TW202109721A - Conductive device and roller conveying device having electric grounding roller shafts to prevent electrostatic discharge damage to substrate - Google Patents
Conductive device and roller conveying device having electric grounding roller shafts to prevent electrostatic discharge damage to substrate Download PDFInfo
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- TW202109721A TW202109721A TW109126055A TW109126055A TW202109721A TW 202109721 A TW202109721 A TW 202109721A TW 109126055 A TW109126055 A TW 109126055A TW 109126055 A TW109126055 A TW 109126055A TW 202109721 A TW202109721 A TW 202109721A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/02—Carrying-off electrostatic charges by means of earthing connections
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/10—Antistatic features
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- Condensed Matter Physics & Semiconductors (AREA)
- Elimination Of Static Electricity (AREA)
- Electrophotography Configuration And Component (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
Description
本發明是有關於一種用於將輥輸送裝置的輥軸電接地的導電裝置以及包括其的輥輸送裝置。The present invention relates to a conductive device for electrically grounding the roller shaft of a roller conveying device and a roller conveying device including the conductive device.
例如在對顯示裝置用的玻璃基板或電子電路基板等各種基板進行處理來製造元件的處理過程中,通常進行利用輥輸送裝置搬送基板。因輥輸送裝置的輥軸的旋轉、或輥與基板的摩擦而產生靜電,由此存在使基板或形成在基板上的元件劣化或破損的擔憂。作為針對所述問題的應對方案,可考慮在基板的搬送路徑設置用於消除靜電的電離器、或將輥軸例如電接地。For example, in the process of processing various substrates such as glass substrates for display devices and electronic circuit substrates to manufacture components, the substrates are usually conveyed by a roller conveyor. The rotation of the roller shaft of the roller conveying device or the friction between the roller and the substrate generates static electricity, which may cause deterioration or damage to the substrate or the components formed on the substrate. As a solution to this problem, it is conceivable to provide an ionizer for eliminating static electricity in the conveyance path of the substrate, or to electrically ground the roller shaft, for example.
例如,專利文獻1中記載的技術涉及一種接地裝置,其安裝在輥軸的端部,用於將輥軸經由接地線而接地。在所述裝置中,相對於可安裝在輥軸的端部的殼體,旋轉自如地設置有導電軸,在導電軸連接接地線。藉由此種結構,殼體伴隨輥軸的旋轉而進行旋轉,但成為接地線的扭曲的原因的導電軸的旋轉得到抑制。
[現有技術文獻]
[專利文獻]For example, the technique described in
專利文獻1:韓國專利第10-1401025號公報(例如,圖3)Patent Document 1: Korean Patent No. 10-1401025 (for example, Figure 3)
[發明所欲解決之課題][The problem to be solved by the invention]
專利文獻1中記載的接地裝置具有如下的問題:零件數多且結構複雜,組裝需要大的工夫。尤其,如下的作業非常困難、且需要長時間,所述作業是在將包含施力用的彈簧的各零件組裝在殼體內並利用螺絲進行固定時,一面按住因彈簧的復原力而將要飛出的零件,一面使用工具進行螺固的作業。The grounding device described in
本發明是鑒於所述問題而成,其第一目的在於提出一種在將電接地作為目的而安裝在輥軸的裝置中,容易組裝的結構。另外,本發明的第二目的在於提供一種可藉由將輥軸接地來防止靜電對於基板的損害的輥輸送裝置。 [解決課題之手段]The present invention was made in view of the above-mentioned problems, and its first object is to propose a structure that is easy to assemble in a device that is mounted on a roller shaft for the purpose of electrical grounding. In addition, the second object of the present invention is to provide a roller transport device that can prevent damage to the substrate by static electricity by grounding the roller shaft. [Means to solve the problem]
本發明的一形態是一種導電裝置,其用於將輥輸送裝置的輥軸與接地線電連接,為了達成第一目的,所述導電裝置包括:殼體,具有卡合在所述輥軸的端部的卡合部位;軸構件,由導電性材料形成,經由設置在所述殼體的開口而自所述殼體的內部朝外部突出;軸承,在所述殼體內,相對於所述殼體旋轉自如地支撐所述軸構件;以及導電部,與所述軸構件彈性地抵接,將所述軸構件與所述殼體之間電連接來形成導電路徑。One aspect of the present invention is a conductive device, which is used to electrically connect the roller shaft of the roller conveying device with a ground wire. In order to achieve the first object, the conductive device includes: a housing having a housing that is engaged with the roller shaft The engagement part of the end; the shaft member, which is formed of a conductive material and protrudes from the inside of the housing to the outside through the opening provided in the housing; the bearing, in the housing, is opposite to the housing The body rotatably supports the shaft member; and a conductive portion elastically abuts on the shaft member and electrically connects the shaft member and the housing to form a conductive path.
而且,所述殼體包含:本體部,由具有導電性的材料形成,具有可收容所述軸承及所述導電部的內部空間;以及蓋部,設置有成為所述開口的貫穿孔,並且與所述本體部卡合來堵塞所述內部空間,由此將所述軸承及所述導電部密封在所述內部空間中;所述本體部與所述蓋部藉由設置在兩者的螺絲部位相互進行螺合來一體化,而構成所述殼體。Furthermore, the housing includes: a main body, which is formed of a conductive material, and has an internal space capable of accommodating the bearing and the conductive part; and a cover, which is provided with a through hole that becomes the opening, and is connected to The body part is engaged to block the internal space, thereby sealing the bearing and the conductive part in the internal space; the body part and the cover part are provided at the screw positions of both They are screwed together to be integrated to form the housing.
在如此構成的發明中,在將支撐軸構件的軸承及導電部收容在構成殼體的本體部的內部空間中的狀態下,將蓋部蓋在本體部上並擰入蓋緊,由此零件的組裝完成。因此,與所述現有技術相比格外容易組裝。另外,軸構件相對於殼體旋轉自如,因此藉由將接地線與軸構件連接,即便在殼體與輥軸一體旋轉時,也可以抑制接地線的扭曲。In the invention thus constituted, in a state where the bearing supporting the shaft member and the conductive part are housed in the internal space of the main body constituting the housing, the cover part is capped on the main body part and screwed into the cover tightly, thereby the parts The assembly is complete. Therefore, it is extremely easy to assemble compared with the prior art. In addition, the shaft member is free to rotate with respect to the housing. Therefore, by connecting the ground wire to the shaft member, even when the housing and the roller shaft rotate integrally, the ground wire can be suppressed from twisting.
另外,本發明的另一形態是一種輥輸送裝置,為了達成所述第二目的,所述輥輸送裝置包括:輥軸,環繞中心軸進行旋轉;輥,安裝在所述輥軸,與所述輥軸一體地旋轉來朝規定的搬送方向搬送被搬送物;所述結構的導電裝置,安裝在所述輥軸的端部;以及接地線,與所述導電裝置連接。In addition, another aspect of the present invention is a roller conveying device. In order to achieve the second object, the roller conveying device includes: a roller shaft that rotates around a central axis; a roller installed on the roller shaft and the The roller shaft integrally rotates to convey the object to be conveyed in a predetermined conveying direction; the conductive device of the structure is installed at the end of the roller shaft; and the ground wire is connected to the conductive device.
在如此構成的發明中,可在將輥軸電接地的狀態下搬送基板,因此可將靜電對於基板的損害防止於未然。 [發明之效果]In the invention thus constituted, the substrate can be conveyed in a state where the roller shaft is electrically grounded, so that damage to the substrate by static electricity can be prevented beforehand. [Effects of Invention]
如上所述,根據本發明,可構成一種可簡單地組裝、且可將輥軸確實地接地的導電裝置。另外,藉由將此種導電裝置安裝在輥輸送裝置,可防止對於被搬送的基板的損害。As described above, according to the present invention, it is possible to construct a conductive device that can be easily assembled and that can reliably ground the roller shaft. In addition, by installing such a conductive device on the roller conveying device, damage to the conveyed substrate can be prevented.
圖1是表示本發明的一實施方式的圖。更具體而言,圖1的(a)是表示本發明的導電裝置的第一實施方式的外觀的圖。另外,圖1的(b)是表示配備有所述導電裝置的輥輸送裝置的一部分的外觀的圖。如圖1的(a)所示,導電裝置1具有在大致圓柱狀的殼體100的中心軸上突出地設置有軸構件40的結構。Fig. 1 is a diagram showing an embodiment of the present invention. More specifically, (a) of FIG. 1 is a diagram showing the appearance of the first embodiment of the conductive device of the present invention. In addition, (b) of FIG. 1 is a diagram showing the appearance of a part of a roller conveying device equipped with the conductive device. As shown in FIG. 1( a ), the
軸構件40相對於殼體100,環繞與殼體100的中心軸大致一致的旋轉軸自由旋轉。在自殼體100朝外部突出的軸構件40的前端,經由端子接頭71而連接地線70。在與設置有軸構件40之側相反側的殼體100的端部,與殼體100的中心軸同軸地形成有外螺紋11。The
如圖1的(b)所示,導電裝置1安裝在輥輸送裝置9。更具體而言,輥輸送裝置9包括:平行地配置的一對框架910、910;以軸旋轉自如的方式由所述框架910、910支撐兩端的多個輥軸920;以及在各輥軸920分別設置有多個的搬送輥930。藉由輥軸920進行旋轉,而朝規定的搬送方向搬送由搬送輥930來支撐下表面的未圖示的基板。輥軸920是具有導電性的例如金屬製,搬送輥930是具有導電性的例如樹脂製。As shown in FIG. 1( b ), the
導電裝置1分別安裝在各輥軸920的其中一個端部921。即,在各輥軸920的其中一個端部921形成有未圖示的內螺紋,將導電裝置1的外螺紋11與所述內螺紋螺合,由此將導電裝置1安裝在輥軸920的端部,並且與輥軸920電連接。分別安裝在多個輥軸920的導電裝置1經由地線70而相互電連接,最終與規定的接地電極連接而接地。The
由此,防止在基板搬送的過程中在輥軸920產生靜電而對基板造成損害。當利用搬送輥930來搬送例如玻璃基板時,因玻璃基板與搬送輥930的摩擦,而使玻璃基板、輥軸920及搬送輥930帶靜電。若無如本實施方式那樣的導電裝置,則有時產生所帶的靜電自搬送輥930或輥軸920朝基板放電的所謂的火花(spark)。藉由導電裝置1來管理輥軸920的電位,例如進行電接地,由此可防止此種火花。As a result, it is prevented that static electricity is generated on the
藉由輥軸920進行旋轉,導電裝置1的殼體100與輥軸920一體地進行旋轉。另一方面,地線70安裝在軸構件40,軸構件40相對於殼體100,環繞與殼體100的中心軸同軸的旋轉軸自由旋轉。因此,在安裝有地線70的狀態下軸構件40不進行旋轉,避免伴隨輥軸920的旋轉而在地線70產生扭曲。As the
以下,參照圖2至圖4,對導電裝置1的更詳細的結構進行說明。圖2是表示構成導電裝置的各零件的內部結構的分解剖面圖,圖4是導電裝置的組裝剖面圖。另外,圖3是表示導電裝置的組裝步驟的流程圖。Hereinafter, a more detailed structure of the
如圖2所示,導電裝置1包括:殼體本體10、彈簧20、導電塊30、軸構件40、軸承50、蓋部60、地線70、固定螺絲80、以及墊圈90。地線70以外的各構件的形狀大體上具有軸對稱性,如圖1以及圖2所示,藉由將這些構件呈同軸狀地組裝來構成導電裝置1。As shown in FIG. 2, the
殼體本體10是利用具有導電性的材料,例如不銹鋼、黃銅、鋁等金屬材料來一體地構成的零件,自大致圓柱狀的構件的上端中央部至規定的深度為止被打穿,具有上端開口且下端密閉的筒型形狀。由此,在殼體本體10內形成用於收容後述的各零件的內部空間SP。在殼體本體10的上端開口部的邊緣形成有內螺紋13。The
彈簧20是由具有導電性及彈性的材料,例如金屬線所形成的螺旋彈簧。彈簧20的外徑變成限制在殼體本體10的內部空間SP中的尺寸。The
導電塊30是由具有導電性的材料,例如金屬、碳(石墨)所形成的零件,具有如下的結構:在具有比彈簧20的內徑大的直徑的圓板狀部位31的下部,連接有具有比彈簧20的內徑小的直徑的圓柱狀部位32。另外,在圓板狀部位31的上表面中央部設置有凹部33。導電塊30使圓柱狀部位32向下,處於被收容在殼體本體10內的彈簧20的上方。於是,導電塊30以圓柱狀部位32插通在彈簧20的內部的形態由彈簧20彈性地支撐。The
軸構件40是包含具有導電性的材料,例如不銹鋼、黃銅、鋁等金屬材料的棒狀的零件,其下部41被部分地擴徑,並且下端面42形成為倒圓錐形狀。另外,在上端部43形成有內螺紋44。The
軸承50是徑向滾動軸承,例如可使用市售的滾珠軸承。軸構件40的外徑以如下方式設定:相對於軸承50的內徑應用適宜的配合公差,而使兩者之間變成間隙配合的狀態。由此,例如可相對於軸承50的內圈,能夠以輕微的力插通軸構件40。The
蓋部60是在其周圍設置有外螺紋61的筒狀的零件。外螺紋61變成與殼體本體10的內螺紋13進行螺合的形狀,這些螺紋進行螺合來使殼體本體10與蓋部60一體化,由此構成殼體100。蓋部60的材料並無特別限定,例如可使用與殼體本體10相同的材料。蓋部60的筒狀部位62的內徑以如下方式設定:相對於軸承50的外徑應用適宜的配合公差,而使兩者之間變成間隙配合的狀態。由此,例如可相對於蓋部60,能夠以輕微的力插通軸承50。The
另一方面,蓋部60的上端63的開口直徑略小於軸承50的外徑。即,筒狀部位62的側壁面變成在其上端朝內側(中心軸側)突出的結構。由此,防止被收容在筒狀部位62的內部的軸承50朝比蓋部60更上方飛出。即,蓋部60具有將彈簧20、導電塊30、軸構件40及軸承50密封在殼體100內的功能。而且,相對於殼體100旋轉自如的軸構件40的上端自設置在蓋部60的上端63的開口突出。On the other hand, the opening diameter of the
在所述軸構件40的上端連接地線70。具體而言,固定螺絲80與形成在軸構件40的上端部43的內螺紋44進行螺合。隔著安裝在地線70的一端的端子接頭71及墊圈90來將固定螺絲80與內螺紋44螺合,由此將端子接頭71機械式地與軸構件40結合,由此將地線70與軸構件40電連接。A
將這些構件組裝來製造導電裝置1時的步驟的一例如圖3所示。首先,優選在使殼體本體10的開口部向上的狀態下,將彈簧20及導電塊30以此順序收容在殼體本體10的內部空間SP中(步驟S101、步驟S102)。另外,也可以在將彈簧20與導電塊30組合的狀態下收容在殼體本體10內。An example of the steps when assembling these components to manufacture the
其次,在使軸構件40插通在軸承50中的狀態下,將它們一體地收容在殼體本體10內(步驟S103)。而且,將蓋部60蓋在軸承50上,一面抵抗由彈簧20產生的施加力來壓入蓋部60,一面與殼體本體10進行螺合(步驟S104)。Next, with the
圖4的(a)左圖表示此時的狀態。在將蓋部60蓋在軸承50上的時間點,抑制被收容在殼體本體10內的各零件朝外部飛出。尤其,軸構件40的下端尖,在承受其的導電塊30的上部設置有凹部33,因此也避免軸構件40在導電塊30上朝橫向滑動而導致位置偏離。因此,將蓋部60與殼體本體10螺合的作業自身兼作將各零件安裝在正規的位置的作業。另外,到此為止的組裝作業不特別需要治具與工具。如此,在所述導電裝置1中,用於將各零件一體化的組裝作業極其簡單。The left diagram of Fig. 4(a) shows the state at this time. At the time when the
回到圖3,將如此組裝的導電裝置1與地線連接(步驟S106、步驟S107),在此之前,也可以將導電裝置1卡合在輥軸920(步驟S105)。即,可存在將導電裝置1本體卡合在輥軸920後連接地線70的方法、及將至地線70已完成安裝的狀態下的導電裝置1卡合在輥軸920的方法(在此情況下,步驟S105在步驟S107之後執行)。這些方法可對應於現場的作業性是否良好而適宜選擇。Returning to FIG. 3, the
地線70的連接能夠以如下方式來進行。將墊圈90插通在固定螺絲80中(步驟S106),使固定螺絲80穿過安裝在地線70的端部的端子接頭71的安裝孔而緊固在軸構件40的內螺紋44(步驟S107),由此將地線70與導電裝置1連接。此時,固定螺絲80的緊固例如使用如螺絲刀那樣的工具,但作為安裝物件物的軸構件40為固定在更大的導電裝置1或輥軸920的狀態,因此其支撐比較容易。The connection of the
圖4的(a)右圖表示此時的狀態。在此狀態下,在殼體100的內部空間SP中,導電塊30經由彈簧20而與殼體本體10電連接,並且由已被壓入的彈簧20的復原力向上施力。軸構件40按壓在導電塊30的上表面,因此軸構件40也被向上施力。The right figure of Fig. 4(a) shows the state at this time. In this state, in the internal space SP of the
軸構件40插通在軸承50中。軸構件40的擴徑部位41碰觸軸承50的下表面,由此限制軸構件40相對於軸承50的向上的移動。換言之,當軸構件40將要向上位移時,軸承50也一體地位移。The
作為結果,彈簧20對導電塊30、軸構件40及軸承50賦予向上的施加力。軸承50的上端由蓋部60的上端63來限制位移,因此變成軸承50被蓋部60按壓的狀態。由此,各零件在上下方向上的位置得到固定,防止各零件在殼體100內大幅度晃動。As a result, the
圖4的(b)是更詳細地表示軸構件40、軸承50及蓋部60的抵接狀態的部分剖面圖。軸承50例如為滾珠軸承,包括外圈51、內圈52及轉動體53作為其主要構成。轉動體53在外圈51與內圈52之間轉動,由此在外圈51與內圈52之間實現相對的旋轉運動。FIG. 4( b) is a partial cross-sectional view showing the contact state of the
此處,軸構件40的擴徑部位41抵接在軸承50的內圈52,未抵接在外圈51。換言之,擴徑部位41的外徑以滿足所述關係的方式設定。另一方面,蓋部60的上端63抵接在軸承50的外圈51,未抵接在內圈52。換言之,蓋部60的上端63的開口直徑以滿足所述關係的方式設定。Here, the
因此,由空心箭頭表示的彈簧20的向上的施加力F具有如下的作用:將軸構件40按壓在軸承50的內圈52,由此在軸構件40與內圈52之間不產生位移,將蓋部60按壓在軸承50的外圈51,由此在蓋部60與外圈51之間不產生位移。另一方面,外圈51與內圈52之間順利地進行旋轉。其結果,實現軸構件40相對於殼體100的自由的旋轉。Therefore, the upward urging force F of the
軸構件40相對於殼體100進行旋轉,由此軸構件40的前端以碰觸導電塊30的狀態進行滑動。因此,對於導電塊30要求如下的性質:導電性良好、摩擦係數低、且耐熱性高。在本實施方式中,作為適合於此種目的的導電塊,使用碳(石墨)塊。The
如上所述,本實施方式的導電裝置1具有將輥輸送裝置9的輥軸920電接地的功能。具體而言,形成經由各自包含導電性材料的殼體本體10、彈簧20、導電塊30、軸構件40及地線70而到達未圖示的接地電極的導電路徑,去除在輥軸920產生的靜電。由此,避免因靜電而使被搬送的基板或形成在其表面的元件破損或使特性劣化的問題。As described above, the
導電裝置1可在將主要零件收容在殼體本體10內後,藉由蓋上蓋部60並擰入這一簡單的作業來組裝。因此,不使用特別的治具與工具,另外,能夠以少的工時進行組裝。The
以下,對本發明的導電裝置的其他實施方式進行說明。在這些實施方式中,與所述第一實施方式相比,一部分的結構不同,但大部分的構成相同。因此,對具有與第一實施方式相同的結構、功能的構件附加相同的符號,有時省略詳細的說明。Hereinafter, other embodiments of the conductive device of the present invention will be described. In these embodiments, compared with the above-mentioned first embodiment, some of the structures are different, but most of the structures are the same. Therefore, members having the same structure and function as those of the first embodiment are assigned the same reference numerals, and detailed descriptions may be omitted.
圖5是表示本發明的導電裝置的第二實施方式的圖。與所述第一實施方式相比,在第二實施方式的導電裝置2中,殼體的結構的一部分不同,除此點以外的結構相同。具體而言,在構成殼體200的殼體本體210與蓋部260中,在殼體本體210側形成內螺紋213,在蓋部260側形成外螺紋261,兩者相互進行螺合。即便是此種結構,也可以與所述第一實施方式同樣地獲得如下的效果:組裝簡單,可將輥軸確實地接地。Fig. 5 is a diagram showing a second embodiment of the conductive device of the present invention. Compared with the first embodiment, in the
另外,在此結構中,可使殼體本體210的上部的內徑例如與軸承50的外徑一致。若如此設定,則在組裝步驟中的將軸承50收容在殼體本體210內的步驟(步驟S103)中,可抑制軸承50在橫向上的晃動,更順利地蓋上蓋部260。由此,組裝時的作業性進一步提升。In addition, in this structure, the inner diameter of the upper part of the
圖6是表示本發明的導電裝置的第三實施方式及第四實施方式的圖。更具體而言,圖6的(a)表示本發明的導電裝置的第三實施方式,圖6的(b)表示本發明的導電裝置的第四實施方式。在圖6的(a)中所示的第三實施方式的導電裝置3中,彈簧320配置在軸承50的上方。更具體而言,在此實施方式中,在殼體本體310的內部空間SP的底部配置碳製的導電塊330,並以抵接在導電塊330的上表面的方式設置軸構件340。軸構件340以插通在軸承50中的狀態收容在殼體本體310內。Fig. 6 is a diagram showing a third embodiment and a fourth embodiment of the conductive device of the present invention. More specifically, FIG. 6(a) shows the third embodiment of the conductive device of the present invention, and FIG. 6(b) shows the fourth embodiment of the conductive device of the present invention. In the
其後,將彈簧320裝載在軸承50並蓋上蓋部360。蓋部上端363的開口直徑比彈簧320的外徑小,由此防止彈簧320的飛出。將蓋部360與殼體本體310螺合,由此彈簧320收縮,其復原力向下對軸承50施力。由此,軸構件340以被導電塊330按壓的狀態進行旋轉。After that, the
在此情況下,在軸構件340與導電塊330之間、及導電塊330與殼體本體310之間分別可取得導通,因此彈簧320不需要導電性。另外,只要在耐磨耗性方面不產生問題,則也可以設為軸構件340不經由導電塊而抵接在殼體本體310的構成。In this case, conduction can be achieved between the
另外,在此結構中,例如將殼體本體310的內徑設為對應於軸承50的外徑的內徑,由此可使將軸承50收容在殼體本體310內時的朝橫向的晃動減少至實用上無問題的程度為止。因此,進而裝載彈簧320並蓋緊蓋部360,由此可組裝導電裝置3,組裝作業變得更容易。In addition, in this structure, for example, the inner diameter of the housing
另外,在此結構中,為了將彈簧320位置精度良好地配置在殼體本體310內而使其後的蓋部360的安裝變得容易,如圖示那樣,優選在殼體本體310設置外螺紋,在蓋部360設置內螺紋。In addition, in this structure, in order to arrange the
另外,在圖6的(b)中所示的第四實施方式的導電裝置4中,代替設置在第一實施方式的導電裝置1的彈簧20及導電塊30,將由具有導電性及彈性的材料,例如磷青銅所形成的板彈簧420設置在殼體400內。板彈簧420利用其復原力來向上對軸構件40施力,由此將軸構件40按壓在軸承50,且將軸承50按壓在蓋部60的上端63。另外,藉由分別抵接在殼體本體410與軸構件40來將它們電連接。即,板彈簧420將軸構件40與殼體本體410彈性地電連接。由此,可謀求零件數的進一步削減。In addition, in the conductive device 4 of the fourth embodiment shown in FIG. 6(b), instead of the
在這些實施方式的導電裝置3、導電裝置4中,也可以經由所述導電裝置來將輥軸電接地。另外,將主要零件收容在殼體本體內並利用蓋部蓋緊的組裝步驟也與第一實施方式相同。因此,可容易地進行導電裝置的組裝。In the
如以上所說明那樣,在所述第一實施方式中,殼體本體10及蓋部60分別作為本發明的“本體部”及“蓋部”發揮功能,它們一體地作為本發明的“殼體”發揮功能。另外,軸構件40及軸承50分別作為本發明的“軸構件”及“軸承”而各自發揮功能。另外,彈簧20作為本發明的“施力構件”發揮功能,另一方面,導電塊30作為本發明的“抵接構件”發揮功能,它們一體地作為本發明的“導電部”發揮功能。另外,設置在殼體本體10的外螺紋11相當於本發明的“卡合部位”,另一方面,設置在軸構件40的內螺紋44相當於本發明的“連接部位”。另外,地線70相當於本發明的“接地線”。As described above, in the first embodiment, the
另外,在第三實施方式中,彈簧320作為本發明的“施力構件”發揮功能,另一方面,導電塊330作為本發明的“抵接構件”發揮功能,它們一體地作為本發明的“導電部”發揮功能。另一方面,在第四實施方式中,板彈簧420作為本發明的“彈性體”發揮功能。In addition, in the third embodiment, the
另外,本發明並不限定於所述實施方式,只要不脫離其主旨,則除所述實施方式以外,可進行各種變更。例如,在所述實施方式中,經由設置在殼體本體10的外螺紋11來將導電裝置1與輥軸920連接。但是,用於將導電裝置卡合在輥軸的結構並不限定於此,可適宜使用其他結構。In addition, the present invention is not limited to the above-mentioned embodiment, and various changes can be made in addition to the above-mentioned embodiment as long as it does not deviate from the gist. For example, in the described embodiment, the
另外,例如在所述第一實施方式至第三實施方式中,作為施加力的產生源,使用螺旋彈簧,但作為替代,也可以使用如在第四實施方式中所使用的板彈簧、或導電性樹脂材料來產生施加力。In addition, for example, in the first to third embodiments, a coil spring is used as a source of applied force, but instead, a leaf spring as used in the fourth embodiment or a conductive Resin material to generate applied force.
另外,例如在所述第一實施方式中,藉由產生施加力的彈簧20來確保導電塊30與殼體本體10的導通,但用於產生施加力的構成與用於確保導通的構成無需為相同的構成,它們也可以由不同的構件來實現。In addition, for example, in the first embodiment, the conduction between the
另外,例如在所述第一實施方式中,為了使零件間的裝卸變得容易,將軸構件40與軸承50的內圈52之間、及蓋部60與軸承50的外圈51之間均設為間隙配合的狀態。作為替代,也可以將任一者設為中間配合或緊配合的狀態。例如當將軸構件與軸承之間設為緊配合時,軸構件與內圈之間在組裝時被固定,因此並非必須在軸構件設置擴徑部位。In addition, for example, in the first embodiment, in order to facilitate the attachment and detachment between the parts, the
另外,所述實施方式的殼體本體10等的整體由導電性材料(例如金屬)形成,但並不限定於此。即,只要確保將輥軸與導電部(彈簧及導電塊)連接的導電路徑便足夠,不參與所述導電路徑的部分也可以不具有導電性。In addition, the
另外,在所述實施方式中,甚至將地線70、固定螺絲80及墊圈90都包含在導電裝置的構成的一部分中,但在將所述導電裝置作為製品來流通的情況下,也可以將這些零件(特別是地線)作為不包含在導電裝置中的外部零件來處理。In addition, in the above-mentioned embodiment, even the
以上,如例示具體的實施方式所說明那樣,在本發明的導電裝置中,例如導電部可為如下的構成:由具有導電性的材料形成,具有抵接在軸構件並與殼體電連接的抵接構件,以及朝接近方向對軸構件與抵接構件之間施力來賦予按壓力的施力構件。根據此種構成,在伴隨軸構件的旋轉而與抵接構件之間產生的滑動中,也可以穩定地確保電導通。As described above, as described in the specific embodiment, in the conductive device of the present invention, for example, the conductive portion may be formed of a conductive material, having a structure that abuts on the shaft member and is electrically connected to the housing. An abutting member, and an urging member that urges between the shaft member and the abutting member in the approach direction to give a pressing force. According to such a configuration, even in sliding with the abutting member due to the rotation of the shaft member, it is possible to stably ensure electrical conduction.
在此情況下,例如施力構件可為由具有導電性的材料形成,介於抵接構件與殼體之間的彈性體。根據此種構成,施力構件兼具對抵接構件賦予施加力的功能與確保導通的功能,可減少零件數。In this case, for example, the urging member may be an elastic body formed of a conductive material and interposed between the abutting member and the housing. According to this configuration, the urging member has both the function of applying force to the contact member and the function of ensuring conduction, and the number of parts can be reduced.
另外,例如導電部可為由具有導電性的材料形成,介於軸構件與殼體之間的彈性體。根據此種構成,藉由導電部來將軸構件與殼體之間彈性地電連接,與所述相同,可兼具對軸構件賦予施加力的功能與確保導通的功能。In addition, for example, the conductive portion may be an elastic body formed of a conductive material and interposed between the shaft member and the housing. According to this configuration, the shaft member and the housing are elastically and electrically connected by the conductive portion, and as described above, it is possible to have both the function of applying force to the shaft member and the function of ensuring conduction.
另外,例如軸承是內圈與外圈相對地環繞一個旋轉軸自由旋轉的徑向軸承,外圈抵接在殼體,軸構件可具有將具有內圈的內徑以下的直徑的棒狀構件的一端部與內圈的內徑相比擴徑的形狀,並以使一端部位於殼體內,使與一端部相反的另一端部位於殼體外的狀態插通在內圈中。根據此種構成,藉由殼體及軸構件抵接在軸承來規定各零件的位置關係,而且可使軸構件相對於殼體順利地進行旋轉。In addition, for example, the bearing is a radial bearing in which the inner ring and the outer ring are relatively free to rotate around a rotating shaft. The outer ring abuts on the housing, and the shaft member may have a rod-shaped member having a diameter below the inner diameter of the inner ring. One end has a shape with a larger diameter than the inner diameter of the inner ring, and the one end is inserted into the inner ring so that the one end is located in the housing and the other end opposite to the one end is located outside the housing. According to such a structure, the positional relationship of each part is defined by the contact of the housing and the shaft member with the bearing, and the shaft member can be smoothly rotated with respect to the housing.
另外,例如可在軸構件中的朝殼體外露出的部分,設置用於連接接地線的連接部位。根據此種構成,即便殼體伴隨輥軸的旋轉而進行旋轉,也可以避免連接有接地線的軸構件的旋轉,因此不存在接地線扭曲、或因接地線的連接而阻礙輥軸的旋轉的情況。 [產業上的可利用性]In addition, for example, a portion of the shaft member exposed to the outside of the housing may be provided with a connection site for connecting a ground wire. According to this configuration, even if the housing rotates with the rotation of the roller shaft, the rotation of the shaft member connected to the ground wire can be avoided. Therefore, there is no twisting of the ground wire or obstruction of the rotation of the roller shaft due to the connection of the ground wire. Happening. [Industrial availability]
本發明可適宜地應用於構成搬送玻璃基板、電子電路基板等各種基板的輥輸送裝置的用途。The present invention can be suitably applied to applications constituting a roller conveying device that conveys various substrates such as glass substrates and electronic circuit boards.
1、2、3、4:導電裝置
9:輥輸送裝置
10、210、310、410:殼體本體(本體部、殼體)
11:外螺紋(卡合部位)
13、213:內螺紋
20、320:彈簧(施力構件、導電部)
30、330:導電塊(抵接構件、導電部)
31:圓板狀部位
32:圓柱狀部位
33:凹部
40、340:軸構件
41:下部(擴徑部位)
42:下端面
43:上端部
44:內螺紋(連接部位)
50:軸承
51:外圈
52:內圈
53:轉動體
60、260、360:蓋部(殼體)
61、261:外螺紋
62:筒狀部位
63:上端
70:地線(接地線)
71:端子接頭
80:固定螺絲
90:墊圈
100、200、300、400:殼體
363:蓋部上端
420:板彈簧(彈性體)
910:框架
920:輥軸
921:其中一個端部
930:搬送輥(輥)
F:施加力
SP:內部空間
S101~S107:步驟1, 2, 3, 4: conductive device
9:
圖1是表示本發明的一實施方式的圖。 圖2是表示構成導電裝置的各零件的內部結構的分解剖面圖。 圖3是表示導電裝置的組裝步驟的流程圖。 圖4是導電裝置的組裝剖面圖。 圖5是表示本發明的導電裝置的第二實施方式的圖。 圖6是表示本發明的導電裝置的第三實施方式及第四實施方式的圖。Fig. 1 is a diagram showing an embodiment of the present invention. Fig. 2 is an exploded cross-sectional view showing the internal structure of each component constituting the conductive device. Fig. 3 is a flowchart showing the assembly procedure of the conductive device. Fig. 4 is an assembled cross-sectional view of the conductive device. Fig. 5 is a diagram showing a second embodiment of the conductive device of the present invention. Fig. 6 is a diagram showing a third embodiment and a fourth embodiment of the conductive device of the present invention.
1:導電裝置 1: Conductive device
10:殼體本體(本體部、殼體) 10: Shell body (body part, shell)
11:外螺紋(卡合部位) 11: External thread (locking part)
13:內螺紋 13: Internal thread
20:彈簧(施力構件、導電部) 20: Spring (forcing member, conductive part)
30:導電塊(抵接構件、導電部) 30: Conductive block (contact member, conductive part)
31:圓板狀部位 31: Disc-shaped parts
32:圓柱狀部位 32: Cylindrical part
33:凹部 33: recess
40:軸構件 40: Shaft member
41:下部(擴徑部位) 41: Lower part (expanded diameter part)
42:下端面 42: lower end face
43:上端部 43: upper end
44:內螺紋(連接部位) 44: Internal thread (connection part)
50:軸承 50: Bearing
60:蓋部(殼體) 60: Lid (housing)
61:外螺紋 61: External thread
62:筒狀部位 62: cylindrical part
63:上端 63: upper end
70:地線(接地線) 70: Ground wire (ground wire)
71:端子接頭 71: terminal connector
80:固定螺絲 80: fixing screw
90:墊圈 90: Washer
SP:內部空間 SP: Internal space
Claims (7)
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JP2019-153573 | 2019-08-26 | ||
JP2019153573A JP6997745B2 (en) | 2019-08-26 | 2019-08-26 | Conductive device and roller conveyor device |
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TW202109721A true TW202109721A (en) | 2021-03-01 |
TWI774033B TWI774033B (en) | 2022-08-11 |
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TW109126055A TWI774033B (en) | 2019-08-26 | 2020-07-31 | Conductive device and roller conveying device |
Country Status (4)
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JP (1) | JP6997745B2 (en) |
KR (1) | KR102418285B1 (en) |
CN (1) | CN112429457A (en) |
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Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2505243Y2 (en) * | 1989-10-05 | 1996-07-24 | 光洋精工株式会社 | Grounding device |
JPH076712U (en) * | 1993-06-28 | 1995-01-31 | 荒木技研工業株式会社 | Position detection mechanism for reciprocating moving body |
JP2006214461A (en) * | 2005-02-01 | 2006-08-17 | Maruyasu Kikai Kk | Bearing device and roller conveyor using it |
KR20150053220A (en) * | 2013-11-06 | 2015-05-15 | 주식회사 엘코랩 | An earth apparatus for body of revolution |
KR101401025B1 (en) | 2013-12-23 | 2014-05-30 | (주)누리시스템 | Apparatus for earthing a roller of conveyer for transferring a substrate |
KR102003116B1 (en) * | 2017-06-01 | 2019-07-24 | 주식회사 디쌤 | Ground device for conveyor roller |
CN209258932U (en) * | 2018-09-28 | 2019-08-16 | 南京泰宇矿用设备有限公司 | A kind of antistatic nonmetallic carrier roller structure of combined type |
KR101970274B1 (en) * | 2019-03-14 | 2019-04-18 | 박문주 | An earthing device used for substrate transfer shaft |
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2020
- 2020-07-27 CN CN202010729931.0A patent/CN112429457A/en active Pending
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KR102418285B1 (en) | 2022-07-07 |
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TWI774033B (en) | 2022-08-11 |
JP2021031240A (en) | 2021-03-01 |
JP6997745B2 (en) | 2022-02-04 |
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