CN111310313A - IAP-based simulation method and device and wafer cleaning equipment - Google Patents
IAP-based simulation method and device and wafer cleaning equipment Download PDFInfo
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Abstract
The invention discloses an IAP-based simulation method, an IAP-based simulation device and wafer cleaning equipment, wherein the method comprises the following steps: receiving a function instruction for controlling a hardware machine through a logic layer, and issuing the function instruction to a drive layer; judging whether the current mode is in a simulation mode or not through a driving layer; when the current simulation mode is in, blocking the communication between the driving layer and the hardware machine, issuing a functional instruction to a simulation environment for simulating the hardware machine, and simulating the hardware machine to execute the functional instruction; returning the simulation result of the functional instruction through the driving layer and the logic layer; the simulation environment is preset, the configuration file of the simulation environment comprises a binding relation between a functional instruction of the hardware machine and the corresponding IO point channel, and each IO point channel is provided with an IO initial value. The method can restore the working scene of the actual machine in the simulation test stage and display the real point position channel change of the hardware machine in the simulation mode so as to provide a reliable simulation test result.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to an IAP (integrated circuit board) -based simulation method and device and wafer cleaning equipment applying the IAP-based simulation device.
Background
The current semiconductor device relies on an IAP (Industrial automation platform) mechanism, and a software control system of the semiconductor device can be divided into upper computer software and lower computer software, wherein the upper computer software mainly functions to provide a GUI interface, store data and control the lower computer software, and the lower computer software mainly functions to receive an instruction sent by the upper computer software, control actual machine hardware to execute corresponding actions, and simultaneously feed back the lower computer software and hardware information to the upper computer software.
The software of the lower computer is divided into a logic layer and a driving layer according to a hierarchical structure, wherein the logic layer comprises all logic codes such as basic functions, combination functions, alarming, interlocking and the like, the driving layer is used for connecting the logic layer with an IO point of hardware equipment, and the software of the lower computer performs interaction of the hardware equipment through the driving layer.
Therefore, when the software of the lower computer is not connected with the hardware equipment, the simulation mode needs to be switched, otherwise, an exception occurs. The test of the current simulation mode only refers to that an instruction directly returns after reaching a drive layer, the scene only can test whether the communication of upper and lower computer software is normal or not, whether a function code is normally triggered or not (only the function of a shallow layer is tested, and particularly a code block related to hardware interaction cannot normally be executed) but cannot restore an actual machine scene and feed back the actual relevant IO point position change of a hardware machine, so that the current software can pass through a simulation test stage smoothly, but errors are frequently reported in the actual work of the hardware machine, and a great number of errors which do not occur in the simulation test stage often occur.
Therefore, it is necessary to provide a simulation method, which can restore the working scene of the actual machine in the simulation test stage and display the actual point channel change of the hardware machine in the simulation mode, so as to provide a reliable simulation test result.
Disclosure of Invention
The invention aims to provide an IAP-based simulation method, an IAP-based simulation device and wafer cleaning equipment, which are used for restoring the working scene of an actual hardware machine in a simulation test stage, displaying the actual point position channel change of the hardware machine in a simulation mode and providing a reliable simulation test result.
In order to achieve the above object, the present invention provides an IAP-based simulation method, including:
receiving a function instruction for controlling a hardware machine through a logic layer, and issuing the function instruction to a drive layer;
judging whether the current mode is a simulation mode or not through the driving layer;
when the current simulation mode is in, blocking the communication between the driving layer and the hardware machine, issuing the functional instruction to a simulation environment for simulating the hardware machine, and simulating the hardware machine to execute the functional instruction;
returning the simulation result of the functional instruction through the driving layer and the logic layer;
the simulation environment is preset, the configuration file of the simulation environment comprises a binding relationship between a functional instruction of the hardware machine and corresponding IO point location channels, and each IO point location channel is provided with an IO initial value.
Optionally, the presetting the simulation environment includes:
and importing a pre-compiled simulation dynamic link library file into an IAP simulation project to generate the simulation environment, and adding the configuration file of the simulation environment into the configuration file of the IAP simulation project.
Optionally, configuring the configuration file of the simulation environment comprises at least one of:
binding each basic function instruction with one DI point location channel in the simulation environment and setting an IO initial value of each DI point location channel;
binding each PMC combined function instruction with a plurality of DI point location channels in the simulation environment and setting an IO initial value of each DI point location channel;
binding each TMC combined function instruction with a plurality of DI point location channels in the simulation environment and setting an IO initial value of each DI point location channel;
and binding each AO quantity function instruction with one AI point location channel in the simulation environment and setting an IO initial value of each AI point location channel.
Optionally, the issuing the functional instruction to a simulation environment for simulating the hardware machine, where simulating the hardware machine to execute the functional instruction includes:
when the function instruction is the basic function instruction or the AO amount function instruction, directly issuing the basic function instruction or the AO amount function instruction to the simulation environment, and simulating and executing the basic function instruction or the AO amount function instruction by a simulation module in the simulation environment according to the IO initial value of a corresponding DI point location channel or AI point location channel in the configuration file.
Optionally, the issuing the functional instruction to a simulation environment for simulating the hardware machine, where simulating the hardware machine to execute the functional instruction includes:
when the functional instruction is the PMC combined functional instruction or the TMC combined functional instruction, first calling an execution logic corresponding to the PMC combined functional instruction or the TMC combined functional instruction, issuing the PMC combined functional instruction or the TMC combined functional instruction and the execution logic to the simulation environment, calling a method for setting a change time of an IO point location channel provided by the simulation environment, setting a change time of each DI point location channel bound to the PMC combined functional instruction or the TMC combined functional instruction according to the execution logic in a sequence of the change times, and simultaneously simulating and executing the PMC combined functional instruction or the TMC combined functional instruction according to the IO initial value of each corresponding DI point location channel in the configuration file.
Optionally, the invoking of the method for setting the IO point location channel change time provided by the simulation environment includes:
the setChangeTime () method is called.
Optionally, the blocking communication between the driver layer and the hardware platform includes:
and declaring that the simulation environment is taken as an example in the drive layer, and blocking the communication between the drive layer and the hardware machine by using a simulation method provided by the IAP.
The invention also provides an IAP-based simulation device, which comprises:
the file analysis module is used for analyzing a configuration file for simulating a simulation environment of a hardware machine, binding a functional instruction of the hardware machine and a corresponding IO point channel according to the configuration file, and setting an IO initial value of each IO point channel;
the simulation module is used for establishing the simulation environment, receiving a functional instruction for controlling the hardware machine through a logic layer and sending the functional instruction to a driving layer; judging whether the current mode is a simulation mode or not through the driving layer; when the current simulation mode is in, blocking the communication between the driving layer and a hardware machine, issuing the functional instruction to the simulation environment, and simulating the hardware machine to execute the functional instruction; and returning the simulation result of the functional instruction through the driving layer and the logic layer.
Optionally, the method further comprises: and the log module is used for recording the receiving and sending of the functional instruction and the change of the IO point position channel in the simulation mode.
The invention also provides wafer cleaning equipment based on IAP, which comprises the IAP-based simulation device.
The invention has the beneficial effects that:
the method simulates the work of a real hardware machine based on an IAP mechanism, binds a function command with an IO point channel of a simulation machine and sets a parameter value by a configuration file of a simulation environment in advance, blocks the communication between a driving layer and the hardware machine when the driving layer judges that the current simulation mode is in, and sends a function instruction to the simulation environment for simulating the hardware machine, so that the simulation hardware machine executes the function instruction, the working scene of the actual hardware machine is restored in the simulation test stage, the actual point channel change of the hardware machine is displayed in the simulation mode, and a reliable simulation test result is provided.
The apparatus of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings, in which like reference numerals generally represent like parts.
Fig. 1 shows a step diagram of an IAP-based emulation method according to the present invention.
Fig. 2 shows a schematic diagram of an IAP-based emulation method according to the present invention.
Fig. 3 is a schematic diagram illustrating a method for issuing a functional instruction to an emulation environment by a driver layer in an IAP-based emulation simulation method according to an embodiment of the present invention.
Fig. 4 shows an exemplary diagram of a combined function simulation process in an IAP-based simulation method according to an embodiment of the present invention.
Detailed Description
The test of the lower computer software simulation mode based on the IAP mechanism at present only refers to that an instruction directly returns after reaching a driving layer, the scenario only can test whether the communication of upper and lower computer software is normal, whether a function code is normally triggered, and cannot restore an actual machine scenario and feed back IO point location changes actually related to a hardware machine, which include some direct changes and indirect changes, such as some conflicting mutual exclusion point locations (two point locations cannot be simultaneously triggered at any moment), when one point location is controlled by a certain basic function (a basic function instruction is a function of directly controlling a specific point location, relatively speaking, functions with logical basic control functions are collectively referred to as a combined function), according to an actual situation, only the conflicting point location is in a triggered state, the point location cannot be normally triggered, and meanwhile, the conflicting point location is not triggered, the point normally triggers.
Therefore, the existing simulation test only returns directly without issuing commands to hardware, so that indirect changes cannot be tested, and the working scene of the actual machine cannot be restored, so that a result which violates the actual working condition of the machine occurs, for example, two commands which respectively control a pair of collision points are issued normally, and when the test content is richer, the test result is unreliable.
In order to solve the problems, the method provides an IAP-based simulation method, which can restore the working scene of an actual machine in a simulation test stage and display the real point position channel change of a hardware machine in a simulation mode so as to provide a reliable simulation test result.
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
Fig. 1 shows a step diagram of an IAP-based emulation method according to the present invention.
As shown in fig. 1, an IAP-based simulation method according to the present invention includes:
receiving a function instruction for controlling a hardware machine through a logic layer, and issuing the function instruction to a drive layer;
judging whether the current mode is in a simulation mode or not through a driving layer;
when the current simulation mode is in, blocking the communication between the driving layer and the hardware machine, issuing a functional instruction to a simulation environment for simulating the hardware machine, and simulating the hardware machine to execute the functional instruction;
returning the simulation result of the functional instruction through the driving layer and the logic layer;
the simulation environment is preset, the configuration file of the simulation environment comprises a binding relation between a functional instruction of the hardware machine and the corresponding IO point channel, and each IO point channel is provided with an IO initial value.
Specifically, referring to fig. 2, by binding a function command and an IO point location channel of a simulation machine in a configuration file of a simulation environment in advance and setting a parameter value, when the driver layer determines that the driver layer is currently in the simulation mode, the driver layer blocks communication between the driver layer and the hardware machine, and issues the function command to the simulation environment for simulating the hardware machine, and the simulation hardware machine executes the function command, so that a working scene of an actual hardware machine is restored at a simulation test stage, an actual point location channel change of the hardware machine is displayed in the simulation mode, and a reliable simulation test result is provided. The IAP comprises upper computer software and lower computer software, the upper computer software can issue a function instruction for controlling the hardware machine to the hardware machine through the lower computer software, and the lower computer software is provided with a logic layer and a driving layer
In a preferred embodiment, the presetting of the simulation environment may include: and importing the pre-compiled simulation dynamic link library file into an IAP simulation project to generate a simulation environment, and adding the configuration file of the simulation environment into the configuration file of the IAP simulation project.
Specifically, the IAP is provided with an emulation tag for external development, and a person skilled in the art can develop and compile an emulation program for realizing an emulation environment in advance according to the invention, and nest the emulation program in lower computer software to realize the establishment of the emulation environment.
In one example, a precompiled simulation dynamic link library file SimuEnvironment.dll is imported into an IAP simulation project to generate a simulation environment, and a configuration file SimuEnvironment.xml is added into a config file under an IAP simulation project file, and the contents in the configuration file are configured.
In a preferred embodiment, the configuration file for configuring the simulation environment according to the functional instruction for controlling the hardware machine may include at least one of:
binding each basic function instruction with a corresponding DI point location channel in the simulation environment and setting an IO initial value of each DI point location channel;
binding each PMC combined function instruction with a plurality of corresponding DI point location channels in a simulation environment and setting an IO initial value of each DI point location channel;
binding each TMC combined function instruction with a plurality of corresponding DI point location channels in a simulation environment and setting an IO initial value of each DI point location channel;
and binding each AO quantity function instruction with a corresponding AI point location channel in the simulation environment and setting an IO initial value of each AI point location channel.
In particular, xml can bind a function and an IO channel in a specified format and set an IO initial value, where the binding content mainly includes the following:
the basic function instruction (DO channel digital quantity output) and the channel number of the corresponding DI (channel digital quantity input) point position channel are bound in a one-to-one mode, for example, a water filling valve control command is bound with a DI channel of a water filling valve;
the PMC combined function instruction (including a plurality of basic function instructions) is bound with corresponding DI point channel numbers in a one-to-many mode, for example, a Tank1 water injection function is bound with all liquid level DI channels of a Tank1, or a Robot1 horizontal movement function is bound with all in-place detection DI point positions of all grooves of a Robot 1;
TMC combined function instructions (e.g., function instructions for a Robot to move across multiple process modules) are bound to corresponding state DI point channel numbers in a one-to-many manner, for example, a Robot1 horizontal movement function is bound to a Robot 1X axis shift to target position command and all state DI channel numbers are bound to each other;
the AO (analog output quantity) function command is bound with a corresponding AI (analog input) channel, for example, the AO function command of the heating temperature of the heating machine is bound with the corresponding AI channel.
Note that the lower computer software includes PMC and TMC. Herein, PMC (process module control) refers to a process module fixed on a machine, such as each tank and all components belonging to it. TMC (transfer module control) refers to hardware for transfer, such as robot, etc., that can move on a machine table across a plurality of process modules. Therefore, the PMC combination function binds to the IO in one process module, and the TMC combination function binds to all IO points (related to multiple process modules) in the hardware motion interval of transmission.
In a preferred embodiment, blocking the communication between the driver layer and the hardware platform may include:
the simulation environment is declared in the drive layer of the IAP lower computer software, and the communication between the drive layer and the hardware machine is blocked by the simulation method provided by the IAP.
Specifically, fig. 3 is an example of processing a method of issuing a driver layer to a PLC, where a simulation environment simulenvironment instance is declared in a software driver layer of a lower computer, and a Simulated simulation method provided by an IAP blocks communication with hardware and calls a read-write method provided by the simulation environment simulenvironment, that is, a basic function instruction or an AO function instruction can be issued to the simulation environment, so as to complete building of the simulation environment and smoothly test a basic function.
In a preferred embodiment, issuing the functional instruction to the simulation environment for simulating the hardware machine, where the simulating the hardware machine to execute the functional instruction may include:
when the function instruction is a basic function instruction or an AO amount function instruction, directly issuing the basic function instruction or the AO amount function instruction to a simulation environment, and executing simulation of the basic function instruction or the AO amount function instruction by a simulation program in the simulation environment according to an IO initial value of a corresponding DI point location channel or AI point location channel in the configuration file;
when the functional instruction is a PMC combined functional instruction or a TMC combined functional instruction, firstly calling an execution logic corresponding to the PMC combined functional instruction or the TMC combined functional instruction, issuing the PMC combined functional instruction or the TMC combined functional instruction and the execution logic to a simulation environment, calling a method for setting the change time of the IO point location channel provided by the simulation environment, setting the change time of each DI point location channel bound by the PMC combined functional instruction or the TMC combined functional instruction according to the execution logic in the sequence of the change time, and simultaneously simulating and executing the PMC combined functional instruction or the TMC combined functional instruction according to the IO initial value of each corresponding DI point location channel in the configuration file.
Specifically, the basic function instruction refers to the on or off operation of a hardware point channel for a basic machine. For example, at present, a water inlet valve of a certain process groove in a machine is to be directly opened, as shown in fig. 1, after the upper computer software sends the function instruction, the logic layer receives the instruction and then issues the instruction to the drive layer, the drive layer judges that the simulation mode is the present, hardware interaction is not performed, but a simulation read-write method is entered, the simulation program is directly jumped to, the simulation program sets the bound IO channel value to 1 (namely, the signal is triggered), and the result is recorded in a log file; similarly, after the upper computer software sends an instruction for closing the water inlet valve of the process tank, the corresponding IO value is set to be 0, and the result is recorded in the log file.
The combined function instruction refers to a function of controlling a plurality of basic function instructions through corresponding execution logic in the logic layer, for example, a combined function instruction for cleaning a process tank for water injection, two basic function instructions of opening a water injection valve and closing the water injection valve which need to be called, and certain logic processing is included, for example, the water injection valve is closed when the liquid level reaches a preset value. In each combined function instruction, a method setChangeTime () provided by simulenvironment and used for setting IO change time is called, the change time of each bound DI channel is set according to the sequence of the change time of a plurality of basic functions executed in each combined function instruction, and the parameter format of the setChangeTime () method is as follows: "channel number, parameter value, time", each channel number sets a change time, and if not, the default is unchanged.
Fig. 4 shows an example of a method for setting a change of a simulated DI channel in a combined function instruction of a water filling function of a process Tank, where a water filling function instruction is sent from upper computer software, a program enters a logic control method of the function after going to a logic layer of lower computer software, and after determining that the current mode is a simulation mode, the program first calls a simulated setChangeTime () method (the method is actually executed on another single thread), sets a change time of a DI point channel, and sets a certain liquid level change in a water filling function of Tank 1: setChangeTime (72, 0, 0) and setChangeTime (72, 1, 5) indicating that the liquid level DI signal with channel number 72 is in the trigger state at the 5 th s, and then the water filling function command is executed. When the signal is at 0s, the DI point with channel number 72 (the point is the liquid level DI signal) is in the non-triggered state, and the DI point value is 0 (the actual machine indicates that the water level in the time slot does not reach). When the 5 th time slot is reached, the simulation program will automatically trigger the DI signal, i.e. set the IO channel value of the point to 1 (in the actual hardware machine, this indicates that the water level in the time slot has been reached). Therefore, the situation that the water injection function operates in the actual machine can be dynamically restored in the testing stage. After the 5 th time, the combined function logic judges that the water level reaches, the valve closing function is called, and then the function is normally finished.
Therefore, the IAP-based simulation method according to the embodiment can effectively avoid that the water injection function in the conventional simulation test method continues to alarm until the function is overtime if the water level signal is not monitored until the water level signal is lighted up, can accurately test the direct change and the indirect change of the point channel, restores the working scene of the actual hardware machine, and improves the accuracy of the simulation test result through the setting method of the dynamic simulation DI signal.
The embodiment of the present invention further provides an IAP-based simulation apparatus, including:
the file analysis module is used for analyzing a configuration file for simulating a simulation environment of the hardware machine, binding a functional instruction of the hardware machine and a corresponding IO point channel according to the configuration file, and setting an IO initial value of each IO point channel;
the simulation module is used for establishing a simulation environment, receiving a functional instruction for controlling the hardware machine through the logic layer and sending the functional instruction to the drive layer; judging whether the current mode is in a simulation mode or not through a driving layer; when the current simulation mode is in, the communication between the driving layer and the hardware machine is blocked, and the functional instruction is issued to the simulation environment to simulate the hardware machine to execute the functional instruction; and returning the simulation result of the functional instruction through the driving layer and the logic layer.
Specifically, the file parsing module is mainly used for defining an externally provided simulenvironment xml configuration file, binding a function and an IO point channel through a specified format, and setting an IO initial value, wherein the binding content mainly includes: binding a basic function (DO) and a corresponding DI point position channel number in a one-to-one mode; binding the PMC combination function with a corresponding DI point location channel number in a one-to-many manner; TMC combination function and corresponding state (DI) point location channel number are bound one to many; the AO analog quantity output function is bound with the corresponding AI analog quantity input channel. The simulation module is mainly used for a simulation issuing processing method, a simulation receiving processing method, a simulation environment setting method and the like.
In one example, the method may further include: and the log module is used for recording the receiving and sending of the functional instruction and the change of the IO point location channel in the simulation mode.
Specifically, the log module mainly records contents such as function instruction receiving and sending, IO channel change and the like in the simulation mode.
The embodiment of the invention further provides wafer cleaning equipment based on an IAP mechanism, which comprises the IAP-based simulation device. By adopting the lower computer simulation system based on the IAP mechanism of the embodiment, the actual machine scene can be restored in the simulation test stage, the direct point location change and the indirect point location change of the actual machine can be displayed in the simulation mode, and a reliable simulation test result can be provided.
The technical personnel in the field can complete the secondary development of the simulation environment of the invention based on the method of the invention through the tools such as the bottom library function and the related simulation label provided by the existing IAP (the development process of the simulation environment is easy to realize by the technical personnel in the field and is not described herein), the developed simulation environment is grafted into the software program of the lower computer, the binding of the functional instruction and the channel point and the related IO initial value setting are carried out aiming at different machine functions based on the configuration file provided by the simulation environment, the simulation test aiming at different hardware machines is realized, and the simulation environment of the invention can be transplanted into any lower computer software developed based on the IAP, or other semiconductor equipment developed based on the upper computer software and the lower computer software, so that the same technical effect can be realized.
Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.
Claims (10)
1. An IAP-based simulation method is characterized by comprising the following steps:
receiving a function instruction for controlling a hardware machine through a logic layer, and issuing the function instruction to a drive layer;
judging whether the current mode is a simulation mode or not through the driving layer;
when the current simulation mode is in, blocking the communication between the driving layer and the hardware machine, issuing the functional instruction to a simulation environment for simulating the hardware machine, and simulating the hardware machine to execute the functional instruction;
returning the simulation result of the functional instruction through the driving layer and the logic layer;
the simulation environment is preset, the configuration file of the simulation environment comprises a binding relationship between a functional instruction of the hardware machine and corresponding IO point location channels, and each IO point location channel is provided with an IO initial value.
2. The IAP-based emulation simulation method of claim 1, wherein presetting the emulation environment comprises:
and importing a pre-compiled simulation dynamic link library file into an IAP simulation project to generate the simulation environment, and adding the configuration file of the simulation environment into the configuration file of the IAP simulation project.
3. The IAP-based emulation simulation method of claim 1, wherein configuring a configuration file of the emulation environment comprises at least one of:
binding each basic function instruction with one DI point location channel in the simulation environment and setting an IO initial value of each DI point location channel;
binding each PMC combined function instruction with a plurality of DI point location channels in the simulation environment and setting an IO initial value of each DI point location channel;
binding each TMC combined function instruction with a plurality of DI point location channels in the simulation environment and setting an IO initial value of each DI point location channel;
and binding each AO quantity function instruction with one AI point location channel in the simulation environment and setting an IO initial value of each AI point location channel.
4. The IAP-based emulation simulation method of claim 3, wherein the issuing the functional instruction into an emulation environment for emulating the hardware machine, the emulating the hardware machine to execute the functional instruction comprises:
when the function instruction is the basic function instruction or the AO amount function instruction, directly issuing the basic function instruction or the AO amount function instruction to the simulation environment, and simulating and executing the basic function instruction or the AO amount function instruction by a simulation module in the simulation environment according to the IO initial value of a corresponding DI point location channel or AI point location channel in the configuration file.
5. The IAP-based machine emulation simulation method of claim 3, wherein the issuing the functional instruction into an emulation environment for emulating the hardware machine, the emulating the hardware machine to execute the functional instruction comprises:
when the functional instruction is the PMC combined functional instruction or the TMC combined functional instruction, first calling an execution logic corresponding to the PMC combined functional instruction or the TMC combined functional instruction, issuing the PMC combined functional instruction or the TMC combined functional instruction and the execution logic to the simulation environment, calling a method for setting a change time of an IO point location channel provided by the simulation environment, setting a change time of each DI point location channel bound to the PMC combined functional instruction or the TMC combined functional instruction according to the execution logic in a sequence of the change times, and simultaneously simulating and executing the PMC combined functional instruction or the TMC combined functional instruction according to the IO initial value of each corresponding DI point location channel in the configuration file.
6. The IAP-based simulation method according to claim 5, wherein the method for calling the IO point channel change setting time provided by the simulation environment comprises:
the setChangeTime () method is called.
7. The IAP-based emulation simulation method of claim 1, wherein blocking communication between the driver layer and a hardware platform comprises:
and declaring that the simulation environment is taken as an example in the drive layer, and blocking the communication between the drive layer and the hardware machine by using a simulation method provided by the IAP.
8. An IAP-based emulation apparatus, comprising:
the file analysis module is used for analyzing a configuration file for simulating a simulation environment of a hardware machine, binding a functional instruction of the hardware machine and a corresponding IO point channel according to the configuration file, and setting an IO initial value of each IO point channel;
the simulation module is used for establishing the simulation environment, receiving a functional instruction for controlling the hardware machine through a logic layer and sending the functional instruction to a driving layer; judging whether the current mode is a simulation mode or not through the driving layer; when the current simulation mode is in, blocking the communication between the driving layer and a hardware machine, issuing the functional instruction to the simulation environment, and simulating the hardware machine to execute the functional instruction; and returning the simulation result of the functional instruction through the driving layer and the logic layer.
9. The IAP-based emulation simulation device of claim 8, further comprising:
and the log module is used for recording the receiving and sending of the functional instruction and the change of the IO point position channel in the simulation mode.
10. An IAP based wafer cleaning apparatus comprising an IAP based simulation device according to claim 8 or 9.
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| CN113676368A (en) * | 2021-07-12 | 2021-11-19 | 交控科技股份有限公司 | Method and device applied to ATS network performance test |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112749425A (en) * | 2021-01-19 | 2021-05-04 | 北京北方华创微电子装备有限公司 | Gas path diagram implementation method and device based on IAP platform |
| CN113676368A (en) * | 2021-07-12 | 2021-11-19 | 交控科技股份有限公司 | Method and device applied to ATS network performance test |
| CN113676368B (en) * | 2021-07-12 | 2022-07-19 | 交控科技股份有限公司 | Method and device applied to ATS network performance test |
Also Published As
| Publication number | Publication date |
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| CN111310313B (en) | 2023-10-13 |
| TW202129526A (en) | 2021-08-01 |
| TWI792141B (en) | 2023-02-11 |
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