TW202129526A - Iap based simulation method and device and wafer cleaning device - Google Patents

Abstract

An IAP based simulation method and device and wafer cleaning equipment. The method includes: receiving the function instruction for controlling the hardware machine through the logic layer and sending the function instruction to the driving layer; judging whether it is in the simulation mode through the driver layer; blocking the communication between the driver layer and the hardware platform when currently in the simulation mode, and sending the function instructions to the simulation environment used for simulating the hardware machine, and executing the function instruction by simulating the hardware platform; the simulation results of function instructions are returned through the driver layer and logic layer. The simulation environment is preset, and the configuration file of the simulation environment includes the binding relationship between the function instructions of the hardware machine and the corresponding IO point channel, and each IO point channel is set with an IO initial value.

Description

IAP-based simulation method, device and wafer cleaning equipment

The present invention relates to the technical field of semiconductor equipment, and more specifically, to an IAP-based simulation method and device, and a wafer cleaning device using the IAP-based simulation device.

The current semiconductor equipment relies on the IAP (Industrial automation platform) mechanism. Its software control system can be divided into upper computer software and lower computer software. The main function of the upper computer software is to provide GUI interface, data storage and control the lower computer software. , And the main function of the lower computer software is to receive the instructions sent by the upper computer software, control the actual machine hardware to perform corresponding actions, and feedback the lower computer software and hardware information to the upper computer software.

The software of the lower computer can be divided into logic layer and drive layer according to the hierarchical structure. The logic layer contains all the basic functions, combination functions, alarm and interlocking logic codes, and the drive layer connects the logic layer and the hardware device IO points. , The lower computer software interacts with hardware devices through the driver layer.

Therefore, when the software of the lower computer is not connected to the hardware device, it must be switched to the simulation mode, otherwise an abnormality will occur. The current simulation mode test only returns directly after the command reaches the drive layer. This scenario can only test whether the upper and lower computer software communicates normally and whether the function code is triggered normally (only the shallow functions are tested, and the code that involves hardware interaction is specific. The block cannot be executed normally), but it cannot restore the actual machine scene and feedback the actual related IO point changes of the hardware machine. As a result, it often appears that the current software can pass the simulation test stage smoothly, but in the hardware machine In actual work, errors are frequently reported, and there are often quite a few errors that did not appear in the simulation test stage.

Therefore, it is necessary to propose a simulation method that can restore the working scene of the actual machine in the simulation test stage and display the real point channel changes of the hardware machine in the simulation mode to provide reliable simulation test results.

The purpose of the present invention is to propose a simulation method, device and wafer cleaning equipment based on IAP, to realize the restoration of the actual hardware machine working scene in the simulation test stage, and to display the actual point channel changes of the hardware machine in the simulation mode, Provide reliable simulation test results.

In order to achieve the above objective, the present invention proposes an IAP-based simulation method, which includes: receiving a functional instruction for controlling a hardware machine through a logic layer, and issuing the functional instruction to a driving layer; The layer judges whether it is currently in simulation mode; when it is currently in the simulation mode, the communication between the driver layer and the hardware machine is blocked, and the function command is issued to a device used to simulate the hardware machine. In the simulation environment, the hardware machine is simulated to execute the function instruction; the simulation result of the function instruction is returned through the drive layer and the logic layer; wherein, the simulation environment is preset, and a configuration file of the simulation environment includes the The binding relationship between the functional instructions of the hardware machine and the corresponding IO point channel, and each IO point channel is set with an IO initial value.

The present invention also provides an IAP-based simulation device, including: a file analysis module for analyzing a configuration file of a simulation environment that simulates a hardware machine, and binds the hardware machine's functional instructions with the configuration file according to the configuration file Corresponding to the IO point channel and set the IO initial value of each IO point channel; an analog module is used to establish the simulation environment, receive the functional instructions for controlling the hardware machine through a logic layer, and convert the The function instruction is issued to a drive layer; the drive layer is used to determine whether it is currently in simulation mode; when it is currently in the simulation mode, the communication between the drive layer and the hardware machine is blocked, and the function instruction is issued In the simulation environment, the hardware machine is simulated to execute the function instruction; the simulation result of the function instruction is returned through the drive layer and the logic layer.

The present invention also provides an IAP-based wafer cleaning equipment, including the above-mentioned IAP-based simulation device.

The beneficial effect of the present invention is that the present invention simulates the work of a real hardware machine based on the IAP mechanism, and binds the configuration file of the simulation environment to the IO point channel of the simulated machine in advance and sets the parameter value. When the driving layer judges When currently in the simulation mode, block the communication between the driver layer and the hardware machine, and send the function instructions to the simulation environment used to simulate the hardware machine. The simulation hardware machine executes the function instructions to achieve the The simulation test stage restores the working scene of the actual hardware machine, displays the actual point channel changes of the hardware machine in the simulation mode, and provides reliable simulation test results.

The device of the present invention has other characteristics and advantages, which will be apparent from the drawings incorporated herein and the following specific embodiments, or will be in the drawings incorporated herein and the following specific implementations. Detailed statements are made in the manners, and these drawings and specific embodiments are used together to explain the specific principles of the present invention.

The following disclosure provides many different embodiments or examples of different components for implementing the disclosure. Specific examples of components and configurations are described below to simplify the disclosure. Of course, these are only examples and are not intended to be limiting. For example, in the following description, a first member formed on or on a second member may include an embodiment in which the first member and the second member are formed in direct contact, and may also include additional members therein An embodiment that can be formed between the first member and the second member so that the first member and the second member may not directly contact. In addition, the present disclosure may repeat reference numbers and/or letters in each example. This repetition is for the purpose of simplification and clarity and does not in itself indicate the relationship between the various embodiments and/or configurations discussed.

In addition, for ease of description, spatially relative terms such as "below", "below", "below", "above", "upper" and the like can be used herein to describe one element or component and another(s) The relationship between components or components is illustrated in the figure. Spatial relative terms are intended to cover different orientations of devices in use or operation other than those depicted in the figures. The device can be oriented in other ways (rotated by 90 degrees or in other orientations) and therefore the spatial relative descriptors used in this article can also be interpreted.

Although the numerical ranges and parameters stated in the broad scope of this disclosure are approximate values, the numerical values stated in the specific examples should be reported as accurately as possible. However, any value inherently contains certain errors inevitably due to the standard deviation seen in the respective test measurement. Furthermore, as used herein, the term "about" generally means within 10%, 5%, 1%, or 0.5% of a given value or range. Alternatively, the term "approximately" means within one acceptable standard error of the mean when considered by a general technician of the technology. Except in the operation/working example, or unless explicitly specified in other ways, such as the total numerical range of the quantity of materials disclosed in this article, the duration of time, temperature, operating conditions, the ratio of quantities and the like, Quantities, values and percentages should be understood as modified by the term "about" in all examples. Correspondingly, unless otherwise indicated, the numerical parameters stated in the scope of this disclosure and the accompanying invention application are approximate values that can be changed as needed. At the very least, each numerical parameter should be explained at least in view of the number of significant digits reported and by applying ordinary rounding techniques. Ranges can be expressed herein as from one endpoint to the other or between two endpoints. All ranges disclosed herein include endpoints, unless otherwise specified.

The current test of the software simulation mode of the lower computer based on the IAP mechanism only returns directly after the command reaches the drive layer. This scenario can only test whether the upper and lower computer software communicates normally, whether the function code is triggered normally, and cannot restore the actual machine scene. Feedback the actual related IO point changes of the hardware machine, including some direct changes and indirect changes, such as some conflicting mutually exclusive points (two points cannot be triggered at any time), when a certain basic function (Basic function instructions are functions that directly control specific points. Relatively speaking, functions that have logical control of basic functions are collectively called combined functions.) When controlling one of the points, according to the actual situation, it will only cause the conflict point to be triggered. Status, the point cannot be triggered normally, and because the conflicting point is not triggered, the point is triggered normally.

Therefore, because the existing simulation test only returns directly without issuing commands to the hardware, indirect changes cannot be tested, and the actual machine working scene cannot be restored, resulting in results that violate the actual working conditions of the machine, such as two The commands that control a pair of conflicting points respectively are issued normally, and when the test content becomes more abundant, the test results are not reliable.

In order to solve the above problems, this law proposes a simulation method based on IAP, which can restore the working scene of the actual machine in the simulation test stage and show the real point channel changes of the hardware machine in the simulation mode, so as to provide reliable simulation Test Results.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. Although the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to make the present invention more thorough and complete, and to fully convey the scope of the present invention to those skilled in the art.

Fig. 1 shows a step diagram of an IAP-based simulation method according to the present invention.

As shown in Figure 1, an IAP-based simulation method according to the present invention includes: receiving a functional instruction for controlling a hardware machine through a logic layer, and issuing the functional instruction to the driving layer; judging by the driving layer whether it is currently In simulation mode; when currently in simulation mode, block the communication between the driver layer and the hardware machine, and issue function commands to the simulation environment used to simulate the hardware machine, and simulate the execution of the hardware machine Function instruction; the simulation result of the function instruction is returned through the drive layer and the logic layer; among them, the simulation environment is preset, and the configuration file of the simulation environment includes the binding relationship between the function instructions of the hardware machine and the corresponding IO point channel. Each IO point channel is set with IO initial value.

Specifically, referring to Figure 2, by pre-binding function commands to the IO point channel of the simulation machine in the configuration file of the simulation environment and setting parameter values, when the driving layer judges that it is currently in the simulation mode, it blocks the driving layer and the hardware The communication between the hardware machines and the issuing of functional instructions to the simulation environment used to simulate the hardware machines. The simulation hardware machines execute the functional instructions to realize the restoration of the actual hardware machine working scenarios during the simulation test stage. , Display the actual point channel changes of the hardware machine in the simulation mode, and provide reliable simulation test results. Among them, IAP includes upper computer software and lower computer software. The upper computer software can issue functional commands to control the hardware machine through the lower computer software. The lower computer software has a logic layer and a drive layer.

In a preferred embodiment, presetting the simulation environment may include: importing the pre-compiled simulation dynamic link library file into the IAP simulation project to generate the simulation environment, and adding the configuration file of the simulation environment to the configuration file of the IAP simulation project.

Specifically, IAP provides simulation tags for external development. Those skilled in the art can develop and compile simulation programs for realizing the simulation environment in advance according to the present invention, and embed the simulation programs in the software of the lower computer to realize the simulation. Construction of the environment.

In an example, import the pre-compiled simulation dynamic link library file SimuEnvironment.dll into the IAP simulation project to generate the simulation environment, and add the configuration file SimuEnvironment.xml to the config file under the IAP simulation project file, and configure it at the same time Content.

In a preferred embodiment, according to the functional instructions for controlling the hardware machine, the configuration file for configuring the simulation environment may include at least one of the following: binding each basic functional instruction to a corresponding DI point channel in the simulation environment and Set the IO initial value of each DI point channel; bind each PMC combined function instruction to the corresponding multiple DI point channels in the simulation environment and set the IO initial value of each DI point channel; change each TMC The combined function command is bound to multiple corresponding DI point channels in the simulation environment and the IO initial value of each DI point channel is set; each AO function command is bound to a corresponding AI point channel in the simulation environment And set the IO initial value of each AI point channel.

Specifically, in the configuration file SimuEnvironment.xml, functions and IO channels can be bound through a prescribed format, and the initial value of IO can be set. The binding content mainly includes the following: basic function instructions (DO channel digital output) and corresponding DI (channel Digital input) One-to-one binding of point channel channel numbers, such as binding water injection valve control commands to water injection valve DI channels; PMC combined function commands (including multiple basic function commands) and corresponding DI point channel numbers Multi-binding, for example, the tank1 water injection function is bound to all the DI channels of Tank1, or the Robot1 horizontal movement function is bound to all the slot in-position detection DI points of Robot1; TMC combination function instructions (such as the movement operation of the robot across multiple process modules) Function instruction) is bound to the corresponding state DI point channel number one-to-many, for example, Robot1 horizontal movement function and Robot1 X axis shift to target position command are bound to all state DI channels; AO (analog output) function instruction is bound to Corresponding AI (analog input) channel binding, such as the binding of the AO function command of the heating machine heating temperature to the corresponding AI channel.

It should be noted that the lower computer software includes PMC and TMC. Among them, PMC (process module control) refers to a fixed process module on the machine, such as each tank and all its components. TMC (transfer module control) refers to the hardware that can be moved on the machine and spans multiple process modules for transmission, such as robots. Therefore, the PMC combination function is bound to the IO in a process module, and the TMC combination function is bound to all the IO points (involving multiple process modules) in the transmitted hardware motion range.

In a preferred embodiment, blocking the communication between the driver layer and the hardware machine may include: declaring in the driver layer of the IAP lower computer software to take the simulation environment as an example, and block the driver layer and the hardware machine through the simulation method provided by IAP Communication of hardware machines.

Specifically, Figure 3 is an example of processing the method that the driver layer sends to the PLC. The simulation environment SimuEnvironment instance is declared in the lower computer software driver layer, and the Simulated simulation method provided by IAP is used to block communication with the hardware and call the simulation environment SimuEnvironment The provided read and write method can send basic function instructions or AO function instructions to the simulation environment to complete the construction of the simulation environment and test the basic functions smoothly.

In a preferred embodiment, the function instruction is issued to the simulation environment used to simulate the hardware machine. The execution of the function instruction by the simulated hardware machine may include: when the function instruction is a basic function instruction or an AO quantity function instruction, Directly issue basic function instructions or AO quantity function instructions to the simulation environment. The simulation program in the simulation environment executes the basic function instructions or AO quantity function instructions according to the IO initial value of the corresponding DI point channel or AI point channel in the configuration file Simulation; when the function command is a PMC combined function command or a TMC combined function command, first call the execution logic corresponding to the PMC combined function command or TMC combined function command and issue the PMC combined function command or TMC combined function command and the execution logic In the simulation environment, call the method of setting the change time of the IO point channel provided by the simulation environment, and set the change time of each DI point channel bound to the PMC combination function instruction or TMC combination function instruction in the sequence of the change time according to the execution logic , Simultaneously execute the PMC combined function command or TMC combined function command according to the IO initial value of each DI point channel in the configuration file.

Specifically, the basic function instruction refers to the opening or closing operation of the hardware point channel of the basic machine. For example, it is necessary to directly open the water inlet valve of a certain process slot in the machine, as shown in Figure 1. When the host computer software sends the function command, the logic layer receives the command and sends it to the drive layer. The drive layer judges this time In the simulation mode, the hardware interaction is not performed, but the simulation read and write method is entered, and directly jumps to the simulation program. The simulation program will set the bound IO channel value to 1 (that is, the signal is triggered), and record the result in In the log file; in the same way, when the host computer software sends a command to close the water inlet valve of the process tank, the corresponding IO value will be set to 0, and the result will be recorded in the log file.

The combined function command refers to the function of controlling multiple basic function commands through the corresponding execution logic in the logic layer. For example, the combined function command to realize the water injection of the cleaning process tank, the two basic function commands that need to be called to open the water injection valve and close the water injection valve, It also contains certain logic processing, such as closing the water injection valve when the liquid level reaches a preset value. In each combined function instruction, call the method setChangeTime() provided by SimuEnvironment to set the IO change time, and set the change for each bound DI channel according to the sequence of the change time of multiple basic functions in each combined function instruction. The parameter format of the setChangeTime() method is: "channel number, parameter value, time", each channel number is set with a change time, if it is not set, there will be no change by default.

Figure 4 shows an example of the method of setting the analog DI channel change in the combined function command of the process tank water injection function. The water injection function command is sent from the upper computer software, and the program goes to the lower computer software logic layer, and then enters the logic control method of the function After judging that it is currently in simulation mode, the program will first call the simulation setChangeTime() method (this method is actually executed on a separate thread), set the change time of the DI point channel, and set a certain value in the tank1 water injection function. Liquid level change: setChangeTime(72,0,0) and setChangeTime(72,1,5), indicating that the DI signal of the liquid level with channel number 72 is in the trigger state at the 5th second, and then the water injection function command will be executed.

At the 0s, the DI point with channel number 72 (this point is the level DI signal) is in the untriggered state, and the DI point value is 0 (in the actual machine, it means that the water level in the tank has not reached at this time) . At the 5th second, the simulation program will automatically trigger the DI signal, that is, set the IO channel value of this point to 1 (in the actual hardware machine, it means that the water level in the tank has reached at this time). In this way, it is possible to dynamically restore the operation of the water injection function in the actual machine during the test phase. After 5s, the combination function logic judges that the water level is reached, it will call the valve-closing function, and then the function will be terminated normally.

Therefore, the IAP-based simulation method of the above embodiment can effectively avoid the previous simulation test method that the water injection function has not monitored the water level signal and will continue to alarm until the function is overtime by dynamically simulating the setting method of the DI signal. It can accurately test the direct change and indirect change of the point channel, restore the working scene of the actual hardware machine, and improve the accuracy of the simulation test result.

The embodiment of the present invention also provides an IAP-based simulation device, including: a file parsing module, used to analyze the configuration file of the simulation environment of the simulated hardware machine, and bind the functional instructions of the hardware machine to the corresponding configuration file according to the configuration file. IO point channel and set the IO initial value of each IO point channel; analog module, used to establish a simulation environment, receive functional instructions for controlling the hardware machine through the logic layer, and send the functional instructions to the drive layer ; Judge whether it is currently in simulation mode through the drive layer; when it is currently in simulation mode, block the communication between the drive layer and the hardware machine, and send function commands to the simulation environment to simulate the hardware machine execution function Instruction; the simulation result of the function instruction is returned through the drive layer and the logic layer.

Specifically, the main function of the file parsing module is to define the SimuEnvironment.xml configuration file provided externally, bind functions and IO point channels through a prescribed format, and set the initial value of IO. The binding content mainly includes: basic functions (DO) and corresponding One-to-one binding of DI point channel number; PMC combination function and corresponding DI point channel number one-to-many binding; TMC combination function and corresponding status (DI) point channel number one-to-many binding; AO analog output The quantity function is bound to the corresponding AI analog quantity input channel. The simulation module is mainly used to simulate the sending processing method, the simulation receiving processing method, the simulation environment setting method, etc.

In an example, it may further include: a log module, which is used to record the sending and receiving of functional instructions and the change of the IO point channel in the simulation mode.

Specifically, the log module mainly records content such as the sending and receiving of functional instructions and the changes of IO channels in the simulation mode.

The embodiment of the present invention also provides a wafer cleaning equipment based on the IAP mechanism, including the aforementioned IAP-based simulation device. The lower computer simulation system based on the IAP mechanism of the above embodiment can restore the actual machine scene during the simulation test stage, display the direct point change and indirect point change of the actual machine in the simulation mode, and provide reliable simulation test results .

Those with ordinary knowledge in this technical field can use the underlying library functions and related simulation tags provided by the existing IAP to complete the secondary development of the simulation environment of the present invention based on the method of the present invention (the development process of the simulation environment It is easy for the knowledgeable person to realize it, so I won’t repeat it here). Connect the developed simulation environment to the software program of the lower computer. Based on the configuration file provided by the simulation environment, bind function commands and channel points for different machine functions. And related IO initial value settings, realize the simulation test for different hardware machines, and the invented simulation environment can be transplanted to any lower computer software developed based on IAP, or transplanted to other semiconductor equipment developed based on upper and lower computer software Both can achieve the same technical effect.

The foregoing content summarizes the features of several embodiments, so that those familiar with the art can better understand the aspect of the disclosure. Those familiar with the technology should understand that they can easily use the present disclosure as a basis for designing or modifying other processes and structures for implementing the same purpose and/or achieving the same advantages of the embodiments described herein. Those familiar with this technology should also understand that these equivalent structures do not depart from the spirit and scope of this disclosure, and they can make various changes, substitutions and alterations in this article without departing from the spirit and scope of this disclosure.

When read in conjunction with the accompanying drawings, the aspect of the present disclosure is best understood from the following detailed description. It should be noted that according to standard practice in the industry, the various components are not drawn to scale. In fact, the size of various components can be increased or decreased arbitrarily for the sake of clarity of the discussion. Fig. 1 shows a step diagram of an IAP-based simulation method according to the present invention. Fig. 2 shows a schematic diagram of an IAP-based simulation method according to the present invention. Fig. 3 shows a schematic diagram of a method for a driving layer to issue a function instruction to a simulation environment in an IAP-based simulation method according to an embodiment of the present invention. Fig. 4 shows an example diagram of a combined function simulation process in an IAP-based simulation method according to an embodiment of the present invention.

Claims (10)

A simulation method based on IAP, including: Receive a function command for controlling a hardware machine through a logic layer, and issue the function command to a drive layer; Judge whether it is currently in a simulation mode through the drive layer; When currently in the simulation mode, block the communication between the driver layer and the hardware machine, and issue the function command to a simulation environment for simulating the hardware machine to simulate the hardware The machine executes the functional command; and Return a simulation result of the function instruction through the drive layer and the logic layer; The simulation environment is preset, and a configuration file of the simulation environment includes the binding relationship between the functional instructions of the hardware machine and the corresponding IO point channel, and each IO point channel is set with an IO initial value. The simulation method according to claim 1, wherein presetting the simulation environment includes: A pre-compiled simulation dynamic link library file is imported into an IAP simulation project to generate the simulation environment, and the configuration file of the simulation environment is added to a configuration file of the IAP simulation project. The simulation method according to claim 1, wherein the configuration file configuring the simulation environment includes at least one of the following: Bind each basic function instruction to a DI point channel in the simulation environment and set an IO initial value for each DI point channel; Bind each PMC combined function command with multiple DI point channels in the simulation environment and set the IO initial value of each DI point channel; Bind each TMC combined function instruction to multiple DI point channels in the simulation environment and set the IO initial value of each DI point channel; and Bind each AO function instruction with an AI point channel in the simulation environment and set an IO initial value for each AI point channel. The simulation method according to claim 3, wherein the issuing the function instruction to a simulation environment for simulating the hardware machine, and simulating the hardware machine to execute the function instruction includes: When the function instruction is the basic function instruction or the AO quantity function instruction, the basic function instruction or the AO quantity function instruction is directly issued to the simulation environment, and a simulation module in the simulation environment is based on the corresponding configuration file The IO initial value of the DI point channel or AI point channel simulates the execution of the basic function instruction or the AO function instruction. The simulation method according to claim 3, wherein the issuing the function instruction to the simulation environment for simulating the hardware machine, and simulating the hardware machine to execute the function instruction includes: When the function command is the PMC combined function command or the TMC combined function command, first call the execution logic corresponding to the PMC combined function command or the TMC combined function command, and combine the PMC combined function command or the TMC combined function command And the execution logic is sent to the simulation environment, a method for setting the IO point channel change time provided by the simulation environment is invoked, and the PMC combined function command or the TMC combined function command is bound to the PMC combined function command or the TMC combined function command in the sequence of the change time according to the execution logic. Set the time when each DI point channel setting changes, and simultaneously execute the PMC combined function command or the TMC combined function command according to the IO initial value of each corresponding DI point channel in the configuration file. The IAP-based simulation method according to claim 5, wherein the method of calling the IO point channel change time provided by the simulation environment includes: Call the setChangeTime() method. The IAP-based simulation method according to claim 1, wherein the blocking communication between the driver layer and the hardware machine includes: It is stated in the driver layer that the simulation environment is taken as an example, and the communication between the driver layer and the hardware machine is blocked by the simulation method provided by the IAP. A simulation device based on IAP, including: A file parsing module for parsing a configuration file of a simulation environment of a simulated hardware machine, and binding a function command of the hardware machine to the corresponding IO point channel according to the configuration file and setting each The IO initial value of the IO point channel; and A simulation module is used to establish the simulation environment, receive a function command for controlling the hardware machine through a logic layer, and send the function command to a drive layer; the drive layer judges whether it is currently in a Simulation mode; when currently in the simulation mode, block the communication between the driver layer and the hardware machine, and issue the function command to the simulation environment to simulate the hardware machine to execute the function command; A simulation result of the function instruction is returned through the driving layer and the logic layer. The IAP-based simulation device as described in claim 8, further comprising: A log module is used to record the sending and receiving of the function command and the change of the IO point channel in the simulation mode. An IAP-based wafer cleaning equipment, which includes the simulation device as described in claim 8 or 9.

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