The technical essence of the invention makes any simple modifications, equivalent changes and modifications to the above embodiments still fall within the scope of the technical solutions of the present invention.

10: Reaction chamber 11: Plasma action space 12: Microwave window 20: Reactive gas control module 21: Hydrocarbon gas source 22: Helium source 23: Hydrogen source 24: Vacuum pump 30: Diamond stage 31: Focus area 40: Microwave generator 41: Launch port 42: Polarization tube 43: Polarization plate 44: Linear polarization electric field microwave source 50: Focusing lens 60: Focusing mechanism 61: Motor 62: Screw assembly 621: Rotating Parts 622: Displacement Piece 6221: lens end 6222: casing end 70: Direct-acting components 71: fixed parts 72: Slider 80: Microwave absorbing shell 81: accommodating space 82: entrance 83: Exit A: Diamond seed D: separation distance

Figure 1 is a perspective view of the present invention. Figure 2 is an exploded view of the components of the present invention. Fig. 3 is a partial perspective view of the present invention. Figure 4 is a schematic partial cross-sectional view of the present invention.

10: Reaction chamber

12: Microwave window

42: Polarization tube

43: Polarization plate

50: Focusing lens

60: Focusing mechanism

61: Motor

62: Screw assembly

621: Rotating Parts

622: Displacement Piece

6221: lens end

6222: casing end

70: Direct-acting components

71: fixed parts

72: Slider

80: Microwave absorbing shell

Claims (10)

A microwave emitting module of an artificial diamond production device is used to emit microwaves to a diamond carrier in a reaction cavity; the reaction cavity has a microwave window; the side of the diamond carrier facing the microwave window has a focus Area; the microwave emitting module is located outside the reaction chamber and includes: A microwave generator having a launch port, and the microwave generator launches microwaves toward the diamond carrier through the launch port; A focusing lens, which is located between the diamond stage and the launch port, and concentrates the microwaves of the microwave generator; A focusing mechanism is connected with the focusing lens and changing the separation distance between the focusing lens and the emission port, so that the microwaves of the microwave generator are concentrated on the focusing area of the diamond stage. The microwave transmitting module according to claim 1, wherein the focusing mechanism has: A motor A screw assembly, which has; A rotating part, which is connected to the motor; A displacement piece connected to the rotating piece and fixedly fixing the focusing lens; wherein, the rotation of the rotating piece causes the displacement piece to move linearly relative to the rotating piece. The microwave transmitting module according to claim 2, wherein: The rotating part is a set of pipes with internal threads on the inner wall surface; one end of the rotating part is connected to the motor; The displacement member is an externally threaded rod, the opposite ends of which are respectively a lens end and a sleeve tube end. The lens end is fixed with the focusing lens, and the sleeve end penetrates the rotating member and is screwed to the rotating member . The microwave transmitting module according to claim 3, further having a microwave absorbing shell, the microwave absorbing shell is connected to the microwave generator and the reaction cavity, and is formed with: An accommodating space; An entrance connecting the accommodating space and the launching port of the microwave generator; An outlet connected to the accommodating space, and the outer peripheral edge of the outlet abuts against the outer side of the reaction chamber and surrounds the microwave window; The focusing lens is located in the accommodating space, the focusing mechanism is located outside the microwave absorbing housing, and the displacement member of the screw assembly of the focusing mechanism slidably penetrates the microwave absorbing housing. The microwave transmitting module according to claim 4 further has a constant-moving component, which has: A fixing piece whose position is fixed relative to the launch port; A sliding member slidably connected to the fixing member and fixing the focusing lens; Wherein, the linear motion component and the focusing mechanism are respectively connected to opposite ends of the focusing lens. The microwave transmitting module according to claim 5, wherein: The fixing part is a linear bearing, and the microwave absorbing shell is fixed; The sliding piece is a straight rod and slidably penetrates the fixing piece and the microwave absorbing shell; one end of the sliding piece is located in the accommodating space and the focusing lens is fixed, and the other end is located outside the microwave absorbing shell. The microwave transmitting module according to any one of claims 1 to 4, wherein the microwave generator has a polarizing tube, and one end of the polarizing tube facing the diamond stage opens as the transmitting port, and the polarizing tube There is at least one strip-shaped polarizing plate, the at least one polarizing plate extends along the traveling path of the microwave, and the thickness of the plate body at the opposite ends of the at least one polarizing plate is gradually reduced. The microwave transmitting module according to claim 7, wherein: The at least one strip-shaped polarization plate includes two polarization plates, and the two polarization plates are arranged opposite to each other; The microwave generator further has a linearly polarized electric field microwave source, which is connected to one end of the polarizing tube opposite to the emission port, and emits linearly polarized electric field microwaves toward the polarizing tube; Wherein, the two-polarization plate converts the linearly polarized electric field microwaves in the polarizing tube into circularly polarized electric field microwaves, and causes the launch port to emit the circularly polarized electric field microwaves toward the diamond stage. The microwave transmitting module according to any one of claims 1 to 4, wherein the focusing lens is a dielectric convex lens. An artificial diamond production device, including: A reaction chamber, which has: A microwave window through which external microwaves can penetrate into the reaction chamber; A diamond stage, which is set in the reaction chamber and has a focusing area on the side facing the microwave window; A microwave emission module, which is located outside the reaction chamber and includes: A microwave generator having a launch port, and the microwave generator launches microwaves toward the diamond carrier through the launch port; A focusing lens, which is located between the diamond stage and the launch port, and concentrates the microwaves of the microwave generator; A focusing mechanism is connected with the focusing lens and changing the separation distance between the focusing lens and the emitting port, so that the circularly polarized electric field microwaves of the microwave generator are concentrated on the focusing area of the diamond stage.

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