TW202120600A - Polyimide, polyimide resin film, multilayer body and flexible device - Google Patents

Polyimide, polyimide resin film, multilayer body and flexible device Download PDF

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TW202120600A
TW202120600A TW109140573A TW109140573A TW202120600A TW 202120600 A TW202120600 A TW 202120600A TW 109140573 A TW109140573 A TW 109140573A TW 109140573 A TW109140573 A TW 109140573A TW 202120600 A TW202120600 A TW 202120600A
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polyimide
resin film
polyimide resin
structural unit
polyimine
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佐伯昭典
三井博子
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日商東麗股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/34Layered products comprising a layer of synthetic resin comprising polyamides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors

Abstract

The present invention provides a polyimide which contains a specific structural unit, and which is characterized in that with respect to the IR spectrum of a resin film formed of this polyimide and having a thickness of 10 [mu]m, if Y is the maximum peak intensity present within the range of from 1,450 to 1,550 cm<SP>-1</SP> and Z is the maximum peak intensity present within the range of from 3,400 to 3,700 cm<SP>-1</SP>, Y and Z satisfy formula 0.1 ≤ Z/Y ≤ 0.4; and this polyimide has good transparency, oxidation resistance and laser releasability from a supporting substrate, while having low in-plane/out-of-plane birefringence, and enables the achievement of a polyimide resin film having excellent flexibility and a flexible device.

Description

聚醯亞胺、聚醯亞胺樹脂膜、積層體及可撓性器件Polyimide, polyimide resin film, laminate and flexible device

本發明是有關於一種聚醯亞胺、聚醯亞胺樹脂膜、積層體及可撓性器件。The invention relates to a polyimide, a polyimide resin film, a laminate and a flexible device.

有機膜與玻璃相比具有富有彎曲性、不易破裂且輕量等特長。最近,藉由將平板顯示器的基板更換為有機膜而使平板顯示器可撓性化的動態活躍化。Compared with glass, organic film has the advantages of flexibility, resistance to cracking, and light weight. Recently, by replacing the substrate of the flat panel display with an organic film, the dynamics of the flexibility of the flat panel display have been activated.

作為有機膜中所使用的樹脂,可列舉:聚酯、聚醯胺、聚醯亞胺、聚碳酸酯、聚醚碸、丙烯酸、環氧、環烯烴聚合物等。該些中,聚醯亞胺為高耐熱性樹脂,因此適合作為顯示器基板。然而,通常的聚醯亞胺樹脂因高的芳香環密度而著色為茶色或黃色,從而可見光線區域中的透射率低,難以用於要求透明性的領域中。Examples of the resin used in the organic film include polyester, polyamide, polyimide, polycarbonate, polyether sulfide, acrylic, epoxy, cycloolefin polymer, and the like. Among these, polyimide is a highly heat-resistant resin, so it is suitable as a display substrate. However, ordinary polyimide resins are colored brown or yellow due to their high aromatic ring density, so that the transmittance in the visible light region is low, and it is difficult to use them in fields requiring transparency.

針對提高此種聚醯亞胺樹脂的透明性的課題,於專利文獻1中揭示有由脂環式酸二酐與各種芳香族二胺或脂環式二胺獲得的聚醯亞胺具有高透明性、低雙折射性。In response to the problem of improving the transparency of such polyimide resins, Patent Document 1 discloses that polyimides obtained from alicyclic acid dianhydrides and various aromatic diamines or alicyclic diamines have high transparency. Sex, low birefringence.

另外,於專利文獻2中揭示有使用在空氣中進行煆燒而獲得的透明聚醯亞胺樹脂膜來獲得可撓性的觸控面板的方法。 [現有技術文獻] [專利文獻]In addition, Patent Document 2 discloses a method of obtaining a flexible touch panel using a transparent polyimide resin film obtained by sintering in the air. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開平11-080350號公報 [專利文獻2]國際公開第2018/84067號[Patent Document 1] Japanese Patent Laid-Open No. 11-080350 [Patent Document 2] International Publication No. 2018/84067

[發明所欲解決之課題] 但是,專利文獻1中記載的聚醯亞胺存在如下問題:耐氧化性低,當於大氣環境下進行加熱時,因熱氧化而容易黃變。另外,於在有機膜上製作顯示器的情況下,通常是如下等製程:將有機膜成膜於支撐基板上,於有機膜上製作電子器件,然後自支撐基板剝離有機膜。於該剝離製程中,專利文獻1中記載的聚醯亞胺存在剝離所需的照射能量高且雷射剝離性差的問題。[The problem to be solved by the invention] However, the polyimide described in Patent Document 1 has the following problem: its resistance to oxidation is low, and when heated in an atmospheric environment, it is easily yellowed due to thermal oxidation. In addition, in the case of fabricating a display on an organic film, a process such as the following is usually: forming an organic film on a supporting substrate, fabricating electronic devices on the organic film, and then peeling off the organic film from the supporting substrate. In this peeling process, the polyimide described in Patent Document 1 has the problems of high irradiation energy required for peeling and poor laser peeling properties.

另外,於專利文獻2中揭示有藉由在空氣中進行30分鐘煆燒而可獲得透明的聚醯亞胺樹脂膜的主旨。但是,專利文獻2中記載的透明聚醯亞胺樹脂膜的機械強度稍低,因此存在如下問題:於如上所述的剝離製程中,聚醯亞胺樹脂膜容易斷裂。另外,存在聚醯亞胺樹脂膜的耐彎折性小的問題。In addition, Patent Document 2 discloses that a transparent polyimide resin film can be obtained by baking in the air for 30 minutes. However, since the mechanical strength of the transparent polyimide resin film described in Patent Document 2 is slightly low, there is a problem that the polyimide resin film is easily broken during the peeling process as described above. In addition, there is a problem that the bending resistance of the polyimide resin film is small.

本發明的目的在於提供一種透明性、耐氧化性、自支撐基板的雷射剝離性良好且面內/面外雙折射低、撓性優異的聚醯亞胺及聚醯亞胺樹脂膜。 [解決課題之手段]The object of the present invention is to provide a polyimide and polyimide resin film that has good transparency, oxidation resistance, laser releasability of a self-supporting substrate, low in-plane/out-of-plane birefringence, and excellent flexibility. [Means to solve the problem]

為了解決所述課題並達成目的,本發明為一種聚醯亞胺,其包含下述式(1)所表示的聚醯亞胺結構單元A、下述式(2)所表示的聚醯亞胺結構單元B及下述式(3)所表示的聚醯亞胺結構單元C,且所述聚醯亞胺的特徵在於:於將該聚醯亞胺製成厚度10 μm的樹脂膜時的紅外線(Infrared,IR)光譜中,當將存在於1450 cm-1 ~1550 cm-1 的範圍內的最大峰值強度設為Y、將存在於3400 cm-1 ~3700 cm-1 的範圍內的最大峰值強度設為Z時,滿足下述式。 式)0.1≦Z/Y≦0.4In order to solve the problem and achieve the object, the present invention is a polyimide comprising a polyimide structural unit A represented by the following formula (1) and a polyimide represented by the following formula (2) The structural unit B and the polyimide structural unit C represented by the following formula (3), and the polyimide is characterized by infrared rays when the polyimide is made into a resin film with a thickness of 10 μm In the (Infrared, IR) spectrum, when the maximum peak intensity in the range of 1450 cm -1 to 1550 cm -1 is set to Y, the maximum peak in the range of 3400 cm -1 to 3700 cm -1 When the intensity is set to Z, the following equation is satisfied. Formula) 0.1≦Z/Y≦0.4

[化1]

Figure 02_image001
[化1]
Figure 02_image001

(X1 表示直鍵或氧原子;X2 表示氧原子、-C(CF3 )2 -、-C(CH3 )2 -或-Si(CH3 )2 -;X3 表示直鍵、-SO2 -、-C(CH3 )2 -或-C(CF3 )2 -) [發明的效果](X 1 represents a direct bond or an oxygen atom; X 2 represents an oxygen atom, -C(CF 3 ) 2 -, -C(CH 3 ) 2 -or -Si(CH 3 ) 2 -; X 3 represents a direct bond,- SO 2 -, -C(CH 3 ) 2 -or -C(CF 3 ) 2 -) [Effects of the invention]

根據本發明,可提供一種透明性、耐氧化性、自支撐基板的雷射剝離性良好且面內/面外雙折射低、撓性優異的聚醯亞胺及聚醯亞胺樹脂膜。本發明的聚醯亞胺及聚醯亞胺樹脂膜可適宜地用作可撓性器件、例如液晶顯示器、有機電致發光(electroluminescence,EL)顯示器、觸控面板、彩色濾光片、電子紙、微發光二極體(Light Emitting Diode,LED)顯示器等顯示器件、太陽電池、互補金屬氧化物半導體(Complementary Metal Oxide Semiconductor,CMOS)等光接收器件、透明天線等通信用器件等的可撓性基板。藉由使用此種可撓性基板,能夠製作可靠性高的可撓性器件。According to the present invention, it is possible to provide a polyimide and polyimide resin film with good transparency, oxidation resistance, good laser releasability of a self-supporting substrate, low in-plane/out-of-plane birefringence, and excellent flexibility. The polyimide and polyimide resin film of the present invention can be suitably used as flexible devices, such as liquid crystal displays, organic electroluminescence (EL) displays, touch panels, color filters, and electronic paper. , Micro-light emitting diode (Light Emitting Diode, LED) displays and other display devices, solar cells, complementary metal oxide semiconductor (Complementary Metal Oxide Semiconductor, CMOS) and other light receiving devices, transparent antennas and other communication devices, etc. Substrate. By using such a flexible substrate, a flexible device with high reliability can be manufactured.

以下,將本發明的聚醯亞胺、聚醯亞胺樹脂膜、積層體及可撓性器件的實施形態與圖式一起詳細說明。再者,本發明並不受以下的實施形態限定。Hereinafter, embodiments of the polyimide, polyimide resin film, laminate, and flexible device of the present invention will be described in detail together with the drawings. In addition, the present invention is not limited by the following embodiments.

<聚醯亞胺> 本發明的實施形態的聚醯亞胺為包含下述式(1)所表示的聚醯亞胺結構單元A、下述式(2)所表示的聚醯亞胺結構單元B及下述式(3)所表示的聚醯亞胺結構單元C的聚醯亞胺,且於將該聚醯亞胺製成厚度10 μm的樹脂膜時的IR光譜中,當將存在於1480 cm-1 ~1510 cm-1 的範圍內的最大峰值強度設為Y、將存在於3400 cm-1 ~3700 cm-1 的範圍內的最大峰值強度設為Z時,滿足下述式。<Polyimine> The polyimide of the embodiment of the present invention includes a polyimine structural unit A represented by the following formula (1) and a polyimine structural unit represented by the following formula (2) B and the polyimide of the polyimide structural unit C represented by the following formula (3), and when the polyimide is made into a resin film with a thickness of 10 μm, when it will be present in the IR spectrum When the maximum peak intensity in the range of 1480 cm -1 to 1510 cm -1 is Y, and the maximum peak intensity in the range of 3400 cm -1 to 3700 cm -1 is Z, the following equation is satisfied.

式)0.1≦Z/Y≦0.4Formula) 0.1≦Z/Y≦0.4

[化2]

Figure 02_image001
[化2]
Figure 02_image001

X1 表示直鍵或氧原子。X2 表示氧原子、-C(CF3 )2 -、-C(CH3 )2 -或-Si(CH3 )2 -。X3 表示直鍵、-SO2 -、-C(CH3 )2 -或-C(CF3 )2 -。X 1 represents a direct bond or an oxygen atom. X 2 represents an oxygen atom, -C(CF 3 ) 2 -, -C(CH 3 ) 2 -or -Si(CH 3 ) 2 -. X 3 represents a direct bond, -SO 2 -, -C(CH 3 ) 2 -or -C(CF 3 ) 2 -.

於IR光譜中,認為於1480 cm-1 ~1510 cm-1 的區域顯現出由伴隨單環式芳香族烴的環內碳-碳伸縮的骨架振動引起的吸收,於3400 cm-1 ~3700 cm-1 的區域顯現出由形成有分子間氫鍵的O-H伸縮引起的吸收。因此,Z/Y表示源自分子間氫鍵的峰值強度相對於源自單環式芳香族烴的峰值強度的強度比。In the IR spectrum, it is believed that absorption caused by the skeletal vibration accompanying the carbon-carbon stretching and contraction of the monocyclic aromatic hydrocarbon in the region of 1480 cm -1 ~1510 cm -1 appears at 3400 cm -1 ~3700 cm -1 The region of -1 exhibits absorption due to OH stretching with intermolecular hydrogen bonds. Therefore, Z/Y represents the intensity ratio of the peak intensity derived from the intermolecular hydrogen bond to the peak intensity derived from the monocyclic aromatic hydrocarbon.

於Z/Y未滿0.1的情況下,分子間氫鍵弱,因此於自外部對聚醯亞胺樹脂膜施加應力時,容易斷裂。另外,於大於0.4的情況下,分子間氫鍵過強,因此認為於自外部對聚醯亞胺樹脂膜施加應力時,於膜內部無法緩和應力而膜變脆。於Z/Y為0.1以上、0.4以下時,可獲得具有良好的撓性的聚醯亞胺。When Z/Y is less than 0.1, the intermolecular hydrogen bond is weak, so when stress is applied to the polyimide resin film from the outside, it is easy to break. In addition, in the case of greater than 0.4, the intermolecular hydrogen bond is too strong. Therefore, it is considered that when stress is applied to the polyimide resin film from the outside, the stress cannot be relieved inside the film and the film becomes brittle. When Z/Y is 0.1 or more and 0.4 or less, polyimide having good flexibility can be obtained.

本發明的實施形態的聚醯亞胺例如於聚醯亞胺中所含的全部二胺殘基中,包含5 mol%以上、95 mol%以下的具有磺醯基的二胺,且於用於醯亞胺化的固化條件為加熱溫度高於230℃且加熱時間為1小時以上的條件時,Z/Y容易成為0.1以上、0.4以下。The polyimide of the embodiment of the present invention contains, for example, 5 mol% or more and 95 mol% or less of the diamine having a sulfonamide group in all the diamine residues contained in the polyimide, and is used for When the curing conditions for imidization are the heating temperature higher than 230° C. and the heating time is 1 hour or longer, Z/Y is likely to be 0.1 or more and 0.4 or less.

磺醯基具有作為氫鍵受體的性質,因此例如於與聚醯亞胺分子中所存在的胺基或羥基等氫鍵供體之間形成氫鍵。因此,Z根據具有磺醯基的二胺的含量而變大。The sulfonyl group has the property of being a hydrogen bond acceptor, and therefore, for example, it forms a hydrogen bond with a hydrogen bond donor such as an amine group or a hydroxyl group present in the polyimide molecule. Therefore, Z becomes larger according to the content of the diamine having a sulfonyl group.

另一方面,關於Y,由於峰值強度由單環式芳香族環的含量決定,因此於通常的芳香族聚醯亞胺中,大致決定了最大峰值強度。因此,藉由調整Z而能夠將Z/Y調整為0.1以上、0.4以下。On the other hand, with regard to Y, since the peak intensity is determined by the content of the monocyclic aromatic ring, the maximum peak intensity is roughly determined in a normal aromatic polyimide. Therefore, by adjusting Z, Z/Y can be adjusted to 0.1 or more and 0.4 or less.

另外,於用於醯亞胺化的固化條件為所述條件的情況下,聚醯亞胺膜中所含的溶劑充分逃逸,且充分進行醯亞胺化反應,藉此聚醯亞胺分子彼此堆積(packing)。藉此,認為於聚醯亞胺分子間形成有更多的氫鍵。In addition, when the curing conditions for the imidization are the above-mentioned conditions, the solvent contained in the polyimide film escapes sufficiently, and the imidization reaction proceeds sufficiently, whereby the polyimide molecules are mutually Packing. From this, it is thought that more hydrogen bonds are formed between the polyimide molecules.

本發明的實施形態的聚醯亞胺藉由包含聚醯亞胺結構單元A而機械強度及撓性優異,藉由包含聚醯亞胺結構單元B而能夠實現耐化學品性的提高及低雙折射率化,藉由包含聚醯亞胺結構單元C而可於不使機械特性惡化的情況下提高透明性及雷射剝離性。聚醯亞胺結構單元A較佳為下述式(4)所表示的結構單元A',聚醯亞胺結構單元B較佳為下述式(5)所表示的結構單元B',聚醯亞胺結構單元C較佳為下述式(6)所表示的結構單元C'。式(4)中,X1 表示直鍵或氧原子。The polyimide of the embodiment of the present invention is excellent in mechanical strength and flexibility by including the polyimine structural unit A, and by including the polyimine structural unit B, it is possible to improve the chemical resistance and reduce the chemical resistance. By increasing the refractive index, by including the polyimide structural unit C, the transparency and laser releasability can be improved without deteriorating the mechanical properties. The polyimide structural unit A is preferably the structural unit A'represented by the following formula (4), and the polyimine structural unit B is preferably the structural unit B'represented by the following formula (5), and the polyimide The imine structural unit C is preferably a structural unit C′ represented by the following formula (6). In formula (4), X 1 represents a direct bond or an oxygen atom.

[化3]

Figure 02_image003
[化3]
Figure 02_image003

另外,聚醯亞胺結構單元A、聚醯亞胺結構單元B及聚醯亞胺結構單元C均為耐氧化性優異的結構,因此即便於大氣環境下進行加熱,亦不易產生由熱氧化所致的黃變。因此,藉由包含聚醯亞胺結構單元A、聚醯亞胺結構單元B及聚醯亞胺結構單元C的全部,可獲得透明性、耐氧化性、自支撐基板的雷射剝離性良好且面內/面外雙折射低、撓性優異的聚醯亞胺。In addition, polyimide structural unit A, polyimine structural unit B, and polyimine structural unit C are all structures with excellent oxidation resistance. Therefore, even if heated in an atmospheric environment, it is not easy to generate heat caused by thermal oxidation. Caused by yellowing. Therefore, by including all of the polyimide structural unit A, the polyimine structural unit B, and the polyimine structural unit C, transparency, oxidation resistance, and good laser releasability of the self-supporting substrate can be obtained. Polyimide with low in-plane/out-of-plane birefringence and excellent flexibility.

就進一步提高耐氧化性的觀點而言,聚醯亞胺結構單元A、聚醯亞胺結構單元B及聚醯亞胺結構單元C的合計量較佳為全部聚醯亞胺結構單元的80莫耳%以上,進而佳為90莫耳%以上。再者,所謂全部聚醯亞胺結構單元,是指構成聚醯亞胺的全部的結構單元。於聚醯亞胺包含結構單元A、結構單元B及結構單元C以外的結構單元的情況下,結構單元A、結構單元B及結構單元C與其他結構單元的合計量(莫耳基準)為全部聚醯亞胺結構單元。From the viewpoint of further improving the oxidation resistance, the total amount of polyimine structural unit A, polyimine structural unit B, and polyimine structural unit C is preferably 80 moles of all polyimine structural units. Ear% or more, more preferably 90 mole% or more. In addition, the term "all polyimine structural units" refers to all structural units constituting polyimine. When the polyimide contains structural units other than structural unit A, structural unit B, and structural unit C, the total amount (mole basis) of structural unit A, structural unit B, structural unit C and other structural units is all Polyimine structural unit.

另外,於將聚醯亞胺結構單元A、聚醯亞胺結構單元B、聚醯亞胺結構單元C各自的比率(莫耳基準)設為(i):(ii):(iii)時,較佳為(i):(ii):(iii)=5~80:1~70:1~70,進而佳為(i):(ii):(iii)=10~70:5~60:5~60,特佳為(i):(ii):(iii)=15~60:15~50:15~55。In addition, when the ratio (mole basis) of the polyimide structural unit A, the polyimine structural unit B, and the polyimine structural unit C is set as (i): (ii): (iii), Preferably (i): (ii): (iii)=5~80:1~70:1~70, and more preferably (i):(ii):(iii)=10~70:5~60: 5 to 60, particularly preferably (i): (ii): (iii) = 15-60: 15-50: 15-55.

本發明的聚醯亞胺亦可於不妨礙本發明的效果的範圍內包含其他結構單元。作為其他結構單元,可列舉作為聚醯胺酸的脫水閉環體的聚醯亞胺(包含結構單元A、結構單元B及結構單元C以外的結構單元的聚醯亞胺)、作為多羥基醯胺的脫水閉環體的聚苯並噁唑等。作為其他結構單元的一例,可列舉通式(7)所表示的聚醯亞胺結構單元(其中,為結構單元A、結構單元B及結構單元C以外的結構單元)。The polyimide of the present invention may contain other structural units within a range that does not hinder the effects of the present invention. Examples of other structural units include polyimine (polyimine containing structural units other than structural unit A, structural unit B, and structural unit C), which is a dehydrated ring-closing body of polyamide acid, and polyhydroxyamide The dehydrated ring-closure polybenzoxazole and so on. As an example of the other structural unit, a polyimide structural unit represented by the general formula (7) (a structural unit other than the structural unit A, the structural unit B, and the structural unit C) can be cited.

[化4]

Figure 02_image005
[化4]
Figure 02_image005

R1 表示四價四羧酸殘基,R2 表示二價二胺殘基。R 1 represents a tetravalent tetracarboxylic acid residue, and R 2 represents a divalent diamine residue.

作為R1 中所使用的酸二酐,可列舉國際公開第2017/099183號中記載的芳香族酸二酐、脂環式酸二酐或脂肪族酸二酐等。其中,較佳為提供式(8)所表示的結構的酸二酐及提供式(9)所表示的結構的酸二酐。藉由R1 包含通式(8)所表示的結構,可獲得玻璃轉移溫度高的聚醯亞胺。另外,藉由R1 包含通式(9)所表示的結構,可獲得透明性高、面內/面外雙折射小且玻璃轉移溫度高的聚醯亞胺。該些其他酸二酐可單獨使用或組合使用兩種以上。Examples of the acid dianhydride used in R 1 include aromatic acid dianhydrides, alicyclic acid dianhydrides, and aliphatic acid dianhydrides described in International Publication No. 2017/099183. Among them, it is preferable to provide an acid dianhydride having a structure represented by the formula (8) and an acid dianhydride providing a structure represented by the formula (9). When R 1 includes the structure represented by the general formula (8), a polyimide with a high glass transition temperature can be obtained. In addition, when R 1 includes the structure represented by the general formula (9), a polyimide having high transparency, low in-plane/out-of-plane birefringence, and a high glass transition temperature can be obtained. These other acid dianhydrides can be used alone or in combination of two or more.

[化5]

Figure 02_image007
[化5]
Figure 02_image007

作為R2 中所使用的二胺化合物,可列舉國際公開第2017/099183號中記載的芳香族二胺化合物、脂環式二胺化合物或脂肪族二胺化合物等。其中,就能夠兼顧透明性與耐熱性的方面而言,較佳為提供式(10)~式(15)的任一者所表示的結構的二胺。該些芳香族二胺化合物、脂環式二胺化合物或脂肪族二胺化合物可單獨使用或組合使用兩種以上。Examples of the diamine compound used in R 2 include aromatic diamine compounds, alicyclic diamine compounds, and aliphatic diamine compounds described in International Publication No. 2017/099183. Among them, it is preferable to provide a diamine having a structure represented by any one of formula (10) to formula (15) in terms of compatibility between transparency and heat resistance. These aromatic diamine compounds, alicyclic diamine compounds, or aliphatic diamine compounds can be used alone or in combination of two or more.

[化6]

Figure 02_image009
[化6]
Figure 02_image009

另外,本發明的聚醯亞胺亦可包含三胺骨架。三胺具有三個胺基,藉由與三個四羧酸二酐成分鍵結而形成分支狀的分子鏈,因此能夠獲得機械強度優異的聚醯亞胺樹脂膜。此種具有三胺骨架的聚醯亞胺前驅物可藉由將三胺化合物用作聚合成分之一而獲得。In addition, the polyimide of the present invention may also contain a triamine skeleton. The triamine has three amine groups, and forms a branched molecular chain by bonding with three tetracarboxylic dianhydride components, so that a polyimide resin film with excellent mechanical strength can be obtained. Such a polyimine precursor having a triamine skeleton can be obtained by using a triamine compound as one of the polymerization components.

三胺化合物的具體例中,作為不具有脂肪族基的三胺化合物,可列舉:2,4,4'-三胺基二苯基醚(2,4,4'-triaminodiphenyl ether,TAPE)、1,3,5-三(4-胺基苯氧基)苯(1,3,5-tris(4-aminophenoxy)benzene,1,3,5-TAPOB)、1,2,3-三(4-胺基苯氧基)苯(1,2,3-TAPOB)、三(4-胺基苯基)胺、1,3,5-三(4-胺基苯基)苯、3,4,4'-三胺基二苯基醚等。另外,作為具有脂肪族基的三胺化合物的具體例,可列舉三(2-胺基乙基)胺(tris(2-aminoethyl)amine,TAEA)、三(3-胺基丙基)胺等。其中,較佳為使用不具有脂肪族基且不易熱分解的成分。即,較佳為使用2,4,4'-三胺基二苯基醚(TAPE)、1,3,5-三(4-胺基苯氧基)苯(1,3,5-TAPOB)、1,2,3-三(4-胺基苯氧基)苯(1,2,3-TAPOB)等。Among the specific examples of the triamine compound, as the triamine compound that does not have an aliphatic group, 2,4,4'-triaminodiphenyl ether (2,4,4'-triaminodiphenyl ether, TAPE), 1,3,5-tris(4-aminophenoxy)benzene (1,3,5-tris(4-aminophenoxy)benzene, 1,3,5-TAPOB), 1,2,3-tris(4 -Aminophenoxy)benzene (1,2,3-TAPOB), tris(4-aminophenyl)amine, 1,3,5-tris(4-aminophenyl)benzene, 3,4, 4'-triaminodiphenyl ether, etc. In addition, specific examples of triamine compounds having an aliphatic group include tris(2-aminoethyl)amine (TAEA), tris(3-aminopropyl)amine, etc. . Among them, it is preferable to use a component that does not have an aliphatic group and is not easily decomposed by heat. That is, it is preferable to use 2,4,4'-triaminodiphenyl ether (TAPE), 1,3,5-tris(4-aminophenoxy)benzene (1,3,5-TAPOB) , 1,2,3-Tris(4-aminophenoxy)benzene (1,2,3-TAPOB), etc.

另外,本發明的聚醯亞胺亦可於R1 及/或R2 中具有通式(16)所表示的結構。藉由聚醯亞胺具有通式(16)所表示的結構,可減少於使用所述聚醯亞胺而獲得的聚醯亞胺樹脂膜與支撐基板之間所產生的殘留應力。因此,可抑制於支撐基板上形成聚醯亞胺樹脂膜時的基板翹曲。In addition, the polyimide of the present invention may have a structure represented by the general formula (16) in R 1 and/or R 2. Since the polyimide has the structure represented by the general formula (16), the residual stress generated between the polyimide resin film obtained by using the polyimide and the supporting substrate can be reduced. Therefore, it is possible to suppress the warpage of the substrate when the polyimide resin film is formed on the supporting substrate.

[化7]

Figure 02_image011
[化7]
Figure 02_image011

式(16)中,R3 及R4 各自獨立地表示碳數1~20的一價有機基。x表示3~200的整數。In formula (16), R 3 and R 4 each independently represent a monovalent organic group having 1 to 20 carbon atoms. x represents an integer of 3 to 200.

作為R3 及R4 中的碳數1~20的一價有機基,可列舉:烴基、胺基、烷氧基、環氧基等。作為R3 及R4 中的烴基,可列舉:碳數1~20的烷基、碳數3~20的環烷基、碳數6~20的芳基等。Examples of the monovalent organic group having 1 to 20 carbon atoms in R 3 and R 4 include a hydrocarbon group, an amino group, an alkoxy group, and an epoxy group. Examples of the hydrocarbon group in R 3 and R 4 include an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, and an aryl group having 6 to 20 carbon atoms.

作為碳數1~20的烷基,較佳為碳數1~10的烷基,具體而言,可列舉:甲基、乙基、丙基、異丙基、丁基、異丁基、第三丁基、戊基、己基等。作為碳數3~20的環烷基,較佳為碳數3~10的環烷基,具體而言,可列舉環戊基、環己基等。作為碳數6~20的芳基,較佳為碳數6~12的芳基,具體而言,可列舉:苯基、甲苯基、萘基等。The alkyl group having 1 to 20 carbons is preferably an alkyl group having 1 to 10 carbons. Specifically, examples include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, and Tributyl, pentyl, hexyl, etc. The cycloalkyl group having 3 to 20 carbon atoms is preferably a cycloalkyl group having 3 to 10 carbon atoms, and specific examples include cyclopentyl and cyclohexyl. The aryl group having 6 to 20 carbon atoms is preferably an aryl group having 6 to 12 carbon atoms, and specific examples thereof include a phenyl group, a tolyl group, and a naphthyl group.

作為R3 及R4 中的烷氧基,可列舉:甲氧基、乙氧基、丙氧基、異丙氧基、丁氧基、苯氧基、丙烯氧基及環己氧基等。Examples of the alkoxy group in R 3 and R 4 include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a phenoxy group, a propyleneoxy group, a cyclohexyloxy group, and the like.

通式(16)中的R3 及R4 較佳為碳數1~3的一價脂肪族烴基或碳數6~10的芳香族基。原因在於:所獲得的聚醯亞胺膜兼具高耐熱性與低殘留應力。此處,碳數1~3的一價脂肪族烴基較佳為甲基,碳數6~10的芳香族基較佳為苯基。 R 3 and R 4 in the general formula (16) are preferably a monovalent aliphatic hydrocarbon group having 1 to 3 carbons or an aromatic group having 6 to 10 carbons. The reason is that the obtained polyimide film has both high heat resistance and low residual stress. Here, the monovalent aliphatic hydrocarbon group having 1 to 3 carbons is preferably a methyl group, and the aromatic group having 6 to 10 carbons is preferably a phenyl group.

通式(16)中的x為3~200的整數,較佳為5~100,更佳為5~70,進而佳為8~50的整數。於x為所述範圍內的情況下,可減少聚醯亞胺的殘留應力,可減少基板翹曲。另外,可抑制聚醯亞胺膜產生白濁或者聚醯亞胺膜的機械強度降低。X in the general formula (16) is an integer of 3 to 200, preferably 5 to 100, more preferably 5 to 70, and still more preferably an integer of 8 to 50. When x is within the above range, the residual stress of the polyimide can be reduced, and the warpage of the substrate can be reduced. In addition, the polyimide film can be prevented from becoming cloudy or the mechanical strength of the polyimide film is reduced.

具有通式(16)所表示的結構的聚醯亞胺前驅物樹脂可藉由將下述通式(17)所表示的矽酮化合物用作單體成分而獲得。The polyimide precursor resin having a structure represented by the general formula (16) can be obtained by using a silicone compound represented by the following general formula (17) as a monomer component.

[化8]

Figure 02_image013
[化8]
Figure 02_image013

式(17)中,存在多個的R5 分別獨立地為單鍵或碳數1~20的二價有機基,存在多個的R6 、R7 及R8 分別獨立地為碳數1~20的一價有機基,L1 、L2 及L3 分別獨立地為選自由胺基、酸酐基、羧基、羥基、環氧基、巰基及R10 所組成的群組中的一個基。R10 為碳數1~20的一價有機基。y為3~200的整數,z為0~197的整數。In formula (17), there are a plurality of R 5 each independently being a single bond or a divalent organic group having 1 to 20 carbons, and the plurality of R 6 , R 7 and R 8 are each independently having a carbon number of 1 to 20. The monovalent organic group of 20, L 1 , L 2 and L 3 are each independently a group selected from the group consisting of an amino group, an acid anhydride group, a carboxyl group, a hydroxyl group, an epoxy group, a mercapto group, and R 10 . R 10 is a monovalent organic group having 1 to 20 carbon atoms. y is an integer of 3 to 200, and z is an integer of 0 to 197.

以上所述中,「單鍵」與「直鍵」為相同含義。即,為L1 或L2 與Si直接鍵結的狀態。In the above description, "single key" and "direct key" have the same meaning. That is, it is a state where L 1 or L 2 and Si are directly bonded.

本發明的聚醯亞胺可藉由使包含下述式(18)所表示的結構單元、下述式(19)所表示的結構單元及下述式(20)所表示的結構單元的聚醯亞胺前驅物進行醯亞胺閉環而獲得。The polyimide of the present invention can be obtained by making a polyimide comprising a structural unit represented by the following formula (18), a structural unit represented by the following formula (19), and a structural unit represented by the following formula (20) The imine precursor is obtained by ring closure of imine.

[化9]

Figure 02_image015
[化9]
Figure 02_image015

式(18)~式(20)中,Y1 ~Y6 各自獨立地表示氫原子、碳數1~10的一價有機基或碳數1~10的一價烷基矽烷基。R9 表示式(21)所表示的四價四羧酸殘基,式(21)中的X2 表示氧原子、-C(CF3 )2 -、-C(CH3 )2 -或-Si(CH3 )2 -。R10 表示式(22)所表示的二價二胺殘基,式(22)中的X1 表示直鍵或氧原子。R11 表示式(23)所表示的二價二胺殘基,式(23)中的X3 表示直鍵、-SO2 -、-C(CH3 )2 -或-C(CF3 )2 -。R12 表示式(24)所表示的二價二胺殘基。In formulas (18) to (20), Y 1 to Y 6 each independently represent a hydrogen atom, a monovalent organic group having 1 to 10 carbons, or a monovalent alkylsilyl group having 1 to 10 carbons. R 9 represents the tetravalent tetracarboxylic acid residue represented by the formula (21), X 2 in the formula (21) represents an oxygen atom, -C(CF 3 ) 2 -, -C(CH 3 ) 2 -or -Si (CH 3 ) 2 -. R 10 represents a divalent diamine residue represented by the formula (22), and X 1 in the formula (22) represents a direct bond or an oxygen atom. R 11 represents the divalent diamine residue represented by the formula (23), X 3 in the formula (23) represents a straight bond, -SO 2 -, -C(CH 3 ) 2 -or -C(CF 3 ) 2 -. R 12 represents a divalent diamine residue represented by formula (24).

[化10]

Figure 02_image017
[化10]
Figure 02_image017

作為醯亞胺化的方法,並無特別限定,可列舉:熱醯亞胺化或化學醯亞胺化。其中,就聚醯亞胺樹脂膜的耐熱性、可見光區域的透明性的觀點而言,較佳為熱醯亞胺化。The method of imidization is not particularly limited, and examples include thermal imidization or chemical imidization. Among them, from the viewpoint of the heat resistance of the polyimide resin film and the transparency in the visible light region, thermal imidization is preferred.

聚醯胺酸或聚醯胺酸酯、聚醯胺酸矽烷酯等聚醯亞胺前驅物樹脂可藉由二胺化合物與酸二酐或其衍生物的反應而合成。作為衍生物,可列舉所述酸二酐的四羧酸、所述四羧酸的單酯、二酯、三酯或四酯、醯氯化物等,具體而言,可列舉經甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基等酯化的結構。聚合反應的反應方法若可製造目標聚醯亞胺前驅物樹脂,則並無特別限制,可使用公知的反應方法。Polyimide precursor resins such as polyamide acid, polyamide acid ester, polyamide silylester, and the like can be synthesized by the reaction of a diamine compound and an acid dianhydride or a derivative thereof. Examples of derivatives include the tetracarboxylic acid of the acid dianhydride, the monoester, diester, triester or tetraester of the tetracarboxylic acid, and the chlorinated acid. Esterified structures such as propyl, n-propyl, isopropyl, n-butyl, second butyl, and tertiary butyl. The reaction method of the polymerization reaction is not particularly limited as long as the target polyimine precursor resin can be produced, and a known reaction method can be used.

作為具體的反應方法,可列舉如下方法等:於反應器中裝入規定量的所有的二胺成分及溶劑,於使其溶解後,裝入規定量的酸二酐成分,於室溫(25℃)~80℃下攪拌0.5小時~30小時。As a specific reaction method, the following method can be exemplified: a predetermined amount of all diamine components and solvents are charged in a reactor, and after dissolving them, a predetermined amount of acid dianhydride components are charged at room temperature (25 ℃) ~80℃ Stir for 0.5 hour to 30 hours.

作為所使用的溶劑,並無特別限制,可使用公知的溶劑。例如,作為所述溶媒,可列舉:N-甲基-2-吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N,N-二甲基異丁基醯胺、3-甲氧基-N,N-二甲基丙醯胺、3-丁氧基-N,N-二甲基丙醯胺、γ-丁內酯、乳酸乙酯、1,3-二甲基-2-咪唑啶酮、N,N'-二甲基丙烯脲、1,1,3,3-四甲基脲、二甲基亞碸、環丁碸、丙二醇單甲醚、丙二醇單甲醚乙酸酯、二乙二醇乙基甲基醚、二乙二醇二甲醚、水或國際公開第2017/099183號中記載的溶劑等。該些可單獨使用或組合使用兩種以上。該些中,就所獲得的聚醯亞胺膜的透明性的觀點而言,較佳為γ-丁內酯。The solvent used is not particularly limited, and a known solvent can be used. For example, as the solvent, N-methyl-2-pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, N,N-dimethyl Isobutylamide, 3-methoxy-N,N-dimethylpropanamide, 3-butoxy-N,N-dimethylpropanamide, γ-butyrolactone, ethyl lactate, 1,3-Dimethyl-2-imidazolidinone, N,N'-dimethyl propylene urea, 1,1,3,3-tetramethyl urea, dimethyl sulfide, cyclobutane, propylene glycol mono Methyl ether, propylene glycol monomethyl ether acetate, diethylene glycol ethyl methyl ether, diethylene glycol dimethyl ether, water, or the solvent described in International Publication No. 2017/099183. These can be used individually or in combination of 2 or more types. Among these, from the viewpoint of the transparency of the obtained polyimide film, γ-butyrolactone is preferred.

聚醯亞胺前驅物的重量平均分子量(Mw)較佳為10,000~1,000,000,更佳為30,000~500,000,進而佳為65,000~300,000。The weight average molecular weight (Mw) of the polyimide precursor is preferably 10,000 to 1,000,000, more preferably 30,000 to 500,000, and still more preferably 65,000 to 300,000.

若聚醯亞胺前驅物的重量平均分子量為所述範圍內,則能夠於不使所獲得的塗膜的平坦性惡化的情況下提高所獲得的聚醯亞胺的強度。If the weight average molecular weight of the polyimide precursor is within the above range, the strength of the obtained polyimide can be increased without deteriorating the flatness of the obtained coating film.

再者,重量平均分子量、數量平均分子量及分子量分佈為使用東曹(TOSOH)製造的DP-8020型凝膠滲透層析(Gel Permeation Chromatography,GPC)裝置(保護管柱:TSK guard column ALPHA 管柱:TSK-GEL α-M、展開溶劑:添加N,N'-二甲基乙醯胺(N,N'-dimethyl acetamide,DMAc)、0.05M-LiCl、0.05%磷酸)測定所得的值。In addition, the weight average molecular weight, number average molecular weight and molecular weight distribution are based on the DP-8020 Gel Permeation Chromatography (GPC) device manufactured by TOSOH (protection column: TSK guard column ALPHA column) : TSK-GEL α-M, developing solvent: add N,N'-dimethyl acetamide (DMAc), 0.05M-LiCl, 0.05% phosphoric acid) to measure the obtained value.

為了將分子量調整為較佳的範圍,聚醯亞胺前驅物亦可利用封端劑將兩末端密封。作為與酸二酐反應的封端劑,可列舉單胺或一元醇等。另外,作為與二胺化合物反應的封端劑,可列舉:酸酐、單羧酸、單醯氯化合物、單活性酯化合物、二碳酸酯類、乙烯基醚類等。另外,藉由使封端劑反應,可導入各種有機基作為末端基。In order to adjust the molecular weight to a preferable range, the polyimide precursor can also be sealed at both ends with a capping agent. Examples of the blocking agent that reacts with acid dianhydride include monoamines, monohydric alcohols, and the like. In addition, examples of the end-capping agent that reacts with the diamine compound include acid anhydrides, monocarboxylic acids, monochlorine compounds, monoactive ester compounds, dicarbonates, vinyl ethers, and the like. In addition, by reacting the blocking agent, various organic groups can be introduced as terminal groups.

相對於酸二酐成分,酸酐基末端的密封劑的導入比例較佳為0.1莫耳%~60莫耳%的範圍,特佳為0.5莫耳%~50莫耳%。另外,相對於二胺成分,胺基末端的密封劑的導入比例較佳為0.1莫耳%~100莫耳%的範圍,特佳為0.5莫耳%~70莫耳%。亦可藉由使多種封端劑反應而導入多種不同的末端基。With respect to the acid dianhydride component, the introduction ratio of the sealant at the acid anhydride group terminal is preferably in the range of 0.1 mol% to 60 mol%, and particularly preferably 0.5 mol% to 50 mol%. In addition, with respect to the diamine component, the introduction ratio of the sealant at the amino terminal is preferably in the range of 0.1 mol% to 100 mol%, and particularly preferably 0.5 mol% to 70 mol%. It is also possible to introduce a variety of different end groups by reacting a variety of end-capping agents.

導入至聚醯亞胺前驅物中的封端劑可利用以下方法來容易地檢測到。例如,將導入有封端劑的聚合物溶解於酸性溶液中,分解成作為聚合物的結構單元的胺成分與酸酐成分,對所得者進行氣相層析(Gas Chromatography,GC)或核磁共振(Nuclear Magnetic Resonance,NMR)測定,藉此可容易地檢測到封端劑。此外,即便是對導入有封端劑的聚合物直接進行熱分解氣相層析(Pyrolysis Gas Chromatography,PGC)或紅外光譜、1 H-NMR光譜測定及13 C-NMR光譜測定,亦能夠容易地檢測到。The capping agent introduced into the polyimide precursor can be easily detected by the following method. For example, the polymer into which the capping agent is introduced is dissolved in an acidic solution and decomposed into the amine component and acid anhydride component as the structural unit of the polymer, and the resultant is subjected to gas chromatography (GC) or nuclear magnetic resonance ( Nuclear Magnetic Resonance, NMR) measurement, whereby the blocking agent can be easily detected. In addition, even if it is directly subjected to thermal decomposition gas chromatography (Pyrolysis Gas Chromatography, PGC) or infrared spectroscopy, 1 H-NMR spectroscopy and 13 C-NMR spectroscopy of the polymer into which the capping agent is introduced, it can be easily detected.

將藉由所述方法而獲得的聚醯亞胺前驅物醯亞胺化來製造聚醯亞胺的方法並無特別限制,可使用公知的反應方法。作為具體的反應方法,可列舉將以所述方式獲得的聚醯亞胺前驅物溶液於100℃~200℃下攪拌0.5小時~30小時的方法等。There is no particular limitation on the method of producing polyimine by imidizing the polyimide precursor obtained by the method, and a known reaction method can be used. As a specific reaction method, the method of stirring the polyimide precursor solution obtained by the said method at 100-200 degreeC for 0.5 to 30 hours, etc. are mentioned.

<聚醯亞胺樹脂組成物> 將本發明的實施形態的聚醯亞胺與適當的成分混合,可製成聚醯亞胺樹脂組成物。作為聚醯亞胺樹脂組成物中可含的成分,並無特別限定,可列舉:溶劑、紫外線吸收劑、熱交聯劑、無機填料、界面活性劑、內部剝離劑、著色劑等。<Polyimide resin composition> The polyimide of the embodiment of the present invention is mixed with appropriate components to form a polyimide resin composition. The components that can be contained in the polyimide resin composition are not particularly limited, and examples include solvents, ultraviolet absorbers, thermal crosslinking agents, inorganic fillers, surfactants, internal release agents, colorants, and the like.

(溶劑) 本發明的實施形態的聚醯亞胺樹脂組成物亦可含有溶劑。作為溶劑,可列舉:N-甲基-2-吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N,N-二甲基異丁基醯胺、3-甲氧基-N,N-二甲基丙醯胺、3-丁氧基-N,N-二甲基丙醯胺、γ-丁內酯、乳酸乙酯、1,3-二甲基-2-咪唑啶酮、N,N'-二甲基丙烯脲、1,1,3,3-四甲基脲、二甲基亞碸、環丁碸、丙二醇單甲醚、丙二醇單甲醚乙酸酯、二乙二醇乙基甲基醚、二乙二醇二甲醚、水或國際公開第2017/099183號中記載的溶劑等。本發明的實施形態的聚醯亞胺樹脂組成物中所含的溶劑可為一種,亦可為多種。該些中,就所獲得的聚醯亞胺的透明性與可藉由含有少量而獲得所述效果的觀點而言,較佳為包含γ-丁內酯,較佳為不包含醯胺系溶劑。(Solvent) The polyimide resin composition of the embodiment of the present invention may contain a solvent. Examples of solvents include N-methyl-2-pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, and N,N-dimethylisobutylamide. Amine, 3-methoxy-N,N-dimethylpropanamide, 3-butoxy-N,N-dimethylpropanamide, γ-butyrolactone, ethyl lactate, 1,3- Dimethyl-2-imidazolidinone, N,N'-dimethyl allylurea, 1,1,3,3-tetramethylurea, dimethyl sulfide, cyclobutane, propylene glycol monomethyl ether, propylene glycol Monomethyl ether acetate, diethylene glycol ethyl methyl ether, diethylene glycol dimethyl ether, water, or the solvent described in International Publication No. 2017/099183. The solvent contained in the polyimide resin composition of the embodiment of the present invention may be one type or multiple types. Among these, in terms of the transparency of the obtained polyimine and the above-mentioned effects can be obtained by containing a small amount, it is preferable to include γ-butyrolactone, and it is preferable not to include an amide-based solvent. .

(紫外線吸收劑) 本發明的實施形態的聚醯亞胺樹脂組成物亦可含有紫外線吸收劑。藉由聚醯亞胺樹脂組成物含有紫外線吸收劑,可顯著抑制於長期間暴曬於太陽光下時聚醯亞胺的透明性或機械特性等物性降低。(Ultraviolet absorber) The polyimide resin composition of the embodiment of the present invention may contain an ultraviolet absorber. When the polyimide resin composition contains an ultraviolet absorber, it is possible to significantly suppress the deterioration of the transparency or mechanical properties of the polyimide when exposed to sunlight for a long period of time.

作為紫外線吸收劑,可並無特別限定地使用公知者。就透明性、非著色性的方面而言,可較佳地使用苯並三唑系化合物、二苯甲酮系化合物、三嗪系化合物。As the ultraviolet absorber, a known one can be used without particular limitation. In terms of transparency and non-coloring properties, benzotriazole-based compounds, benzophenone-based compounds, and triazine-based compounds can be preferably used.

紫外線吸收劑較佳為分子量為1000以下的化合物。藉由紫外線吸收劑為分子量1000以下的低分子化合物,可於不使聚醯亞胺樹脂膜的霧度增加的情況下提高樹脂膜的耐光性。The ultraviolet absorber is preferably a compound having a molecular weight of 1,000 or less. When the ultraviolet absorber is a low-molecular compound with a molecular weight of 1000 or less, the light resistance of the resin film can be improved without increasing the haze of the polyimide resin film.

相對於聚醯亞胺樹脂100重量份,聚醯亞胺樹脂組成物中的紫外線吸收劑的含量較佳為0.5重量份~5重量份。藉由聚醯亞胺樹脂組成物於所述範圍內含有紫外線吸收劑,可於不損及樹脂的透明性的情況下提高耐光性(對於光、特別是紫外光的耐性)。The content of the ultraviolet absorber in the polyimide resin composition is preferably 0.5 to 5 parts by weight relative to 100 parts by weight of the polyimide resin. When the polyimide resin composition contains an ultraviolet absorber within the above-mentioned range, the light resistance (resistance to light, particularly ultraviolet light) can be improved without impairing the transparency of the resin.

(熱交聯劑) 本發明的實施形態的聚醯亞胺樹脂組成物亦可含有熱交聯劑。作為熱交聯劑,較佳為環氧化合物、或者具有至少兩個烷氧基甲基或羥甲基的化合物。藉由具有至少兩個該些基,與樹脂及同種分子進行縮合反應而形成交聯結構體,可提高加熱處理後的硬化膜的機械強度或耐化學品性。(Thermal crosslinking agent) The polyimide resin composition of the embodiment of the present invention may contain a thermal crosslinking agent. The thermal crosslinking agent is preferably an epoxy compound or a compound having at least two alkoxymethyl groups or hydroxymethyl groups. By having at least two of these groups, the cross-linked structure is formed by the condensation reaction with the resin and the same molecules, and the mechanical strength or chemical resistance of the cured film after the heat treatment can be improved.

相對於聚醯亞胺樹脂100重量份,聚醯亞胺樹脂組成物中的熱交聯劑的含量較佳為0.01重量份~10重量份。藉由聚醯亞胺樹脂組成物於所述範圍內含有熱交聯劑,能夠於不損及樹脂的透明性的情況下提高樹脂的機械特性或耐化學品性。The content of the thermal crosslinking agent in the polyimide resin composition is preferably 0.01 to 10 parts by weight relative to 100 parts by weight of the polyimide resin. When the polyimide resin composition contains the thermal crosslinking agent within the above range, the mechanical properties and chemical resistance of the resin can be improved without impairing the transparency of the resin.

(偶合劑) 為了提高與基材的接著性,本發明的實施形態的聚醯亞胺樹脂組成物可添加矽烷偶合劑、鈦偶合劑等偶合劑。相對於聚醯亞胺樹脂100重量份,聚醯亞胺樹脂組成物中的偶合劑的含量較佳為0.1重量份~5重量份。(Coupling agent) In order to improve the adhesion to the substrate, the polyimide resin composition of the embodiment of the present invention may be added with a coupling agent such as a silane coupling agent and a titanium coupling agent. The content of the coupling agent in the polyimide resin composition is preferably 0.1 to 5 parts by weight relative to 100 parts by weight of the polyimide resin.

(無機填料) 本發明的實施形態的聚醯亞胺樹脂組成物亦可含有無機填料。作為無機填料,可列舉:二氧化矽微粒子、氧化鋁微粒子、二氧化鈦微粒子、氧化鋯微粒子等。無機填料的形狀並無特別限定,可列舉:球狀、橢圓形狀、扁平狀、棒狀、纖維狀等。(Inorganic filler) The polyimide resin composition of the embodiment of the present invention may contain an inorganic filler. Examples of the inorganic filler include silica microparticles, alumina microparticles, titanium dioxide microparticles, and zirconia microparticles. The shape of the inorganic filler is not particularly limited, and examples thereof include a spherical shape, an elliptical shape, a flat shape, a rod shape, and a fibrous shape.

為了防止光的散射,無機填料較佳為粒徑小。具體而言,無機填料的平均粒徑較佳為0.5 nm~100 nm,更佳為0.5 nm~30 nm的範圍。In order to prevent the scattering of light, the inorganic filler preferably has a small particle size. Specifically, the average particle size of the inorganic filler is preferably 0.5 nm to 100 nm, more preferably 0.5 nm to 30 nm.

相對於聚醯亞胺樹脂100重量份,聚醯亞胺樹脂組成物中的無機填料的含量較佳為1重量份~100重量份。藉由聚醯亞胺樹脂組成物於所述範圍內含有無機填料,能夠不損及撓性而使聚醯亞胺樹脂的熱膨脹係數(Coefficient Of Thermal Expansion,CTE)或雙折射降低。The content of the inorganic filler in the polyimide resin composition is preferably 1 part by weight to 100 parts by weight relative to 100 parts by weight of the polyimide resin. When the polyimide resin composition contains an inorganic filler within the above-mentioned range, it is possible to reduce the coefficient of thermal expansion (CTE) or birefringence of the polyimide resin without impairing flexibility.

(界面活性劑) 本發明的實施形態的聚醯亞胺樹脂組成物可含有界面活性劑。藉由聚醯亞胺樹脂組成物含有界面活性劑,可提高塗佈聚醯亞胺樹脂組成物時的膜厚均勻性。作為界面活性劑,可列舉:弗洛德(FLUORAD)(商品名、住友3M股份有限公司製造)、美佳法(MEGAFAC)(商品名、迪愛生(DIC)股份有限公司製造)、薩爾福隆(SULFLON)(商品名、旭硝子股份有限公司製造)等氟系界面活性劑。另外,可列舉:KP341(商品名、信越化學工業股份有限公司製造)、DBE(商品名、智索(CHISSO)股份有限公司製造)、珀利弗洛(POLYFLOW)、格拉諾(GLANOL)(商品名、共榮社化學股份有限公司製造)、畢克(BYK)(畢克化學(BYK-Chemie)股份有限公司製造)等有機矽氧烷界面活性劑。進而可列舉珀利弗洛(POLYFLOW)(商品名、共榮社化學股份有限公司製造)等丙烯酸聚合物界面活性劑。(Interface active agent) The polyimide resin composition of the embodiment of the present invention may contain a surfactant. When the polyimide resin composition contains a surfactant, the uniformity of the film thickness when the polyimide resin composition is applied can be improved. Examples of surfactants include: FLUORAD (trade name, manufactured by Sumitomo 3M Co., Ltd.), MEGAFAC (trade name, manufactured by DIC Co., Ltd.), Salfron (SULFLON) (trade name, manufactured by Asahi Glass Co., Ltd.) and other fluorine-based surfactants. In addition, KP341 (trade name, manufactured by Shin-Etsu Chemical Co., Ltd.), DBE (trade name, manufactured by Chisso Co., Ltd.), POLYFLOW, and GLANOL (products Name, Kyoeisha Chemical Co., Ltd.), BYK (BYK-Chemie Co., Ltd.) and other organosiloxane surfactants. Furthermore, acrylic polymer surfactants such as POLYFLOW (trade name, manufactured by Kyoeisha Chemical Co., Ltd.) can be cited.

相對於聚醯亞胺樹脂100重量份,聚醯亞胺樹脂組成物中的界面活性劑的含量較佳為0.01重量份~10重量份。The content of the surfactant in the polyimide resin composition is preferably 0.01 to 10 parts by weight relative to 100 parts by weight of the polyimide resin.

(內部脫模劑) 本發明的實施形態的聚醯亞胺樹脂組成物可含有內部脫模劑。藉由聚醯亞胺樹脂組成物含有內部脫模劑,可提高聚醯亞胺樹脂膜自支撐基板的剝離性。作為內部脫模劑,可列舉長鏈脂肪酸等。相對於聚醯亞胺樹脂100重量份,聚醯亞胺樹脂組成物中的內部脫模劑的含量較佳為0.1重量份~5重量份。(Internal release agent) The polyimide resin composition of the embodiment of the present invention may contain an internal mold release agent. When the polyimide resin composition contains an internal mold release agent, the releasability of the polyimide resin film from the supporting substrate can be improved. Examples of the internal mold release agent include long-chain fatty acids. The content of the internal mold release agent in the polyimide resin composition is preferably 0.1 to 5 parts by weight relative to 100 parts by weight of the polyimide resin.

(著色劑) 本發明的實施形態的聚醯亞胺樹脂組成物可含有著色劑。藉由聚醯亞胺樹脂組成物添加有著色劑,可調節聚醯亞胺樹脂膜的色澤。(Colorant) The polyimide resin composition of the embodiment of the present invention may contain a coloring agent. By adding a coloring agent to the polyimide resin composition, the color of the polyimide resin film can be adjusted.

作為著色劑,可使用染料、有機顏料、無機顏料等,但就耐熱性、透明性的方面而言,較佳為有機顏料。其中,較佳為透明性高、耐光性、耐熱性、耐化學品性優異者。As the coloring agent, dyes, organic pigments, inorganic pigments, etc. can be used, but in terms of heat resistance and transparency, organic pigments are preferred. Among them, those having high transparency, light resistance, heat resistance, and chemical resistance are preferred.

<聚醯亞胺樹脂膜> 本發明的實施形態的聚醯亞胺樹脂膜包含所述聚醯亞胺。其可將所述聚醯亞胺或聚醯亞胺樹脂組成物成形為膜狀而獲得。<Polyimide resin film> The polyimide resin film of the embodiment of the present invention contains the polyimide. It can be obtained by molding the polyimide or polyimide resin composition into a film shape.

關於本發明的實施形態的聚醯亞胺樹脂膜,相對於聚醯亞胺樹脂膜的重量,較佳為包含1 ppm以上、1000 ppm以下的γ-丁內酯,更佳為包含5 ppm以上、500 ppm以下的γ-丁內酯,進而佳為包含10 ppm以上、300 ppm以下的γ-丁內酯。藉由聚醯亞胺樹脂膜以所述比率包含γ-丁內酯,可於不使形成於聚醯亞胺樹脂膜上的電路或元件的特性惡化的情況下提高自支撐基板的機械剝離性。此外,可緩和於聚醯亞胺樹脂膜與形成於其上的電路或元件的界面所產生的應力。因此,可提高將於聚醯亞胺樹脂膜上積層電路或元件而成的積層體彎折時的耐龜裂性。Regarding the polyimide resin film of the embodiment of the present invention, it is preferable to contain 1 ppm or more and 1000 ppm or less of γ-butyrolactone relative to the weight of the polyimide resin film, and it is more preferable to contain 5 ppm or more. , 500 ppm or less of γ-butyrolactone, more preferably 10 ppm or more and 300 ppm or less of γ-butyrolactone. By including γ-butyrolactone in the polyimide resin film at the stated ratio, the mechanical peelability of the self-supporting substrate can be improved without deteriorating the characteristics of the circuits or components formed on the polyimide resin film . In addition, the stress generated at the interface between the polyimide resin film and the circuit or element formed thereon can be alleviated. Therefore, it is possible to improve the crack resistance when a laminate formed by laminating circuits or elements on a polyimide resin film is bent.

作為獲得相對於聚醯亞胺樹脂膜的重量而包含1 ppm以上、1000 ppm以下的γ-丁內酯的聚醯亞胺樹脂膜的方法,例如可列舉如下方法等:使用γ-丁內酯作為溶劑來製成聚醯亞胺前驅物樹脂溶液,將所述溶液塗佈於支撐基材上,於240℃至290℃的範圍內加熱45分鐘~180分鐘來進行熱醯亞胺化。As a method of obtaining a polyimide resin film containing 1 ppm or more and 1000 ppm or less of γ-butyrolactone relative to the weight of the polyimide resin film, for example, the following method can be cited: using γ-butyrolactone A polyimide precursor resin solution is prepared as a solvent, and the solution is coated on a supporting substrate, and heated in the range of 240° C. to 290° C. for 45 minutes to 180 minutes to perform thermal imidization.

另外,本發明的實施形態的聚醯亞胺樹脂膜較佳為不包含醯胺系溶劑。藉由聚醯亞胺樹脂膜不包含醯胺系溶劑,能夠抑制熱醯亞胺化時的黃變並提高透明性。作為較佳為不包含的醯胺系溶劑,例如可列舉:N-甲基-2-吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N,N-二甲基異丁基醯胺、3-甲氧基-N,N-二甲基丙醯胺、3-丁氧基-N,N-二甲基丙醯胺、1,3-二甲基-2-咪唑啶酮、N,N'-二甲基丙烯脲、1,1,3,3-四甲基脲等。In addition, the polyimide resin film of the embodiment of the present invention preferably does not contain an amide-based solvent. Since the polyimide resin film does not contain an amide-based solvent, yellowing during thermal imidization can be suppressed and transparency can be improved. As the amide-based solvent preferably not contained, for example, N-methyl-2-pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, N ,N-Dimethylisobutylamide, 3-Methoxy-N,N-Dimethylpropionamide, 3-Butoxy-N,N-Dimethylpropionamide, 1,3- Dimethyl-2-imidazolidinone, N,N'-dimethyl allylurea, 1,1,3,3-tetramethylurea, etc.

再者,於本發明中,聚醯亞胺樹脂膜中所含的溶劑的含量為如下值:將切割成長條狀的聚醯亞胺樹脂膜放入加熱容器中進行加熱,並藉由熱脫離氣相層析/質譜法(Gas Chromatograph/Mass Spectrometry,GC/MS)來測定所捕集的氣體而得的值。關於本發明的實施形態的聚醯亞胺樹脂膜,藉由所述測定方法而測定的γ-丁內酯的含量較佳為1 ppm以上、1000 ppm以下,醯胺系溶劑的含量較佳為檢測極限以下(相對於聚醯亞胺樹脂膜的重量而未滿1 ppm)。Furthermore, in the present invention, the content of the solvent contained in the polyimide resin film is the following value: the polyimide resin film cut into long strips is placed in a heating container to be heated, and then removed by heat Gas Chromatograph/Mass Spectrometry (GC/MS) is used to measure the value of the trapped gas. Regarding the polyimide resin film of the embodiment of the present invention, the content of γ-butyrolactone measured by the measurement method is preferably 1 ppm or more and 1000 ppm or less, and the content of the amide-based solvent is preferably Below the detection limit (less than 1 ppm relative to the weight of the polyimide resin film).

本發明的實施形態的聚醯亞胺樹脂膜的玻璃轉移溫度(Tg)較佳為220℃以上、250℃以下,進而佳為225℃以上、245℃以下。藉由聚醯亞胺樹脂膜的Tg為220℃以上,可抑制器件製成時的變形。另外,藉由聚醯亞胺樹脂膜的Tg為250℃以下,能夠減少殘留應力,可抑制翹曲。所謂此處所述的「翹曲」,是指由目視判斷的包含膜與支撐基板的積層體的捲曲程度。所謂「殘留應力」,是指將樹脂組成物塗佈於玻璃基板等基板上並形成膜後的膜內部所殘留的應力,為膜中會產生的「翹曲」的基準。具體而言,可利用下述實施例中記載的方法來測定。The glass transition temperature (Tg) of the polyimide resin film of the embodiment of the present invention is preferably 220°C or higher and 250°C or lower, and more preferably 225°C or higher and 245°C or lower. When the Tg of the polyimide resin film is 220°C or higher, the deformation of the device can be suppressed. In addition, since the Tg of the polyimide resin film is 250°C or less, residual stress can be reduced and warpage can be suppressed. The "warpage" as used herein refers to the degree of curling of the laminate including the film and the supporting substrate as judged by visual observation. The "residual stress" refers to the stress remaining in the film after the resin composition is applied to a substrate such as a glass substrate and the film is formed, and is a reference for "warpage" that may occur in the film. Specifically, it can be measured by the method described in the following Examples.

以下,對使用本發明的實施形態的聚醯亞胺或其組成物來製造聚醯亞胺樹脂膜的方法進行說明。Hereinafter, the method of manufacturing a polyimide resin film using the polyimide or its composition of embodiment of this invention is demonstrated.

藉由將所述聚醯亞胺前驅物的樹脂組成物或聚醯亞胺樹脂組成物塗佈於基板上而可形成聚醯亞胺前驅物或聚醯亞胺樹脂的塗膜。作為將該聚醯亞胺前驅物或聚醯亞胺樹脂的樹脂組成物塗佈於基板上而形成塗膜的方法,可列舉:輥塗佈法、旋塗法、狹縫塗佈法及使用刮刀、塗佈機等進行塗佈的方法等。再者,於塗膜形成步驟中,藉由重覆塗佈,可控制塗膜的厚度或表面平滑性等。其中,就塗膜的表面平滑性及膜厚均勻性的觀點而言,較佳為狹縫模塗佈法。The coating film of the polyimide precursor or the polyimide resin can be formed by coating the resin composition of the polyimide precursor or the polyimide resin composition on the substrate. As a method of coating the polyimide precursor or the resin composition of the polyimide resin on a substrate to form a coating film, include: roll coating method, spin coating method, slit coating method, and use Coating methods such as doctor blades, coaters, etc. Furthermore, in the coating film forming step, the thickness or surface smoothness of the coating film can be controlled by repeated coating. Among them, from the viewpoint of the surface smoothness of the coating film and the uniformity of the film thickness, the slit die coating method is preferred.

塗膜的厚度可根據所期望的用途來適宜選擇,並無特別限定,例如為1 μm~500 μm,較佳為2 μm~250 μm,特佳為5 μm~125 μm。作為基板,可列舉:聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)膜、聚萘二甲酸乙二酯(polyethylene naphthalate,PEN)膜、聚對苯二甲酸丁二酯(polybutylene terephthalate,PBT)膜、矽晶圓、玻璃晶圓、氧化物晶圓、玻璃基板、Cu基板及SUS板等。其中,就表面平滑性、加熱時的尺寸穩定性的觀點而言,較佳為玻璃基板。作為構成玻璃基板的玻璃,就尺寸穩定性的觀點而言,特佳為無鹼玻璃。The thickness of the coating film can be appropriately selected according to the intended use and is not particularly limited. For example, it is 1 μm to 500 μm, preferably 2 μm to 250 μm, particularly preferably 5 μm to 125 μm. Examples of the substrate include: polyethylene terephthalate (PET) film, polyethylene naphthalate (PEN) film, polybutylene terephthalate (PBT) ) Film, silicon wafer, glass wafer, oxide wafer, glass substrate, Cu substrate and SUS board, etc. Among them, from the viewpoint of surface smoothness and dimensional stability during heating, a glass substrate is preferred. As the glass constituting the glass substrate, from the viewpoint of dimensional stability, alkali-free glass is particularly preferred.

繼而,使溶媒自基板上的塗膜中蒸發,藉此使該塗膜乾燥。具體而言,於該乾燥步驟中,只要對該塗膜進行真空乾燥或加熱乾燥即可,當考慮到所獲得的聚醯亞胺樹脂膜的透明性時,較佳為並無白濁地使溶媒蒸發。於乾燥步驟中的塗膜的乾燥中,使用加熱板、烘箱、紅外線、真空腔室等。Then, the solvent is evaporated from the coating film on the substrate, thereby drying the coating film. Specifically, in the drying step, it is sufficient to vacuum or heat dry the coating film. When the transparency of the obtained polyimide resin film is taken into consideration, it is preferable to make the solvent free of cloudiness. evaporation. In the drying of the coating film in the drying step, a hot plate, an oven, an infrared ray, a vacuum chamber, etc. are used.

用於乾燥的加熱的溫度根據塗膜等被加熱體的種類或目的而多種多樣,較佳為於室溫至170℃的範圍內進行1分鐘至數小時。室溫通常為20℃~30℃,但較佳為25℃。進而,乾燥步驟可於相同條件或不同的條件下進行多次。The heating temperature for drying varies according to the type or purpose of the heated object such as the coating film, and it is preferably performed in the range of room temperature to 170°C for 1 minute to several hours. The room temperature is usually 20°C to 30°C, but preferably 25°C. Furthermore, the drying step may be performed multiple times under the same conditions or under different conditions.

於聚醯亞胺前驅物樹脂的情況下,然後,進行加熱步驟,藉此聚醯亞胺前驅物被醯亞胺化,從而於基板上形成聚醯亞胺樹脂膜。於聚醯亞胺樹脂的情況下,由於已被醯亞胺化,因此亦可不進行加熱步驟,但藉由進行加熱步驟,能夠提高所獲得的聚醯亞胺樹脂膜的機械強度或耐熱性,因此較佳為進行加熱步驟。加熱步驟的環境並無特別限定,可為空氣(氧濃度:約21體積%),亦可為氮氣或氬氣等惰性氣體。其中,藉由在大氣環境下進行加熱,聚醯亞胺樹脂膜的表面一部分被氧化,聚醯亞胺樹脂膜與形成於聚醯亞胺樹脂膜上的電路或元件的密接性提高,可提高將於聚醯亞胺上積層電路或元件而成的積層體彎折時的耐龜裂性,因此加熱步驟的環境較佳為空氣。In the case of the polyimide precursor resin, then, a heating step is performed, whereby the polyimide precursor is imidized, thereby forming a polyimide resin film on the substrate. In the case of the polyimide resin, since it has been imidized, the heating step may not be performed. However, by performing the heating step, the mechanical strength or heat resistance of the obtained polyimide resin film can be improved. Therefore, it is preferable to perform a heating step. The environment of the heating step is not particularly limited, and it may be air (oxygen concentration: about 21% by volume), or an inert gas such as nitrogen or argon. Among them, by heating in the atmosphere, a part of the surface of the polyimide resin film is oxidized, and the adhesion between the polyimide resin film and the circuits or components formed on the polyimide resin film is improved, which can improve Since the laminate formed by laminating circuits or components on polyimide has crack resistance when bent, the environment for the heating step is preferably air.

另外,到達用於加熱步驟的加熱溫度為止所需的時間並無特別限定,可選擇與製造線(manufacturing line)的加熱形式相應的升溫方法。例如,可於烘箱內一邊歷時5分鐘~120分鐘自室溫升溫至180℃以上、550℃以下的加熱溫度,一邊對形成於基材上的聚醯亞胺前驅物或聚醯亞胺樹脂的塗膜進行加熱。或者亦可將形成於基材上的聚醯亞胺前驅物或聚醯亞胺樹脂的塗膜直接投入預先升溫為180℃以上、550℃以下的範圍的烘箱內來進行加熱。另外,該聚醯亞胺前驅物或聚醯亞胺樹脂的塗膜視需要亦可於減壓下進行加熱。In addition, the time required to reach the heating temperature used in the heating step is not particularly limited, and a heating method according to the heating mode of the manufacturing line can be selected. For example, it is possible to coat the polyimide precursor or polyimide resin formed on the substrate while raising the temperature from room temperature to a heating temperature of 180°C or higher and 550°C or lower in an oven in 5 minutes to 120 minutes. The film is heated. Alternatively, the polyimide precursor or the coating film of the polyimide resin formed on the base material may be directly put into an oven whose temperature has been raised to a range of 180° C. or more and 550° C. or less to be heated. In addition, the coating film of the polyimide precursor or polyimide resin may be heated under reduced pressure if necessary.

為了獲得本發明的實施形態的聚醯亞胺樹脂膜,較佳為將聚醯亞胺前驅物或聚醯亞胺樹脂的塗膜於240℃以上、290℃以下的範圍內加熱60分鐘以上。藉由在所述條件下進行加熱,能夠獲得透明性、機械強度均良好的聚醯亞胺樹脂膜。In order to obtain the polyimide resin film of the embodiment of the present invention, it is preferable to heat the polyimide precursor or the coating film of the polyimide resin in the range of 240°C or higher and 290°C or lower for 60 minutes or longer. By heating under the above conditions, a polyimide resin film with good transparency and mechanical strength can be obtained.

經過以上各步驟而獲得的聚醯亞胺樹脂膜可自基板剝離而使用,或者亦可不剝離而直接使用。作為剝離方法,可並無特別限制地使用公知的方法,作為一例,可列舉:浸漬於氫氟酸等化學液中的方法;或對聚醯亞胺樹脂被膜與基板的界面照射雷射的方法(雷射剝離);或利用單刃刀於端部切入切口,以自端部抬起的方式進行剝離的方法(機械剝離)等。本發明的聚醯亞胺樹脂膜的雷射剝離性及機械剝離性均優異,因此較佳為利用雷射剝離或機械剝離的任一方法來進行剝離。The polyimide resin film obtained through the above steps may be peeled off from the substrate and used, or may be used as it is without peeling off. As the peeling method, a known method can be used without particular limitation. As an example, a method of immersing in a chemical liquid such as hydrofluoric acid; or a method of irradiating the interface between the polyimide resin film and the substrate with a laser (Laser peeling); or using a single-edged knife to cut the incision at the end and peel it off by lifting it from the end (mechanical peeling), etc. The polyimide resin film of the present invention is excellent in both laser releasability and mechanical releasability. Therefore, it is preferable to perform peeling by either laser peeling or mechanical peeling.

以所述方式獲得的聚醯亞胺樹脂膜的厚度可根據所期望的用途來適宜選擇,但較佳為1 μm~100 μm,更佳為2 μm~30 μm,特佳為3 μm~20 μm。The thickness of the polyimide resin film obtained in the above manner can be appropriately selected according to the intended use, but is preferably 1 μm to 100 μm, more preferably 2 μm to 30 μm, particularly preferably 3 μm to 20 μm.

<積層體> 本發明的實施形態的積層體於所述聚醯亞胺樹脂膜上包括絕緣層及/或配線層。<Laminated body> The laminate of the embodiment of the present invention includes an insulating layer and/or a wiring layer on the polyimide resin film.

(絕緣層) 絕緣層較佳為包含鹼可溶性樹脂。所謂本發明中的鹼可溶性,是指相對於0.045質量%的氫氧化鉀水溶液(100 g)而於25℃下溶解0.1 g以上。由鹼可溶性樹脂形成的絕緣層可藉由光微影而進行圖案加工,藉此可形成用於導電層的導通的開口部,因此較佳。另外,本發明的實施形態的積層體較佳為具有由包含(甲基)丙烯酸系共聚物的鹼可溶性樹脂形成的絕緣層。原因在於:藉由鹼可溶性樹脂中的(甲基)丙烯酸系共聚物,絕緣層的柔軟性提高。進而,本發明的實施形態的帶導電層的膜較佳為於導電層上具有由包含卡多(cardo)系樹脂的鹼可溶性樹脂形成的絕緣層,所述卡多系樹脂具有兩個以上的下述結構式(25)所表示的結構。原因在於:卡多系樹脂提高絕緣層的疏水性,藉此可提高絕緣層的絕緣性。(Insulation) The insulating layer preferably contains an alkali-soluble resin. The alkali solubility in the present invention means that 0.1 g or more is dissolved at 25°C with respect to a 0.045 mass% potassium hydroxide aqueous solution (100 g). The insulating layer formed of an alkali-soluble resin can be patterned by photolithography, thereby forming an opening for conduction of the conductive layer, which is preferable. In addition, the laminate of the embodiment of the present invention preferably has an insulating layer formed of an alkali-soluble resin containing a (meth)acrylic copolymer. The reason is that the (meth)acrylic copolymer in the alkali-soluble resin improves the flexibility of the insulating layer. Furthermore, the film with a conductive layer of the embodiment of the present invention preferably has an insulating layer formed of an alkali-soluble resin containing a cardo-based resin on the conductive layer, and the cardo-based resin has two or more The structure represented by the following structural formula (25). The reason is that the cardo-based resin improves the hydrophobicity of the insulating layer, thereby improving the insulation of the insulating layer.

[化11]

Figure 02_image019
[化11]
Figure 02_image019

另外,作為具有兩個以上的結構式(25)所表示的結構的卡多系樹脂,可較佳地使用市售品。作為該卡多系樹脂的市售品,例如可列舉:「WR-301(商品名)」(艾迪科(ADEKA)公司製造)、「V-259ME(商品名)」(新日鐵住金化學公司製造)、「奧古索(OGSOL)CR-TR1(商品名)」、「奧古索(OGSOL)CR-TR2(商品名)」、「奧古索(OGSOL)CR-TR3(商品名)」、「奧古索(OGSOL)CR-TR4(商品名)」、「奧古索(OGSOL)CR-TR5(商品名)」、「奧古索(OGSOL)CR-TR6(商品名)」(以上為大阪氣體化學(Osaka Gas Chemical)公司製造)等。In addition, as the cardo-based resin having two or more structures represented by the structural formula (25), commercially available products can be preferably used. Examples of commercially available products of this cardo-based resin include "WR-301 (trade name)" (manufactured by ADEKA), "V-259ME (trade name)" (Nippon Steel & Sumikin Chemical Co., Ltd.) Manufactured by the company), "OGSOL CR-TR1 (trade name)", "OGSOL CR-TR2 (trade name)", "OGSOL CR-TR3 (trade name) ", "OGSOL CR-TR4 (trade name)", "OGSOL CR-TR5 (trade name)", "OGSOL CR-TR6 (trade name)" ( The above are made by Osaka Gas Chemical (Osaka Gas Chemical), etc.

就使塗佈特性提高的觀點而言,(甲基)丙烯酸系共聚物及卡多系樹脂的重量平均分子量分別較佳為2,000以上。另外,就使絕緣層的圖案形成中的絕緣層於顯影液中的溶解性提高的觀點而言,該些的重量平均分子量分別較佳為200,000以下。此處,重量平均分子量是指藉由凝膠滲透層析法(Gel Permeation Chromatography,GPC)而測定的聚苯乙烯換算值。From the viewpoint of improving coating properties, the weight average molecular weight of the (meth)acrylic copolymer and the cardo resin is preferably 2,000 or more. In addition, from the viewpoint of improving the solubility of the insulating layer in the developer in the pattern formation of the insulating layer, each of these weight average molecular weights is preferably 200,000 or less. Here, the weight average molecular weight refers to a polystyrene conversion value measured by Gel Permeation Chromatography (GPC).

另外,於絕緣層含有(甲基)丙烯酸系共聚物及卡多系樹脂兩者的情況下,就抑制層分離而形成均勻的硬化膜的觀點而言,(甲基)丙烯酸系共聚物的重量平均分子量(Mw(A1))與卡多系樹脂的重量平均分子量(Mw(A2))的比(Mw(A2)/Mw(A1))較佳為0.14以上。另一方面,就抑制層分離而形成均勻的硬化膜的觀點而言,該比(Mw(A2)/Mw(A1))較佳為1.5以下,更佳為1.0以下。In addition, when the insulating layer contains both a (meth)acrylic copolymer and a cardo-based resin, the weight of the (meth)acrylic copolymer is from the viewpoint of suppressing layer separation and forming a uniform cured film The ratio (Mw(A2)/Mw(A1)) of the average molecular weight (Mw(A1)) to the weight average molecular weight (Mw(A2)) of the cardo-based resin is preferably 0.14 or more. On the other hand, from the viewpoint of suppressing layer separation and forming a uniform cured film, the ratio (Mw(A2)/Mw(A1)) is preferably 1.5 or less, and more preferably 1.0 or less.

本發明中的絕緣層可使用包含鹼可溶性樹脂的絕緣性組成物來形成。該絕緣性組成物中所含的鹼可溶性樹脂的含量可根據所期望的膜厚或用途來任意選擇,通常是相對於固體成分的100質量%而設為10質量%以上、70質量%以下。The insulating layer in the present invention can be formed using an insulating composition containing an alkali-soluble resin. The content of the alkali-soluble resin contained in the insulating composition can be arbitrarily selected according to the desired film thickness or application, and is usually 10% by mass or more and 70% by mass or less with respect to 100% by mass of the solid content.

所述絕緣性組成物亦可含有抗氧化劑。藉由所述絕緣性組成物含有抗氧化劑,可進一步減少絕緣層的著色,並且可提高絕緣層的耐候性。作為抗氧化劑的種類,可列舉具有苯並三唑、有機磷、受阻酚結構的化合物、具有受阻胺結構的化合物等。該些中,藉由含有具有酚性羥基的化合物及/或具有胺基的化合物,絕緣層與基底層的密接力提高,可抑制彎折時的剝離,因此較佳。The insulating composition may also contain an antioxidant. When the insulating composition contains an antioxidant, the coloration of the insulating layer can be further reduced, and the weather resistance of the insulating layer can be improved. As the type of antioxidant, a compound having a benzotriazole, organic phosphorus, hindered phenol structure, a compound having a hindered amine structure, and the like can be cited. Among these, by containing a compound having a phenolic hydroxyl group and/or a compound having an amine group, the adhesive force between the insulating layer and the base layer is improved, and peeling during bending can be suppressed, which is preferable.

作為具有苯並三唑、有機磷、受阻酚結構的化合物,具體而言,可列舉日本專利特開2019-101440號中記載的化合物,但並不限定於此。作為具有受阻胺結構的化合物,具體而言,可列舉國際公開第2015/012228號中記載的化合物,但不限定於此。As the compound having a benzotriazole, organophosphorus, and hindered phenol structure, specifically, the compounds described in Japanese Patent Application Laid-Open No. 2019-101440 can be cited, but are not limited to these. Specific examples of the compound having a hindered amine structure include the compounds described in International Publication No. 2015/012228, but are not limited thereto.

抗氧化劑可單獨含有或組合含有兩種以上。相對於固體成分的100質量份,絕緣層中的抗氧化劑的含量較佳為設為0.1質量份以上、5質量份以下。Antioxidant can be contained individually or in combination of 2 or more types. The content of the antioxidant in the insulating layer is preferably 0.1 parts by mass or more and 5 parts by mass or less with respect to 100 parts by mass of the solid content.

所述絕緣性組成物視需要亦可更含有多官能單體、硬化劑、紫外線吸收劑、聚合抑制劑、密接改良劑、溶劑、界面活性劑、溶解抑制劑、穩定劑、消泡劑、著色劑等添加劑。The insulating composition may further contain multifunctional monomers, hardeners, ultraviolet absorbers, polymerization inhibitors, adhesion modifiers, solvents, surfactants, dissolution inhibitors, stabilizers, defoamers, and coloring as needed. Agents and other additives.

(導電層) 導電層較佳為具有線寬度為0.1 μm~9 μm的網眼結構。藉由導電層具有線寬度為0.1 μm~9 μm的網眼結構,可提高導電層的導電性及視認性。導電層的網眼結構的線寬度更佳為0.5 μm以上,進而佳為1 μm以上。另一方面,導電層的網眼結構的線寬度更佳為7 μm以下,進而佳為6 μm以下。(Conductive layer) The conductive layer preferably has a mesh structure with a line width of 0.1 μm-9 μm. Since the conductive layer has a mesh structure with a line width of 0.1 μm-9 μm, the conductivity and visibility of the conductive layer can be improved. The line width of the mesh structure of the conductive layer is more preferably 0.5 μm or more, and still more preferably 1 μm or more. On the other hand, the line width of the mesh structure of the conductive layer is more preferably 7 μm or less, and still more preferably 6 μm or less.

另外,導電層的膜厚較佳為0.1 μm以上,更佳為0.2 μm以上,進而佳為0.3 μm以上。另一方面,導電層的膜厚較佳為5 μm以下,更佳為3 μm以下,進而佳為1 μm以下。In addition, the film thickness of the conductive layer is preferably 0.1 μm or more, more preferably 0.2 μm or more, and still more preferably 0.3 μm or more. On the other hand, the film thickness of the conductive layer is preferably 5 μm or less, more preferably 3 μm or less, and still more preferably 1 μm or less.

作為導電層中所含的導電性粒子,例如可列舉國際公開第2018/084067號中記載的粒子,更佳為銀粒子。Examples of the conductive particles contained in the conductive layer include particles described in International Publication No. 2018/084067, and silver particles are more preferable.

為了形成具有所期望的導電性的微細的導電圖案,導電性粒子的一次粒子徑較佳為10 nm~200 nm,更佳為10 nm~60 nm。此處,導電性粒子的一次粒子徑是藉由如下方式而算出:藉由掃描式電子顯微鏡而對導電層的剖面進行觀察,隨機選擇100個粒子,測定各粒子的一次粒子徑,並取該些的算術平均值。再者,各粒子的一次粒子的粒子徑設為一次粒子中直徑最長部分與最短部分的算術平均值。In order to form a fine conductive pattern having desired conductivity, the primary particle diameter of the conductive particles is preferably 10 nm to 200 nm, and more preferably 10 nm to 60 nm. Here, the primary particle diameter of the conductive particles is calculated by observing the cross section of the conductive layer with a scanning electron microscope, randomly selecting 100 particles, measuring the primary particle diameter of each particle, and taking the The arithmetic mean of these. In addition, the particle diameter of the primary particle of each particle is taken as the arithmetic mean of the longest part and the shortest part of the primary particles.

就使導電性提高的觀點而言,導電層中的導電性粒子的含量較佳為20質量%以上,就使圖案加工性提高的觀點而言,較佳為95質量%以下。From the viewpoint of improving conductivity, the content of conductive particles in the conductive layer is preferably 20% by mass or more, and from the viewpoint of improving pattern processability, it is preferably 95% by mass or less.

另外,導電層較佳為含有0.1質量%~80質量%的有機化合物。藉由導電層含有0.1質量%以上的有機化合物,可對導電層賦予柔軟性,從而可進一步提高導電層的耐彎曲性。另一方面,藉由導電層含有80質量%以下的有機化合物,可提高導電性。In addition, the conductive layer preferably contains 0.1% by mass to 80% by mass of organic compounds. When the conductive layer contains 0.1% by mass or more of an organic compound, flexibility can be imparted to the conductive layer, and the bending resistance of the conductive layer can be further improved. On the other hand, when the conductive layer contains 80% by mass or less of organic compounds, conductivity can be improved.

作為導電層中所含的有機化合物,較佳為鹼可溶性樹脂。作為鹼可溶性樹脂,較佳為具有羧基的(甲基)丙烯酸系共聚物。此處,所謂(甲基)丙烯酸系共聚物,是指(甲基)丙烯酸系單體與其他單體的共聚物。The organic compound contained in the conductive layer is preferably an alkali-soluble resin. The alkali-soluble resin is preferably a (meth)acrylic copolymer having a carboxyl group. Here, the (meth)acrylic copolymer refers to a copolymer of a (meth)acrylic monomer and other monomers.

作為(甲基)丙烯酸系單體及其他單體的具體例,例如可列舉國際公開第2018/084067號中記載的例子,但並不限定於該些。As specific examples of (meth)acrylic monomers and other monomers, for example, the examples described in International Publication No. 2018/084067 can be cited, but they are not limited to these.

為了於鹼可溶性樹脂中導入賦予鹼可溶性的羧基,例如可列舉使(甲基)丙烯酸、衣康酸、巴豆酸、馬來酸、富馬酸、該些的酸酐等與所述(甲基)丙烯酸系單體共聚的方法。In order to introduce alkali-soluble carboxyl groups into alkali-soluble resins, for example, (meth)acrylic acid, itaconic acid, crotonic acid, maleic acid, fumaric acid, these acid anhydrides, etc. may be combined with the (methyl) The method of copolymerization of acrylic monomers.

就增大硬化反應的速度的觀點而言,(甲基)丙烯酸系共聚物較佳為於側鏈或分子末端具有碳-碳雙鍵。作為具有碳-碳雙鍵的官能基,例如可列舉:乙烯基、烯丙基、(甲基)丙烯酸基等。From the viewpoint of increasing the speed of the curing reaction, the (meth)acrylic copolymer preferably has a carbon-carbon double bond in a side chain or a molecular terminal. As a functional group which has a carbon-carbon double bond, a vinyl group, an allyl group, (meth)acrylic group, etc. are mentioned, for example.

鹼可溶性樹脂的羧酸當量較佳為400 g/mol~1,000 g/mol。鹼可溶性樹脂的羧酸當量可藉由對酸價進行測定而算出。另外,為了可以高水準兼顧硬度與耐龜裂性,鹼可溶性樹脂的雙鍵當量較佳為150 g/mol~10,000 g/mol。鹼可溶性樹脂的雙鍵當量可藉由對碘價進行測定而算出。The carboxylic acid equivalent of the alkali-soluble resin is preferably 400 g/mol to 1,000 g/mol. The carboxylic acid equivalent of the alkali-soluble resin can be calculated by measuring the acid value. In addition, in order to achieve a high level of both hardness and crack resistance, the double bond equivalent of the alkali-soluble resin is preferably 150 g/mol to 10,000 g/mol. The double bond equivalent of the alkali-soluble resin can be calculated by measuring the iodine value.

鹼可溶性樹脂的重量平均分子量(Mw)較佳為1,000~100,000。藉由將重量平均分子量設為所述範圍內,可獲得鹼可溶性樹脂的良好的塗佈特性,於導電層上進行圖案形成時的鹼可溶性樹脂於顯影液中的溶解性亦變得良好。此處,鹼可溶性樹脂的重量平均分子量是指藉由凝膠滲透層析法(GPC)而測定的聚苯乙烯換算值。The weight average molecular weight (Mw) of the alkali-soluble resin is preferably 1,000 to 100,000. By setting the weight average molecular weight within the above range, good coating properties of the alkali-soluble resin can be obtained, and the solubility of the alkali-soluble resin in the developer when patterning on the conductive layer also becomes good. Here, the weight average molecular weight of the alkali-soluble resin means a polystyrene conversion value measured by gel permeation chromatography (GPC).

另外,導電層亦可含有有機錫化合物及金屬螯合化合物中的至少一者。藉由導電層含有有機錫化合物及金屬螯合化合物中的至少一者,可進一步提高導電層與阻氣層的密接。特別是,金屬螯合化合物與有機錫化合物相比,可不造成環境負擔而獲得密接性提高效果,因此更佳。有機錫化合物及金屬螯合化合物可使用公知的化合物。In addition, the conductive layer may contain at least one of an organotin compound and a metal chelate compound. Since the conductive layer contains at least one of an organotin compound and a metal chelate compound, the adhesion between the conductive layer and the gas barrier layer can be further improved. In particular, the metal chelate compound is better than the organotin compound because it can obtain the effect of improving the adhesion without causing an environmental burden. Known compounds can be used for the organotin compound and metal chelate compound.

另外,導電層亦可含有抗氧化劑。藉由導電層含有抗氧化劑,可提高導電層的耐候性。作為抗氧化劑的種類,可列舉與所述絕緣層中可含的抗氧化劑相同的抗氧化劑。該些中,藉由含有具有酚性羥基的化合物及/或具有胺基的化合物,導電層與基底層的密接力提高,可抑制彎折時的剝離,因此較佳。In addition, the conductive layer may also contain an antioxidant. Since the conductive layer contains an antioxidant, the weather resistance of the conductive layer can be improved. As the type of antioxidant, the same antioxidant as the antioxidant that can be contained in the insulating layer can be cited. Among these, by containing a compound having a phenolic hydroxyl group and/or a compound having an amine group, the adhesive force between the conductive layer and the base layer is improved, and peeling at the time of bending can be suppressed, which is preferable.

抗氧化劑可單獨含有或組合含有兩種以上。相對於固體成分的100質量份,導電層中的抗氧化劑的含量較佳為設為0.1質量份以上、5質量份以下。Antioxidant can be contained individually or in combination of 2 or more types. The content of the antioxidant in the conductive layer is preferably 0.1 parts by mass or more and 5 parts by mass or less with respect to 100 parts by mass of the solid content.

導電層較佳為除此以外還含有分散劑、光聚合起始劑、單體、光酸產生劑、熱酸產生劑、溶劑、增感劑、於可見光下具有吸收的顏料及染料中的至少一者、密接改良劑、界面活性劑、聚合抑制劑、抗氧化劑等。The conductive layer preferably contains at least a dispersant, a photopolymerization initiator, a monomer, a photoacid generator, a thermal acid generator, a solvent, a sensitizer, pigments and dyes that absorb under visible light. One is close contact modifiers, surfactants, polymerization inhibitors, antioxidants, etc.

另外,本發明中的導電層可使用導電性組成物來形成。作為該導電性組成物中所含的成分,例如可列舉:導電性粒子、鹼可溶性樹脂、有機錫化合物、金屬螯合化合物、分散劑、光聚合起始劑、單體、光酸產生劑、熱酸產生劑、溶劑、增感劑、於可見光下具有吸收的顏料及染料中的至少一者、密接改良劑、界面活性劑、抗氧化劑或聚合抑制劑等。In addition, the conductive layer in the present invention can be formed using a conductive composition. Examples of the components contained in the conductive composition include conductive particles, alkali-soluble resins, organotin compounds, metal chelate compounds, dispersants, photopolymerization initiators, monomers, photoacid generators, Thermal acid generators, solvents, sensitizers, at least one of pigments and dyes that absorb under visible light, adhesion modifiers, surfactants, antioxidants, polymerization inhibitors, and the like.

導電性組成物所含有的導電性粒子較佳為於其粒子表面的至少一部分具有被覆層。藉此,可使導電性粒子的表面活性降低而抑制導電性粒子彼此的反應及導電性粒子與有機成分的反應中的至少一者,從而提高導電性粒子的分散性。進而,於在導電層的加工中使用光微影的情況下,亦可抑制曝光光的散射,以高精度對導電層進行圖案加工。另一方面,該導電性粒子表面的被覆層可藉由在氧的存在下以150℃~350℃左右的高溫進行加熱而被容易地去除。其結果,導電性組成物中的導電性粒子可顯現出導電層的充分的導電性。The conductive particles contained in the conductive composition preferably have a coating layer on at least a part of the particle surface. Thereby, the surface activity of conductive particles can be reduced, and at least one of the reaction between conductive particles and the reaction between conductive particles and organic components can be suppressed, and the dispersibility of conductive particles can be improved. Furthermore, when photolithography is used for the processing of the conductive layer, scattering of exposure light can be suppressed, and the conductive layer can be patterned with high accuracy. On the other hand, the coating layer on the surface of the conductive particles can be easily removed by heating at a high temperature of about 150°C to 350°C in the presence of oxygen. As a result, the conductive particles in the conductive composition can express sufficient conductivity of the conductive layer.

導電性粒子表面的被覆層較佳為包含碳及碳化合物中的至少一者。藉由該被覆層包含碳及碳化合物中的至少一者,可進一步提高導電性組成物中的導電性粒子的分散性。The coating layer on the surface of the conductive particle preferably contains at least one of carbon and a carbon compound. When the coating layer contains at least one of carbon and a carbon compound, the dispersibility of the conductive particles in the conductive composition can be further improved.

作為於導電性粒子表面形成包含碳及碳化合物中的至少一者的被覆層的方法,例如可列舉藉由熱電漿(thermal plasma)法而使甲烷氣體等具有碳的反應性氣體與導電性粒子接觸的方法(日本專利特開2007-138287號公報中記載的方法)等。As a method of forming a coating layer containing at least one of carbon and a carbon compound on the surface of the conductive particles, for example, a thermal plasma method to make a reactive gas with carbon such as methane gas and conductive particles are used The method of contact (the method described in JP 2007-138287 A), etc.

<用途> 本發明的實施形態的聚醯亞胺及聚醯亞胺樹脂膜可用作液晶顯示器、有機EL顯示器、觸控面板、電子紙、彩色濾光片、微LED顯示器等顯示器件、太陽電池、CMOS等光接收器件、透明天線等通信用器件等可撓性器件中的可撓性基板。特別是,本案記載的聚醯亞胺樹脂的耐氧化性優異且具有良好的透明性,因此可適宜地用於要求高耐光性可靠性與透明性的可撓性觸控面板、可撓性太陽電池、可撓性透明天線的各用途中。<Use> The polyimide and polyimide resin film of the embodiment of the present invention can be used as display devices such as liquid crystal displays, organic EL displays, touch panels, electronic paper, color filters, micro LED displays, solar cells, and CMOS Flexible substrates in flexible devices such as light receiving devices, transparent antennas and other communication devices. In particular, the polyimide resin described in this case has excellent oxidation resistance and good transparency, so it can be suitably used for flexible touch panels and flexible solar panels that require high light resistance, reliability and transparency. In various applications of batteries and flexible transparent antennas.

可撓性器件的製造步驟包括如下步驟:於形成於基板上的聚醯亞胺樹脂膜上形成顯示器件、光接收器件所需的電路或元件。例如,可藉由公知的方法而於聚醯亞胺樹脂膜上形成器件所需的電路或元件。如上所述,可使用雷射剝離或機械剝離等公知的方法,將於表面形成有電路或元件的固體狀聚醯亞胺樹脂膜自基板剝離,從而獲得可撓性器件。 [實施例]The manufacturing steps of the flexible device include the following steps: forming circuits or components required for the display device and the light receiving device on the polyimide resin film formed on the substrate. For example, a circuit or element required for a device can be formed on a polyimide resin film by a known method. As described above, known methods such as laser peeling or mechanical peeling can be used to peel the solid polyimide resin film on which circuits or elements are formed from the substrate to obtain a flexible device. [Example]

以下,列舉實施例等來對本發明進行說明,但本發明並不受該些例子限定。Hereinafter, the present invention will be explained with examples and the like, but the present invention is not limited by these examples.

<材料> (酸二酐) ODPA:4,4'-氧基二鄰苯二甲酸二酐 6FDA:2,2-雙(3,4-二羧基苯基)六氟丙烷二酐 PMDA:均苯四甲酸二酐 BPDA:3,3',4,4'-聯苯四羧酸二酐 (二胺化合物) 3,3'-DDS:3,3'-二胺基二苯基碸 BAPS-m:雙[4-(3-胺基苯氧基)苯基]碸 TFMB:2,2'-雙(三氟甲基)聯苯胺 6FODA:2,2'-雙(三氟甲基)-4,4'-二胺基二苯基醚 HFBAPP:2,2-雙[4-(4-胺基苯氧基)苯基]六氟丙烷 4,4'-DDS:4,4'-二胺基二苯基碸 (三胺化合物) TAPOB:1,3,5-三(4-胺基苯氧基)苯 (溶劑) GBL:γ-丁內酯 NMP:N-甲基-2-吡咯啶酮 (鹼可溶性樹脂) 鹼可溶性樹脂(A):使0.4當量的甲基丙烯酸縮水甘油酯與包含甲基丙烯酸/甲基丙烯酸甲酯/苯乙烯=54/23/23(莫耳%)的共聚物的羧基進行加成反應而成者(重量平均分子量(Mw):29,000) (導電性粒子) A-1:表面碳被覆層的平均厚度為1 nm且一次粒子徑為40 nm的銀粒子(日清工程(Nissin Engineering)(股)製造)。<Materials> (Acid dianhydride) ODPA: 4,4'-oxydiphthalic dianhydride 6FDA: 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride PMDA: Pyromellitic dianhydride BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride (Diamine compound) 3,3'-DDS: 3,3'-diaminodiphenyl sulfide BAPS-m: Bis[4-(3-aminophenoxy)phenyl] sulfide TFMB: 2,2'-bis(trifluoromethyl)benzidine 6FODA: 2,2'-bis(trifluoromethyl)-4,4'-diaminodiphenyl ether HFBAPP: 2,2-bis[4-(4-aminophenoxy)phenyl]hexafluoropropane 4,4'-DDS: 4,4'-diaminodiphenyl sulfide (Triamine compound) TAPOB: 1,3,5-tris(4-aminophenoxy)benzene (Solvent) GBL: γ-butyrolactone NMP: N-methyl-2-pyrrolidone (Alkali-soluble resin) Alkali-soluble resin (A): Add 0.4 equivalent of glycidyl methacrylate to the carboxyl group of a copolymer containing methacrylic acid/methyl methacrylate/styrene=54/23/23 (mol%) The reaction product (weight average molecular weight (Mw): 29,000) (Conductive particles) A-1: Silver particles (manufactured by Nissin Engineering Co., Ltd.) with an average thickness of the surface carbon coating layer of 1 nm and a primary particle diameter of 40 nm.

<評價> (1)聚醯亞胺前驅物樹脂的重量平均分子量的測定 重量平均分子量(Mw)是藉由凝膠滲透層析法(GPC)並根據下述條件而測定的。另外,用於算出重量平均分子量的校準曲線是使用標準聚苯乙烯(東曹(TOSOH)(股)製造)而製成的。<Evaluation> (1) Determination of the weight average molecular weight of the polyimide precursor resin The weight average molecular weight (Mw) is measured by gel permeation chromatography (GPC) under the following conditions. In addition, the calibration curve for calculating the weight average molecular weight was prepared using standard polystyrene (manufactured by TOSOH Co., Ltd.).

設備裝置:DP-8020(東曹(TOSOH)(股)製造) 展開溶劑:添加N,N'-二甲基乙醯胺(DMAc)、0.05M-LiCl、0.05%磷酸 保護管柱:TSK guard column ALPHA(東曹(TOSOH)(股)製造) 管柱:TSK-GEL α-M(東曹(TOSOH)(股)製造) 流速:0.8 mL/分鐘 管柱溫度:23℃ 檢測器:RI-8020(東曹(TOSOH)(股)製造)。Equipment: DP-8020 (manufactured by TOSOH (stock)) Developing solvent: add N,N'-dimethylacetamide (DMAc), 0.05M-LiCl, 0.05% phosphoric acid Guard column: TSK guard column ALPHA (manufactured by TOSOH (stock)) Column: TSK-GEL α-M (manufactured by TOSOH (stock)) Flow rate: 0.8 mL/min Column temperature: 23℃ Detector: RI-8020 (manufactured by TOSOH (stock)).

(2)聚醯亞胺樹脂膜(玻璃基板上)的製成 使用旋塗機(三笠(Mikasa)(股)製造的「1H-360S(商品名)」),將各實施例、比較例中所製成的聚醯亞胺前驅物樹脂組成物以固化後的膜厚成為10 μm±0.5 μm的方式旋轉塗佈於125 mm見方、0.5 mm厚的無鹼玻璃基板(AN100、AGC公司製造)上,然後使用加熱板(大日本網屏製造(股)製造的「SCW-636(商品名)」)於120℃下預烘烤5分鐘,製作預烘烤膜。將所製作的基板於下述條件下固化,從而製成聚醯亞胺樹脂膜(玻璃基板上)。(2) Production of polyimide resin film (on glass substrate) Using a spin coater (Mikasa (Mikasa) (stock) "1H-360S (trade name)"), the polyimide precursor resin composition produced in each example and comparative example was cured The film thickness becomes 10 μm±0.5 μm, and it is spin-coated on a 125 mm square and 0.5 mm thick alkali-free glass substrate (AN100, manufactured by AGC), and then used a hot plate (made by Dai Nippon Screen Co., Ltd.) "SCW-636 (trade name)") is pre-baked at 120°C for 5 minutes to make a pre-baked film. The produced substrate was cured under the following conditions to form a polyimide resin film (on a glass substrate).

實施例1~實施例14、實施例16~實施例21、比較例1~比較例4:使用烘箱(「IHPS-222」;愛斯佩克(ESPEC)(股)製造),於空氣中以表1中記載的溫度、時間進行固化,藉此製作聚醯亞胺樹脂組成物的膜狀物(玻璃基板上)。再者,固化是藉由將基板投入調整為各實施例、比較例中記載的溫度的烘箱中來進行的。Example 1 to Example 14, Example 16 to Example 21, Comparative Example 1 to Comparative Example 4: Using an oven ("IHPS-222"; manufactured by ESPEC (stock)), in air The temperature and time described in Table 1 were cured to produce a polyimide resin composition film (on a glass substrate). In addition, curing was performed by putting the substrate into an oven adjusted to the temperature described in each of the Examples and Comparative Examples.

實施例15:使用惰性烘箱(inert oven)(光洋熱系統(Koyo Thermo System)(股)製造的INH-21CD),於氮氣流下(氧濃度未滿100 ppm)歷時40分鐘升溫至250℃,保持60分鐘,以5℃/min~8℃/min冷卻至50℃,從而製作聚醯亞胺樹脂膜(玻璃基板上)。Example 15: Using an inert oven (INH-21CD manufactured by Koyo Thermo System (stock)), the temperature was raised to 250°C for 40 minutes under nitrogen flow (oxygen concentration less than 100 ppm), and kept For 60 minutes, it was cooled to 50°C at 5°C/min-8°C/min to produce a polyimide resin film (on the glass substrate).

所獲得的聚醯亞胺樹脂膜的膜厚是使用表面粗糙度/輪廓形狀測定機(薩福考姆(SURFCOM)1400D;東京精密(股)製造),將測定倍率設為10,000倍、將測定長度設為1.0 mm、將測定速度設為0.30 mm/s來進行測定的。The film thickness of the obtained polyimide resin film was measured using a surface roughness/contour shape measuring machine (SURFCOM 1400D; manufactured by Tokyo Precision Co., Ltd.), and the measurement magnification was set to 10,000 times. The length is set to 1.0 mm and the measurement speed is set to 0.30 mm/s to perform the measurement.

(3)聚醯亞胺樹脂膜(剝離膜)的製作 利用單刃刀於距(2)中所製成的聚醯亞胺樹脂膜(玻璃基板上)四邊的端部為1 cm的部分切入切口,以自端部抬起的方式進行剝離,藉此獲得聚醯亞胺樹脂膜(剝離膜)。(3) Production of polyimide resin film (release film) Use a single-edged knife to cut into the incision at a distance of 1 cm from the four sides of the polyimide resin film (on the glass substrate) made in (2), and peel it off by lifting it from the end. A polyimide resin film (release film) was obtained.

(4)IR光譜的峰值強度比的測定 藉由下述方法來測定(2)中所獲得的聚醯亞胺樹脂膜的IR光譜的峰值強度比。 分析方法:傅立葉轉換紅外光譜衰減全反射(Fourier Transform Infrared spectroscopy-Attenuated Total Reflection,FTIR-ATR) 裝置:FTS-55A(伯樂(Bio-Rad)公司製造) 條件:ATR附件(Ge45°) 光源:特殊陶瓷 檢測器:MCT 解析度:4 cm-1 累計次數:32次 測定範圍:400 cm-1 ~4000 cm-1 光譜縱軸:吸光度 步驟1)以2000 cm-1 ~4000 cm-1 為基準畫出基線 步驟2)利用存在於1480 cm-1 ~1510 cm-1 的範圍內的最大峰值進行標準化 步驟3)讀取存在於3400 cm-1 ~3700 cm-1 的範圍內的最大峰值距基線的高度 步驟4)根據下述式來算出將IR光譜的存在於1480 cm-1 ~1510 cm-1 的範圍內的最大峰值強度設為Y、將存在於3400 cm-1 ~3700 cm-1 的範圍內的最大峰值強度設為Z時的峰值強度比 式)峰值強度比=Z/Y。(4) Measurement of IR spectrum peak intensity ratio The IR spectrum peak intensity ratio of the polyimide resin film obtained in (2) was measured by the following method. Analysis method: Fourier Transform Infrared spectroscopy-Attenuated Total Reflection (FTIR-ATR) Device: FTS-55A (manufactured by Bio-Rad) Conditions: ATR accessory (Ge45°) Light source: Special Ceramic detector: MCT Resolution: 4 cm -1 Cumulative times: 32 times Measurement range: 400 cm -1 ~4000 cm -1 Spectral axis: absorbance step 1) Draw with 2000 cm -1 ~4000 cm -1 as the reference Step 2) Use the largest peak existing in the range of 1480 cm -1 ~1510 cm -1 to standardize Step 3) Read the distance between the largest peak existing in the range of 3400 cm -1 ~3700 cm -1 from the baseline Height step 4) Calculate according to the following formula. Set the maximum peak intensity of the IR spectrum in the range of 1480 cm -1 to 1510 cm -1 as Y, which will exist in the range of 3400 cm -1 to 3700 cm -1 The maximum peak intensity in is set as the peak intensity ratio when Z is the formula) Peak intensity ratio = Z/Y.

(5)聚醯亞胺樹脂膜中所含的GBL及NMP的量的測定 藉由下述步驟來測定聚醯亞胺樹脂組成物中所含的GBL的量。 步驟1)脫離氣體的捕集 將(3)中所獲得的聚醯亞胺樹脂膜(剝離膜)切割成長條狀,採取至加熱容器中。繼而,連同加熱容器於下述條件下進行加熱,將所產生的氣體捕集至吸附管中。將不使用試料而進行相同操作的檢體作為對照。 ·加熱溫度:400℃ ·加熱時間:60 min ·環境:氮氣50 mL/min 步驟2)熱脫離GC/MS 藉由熱脫離GC/MS來測定利用步驟1的方法捕集至吸附管中的氣體。以下示出熱脫離GC/MS的條件。 ·熱脫離裝置:TD-100(瑪珂思(Markes)) ·一次熱脫離條件:脫離溫度260℃、陷阱溫度-27℃、15 min ·二次熱脫離條件:320℃、5 min ·GC裝置:7890A(安捷倫(Agilent)) ·管柱:DB-5MS 30 m×0.25 mmID 膜厚1 μm(安捷倫(Agilent)J&W) ·管柱溫度:40℃(4 min)~280℃(22 min)升溫速度10℃/min ·MS裝置:5975C(安捷倫(Agilent)) ·離子化法:電子電離(Electron ionization,EI) ·監測離子:m/z 29~600 ·GBL定量離子:m/z 86 ·NMP定量離子:m/z 98 ·離子源溫度:230℃ ·標準品:GBL(和光純藥工業(股)製造 特級)、NMP(和光純藥工業(股)製造 特級) 利用甲醇溶解標準品而製成標準溶液。自適宜稀釋該溶液而製成的標準溶液中採取1 μL並注入吸附管中,然後於與試樣相同的條件下進行測定,製成校準曲線來進行定量。(5) Determination of the amount of GBL and NMP contained in the polyimide resin film The amount of GBL contained in the polyimide resin composition is measured by the following procedure. Step 1) Capture of degassing The polyimide resin film (release film) obtained in (3) is cut into long strips and taken into a heating container. Then, the heating container is heated under the following conditions to trap the generated gas in the adsorption tube. A specimen subjected to the same operation without using a sample was used as a control. ·Heating temperature: 400℃ ·Heating time: 60 min ·Environment: Nitrogen 50 mL/min Step 2) Thermal separation from GC/MS Measure the gas trapped in the adsorption tube by the method in step 1 by thermal separation GC/MS. The conditions for thermal separation GC/MS are shown below. ·Thermal release device: TD-100 (Markes) ·One-time thermal release conditions: release temperature 260℃, trap temperature -27℃, 15 min ·Secondary thermal separation conditions: 320℃, 5 min ·GC device: 7890A (Agilent) ·Column: DB-5MS 30 m×0.25 mmID, film thickness 1 μm (Agilent J&W) ·Column temperature: 40℃ (4 min) ~ 280℃ (22 min) heating rate 10℃/min · MS device: 5975C (Agilent) ·Ionization method: Electron ionization (EI) ·Monitoring ion: m/z 29~600 ·GBL quantitative ion: m/z 86 ·NMP quantitative ion: m/z 98 ·Ion source temperature: 230℃ ·Standard products: GBL (Special grade manufactured by Wako Pure Chemical Industries, Ltd.), NMP (Special grade manufactured by Wako Pure Chemical Industries, Ltd.) Use methanol to dissolve the standard to make a standard solution. Take 1 μL from the standard solution prepared by appropriately diluting the solution and inject it into the adsorption tube, and then perform the measurement under the same conditions as the sample to prepare a calibration curve for quantification.

(6)玻璃轉移溫度的測定 使用熱機械分析裝置(SII奈米科技(SII Nano Technology)公司製造的愛思特(EXSTAR)6000TMA/SS6000),於氮氣流下以拉伸負荷30 mN進行玻璃轉移溫度的測定。升溫方法是於以下條件下進行的。於第1階段以升溫速率5℃/min升溫至150℃並去除聚醯亞胺樹脂膜的試樣的吸附水,於第2階段以降溫速率5℃/min空氣冷卻至室溫。於第3階段以升溫速率5℃/min進行正式測定,求出該試樣的玻璃轉移溫度。再者,於該測定中使用(3)中所示的聚醯亞胺樹脂膜(剝離膜),測定中所使用的膜的寬度設為5 mm,夾頭間距離設為20 mm。(6) Measurement of glass transition temperature A thermomechanical analysis device (EXSTAR 6000TMA/SS6000 manufactured by SII Nano Technology) was used to measure the glass transition temperature under a nitrogen stream with a tensile load of 30 mN. The heating method is carried out under the following conditions. In the first stage, the temperature was raised to 150°C at a heating rate of 5°C/min and the adsorbed water of the sample of the polyimide resin film was removed, and in the second stage, the temperature was cooled to room temperature with air at a cooling rate of 5°C/min. In the third stage, a formal measurement was performed at a heating rate of 5°C/min, and the glass transition temperature of the sample was determined. In addition, the polyimide resin film (release film) shown in (3) was used in this measurement, the width of the film used in the measurement was set to 5 mm, and the distance between the chucks was set to 20 mm.

(7)翹曲的測定 將(2)中所製成的帶聚醯亞胺樹脂膜的玻璃基板放置於石平台上,測定靜置30分鐘後的翹曲量,藉此進行評價。再者,翹曲量定義為四角的浮起的平均值,測定是於調整為室溫23℃±2℃、濕度50%±5%的房間內實施的。(7) Measurement of warpage The glass substrate with the polyimide resin film prepared in (2) was placed on a stone platform, and the amount of warpage after standing for 30 minutes was measured for evaluation. In addition, the amount of warpage is defined as the average value of the floating of the four corners, and the measurement is carried out in a room adjusted to a room temperature of 23°C±2°C and a humidity of 50%±5%.

(8)黃色度的測定 使用色彩儀表(color meter)(SM-T45、須賀(suga)試驗機股份有限公司製造)來進行黃色度的測定。光源使用C光源,測定是以透射光模式進行的。再者,於測定中使用(2)中所製作的聚醯亞胺樹脂膜(玻璃基板上);及利用烘箱(「IHPS-222」;愛斯佩克(ESPEC)(股)製造)將(2)中所製成的聚醯亞胺樹脂膜(玻璃基板上)於大氣環境下(氧濃度:21體積%)以250℃追加加熱1小時所得者。於表1中,分別表示為「固化後」「追加加熱後」。(8) Determination of yellowness A color meter (SM-T45, manufactured by Suga Testing Machine Co., Ltd.) was used to measure the degree of yellowness. The C light source was used as the light source, and the measurement was performed in transmitted light mode. In addition, the polyimide resin film (on a glass substrate) produced in (2) was used in the measurement; and an oven ("IHPS-222"; manufactured by ESPEC (Stock)) was used to 2) The polyimide resin film (on the glass substrate) prepared in the above is heated at 250°C for 1 hour in the atmosphere (oxygen concentration: 21% by volume). In Table 1, they are expressed as "after curing" and "after additional heating".

(9)面內/面外雙折射的測定 使用稜鏡耦合器(麥特利空(METRICON)公司製造、PC2010)來測定波長632.8 nm的TE折射率(n(TE))及TM折射率(n(TM))。n(TE)、n(TM)分別為相對於聚醯亞胺膜面平行、垂直方向的折射率。面內/面外雙折射是以n(TE)與n(TM)的差(n(TE)-n(TM))的形式計算出的。再者,於測定中使用(3)中所獲得的聚醯亞胺樹脂膜(剝離膜)。(9) Measurement of in-plane/out-of-plane birefringence The TE refractive index (n(TE)) and the TM refractive index (n(TM)) at a wavelength of 632.8 nm were measured using a quince coupler (manufactured by METRICON, PC2010). n(TE) and n(TM) are the refractive indexes in parallel and perpendicular directions with respect to the surface of the polyimide film, respectively. The in-plane/out-of-plane birefringence is calculated as the difference between n(TE) and n(TM) (n(TE)-n(TM)). In addition, the polyimide resin film (release film) obtained in (3) was used for the measurement.

(10)聚醯亞胺樹脂膜的耐折性試驗(MIT試驗) 使用(3)中所獲得的聚醯亞胺樹脂膜(剝離膜)於下述條件下實施試驗。再者,以測定數為n=3來實施,將其平均值作為耐折次數。 試驗方法:依據日本工業標準(Japanese Industrial Standards,JIS)P 8115(2001) 試驗片:長條110 mm×10 mm 試驗條件:試驗負荷:1.0 kgf 彎折角度:135° 彎折面的R:0.38 mm 彎折速度:每分鐘175次 測定數:n=3 試驗環境:(23±2)℃、(50±5)%RH 測定裝置:MIT試驗機 型號DA(東洋精機製作所(股)製造)。(10) Folding resistance test of polyimide resin film (MIT test) Using the polyimide resin film (release film) obtained in (3), the test was carried out under the following conditions. In addition, it is implemented with the number of measurements as n=3, and the average value thereof is regarded as the number of folding resistance. Test method: According to Japanese Industrial Standards (JIS) P 8115 (2001) Test piece: long strip 110 mm×10 mm Test conditions: Test load: 1.0 kgf Bending angle: 135° R of bending surface: 0.38 mm Bending speed: 175 times per minute Number of measurements: n=3 Test environment: (23±2)℃, (50±5)%RH Measuring device: MIT testing machine model DA (manufactured by Toyo Seiki Co., Ltd.).

(11)基板密接力的測定(90°剝離試驗) 將(2)中所獲得的聚醯亞胺樹脂膜(玻璃基板上)切成10 mm寬、100 mm長,使用加熱板進行120℃×6分鐘的脫水烘烤處理,然後於拉伸速度50 mm/min的條件下進行90°剝離試驗。此處,於90°剝離試驗中,使用依據JIS C6481(1996、印刷配線板用覆銅積層版試驗法)的密接性試驗機(山本鍍金試驗器公司製造)來測定90°剝離強度(N/cm),並利用以下的評價方法來進行判定。 優良(A):0.3 N/cm以下 良好(B):0.3 N/cm以上、未滿0.5 N/cm 合格(C):0.5 N/cm以上、未滿0.8 N/cm 不良(D):0.8 N/cm以上。(11) Measurement of substrate adhesion (90° peeling test) Cut the polyimide resin film (on the glass substrate) obtained in (2) into 10 mm wide and 100 mm long, and use a hot plate to perform dehydration and baking treatment at 120°C x 6 minutes, and then set it at a stretching speed of 50 A 90° peel test is carried out under the condition of mm/min. Here, in the 90° peel test, the 90° peel strength (N/ cm), and use the following evaluation methods to make judgments. Excellent (A): 0.3 N/cm or less Good (B): 0.3 N/cm or more, less than 0.5 N/cm Pass (C): 0.5 N/cm or more, less than 0.8 N/cm Bad (D): 0.8 N/cm or more.

(12)雷射剝離試驗 對於(2)中所獲得的聚醯亞胺樹脂膜(玻璃基板上),自玻璃基板側照射308 nm的準分子雷射(形狀:21 mm×1.0 mm)來進行雷射剝離試驗。雷射是在短軸方向一邊每次錯開0.25 mm一邊進行照射。於沿著照射區域的邊緣切入切口時,將剝離膜的能量作為剝離所需的照射能量(剝離能量),利用以下的基準來進行評價。 優良(A):剝離能量為230 mJ/cm2 以下。 良好(B):照射能量超過230 mJ/cm2 、260 mJ/cm2 以下。 合格(C):照射能量超過260 mJ/cm2 、300 mJ/cm2 以下。 不良(D):照射能量超過300 mJ/cm2(12) Laser peel test The polyimide resin film (on the glass substrate) obtained in (2) was irradiated with a 308 nm excimer laser (shape: 21 mm×1.0 mm) from the glass substrate side. Laser peel test. The laser is irradiated while shifting 0.25 mm at a time in the short axis direction. When the incision was made along the edge of the irradiation area, the energy of the peeling film was used as the irradiation energy (peeling energy) required for peeling, and the evaluation was performed using the following criteria. Good (A): The peeling energy is 230 mJ/cm 2 or less. Good (B): Irradiation energy exceeds 230 mJ/cm 2 , 260 mJ/cm 2 or less. Pass (C): Irradiation energy exceeds 260 mJ/cm 2 , 300 mJ/cm 2 or less. Bad (D): The irradiation energy exceeds 300 mJ/cm 2 .

(13)導電性組成物的導電性評價 利用下述方法,使用預先準備的導電性組成物及絕緣性組成物來進行積層體的製作,繼而,進行使用該積層體的導電性評價。(13) Conductivity evaluation of conductive composition The following method was used to prepare a laminate using the conductive composition and insulating composition prepared in advance, and then the conductivity evaluation using the laminate was performed.

(製造例1:導電性組成物的製作) 於製造例1中,製備導電性組成物(AE-1)。詳細而言,針對將80 g的導電性粒子(A-1)、4.06 g的界面活性劑(「迪斯帕畢克(DISPERBYK)」(註冊商標)21116:迪愛生(DIC)公司製造)、98.07 g的丙二醇單甲醚乙酸酯(Propylene Glycol Monomethyl Ether Acetate,PGMEA)、98.07 g的二丙二醇甲醚(Dipropylene Glycol Methyl Ether,DPM)混合而成者,利用均質機以1200 rpm實施30分鐘的處理。進而,使用高壓濕式無介質微粒化裝置納諾瑪紮(nanomizer)(納諾瑪紮(nanomizer)公司製造)來分散混合物而獲得銀含量為40質量%的銀分散液。(Production example 1: Production of conductive composition) In Production Example 1, a conductive composition (AE-1) was prepared. Specifically, 80 g of conductive particles (A-1), 4.06 g of surfactant ("DISPERBYK" (registered trademark) 21116: manufactured by DIC Corporation), 98.07 g of Propylene Glycol Monomethyl Ether Acetate (PGMEA) and 98.07 g of Dipropylene Glycol Methyl Ether (DPM) are mixed, and the homogenizer is used for 30 minutes at 1200 rpm. deal with. Furthermore, the mixture was dispersed using a high-pressure wet type non-medium micronization device nanomizer (manufactured by Nanomizer) to obtain a silver dispersion liquid with a silver content of 40% by mass.

於將20 g的作為有機化合物的鹼可溶性樹脂(AR)、0.6 g的作為金屬螯合化合物的乙醯乙酸乙酯二異丙酸鋁(ALCH:川研精細化學(Kawaken Fine Chemical)公司製造)、2.4 g的光聚合起始劑(NCI-831:艾迪科(ADEKA)公司製造)、12.0 g的PE-3A混合而成者中,添加132.6 g的PGMEA、52.6 g的DPM並進行攪拌,藉此獲得導電性組成物用的有機I液。將所述銀分散液與有機I液以72.6/27.4的質量比混合而獲得導電性組成物(AE-1)。For 20 g of alkali-soluble resin (AR) as an organic compound, 0.6 g of ethyl acetate aluminum diisopropylate as a metal chelate compound (ALCH: manufactured by Kawaken Fine Chemical Co., Ltd.) , 2.4 g of photopolymerization initiator (NCI-831: manufactured by ADEKA) and 12.0 g of PE-3A are mixed, and 132.6 g of PGMEA and 52.6 g of DPM are added and stirred, Thereby, the organic liquid I for the conductive composition is obtained. The silver dispersion liquid and the organic liquid I were mixed at a mass ratio of 72.6/27.4 to obtain a conductive composition (AE-1).

(製造例2:導電性組成物的製作) 於有機I液中進而添加0.24 g的作為受阻酚系抗氧化劑的易璐諾斯(Irganox)1010(日本巴斯夫(BASF Japan)公司製造),除此以外,與製造例1同樣地獲得導電性組成物(AE-2)。(Production example 2: Production of conductive composition) 0.24 g of Irganox 1010 (manufactured by BASF Japan) as a hindered phenol-based antioxidant was further added to the organic liquid I, and a conductive composition was obtained in the same manner as in Manufacturing Example 1, except that物(AE-2).

(製造例3:導電性組成物的製作) 於有機I液中進而添加0.24 g的作為受阻胺系抗氧化劑的艾迪科斯塔波(Adekastab)LA-87(艾迪科(ADEKA)公司製造),除此以外,與製造例1同樣地獲得導電性組成物(AE-3)。(Production example 3: Production of conductive composition) To the organic liquid I was further added 0.24 g of Adekastab LA-87 (manufactured by ADEKA) as a hindered amine-based antioxidant, and it was obtained in the same manner as in Production Example 1 except that Conductive composition (AE-3).

(製造例4:導電性組成物的製作) 於有機I液中進而添加0.24 g的作為受阻酚系抗氧化劑的艾迪科斯塔波(Adekastab)AO-20(艾迪科(ADEKA)公司製造),除此以外,與製造例1同樣地獲得導電性組成物(AE-4)。(Production Example 4: Production of conductive composition) To the organic liquid I was further added 0.24 g of Adekastab AO-20 (manufactured by ADEKA) as a hindered phenol-based antioxidant, and the obtained product was obtained in the same manner as in Manufacturing Example 1 except that Conductive composition (AE-4).

(製造例5:絕緣性組成物的製作) 於製造例5中,製備絕緣性組成物(OA-1)。詳細而言,於潔淨瓶中添加50.0 g的卡多系樹脂(V-259ME:新日鐵住友化學公司製造)、18.0 g的交聯性單體(TAIC:日本化成公司製造)、10.0 g的交聯性單體(M-315:東亞合成公司製造)、20.0 g的環氧化合物(PG-100:大阪氣體化學(Osaka Gas Chemical)公司製造)、0.2 g的光聚合起始劑(OXE-01:巴斯夫(BASF)公司製造)並攪拌1小時,從而獲得絕緣性組成物(OA-1)。(Production Example 5: Production of insulating composition) In Production Example 5, an insulating composition (OA-1) was prepared. Specifically, 50.0 g of Cardo resin (V-259ME: manufactured by Nippon Steel and Sumitomo Chemical Co., Ltd.), 18.0 g of crosslinkable monomer (TAIC: manufactured by Nippon Kasei Co., Ltd.), and 10.0 g of Crosslinkable monomer (M-315: manufactured by Toagosei Co., Ltd.), 20.0 g epoxy compound (PG-100: manufactured by Osaka Gas Chemical Co., Ltd.), 0.2 g photopolymerization initiator (OXE- 01: manufactured by BASF Corporation) and stirred for 1 hour to obtain an insulating composition (OA-1).

(製造例6:絕緣性組成物的製作) 除進而添加0.2 g的作為受阻酚系抗氧化劑的易璐諾斯(Irganox)1010(日本巴斯夫(BASF Japan)公司製造)以外,與製造例5同樣地獲得絕緣性組成物(OA-2)。(Production Example 6: Production of insulating composition) Except for further adding 0.2 g of Irganox 1010 (manufactured by BASF Japan) as a hindered phenol-based antioxidant, an insulating composition (OA-2) was obtained in the same manner as in Production Example 5.

(製造例7:絕緣性組成物的製作) 除進而添加0.2 g的作為受阻胺系抗氧化劑的艾迪科斯塔波(Adekastab)LA-87(艾迪科(ADEKA)公司製造)以外,與製造例5同樣地獲得絕緣性組成物(OA-3)。(Production Example 7: Production of insulating composition) Except for further adding 0.2 g of Adekastab LA-87 (manufactured by ADEKA) as a hindered amine-based antioxidant, an insulating composition (OA- 3).

(製造例8:絕緣性組成物的製作) 除進而添加0.2 g的作為受阻酚系抗氧化劑的艾迪科斯塔波(Adekastab)AO-20(艾迪科(ADEKA)公司製造)以外,與製造例5同樣地獲得絕緣性組成物(OA-4)。(Production Example 8: Production of insulating composition) Except for further adding 0.2 g of Adekastab AO-20 (manufactured by ADEKA) as a hindered phenol-based antioxidant, an insulating composition (OA- 4).

(導電性評價) 步驟1:絕緣層的形成 於(2)所製成的聚醯亞胺樹脂膜(玻璃基板上)上,使用旋塗機將製造例5~製造例8中所製成的絕緣性組成物(OA-1~OA-4)以1000 rpm旋轉塗佈5秒,然後使用加熱板於100℃下預烘烤2分鐘,製作預烘烤膜。使用平行光遮罩對準器,將超高壓水銀燈作為光源並介隔所期望的遮罩對預烘烤膜進行曝光。然後,使用自動顯影裝置,利用0.045質量%氫氧化鉀水溶液噴淋顯影60秒,繼而,利用水淋洗30秒並進行圖案加工。針對經圖案加工的基板,使用烘箱於空氣中以230℃固化60分鐘,形成厚度1.0 μm的絕緣層,從而獲得積層基板。(Evaluation of conductivity) Step 1: Formation of insulating layer On the polyimide resin film (on a glass substrate) produced in (2), the insulating composition (OA-1 to OA-4) produced in Production Example 5 to Production Example 8 was applied using a spin coater. ) Spin coating at 1000 rpm for 5 seconds, and then use a hot plate to pre-bake at 100°C for 2 minutes to make a pre-baked film. Using a parallel light mask aligner, use an ultra-high pressure mercury lamp as a light source and expose the prebaked film through a desired mask. Then, using an automatic developing device, it was spray-developed with a 0.045% by mass potassium hydroxide aqueous solution for 60 seconds, and then rinsed with water for 30 seconds to perform pattern processing. The patterned substrate was cured in an oven at 230°C for 60 minutes in air to form an insulating layer with a thickness of 1.0 μm, thereby obtaining a multilayer substrate.

步驟2:配線層的形成 使用旋塗機(三笠(Mikasa)(股)製造的「1H-360S(商品名)」),於300 rpm下為10秒、500 rpm下為2秒的條件下將製造例1~製造例4中所製成的導電性組成物(AE-1~AE-4)旋轉塗佈於步驟1中所製成的積層基板上,使用加熱板(大日本網屏製造(股)製造的「SCW-636(商品名)」)將基板於100℃下預烘烤2分鐘,獲得膜厚0.9 μm的預烘烤膜。使用平行光遮罩對準器(佳能(canon)(股)製造的「PLA-501F(商品名)」),將超高壓水銀燈作為光源並介隔所期望的遮罩對預烘烤膜進行曝光。然後,使用自動顯影裝置(瀧澤產業(股)製造的「AD-2000(商品名)」),利用0.045質量%氫氧化鉀水溶液噴淋顯影60秒,繼而,利用水淋洗30秒並進行圖案加工。然後,使用烘箱(「IHPS-222」;愛斯佩克(Espec)(股)製造),於空氣中以230℃實施30分鐘後烘烤,藉此獲得體積電阻率評價圖案。Step 2: Formation of wiring layer Using a spin coater (Mikasa (Mikasa) "1H-360S (trade name)"), under the conditions of 300 rpm for 10 seconds, 500 rpm for 2 seconds, manufacture example 1 to manufacture example 4 The conductive composition (AE-1 to AE-4) prepared in step 1 was spin-coated on the multilayer substrate prepared in step 1, using a hot plate (Dainippon Screen Manufacturing Co., Ltd. "SCW- 636 (trade name)”) The substrate is pre-baked at 100°C for 2 minutes to obtain a pre-baked film with a film thickness of 0.9 μm. Use a parallel light mask aligner ("PLA-501F (trade name)" manufactured by Canon (Canon) Co., Ltd.), use an ultra-high pressure mercury lamp as a light source, and expose the prebaked film through the desired mask . Then, using an automatic developing device ("AD-2000 (trade name)" manufactured by Takizawa Sangyo Co., Ltd.), it was spray-developed with a 0.045 mass% potassium hydroxide aqueous solution for 60 seconds, and then rinsed with water for 30 seconds and patterned Processing. Then, using an oven ("IHPS-222"; manufactured by Espec (stock)), post-baking was performed in the air at 230°C for 30 minutes, thereby obtaining a volume resistivity evaluation pattern.

針對所獲得的體積電阻率評價圖案,藉由表面電阻測定機(「勞萊斯塔(LORESTA)」(註冊商標)-FP;三菱油化(股)製造)來測定表面電阻值ρs(Ω/□),藉由表面粗糙度形狀測定機(「薩福考姆(SURFCOM)」(註冊商標)1400D;東京精密(股)製造)來測定膜厚t(cm),將兩值相乘,藉此算出體積電阻率(μΩ·cm),依據以下的評價基準來進行導電性評價。 優良(A):未滿60 μΩ·cm 良好(B):60 μΩ·cm以上、未滿80 μΩ·cm 合格(C):80 μΩ·cm以上、未滿100 μΩ·cm 不良(D):100 μΩ·cm以上。For the obtained volume resistivity evaluation pattern, the surface resistance value ρs (Ω/) was measured by a surface resistance measuring machine ("LORESTA" (registered trademark)-FP; manufactured by Mitsubishi Petrochemical Co., Ltd.) □), measure the film thickness t (cm) with a surface roughness shape measuring machine ("SURFCOM" (registered trademark) 1400D; manufactured by Tokyo Precision Co., Ltd.), multiply the two values, and borrow The volume resistivity (μΩ·cm) was calculated, and the conductivity was evaluated based on the following evaluation criteria. Excellent (A): Less than 60 μΩ·cm Good (B): 60 μΩ·cm or more but less than 80 μΩ·cm Pass (C): 80 μΩ·cm or more, less than 100 μΩ·cm Bad (D): 100 μΩ·cm or more.

(14)耐彎折性評價 將與所述(13)中所製作的基板相同的基板切成1 cm寬,使用直徑為1 cm、5 mm、1 mm、0.8 mm的金屬棒來進行180度彎折試驗。試驗次數設為1次,使用光學顯微鏡來觀察有無龜裂產生,依據以下的評價基準來評價耐彎曲性。 優秀(S):於直徑0.8 mm下無龜裂產生 優良(A):於直徑1 mm下無龜裂產生 良好(B):於直徑5 mm下無龜裂產生,於直徑1 mm下有龜裂產生 合格(C):於直徑1 cm下無龜裂產生,於直徑5 mm下有龜裂產生 不合格(D):於直徑1 cm下有龜裂產生。(14) Evaluation of bending resistance The same substrate as the substrate produced in (13) was cut into a width of 1 cm, and metal rods with diameters of 1 cm, 5 mm, 1 mm, and 0.8 mm were used to perform a 180-degree bending test. The number of tests was set to 1, and the occurrence of cracks was observed using an optical microscope, and the bending resistance was evaluated based on the following evaluation criteria. Excellent (S): no cracks under 0.8 mm in diameter Excellent (A): no cracks under 1 mm in diameter Good (B): No cracks under 5 mm in diameter, cracks under 1 mm in diameter Pass (C): No cracks under 1 cm in diameter, and cracks under 5 mm in diameter Unqualified (D): Cracks occur under 1 cm in diameter.

合成例1 於300 mL四口燒瓶中設置溫度計、帶攪拌翼的攪拌棒。其次,於乾燥氮氣流下投入110 g的GBL,升溫至30℃。升溫後,一邊攪拌一邊投入7.00 g(28.2 mmol)的作為二胺化合物的3,3'-DDS、8.87 g(20.5 mmol)的BAPS-m、0.82 g(2.56 mmol)的TFMB,利用20 g的GBL進行清洗。確認到二胺化合物溶解後,投入16.2 g(52.3 mmol)的作為酸二酐的ODPA,利用20 g的GBL進行清洗。然後,升溫至50℃後,反應4小時,冷卻後,加入0.02 g的界面活性劑(迪愛生(DIC)(股)製造的「F-477」)並攪拌1小時。利用聚乙烯製的過濾器(過濾器孔徑0.2 μm)對所獲得的溶液進行過濾,獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為85000。Synthesis example 1 Set a thermometer and a stirring rod with stirring wings in a 300 mL four-necked flask. Next, 110 g of GBL was put in under a stream of dry nitrogen, and the temperature was raised to 30°C. After the temperature was raised, 7.00 g (28.2 mmol) of 3,3'-DDS as a diamine compound, 8.87 g (20.5 mmol) of BAPS-m, 0.82 g (2.56 mmol) of TFMB were added while stirring, and 20 g of GBL is cleaned. After confirming that the diamine compound was dissolved, 16.2 g (52.3 mmol) of ODPA as an acid dianhydride was put in, and washed with 20 g of GBL. Then, the temperature was raised to 50°C, and the reaction was carried out for 4 hours. After cooling, 0.02 g of a surfactant (“F-477” manufactured by DIC Co., Ltd.) was added and stirred for 1 hour. The obtained solution was filtered with a polyethylene filter (filter pore size 0.2 μm) to obtain a polyimide precursor resin composition. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 85,000.

合成例2 將3,3'-DDS變更為5.01 g(20.2 mmol)、將BAPS-m變更為8.72 g(20.2 mmol)、將TFMB變更為3.23 g(10.1 mmol)、將ODPA變更為16.0 g(51.5 mmol),除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為94000。Synthesis Example 2 Change 3,3'-DDS to 5.01 g (20.2 mmol), BAPS-m to 8.72 g (20.2 mmol), TFMB to 3.23 g (10.1 mmol), and ODPA to 16.0 g (51.5 mmol) Except for this, a polyimide precursor resin composition was obtained in the same manner as in Synthesis Example 1. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 94,000.

合成例3 將3,3'-DDS變更為5.08 g(20.5 mmol)、代替BAPS-m而變更為8.39 g(20.5 mmol)的HFBAPP、將TFMB變更為3.27 g(10.2 mmol)、將ODPA變更為16.2 g(52.2 mmol),除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為97000。Synthesis Example 3 Change 3,3'-DDS to 5.08 g (20.5 mmol), replace BAPS-m and change to 8.39 g (20.5 mmol) HFBAPP, change TFMB to 3.27 g (10.2 mmol), and change ODPA to 16.2 g ( 52.2 mmol), except for this, in the same manner as in Synthesis Example 1, a polyimide precursor resin composition was obtained. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 97,000.

合成例4 將3,3'-DDS變更為4.87 g(19.6 mmol)、將BAPS-m變更為8.70 g(20.1 mmol)、將TFMB變更為3.22 g(10.1 mmol)、將ODPA變更為15.9 g(51.4 mmol),進而,於與加入3,3'-DDS、BAPS-m、TFMB的時間點相同的時間點進而加入0.201 g(0.50 mmol)的TAPOB,除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為125000。Synthesis Example 4 Changed 3,3'-DDS to 4.87 g (19.6 mmol), BAPS-m to 8.70 g (20.1 mmol), TFMB to 3.22 g (10.1 mmol), and ODPA to 15.9 g (51.4 mmol) Furthermore, 0.201 g (0.50 mmol) of TAPOB was further added at the same time point as the time when 3,3'-DDS, BAPS-m, and TFMB were added, and except for that, the same procedure as in Synthesis Example 1 was carried out to obtain polyamide Amine precursor resin composition. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 125,000.

合成例5 將3,3'-DDS變更為4.76 g(19.2 mmol)、將BAPS-m變更為8.29 g(19.2 mmol)、將TFMB變更為3.07 g(9.59 mmol)、將ODPA變更為11.4 g(36.7 mmol),進而,於與ODPA相同的時間點投入5.43 g(12.2 mmol)的6FDA,除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為92000。Synthesis Example 5 Changed 3,3'-DDS to 4.76 g (19.2 mmol), BAPS-m to 8.29 g (19.2 mmol), TFMB to 3.07 g (9.59 mmol), and ODPA to 11.4 g (36.7 mmol) Furthermore, at the same time point as ODPA, except that 5.43 g (12.2 mmol) of 6FDA was injected, a polyimide precursor resin composition was obtained in the same manner as in Synthesis Example 1. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 92,000.

合成例6 將3,3'-DDS變更為5.20 g(20.9 mmol)、將BAPS-m變更為9.04 g(20.9 mmol)、將TFMB變更為3.35 g(10.5 mmol)、將ODPA變更為12.4 g(40.1 mmol),進而,於與ODPA相同的時間點投入2.91 g(13.4 mmol)的PMDA,除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為101000。Synthesis Example 6 Changed 3,3'-DDS to 5.20 g (20.9 mmol), BAPS-m to 9.04 g (20.9 mmol), TFMB to 3.35 g (10.5 mmol), and ODPA to 12.4 g (40.1 mmol) In addition, 2.91 g (13.4 mmol) of PMDA was added at the same time as ODPA, and except for that, a polyimide precursor resin composition was obtained in the same manner as in Synthesis Example 1. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 101,000.

合成例7 將3,3'-DDS變更為2.45 g(9.87 mmol)、將BAPS-m變更為8.53 g(19.7 mmol)、將TFMB變更為6.32 g(19.7 mmol)、將ODPA變更為15.6 g(50.4 mmol),除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為98000。Synthesis Example 7 Changed 3,3'-DDS to 2.45 g (9.87 mmol), BAPS-m to 8.53 g (19.7 mmol), TFMB to 6.32 g (19.7 mmol), and ODPA to 15.6 g (50.4 mmol) Except for this, a polyimide precursor resin composition was obtained in the same manner as in Synthesis Example 1. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 98,000.

合成例8 將3,3'-DDS變更為2.54 g(10.2 mmol)、將BAPS-m變更為4.41 g(10.2 mmol)、將TFMB變更為9.81 g(30.6 mmol)、將ODPA變更為16.2 g(52.1 mmol),除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為102000。Synthesis Example 8 Changed 3,3'-DDS to 2.54 g (10.2 mmol), BAPS-m to 4.41 g (10.2 mmol), TFMB to 9.81 g (30.6 mmol), and ODPA to 16.2 g (52.1 mmol) Except for this, a polyimide precursor resin composition was obtained in the same manner as in Synthesis Example 1. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 102,000.

合成例9 除將所使用的溶媒自GBL變更為NMP以外,與合成例4同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為120000。Synthesis Example 9 A polyimide precursor resin composition was obtained in the same manner as in Synthesis Example 4 except that the solvent used was changed from GBL to NMP. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 120,000.

合成例10 將3,3'-DDS變更為2.50 g(10.1 mmol)、將BAPS-m變更為4.35 g(10.1 mmol)、代替TFMB而變更為10.15 g(30.2 mmol)的6FODA、將ODPA變更為15.9 g(51.3 mmol),除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為107000。Synthesis Example 10 3,3'-DDS was changed to 2.50 g (10.1 mmol), BAPS-m was changed to 4.35 g (10.1 mmol), TFMB was changed to 10.15 g (30.2 mmol) of 6FODA, and ODPA was changed to 15.9 g ( 51.3 mmol), except for this, in the same manner as in Synthesis Example 1, a polyimide precursor resin composition was obtained. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 107,000.

合成例11 將3,3'-DDS變更為1.28 g(5.14 mmol)、將BAPS-m變更為2.22 g(5.14 mmol)、將TFMB變更為13.2 g(41.1 mmol)、將ODPA變更為16.3 g(52.4 mmol),除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為107000。Synthesis Example 11 Change 3,3'-DDS to 1.28 g (5.14 mmol), BAPS-m to 2.22 g (5.14 mmol), TFMB to 13.2 g (41.1 mmol), and ODPA to 16.3 g (52.4 mmol) Except for this, a polyimide precursor resin composition was obtained in the same manner as in Synthesis Example 1. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 107,000.

合成例12 將3,3'-DDS變更為0.64 g(2.58 mmol)、將BAPS-m變更為1.11 g(2.58 mmol)、將TFMB變更為14.9 g(46.4 mmol)、將ODPA變更為16.3 g(52.6 mmol),除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為110000。Synthesis Example 12 Changed 3,3'-DDS to 0.64 g (2.58 mmol), BAPS-m to 1.11 g (2.58 mmol), TFMB to 14.9 g (46.4 mmol), and ODPA to 16.3 g (52.6 mmol) Except for this, a polyimide precursor resin composition was obtained in the same manner as in Synthesis Example 1. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 110,000.

合成例13 將3,3'-DDS變更為2.55 g(10.3 mmol)、將BAPS-m變更為4.44 g(10.3 mmol)、將TFMB變更為9.88 g(30.8 mmol)、將ODPA變更為12.2 g(39.3 mmol),進而,於與ODPA相同的時間點投入3.86 g(13.1 mmol)的BPDA,除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為116000。Synthesis Example 13 Changed 3,3'-DDS to 2.55 g (10.3 mmol), BAPS-m to 4.44 g (10.3 mmol), TFMB to 9.88 g (30.8 mmol), and ODPA to 12.2 g (39.3 mmol) Furthermore, 3.86 g (13.1 mmol) of BPDA was added at the same time point as ODPA, and except that it was the same as Synthesis Example 1, a polyimide precursor resin composition was obtained. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 116,000.

合成例14 將3,3'-DDS變更為6.22 g(25.1 mmol)、將BAPS-m變更為10.8 g(25.1 mmol)、將ODPA變更為15.9 g(51.2 mmol),並且不使用TFMB,除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為64000。Synthesis Example 14 Change 3,3'-DDS to 6.22 g (25.1 mmol), change BAPS-m to 10.8 g (25.1 mmol), change ODPA to 15.9 g (51.2 mmol), and do not use TFMB. In addition, with In Synthesis Example 1, a polyimide precursor resin composition was obtained in the same manner. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 64,000.

合成例15 除將3,3'-DDS變更為4,4'-DDS以外,與合成例4同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為81000。Synthesis Example 15 Except having changed 3,3'-DDS to 4,4'-DDS, it carried out similarly to the synthesis example 4, and obtained the polyimide precursor resin composition. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 81,000.

合成例16 將3,3'-DDS變更為5.38 g(21.7 mmol)、將TFMB變更為10.4 g(32.5 mmol)、將ODPA變更為17.1 g(55.3 mmol),並且不使用BAPS-m,除此以外,與合成例1同樣地獲得聚醯亞胺前驅物樹脂組成物。所獲得的組成物中的聚醯亞胺前驅物的重量平均分子量(Mw)為90000。Synthesis Example 16 3,3'-DDS was changed to 5.38 g (21.7 mmol), TFMB was changed to 10.4 g (32.5 mmol), ODPA was changed to 17.1 g (55.3 mmol), and BAPS-m was not used. In Synthesis Example 1, a polyimide precursor resin composition was obtained in the same manner. The weight average molecular weight (Mw) of the polyimide precursor in the obtained composition was 90,000.

實施例1~實施例21及比較例1~比較例4 作為聚醯亞胺前驅物樹脂組成物,使用表1中記載的組成物,如表1中記載般設定固化條件,利用所述(2)中記載的方法來製作聚醯亞胺樹脂膜。將所獲得的聚醯亞胺樹脂膜的試驗結果示於以下的表2中。Example 1 to Example 21 and Comparative Example 1 to Comparative Example 4 As the polyimide precursor resin composition, the composition described in Table 1 was used, the curing conditions were set as described in Table 1, and the polyimide resin film was produced by the method described in (2) above. The test results of the obtained polyimide resin film are shown in Table 2 below.

[表1] 酸二酐(mol%) 胺(mol%) 莫耳比率 酸二酐/胺 溶劑 Mw 固化條件   ODPA 6FDA PMDA BPDA 3,3'-DDS BAPS-m TFMB 6FODA HFBAPP 4,4'-DDS TAPOB 溫度 時間 氧濃度 實施例1 合成例1 100 55 40 5 100/98.0 GBL 85000 250℃ 60 min 21%   實施例2 合成例2 100 40 40 20 100/98.0 GBL 94000 250℃ 60 min 21%   實施例3 合成例3 100 40 20 40 100/98.0 GBL 97000 250℃ 60 min 21%   實施例4 合成例4 100 39 40 20 1 100/98.0 GBL 125000 250℃ 60 min 21%   實施例5 合成例5 75 25 40 40 20 100/98.0 GBL 92000 250℃ 60 min 21%   實施例6 合成例5 75 25 40 40 20 100/98.0 GBL 92000 250℃ 60 min 21%   實施例7 合成例6 75 25 40 40 20 100/98.0 GBL 101000 250℃ 60 min 21%   實施例8 合成例7 100 20 40 40 100/98.0 GBL 98000 250℃ 60 min 21%   實施例9 合成例8 100 20 20 60 100/98.0 GBL 102000 250℃ 60 min 21%   實施例10 合成例8 100 20 20 60 100/98.0 GBL 102000 250℃ 60 min 21%   實施例11 合成例8 100 20 20 60 100/98.0 GBL 102000 250℃ 60 min 21%   實施例12 合成例8 100 20 20 60 100/98.0 GBL 102000 250℃ 60 min 21%   實施例13 合成例8 100 20 20 60 100/98.0 GBL 102000 250℃ 60 min 21%   比較例1 合成例8 100 20 20 60 100/98.0 GBL 102000 230℃ 30 min 21%   實施例14 合成例8 100 20 20 60 100/98.0 GBL 102000 300℃ 60 min 21%   實施例15 合成例8 100 20 20 60 100/98.0 GBL 102000 250℃ 60 min <100 ppm   實施例16 合成例9 100 20 20 60 100/98.0 NMP 120000 250℃ 60 min 21%   實施例17 合成例10 100 20 20 60 100/98.0 GBL 107000 250℃ 60 min 21%   實施例18 合成例10 100 20 20 60 100/98.0 GBL 107000 250℃ 60 min 21%   實施例19 合成例11 100 10 10 80 100/98.0 GBL 107000 250℃ 60 min 21%   實施例20 合成例12 100 5 5 90 100/98.0 GBL 110000 250℃ 60 min 21%   實施例21 合成例13 75 25 20 20 60 100/98.0 GBL 116000 250℃ 60 min 21%   比較例2 合成例14 100 50 50 100/98.0 GBL 64000 250℃ 60 min 21%   比較例3 合成例15 100 20 60 20 100/98.0 GBL 81000 250℃ 60 min 21%   比較例4 合成例16 100 40 60 100/98 GBL 90000 250℃ 60 min 21%   [Table 1] Acid dianhydride (mol%) Amine (mol%) Mohr ratio acid dianhydride/amine Solvent Mw Curing conditions ODPA 6FDA PMDA BPDA 3,3'-DDS BAPS-m TFMB 6FODA HFBAPP 4,4'-DDS TAPOB temperature time Oxygen concentration Example 1 Synthesis example 1 100 55 40 5 100/98.0 GBL 85000 250°C 60 min twenty one% Example 2 Synthesis Example 2 100 40 40 20 100/98.0 GBL 94000 250°C 60 min twenty one% Example 3 Synthesis Example 3 100 40 20 40 100/98.0 GBL 97000 250°C 60 min twenty one% Example 4 Synthesis Example 4 100 39 40 20 1 100/98.0 GBL 125000 250°C 60 min twenty one% Example 5 Synthesis Example 5 75 25 40 40 20 100/98.0 GBL 92000 250°C 60 min twenty one% Example 6 Synthesis Example 5 75 25 40 40 20 100/98.0 GBL 92000 250°C 60 min twenty one% Example 7 Synthesis Example 6 75 25 40 40 20 100/98.0 GBL 101000 250°C 60 min twenty one% Example 8 Synthesis Example 7 100 20 40 40 100/98.0 GBL 98000 250°C 60 min twenty one% Example 9 Synthesis Example 8 100 20 20 60 100/98.0 GBL 102000 250°C 60 min twenty one% Example 10 Synthesis Example 8 100 20 20 60 100/98.0 GBL 102000 250°C 60 min twenty one% Example 11 Synthesis Example 8 100 20 20 60 100/98.0 GBL 102000 250°C 60 min twenty one% Example 12 Synthesis Example 8 100 20 20 60 100/98.0 GBL 102000 250°C 60 min twenty one% Example 13 Synthesis Example 8 100 20 20 60 100/98.0 GBL 102000 250°C 60 min twenty one% Comparative example 1 Synthesis Example 8 100 20 20 60 100/98.0 GBL 102000 230°C 30 min twenty one% Example 14 Synthesis Example 8 100 20 20 60 100/98.0 GBL 102000 300°C 60 min twenty one% Example 15 Synthesis Example 8 100 20 20 60 100/98.0 GBL 102000 250°C 60 min <100 ppm Example 16 Synthesis Example 9 100 20 20 60 100/98.0 NMP 120000 250°C 60 min twenty one% Example 17 Synthesis Example 10 100 20 20 60 100/98.0 GBL 107000 250°C 60 min twenty one% Example 18 Synthesis Example 10 100 20 20 60 100/98.0 GBL 107000 250°C 60 min twenty one% Example 19 Synthesis Example 11 100 10 10 80 100/98.0 GBL 107000 250°C 60 min twenty one% Example 20 Synthesis Example 12 100 5 5 90 100/98.0 GBL 110000 250°C 60 min twenty one% Example 21 Synthesis Example 13 75 25 20 20 60 100/98.0 GBL 116000 250°C 60 min twenty one% Comparative example 2 Synthesis Example 14 100 50 50 100/98.0 GBL 64000 250°C 60 min twenty one% Comparative example 3 Synthesis Example 15 100 20 60 20 100/98.0 GBL 81000 250°C 60 min twenty one% Comparative example 4 Synthesis Example 16 100 40 60 100/98 GBL 90000 250°C 60 min twenty one%

[表2] 聚醯亞胺樹脂膜 觸控面板 IR峰值強度比 Z/Y GBL含量 ppm NMP含量 ppm 玻璃轉移溫度 ℃ 翹曲mm 黃色度 面內/面外雙折射 MIT試驗 90°剝離強度 雷射剝離性 導電性組成物 絕緣性組成物 導電性 彎折試驗 固化後 追加加熱後 實施例1 0.40 140 - 230 <1 0.9 0.9 0.0014 8000 A A AE-1 OA-1 A B 實施例2 0.31 130 - 232 <1 1.0 1.0 0.0016 >10000 A A AE-1 OA-1 A A 實施例3 0.26 125 - 232 <1 1.2 1.2 0.0015 >10000 A A AE-1 OA-1 A A 實施例4 0.30 130 - 234 <1 1.0 1.0 0.0016 >10000 A A AE-1 OA-1 A A 實施例5 0.31 130 - 237 <1 1.2 1.4 0.0016 >10000 A A AE-1 OA-1 A A 實施例6 0.31 130 - 237 <1 1.2 1.4 0.0016 >10000 A A AE-2 OA-2 A S 實施例7 0.32 130 - 248 3 2.9 3.4 0.0028 >10000 A A AE-1 OA-1 A A 實施例8 0.24 115 - 234 <1 1.2 1.2 0.002 >10000 A A AE-1 OA-1 A A 實施例9 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-1 OA-1 A A 實施例10 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-2 OA-2 A S 實施例11 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-3 OA-3 A S 實施例12 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-2 OA-3 A S 實施例13 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-4 OA-4 A S 比較例1 0.04 1500 - 224 <1 1.2 1.2 0.002 4000 A A AE-1 OA-1 C C 實施例14 0.22 <1 - 238 <1 1.9 1.9 0.0025 >10000 C A AE-1 OA-1 A B 實施例15 0.19 110 - 237 <1 1.3 1.3 0.0022 >10000 A A AE-1 OA-1 A B 實施例16 0.15 - 280 237 <1 2.1 2.1 0.0022 >10000 B A AE-1 OA-1 B A 實施例17 0.22 110 - 234 <1 1.4 1.4 0.0018 >10000 A A AE-1 OA-1 A A 實施例18 0.22 110 - 234 <1 1.4 1.4 0.0018 >10000 A A AE-2 OA-2 A S 實施例19 0.19 85 - 238 <1 1.4 1.4 0.0026 >10000 A B AE-1 OA-1 A A 實施例20 0.18 75 - 241 <1 1.4 1.4 0.003 >10000 A C AE-1 OA-1 A B 實施例21 0.22 95 - 244 2 2.2 2.3 0.0051 >10000 A A AE-1 OA-1 A A 比較例2 0.42 155 - 228 <1 0.8 0.8 0.0014 2800 A - AE-1 OA-1 A C 比較例3 0.22 120 - 249 3 1.5 1.5 0.0025 5000 A A AE-1 OA-1 A C 比較例4 0.24 120 - 238 <1 1.2 1.2 0.0023 >10000 A A AE-1 OA-1 - - [Table 2] Polyimide resin film Touch panel IR peak intensity ratio Z/Y GBL content ppm NMP content ppm Glass transition temperature ℃ Warpage mm Yellowness In-plane/Out-of-plane birefringence MIT test 90° peel strength Laser peelability Conductive composition Insulating composition Conductivity Bending test After curing After additional heating Example 1 0.40 140 - 230 <1 0.9 0.9 0.0014 8000 A A AE-1 OA-1 A B Example 2 0.31 130 - 232 <1 1.0 1.0 0.0016 >10000 A A AE-1 OA-1 A A Example 3 0.26 125 - 232 <1 1.2 1.2 0.0015 >10000 A A AE-1 OA-1 A A Example 4 0.30 130 - 234 <1 1.0 1.0 0.0016 >10000 A A AE-1 OA-1 A A Example 5 0.31 130 - 237 <1 1.2 1.4 0.0016 >10000 A A AE-1 OA-1 A A Example 6 0.31 130 - 237 <1 1.2 1.4 0.0016 >10000 A A AE-2 OA-2 A S Example 7 0.32 130 - 248 3 2.9 3.4 0.0028 >10000 A A AE-1 OA-1 A A Example 8 0.24 115 - 234 <1 1.2 1.2 0.002 >10000 A A AE-1 OA-1 A A Example 9 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-1 OA-1 A A Example 10 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-2 OA-2 A S Example 11 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-3 OA-3 A S Example 12 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-2 OA-3 A S Example 13 0.21 100 - 236 <1 1.3 1.3 0.0022 >10000 A A AE-4 OA-4 A S Comparative example 1 0.04 1500 - 224 <1 1.2 1.2 0.002 4000 A A AE-1 OA-1 C C Example 14 0.22 <1 - 238 <1 1.9 1.9 0.0025 >10000 C A AE-1 OA-1 A B Example 15 0.19 110 - 237 <1 1.3 1.3 0.0022 >10000 A A AE-1 OA-1 A B Example 16 0.15 - 280 237 <1 2.1 2.1 0.0022 >10000 B A AE-1 OA-1 B A Example 17 0.22 110 - 234 <1 1.4 1.4 0.0018 >10000 A A AE-1 OA-1 A A Example 18 0.22 110 - 234 <1 1.4 1.4 0.0018 >10000 A A AE-2 OA-2 A S Example 19 0.19 85 - 238 <1 1.4 1.4 0.0026 >10000 A B AE-1 OA-1 A A Example 20 0.18 75 - 241 <1 1.4 1.4 0.003 >10000 A C AE-1 OA-1 A B Example 21 0.22 95 - 244 2 2.2 2.3 0.0051 >10000 A A AE-1 OA-1 A A Comparative example 2 0.42 155 - 228 <1 0.8 0.8 0.0014 2800 A - AE-1 OA-1 A C Comparative example 3 0.22 120 - 249 3 1.5 1.5 0.0025 5000 A A AE-1 OA-1 A C Comparative example 4 0.24 120 - 238 <1 1.2 1.2 0.0023 >10000 A A AE-1 OA-1 - -

於實施例1~實施例21中,確認到具有良好的機械特性、雷射剝離性、光學特性、耐熱氧化性。另外,於聚醯亞胺樹脂膜上形成絕緣層及導電性配線作為電路的一例,對體積電阻、耐彎折性進行評價,結果確認到良好的特性。In Examples 1 to 21, good mechanical properties, laser releasability, optical properties, and thermal oxidation resistance were confirmed. In addition, an insulating layer and conductive wiring were formed on the polyimide resin film as an example of a circuit, and the volume resistance and the bending resistance were evaluated. As a result, good characteristics were confirmed.

比較例1中,由於固化未充分進行,因此認為成為分子間相互作用弱且機械特性差的結果。另外,認為大量殘留於膜中的GBL於固化步驟中作用於導電性配線而使導電性惡化。In Comparative Example 1, since curing did not proceed sufficiently, it is considered that the intermolecular interaction was weak and the mechanical properties were poor. In addition, it is considered that a large amount of GBL remaining in the film acts on the conductive wiring in the curing step to deteriorate conductivity.

於比較例2中,由於不包含式(1)所表示的結構單元,因此認為所獲得的聚醯亞胺膜的機械強度降低。於比較例3中,由於代替3,3'-DDS而使用4,4'-DDS,因此認為所獲得的聚醯亞胺樹脂膜的黃色度上升,進而機械強度降低。於比較例4中,由於不包含BAPS-m,因此認為聚醯亞胺膜的耐化學品性降低。另外,於塗佈絕緣性組成物時產生了龜裂,因此無法實施導電性及彎折試驗。In Comparative Example 2, since the structural unit represented by formula (1) is not included, it is considered that the mechanical strength of the obtained polyimide film is reduced. In Comparative Example 3, since 4,4'-DDS was used instead of 3,3'-DDS, it is considered that the yellowness of the obtained polyimide resin film increased and the mechanical strength decreased. In Comparative Example 4, since BAPS-m is not included, it is considered that the chemical resistance of the polyimide film is reduced. In addition, cracks occurred when the insulating composition was applied, so conductivity and bending tests could not be performed.

1:基線 2:存在於3400 cm-1 ~3700 cm-1 的範圍內的最大峰值強度 3:存在於1480 cm-1 ~1510 cm-1 的範圍內的最大峰值強度1: Baseline 2: Maximum peak intensity in the range of 3400 cm -1 to 3700 cm -1 3: Maximum peak intensity in the range of 1480 cm -1 to 1510 cm -1

圖1是實施例3的聚醯亞胺樹脂膜的IR光譜(2000 cm-1 ~4000 cm-1 )。 圖2是實施例3的聚醯亞胺樹脂膜的IR光譜(1480 cm-1 ~1510 cm-1 )。 圖3是比較例1的聚醯亞胺樹脂膜的IR光譜(2000 cm-1 ~4000 cm-1 )。 圖4是比較例1的聚醯亞胺樹脂膜的IR光譜(1480 cm-1 ~1510 cm-1 )。 圖5是比較例2的聚醯亞胺樹脂膜的IR光譜(2000 cm-1 ~4000 cm-1 )。 圖6是比較例2的聚醯亞胺樹脂膜的IR光譜(1480 cm-1 ~1510 cm-1 )。Fig. 1 is an IR spectrum (2000 cm -1 to 4000 cm -1 ) of the polyimide resin film of Example 3. Fig. 2 is an IR spectrum (1480 cm -1 to 1510 cm -1 ) of the polyimide resin film of Example 3. Fig. 3 is an IR spectrum (2000 cm -1 to 4000 cm -1 ) of the polyimide resin film of Comparative Example 1. Fig. 4 is an IR spectrum (1480 cm -1 to 1510 cm -1 ) of the polyimide resin film of Comparative Example 1. Fig. 5 is an IR spectrum (2000 cm -1 to 4000 cm -1 ) of the polyimide resin film of Comparative Example 2. Fig. 6 is an IR spectrum (1480 cm -1 to 1510 cm -1 ) of the polyimide resin film of Comparative Example 2.

Figure 109140573-A0101-11-0002-1
Figure 109140573-A0101-11-0002-1

1:基線 1: Baseline

2:存在於3400cm-1~3700cm-1的範圍內的最大峰值強度 2: The maximum peak intensity existing in the range of 3400cm -1 ~ 3700cm -1

Claims (14)

一種聚醯亞胺,包含式(1)所表示的聚醯亞胺結構單元A、式(2)所表示的聚醯亞胺結構單元B及式(3)所表示的聚醯亞胺結構單元C,且所述聚醯亞胺的特徵在於:於將所述聚醯亞胺製成厚度10 μm的樹脂膜時的紅外線光譜中,當將存在於1480 cm-1 ~1510 cm-1 的範圍內的最大峰值強度設為Y、將存在於3400 cm-1 ~3700 cm-1 的範圍內的最大峰值強度設為Z時,滿足下述式; 式)0.1≦Z/Y≦0.4
Figure 03_image001
(X1 表示直鍵或氧原子;X2 表示氧原子、-C(CF3 )2 -、-C(CH3 )2 -或-Si(CH3 )2 -;X3 表示直鍵、-SO2 -、-C(CH3 )2 -或-C(CF3 )2 -)。
A polyimide comprising polyimine structural unit A represented by formula (1), polyimine structural unit B represented by formula (2), and polyimine structural unit represented by formula (3) C, and the characteristic of the polyimide is that in the infrared spectrum when the polyimide is made into a resin film with a thickness of 10 μm, it will exist in the range of 1480 cm -1 to 1510 cm -1 When the maximum peak intensity within is set to Y and the maximum peak intensity existing in the range of 3400 cm -1 to 3700 cm -1 is set to Z, the following formula is satisfied; formula) 0.1≦Z/Y≦0.4
Figure 03_image001
(X 1 represents a direct bond or an oxygen atom; X 2 represents an oxygen atom, -C(CF 3 ) 2 -, -C(CH 3 ) 2 -or -Si(CH 3 ) 2 -; X 3 represents a direct bond,- SO 2 -, -C(CH 3 ) 2 -or -C(CF 3 ) 2 -).
如請求項1所述的聚醯亞胺,其中,所述聚醯亞胺結構單元A、所述聚醯亞胺結構單元B及所述聚醯亞胺結構單元C的合計量為全部聚醯亞胺結構單元的80莫耳%以上。The polyimide according to claim 1, wherein the total amount of the polyimine structural unit A, the polyimine structural unit B, and the polyimine structural unit C is all polyimide More than 80 mole% of the imine structural unit. 如請求項1或請求項2所述的聚醯亞胺,其中,所述聚醯亞胺結構單元A為下述式(4)所表示的結構單元;
Figure 03_image022
(X1 表示直鍵或氧原子)。
The polyimide according to claim 1 or 2, wherein the polyimine structural unit A is a structural unit represented by the following formula (4);
Figure 03_image022
(X 1 represents a direct bond or an oxygen atom).
如請求項1至請求項3中任一項所述的聚醯亞胺,其中,所述聚醯亞胺結構單元B為下述式(5)所表示的結構單元;
Figure 03_image024
The polyimide according to any one of claims 1 to 3, wherein the polyimine structural unit B is a structural unit represented by the following formula (5);
Figure 03_image024
.
如請求項1至請求項4中任一項所述的聚醯亞胺,其中,所述聚醯亞胺結構單元C為下述式(6)所表示的結構單元;
Figure 03_image026
The polyimide according to any one of claims 1 to 4, wherein the polyimine structural unit C is a structural unit represented by the following formula (6);
Figure 03_image026
.
一種聚醯亞胺樹脂膜,包含如請求項1至請求項5中任一項所述的聚醯亞胺。A polyimide resin film comprising the polyimide according to any one of claim 1 to claim 5. 如請求項6所述的聚醯亞胺樹脂膜,其中,玻璃轉移溫度為220℃以上、250℃以下。The polyimide resin film according to claim 6, wherein the glass transition temperature is 220°C or higher and 250°C or lower. 如請求項6或請求項7所述的聚醯亞胺樹脂膜,其中,相對於聚醯亞胺樹脂膜的重量,以1 ppm以上、1000 ppm以下的範圍含有γ-丁內酯。The polyimide resin film according to claim 6 or 7, wherein γ-butyrolactone is contained in a range of 1 ppm or more and 1000 ppm or less with respect to the weight of the polyimide resin film. 如請求項6至請求項8中任一項所述的聚醯亞胺樹脂膜,其不包含醯胺系溶劑。The polyimide resin film according to any one of claims 6 to 8, which does not contain an amide-based solvent. 一種積層體,於如請求項6至請求項9中任一項所述的聚醯亞胺樹脂膜上包括絕緣層及/或導電層。A laminated body comprising an insulating layer and/or a conductive layer on the polyimide resin film according to any one of claims 6 to 9. 一種積層體,於如請求項6至請求項9中任一項所述的聚醯亞胺樹脂膜上包括絕緣層及導電層,且所述積層體中,所述絕緣層及所述導電層的任一者包含抗氧化劑。A laminated body comprising an insulating layer and a conductive layer on the polyimide resin film according to any one of claims 6 to 9, and in the laminated body, the insulating layer and the conductive layer Any of them contains antioxidants. 如請求項11所述的積層體,其中,所述抗氧化劑為含有胺基或酚性羥基的化合物。The laminate according to claim 11, wherein the antioxidant is a compound containing an amino group or a phenolic hydroxyl group. 一種可撓性器件,包括如請求項6至請求項9中任一項所述的聚醯亞胺樹脂膜或如請求項10至請求項12中任一項所述的積層體。A flexible device comprising the polyimide resin film according to any one of claims 6 to 9 or the laminate according to any one of claims 10 to 12. 如請求項13所述的可撓性器件,其中,所述可撓性器件為可撓性觸控面板、可撓性太陽能電池或可撓性透明天線。The flexible device according to claim 13, wherein the flexible device is a flexible touch panel, a flexible solar cell, or a flexible transparent antenna.
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