TW202115233A - 處理液 - Google Patents
處理液 Download PDFInfo
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- TW202115233A TW202115233A TW109129235A TW109129235A TW202115233A TW 202115233 A TW202115233 A TW 202115233A TW 109129235 A TW109129235 A TW 109129235A TW 109129235 A TW109129235 A TW 109129235A TW 202115233 A TW202115233 A TW 202115233A
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- 239000007788 liquid Substances 0.000 title claims abstract description 285
- 238000000034 method Methods 0.000 title description 74
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- -1 hydroxyamine compound Chemical class 0.000 claims abstract description 53
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- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical class ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 claims abstract description 12
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- 229910052700 potassium Inorganic materials 0.000 claims abstract description 7
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 7
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 7
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- ZNBNBTIDJSKEAM-UHFFFAOYSA-N 4-[7-hydroxy-2-[5-[5-[6-hydroxy-6-(hydroxymethyl)-3,5-dimethyloxan-2-yl]-3-methyloxolan-2-yl]-5-methyloxolan-2-yl]-2,8-dimethyl-1,10-dioxaspiro[4.5]decan-9-yl]-2-methyl-3-propanoyloxypentanoic acid Chemical compound C1C(O)C(C)C(C(C)C(OC(=O)CC)C(C)C(O)=O)OC11OC(C)(C2OC(C)(CC2)C2C(CC(O2)C2C(CC(C)C(O)(CO)O2)C)C)CC1 ZNBNBTIDJSKEAM-UHFFFAOYSA-N 0.000 claims description 5
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Classifications
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- C—CHEMISTRY; METALLURGY
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- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
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- H—ELECTRICITY
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
本發明的課題為,提供一種即使冷藏保管及室溫靜置等溫度環境變化反復,殘渣去除性能及耐蝕性的性能穩定性亦優異之處理液。本發明的處理液包含:選自包含羥基胺及羥基胺鹽之群組中之羥基胺化合物;有機溶劑;鹼性化合物;及選自包含Na、Al、K、Ca、Cr、Fe、Ni及Zn之群組中之1種以上的第1金屬離子,相對於處理液的總質量,上述第1金屬離子的總計含量為7.0質量ppb~800.0質量ppb。
Description
本發明係關於一種處理液。尤其係關於一種能夠較佳地用於製造半導體器件之處理液。
使用光微影技術,在基板上形成微細的電子電路圖案來製造CCD(Charge-Coupled Device,電荷耦合器件)及記憶體等半導體器件。具體而言,在基板上具有成為配線材料之金屬膜、蝕刻停止層及層間絕緣層之積層體上形成抗蝕劑膜,並實施光微影步驟及乾式蝕刻步驟(例如電漿蝕刻處理),藉此製造半導體器件。
又,最近為了實現半導體器件的更進一步的微細化,亦可以使用TiN、AlOx等金屬材料系抗蝕劑膜(所謂金屬硬遮罩)來作為上述抗蝕劑膜。使用金屬硬遮罩來作為抗蝕劑膜之情況下,通常進行如下步驟,亦即,將金屬硬遮罩用作遮罩來進行乾式蝕刻步驟(例如電漿蝕刻處理),形成基於金屬硬遮罩的圖案形狀之孔且露出成為配線膜之金屬膜面。
在經由乾式蝕刻步驟之基板堆積有乾式蝕刻殘渣(使用金屬硬遮罩來作為抗蝕劑膜之情況下,作為殘渣成分,例如較多地包含鈦系金屬等金屬成分。另一方面,使用光阻膜之情況下,作為殘渣成分較多地包含有機成分)。該等殘渣通常使用處理液來去除,以免妨礙下一步驟。
例如,專利文獻1中公開有“一種微影製程用洗淨液,其含有:羥基胺;選自包含1,8-二氮雜雙環[5.4.0]十一碳烯-7及1,4-二氮雜雙環[2.2.2]辛烷之群組中之至少一個的胺化合物;水溶性有機溶劑;及水,且pH為8以上,微影製程用洗淨液,其特徵為,相對於上述微影製程用洗淨液總量,包含10質量%以上的上述水溶性有機溶劑”。
[專利文獻1]特表第6486652號公報
本發明人等對專利文獻1中所記載之處理液的經時性能進行了研究,發現在既定條件下進行保管時,性能穩定性可能較差。更具體而言,一般在不使用處理液時,在既定溫度下冷藏保管,當使用時,將處理液從冷藏保管中取出並恢復到室溫而進行使用。本發明人等發現在反復實施將處理液冷藏保管既定時間後,將處理液在室溫下靜置既定時間的一系列操作時,處理液的殘渣去除性能(尤其,去除源自金屬硬遮罩的殘渣的性能)和耐蝕性(尤其係相對於Co(鈷)或Co合金之耐蝕性)可能較差,從而該等性能的穩定性可能較差。
亦即,已明確即使存在如上述般溫度環境變化,仍有改善處理液的餘地,以確保殘渣去除性能及耐蝕性的性能。再者,以下還將確保上述性能的情況稱為殘渣去除性能及耐蝕性的性能穩定性優異。
因此,本發明的課題為,提供一種即使冷藏保管及室溫靜置等溫度環境變化反復,殘渣去除性能(尤其,去除源自金屬硬遮罩的殘渣的性能)及耐蝕性(尤其,相對於Co或Co合金之耐蝕性)的性能穩定性優異之處理液。
本發明人等為了解決上述課題而進行了深入研究之結果,發現了能夠藉由以下的構成來解決上述課題。
〔1〕一種處理液,其包含:
選自包含羥基胺及羥基胺鹽之群組中之羥基胺化合物;
有機溶劑;
鹼性化合物;及
選自包含Na、Al、K、Ca、Cr、Fe、Ni及Zn之群組中之1種以上的第1金屬離子,該處理液中,
相對於處理液的總質量,上述第1金屬離子的總計含量為7.0質量ppb~800.0質量ppb。
〔2〕如〔1〕所述之處理液,其中,相對於處理液的總質量,處理液中所包含之上述第1金屬離子中的至少1種金屬離子的含量為1.0質量ppb~100.0質量ppb。
〔3〕如〔1〕或〔2〕所述之處理液,其中,處理液中所包含之上述第1金屬離子為2種以上,並且相對於處理液的總質量,各金屬離子的含量均為1.0質量ppb~100.0質量ppb。
〔4〕如〔1〕至〔3〕之任一項所述之處理液,其還包含選自包含Li、Mg、Mn、Cu、Ag、Pb及Co之群組中之1種以上的第2金屬離子,
相對於處理液的總質量,上述第2金屬離子的總計含量為0.01質量ppb~10.0質量ppb。
〔5〕如〔4〕所述之處理液,其中,相對於處理液的總質量,處理液中所包含之上述第2金屬離子中的至少1種金屬離子的含量為0.01質量ppb~1.0質量ppb。
〔6〕如〔4〕或〔5〕所述之處理液,其中,處理液中所包含之上述第2金屬離子為2種以上,並且,相對於處理液的總質量,各金屬離子的含量均為0.01質量ppb~1.0質量ppb。
〔7〕如〔1〕至〔6〕之任一項所述之處理液,其中,上述羥基胺化合物包含選自包含羥基胺及硫酸羥基胺之群組中之至少1種。
[發明效果]
依本發明,能夠提供一種即使冷藏保管及室溫靜置等溫度環境變化反復,殘渣去除性能及耐蝕性的性能穩定性亦優異之處理液。
以下,對本發明進行詳細說明。
以下所記載之構成要件的說明有時根據本發明的代表性的實施態樣來完成,但是本發明並不限制於該等的實施態樣。
另外,在本說明書中,用“~”來表示之數值範圍係指將記載於“~”前後之數值作為下限值及上限值而包括之範圍。
又,本發明中稱為“準備”時,除了合成及調合既定的材料等而具備以外,亦包含藉由購入等獲得既定的材料者。
又,在本發明中,“ppb”表示“parts-per-billion(10-9
)”。
又,本發明中,1Å(埃)相當於0.1nm。
又,本發明中的基團(原子團)的標記中,未標註經取代及未經取代之標記係在不損害本發明的效果之範圍內與不具有取代基者一同還包含具有取代基者之標記。例如“烴基”不僅包含不具有取代基之烴基(未經取代的烴基),亦包含具有取代基之烴基(經取代的烴基)。在此,關於各化合物的含義亦相同。
本說明書中,處理液的pH為在室溫(25℃)下以HORIBA,Ltd.製、F-51(產品名)測量之值。
又,本發明中的“放射線”係指例如以水銀燈的明線光譜、準分子雷射為代表之遠紫外線、極紫外線(EUV光)、X射線或電子束等。又,本發明中,光係指光化射線或放射線。本發明中的“曝光”只要沒有特別說明,曝光不僅包含以水銀燈、準分子雷射為代表之基於遠紫外線、X射線或EUV光等之曝光,亦包含基於電子束或離子束等粒子束之繪製。
[處理液]
本發明的處理液包含:
選自包含羥基胺及羥基胺鹽之群組中之羥基胺化合物;
有機溶劑;
鹼性化合物;及
選自包含Na、Al、K、Ca、Cr、Fe、Ni及Zn之群組中之1種以上的第1金屬離子,該處理液中,
相對於處理液的總質量,上述第1金屬離子的總計含量為7.0質量ppb~800.0質量ppb。
發明人等進行深入研究的結果,明確了作用機制尚未明確,但依上述結構的處理液,即使冷藏保管及室溫靜置等溫度環境變化反復,殘渣去除性能及耐蝕性的性能穩定性亦優異(以下,還可以說“殘渣去除性能及耐蝕性的經時穩定性優異”)。
上述處理液作為半導體器件用處理液,能夠適用於製造半導體器件時的各製程中。尤其,上述處理液可較佳地用作將金屬硬遮罩用作硬遮之乾式蝕刻製程之後的洗淨液。
以下,對本發明的處理液中所包含之各成分進行說明。
〔羥基胺化合物〕
本發明的處理液包含選自包含羥基胺及羥基胺鹽之群組中之羥基胺化合物。羥基胺化合物具有促進殘渣的分解及可溶化之功能。
其中,本發明的處理液的羥基胺化合物之“羥基胺”係指包含經取代或未經取代的烷基羥基胺等之廣義的羥基胺化合物,即使為其中任一種亦能夠得到本發明的效果。
作為羥基胺化合物,並無特別限制,但是作為較佳的態樣,未經取代的羥基胺及羥基胺衍生物以及其鹽為較佳。
作為羥基胺衍生物並無特別限制,但是例如可舉出O-甲基羥基胺、O-乙基羥基胺、N-甲基羥基胺、N,N-二甲基羥基胺、N,O-二甲基羥基胺、N-乙基羥基胺、N,N-二乙基羥基胺、N,O-二乙基羥基胺、O,N,N-三甲基羥基胺、N,N-二羧基乙基羥基胺及N,N-二磺基乙基羥基胺等。
作為未經取代的羥基胺或羥基胺衍生物的鹽,上述之未經取代的羥基胺或羥基胺衍生物的無機酸鹽或有機酸鹽為較佳,Cl、S、N或P等非金屬原子能夠與氫原子鍵結而成之無機酸的鹽為更佳,鹽酸、硫酸及硝酸中的任一種酸的鹽為進一步較佳。其中,硝酸羥基胺(羥基胺硝酸鹽)、硫酸羥基胺(羥基胺硫酸鹽)、鹽酸羥基胺、磷酸羥基胺、硫酸N,N-二乙基羥基胺、硝酸N,N-二乙基羥基胺或該等混合物為較佳。
又,作為上述之未經取代的羥基胺或羥基胺衍生物的有機酸鹽,例如可舉出羥基銨檸檬酸鹽、羥基銨草酸鹽及羥基銨偏二氟等。
作為羥基胺化合物,從處理液的殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,其中,選自包含羥基胺及硫酸羥基胺之群組中之至少1種羥基胺化合物為較佳,未經取代的羥基胺及其硫酸鹽為更佳,未經取代的羥基胺為進一步較佳。
作為羥基胺化合物的含量的下限值,相對於處理液的總質量,0.1質量%以上為較佳,從處理液的殘渣去除性及缺陷抑制性更優異之觀點考慮,1質量%以上為較佳,3質量%以上為進一步較佳。作為羥基胺化合物的含量的上限值,相對於處理液的總質量,40質量%以下為較佳,從處理液的耐蝕性更優異之觀點考慮,30質量%以下為更佳,25質量%以下為進一步較佳,20質量%以下為特佳,15質量%以下為最佳。
羥基胺化合物可以單獨使用1種,亦可以使用2種以上。使用2種以上之情況下,該等總計含量在上述範圍內為較佳。
〔鹼性化合物〕
本發明的處理液包含鹼性化合物。再者、這裡指的“鹼性化合物”與上述羥基胺化合物為不同的化合物。亦即,羥基胺化合物不包含於鹼性化合物。
作為鹼性化合物,可以係無機鹼性化合物及有機鹼性化合物中的任一個,但從處理液的殘渣去除性及缺陷抑制性更優異之觀點考慮,有機鹼性化合物為較佳,胺化合物或含氮芳香族化合物為更佳。
從確保殘渣去除性能的同時能夠更有效地抑制基板上的金屬層(較佳為包含W(鎢)和/或Co(鈷)之金屬層)的腐蝕之觀點考慮,作為胺化合物,具有環狀結構之胺化合物為較佳。
具有環狀結構之胺化合物中,胺基可以僅存在於上述環狀結構中及上述環狀結構外的任一者,亦可以存在於該兩者中。其中,胺基為三級胺基之情況下,上述三級胺基存在於環狀結構中並且環狀結構為非芳香族的環狀結構(含氮非芳香環)亦為較佳。
作為胺化合物,例如可舉出四氫糠胺、N-(2-胺基乙基)哌𠯤、1,8-二吖雙環[5.4.0]-7-十一烯(DBU)、1,4-二吖雙環[2.2.2]辛烷、羥基乙基哌𠯤、哌𠯤、2-甲基哌𠯤、反式-2,5-二甲基哌𠯤、順式-2,6-二甲基哌𠯤、2-哌啶甲醇、環己基胺、1,5-二吖雙環[4,3,0]-5-壬烯、二伸乙三胺、三伸乙四胺及四伸乙基五胺等。
其中,從確保殘渣去除性能的同時更有效地抑制基板上的金屬層(較佳為包含Co或Co合金之金屬層)的腐蝕之觀點考慮,作為胺化合物,四氫糠胺、N-(2-胺基乙基)哌𠯤、1,8-二吖雙環[5.4.0]-7-十一烯或1,4-二吖雙環[2.2.2]辛烷為較佳。
胺化合物的分子量係50~500為較佳,75~400為更佳,100~300為進一步較佳。
作為含氮芳香族化合物,並無特別限制,例如經取代或未經取代的苯并三唑為較佳。作為經取代的苯并三唑,例如被烷基或芳基取代之苯并三唑為較佳。
作為經取代或未經取代的苯并三唑,具體而言,可舉出苯并三唑(BTA)及5-甲基-1H-苯并三唑(5M-BTA)等。
鹼性化合物可以單獨使用1種,亦可以使用2種以上。
相對於處理液的總質量,鹼性化合物的含量(使用2種以上時為其總計含量)例如為0.1~20質量%,0.5~15質量%為較佳。
〔有機溶劑〕
本發明的處理液包含有機溶劑。
作為有機溶劑,並無特別限制,但醇系溶劑為較佳,水溶性醇系溶劑為更佳。
作為醇系溶劑,例如可舉出烷烴二醇、伸烷基二醇、烷氧基醇、飽和脂肪族一元醇、不飽和非芳香族一元醇及三價以上的醇等。
作為烷烴二醇,例如可舉出二醇、2-甲基-1,3-丙烷二醇、1,2-丙烷二醇、1,3-二羥基丙烷、2-甲基戊烷-2,4-二醇、2,2-二甲基-1,3-己二醇、1,4-二羥基丁烷、1,3-丁二醇、1,2-丁二醇、2,3-丁二醇、2,5-二羥基-2,5-二甲基己烷、頻哪醇及伸烷基二醇等。
作為伸烷基二醇,例如可舉出乙二醇、丙二醇、二乙二醇、二丙二醇、三乙二醇及四乙二醇等。
作為烷氧基醇,例如可舉出3-甲氧基-1-丁醇、3-甲氧基-3-甲基丁醇、1-甲氧基-2-丁醇及二醇單醚等。
作為二醇單醚,例如可舉出乙二醇單甲醚、乙二醇單乙醚、乙二醇單正丙醚、乙二醇單異丙醚、乙二醇單丁醚(EGBE)、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單丁醚、三乙二醇單甲醚、三乙二醇單乙醚、三乙二醇單丁醚、1-甲氧基-2-丙醇、2-甲氧基-1-丙醇、1-乙氧基-2-丙醇、2-乙氧基-1-丙醇、丙二醇單正丙醚、二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單正丙醚、三丙二醇單乙醚、三丙二醇單甲醚、乙二醇單苄醚及二乙二醇單苄醚等。
作為飽和脂肪族一元醇,例如可舉出甲醇、乙醇、正丙醇、異丙醇、1-丁醇、2-丁醇、異丁醇、第三丁醇、2-戊醇、第三戊醇及1-己醇等。
作為不飽和非芳香族一元醇,例如可舉出烯丙醇、炔丙基醇、2-丁烯醇、3-丁烯醇及4-戊烯-2-醇等。
作為包含環結構之低分子量的醇,例如可舉出四氫糠醇、糠醇及1,3-環戊烷二醇等。
作為三價以上的醇,例如可舉出甘油等。
其中,作為有機溶劑,鏈烷二醇(較佳為2-甲基戊烷-2,4-二醇)、烷氧基醇(較佳為3-甲氧基-3-甲基丁醇)或二醇單醚(較佳為EGBE)為較佳。
作為有機溶劑的分子量,32~250為較佳,40~200為更佳,50~150為進一步較佳。
從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,作為有機溶劑的含量的下限值,相對於處理液的總質量,1質量%以上為較佳,2質量%以上為更佳。從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,作為有機溶劑的含量的上限值,相對於處理液的總質量,40質量%以下為較佳,30質量%以下為更佳,25質量%以下為進一步較佳。
有機溶劑可以單獨使用1種,亦可以使用2種以上。使用2種以上之情況下,該等總計含量在上述範圍內為較佳。
〔第1金屬離子〕
本發明的處理液包含選自包含Na、Al、K、Ca、Cr、Fe、Ni及Zn之群組中之1種以上的第1金屬離子。
本發明的處理液中、從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,作為第1金屬離子的總計含量的下限值,相對於處理液的總質量為7.0質量ppb以上,8.0質量ppb以上為較佳,9.0質量ppb以上為更佳。又,相對於處理液的總質量,第1金屬離子的總計含量的上限值為800.0質量ppb以下,從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,700.0質量ppb以下為較佳,600.0質量ppb以下為更佳。
從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,相對於處理液的總質量,處理液中所包含之第1金屬離子中的至少一種金屬離子的含量係1.0~100.0質量ppb為較佳。
從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,處理液中所包含之第1金屬離子為2種以上,並且,相對於處理液的總質量,各金屬離子的含量均係1.0~100.0質量ppb為較佳,處理液包含選自包含Na、Al、K、Ca、Cr、Fe、Ni及Zn之群組中之所有的金屬離子作為第1金屬離子,並且,相對於處理液的總質量,各金屬離子的含量均係1.0~100.0質量ppb為更佳。
從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,處理液中,作為第1金屬離子,至少包含Ca離子為較佳。
第1金屬離子可以為在處理液中所包含之各成分(原料)中不可避免地包含之金屬離子,亦可以為在製造、儲存和/或移送處理液時不可避免地包含之金屬離子,亦可以為有意添加者。
作為在體系中有意添加第1金屬離子之方法,例如,可舉出添加包含所對應之金屬原子之金屬鹽之方法。作為金屬鹽的種類,並無特別限制,例如可舉出硫酸鹽、氯化物鹽及溴化物鹽等。
處理液中的金屬離子的種類及含量能夠利用SP-ICP-MS法(Single Particle Inductively Coupled Plasma Mass Spectrometry:單粒子-電感耦合等離子體質譜法)測定。
其中,SP-ICP-MS法與通常的ICP-MS法(感應耦合電漿質譜法)使用同樣的裝置,僅在資料分析上不同。SP-ICP-MS法的資料分析能夠利用市售的軟體實施。
ICP-MS法中,與其存在形態無關地進行測定作為測定對象之金屬成分的含量。因此,作為金屬成分的含量,對作為測定對象之金屬粒子和金屬離子的總計質量進行計量。
另一方面,能夠利用SP-ICP-MS法測定金屬粒子的含量。因此,能夠藉由從試樣中的金屬成分的含量減去金屬粒子的含量,來計算出試樣中的金屬離子的含量。
作為SP-ICP-MS法的裝置,例如可舉出Agilent Technologies Japan,ltd製、Agilent 8800 三重四極ICP-MS(inductively coupled plasma mass spectrometry:電感耦合等離子體質譜、半導體分析用、選項#200),並能夠利用實施例中所記載之方法測定。作為除上述以外的其他裝置,除了能夠使用PerkinElmer Co.,Ltd.製 NexION350S之外,還能夠使用Agilent Technologies Japan,ltd製、Agilent 8900。
〔水〕
本發明的處理液還包含水為較佳。
本發明的處理液中,水的含量並無特別限制,相對於處理液的總質量,15~98質量%為較佳,30~95質量%為更佳,50~95質量%為進一步較佳。
〔第2金屬離子〕
本發明的處理液還包含第2金屬離子為較佳。
第2金屬離子係選自包含Li、Mg、Mn、Cu、Ag、Pb及Co之群組中之1種以上的金屬離子。
本發明的處理液中、從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,作為第2金屬離子的總計含量的下限值,相對於處理液的總質量,0.01質量ppb以上為較佳,0.05質量ppb以上為更佳,0.1質量ppb以上為進一步較佳。又,從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,相對於處理液的總質量,第2金屬離子的總計含量的上限值係10.0質量ppb以下為較佳,8.0質量ppb以下為更佳,6.0質量ppb以下為進一步較佳。
從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,相對於處理液的總質量,處理液中所包含之第2金屬離子中的至少一種金屬離子的含量係0.01~1.0質量ppb為較佳。
從殘渣去除性能及耐蝕性的經時穩定性更優異之觀點考慮,處理液中所包含之第2金屬離子為2種以上,並且,相對於處理液的總質量,各金屬離子的含量均係0.01~1.0質量ppb為較佳,處理液包含選自包含Li、Mg、Mn、Cu、Ag、Pb及Co之群組中之所有的金屬離子作為第2金屬離子,並且,相對於處理液的總質量,各金屬離子的含量均係0.01~1.0質量ppb為更佳。
第2金屬離子可以為在處理液中所包含之各成分(原料)中不可避免地包含之金屬離子,亦可以為在製造、儲存和/或移送處理液時不可避免地包含之金屬離子,亦可以為有意添加者。
作為在體系中有意添加第2金屬離子之方法,例如,可舉出添加包含所對應之金屬原子之金屬鹽之方法。作為金屬鹽的種類,並無特別限制,例如可舉出硫酸鹽、氯化物鹽及溴化物鹽等。
再者、關於處理液中的第2金屬離子的含量的測定方法,與上述第1金屬離子的含量的測定方法相同。
〔螯合劑〕
本發明的處理液還包含螯合劑為較佳。螯合劑與殘渣中所包含之已氧化之金屬螯合。
作為螯合劑,並無特別限制,但聚胺基聚羧酸為較佳。
聚胺基聚羧酸係具有複數個胺基及複數個羧酸基之化合物。作為聚胺基聚羧酸,例如可舉出單-或聚伸烷基多胺聚羧酸、聚胺基烷聚羧酸、聚胺基烷醇聚羧酸及羥基烷基醚多胺聚羧酸。
作為聚胺基聚羧酸,例如可舉出丁二胺四乙酸、二乙烯三胺五乙酸(DTPA)、乙二胺四丙酸、三乙四胺六乙酸、1,3-二胺基-2-羥基丙烷-N,N,N’,N’-四乙酸、丙二胺四乙酸、乙二胺四乙酸(EDTA)、反-1,2-環己二胺四乙酸、乙二胺二乙酸、乙二胺二丙酸、1,6-六亞甲基-二胺-N,N,N’,N’-四乙酸、N,N-雙(2-羥基苄基)乙二胺-N,N-二乙酸、二胺基丙烷四乙酸、1,4,7,10-四氮雜環十二烷-四乙酸、二胺基丙醇四乙酸及(羥乙基)乙二胺三乙酸等。其中,二乙烯三胺五乙酸(DTPA)、乙二胺四乙酸(EDTA)或反-1,2-環己二胺四乙酸為較佳。
本發明的處理液中、螯合劑的含量並無特別限制,相對於處理液的總質量,0.01~5質量%為較佳,0.01~3質量%為更佳。
螯合劑可以單獨使用1種,亦可以使用2種以上。使用2種以上之情況下,該等總計含量在上述範圍內為較佳。
〔其他成分〕
本發明的處理液除了上述成分以外,還可以包含其他成分。
作為其他成分,例如可舉出界面活性劑、四級氫氧化銨鹽、還原劑、pH調節劑、耐蝕材、消泡劑、防銹劑及防腐劑等。
〔處理液的pH〕
作為本發明的處理液的pH,並無特別限制,但從殘渣去除性能優異之觀點考慮,在鹼性區域為較佳。其中,從相對於Co之耐蝕性能更優異之觀點考慮,處理液的pH係8以上為較佳,9以上為更佳,10以上為進一步較佳。再者、從相對於W之耐蝕性更優異之觀點考慮,作為處理液的pH,14以下為較佳,12以下為更佳。
為了在上述pH的範圍內製備處理液,處理液亦可以還包含pH調整劑。
〔用途〕
本發明的處理液,可以較佳地用作半導體器件用處理液。本發明中,“半導體器件用”係指製造半導體器件時所使用。本發明的處理液亦能夠在用於製造半導體器件之任一步驟中使用,例如亦能夠在基板上存在之絕緣膜、抗蝕劑或防反射膜的處理、乾式蝕刻殘渣(光阻膜的殘渣及金屬硬遮罩的殘渣等)的處理及灰化殘渣的處理等中使用。
作為處理液的更具體的用途,可舉出在為了使用感光化射線性或感放射線性樹脂組成物來形成光阻膜之前改良組成物的塗佈性而塗佈於基板上之預濕液、用於去除乾式蝕刻殘渣等殘渣之洗淨液、用於去除圖案形成中所使用之各種抗蝕劑膜(較佳為光阻膜)之溶液(例如去除液及剝離液等)及為了從基板去除永久膜(例如濾色器、透明絕緣膜、樹脂製的透鏡)等而使用之溶液(例如去除液及剝離液等)等。又,亦能夠用作圖案形成用各種感光化射線性或感放射線性樹脂組成物層的顯影液。
又,亦能夠用作用於從化學機械研磨後的基板去除金屬雜質或微粒子等殘渣之洗淨液。去除永久膜後的基板有時會再次在半導體器件中使用,因此永久膜的去除亦包含於半導體器件的製造步驟中。
亦可以用作相對於具有金屬層之基板的上述金屬層之處理用蝕刻液。
上述用途中,能夠較佳地用作用於去除乾式蝕刻殘渣的洗淨液、用於去除圖案形成中所使用之各種抗蝕劑膜的溶液或用於從化學機械研磨後的基板去除金屬雜質或微粒子等殘渣之洗淨液。
本發明的處理液在上述用途中可以僅用於1個用途,亦可以用於2個以上的用途。
最近,隨著半導體器件的微細化及高機能化的發展,作為用於配線材料及插塞材料等之金屬,要求更高的導電性。例如,可預測用作配線材料之金屬從Al(鋁)及Cu(銅)替換成Co。又,可預測關於用作插塞材料之金屬,除了W以外,對Co的需求更加提高。
因此,作為處理液的特性,相對於W及Co之腐蝕較少為較佳。
本發明的處理液用於處理具有包含選自包含W及Co之群組中之1種以上之金屬層之基板為較佳。又,本發明的處理液用作用於製造包含基板之半導體器件的處理液為較佳,該基板具有包含選自包含W及Co之群組中之1種以上之金屬層。
另外,上述包含選自包含W及Co之群組中之1種以上之金屬層可以為僅由W和/或Co構成之金屬層,亦可以為作為包含W和/或Co之合金之金屬層,還可以為包含W和/或Co之其他形態的金屬層。
[處理液的製造方法]
〔處理液的調液方法〕
上述處理液能夠藉由公知的方法來製造。以下,對上述處理液之製造方法進行詳述。
<原料純化製程>
上述處理液的製造中,期望在事前藉由蒸餾、離子交換或過濾等來純化用於製備處理液的原料中的任一種以上。作為純化的程度,例如純化至原料的純度係99%以上為較佳,純化至純度係99.9%以上為進一步較佳。
作為純化方法並無特別限制,可舉出通過離子交換樹脂或RO膜(Reverse Osmosis Membrane,反滲透膜)等之方法、蒸餾或後述之過濾等方法。具體而言,例如可舉出對反浸透膜等通液來進行了1次純化之後,對由陽離子交換樹脂、陰離子交換樹脂或混床型離子交換樹脂構成之純化裝置通液來實施2次純化之方法等。
另外,純化處理亦可以組合複數個上述之公知的純化方法來實施。
又,純化處理亦可以實施複數次。
<過濾>
作為過濾器,只要為以往用於過濾用途等者,就無特別限制。例如可舉出基於聚四氟乙烯(PTFE)及四氟乙烯全氟烷基乙烯醚共聚物(PFA)等氟樹脂、尼龍等聚醯胺系樹脂以及聚乙烯及聚丙烯(PP)等聚烯烴樹脂(包含高密度或超高分子量)等之過濾器。該等材料中,選自包括聚乙烯、聚丙烯(包含高密度聚丙烯)、PTFE及PFA等氟樹脂以及尼龍等聚醯胺系樹脂之群組中之材料為較佳,其中,PTFE及PFA等氟樹脂的過濾器為進一步較佳。藉由使用由該等材料形成之過濾器,能夠有效地去除容易成為缺陷的原因的極性高的異物。
作為過濾器的臨界表面張力,70mN/m以上為較佳,95mN/m以下為更佳,75~85mN/m為進一步較佳。另外,臨界表面張力的值係製造商的標稱值。藉由使用臨界表面張力在上述範圍的過濾器,能夠有效地去除容易成為缺陷的原因的極性高的異物。
過濾器的孔徑係2~20nm左右為較佳,2~15nm為更佳。藉由設為該範圍,能夠抑制過濾堵塞的同時確實地去除原料中所包含之雜質或聚集物等微細的異物。
使用過濾器時,亦可以組合不同之過濾器。此時,第1過濾器的過濾可以僅進行1次,亦可以進行2次以上。組合不同之過濾器來進行2次以上過濾之情況下,第2次以後的孔徑與第1次的過濾的孔徑相同或比第1次的過濾的孔徑小為較佳。又,亦可以組合在上述之範圍內不同孔徑的第1過濾器。其中的孔徑能夠參閱過濾器廠商的標稱值。作為市售的過濾器,例如能夠從由NIHON PALL LTD.、Advantec Toyo Kaisha,ltd.、Nihon Entegris K.K.(Formerly Nippon Mykrolis Corporation)或KITZ MICROFILTER CORPORATION等提供之各種過濾器中選擇。又,亦能夠使用聚醯胺製“P-尼龍過濾器(孔徑0.02μm、臨界表面張力77mN/m)”;(NIHON PALL LTD.製)、高密度聚乙烯製“PE・清潔過濾器(孔徑0.02μm)”;(NIHON PALL LTD.製)及高密度聚乙烯製“PE・清潔過濾器(孔徑0.01μm)”;(NIHON PALL LTD.製)。
第2過濾器能夠使用由與上述之第1過濾器相同的材料等形成之過濾器。第2過濾器的孔徑係1~10nm左右為較佳。
又,本發明中,進行過濾製程時的溫度在室溫(25℃)以下為較佳,23℃以下為更佳,20℃以下為進一步較佳。又,0℃以上為較佳,5℃以上為更佳,10℃以上為進一步較佳。
過濾的步驟中,能夠去除粒子性的異物或雜質,但是若在上述溫度下,則溶解於原料中之上述粒子性的異物和/或雜質的量變少,因此藉由過濾有效地去除。
又,為了將最終得到之處理液中的金屬離子的含量調整在如上述之範圍內,關於一部分或全部的原料及其混合物,亦可以以調整成一定量的金屬離子殘留的方式實施純化處理。
<調液製程>
本發明的處理液的調液並無特別限制,例如能夠藉由混合上述之各成分來製造。混合上述之各成分之順序和/或時序並無特別限制,例如可舉出將羥基胺化合物預先分散於調整了pH之水中並依序混合既定的成分之方法。
[試劑盒及濃縮液]
本發明中的處理液亦可以作為將該原料分割成複數個之試劑盒。
作為將處理液作為試劑盒之具體的方法,例如可舉出作為第1液準備在有機溶劑中分散或溶解羥基胺化合物及有機鹼性化合物之液體組成物,作為第2液準備包含第1金屬離子、第2金屬離子及其他成分之液體組成物之態樣。
又,處理液亦可以使用濃縮液來準備。準備處理液的濃縮液之情況下,其濃縮倍率依據所構成之組成適當地確定,但是5~2000倍為較佳。亦即,處理液可以將濃縮液稀釋成5~2000倍來使用。
〔容器(收容容器)〕
本發明的處理液只要(與是否為試劑盒及濃縮液無關)腐蝕性等沒有問題,則能夠填充於任意的容器中來保管、運輸並且使用。作為容器,用於以半導體用途時容器內的清潔度高且雜質的溶出少者為較佳。作為能夠使用之容器,可舉出AICELLO CHEMICAL CO.,ltd.製的“Clean-Bottle”系列及KODAMA PLASTICS Co.,Ltd.製的“Pure bottle”等,但是並不限制於該等。該容器的內壁由選自包括聚乙烯樹脂、聚丙烯樹脂及聚乙烯-聚丙烯樹脂之群組中之1種以上的樹脂或與它們不同之樹脂或不銹鋼、赫史特合金、英高鎳合金及蒙乃爾合金等實施了防銹及金屬溶出防止處理之金屬形成為較佳。
作為上述不同之樹脂,氟系樹脂(全氟樹脂)為較佳。如上所述,與內壁為聚乙烯樹脂、聚丙烯樹脂或聚乙烯-聚丙烯樹脂之容器相比,藉由使用內壁為氟系樹脂之容器,能夠抑制伸乙基或伸丙基的寡聚物的溶出等不良情況的產生。
作為該等內壁為氟系樹脂之容器的具體例,例如可舉出Entegris,Inc.製 FluoroPurePFA複合管柱等。又,亦能夠使用日本特表平3-502677號公報的第4頁等、國際公開第2004/016526號小冊子的第3頁等及國際公開第99/046309號小冊子的第9頁及16頁等中記載之容器。
又,容器的內壁除了上述之氟系樹脂以外,亦較佳地使用石英及經電解研磨之金屬材料(亦即,已電解研磨的金屬材料)。
作為用於上述經電解研磨之金屬材料的製造之金屬材料,包含選自包含鉻及鎳之群組中之至少1種,鉻及鎳的含量的總計相對於金屬材料總質量超過25質量%之金屬材料為較佳,例如可舉出不銹鋼及鎳-鉻合金等。
金屬材料中的鉻及鎳的含量的總計相對於金屬材料總質量係30質量%以上為進一步較佳。
另外,作為金屬材料中的鉻及鎳的含量的總計的上限值並無特別限制,但是通常係90質量%以下為較佳。
作為不銹鋼並無特別限制,能夠使用公知的不銹鋼。其中,包含8質量%以上的鎳之合金為較佳,包含8質量%以上的鎳之奧氏體系不銹鋼為進一步較佳。作為奧氏體系不銹鋼,例如可舉出SUS(Steel Use Stainless,鋼用不鏽鋼)304(Ni含量8質量%、Cr含量18質量%)、SUS304L(Ni含量9質量%、Cr含量18質量%)、SUS316(Ni含量10質量%、Cr含量16質量%)及SUS316L(Ni含量12質量%、Cr含量16質量%)等。
作為鎳-鉻合金並無特別限制,能夠使用公知的鎳-鉻合金。其中,鎳含量係40~75質量%、鉻含量係1~30質量%的鎳-鉻合金為較佳。
作為鎳-鉻合金,例如可舉出赫史特合金(產品名以下相同。)、蒙乃爾合金(產品名以下相同)及英高鎳合金(產品名以下相同)等。更具體而言,可舉出赫史特合金C-276(Ni含量63質量%、Cr含量16質量%)、赫史特合金-C(Ni含量60質量%、Cr含量17質量%)及赫史特合金C-22(Ni含量61質量%、Cr含量22質量%)等。
又,鎳-鉻合金依據需要除了上述之合金以外,亦可以包含硼、矽、鎢、鉬、銅及鈷等。
作為對金屬材料進行電解研磨之方法並無特別限制,能夠使用公知的方法。例如能夠使用日本特開2015-227501號公報的[0011]-[0014]段及日本特開2008-264929號公報的[0036]-[0042]段等中所記載之方法。
可推測金屬材料藉由進行電解研磨,表面的鈍化層中的鉻的含量變得多於母相的鉻的含量。因此,從由經電解研磨之金屬材料塗覆之內壁難以向處理液中流出金屬元素,因此可推測能夠得到金屬雜質量減少項所述之處理液。
另外,金屬材料精拋為較佳。拋光的方法並無特別限制,能夠使用公知的方法。用於精拋之研磨粒的尺寸並無特別限制,但是從金屬材料的表面的凹凸更容易變小的觀點考慮,#400以下為較佳。
另外,拋光在電解研磨之前進行為較佳。
又,金屬材料亦可以組合1或2個以上的改變研磨粒的尺寸等粗細來進行之複數個階段的拋光、酸洗淨及磁性流體研磨等來進行處理。
本發明中,有時將具有上述容器及收容於該容器內之上述處理液者稱為處理液收容體。
該等容器在填充處理液之前洗淨其內部為較佳。洗淨中所使用之液體中降低該液中的金屬雜質量為較佳。本發明的處理液在製造後亦可以裝入加侖瓶或塗層瓶等容器中來運輸及保管。
以防止保管時的處理液中的成分的變化之目的,亦可以將容器內替換成純度99.99995體積%以上的惰性氣體(氮氣或氬氣等)。尤其,含水率少的氣體為較佳。又,運輸及保管時,可以為常溫,但是為了防止變質,亦可以將溫度控制在-20℃至20℃的範圍內。
(無塵室)
包括本發明的處理液的製造、收容容器的開封和/或洗淨、處理液的填充等之操作、處理分析及測量均在無塵室進行為較佳。無塵室滿足14644-1無塵室基準為較佳。滿足ISO(國際標準化機構)等級1、ISO等級2、ISO等級3、ISO等級4中的任一個為較佳,滿足ISO等級1或ISO等級2為更佳,滿足ISO等級1為進一步較佳。
[基板的洗淨方法]
作為使用了本發明的處理液之基板的洗淨方法的態樣之一,可舉出具有使用上述處理液來洗淨具有包含選自包含W及Co之群組中之1種以上之金屬層之基板之洗淨步驟(以下亦稱為“洗淨步驟B”。)之態樣。又,上述態樣的洗淨方法亦可以具有在洗淨步驟B之前製備上述處理液之處理液製備步驟(以下稱為“處理液製備步驟A”。)。
以下基板的洗淨方法的說明中,將在洗淨步驟B之前實施處理液製備步驟A之情況作為一例來表示,但是並不限制於此,本發明的基板的洗淨方法亦可以使用預先準備之上述處理液來進行。
〔洗淨對象物〕
本發明的基板的洗淨方法的洗淨對象物係具有包含選自包含W及Co之群組中之1種以上之金屬層之基板為較佳。作為本發明的基板的洗淨方法的洗淨對象物,例如可舉出在基板上依序至少具備包含選自包含上述W及Co之群組中之1種以上之金屬層(以下,簡稱為“金屬層”。)、層間絕緣層及金屬硬遮罩之積層物。積層物還可以藉由經由乾式蝕刻步驟等,具有以露出金屬層的表面的方式從金屬硬遮罩的表面(開口部)朝向基板形成之孔。
如上述的具有孔之積層物之製造方法並無特別限制,但是通常可舉出如下方法,亦即,將金屬硬遮罩用作遮罩來對依序具有基板、金屬層、層間絕緣層及金屬硬遮罩之處理前積層物實施乾式蝕刻步驟,並以露出金屬層的表面的方式對層間絕緣層進行蝕刻,藉此設置貫穿金屬硬遮罩及層間絕緣層內之孔。
另外,金屬硬遮罩之製造方法並無特別限制,例如可舉出如下方法,亦即,首先在層間絕緣層上形成包含既定成分之金屬層,並在該金屬層上形成既定圖案的抗蝕劑膜。接著,將抗蝕劑膜用作遮罩,對金屬層進行蝕刻,藉此製造金屬硬遮罩(亦即,金屬層被圖案化之膜)。
又,積層物可以具有除了上述層以外的層,例如可舉出蝕刻停止層、防反射層等。
圖1中示出表示本發明的基板的洗淨方法的洗淨對象物亦即積層物的一例之剖面示意圖。
圖1所示之積層物10在基板1上依序具備金屬層2、蝕刻停止層3、層間絕緣層4及金屬硬遮罩5,藉由經由乾式蝕刻步驟等,在既定位置形成有露出金屬層2之孔6。亦即,圖1所示之洗淨對象物係如下積層物:依序具備基板1、金屬層2、蝕刻停止層3、層間絕緣層4及金屬硬遮罩5,在金屬硬遮罩5的開口部的位置雙具備從其表面貫穿到金屬層2的表面之孔6。孔6的內壁11以由蝕刻停止層3、層間絕緣層4及金屬硬遮罩5組成之截面壁11a及由被露出之金屬層2組成之底壁11b構成,並附著有乾式蝕刻殘渣12。
本發明的基板的洗淨方法能夠較佳地用於以該等乾式蝕刻殘渣12的去除為目的之洗淨。亦即,乾式蝕刻殘渣12的去除性能優異的同時相對於洗淨對象物的內壁11(例如金屬層2等)之耐腐性能亦優異。
又,本發明的基板的洗淨方法亦可以在乾式蝕刻步驟之後實施於進行了乾灰化步驟之積層物。
以下,對上述之積層物的各層構成材料進行說明。
<金屬硬遮罩>
金屬硬遮罩包含至少1種選自包含Cu、Co、W、AlOx、AlN、AlOxNy、WOx、Ti、TiN、ZrOx、HfOx及TaOx之群組中之成分為較佳。其中,x、y分別為由x=1~3、y=1~2表示之數。
作為上述金屬硬遮罩的材料,例如可舉出TiN、WO2
及ZrO2
等。
<層間絕緣層>
層間絕緣層的材料並無特別限制,介電常數k為3.0以下的材料為較佳,介電常數k為2.6以下的材料為更佳。
作為具體的層間絕緣層的材料,可舉出SiO2
、SiOC系材料及聚醯亞胺等有機系聚合物等。
<蝕刻停止層>
蝕刻停止層的材料並無特別限制。作為具體的蝕刻停止層的材料,可舉出SiN、SiON、SiOCN系材料及AlOx等金屬氧化物。
<金屬層>
形成金屬層之配線材料至少包含W(鎢)或Co(鈷)。又,該等金屬亦可以為與其他金屬的合金。
本發明的配線材料還可以包含除了W及Co以外的金屬、氮化金屬或合金。具體而言,可舉出銅、鈦、鈦-鎢、氮化鈦、鉭、鉭化合物、鉻、鉻氧化物及鋁等。
<基板>
此處所述之“基板”中例如包括由單層組成之半導體基板及由多層組成之半導體基板。
構成由單層組成之半導體基板之材料並無特別限制,通常由矽、矽鍺、如GaAs的第III-V族化合物或該等的任意組合構成為較佳。
由多層構成之半導體基板之情況下,其結構並無特別限制,例如亦可以在上述矽等半導體基板上具有如金屬線及介電材料的互連結構(interconnect features)等露出之積體電路結構。作為用於互連結構之金屬及合金,可舉出鋁、與銅合金化之鋁、銅、鈦、鉭、鈷、矽、氮化鈦、氮化鉭及鎢,但是並不限制於該等。又,亦可以在半導體基板上具有層間介電質層、氧化矽、氮化矽、碳化矽及碳摻雜的氧化矽等層。
〔處理製程〕
以下,分別對處理液製備步驟A及洗淨步驟B進行詳述。
<處理液製備製程A>
處理液製備步驟A係製備上述處理液之步驟。本步驟中所使用之各成分如上所述。
本步驟的順序並無特別限制,例如可舉出藉由添加羥基胺化合物、鹼性化合物、有機溶劑、第1金屬離子及其他任意成分並進行攪拌混合來製備處理液之方法。另外,添加各成分之情況下,可以總括添加,亦可以分成複數次來添加。
又,包含於處理液之各成分使用分類成半導體等級者或分類成以其為基準之高純度等級者,並使用進行基於過濾之異物去除和/或基於離子交換樹脂等之離子成分減少者為較佳。
再者、在除了第1金屬離子之原料成分中包含有與第1金屬離子相應之金屬離子,並且其總計含量超過既定量時,可以在混合羥基胺化合物、鹼性化合物、有機溶劑及根據需要的其他任意成分之後,藉由基於過濾之異物去除和/或基於離子交換樹脂等之離子成分減少,製備包含既定量的第1金屬離子、羥基胺化合物、鹼性化合物、有機溶劑及根據需要的其他任意成分之處理液。
又,準備處理液的濃縮液之情況下,在實施洗淨步驟B之前,稀釋濃縮液來得到稀釋液之後,使用該稀釋液實施洗淨步驟B。此時,上述稀釋中使用包含水之稀釋液來進行為較佳。
<洗淨製程B>
作為用洗淨步驟B洗淨之洗淨對象物,可舉出上述之積層物,可例示如上所述實施乾式蝕刻步驟來形成孔之積層物10(參閱圖1)。另外,該積層物10在孔6內附著有乾式蝕刻殘渣12。
另外,亦可以在乾式蝕刻步驟之後,將進行了乾灰化步驟之積層物設為洗淨對象物。
使處理液與洗淨對象物接觸之方法並無特別限制,但是例如可舉出在放入罐中之處理液中浸漬洗淨對象物之方法、在洗淨對象物上對處理液進行噴霧之方法、在洗淨對象物上流過處理液之方法或該等的任意組合。從殘渣去除性能的觀點考慮,在處理液中浸漬洗淨對象物之方法為較佳。
處理液的溫度係90℃以下為較佳,25~80℃為更佳,30~75℃為進一步較佳,40~70℃為特佳。
洗淨時間能夠依據所使用之洗淨方法及處理液的溫度來調整。
用分批浸漬方式(在處理槽內浸漬複數片洗淨對象物來進行處理之分批方式)進行洗淨之情況下,洗淨時間在60分鐘以內為較佳,1~60分鐘為更佳,3~20分鐘為進一步較佳,4~15分鐘為特佳。
用單片方式進行洗淨之情況下,洗淨時間係10秒鐘~5分鐘為較佳,15秒鐘~4分鐘為更佳,15秒鐘~3分鐘為進一步較佳,20秒鐘~2分鐘為特佳。
另外,為了更加增進處理液的洗淨能力,亦可以使用機械攪拌方法。
作為機械攪拌方法,例如可舉出使處理液在洗淨對象物上循環之方法、使處理液在洗淨對象物上流過或噴霧之方法及用超聲波或兆頻攪拌處理液之方法等。
<沖洗製程B2>
使用了本發明的處理液之基板的洗淨方法在洗淨步驟B之後,還可以具有用溶劑洗淨洗淨對象物之步驟(以下稱為“沖洗步驟B2”。)。
沖洗步驟B2與洗淨步驟B連續進行,係用沖洗溶劑(沖洗液)歷時5秒鐘~5分鐘進行沖洗之步驟為較佳。沖洗步驟B2亦可以使用上述機械攪拌方法來進行。
作為沖洗溶劑,例如可舉出脫離子(DI:De Ionize)水、甲醇、乙醇、異丙醇、N-甲基吡咯啶酮、γ-丁內酯、二甲亞碸、乳酸乙基及丙二醇單甲醚乙酸酯,但是並不限制於該等。或者,亦可以利用pH>8的水性沖洗液(經稀釋之水性氫氧化銨等)。
作為沖洗溶劑,氫氧化銨水溶液、DI水、甲醇、乙醇或異丙醇為較佳,氫氧化銨水溶液、DI水或異丙醇為更佳,氫氧化銨水溶液或DI水為進一步較佳。
作為使沖洗溶劑與洗淨對象物接觸之方法,亦能夠相同地適用使上述之處理液與洗淨對象物接觸之方法。
沖洗步驟B2中的沖洗溶劑的溫度係16~27℃為較佳。
<乾燥製程B3>
使用了本發明的處理液之基板的洗淨方法亦可以在沖洗步驟B2之後具有使洗淨對象物乾燥之乾燥步驟B3。
作為乾燥方法並無特別限制。作為乾燥方法,例如可舉出旋轉乾燥法、使乾性氣體流過洗淨對象物上之方法、藉由如加熱板或紅外線燈的加熱機構對基板進行加熱之方法、馬蘭哥尼乾燥法、諾塔哥尼乾燥法、IPA(異丙醇)乾燥法或該等的任意組合。
乾燥時間依賴於所使用之既定方法,但是通常係30秒鐘~幾分鐘為較佳。
使用了本發明的處理液之基板的洗淨方法的洗淨對象物並不限制於如上述之在基板上依序至少具備包含選自包含W及Co之群組中之1種以上之金屬層、層間絕緣層及金屬硬遮罩之積層物。亦即,例如亦能夠用於在基板上依序至少具備包含選自包括W及Co之群組中之1種以上之金屬層、層間絕緣層及光阻膜之積層物的光刻膠蝕刻殘渣的去除。
[實施例]
以下,依據實施例對進一步進行詳細說明。以下實施例所示之材料、使用量、比例、處理內容及處理步驟等,只要不脫離本發明的趣旨,則能夠適當變更。然而,本發明的範圍並非係藉由以下所示之實施例限制地解釋者。另外,只要沒有特別說明“%”係指“質量%”。
[處理液的製備1]
分別製備了表1所示之處理液(處理液1~8)。另外,各處理液中,所使用之各種成分的含量(均為質量基準)如表中所示。
其中,示於表1之各種成分皆使用分類成半導體等級者或分類成以其為基準之高純度等級者,關於液體成分,使用了進一步經複數次過濾而純化者。
混合各成分以成為表1中所記載之配比來製備了混合液。再者、第1金屬離子及第2金屬離子藉由添加包含所對應之金屬原子之金屬鹽(金屬鹽化物)而導入到液體中。
處理液中的金屬離子的含量藉由已敘述的方法進行了測定。檢測極限者使用了在適當濃縮藥液之後進行測定並轉換之值。
表1中的縮寫如下。
HA:羥基胺
HAS:硫酸羥基胺
DTPA:二乙三胺五乙酸
EGBE:乙二醇單丁醚
5M―BTA:5-甲基-1H-苯并三唑
DBU:二氮雜雙環十一碳烯
[評價]
對在上述製備之各處理液進行了下述所示之各種評價。
〔相對於Co膜之耐蝕性的經時穩定性〕
使用實施例及比較例的各處理液,對相對於Co膜之耐蝕性的經時穩定性進行了評價。具體如下。
<具備Co膜之基板的製作>
準備了藉由CVD(Chemical Vapor Deposition:化學氣相沉積)法在基板(矽晶圓(直徑:12英吋))的其中一個表面上形成有Co膜之基板。
<蝕刻試驗>
使用所製備之實施例及比較例的各處理液,對Co膜進行了蝕刻處理。再者,在本試驗中測量之相對於Co膜之蝕刻速度愈低,相對於Co膜之耐蝕性愈良好。以下,詳細說明蝕刻試驗。
(1)新鮮時的蝕刻率(ERFr
)
在剛製備的處理液(以下還稱作“新鮮”。)中將形成有上述Co膜之基板(65℃)浸漬了5分鐘。接著,由浸漬於處理液前後的Co膜的膜厚之差,計算處理液相對於Co膜之蝕刻率(Å/分鐘),將其蝕刻率設為ERFr
。
另外,關於處理前後的Co膜的膜厚,使用橢圓偏光法(分光橢圓偏振計、產品名“Vase”、J.A. Woollam Japan Co.,Inc.製)在測量範圍250-1000nm、測量見方度70度及75度的條件下進行了測量。
(2)熱循環處理後的蝕刻率(ERAge
)
在24℃、大氣壓下,將實施例及比較例的各處理液封裝於樹脂製容器中。樹脂製容器為AICELLO CHEMICAL CO.,ltd.製Clean-Bottle,且使用了容器的總容量為500ml者。而且,針對封裝於容器之各處理液,以在冷藏保管溫度即-5℃下5天→在室溫(24℃)下2天總計7天為1組,對其反復實施了26次(182天)的熱循環處理。接著,在進行了上述熱循環處理後的處理液(65℃)中將形成有上述Co膜之基板浸漬5分鐘,並由浸漬於處理液前後的Co膜的膜厚之差計算處理液相對於Co膜之蝕刻率(Å/分鐘),且將該蝕刻率設為ERAge
。
(3)蝕刻率維持率的估算及評價
基於所獲得的之蝕刻率ERFr
及ERAge
,估算蝕刻率的維持率(蝕刻率維持率(%)=ERAge
/ERFr
×100),對相對於Co膜之耐蝕性的經時穩定性進行了評價。
再者、蝕刻率維持率(%)愈接近100%,相對於Co膜之耐蝕性的維持率愈良好。亦即,相對於Co膜之耐蝕性的經時穩定性良好。
基於以下評價基準對蝕刻率維持率(%)進行了評價。
(評價基準)
“AAA”:蝕刻率維持率(%)為100~102%
“AA”:蝕刻率維持率(%)超過102%且為106%以下
“A+”:蝕刻率維持率(%)超過106%且為114%以下
“A-”:蝕刻率維持率(%)超過114%且為130%以下
“B”:蝕刻率維持率(%)超過130%且為200%以下
“C”:蝕刻率維持率(%)超過200%且為430%以下
“D”:蝕刻率維持率(%)超過430%
再者、作為蝕刻率維持率(%),100~114%為較佳,100~106%為更佳,100~102%為進一步較佳。
〔殘渣去除性的經時穩定性〕
使用實施例及比較例的各處理液,對殘渣去除性的經時穩定性進行了評價。
另外,以下的評價中,準備對MHM(金屬硬遮罩)進行電漿蝕刻時所產生之殘渣的一種亦即由TiO2
構成之模型膜,對其蝕刻速度進行評價,藉此對殘渣去除性的經時穩定性進行了評價。由TiO2
構成之模型膜(TiO2
膜)以1000Å的膜厚設置於Si基板上。
<蝕刻試驗>
使用所製備之實施例及比較例的各處理液,對TiO2
膜進行了蝕刻處理。再者、在本試驗中測量之相對於TiO2
膜之蝕刻率愈高,殘渣去除性能愈良好。以下,詳細說明蝕刻試驗。
(1)新鮮時的蝕刻率(ERFr
)
在剛製備的處理液(“新鮮”)(65℃)中將具備有上述TiO2
膜之基板浸漬了5分鐘。接著,由浸漬於處理液前後的TiO2
膜的膜厚之差,計算處理液相對於TiO2
膜之蝕刻率(Å/分鐘),將其蝕刻率設為ERFr
。
另外,關於處理前後的TiO2
膜的膜厚,使用橢圓偏光法(分光橢圓偏振計、產品名“Vase”、J.A. Woollam Japan Co.,Inc.製)在測量範圍250-1000nm、測量見方度70度及75度的條件下進行了測量。
(2)熱循環處理後的蝕刻率(ERAge
)
在24℃、大氣壓下,將實施例及比較例的各處理液封裝於樹脂製容器中。樹脂製容器為AICELLO CHEMICAL CO.,ltd.製Clean-Bottle,且使用了容器的總容量為500ml者。而且,針對封裝於容器之各處理液,以在冷藏保管溫度即-5℃下5天→在室溫(24℃)下2天總計7天為1組,對其反復實施了26次(182天)的熱循環處理。接著,在進行了上述熱循環處理後的處理液(65℃)中將具備有上述TiO2
膜之基板浸漬5分鐘,並由浸漬於處理液前後的TiO2
膜的膜厚之差計算處理液相對於TiO2
膜之蝕刻率(Å/分鐘),且將該蝕刻率設為ERAge
。
(3)蝕刻率維持率的估算及評價
基於所獲得的之蝕刻率ERFr
及ERAge
,估算蝕刻率的維持率(蝕刻率維持率(%)=ERAge
/ERFr
×100),對殘渣去除性的經時性能的經時穩定性進行了評價。
再者、蝕刻率維持率(%)愈接近100%,殘渣去除性能的維持率愈良好。亦即,殘渣去除性的經時穩定性良好。
基於以下評價基準對蝕刻率維持率(%)進行了評價。
(評價基準)
“AAA”:蝕刻率維持率(%)為97~100%
“AA”:蝕刻率維持率(%)為92%以上且小於97%
“A+”:蝕刻率維持率(%)為86%以上且小於92%
“A-”:蝕刻率維持率(%)為78%以上且小於86%
“B”:蝕刻率維持率(%)為70%以上且小於78%
“C”:蝕刻率維持率(%)為60%以上且小於70%
“D”:蝕刻率維持率(%)小於60%
再者、作為蝕刻率維持率(%),86~100%為較佳,92~100%為更佳,97~100%為進一步較佳。
[結果]
下述表中示出了各處理液的摻合及試驗的結果。
在表1中,作為水的含量而示出之“剩餘部分”的記載係指最終得到之處理液調整為包含各成分的欄中所示之量的成分,除此以外剩餘的成分為水。
在表2(其1)~表9(其3)中、“ERFr(Å/min)”的欄中,“Co ERFr”及“TiO2
ERFr”的欄分別表示各處理液新鮮時的相對於Co膜和TiO2
之蝕刻率(Å/分鐘)。
在表2(其1)~表9(其3)中、“ERAge(Å/min)”的欄中,“Co ERAge”及“TiO2
ERAge”的欄分別表示各處理液熱循環處理後的相對於Co膜和TiO2
之蝕刻率(Å/分鐘)。
再者、以下,表1表示處理液1~8的基本組成。
表2(其1)~(其4)表示表1中的處理液1中的第1金屬離子及第2金屬離子的配比及含量以及處理液1的評價結果。亦即,例如表2(其1)所示之實施例1001的處理液為表1所示之處理液1,其相對於處理液的總質量,以總計含量計包含400.0質量ppb的選自包含Na、Al、K、Ca、Cr、Fe、Ni及Zn之群組中之所有的金屬離子作為第1金屬離子,且相對於處理液的總質量,以總計含量包含5.55質量ppb的選自包含Li、Mg、Mn、Cu、Ag、Pb及Co之群組中之所有的金屬離子作為第2金屬離子。
表3(其1)~(其3)表示表1中的處理液2中的第1金屬離子的配比及含量以及處理液2的評價結果。再者,在處理液2中不包含第2金屬離子(為檢測極限以下)。
表4(其1)~(其3)表示表1中的處理液3中的第1金屬離子的配比及含量以及處理液3的評價結果。再者,在處理液3中不包含第2金屬離子(為檢測極限以下)。
表5(其1)~(其3)表示表1中的處理液4中的第1金屬離子的配比及含量以及處理液4的評價結果。再者,在處理液4中不包含第2金屬離子(為檢測極限以下)。
表6(其1)~(其3)表示表1中的處理液5中的第1金屬離子的配比及含量以及處理液5的評價結果。再者,在處理液5中不包含第2金屬離子(為檢測極限以下)。
表7(其1)~(其3)表示表1中的處理液6中的第1金屬離子的配比及含量以及處理液6的評價結果。再者,在處理液6中不包含第2金屬離子(為檢測極限以下)。
表8(其1)~(其3)表示表1中的處理液7中的第1金屬離子的配比及含量以及處理液7的評價結果。再者,在處理液7中不包含第2金屬離子(為檢測極限以下)。
表9(其1)~(其3)表示表1中的處理液8中的第1金屬離子的配比及含量以及處理液8的評價結果。再者,在處理液8中不包含第2金屬離子(為檢測極限以下)。
[表1]
表1 (基本組成) | 詳細 | 處理液1 (質量%) | 處理液2 (質量%) | 處理液3 (質量%) | 處理液4 (質量%) | 處理液5 (質量%) | 處理液6 (質量%) | 處理液7 (質量%) | 處理液8 (質量%) |
羥基胺化合物 | HA | 5 | 0 | 10 | 10 | 10 | 10 | 25 | 35 |
HAS | 0 | 5 | 0 | 0 | 0 | 0 | 0 | 0 | |
有機溶劑 | EGBE | 3 | 3 | 0 | 0 | 0 | 3 | 3 | 3 |
3-甲氧基-3-甲基丁醇 | 0 | 0 | 20 | 20 | 0 | 0 | 0 | 0 | |
2-甲基戊烷-2,4-二醇 | 0 | 0 | 0 | 0 | 20 | 0 | 0 | 0 | |
鹼性化合物 | 5M-BTA | 0.2 | 0.2 | 0 | 0 | 0 | 0.2 | 0.2 | 0.2 |
DBU | 0.76 | 0.76 | 5 | 0 | 1 | 0.76 | 0.76 | 0.76 | |
1,4-二吖雙環[2.2.2]辛烷 | 0 | 0 | 0 | 10 | 0 | 0 | 0 | 0 | |
金屬鹽 (金屬鹽化合物) | 表2~表9中所記載之第1金屬離子的離子源及表2中所記載之第2金屬離子的離子源 | 以金屬離子含量相對於處理液的總質量成為表2中所記載之量的方式進行了添加 | 以金屬離子含量相對於處理液的總質量成為表3中所記載之量的方式進行了添加 | 以金屬離子含量相對於處理液的總質量成為表4中所記載之量的方式進行了添加 | 以金屬離子含量相對於處理液的總質量成為表5中所記載之量的方式進行了添加 | 以金屬離子含量相對於處理液的總質量成為表6中所記載之量的方式進行了添加 | 以金屬離子含量相對於處理液的總質量成為表7中所記載之量的方式進行了添加 | 以金屬離子含量相對於處理液的總質量成為表8中所記載之量的方式進行了添加 | 以金屬離子含量相對於處理液的總質量成為表9中所記載之量的方式進行了添加 |
其他成分 | DTPA | 0.6 | 0.6 | 0 | 0 | 0 | 0.6 | 0.6 | 0.6 |
水 | 超純水 | 剩餘部分 | 剩餘部分 | 剩餘部分 | 剩餘部分 | 剩餘部分 | 剩餘部分 | 剩餘部分 | 剩餘部分 |
總計含量 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 |
[表2]
表2 (其1) | 第1金屬離子 的總計含量 (質量ppb) | 第1金屬離子(質量ppb) | 第2金屬離子的 總計含量 (質量ppb) | 第2金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||||||||
實施例 (處理液1) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Li | Mg | Mn | Cu | Ag | Pb | Co | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | ||||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||||||||||
1001 | 400.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 5.55 | 0.78 | 0.78 | 0.8 | 0.8 | 0.77 | 0.82 | 0.8 | 0.1211 | 1.489 | 0.1211 | 1.444 | 100 | AAA | 97 | AAA |
1002 | 351.2 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 5.57 | 0.81 | 0.77 | 0.78 | 0.82 | 0.79 | 0.83 | 0.78 | 0.1203 | 1.496 | 0.1215 | 1.466 | 101 | AAA | 98 | AAA |
1003 | 351.2 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 5.83 | 0.80 | 0.83 | 0.85 | 0.85 | 0.80 | 0.89 | 0.82 | 0.1189 | 1.490 | 0.1189 | 1.445 | 100 | AAA | 97 | AAA |
1004 | 351.2 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 5.79 | 0.85 | 0.85 | 0.83 | 0.84 | 0.83 | 0.87 | 0.73 | 0.1191 | 1.507 | 0.1203 | 1.492 | 101 | AAA | 99 | AAA |
1005 | 351.2 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 5.71 | 0.83 | 0.85 | 0.85 | 0.81 | 0.79 | 0.80 | 0.79 | 0.1203 | 0.1481 | 0.1215 | 1.451 | 101 | AAA | 98 | AAA |
1006 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 5.71 | 0.72 | 0.79 | 0.88 | 0.82 | 0.83 | 0.86 | 0.80 | 0.1204 | 1.504 | 0.1204 | 1.459 | 100 | AAA | 97 | AAA |
1007 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 5.70 | 0.73 | 0.75 | 0.86 | 0.80 | 0.84 | 0.87 | 0.85 | 0.1222 | 1.521 | 0.1234 | 1.475 | 101 | AAA | 97 | AAA |
1008 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 5.69 | 0.78 | 0.78 | 0.73 | 0.88 | 0.82 | 0.82 | 0.87 | 0.1187 | 1.490 | 0.1187 | 1.460 | 100 | AAA | 98 | AAA |
1009 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 5.69 | 0.85 | 0.82 | 0.83 | 0.81 | 0.74 | 0.87 | 0.78 | 0.1199 | 1.523 | 0.1211 | 1.508 | 101 | AAA | 99 | AAA |
1010 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 5.60 | 0.76 | 0.83 | 0.87 | 0.85 | 0.76 | 0.77 | 0.76 | 0.1187 | 1.501 | 0.1199 | 1.456 | 101 | AAA | 97 | AAA |
1011 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 5.62 | 0.71 | 0.83 | 0.82 | 0.87 | 0.76 | 0.88 | 0.76 | 0.1217 | 1.498 | 0.1217 | 1.453 | 100 | AAA | 97 | AAA |
1012 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 5.43 | 0.82 | 0.76 | 0.74 | 0.85 | 0.71 | 0.81 | 0.73 | 0.1201 | 1.479 | 0.1213 | 1.435 | 101 | AAA | 97 | AAA |
1013 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 5.67 | 0.78 | 0.82 | 0.88 | 0.73 | 0.80 | 0.90 | 0.76 | 0.1207 | 1.497 | 0.1207 | 1.482 | 100 | AAA | 99 | AAA |
1014 | 440.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 5.59 | 0.86 | 0.77 | 0.74 | 0.88 | 0.84 | 0.78 | 0.73 | 0.1189 | 1.504 | 0.1189 | 1.458 | 100 | AAA | 97 | AAA |
1015 | 440.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 5.63 | 0.74 | 0.76 | 0.73 | 0.88 | 0.84 | 0.84 | 0.84 | 0.1207 | 1.496 | 0.1207 | 1.467 | 100 | AAA | 98 | AAA |
1016 | 440.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 5.48 | 0.71 | 0.84 | 0.79 | 0.74 | 0.75 | 0.85 | 0.80 | 0.1198 | 1.521 | 0.1210 | 1.475 | 101 | AAA | 97 | AAA |
1017 | 440.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 5.46 | 0.80 | 0.80 | 0.77 | 0.75 | 0.77 | 0.77 | 0.80 | 0.1218 | 1.503 | 0.1230 | 1.458 | 101 | AAA | 97 | AAA |
[表3]
表2 (其2) | 第1金屬離子 的總計含量 (質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例 (處理液1) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
1018 | 350.8 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1214 | 1.494 | 0.18332 | 1.076 | 151 | B | 72 | B |
1019 | 350.8 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1198 | 1.503 | 0.21088 | 1.067 | 176 | B | 71 | B |
1020 | 350.8 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1201 | 1.509 | 0.15972 | 1.147 | 133 | B | 76 | B |
1021 | 350.8 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1199 | 1.510 | 0.23383 | 1.133 | 195 | B | 75 | B |
1022 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 0.1223 | 1.480 | 0.15895 | 1.110 | 130 | B | 75 | B |
1023 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 0.1182 | 1.495 | 0.17371 | 1.091 | 147 | B | 73 | B |
1024 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 0.1201 | 1.515 | 0.18855 | 1.091 | 157 | B | 72 | B |
1025 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 0.1199 | 1.477 | 0.23615 | 1.078 | 197 | B | 73 | B |
1026 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 0.1196 | 1.504 | 0.22722 | 1.098 | 190 | B | 73 | B |
1027 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 0.1216 | 1.479 | 0.22018 | 1.124 | 181 | B | 76 | B |
1028 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1177 | 1.478 | 0.17308 | 1.049 | 147 | B | 71 | B |
1029 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 0.1203 | 1.490 | 0.23104 | 1.132 | 192 | B | 76 | B |
1030 | 460.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1213 | 1.508 | 0.24012 | 1.116 | 198 | B | 74 | B |
1031 | 460.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1189 | 1.503 | 0.20212 | 1.082 | 170 | B | 72 | B |
1032 | 460.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1215 | 1.517 | 0.23211 | 1.153 | 191 | B | 76 | B |
1033 | 460.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1197 | 1.513 | 0.18675 | 1.059 | 156 | B | 70 | B |
1034 | 9.6 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1184 | 1.485 | 0.12789 | 1.322 | 108 | A+ | 89 | A+ |
1035 | 353.6 | 1.2 | 1.2 | 50.0 | 50.0 | 90.0 | 1.2 | 50.0 | 110.0 | 0.1209 | 1.515 | 0.21998 | 1.090 | 182 | B | 72 | B |
1036 | 422.0 | 1.2 | 50.0 | 90.0 | 90.0 | 0.8 | 50.0 | 50.0 | 90.0 | 0.1203 | 1.481 | 0.2202 | 1.140 | 183 | B | 77 | B |
1037 | 353.6 | 50.0 | 50.0 | 110.0 | 90.0 | 50.0 | 1.2 | 1.2 | 1.2 | 0.1203 | 1.523 | 0.22265 | 1.158 | 185 | B | 76 | B |
1038 | 720.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1181 | 1.507 | 0.1275 | 1.326 | 108 | A+ | 88 | A+ |
1039 | 106.8 | 0.8 | 1.2 | 1.2 | 50.0 | 1.2 | 50.0 | 1.2 | 1.2 | 0.1207 | 1.482 | 0.18743 | 1.126 | 153 | B | 76 | B |
1040 | 9.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1176 | 1.492 | 0.15882 | 1.074 | 135 | B | 72 | B |
1041 | 453.2 | 0.8 | 90.0 | 90.0 | 1.2 | 90.0 | 1.2 | 90.0 | 90.0 | 0.1203 | 1.488 | 0.16475 | 1.101 | 137 | B | 74 | B |
1042 | 630.8 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1188 | 1.524 | 0.23394 | 1.067 | 197 | B | 70 | B |
1043 | 9.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1212 | 1.488 | 0.20482 | 1.116 | 169 | B | 75 | B |
1044 | 9.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1195 | 1.503 | 0.15899 | 1.157 | 133 | B | 77 | B |
1045 | 9.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1195 | 1.511 | 0.22457 | 1.133 | 188 | B | 75 | B |
1046 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 0.1222 | 1.495 | 0.22729 | 1.046 | 186 | B | 70 | B |
1047 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 0.1198 | 1.519 | 0.19644 | 1.109 | 164 | B | 73 | B |
1048 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 0.1222 | 1.506 | 0.20771 | 1.130 | 170 | B | 75 | B |
1049 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 0.1181 | 1.488 | 0.16887 | 1.071 | 143 | B | 72 | B |
1050 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 0.1186 | 1.505 | 0.16953 | 1.129 | 143 | B | 75 | B |
1051 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 0.1194 | 1.509 | 0.21609 | 1.071 | 181 | B | 71 | B |
1052 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 0.1185 | 1.486 | 0.16115 | 1.085 | 136 | B | 73 | B |
1053 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 0.1181 | 1.517 | 0.1784 | 1.153 | 151 | B | 76 | B |
1054 | 118.4 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1218 | 1.510 | 0.17299 | 1.057 | 142 | B | 70 | B |
1055 | 118.4 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1217 | 1.516 | 0.18372 | 1.152 | 151 | B | 76 | B |
1056 | 118.4 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1200 | 1.490 | 0.23636 | 1.058 | 197 | B | 71 | B |
1057 | 421.6 | 50.0 | 90.0 | 0.8 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 0.1214 | 1.518 | 0.1846 | 1.093 | 152 | B | 72 | B |
1058 | 630.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1200 | 1.491 | 0.15716 | 1.103 | 131 | B | 74 | B |
1059 | 630.8 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1190 | 1.518 | 0.18929 | 1.063 | 159 | B | 70 | B |
1060 | 630.8 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1195 | 1.517 | 0.2139 | 1.077 | 179 | B | 71 | B |
1061 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.1213 | 1.490 | 0.20982 | 1.133 | 173 | B | 76 | B |
1062 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 0.1206 | 1.486 | 0.22309 | 1.070 | 185 | B | 72 | B |
1063 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 0.1188 | 1.509 | 0.16744 | 1.101 | 141 | B | 73 | B |
1064 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 0.1180 | 1.522 | 0.22894 | 1.081 | 194 | B | 71 | B |
[表4]
表2 (其3) | 第1金屬離子 的總計含量 (質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例 (處理液1) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
1065 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 0.1211 | 1.515 | 0.22287 | 1.151 | 184 | B | 76 | B |
1066 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 0.1195 | 1.499 | 0.21153 | 1.124 | 177 | B | 75 | B |
1067 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 0.1178 | 1.479 | 0.2215 | 1.124 | 188 | B | 76 | B |
1068 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 0.1208 | 1.476 | 0.16673 | 1.122 | 138 | B | 76 | B |
1069 | 740.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1180 | 1.516 | 0.20879 | 1.061 | 177 | B | 70 | B |
1070 | 740.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1183 | 1.482 | 0.22824 | 1.067 | 193 | B | 72 | B |
1071 | 740.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1198 | 1.478 | 0.16179 | 1.108 | 135 | B | 75 | B |
1072 | 118.4 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1177 | 1.521 | 0.20598 | 1.111 | 175 | B | 73 | B |
1073 | 740.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1194 | 1.491 | 0.23053 | 1.059 | 193 | B | 71 | B |
1074 | 470.8 | 0.8 | 50.0 | 50.0 | 110.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1217 | 1.515 | 0.16789 | 1.075 | 138 | B | 71 | B |
1075 | 215.6 | 1.2 | 1.2 | 50.0 | 1.2 | 110.0 | 0.8 | 1.2 | 50.0 | 0.1193 | 1.521 | 0.18366 | 1.064 | 154 | B | 70 | B |
1076 | 284.0 | 50.0 | 0.8 | 50.0 | 90.0 | 1.2 | 1.2 | 90.0 | 0.8 | 0.1196 | 1.520 | 0.18302 | 1.094 | 153 | B | 72 | B |
1077 | 393.2 | 50.0 | 1.2 | 90.0 | 0.8 | 50.0 | 90.0 | 110.0 | 1.2 | 0.1178 | 1.482 | 0.16728 | 1.126 | 142 | B | 76 | B |
1078 | 372.8 | 90.0 | 90.0 | 1.2 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 0.1225 | 1.518 | 0.23266 | 1.063 | 190 | B | 70 | B |
1079 | 482.0 | 90.0 | 110.0 | 50.0 | 0.8 | 90.0 | 50.0 | 90.0 | 1.2 | 0.1177 | 1.515 | 0.21545 | 1.151 | 183 | B | 76 | B |
1080 | 482.0 | 90.0 | 110.0 | 50.0 | 1.2 | 50.0 | 90.0 | 0.8 | 90.0 | 0.1220 | 1.515 | 0.23051 | 1.152 | 189 | B | 76 | B |
1081 | 324.0 | 0.8 | 1.2 | 1.2 | 90.0 | 0.8 | 90.0 | 90.0 | 50.0 | 0.1211 | 1.496 | 0.20463 | 1.107 | 169 | B | 74 | B |
1082 | 401.6 | 50.0 | 50.0 | 110.0 | 50.0 | 90.0 | 0.8 | 0.8 | 50.0 | 0.1222 | 1.499 | 0.16013 | 1.095 | 131 | B | 73 | B |
1083 | 344.4 | 90.0 | 50.0 | 0.8 | 1.2 | 1.2 | 90.0 | 1.2 | 110.0 | 0.1192 | 1.490 | 0.19432 | 1.087 | 163 | B | 73 | B |
1084 | 453.6 | 90.0 | 90.0 | 1.2 | 110.0 | 1.2 | 1.2 | 110.0 | 50.0 | 0.1188 | 1489 | 0.17816 | 1.131 | 150 | B | 76 | B |
1085 | 441.6 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.8 | 110.0 | 0.1214 | 1.521 | 0.19303 | 1.095 | 159 | B | 72 | B |
1086 | 462.0 | 110.0 | 0.8 | 110.0 | 1.2 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1206 | 1.488 | 0.22558 | 1.071 | 187 | B | 72 | B |
1087 | 304.0 | 1.2 | 110.0 | 0.8 | 90.0 | 1.2 | 50.0 | 0.8 | 50.0 | 0.1224 | 1.489 | 0.17988 | 1.072 | 147 | B | 72 | B |
1088 | 502.0 | 50.0 | 90.0 | 0.8 | 110.0 | 110.0 | 50.0 | 1.2 | 90.0 | 0.1224 | 1.480 | 0.21673 | 1.036 | 177 | B | 70 | B |
1089 | 502.0 | 50.0 | 110.0 | 1.2 | 50.0 | 110.0 | 0.8 | 90.0 | 90.0 | 0.1205 | 1.502 | 0.16987 | 1.127 | 141 | B | 75 | B |
1090 | 392.8 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 110.0 | 90.0 | 1.2 | 0.1198 | 1.476 | 0.2048 | 1.107 | 171 | B | 75 | B |
1091 | 502.0 | 110.0 | 0.8 | 110.0 | 50.0 | 1.2 | 90.0 | 50.0 | 90.0 | 0.1193 | 1.503 | 0.15627 | 1.112 | 131 | B | 74 | B |
1092 | 413.2 | 110.0 | 50.0 | 1.2 | 1.2 | 90.0 | 50.0 | 110.0 | 0.8 | 0.1221 | 1.523 | 0.16727 | 1.173 | 137 | B | 77 | B |
1093 | 392.8 | 110.0 | 90.0 | 50.0 | 50.0 | 0.8 | 90.0 | 1.2 | 0.8 | 0.1183 | 1.499 | 0.16448 | 1.094 | 139 | B | 73 | B |
1094 | 255.2 | 1.2 | 0.8 | 1.2 | 0.8 | 50.0 | 110.0 | 1.2 | 90.0 | 0.1191 | 1.490 | 0.21314 | 1.103 | 179 | B | 74 | B |
1095 | 542.0 | 1.2 | 50.0 | 90.0 | 110.0 | 110.0 | 90.0 | 90.0 | 0.8 | 0.1183 | 1.487 | 0.2071 | 1.056 | 175 | B | 71 | B |
1096 | 255.2 | 50.0 | 1.2 | 90.0 | 1.2 | 1.2 | 110.0 | 0.8 | 0.8 | 0.1220 | 1.505 | 0.19147 | 1.144 | 157 | B | 76 | B |
1097 | 295.2 | 1.2 | 0.8 | 1.2 | 110.0 | 90.0 | 90.0 | 0.8 | 1.2 | 0.1211 | 1.488 | 0.2373 | 1.071 | 196 | B | 72 | B |
1098 | 472.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.8 | 1.2 | 110.0 | 0.1198 | 1.493 | 0.19531 | 1.150 | 163 | B | 77 | B |
1099 | 303.6 | 0.8 | 50.0 | 50.0 | 0.8 | 1.2 | 0.8 | 110.0 | 90.0 | 0.1198 | 1.490 | 0.17128 | 1.058 | 143 | B | 71 | B |
1100 | 324.0 | 1.2 | 110.0 | 0.8 | 50.0 | 50.0 | 1.2 | 110.0 | 0.8 | 0.1215 | 1.499 | 0.17138 | 1.049 | 141 | B | 70 | B |
1101 | 433.2 | 50.0 | 110.0 | 1.2 | 1.2 | 0.8 | 110.0 | 50.0 | 110.0 | 0.1183 | 1.505 | 0.16448 | 1.129 | 139 | B | 75 | B |
1102 | 610.8 | 90.0 | 0.8 | 90.0 | 50.0 | 110.0 | 110.0 | 110.0 | 50.0 | 0.1209 | 1.490 | 0.16683 | 1.147 | 138 | B | 77 | B |
1103 | 412.8 | 90.0 | 1.2 | 110.0 | 0.8 | 110.0 | 50.0 | 50.0 | 0.8 | 0.1217 | 1.523 | 0.20439 | 1.066 | 168 | B | 70 | B |
1104 | 166.0 | 0.8 | 0.8 | 0.8 | 1.2 | 110.0 | 1.2 | 50.0 | 1.2 | 0.1211 | 1.512 | 0.18775 | 1.149 | 155 | B | 76 | B |
1105 | 562.0 | 110.0 | 90.0 | 50.0 | 90.0 | 110.0 | 110.0 | 0.8 | 1.2 | 0.1183 | 1.509 | 0.23185 | 1.071 | 196 | B | 71 | B |
1106 | 364.0 | 110.0 | 110.0 | 90.0 | 0.8 | 0.8 | 1.2 | 1.2 | 50.0 | 0.1181 | 1.481 | 0.19374 | 1.081 | 164 | B | 73 | B |
1107 | 473.2 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 50.0 | 1.2 | 0.1219 | 1.478 | 0.20964 | 1.109 | 172 | B | 75 | B |
1108 | 513.2 | 1.2 | 90.0 | 110.0 | 0.8 | 1.2 | 110.0 | 90.0 | 110.0 | 0.1211 | 1.485 | 0.17434 | 1.144 | 144 | B | 77 | B |
1109 | 315.2 | 1.2 | 90.0 | 110.0 | 1.2 | 0.8 | 0.8 | 110.0 | 1.2 | 0.1209 | 1.489 | 0.16932 | 1.132 | 140 | B | 76 | B |
1110 | 481.6 | 50.0 | 0.8 | 50.0 | 110.0 | 0.8 | 50.0 | 110.0 | 110.0 | 0.1200 | 1.477 | 0.16915 | 1.063 | 141 | B | 72 | B |
1111 | 404.0 | 90.0 | 1.2 | 110.0 | 110.0 | 0.8 | 1.2 | 0.8 | 90.0 | 0.1182 | 1.476 | 0.16552 | 1.033 | 140 | B | 70 | B |
1112 | 602.0 | 110.0 | 1.2 | 0.8 | 90.0 | 90.0 | 110.0 | 110.0 | 90.0 | 0.1193 | 1.485 | 0.18258 | 1.099 | 153 | B | 74 | B |
1113 | 472.8 | 110.0 | 1.2 | 0.8 | 110.0 | 50.0 | 0.8 | 90.0 | 110.0 | 0.1197 | 1.513 | 0.20954 | 1.135 | 175 | B | 75 | B |
1114 | 384.0 | 110.0 | 50.0 | 1.2 | 0.8 | 110.0 | 1.2 | 0.8 | 110.0 | 0.1221 | 1.491 | 0.23573 | 1.148 | 193 | B | 77 | B |
1115 | 730.8 | 0.8 | 110.0 | 110.0 | 90. | 110.0 | 90.0 | 110.0 | 110.0 | 0.1224 | 1.487 | 0.17993 | 1.070 | 147 | B | 72 | B |
1116 | 532.8 | 0.8 | 110.0 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 0.1213 | 1.479 | 0.20626 | 1.139 | 170 | B | 77 | B |
[表5]
表2 (其4) | 第1金屬離子 的總計含量 (質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
比較例 (處理液1) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
1 | 6.4 | 0.8 | 0.8 | 0.8 | 0.8 | 0.8 | 0.8 | 0.8 | 0.8 | 0.1184 | 1.485 | 0.99 | 0.301 | 836 | D | 20 | D |
2 | 880.0 | 110.0 | 110.0 | 110.0 | 110.0 | 110.0 | 110.0 | 110.0 | 110.0 | 0.1198 | 1.494 | 1.002 | 0.298 | 836 | D | 19 | D |
3 | 6.0 | 0.1 | 0.6 | 0.3 | 0.2 | 0.9 | 3.1 | 0.2 | 0.6 | 0.1184 | 1.485 | 0.98 | 0.302 | 827 | D | 20 | D |
[表6]
表3 (其1) | 第1金屬離子 的總計含量 (質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例 (處理液2) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
2001 | 400.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1206 | 1.512 | 0.1338 | 1.331 | 111 | A+ | 88 | A+ |
2002 | 351.2 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1175 | 1.504 | 0.1328 | 1.369 | 113 | A+ | 91 | A+ |
2003 | 351.2 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1197 | 1.520 | 0.1317 | 1.353 | 110 | A+ | 89 | A+ |
2004 | 351.2 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1189 | 1.485 | 0.1320 | 1.292 | 111 | A+ | 87 | A+ |
2005 | 351.2 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1216 | 1.515 | 0.1313 | 1.333 | 108 | A+ | 88 | A+ |
2006 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 0.1221 | 1.499 | 0.1356 | 1.364 | 111 | A+ | 91 | A+ |
2007 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 0.1205 | 1.523 | 0.1337 | 1.371 | 111 | A+ | 90 | A+ |
2008 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 0.1214 | 1.479 | 0.1336 | 1.317 | 110 | A+ | 89 | A+ |
2009 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 0.1216 | 1.502 | 0.1338 | 1.367 | 110 | A+ | 91 | A+ |
2010 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 0.1217 | 1.509 | 0.1363 | 1.343 | 112 | A+ | 89 | A+ |
2011 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1182 | 1.502 | 0.1312 | 1.307 | 111 | A+ | 87 | A+ |
2012 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 0.1188 | 1.509 | 0.1271 | 1.343 | 107 | A+ | 89 | A+ |
2013 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.1192 | 1.489 | 0.1323 | 1.295 | 111 | A+ | 87 | A+ |
2014 | 440.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1216 | 1.482 | 0.1374 | 1.304 | 113 | A+ | 88 | A+ |
2015 | 440.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1189 | 1.507 | 0.1308 | 1.296 | 110 | A+ | 86 | A+ |
2016 | 440.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1197 | 1.514 | 0.1340 | 1.302 | 112 | A+ | 86 | A+ |
2017 | 440.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1191 | 1.476 | 0.1310 | 1.329 | 110 | A+ | 90 | A+ |
2018 | 350.8 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1220 | 1.488 | 0.1782 | 1.071 | 146 | B | 72 | B |
2019 | 350.8 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1212 | 1.494 | 0.2412 | 0.105 | 199 | B | 74 | B |
2020 | 350.8 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1206 | 1.501 | 0.1785 | 1.051 | 148 | B | 70 | B |
2021 | 350.8 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1210 | 1.489 | 0.2251 | 1.109 | 186 | B | 74 | B |
2022 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 0.1210 | 1.521 | 0.1791 | 1.156 | 148 | B | 76 | B |
2023 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 0.1216 | 1.504 | 0.2384 | 1.083 | 196 | B | 72 | B |
2024 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 0.1202 | 1.496 | 0.2152 | 1.137 | 179 | B | 76 | B |
2025 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 0.1205 | 1.486 | 0.1856 | 1.070 | 154 | B | 72 | B |
2026 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 0.1192 | 1.509 | 0.1645 | 1.056 | 138 | B | 70 | B |
2027 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 0.1197 | 1.476 | 0.2226 | 1.077 | 186 | B | 73 | B |
2028 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1220 | 1.476 | 0.1977 | 1.062 | 162 | B | 72 | B |
2029 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 0.1217 | 1.495 | 0.2069 | 1.047 | 170 | B | 70 | B |
2030 | 460.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1187 | 1.490 | 0.2256 | 1.147 | 190 | B | 77 | B |
2031 | 460.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1194 | 1.512 | 0.1684 | 1.149 | 141 | B | 76 | B |
2032 | 460.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1195 | 1.486 | 0.1865 | 1.040 | 156 | B | 70 | B |
2033 | 460.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1225 | 1.510 | 0.2107 | 1.072 | 172 | B | 71 | B |
2034 | 9.6 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1208 | 1.503 | 0.1353 | 1.323 | 112 | A+ | 88 | A+ |
2035 | 353.6 | 1.2 | 1.2 | 50.0 | 50.0 | 90.0 | 1.2 | 50.0 | 110.0 | 0.1196 | 1.524 | 0.1687 | 1.128 | 141 | B | 74 | B |
2036 | 422.0 | 1.2 | 50.0 | 90.0 | 90.0 | 0.8 | 50.0 | 50.0 | 90.0 | 0.1224 | 1.522 | 0.1652 | 1.141 | 135 | B | 75 | B |
2037 | 353.6 | 50.0 | 50.0 | 110.0 | 90.0 | 50.0 | 1.2 | 1.2 | 1.2 | 0.1219 | 1.481 | 0.1780 | 1.096 | 146 | B | 74 | B |
2038 | 720.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1190 | 1.478 | 0.1345 | 1.316 | 113 | A+ | 89 | A+ |
2039 | 106.8 | 0.8 | 1.2 | 1.2 | 50.0 | 1.2 | 50.0 | 1.2 | 1.2 | 0.1204 | 1.516 | 0.2191 | 1.167 | 182 | B | 77 | B |
2040 | 9.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1214 | 1.513 | 0.1967 | 1.165 | 162 | B | 77 | B |
2041 | 453.2 | 0.8 | 90.0 | 90.0 | 1.2 | 90.0 | 1.2 | 90.0 | 90.0 | 0.1178 | 1.501 | 0.1601 | 1.096 | 136 | B | 73 | B |
2042 | 630.8 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1211 | 1.490 | 0.1998 | 1.147 | 165 | B | 77 | B |
2043 | 9.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1210 | 1.490 | 0.1827 | 1.088 | 151 | B | 73 | B |
2044 | 9.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1197 | 1.507 | 0.1963 | 1.160 | 164 | B | 77 | B |
2045 | 9.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1224 | 1.504 | 0.1934 | 1.052 | 158 | B | 70 | B |
[表7]
表3 (其2) | 第1金屬離子 的總計含量 (質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例 (處理液2) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
2046 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 0.1221 | 1.481 | 0.2015 | 1.096 | 165 | B | 74 | B |
2047 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 0.1205 | 1.514 | 0.2024 | 1.151 | 168 | B | 76 | B |
2048 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 0.1196 | 1.521 | 0.1651 | 1.156 | 138 | B | 76 | B |
2049 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 0.1185 | 1.500 | 0.1872 | 1.125 | 158 | B | 75 | B |
2050 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 0.1220 | 1.518 | 0.1939 | 1.169 | 159 | B | 77 | B |
2051 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 0.1201 | 1.507 | 0.1898 | 1.130 | 158 | B | 75 | B |
2052 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 0.1194 | 1.482 | 0.1660 | 1.126 | 139 | B | 76 | B |
2053 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 0.1220 | 1.488 | 0.1708 | 1.131 | 140 | B | 76 | B |
2054 | 118.4 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1212 | 1.521 | 0.1904 | 1.156 | 157 | B | 76 | B |
2055 | 118.4 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1189 | 1.501 | 0.2307 | 1.081 | 194 | B | 72 | B |
2056 | 118.4 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1179 | 1.484 | 0.2311 | 1.143 | 196 | B | 77 | B |
2057 | 421.6 | 50.0 | 90.0 | 0.8 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 0.1188 | 1.494 | 0.2032 | 1.150 | 171 | B | 77 | B |
2058 | 630.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1203 | 1.503 | 0.2201 | 1.082 | 183 | B | 72 | B |
2059 | 630.8 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1196 | 1.490 | 0.2105 | 1.132 | 176 | B | 76 | B |
2060 | 630.8 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1215 | 1.522 | 0.2260 | 1.127 | 186 | B | 74 | B |
2061 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.1204 | 1.512 | 0.1781 | 1.088 | 148 | B | 72 | B |
2062 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 0.1185 | 1.499 | 0.1848 | 1.080 | 156 | B | 72 | B |
2063 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 0.1224 | 1.501 | 0.2253 | 1.111 | 184 | B | 74 | B |
2064 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 0.1208 | 1.479 | 0.2054 | 1.109 | 170 | B | 75 | B |
2065 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 0.1221 | 1.495 | 0.2148 | 1.076 | 176 | B | 72 | B |
2066 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 0.1176 | 1.510 | 0.2329 | 1.087 | 198 | B | 72 | B |
2067 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 0.1200 | 1.491 | 0.2124 | 1.059 | 177 | B | 71 | B |
2068 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 0.1195 | 1.506 | 0.2152 | 1.054 | 180 | B | 70 | B |
2069 | 740.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1190 | 1.514 | 0.2344 | 1.151 | 197 | B | 76 | B |
2070 | 740.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1180 | 1.487 | 0.1911 | 1.130 | 162 | B | 76 | B |
2071 | 740.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1203 | 1.510 | 0.2333 | 1.118 | 194 | B | 74 | B |
2072 | 118.4 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1197 | 1.502 | 0.2034 | 1.096 | 170 | B | 73 | B |
2073 | 740.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1206 | 1.481 | 0.2147 | 1.126 | 178 | B | 76 | B |
2074 | 470.8 | 0.8 | 50.0 | 50.0 | 110.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1219 | 1.502 | 0.2291 | 1.081 | 188 | B | 72 | B |
2075 | 215.6 | 1.2 | 1.2 | 50.0 | 1.2 | 110.0 | 0.8 | 1.2 | 50.0 | 0.1217 | 1.521 | 0.1801 | 1.140 | 148 | B | 75 | B |
2076 | 284.0 | 50.0 | 0.8 | 50.0 | 90.0 | 1.2 | 1.2 | 90.0 | 0.8 | 0.1223 | 1.497 | 0.2129 | 1.108 | 174 | B | 74 | B |
2077 | 393.2 | 50.0 | 1.2 | 90.0 | 0.8 | 50.0 | 90.0 | 110.0 | 1.2 | 0.1178 | 1.482 | 0.1920 | 1.112 | 163 | B | 75 | B |
2078 | 372.8 | 90.0 | 90.0 | 1.2 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 0.1184 | 1.511 | 0.2298 | 1.103 | 194 | B | 73 | B |
2079 | 482.0 | 90.0 | 110.0 | 50.0 | 0.8 | 90.0 | 50.0 | 90.0 | 1.2 | 0.1194 | 1.522 | 0.1708 | 1.081 | 143 | B | 71 | B |
2080 | 482.0 | 90.0 | 110.0 | 50.0 | 1.2 | 50.0 | 90.0 | 0.8 | 90.0 | 0.1183 | 1.496 | 0.1597 | 1.122 | 135 | B | 75 | B |
2081 | 324.0 | 0.8 | 1.2 | 1.2 | 90.0 | 0.8 | 90.0 | 90.0 | 50.0 | 0.1182 | 1.491 | 0.2304 | 1.103 | 195 | B | 74 | B |
2082 | 401.6 | 50.0 | 50.0 | 110.0 | 50.0 | 90.0 | 0.8 | 0.8 | 50.0 | 0.1221 | 1.479 | 0.1660 | 1.094 | 136 | B | 74 | B |
2083 | 344.4 | 90.0 | 50.0 | 0.8 | 1.2 | 1.2 | 90.0 | 1.2 | 110.0 | 0.1187 | 1.501 | 0.1686 | 1.066 | 142 | B | 71 | B |
2084 | 453.6 | 90.0 | 90.0 | 1.2 | 110.0 | 1.2 | 1.2 | 110.0 | 50.0 | 0.1215 | 1.493 | 0.2296 | 1.090 | 189 | B | 73 | B |
2085 | 441.6 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.8 | 110.0 | 0.1194 | 1.477 | 0.1636 | 1.049 | 137 | B | 71 | B |
2086 | 462.0 | 110.0 | 0.8 | 110.0 | 1.2 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1194 | 1.520 | 0.1791 | 1.171 | 150 | B | 77 | B |
2087 | 304.0 | 1.2 | 110.0 | 0.8 | 90.0 | 1.2 | 50.0 | 0.8 | 50.0 | 0.1215 | 1.521 | 0.2066 | 1.171 | 170 | B | 77 | B |
2088 | 502.0 | 50.0 | 90.0 | 0.8 | 110.0 | 110.0 | 50.0 | 1.2 | 90.0 | 0.1182 | 1.478 | 0.1809 | 1.049 | 153 | B | 71 | B |
2089 | 502.0 | 50.0 | 110.0 | 1.2 | 50.0 | 110.0 | 0.8 | 90.0 | 90.0 | 0.1213 | 1.496 | 0.1759 | 1.107 | 145 | B | 74 | B |
2090 | 392.8 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 110.0 | 90.0 | 1.2 | 0.1183 | 1.516 | 0.1786 | 1.167 | 151 | B | 77 | B |
[表8]
表3(其3) | 第1金屬離子的總計含量(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | |||||||||||||
實施例(處理液2) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
2091 | 502.0 | 110.0 | 0.8 | 110.0 | 50.0 | 1.2 | 90.0 | 50.0 | 90.0 | 0.1225 | 1.477 | 0.1874 | 1.064 | 153 | B | 72 | B |
2092 | 413.2 | 110.0 | 50.0 | 1.2 | 1.2 | 90.0 | 50.0 | 110.0 | 0.8 | 0.1183 | 1.511 | 0.2283 | 1.118 | 193 | B | 74 | B |
2093 | 392.8 | 110.0 | 90.0 | 50.0 | 50.0 | 0.8 | 90.0 | 1.2 | 0.8 | 0.1175 | 1.490 | 0.1880 | 1.118 | 160 | B | 75 | B |
2094 | 255.2 | 1.2 | 0.8 | 1.2 | 0.8 | 50.0 | 110.0 | 1.2 | 90.0 | 0.1212 | 1.490 | 0.2194 | 1.088 | 181 | B | 73 | B |
2095 | 542.0 | 1.2 | 50.0 | 90.0 | 110.0 | 110.0 | 90.0 | 90.0 | 0.8 | 0.1176 | 1.505 | 0.1905 | 1.083 | 162 | B | 72 | B |
2096 | 255.2 | 50.0 | 1.2 | 90.0 | 1.2 | 1.2 | 110.0 | 0.8 | 0.8 | 0.1178 | 1.521 | 0.1755 | 1.110 | 149 | B | 73 | B |
2097 | 295.2 | 1.2 | 0.8 | 1.2 | 110.0 | 90.0 | 90.0 | 0.8 | 1.2 | 0.1201 | 1.482 | 0.1657 | 1.067 | 138 | B | 72 | B |
2098 | 472.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.8 | 1.2 | 110.0 | 0.1188 | 1.522 | 0.1628 | 1.157 | 137 | B | 76 | B |
2099 | 303.6 | 0.8 | 50.0 | 50.0 | 0.8 | 1.2 | 0.8 | 110.0 | 90.0 | 0.1212 | 1.476 | 0.2279 | 1.137 | 188 | B | 77 | B |
2100 | 324.0 | 1.2 | 110.0 | 0.8 | 50.0 | 50.0 | 1.2 | 110.0 | 0.8 | 0.1190 | 1.480 | 0.2238 | 1.080 | 188 | B | 73 | B |
2101 | 433.2 | 50.0 | 110.0 | 1.2 | 1.2 | 0.8 | 110.0 | 50.0 | 110.0 | 0.1188 | 1.505 | 0.2151 | 1.083 | 181 | B | 72 | B |
2102 | 610.8 | 90.0 | 0.8 | 90.0 | 50.0 | 110.0 | 110.0 | 110.0 | 50.0 | 0.1209 | 1.512 | 0.1572 | 0.089 | 130 | B | 72 | B |
2103 | 412.8 | 90.0 | 1.2 | 110.0 | 0.8 | 110.0 | 50.0 | 50.0 | 0.8 | 0.1202 | 1.497 | 0.1911 | 1.108 | 159 | B | 74 | B |
2104 | 166.0 | 0.8 | 0.8 | 0.8 | 1.2 | 110.0 | 1.2 | 50.0 | 1.2 | 0.1217 | 1.481 | 0.2044 | 1.140 | 168 | B | 77 | B |
2105 | 562.0 | 110.0 | 90.0 | 50.0 | 90.0 | 110.0 | 110.0 | 0.8 | 1.2 | 0.1210 | 1.490 | 0.1803 | 1.073 | 149 | B | 72 | B |
2106 | 364.0 | 110.0 | 110.0 | 90.0 | 0.8 | 0.8 | 1.2 | 1.2 | 50.0 | 0.1202 | 1.476 | 0.2200 | 1.093 | 183 | B | 74 | B |
2107 | 473.2 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 50.0 | 1.2 | 0.1223 | 1.519 | 0.2325 | 1.109 | 190 | B | 73 | B |
2108 | 513.2 | 1.2 | 90.0 | 110.0 | 0.8 | 1.2 | 110.0 | 90.0 | 110.0 | 0.1211 | 1.504 | 0.1684 | 1.143 | 139 | B | 76 | B |
2109 | 315.2 | 1.2 | 90.0 | 110.0 | 1.2 | 0.8 | 0.8 | 110.0 | 1.2 | 0.1200 | 1.509 | 0.1980 | 1.131 | 165 | B | 75 | B |
2110 | 481.6 | 50.0 | 0.8 | 50.0 | 110.0 | 0.8 | 50.0 | 110.0 | 110.0 | 0.1179 | 1.484 | 0.2134 | 1.083 | 181 | B | 73 | B |
2111 | 404.0 | 90.0 | 1.2 | 110.0 | 110.0 | 0.8 | 1.2 | 0.8 | 90.0 | 0.1193 | 1.497 | 0.1897 | 1.093 | 159 | B | 73 | B |
2112 | 602.0 | 110.0 | 1.2 | 0.8 | 90.0 | 90.0 | 110.0 | 110.0 | 90.0 | 0.1176 | 1.491 | 0.1753 | 1.089 | 149 | B | 73 | B |
2113 | 472.8 | 110.0 | 1.2 | 0.8 | 110.0 | 50.0 | 0.8 | 90.0 | 110.0 | 0.1205 | 1.498 | 0.2121 | 1.124 | 176 | B | 75 | B |
2114 | 384.0 | 110.0 | 50.0 | 1.2 | 0.8 | 110.0 | 1.2 | 0.8 | 110.0 | 0.1210 | 1.508 | 0.1598 | 1.161 | 132 | B | 77 | B |
2115 | 730.8 | 0.8 | 110.0 | 110.0 | 90.0 | 110.0 | 90.0 | 110.0 | 110.0 | 0.1184 | 1.485 | 0.1954 | 1.039 | 165 | B | 70 | B |
2116 | 532.8 | 0.8 | 110.0 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 0.1191 | 1.502 | 0.1548 | 1.112 | 130 | B | 74 | B |
[表9]
表4(其1) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液3) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
3001 | 400.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1188 | 1.494 | 0.1342 | 1.345 | 113 | A+ | 90 | A+ |
3002 | 351.2 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1191 | 1.496 | 0.1274 | 1.316 | 107 | A+ | 88 | A+ |
3003 | 351.2 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1213 | 1.482 | 0.1358 | 1.348 | 112 | A+ | 91 | A+ |
3004 | 351.2 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1186 | 1.488 | 0.1292 | 1.310 | 109 | A+ | 88 | A+ |
3005 | 351.2 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1215 | 1.477 | 0.1349 | 1.344 | 111 | A+ | 91 | A+ |
3006 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 0.1205 | 1.491 | 0.1337 | 1.342 | 111 | A+ | 90 | A+ |
3007 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 0.1177 | 1.502 | 0.1271 | 1.366 | 108 | A+ | 91 | A+ |
3008 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 0.1176 | 1.501 | 0.1317 | 1.336 | 112 | A+ | 89 | A+ |
3009 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 0.1210 | 1.484 | 0.1343 | 1.306 | 111 | A+ | 88 | A+ |
3010 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 0.1181 | 1.509 | 0.1311 | 1.343 | 111 | A+ | 89 | A+ |
3011 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1206 | 1.510 | 0.1303 | 1.329 | 108 | A+ | 88 | A+ |
3012 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 0.1196 | 1.524 | 0.1351 | 1.310 | 113 | A+ | 86 | A+ |
3013 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.1201 | 1.506 | 0.1309 | 1.370 | 109 | A+ | 91 | A+ |
3014 | 440.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1201 | 1.496 | 0.1333 | 1.331 | 111 | A+ | 89 | A+ |
3015 | 440.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1215 | 1.481 | 0.1324 | 1.318 | 109 | A+ | 89 | A+ |
3016 | 440.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1217 | 1.492 | 0.1314 | 1.298 | 108 | A+ | 87 | A+ |
3017 | 440.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1213 | 1.512 | 0.1286 | 1.376 | 106 | A+ | 91 | A+ |
3018 | 350.8 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1189 | 1.480 | 0.1653 | 1.125 | 139 | B | 76 | B |
3019 | 350.8 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1215 | 1.502 | 0.2162 | 1.127 | 178 | B | 75 | B |
3020 | 350.8 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1200 | 1.516 | 0.2292 | 1.092 | 191 | B | 72 | B |
3021 | 350.8 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1204 | 1.477 | 0.2192 | 1.063 | 182 | B | 72 | B |
3022 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 0.1202 | 1.521 | 0.2319 | 1.080 | 193 | B | 71 | B |
3023 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 0.1220 | 1.516 | 0.1769 | 1.107 | 145 | B | 73 | B |
3024 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 0.1216 | 1.490 | 0.1945 | 1.043 | 160 | B | 70 | B |
3025 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 0.1194 | 1.499 | 0.2078 | 1.094 | 174 | B | 73 | B |
3026 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 0.1213 | 1.490 | 0.1990 | 1.058 | 164 | B | 71 | B |
3027 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 0.1197 | 1.516 | 0.2046 | 1.167 | 171 | B | 77 | B |
3028 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1213 | 1.502 | 0.2257 | 1.112 | 186 | B | 74 | B |
3029 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 0.1196 | 1.515 | 0.2201 | 1.152 | 184 | B | 76 | B |
3030 | 460.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1177 | 1.485 | 0.1695 | 1.039 | 144 | B | 70 | B |
3031 | 460.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1216 | 1.502 | 0.1982 | 1.097 | 163 | B | 73 | B |
3032 | 460.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1176 | 1.481 | 0.2105 | 1.111 | 179 | B | 75 | B |
3033 | 460.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1208 | 1.479 | 0.2030 | 1.035 | 168 | B | 70 | B |
3034 | 9.6 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1216 | 1.517 | 0.1301 | 1.320 | 107 | A+ | 87 | A+ |
3035 | 353.6 | 1.2 | 1.2 | 50.0 | 50.0 | 90.0 | 1.2 | 50.0 | 110.0 | 0.1214 | 1.511 | 0.2015 | 1.088 | 166 | B | 72 | B |
3036 | 422.0 | 1.2 | 50.0 | 90.0 | 90.0 | 0.8 | 50.0 | 50.0 | 90.0 | 0.1192 | 1.489 | 0.2086 | 1.057 | 175 | B | 71 | B |
3037 | 353.6 | 50.0 | 50.0 | 110.0 | 90.0 | 50.0 | 1.2 | 1.2 | 1.2 | 0.1208 | 1.484 | 0.1957 | 1.113 | 162 | B | 75 | B |
3038 | 720.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1179 | 1.512 | 0.1249 | 1.300 | 106 | A+ | 86 | A+ |
3039 | 106.8 | 0.8 | 1.2 | 1.2 | 50.0 | 1.2 | 50.0 | 1.2 | 1.2 | 0.1205 | 1.483 | 0.2205 | 1.083 | 183 | B | 73 | B |
3040 | 9.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1215 | 1.507 | 0.1932 | 1.131 | 159 | B | 75 | B |
3041 | 453.2 | 0.8 | 90.0 | 90.0 | 1.2 | 90.0 | 1.2 | 90.0 | 90.0 | 0.1192 | 1.505 | 0.2098 | 1.053 | 176 | B | 70 | B |
3042 | 630.8 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1209 | 1.479 | 0.2164 | 1.050 | 179 | B | 71 | B |
3043 | 9.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1191 | 1.494 | 0.2107 | 1.075 | 177 | B | 72 | B |
3044 | 9.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1193 | 1.478 | 0.1801 | 1.123 | 151 | B | 76 | B |
3045 | 9.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1185 | 1.508 | 0.2074 | 1.055 | 175 | B | 70 | B |
[表10]
表4(其2) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液3) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
3046 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 0.1193 | 1.483 | 0.2315 | 1.053 | 194 | B | 71 | B |
3047 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 0.1205 | 1.506 | 0.2350 | 1.160 | 195 | B | 77 | B |
3048 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 0.1180 | 1.525 | 0.2029 | 1.113 | 172 | B | 73 | B |
3049 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 0.1200 | 1.490 | 0.1979 | 1.118 | 165 | B | 75 | B |
3050 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 0.1195 | 1.484 | 0.1757 | 1.083 | 147 | B | 73 | B |
3051 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 0.1196 | 1.512 | 0.1973 | 1.134 | 165 | B | 75 | B |
3052 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 0.1198 | 1.500 | 0.2287 | 1.155 | 191 | B | 77 | B |
3053 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 0.1188 | 1.508 | 0.2341 | 1.131 | 197 | B | 75 | B |
3054 | 118.4 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1194 | 1.475 | 0.1875 | 1.033 | 157 | B | 70 | B |
3055 | 118.4 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1180 | 1.482 | 0.1817 | 1.111 | 154 | B | 75 | B |
3056 | 118.4 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1175 | 1.484 | 0.1704 | 1.143 | 145 | B | 77 | B |
3057 | 421.6 | 50.0 | 90.0 | 0.8 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 0.1209 | 1.521 | 0.2188 | 1.126 | 181 | B | 74 | B |
3058 | 630.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1204 | 1.480 | 0.2094 | 1.051 | 174 | B | 71 | B |
3059 | 630.8 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1206 | 1.489 | 0.1772 | 1.042 | 147 | B | 70 | B |
3060 | 630.8 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1182 | 1.484 | 0.2245 | 1.054 | 190 | B | 71 | B |
3061 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.1194 | 1.509 | 0.1720 | 1.102 | 144 | B | 73 | B |
3062 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 0.1221 | 1.524 | 0.1954 | 1.067 | 160 | B | 70 | B |
3063 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 0.1194 | 1.493 | 0.2328 | 0.105 | 195 | B | 74 | B |
3064 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 0.1204 | 1.500 | 0.1649 | 1.110 | 137 | B | 74 | B |
3065 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 0.1220 | 1.510 | 0.2208 | 1.057 | 181 | B | 70 | B |
3066 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 0.1202 | 1.481 | 0.2188 | 1.111 | 182 | B | 75 | B |
3067 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 0.1181 | 1.493 | 0.1925 | 1.120 | 163 | B | 75 | B |
3068 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 0.1194 | 1.518 | 0.1994 | 1.078 | 167 | B | 71 | B |
3069 | 740.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1177 | 1.503 | 0.1930 | 1.097 | 164 | B | 73 | B |
3070 | 740.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1222 | 1.498 | 0.2053 | 1.063 | 168 | B | 71 | B |
3071 | 740.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1221 | 1.504 | 0.2417 | 1.143 | 198 | B | 76 | B |
3072 | 118.4 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1208 | 1.511 | 0.2247 | 1.088 | 186 | B | 72 | B |
3073 | 740.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1192 | 1.512 | 0.2348 | 1.165 | 197 | B | 77 | B |
3074 | 470.8 | 0.8 | 50.0 | 50.0 | 110.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1225 | 1.491 | 0.1764 | 1.074 | 144 | B | 72 | B |
3075 | 215.6 | 1.2 | 1.2 | 50.0 | 1.2 | 110.0 | 0.8 | 1.2 | 50.0 | 0.1213 | 1.510 | 0.1625 | 1.072 | 134 | B | 71 | B |
3076 | 284.0 | 50.0 | 0.8 | 50.0 | 90.0 | 1.2 | 1.2 | 90.0 | 0.8 | 0.1195 | 1.504 | 0.2329 | 1.083 | 195 | B | 72 | B |
3077 | 393.2 | 50.0 | 1.2 | 90.0 | 0.8 | 50.0 | 90.0 | 110.0 | 1.2 | 0.1204 | 1.505 | 0.1698 | 1.054 | 141 | B | 70 | B |
3078 | 372.8 | 90.0 | 90.0 | 1.2 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 0.1213 | 1.485 | 0.1929 | 1.114 | 159 | B | 75 | B |
3079 | 482.0 | 90.0 | 110.0 | 50.0 | 0.8 | 90.0 | 50.0 | 90.0 | 1.2 | 0.1213 | 1.489 | 0.2183 | 1.057 | 180 | B | 71 | B |
3080 | 482.0 | 90.0 | 110.0 | 50.0 | 1.2 | 50.0 | 90.0 | 0.8 | 90.0 | 0.1211 | 1.478 | 0.2179 | 1.049 | 180 | B | 71 | B |
3081 | 324.0 | 0.8 | 1.2 | 1.2 | 90.0 | 0.8 | 90.0 | 90.0 | 50.0 | 0.1189 | 1.501 | 0.2365 | 1.126 | 199 | B | 75 | B |
3082 | 401.6 | 50.0 | 50.0 | 110.0 | 50.0 | 90.0 | 0.8 | 0.8 | 50.0 | 0.1214 | 1.512 | 0.1772 | 1.149 | 146 | B | 76 | B |
3083 | 344.4 | 90.0 | 50.0 | 0.8 | 1.2 | 1.2 | 90.0 | 1.2 | 110.0 | 0.1183 | 1.507 | 0.1905 | 1.160 | 161 | B | 77 | B |
3084 | 453.6 | 90.0 | 90.0 | 1.2 | 110.0 | 1.2 | 1.2 | 110.0 | 50.0 | 0.1183 | 1.500 | 0.2248 | 1.110 | 190 | B | 74 | B |
3085 | 441.6 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.8 | 110.0 | 0.1211 | 1.500 | 0.1707 | 1.125 | 141 | B | 75 | B |
3086 | 462.0 | 110.0 | 0.8 | 110.0 | 1.2 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1218 | 1.485 | 0.2155 | 1.054 | 177 | B | 71 | B |
3087 | 304.0 | 1.2 | 110.0 | 0.8 | 90.0 | 1.2 | 50.0 | 0.8 | 50.0 | 0.1222 | 1.525 | 0.1882 | 1.174 | 154 | B | 77 | B |
3088 | 502.0 | 50.0 | 90.0 | 0.8 | 110.0 | 110.0 | 50.0 | 1.2 | 90.0 | 0.1225 | 1.495 | 0.1959 | 1.151 | 160 | B | 77 | B |
3089 | 502.0 | 50.0 | 110.0 | 1.2 | 50.0 | 110.0 | 0.8 | 90.0 | 90.0 | 0.1187 | 1.498 | 0.1828 | 1.154 | 154 | B | 77 | B |
3090 | 392.8 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 110.0 | 90.0 | 1.2 | 0.1225 | 1.487 | 0.2327 | 1.145 | 190 | B | 77 | B |
[表11]
表4(其3) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液3) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
3091 | 502.0 | 110.0 | 0.8 | 110.0 | 50.0 | 1.2 | 90.0 | 50.0 | 90.0 | 0.1204 | 1.487 | 0.2204 | 1.071 | 183 | B | 72 | B |
3092 | 413.2 | 110.0 | 50.0 | 1.2 | 1.2 | 90.0 | 50.0 | 110.0 | 0.8 | 0.1183 | 1.519 | 0.2165 | 1.124 | 183 | B | 74 | B |
3093 | 392.8 | 110.0 | 90.0 | 50.0 | 50.0 | 0.8 | 90.0 | 1.2 | 0.8 | 0.1216 | 1.520 | 0.2212 | 1.125 | 182 | B | 74 | B |
3094 | 255.2 | 1.2 | 0.8 | 1.2 | 0.8 | 50.0 | 110.0 | 1.2 | 90.0 | 0.1216 | 1.511 | 0.1593 | 1.058 | 131 | B | 70 | B |
3095 | 542.0 | 1.2 | 50.0 | 90.0 | 110.0 | 110.0 | 90.0 | 90.0 | 0.8 | 0.1209 | 1.499 | 0.2382 | 1.139 | 197 | B | 76 | B |
3096 | 255.2 | 50.0 | 1.2 | 90.0 | 1.2 | 1.2 | 110.0 | 0.8 | 0.8 | 0.1185 | 1.495 | 0.2227 | 1.121 | 188 | B | 75 | B |
3097 | 295.2 | 1.2 | 0.8 | 1.2 | 110.0 | 90.0 | 90.0 | 0.8 | 1.2 | 0.1217 | 1.481 | 0.1753 | 1.111 | 144 | B | 75 | B |
3098 | 472.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.8 | 1.2 | 110.0 | 0.1224 | 1.511 | 1.1921 | 1.072 | 157 | B | 71 | B |
3099 | 303.6 | 0.8 | 50.0 | 50.0 | 0.8 | 1.2 | 0.8 | 110.0 | 90.0 | 0.1218 | 1.489 | 0.2144 | 1.087 | 176 | B | 73 | B |
3100 | 324.0 | 1.2 | 110.0 | 0.8 | 50.0 | 50.0 | 1.2 | 110.0 | 0.8 | 0.1207 | 1.519 | 0.2100 | 1.079 | 174 | B | 71 | B |
3101 | 433.2 | 50.0 | 110.0 | 1.2 | 1.2 | 0.8 | 110.0 | 50.0 | 110.0 | 0.1202 | 1.489 | 0.1851 | 1.146 | 154 | B | 77 | B |
3102 | 610.8 | 90.0 | 0.8 | 90.0 | 50.0 | 110.0 | 110.0 | 110.0 | 50.0 | 0.1212 | 1.523 | 0.1782 | 1.066 | 147 | B | 70 | B |
3103 | 412.8 | 90.0 | 1.2 | 110.0 | 0.8 | 110.0 | 50.0 | 50.0 | 0.8 | 0.1197 | 1.493 | 0.2047 | 1.045 | 171 | B | 70 | B |
3104 | 166.0 | 0.8 | 0.8 | 0.8 | 1.2 | 110.0 | 1.2 | 50.0 | 1.2 | 0.1204 | 1.478 | 0.1853 | 1.064 | 154 | B | 72 | B |
3105 | 562.0 | 110.0 | 90.0 | 50.0 | 90.0 | 110.0 | 110.0 | 0.8 | 1.2 | 0.1183 | 1.495 | 0.1704 | 1.121 | 144 | B | 75 | B |
3106 | 364.0 | 110.0 | 110.0 | 90.0 | 0.8 | 0.8 | 1.2 | 1.2 | 50.0 | 0.1207 | 1.478 | 0.1714 | 1.035 | 142 | B | 70 | B |
3107 | 473.2 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 50.0 | 1.2 | 0.1196 | 1.489 | 0.2141 | 1.147 | 179 | B | 77 | B |
3108 | 513.2 | 1.2 | 90.0 | 110.0 | 0.8 | 1.2 | 110.0 | 90.0 | 110.0 | 0.1179 | 1.524 | 0.2051 | 1.127 | 174 | B | 74 | B |
3109 | 315.2 | 1.2 | 90.0 | 110.0 | 1.2 | 0.8 | 0.8 | 110.0 | 1.2 | 0.1176 | 1.491 | 0.2245 | 1.059 | 191 | B | 71 | B |
3110 | 481.6 | 50.0 | 0.8 | 50.0 | 110.0 | 0.8 | 50.0 | 110.0 | 110.0 | 0.1217 | 1.488 | 0.1923 | 1.131 | 158 | B | 76 | B |
3111 | 404.0 | 90.0 | 1.2 | 110.0 | 110.0 | 0.8 | 1.2 | 0.8 | 90.0 | 0.1202 | 1.501 | 0.2320 | 1.156 | 193 | B | 77 | B |
3112 | 602.0 | 110.0 | 1.2 | 0.8 | 90.0 | 90.0 | 110.0 | 110.0 | 90.0 | 0.1190 | 1.498 | 0.1726 | 1.063 | 145 | B | 71 | B |
3113 | 472.8 | 110.0 | 1.2 | 0.8 | 110.0 | 50.0 | 0.8 | 90.0 | 110.0 | 0.1219 | 1.508 | 0.1731 | 1.161 | 142 | B | 77 | B |
3114 | 384.0 | 110.0 | 50.0 | 1.2 | 0.8 | 110.0 | 1.2 | 0.8 | 110.0 | 0.1215 | 1.516 | 0.1969 | 1.061 | 162 | B | 70 | B |
3115 | 730.8 | 0.8 | 110.0 | 110.0 | 90.0 | 110.0 | 90.0 | 110.0 | 110.0 | 0.1194 | 1.507 | 0.1923 | 1.131 | 161 | B | 75 | B |
3116 | 532.8 | 0.8 | 110.0 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 0.1219 | 1.520 | 0.1682 | 1.155 | 138 | B | 76 | B |
[表12]
表5(其1) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液4) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
4001 | 400.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1214 | 1.500 | 0.1348 | 1.335 | 111 | A+ | 89 | A+ |
4002 | 351.2 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1180 | 1.513 | 0.1275 | 1.377 | 108 | A+ | 91 | A+ |
4003 | 351.2 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1220 | 1.498 | 0.1343 | 1.304 | 110 | A+ | 87 | A+ |
4004 | 351.2 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1213 | 1.488 | 0.1286 | 1.339 | 106 | A+ | 90 | A+ |
4005 | 351.2 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1212 | 1.506 | 0.1321 | 1.355 | 109 | A+ | 90 | A+ |
4006 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 0.1208 | 1.480 | 0.1353 | 1.332 | 112 | A+ | 90 | A+ |
4007 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 0.1206 | 1.514 | 0.1278 | 1.348 | 106 | A+ | 89 | A+ |
4008 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 0.1188 | 1.481 | 0.1330 | 1.318 | 112 | A+ | 89 | A+ |
4009 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 0.1207 | 1.488 | 0.1291 | 1.295 | 107 | A+ | 87 | A+ |
4010 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 0.1194 | 1.524 | 0.1290 | 1.356 | 108 | A+ | 89 | A+ |
4011 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1193 | 1.492 | 0.1324 | 1.298 | 111 | A+ | 87 | A+ |
4012 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 0.1201 | 1.485 | 0.1309 | 1.292 | 109 | A+ | 87 | A+ |
4013 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.1176 | 1.502 | 0.1270 | 1.352 | 108 | A+ | 90 | A+ |
4014 | 440.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1211 | 1.525 | 0.1357 | 1.372 | 112 | A+ | 90 | A+ |
4015 | 440.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1182 | 1.479 | 0.1301 | 1.331 | 110 | A+ | 90 | A+ |
4016 | 440.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1218 | 1.495 | 0.1364 | 1.345 | 112 | A+ | 90 | A+ |
4017 | 440.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1201 | 1.492 | 0.1310 | 1.283 | 109 | A+ | 86 | A+ |
4018 | 350.8 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1220 | 1.516 | 0.2294 | 1.168 | 188 | B | 77 | B |
4019 | 350.8 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1213 | 1.479 | 0.2329 | 1.109 | 192 | B | 75 | B |
4020 | 350.8 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1188 | 1.499 | 0.1890 | 1.124 | 159 | B | 75 | B |
4021 | 350.8 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1210 | 1.485 | 0.1851 | 1.129 | 153 | B | 76 | B |
4022 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 0.1200 | 1.504 | 0.2076 | 1.098 | 173 | B | 73 | B |
4023 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 0.1194 | 1510 | 0.1588 | 1.163 | 133 | B | 77 | B |
4024 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 0.1214 | 1.506 | 0.1943 | 1.069 | 160 | B | 71 | B |
4025 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 0.1215 | 1.485 | 0.2162 | 1.084 | 178 | B | 73 | B |
4026 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 0.1188 | 1.520 | 0.1937 | 1.079 | 163 | B | 71 | B |
4027 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 0.1209 | 1.475 | 0.2357 | 1.033 | 195 | B | 70 | B |
4028 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1195 | 1.485 | 0.1625 | 1.129 | 136 | B | 76 | B |
4029 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 0.1178 | 1.480 | 0.1884 | 1.066 | 160 | B | 72 | B |
4030 | 460.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1201 | 1.515 | 0.2041 | 1.075 | 170 | B | 71 | B |
4031 | 460.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1215 | 1.493 | 0.1810 | 1.045 | 149 | B | 70 | B |
4032 | 460.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1177 | 1.478 | 0.1672 | 1.123 | 142 | B | 76 | B |
4033 | 460.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1188 | 1.498 | 0.1841 | 1.063 | 155 | B | 71 | B |
4034 | 9.6 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1176 | 1.496 | 0.1293 | 1.302 | 110 | A+ | 87 | A+ |
4035 | 353.6 | 1.2 | 1.2 | 50.0 | 50.0 | 90.0 | 1.2 | 50.0 | 110.0 | 0.1215 | 1.477 | 0.2247 | 1.063 | 185 | B | 72 | B |
4036 | 422.0 | 1.2 | 50.0 | 90.0 | 90.0 | 0.8 | 50.0 | 50.0 | 90.0 | 0.1208 | 1.501 | 0.1958 | 1.126 | 162 | B | 75 | B |
4037 | 353.6 | 50.0 | 50.0 | 110.0 | 90.0 | 50.0 | 1.2 | 1.2 | 1.2 | 0.1202 | 1.515 | 0.1658 | 1.061 | 138 | B | 70 | B |
4038 | 720.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1201 | 1.523 | 0.1321 | 1.310 | 110 | A+ | 86 | A+ |
4039 | 106.8 | 0.8 | 1.2 | 1.2 | 50.0 | 1.2 | 50.0 | 1.2 | 1.2 | 0.1223 | 1.499 | 0.2190 | 1.139 | 179 | B | 76 | B |
4040 | 9.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1199 | 1.503 | 0.1979 | 1.082 | 165 | B | 72 | B |
4041 | 453.2 | 0.8 | 90.0 | 90.0 | 1.2 | 90.0 | 1.2 | 90.0 | 90.0 | 0.1205 | 1.514 | 0.1844 | 1.090 | 153 | B | 72 | B |
4042 | 630.8 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1189 | 1.476 | 0.1807 | 1.062 | 152 | B | 72 | B |
4043 | 9.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1203 | 1.500 | 0.2358 | 1.125 | 196 | B | 75 | B |
4044 | 9.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1180 | 1.508 | 0.2289 | 1.161 | 194 | B | 77 | B |
4045 | 9.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1220 | 1.507 | 0.2379 | 0.070 | 195 | B | 71 | B |
[表13]
表5(其2) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液4) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
4046 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 0.1197 | 1.478 | 0.1568 | 1.064 | 131 | B | 72 | B |
4047 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 0.1204 | 1.488 | 0.2373 | 1.072 | 197 | B | 72 | B |
4048 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 0.1188 | 1.478 | 0.1675 | 1.035 | 141 | B | 70 | B |
4049 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 0.1198 | 1.521 | 0.2181 | 1.126 | 182 | B | 74 | B |
4050 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 0.1186 | 1.510 | 0.2159 | 1.148 | 182 | B | 76 | B |
4051 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 0.1193 | 1.494 | 0.1730 | 1.151 | 145 | B | 77 | B |
4052 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 0.1196 | 1.494 | 0.2284 | 1.046 | 191 | B | 70 | B |
4053 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 0.1197 | 1.514 | 0.1939 | 1.105 | 162 | B | 73 | B |
4054 | 118.4 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1176 | 1.497 | 0.2082 | 1.048 | 177 | B | 70 | B |
4055 | 118.4 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1215 | 1.491 | 0.2320 | 1.059 | 191 | B | 71 | B |
4056 | 118.4 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1194 | 1.510 | 0.2340 | 1.102 | 196 | B | 73 | B |
4057 | 421.6 | 50.0 | 90.0 | 0.8 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 0.1194 | 1.516 | 0.1611 | 1.137 | 135 | B | 75 | B |
4058 | 630.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1185 | 1.522 | 0.1897 | 1.156 | 160 | B | 76 | B |
4059 | 630.8 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1186 | 1.480 | 0.2277 | 1.125 | 192 | B | 76 | B |
4060 | 630.8 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1193 | 1.489 | 0.1798 | 1.072 | 150 | B | 72 | B |
4061 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.1215 | 1.507 | 0.1811 | 1.055 | 149 | B | 70 | B |
4062 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 0.1192 | 1.512 | 0.2337 | 1.149 | 196 | B | 76 | B |
4063 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 0.1199 | 1.489 | 0.1883 | 1.131 | 157 | B | 76 | B |
4064 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 0.1175 | 1.522 | 0.1634 | 1.111 | 139 | B | 73 | B |
4065 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 0.1219 | 1.519 | 0.1584 | 1.139 | 130 | B | 75 | B |
4066 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 0.1209 | 1.517 | 0.1947 | 1.092 | 161 | B | 72 | B |
4067 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 0.1179 | 1.522 | 0.2276 | 1.142 | 193 | B | 75 | B |
4068 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 0.1211 | 1.496 | 0.1998 | 1.107 | 165 | B | 74 | B |
4069 | 740.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1204 | 1.481 | 0.1745 | 1.096 | 145 | B | 74 | B |
4070 | 740.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1176 | 1.525 | 0.2070 | 1.128 | 176 | B | 74 | B |
4071 | 740.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1197 | 1.481 | 0.2358 | 1.096 | 197 | B | 74 | B |
4072 | 118.4 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1197 | 1.504 | 0.2010 | 1.068 | 168 | B | 71 | B |
4073 | 740.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1215 | 1.494 | 0.2005 | 1.046 | 165 | B | 70 | B |
4074 | 470.8 | 0.8 | 50.0 | 50.0 | 110.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1219 | 1.516 | 0.1780 | 1.122 | 146 | B | 74 | B |
4075 | 215.6 | 1.2 | 1.2 | 50.0 | 1.2 | 110.0 | 0.8 | 1.2 | 50.0 | 0.1214 | 1.483 | 0.1980 | 1.053 | 163 | B | 71 | B |
4076 | 284.0 | 50.0 | 0.8 | 50.0 | 90.0 | 1.2 | 1.2 | 90.0 | 0.8 | 0.1221 | 1.505 | 0.1636 | 1.083 | 134 | B | 72 | B |
4077 | 393.2 | 50.0 | 1.2 | 90.0 | 0.8 | 50.0 | 90.0 | 110.0 | 1.2 | 0.1212 | 1.481 | 0.2169 | 1.066 | 179 | B | 72 | B |
4078 | 372.8 | 90.0 | 90.0 | 1.2 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 0.1191 | 1.480 | 0.1941 | 1.036 | 163 | B | 70 | B |
4079 | 482.0 | 90.0 | 110.0 | 50.0 | 0.8 | 90.0 | 50.0 | 90.0 | 1.2 | 0.1175 | 1.521 | 0.2233 | 1.080 | 190 | B | 71 | B |
4080 | 482.0 | 90.0 | 110.0 | 50.0 | 1.2 | 50.0 | 90.0 | 0.8 | 90.0 | 0.1215 | 1.480 | 0.1713 | 1.080 | 141 | B | 73 | B |
4081 | 324.0 | 0.8 | 1.2 | 1.2 | 90.0 | 0.8 | 90.0 | 90.0 | 50.0 | 0.1213 | 1.519 | 0.1698 | 1.063 | 140 | B | 70 | B |
4082 | 401.6 | 50.0 | 50.0 | 110.0 | 50.0 | 90.0 | 0.8 | 0.8 | 50.0 | 0.1205 | 1.479 | 0.1735 | 1.065 | 144 | B | 72 | B |
4083 | 344.4 | 90.0 | 50.0 | 0.8 | 1.2 | 1.2 | 90.0 | 1.2 | 110.0 | 0.1193 | 1.478 | 0.2230 | 1.123 | 187 | B | 76 | B |
4084 | 453.6 | 90.0 | 90.0 | 1.2 | 110.0 | 1.2 | 1.2 | 110.0 | 50.0 | 0.1196 | 1.510 | 0.2128 | 1.102 | 178 | B | 73 | B |
4085 | 441.6 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.8 | 110.0 | 0.1183 | 1.520 | 0.1928 | 1.140 | 163 | B | 75 | B |
4086 | 462.0 | 110.0 | 0.8 | 110.0 | 1.2 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1216 | 1.517 | 0.1678 | 1.123 | 138 | B | 74 | B |
4087 | 304.0 | 1.2 | 110.0 | 0.8 | 90.0 | 1.2 | 50.0 | 0.8 | 50.0 | 0.1213 | 1.516 | 0.1613 | 1.122 | 133 | B | 74 | B |
4088 | 502.0 | 50.0 | 90.0 | 0.8 | 110.0 | 110.0 | 50.0 | 1.2 | 90.0 | 0.1224 | 1.479 | 0.1787 | 1.080 | 146 | B | 73 | B |
4089 | 502.0 | 50.0 | 110.0 | 1.2 | 50.0 | 110.0 | 0.8 | 90.0 | 90.0 | 0.1220 | 1.502 | 0.1915 | 1.142 | 157 | B | 76 | B |
4090 | 392.8 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 110.0 | 90.0 | 1.2 | 0.1196 | 1.495 | 0.2273 | 1.062 | 190 | B | 71 | B |
[表14]
表5(其3) | 第1金屬離子的總計含量(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | |||||||||||||
實施例(處理液4) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
4091 | 502.0 | 110.0 | 0.8 | 110.0 | 50.0 | 1.2 | 90.0 | 50.0 | 90.0 | 0.1216 | 1.522 | 0.1739 | 1.157 | 143 | B | 76 | B |
4092 | 413.2 | 110.0 | 50.0 | 1.2 | 1.2 | 90.0 | 50.0 | 110.0 | 0.8 | 0.1178 | 1.483 | 0.1614 | 1.068 | 137 | B | 72 | B |
4093 | 392.8 | 110.0 | 90.0 | 50.0 | 50.0 | 0.8 | 90.0 | 1.2 | 0.8 | 0.1201 | 1.524 | 0.2293 | 1.174 | 191 | B | 77 | B |
4094 | 255.2 | 1.2 | 0.8 | 1.2 | 0.8 | 50.0 | 110.0 | 1.2 | 90.0 | 0.1211 | 1.513 | 0.2265 | 1.135 | 187 | B | 75 | B |
4095 | 542.0 | 1.2 | 50.0 | 90.0 | 110.0 | 110.0 | 90.0 | 90.0 | 0.8 | 0.1198 | 1.482 | 0.2205 | 1.067 | 184 | B | 72 | B |
4096 | 255.2 | 50.0 | 1.2 | 90.0 | 1.2 | 1.2 | 110.0 | 0.8 | 0.8 | 0.1213 | 1.518 | 0.2232 | 1.153 | 184 | B | 76 | B |
4097 | 295.2 | 1.2 | 0.8 | 1.2 | 110.0 | 90.0 | 90.0 | 0.8 | 1.2 | 0.1180 | 1.510 | 0.1829 | 1.147 | 155 | B | 76 | B |
4098 | 472.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.8 | 1.2 | 110.0 | 0.1212 | 1.493 | 0.2037 | 1.090 | 168 | B | 73 | B |
4099 | 303.6 | 0.8 | 50.0 | 50.0 | 0.8 | 1.2 | 0.8 | 110.0 | 90.0 | 0.1192 | 1.483 | 0.1574 | 1.112 | 132 | B | 75 | B |
4100 | 324.0 | 1.2 | 110.0 | 0.8 | 50.0 | 50.0 | 1.2 | 110.0 | 0.8 | 0.1183 | 1.500 | 0.2260 | 1.140 | 191 | B | 76 | B |
4101 | 433.2 | 50.0 | 110.0 | 1.2 | 1.2 | 0.8 | 110.0 | 50.0 | 110.0 | 0.1196 | 1.517 | 0.1675 | 1.092 | 140 | B | 72 | B |
4102 | 610.8 | 90.0 | 0.8 | 90.0 | 50.0 | 110.0 | 110.0 | 110.0 | 50.0 | 0.1188 | 1.506 | 0.2008 | 1.160 | 169 | B | 77 | B |
4103 | 412.8 | 90.0 | 1.2 | 110.0 | 0.8 | 110.0 | 50.0 | 50.0 | 0.8 | 0.1183 | 1.522 | 0.1951 | 1.126 | 165 | B | 74 | B |
4104 | 166.0 | 0.8 | 0.8 | 0.8 | 1.2 | 110.0 | 1.2 | 50.0 | 1.2 | 0.1197 | 1.495 | 0.2047 | 1.091 | 171 | B | 73 | B |
4105 | 562.0 | 110.0 | 90.0 | 50.0 | 90.0 | 110.0 | 110.0 | 0.8 | 1.2 | 0.1175 | 1.498 | 0.1563 | 1.079 | 133 | B | 72 | B |
4106 | 364.0 | 110.0 | 110.0 | 90.0 | 0.8 | 0.8 | 1.2 | 1.2 | 50.0 | 0.1205 | 1.513 | 0.2349 | 1.104 | 195 | B | 73 | B |
4107 | 473.2 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 50.0 | 1.2 | 0.1180 | 1.486 | 0.1924 | 1.099 | 163 | B | 74 | B |
4108 | 513.2 | 1.2 | 90.0 | 110.0 | 0.8 | 1.2 | 110.0 | 90.0 | 110.0 | 0.1214 | 1.489 | 0.1590 | 1.102 | 131 | B | 74 | B |
4109 | 315.2 | 1.2 | 90.0 | 110.0 | 1.2 | 0.8 | 0.8 | 110.0 | 1.2 | 0.1193 | 1.507 | 0.1790 | 1.146 | 150 | B | 76 | B |
4110 | 481.6 | 50.0 | 0.8 | 50.0 | 110.0 | 0.8 | 50.0 | 110.0 | 110.0 | 0.1200 | 1.503 | 0.1884 | 1.157 | 157 | B | 77 | B |
4111 | 404.0 | 90.0 | 1.2 | 110.0 | 110.0 | 0.8 | 1.2 | 0.8 | 90.0 | 0.1209 | 1.513 | 0.2213 | 1.059 | 183 | B | 70 | B |
4112 | 602.0 | 110.0 | 1.2 | 0.8 | 90.0 | 90.0 | 110.0 | 110.0 | 90.0 | 0.1212 | 1.523 | 0.1696 | 1.142 | 140 | B | 75 | B |
4113 | 472.8 | 110.0 | 1.2 | 0.8 | 110.0 | 50.0 | 0.8 | 90.0 | 110.0 | 0.1213 | 1.510 | 0.1953 | 1.133 | 161 | B | 75 | B |
4114 | 384.0 | 110.0 | 50.0 | 1.2 | 0.8 | 110.0 | 1.2 | 0.8 | 110.0 | 0.1191 | 1.504 | 0.1990 | 1.098 | 167 | B | 73 | B |
4115 | 730.8 | 0.8 | 110.0 | 110.0 | 90.0 | 110.0 | 90.0 | 110.0 | 110.0 | 0.1181 | 1.517 | 0.1713 | 1.107 | 145 | B | 73 | B |
4116 | 532.8 | 0.8 | 110.0 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 0.1178 | 1.517 | 0.2108 | 1.092 | 179 | B | 72 | B |
[表15]
表6(其1) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液5) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
5001 | 400.0 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1199 | 1.507 | 0.1319 | 1.372 | 110 | A+ | 91 | A+ |
5002 | 351.2 | 1.2 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1215 | 1.502 | 0.1312 | 1.336 | 108 | A+ | 89 | A+ |
5003 | 351.2 | 50 | 1.2 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1221 | 1.52 | 0.1367 | 1.355 | 112 | A+ | 89 | A+ |
5004 | 351.2 | 50 | 50 | 1.2 | 50 | 50 | 50 | 50 | 50 | 0.1179 | 1.497 | 0.1309 | 1.333 | 111 | A+ | 89 | A+ |
5005 | 351.2 | 50 | 50 | 50 | 1.2 | 50 | 50 | 50 | 50 | 0.1192 | 1.484 | 0.1311 | 1.276 | 110 | A+ | 86 | A+ |
5006 | 351.2 | 50 | 50 | 50 | 50 | 1.2 | 50 | 50 | 50 | 0.1213 | 1.501 | 0.1298 | 1.351 | 107 | A+ | 90 | A+ |
5007 | 351.2 | 50 | 50 | 50 | 50 | 50 | 1.2 | 50 | 50 | 0.1198 | 1.515 | 0.1306 | 1.334 | 109 | A+ | 88 | A+ |
5008 | 351.2 | 50 | 50 | 50 | 50 | 50 | 50 | 1.2 | 50 | 0.1193 | 1.475 | 0.1277 | 1.298 | 107 | A+ | 88 | A+ |
5009 | 351.2 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 1.2 | 0.1211 | 1.485 | 0.1284 | 1.337 | 106 | A+ | 90 | A+ |
5010 | 440.0 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 90 | 0.1216 | 1.513 | 0.1338 | 1.301 | 110 | A+ | 86 | A+ |
5011 | 440.0 | 50 | 50 | 50 | 50 | 50 | 50 | 90 | 50 | 0.1217 | 1.483 | 0.1314 | 1.276 | 108 | A+ | 86 | A+ |
5012 | 440.0 | 50 | 50 | 50 | 50 | 50 | 90 | 50 | 50 | 0.1222 | 1.491 | 0.1332 | 1.298 | 109 | A+ | 87 | A+ |
5013 | 440.0 | 50 | 50 | 50 | 50 | 90 | 50 | 50 | 50 | 0.1204 | 1.496 | 0.1288 | 1.286 | 107 | A+ | 86 | A+ |
5014 | 440.0 | 50 | 50 | 50 | 90 | 50 | 50 | 50 | 50 | 0.1177 | 1.511 | 0.1260 | 1.344 | 107 | A+ | 89 | A+ |
5015 | 440.0 | 50 | 50 | 90 | 50 | 50 | 50 | 50 | 50 | 0.1212 | 1.519 | 0.1357 | 1.306 | 112 | A+ | 86 | A+ |
5016 | 440.0 | 50 | 90 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1219 | 1.478 | 0.1353 | 1.330 | 111 | A+ | 90 | A+ |
5017 | 440.0 | 90 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1220 | 1.507 | 0.1378 | 1.356 | 113 | A+ | 90 | A+ |
5018 | 350.8 | 0.8 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1213 | 1.483 | 0.1832 | 1.112 | 151 | B | 75 | B |
5019 | 350.8 | 50 | 0.8 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1186 | 1.518 | 0.2206 | 1.139 | 186 | B | 75 | B |
5020 | 350.8 | 50 | 50 | 0.8 | 50 | 50 | 50 | 50 | 50 | 0.1223 | 1.525 | 0.2128 | 1.067 | 174 | B | 70 | B |
5021 | 350.8 | 50 | 50 | 50 | 0.8 | 50 | 50 | 50 | 50 | 0.1216 | 1.524 | 0.1861 | 1.066 | 153 | B | 70 | B |
5022 | 350.8 | 50 | 50 | 50 | 50 | 0.8 | 50 | 50 | 50 | 0.1200 | 1.495 | 0.1691 | 1.092 | 141 | B | 73 | B |
5023 | 350.8 | 50 | 50 | 50 | 50 | 50 | 0.8 | 50 | 50 | 0.1179 | 1.520 | 0.1615 | 1.109 | 137 | B | 73 | B |
5024 | 350.8 | 50 | 50 | 50 | 50 | 50 | 50 | 0.8 | 50 | 0.1189 | 1.516 | 0.2141 | 1.062 | 180 | B | 70 | B |
5025 | 350.8 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 0.8 | 0.1185 | 1.500 | 0.1802 | 1.110 | 152 | B | 74 | B |
5026 | 460.0 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 110 | 0.1221 | 1.483 | 0.2406 | 1.097 | 197 | B | 74 | B |
5027 | 460.0 | 50 | 50 | 50 | 50 | 50 | 50 | 110 | 50 | 0.1187 | 1.479 | 0.1840 | 1.094 | 155 | B | 74 | B |
5028 | 460.0 | 50 | 50 | 50 | 50 | 50 | 110 | 50 | 50 | 0.1213 | 1.490 | 0.2073 | 1.088 | 171 | B | 73 | B |
5029 | 460.0 | 50 | 50 | 50 | 50 | 110 | 50 | 50 | 50 | 0.1207 | 1.517 | 0.1810 | 1.168 | 150 | B | 77 | B |
5030 | 460.0 | 50 | 50 | 50 | 110 | 50 | 50 | 50 | 50 | 0.1219 | 1.499 | 0.1938 | 1.049 | 159 | B | 70 | B |
5031 | 460.0 | 50 | 50 | 110 | 50 | 50 | 50 | 50 | 50 | 0.1214 | 1.480 | 0.2283 | 1.065 | 188 | B | 72 | B |
5032 | 460.0 | 50 | 110 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1202 | 1.500 | 0.2308 | 1.065 | 192 | B | 71 | B |
5033 | 460.0 | 110 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 0.1202 | 1.481 | 0.2032 | 1.126 | 169 | B | 76 | B |
5034 | 9.6 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1217 | 1.501 | 0.1363 | 1.351 | 112 | A+ | 90 | A+ |
5035 | 353.6 | 1.2 | 1.2 | 50 | 50 | 90 | 1.2 | 50 | 110.0 | 0.1221 | 1.495 | 0.1928 | 1.076 | 158 | B | 72 | B |
5036 | 422.0 | 1.2 | 50 | 90 | 90 | 0.8 | 50 | 50 | 90 | 0.1181 | 1.517 | 0.1748 | 1.123 | 148 | B | 74 | B |
5037 | 353.6 | 50 | 50 | 110.0 | 90 | 50 | 1.2 | 1.2 | 1.2 | 0.1222 | 1.493 | 0.2138 | 1.060 | 175 | B | 71 | B |
5038 | 720.0 | 90 | 90 | 90 | 90 | 90 | 90 | 90 | 90 | 0.1207 | 1.495 | 0.1316 | 1.330 | 109 | A+ | 89 | A+ |
5039 | 106.8 | 0.8 | 1.2 | 1.2 | 50 | 1.2 | 50 | 1.2 | 1.2 | 0.1179 | 1.484 | 0.1638 | 1.039 | 139 | B | 70 | B |
5040 | 9.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1194 | 1.482 | 0.1886 | 1.097 | 158 | B | 74 | B |
5041 | 453.2 | 0.8 | 90 | 90 | 1.2 | 90 | 1.2 | 90 | 90 | 0.1181 | 1.509 | 0.2255 | 1.056 | 191 | B | 70 | B |
5042 | 630.8 | 0.8 | 90 | 90 | 90 | 90 | 90 | 90 | 90 | 0.1188 | 1.507 | 0.2292 | 1.100 | 193 | B | 73 | B |
5043 | 9.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1207 | 1.504 | 0.2137 | 1.083 | 177 | B | 72 | B |
5044 | 9.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1211 | 1.476 | 0.1937 | 1.121 | 160 | B | 76 | B |
5045 | 9.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1202 | 1.503 | 0.2331 | 1.097 | 194 | B | 73 | B |
[表16]
表6(其2) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液5) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
5046 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 0.1203 | 1.510 | 0.1829 | 1.117 | 152 | B | 74 | B |
5047 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 0.1218 | 1.475 | 0.1790 | 1.077 | 147 | B | 73 | B |
5048 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 0.1208 | 1.494 | 0.1932 | 1.061 | 160 | B | 71 | B |
5049 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 0.1209 | 1.485 | 0.1705 | 1.143 | 141 | B | 77 | B |
5050 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 0.1220 | 1.500 | 0.2379 | 1.095 | 195 | B | 73 | B |
5051 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 0.1177 | 1.500 | 0.1837 | 1.080 | 156 | B | 72 | B |
5052 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 0.1177 | 1.500 | 0.1847 | 1.125 | 157 | B | 75 | B |
5053 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 0.1209 | 1.523 | 0.2019 | 1.172 | 167 | B | 77 | B |
5054 | 118.4 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1205 | 1.478 | 0.1662 | 1.109 | 138 | B | 75 | B |
5055 | 118.4 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1184 | 1.501 | 0.2214 | 1.126 | 187 | B | 75 | B |
5056 | 118.4 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1201 | 1.483 | 0.2318 | 1.068 | 193 | B | 72 | B |
5057 | 421.6 | 50.0 | 90.0 | 0.8 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 0.1202 | 1.508 | 0.1911 | 1.101 | 159 | B | 73 | B |
5058 | 630.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1210 | 1.507 | 0.1996 | 1.100 | 165 | B | 73 | B |
5059 | 630.8 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1185 | 1.490 | 0.2299 | 1.117 | 194 | B | 75 | B |
5060 | 630.8 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1196 | 1.512 | 0.2224 | 1.119 | 186 | B | 74 | B |
5061 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.1191 | 1.482 | 0.1739 | 1.082 | 146 | B | 73 | B |
5062 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 0.1215 | 1.524 | 0.2320 | 1.097 | 191 | B | 72 | B |
5063 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 0.1209 | 1.518 | 0.2030 | 1.093 | 168 | B | 72 | B |
5064 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 0.1199 | 1.509 | 0.1618 | 1.086 | 135 | B | 72 | B |
5065 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 0.1222 | 1.477 | 0.2371 | 1.093 | 194 | B | 74 | B |
5066 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 0.1201 | 1.522 | 0.1753 | 1.066 | 146 | B | 70 | B |
5067 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 0.1201 | 1.513 | 0.1718 | 1.089 | 143 | B | 72 | B |
5068 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 0.1209 | 1.497 | 0.1994 | 1.138 | 165 | B | 76 | B |
5069 | 740.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1186 | 1.508 | 0.1934 | 1.101 | 163 | B | 73 | B |
5070 | 740.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1185 | 1.488 | 0.1932 | 1.042 | 163 | B | 70 | B |
5071 | 740.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1194 | 1.497 | 0.1862 | 1.063 | 156 | B | 71 | B |
5072 | 118.4 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1224 | 1.503 | 0.1873 | 1.157 | 153 | B | 77 | B |
5073 | 740.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1179 | 1.513 | 0.2229 | 1.150 | 189 | B | 76 | B |
5074 | 470.8 | 0.8 | 50.0 | 50.0 | 110.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1188 | 1.517 | 0.1676 | 1.123 | 141 | B | 74 | B |
5075 | 215.6 | 1.2 | 1.2 | 50.0 | 1.2 | 110.0 | 0.8 | 1.2 | 50.0 | 0.1209 | 1.524 | 0.2346 | 1.112 | 194 | B | 73 | B |
5076 | 284.0 | 50.0 | 0.8 | 50.0 | 90.0 | 1.2 | 1.2 | 90.0 | 0.8 | 0.1176 | 1.490 | 0.1788 | 1.147 | 152 | B | 77 | B |
5077 | 393.2 | 50.0 | 1.2 | 90.0 | 0.8 | 50.0 | 90.0 | 110.0 | 1.2 | 0.1193 | 1.487 | 0.1563 | 1.100 | 131 | B | 74 | B |
5078 | 372.8 | 90.0 | 90.0 | 1.2 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 0.1212 | 1.480 | 0.1624 | 1.080 | 134 | B | 73 | B |
5079 | 482.0 | 90.0 | 110.0 | 50.0 | 0.8 | 90.0 | 50.0 | 90.0 | 1.2 | 0.1223 | 1.478 | 0.1981 | 1.138 | 162 | B | 77 | B |
5080 | 482.0 | 90.0 | 110.0 | 50.0 | 1.2 | 50.0 | 90.0 | 0.8 | 90.0 | 0.1181 | 1.476 | 0.2161 | 1.062 | 183 | B | 72 | B |
5081 | 324.0 | 0.8 | 1.2 | 1.2 | 90.0 | 0.8 | 90.0 | 90.0 | 50.0 | 0.1203 | 1.482 | 0.1996 | 1.097 | 166 | B | 74 | B |
5082 | 401.6 | 50.0 | 50.0 | 110.0 | 50.0 | 90.0 | 0.8 | 0.8 | 50.0 | 0.1221 | 1.481 | 0.1733 | 1.125 | 142 | B | 76 | B |
5083 | 344.4 | 90.0 | 50.0 | 0.8 | 1.2 | 1.2 | 90.0 | 1.2 | 110.0 | 0.1217 | 1.486 | 0.1875 | 1.070 | 154 | B | 72 | B |
5084 | 453.6 | 90.0 | 90.0 | 1.2 | 110.0 | 1.2 | 1.2 | 110.0 | 50.0 | 0.1188 | 1.522 | 0.2352 | 1.157 | 198 | B | 76 | B |
5085 | 441.6 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.8 | 110.0 | 0.1197 | 1.485 | 0.2358 | 1.040 | 197 | B | 70 | B |
5086 | 462.0 | 110.0 | 0.8 | 110.0 | 1.2 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1186 | 1.522 | 0.1885 | 1.141 | 159 | B | 75 | B |
5087 | 304.0 | 1.2 | 110.0 | 0.8 | 90.0 | 1.2 | 50.0 | 0.8 | 50.0 | 0.1224 | 1.483 | 0.2106 | 1.097 | 172 | B | 74 | B |
5088 | 502.0 | 50.0 | 90.0 | 0.8 | 110.0 | 110.0 | 50.0 | 1.2 | 90.0 | 0.1224 | 1.495 | 0.2302 | 1.122 | 188 | B | 75 | B |
5089 | 502.0 | 50.0 | 110.0 | 1.2 | 50.0 | 110.0 | 0.8 | 90.0 | 90.0 | 0.1187 | 1.523 | 0.1958 | 1.157 | 165 | B | 76 | B |
5090 | 392.8 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 110.0 | 90.0 | 1.2 | 0.1210 | 1.477 | 0.1960 | 1.122 | 162 | B | 76 | B |
[表17]
表6(其3) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液5) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
5091 | 502.0 | 110.0 | 0.8 | 110.0 | 50.0 | 1.2 | 90.0 | 50.0 | 90.0 | 0.1182 | 1.511 | 0.2127 | 1.164 | 180 | B | 77 | B |
5092 | 413.2 | 110.0 | 50.0 | 1.2 | 1.2 | 90.0 | 50.0 | 110.0 | 0.8 | 0.1205 | 1.481 | 0.1953 | 1.111 | 162 | B | 75 | B |
5093 | 392.8 | 110.0 | 90.0 | 50.0 | 50.0 | 0.8 | 90.0 | 1.2 | 0.8 | 0.1185 | 1.499 | 0.2263 | 1.154 | 191 | B | 77 | B |
5094 | 255.2 | 1.2 | 0.8 | 1.2 | 0.8 | 50.0 | 110.0 | 1.2 | 90.0 | 0.1184 | 1.519 | 0.1977 | 1.140 | 167 | B | 75 | B |
5095 | 542.0 | 1.2 | 50.0 | 90.0 | 110.0 | 110.0 | 90.0 | 90.0 | 0.8 | 0.1225 | 1.521 | 0.1948 | 1.125 | 159 | B | 74 | B |
5096 | 255.2 | 50.0 | 1.2 | 90.0 | 1.2 | 1.2 | 110.0 | 0.8 | 0.8 | 0.1180 | 1.478 | 0.1734 | 1.034 | 147 | B | 70 | B |
5097 | 295.2 | 1.2 | 0.8 | 1.2 | 110.0 | 90.0 | 90.0 | 0.8 | 1.2 | 0.1215 | 1.482 | 0.1787 | 1.052 | 147 | B | 71 | B |
5098 | 472.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.8 | 1.2 | 110.0 | 0.1179 | 1.476 | 0.1863 | 1.048 | 158 | B | 71 | B |
5099 | 303.6 | 0.8 | 50.0 | 50.0 | 0.8 | 1.2 | 0.8 | 110.0 | 90.0 | 0.1191 | 1.516 | 0.1990 | 1.167 | 167 | B | 77 | B |
5100 | 324.0 | 1.2 | 110.0 | 0.8 | 50.0 | 50.0 | 1.2 | 110.0 | 0.8 | 0.1211 | 1.476 | 0.1743 | 1.077 | 144 | B | 73 | B |
5101 | 433.2 | 50.0 | 110.0 | 1.2 | 1.2 | 0.8 | 110.0 | 50.0 | 110.0 | 0.1213 | 1.490 | 0.1893 | 1.147 | 156 | B | 77 | B |
5102 | 610.8 | 90.0 | 0.8 | 90.0 | 50.0 | 110.0 | 110.0 | 110.0 | 50.0 | 0.1223 | 1.508 | 0.2030 | 1.131 | 166 | B | 75 | B |
5103 | 412.8 | 90.0 | 1.2 | 110.0 | 0.8 | 110.0 | 50.0 | 50.0 | 0.8 | 0.1207 | 1.524 | 0.1775 | 1.159 | 147 | B | 76 | B |
5104 | 166.0 | 0.8 | 0.8 | 0.8 | 1.2 | 110.0 | 1.2 | 50.0 | 1.2 | 0.1183 | 1.476 | 0.1668 | 1.078 | 141 | B | 73 | B |
5105 | 562.0 | 110.0 | 90.0 | 50.0 | 90.0 | 110.0 | 110.0 | 0.8 | 1.2 | 0.1222 | 1.523 | 0.2285 | 1.142 | 187 | B | 75 | B |
5106 | 364.0 | 110.0 | 110.0 | 90.0 | 0.8 | 0.8 | 1.2 | 1.2 | 50.0 | 0.1198 | 1.515 | 0.1749 | 1.167 | 146 | B | 77 | B |
5107 | 473.2 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 50.0 | 1.2 | 0.1216 | 1.502 | 0.2006 | 1.142 | 165 | B | 76 | B |
5108 | 513.2 | 1.2 | 90.0 | 110.0 | 0.8 | 1.2 | 110.0 | 90.0 | 110.0 | 0.1204 | 1.491 | 0.2396 | 1.044 | 199 | B | 70 | B |
5109 | 315.2 | 1.2 | 90.0 | 110.0 | 1.2 | 0.8 | 0.8 | 110.0 | 1.2 | 0.1204 | 1.488 | 0.1963 | 1.086 | 163 | B | 73 | B |
5110 | 481.6 | 50.0 | 0.8 | 50.0 | 110.0 | 0.8 | 50.0 | 110.0 | 110.0 | 0.1187 | 1.510 | 0.1840 | 1.148 | 155 | B | 76 | B |
5111 | 404.0 | 90.0 | 1.2 | 110.0 | 110.0 | 0.8 | 1.2 | 0.8 | 90.0 | 0.1212 | 1.509 | 0.2279 | 1.102 | 188 | B | 73 | B |
5112 | 602.0 | 110.0 | 1.2 | 0.8 | 90.0 | 90.0 | 110.0 | 110.0 | 90.0 | 0.1222 | 1.483 | 0.2236 | 1.142 | 183 | B | 77 | B |
5113 | 472.8 | 110.0 | 1.2 | 0.8 | 110.0 | 50.0 | 0.8 | 90.0 | 110.0 | 0.1185 | 1.502 | 0.1955 | 1.156 | 165 | B | 77 | B |
5114 | 384.0 | 110.0 | 50.0 | 1.2 | 0.8 | 110.0 | 1.2 | 0.8 | 110.0 | 0.1189 | 1.498 | 0.1569 | 1.124 | 132 | B | 75 | B |
5115 | 730.8 | 0.8 | 110.0 | 110.0 | 90.0 | 110.0 | 90.0 | 110.0 | 110.0 | 0.1213 | 1.509 | 0.2244 | 1.102 | 185 | B | 73 | B |
5116 | 532.8 | 0.8 | 110.0 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 0.1203 | 1.500 | 0.2371 | 1.155 | 197 | B | 77 | B |
[表18]
表7(其1) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液6) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
6001 | 400.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1211 | 1.516 | 0.1369 | 1.380 | 113 | A+ | 91 | A+ |
6002 | 351.2 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1198 | 1.495 | 0.1270 | 1.345 | 106 | A+ | 90 | A+ |
6003 | 351.2 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1184 | 1.505 | 0.1326 | 1.310 | 112 | A+ | 87 | A+ |
6004 | 351.2 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1205 | 1.497 | 0.1277 | 1.333 | 106 | A+ | 89 | A+ |
6005 | 351.2 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1185 | 1.491 | 0.1292 | 1.357 | 109 | A+ | 91 | A+ |
6006 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 0.1221 | 1.196 | 0.1295 | 1.287 | 106 | A+ | 86 | A+ |
6007 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 0.1215 | 1.490 | 0.1373 | 1.341 | 113 | A+ | 90 | A+ |
6008 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 0.1209 | 1.480 | 0.1354 | 1.287 | 112 | A+ | 87 | A+ |
6009 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 0.1223 | 1.522 | 0.1321 | 1.354 | 108 | A+ | 89 | A+ |
6010 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 0.1213 | 1.479 | 0.1346 | 1.287 | 111 | A+ | 87 | A+ |
6011 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1224 | 1.503 | 0.1298 | 1.368 | 106 | A+ | 91 | A+ |
6012 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 0.1208 | 1.481 | 0.1304 | 1.304 | 108 | A+ | 88 | A+ |
6013 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.1223 | 1.518 | 0.1358 | 1.351 | 111 | A+ | 89 | A+ |
6014 | 440.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1202 | 1.503 | 0.1358 | 1.308 | 113 | A+ | 87 | A+ |
6015 | 440.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1217 | 1.523 | 0.1363 | 1.325 | 112 | A+ | 87 | A+ |
6016 | 440.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1222 | 1.498 | 0.1308 | 1.334 | 107 | A+ | 89 | A+ |
6017 | 440.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1177 | 1.522 | 0.1248 | 1.309 | 106 | A+ | 86 | A+ |
6018 | 350.8 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1183 | 1.516 | 0.1787 | 1.076 | 151 | B | 71 | B |
6019 | 350.8 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1176 | 1.490 | 0.1787 | 1.132 | 152 | B | 76 | B |
6020 | 350.8 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1200 | 1.486 | 0.1944 | 1.085 | 162 | B | 73 | B |
6021 | 350.8 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1204 | 1.492 | 0.1975 | 1.119 | 164 | B | 75 | B |
6022 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 0.1181 | 1.515 | 0.1630 | 1.091 | 138 | B | 72 | B |
6023 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 0.1194 | 1.495 | 0.1588 | 1.076 | 133 | B | 72 | B |
6024 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 0.1194 | 1.481 | 0.2257 | 1.096 | 189 | B | 74 | B |
6025 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 0.1198 | 1.488 | 0.2373 | 1.072 | 198 | B | 72 | B |
6026 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 0.1178 | 1.516 | 0.1884 | 1.167 | 160 | B | 77 | B |
6027 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 0.1182 | 1.520 | 0.1998 | 1.170 | 169 | B | 77 | B |
6028 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1188 | 1.510 | 0.1723 | 1.057 | 145 | B | 70 | B |
6029 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 0.1198 | 1.506 | 0.2241 | 1.114 | 187 | B | 74 | B |
6030 | 460.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1189 | 1.515 | 0.2307 | 1.060 | 194 | B | 70 | B |
6031 | 460.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1196 | 1.497 | 0.2333 | 1.108 | 195 | B | 74 | B |
6032 | 460.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1201 | 1.479 | 0.1837 | 1.109 | 153 | B | 75 | B |
6033 | 460.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1206 | 1.491 | 0.2111 | 1.089 | 175 | B | 73 | B |
6034 | 9.6 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1185 | 1.479 | 0.1292 | 1.287 | 109 | A+ | 87 | A+ |
6035 | 353.6 | 1.2 | 1.2 | 50.0 | 50.0 | 90.0 | 1.2 | 50.0 | 110.0 | 0.1216 | 1.524 | 0.1678 | 1.097 | 138 | B | 72 | B |
6036 | 422.0 | 1.2 | 50.0 | 90.0 | 90.0 | 0.8 | 50.0 | 50.0 | 90.0 | 0.1201 | 1.505 | 0.1814 | 1.144 | 151 | B | 76 | B |
6037 | 353.6 | 50.0 | 50.0 | 110.0 | 90.0 | 50.0 | 1.2 | 1.2 | 1.2 | 0.1195 | 1.520 | 0.2270 | 1.125 | 190 | B | 74 | B |
6038 | 720.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1204 | 1.520 | 0.1337 | 1.368 | 111 | A+ | 90 | A+ |
6039 | 106.8 | 0.8 | 1.2 | 1.2 | 50.0 | 1.2 | 50.0 | 1.2 | 1.2 | 0.1195 | 1.516 | 0.2235 | 1.091 | 187 | B | 72 | B |
6040 | 9.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1202 | 1.493 | 0.1899 | 1.075 | 158 | B | 72 | B |
6041 | 453.2 | 0.8 | 90.0 | 90.0 | 1.2 | 90.0 | 1.2 | 90.0 | 90.0 | 0.1216 | 1.505 | 0.1762 | 1.084 | 145 | B | 72 | B |
6042 | 630.8 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1188 | 1.521 | 0.1604 | 1.065 | 135 | B | 70 | B |
6043 | 9.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1211 | 1.495 | 0.1659 | 1.076 | 137 | B | 72 | B |
6044 | 9.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1201 | 1.485 | 0.1694 | 1.143 | 141 | B | 77 | B |
6045 | 9.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1185 | 1.511 | 0.1576 | 1.088 | 133 | B | 72 | B |
[表19]
表7(其2) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液6) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
6046 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 0.1196 | 1.485 | 0.2248 | 1.114 | 188 | B | 75 | B |
6047 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 0.1215 | 1.495 | 0.1896 | 1.091 | 156 | B | 73 | B |
6048 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 0.1184 | 1.513 | 0.2096 | 1.105 | 177 | B | 73 | B |
6049 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 0.1185 | 1.483 | 0.1588 | 1.038 | 134 | B | 70 | B |
6050 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 0.1208 | 1.484 | 0.1884 | 1.113 | 156 | B | 75 | B |
6051 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 0.1187 | 1.511 | 0.1947 | 1.148 | 164 | B | 76 | B |
6052 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 0.1211 | 1.477 | 0.1901 | 1.107 | 157 | B | 75 | B |
6053 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 0.1198 | 1.477 | 0.2372 | 1.108 | 198 | B | 75 | B |
6054 | 118.4 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1217 | 1.521 | 0.2312 | 1.156 | 190 | B | 76 | B |
6055 | 118.4 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1211 | 1.485 | 0.2386 | 1.114 | 197 | B | 75 | B |
6056 | 118.4 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1205 | 1.523 | 0.2338 | 1.172 | 194 | B | 77 | B |
6057 | 421.6 | 50.0 | 90.0 | 0.8 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 0.1199 | 1.515 | 0.2098 | 1.166 | 175 | B | 77 | B |
6058 | 630.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1193 | 1.491 | 0.2135 | 1.088 | 179 | B | 73 | B |
6059 | 630.8 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1211 | 1.490 | 0.2253 | 1.133 | 186 | B | 76 | B |
6060 | 630.8 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1207 | 1.500 | 0.1871 | 1.140 | 155 | B | 76 | B |
6061 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.1206 | 1.501 | 0.2099 | 1.051 | 174 | B | 70 | B |
6062 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 0.1189 | 1.478 | 0.2283 | 1.123 | 192 | B | 76 | B |
6063 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 0.1213 | 1.495 | 0.2075 | 1.151 | 171 | B | 77 | B |
6064 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 0.1200 | 1.517 | 0.2183 | 1.062 | 182 | B | 70 | B |
6065 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 0.1210 | 1.476 | 0.1706 | 1.107 | 141 | B | 75 | B |
6066 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 0.1187 | 1.523 | 0.1721 | 1.158 | 145 | B | 76 | B |
6067 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 0.1215 | 1.509 | 0.1956 | 1.162 | 161 | B | 77 | B |
6068 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 0.1199 | 1.501 | 0.2098 | 1.141 | 175 | B | 76 | B |
6069 | 740.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1178 | 1.516 | 0.2167 | 1.077 | 184 | B | 71 | B |
6070 | 740.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1177 | 1.475 | 0.1531 | 1.077 | 130 | B | 73 | B |
6071 | 740.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1221 | 1.522 | 0.2063 | 1.126 | 169 | B | 74 | B |
6072 | 118.4 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1216 | 1.516 | 0.2127 | 1.092 | 175 | B | 72 | B |
6073 | 740.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1182 | 1.521 | 0.1879 | 1.080 | 159 | B | 71 | B |
6074 | 470.8 | 0.8 | 50.0 | 50.0 | 110.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1217 | 1.513 | 0.2216 | 1.150 | 182 | B | 76 | B |
6075 | 215.6 | 1.2 | 1.2 | 50.0 | 1.2 | 110.0 | 0.8 | 1.2 | 50.0 | 0.1220 | 1.484 | 0.2074 | 1.113 | 170 | B | 75 | B |
6076 | 284.0 | 50.0 | 0.8 | 50.0 | 90.0 | 1.2 | 1.2 | 90.0 | 0.8 | 0.1209 | 1.479 | 0.2019 | 1.065 | 167 | B | 72 | B |
6077 | 393.2 | 50.0 | 1.2 | 90.0 | 0.8 | 50.0 | 90.0 | 110.0 | 1.2 | 0.1219 | 1.477 | 0.1671 | 1.138 | 137 | B | 77 | B |
6078 | 372.8 | 90.0 | 90.0 | 1.2 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 0.1221 | 1.510 | 0.2406 | 1.072 | 197 | B | 71 | B |
6079 | 482.0 | 90.0 | 110.0 | 50.0 | 0.8 | 90.0 | 50.0 | 90.0 | 1.2 | 0.1198 | 1.518 | 0.1617 | 1.108 | 135 | B | 73 | B |
6080 | 482.0 | 90.0 | 110.0 | 50.0 | 1.2 | 50.0 | 90.0 | 0.8 | 90.0 | 0.1217 | 1.491 | 0.1789 | 1.119 | 147 | B | 75 | B |
6081 | 324.0 | 0.8 | 1.2 | 1.2 | 90.0 | 0.8 | 90.0 | 90.0 | 50.0 | 0.1202 | 1.524 | 0.1563 | 1.113 | 130 | B | 73 | B |
6082 | 401.6 | 50.0 | 50.0 | 110.0 | 50.0 | 90.0 | 0.8 | 0.8 | 50.0 | 0.1208 | 1.508 | 0.1981 | 1.071 | 164 | B | 71 | B |
6083 | 344.4 | 90.0 | 50.0 | 0.8 | 1.2 | 1.2 | 90.0 | 1.2 | 110.0 | 0.1206 | 1.515 | 0.2050 | 1.061 | 170 | B | 70 | B |
6084 | 453.6 | 90.0 | 90.0 | 1.2 | 110.0 | 1.2 | 1.2 | 110.0 | 50.0 | 0.1182 | 1.494 | 0.1963 | 1.091 | 166 | B | 73 | B |
6085 | 441.6 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.8 | 110.0 | 0.1219 | 1.481 | 0.1902 | 1.141 | 156 | B | 77 | B |
6086 | 462.0 | 110.0 | 0.8 | 110.0 | 1.2 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1183 | 1.477 | 0.1858 | 1.049 | 157 | B | 71 | B |
6087 | 304.0 | 1.2 | 110.0 | 0.8 | 90.0 | 1.2 | 50.0 | 0.8 | 50.0 | 0.1202 | 1.522 | 0.1659 | 1.157 | 138 | B | 76 | B |
6088 | 502.0 | 50.0 | 90.0 | 0.8 | 110.0 | 110.0 | 50.0 | 1.2 | 90.0 | 0.1180 | 1.517 | 0.1640 | 1.062 | 139 | B | 70 | B |
6089 | 502.0 | 50.0 | 110.0 | 1.2 | 50.0 | 110.0 | 0.8 | 90.0 | 90.0 | 0.1204 | 1.489 | 0.2289 | 1.102 | 190 | B | 74 | B |
6090 | 392.8 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 110.0 | 90.0 | 1.2 | 0.1203 | 1.479 | 0.1588 | 1.110 | 132 | B | 75 | B |
[表20]
表7(其3) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液6) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
6091 | 502.0 | 110.0 | 0.8 | 110.0 | 50.0 | 1.2 | 90.0 | 50.0 | 90.0 | 0.1216 | 1.479 | 0.7970 | 1.109 | 162 | B | 75 | B |
6092 | 413.2 | 110.0 | 50.0 | 1.2 | 1.2 | 90.0 | 50.0 | 110.0 | 0.8 | 0.1181 | 1.494 | 0.1842 | 1.106 | 156 | B | 74 | B |
6093 | 392.8 | 110.0 | 90.0 | 50.0 | 50.0 | 0.8 | 90.0 | 1.2 | 0.8 | 0.1219 | 1.502 | 0.1744 | 1.127 | 143 | B | 75 | B |
6094 | 255.2 | 1.2 | 0.8 | 1.2 | 0.8 | 50.0 | 110.0 | 1.2 | 90.0 | 0.1196 | 1.508 | 0.2344 | 1.056 | 196 | B | 70 | B |
6095 | 542.0 | 1.2 | 50.0 | 90.0 | 110.0 | 110.0 | 90.0 | 90.0 | 0.8 | 0.1195 | 1.481 | 0.2114 | 1.111 | 177 | B | 75 | B |
6096 | 255.2 | 50.0 | 1.2 | 90.0 | 1.2 | 1.2 | 110.0 | 0.8 | 0.8 | 0.1216 | 1.519 | 0.1799 | 1.078 | 148 | B | 71 | B |
6097 | 295.2 | 1.2 | 0.8 | 1.2 | 110.0 | 90.0 | 90.0 | 0.8 | 1.2 | 0.1175 | 1.522 | 0.2198 | 1.066 | 187 | B | 70 | B |
6098 | 472.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.8 | 1.2 | 110.0 | 0.1182 | 1.486 | 0.2009 | 1.070 | 170 | B | 72 | B |
6099 | 303.6 | 0.8 | 50.0 | 50.0 | 0.8 | 1.2 | 0.8 | 110.0 | 90.0 | 0.1218 | 1.477 | 0.2192 | 1.093 | 180 | B | 74 | B |
6100 | 324.0 | 1.2 | 110.0 | 0.8 | 50.0 | 50.0 | 1.2 | 110.0 | 0.8 | 0.1215 | 1.476 | 0.2054 | 1.136 | 169 | B | 77 | B |
6101 | 433.2 | 50.0 | 110.0 | 1.2 | 1.2 | 0.8 | 110.0 | 50.0 | 110.0 | 0.1190 | 1.480 | 0.2201 | 1.110 | 185 | B | 75 | B |
6102 | 610.8 | 90.0 | 0.8 | 90.0 | 50.0 | 110.0 | 110.0 | 110.0 | 50.0 | 0.1208 | 1.484 | 0.1824 | 1.084 | 151 | B | 73 | B |
6103 | 412.8 | 90.0 | 1.2 | 110.0 | 0.8 | 110.0 | 50.0 | 50.0 | 0.8 | 0.1202 | 1.484 | 0.2259 | 1.113 | 188 | B | 75 | B |
6104 | 166.0 | 0.8 | 0.8 | 0.8 | 1.2 | 110.0 | 1.2 | 50.0 | 1.2 | 0.1182 | 1.506 | 0.2045 | 1.144 | 173 | B | 76 | B |
6105 | 562.0 | 110.0 | 90.0 | 50.0 | 90.0 | 110.0 | 110.0 | 0.8 | 1.2 | 0.1180 | 1.515 | 0.1735 | 1.151 | 147 | B | 76 | B |
6106 | 364.0 | 110.0 | 110.0 | 90.0 | 0.8 | 0.8 | 1.2 | 1.2 | 50.0 | 0.1205 | 1.495 | 0.1989 | 1.046 | 165 | B | 70 | B |
6107 | 473.2 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 50.0 | 1.2 | 0.1202 | 1.509 | 0.2031 | 1.117 | 169 | B | 74 | B |
6108 | 513.2 | 1.2 | 90.0 | 110.0 | 0.8 | 1.2 | 110.0 | 90.0 | 110.0 | 0.1209 | 1.522 | 0.1669 | 1.126 | 138 | B | 74 | B |
6109 | 315.2 | 1.2 | 90.0 | 110.0 | 1.2 | 0.8 | 0.8 | 110.0 | 1.2 | 0.1204 | 1.517 | 0.2023 | 1.138 | 168 | B | 75 | B |
6110 | 481.6 | 50.0 | 0.8 | 50.0 | 110.0 | 0.8 | 50.0 | 110.0 | 110.0 | 0.1219 | 1.511 | 0.2060 | 1.058 | 169 | B | 70 | B |
6111 | 404.0 | 90.0 | 1.2 | 110.0 | 110.0 | 0.8 | 1.2 | 0.8 | 90.0 | 0.1206 | 1.491 | 0.2074 | 1.073 | 172 | B | 72 | B |
6112 | 602.0 | 110.0 | 1.2 | 0.8 | 90.0 | 90.0 | 110.0 | 110.0 | 90.0 | 0.1223 | 1.520 | 0.2361 | 1.064 | 193 | B | 70 | B |
6113 | 472.8 | 110.0 | 1.2 | 0.8 | 110.0 | 50.0 | 0.8 | 90.0 | 110.0 | 0.1205 | 1.505 | 0.1905 | 1.069 | 158 | B | 71 | B |
6114 | 384.0 | 110.0 | 50.0 | 1.2 | 0.8 | 110.0 | 1.2 | 0.8 | 110.0 | 0.1204 | 1.494 | 0.2312 | 1.136 | 192 | B | 76 | B |
6115 | 730.8 | 0.8 | 110.0 | 110.0 | 90.0 | 110.0 | 90.0 | 110.0 | 110.0 | 0.1206 | 1.504 | 0.1604 | 1.053 | 133 | B | 70 | B |
6116 | 532.8 | 0.8 | 110.0 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 0.1219 | 1.478 | 0.1743 | 1.050 | 143 | B | 71 | B |
[表21]
表8(其1) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液7) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
7001 | 400.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1178 | 1.494 | 0.1295 | 1.300 | 110 | A+ | 87 | A+ |
7002 | 351.2 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1187 | 1.502 | 0.1306 | 1.322 | 110 | A+ | 88 | A+ |
7003 | 351.2 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1190 | 1.507 | 0.1297 | 1.342 | 109 | A+ | 89 | A+ |
7004 | 351.2 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1179 | 1.501 | 0.1285 | 1.306 | 109 | A+ | 87 | A+ |
7005 | 351.2 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1180 | 1.510 | 0.1263 | 1.314 | 107 | A+ | 87 | A+ |
7006 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 0.1187 | 1.516 | 0.1282 | 1.349 | 108 | A+ | 89 | A+ |
7007 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 0.1200 | 1.498 | 0.1272 | 1.288 | 106 | A+ | 86 | A+ |
7008 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 0.1200 | 1.507 | 0.1321 | 1.356 | 110 | A+ | 90 | A+ |
7009 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 0.1223 | 1.483 | 0.1345 | 1.335 | 110 | A+ | 90 | A+ |
7010 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 0.1190 | 1.498 | 0.1344 | 1.334 | 113 | A+ | 89 | A+ |
7011 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1197 | 1.522 | 0.1293 | 1.370 | 108 | A+ | 90 | A+ |
7012 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 0.1197 | 1.505 | 0.1269 | 1.324 | 106 | A+ | 88 | A+ |
7013 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.1205 | 1.513 | 0.1325 | 1.301 | 110 | A+ | 86 | A+ |
7014 | 440.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1214 | 1.509 | 0.1323 | 1.328 | 109 | A+ | 88 | A+ |
7015 | 440.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1201 | 1.483 | 0.1273 | 1.290 | 106 | A+ | 87 | A+ |
7016 | 440.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1212 | 1.503 | 0.1296 | 1.323 | 107 | A+ | 88 | A+ |
7017 | 440.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1193 | 1.523 | 0.1312 | 1.310 | 110 | A+ | 86 | A+ |
7018 | 350.8 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1220 | 1.493 | 0.1745 | 1.105 | 143 | B | 74 | B |
7019 | 350.8 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1220 | 1.487 | 0.1805 | 1.055 | 148 | B | 71 | B |
7020 | 350.8 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1194 | 1.486 | 0.2065 | 1.070 | 173 | B | 72 | B |
7021 | 350.8 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1206 | 1.524 | 0.1773 | 1.158 | 147 | B | 76 | B |
7022 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 0.1220 | 1.497 | 0.1720 | 1.092 | 141 | B | 73 | B |
7023 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 0.1193 | 1.522 | 0.1957 | 1.172 | 164 | B | 77 | B |
7024 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 0.1189 | 1.493 | 0.2045 | 1.120 | 172 | B | 75 | B |
7025 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 0.1199 | 1.522 | 0.1631 | 1.157 | 136 | B | 76 | B |
7026 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 0.1219 | 1.494 | 0.2219 | 1.135 | 182 | B | 76 | B |
7027 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 0.1219 | 1.512 | 0.2157 | 1.134 | 177 | B | 75 | B |
7028 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1175 | 1.516 | 0.2233 | 1.152 | 190 | B | 76 | B |
7029 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 0.1207 | 1.483 | 0.2305 | 1.053 | 191 | B | 71 | B |
7030 | 460.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1189 | 1.493 | 0.1772 | 1.090 | 149 | B | 73 | B |
7031 | 460.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1218 | 1.524 | 0.1644 | 1.128 | 135 | B | 74 | B |
7032 | 460.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1223 | 1.482 | 0.2312 | 1.082 | 189 | B | 73 | B |
7033 | 460.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1199 | 1.511 | 0.2205 | 1.088 | 184 | B | 72 | B |
7034 | 9.6 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1213 | 1.501 | 0.1358 | 1.291 | 112 | A+ | 86 | A+ |
7035 | 353.6 | 1.2 | 1.2 | 50.0 | 50.0 | 90.0 | 1.2 | 50.0 | 110.0 | 0.1201 | 1.487 | 0.1958 | 1.116 | 163 | B | 75 | B |
7036 | 422.0 | 1.2 | 50.0 | 90.0 | 90.0 | 0.8 | 50.0 | 50.0 | 90.0 | 0.1201 | 1.513 | 0.1694 | 1.165 | 141 | B | 77 | B |
7037 | 353.6 | 50.0 | 50.0 | 110.0 | 90.0 | 50.0 | 1.2 | 1.2 | 1.2 | 0.1183 | 1.502 | 0.1964 | 1.127 | 166 | B | 75 | B |
7038 | 720.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1203 | 1.480 | 0.1359 | 1.332 | 113 | A+ | 90 | A+ |
7039 | 106.8 | 0.8 | 1.2 | 1.2 | 50.0 | 1.2 | 50.0 | 1.2 | 1.2 | 0.1198 | 1.506 | 0.1677 | 1.145 | 140 | B | 76 | B |
7040 | 9.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1194 | 1.521 | 0.1599 | 1.110 | 134 | B | 73 | B |
7041 | 453.2 | 0.8 | 90.0 | 90.0 | 1.2 | 90.0 | 1.2 | 90.0 | 90.0 | 0.1190 | 1.479 | 0.1987 | 1.035 | 167 | B | 70 | B |
7042 | 630.8 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1214 | 1.522 | 0.2221 | 1.111 | 183 | B | 73 | B |
7043 | 9.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1198 | 1.509 | 0.2133 | 1.132 | 178 | B | 75 | B |
7044 | 9.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1193 | 1.477 | 0.1575 | 1.138 | 132 | B | 77 | B |
7045 | 9.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1220 | 1.507 | 0.1891 | 1.085 | 155 | B | 72 | B |
[表22]
表8(其2) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液7) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
7046 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 0.1198 | 1.485 | 0.1629 | 1.129 | 136 | B | 76 | B |
7047 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 0.1214 | 1.488 | 0.2076 | 1.041 | 171 | B | 70 | B |
7048 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 0.1222 | 1.519 | 0.2016 | 1.094 | 165 | B | 72 | B |
7049 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 0.1185 | 1.518 | 0.1576 | 1.108 | 133 | B | 73 | B |
7050 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 0.1194 | 1.500 | 0.2221 | 1.065 | 186 | B | 71 | B |
7051 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 0.1179 | 1.518 | 0.2240 | 1.124 | 190 | B | 74 | B |
7052 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 0.1203 | 1.495 | 0.2298 | 1.122 | 191 | B | 75 | B |
7053 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 0.1220 | 1.497 | 0.1648 | 1.093 | 135 | B | 73 | B |
7054 | 118.4 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1203 | 1.483 | 0.2008 | 0.127 | 167 | B | 76 | B |
7055 | 118.4 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1180 | 1.500 | 0.1923 | 1.110 | 163 | B | 74 | B |
7056 | 118.4 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1177 | 1.483 | 0.1824 | 1.038 | 155 | B | 70 | B |
7057 | 421.6 | 50.0 | 90.0 | 0.8 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 0.1211 | 1.503 | 0.1890 | 1.052 | 156 | B | 70 | B |
7058 | 630.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1202 | 1.511 | 0.1827 | 1.072 | 152 | B | 71 | B |
7059 | 630.8 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1189 | 1.520 | 0.1617 | 1.170 | 136 | B | 77 | B |
7060 | 630.8 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1201 | 1.501 | 0.2041 | 1.051 | 170 | B | 70 | B |
7061 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.1213 | 1.483 | 0.2293 | 1.142 | 189 | B | 77 | B |
7062 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 0.1224 | 1.492 | 0.1787 | 1.119 | 146 | B | 75 | B |
7063 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 0.1213 | 1.519 | 0.1590 | 1.155 | 131 | B | 76 | B |
7064 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 0.1187 | 1.495 | 0.1983 | 1.106 | 167 | B | 74 | B |
7065 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 0.1195 | 1.518 | 0.2114 | 1.153 | 177 | B | 76 | B |
7066 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 0.1180 | 1.494 | 0.2042 | 1.061 | 173 | B | 71 | B |
7067 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 0.1194 | 1.489 | 0.2185 | 1.057 | 183 | B | 71 | B |
7068 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 0.1204 | 1.510 | 0.1866 | 1.072 | 155 | B | 71 | B |
7069 | 740.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1185 | 1.490 | 0.2358 | 1.088 | 199 | B | 73 | B |
7070 | 740.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1217 | 1.517 | 0.2421 | 1.123 | 199 | B | 74 | B |
7071 | 740.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1177 | 1.483 | 0.1578 | 1.113 | 134 | B | 75 | B |
7072 | 118.4 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1219 | 1.476 | 0.1816 | 1.137 | 149 | B | 77 | B |
7073 | 740.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1211 | 1.477 | 0.1683 | 1.122 | 139 | B | 76 | B |
7074 | 470.8 | 0.8 | 50.0 | 50.0 | 110.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1215 | 1.514 | 0.2040 | 1.105 | 168 | B | 73 | B |
7075 | 215.6 | 1.2 | 1.2 | 50.0 | 1.2 | 110.0 | 0.8 | 1.2 | 50.0 | 0.1206 | 1.483 | 0.1918 | 1.127 | 159 | B | 76 | B |
7076 | 284.0 | 50.0 | 0.8 | 50.0 | 90.0 | 1.2 | 1.2 | 90.0 | 0.8 | 0.1183 | 1.498 | 0.1645 | 1.049 | 139 | B | 70 | B |
7077 | 393.2 | 50.0 | 1.2 | 90.0 | 0.8 | 50.0 | 90.0 | 110.0 | 1.2 | 0.1197 | 1.507 | 0.1712 | 1.085 | 143 | B | 72 | B |
7078 | 372.8 | 90.0 | 90.0 | 1.2 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 0.1209 | 1.482 | 0.1741 | 1.111 | 144 | B | 75 | B |
7079 | 482.0 | 90.0 | 110.0 | 50.0 | 0.8 | 90.0 | 50.0 | 90.0 | 1.2 | 0.1177 | 1.499 | 0.2083 | 1.124 | 177 | B | 75 | B |
7080 | 482.0 | 90.0 | 110.0 | 50.0 | 1.2 | 50.0 | 90.0 | 0.8 | 90.0 | 0.1194 | 1.496 | 0.1600 | 1.092 | 134 | B | 73 | B |
7081 | 324.0 | 0.8 | 1.2 | 1.2 | 90.0 | 0.8 | 90.0 | 90.0 | 50.0 | 0.1208 | 1.512 | 0.2222 | 1.073 | 184 | B | 71 | B |
7082 | 401.6 | 50.0 | 50.0 | 110.0 | 50.0 | 90.0 | 0.8 | 0.8 | 50.0 | 0.1182 | 1.502 | 0.2329 | 1.051 | 197 | B | 70 | B |
7083 | 344.4 | 90.0 | 50.0 | 0.8 | 1.2 | 1.2 | 90.0 | 1.2 | 110.0 | 0.1190 | 1.524 | 0.1606 | 1.113 | 135 | B | 73 | B |
7084 | 453.6 | 90.0 | 90.0 | 1.2 | 110.0 | 1.2 | 1.2 | 110.0 | 50.0 | 0.1224 | 1.504 | 0.1775 | 1.113 | 145 | B | 74 | B |
7085 | 441.6 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.8 | 110.0 | 0.1186 | 1.475 | 0.1969 | 1.121 | 166 | B | 76 | B |
7086 | 462.0 | 110.0 | 0.8 | 110.0 | 1.2 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1212 | 1.500 | 0.2290 | 1.110 | 189 | B | 74 | B |
7087 | 304.0 | 1.2 | 110.0 | 0.8 | 90.0 | 1.2 | 50.0 | 0.8 | 50.0 | 0.1206 | 1.498 | 0.1941 | 1.093 | 161 | B | 73 | B |
7088 | 502.0 | 50.0 | 90.0 | 0.8 | 110.0 | 110.0 | 50.0 | 1.2 | 90.0 | 0.1205 | 1.500 | 0.2205 | 1.155 | 183 | B | 77 | B |
7089 | 502.0 | 50.0 | 110.0 | 1.2 | 50.0 | 110.0 | 0.8 | 90.0 | 90.0 | 0.1182 | 1.506 | 0.2305 | 1.129 | 195 | B | 75 | B |
7090 | 392.8 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 110.0 | 90.0 | 1.2 | 0.1117 | 1.493 | 0.1643 | 1.075 | 135 | B | 72 | B |
[表23]
表8(其3) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液7) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
7091 | 502.0 | 110.0 | 0.8 | 110.0 | 50.0 | 1.2 | 90.0 | 50.0 | 90.0 | 0.1211 | 1.519 | 0.2265 | 1.109 | 187 | B | 73 | B |
7092 | 413.2 | 110.0 | 50.0 | 1.2 | 1.2 | 90.0 | 50.0 | 110.0 | 0.8 | 0.1209 | 1.517 | 0.1717 | 0.168 | 142 | B | 77 | B |
7093 | 392.8 | 110.0 | 90.0 | 50.0 | 50.0 | 0.8 | 90.0 | 1.2 | 0.8 | 0.1219 | 1.523 | 0.1950 | 1.082 | 160 | B | 71 | B |
7094 | 255.2 | 1.2 | 0.8 | 1.2 | 0.8 | 50.0 | 110.0 | 1.2 | 90.0 | 0.1212 | 1.508 | 0.1916 | 1.101 | 158 | B | 73 | B |
7095 | 542.0 | 1.2 | 50.0 | 90.0 | 110.0 | 110.0 | 90.0 | 90.0 | 0.8 | 0.1183 | 1.509 | 0.2177 | 1.117 | 184 | B | 74 | B |
7096 | 255.2 | 50.0 | 1.2 | 90.0 | 1.2 | 1.2 | 110.0 | 0.8 | 0.8 | 0.1188 | 1.488 | 0.1628 | 1.042 | 137 | B | 70 | B |
7097 | 295.2 | 1.2 | 0.8 | 1.2 | 110.0 | 90.0 | 90.0 | 0.8 | 1.2 | 0.1221 | 1.481 | 0.2137 | 1.066 | 175 | B | 72 | B |
7098 | 472.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.8 | 1.2 | 110.0 | 0.1210 | 1.480 | 0.2081 | 1.080 | 172 | B | 73 | B |
7099 | 303.6 | 0.8 | 50.0 | 50.0 | 0.8 | 1.2 | 0.8 | 110.0 | 90.0 | 0.1198 | 1.483 | 0.1953 | 1.097 | 163 | B | 74 | B |
7100 | 324.0 | 1.2 | 110.0 | 0.8 | 50.0 | 50.0 | 1.2 | 110.0 | 0.8 | 0.1192 | 1.497 | 0.1740 | 1.108 | 146 | B | 74 | B |
7101 | 433.2 | 50.0 | 110.0 | 1.2 | 1.2 | 0.8 | 110.0 | 50.0 | 110.0 | 0.1184 | 1.492 | 0.1563 | 1.134 | 132 | B | 76 | B |
7102 | 610.8 | 90.0 | 0.8 | 90.0 | 50.0 | 110.0 | 110.0 | 110.0 | 50.0 | 0.1225 | 1.487 | 0.1984 | 1.101 | 162 | B | 74 | B |
7103 | 412.8 | 90.0 | 1.2 | 110.0 | 0.8 | 110.0 | 50.0 | 50.0 | 0.8 | 0.1185 | 1.520 | 0.1765 | 1.140 | 149 | B | 75 | B |
7104 | 166.0 | 0.8 | 0.8 | 0.8 | 1.2 | 110.0 | 1.2 | 50.0 | 1.2 | 0.1182 | 1.485 | 0.1844 | 1.054 | 156 | B | 71 | B |
7105 | 562.0 | 110.0 | 90.0 | 50.0 | 90.0 | 110.0 | 110.0 | 0.8 | 1.2 | 0.1220 | 1.494 | 0.2025 | 1.136 | 166 | B | 76 | B |
7106 | 364.0 | 110.0 | 110.0 | 90.0 | 0.8 | 0.8 | 1.2 | 1.2 | 50.0 | 0.1201 | 1.503 | 0.1609 | 1.112 | 134 | B | 74 | B |
7107 | 473.2 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 50.0 | 1.2 | 0.1221 | 1.509 | 0.2052 | 1.132 | 168 | B | 75 | B |
7108 | 513.2 | 1.2 | 90.0 | 110.0 | 0.8 | 1.2 | 110.0 | 90.0 | 110.0 | 0.1207 | 1.486 | 0.2270 | 1.085 | 188 | B | 73 | B |
7109 | 315.2 | 1.2 | 90.0 | 110.0 | 1.2 | 0.8 | 0.8 | 110.0 | 1.2 | 0.1212 | 1.524 | 0.2060 | 1.173 | 170 | B | 77 | B |
7110 | 481.6 | 50.0 | 0.8 | 50.0 | 110.0 | 0.8 | 50.0 | 110.0 | 110.0 | 0.1206 | 1.502 | 0.1568 | 1.051 | 130 | B | 70 | B |
7111 | 404.0 | 90.0 | 1.2 | 110.0 | 110.0 | 0.8 | 1.2 | 0.8 | 90.0 | 0.1198 | 1.477 | 0.1989 | 1.078 | 166 | B | 73 | B |
7112 | 602.0 | 110.0 | 1.2 | 0.8 | 90.0 | 90.0 | 110.0 | 110.0 | 90.0 | 0.1210 | 1.504 | 0.2033 | 1.128 | 168 | B | 75 | B |
7113 | 472.8 | 110.0 | 1.2 | 0.8 | 110.0 | 50.0 | 0.8 | 90.0 | 110.0 | 0.1216 | 1.492 | 0.2249 | 1.044 | 185 | B | 70 | B |
7114 | 384.0 | 110.0 | 50.0 | 1.2 | 0.8 | 110.0 | 1.2 | 0.8 | 110.0 | 0.1206 | 1.493 | 0.2220 | 1.075 | 184 | B | 72 | B |
7115 | 730.8 | 0.8 | 110.0 | 110.0 | 90.0 | 110.0 | 90.0 | 110.0 | 110.0 | 0.1176 | 1.519 | 0.2046 | 1.139 | 174 | B | 75 | B |
7116 | 532.8 | 0.8 | 110.0 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 0.1202 | 1.522 | 0.1598 | 1.081 | 133 | B | 71 | B |
[表24]
表9(其1) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液8) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
8001 | 400.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1207 | 1.488 | 0.1303 | 1.354 | 108 | A+ | 91 | A+ |
8002 | 351.2 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1217 | 1.493 | 0.1302 | 1.344 | 107 | A+ | 90 | A+ |
8003 | 351.2 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1215 | 1.519 | 0.1312 | 1.367 | 108 | A+ | 90 | A+ |
8004 | 351.2 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1219 | 1.486 | 0.1305 | 1.352 | 107 | A+ | 91 | A+ |
8005 | 351.2 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1219 | 1.488 | 0.1292 | 1.339 | 106 | A+ | 90 | A+ |
8006 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 50.0 | 0.1188 | 1.487 | 0.1259 | 1.353 | 106 | A+ | 91 | A+ |
8007 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 50.0 | 0.1179 | 1.524 | 0.1250 | 1.311 | 106 | A+ | 86 | A+ |
8008 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 50.0 | 0.1213 | 1.502 | 0.1358 | 1.337 | 112 | A+ | 89 | A+ |
8009 | 351.2 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 1.2 | 0.1176 | 1.505 | 0.1294 | 1.369 | 110 | A+ | 91 | A+ |
8010 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 0.1215 | 1.517 | 0.1336 | 1.365 | 110 | A+ | 90 | A+ |
8011 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1200 | 1.491 | 0.1308 | 1.297 | 109 | A+ | 87 | A+ |
8012 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 0.1182 | 1.507 | 0.1324 | 1.311 | 112 | A+ | 87 | A+ |
8013 | 440.0 | 50.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.1207 | 1.512 | 0.1364 | 1.331 | 113 | A+ | 88 | A+ |
8014 | 440.0 | 50.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1220 | 1.502 | 0.1318 | 1.292 | 108 | A+ | 86 | A+ |
8015 | 440.0 | 50.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1203 | 1.502 | 0.1324 | 1.307 | 110 | A+ | 87 | A+ |
8016 | 440.0 | 50.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1204 | 1.475 | 0.1336 | 1.298 | 111 | A+ | 88 | A+ |
8017 | 440.0 | 90.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1194 | 1.509 | 0.1326 | 1.358 | 111 | A+ | 90 | A+ |
8018 | 350.8 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1180 | 1.496 | 0.1605 | 1.077 | 136 | B | 72 | B |
8019 | 350.8 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1179 | 1.523 | 0.1863 | 1.127 | 158 | B | 74 | B |
8020 | 350.8 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1224 | 1.523 | 0.2386 | 1.096 | 195 | B | 72 | B |
8021 | 350.8 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1183 | 1.504 | 0.2330 | 1.128 | 197 | B | 75 | B |
8022 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 50.0 | 0.1187 | 1.507 | 0.1591 | 1.160 | 134 | B | 77 | B |
8023 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 50.0 | 0.1198 | 1.484 | 0.1749 | 1.128 | 146 | B | 76 | B |
8024 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 50.0 | 0.1186 | 1.484 | 0.2313 | 1.083 | 195 | B | 73 | B |
8025 | 350.8 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.8 | 0.1219 | 1.519 | 0.1962 | 1.094 | 161 | B | 72 | B |
8026 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 0.1205 | 1.516 | 0.1796 | 1.091 | 149 | B | 72 | B |
8027 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 0.1190 | 1.483 | 0.2190 | 1.127 | 184 | B | 76 | B |
8028 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1224 | 1.493 | 0.1591 | 1.105 | 130 | B | 74 | B |
8029 | 460.0 | 50.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 0.1183 | 1.475 | 0.1692 | 1.092 | 143 | B | 74 | B |
8030 | 460.0 | 50.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1214 | 1.500 | 0.2076 | 1.050 | 171 | B | 70 | B |
8031 | 460.0 | 50.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1181 | 1.502 | 0.1866 | 1.096 | 158 | B | 73 | B |
8032 | 460.0 | 50.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1200 | 1.520 | 0.1884 | 1.079 | 157 | B | 71 | B |
8033 | 460.0 | 110.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 50.0 | 0.1180 | 1.519 | 0.1841 | 1.170 | 156 | B | 77 | B |
8034 | 9.6 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1201 | 1.497 | 0.1298 | 1.317 | 108 | A+ | 88 | A+ |
8035 | 353.6 | 1.2 | 1.2 | 50.0 | 50.0 | 90.0 | 1.2 | 50.0 | 110.0 | 0.1216 | 1.479 | 0.2079 | 1.080 | 171 | B | 73 | B |
8036 | 422.0 | 1.2 | 50.0 | 90.0 | 90.0 | 0.8 | 50.0 | 50.0 | 90.0 | 0.1214 | 1.517 | 0.1808 | 1.077 | 149 | B | 71 | B |
8037 | 353.6 | 50.0 | 50.0 | 110.0 | 90.0 | 50.0 | 1.2 | 1.2 | 1.2 | 0.1216 | 1.477 | 0.2408 | 1.048 | 198 | B | 71 | B |
8038 | 720.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1204 | 1.479 | 0.1324 | 1.272 | 110 | A+ | 86 | A+ |
8039 | 106.8 | 0.8 | 1.2 | 1.2 | 50.0 | 1.2 | 50.0 | 1.2 | 1.2 | 0.1175 | 1.524 | 0.1598 | 1.143 | 136 | B | 75 | B |
8040 | 9.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1192 | 1.496 | 0.1585 | 1.137 | 133 | B | 76 | B |
8041 | 453.2 | 0.8 | 90.0 | 90.0 | 1.2 | 90.0 | 1.2 | 90.0 | 90.0 | 0.1224 | 1.506 | 0.1677 | 1.099 | 137 | B | 73 | B |
8042 | 630.8 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1201 | 1.524 | 0.2162 | 1.158 | 180 | B | 76 | B |
8043 | 9.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1201 | 1.481 | 0.1801 | 1.111 | 150 | B | 75 | B |
8044 | 9.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1202 | 1.494 | 0.1658 | 1.046 | 138 | B | 70 | B |
8045 | 9.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1190 | 1.523 | 0.2070 | 1.172 | 174 | B | 77 | B |
[表25]
表9(其2) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液8) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
8046 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 1.2 | 0.1177 | 1.480 | 0.1754 | 1.066 | 149 | B | 72 | B |
8047 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 1.2 | 0.1207 | 1.487 | 0.1835 | 1.056 | 152 | B | 71 | B |
8048 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 1.2 | 0.1177 | 1.484 | 0.2188 | 1.039 | 186 | B | 70 | B |
8049 | 9.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.8 | 0.1205 | 1.524 | 0.2096 | 1.127 | 174 | B | 74 | B |
8050 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 0.1200 | 1.524 | 0.1980 | 1.113 | 165 | B | 73 | B |
8051 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 0.1198 | 1.497 | 0.1701 | 1.048 | 142 | B | 70 | B |
8052 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 0.1204 | 1.479 | 0.2276 | 1.050 | 189 | B | 71 | B |
8053 | 118.4 | 1.2 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 0.1207 | 1.496 | 0.1690 | 1.047 | 140 | B | 70 | B |
8054 | 118.4 | 1.2 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1183 | 1.521 | 0.2069 | 1.156 | 175 | B | 76 | B |
8055 | 118.4 | 1.2 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1183 | 1.486 | 0.2177 | 1.070 | 184 | B | 72 | B |
8056 | 118.4 | 1.2 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1219 | 1.520 | 0.2353 | 1.170 | 193 | B | 77 | B |
8057 | 421.6 | 50.0 | 90.0 | 0.8 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 0.1175 | 1.507 | 0.2116 | 1.115 | 180 | B | 74 | B |
8058 | 630.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1189 | 1.507 | 0.2367 | 1.130 | 199 | B | 75 | B |
8059 | 630.8 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1196 | 1.497 | 0.1579 | 1.048 | 132 | B | 70 | B |
8060 | 630.8 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1208 | 1.514 | 0.1667 | 1.151 | 138 | B | 76 | B |
8061 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.1200 | 1.497 | 0.2195 | 1.078 | 183 | B | 72 | B |
8062 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 90.0 | 0.1215 | 1.502 | 0.2260 | 1.127 | 186 | B | 75 | B |
8063 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 90.0 | 0.1194 | 1.503 | 0.1826 | 1.097 | 153 | B | 73 | B |
8064 | 630.8 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.8 | 0.1207 | 1.523 | 0.2233 | 1.127 | 185 | B | 74 | B |
8065 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 0.1182 | 1.513 | 0.2139 | 1.135 | 181 | B | 75 | B |
8066 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 0.1200 | 1.521 | 0.1991 | 1.095 | 166 | B | 72 | B |
8067 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 0.1183 | 1.490 | 0.1952 | 1.102 | 165 | B | 74 | B |
8068 | 740.0 | 90.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 0.1182 | 1.515 | 0.1713 | 1.091 | 145 | B | 72 | B |
8069 | 740.0 | 90.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1220 | 1.506 | 0.1683 | 1.099 | 138 | B | 73 | B |
8070 | 740.0 | 90.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1193 | 1.483 | 0.1933 | 1.082 | 162 | B | 73 | B |
8071 | 740.0 | 90.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1212 | 1.522 | 0.2146 | 1.157 | 177 | B | 76 | B |
8072 | 118.4 | 110.0 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 0.1176 | 1.491 | 0.1917 | 1.133 | 163 | B | 76 | B |
8073 | 740.0 | 110.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 90.0 | 0.1194 | 1.509 | 0.1587 | 1.147 | 133 | B | 76 | B |
8074 | 470.8 | 0.8 | 50.0 | 50.0 | 110.0 | 50.0 | 110.0 | 50.0 | 50.0 | 0.1213 | 1.511 | 0.1796 | 1.058 | 148 | B | 70 | B |
8075 | 215.6 | 1.2 | 1.2 | 50.0 | 1.2 | 110.0 | 0.8 | 1.2 | 50.0 | 0.1214 | 1.514 | 0.2015 | 1.166 | 166 | B | 77 | B |
8076 | 284.0 | 50.0 | 0.8 | 50.0 | 90.0 | 1.2 | 1.2 | 90.0 | 0.8 | 0.1178 | 1.482 | 0.2214 | 1.096 | 188 | B | 74 | B |
8077 | 393.2 | 50.0 | 1.2 | 90.0 | 0.8 | 50.0 | 90.0 | 110.0 | 1.2 | 0.1211 | 1.478 | 0.2241 | 1.079 | 185 | B | 73 | B |
8078 | 372.8 | 90.0 | 90.0 | 1.2 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 0.1223 | 1.499 | 0.2361 | 1.094 | 193 | B | 73 | B |
8079 | 482.0 | 90.0 | 110.0 | 50.0 | 0.8 | 90.0 | 50.0 | 90.0 | 1.2 | 0.1193 | 1.492 | 0.1897 | 1.119 | 159 | B | 75 | B |
8080 | 482.0 | 90.0 | 110.0 | 50.0 | 1.2 | 50.0 | 90.0 | 0.8 | 90.0 | 0.1221 | 1.489 | 0.1844 | 1.072 | 151 | B | 72 | B |
8081 | 324.0 | 0.8 | 1.2 | 1.2 | 90.0 | 0.8 | 90.0 | 90.0 | 50.0 | 0.1196 | 1.514 | 0.1747 | 1.090 | 146 | B | 72 | B |
8082 | 401.6 | 50.0 | 50.0 | 110.0 | 50.0 | 90.0 | 0.8 | 0.8 | 50.0 | 0.1202 | 1.516 | 01984 | 1.168 | 165 | B | 77 | B |
8083 | 344.4 | 90.0 | 50.0 | 0.8 | 1.2 | 1.2 | 90.0 | 1.2 | 110.0 | 0.1221 | 1.487 | 0.1831 | 1.071 | 150 | B | 72 | B |
8084 | 453.6 | 90.0 | 90.0 | 1.2 | 110.0 | 1.2 | 1.2 | 110.0 | 50.0 | 0.1219 | 1.487 | 0.1804 | 1.130 | 148 | B | 76 | B |
8085 | 441.6 | 0.8 | 90.0 | 90.0 | 50.0 | 50.0 | 50.0 | 0.8 | 110.0 | 0.1205 | 1.508 | 0.2170 | 1.161 | 180 | B | 77 | B |
8086 | 462.0 | 110.0 | 0.8 | 110.0 | 1.2 | 50.0 | 50.0 | 90.0 | 50.0 | 0.1194 | 1.513 | 0.1731 | 1.059 | 145 | B | 70 | B |
8087 | 304.0 | 1.2 | 110.0 | 0.8 | 90.0 | 1.2 | 50.0 | 0.8 | 50.0 | 0.1182 | 1.516 | 0.2009 | 1.122 | 170 | B | 74 | B |
8088 | 502.0 | 50.0 | 90.0 | 0.8 | 110.0 | 110.0 | 50.0 | 1.2 | 90.0 | 0.1181 | 1.523 | 0.1678 | 1.081 | 142 | B | 71 | B |
8089 | 502.0 | 50.0 | 110.0 | 1.2 | 50.0 | 110.0 | 0.8 | 90.0 | 90.0 | 0.1211 | 1.502 | 0.1659 | 1.066 | 137 | B | 71 | B |
8090 | 392.8 | 90.0 | 50.0 | 0.8 | 50.0 | 0.8 | 110.0 | 90.0 | 1.2 | 0.1180 | 1.498 | 0.1781 | 1.063 | 151 | B | 71 | B |
[表26]
表9(其3) | 第1金屬離子的總計含量(質量ppb) | 第1金屬離子(質量ppb) | ERFr(Å/min) | ERFr(Å/min) | 評價 | ||||||||||||
實施例(處理液8) | Na | Al | K | Ca | Cr | Fe | Ni | Zn | Co ERFr | TiO2 ERFr | Co ERAge | TiO2 ERAge | Co耐蝕性能的性能穩定性 | 殘渣去除性能的性能穩定性 | |||
ER維持率(%) | 評價結果 | ER維持率(%) | 評價結果 | ||||||||||||||
8091 | 502.0 | 110.0 | 0.8 | 110.0 | 50.0 | 1.2 | 90.0 | 50.0 | 90.0 | 0.1188 | 1.512 | 0.2234 | 1.073 | 188 | B | 71 | B |
8092 | 413.2 | 110.0 | 50.0 | 1.2 | 1.2 | 90.0 | 50.0 | 110.0 | 0.8 | 0.1214 | 1.508 | 0.2015 | 1.116 | 166 | B | 74 | B |
8093 | 392.8 | 110.0 | 90.0 | 50.0 | 50.0 | 0.8 | 90.0 | 1.2 | 0.8 | 0.1182 | 1.510 | 0.1667 | 1.057 | 141 | B | 70 | B |
8094 | 255.2 | 1.2 | 0.8 | 1.2 | 0.8 | 50.0 | 110.0 | 1.2 | 90.0 | 0.1185 | 1.505 | 0.1730 | 1.144 | 146 | B | 76 | B |
8095 | 542.0 | 1.2 | 50.0 | 90.0 | 110.0 | 110.0 | 90.0 | 90.0 | 0.8 | 0.1218 | 1.511 | 0.2205 | 1.103 | 181 | B | 73 | B |
8096 | 255.2 | 50.0 | 1.2 | 90.0 | 1.2 | 1.2 | 110.0 | 0.8 | 0.8 | 0.1196 | 1.491 | 0.2009 | 1.044 | 168 | B | 70 | B |
8097 | 295.2 | 1.2 | 0.8 | 1.2 | 110.0 | 90.0 | 90.0 | 0.8 | 1.2 | 0.1210 | 1.478 | 0.1718 | 1.064 | 142 | B | 72 | B |
8098 | 472.8 | 90.0 | 0.8 | 90.0 | 90.0 | 90.0 | 0.8 | 1.2 | 110.0 | 0.1180 | 1.486 | 0.1958 | 1.040 | 166 | B | 70 | B |
8099 | 303.6 | 0.8 | 50.0 | 50.0 | 0.8 | 1.2 | 0.8 | 110.0 | 90.0 | 0.1200 | 1.519 | 0.2243 | 1.063 | 187 | B | 70 | B |
8100 | 324.0 | 1.2 | 110.0 | 0.8 | 50.0 | 50.0 | 1.2 | 110.0 | 0.8 | 0.1198 | 1.492 | 0.1870 | 1.059 | 156 | B | 71 | B |
8101 | 433.2 | 50.0 | 110.0 | 1.2 | 1.2 | 0.8 | 110.0 | 50.0 | 110.0 | 0.1181 | 1.511 | 0.1807 | 1.103 | 153 | B | 73 | B |
8102 | 610.8 | 90.0 | 0.8 | 90.0 | 50.0 | 110.0 | 110.0 | 110.0 | 50.0 | 0.1198 | 1.509 | 0.2276 | 1.071 | 190 | B | 71 | B |
8103 | 412.8 | 90.0 | 1.2 | 110.0 | 0.8 | 110.0 | 50.0 | 50.0 | 0.8 | 0.1175 | 1.475 | 0.1846 | 1.077 | 157 | B | 73 | B |
8104 | 166.0 | 0.8 | 0.8 | 0.8 | 1.2 | 110.0 | 1.2 | 50.0 | 1.2 | 0.1219 | 1.490 | 0.1694 | 1.043 | 139 | B | 70 | B |
8105 | 562.0 | 110.0 | 90.0 | 50.0 | 90.0 | 110.0 | 110.0 | 0.8 | 1.2 | 0.1208 | 1.507 | 0.1944 | 1.130 | 161 | B | 75 | B |
8106 | 364.0 | 110.0 | 110.0 | 90.0 | 0.8 | 0.8 | 1.2 | 1.2 | 50.0 | 0.1195 | 1.522 | 0.2068 | 1.065 | 173 | B | 70 | B |
8107 | 473.2 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 50.0 | 1.2 | 0.1219 | 1.482 | 0.2169 | 1.037 | 178 | B | 70 | B |
8108 | 513.2 | 1.2 | 90.0 | 110.0 | 0.8 | 1.2 | 110.0 | 90.0 | 110.0 | 0.1204 | 1.487 | 0.2299 | 1.115 | 191 | B | 75 | B |
8109 | 315.2 | 1.2 | 90.0 | 110.0 | 1.2 | 0.8 | 0.8 | 110.0 | 1.2 | 0.1204 | 1.509 | 0.2034 | 1.147 | 169 | B | 76 | B |
8110 | 481.6 | 50.0 | 0.8 | 50.0 | 110.0 | 0.8 | 50.0 | 110.0 | 110.0 | 0.1220 | 1.520 | 0.1977 | 1.125 | 162 | B | 74 | B |
8111 | 404.0 | 90.0 | 1.2 | 110.0 | 110.0 | 0.8 | 1.2 | 0.8 | 90.0 | 0.1205 | 1.484 | 0.2146 | 1.054 | 178 | B | 71 | B |
8112 | 602.0 | 110.0 | 1.2 | 0.8 | 90.0 | 90.0 | 110.0 | 110.0 | 90.0 | 0.1195 | 1.475 | 0.1805 | 1.092 | 151 | B | 74 | B |
8113 | 472.8 | 110.0 | 1.2 | 0.8 | 110.0 | 50.0 | 0.8 | 90.0 | 110.0 | 0.1178 | 1.488 | 0.2284 | 1.057 | 194 | B | 71 | B |
8114 | 384.0 | 110.0 | 50.0 | 1.2 | 0.8 | 110.0 | 1.2 | 0.8 | 110.0 | 0.1217 | 1.476 | 0.1936 | 1.063 | 159 | B | 72 | B |
8115 | 730.8 | 0.8 | 110.0 | 110.0 | 90.0 | 110.0 | 90.0 | 110.0 | 110.0 | 0.1183 | 1.511 | 0.2141 | 1.088 | 181 | B | 72 | B |
8116 | 532.8 | 0.8 | 110.0 | 110.0 | 110.0 | 90.0 | 110.0 | 1.2 | 0.8 | 0.1204 | 1.498 | 0.1806 | 1.093 | 150 | B | 73 | B |
[處理液的製備2]
在上述之實施例1001~1017的處理液中,對將各處理液中所包含之第2金屬離子的總計含量調整為20.0質量ppb之處理液(各實施例1001A~1017A)進行調整,並實施同樣的評價,結果,相對於Co膜之蝕刻率維持率(%)變差,各處理液均成為超過102%且為106%以下的數值範圍(評價:AA)。又,關於相對於TiO2
膜之蝕刻率維持率(%)亦觀察到劣化,各處理液均成為超過92%以上且小於97%的數值範圍(評價:AA)。
[處理液的製備3]
在上述之實施例1001~1017的處理液中,對將各處理液中所包含之第2金屬離子的總計含量調整為0.004質量ppb之處理液(各實施例1001B~1017B)進行調整,並實施同樣的評價,結果,相對於Co膜之蝕刻率維持率(%)變差,各處理液均成為超過102%且為106%以下的數值範圍(評價:AA)。又,關於相對於TiO2
膜之蝕刻率維持率(%)亦觀察到劣化,各處理液均成為超過92%以上且小於97%的數值範圍(評價:AA)。
藉由上述處理液的製備1(表2(其1)~表9(其3))所示之結果以及上述處理液的製備2及3所示之結果可明確,實施例的處理液即使冷藏保管及室溫靜置等溫度環境變化反復,殘渣去除性能和耐蝕性的性能穩定性亦優異。
藉由上述處理液的製備1(表2(其1)~表9(其3))所示之結果以及上述處理液的製備2及3所示之結果可明確,處理液滿足以下所示之要件X1時(較佳為處理液滿足要件X1及要件Y1時(與實施例1001A~1017A及實施例1001B~1017B相應)、更佳為處理液滿足要件X1及要件Y2時(與實施例1001~1017相應)),殘渣去除性能和耐蝕性的性能穩定性更優異。
(要件X1)處理液包含2種以上第1金屬離子,且相對於處理液的總質量,各金屬離子的含量均為1.0質量ppb~100.0質量ppb。
(要件Y1)處理液包含第2金屬離子。
(要件Y2)處理液包含2種以上第2金屬離子,且相對於處理液的總質量,其總計含量為0.01質量ppb~10.0質量ppb,另外,相對於處理液的總質量,處理液中所包含之各第2金屬離子的含量均為0.01質量ppb~1.0質量ppb。
另一方面,可明確,比較例的處理液在冷藏保管及室溫靜置等溫度環境變化反復時,無法兼顧殘渣去除性能和耐蝕性的性能穩定性。
1:基板
2:金屬層
3:蝕刻停止層
4:層間絕緣層
5:金屬硬遮罩
6:孔
10:積層物
11:內壁
11a:截面壁
11b:底壁
12:乾式蝕刻殘渣
圖1係表示能夠適用於使用了本發明的處理液之基板的洗淨方法之積層物的一例之剖面示意圖。
1:基板
2:金屬層
3:蝕刻停止層
4:層間絕緣層
5:金屬硬遮罩
6:孔
10:積層物
11:內壁
11a:截面壁
11b:底壁
12:乾式蝕刻殘渣
Claims (7)
- 一種處理液,其係包含: 選自包含羥基胺及羥基胺鹽之群組中之羥基胺化合物; 有機溶劑; 鹼性化合物;及 選自包含Na、Al、K、Ca、Cr、Fe、Ni及Zn之群組中之1種以上的第1金屬離子,該處理液中, 相對於處理液的總質量,上述第1金屬離子的總計含量為7.0質量ppb~800.0質量ppb。
- 如請求項1所述之處理液,其中 相對於處理液的總質量,處理液中所包含之前述第1金屬離子中的至少1種金屬離子的含量為1.0質量ppb~100.0質量ppb。
- 如請求項1或請求項2所述之處理液,其中 處理液中所包含之前述第1金屬離子為2種以上,並且相對於處理液的總質量,各金屬離子的含量均為1.0質量ppb~100.0質量ppb。
- 如請求項1或請求項2所述之處理液,其還包含選自包含Li、Mg、Mn、Cu、Ag、Pb及Co之群組中之1種以上的第2金屬離子, 相對於處理液的總質量,前述第2金屬離子的總計含量為0.01質量ppb~10.0質量ppb。
- 如請求項4所述之處理液,其中 相對於處理液的總質量,處理液中所包含之前述第2金屬離子中的至少1種金屬離子的含量為0.01質量ppb~1.0質量ppb。
- 如請求項4所述之處理液,其中 處理液中所包含之前述第2金屬離子為2種以上,並且,相對於處理液的總質量,各金屬離子的含量均為0.01質量ppb~1.0質量ppb。
- 如請求項1或請求項2所述之處理液,其中 上述羥基胺化合物包含選自包含羥基胺及硫酸羥基胺之群組中之至少1種。
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