TW202108908A - Hydrostatic controller for maintaining constant fluid film gap - Google Patents

Abstract

Embodiments herein disclose a hydrostatic controller for maintaining a constant fluid film gap. The hydrostatic controller includes a fixed restrictor (106 or 402) configured to provide a fixed resistance in the hydrostatic controller. The fixed restrictor (106 or 402) is connected in series with a variable restrictor (108 or 404). The variable restrictor (108 or 404) is configured to provide a variable resistance in the hydrostatic controller. The variable restrictor (108 or 404) is connected in line with a recess pocket (112 or 410). The fixed resistance has a geometry of a capillary restrictor. The variable resistance comprises a geometry, wherein the geometry deforms to actively control a flow rate in the hydrostatic controller, wherein the geometry is provided by the circular member (102 or 406).

Description

Hydrostatic controller to maintain a constant liquid film gap

The present invention relates to a hydrostatic bearing system, and more particularly, to a hydrostatic pressure controller for maintaining a constant fluid film gap in the hydrostatic bearing system. The present disclosure is based upon and claims India Application No. June 11, 2019 and 201941023121, filed June 11, 2019, filed Application No. 201941023123 filed, said application is incorporated herein by reference.

The hydrostatic bearing system is a non-contact bearing system that guides fluids such as air, lubricating oil and other fluids into it, and obtains load capacity through restriction. Although the hydrostatic bearing system has advantages such as low friction and high movement accuracy due to the averaging effect, it has disadvantages such as low stiffness and low damping characteristics. In order to improve the rigidity of the hydrostatic bearing system, it is effective to reduce the bearing clearance. In addition, in order to optimally design a bearing with a smaller bearing clearance, the amount of fluid flowing in the bearing system should be limited to correspond to the bearing clearance.

However, when reducing the bearing clearance, the machining accuracy of the bearing should be improved. Therefore, there is a limit to improving the rigidity of the bearing by reducing the bearing clearance. In order to overcome this restriction, various variable restriction mechanisms have been proposed.

In one example, there is a working mechanism of a flow controller in the existing hydrostatic bearing system. The flow controller uses a flat membrane and a spherical membrane in series, in which two different liquid flow resistances have thin restrictive gaps. The thin confinement gap is directly connected to one of the hydrostatic grooves. In the existing hydrostatic bearing system, the conventional liquid flow restrictor is a fixed flow resistance, and when the pressure of the oil cavity in the hydrostatic groove changes, the flow rate will decrease. The flow equation is as follows, Q = (supply pressure-oil chamber pressure)/(fixed flow resistance).

Therefore, it is desirable to solve the above shortcomings or other shortcomings or at least provide useful alternatives.

In view of this, our inventors devoted themselves to further research, and proceeded to develop and improve, hoping to develop a better invention to solve the above problems, and after continuous experimentation and modification, the present invention came out.

The main purpose of the embodiments of the present invention is to provide a flow control unit for maintaining a constant fluid film gap in a hydrostatic bearing system.

Another object of the embodiments of the present invention is to provide a hydrostatic bearing film thickness controller using a cylindrical tube diaphragm.

Therefore, the embodiment of the present invention discloses a hydrostatic pressure controller for maintaining a constant fluid film gap. The hydrostatic pressure controller includes a circular member and a fixed restrictor. The fixed restrictor is configured to provide a fixed flow resistance in the hydrostatic pressure controller, wherein the fixed restrictor is connected in series with the variable restrictor. The variable flow restrictor is configured to provide variable flow resistance in the hydrostatic pressure controller. The variable flow restrictor is connected with the oil cavity groove in a straight line. The fixed flow resistance has the geometry of a capillary flow restrictor. Variable flow resistance includes geometric shapes. The geometric shape is deformed to actively control the flow in the hydrostatic pressure controller, wherein the geometric shape is provided by a circular member.

In one embodiment, the play formed by the circular member and the annular boss is used to provide variable flow resistance.

In one embodiment, the fixed restrictor is connected in series with the circular member through a variable restrictor and capillary system to generate a pressure gradient across the circular member.

In one embodiment, the circular member is a circular flat membrane and a cylindrical tube diaphragm.

In one embodiment, the hydrostatic pressure controller is a flow control unit or a hydrostatic bearing film thickness controller.

In one embodiment, the circular member is a circular flat membrane and a cylindrical tube diaphragm.

Therefore, the embodiment of the present invention discloses a flow control unit for maintaining a constant fluid film gap in a hydrostatic bearing system. The flow control unit includes a circular flat membrane, an annular boss, and a fixed restrictor that provides a fixed flow resistance in the flow control unit. The fixed current limiter is connected in series with the variable current limiter. The variable flow restrictor provides variable flow resistance in the flow control unit, wherein the variable flow restrictor is connected in line with the oil cavity groove. The fixed flow resistance has the geometry of a capillary flow restrictor. The variable flow resistance includes a geometric shape in which the geometric shape of the variable flow resistance is deformed to actively control the flow in the hydrostatic bearing system. The circular flat membrane provides a variable flow resistance geometry. The use of a clearance formed by a circular flat membrane and an annular boss provides variable flow resistance.

In one embodiment, the fixed flow resistance enables the necessary pressure difference to be formed across the circular flat membrane.

In one embodiment, the fixed flow resistance maintains the correct gradient of the pressure difference across the circular flat membrane.

In one embodiment, the cross-section of the clearance is determined by the deformation of the circular flat membrane.

In one embodiment, the pressure difference across the circular flat membrane controls the amount of deformation in the circular flat membrane.

In one embodiment, a fixed flow resistance blocks fluid flow in order to control a large flow of fluid flow through the variable flow restrictor.

In one embodiment, the clearance is provided at a specific supply pressure.

Therefore, the embodiment of the present invention discloses a hydrostatic bearing system, which includes an oil sump, a pressure relief valve, a pump, a motor, an accumulator, a filter, a hydraulic power unit, a bearing groove, and a flow control unit. The flow control unit includes a circular flat membrane as a variable flow restrictor, an annular boss, and a fixed flow restrictor that provides a fixed flow resistance in the flow control unit. The fixed current limiter is connected in series with the variable current limiter. The variable flow restrictor provides variable flow resistance in the flow control unit, wherein the variable flow restrictor is connected in line with the oil cavity groove. The fixed flow resistance has the geometry of a capillary flow restrictor. The variable flow resistance includes a geometric shape in which the geometric shape of the variable flow resistance is deformed to actively control the flow in the hydrostatic bearing system. The circular flat membrane provides a variable flow resistance geometry. The use of a clearance formed by a circular flat membrane and an annular boss provides variable flow resistance.

Therefore, an embodiment of the present invention discloses a hydrostatic bearing film thickness controller that includes a fixed current limit configured to provide a fixed flow resistance in the hydrostatic bearing film thickness controller Device. The fixed current limiter is connected in series with the variable current limiter. The variable flow restrictor is configured to provide a variable flow resistance in the hydrostatic bearing film thickness controller, wherein the variable flow restrictor is connected in line with the oil cavity groove. The fixed flow resistance includes the geometry of the capillary restrictor. The variable flow resistance includes a geometric shape, where the geometric shape is deformed to actively control the flow in the hydrostatic bearing film thickness controller. This geometry is provided by the cylindrical tube diaphragm. The fixed restrictor is connected in series with the cylindrical pipe diaphragm through a variable restrictor and a capillary system to generate a pressure gradient across the cylindrical pipe diaphragm.

In one embodiment, the cylindrical tube diaphragm is configured such that stress changes across the cylindrical tube diaphragm are minimized.

In one embodiment, the cylindrical tube diaphragm is configured to have a variable thickness to improve the bending characteristics of the cylindrical tube diaphragm.

In one embodiment, the supply pressure on the inner part of the cylindrical tube diaphragm provides a protrusion in the cylindrical tube diaphragm towards the thin restricted play.

In one embodiment, the change in the gap in the cylindrical tube diaphragm is maintained by the thin restrictive clearance of variable flow resistance.

In one embodiment, the supply pressure on the inner part of the cylindrical tube diaphragm forms a narrow radial clearance part. The narrow radial clearance part is directly connected to the oil cavity groove.

In one embodiment, the cylindrical tube diaphragm is configured such that the deformation is closer to the desired average deflection of the cylindrical tube diaphragm.

These and other aspects of the embodiments of the present invention will be better understood and understood when considered in conjunction with the following description and drawings. However, it should be understood that although the following description indicates preferred embodiments and many specific details thereof, they are given in an illustrative rather than restrictive manner. Many changes and modifications can be made within the scope of the embodiments of the present invention without departing from the spirit of the present invention, and the embodiments of the present invention include all such modifications.

Regarding the technical means of our inventors, several preferred embodiments are described in detail below in conjunction with the drawings, in order to provide a thorough understanding and approval of the present invention.

The embodiments of the present invention and its various features and advantageous details are explained more fully with reference to the non-limiting embodiments shown in the drawings and described in detail in the following description. Descriptions of known components and processing techniques are omitted to avoid unnecessarily obscuring the embodiments of the present invention. In addition, the various embodiments described in the present invention are not necessarily mutually exclusive, because some embodiments may be combined with one or more other embodiments to form new embodiments. Unless otherwise specified, the term "or" refers to a non-exclusive "or". The examples used in the present invention are only intended to help understanding in a way that the embodiments of the present invention can be implemented and further enable those with ordinary knowledge in the technical field to which the present invention pertains to implement the embodiments of the present invention. Therefore, these examples should not be construed as limiting the scope of the embodiments of the present invention.

The accompanying drawings are used to help easily understand various technical features, and it should be understood that the embodiments proposed by the present invention are not limited by the accompanying drawings. Therefore, the present invention should be construed as extending to any changes, equivalents, and substitutions other than those specifically set forth in the drawings. Although the present invention may use the terms first, second, etc. to describe various elements, these elements should not be limited by these terms. These terms are generally only used to distinguish one element from another element.

Therefore, the embodiment of the present invention discloses a flow control unit for maintaining a constant fluid film gap in a hydrostatic bearing system. The flow control unit includes a circular flat membrane, an annular boss, and a fixed restrictor that provides a fixed flow resistance in the flow control unit. The fixed current limiter is connected in series with the variable current limiter. The variable flow restrictor provides variable flow resistance in the flow control unit, wherein the variable flow restrictor is connected in line with the oil cavity groove. The fixed flow resistance has the geometry of a capillary flow restrictor. The variable flow resistance includes a geometric shape in which the geometric shape of the variable flow resistance is deformed to actively control the flow in the hydrostatic bearing system. The circular flat membrane provides a variable flow resistance geometry. The use of a clearance formed by a circular flat membrane and an annular boss provides variable flow resistance.

Unlike conventional methods and systems, the flow control unit uses a circular flat membrane to control the thickness of the hydrostatic bearing film. The flow control unit compensates by supplying more fluid to increase the bearing capacity and rigidity of the bearing.

In addition, the tube diaphragm is fixed around a thin circular slot or thin restricting gap, and has many advantages compared to a flat membrane because the tube diaphragm can be easily attached, but the flat diaphragm needs to be press-fitted to fit the thickness of the hydrostatic bearing film The components of the controller are held on the edge of the membrane. The flow rate of the fluid depends on the pressure difference between the supply pressure and the oil chamber pressure, as well as the fluid flow resistance that limits the clearance. The liquid flow resistance of the clearance is controlled by the change of the restriction gap, which is caused by the deflection of the tube diaphragm caused by the fixed flow resistance.

The geometry of the variable flow resistance is provided by the cylindrical tube diaphragm to deform and actively control the flow in the hydrostatic bearing film thickness controller. The deflection of the tube diaphragm allows more fluid to enter the loaded oil cavity groove, thereby adjusting the stiffness and thickness of the hydrostatic system membrane gap.

Referring now to the drawings, and more specifically to Figures 1 to 4, a preferred embodiment is shown.

Figure 1 is a cross-sectional view of a flow control unit (100) for maintaining a constant fluid film gap in a hydrostatic bearing system (200) according to an embodiment of the present disclosure;

Generally speaking, since the hydrostatic bearing system (200) can achieve high rigidity, the hydrostatic bearing system (200) is required. In order to achieve high stiffness, a flow control unit (100) is required to maintain a constant fluid film gap in the hydrostatic bearing system (200). In one embodiment, the flow control unit (100) includes a circular flat membrane (102), an annular boss (104), and a fixed restrictor (106) configured to provide a fixed flow resistance in the flow control unit (100) ). The fixed restrictor (106) is connected in series with the variable restrictor (108). The variable flow restrictor (108) is configured to provide a variable flow resistance in the flow control unit (100). The variable flow restrictor (108) is connected with the oil cavity groove (112) (namely, the bearing groove) in a straight line. The fixed flow resistance and the variable flow resistance help to regulate the fluid flow in the flow control unit (100). The fixed flow resistance has the geometry of a capillary flow restrictor. Variable flow resistance includes geometric shapes that can be deformed and thereby actively control flow. The circular flat membrane (102) provides a variable flow resistance geometry. The fixed flow resistance enables the necessary pressure difference to be formed across the circular flat membrane (102) so that the circular flat membrane (102) can be deformed as expected. The fixed flow resistance also blocks the flow to prevent a large flow of fluid from flowing through the fixed flow resistance. The fixed flow resistance also helps to maintain the correct pressure difference gradient across the circular flat membrane (102) so that the circular flat membrane (102) does not deflect in the opposite direction as expected.

In addition, a variable flow resistance is realized via a play (110) formed by a circular flat film (102) and an annular boss (104). The clearance (110) is optimized for best performance at a given operating supply pressure of 25 bar. The cross section of the clearance (110) is determined by the size of the membrane deformation. The higher the deformation of the membrane, the smaller the cross-sectional area of the clearance. The pressure difference across the circular flat membrane (102) helps to control the amount of deformation of the circular flat membrane (102), thereby controlling the clearance (110). When the bearing clearance changes, the thin limit clearance in the variable flow resistance of the control unit (100) changes to compensate for the change in clearance. The increase of the load will increase the pressure of the oil chamber, thereby reducing the bearing film gap. The control unit (100) compensates by supplying more fluid to increase the bearing capacity and rigidity of the bearing. This represents a positive slope between pressure and fluid flow, which leads to ideal performance, and this is achieved via the control unit (100).

As the oil chamber pressure increases, the flow control unit (100) uses a variable flow restrictor to cause the flow to increase at the same time. This helps maintain the bearing clearance height to obtain sufficient rigidity so that the hydrostatic bearing system (200) can provide the required precision and accuracy.

In addition, the thickness of the circular flat membrane (102) and the restricted gap can be used to control the performance of the variable flow resistance. The round flat film (102) is easy to install and fix. The design is easy to manufacture and implement.

The model of the flow control unit (100) has been tested in the laboratory using hydrostatic bearing test equipment. The output performance shows that the flow rate increases when the load increases, the load increases the oil chamber pressure and tends to increase the flow resistance of the bearing groove, and the thickness of the hydrostatic bearing film will begin to decrease. This can be prevented by increasing the flow rate by an external flow control mechanism. Using a diaphragm to reduce the flow resistance of the bearing groove will help maintain a constant film thickness and achieve the desired performance.

Figure 2 is a schematic diagram of a hydrostatic bearing system (200) according to an embodiment of the present disclosure. The hydrostatic bearing system (200) includes a hydraulic power unit (214), an oil sump (202), a pressure relief valve (204), a pump (206), a motor (208), an accumulator (210), and a filter (212) ) And bearing groove (216) and flow control unit (100). The hydraulic power unit (214) is used to pressurize the oil, and the oil generates the supply pressure (Ps). The pressurized oil is supplied to a flow control unit (100) having a fixed flow resistance (106) and a variable flow resistance (102). The oil passes through the flow control unit (100) and advances to the oil chamber groove (112) where the oil chamber pressure (Pr) is generated.

Figure 3 is a cross-sectional view of a plurality of flow control units (100) connected in series and assembled into a single unit connected to a hydrostatic bearing system (200). The arrangement and function of the flow control unit (100) have been explained in conjunction with Fig. 1 and Fig. 2.

The bearing capacity and stiffness of the hydrostatic bearing system (200) depend on the fixed flow resistance of the flow control unit (100). The capillary restrictor is used as the fixed restrictor (106), and the parameters of the fixed restrictor (106) are mainly the diameter of the capillary and the length of the capillary.

Fig. 4 is a cross-sectional view of a hydrostatic bearing film thickness controller (400) according to an embodiment of the present disclosure. In one embodiment, the hydrostatic bearing film thickness controller (400) includes a fixed flow restrictor (402) configured to provide a fixed flow resistance in the hydrostatic bearing film thickness controller (400). The fixed restrictor (402) is connected in series with the variable restrictor (404). The variable flow restrictor (404) is configured to provide a variable flow resistance in the hydrostatic bearing film thickness controller (400), wherein the variable flow restrictor (404) and the oil cavity groove (410) are connected in a line.

In addition, the fixed flow resistance has the geometry of a capillary flow restrictor. The variable flow resistance includes a geometric shape that is deformable and thereby actively controls the flow rate. The geometry of the variable restrictor is provided by the cylindrical tube diaphragm (406). A fixed restrictor (402) modeled using a capillary system is connected in series with the variable flow resistance of the cylindrical tube diaphragm (406) to generate a pressure gradient across the cylindrical tube diaphragm (406).

The design of the cylindrical tube diaphragm (406) minimizes the stress variation across the cylindrical tube diaphragm (406). The length (411) of the cylindrical tube diaphragm (406) is designed to have a variable thickness to improve its bending characteristics. The cylindrical tube diaphragm (406) has a smaller cross-sectional thickness (412) on the edge of the cylinder (414), and the cross-sectional thickness is tapered and increased to form a thicker part in the middle of the other cylinder (413). cross section. The cylindrical tube diaphragm (406) is designed so that the deformation is closer to the desired average deflection of the cylindrical tube diaphragm (406), rather than having uneven deformation along its length. The supply pressure on the inside of the tube diaphragm (406) causes the tube diaphragm (406) to bulge toward the thin restricted play (408). The thin limiting clearance (408) is directly connected to the oil cavity groove (410) of the bearing and changes with the pressure of the entering oil cavity. The deflection of the tube diaphragm (406) allows more fluid to enter the loaded oil cavity groove, thereby adjusting the stiffness and the thickness of the hydrostatic system membrane gap. When the bearing clearance changes, the thin limiting clearance (408) in the variable flow resistance (that is, the annular boss clearance) changes to compensate for the change in clearance. The increase of the load will increase the pressure of the oil chamber, thereby reducing the bearing film gap. The hydrostatic bearing film thickness controller (400) compensates by supplying more fluid to increase the bearing capacity and rigidity of the bearing. This represents a positive slope between pressure and fluid flow, which leads to ideal performance, and this is achieved via the hydrostatic bearing film thickness controller (400).

The variable thickness reduces the maximum deflection that can be obtained while keeping the average deflection constant, so it can reduce the maximum gap without blocking the fluid passage, thereby achieving a greater percentage of the average gap thickness.

The tube diaphragm (406) is fixed around a thin circular slot or thin restricting gap, and has many advantages compared to a flat membrane because the tube diaphragm (406) can be easily attached, but the flat diaphragm needs to be press-fitted in order to The pressure bearing film thickness controller (400) is held on the edge of the film in the assembly. The flow rate of the fluid depends on the pressure difference between the supply pressure and the oil chamber pressure, as well as the fluid flow resistance that limits the clearance. The liquid flow resistance of the clearance is controlled by the change of the restriction gap, which is caused by the deflection of the tube diaphragm caused by the fixed flow resistance.

The hydrostatic bearing film thickness controller (400) has been tested in a single-slot hydrostatic bearing test equipment manufactured in the laboratory. In this test equipment, the fluid flow resistance of the bearing groove tends to increase. The pressure in the oil chamber changes. Then, the hydrostatic bearing film thickness starts to decrease, which can be prevented by increasing the flow rate via an external flow control mechanism (ie, tube diaphragm) to reduce the flow resistance of the bearing groove that will maintain a constant film thickness.

The embodiments of the present invention may be implemented using at least one software program that runs on at least one hardware device and performs network management functions to control the elements.

The above description of specific embodiments will fully reveal the general nature of the embodiments of the present invention, so that others can easily modify and/or adjust such specific embodiments for use without departing from the general concept. Various applications, and therefore such adjustments and modifications should and are intended to be included in the meaning and scope of equivalents of the disclosed embodiments. It should be understood that the wording or terminology used in the present invention is for the purpose of description, not for limitation. Therefore, although the embodiments of the present invention have been described in terms of preferred embodiments, those with ordinary knowledge in the technical field to which the present invention pertains will recognize that the embodiments of the present invention can be adopted within the spirit and scope of the described embodiments of the present invention. The modifications within are implemented.

In summary, the technical means disclosed in the present invention can effectively solve the conventional problems and achieve the expected purpose and effect. It has not been seen in the publications, has not been used publicly, and has long-term progress before the application. The patent law claims that the invention is correct. Yan filed an application in accordance with the law and prayed that Jun Shanghui would give a detailed examination and grant a patent for invention.

However, the above are only a few preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, all equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the description of the invention are all It should still fall within the scope of the invention patent.

〔this invention〕 100: flow control unit 102: round flat film 104: Ring boss 106: fixed restrictor 108: Variable flow restrictor 110: Clearance 112: oil cavity groove 200: Hydrostatic bearing system 202: oil pool 204: Pressure relief valve 206: Pump 208: Motor 210: Accumulator 212: filter 214: Hydraulic power unit 216: bearing groove 400: Hydrostatic bearing film thickness controller 402: fixed restrictor 404: Variable flow restrictor 406: Cylindrical tube diaphragm 408: Thin limit clearance 410: oil cavity groove 411: length 412: Smaller cross-sectional thickness 413: Another cylinder 414: cylinder

[Figure 1] is a cross-sectional view of a flow control unit for maintaining a constant fluid film gap in a hydrostatic bearing system according to an embodiment of the present disclosure; [Figure 2] is a schematic view of a hydrostatic bearing system according to an embodiment of the present disclosure; [Figure 3] is a cross-sectional view of a plurality of flow control units connected in series and assembled into a single unit according to an embodiment of the present disclosure, the single unit being connected to a hydrostatic bearing system; [Fig. 4] is a cross-sectional view of a hydrostatic bearing film thickness controller according to an embodiment of the present disclosure.

102: round flat film

104: Ring boss

106: fixed restrictor

108: Variable flow restrictor

110: Clearance

112: oil cavity groove

Claims (36)

A hydrostatic pressure controller for maintaining a constant fluid film gap in a hydrostatic bearing system (200), including: Component (102 or 406); A fixed restrictor (106 or 402), the fixed restrictor is configured to provide a fixed flow resistance in the hydrostatic controller, wherein the fixed restrictor (106 and 402) and a variable restrictor Devices (108 or 404) connected in series; and The variable restrictor (108 or 404), the variable restrictor is configured to provide a variable flow resistance in the hydrostatic pressure controller, wherein the variable restrictor (108 or 404) ) Is connected in line with the oil cavity groove (112 or 410), Wherein the fixed flow resistance has the geometry of a capillary flow restrictor, and The variable flow resistance includes a geometric shape that is deformed to actively control the flow in the hydrostatic bearing system (200), wherein the geometric shape is provided by the member (102 or 406). The hydrostatic pressure controller according to claim 1, wherein the fixed restrictor (106 or 402) passes through the variable restrictor (108 or 404) and the capillary system and the circular member (102 or 406) Connected in series to generate a pressure gradient across the member (102 or 406). The hydrostatic pressure controller according to claim 1, wherein the member (102 or 406) is one of a circular flat diaphragm (102) and a cylindrical tube diaphragm (406). The hydrostatic pressure controller according to claim 3, wherein the fixed flow resistance enables a necessary pressure difference to be formed across the member (102). The hydrostatic pressure controller of claim 3, wherein the fixed flow resistance maintains the correct gradient of the pressure difference across the member (102). The hydrostatic pressure controller according to claim 3, further comprising an annular boss (104), wherein the clearance (110) generated by the member (102) and the annular boss (104) is used to provide the Variable flow resistance. The hydrostatic pressure controller according to claim 6, wherein the cross section of the clearance (110) is determined by the deformation of the member (102). The hydrostatic pressure controller according to claim 6, wherein the clearance (110) is provided at a specific supply pressure. The hydrostatic pressure controller of claim 3, wherein the pressure difference across the member (102) controls the amount of deformation in the member (102). The hydrostatic pressure controller according to claim 3, wherein the fixed flow resistance blocks fluid flow so as to control a large flow of the fluid flow through the variable flow restrictor (108 or 404). The hydrostatic pressure controller of claim 3, wherein the member (406) is configured such that the change in stress across the member (406) is minimized. The hydrostatic pressure controller according to claim 3, wherein the member (406) is configured to have a variable thickness to improve the bending characteristics of the member (406). The hydrostatic pressure controller according to claim 3, wherein the supply pressure on the inner part of the member (406) provides a protrusion in the member (406) toward the thin restricted play (408). The hydrostatic pressure controller according to claim 13, wherein the change of the gap in the member (406) is maintained by the thin restriction clearance (408) of the variable flow resistance. The hydrostatic pressure controller according to claim 3, wherein the supply pressure on the inner part of the member (406) forms a narrow radial clearance part, wherein the narrow radial clearance part is directly connected to the The oil cavity grooves (112 and 410). The hydrostatic pressure controller of claim 3, wherein the member (406) is configured such that the deformation is closer to a desired average deflection of the member (406). The hydrostatic pressure controller according to claim 3, wherein the member (406) includes a small cross-sectional thickness (412) on the edge of the cylinder (414), and the cross-sectional thickness is tapered and increased so as to The middle part of the other cylinder (413) forms a thicker cross section. The hydrostatic pressure controller according to claim 1, wherein the hydrostatic pressure controller is a flow control unit (100) or a hydrostatic bearing film thickness controller (400). A hydrostatic bearing system (200), including: Oil pool (202); Pressure relief valve (204); Pump (206); Motor (208); Accumulator (210); Filter (212); Hydraulic power unit (214); Bearing groove (216); and The hydrostatic pressure controller includes: Component (102 or 406); A fixed restrictor (106 or 402), the fixed restrictor is configured to provide a fixed flow resistance in the hydrostatic controller, wherein the fixed restrictor (106 and 402) and a variable restrictor Devices (108 or 404) connected in series; and The variable restrictor (108 or 404), the variable restrictor is configured to provide a variable flow resistance in the hydrostatic pressure controller, wherein the variable restrictor (108 or 404) ) Is connected in line with the oil cavity groove (112 or 410), Wherein the fixed flow resistance has the geometry of a capillary flow restrictor, The variable flow resistance includes a geometric shape, wherein the geometric shape is deformed to actively control the flow in the hydrostatic bearing system (200), wherein the geometric shape is provided by the member (102 or 400). The hydrostatic bearing system (200) according to claim 19, wherein the fixed restrictor (106 or 402) passes through the variable restrictor (108 or 404) and the capillary system and the component (102) Or 406) connected in series to generate a pressure gradient across the member (102 or 406). The hydrostatic bearing system (200) according to claim 19, wherein the member (102 or 406) is one of a circular flat diaphragm (102) and a cylindrical tube diaphragm (406). The hydrostatic bearing system (200) according to claim 21, wherein the fixed flow resistance enables a necessary pressure difference to be formed across the member (102). The hydrostatic bearing system (200) of claim 21, wherein the fixed flow resistance maintains the correct gradient of the pressure difference across the member (102). The hydrostatic bearing system (200) according to claim 21, further comprising an annular boss (104), wherein the clearance (110) generated by the member (102) and the annular boss (104) is used The variable flow resistance is provided. The hydrostatic bearing system (200) according to claim 24, wherein the cross section of the clearance (110) is determined by the deformation of the member (102). The hydrostatic bearing system (200) according to claim 24, wherein the clearance (110) is provided at a specific supply pressure. The hydrostatic bearing system (200) of claim 21, wherein the pressure difference across the member (102) controls the amount of deformation in the member (102). The hydrostatic bearing system (200) according to claim 21, wherein the fixed flow resistance blocks fluid flow so as to control a large flow of the fluid flow through the variable flow restrictor (108 or 404). The hydrostatic bearing system (200) of claim 21, wherein the member (406) is configured such that the change in stress across the member (406) is minimized. The hydrostatic bearing system (200) according to claim 21, wherein the member (406) is configured to have a variable thickness to improve the bending characteristics of the member (406). The hydrostatic bearing system (200) according to claim 21, wherein the supply pressure on the inner part of the member (406) provides a protrusion in the member (406) toward the thin limit clearance (408) . The hydrostatic bearing system (200) according to claim 31, wherein the change of the gap in the member (406) is maintained by the thin restrictive clearance (408) of the variable flow resistance. The hydrostatic bearing system (200) according to claim 21, wherein the supply pressure on the inner part of the member (406) forms a narrow radial clearance portion, wherein the narrow radial clearance portion directly Connected to the oil cavity grooves (112 and 410). The hydrostatic bearing system (200) of claim 21, wherein the member (406) is configured such that the deformation is closer to a desired average deflection of the member (406). The hydrostatic bearing system (200) according to claim 21, wherein the member (406) includes a small cross-sectional thickness (412) on the edge of the cylinder (414), and the cross-sectional thickness is tapered Increase to form a thicker cross section in the middle part of the other cylinder (413). The hydrostatic bearing system (200) according to claim 19, wherein the hydrostatic pressure controller is a flow control unit (100) or a hydrostatic bearing film thickness controller (400).

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