TW202115385A - Inspection module, inversion module, and inspection apparatus - Google Patents

Abstract

In order to easily manufacture an inspection device that flexibly responds to user requirements, an inspection module is provided with a conveyance unit, a sensor unit, a movement mechanism, a detection unit, and a control unit. The conveyance unit is capable of conveying an object being inspected between the inspection module and outside of the inspection module. The sensor unit performs at least one inspection process among an imaging process and a measurement process that have the object being inspected as a subject. The movement mechanism moves the position of the sensor unit relative to the object being inspected. The detection unit is for obtaining information that pertains to the attitude and the position of the object being inspected. The control unit adjusts the position of the sensor unit relative to the object being inspected by means of the movement mechanism, on the basis of the information obtained by the detection unit.

Description

Inspection module, turning module and inspection device

The invention relates to an inspection module, an overturning module and an inspection device.

In the past, there has been known an inspection device (for example, Patent Document 1, etc.) that uses a three-dimensional component used in a driving part of an automobile or the like and its periphery as an inspection target (also referred to as a workpiece).

In this inspection device, for example, a plurality of cameras are arranged along the movement path of the workpiece, and the workpiece can be imaged from multiple directions. [Prior Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2018-205197

(The problem to be solved by the invention)

However, if the part of the workpiece that becomes the object of imaging increases, the number of cameras will increase, resulting in an increase in the size of the inspection device. For example, with the increase in the size of the workpiece, the number of cameras will further increase, which may lead to the further increase in the size of the inspection device. In addition, in order to manufacture an inspection device that meets the needs of the user such as the shape and size of the workpiece, the space for installing the device, and the budget, the inspection device must be designed individually for each specification that meets the needs of the user. It is not easy to provide an inspection device that meets the needs of users.

The above-mentioned problems are generally common in inspection devices, and the inspection device targets inspection objects including automotive parts and parts for purposes other than automobiles, and performs inspection processing including imaging and measurement other than imaging. By.

The present invention is accomplished in view of the above-mentioned problems, and its purpose is to provide a technique for easily manufacturing an inspection device that can flexibly meet the needs of users. (Technical means to solve the problem)

In order to solve the above-mentioned problems, the inspection module of the first aspect is provided with a transport unit, a sensor unit, a movement mechanism, a detection unit, and a control unit. The said conveyance part conveys the to-be-inspected object between the said module for inspection and the exterior of the said module for inspection. The sensor unit performs processing for inspection of at least one of imaging and measurement with the object to be inspected. The moving mechanism moves the relative position of the sensor section with respect to the inspection object. The detection unit is used to obtain information on the posture and position of the inspected object. The control unit adjusts the relative position of the sensor unit with respect to the inspection object by the moving mechanism according to the information obtained by the detection unit.

The inspection module of the second aspect is the inspection module of the first aspect, and the sensor section includes an imaging section that uses the inspection object as an object to be photographed.

The inspection module of the third aspect is included in the inspection module of the first or second aspect, and the conveying part includes a belt conveyor.

The turning module of the fourth aspect is provided with a conveying part, a holding part, a moving mechanism, a detecting part, and a control part. The conveying unit conveys the inspection object between the reversing module and the outside of the reversing module. The holding part holds the inspection object in order to invert the inspection object. The moving mechanism moves the holding part in a state where the inspection object is held by the holding part, thereby turning the inspection object over. The detection unit is used to obtain information on the posture and position of the inspected object. The control section adjusts the relative position of the holding section with respect to the inspection object by the moving mechanism based on the information obtained by the detection section.

The turning module of the fifth aspect is in the turning module of the fourth aspect, and the conveying part includes a belt conveyor.

The inspection device of the sixth aspect includes two or more modules connected to each other. The two or more modules include a first module and a second module. The first module has a first conveying part, a sensor part, a first moving mechanism, a first detecting part, and a first control part. The first transport unit transports the inspection object between the first module and the outside of the first module. The sensor unit performs processing for inspection of at least one of imaging and measurement with the object to be inspected. The first moving mechanism moves the relative position of the sensor section with respect to the inspection object. The first detecting unit is used to obtain information about the posture and position of the inspected object. The first control unit adjusts the relative position of the sensor unit with respect to the inspection object by the first moving mechanism based on the information obtained by the first detection unit. The second module has a second conveying part, a holding part, a second moving mechanism, a second detecting part, and a second control part. The second transport unit transports the inspection object between the second module and the outside of the second module. The holding part holds the inspection object in order to invert the inspection object. The second moving mechanism moves the holding portion in a state in which the inspection object is held by the holding portion, thereby turning the inspection object over. The second detecting unit is used to obtain information about the posture and position of the inspected object. The second control unit adjusts the relative position of the holding unit to the inspected object by the second moving mechanism based on the information obtained by the second detecting unit.

The inspection device of the seventh aspect is in the inspection device of the sixth aspect, and the second control section is based on the information obtained by using the first detecting section and the information obtained by using the second detecting section, and The relative position of the holding portion with respect to the inspection object is adjusted by the second moving mechanism; or the first control portion is based on the information obtained by using the first detecting portion and the information obtained by using the second detecting portion The information obtained is used to adjust the relative position of the sensor portion with respect to the object under inspection by the first moving mechanism.

The inspection device of the eighth aspect includes two or more modules connected to each other. The two or more modules include a first module and a second module. The first module has a first conveying part, a first sensor part, a first moving mechanism, a first detecting part, and a first control part. The first transport unit transports the inspection object between the first module and the outside of the first module. The first sensor unit performs processing for inspection of at least one of imaging and measurement with the object to be inspected. The first moving mechanism moves the relative position of the first sensor section with respect to the inspection object. The first detecting unit is used to obtain information about the posture and position of the inspected object. The first control unit adjusts the relative position of the first sensor unit with respect to the inspection object by the first moving mechanism according to the information obtained by the first detection unit. The second module has a second conveying part, a second sensor part, a second moving mechanism, a second detecting part, and a second control part. The second transport unit transports the inspection object between the second module and the outside of the second module. The second sensor unit performs processing for inspection of at least one of imaging and measurement with the object to be inspected. The second moving mechanism moves the relative position of the second sensor section with respect to the inspection object. The second detecting unit is used to obtain information about the posture and position of the inspected object. The second control unit adjusts the relative position of the second sensor unit with respect to the inspection object through the second moving mechanism according to the information obtained by the second detection unit.

The inspection device of the ninth aspect is in the inspection device of the eighth aspect, and the second control part is based on the information obtained by using the first detecting part and the information obtained by using the second detecting part, and Adjust the relative position of the second sensor part with respect to the inspected object by the second moving mechanism; or the first control part uses the information obtained by the first detection part and the second The information obtained by the detecting part is adjusted by the first moving mechanism to adjust the relative position of the first sensor part with respect to the inspected object.

The inspection device of the tenth aspect is in the inspection device of any one of the sixth to the ninth aspect, and the inspection objects located in each of the two or more modules are simultaneously directed downstream of the conveying path Module transport on the side.

The inspection device of the eleventh aspect is the inspection device of any one of the sixth to the tenth aspect, and the first conveying part and the second conveying part respectively include a belt conveyor. (Compared with the effect of previous technology)

According to the inspection module of the first aspect, for example, by moving the sensor portion relative to the inspection object, one sensor portion can be used for inspection of one or two or more parts of the inspection object. Processing. Therefore, for example, two or more modules including one or two or more inspection modules can be appropriately combined to manufacture an inspection device. In addition, for example, even if at least one of the posture and position of the inspection object is shifted when the inspection object is carried into the inspection module from another module, the sensor unit can be adjusted relative to the inspection object in accordance with the shift. The relative position of things. Therefore, an inspection device that can flexibly correspond to the user's needs such as the shape and size of the object to be inspected, the space for installing the device, and the budget can be easily manufactured.

According to the inspection module of the second aspect, for example, by relatively moving the imaging unit with respect to the object to be inspected, one imaging unit can be used to image one part or two or more parts of the object to be inspected. Therefore, for example, two or more modules including one or more camera modules can be appropriately combined to manufacture an inspection device. In addition, for example, even if at least one of the posture and position of the inspection object is shifted when the inspection object is carried into the inspection module from another module, it is possible to adjust the imaging unit relative to the inspection object in accordance with the shift. relative position.

According to the inspection module of the third aspect, for example, the posture and position of the inspection object even when the inspection object is transferred from the belt conveyor of the adjacent module to the belt conveyor of the inspection module The offset of at least one of them can also adjust the relative position of the sensor portion with respect to the object to be inspected corresponding to the offset.

According to the reversing module of the fourth aspect, for example, it is possible to appropriately combine two or more including an inspection module for performing inspection processing with the object to be inspected, and a reversing module for reversing the object to be inspected. Modules to manufacture inspection devices. Also, for example, even if at least one of the posture and position of the inspected object is shifted when the inspected object is carried into the turning module from another module, the relative position of the holding portion with respect to the inspected object can be adjusted in accordance with the shift. Position, whereby the holding part can be used to hold the inspected object and turn it over. Therefore, an inspection device that can flexibly correspond to the user's needs such as the shape and size of the object to be inspected, the space for installing the device, and the budget can be easily manufactured.

According to the turning module of the fifth aspect, for example, even when the inspection object is transferred from the belt conveyor of the adjacent module to the belt conveyor of the turning module, the posture and position of the inspection object are at least For one offset, the relative position of the holding portion with respect to the inspection object can also be adjusted corresponding to the offset.

According to the inspection apparatus according to the sixth aspect, for example, two or more including a first module for processing the inspection object for the inspection object and a second module for turning the inspection object can be appropriately combined. Modules to manufacture inspection devices. Also, for example, even if at least one of the posture and position of the inspected object is shifted when the object to be inspected is carried into the first module from another module, the sensor portion can be adjusted relative to the inspected object in accordance with the shift. The relative position of things. Also, for example, even if at least one of the posture and position of the inspected object is shifted when the inspected object is carried into the second module from another module, it is possible to adjust the holding portion relative to the inspected object in accordance with the shift. relative position. Therefore, an inspection device that can flexibly correspond to the user's needs such as the shape and size of the object to be inspected, the space for installing the device, and the budget can be easily manufactured.

According to the inspection device of the seventh aspect, for example, when the inspected object is moved into the second module after the first module, in the second module, the detection unit in the first module can be used. The information obtained is used to adjust the relative position of the holding part with respect to the inspected object. When the inspected object is moved into the first module after the second module, the second module can be used in the first module. The information obtained by the detection part in the group is used to adjust the relative position of the sensor part with respect to the object to be inspected. By this, for example, the structure and time required for obtaining information can be reduced.

According to the inspection device of the eighth aspect, for example, two or more modules including a first module and a second module for performing inspection processing with the object to be inspected can be appropriately combined to manufacture Check the device. Also, for example, even if at least one of the posture and position of the inspected object is shifted when the inspected object is moved into the first module or the second module from another module, the sensor can be adjusted corresponding to the shift The relative position of the part relative to the inspected object. Therefore, an inspection device that can flexibly correspond to the user's needs such as the shape and size of the object to be inspected, the space for installing the device, and the budget can be easily manufactured. Also, for example, with the increase in the number of inspected objects that are continuously inspected, it is possible to share the inspection processing on multiple parts of the inspected objects in two or more inspection modules. Increase the number of inspected objects that are discharged from the inspection device per unit of time that have been processed for inspection.

According to the inspection device of the ninth aspect, for example, when the inspected object is moved into the second module after the first module, in the second module, the first detection in the first module can be used To adjust the relative position of the second sensor portion with respect to the inspected object based on the information obtained by the second module, and when the inspected object is moved into the first module after the second module, in the first module, The information obtained by using the second detecting part in the second module can be used to adjust the relative position of the first sensor part with respect to the inspected object. By this, for example, the structure and time required for obtaining information can be reduced.

According to the inspection device of the tenth aspect, for example, by simultaneously transporting the inspected object between all the modules to the adjacent module on the downstream side, the completed inspection can be discharged from the inspection device per unit time The number of inspected objects used for processing has increased.

According to the inspection device of the 11th aspect, for example, at least one of the posture and position of the inspected object even when the inspected object is transferred from the belt conveyor of one module to the belt conveyor of the next module The offset can also adjust the relative position of the sensor portion or the holding portion with respect to the object to be inspected in accordance with the offset.

Hereinafter, each embodiment of the present invention will be described with reference to the accompanying drawings. The constituent elements described in each embodiment are merely examples, and the gist of the present invention is not to limit the scope of the present invention to only these constituent elements. The drawings are only shown schematically. In the drawings, in order to be easily understood, there are cases where the size and quantity of each part are exaggerated or simply illustrated as needed. In addition, in the drawings, the same symbols are assigned to the parts having the same structure and function, and repeated descriptions are appropriately omitted. In Fig. 1(a) to Fig. 3(b) and Fig. 11(a) to Fig. 12(c), the XYZ coordinate system of the right-hand system is marked. In this XYZ coordinate system, the direction in which the inspection object W0 is transported along the horizontal plane by the transport section Cv1 of the input module 11 is set as the +X direction, which is perpendicular to the direction in which the inspection object W0 is transported along the horizontal plane. The direction is set as the +Y direction, and the gravity direction orthogonal to both the +X direction and the +Y direction is set as the -Z direction.

In addition, in this specification, words and expressions that indicate relative or absolute positional relationships (such as "parallel", "orthogonal", "center", etc.), unless otherwise emphasized, do not only accurately indicate the positional relationship, but also include tolerances. The state, and also refers to the state of being relatively displaced in angle or distance within the range where the same degree of function can be obtained. Words and expressions that indicate the state of two or more objects being equal (such as "identical", "equal", "homogeneous", etc.), unless specifically emphasized, do not only mean quantitatively and accurately equal state, but also mean that there is a tolerance Or can get the same degree of function difference status. Words and expressions expressing shapes (such as "quadrilateral" or "cylindrical", etc.), unless specifically emphasized, do not only accurately express geometrical shapes, but within the range that the same degree of effect can be obtained, it also means that, for example, it has Concave-convex or chamfered shapes. The phrase "has," "has," "has," "includes," or "has" a constituent element is not an exclusive word that excludes the existence of other constituent elements. The phrase "connected", unless specifically emphasized, can also be a phrase including a state where two elements are separated by sandwiching other essential elements in addition to the state where two elements are connected.

<1. The first embodiment> ＜1-1. Composition of inspection device＞ 1(a) to FIG. 10, the inspection apparatus 1 of the first embodiment will be described. Fig. 1(a) is a perspective view schematically showing the appearance of the inspection apparatus 1 of the first example of the first embodiment. Fig. 1(b) is a diagram showing a schematic configuration of the inspection apparatus 1 of the first example of the first embodiment. Fig. 2(a) is a perspective view showing a state in which the inspection apparatus 1 of the first example of the first embodiment is manufactured. Fig. 2(b) is a diagram schematically showing a state in which the inspection apparatus 1 of the first example of the first embodiment is manufactured.

As shown in FIGS. 1(a) and 1(b), the inspection apparatus 1 includes, for example, an input module 11, four inspection modules 12, a reversing module 13, and a discharge module 14. More specifically, in the inspection apparatus 1, for example, the input module 11, the first inspection module (also referred to as the first inspection module) 121, and the second inspection module (also referred to as the first inspection module) 121 The second inspection module) 122, the reversal module 13, the third inspection module (also called the third inspection module) 123, the fourth inspection module (also called the fourth inspection module) ) 124 and the discharge module 14 are arranged in a state of being connected in the order described above in the +X direction. The input module 11, the inspection module 12, the reversal module 13, and the discharge module 14 may also be referred to as "modules" as appropriate. A plurality of modules 11, 12, 13, and 14 can be produced individually. Moreover, for example, as shown in FIG. 2(a) and FIG. 2(b), the inspection device 1 can be manufactured by connecting a plurality of modules 11, 12, 13, and 14 to each other in the +X direction. Therefore, for example, two or more modules including one or two or more inspection modules 12 can be appropriately combined to manufacture an inspection device. The connection between the modules 11, 12, 13, and 14, for example, can be realized by connecting members and fixing members such as screws.

The modules 11, 12, 13, and 14 respectively have a cylindrical part (also referred to as a cylindrical part) on the upper part, and the cylindrical part has an object for inspection (also referred to as an object to be inspected, a workpiece) W0 Internal space for placement and transportation. The cylindrical portion is arranged so as to penetrate in the +X direction, for example. Specifically, for example, the input module 11 has a cylindrical portion 11tb, the inspection module 12 has a cylindrical portion 12tb, the inversion module 13 has a cylindrical portion 13tb, and the discharge module 14 has a cylindrical portion 14tb. And, for example, a plurality of modules 11, 12, 13, 14 are connected to each other to form a cylindrical portion (tube-shaped portion) 1tb, and the single cylindrical portion becomes available in the plurality of modules 11 The path (also referred to as the transport path) Rt1 where the inspection object W0 is transported between, 12, 13, and 14. In Fig. 1(b), the arrow of the two-dot chain line is drawn along the conveying path Rt1 along the +X direction.

Here, for example, the cylindrical portion 1tb is the cylindrical portion 11tb of the input module 11, the cylindrical portion 12tb of the first inspection module 121, the cylindrical portion 12tb of the second inspection module 122, and the reversing module The cylindrical portion 13tb of 13, the cylindrical portion 12tb of the third inspection module 123, the cylindrical portion 12tb of the fourth inspection module 124, and the cylindrical portion 14tb of the discharge module 14 follow the above in the +X direction The state in which the sequence is connected is constituted. In the inspection device 1, for example, the inspection of the inspection object W0 can be performed from the input module 11 through the inspection object W0, with the first inspection module 121, the second inspection module 122, the reversing module 13, The order of the third inspection module 123, the fourth inspection module 124, and the discharge module 14 is carried and performed.

Here, each of the upper surface portion in the +Z direction and the side surface portion in the ±Y direction of the cylindrical portions 11tb, 12tb, 13tb, and 14tb may be transparent or not, for example.

＜1-1-1. Composition of input module＞ The input module 11 is a module in which the inspection object W0 is input from the outside of the inspection device 1. The input module 11 is, for example, located at the first position on the transport path Rt1 of the inspection object W0 among two or more modules including one or more inspection modules 12 included in the inspection device 1.

In the example of Fig. 1 (a) and Fig. 1 (b), the input module 11 has a belt conveyor as a conveying unit Cv1 that can convey the inspection object W0, and each inspection module 12 has the ability to convey the inspection object. The transport unit Cv2 of W0 is a belt conveyor, the turning module 13 has a belt conveyor as a transport unit Cv3 that can transport the inspection object W0, and the discharge module 14 has a transport unit Cv4 as a transport unit Cv4 that can transport the inspection object W0 Belt conveyor. The belt conveyor has, for example, a pulley that rotates in accordance with the driving force of a driving unit such as a motor, a roller, and a belt arranged along the outer circumference of the pulley and the roller. The transport unit Cv1 of the input module 11 can transport the inspection object W0 between the input module 11 and the outside of the input module 11, for example. The transport unit Cv2 of the inspection module 12 can transport the inspection object W0 between the inspection module 12 and the outside of the inspection module 12, for example. The transport unit Cv3 of the reversing module 13 can transport the inspection object W0 between the reversing module 13 and the outside of the reversing module 13, for example. The conveyance part Cv4 of the discharge module 14 may convey the inspection object W0 between the discharge module 14 and the outside of the discharge module 14, or may convey the inspection object W0 to a predetermined position in the discharge module 14, for example.

For example, the input module 11 has a portion (also referred to as an opening and closing portion) 11oc that can be opened and closed at an end in the -X direction on the opposite side of the inspection module 12 in the cylindrical portion 11tb. The opening and closing portion 11oc has, for example, a door or a gate that can be opened and closed. The inspection object W0 is injected into the injection module 11 via the opening and closing portion 11oc, for example. For example, there may be a state in which the operator Op0 puts the inspection object W0 into the input module 11. In this case, for example, there may be a situation where the operator Op0 aligns the mark drawn or projected on the belt body of the belt conveyor as the conveying part Cv1 and places the inspection object W0 on the belt body. . In this case, for example, the case where the inspection object W0 has been put into the module 11 can be detected by a sensor that detects the inspection object W0 placed on the belt. In addition, for example, a robot or the like provided outside the inspection apparatus 1 may throw the inspection object W0 into the injection module 11. Here, for example, the inspection object W0 placed on the belt body of the belt conveyor as the conveying unit Cv1 can be delivered to the first outside the input module 11 in the +X direction by the conveying unit Cv1 A conveying part Cv2 (also referred to as a conveying part Cv21) of the inspection module 121. Here, when the inspection object W0 is transferred from the transport section Cv1 of the input module 11, which is the module before the first inspection module 121, to the transport section Cv21 of the first inspection module 121, there is an inspection object The posture and position of W0 will shift.

＜1-1-2. Composition of inspection modules＞ The inspection module 12 is, for example, a module that performs imaging as an inspection process, and the inspection process targets the inspection object W0. Here, the first inspection module 121, for example, can be processed as an inspection object W0 that is transferred from the transport section Cv1 of the input module 11 to the transport section Cv21 of the first inspection module 121 as an object. Camera. The inspection object W0 that has been imaged by the first inspection module 121 can be transferred from the first inspection module 121 to the outside of the first inspection module 121 in the +X direction by the transport unit Cv21 The transport part Cv2 (also referred to as the transport part Cv22) of the second inspection module 122. Here, for example, when the inspection object W0 is transferred from the transport unit Cv21 of the first inspection module 121 to the transport unit Cv22 of the second inspection module 122, the posture and position of the inspection object W0 will occur. Circumstances of deviation.

The second inspection module 122 can, for example, be processed as an inspection object W0 that is transferred from the transport section Cv21 of the first inspection module 121 to the transport section Cv22 of the second inspection module 122. Camera. The inspection object W0 that has been imaged by the second inspection module 122 can be transferred from the second inspection module 122 to the outside of the second inspection module 122 in the +X direction by the transport unit Cv22 The conveyance part Cv3 of the module 13 is turned over. Here, for example, when the inspection object W0 is transferred from the transport section Cv22 of the second inspection module 122 to the transport section Cv3 of the reversing module 13, there is a deviation in the posture and position of the inspection object W0. Happening.

The third inspection module 123, for example, can be performed by the inspection object W0 that is transferred from the transport section Cv3 of the reversing module 13 to the transport section Cv2 (also referred to as the transport section Cv23) of the third inspection module 123. The camera used for inspection processing. The inspection object W0 that has been imaged by the third inspection module 123 can be transferred from the third inspection module 123 to the outside of the third inspection module 123 in the +X direction by the transport unit Cv23 The transport unit Cv2 (also referred to as the transport unit Cv24) of the fourth inspection module 124. Here, for example, when the inspection object W0 is transferred from the transport section Cv3 of the reversing module 13 to the transport section Cv23 of the third inspection module 123, there may be deviations in the posture and position of the inspection object W0. situation. Also, for example, when the inspection object W0 is transferred from the transport unit Cv23 of the third inspection module 123 to the transport unit Cv24 of the fourth inspection module 124, there is a deviation in the posture and position of the inspection object W0. Move the situation.

The fourth inspection module 124, for example, can be processed as an inspection object W0 that is transferred from the transport part Cv23 of the third inspection module 123 to the transport part Cv24 of the fourth inspection module 124. Camera. The inspection object W0 that has been imaged by the fourth inspection module 124 can be transferred from the fourth inspection module 124 to the outside of the fourth inspection module 124 in the +X direction by the transport unit Cv24 The conveyance part Cv4 of the module 14 is discharged.

FIG. 3(a) is a diagram showing an example of the main physical structure of the inspection module 12. The inspection module 12 has, for example, a sensor unit 12s, a moving mechanism 12t, and a detection unit 12d.

The sensor part 12s can perform imaging as a process for inspection, and the process for inspection uses the inspection object W0 as a target. Here, the inspection module 12 may have one sensor part 12s, and may have two or more sensor parts 12s. In the example of FIG. 3(a), the inspection module 12 has two sensor parts 12s including a first sensor part 12s1 and a second sensor part 12s2. For the sensor unit 12s, for example, an imaging unit having an imaging element such as a charge coupled device (CCD) can be applied. The imaging unit can capture at least a part of the inspection object W0 as an object to be photographed. The sensor part 12s may have illumination, for example. For the lighting, for example, planar lighting using a light emitting diode (Light Emitting Diode: LED) can be applied.

The moving mechanism 12t can move the relative position of the sensor part 12s with respect to the inspection object W0, for example. Here, the inspection module 12 may have one moving mechanism 12t or two or more moving mechanisms 12t according to the number of the sensor parts 12s, for example. In the example of FIG. 3(a), the inspection module 12 has two components including a first moving mechanism 12t1 and a second moving mechanism 12t2 that are arranged to face each other in the ±Y direction so as to sandwich the conveying portion Cv2. Moving mechanism 12t. The first moving mechanism 12t1 can move the relative position of the first sensor portion 12s1 with respect to the inspection object W0. The second moving mechanism 12t2 can move the relative position of the second sensor portion 12s2 with respect to the inspection object W0. By this, for example, even if the inspection object W0 is enlarged, the sensor unit 12s can be moved by the moving mechanism 12t, thereby imaging the inspection object W0 from multiple directions. Here, the inspection object W0 may have a size of approximately 550 mm in vertical width, approximately 550 mm in horizontal width, and approximately 200 mm in height.

In this way, for example, since the sensor portion 12s can be relatively moved with respect to the inspection object W0, it is possible to use one sensor portion 12s to perform inspection processing on one part or two or more of the inspection object W0. Camera. Therefore, for example, the shape and size of the inspection object W0, the space for installing the device, and the budget of the user's needs can be considered, and one or two or more inspection modules 12 can be combined to manufacture the inspection device 1.

For the moving mechanism 12t, for example, a robotic arm can be applied. For the robot arm, for example, it is possible to apply a reference part Pt0, a first movable part Pt1, a second movable part Pt2, a third movable part Pt3, a fourth movable part Pt4, a fifth movable part Pt5, and a sixth movable part Pt6. A robotic arm that rotates its axis (also called a six-axis robotic arm). In this case, the reference part Pt0 is fixed to the base part Bs12 of the inspection module 12, etc., for example. To this base portion Bs12, for example, a belt conveyor with a conveying portion Cv2 may be fixed. The reference portion Pt0 has, for example, a rotation portion Pr1 that rotatably holds the first movable portion Pt1 with the first axis P11 along the +Z direction as the center. The first movable portion Pt1 has, for example, a second rotating portion Pr2 that rotatably holds the second movable portion Pt2 with the second axis P12 along the horizontal direction as the center. The second movable portion Pt2 has, for example, a third rotating portion Pr3 that rotatably holds the third movable portion Pt3 around the third axis P13 along the horizontal direction. The third movable portion Pt3 has, for example, a fourth rotation portion Pr4 that rotatably holds the fourth movable portion Pt4 with a fourth axis P14 perpendicular to the third axis P13 as a center. The fourth movable portion Pt4 has, for example, a fifth rotating portion Pr5 that rotatably holds the fifth movable portion Pt5 with a fifth axis P15 perpendicular to the fourth axis P14 as a center. The fifth movable portion Pt5 has, for example, a sixth rotating portion Pr6 that rotatably holds the sixth movable portion Pt6 with a sixth axis P16 perpendicular to the fifth axis P15 as a center. Furthermore, it is arranged in a state where the sensor part 12s is fixed to the sixth movable part Pt6.

The detection unit 12d can obtain information about the posture and position of the inspection object W0, for example. Here, the inspection module 12 may have one detecting portion 12d or two or more detecting portions 12d. In the example of FIG. 3(a), the inspection module 12 has one detection part 12d located in the +Z direction which is the upper direction of the conveyance part Cv2. The detection unit 12d can be, for example, an image pickup device having a charge coupled device (CCD) or the like. The detection part 12d may also have illumination, for example. The information that can be obtained by the detecting portion 12d can be used, for example, for the purpose of adjusting the relative position of the sensor portion 12s with respect to the inspection object W0 by the moving mechanism 12t.

＜1-1-3. The structure of the flip module＞ The turning module 13 is, for example, a module for turning the inspection object W0. The overturning of the inspection object W0 includes, for example, the overturning of the inspection object W0. Here, the reversing module 13 can reverse the inspection object W0 delivered from the conveying part Cv22 of the second inspection module 122 to the conveying part Cv3, for example. FIG. 3(b) is a diagram showing an example of the main physical structure of the reversing module 13. The turning module 13 has, for example, a holding part 13h, a moving mechanism 13t, and a detecting part 13d.

The holding part 13h can hold the inspection object W0 in order to reverse the inspection object W0, for example. Here, the turnover module 13 may have one holding portion 13h, or may have two or more holding portions 13h. In the example of FIG. 3(b), the turning module 13 has a holding portion 13h. For the holding portion 13h, for example, a manipulator having two or more fingers capable of holding the inspection object W0 can be applied.

For example, the moving mechanism 13t can move the holding portion 13h while holding the inspection object W0 by the holding portion 13h, thereby turning the inspection object W0 over. Here, the reversing module 13 only needs to have one moving mechanism 13t with respect to one holding portion 13h, for example. More specifically, the turning module 13 only needs to have one moving mechanism 13t when there is one holding portion 13h, and when there are two or more holding portions 13h, it only needs to have two or more. The moving mechanism is only 13t. In the example of FIG. 3(b), the reversing module 13 has a moving mechanism 13t which is arrange|positioned at the side of the conveyance part Cv3. The moving mechanism 13t of the reversing module 13 can be, for example, a robot arm similar to the moving mechanism 12t of the inspection module 12 can be applied. As shown in FIG. 3(b), for example, when the moving mechanism 13t uses the same six-axis robot arm as the moving mechanism 12t of FIG. 3(a), the reference portion Pt0 is fixed to the base of the turning module 13, for example The portion Bs13 and the like are arranged in a state where the holding portion 13h is fixed to the sixth movable portion Pt6. For example, a belt conveyor of the conveying part Cv3 may be fixed to the base part Bs13.

The detection unit 13d can obtain information about the posture and position of the inspection object W0, for example. Here, the turning module 13 may have one detecting portion 13d or more than two detecting portions 13d. In the example of FIG. 3(b), the reversing module 13 has a detecting part 13d located in the +Z direction which is the upper direction of the conveying part Cv3. The detection unit 13d may be an image pickup device having a charge coupled device (CCD), for example. The detection part 13d may also have illumination, for example. The information that can be obtained by the detecting portion 13d can be used, for example, for the purpose of adjusting the relative position of the holding portion 13h with respect to the inspection object W0 by the moving mechanism 13t.

＜1-1-4. Composition of discharge module＞ The discharge module 14 is, for example, a module in which the inspection object W0 is discharged from the inside of the inspection device 1 to the outside of the inspection device 1. The discharge module 14 is located, for example, at the end of the transport path Rt1 of the inspection object W0 among two or more modules including one or more inspection modules 12 included in the inspection device 1. The discharge module 14 has, for example, an openable and closable portion (opening and closing portion) 14oc at an end in the +X direction on the opposite side of the inspection module 12 in the cylindrical portion 14tb. The opening and closing portion 14oc has, for example, a door or a gate that can be opened and closed. The inspection object W0 is discharged to the outside of the discharge module 14 via the opening and closing portion 14oc, for example. For example, there may be a situation in which the operator Op0 discharges the inspection object W0 to the outside of the discharge module 14. In addition, for example, a robot or the like provided outside the inspection apparatus 1 may discharge the inspection object W0 from the inside of the discharge module 14 to the outside.

＜1-2. Functional structure of inspection device＞ 4 to 10 are block diagrams showing an example of the functional configuration of the inspection device 1 of the first embodiment. FIG. 4 is mainly a block diagram showing an example of the functional configuration of the input module 11. FIG. 5 is a block diagram mainly showing an example of the functional configuration of the inspection module 12 (specifically, the first inspection module 121). FIG. 6 is a block diagram mainly showing an example of the functional configuration of the inspection module 12 (specifically, the second inspection module 122). FIG. 7 is a block diagram mainly showing an example of the functional configuration of the turning module 13. FIG. 8 is a block diagram mainly showing an example of the functional configuration of the inspection module 12 (specifically, the third inspection module 123). FIG. 9 is a block diagram mainly showing an example of the functional configuration of the inspection module 12 (specifically, the fourth inspection module 124). FIG. 10 is a block diagram mainly showing an example of the functional configuration of the discharge module 14.

＜1-2-1. Functional structure of input module＞ As shown in FIG. 4, the input module 11 has, for example, an integrated control part C0, an input part 11i, a conveyance control part Cc1, and a connection part 11h, and these are electrically connected via the wiring Wr1. Moreover, the input module 11 has, for example, an output unit 11d connected to the integrated control unit C0, and a transport unit Cv1 connected to the transport control unit Cc1.

The integrated control unit C0 can control the operation of the inspection device 1 in an integrated manner, for example. The integrated control unit C0 has, for example, a computing unit, a memory, and a memory unit. The arithmetic unit is composed of, for example, one or more central processing units (Central Processing Unit: CPU) and the like. The memory, for example, is composed of a volatile memory medium such as RAM (Random Access Memory). The memory portion is composed of, for example, a non-volatile memory medium such as a hard disk drive (HDD) or a solid state drive (SSD). The memory part can memorize programs and various information, for example. The arithmetic unit realizes various functions, for example, by reading in and executing a program stored in the memory unit. At this time, the RAM is used as a work space, for example, and can memorize temporarily generated or acquired information. At least a part of the functions that can be implemented by the integrated control unit C0 may also be formed by hardware such as dedicated electronic circuits.

The input unit 11i can input various information in response to the action of the operator Op0, for example. For the input unit 11i, for example, an operation unit such as a button or a touch pad or a microphone unit capable of voice input can be used. The actions of the operator Op0 may include, for example, actions such as manipulation and vocalization.

The output unit 11d can output information in a manner that can be recognized by the operator Op0 based on the information from the integrated control unit C0, for example. The output unit 11d can be applied, for example, a display unit or a lamp that visually outputs information, a speaker that audibly outputs information, and the like.

The conveyance control part Cc1 can control the operation|movement of the conveyance part Cv1, for example. The transport control unit Cc1 has, for example, the same configuration as a computer including a computing unit, a memory, and a storage unit. The conveyance control part Cc1 can realize the function of the conveyance control part Cc1 by executing the program in the memory part by using the arithmetic part, for example. The conveyance control part Cc1 can control the operation of the conveyance part Cv1 by controlling the rotation of at least one pulley of a belt conveyor, for example. At least a part of the functions of the functional configuration implemented by the transport control unit Cc1 may be constituted by hardware such as dedicated electronic circuits, for example.

The connecting portion 11h is, for example, a portion electrically connected to modules other than the input module 11 among the plurality of modules constituting the inspection device 1. The connecting portion 11h may be, for example, a method in which the wires Wr2 of a plurality of modules are electrically connected separately, or a method in which the wires Wr2 of a plurality of modules are electrically connected in series. In FIGS. 4 to 10, the part of the module discussed in the wiring Wr2 is depicted by a solid line, and the part of the module that is not discussed is depicted by a two-dot chain line.

＜1-2-2. Functional structure of inspection module＞ As shown in FIGS. 5, 6, 8 and 9, respectively, the first inspection module 121, the second inspection module 122, the third inspection module 123, and the fourth inspection module 124 respectively have The same functional composition.

The inspection module 12 includes, for example, a transport control unit Cc2, a detection control unit Cd2, a sensor control unit Cs2, and a movement control unit Ct2, and these are electrically connected to each other via a wire Wr2. In addition, the inspection module 12 has, for example, a conveying section Cv2 connected to the conveying control section Cc2, a detection section 12d connected to the detection control section Cd2, and a sensor section 12s connected to the sensor control section Cs2. , And the movement mechanism 12t connected to the movement control part Ct2.

Here, in each example of FIG. 5, FIG. 6, FIG. 8, and FIG. 9, the inspection module 12 has two sensor control parts Cs2, and two movement control parts Ct2. Specifically, the inspection module 12 includes, for example, a first sensor control unit Cs2 (also referred to as a first sensor control unit Cs21) and a second sensor control unit Cs2 (also referred to as a second sensor control unit Cs2). The two sensor control parts Cs2 of the sensor control part Cs22) and the first movement control part Ct2 (also called the first movement control part Ct21) and the second movement control part Ct2 (also called the first movement control part Ct2) Two movement control parts Ct22) Two movement control parts Ct2. In this case, as shown in FIG. 3(a), the inspection module 12 has two sensor parts 12s including a first sensor part 12s1 and a second sensor part 12s2, and has two sensor parts 12s including a first sensor part 12s1 and a second sensor part 12s2. Two moving mechanisms 12t of the moving mechanism 12t1 and the second moving mechanism 12t2. Here, for example, the first sensor part 12s1 is connected to the first sensor control part Cs21, and the second sensor part 12s2 is connected to the second sensor control part Cs22. Moreover, for example, the first movement mechanism 12t1 is connected to the first movement control portion Ct21, and the second movement mechanism 12t2 is connected to the second movement control portion Ct22. Here, for example, when the inspection module 12 has one sensor unit 12s and one movement mechanism 12t, it is only necessary to have one sensor control unit Cs2 and one movement control unit Ct2.

Each of the transport control unit Cc2, the detection control unit Cd2, the sensor control unit Cs2, and the movement control unit Ct2 has, for example, the same configuration as a computer including a computing unit, a memory, and a storage unit.

The conveyance control unit Cc2 can realize the function of the conveyance control unit Cc2 by executing a program in the memory unit with the arithmetic unit, for example. The conveyance control part Cc2 can control the operation of the conveyance part Cv2 by controlling the rotation of at least one pulley of a belt conveyor, for example. At least a part of the functions of the functional configuration implemented by the transport control unit Cc2 may be constituted by hardware such as dedicated electronic circuits, for example.

The detection control part Cd2 can realize the function of the detection control part Cd2 by using the computing part to execute the program in the memory part, for example. The detection control unit Cd2 can, for example, control the action of the detection unit 12d, and can obtain the posture and position information of the inspection object W0 obtained by the detection unit 12d. The detection control unit Cd2 may also perform calculations based on information on the posture and position of the inspection object W0, for example. In this case, for example, the detection control unit Cd2 captures the image (also referred to as the actual image) of the inspection object W0 obtained by the detection unit 12d and the reference posture of the inspection object W0 prepared in advance and The positional images (also referred to as the main image) are compared, so that the displacement of the posture and position of the inspection object W0 from the reference can be detected. For example, the main image may be an image that actually captures the inspection object W0, or an image drawn by computer graphics. To compare the actual image with the main image, for example, the method of detecting and matching feature points, and template matching can be used. The calculation for detecting the displacement of the posture and position of the inspection object W0 from the reference may be performed by, for example, other control units such as the integrated control unit C0. At least a part of the functions of the functional configuration implemented by the detection control unit Cd2 may also be constituted by hardware such as dedicated electronic circuits.

The sensor control unit Cs2 can realize the function of the sensor control unit Cs2 by using the computing unit to execute a program in the memory unit, for example. The sensor control part Cs2 can control the operation of the sensor part 12s, for example, and can obtain information (also referred to as imaging information) obtained by imaging the inspection object W0 by the sensor part 12s. The sensor control unit Cs2 can output the imaging information of the inspection object W0 to the integrated control unit C0 via the wiring Wr2 and the wiring Wr1, for example, directly or after applying various information processing. By this, it is possible to obtain imaging information as a result of imaging, and the imaging is a process for inspection with the inspection object W0 as a target. Here, for example, the integrated control unit C0 can display the image based on the imaging information on the output unit 11d, and the operator Op0 visually inspects the appearance of the inspection object W0, or the integrated control unit C0 can display the imaging information by The image is compared with at least a part of the standard image of the inspected object W0, and the operation of inspecting the appearance of the inspected object W0 is performed. Here, for example, the sensor control unit Cs2 may perform calculations for inspecting the appearance of the inspection object W0, and send information indicating the calculation results to the integration control unit C0. At least a part of the functions of the functional configuration implemented by the sensor control unit Cs2 may also be constituted by hardware such as dedicated electronic circuits, for example.

The movement control unit Ct2 can realize the function of the movement control unit Ct2 by executing a program in the memory unit by the arithmetic unit, for example. The movement control unit Ct2 can control the movement of the movement mechanism 12t, for example. Here, the movement control part Ct2 can adjust the relative position of the sensor part 12s with respect to the inspection object W0 by the movement mechanism 12t based on the information obtained by the detection part 12d, for example. Specifically, the movement control portion Ct2 may have the following aspects: based on the detection control portion Cd2, etc., based on the detected offset detected by the information of the posture and position of the inspected object W0 obtained from the detection portion 12d. , And adjust the relative position of the sensor portion 12s with respect to the inspection object W0 by the moving mechanism 12t. With such a configuration, for example, even if at least one of the posture and position of the inspection object W0 is shifted when the inspection object W0 is carried into the inspection module 12 from another module, it can be adjusted in accordance with the shift. The relative position of the sensor part 12s with respect to the inspection object W0. More specifically, for example, when the inspection object W0 is transferred from the belt conveyor of the adjacent module to the belt conveyor of the inspection module 12, even if the posture and position of the inspection object W0 are at least For one offset, the relative position of the sensor portion 12s with respect to the inspection object W0 can also be adjusted corresponding to the offset. Also, for example, compared to adjusting the posture and position of the inspection object W0, adjusting the relative position of the sensor portion 12s with respect to the inspection object W0 by the moving mechanism 12t can be realized more easily and at a higher speed. Thereby, it is possible to easily manufacture the inspection device 1 that can flexibly correspond to the user's needs such as the shape and size of the inspected object W0, the space for installing the device, and the budget. At least a part of the functions of the functional configuration implemented by the movement control unit Ct2 may be constituted by hardware such as dedicated electronic circuits, for example.

In addition, for example, the movement control unit Ct2 can also be controlled in the following manner: by moving the relative position of the sensor unit 12s with respect to the inspection object W0, the sensor unit 12s is used to control a plurality of locations of the inspection object W0. Perform imaging as processing for inspection.

＜1-2-3. Functional structure of the flip module＞ As shown in FIG. 7, the reversing module 13 has, for example, a conveyance control unit Cc3, a detection control unit Cd3, and a reversal control unit Cr3, which are electrically connected to each other via a wire Wr2. In addition, the turnover module 13 has, for example, a detection part 13d connected to the detection control part Cd3, a transport part Cv3 connected to the transport control part Cc3, and a holding part 13h and a moving mechanism 13t connected to the turnover control part Cr3. . Here, in the example of FIG. 7, the reversing module 13 has a reversing control unit Cr3. In this case, as shown in FIG. 3(b), the turning module 13 has a holding portion 13h and a moving mechanism 13t. Here, for example, the turning module 13 may have two holding parts 13h and two moving mechanisms 13t, and there may be two turning control parts Cr3.

Each of the transport control unit Cc3, the detection control unit Cd3, and the reversal control unit Cr3 has, for example, the same configuration as a computer including a computing unit, a memory, and a memory unit.

The conveyance control unit Cc3 can realize the function of the conveyance control unit Cc3 by executing a program in the memory unit with the arithmetic unit, for example. The conveyance control part Cc3 can control the operation of the conveyance part Cv3 by controlling the rotation of at least one pulley of a belt conveyor, for example. At least a part of the functions of the functional configuration realized by the transport control unit Cc3 may be constituted by hardware such as dedicated electronic circuits, for example.

The detection control part Cd3 can realize the function of the detection control part Cd3 by using the computing part to execute the program in the memory part, for example. The detection control unit Cd3 can control the movement of the detection unit 13d, and can obtain the posture and position information of the inspection object W0 obtained by the detection unit 13d, for example. The detection control unit Cd3 may also perform calculations based on information of the posture and position of the inspection object W0, for example. In this case, for example, the detection control unit Cd3 captures the image (the actual image) of the inspection object W0 obtained by the detection unit 13d and the pre-prepared image of the posture and position of the inspection object W0. The (main image) is compared to detect the deviation of the posture and position of the inspection object W0 from the reference. The actual image and the main image can be compared, for example, the method of detecting and matching feature points, and template matching, etc. can be used. The calculation for detecting the displacement of the posture and position of the inspection object W0 from the reference may be performed by, for example, other control units such as the integrated control unit C0. At least a part of the functions implemented by the detection control unit Cd3 may also be constituted by hardware such as dedicated electronic circuits.

The turning control part Cr3 can realize the function of the turning control part Cr3 by, for example, executing the program in the memory part by the calculation part. The inversion control part Cr3 can control the operation of the holding part 13h and the moving mechanism 13t, for example. Here, the turning control part Cr3 can adjust the relative position of the holding part 13h with respect to the inspection object W0 by the moving mechanism 13t based on the information obtained by the detection part 12d, for example. Specifically, the turning control portion Cr3 may have the following aspects: according to the detection control portion Cd3 and the detection portion 13d from the use of the detection portion 13d obtained by the posture and position information of the inspection object W0 detected offset, And the relative position of the holding portion 13h with respect to the inspection object W0 is adjusted by the moving mechanism 13t. If such a configuration is adopted, for example, even if at least one of the posture and position of the inspection object W0 is shifted when the inspection object W0 is carried into the reverse turning module 13 from another module, it can be adjusted in accordance with the shift. The relative position of the holding portion 13h with respect to the inspection object W0. More specifically, for example, when the inspection object W0 is transferred from the belt conveyor of the adjacent module to the belt conveyor of the turning module 13, even if at least one of the posture and position of the inspection object W0 is In this case, the relative position of the holding portion 13h with respect to the inspection object W0 may be adjusted in accordance with the offset. Thereby, even if at least one of the posture and the position of the inspection object W0 is shifted, the inspection object W0 can be held and turned over by the holding portion 13h. At least a part of the functions of the functional configuration implemented by the inversion control unit Cr3 may be constituted by hardware such as dedicated electronic circuits, for example.

In addition, for example, two or more modules including the inspection module 12 and the reversing module 13 can be appropriately combined to manufacture the inspection device 1. Therefore, it is possible to easily manufacture the inspection device 1 that can flexibly correspond to the user's needs such as the shape and size of the inspection object W0, the space and budget for installing the device, and so on.

＜1-2-4. Functional structure of the discharge module＞ As shown in FIG. 10, the discharge module 14 has, for example, the conveyance control part Cc4 electrically connected to the wiring Wr2, and the conveyance part Cv4 connected to this conveyance control part Cc4. The transport control unit Cc4 has, for example, the same configuration as a computer including a computing unit, a memory, and a storage unit. The conveyance control unit Cc4 can realize the function of the conveyance control unit Cc4 by executing a program in the memory unit with the arithmetic unit, for example. The conveyance control part Cc4 can control the operation of the conveyance part Cv4 by controlling the rotation of at least one pulley of a belt conveyor, for example. At least a part of the functions of the functional configuration realized by the transport control unit Cc4 may be constituted by hardware such as dedicated electronic circuits, for example.

＜1-3. Changes in the manufacture of inspection devices＞ Although the inspection apparatus 1 of the first example of the above-mentioned first embodiment can be manufactured by combining one input module 11, four inspection modules 12, one reversing module 13, and one ejection module, for individual There can be various combinations of modules made by the ground. In other words, for example, the inspection apparatus 1 may be provided with two or more modules including a first module and a second module, which are mutually connected.

Here, for example, there may be a situation where the first module is the first inspection module 12 (first inspection module 121), and the second module is the second inspection module 12 (second Inspection module 122). In this case, the first inspection module 121 has, for example, a conveying part Cv21 as a first conveying part, a sensor part 12s as a first sensor part, a moving mechanism 12t as a first moving mechanism, and a second A detection part 12d of a detection part, and a movement control part Ct2 as a first control part. In addition, the second inspection module 122 has, for example, a conveying part Cv22 as a second conveying part, a sensor part 12s as a second sensor part, a moving mechanism 12t as a second moving mechanism, and a second detecting Part of the detection part 12d, and the movement control part Ct2 as the second control part.

If such a configuration is adopted, for example, two or more modules including a first module and a second module for performing inspection processing with the inspection object W0 as the target can be appropriately combined to produce an inspection device 1. Also, for example, even when the inspection object W0 is to be carried into the first inspection module 121 as the first module or the second inspection module 122 as the second module from another module. At least one of the posture and the position is shifted, and the relative position of the sensor portion 12s with respect to the inspection object W0 can also be adjusted corresponding to the shift. Therefore, the inspection device 1 that can flexibly correspond to the user's needs such as the shape and size of the inspection object W0, the space for installing the device, and the budget can be easily manufactured. Also, for example, when the inspection object W0 is transferred from the belt conveyor of the module to the belt conveyor of the next module, even if at least one of the posture and position of the inspection object W0 is shifted, it may be The relative position of the sensor portion 12s with respect to the inspection object W0 is adjusted in accordance with the offset.

Moreover, here, for example, the following situation may also exist: the first module is the inspection module 12 and the second module is the reversing module 13. In this case, the inspection module 12 has, for example, a conveying part Cv21 as a first conveying part, a sensor part 12s, a moving mechanism 12t as a first moving mechanism, a detecting part 12d as a first detecting part, And the movement control unit Ct2 as the first control unit. In addition, the reversing module 13 has, for example, a conveying part Cv3 as a second conveying part, a holding part 13h, a moving mechanism 13t as a second moving mechanism, a detecting part 13d as a second detecting part, and a second control part. The flip control part Cr3.

If such a configuration is adopted, for example, two or more modules including a first module for performing inspection processing for the inspection object W0 and a second module for reversing the inspection object W0 can be appropriately combined. Module to manufacture the inspection device 1. Also, for example, even if at least one of the posture and position of the inspection object W0 is shifted when the inspection object is carried into the inspection module 12 as the first module from another module, it can be adjusted in accordance with the shift. The relative position of the sensor part 12s with respect to the inspection object W0. In addition, for example, even if at least one of the posture and position of the inspected object W0 is shifted when the inspection object W0 is carried into the turning module 13 as the second module from another module, it can also correspond to the shift. The relative position of the holding portion 13h with respect to the inspection object W0 is adjusted. Therefore, the inspection device 1 that can flexibly correspond to the user's needs such as the shape and size of the inspection object W0, the space for installing the device, and the budget can be easily manufactured. Also, for example, when the inspection object W0 is transferred from the belt conveyor of the module to the belt conveyor of the next module, even if at least one of the posture and position of the inspection object W0 is shifted, it may be In response to this offset, the relative positions of the sensor portion 12s and the holding portion 13h with respect to the inspection object W0 are adjusted.

Fig. 11(a) is a diagram showing a schematic configuration of an inspection apparatus 1A of the second example constituted by a combination of a plurality of modules. Fig. 11(b) is a diagram showing the schematic configuration of the inspection apparatus 1B of the third example constituted by a combination of a plurality of modules. The inspection device 1A of the second example and the inspection device 1B of the third example are examples of inspection devices including the inversion module 13 respectively.

For example, as shown in FIG. 11( a ), the inspection apparatus 1A of the second example includes an input module 11, two inspection modules 12, a reversing module 13, and a discharge module 14. More specifically, for example, the input module 11, the first inspection module 12 (first inspection module 121), the inversion module 13, and the second inspection module 12 (second inspection module 122), and the discharge module 14 are arranged in a state of being connected in the order described above in the +X direction. In the inspection apparatus 1A of the second example, for example, from the input module 11, the inspection object W0 is selected from the first inspection module 121, the reversing module 13, the second inspection module 122, and the discharge module 14. The order is transported, so that the inspection of the inspection object W0 can be performed. In this case, for example, the first inspection module 121 may use one side (for example, the front side) of the inspection object W0 as the object to perform the imaging as the inspection processing, and the inspection object may be After W0 is turned upside down, the second inspection module 122 uses the other side (for example, the back surface) of the inspection object W0 as a target to perform imaging as a process for inspection. The inspection apparatus 1A of the second example having such a structure can be configured by placing the input module 11, the two inspection modules 12, the reversing module 13, and the ejection module 14 separately produced in the +X direction, for example. They are connected to each other to be manufactured.

For example, as shown in FIG. 11(b), the inspection apparatus 1B of the third example includes an input module 11, an inspection module 12, and a reversing module 13. More specifically, for example, the input module 11, the inspection module 12 (first inspection module 121), and the reversal module 13 are arranged in a state of being connected in the order described above in the +X direction. In the inspection apparatus 1B of the third example, for example, from the input module 11, the inspection object W0 is selected from the first inspection module 121, the reversing module 13, the first inspection module 121, and the input module 11. The order is transported, so that the inspection of the inspection object W0 can be performed. In this case, for example, the first inspection module 121 may use one side (for example, the front side) of the inspection object W0 as the object to perform the imaging as the inspection processing, and the inspection object may be After W0 is turned up and down, the first inspection module 121 uses the other side (for example, the back side) of the inspection object W0 as a target to perform imaging as a process for inspection. Furthermore, the input module 11 can function as the discharge module 14, for example. The inspection device 1B of the third example having such a structure can be manufactured by, for example, connecting the input module 11, one inspection module 12, and the reversing module 13 which are manufactured separately to each other in the +X direction. .

Here, for example, in each of the inspection device 1 of the first example, the inspection device 1A of the second example, and the inspection device 1B of the third example, the input module 11 may be omitted, or the ejection mold may be omitted. Group 14. In this case, for example, the inspection module 12 for performing inspection processing with the inspection object W0 as the object and the reversing module 13 for reversing the inspection object may be made separately. Two or more modules are combined to manufacture inspection devices 1, 1A, and 1B. Thereby, the inspection devices 1, 1A, 1B that can flexibly correspond to the user's needs such as the shape and size of the inspection object W0, the space for setting the device, and the budget, etc. can be easily manufactured.

Fig. 12(a) is a diagram showing a schematic configuration of an inspection apparatus 1C of a fourth example constituted by a combination of a plurality of modules. Fig. 12(b) is a diagram showing a schematic configuration of the inspection apparatus 1D of the fifth example constituted by a combination of a plurality of modules. FIG. 12(c) is a diagram showing the schematic configuration of the inspection apparatus 1E of the sixth example constituted by one inspection module 12. The inspection device 1C of the fourth example, the inspection device 1D of the fifth example, and the inspection device 1E of the sixth example are examples of inspection devices that do not include the reversing module 13 respectively.

For example, as shown in FIG. 12(a), the inspection apparatus 1C of the fourth example includes an input module 11, two inspection modules 12, and a discharge module 14. More specifically, for example, the input module 11, the first inspection module 12 (first inspection module 121), the second inspection module 12 (second inspection module 122), and discharge The modules 14 are arranged in a state of being connected in the order described above in the +X direction. In the inspection apparatus 1C of the fourth example, for example, from the input module 11, the inspection object W0 is transported in the order of the first inspection module 121, the second inspection module 122, and the discharge module 14, thereby The inspection of the inspection object W0 can be performed. In this case, for example, the first inspection module 121 and the second inspection module 122 can use one side (for example, the front or back) of the inspection object W0 as a target to perform imaging as a processing for inspection. The inspection apparatus 1C of the fourth example having such a structure can be formed by, for example, connecting the input module 11, the two inspection modules 12, and the ejection module 14 that are manufactured separately to each other in the +X direction. Is manufactured.

For example, as shown in FIG. 12( b ), the inspection device 1D of the fifth example includes an input module 11, an inspection module 12, and a discharge module 14. More specifically, for example, the input module 11, the inspection module 12 (first inspection module 121), and the discharge module 14 are arranged in a state of being connected in the order described above in the +X direction. In the inspection apparatus 1D of the fifth example, the inspection object W0 is transported in the order of the first inspection module 121 and the discharge module 14 from the input module 11, so that inspection of the inspection object W0 can be performed . In this case, for example, the first inspection module 121 may use one side (for example, the front or back) of the inspection object W0 as a target to perform imaging as a processing for inspection. The inspection device 1D of the fifth example having such a structure can be constructed by, for example, interconnecting the input module 11, one inspection module 12, and the discharge module 14 that are manufactured separately in the +X direction. manufacture.

Here, for example, in each of the inspection apparatus 1C of the fourth example and the inspection apparatus 1D of the fifth example, the input module 11 may be omitted, or the discharge module 14 may be omitted. In this case, for example, it is also possible to appropriately make two or more modules including one or more inspection modules 12 for processing the inspection object W0 as the object. They are combined to manufacture inspection devices 1C and 1D. Thereby, it is possible to easily manufacture inspection devices 1C, 1D that can flexibly correspond to the user's needs such as the shape and size of the inspection object W0, the space for installing the device, and the budget.

For example, as shown in FIG. 12(c), the inspection apparatus 1E of the sixth example is provided with one inspection module 12. More specifically, the inspection apparatus 1E of the sixth example has, for example, a configuration in which the input module 11 and the discharge module 14 are omitted from the inspection apparatus 1D of the fifth example. In the inspection apparatus 1E of the sixth example, for example, one inspection module 12 (first inspection module 121) can be used for inspection by using one side of the inspection object W0 (for example, the front or back) as the object. The processing of the camera.

<1-4. An example of the operation of the inspection device> FIG. 13 is a diagram showing a timing chart related to an operation in which an inspection object W0 in the inspection apparatus 1 of the first example of the first embodiment is used as a target. For example, as shown in FIG. 13, the period during which the inspection apparatus 1 performs an operation with one inspection object W0 as an object is composed of a time-continuous period Pd11, a period Pd12 (period Pd121), a period Pd12 (period Pd122), and a period Pd13, period Pd12 (period Pd123), period Pd12 (period Pd124), and period Pd14 are constituted. The period Pd11 is the period when the inspection object W0 is in the input module 11. The period Pd12 (period Pd121) is a period in which the inspection object W0 is located in the first inspection module 12 (first inspection module 121). The period Pd12 (period Pd122) is a period in which the inspection object W0 is located in the second inspection module 12 (second inspection module 122). The period Pd13 is the period when the inspected object W0 is located in the turning module 13. The period Pd12 (period Pd123) is a period in which the inspection object W0 is located in the third inspection module 12 (third inspection module 123). The period Pd12 (period Pd124) is a period in which the inspection object W0 is located in the fourth inspection module 12 (fourth inspection module 124). The period Pd14 is the period when the inspection object W0 is located in the discharge module 14.

In the example of FIG. 13, for example, the period Pd11 is determined by the period during which the inspection object W0 is put into the input module 11 (also referred to as the input period) Pin, and between the input module 11 and the first inspection mold The first half of the period (also referred to as the transport period) Ptr during which the inspection object W0 is transported between the group 12 (the first inspection module 121). The period Pd12 (Pd121) consists of the second half of the transport period Ptr in which the inspection object W0 is transported between the input module 11 and the first inspection module 12 (first inspection module 121) by the detection unit 12d During the acquisition of the information of the position and posture of the inspected object W0 and the adjustment of the position of the sensor part 12s based on the information (also referred to as the sensor part adjustment period) Pas, by the sensor During the imaging period (also referred to as the imaging period) Pca of more than one imaging process (also referred to as imaging period) performed by the inspection object W0 as the object for inspection by the part 12s, and in the first inspection module 12 (first inspection mold The first half of the period (transport period) Ptr during which the inspection object W0 is transported between the group 121) and the second inspection module 12 (the second inspection module 122). During the period Pd12 (Pd122), the inspection object W is transported between the first inspection module 12 (first inspection module 121) and the second inspection module 12 (second inspection module 122). The second half of the transport period Ptr, the sensor unit adjustment period Pas, the imaging period Pca, and the transport of the inspection object W0 between the second inspection module 12 (second inspection module 122) and the reversing module 13 The first half of the period (transport period) Ptr. The period Pd13 is performed by the detection unit 13d during the second half of the transport period Ptr in which the inspection object W0 is transported between the second inspection module 12 (the second inspection module 122) and the reversing module 13 The acquisition of information on the position and posture of the inspected object W0 and the period during which the position of the holding portion 13h is adjusted based on the information (also referred to as the holding portion adjustment period) Pah, the holding portion 13h and the moving mechanism 13t make the inspected The period during which the object W0 is inverted (also referred to as the inversion period) Pre, and the period during which the object to be inspected W0 is transported between the inversion module 13 and the third inspection module 12 (third inspection module 123) (transport period) ) The first half of Ptr. The period Pd12 (Pd123) consists of the second half of the transport period of Ptr during the transport period of the inspection object W0 between the reversing module 13 and the third inspection module 12 (third inspection module 123), and the sensor adjustment period Pas, Pca during imaging, and transport of the inspection object W0 between the third inspection module 12 (third inspection module 123) and the fourth inspection module 12 (fourth inspection module 124) The first half of the period (transport period) Ptr. During the period Pd12 (Pd124), the inspection object W is transported between the third inspection module 12 (third inspection module 123) and the fourth inspection module 12 (fourth inspection module 124). The second half of the transport period Ptr, the sensor part adjustment period Pas, the imaging period Pca, and the transport of the inspection object W0 between the fourth inspection module 12 (fourth inspection module 124) and the discharge module 14 The first half of the period (transport period) Ptr. The period Pd14 is performed by the second half of the transport period Ptr in which the inspection object W0 is transported between the fourth inspection module 12 (fourth inspection module 124) and the ejection module 14, and the ejection from the ejection module 14 is performed. The operation period (also referred to as the ejection period) of the inspection object W0 is constituted by Pdi.

Here, for example, the input period Pin is set to 6 seconds, the transport period Ptr is set to 4 seconds, the sensor section adjustment period Pas and the holding section adjustment period Pah are set to 1 second, and the imaging period Pca is set to 5 seconds. The reversal period Pre is set to 5 seconds, and the discharge period Pdi is set to 6 seconds. Here, it is assumed that a part of the inspection object W0 is imaged five times in each of the four image-capturing periods Pca, which requires 1 second as processing for inspection. In this case, the period during which the inspection device 1 shown in FIG. 13 performs an operation that targets the inspection object W0 is 66 seconds.

Here, for example, suppose that the inspection device 1D of the fifth example shown in FIG. 12(b) performs a period during which the object to be inspected W0 is the object of operation, which is set as the input period Pin of 6 seconds and 4 seconds. Clock transport period Ptr, 1-second sensor part adjustment period Pas, 20-second imaging period for a part of the inspection object W0, 20-second imaging period Pca, 4 It is composed of Ptr for the conveying period of 1 second and Pdi for the discharge period of 6 seconds. In this case, the period during which an operation to target the inspection object W0 is performed is 41 seconds. In other words, the inspection of the inspection object W0 can be performed at a rate of processing once every 41 seconds.

Here, for example, it is assumed that the inspection apparatus 1 of the first example of the first embodiment is used to continuously inspect a plurality of inspection objects W0. FIG. 14 is a timing chart related to the operation of a plurality of inspection objects W0 in the inspection apparatus 1 of the first example of the first embodiment. Here, for example, it is assumed that the following control is performed by the integrated control unit C0: simultaneously conveying the inspection object W0 located in the input module 11 and each of the plural modules to the upper and downstream side of the conveying path Rt1 Modules, and the plural modules are located between the input module 11 and the discharge module 14. In addition, here, it is assumed that the plurality of inspection objects W0 that are the continuous inspection objects include the first inspection object W0 (also referred to as the first inspection object W01) and the second inspection object W0 (also known as the second inspection object W02), the third inspection object W0 (also known as the third inspection object W03), and the fourth inspection object W0 (also known as the fourth inspection object W04) And the fifth inspection object W0 (also referred to as the fifth inspection object W05). In FIG. 14, the time sequence of the action of the first inspection object W01 is represented by the rectangle marked with the first oblique line, and the time sequence of the second inspection object W02 is represented by the shadow line marked with the second oblique line. The time sequence of the movement of the third inspection object W03 is represented by the rectangle marked with the hatching of the spots, the time sequence of the movement of the fourth inspection object W04 is represented by the black rectangle, and the time sequence of the movement of the fourth inspection object W04 is represented by the black rectangle. The timing of the movement of the inspection object W05 is represented by the hollow painted white rectangle. As shown in FIG. 13, the period during which the operation of the inspection device 1 for each inspection object W0 is performed is composed of one input period Pin (6 seconds), six transport periods Ptr (each 4 seconds), and four One sensor part adjustment period Pas (1 second each), one holding part adjustment period Pah (1 second), four imaging periods Pca (5 seconds each), one reversing period Pre (5 seconds), and A discharge period Pdi (6 seconds) constitutes.

In this case, as shown in FIG. 14, the inspection object W0 that has been imaged as a processing for inspection can be processed at a rate of 10 seconds and discharged from the inspection device 1. In other words, the imaging of the inspection object W0 as a processing for inspection can be completed at a speed of one processing in 10 seconds. In this case, by sharing the inspection processing of the inspection object W0 by the plurality of inspection modules 12, the time that the inspection object W0 stays in one module can be shortened. As a result, it is possible to shorten the speed of completing the imaging of the inspection object W0 as the processing for the inspection. Moreover, for example, assuming that a plurality of inspection objects W0 are inspected, the speed at which the inspection processing of the inspection object W0 is completed can increase with the number of inspection modules 12 constituting the inspection device. And shorten.

Therefore, for example, when the space and budget for installing the inspection device are sufficient, by increasing the number of inspection modules 12 constituting the inspection device, it is possible to shorten the time required to complete the imaging of the inspection object W0 as an inspection process. speed. In other words, for example, with the increase in the number of inspection objects W0 that are continuously inspected, two or more inspection modules 12 are used to perform inspections on multiple parts of the inspection object W0 in a shared manner. The processing can increase the number of inspected objects W0 discharged from the inspection device per unit of time that have completed the processing for inspection. That is, the takt in the inspection device can be increased. On the other hand, when the space or budget for installing the inspection device is insufficient, the number of inspection modules 12 constituting the inspection device may be increased within an allowable range. Thereby, it is possible to easily manufacture the inspection device 1 that can flexibly correspond to the user's needs such as the shape and size of the inspected object W0, the space for installing the device, and the budget. Moreover, here, for example, by simultaneously transporting the inspection object W0 among all the modules to the adjacent module on the downstream side, the inspection device 1 can be transported out of the inspection device 1 per unit time. The number of inspection objects W0 has increased.

<1-5. Summary of the first embodiment> As described above, according to the inspection module 12 of the first embodiment, for example, the sensor unit 12s can move relative to the inspection object W0. Therefore, it is possible to use one imaging unit as the sensor unit 12s to be opposed to the inspection object W0. One part or two or more parts of the inspection object are taken as inspection processing. Thereby, for example, two or more modules including one or two or more inspection modules 12 can be appropriately combined to manufacture inspection devices 1, 1A, 1B, 1C, and 1D. Therefore, for example, it is not necessary to design and integrate all the components for processing the inspection object W0 from the beginning in order to meet the user's needs of the shape and size of the inspection object W0, the space for setting the device, and the budget. The specifications of the device. Also, for example, even if at least one of the posture and position of the inspection object W0 is shifted when the inspection object W0 is carried into the inspection module 12 from another module, the sensor unit can be adjusted in accordance with the shift. The relative position of the 12s camera unit relative to the inspected object W0. Therefore, the inspection devices 1, 1A, 1B, 1C, 1D that can flexibly correspond to the user's needs such as the shape and size of the inspection object W0, the space for installing the device, and the budget can be easily manufactured.

In addition, according to the reversing module 13 of the first embodiment, for example, an inspection module 12 for performing inspection processing with the inspection object W0 as a target can be appropriately combined with an inspection module 12 for reversing the inspection object W0. Two or more modules of the module 13 are used to manufacture inspection devices 1, 1A, and 1B. Therefore, for example, it is not necessary to redesign and incorporate all the components for processing the inspected object W0 in order to meet the needs of the user for the shape and size of the inspected object W0, the space for installing the device, and the budget. The specifications of the integrated device. Also, for example, even if at least one of the posture and position of the inspection object W0 is shifted when the inspection object W0 is carried into the reversing module 13 from another module, the holding portion 13h can be adjusted relative to the shift in response to the shift. The relative position of the inspected object W0. Thereby, even if at least one of the posture and the position of the inspection object W0 is shifted, the holding portion 13h can be used to hold the inspection object W0 and turn it over. Therefore, the inspection devices 1, 1A, 1B that can flexibly correspond to the user such as the shape and size of the inspected object, the space for setting the device, and the budget, etc. can be easily manufactured.

In addition, according to the inspection apparatus 1, 1A, and 1B of the first embodiment, for example, the inspection module 12, which is the first module for performing the inspection process with the inspection object W0 as the target, can be appropriately combined. And two or more modules of the reversing module 13 as the second module that reverse the inspection object W0 to manufacture the inspection devices 1, 1A, and 1B. Also, for example, even if at least one of the posture and the position of the inspection object W0 is shifted when the inspection object is carried into the inspection module 12 as the first module from another module, it can correspond to the shift. The relative position of the sensor part 12s with respect to the inspection object W0 is adjusted. Also, for example, even if at least one of the posture and position of the inspected object W0 is shifted when the inspection object W0 is carried into the turning module 13 as the second module from another module, it can also correspond to the shift. The relative position of the holding portion 13h with respect to the inspection object W0 is adjusted. Therefore, the inspection devices 1, 1A, 1B that can flexibly correspond to the user's needs such as the shape and size of the object to be inspected, the space for installing the device, and the budget can be easily manufactured.

In addition, according to the inspection apparatus 1, 1A, and 1C of the first embodiment, for example, it is possible to appropriately combine two of the first module and the second module for performing inspection processing with the inspection object W0 as the target. More than one module to manufacture inspection devices 1, 1A, 1C. Also, for example, even when the inspection object W0 is carried into the first inspection module 121 as the first module or the second inspection module 122 as the second module from another module, the posture of the inspection object W0 At least one of the offset and the position may be offset, and the relative position of the sensor portion 12s with respect to the inspection object W0 can also be adjusted corresponding to the offset. Therefore, the inspection device 1 that can flexibly correspond to the user's needs such as the shape and size of the inspection object W0, the space for installing the device, and the budget can be easily manufactured. Also, for example, with the increase in the number of inspection objects W0 that are continuously inspected, the processing for inspecting the plurality of inspection objects W0 is performed in a shared manner in two or more inspection modules 12 , Can increase the number of inspected objects W0 discharged from inspection devices 1, 1A, 1C that have been processed for inspection per unit time.

＜2. Modifications＞ In addition, the present invention is not limited to the above-mentioned embodiments, and various changes, improvements, etc. can be made without departing from the scope of the present invention.

In the above-mentioned first embodiment, the sensor unit 12s may perform, for example, at least one of inspection processing of imaging and measurement with the inspection object W0 as a target. For the measurement with the inspection object W0 as the object, for example, there may be measurement of the flow rate or pressure of the gas in the hole of the inspection object W0. In this case, the sensor unit 12s can, for example, appropriately combine a valve to adjust the amount of gas supplied, a flow meter to measure the gas flowing in the hole, and to measure the pressure of the gas flowing in the hole. The pressure gauge and so on.

In the above-mentioned first embodiment, the conveying parts Cv1, Cv2, Cv3, and Cv4, for example, can replace the belt conveyor and apply a different configuration such as a robot that can convey the inspection object W0.

In the first embodiment described above, for example, a plurality of modules connected to each other may include a transport module (also referred to as a transport module) 15 that changes the transport direction of the inspection object W0. The transport module 15 can be applied, for example, to a belt conveyor (also referred to as a curved belt conveyor) that bends the transport direction of the inspection object W0, and a transport robot that can appropriately change the transport direction of the inspection object W0. .

FIG. 15 is a diagram showing a schematic configuration of an example of an inspection device 1F composed of a combination of a plurality of modules including a conveying module 15 having a curved belt conveyor. FIG. 16 is a diagram showing a schematic configuration of an example of an inspection device 1G composed of a combination of a plurality of modules including a conveying module 15 having a curved belt conveyor. Each of the inspection device 1F and the inspection device 1G has the following configuration added to the inspection device 1 of the above-mentioned first example: the first inspection device is arranged between the second inspection module 122 and the reversing module 13 The transport module 151 and the second transport module 152 arranged between the reversing module 13 and the third inspection module 123. With such a structure, for example, when the inspection object W0 is transported from the second inspection module 122 to the turning module 13 via the curved belt conveyor of the first transport module 151, the posture and position of the inspection object W0 At least one of them easily shifts greatly. In contrast, for example, the turning module 13 can adjust the relative position of the holding portion 13h to the inspection object W0 corresponding to the deviation of at least one of the posture and the position of the inspection object W0. Also, for example, when the inspection object W0 is transported from the turning module 13 to the third inspection module 123 via the curved belt conveyor of the second transport module 152, at least one of the posture and position of the inspection object W0 Easily offset by a large margin. In contrast, for example, the inspection module 12 can adjust the relative position of the sensor portion 12s to the inspection object W0 in accordance with the deviation of at least one of the posture and the position of the inspection object W0. Therefore, it is possible to easily manufacture inspection devices 1F, 1G that can flexibly correspond to the user's needs such as the shape and size of the inspection object W0, the space for installing the device, and the budget.

Fig. 17(a) is a diagram showing a schematic configuration of an example of an inspection device 1H composed of a combination of a plurality of modules including a transport module 15 having a transport robot. In the example of FIG. 17(a), the inspection device 1H has a transport module 15 with a transport robot located in the input module 11, the first inspection module 121, the second inspection module 122, and the third inspection module. Between group 123. In this case, for example, corresponding to the shape and size of the inspection object W0 to be inserted into the input module 11, the inspection object W0 can be transported to the first inspection module 121 by the transport module 15 Any one of the second inspection module 122 and the third inspection module 123 is the inspection module 12.

Fig. 17(b) is a diagram showing a schematic configuration of an example of an inspection apparatus 1I composed of a combination of a plurality of modules including a transport module 15 having a transport robot. In the example of FIG. 17(b), the transport module 15 of the inspection device 11 with a transport robot is located in the first input module 11 (also referred to as the first input module 111) and the second input module 11 ( Between the second input module 112), the first inspection module 121, and the second inspection module 122. In this case, for example, the inspection object W0 that has been appropriately carried in from the two input modules 11 may correspond to the shape and size of the inspection object W0, and the inspection object W0 can be inspected by the transport module 15 The object W0 is transported to the inspection module 12 of the first inspection module 121 and the second inspection module 122.

In the above-mentioned first embodiment, for example, the method of obtaining information of the posture and position of the inspected object W0 by the detecting unit 12d, for example, the method of measuring the three-dimensional surface shape or the measurement using a displacement sensor can also be used. The method of the distance to the object, etc. As methods for measuring the three-dimensional shape, for example, pattern light projection method, light cutting method, white light interference, etc. can be applied. For the displacement sensor, for example, an optical displacement sensor using a triangular distance measurement as the detection principle can be applied.

In the above-mentioned first embodiment, for example, if the width of the belt of the belt conveyor is increased to correspond to the transportation of the large inspection object W0, it is necessary to increase the diameters of the pulleys and rollers that support the belt to be adjacent to each other. Between the modules, it is easy to produce larger triangular column-shaped grooves between the belt conveyors. In this case, for example, a triangular columnar groove may be filled to arrange a member whose surface is easy to slide. In addition, for example, a belt conveyor (also called a knife edge conveyor) provided with a member for sharpening the ends can also be used, and it is difficult to produce triangular columnar grooves between the belt conveyors.

In the above-mentioned first embodiment, for example, for each inspection object W0, in the inspection module 12 as the second module (for example, the second inspection module 122), according to the movement as the second control unit The control unit Ct2 uses the information obtained by the detection unit 12d as the first detection unit of the inspection module 12 (for example, the first inspection module 121) on the upstream side of the transport path Rt1 as the first module, And use the information obtained by the detection unit 12d as the second detection unit of the inspection module 12 (for example, the second inspection module 122) as the second module, by the moving mechanism as the second moving mechanism 12t is used to adjust the relative position of the sensor part 12s as the second sensor part with respect to the inspection object W0. Also, for example, for each inspection object W0, in the inspection module 12 as the first module (for example, the first inspection module 121), the transport path may be used according to the movement control unit Ct2 as the first control unit The information obtained by the detection unit 12d as the second detection unit of the inspection module 12 (for example, the second inspection module 122) on the relatively upstream side of Rt1 as the second module, and used as the first model The information obtained by the detecting unit 12d as the first detecting unit of the inspection module 12 (for example, the first inspection module 121) of the group is adjusted as the first moving mechanism by the moving mechanism 12t as the first moving mechanism. The relative position of the sensor part 12s of the sensor part with respect to the inspection object W0.

If such a structure is adopted, when the inspection object W0 will be moved into the second module after the first module, in the second module, the first detection unit in the first module can be used The information obtained by the detection portion 12d is used to adjust the relative position of the sensor portion 12s as the second sensor portion with respect to the inspection object W0, and the inspection object W0 is carried into the first after the second module In the case of a module, in the first module, the information obtained by using the detecting part 12d as the second detecting part in the second module can be used to adjust the sensor as the first sensor part The relative position of the portion 12s with respect to the inspection object W0. By this, for example, the structure and time required for obtaining information can be reduced.

Here, an example of such a configuration will be described. Fig. 18(a) is a diagram showing an example of obtaining the information of the posture and position of the inspection object W0 in a module on the upstream side. FIG. 18(b) is a diagram showing an example of obtaining the information of the posture and position of the inspection object W0 in a module on the downstream side. Here, the following case is taken as an example for description: the detection unit 12d images the inspection object W0 from directly above to obtain the imaging information of the two-dimensional posture and position of the inspection object W0. In addition, here, it is assumed that the inspection object W0 is carried into the second module after the first module. For example, there may be a configuration as follows: the imaging information of the inspected object W0 obtained by the detection unit 12d of the first module, as shown in FIG. 18(a), the eight characteristic points of the inspected object W0 (the first The positions of the first to eighth feature points P1~P8) are detected, and then, the imaging information of the inspected object W0 obtained by the detecting unit 12d of the second module is checked, as shown in Fig. 18(b) The positions of the four feature points (the first feature point P1a, the fourth feature point P4a, the fifth feature point P5a, and the eighth feature point P8a) of the inspection object W0 are detected, and the eight points obtained from the first module The relationship between two feature points (the first to eighth feature points P1~P8) is used to infer the other four feature points (the second feature point P2a, the third feature point P3a, the sixth feature point P6a, and the seventh feature point P7a) s position. Even with such a configuration, for example, for each of the first module and the second module, the amount of deviation of the posture and position of the inspection object W0 caused by rotational movement and parallel movement can be detected.

Here, although the two-dimensional posture and position information of the inspection object W0 obtained by the detection unit 12d of one module is used in other modules, the example has been described, but it is not limited to this, for example, The information of the three-dimensional posture and position of the inspection object W0 obtained by the detection unit 12d of one module can be used in other modules.

Furthermore, in the above-mentioned first embodiment, for example, for each inspection object W0, in the reversing module 13 as the second module, the transport path Rt1 may be used according to the reversing control unit Cr3 as the second control unit. The information obtained by the detection unit 12d as the first detection unit of the inspection module 12 (for example, the first inspection module 121) as the first module on the relatively upstream side, and the information used as the second module The information obtained by the detecting portion 13d as the second detecting portion of the turning module 13 adjusts the relative position of the holding portion 13h with respect to the inspection object W0 by the moving mechanism 13t as the second moving mechanism. Also, for example, for each inspection object W0, in the inspection module 12 as the first module (for example, the first inspection module 121), the transport path may be used according to the movement control unit Ct2 as the first control unit Information obtained by the detection section 13d of the inversion module 13 on the relatively upstream side of Rt1 as the second detection section, and detection using the inspection module 12 as the first module as the first detection section The information obtained by the part 12d adjusts the relative position of the sensor part 12s with respect to the inspection object W0 by the moving mechanism 12t as the first moving mechanism. If such a structure is adopted, for example, when the inspection object W0 is moved into the reversing module 13 as the second module after the inspection module 12 as the first module, the inspection object W0 is turned over as the second module. In the module 13, the information obtained by the detection unit 12d of the inspection module 12 as the first module can be used to adjust the relative position of the holding portion 13h with respect to the inspection object W0. When the inspection module 12 as the first module is moved into the inspection module 12 as the first module after the turning module 13 as the second module, the inspection module 12 as the first module can be used as the second The information obtained by the detecting portion 13d of the turning module 13 of the module is used to adjust the relative position of the sensor portion 12s with respect to the inspection object W0. By this, for example, the structure and time required for obtaining information can be reduced.

In the above-mentioned first embodiment, for example, the integrated control unit C0 may also exist in modules other than the input module 11. For example, the integrated control unit C0 may exist in any one of the input module 11, the inspection module 12, the inversion module 13, and the discharge module 14.

Furthermore, of course, it is also possible to appropriately combine all or a part of the first embodiment and the various modifications described above within a range that does not cause any contradiction.

1. 1A, 1B, 1C, 1D, 1E, 1F, 1G, 1H, 1I: inspection device 1tb, 11tb, 12tb, 13tb, 14tb: cylindrical part 11: Put into the module 11d: Output section 11h: Connection part 11i: Input section 11oc, 14oc: opening and closing part 12: Inspection module 12d, 13d: detection part 12s, 12s1, 12s2: sensor part 12t, 12t1, 12t2, 13t: moving mechanism 13: Flip the module 13h: Holding part 14: discharge module 15, 151, 152: transport module 111, 112: the first to the second input module 121~124: Modules for the first to fourth inspection Bs12, Bs13: base part C0: Integrated Control Department Cc1, Cc2, Cc3, Cc4: Conveyance control unit Cd2, Cd3: Detection control part Cr3: Flip control section Cs2: Sensor control part Cs21: The first sensor control unit Cs22: The second sensor control unit Ct2: Movement Control Department Ct21: The first movement control unit Ct22: The second movement control unit Cv1, Cv2, Cv3, Cv4, Cv21, Cv22, Cv23, Cv24: Conveyor Op0: Operator P1~P8, P1a~P8a: feature points Pd11~Pd14, Pd121~Pd124: period Pas: During sensor adjustment Pah: During the adjustment period of the maintenance department Pca: during filming Pdi: during discharge Pin: during the investment period Pre: During the rollover Ptr: during transport Pl1~Pl6: first to sixth axis Pr1: Rotating part Pr2~Pr6: The second to sixth rotating parts Pt0: Reference part Pt1~Pt6: the first to sixth movable parts Rt1: Transport path W0: Object to be inspected W01~W05: The first to fifth inspection objects Wr1, Wr2: Wiring

Fig. 1(a) is a perspective view schematically showing the appearance of the inspection device of the first example of the first embodiment. Fig. 1(b) is a diagram showing a schematic configuration of the inspection device of the first example of the first embodiment. Fig. 2(a) is a perspective view showing a state in which the inspection device of the first example of the first embodiment is manufactured. Fig. 2(b) is a diagram schematically showing a state in which the inspection device of the first example of the first embodiment is manufactured. Fig. 3(a) is a diagram showing an example of the main physical structure of the inspection module. Fig. 3(b) is a diagram showing an example of the main physical structure of the reversing module. Fig. 4 is a diagram showing an example of the functional configuration of a part of the inspection device of the first embodiment. Fig. 5 is a diagram showing an example of a functional configuration of a part of the inspection device of the first embodiment. Fig. 6 is a diagram showing an example of a functional configuration of a part of the inspection device of the first embodiment. Fig. 7 is a diagram showing an example of the functional configuration of a part of the inspection device of the first embodiment. Fig. 8 is a diagram showing an example of the functional configuration of a part of the inspection device of the first embodiment. Fig. 9 is a diagram showing an example of the functional configuration of a part of the inspection device of the first embodiment. Fig. 10 is a diagram showing an example of a functional configuration of a part of the inspection device of the first embodiment. Fig. 11(a) is a diagram showing the schematic configuration of the inspection device of the second example constituted by a combination of a plurality of modules. Fig. 11(b) is a diagram showing the schematic configuration of the inspection device of the third example constituted by a combination of a plurality of modules. Fig. 12(a) is a diagram showing the schematic configuration of the inspection device of the fourth example constituted by a combination of a plurality of modules. Fig. 12(b) is a diagram showing the schematic configuration of the inspection device of the fifth example constituted by a combination of a plurality of modules. Fig. 12(c) is a diagram showing the schematic configuration of the inspection device of the sixth example constituted by one module. FIG. 13 is a diagram showing a timing chart related to an example of an operation in which an object to be inspected in the inspection apparatus of the first example of the first embodiment is a target. FIG. 14 is a diagram showing a timing chart related to an example of an operation in which a plurality of objects to be inspected are objects in the inspection apparatus of the first example of the first embodiment. Fig. 15 is a diagram showing a schematic configuration of an example of an inspection device composed of a combination of a plurality of modules including a conveying module having a curved belt conveyor. Fig. 16 is a diagram showing a schematic configuration of another example of an inspection device composed of a combination of a plurality of modules including a conveying module having a curved belt conveyor. Fig. 17(a) is a diagram showing a schematic configuration of an example of an inspection device composed of a combination of a plurality of modules including a transport module with a transport robot. Fig. 17(b) is a diagram showing a schematic configuration of another example of an inspection device composed of a combination of a plurality of modules including a transport module with a transport robot. Fig. 18(a) is a diagram showing an example of obtaining the information of the posture and position of the inspected object in a module on the upstream side. Fig. 18(b) is a diagram showing an example of the acquisition state of information on the posture and position of the inspected object in a module on the downstream side.

1: Inspection device

11: Put into the module

12: Inspection module

12d: Detection Department

12s, 12s1, 12s2: sensor part

12t, 12t1, 12t2: moving mechanism

13: Flip the module

14: discharge module

121~124: Modules for the first to fourth inspection

Cc2: Conveyance control unit

Cd2: Detection control part

Cs2: Sensor control part

Cs21: The first sensor control unit

Cs22: The second sensor control unit

Ct2: Movement Control Department

Ct21: The first movement control unit

Ct22: The second movement control unit

Cv2, Cv21: Conveying Department

Wr2: Wiring

Claims (11)

An inspection module, which has: A conveying part that conveys the inspected object between the inspection module and the outside of the inspection module; A sensor unit that performs processing for inspection of at least one of imaging and measurement with the object to be inspected; A moving mechanism that moves the relative position of the sensor portion with respect to the object to be inspected; The detection unit is used to obtain information about the posture and position of the object to be inspected; and The control unit adjusts the relative position of the sensor unit with respect to the inspection object by the moving mechanism based on the information obtained by the detection unit. Such as the inspection module of claim 1, in which, The sensor unit includes an imaging unit that uses the inspection object as an object to be photographed. Such as the inspection module of claim 1 or 2, in which, The above-mentioned conveying unit includes a belt conveyor. A flip module, which has: A conveying part that conveys the object to be inspected between the turning module and the outside of the turning module; A holding part, which holds the inspected object in order to turn the inspected object over; A moving mechanism, which moves the holding portion in a state in which the inspected object is held by the holding portion, thereby turning the inspected object over; The detection unit is used to obtain information about the posture and position of the object to be inspected; and The control part adjusts the relative position of the holding part with respect to the inspection object by the moving mechanism based on the information obtained by the detecting part. Such as the flipping module of claim 4, in which, The above-mentioned conveying unit includes a belt conveyor. An inspection device provided with two or more modules connected to each other, The two or more modules include a first module and a second module, The above-mentioned first module has: A first conveying part, which conveys the object to be inspected between the first module and the outside of the first module; A sensor unit that performs processing for inspection of at least one of imaging and measurement with the object to be inspected; A first moving mechanism, which moves the relative position of the sensor portion with respect to the object to be inspected; The first detection unit is used to obtain information about the posture and position of the object to be inspected; and A first control part, which adjusts the relative position of the sensor part with respect to the inspected object by the first moving mechanism according to the information obtained by the first detection part; The above-mentioned second module has: A second conveying part, which conveys the inspection object between the second module and the outside of the second module; A holding part, which holds the inspected object in order to turn the inspected object over; A second moving mechanism, which moves the holding part in a state where the inspection object is held by the holding part, thereby turning the inspection object over; The second detection unit is used to obtain information about the posture and position of the object to be inspected; and The second control part adjusts the relative position of the holding part with respect to the inspected object by the second moving mechanism based on the information obtained by the second detecting part. Such as the inspection device of claim 6, in which, The second control section adjusts the holding section relative to the inspected object by the second moving mechanism based on the information obtained by using the first detecting section and the information obtained by using the second detecting section. The relative position; or the first control unit adjusts the sensor by the first moving mechanism based on the information obtained by using the first detecting unit and the information obtained by using the second detecting unit The relative position of the part relative to the above-mentioned inspected object. An inspection device provided with two or more modules connected to each other, The two or more modules include a first module and a second module, The above-mentioned first module has: A first conveying part, which conveys the object to be inspected between the first module and the outside of the first module; The first sensor unit performs processing for inspection of at least one of imaging and measurement with the object to be inspected; A first moving mechanism, which moves the relative position of the first sensor portion with respect to the object to be inspected; The first detection unit is used to obtain information about the posture and position of the object to be inspected; and A first control part, which adjusts the relative position of the first sensor part with respect to the inspected object by the first moving mechanism according to the information obtained by the first detection part; The above-mentioned second module has: A second conveying part, which conveys the inspection object between the second module and the outside of the second module; The second sensor section performs processing for inspection of at least one of imaging and measurement with the inspection object as an object; A second moving mechanism, which moves the relative position of the second sensor portion with respect to the object to be inspected; The second detection unit is used to obtain information about the posture and position of the object to be inspected; and The second control unit adjusts the relative position of the second sensor unit with respect to the inspection object by the second moving mechanism according to the information obtained by the second detection unit. Such as the inspection device of claim 8, in which, The second control unit adjusts the second sensor unit relative to the information obtained by using the first detecting unit and the information obtained using the second detecting unit through the second moving mechanism. The relative position of the inspected object; or the first control unit adjusts by the first moving mechanism based on the information obtained by using the first detecting unit and the information obtained by using the second detecting unit The relative position of the first sensor portion with respect to the inspection object. Such as the inspection device of any one of claims 6 to 9, wherein: The inspection object located in each of the two or more modules is simultaneously transported to the module on the downstream side of the transport path. Such as the inspection device of any one of claims 6 to 9, wherein: The first conveying unit and the second conveying unit each include a belt conveyor.

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