TW202109721A - Conductive device and roller conveying device having electric grounding roller shafts to prevent electrostatic discharge damage to substrate - Google Patents

Conductive device and roller conveying device having electric grounding roller shafts to prevent electrostatic discharge damage to substrate Download PDF

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TW202109721A
TW202109721A TW109126055A TW109126055A TW202109721A TW 202109721 A TW202109721 A TW 202109721A TW 109126055 A TW109126055 A TW 109126055A TW 109126055 A TW109126055 A TW 109126055A TW 202109721 A TW202109721 A TW 202109721A
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conductive
housing
shaft member
roller
bearing
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TW109126055A
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Chinese (zh)
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TWI774033B (en
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廣田雅治
羽方満之
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日商斯庫林集團股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00Roller-ways
    • B65G13/02Roller-ways having driven rollers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00Roller-ways
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05FSTATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00Carrying-off electrostatic charges
    • H05F3/02Carrying-off electrostatic charges by means of earthing connections
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/10Antistatic features

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Elimination Of Static Electricity (AREA)
  • Electrophotography Configuration And Component (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

The invention discloses a structure which is easy to assemble in a conductive device mounted to a roller shaft and a roller conveying device for the purpose of electric grounding. The conductive device of the invention includes: a shell (100) having an engaging portion (11) to be engaged with the end of roller shaft; a shaft member (40) formed of conductive material and protruded from the interior of the shell to the outside through an opening disposed on the shell; a bearing (50) disposed inside the shell for rotatably supporting the shaft member relative to the shell; and, conductive portions (20, 30) elastically abutted against the shaft member to electrically connect the shaft member with the shell. The shell includes: a main body (10) having an internal space for receiving the bearing and the conductive portions; and a cap (60) engaged with the main body to block the internal space for sealing the bearing and the conductive portions in the internal space. The main body and the cap are screwed together as a whole to form the shell.

Description

導電裝置以及輥輸送裝置Conductive device and roller conveying device

本發明是有關於一種用於將輥輸送裝置的輥軸電接地的導電裝置以及包括其的輥輸送裝置。The present invention relates to a conductive device for electrically grounding the roller shaft of a roller conveying device and a roller conveying device including the conductive device.

例如在對顯示裝置用的玻璃基板或電子電路基板等各種基板進行處理來製造元件的處理過程中,通常進行利用輥輸送裝置搬送基板。因輥輸送裝置的輥軸的旋轉、或輥與基板的摩擦而產生靜電,由此存在使基板或形成在基板上的元件劣化或破損的擔憂。作為針對所述問題的應對方案,可考慮在基板的搬送路徑設置用於消除靜電的電離器、或將輥軸例如電接地。For example, in the process of processing various substrates such as glass substrates for display devices and electronic circuit substrates to manufacture components, the substrates are usually conveyed by a roller conveyor. The rotation of the roller shaft of the roller conveying device or the friction between the roller and the substrate generates static electricity, which may cause deterioration or damage to the substrate or the components formed on the substrate. As a solution to this problem, it is conceivable to provide an ionizer for eliminating static electricity in the conveyance path of the substrate, or to electrically ground the roller shaft, for example.

例如,專利文獻1中記載的技術涉及一種接地裝置,其安裝在輥軸的端部,用於將輥軸經由接地線而接地。在所述裝置中,相對於可安裝在輥軸的端部的殼體,旋轉自如地設置有導電軸,在導電軸連接接地線。藉由此種結構,殼體伴隨輥軸的旋轉而進行旋轉,但成為接地線的扭曲的原因的導電軸的旋轉得到抑制。 [現有技術文獻] [專利文獻]For example, the technique described in Patent Document 1 relates to a grounding device that is attached to the end of a roller shaft for grounding the roller shaft via a ground wire. In the above-mentioned device, a conductive shaft is rotatably provided with respect to the housing which can be mounted on the end of the roller shaft, and a ground wire is connected to the conductive shaft. With this structure, the housing rotates with the rotation of the roller shaft, but the rotation of the conductive shaft, which causes the twisting of the ground wire, is suppressed. [Prior Art Literature] [Patent Literature]

專利文獻1:韓國專利第10-1401025號公報(例如,圖3)Patent Document 1: Korean Patent No. 10-1401025 (for example, Figure 3)

[發明所欲解決之課題][The problem to be solved by the invention]

專利文獻1中記載的接地裝置具有如下的問題:零件數多且結構複雜,組裝需要大的工夫。尤其,如下的作業非常困難、且需要長時間,所述作業是在將包含施力用的彈簧的各零件組裝在殼體內並利用螺絲進行固定時,一面按住因彈簧的復原力而將要飛出的零件,一面使用工具進行螺固的作業。The grounding device described in Patent Document 1 has the following problems: the number of parts is large, the structure is complicated, and the assembly requires a lot of labor. In particular, the following work is very difficult and takes a long time. The work involves assembling each part including the spring for urging in the housing and fixing it with screws, while pressing the spring to fly due to the restoring force. Use tools to perform screwing operations on the parts that are drawn out.

本發明是鑒於所述問題而成,其第一目的在於提出一種在將電接地作為目的而安裝在輥軸的裝置中,容易組裝的結構。另外,本發明的第二目的在於提供一種可藉由將輥軸接地來防止靜電對於基板的損害的輥輸送裝置。 [解決課題之手段]The present invention was made in view of the above-mentioned problems, and its first object is to propose a structure that is easy to assemble in a device that is mounted on a roller shaft for the purpose of electrical grounding. In addition, the second object of the present invention is to provide a roller transport device that can prevent damage to the substrate by static electricity by grounding the roller shaft. [Means to solve the problem]

本發明的一形態是一種導電裝置,其用於將輥輸送裝置的輥軸與接地線電連接,為了達成第一目的,所述導電裝置包括:殼體,具有卡合在所述輥軸的端部的卡合部位;軸構件,由導電性材料形成,經由設置在所述殼體的開口而自所述殼體的內部朝外部突出;軸承,在所述殼體內,相對於所述殼體旋轉自如地支撐所述軸構件;以及導電部,與所述軸構件彈性地抵接,將所述軸構件與所述殼體之間電連接來形成導電路徑。One aspect of the present invention is a conductive device, which is used to electrically connect the roller shaft of the roller conveying device with a ground wire. In order to achieve the first object, the conductive device includes: a housing having a housing that is engaged with the roller shaft The engagement part of the end; the shaft member, which is formed of a conductive material and protrudes from the inside of the housing to the outside through the opening provided in the housing; the bearing, in the housing, is opposite to the housing The body rotatably supports the shaft member; and a conductive portion elastically abuts on the shaft member and electrically connects the shaft member and the housing to form a conductive path.

而且,所述殼體包含:本體部,由具有導電性的材料形成,具有可收容所述軸承及所述導電部的內部空間;以及蓋部,設置有成為所述開口的貫穿孔,並且與所述本體部卡合來堵塞所述內部空間,由此將所述軸承及所述導電部密封在所述內部空間中;所述本體部與所述蓋部藉由設置在兩者的螺絲部位相互進行螺合來一體化,而構成所述殼體。Furthermore, the housing includes: a main body, which is formed of a conductive material, and has an internal space capable of accommodating the bearing and the conductive part; and a cover, which is provided with a through hole that becomes the opening, and is connected to The body part is engaged to block the internal space, thereby sealing the bearing and the conductive part in the internal space; the body part and the cover part are provided at the screw positions of both They are screwed together to be integrated to form the housing.

在如此構成的發明中,在將支撐軸構件的軸承及導電部收容在構成殼體的本體部的內部空間中的狀態下,將蓋部蓋在本體部上並擰入蓋緊,由此零件的組裝完成。因此,與所述現有技術相比格外容易組裝。另外,軸構件相對於殼體旋轉自如,因此藉由將接地線與軸構件連接,即便在殼體與輥軸一體旋轉時,也可以抑制接地線的扭曲。In the invention thus constituted, in a state where the bearing supporting the shaft member and the conductive part are housed in the internal space of the main body constituting the housing, the cover part is capped on the main body part and screwed into the cover tightly, thereby the parts The assembly is complete. Therefore, it is extremely easy to assemble compared with the prior art. In addition, the shaft member is free to rotate with respect to the housing. Therefore, by connecting the ground wire to the shaft member, even when the housing and the roller shaft rotate integrally, the ground wire can be suppressed from twisting.

另外,本發明的另一形態是一種輥輸送裝置,為了達成所述第二目的,所述輥輸送裝置包括:輥軸,環繞中心軸進行旋轉;輥,安裝在所述輥軸,與所述輥軸一體地旋轉來朝規定的搬送方向搬送被搬送物;所述結構的導電裝置,安裝在所述輥軸的端部;以及接地線,與所述導電裝置連接。In addition, another aspect of the present invention is a roller conveying device. In order to achieve the second object, the roller conveying device includes: a roller shaft that rotates around a central axis; a roller installed on the roller shaft and the The roller shaft integrally rotates to convey the object to be conveyed in a predetermined conveying direction; the conductive device of the structure is installed at the end of the roller shaft; and the ground wire is connected to the conductive device.

在如此構成的發明中,可在將輥軸電接地的狀態下搬送基板,因此可將靜電對於基板的損害防止於未然。 [發明之效果]In the invention thus constituted, the substrate can be conveyed in a state where the roller shaft is electrically grounded, so that damage to the substrate by static electricity can be prevented beforehand. [Effects of Invention]

如上所述,根據本發明,可構成一種可簡單地組裝、且可將輥軸確實地接地的導電裝置。另外,藉由將此種導電裝置安裝在輥輸送裝置,可防止對於被搬送的基板的損害。As described above, according to the present invention, it is possible to construct a conductive device that can be easily assembled and that can reliably ground the roller shaft. In addition, by installing such a conductive device on the roller conveying device, damage to the conveyed substrate can be prevented.

圖1是表示本發明的一實施方式的圖。更具體而言,圖1的(a)是表示本發明的導電裝置的第一實施方式的外觀的圖。另外,圖1的(b)是表示配備有所述導電裝置的輥輸送裝置的一部分的外觀的圖。如圖1的(a)所示,導電裝置1具有在大致圓柱狀的殼體100的中心軸上突出地設置有軸構件40的結構。Fig. 1 is a diagram showing an embodiment of the present invention. More specifically, (a) of FIG. 1 is a diagram showing the appearance of the first embodiment of the conductive device of the present invention. In addition, (b) of FIG. 1 is a diagram showing the appearance of a part of a roller conveying device equipped with the conductive device. As shown in FIG. 1( a ), the conductive device 1 has a structure in which a shaft member 40 is protrudingly provided on the central axis of a substantially cylindrical housing 100.

軸構件40相對於殼體100,環繞與殼體100的中心軸大致一致的旋轉軸自由旋轉。在自殼體100朝外部突出的軸構件40的前端,經由端子接頭71而連接地線70。在與設置有軸構件40之側相反側的殼體100的端部,與殼體100的中心軸同軸地形成有外螺紋11。The shaft member 40 is free to rotate with respect to the housing 100 around a rotation axis substantially coincident with the central axis of the housing 100. The front end of the shaft member 40 protruding from the housing 100 to the outside is connected to a ground wire 70 via a terminal fitting 71. At the end of the housing 100 on the side opposite to the side where the shaft member 40 is provided, a male screw 11 is formed coaxially with the center axis of the housing 100.

如圖1的(b)所示,導電裝置1安裝在輥輸送裝置9。更具體而言,輥輸送裝置9包括:平行地配置的一對框架910、910;以軸旋轉自如的方式由所述框架910、910支撐兩端的多個輥軸920;以及在各輥軸920分別設置有多個的搬送輥930。藉由輥軸920進行旋轉,而朝規定的搬送方向搬送由搬送輥930來支撐下表面的未圖示的基板。輥軸920是具有導電性的例如金屬製,搬送輥930是具有導電性的例如樹脂製。As shown in FIG. 1( b ), the conductive device 1 is installed on the roller conveying device 9. More specifically, the roller conveying device 9 includes: a pair of frames 910 and 910 arranged in parallel; a plurality of roller shafts 920 whose ends are supported by the frames 910 and 910 so as to be rotatable; and each roller shaft 920 A plurality of conveying rollers 930 are respectively provided. As the roller shaft 920 rotates, the substrate (not shown) on the lower surface supported by the transport roller 930 is transported in a predetermined transport direction. The roller shaft 920 is conductive, for example, made of metal, and the transport roller 930 is conductive, for example, made of resin.

導電裝置1分別安裝在各輥軸920的其中一個端部921。即,在各輥軸920的其中一個端部921形成有未圖示的內螺紋,將導電裝置1的外螺紋11與所述內螺紋螺合,由此將導電裝置1安裝在輥軸920的端部,並且與輥軸920電連接。分別安裝在多個輥軸920的導電裝置1經由地線70而相互電連接,最終與規定的接地電極連接而接地。The conductive device 1 is respectively installed at one end 921 of each roller shaft 920. That is, an internal thread (not shown) is formed at one end 921 of each roller shaft 920, and the external thread 11 of the conductive device 1 is screwed with the internal thread, thereby mounting the conductive device 1 on the roller shaft 920. The end is electrically connected to the roller shaft 920. The conductive devices 1 respectively attached to the plurality of roller shafts 920 are electrically connected to each other via a ground wire 70, and are finally connected to a predetermined ground electrode to be grounded.

由此,防止在基板搬送的過程中在輥軸920產生靜電而對基板造成損害。當利用搬送輥930來搬送例如玻璃基板時,因玻璃基板與搬送輥930的摩擦,而使玻璃基板、輥軸920及搬送輥930帶靜電。若無如本實施方式那樣的導電裝置,則有時產生所帶的靜電自搬送輥930或輥軸920朝基板放電的所謂的火花(spark)。藉由導電裝置1來管理輥軸920的電位,例如進行電接地,由此可防止此種火花。As a result, it is prevented that static electricity is generated on the roller shaft 920 during the transfer of the substrate to cause damage to the substrate. When, for example, the glass substrate is transported by the transport roller 930, the glass substrate, the roller shaft 920, and the transport roller 930 are electrostatically charged due to friction between the glass substrate and the transport roller 930. If there is no conductive device as in the present embodiment, so-called sparks in which the charged static electricity is discharged from the conveyance roller 930 or the roller shaft 920 to the substrate may be generated. The electric potential of the roller shaft 920 is managed by the conductive device 1, for example, electrical grounding, so that such sparks can be prevented.

藉由輥軸920進行旋轉,導電裝置1的殼體100與輥軸920一體地進行旋轉。另一方面,地線70安裝在軸構件40,軸構件40相對於殼體100,環繞與殼體100的中心軸同軸的旋轉軸自由旋轉。因此,在安裝有地線70的狀態下軸構件40不進行旋轉,避免伴隨輥軸920的旋轉而在地線70產生扭曲。As the roller shaft 920 rotates, the housing 100 of the conductive device 1 and the roller shaft 920 rotate integrally. On the other hand, the ground wire 70 is mounted on the shaft member 40, and the shaft member 40 is free to rotate around a rotation axis coaxial with the central axis of the housing 100 relative to the housing 100. Therefore, the shaft member 40 does not rotate in the state in which the ground wire 70 is attached, so as to prevent the ground wire 70 from being twisted due to the rotation of the roller shaft 920.

以下,參照圖2至圖4,對導電裝置1的更詳細的結構進行說明。圖2是表示構成導電裝置的各零件的內部結構的分解剖面圖,圖4是導電裝置的組裝剖面圖。另外,圖3是表示導電裝置的組裝步驟的流程圖。Hereinafter, a more detailed structure of the conductive device 1 will be described with reference to FIGS. 2 to 4. FIG. 2 is an exploded cross-sectional view showing the internal structure of each component constituting the conductive device, and FIG. 4 is an assembled cross-sectional view of the conductive device. In addition, FIG. 3 is a flowchart showing the assembly procedure of the conductive device.

如圖2所示,導電裝置1包括:殼體本體10、彈簧20、導電塊30、軸構件40、軸承50、蓋部60、地線70、固定螺絲80、以及墊圈90。地線70以外的各構件的形狀大體上具有軸對稱性,如圖1以及圖2所示,藉由將這些構件呈同軸狀地組裝來構成導電裝置1。As shown in FIG. 2, the conductive device 1 includes: a housing body 10, a spring 20, a conductive block 30, a shaft member 40, a bearing 50, a cover 60, a ground wire 70, a fixing screw 80, and a washer 90. The shape of each member other than the ground wire 70 is substantially axisymmetric. As shown in FIGS. 1 and 2, the conductive device 1 is constructed by assembling these members coaxially.

殼體本體10是利用具有導電性的材料,例如不銹鋼、黃銅、鋁等金屬材料來一體地構成的零件,自大致圓柱狀的構件的上端中央部至規定的深度為止被打穿,具有上端開口且下端密閉的筒型形狀。由此,在殼體本體10內形成用於收容後述的各零件的內部空間SP。在殼體本體10的上端開口部的邊緣形成有內螺紋13。The housing body 10 is an integral part made of conductive materials, such as metal materials such as stainless steel, brass, aluminum, etc. It is penetrated from the center of the upper end of the substantially cylindrical member to a predetermined depth, and has an upper end. A cylindrical shape with an opening and a closed bottom. As a result, an internal space SP for accommodating various components described later is formed in the housing main body 10. An internal thread 13 is formed on the edge of the upper end opening of the casing body 10.

彈簧20是由具有導電性及彈性的材料,例如金屬線所形成的螺旋彈簧。彈簧20的外徑變成限制在殼體本體10的內部空間SP中的尺寸。The spring 20 is a coil spring formed of a conductive and elastic material, such as a metal wire. The outer diameter of the spring 20 becomes a size restricted in the internal space SP of the housing body 10.

導電塊30是由具有導電性的材料,例如金屬、碳(石墨)所形成的零件,具有如下的結構:在具有比彈簧20的內徑大的直徑的圓板狀部位31的下部,連接有具有比彈簧20的內徑小的直徑的圓柱狀部位32。另外,在圓板狀部位31的上表面中央部設置有凹部33。導電塊30使圓柱狀部位32向下,處於被收容在殼體本體10內的彈簧20的上方。於是,導電塊30以圓柱狀部位32插通在彈簧20的內部的形態由彈簧20彈性地支撐。The conductive block 30 is a part formed of conductive material, such as metal or carbon (graphite), and has the following structure: A disc-shaped part 31 having a diameter larger than the inner diameter of the spring 20 is connected to the lower part of the disc-shaped part 31 The cylindrical portion 32 has a diameter smaller than the inner diameter of the spring 20. In addition, a recess 33 is provided in the center of the upper surface of the disc-shaped portion 31. The conductive block 30 has the cylindrical portion 32 downward and above the spring 20 housed in the housing body 10. Then, the conductive block 30 is elastically supported by the spring 20 in a form in which the cylindrical portion 32 is inserted into the inside of the spring 20.

軸構件40是包含具有導電性的材料,例如不銹鋼、黃銅、鋁等金屬材料的棒狀的零件,其下部41被部分地擴徑,並且下端面42形成為倒圓錐形狀。另外,在上端部43形成有內螺紋44。The shaft member 40 is a rod-shaped part containing a conductive material, such as a metal material such as stainless steel, brass, aluminum, and the like. The lower portion 41 is partially enlarged in diameter, and the lower end surface 42 is formed in an inverted cone shape. In addition, a female screw 44 is formed in the upper end 43.

軸承50是徑向滾動軸承,例如可使用市售的滾珠軸承。軸構件40的外徑以如下方式設定:相對於軸承50的內徑應用適宜的配合公差,而使兩者之間變成間隙配合的狀態。由此,例如可相對於軸承50的內圈,能夠以輕微的力插通軸構件40。The bearing 50 is a radial rolling bearing, and for example, a commercially available ball bearing can be used. The outer diameter of the shaft member 40 is set in such a way that an appropriate fit tolerance is applied to the inner diameter of the bearing 50 so that the two are in a state of clearance fit. As a result, for example, the shaft member 40 can be inserted into the inner ring of the bearing 50 with a slight force.

蓋部60是在其周圍設置有外螺紋61的筒狀的零件。外螺紋61變成與殼體本體10的內螺紋13進行螺合的形狀,這些螺紋進行螺合來使殼體本體10與蓋部60一體化,由此構成殼體100。蓋部60的材料並無特別限定,例如可使用與殼體本體10相同的材料。蓋部60的筒狀部位62的內徑以如下方式設定:相對於軸承50的外徑應用適宜的配合公差,而使兩者之間變成間隙配合的狀態。由此,例如可相對於蓋部60,能夠以輕微的力插通軸承50。The cover part 60 is a cylindrical part in which the external thread 61 is provided in the periphery. The external thread 61 becomes a shape to be screwed with the internal thread 13 of the casing body 10, and these threads are screwed to integrate the casing body 10 and the cover 60, thereby constituting the casing 100. The material of the cover 60 is not particularly limited, and for example, the same material as the case body 10 can be used. The inner diameter of the cylindrical portion 62 of the cover 60 is set in such a way that an appropriate fit tolerance is applied to the outer diameter of the bearing 50 so that the two are in a state of clearance fit. Thereby, for example, the bearing 50 can be penetrated with respect to the cover part 60 with a slight force.

另一方面,蓋部60的上端63的開口直徑略小於軸承50的外徑。即,筒狀部位62的側壁面變成在其上端朝內側(中心軸側)突出的結構。由此,防止被收容在筒狀部位62的內部的軸承50朝比蓋部60更上方飛出。即,蓋部60具有將彈簧20、導電塊30、軸構件40及軸承50密封在殼體100內的功能。而且,相對於殼體100旋轉自如的軸構件40的上端自設置在蓋部60的上端63的開口突出。On the other hand, the opening diameter of the upper end 63 of the cover 60 is slightly smaller than the outer diameter of the bearing 50. That is, the side wall surface of the cylindrical portion 62 has a structure in which the upper end thereof protrudes toward the inner side (the central axis side). This prevents the bearing 50 housed in the cylindrical portion 62 from flying out above the cover 60. That is, the cover 60 has a function of sealing the spring 20, the conductive block 30, the shaft member 40, and the bearing 50 in the housing 100. In addition, the upper end of the shaft member 40 rotatably with respect to the housing 100 protrudes from the opening provided in the upper end 63 of the cover 60.

在所述軸構件40的上端連接地線70。具體而言,固定螺絲80與形成在軸構件40的上端部43的內螺紋44進行螺合。隔著安裝在地線70的一端的端子接頭71及墊圈90來將固定螺絲80與內螺紋44螺合,由此將端子接頭71機械式地與軸構件40結合,由此將地線70與軸構件40電連接。A ground wire 70 is connected to the upper end of the shaft member 40. Specifically, the fixing screw 80 is threadedly engaged with the female thread 44 formed on the upper end portion 43 of the shaft member 40. The fixing screw 80 is screwed to the female thread 44 through the terminal fitting 71 and the washer 90 installed at one end of the ground wire 70, thereby mechanically coupling the terminal fitting 71 to the shaft member 40, thereby connecting the ground wire 70 and The shaft member 40 is electrically connected.

將這些構件組裝來製造導電裝置1時的步驟的一例如圖3所示。首先,優選在使殼體本體10的開口部向上的狀態下,將彈簧20及導電塊30以此順序收容在殼體本體10的內部空間SP中(步驟S101、步驟S102)。另外,也可以在將彈簧20與導電塊30組合的狀態下收容在殼體本體10內。An example of the steps when assembling these components to manufacture the conductive device 1 is shown in FIG. 3. First, it is preferable to house the spring 20 and the conductive block 30 in the internal space SP of the housing body 10 in this order with the opening of the housing body 10 facing upward (step S101 and step S102). In addition, the spring 20 and the conductive block 30 may be housed in the housing body 10 in a state where the spring 20 and the conductive block 30 are combined.

其次,在使軸構件40插通在軸承50中的狀態下,將它們一體地收容在殼體本體10內(步驟S103)。而且,將蓋部60蓋在軸承50上,一面抵抗由彈簧20產生的施加力來壓入蓋部60,一面與殼體本體10進行螺合(步驟S104)。Next, with the shaft member 40 inserted into the bearing 50, they are integrally housed in the housing body 10 (step S103). Then, the cover 60 is placed on the bearing 50, while being pressed into the cover 60 against the biasing force of the spring 20, the cover 60 is screwed into the housing body 10 (step S104).

圖4的(a)左圖表示此時的狀態。在將蓋部60蓋在軸承50上的時間點,抑制被收容在殼體本體10內的各零件朝外部飛出。尤其,軸構件40的下端尖,在承受其的導電塊30的上部設置有凹部33,因此也避免軸構件40在導電塊30上朝橫向滑動而導致位置偏離。因此,將蓋部60與殼體本體10螺合的作業自身兼作將各零件安裝在正規的位置的作業。另外,到此為止的組裝作業不特別需要治具與工具。如此,在所述導電裝置1中,用於將各零件一體化的組裝作業極其簡單。The left diagram of Fig. 4(a) shows the state at this time. At the time when the cover 60 is covered on the bearing 50, the parts contained in the housing body 10 are suppressed from flying out to the outside. In particular, the lower end of the shaft member 40 is sharp, and a recess 33 is provided on the upper part of the conductive block 30 that bears it. Therefore, the shaft member 40 is prevented from sliding laterally on the conductive block 30 to cause positional deviation. Therefore, the work of screwing the cover 60 and the housing body 10 together is also the work of mounting each component in a regular position. In addition, jigs and tools are not particularly required for the assembly work up to this point. In this way, in the conductive device 1, the assembly work for integrating the components is extremely simple.

回到圖3,將如此組裝的導電裝置1與地線連接(步驟S106、步驟S107),在此之前,也可以將導電裝置1卡合在輥軸920(步驟S105)。即,可存在將導電裝置1本體卡合在輥軸920後連接地線70的方法、及將至地線70已完成安裝的狀態下的導電裝置1卡合在輥軸920的方法(在此情況下,步驟S105在步驟S107之後執行)。這些方法可對應於現場的作業性是否良好而適宜選擇。Returning to FIG. 3, the conductive device 1 assembled in this way is connected to the ground (step S106, step S107). Prior to this, the conductive device 1 may be engaged with the roller shaft 920 (step S105). That is, there may be a method of engaging the body of the conductive device 1 on the roller shaft 920 and then connecting the ground wire 70, and a method of engaging the conductive device 1 on the roller shaft 920 after the ground wire 70 has been installed (here In this case, step S105 is executed after step S107). These methods can be appropriately selected according to whether the workability on site is good.

地線70的連接能夠以如下方式來進行。將墊圈90插通在固定螺絲80中(步驟S106),使固定螺絲80穿過安裝在地線70的端部的端子接頭71的安裝孔而緊固在軸構件40的內螺紋44(步驟S107),由此將地線70與導電裝置1連接。此時,固定螺絲80的緊固例如使用如螺絲刀那樣的工具,但作為安裝物件物的軸構件40為固定在更大的導電裝置1或輥軸920的狀態,因此其支撐比較容易。The connection of the ground wire 70 can be performed in the following manner. The washer 90 is inserted into the fixing screw 80 (step S106), and the fixing screw 80 is inserted through the mounting hole of the terminal fitting 71 installed at the end of the ground wire 70 and fastened to the female thread 44 of the shaft member 40 (step S107). ), thereby connecting the ground wire 70 to the conductive device 1. At this time, for example, a tool such as a screwdriver is used to fasten the fixing screw 80. However, the shaft member 40 as an installation object is fixed to the larger conductive device 1 or the roller shaft 920, so its support is relatively easy.

圖4的(a)右圖表示此時的狀態。在此狀態下,在殼體100的內部空間SP中,導電塊30經由彈簧20而與殼體本體10電連接,並且由已被壓入的彈簧20的復原力向上施力。軸構件40按壓在導電塊30的上表面,因此軸構件40也被向上施力。The right figure of Fig. 4(a) shows the state at this time. In this state, in the internal space SP of the housing 100, the conductive block 30 is electrically connected to the housing body 10 via the spring 20, and is urged upward by the restoring force of the spring 20 that has been pressed in. The shaft member 40 is pressed against the upper surface of the conductive block 30, so the shaft member 40 is also urged upward.

軸構件40插通在軸承50中。軸構件40的擴徑部位41碰觸軸承50的下表面,由此限制軸構件40相對於軸承50的向上的移動。換言之,當軸構件40將要向上位移時,軸承50也一體地位移。The shaft member 40 is inserted through the bearing 50. The enlarged diameter portion 41 of the shaft member 40 touches the lower surface of the bearing 50, thereby restricting the upward movement of the shaft member 40 relative to the bearing 50. In other words, when the shaft member 40 is about to be displaced upward, the bearing 50 is also displaced integrally.

作為結果,彈簧20對導電塊30、軸構件40及軸承50賦予向上的施加力。軸承50的上端由蓋部60的上端63來限制位移,因此變成軸承50被蓋部60按壓的狀態。由此,各零件在上下方向上的位置得到固定,防止各零件在殼體100內大幅度晃動。As a result, the spring 20 imparts an upward urging force to the conductive block 30, the shaft member 40, and the bearing 50. Since the upper end of the bearing 50 is displaced by the upper end 63 of the cover 60, the bearing 50 is pressed by the cover 60. Thereby, the position of each part in the up-down direction is fixed, and each part is prevented from shaking greatly in the housing 100.

圖4的(b)是更詳細地表示軸構件40、軸承50及蓋部60的抵接狀態的部分剖面圖。軸承50例如為滾珠軸承,包括外圈51、內圈52及轉動體53作為其主要構成。轉動體53在外圈51與內圈52之間轉動,由此在外圈51與內圈52之間實現相對的旋轉運動。FIG. 4( b) is a partial cross-sectional view showing the contact state of the shaft member 40, the bearing 50, and the cover 60 in more detail. The bearing 50 is, for example, a ball bearing, and includes an outer ring 51, an inner ring 52, and a rotating body 53 as its main components. The rotating body 53 rotates between the outer ring 51 and the inner ring 52, thereby realizing a relative rotational movement between the outer ring 51 and the inner ring 52.

此處,軸構件40的擴徑部位41抵接在軸承50的內圈52,未抵接在外圈51。換言之,擴徑部位41的外徑以滿足所述關係的方式設定。另一方面,蓋部60的上端63抵接在軸承50的外圈51,未抵接在內圈52。換言之,蓋部60的上端63的開口直徑以滿足所述關係的方式設定。Here, the enlarged diameter portion 41 of the shaft member 40 abuts against the inner ring 52 of the bearing 50 and does not abut against the outer ring 51. In other words, the outer diameter of the enlarged diameter portion 41 is set so as to satisfy the above-mentioned relationship. On the other hand, the upper end 63 of the cover 60 abuts against the outer ring 51 of the bearing 50 and does not abut against the inner ring 52. In other words, the opening diameter of the upper end 63 of the cover 60 is set in such a way that the relationship is satisfied.

因此,由空心箭頭表示的彈簧20的向上的施加力F具有如下的作用:將軸構件40按壓在軸承50的內圈52,由此在軸構件40與內圈52之間不產生位移,將蓋部60按壓在軸承50的外圈51,由此在蓋部60與外圈51之間不產生位移。另一方面,外圈51與內圈52之間順利地進行旋轉。其結果,實現軸構件40相對於殼體100的自由的旋轉。Therefore, the upward urging force F of the spring 20 indicated by the hollow arrow has the effect of pressing the shaft member 40 against the inner ring 52 of the bearing 50, thereby preventing displacement between the shaft member 40 and the inner ring 52, and The cover 60 is pressed against the outer ring 51 of the bearing 50, so that no displacement occurs between the cover 60 and the outer ring 51. On the other hand, the outer ring 51 and the inner ring 52 rotate smoothly. As a result, free rotation of the shaft member 40 with respect to the housing 100 is achieved.

軸構件40相對於殼體100進行旋轉,由此軸構件40的前端以碰觸導電塊30的狀態進行滑動。因此,對於導電塊30要求如下的性質:導電性良好、摩擦係數低、且耐熱性高。在本實施方式中,作為適合於此種目的的導電塊,使用碳(石墨)塊。The shaft member 40 rotates with respect to the housing 100, whereby the front end of the shaft member 40 slides while touching the conductive block 30. Therefore, the conductive block 30 requires the following properties: good conductivity, low friction coefficient, and high heat resistance. In this embodiment, a carbon (graphite) block is used as a conductive block suitable for this purpose.

如上所述,本實施方式的導電裝置1具有將輥輸送裝置9的輥軸920電接地的功能。具體而言,形成經由各自包含導電性材料的殼體本體10、彈簧20、導電塊30、軸構件40及地線70而到達未圖示的接地電極的導電路徑,去除在輥軸920產生的靜電。由此,避免因靜電而使被搬送的基板或形成在其表面的元件破損或使特性劣化的問題。As described above, the conductive device 1 of the present embodiment has the function of electrically grounding the roller shaft 920 of the roller conveying device 9. Specifically, a conductive path is formed to reach a ground electrode (not shown) through the housing body 10, the spring 20, the conductive block 30, the shaft member 40, and the ground wire 70 each containing a conductive material, and the generated in the roller shaft 920 is removed. Static electricity. As a result, it is possible to avoid the problem of damage to the substrate being conveyed or the elements formed on the surface thereof due to static electricity, or deterioration of characteristics.

導電裝置1可在將主要零件收容在殼體本體10內後,藉由蓋上蓋部60並擰入這一簡單的作業來組裝。因此,不使用特別的治具與工具,另外,能夠以少的工時進行組裝。The conductive device 1 can be assembled by a simple operation of covering the lid 60 and screwing in after the main parts are housed in the casing body 10. Therefore, no special jigs and tools are used, and the assembly can be performed with few man-hours.

以下,對本發明的導電裝置的其他實施方式進行說明。在這些實施方式中,與所述第一實施方式相比,一部分的結構不同,但大部分的構成相同。因此,對具有與第一實施方式相同的結構、功能的構件附加相同的符號,有時省略詳細的說明。Hereinafter, other embodiments of the conductive device of the present invention will be described. In these embodiments, compared with the above-mentioned first embodiment, some of the structures are different, but most of the structures are the same. Therefore, members having the same structure and function as those of the first embodiment are assigned the same reference numerals, and detailed descriptions may be omitted.

圖5是表示本發明的導電裝置的第二實施方式的圖。與所述第一實施方式相比,在第二實施方式的導電裝置2中,殼體的結構的一部分不同,除此點以外的結構相同。具體而言,在構成殼體200的殼體本體210與蓋部260中,在殼體本體210側形成內螺紋213,在蓋部260側形成外螺紋261,兩者相互進行螺合。即便是此種結構,也可以與所述第一實施方式同樣地獲得如下的效果:組裝簡單,可將輥軸確實地接地。Fig. 5 is a diagram showing a second embodiment of the conductive device of the present invention. Compared with the first embodiment, in the conductive device 2 of the second embodiment, a part of the structure of the housing is different, and the structure other than this point is the same. Specifically, in the housing body 210 and the cover portion 260 constituting the housing 200, an internal thread 213 is formed on the housing body 210 side, and an external thread 261 is formed on the cover portion 260 side, and the two are screwed to each other. Even with such a structure, the following effects can be obtained in the same way as in the first embodiment: the assembly is simple, and the roller shaft can be reliably grounded.

另外,在此結構中,可使殼體本體210的上部的內徑例如與軸承50的外徑一致。若如此設定,則在組裝步驟中的將軸承50收容在殼體本體210內的步驟(步驟S103)中,可抑制軸承50在橫向上的晃動,更順利地蓋上蓋部260。由此,組裝時的作業性進一步提升。In addition, in this structure, the inner diameter of the upper part of the housing body 210 can be made to coincide with the outer diameter of the bearing 50, for example. With this setting, in the step of accommodating the bearing 50 in the housing body 210 (step S103) in the assembling step, it is possible to suppress the shaking of the bearing 50 in the lateral direction, and to cover the cover 260 more smoothly. As a result, the workability at the time of assembly is further improved.

圖6是表示本發明的導電裝置的第三實施方式及第四實施方式的圖。更具體而言,圖6的(a)表示本發明的導電裝置的第三實施方式,圖6的(b)表示本發明的導電裝置的第四實施方式。在圖6的(a)中所示的第三實施方式的導電裝置3中,彈簧320配置在軸承50的上方。更具體而言,在此實施方式中,在殼體本體310的內部空間SP的底部配置碳製的導電塊330,並以抵接在導電塊330的上表面的方式設置軸構件340。軸構件340以插通在軸承50中的狀態收容在殼體本體310內。Fig. 6 is a diagram showing a third embodiment and a fourth embodiment of the conductive device of the present invention. More specifically, FIG. 6(a) shows the third embodiment of the conductive device of the present invention, and FIG. 6(b) shows the fourth embodiment of the conductive device of the present invention. In the conductive device 3 of the third embodiment shown in (a) of FIG. 6, the spring 320 is arranged above the bearing 50. More specifically, in this embodiment, the conductive block 330 made of carbon is arranged at the bottom of the internal space SP of the casing body 310, and the shaft member 340 is arranged so as to abut on the upper surface of the conductive block 330. The shaft member 340 is housed in the housing body 310 in a state of being inserted into the bearing 50.

其後,將彈簧320裝載在軸承50並蓋上蓋部360。蓋部上端363的開口直徑比彈簧320的外徑小,由此防止彈簧320的飛出。將蓋部360與殼體本體310螺合,由此彈簧320收縮,其復原力向下對軸承50施力。由此,軸構件340以被導電塊330按壓的狀態進行旋轉。After that, the spring 320 is loaded on the bearing 50 and the cover 360 is covered. The opening diameter of the upper end 363 of the cover is smaller than the outer diameter of the spring 320, thereby preventing the spring 320 from flying out. When the cover 360 is screwed to the housing body 310, the spring 320 contracts, and its restoring force urges the bearing 50 downward. As a result, the shaft member 340 rotates while being pressed by the conductive block 330.

在此情況下,在軸構件340與導電塊330之間、及導電塊330與殼體本體310之間分別可取得導通,因此彈簧320不需要導電性。另外,只要在耐磨耗性方面不產生問題,則也可以設為軸構件340不經由導電塊而抵接在殼體本體310的構成。In this case, conduction can be achieved between the shaft member 340 and the conductive block 330, and between the conductive block 330 and the housing body 310, respectively, so the spring 320 does not need to be conductive. In addition, as long as there is no problem in wear resistance, the shaft member 340 may be configured to abut against the housing main body 310 without passing through the conductive block.

另外,在此結構中,例如將殼體本體310的內徑設為對應於軸承50的外徑的內徑,由此可使將軸承50收容在殼體本體310內時的朝橫向的晃動減少至實用上無問題的程度為止。因此,進而裝載彈簧320並蓋緊蓋部360,由此可組裝導電裝置3,組裝作業變得更容易。In addition, in this structure, for example, the inner diameter of the housing main body 310 is set to an inner diameter corresponding to the outer diameter of the bearing 50, so that the lateral vibration when the bearing 50 is housed in the housing main body 310 can be reduced. To the extent that there are no practical problems. Therefore, the spring 320 is further loaded and the cover 360 is tightly closed, so that the conductive device 3 can be assembled, and the assembly operation becomes easier.

另外,在此結構中,為了將彈簧320位置精度良好地配置在殼體本體310內而使其後的蓋部360的安裝變得容易,如圖示那樣,優選在殼體本體310設置外螺紋,在蓋部360設置內螺紋。In addition, in this structure, in order to arrange the spring 320 in the housing body 310 with high accuracy and facilitate the attachment of the rear cover 360, as shown in the figure, it is preferable to provide an external thread on the housing body 310. , The cover 360 is provided with an internal thread.

另外,在圖6的(b)中所示的第四實施方式的導電裝置4中,代替設置在第一實施方式的導電裝置1的彈簧20及導電塊30,將由具有導電性及彈性的材料,例如磷青銅所形成的板彈簧420設置在殼體400內。板彈簧420利用其復原力來向上對軸構件40施力,由此將軸構件40按壓在軸承50,且將軸承50按壓在蓋部60的上端63。另外,藉由分別抵接在殼體本體410與軸構件40來將它們電連接。即,板彈簧420將軸構件40與殼體本體410彈性地電連接。由此,可謀求零件數的進一步削減。In addition, in the conductive device 4 of the fourth embodiment shown in FIG. 6(b), instead of the spring 20 and the conductive block 30 provided in the conductive device 1 of the first embodiment, a material having conductivity and elasticity will be used. For example, a leaf spring 420 formed of phosphor bronze is provided in the housing 400. The leaf spring 420 uses its restoring force to urge the shaft member 40 upward, thereby pressing the shaft member 40 on the bearing 50 and pressing the bearing 50 on the upper end 63 of the cover 60. In addition, the housing main body 410 and the shaft member 40 are respectively abutted to electrically connect them. That is, the leaf spring 420 elastically electrically connects the shaft member 40 and the housing body 410. As a result, the number of parts can be further reduced.

在這些實施方式的導電裝置3、導電裝置4中,也可以經由所述導電裝置來將輥軸電接地。另外,將主要零件收容在殼體本體內並利用蓋部蓋緊的組裝步驟也與第一實施方式相同。因此,可容易地進行導電裝置的組裝。In the conductive device 3 and the conductive device 4 of these embodiments, the roller shaft may be electrically grounded via the conductive device. In addition, the assembling procedure of accommodating the main parts in the casing body and tightening with the cover is also the same as the first embodiment. Therefore, the assembly of the conductive device can be easily performed.

如以上所說明那樣,在所述第一實施方式中,殼體本體10及蓋部60分別作為本發明的“本體部”及“蓋部”發揮功能,它們一體地作為本發明的“殼體”發揮功能。另外,軸構件40及軸承50分別作為本發明的“軸構件”及“軸承”而各自發揮功能。另外,彈簧20作為本發明的“施力構件”發揮功能,另一方面,導電塊30作為本發明的“抵接構件”發揮功能,它們一體地作為本發明的“導電部”發揮功能。另外,設置在殼體本體10的外螺紋11相當於本發明的“卡合部位”,另一方面,設置在軸構件40的內螺紋44相當於本發明的“連接部位”。另外,地線70相當於本發明的“接地線”。As described above, in the first embodiment, the housing body 10 and the cover 60 respectively function as the "main body" and the "cover" of the present invention, and they are integrated as the "housing" of the present invention. "Play to function. In addition, the shaft member 40 and the bearing 50 respectively function as the "shaft member" and the "bearing" of the present invention. In addition, the spring 20 functions as the "biasing member" of the present invention. On the other hand, the conductive block 30 functions as the "contact member" of the present invention, and they integrally function as the "conductive portion" of the present invention. In addition, the external thread 11 provided in the housing body 10 corresponds to the "engagement portion" of the present invention, and on the other hand, the internal thread 44 provided in the shaft member 40 corresponds to the "connection portion" of the present invention. In addition, the ground wire 70 corresponds to the "ground wire" of the present invention.

另外,在第三實施方式中,彈簧320作為本發明的“施力構件”發揮功能,另一方面,導電塊330作為本發明的“抵接構件”發揮功能,它們一體地作為本發明的“導電部”發揮功能。另一方面,在第四實施方式中,板彈簧420作為本發明的“彈性體”發揮功能。In addition, in the third embodiment, the spring 320 functions as the "biasing member" of the present invention. On the other hand, the conductive block 330 functions as the "contact member" of the present invention, and they are integrated as the "appliing member" of the present invention. The conductive part" functions. On the other hand, in the fourth embodiment, the leaf spring 420 functions as the "elastic body" of the present invention.

另外,本發明並不限定於所述實施方式,只要不脫離其主旨,則除所述實施方式以外,可進行各種變更。例如,在所述實施方式中,經由設置在殼體本體10的外螺紋11來將導電裝置1與輥軸920連接。但是,用於將導電裝置卡合在輥軸的結構並不限定於此,可適宜使用其他結構。In addition, the present invention is not limited to the above-mentioned embodiment, and various changes can be made in addition to the above-mentioned embodiment as long as it does not deviate from the gist. For example, in the described embodiment, the conductive device 1 and the roller shaft 920 are connected via the external thread 11 provided on the housing body 10. However, the structure for engaging the conductive device with the roller shaft is not limited to this, and other structures can be suitably used.

另外,例如在所述第一實施方式至第三實施方式中,作為施加力的產生源,使用螺旋彈簧,但作為替代,也可以使用如在第四實施方式中所使用的板彈簧、或導電性樹脂材料來產生施加力。In addition, for example, in the first to third embodiments, a coil spring is used as a source of applied force, but instead, a leaf spring as used in the fourth embodiment or a conductive Resin material to generate applied force.

另外,例如在所述第一實施方式中,藉由產生施加力的彈簧20來確保導電塊30與殼體本體10的導通,但用於產生施加力的構成與用於確保導通的構成無需為相同的構成,它們也可以由不同的構件來實現。In addition, for example, in the first embodiment, the conduction between the conductive block 30 and the housing body 10 is ensured by the spring 20 that generates the applied force, but the structure for generating the applied force and the structure for ensuring the conduction need not be the same. The same composition, they can also be realized by different components.

另外,例如在所述第一實施方式中,為了使零件間的裝卸變得容易,將軸構件40與軸承50的內圈52之間、及蓋部60與軸承50的外圈51之間均設為間隙配合的狀態。作為替代,也可以將任一者設為中間配合或緊配合的狀態。例如當將軸構件與軸承之間設為緊配合時,軸構件與內圈之間在組裝時被固定,因此並非必須在軸構件設置擴徑部位。In addition, for example, in the first embodiment, in order to facilitate the attachment and detachment between the parts, the shaft member 40 and the inner ring 52 of the bearing 50, and the cover 60 and the outer ring 51 of the bearing 50 are both set up. Set to the state of clearance fit. As an alternative, either may be set to a state of intermediate fit or tight fit. For example, when the shaft member and the bearing are tightly fitted, the shaft member and the inner ring are fixed at the time of assembly. Therefore, it is not necessary to provide an enlarged diameter portion on the shaft member.

另外,所述實施方式的殼體本體10等的整體由導電性材料(例如金屬)形成,但並不限定於此。即,只要確保將輥軸與導電部(彈簧及導電塊)連接的導電路徑便足夠,不參與所述導電路徑的部分也可以不具有導電性。In addition, the entire case body 10 and the like of the above-described embodiment are formed of a conductive material (for example, metal), but it is not limited to this. That is, it is sufficient to ensure a conductive path connecting the roller shaft and the conductive portion (spring and conductive block), and the portion that does not participate in the conductive path may not have conductivity.

另外,在所述實施方式中,甚至將地線70、固定螺絲80及墊圈90都包含在導電裝置的構成的一部分中,但在將所述導電裝置作為製品來流通的情況下,也可以將這些零件(特別是地線)作為不包含在導電裝置中的外部零件來處理。In addition, in the above-mentioned embodiment, even the ground wire 70, the fixing screw 80, and the washer 90 are included in a part of the configuration of the conductive device, but when the conductive device is distributed as a product, it may be These parts (especially the ground wire) are treated as external parts that are not included in the conductive device.

以上,如例示具體的實施方式所說明那樣,在本發明的導電裝置中,例如導電部可為如下的構成:由具有導電性的材料形成,具有抵接在軸構件並與殼體電連接的抵接構件,以及朝接近方向對軸構件與抵接構件之間施力來賦予按壓力的施力構件。根據此種構成,在伴隨軸構件的旋轉而與抵接構件之間產生的滑動中,也可以穩定地確保電導通。As described above, as described in the specific embodiment, in the conductive device of the present invention, for example, the conductive portion may be formed of a conductive material, having a structure that abuts on the shaft member and is electrically connected to the housing. An abutting member, and an urging member that urges between the shaft member and the abutting member in the approach direction to give a pressing force. According to such a configuration, even in sliding with the abutting member due to the rotation of the shaft member, it is possible to stably ensure electrical conduction.

在此情況下,例如施力構件可為由具有導電性的材料形成,介於抵接構件與殼體之間的彈性體。根據此種構成,施力構件兼具對抵接構件賦予施加力的功能與確保導通的功能,可減少零件數。In this case, for example, the urging member may be an elastic body formed of a conductive material and interposed between the abutting member and the housing. According to this configuration, the urging member has both the function of applying force to the contact member and the function of ensuring conduction, and the number of parts can be reduced.

另外,例如導電部可為由具有導電性的材料形成,介於軸構件與殼體之間的彈性體。根據此種構成,藉由導電部來將軸構件與殼體之間彈性地電連接,與所述相同,可兼具對軸構件賦予施加力的功能與確保導通的功能。In addition, for example, the conductive portion may be an elastic body formed of a conductive material and interposed between the shaft member and the housing. According to this configuration, the shaft member and the housing are elastically and electrically connected by the conductive portion, and as described above, it is possible to have both the function of applying force to the shaft member and the function of ensuring conduction.

另外,例如軸承是內圈與外圈相對地環繞一個旋轉軸自由旋轉的徑向軸承,外圈抵接在殼體,軸構件可具有將具有內圈的內徑以下的直徑的棒狀構件的一端部與內圈的內徑相比擴徑的形狀,並以使一端部位於殼體內,使與一端部相反的另一端部位於殼體外的狀態插通在內圈中。根據此種構成,藉由殼體及軸構件抵接在軸承來規定各零件的位置關係,而且可使軸構件相對於殼體順利地進行旋轉。In addition, for example, the bearing is a radial bearing in which the inner ring and the outer ring are relatively free to rotate around a rotating shaft. The outer ring abuts on the housing, and the shaft member may have a rod-shaped member having a diameter below the inner diameter of the inner ring. One end has a shape with a larger diameter than the inner diameter of the inner ring, and the one end is inserted into the inner ring so that the one end is located in the housing and the other end opposite to the one end is located outside the housing. According to such a structure, the positional relationship of each part is defined by the contact of the housing and the shaft member with the bearing, and the shaft member can be smoothly rotated with respect to the housing.

另外,例如可在軸構件中的朝殼體外露出的部分,設置用於連接接地線的連接部位。根據此種構成,即便殼體伴隨輥軸的旋轉而進行旋轉,也可以避免連接有接地線的軸構件的旋轉,因此不存在接地線扭曲、或因接地線的連接而阻礙輥軸的旋轉的情況。 [產業上的可利用性]In addition, for example, a portion of the shaft member exposed to the outside of the housing may be provided with a connection site for connecting a ground wire. According to this configuration, even if the housing rotates with the rotation of the roller shaft, the rotation of the shaft member connected to the ground wire can be avoided. Therefore, there is no twisting of the ground wire or obstruction of the rotation of the roller shaft due to the connection of the ground wire. Happening. [Industrial availability]

本發明可適宜地應用於構成搬送玻璃基板、電子電路基板等各種基板的輥輸送裝置的用途。The present invention can be suitably applied to applications constituting a roller conveying device that conveys various substrates such as glass substrates and electronic circuit boards.

1、2、3、4:導電裝置 9:輥輸送裝置 10、210、310、410:殼體本體(本體部、殼體) 11:外螺紋(卡合部位) 13、213:內螺紋 20、320:彈簧(施力構件、導電部) 30、330:導電塊(抵接構件、導電部) 31:圓板狀部位 32:圓柱狀部位 33:凹部 40、340:軸構件 41:下部(擴徑部位) 42:下端面 43:上端部 44:內螺紋(連接部位) 50:軸承 51:外圈 52:內圈 53:轉動體 60、260、360:蓋部(殼體) 61、261:外螺紋 62:筒狀部位 63:上端 70:地線(接地線) 71:端子接頭 80:固定螺絲 90:墊圈 100、200、300、400:殼體 363:蓋部上端 420:板彈簧(彈性體) 910:框架 920:輥軸 921:其中一個端部 930:搬送輥(輥) F:施加力 SP:內部空間 S101~S107:步驟1, 2, 3, 4: conductive device 9: Roller conveyor 10, 210, 310, 410: shell body (body part, shell) 11: External thread (locking part) 13, 213: internal thread 20, 320: Spring (forcing member, conductive part) 30, 330: Conductive block (contact member, conductive part) 31: Disc-shaped parts 32: Cylindrical part 33: recess 40, 340: Shaft member 41: Lower part (expanded diameter part) 42: lower end face 43: upper end 44: Internal thread (connection part) 50: Bearing 51: Outer ring 52: inner circle 53: rotating body 60, 260, 360: cover part (shell) 61, 261: external thread 62: cylindrical part 63: upper end 70: Ground wire (ground wire) 71: terminal connector 80: fixing screw 90: Washer 100, 200, 300, 400: shell 363: cover upper end 420: Leaf spring (elastic body) 910: Frame 920: Roller 921: one of the ends 930: Conveying roller (roller) F: Applied force SP: Internal space S101~S107: steps

圖1是表示本發明的一實施方式的圖。 圖2是表示構成導電裝置的各零件的內部結構的分解剖面圖。 圖3是表示導電裝置的組裝步驟的流程圖。 圖4是導電裝置的組裝剖面圖。 圖5是表示本發明的導電裝置的第二實施方式的圖。 圖6是表示本發明的導電裝置的第三實施方式及第四實施方式的圖。Fig. 1 is a diagram showing an embodiment of the present invention. Fig. 2 is an exploded cross-sectional view showing the internal structure of each component constituting the conductive device. Fig. 3 is a flowchart showing the assembly procedure of the conductive device. Fig. 4 is an assembled cross-sectional view of the conductive device. Fig. 5 is a diagram showing a second embodiment of the conductive device of the present invention. Fig. 6 is a diagram showing a third embodiment and a fourth embodiment of the conductive device of the present invention.

1:導電裝置 1: Conductive device

10:殼體本體(本體部、殼體) 10: Shell body (body part, shell)

11:外螺紋(卡合部位) 11: External thread (locking part)

13:內螺紋 13: Internal thread

20:彈簧(施力構件、導電部) 20: Spring (forcing member, conductive part)

30:導電塊(抵接構件、導電部) 30: Conductive block (contact member, conductive part)

31:圓板狀部位 31: Disc-shaped parts

32:圓柱狀部位 32: Cylindrical part

33:凹部 33: recess

40:軸構件 40: Shaft member

41:下部(擴徑部位) 41: Lower part (expanded diameter part)

42:下端面 42: lower end face

43:上端部 43: upper end

44:內螺紋(連接部位) 44: Internal thread (connection part)

50:軸承 50: Bearing

60:蓋部(殼體) 60: Lid (housing)

61:外螺紋 61: External thread

62:筒狀部位 62: cylindrical part

63:上端 63: upper end

70:地線(接地線) 70: Ground wire (ground wire)

71:端子接頭 71: terminal connector

80:固定螺絲 80: fixing screw

90:墊圈 90: Washer

SP:內部空間 SP: Internal space

Claims (7)

一種導電裝置,是用於將輥輸送裝置的輥軸與接地線電連接的導電裝置,包括: 殼體,具有卡合在所述輥軸的端部的卡合部位; 軸構件,由導電性材料形成,經由設置在所述殼體的開口而自所述殼體的內部朝外部突出; 軸承,在所述殼體內,相對於所述殼體旋轉自如地支撐所述軸構件;以及 導電部,與所述軸構件彈性地抵接,將所述軸構件與所述殼體之間電連接來形成導電路徑; 所述殼體包含: 本體部,由具有導電性的材料形成,具有能夠收容所述軸承及所述導電部的內部空間;以及 蓋部,設置有成為所述開口的貫穿孔,並且與所述本體部卡合來堵塞所述內部空間,由此將所述軸承及所述導電部密封在所述內部空間中; 所述本體部與所述蓋部藉由設置在兩者的螺絲部位相互進行螺合來一體化,而形成所述殼體。A conductive device is a conductive device used to electrically connect the roller shaft of a roller conveying device with a ground wire, and includes: The housing has a clamping part that is clamped at the end of the roller shaft; The shaft member is formed of a conductive material and protrudes from the inside of the housing to the outside through an opening provided in the housing; A bearing, in the housing, rotatably supports the shaft member with respect to the housing; and A conductive part elastically abuts against the shaft member and electrically connects the shaft member and the housing to form a conductive path; The housing includes: The main body part is formed of a conductive material and has an internal space capable of accommodating the bearing and the conductive part; and The cover part is provided with a through hole that becomes the opening, and is engaged with the body part to block the internal space, thereby sealing the bearing and the conductive part in the internal space; The main body part and the cover part are integrated by screwing the screw parts provided at both to form the housing. 如請求項1所述的導電裝置,其中 所述導電部具有: 抵接構件,由具有導電性的材料形成,抵接在所述軸構件,並且與所述殼體電連接;以及 施力構件,對所述軸構件與所述抵接構件之間朝接近方向施力來賦予按壓力。The conductive device according to claim 1, wherein The conductive part has: The abutting member is formed of a conductive material, abuts on the shaft member, and is electrically connected to the housing; and The urging member urges between the shaft member and the abutting member in the approaching direction to provide a pressing force. 如請求項2所述的導電裝置,其中所述施力構件是由具有導電性的材料形成,介於所述抵接構件與所述殼體之間的彈性體。The conductive device according to claim 2, wherein the urging member is formed of a conductive material and is an elastic body interposed between the abutting member and the housing. 如請求項3所述的導電裝置,其中所述導電部是由具有導電性的材料形成,介於所述軸構件與所述殼體之間的彈性體。The conductive device according to claim 3, wherein the conductive portion is formed of a conductive material and is an elastic body interposed between the shaft member and the housing. 如請求項1至請求項4中任一項所述的導電裝置,其中所述軸承是內圈與外圈相對地環繞一個旋轉軸自由旋轉的徑向軸承,所述外圈抵接在所述殼體, 所述軸構件具有與所述內圈的內徑相比將一端部擴徑的形狀,所述一端部為具有所述內圈的內徑以下的直徑的棒狀構件的一端部,並以使所述一端部位於所述殼體內,使與所述一端部相反的另一端部位於所述殼體外的狀態插通在所述內圈中。The conductive device according to any one of claims 1 to 4, wherein the bearing is a radial bearing in which an inner ring and an outer ring are relatively free to rotate around a rotating shaft, and the outer ring abuts on the case, The shaft member has a shape in which one end is enlarged compared to the inner diameter of the inner ring, and the one end is an end of a rod-shaped member having a diameter less than the inner diameter of the inner ring, and The one end portion is located in the housing, and the other end portion opposite to the one end portion is inserted into the inner ring in a state where the other end portion is located outside the housing. 如請求項1至請求項5中任一項所述的導電裝置,其中在所述軸構件中的朝所述殼體外露出的部分,具有用於連接所述接地線的連接部位。The conductive device according to any one of claims 1 to 5, wherein a portion of the shaft member exposed to the outside of the housing has a connection portion for connecting the ground wire. 一種輥輸送裝置,包括: 輥軸,環繞中心軸進行旋轉; 輥,安裝在所述輥軸,與所述輥軸一體地旋轉來朝規定的搬送方向搬送被搬送物; 根據權利要求1至6中任一項所述的導電裝置,安裝在所述輥軸的端部;以及 接地線,與所述導電裝置連接。A roller conveying device includes: The roller shaft rotates around the central axis; A roller is installed on the roller shaft and rotates integrally with the roller shaft to convey the object to be conveyed in a predetermined conveying direction; The conductive device according to any one of claims 1 to 6, installed at the end of the roller shaft; and The ground wire is connected to the conductive device.
TW109126055A 2019-08-26 2020-07-31 Conductive device and roller conveying device TWI774033B (en)

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JP2505243Y2 (en) * 1989-10-05 1996-07-24 光洋精工株式会社 Grounding device
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JP2006214461A (en) * 2005-02-01 2006-08-17 Maruyasu Kikai Kk Bearing device and roller conveyor using it
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CN209258932U (en) * 2018-09-28 2019-08-16 南京泰宇矿用设备有限公司 A kind of antistatic nonmetallic carrier roller structure of combined type
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