CN111310313B - IAP-based simulation method and device and wafer cleaning equipment - Google Patents
IAP-based simulation method and device and wafer cleaning equipment Download PDFInfo
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Abstract
The invention discloses an IAP-based simulation method and device and wafer cleaning equipment, wherein the method comprises the following steps: receiving a function instruction for controlling the hardware machine by the logic layer, and issuing the function instruction to the driving layer; judging whether the current simulation mode exists or not through a driving layer; when the simulation system is in the simulation mode, the communication between the driving layer and the hardware machine is blocked, and a functional instruction is issued to a simulation environment for simulating the hardware machine, and the simulation hardware machine executes the functional instruction; returning the simulation result of the function instruction through the driving layer and the logic layer; the simulation environment is preset, the configuration file of the simulation environment comprises binding relations between functional instructions of the hardware machine and corresponding IO point position channels, and each IO point position channel is provided with an IO initial value. The method can restore the working scene of the actual machine in the simulation test stage and display the real point position channel change of the hardware machine in the simulation mode so as to provide a reliable simulation test result.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to an IAP-based simulation method and device and wafer cleaning equipment applying the IAP-based simulation device.
Background
The current semiconductor device relies on an IAP (Industrial automation platform ) mechanism, and a software control system of the current semiconductor device can be divided into an upper computer software and a lower computer software, wherein the upper computer software mainly aims at providing a GUI interface, storing data and controlling the lower computer software, and the lower computer software mainly aims at receiving an instruction sent by the upper computer software, controlling actual machine hardware to execute corresponding actions, and feeding back the lower computer software and hardware information to the upper computer software.
The lower computer software is divided into a logic layer and a driving layer according to a hierarchical structure, wherein the logic layer comprises logic codes of all basic functions, combined functions, alarms, interlocks and the like, the driving layer is used for connecting the logic layer with IO points of hardware equipment, and the lower computer software performs interaction of the hardware equipment through the driving layer.
Therefore, when the hardware device is not connected to the lower computer software, the lower computer software must be switched to the emulation mode, otherwise, an abnormality occurs. The test of the current simulation mode is only to directly return after an instruction reaches a driving layer, the scene can only test whether the communication of upper computer software and lower computer software is normal, whether a functional code is triggered normally (only the function of a shallow layer is tested, and a code block which specifically relates to hardware interaction cannot normally be executed), but the actual machine scene cannot be restored and the IO point position change actually related to a hardware machine is fed back, so that the current software can pass through a simulation test stage smoothly frequently, but errors are frequently reported in the actual work of the hardware machine, and quite errors which do not occur in the simulation test stage often occur.
Therefore, it is necessary to provide a simulation method, which can restore the working scene of the actual machine in the simulation test stage and display the real point position channel variation of the hardware machine in the simulation mode so as to provide a reliable simulation test result.
Disclosure of Invention
The invention aims to provide an IAP-based simulation method, an IAP-based simulation device and wafer cleaning equipment, which are used for restoring the working scene of an actual hardware machine in a simulation test stage, displaying the actual point position channel change of the hardware machine in a simulation mode and providing a reliable simulation test result.
In order to achieve the above object, the present invention provides an IAP-based simulation method, including:
receiving a function instruction for controlling a hardware machine through a logic layer, and issuing the function instruction to a driving layer;
judging whether the current simulation mode exists or not through the driving layer;
when the simulation mode is currently in the simulation mode, blocking communication between the driving layer and the hardware machine, and issuing the functional instruction to a simulation environment for simulating the hardware machine to simulate the hardware machine to execute the functional instruction;
returning simulation results of the functional instructions through the driving layer and the logic layer;
the simulation environment is preset, the configuration file of the simulation environment comprises binding relations between functional instructions of the hardware machine and corresponding IO point position channels, and each IO point position channel is provided with an IO initial value.
Optionally, presetting the simulation environment includes:
and importing the precompiled simulation dynamic link library file into an IAP simulation project to generate the simulation environment, and adding the configuration file of the simulation environment into the configuration file of the IAP simulation project.
Optionally, the configuration file for configuring the simulation environment includes at least one of:
binding each basic function instruction with one DI point location channel in the simulation environment and setting an IO initial value of each DI point location channel;
binding each PMC combined function instruction with a plurality of DI point bit channels in the simulation environment and setting an IO initial value of each DI point bit channel;
binding each TMC combined function instruction with a plurality of DI point bit channels in the simulation environment and setting an IO initial value of each DI point bit channel;
binding each AO function instruction with one AI point position channel in the simulation environment and setting the IO initial value of each AI point position channel.
Optionally, the issuing the functional instruction to a simulation environment for simulating the hardware machine, and simulating the hardware machine to execute the functional instruction includes:
when the function instruction is the basic function instruction or the AO quantity function instruction, directly issuing the basic function instruction or the AO quantity function instruction to the simulation environment, and performing simulation execution on the basic function instruction or the AO quantity function instruction by a simulation module in the simulation environment according to the IO initial value of the corresponding DI point position channel or AI point position channel in the configuration file.
Optionally, the issuing the functional instruction to a simulation environment for simulating the hardware machine, and simulating the hardware machine to execute the functional instruction includes:
when the function instruction is the PMC combined function instruction or the TMC combined function instruction, firstly, calling an execution logic corresponding to the PMC combined function instruction or the TMC combined function instruction, issuing the PMC combined function instruction or the TMC combined function instruction and the execution logic to the simulation environment, calling a method for setting the variation time of the IO point position channel provided by the simulation environment, setting the variation time of each DI point position channel bound by the PMC combined function instruction or the TMC combined function instruction according to the execution logic according to the variation time sequence, and simultaneously simulating and executing the PMC combined function instruction or the TMC combined function instruction according to the IO initial value of each DI point position channel corresponding to the configuration file.
Optionally, the method for setting the variation time of the IO point location channel provided by the simulation environment includes:
the setChangeTime () method is called.
Optionally, the blocking the communication between the driving layer and the hardware platform includes:
and declaring that the simulation environment is taken as an example in the driving layer, and blocking the communication between the driving layer and the hardware machine by using the simulation method provided by the IAP.
The invention also provides an IAP-based simulation device, which comprises:
the file analysis module is used for analyzing a configuration file of a simulation environment of the simulation hardware machine, binding a functional instruction of the hardware machine with a corresponding IO point position channel according to the configuration file and setting an IO initial value of each IO point position channel;
the simulation module is used for establishing the simulation environment, receiving a functional instruction for controlling the hardware machine through the logic layer and transmitting the functional instruction to the driving layer; judging whether the current simulation mode exists or not through the driving layer; when the simulation mode is currently in, blocking communication between the driving layer and the hardware machine, and issuing the functional instruction to the simulation environment to simulate the hardware machine to execute the functional instruction; and returning simulation results of the functional instructions through the driving layer and the logic layer.
Optionally, the method further comprises: and the log module is used for recording the receiving and transmitting of the functional instruction and the change of the IO point position channel in the simulation mode.
The invention also provides IAP-based wafer cleaning equipment, which comprises the IAP-based simulation device.
The invention has the beneficial effects that:
the invention simulates the operation of a real hardware machine based on an IAP mechanism, binds a function command and an IO point position channel of the simulation machine in advance by the configuration file of the simulation environment, sets parameter values, blocks the communication between the driving layer and the hardware machine when the driving layer judges that the driving layer is in a simulation mode currently, issues the function command to the simulation environment for simulating the hardware machine, and executes the function command by the simulation hardware machine, thereby realizing the reduction of the operation scene of the actual hardware machine in a simulation test stage, displaying the actual point position channel change of the hardware machine in a simulation mode and providing a reliable simulation test result.
The device of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.
Drawings
The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular descriptions of exemplary embodiments of the invention as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the invention.
Fig. 1 shows a step diagram of an IAP based simulation method according to the invention.
Fig. 2 shows a schematic diagram of an IAP based simulation method according to the present invention.
Fig. 3 is a schematic diagram of a method for a driver layer to issue a function instruction to a simulation environment in an IAP-based simulation method according to an embodiment of the present invention.
Fig. 4 is a diagram showing an example of a combined function simulation procedure in an IAP-based simulation method according to an embodiment of the present invention.
Detailed Description
The current test of the lower computer software simulation mode based on the IAP mechanism is to directly return after an instruction arrives at a driving layer, the scene can only test whether the upper computer software and the lower computer software are communicated normally or not, whether a functional code is triggered normally or not, and the actual machine scene and the IO point position change actually related to a feedback hardware machine cannot be restored, wherein the scene comprises some direct changes and indirect changes, such as some conflicted mutually exclusive point positions (two point positions cannot be triggered simultaneously at any moment), when a certain basic function (a basic function instruction is a function for directly controlling a specific point position, and a function with a logic control basic function is called a combined function relatively) controls one point position, the point position cannot be triggered normally only due to the fact that the conflicted point position is in a trigger state according to actual conditions, and meanwhile, the point position is triggered normally due to the fact that the conflicted point position is not triggered.
Therefore, the existing simulation test only returns directly without issuing a command to the hardware, so that indirect change cannot be tested, and the actual machine working scene cannot be restored, so that a result against the actual working condition of the machine appears, for example, two commands for respectively controlling a pair of conflict points are issued normally, and when the test content is more and more abundant, the test result is unreliable.
In order to solve the problems, the method provides an IAP-based simulation method, which can restore the working scene of the actual machine in the simulation test stage and display the real point position channel change of the hardware machine in the simulation mode so as to provide a reliable simulation test result.
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are illustrated in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
Fig. 1 shows a step diagram of an IAP based simulation method according to the invention.
As shown in fig. 1, an IAP-based simulation method according to the present invention includes:
receiving a function instruction for controlling the hardware machine by the logic layer, and issuing the function instruction to the driving layer;
judging whether the current simulation mode exists or not through a driving layer;
when the simulation system is in the simulation mode, the communication between the driving layer and the hardware machine is blocked, and a functional instruction is issued to a simulation environment for simulating the hardware machine, and the simulation hardware machine executes the functional instruction;
returning the simulation result of the function instruction through the driving layer and the logic layer;
the simulation environment is preset, the configuration file of the simulation environment comprises binding relations between functional instructions of the hardware machine and corresponding IO point position channels, and each IO point position channel is provided with an IO initial value.
Specifically, referring to fig. 2, by binding a function command and an IO point location channel of a simulation platform in a configuration file of a simulation environment in advance and setting a parameter value, when a driving layer judges that the driving layer is currently in a simulation mode, communication between the driving layer and a hardware platform is blocked, a function instruction is issued to the simulation environment for simulating the hardware platform, the simulation hardware platform executes the function instruction, the reduction of a working scene of an actual hardware platform in a simulation test stage is realized, the actual point location channel change of the hardware platform is displayed in the simulation mode, and a reliable simulation test result is provided. The IAP comprises upper computer software and lower computer software, the upper computer software can issue functional instructions for controlling the hardware machine to the hardware machine through the lower computer software, and the lower computer software is provided with a logic layer and a driving layer
In a preferred embodiment, the preset simulation environment may include: and importing the precompiled simulation dynamic link library file into the IAP simulation project to generate a simulation environment, and adding the configuration file of the simulation environment into the configuration file of the IAP simulation project.
Specifically, the IAP is provided with a simulation tag for external development, and a person skilled in the art can develop and compile a simulation program for realizing a simulation environment in advance according to the present invention, and nest the simulation program in lower computer software to realize the establishment of the simulation environment.
In one example, a precompiled simulation dynamic link library file simuenvironment. Dll is imported into an IAP simulation project to generate a simulation environment, and a configuration file simuenvironment. Xml is added to a config file under the IAP simulation project file, with the contents configured therein.
In a preferred embodiment, according to the function instruction of the control hardware machine, the configuration file for configuring the simulation environment may include at least one of the following:
binding each basic function instruction with a corresponding DI point location channel in the simulation environment and setting an IO initial value of each DI point location channel;
binding each PMC combined function instruction with a plurality of corresponding DI point position channels in the simulation environment and setting an IO initial value of each DI point position channel;
binding each TMC combined function instruction with a plurality of corresponding DI point position channels in the simulation environment and setting an IO initial value of each DI point position channel;
binding each AO function instruction with a corresponding AI point position channel in the simulation environment and setting the IO initial value of each AI point position channel.
Specifically, in the configuration file simuenvironment. Xml, the function and the IO channel can be bound through a specified format, and the IO initial value is set, wherein the binding content mainly comprises the following steps:
the basic function command (DO channel digital quantity output) is bound with the corresponding DI (channel digital quantity input) point position channel number one-to-one, for example, the filling valve control command is bound with the filling valve DI channel;
the PMC combined function instruction (comprising a plurality of basic function instructions) is bound with the corresponding DI point location channel number in a one-to-many mode, for example, a Tank1 water injection function is bound with all liquid level DI channels of the Tank1, or a Robot1 horizontal movement function is bound with all Tank in-place detection DI points of the Robot 1;
TMC combined function instructions (such as function instructions of a manipulator cross-multi-process module movement operation) are bound with corresponding state DI point channel numbers in one-to-many mode, for example, robot1 horizontal movement functions and Robot 1X-axis shift to target position commands are bound with all state DI channels;
the AO (analog output) function command is bound to a corresponding AI (analog input) channel, for example, the heating station heating temperature AO function command is bound to a corresponding AI channel.
The lower computer software includes PMC and TMC. Wherein PMC (process module control process module control) refers to a process module that is fixed on a machine, e.g., each tank and all components belonging thereto. TMC (transfer module control transfer module control), refers to hardware that is movable on a machine table across multiple process modules for transfer, such as robots and the like. Thus, PMC combining functions bind IO within one process module, while TMC combining functions bind all IO points (involving multiple process modules) within the transmitted hardware movement interval.
In a preferred embodiment, blocking communication between the driver layer and the hardware platform may include:
the method includes the steps that the driving layer of the IAP lower computer software is declared to take a simulation environment as an example, and communication between the driving layer and a hardware machine is blocked through a simulation method provided by the IAP.
Specifically, fig. 3 is an example of processing a method for issuing a driving layer to a PLC, in which a simulation environment is declared in a lower computer software driving layer, communication with hardware is blocked by a simulation method provided by IAP and a read-write method provided by the simulation environment is called, that is, a basic function instruction or an AO function instruction can be issued to the simulation environment, so that the simulation environment is built and basic functions can be tested smoothly.
In a preferred embodiment, the issuing of the functional instruction into the simulation environment for the simulated hardware machine, the executing the functional instruction by the simulated hardware machine may include:
when the function instruction is a basic function instruction or an AO quantity function instruction, directly issuing the basic function instruction or the AO quantity function instruction to a simulation environment, and executing the simulation of the basic function instruction or the AO quantity function instruction by a simulation program in the simulation environment according to the IO initial value of a corresponding DI point position channel or AI point position channel in the configuration file;
when the function instruction is a PMC combined function instruction or a TMC combined function instruction, firstly, calling an execution logic corresponding to the PMC combined function instruction or the TMC combined function instruction, issuing the PMC combined function instruction or the TMC combined function instruction and the execution logic to a simulation environment, calling a method for setting the change moment of the IO point position channel provided by the simulation environment, setting the change moment of each DI point position channel bound by the PMC combined function instruction or the TMC combined function instruction according to the execution logic according to the change moment sequence, and simultaneously simulating and executing the PMC combined function instruction or the TMC combined function instruction according to the IO initial value of each DI point position channel corresponding to the configuration file.
Specifically, the basic function instruction is an on or off operation of a pointer to a hardware point location channel of a basic machine. For example, in the prior art, a water inlet valve of a certain process tank in a machine platform is directly opened, as shown in fig. 1, after the upper computer software sends the function instruction, the logic layer receives the instruction and then issues the instruction to the driving layer, the driving layer judges that the simulation mode is the simulation mode at the moment, and does not perform hardware interaction, but enters a simulation read-write method, and directly jumps to a simulation program, the simulation program sets the bound IO channel value to 1 (namely, the signal triggers), and simultaneously records the result in a log file; similarly, when the upper computer software sends a command for closing the water inlet valve of the process tank, the corresponding IO value is set to 0, and the result is recorded in the log file.
The combined function instruction refers to a function of controlling a plurality of basic function instructions through corresponding execution logic in a logic layer, for example, a combined function instruction for realizing water injection of a clean process tank, two basic function instructions of opening a water injection valve and closing the water injection valve, which need to be called, include certain logic processing, for example, closing the water injection valve when the liquid level reaches a preset value. In each combined function instruction, calling a method setChangeTime () for setting IO change time provided by SimuEnvironment, and setting the change time of each bound DI channel according to the change time sequence of executing a plurality of basic functions in each combined function instruction, wherein the parameter format of the setChangeTime () method is as follows: the channel numbers, parameter values and time are set with a change time, and the default is unchanged when the channel numbers are not set.
Fig. 4 shows an example of a method for setting a simulated DI channel change in a combined function instruction of a process Tank water injection function, where the water injection function instruction is sent from an upper computer software, after a program goes to a lower computer software logic layer, the program enters a logic control method of the function, after judging that the program is in a simulation mode, the program will first call a simulated setChangeTime () method (the method is actually executed on another separate thread), the change time of the DI point location channel is set, and a certain liquid level change is set in the Tank1 water injection function: setChangeTime (72,0,0) and setChangeTime (72,1,5), indicate that the level DI signal with channel number 72 is in the triggered state at 5s, after which execution of the fill function command begins. When the number of s is 0, the DI point (the point is the liquid level DI signal) with the channel number of 72 is in an un-triggered state, and the DI point value is 0 (the actual machine indicates that the water level in the tank is not reached). When 5s, the simulation program will automatically trigger the DI signal, i.e. the IO channel value of the point is set to 1 (in the actual hardware platform, the water level in the tank is reached). Therefore, the water injection function can be dynamically restored to the condition of operating in the actual machine in the test stage. When the combined function logic judges that the water level is reached after 5s, the valve closing function is called, and then the function is normally ended.
Therefore, the IAP-based simulation method of the embodiment can effectively avoid the problem that the water injection function can continuously alarm until the function is overtime after the water level signal is not always monitored in the traditional simulation test method by the dynamic simulation DI signal setting method, can accurately test the direct change and the indirect change of the point location channel, restore the working scene of the actual hardware machine and improve the accuracy of the simulation test result.
The embodiment of the invention also provides an IAP-based simulation device, which comprises:
the file analysis module is used for analyzing the configuration file of the simulation environment of the simulation hardware machine, binding the functional instruction of the hardware machine with the corresponding IO point position channel according to the configuration file and setting the IO initial value of each IO point position channel;
the simulation module is used for establishing a simulation environment, receiving a functional instruction for controlling the hardware machine through the logic layer and transmitting the functional instruction to the driving layer; judging whether the current simulation mode exists or not through a driving layer; when the simulation mode is currently in, blocking the communication between the driving layer and the hardware machine, and issuing a functional instruction to a simulation environment to simulate the hardware machine to execute the functional instruction; and returning simulation results of the functional instructions through the driving layer and the logic layer.
Specifically, the file parsing module is mainly used for defining a simuenvironment-based xml configuration file provided outside, binding functions and IO point channels through a specified format, and setting IO initial values, wherein binding contents mainly comprise: the basic function (DO) is bound with the corresponding DI point location channel number one to one; the PMC combination function is bound with the corresponding DI point location channel number in a one-to-many manner; the TMC combining function is bound with the corresponding state (DI) point location channel number in one-to-many mode; the AO analog quantity output function is bound with the corresponding AI analog quantity input channel. The simulation module is mainly used for simulating a transmitting processing method, a receiving processing method, a simulation environment setting method and the like.
In one example, it may further include: and the log module is used for recording the receiving and transmitting of the functional instruction and the change of the IO point position channel in the simulation mode.
Specifically, the log module mainly records contents such as function instruction receiving and transmitting and IO channel change in a simulation mode.
The embodiment of the invention also provides wafer cleaning equipment based on the IAP mechanism, which comprises the IAP-based simulation device. By adopting the lower computer simulation system based on the IAP mechanism, the scene of the actual machine can be restored in the simulation test stage, and the direct point position change and the indirect point position change of the actual machine can be displayed in the simulation mode, so that a reliable simulation test result is provided.
The secondary development of the simulation environment is completed based on the method (the development process of the simulation environment is easy to realize for the technicians in the field and is not repeated here) by the technicians in the field through the tools such as the bottom library function provided by the existing IAP and the related simulation labels, the developed simulation environment is grafted into the lower computer software program, binding of function instructions and channel point positions and related IO initial value setting are carried out for different machine functions based on configuration files provided by the simulation environment, so that simulation test for different hardware machines is realized, and the simulation environment can be transplanted into the lower computer software developed based on the IAP or into other semiconductor devices developed based on the upper computer software and the lower computer software, so that the same technical effect can be realized.
The foregoing description of embodiments of the invention has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described.
Claims (10)
1. An IAP-based simulation method applied to a semiconductor device, the method comprising:
receiving a function instruction for controlling a hardware machine by a logic layer of lower computer software, and transmitting the function instruction to a driving layer of the lower computer software;
judging whether the current simulation mode exists or not through the driving layer;
when the simulation mode is currently in the simulation mode, blocking communication between the driving layer and the hardware machine, and issuing the functional instruction to a simulation environment for simulating the hardware machine to simulate the hardware machine to execute the functional instruction;
returning simulation results of the functional instructions through the driving layer and the logic layer;
the simulation environment is preset, the configuration file of the simulation environment comprises binding relations between functional instructions of the hardware machine and corresponding IO point position channels, and each IO point position channel is provided with an IO initial value.
2. The IAP based simulation method of claim 1, wherein presetting the simulation environment comprises:
and importing the precompiled simulation dynamic link library file into an IAP simulation project to generate the simulation environment, and adding the configuration file of the simulation environment into the configuration file of the IAP simulation project.
3. The IAP based simulation method of claim 1, wherein configuring the configuration file of the simulation environment comprises at least one of:
binding each basic function instruction with one DI point location channel in the simulation environment and setting an IO initial value of each DI point location channel;
binding each PMC combined function instruction with a plurality of DI point bit channels in the simulation environment and setting an IO initial value of each DI point bit channel;
binding each TMC combined function instruction with a plurality of DI point bit channels in the simulation environment and setting an IO initial value of each DI point bit channel;
binding each AO function instruction with one AI point position channel in the simulation environment and setting the IO initial value of each AI point position channel.
4. The IAP based simulation method of claim 3, wherein the issuing the function instruction into a simulation environment for simulating the hardware platform, simulating the hardware platform to execute the function instruction comprises:
when the function instruction is the basic function instruction or the AO quantity function instruction, directly issuing the basic function instruction or the AO quantity function instruction to the simulation environment, and performing simulation execution on the basic function instruction or the AO quantity function instruction by a simulation module in the simulation environment according to the IO initial value of the corresponding DI point position channel or AI point position channel in the configuration file.
5. The IAP based simulation method of claim 3, wherein the issuing the function instruction into a simulation environment for simulating the hardware platform, simulating the hardware platform to execute the function instruction comprises:
when the function instruction is the PMC combined function instruction or the TMC combined function instruction, firstly, calling an execution logic corresponding to the PMC combined function instruction or the TMC combined function instruction, issuing the PMC combined function instruction or the TMC combined function instruction and the execution logic to the simulation environment, calling a method for setting the variation time of the IO point position channel provided by the simulation environment, setting the variation time of each DI point position channel bound by the PMC combined function instruction or the TMC combined function instruction according to the execution logic according to the variation time sequence, and simultaneously simulating and executing the PMC combined function instruction or the TMC combined function instruction according to the IO initial value of each DI point position channel corresponding to the configuration file.
6. The IAP based simulation method of claim 5, wherein the method for calling the change time of the IO point location channel provided by the simulation environment comprises:
the setChangeTime () method is called.
7. The IAP based simulation method of claim 1, wherein the blocking communication between the driver layer and the hardware platform comprises:
and declaring that the simulation environment is taken as an example in the driving layer, and blocking the communication between the driving layer and the hardware machine by using the simulation method provided by the IAP.
8. An IAP-based simulation simulator for a semiconductor device, comprising:
the file analysis module is used for analyzing a configuration file of a simulation environment of the simulation hardware machine, binding a functional instruction of the hardware machine with a corresponding IO point position channel according to the configuration file and setting an IO initial value of each IO point position channel;
the simulation module is used for establishing the simulation environment, receiving a functional instruction for controlling the hardware machine platform through a logic layer of lower computer software, and transmitting the functional instruction to a driving layer of the lower computer software; judging whether the current simulation mode exists or not through the driving layer; when the simulation mode is currently in, blocking communication between the driving layer and the hardware machine, and issuing the functional instruction to the simulation environment to simulate the hardware machine to execute the functional instruction; and returning simulation results of the functional instructions through the driving layer and the logic layer.
9. The IAP based simulation simulator of claim 8, further comprising:
and the log module is used for recording the receiving and transmitting of the functional instruction and the change of the IO point position channel in the simulation mode.
10. IAP-based wafer cleaning apparatus, characterized in that it comprises an IAP-based simulation device according to claim 8 or 9.
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| CN107807539A (en) * | 2017-10-17 | 2018-03-16 | 广东工业大学 | A kind of glass post-processing production line distributed integeration method and its system |
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| TWI792141B (en) | 2023-02-11 |
| TW202129526A (en) | 2021-08-01 |
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