TWI824158B - Hydrostatic controller for maintaining constant fluid film gap - Google Patents

Hydrostatic controller for maintaining constant fluid film gap Download PDF

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Publication number
TWI824158B
TWI824158B TW109119726A TW109119726A TWI824158B TW I824158 B TWI824158 B TW I824158B TW 109119726 A TW109119726 A TW 109119726A TW 109119726 A TW109119726 A TW 109119726A TW I824158 B TWI824158 B TW I824158B
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Taiwan
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flow
control unit
flat membrane
circular flat
variable
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TW109119726A
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Chinese (zh)
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TW202108908A (en
Inventor
拉曼 庫瑪
薩德汗瓦 巴特
維沙爾 帕迪梅裏
普拉迪普 庫瑪 普拉卡薩姆
撒錫安薩 比安
拉梅什 巴布 尼瑪加達
卡皮爾 丹德
安南 吉安
普拉卡什 薩達西瓦姆
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印度理工學院馬德拉斯分校
印度商微電氣研磨技術有限公司
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • F16C29/025Hydrostatic or aerostatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0644Details of devices to control the supply of liquids to the bearings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Paper (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)

Abstract

Embodiments herein disclose a hydrostatic controller for maintaining a constant fluid film gap. The hydrostatic controller includes a fixed restrictor (106 or 402) configured to provide a fixed resistance in the hydrostatic controller. The fixed restrictor (106 or 402) is connected in series with a variable restrictor (108 or 404). The variable restrictor (108 or 404) is configured to provide a variable resistance in the hydrostatic controller. The variable restrictor (108 or 404) is connected in line with a recess pocket (112 or 410). The fixed resistance has a geometry of a capillary restrictor. The variable resistance comprises a geometry, wherein the geometry deforms to actively control a flow rate in the hydrostatic controller, wherein the geometry is provided by the circular member (102 or 406).

Description

保持恒定液膜間隙的靜液壓控制器Hydrostatic controller to maintain constant film gap

本發明涉及一種流體靜壓軸承系統,並且更具體,涉及一種用於在流體靜壓軸承系統中保持恒定流體薄膜間隙的流體靜壓控制器。本發明基於並要求2019 6 11 提交的印度申請號2019410231212019 6 11 提交的印度申請號201941023123 的優先權,所述申請的公開內容通過引用方式併入本發明。The present invention relates to a hydrostatic bearing system and, more particularly, to a hydrostatic controller for maintaining a constant fluid film gap in a hydrostatic bearing system. The present application is based on and claims priority to Indian Application No. 201941023121 filed on June 11 , 2019 and Indian Application No. 201941023123 filed on June 11 , 2019 , the disclosures of which are incorporated by reference into the present application.

流體靜壓軸承系統是一種非接觸型軸承系統,其將流體諸如空氣、潤滑油等流體引導至其內部,並且通過限制作用獲得負載能力。儘管流體靜壓軸承系統由於平均效應具有諸如低摩擦和高移動精度的優點,但是其具有諸如低剛度和低阻尼特性的缺點。為了提高流體靜壓軸承系統的剛度,減小軸承遊隙是有效的。另外,為了優化地設計具有較小軸承遊隙的軸承,在軸承系統中流動的流體的量應當被限制為對應於軸承遊隙。The hydrostatic bearing system is a non-contact bearing system that guides fluids such as air, lubricating oil, etc. into its interior and obtains load capacity through restriction. Although the hydrostatic bearing system has advantages such as low friction and high movement accuracy due to the averaging effect, it has disadvantages such as low stiffness and low damping characteristics. In order to improve the stiffness of the hydrostatic bearing system, it is effective to reduce the bearing clearance. Additionally, in order to optimally design bearings with smaller bearing clearances, the amount of fluid flowing in the bearing system should be limited to correspond to the bearing clearance.

然而,當減小軸承游隙時,應提高軸承的加工精度。因此,通過減小軸承遊隙來提高軸承的剛度存在限制性。為了克服這種限制,已經提出了各種可變限制機構。However, when reducing bearing clearance, the machining accuracy of the bearing should be improved. Therefore, there are limitations to improving bearing stiffness by reducing bearing clearance. To overcome this limitation, various variable limiting mechanisms have been proposed.

在一個示例中,在現有流體靜壓軸承系統中存在一種流量控制器的工作機構,該流量控制器使用串聯的平坦膜和球形膜,其中兩個不同的液流流阻具有薄限制間隙,該薄限制間隙直接連接到流體靜壓槽中的一者。在現有流體靜壓軸承系統中,常規的液流限流器是固定液流流阻,並且當流體靜壓槽中的油腔壓力變化時,流量將降低。流量方程式如下,Q = (供應壓力-油腔壓力)/(固定流阻)。In one example, in an existing hydrostatic bearing system there is a working mechanism of a flow controller that uses a flat membrane and a spherical membrane in series, where the two different flow resistances have a thin limiting gap. The thin confinement gap is connected directly to one of the hydrostatic tanks. In the existing hydrostatic bearing system, the conventional liquid flow restrictor has a fixed liquid flow resistance, and when the oil chamber pressure in the hydrostatic tank changes, the flow rate will decrease. The flow equation is as follows, Q = (supply pressure-oil chamber pressure)/(fixed flow resistance).

因此,期望解決上述缺點或其他缺陷或至少提供有用的替代方案。Therefore, it is desirable to address the above-mentioned disadvantages or other disadvantages or at least provide a useful alternative.

有鑑於此,吾等發明人乃潛心進一步研究,並著手進行研發及改良,期以一較佳發明以解決上述問題,且在經過不斷試驗及修改後而有本發明之問世。In view of this, our inventors devoted themselves to further research, and began to carry out research and development and improvement, hoping to solve the above problems with a better invention, and after continuous testing and modification, the present invention came out.

本發明的實施方案的主要目的是提供一種流量控制單元,用於在流體靜壓軸承系統中保持恒定流體薄膜間隙。A primary object of embodiments of the present invention is to provide a flow control unit for maintaining a constant fluid film gap in a hydrostatic bearing system.

本發明的實施方案的另一個目的是提供一種使用圓柱形管隔膜的流體靜壓軸承薄膜厚度控制器。Another object of embodiments of the present invention is to provide a hydrostatic bearing film thickness controller using a cylindrical tube diaphragm.

因此,本發明的實施方案公開了一種用於保持恒定流體薄膜間隙的流體靜壓控制器。該流體靜壓控制器包括圓形構件和固定限流器。該固定限流器被構造成在流體靜壓控制器中提供固定流阻,其中固定限流器與可變限流器串聯連接。該可變限流器被構造成在流體靜壓控制器中提供可變流阻。可變限流器與油腔槽成一直線連接。固定流阻具有毛細管限流器的幾何形狀。可變流阻包括幾何形狀。該幾何形狀變形以主動地控制流體靜壓控制器中的流量,其中該幾何形狀由圓形構件提供。Accordingly, embodiments of the present invention disclose a hydrostatic pressure controller for maintaining a constant fluid film gap. The hydrostatic pressure controller includes a circular member and a fixed flow restrictor. The fixed flow restrictor is configured to provide a fixed flow resistance in the hydrostatic controller, wherein the fixed flow restrictor is connected in series with the variable flow restrictor. The variable flow restrictor is configured to provide variable flow resistance in the hydrostatic pressure controller. The variable flow restrictor is connected in a straight line with the oil chamber groove. Fixed flow resistance has the geometry of a capillary flow restrictor. Variable flow resistance includes geometry. The geometry deforms to actively control flow in the hydrostatic controller, where the geometry is provided by a circular member.

在一個實施方案中,使用由圓形構件和環形凸台形成的遊隙提供可變流阻。In one embodiment, variable flow resistance is provided using clearance formed by a circular member and an annular boss.

在一個實施方案中,固定限流器通過可變限流器和毛細管系統與圓形構件串聯連接,以跨圓形構件產生壓力梯度。In one embodiment, the fixed flow restrictor is connected in series with the circular member through a variable flow restrictor and capillary system to create a pressure gradient across the circular member.

在一個實施方案中,圓形構件是圓形平坦膜和圓柱形管隔膜。In one embodiment, the circular members are circular flat membranes and cylindrical tube membranes.

在一個實施方案中,流體靜壓控制器是流量控制單元或流體靜壓軸承薄膜厚度控制器。In one embodiment, the hydrostatic pressure controller is a flow control unit or a hydrostatic bearing film thickness controller.

在一個實施方案中,圓形構件是圓形平坦膜和圓柱形管隔膜。In one embodiment, the circular members are circular flat membranes and cylindrical tube membranes.

因此,本發明的實施方案公開了一種用於在流體靜壓軸承系統中保持恒定流體薄膜間隙的流量控制單元。流量控制單元包括圓形平坦膜、環形凸台和在流量控制單元中提供固定流阻的固定限流器。固定限流器與可變限流器串聯連接。可變限流器在流量控制單元中提供可變流阻,其中可變限流器與油腔槽成一直線連接。固定流阻具有毛細管限流器的幾何形狀。可變流阻包括幾何形狀,其中可變流阻的幾何形狀變形以主動控制流體靜壓軸承系統中的流量。圓形平坦膜提供可變流阻的幾何形狀。使用由圓形平坦膜和環形凸台形成的遊隙提供可變流阻。Accordingly, embodiments of the present invention disclose a flow control unit for maintaining a constant fluid film gap in a hydrostatic bearing system. The flow control unit includes a circular flat membrane, an annular boss, and a fixed flow restrictor that provides a fixed flow resistance in the flow control unit. The fixed current limiter is connected in series with the variable current limiter. The variable flow restrictor provides variable flow resistance in the flow control unit, wherein the variable flow restrictor is connected in line with the oil chamber groove. Fixed flow resistance has the geometry of a capillary flow restrictor. Variable flow resistance includes geometries in which the geometry of the variable flow resistance deforms to actively control flow in a hydrostatic bearing system. The rounded flat membrane provides a variable flow resistance geometry. Variable flow resistance is provided using clearance formed by a circular flat membrane and annular bosses.

在一個實施方案中,固定流阻使得能夠跨圓形平坦膜形成必需的壓力差。In one embodiment, fixed flow resistance enables the necessary pressure differential to be established across the circular flat membrane.

在一個實施方案中,固定流阻維持跨圓形平坦膜的壓力差的正確梯度。In one embodiment, a fixed flow resistance maintains the correct gradient of pressure difference across the circular flat membrane.

在一個實施方案中,遊隙的橫截面由圓形平坦膜的變形確定。In one embodiment, the cross-section of the clearance is determined by the deformation of the circular flat membrane.

在一個實施方案中,跨圓形平坦膜的壓力差控制圓形平坦膜中的變形量。In one embodiment, the pressure difference across the circular flat membrane controls the amount of deformation in the circular flat membrane.

在一個實施方案中,固定流阻阻塞流體流,以便控制大流量的流體流流過可變限流器。In one embodiment, a fixed flow resistance blocks fluid flow to control a large flow of fluid through the variable flow restrictor.

在一個實施方案中,在特定的供應壓力下提供遊隙。In one embodiment, clearance is provided at a specific supply pressure.

因此,本發明的實施方案公開了一種流體靜壓軸承系統,其包括油池、卸壓閥、泵、馬達、蓄能器、過濾器、液壓動力機組、軸承槽和流量控制單元。流量控制單元包括作為可變限流器的圓形平坦膜、環形凸台和在流量控制單元中提供固定流阻的固定限流器。固定限流器與可變限流器串聯連接。可變限流器在流量控制單元中提供可變流阻,其中可變限流器與油腔槽成一直線連接。固定流阻具有毛細管限流器的幾何形狀。可變流阻包括幾何形狀,其中可變流阻的幾何形狀變形以主動控制流體靜壓軸承系統中的流量。圓形平坦膜提供可變流阻的幾何形狀。使用由圓形平坦膜和環形凸台形成的遊隙提供可變流阻。Accordingly, embodiments of the present invention disclose a hydrostatic bearing system that includes a sump, a pressure relief valve, a pump, a motor, an accumulator, a filter, a hydraulic power pack, a bearing tank, and a flow control unit. The flow control unit includes a circular flat membrane as a variable flow restrictor, an annular boss, and a fixed flow restrictor that provides a fixed flow resistance in the flow control unit. The fixed current limiter is connected in series with the variable current limiter. The variable flow restrictor provides variable flow resistance in the flow control unit, wherein the variable flow restrictor is connected in line with the oil chamber groove. Fixed flow resistance has the geometry of a capillary flow restrictor. Variable flow resistance includes geometries in which the geometry of the variable flow resistance deforms to actively control flow in a hydrostatic bearing system. The rounded flat membrane provides a variable flow resistance geometry. Variable flow resistance is provided using clearance formed by a circular flat membrane and annular bosses.

因此,本發明的實施方案公開了一種流體靜壓軸承薄膜厚度控制器,該流體靜壓軸承薄膜厚度控制器包括被構造成在流體靜壓軸承薄膜厚度控制器中提供固定流阻的固定限流器。固定限流器與可變限流器串聯連接。可變限流器被構造成在流體靜壓軸承薄膜厚度控制器中提供可變流阻,其中可變限流器與油腔槽成一直線連接。固定流阻包括毛細管限流器的幾何形狀。可變流阻包括幾何形狀,其中該幾何形狀變形以主動控制流體靜壓軸承薄膜厚度控制器中的流量。該幾何形狀由圓柱形管隔膜提供。固定限流器通過可變限流器和毛細管系統與圓柱形管隔膜串聯連接,以跨圓柱形管隔膜產生壓力梯度。Accordingly, embodiments of the present invention disclose a hydrostatic bearing film thickness controller that includes a fixed flow restriction configured to provide a fixed flow resistance in the hydrostatic bearing film thickness controller. device. The fixed current limiter is connected in series with the variable current limiter. The variable flow restrictor is configured to provide variable flow resistance in the hydrostatic bearing film thickness controller, wherein the variable flow restrictor is in line connection with the oil chamber groove. Fixed flow resistance includes the geometry of the capillary flow restrictor. Variable flow resistance includes geometries where the geometry deforms to actively control flow in hydrostatic bearing film thickness controllers. This geometry is provided by a cylindrical tube diaphragm. The fixed flow restrictor is connected in series with the cylindrical tube diaphragm through a variable flow restrictor and capillary tube system to create a pressure gradient across the cylindrical tube diaphragm.

在一個實施方案中,圓柱形管隔膜被構造成使得跨圓柱形管隔膜的應力變化被減至最小。In one embodiment, the cylindrical tube diaphragm is configured such that stress changes across the cylindrical tube diaphragm are minimized.

在一個實施方案中,圓柱形管隔膜被構造成具有可變厚度以改善圓柱形管隔膜的彎曲特性。In one embodiment, the cylindrical tube membrane is constructed with variable thickness to improve the bending characteristics of the cylindrical tube membrane.

在一個實施方案中,在圓柱形管隔膜內側部分上的供應壓力在圓柱形管隔膜中提供朝向薄限制遊隙的凸出。In one embodiment, supply pressure on the inboard portion of the cylindrical tube diaphragm provides a projection in the cylindrical tube diaphragm towards a thin limiting clearance.

在一個實施方案中,通過可變流阻的薄限制遊隙保持圓柱形管隔膜中間隙的變化。In one embodiment, variations in the gap in the cylindrical tube diaphragm are maintained by a thin restricted clearance of variable flow resistance.

在一個實施方案中,在圓柱形管隔膜的內側部分上的供應壓力形成狹窄的徑向遊隙部分。狹窄的徑向遊隙部分直接連接到油腔槽。In one embodiment, the supply pressure on the inner portion of the cylindrical tube diaphragm creates a narrow radial clearance portion. The narrow radial clearance section is directly connected to the oil chamber groove.

在一個實施方案中,圓柱形管隔膜被構造成使得變形更接近於圓柱形管隔膜的期望的平均偏轉。In one embodiment, the cylindrical tube diaphragm is configured such that the deformation is closer to the desired average deflection of the cylindrical tube diaphragm.

當結合以下描述和附圖考慮時,將更好地認識和理解本發明的實施方案的這些和其他方面。然而,應當理解,儘管以下描述指示了優選實施方案及其許多具體細節,但其是以說明而非限制的方式給出的。在不脫離本發明的精神的情況下,可以在本發明的實施方案的範圍內進行許多改變和修改,並且本發明的實施方案包括所有這樣的修改。These and other aspects of embodiments of the present invention will be better appreciated and understood when considered in conjunction with the following description and accompanying drawings. It is to be understood, however, that the following description, while indicating preferred embodiments and numerous specific details thereof, is given by way of illustration and not limitation. Many changes and modifications may be made within the scope of embodiments of the invention without departing from the spirit of the invention, and embodiments of the invention include all such modifications.

關於吾等發明人之技術手段,茲舉數種較佳實施例配合圖式於下文進行詳細說明,俾供  鈞上深入瞭解並認同本發明。Regarding the technical means of our inventors, several preferred embodiments are described in detail below along with the drawings, so that everyone can have a thorough understanding and recognition of the present invention.

參考在附圖中示出並在以下描述中詳細描述的非限制性實施方案,更全面地解釋了本發明的實施方案及其各種特徵和有利細節。省略對已知組件和處理技術的說明以避免不必要地混淆本發明的實施方案。此外,本發明所描述的各實施方案未必相互排斥,因為一些實施方案可與一個或一個以上其他實施方案組合而形成新的實施方案。除非另外指明,術語“或”是指非排他性的“或”。本發明所用的示例僅僅旨在以本發明的實施方案可以被實現和進一步使本發明所屬技術領域中具有通常知識者能夠實現本發明的實施方案的方式來幫助理解。因此,這些示例不應被解釋為限制本發明的實施方案的範圍。Embodiments of the invention and its various features and advantageous details are explained more fully with reference to the non-limiting embodiments illustrated in the drawings and described in detail in the following description. Descriptions of well-known components and processing techniques are omitted to avoid unnecessarily obscuring embodiments of the invention. Furthermore, various embodiments described herein are not necessarily mutually exclusive, as some embodiments may be combined with one or more other embodiments to form new embodiments. Unless otherwise specified, the term "or" refers to a non-exclusive "or". The examples used in the present invention are merely intended to aid the understanding in a manner in which embodiments of the present invention can be implemented and to further enable those skilled in the art to which the present invention pertains to implement the embodiments of the present invention. Accordingly, these examples should not be construed as limiting the scope of embodiments of the invention.

附圖用於幫助容易地理解各種技術特徵,並且應當理解,本發明提出的實施方案不受附圖的限制。因此,本發明應當被解釋為擴展到除了在附圖中具體闡述的那些之外的任何改變、等同物和替代物。儘管本發明可以使用術語第一、第二等來描述各種元件,但是這些元件不應受到這些術語的限制。這些術語一般僅用於將一個元件與另一元件相區分。The accompanying drawings are used to help easily understand various technical features, and it should be understood that the embodiments proposed by the present invention are not limited by the accompanying drawings. Accordingly, the invention is to be construed to extend to any modifications, equivalents, and alternatives other than those specifically set forth in the drawings. Although the present invention may use the terms first, second, etc. to describe various elements, these elements should not be limited by these terms. These terms are generally only used to distinguish one element from another element.

因此,本發明的實施方案公開了一種用於在流體靜壓軸承系統中保持恒定流體薄膜間隙的流量控制單元。流量控制單元包括圓形平坦膜、環形凸台和在流量控制單元中提供固定流阻的固定限流器。固定限流器與可變限流器串聯連接。可變限流器在流量控制單元中提供可變流阻,其中可變限流器與油腔槽成一直線連接。固定流阻具有毛細管限流器的幾何形狀。可變流阻包括幾何形狀,其中可變流阻的幾何形狀變形以主動控制流體靜壓軸承系統中的流量。圓形平坦膜提供可變流阻的幾何形狀。使用由圓形平坦膜和環形凸台形成的遊隙提供可變流阻。Accordingly, embodiments of the present invention disclose a flow control unit for maintaining a constant fluid film gap in a hydrostatic bearing system. The flow control unit includes a circular flat membrane, an annular boss, and a fixed flow restrictor that provides a fixed flow resistance in the flow control unit. The fixed current limiter is connected in series with the variable current limiter. The variable flow restrictor provides variable flow resistance in the flow control unit, wherein the variable flow restrictor is connected in line with the oil chamber groove. Fixed flow resistance has the geometry of a capillary flow restrictor. Variable flow resistance includes geometries in which the geometry of the variable flow resistance deforms to actively control flow in a hydrostatic bearing system. The rounded flat membrane provides a variable flow resistance geometry. Variable flow resistance is provided using clearance formed by a circular flat membrane and annular bosses.

與常規方法和系統不同,流量控制單元使用圓形平坦膜控制流體靜壓軸承薄膜厚度。流量控制單元通過供應更多的流體進行補償,以增加軸承的承載能力和剛度。Unlike conventional methods and systems, the flow control unit uses a circular flat membrane to control hydrostatic bearing film thickness. The flow control unit compensates by supplying more fluid to increase the bearing's load-carrying capacity and stiffness.

此外,管隔膜固定在薄圓形狹槽或薄限制間隙周圍,並且與平坦膜相比具有許多優點,因為管隔膜可以容易地附接,但是平坦隔膜需要壓配合以在流體靜壓軸承薄膜厚度控制器的組件中保持在膜的邊緣。流體的流量取決於供應壓力和油腔壓力之間的壓力差以及限制遊隙的液流流阻。遊隙的液流流阻由限制間隙的變化控制,該限制間隙的變化是由固定流阻引起的管隔膜的偏轉引起的。Furthermore, tube diaphragms are fixed around thin circular slots or thin confinement gaps and have many advantages over flat diaphragms as tube diaphragms can be easily attached, but flat diaphragms require a press fit to support the hydrostatic bearing film thickness The components of the controller are held at the edge of the membrane. The flow rate of the fluid depends on the pressure difference between the supply pressure and the oil chamber pressure and the flow resistance that limits the clearance. The liquid flow resistance of the clearance is controlled by changes in the limiting gap caused by the deflection of the tube diaphragm caused by the fixed flow resistance.

可變流阻的幾何形狀由圓柱形管隔膜提供,以便變形和主動地控制流體靜壓軸承薄膜厚度控制器中的流量。管隔膜的偏轉允許更多流體進入加載的油腔槽,從而調節剛度和流體靜壓系統薄膜間隙厚度。The variable flow resistance geometry is provided by a cylindrical tube diaphragm to deform and actively control flow in a hydrostatic bearing film thickness controller. Deflection of the tube diaphragm allows more fluid to enter the loaded oil chamber trough, thus regulating the stiffness and hydrostatic system membrane gap thickness.

現在參照附圖,更具體地參考圖1至圖4,示出了優選實施方案。Referring now to the drawings, and more particularly to Figures 1-4, there are shown preferred embodiments.

圖1是根據本發明公開的實施方案的用於在流體靜壓軸承系統(200)中保持恒定流體薄膜間隙的流量控制單元(100)的橫剖視圖;1 is a cross-sectional view of a flow control unit (100) for maintaining a constant fluid film gap in a hydrostatic bearing system (200) in accordance with an embodiment disclosed herein;

一般來講,由於流體靜壓軸承系統(200)能夠實現高剛度,因此需要流體靜壓軸承系統(200)。為了實現高剛度,需要流量控制單元(100)以在流體靜壓軸承系統(200)中保持恒定流體薄膜間隙。在一個實施方案中,流量控制單元(100)包括圓形平坦膜(102)、環形凸台(104)以及被構造成在流量控制單元(100)中提供固定流阻的固定限流器(106)。固定限流器(106)與可變限流器(108)串聯連接。可變限流器(108)被構造成在流量控制單元(100)中提供可變流阻。可變限流器(108)與油腔槽(112)(即軸承槽)成一直線連接。固定流阻和可變流阻有助於調節流量控制單元(100)中的流體流。固定流阻具有毛細管限流器的幾何形狀。可變流阻包括可變形並由此主動控制流量的幾何形狀。圓形平坦膜(102)提供可變流阻的幾何形狀。固定流阻使得能夠跨圓形平坦膜(102)形成必要的壓力差,使得圓形平坦膜(102)能夠如預期變形。固定流阻還會阻塞流量,以防止大流量的流體流過固定流阻。固定流阻還有助於保持跨圓形平坦膜(102)的正確壓力差梯度,以使圓形平坦膜(102)不會在與預期相反的方向上偏轉。Generally speaking, a hydrostatic bearing system (200) is required due to its ability to achieve high stiffness. To achieve high stiffness, a flow control unit (100) is required to maintain a constant fluid film gap in the hydrostatic bearing system (200). In one embodiment, flow control unit (100) includes a circular flat membrane (102), an annular boss (104), and a fixed flow restrictor (106) configured to provide a fixed flow resistance in flow control unit (100) ). The fixed current limiter (106) and the variable current limiter (108) are connected in series. The variable flow restrictor (108) is configured to provide variable flow resistance in the flow control unit (100). The variable flow limiter (108) is connected in a straight line with the oil chamber groove (112) (ie, the bearing groove). Fixed flow resistance and variable flow resistance help regulate fluid flow in the flow control unit (100). Fixed flow resistance has the geometry of a capillary flow restrictor. Variable flow resistance includes geometries that can deform and thereby actively control flow. The rounded flat membrane (102) provides a variable flow resistance geometry. The fixed flow resistance enables the necessary pressure differential to develop across the circular flat membrane (102) so that the circular flat membrane (102) can deform as intended. Fixed flow resistance also blocks flow to prevent large flows of fluid from flowing past the fixed flow resistance. Fixed flow resistance also helps maintain the correct pressure differential gradient across the circular flat membrane (102) so that the circular flat membrane (102) does not deflect in the opposite direction than intended.

此外,經由由圓形平坦膜(102)和環形凸台(104)形成的遊隙(110)實現可變流阻。遊隙(110)被優化以在25巴的給定操作供應壓力下獲得最佳性能。遊隙(110)的橫截面由膜變形的大小決定。膜的變形越高,遊隙橫截面積越小。跨圓形平坦膜(102)的壓差有助於控制圓形平坦膜(102)的變形量,進而控制遊隙(110)。當軸承間隙改變時,控制單元(100)的可變流阻中的薄限制遊隙改變,以補償間隙的改變。負載的增加會增加油腔壓力,從而減小軸承薄膜間隙。控制單元(100)通過供應更多的流體進行補償,以增加軸承的承載能力和剛度。這表示壓力和流體流量之間的正斜率,其導致理想的性能,並且這是經由控制單元(100)實現的。Furthermore, variable flow resistance is achieved via the clearance (110) formed by the circular flat membrane (102) and the annular boss (104). Clearance (110) is optimized for best performance at a given operating supply pressure of 25 bar. The cross-section of the clearance (110) is determined by the amount of membrane deformation. The higher the deformation of the membrane, the smaller the clearance cross-sectional area. The pressure differential across the circular flat membrane (102) helps control the amount of deformation of the circular flat membrane (102) and thereby the clearance (110). When the bearing clearance changes, the thin limiting clearance in the variable flow resistance of the control unit (100) changes to compensate for the change in clearance. An increase in load will increase the oil chamber pressure, thereby reducing the bearing film clearance. The control unit (100) compensates by supplying more fluid to increase the bearing capacity and stiffness. This represents a positive slope between pressure and fluid flow, which results in ideal performance, and this is achieved via the control unit (100).

隨著油腔壓力增加,流量控制單元(100)使用可變限流器引起流量的同時增加。這有助於保持軸承間隙高度以獲得足夠的剛度,從而使流體靜壓軸承系統(200)可以提供所需的精度和準確性。As the oil chamber pressure increases, the flow control unit (100) uses a variable flow restrictor to cause a simultaneous increase in flow. This helps maintain bearing clearance height for sufficient stiffness so that the hydrostatic bearing system (200) can provide the required precision and accuracy.

此外,圓形平坦膜(102)的厚度和限制間隙可用於控制可變流阻的性能。圓形平坦膜(102)易於安裝和固定。該設計易於製造和實施。Additionally, the thickness of the circular flat membrane (102) and the limiting gap can be used to control the performance of the variable flow resistance. The round flat membrane (102) is easy to install and secure. The design is easy to manufacture and implement.

流量控制單元(100)的模型已在實驗室中使用流體靜壓軸承測試裝備進行了測試。輸出性能顯示當負載增加時流量的增加,該負載增加了油腔壓力並且傾向於增加軸承槽的液流流阻,並且流體靜壓軸承薄膜厚度將開始減小。這可以通過由外部流量控制機構增加流量來防止。使用隔膜降低軸承槽的液流流阻將有助於保持恒定的薄膜厚度並實現期望的性能。A model of the flow control unit (100) was tested in the laboratory using a hydrostatic bearing test rig. The output performance shows an increase in flow when the load increases, which increases the oil chamber pressure and tends to increase the fluid flow resistance of the bearing groove, and the hydrostatic bearing film thickness will begin to decrease. This can be prevented by increasing the flow rate by an external flow control mechanism. Using a diaphragm to reduce the resistance to fluid flow in the bearing groove will help maintain a constant film thickness and achieve the desired performance.

圖2是根據本發明公開的實施方案的流體靜壓軸承系統(200)的示意圖。流體靜壓軸承系統(200)包括液壓動力機組(214)、油池(202)、卸壓閥(204)、泵(206)、馬達(208)、蓄能器(210)、過濾器(212)和軸承槽(216)和流量控制單元(100)。液壓動力機組(214)用於對油加壓,油產生供應壓力(Ps)。加壓的油被供應到具有固定流阻(106)和可變流阻(102)的流量控制單元(100)。油通過流量控制單元(100)並前進到產生油腔壓力(Pr)的油腔槽(112)。Figure 2 is a schematic diagram of a hydrostatic bearing system (200) in accordance with an embodiment disclosed herein. The hydrostatic bearing system (200) includes a hydraulic power unit (214), an oil pool (202), a pressure relief valve (204), a pump (206), a motor (208), an accumulator (210), and a filter (212). ) and bearing groove (216) and flow control unit (100). The hydraulic power unit (214) is used to pressurize the oil, which generates supply pressure (Ps). Pressurized oil is supplied to a flow control unit (100) with fixed flow resistance (106) and variable flow resistance (102). The oil passes through the flow control unit (100) and proceeds to the oil chamber tank (112) where the oil chamber pressure (Pr) is generated.

圖3是串聯連接並組裝為單個單元的多個流量控制單元(100)的橫剖視圖,該單個單元連接到流體靜壓軸承系統(200)。已經結合圖1和圖2解釋了流量控制單元(100)的佈置和功能。Figure 3 is a cross-sectional view of a plurality of flow control units (100) connected in series and assembled into a single unit connected to a hydrostatic bearing system (200). The arrangement and functionality of the flow control unit (100) have been explained in conjunction with Figures 1 and 2.

流體靜壓軸承系統(200)的承載能力和剛度取決於流量控制單元(100)的固定流阻。毛細管限流器用作固定限流器(106),並且固定限流器(106)的參數主要是毛細管的直徑和毛細管的長度。The load carrying capacity and stiffness of the hydrostatic bearing system (200) depend on the fixed flow resistance of the flow control unit (100). The capillary flow restrictor is used as a fixed flow restrictor (106), and the parameters of the fixed flow restrictor (106) are mainly the diameter of the capillary tube and the length of the capillary tube.

圖4是根據本發明公開的實施方案的流體靜壓軸承薄膜厚度控制器(400)的橫剖視圖。在一個實施方案中,流體靜壓軸承薄膜厚度控制器(400)包括被構造成在流體靜壓軸承薄膜厚度控制器(400)中提供固定流阻的固定限流器(402)。固定限流器(402)與可變限流器(404)串聯連接。可變限流器(404)被構造成在流體靜壓軸承薄膜厚度控制器(400)中提供可變流阻,其中可變限流器(404)與油腔槽(410)成一直線連接。Figure 4 is a cross-sectional view of a hydrostatic bearing film thickness controller (400) in accordance with a disclosed embodiment of the present invention. In one embodiment, the hydrostatic bearing film thickness controller (400) includes a fixed flow restrictor (402) configured to provide a fixed flow resistance in the hydrostatic bearing film thickness controller (400). The fixed flow limiter (402) and the variable flow limiter (404) are connected in series. A variable flow restrictor (404) is configured to provide variable flow resistance in the hydrostatic bearing film thickness controller (400), wherein the variable flow restrictor (404) is in-line with the oil chamber sump (410).

此外,固定流阻具有毛細管限流器的幾何形狀。該可變流阻包括可變形並由此主動控制流量的幾何形狀。可變限流器的幾何形狀由圓柱形管隔膜(406)提供。使用毛細管系統建模的固定限流器(402)與圓柱形管隔膜(406)的可變流阻串聯連接,以跨圓柱形管隔膜(406)產生壓力梯度。Additionally, fixed flow resistance has the geometry of a capillary flow restrictor. The variable flow resistance includes geometries that deform and thereby actively control flow. The variable flow restrictor geometry is provided by a cylindrical tube diaphragm (406). A fixed flow restrictor (402) modeled using a capillary system is connected in series with a variable flow resistance of the cylindrical tube diaphragm (406) to create a pressure gradient across the cylindrical tube diaphragm (406).

圓柱形管隔膜(406)的設計使得跨圓柱形管隔膜(406)的應力變化被減至最小。圓柱形管隔膜(406)的長度(411)被設計為具有可變厚度以改善其彎曲特性。該圓柱形管隔膜(406)在圓筒(414)的邊緣上具有較小橫截面厚度(412),該橫截面厚度漸縮並增加以在另一圓筒(413)的中間部分形成較厚的橫截面。圓柱形管隔膜(406)被設計成使得變形更接近於圓柱形管隔膜(406)的期望的平均偏轉,而不是沿其長度具有不均勻的變形。管隔膜(406)內側上的供應壓力導致管隔膜(406)朝向薄限制遊隙(408)凸出。薄限制遊隙(408)直接連接到軸承的油腔槽(410),隨著進入的油腔壓力變化而變化。管隔膜(406)的偏轉允許更多流體進入加載的油腔槽,從而調節剛度和流體靜壓系統薄膜間隙厚度。當軸承間隙發生變化時,可變流阻中的薄限制遊隙(408)(即環形凸台間隙)改變以補償間隙的變化。負載的增加會增加油腔壓力,從而減小軸承薄膜間隙。流體靜壓軸承薄膜厚度控制器(400)通過供應更多的流體進行補償,以增加軸承的承載能力和剛度。這表示壓力和流體流量之間的正斜率,其導致理想的性能,並且這是經由流體靜壓軸承薄膜厚度控制器(400)實現的。The design of the cylindrical tube diaphragm (406) is such that stress changes across the cylindrical tube diaphragm (406) are minimized. The length (411) of the cylindrical tube diaphragm (406) is designed with variable thickness to improve its bending characteristics. The cylindrical tube diaphragm (406) has a smaller cross-sectional thickness (412) on the edge of the cylinder (414) that tapers and increases to form a thicker middle portion of the other cylinder (413) cross section. The cylindrical tube diaphragm (406) is designed such that the deformation is closer to the desired average deflection of the cylindrical tube diaphragm (406) rather than having uneven deformation along its length. Supply pressure on the inside of the tube diaphragm (406) causes the tube diaphragm (406) to bulge toward the thin limiting clearance (408). Thin limited clearance (408) is directly connected to the bearing's oil chamber groove (410) and changes as the incoming oil chamber pressure changes. Deflection of the tube diaphragm (406) allows more fluid to enter the loaded oil chamber trough, thereby adjusting the stiffness and hydrostatic system film gap thickness. When the bearing clearance changes, the thin limiting clearance (408) in the variable flow resistance (i.e., the annular boss clearance) changes to compensate for the change in clearance. An increase in load will increase the oil chamber pressure, thereby reducing the bearing film clearance. The hydrostatic bearing film thickness controller (400) compensates by supplying more fluid to increase the bearing's load carrying capacity and stiffness. This represents a positive slope between pressure and fluid flow, which results in ideal performance, and this is achieved via the hydrostatic bearing film thickness controller (400).

可變厚度減小了在保持平均偏轉恒定時可獲得的最大偏轉,因此其可以減小最大間隙而不會阻塞流體通道,從而實現平均間隙厚度的更大百分比。The variable thickness reduces the maximum deflection that can be achieved while keeping the average deflection constant, so it can reduce the maximum gap without blocking the fluid passage, allowing for a greater percentage of the average gap thickness.

管隔膜(406)固定在薄圓形狹槽或薄限制間隙周圍,並且與平坦膜相比具有許多優點,因為管隔膜(406)可以容易地附接,但是平坦隔膜需要壓配合以在流體靜壓軸承薄膜厚度控制器(400)的組件中保持在膜的邊緣。流體的流量取決於供應壓力和油腔壓力之間的壓力差以及限制遊隙的液流流阻。遊隙的液流流阻由限制間隙的變化控制,該限制間隙的變化是由固定流阻引起的管隔膜的偏轉引起的。Tube diaphragms (406) are fixed around thin circular slots or thin restricted gaps and have many advantages over flat diaphragms because tube diaphragms (406) can be easily attached, but flat diaphragms require a press fit to perform hydrostatic A pressure bearing is held within the assembly of the film thickness controller (400) at the edge of the film. The flow rate of the fluid depends on the pressure difference between the supply pressure and the oil chamber pressure and the flow resistance that limits the clearance. The liquid flow resistance of the clearance is controlled by changes in the limiting gap caused by the deflection of the tube diaphragm caused by the fixed flow resistance.

流體靜壓軸承薄膜厚度控制器(400)已經在實驗室製造的單槽流體靜壓軸承測試裝備中進行了測試,在該測試裝備中,隨著軸承槽的液流流阻而趨於增加的油腔壓力是變化的。然後,流體靜壓軸承薄膜厚度開始減小,這可以通過經由外部流量控制機構(即管隔膜)增加流量來防止,以減小將保持恒定薄膜厚度的軸承槽的液流流阻。The hydrostatic bearing film thickness controller (400) has been tested in a laboratory-fabricated single-slot hydrostatic bearing test rig where the fluid flow resistance of the bearing slots tends to increase. The oil chamber pressure changes. The hydrostatic bearing film thickness then begins to decrease, which can be prevented by increasing the flow rate via an external flow control mechanism (i.e. a tube diaphragm) to reduce the resistance to fluid flow in the bearing groove which will maintain a constant film thickness.

可以使用在至少一個硬件設備上運行並執行網絡管理功能以控制元件的至少一個軟件程序來實現本發明的實施方案。Embodiments of the present invention may be implemented using at least one software program that runs on at least one hardware device and performs network management functions to control elements.

具體實施方案的上述描述將充分揭示本發明的實施方案的一般性質,使得在不脫離一般概念的情況下,其他人可通過應用當前知識容易地修改和/或調整此類具體實施方案以用於各種應用,並且因此此類調整和修改應當且旨在包含在所公開的實施方案的等效物的含義和範圍內。應當理解,本發明中採用的措辭或術語是為了描述的目的,而不是為了限制。因此,儘管已經根據優選實施方案描述了本發明的實施方案,但是本發明所屬技術領域中具有通常知識者將認識到,本發明的實施方案可通過在本發明所描述的實施方案的精神和範圍內的修改而被實現。The foregoing description of specific embodiments will sufficiently disclose the general nature of embodiments of the invention such that others, by applying current knowledge, may readily modify and/or adapt such specific embodiments for use without departing from the general concepts. various applications, and therefore such adaptations and modifications should and are intended to be included within the meaning and scope of equivalents to the disclosed embodiments. It is to be understood that the phraseology or terminology employed herein is for the purpose of description and not of limitation. Accordingly, although embodiments of the invention have been described in terms of preferred embodiments, those of ordinary skill in the art to which this invention pertains will recognize that the embodiments of the invention can be practiced within the spirit and scope of the described embodiments of the invention. implemented through modifications within.

綜上所述,本發明所揭露之技術手段確能有效解決習知等問題,並達致預期之目的與功效,且申請前未見諸於刊物、未曾公開使用且具長遠進步性,誠屬專利法所稱之發明無誤,爰依法提出申請,懇祈  鈞上惠予詳審並賜准發明專利,至感德馨。In summary, the technical means disclosed in the present invention can indeed effectively solve the problems of conventional knowledge and achieve the expected purposes and effects. They have not been published in publications or publicly used before the application and are of long-term progress. They are truly worthy of the title. The invention described in the Patent Law is correct, and I submit the application in accordance with the law. I sincerely pray that Jun will review it carefully and grant an invention patent. I am deeply grateful.

惟以上所述者,僅為本發明之數種較佳實施例,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明書內容所作之等效變化與修飾,皆應仍屬本發明專利涵蓋之範圍內。However, the above are only several preferred embodiments of the present invention, and should not be used to limit the scope of the present invention. That is, all equivalent changes and modifications made based on the patent scope of the present invention and the content of the invention specification are It should still fall within the scope of the patent of this invention.

〔本發明〕 100:流量控制單元 102:圓形平坦膜 104:環形凸台 106:固定限流器 108:可變限流器 110:遊隙 112:油腔槽 200:流體靜壓軸承系統 202:油池 204:卸壓閥 206:泵 208:馬達 210:蓄能器 212:過濾器 214:液壓動力機組 216:軸承槽 400:流體靜壓軸承薄膜厚度控制器 402:固定限流器 404:可變限流器 406:圓柱形管隔膜 408:薄限制遊隙 410:油腔槽 411:長度 412:較小橫截面厚度 413:另一圓筒 414:圓筒[Invention] 100:Flow control unit 102: Round flat film 104: Annular boss 106: Fixed current limiter 108:Variable current limiter 110: Clearance 112: Oil chamber groove 200:Hydrostatic Bearing System 202:Youchi 204: Pressure relief valve 206:Pump 208:Motor 210: Accumulator 212:Filter 214:Hydraulic power unit 216:Bearing groove 400: Hydrostatic Bearing Film Thickness Controller 402: Fixed current limiter 404: Variable current limiter 406: Cylindrical tube diaphragm 408: Thin limit clearance 410: Oil chamber groove 411:Length 412: Smaller cross-sectional thickness 413:Another cylinder 414:Cylinder

[圖1]是根據本發明公開的實施方案的用於在流體靜壓軸承系統中保持恒定流體薄膜間隙的流量控制單元的橫剖視圖; [圖2]是根據本發明公開的實施方案的流體靜壓軸承系統的示意圖; [圖3]是根據本發明公開的實施方案的串聯連接並組裝為單個單元的多個流量控制單元的橫剖視圖,該單個單元連接到流體靜壓軸承系統; [圖4]是根據本發明公開的實施方案的流體靜壓軸承薄膜厚度控制器的橫剖視圖。[Fig. 1] is a cross-sectional view of a flow control unit for maintaining a constant fluid film gap in a hydrostatic bearing system according to an embodiment disclosed in the present invention; [Fig. 2] is a schematic diagram of a hydrostatic bearing system according to an embodiment disclosed in the present invention; [Fig. 3] is a cross-sectional view of a plurality of flow control units connected in series and assembled into a single unit connected to a hydrostatic bearing system according to an embodiment disclosed in the present invention; [Fig. 4] is a cross-sectional view of the hydrostatic bearing film thickness controller according to the disclosed embodiment of the present invention.

102:圓形平坦膜 102: Round flat film

104:環形凸台 104: Annular boss

106:固定限流器 106: Fixed current limiter

108:可變限流器 108:Variable current limiter

110:遊隙 110: Clearance

112:油腔槽 112: Oil chamber groove

Claims (13)

一種用於在流體靜壓軸承系統(200)中保持恒定流體薄膜間隙的流量控制單元(100),所述流量控制單元(100)包括:圓形平坦膜(102);環形凸台(104);固定限流器(106),所述固定限流器被構造成在所述流量控制單元(100)中提供固定流阻,其中所述固定限流器(106)與可變限流器(108)串聯連接,所述可變限流器(108),所述可變限流器被構造成在所述流量控制單元(100)中提供可變流阻,其中所述可變限流器(108)與油腔槽(112)成一直線連接,其中所述固定流阻具有毛細管限流器的幾何形狀,其中所述可變流阻包括幾何形狀,所述幾何形狀變形以主動控制所述流體靜壓軸承系統(200)中的流量,其中所述幾何形狀由用於控制膜與環形凸台(104)之間的間隙之所述圓形平坦膜(102)提供;其中使用由所述圓形平坦膜(102)和所述環形凸台(104)產生的遊隙(110)提供所述可變流阻;以及該流體靜壓軸承系統(200)包括:油池(202);卸壓閥(204);泵(206);馬達(208); 蓄能器(210);過濾器(212);液壓動力機組(214);軸承槽(216);流量控制單元(100)。 A flow control unit (100) for maintaining a constant fluid film gap in a hydrostatic bearing system (200), the flow control unit (100) includes: a circular flat membrane (102); an annular boss (104) ; a fixed flow restrictor (106) configured to provide a fixed flow resistance in the flow control unit (100), wherein the fixed flow restrictor (106) is combined with a variable flow restrictor (106); 108) Connected in series, the variable flow restrictor (108) configured to provide variable flow resistance in the flow control unit (100), wherein the variable flow restrictor (108) is in line with the oil chamber groove (112), wherein the fixed flow resistance has the geometry of a capillary flow restrictor, and wherein the variable flow resistance includes a geometry that deforms to actively control the Flow in a hydrostatic bearing system (200), wherein the geometry is provided by the circular flat membrane (102) for controlling the gap between the membrane and the annular boss (104); wherein using the The clearance (110) generated by the circular flat membrane (102) and the annular boss (104) provides the variable flow resistance; and the hydrostatic bearing system (200) includes: an oil pool (202); Pressure valve (204); pump (206); motor (208); Accumulator (210); filter (212); hydraulic power unit (214); bearing groove (216); flow control unit (100). 如請求項1所述之流量控制單元(100),其中所述固定流阻使得能夠跨所述圓形平坦膜(102)形成必要的壓力差。 The flow control unit (100) of claim 1, wherein the fixed flow resistance enables a necessary pressure difference to be formed across the circular flat membrane (102). 如請求項1所述之流量控制單元(100),其中所述固定流阻保持跨所述圓形平坦膜(102)的壓力差的正確梯度。 The flow control unit (100) of claim 1, wherein said fixed flow resistance maintains a correct gradient of pressure differential across said circular flat membrane (102). 如請求項1所述之流量控制單元(100),其中所述遊隙(110)的橫截面由所述圓形平坦膜(102)的變形決定。 The flow control unit (100) of claim 1, wherein the cross section of the clearance (110) is determined by the deformation of the circular flat membrane (102). 如請求項1所述之流量控制單元(100),其中跨所述圓形平坦膜(102)的壓力差控制所述圓形平坦膜(102)中的變形量。 The flow control unit (100) of claim 1, wherein the pressure difference across the circular flat membrane (102) controls the amount of deformation in the circular flat membrane (102). 如請求項1所述之流量控制單元(100),其中所述固定流阻阻塞流體流,以便控制大流量的所述流體流流過所述可變限流器(108)。 The flow control unit (100) of claim 1, wherein the fixed flow resistance blocks the fluid flow so as to control a large flow of the fluid flow through the variable flow restrictor (108). 如請求項1所述之流量控制單元(100),其中所述遊隙(110)以特定的供應壓力提供。 The flow control unit (100) of claim 1, wherein the clearance (110) is provided at a specific supply pressure. 如請求項1所述之流體靜壓軸承系統(200),其中所述固定流阻使得能夠跨所述圓形平坦膜(102)形成必要的壓力差。 The hydrostatic bearing system (200) of claim 1, wherein the fixed flow resistance enables a necessary pressure difference to be established across the circular flat membrane (102). 如請求項1所述之流體靜壓軸承系統(200),其中所述固定流阻保持跨所述圓形平坦膜(102)的壓力差的正確梯度。 The hydrostatic bearing system (200) of claim 1, wherein said fixed flow resistance maintains a correct gradient of pressure differential across said circular flat membrane (102). 如請求項1所述之流體靜壓軸承系統(200),其中所述遊隙(110)的橫截面由所述圓形平坦膜(102)的變形決定。 The hydrostatic bearing system (200) of claim 1, wherein the cross-section of the clearance (110) is determined by the deformation of the circular flat membrane (102). 如請求項1所述之流體靜壓軸承系統(200),其中跨所述圓形平坦膜(102)的壓力差控制所述圓形平坦膜(102)中的變形量。 The hydrostatic bearing system (200) of claim 1, wherein the pressure difference across the circular flat membrane (102) controls the amount of deformation in the circular flat membrane (102). 如請求項1所述之流體靜壓軸承系統(200),其中所述固定流阻阻塞流體流,以便控制大流量的所述流體流流過所述可變限流器(108)。 The hydrostatic bearing system (200) of claim 1, wherein the fixed flow resistance blocks fluid flow to control a large flow of the fluid flow through the variable flow restrictor (108). 如請求項1所述之流體靜壓軸承系統(200),其中所述遊隙(110)以特定的供應壓力提供。 The hydrostatic bearing system (200) of claim 1, wherein the clearance (110) is provided at a specific supply pressure.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6276491B1 (en) * 1997-08-29 2001-08-21 Schoenfeld Robert Regulator for adjusting the fluid flow in a hydrostatic or aerostatic device
US20120033908A1 (en) * 2009-04-20 2012-02-09 Borgwarner Inc. Insulating and damping sleeve for a rolling element bearing cartridge
CN203009583U (en) * 2012-12-28 2013-06-19 扬州锻压机床股份有限公司 Precise hydrostatic bearing lubricating oil fine tuning throttle structure
CN103629235A (en) * 2012-08-21 2014-03-12 财团法人工业技术研究院 Combined variable-resistance hydrostatic slider module
CN106763882A (en) * 2017-03-08 2017-05-31 齐鲁工业大学 A kind of adjustable single-sided film flow controller of precompressed

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3112764A (en) * 1960-10-28 1963-12-03 Bendix Corp Flow-regulating valve
TWI391576B (en) * 2009-05-13 2013-04-01 Ind Tech Res Inst Self-compensating hydrostatic planar bearing device and the method thereof
JP2013087875A (en) * 2011-10-19 2013-05-13 Jtekt Corp Variable throttle type hydrostatic bearing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6276491B1 (en) * 1997-08-29 2001-08-21 Schoenfeld Robert Regulator for adjusting the fluid flow in a hydrostatic or aerostatic device
US20120033908A1 (en) * 2009-04-20 2012-02-09 Borgwarner Inc. Insulating and damping sleeve for a rolling element bearing cartridge
CN103629235A (en) * 2012-08-21 2014-03-12 财团法人工业技术研究院 Combined variable-resistance hydrostatic slider module
CN203009583U (en) * 2012-12-28 2013-06-19 扬州锻压机床股份有限公司 Precise hydrostatic bearing lubricating oil fine tuning throttle structure
CN106763882A (en) * 2017-03-08 2017-05-31 齐鲁工业大学 A kind of adjustable single-sided film flow controller of precompressed

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