TW202105698A - Optical image recognition device and a manufacturing method thereof - Google Patents

Optical image recognition device and a manufacturing method thereof Download PDF

Info

Publication number
TW202105698A
TW202105698A TW108127802A TW108127802A TW202105698A TW 202105698 A TW202105698 A TW 202105698A TW 108127802 A TW108127802 A TW 108127802A TW 108127802 A TW108127802 A TW 108127802A TW 202105698 A TW202105698 A TW 202105698A
Authority
TW
Taiwan
Prior art keywords
image sensor
filter
optical
substrate
recognition device
Prior art date
Application number
TW108127802A
Other languages
Chinese (zh)
Other versions
TWI696280B (en
Inventor
張俊德
劉忠武
郭毓弼
林信誠
Original Assignee
大陸商業泓科技(成都)有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大陸商業泓科技(成都)有限公司 filed Critical 大陸商業泓科技(成都)有限公司
Application granted granted Critical
Publication of TWI696280B publication Critical patent/TWI696280B/en
Publication of TW202105698A publication Critical patent/TW202105698A/en

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14618Containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/1462Coatings
    • H01L27/14621Colour filter arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14685Process for coatings or optical elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14687Wafer level processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0203Containers; Encapsulations, e.g. encapsulation of photodiodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0232Optical elements or arrangements associated with the device
    • H01L31/02325Optical elements or arrangements associated with the device the optical elements not being integrated nor being directly associated with the device

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Image Input (AREA)

Abstract

The invention discloses an optical image recognition device and a manufacturing method thereof. Firstly, a substrate provided with a plurality of conductive pads is provided. Next, an image sensor is formed on the substrate. Then, an optical collimator having a plurality of through holes penetrating through itself is formed on the image sensor. Then, a first high temperature resistant glue is formed on the edge of the top of the optical collimator, and a filter is formed on the first high temperature resistant glue, and the through holes are shielded by the filter, and the periphery of the image sensor is electrically connected to the conductive pads through conductive wires. The plurality of conductive wires are respectively electrically connected to the conductive pads. Finally, an encapsulant is formed on the periphery of the image sensor and the substrate to cover the sidewalls of the optical collimator, the first high temperature resistant glue and the filter, and encapsulate the conductive wire and the conductive pad to avoid falling particles into the through holes and reducing the light receiving efficiency.

Description

光學式影像辨識裝置及其製作方法Optical image recognition device and manufacturing method thereof

本發明係關於一種影像辨識技術,且特別關於一種光學式影像辨識裝置及其製作方法。The present invention relates to an image recognition technology, and particularly relates to an optical image recognition device and a manufacturing method thereof.

通常,指紋具有許多特徵,包括脊,谷和更精細的點。更精細的點包括脊分叉的分叉和脊結束的終點。指紋可以被視為獨特的生物識別數據,因為其特徵分佈是不同的,每個人不能具有相同的指紋。因此,在安全系統中使用諸如指紋之類的生物識別數據可以確保對需要安全性及可移動資產等的區域進行有效和準確的保護。用於獲取指紋圖像的指紋識別裝置一般可以分為電容型裝置和光學型裝置。針對全螢幕面板,原先能容納指紋辨識的螢幕之下方區塊也受到擠壓,為了美觀及周邊配件之市場考量,智慧型手機廠自然不希望將指紋放置於螢幕之背面,因此光學指紋識別裝置是未來趨勢。在傳統技術中,若欲製作光學指紋辨識裝置時,會先完成互補式金氧半(CMOS)封裝製程後,再貼合一紅外線濾光片(IR-Cut filter),以遮蔽光路。然而,因為在互補式金氧半封裝製程中有清洗製程與切割製程,且此些製程都是水製程,非常容易有粒子掉入光路中,造成光路阻塞,使良率小於50%,導致光無法正常接收。Generally, fingerprints have many features, including ridges, valleys, and finer points. The finer points include the bifurcation of the ridge bifurcation and the end point of the ridge end. Fingerprints can be regarded as unique biometric data, because their feature distribution is different, and everyone cannot have the same fingerprint. Therefore, the use of biometric data such as fingerprints in a security system can ensure effective and accurate protection of areas that require security and movable assets. Fingerprint recognition devices for acquiring fingerprint images can generally be classified into capacitive devices and optical devices. For the full-screen panel, the lower part of the screen that originally can accommodate fingerprint recognition is also squeezed. For aesthetics and market considerations of peripheral accessories, smartphone manufacturers naturally do not want to place fingerprints on the back of the screen, so optical fingerprint recognition devices It is the future trend. In traditional technology, if an optical fingerprint recognition device is to be manufactured, a complementary metal oxide semiconductor (CMOS) packaging process is completed first, and then an IR-Cut filter is attached to shield the light path. However, because there are cleaning processes and cutting processes in the complementary metal oxide semi-encapsulation process, and these processes are all water processes, it is very easy for particles to fall into the light path, causing the light path to be blocked, and the yield rate is less than 50%, resulting in light Cannot receive normally.

因此,本發明係在針對上述的困擾,提出一種光學式影像辨識裝置及其製作方法,以解決習知所產生的問題。Therefore, the present invention aims at solving the above-mentioned problems and proposes an optical image recognition device and a manufacturing method thereof to solve the problems caused by the prior art.

本發明的主要目的,在於提供一種光學式影像辨識裝置及其製作方法,其係先貼合濾光片,以遮蔽光學準直器之作為光路之通孔,再利用封裝膠體完成封裝製程,進而避免光路受到互補式金氧半(CMOS)封裝製程中有粒子掉入光路中,降低光接收效率。The main purpose of the present invention is to provide an optical image recognition device and a manufacturing method thereof. The optical filter is first attached to shield the through hole of the optical collimator as the optical path, and then the packaging gel is used to complete the packaging process, and then Prevent the light path from falling into the light path during the complementary metal-oxide-semiconductor (CMOS) packaging process, reducing the light receiving efficiency.

為達上述目的,本發明提供一種光學式影像辨識裝置,包含一基板、一影像感測器、一光學準直器(collimator)、一第一耐高溫膠、一濾光片與一封裝膠體。基板之周圍設有複數個導電接墊,影像感測器設於基板上,影像感測器之周圍透過複數條導線分別電性連接所有導電接墊,光學準直器具有複數個貫穿自身之通孔,光學準直器設於影像感測器上。第一耐高溫膠設於光學準直器之頂部之邊緣,濾光片設於第一耐高溫膠上,並遮蔽所有通孔。封裝膠體設於影像感測器與基板之周圍上,並覆蓋光學準直器、第一耐高溫膠與濾光片之側壁,且包覆所有導線與所有導電接墊。To achieve the above objective, the present invention provides an optical image recognition device, which includes a substrate, an image sensor, an optical collimator, a first high-temperature adhesive, a filter, and an encapsulation gel. A plurality of conductive pads are arranged around the substrate, and the image sensor is arranged on the substrate. The surrounding of the image sensor is electrically connected to all the conductive pads through a plurality of wires. The optical collimator has a plurality of passes through itself. Hole, the optical collimator is arranged on the image sensor. The first high temperature resistant glue is arranged on the edge of the top of the optical collimator, and the filter is arranged on the first high temperature resistant glue, and all the through holes are covered. The packaging glue is arranged on the periphery of the image sensor and the substrate, and covers the optical collimator, the first high temperature resistant glue and the side walls of the filter, and covers all the wires and all the conductive pads.

在本發明之一實施例中,光學式影像辨識裝置更包含一軟性印刷電路板(FPC),其係設於基板之底部。In an embodiment of the present invention, the optical image recognition device further includes a flexible printed circuit board (FPC), which is disposed on the bottom of the substrate.

在本發明之一實施例中,光學式影像辨識裝置更包含一發光模組與一第二耐高溫膠,發光模組透過第二耐高溫膠設於封裝膠體上,並遮蔽濾光片。In an embodiment of the present invention, the optical image recognition device further includes a light-emitting module and a second high-temperature resistant adhesive. The light-emitting module is disposed on the packaging plastic through the second high-temperature resistant adhesive and shields the filter.

在本發明之一實施例中,發光模組為有機發光二極體(OLED)模組。In an embodiment of the present invention, the light emitting module is an organic light emitting diode (OLED) module.

在本發明之一實施例中,影像感測器為互補式金氧半(CMOS)影像感測器,濾光片為紅外線濾光片(IR-Cut filter)。In an embodiment of the present invention, the image sensor is a complementary metal oxide semiconductor (CMOS) image sensor, and the filter is an IR-Cut filter.

在本發明之一實施例中,光學準直器為微機電(MEMS)結構,所有通孔為矽通孔(TSV)。In an embodiment of the present invention, the optical collimator is a micro-electromechanical (MEMS) structure, and all through holes are through silicon vias (TSV).

在本發明之一實施例中,影像感測器、光學準直器、第一耐高溫膠與濾光片之總厚度等於封裝膠體之厚度。In an embodiment of the present invention, the total thickness of the image sensor, the optical collimator, the first high temperature resistant glue and the filter is equal to the thickness of the packaging glue.

本發明亦提供一種光學式影像辨識裝置之製作方法,首先,提供一基板,其周圍設有複數個導電接墊。接著,形成一影像感測器於基板上。再來,形成具有複數個貫穿自身之通孔之一光學準直器(collimator)於影像感測器上。形成完後,形成一第一耐高溫膠於光學準直器之頂部之邊緣。接著,形成一濾光片於第一耐高溫膠上,並利用濾光片遮蔽所有通孔。然後,在影像感測器之周圍透過複數條導線分別電性連接所有導電接墊。最後,形成一封裝膠體於影像感測器與基板之周圍上,並利用封裝膠體覆蓋光學準直器、第一耐高溫膠與濾光片之側壁,且包覆所有導線與所有導電接墊。The present invention also provides a manufacturing method of an optical image recognition device. First, a substrate is provided with a plurality of conductive pads around it. Then, an image sensor is formed on the substrate. Furthermore, an optical collimator (collimator) having a plurality of through holes penetrating through itself is formed on the image sensor. After forming, form a first high temperature resistant glue on the edge of the top of the optical collimator. Then, a filter is formed on the first high temperature resistant adhesive, and all the through holes are shielded by the filter. Then, all the conductive pads are electrically connected through a plurality of wires around the image sensor. Finally, an encapsulant is formed on the periphery of the image sensor and the substrate, and the encapsulant is used to cover the sidewalls of the optical collimator, the first heat-resistant adhesive and the filter, and cover all the wires and all the conductive pads.

在本發明之一實施例中,在形成封裝膠體於影像感測器與基板之周圍上之步驟後,形成一軟性印刷電路板(FPC)於基板之底部。In one embodiment of the present invention, after the step of forming the encapsulant on the periphery of the image sensor and the substrate, a flexible printed circuit board (FPC) is formed on the bottom of the substrate.

在本發明之一實施例中,在形成軟性印刷電路板於基板之底部之步驟後,透過一第二耐高溫膠形成一發光模組於封裝膠體上,並利用發光模組遮蔽濾光片。In an embodiment of the present invention, after the step of forming the flexible printed circuit board on the bottom of the substrate, a light-emitting module is formed on the encapsulating body through a second high temperature resistant adhesive, and the light-emitting module is used to shield the filter.

茲為使 貴審查委員對本發明的結構特徵及所達成的功效更有進一步的瞭解與認識,謹佐以較佳的實施例圖及配合詳細的說明,說明如後:In order to make your reviewer have a better understanding and understanding of the structural features of the present invention and the achieved effects, the preferred embodiment diagrams and detailed descriptions are provided here. The description is as follows:

本發明之實施例將藉由下文配合相關圖式進一步加以解說。盡可能的,於圖式與說明書中,相同標號係代表相同或相似構件。於圖式中,基於簡化與方便標示,形狀與厚度可能經過誇大表示。可以理解的是,未特別顯示於圖式中或描述於說明書中之元件,為所屬技術領域中具有通常技術者所知之形態。本領域之通常技術者可依據本發明之內容而進行多種之改變與修改。The embodiments of the present invention will be further explained by following relevant drawings. As far as possible, in the drawings and the description, the same reference numerals represent the same or similar components. In the drawings, the shape and thickness may be exaggerated based on simplification and convenient labeling. It can be understood that the elements not specifically shown in the drawings or described in the specification are in the form known to those skilled in the art. Those skilled in the art can make various changes and modifications based on the content of the present invention.

當一個元件被稱為『在…上』時,它可泛指該元件直接在其他元件上,也可以是有其他元件存在於兩者之中。相反地,當一個元件被稱為『直接在』另一元件,它是不能有其他元件存在於兩者之中間。如本文所用,詞彙『及/或』包含了列出的關聯項目中的一個或多個的任何組合。When an element is called "on", it can generally mean that the element is directly on other elements, or there can be other elements existing in both. Conversely, when an element is called "directly in" another element, it cannot have other elements in between. As used herein, the term "and/or" includes any combination of one or more of the listed related items.

於下文中關於“一個實施例”或“一實施例”之描述係指關於至少一實施例內所相關連之一特定元件、結構或特徵。因此,於下文中多處所出現之“一個實施例”或 “一實施例”之多個描述並非針對同一實施例。再者,於一或多個實施例中之特定構件、結構與特徵可依照一適當方式而結合。The following description of "one embodiment" or "an embodiment" refers to at least one specific element, structure, or feature related to the embodiment. Therefore, multiple descriptions of "one embodiment" or "an embodiment" appearing in various places below are not directed to the same embodiment. Furthermore, specific components, structures, and features in one or more embodiments can be combined in an appropriate manner.

以下請參閱第1圖,並介紹本發明之光學式影像辨識裝置之第一實施例。光學式影像辨識裝置包含一基板10、複數個導電接墊12、一影像感測器14、複數條導線16、具有複數個貫穿自身之通孔17之一光學準直器(collimator)18、一第一耐高溫膠22、一濾光片24與一封裝膠體26,通孔17之孔徑例如為5微米(μm)。在第一實施例中,濾光片24係以紅外線濾光片(IR-Cut filter)為例,影像感測器14為互補式金氧半(CMOS)影像感測器,但本發明並不以此為限。此外,在本發明之某些實施例中,基板10可為印刷電路板(PCB)、陶瓷基板、聚酰亞胺(PI)基板、聚對苯二甲酸乙二醇酯(PET)基板或聚乙烯萘(PEN)基板。第一耐高溫膠22之材質可為矽芳炔樹脂(PSA)、矽膠、酚醛樹脂膠、耐溫壓克力膠、耐溫環氧膠或無機高溫膠,導線16之材質可為鋁、銀或銅,濾光片24之材質可為玻璃或塑膠,封裝膠體26之材質可為矽膠或環氧基樹脂。在本發明之某些實施例中,光學準直器18為微機電(MEMS)結構,所有通孔17為矽通孔(TSV)。Please refer to Figure 1 below and introduce the first embodiment of the optical image recognition device of the present invention. The optical image recognition device includes a substrate 10, a plurality of conductive pads 12, an image sensor 14, a plurality of wires 16, an optical collimator (collimator) 18 having a plurality of through holes 17 passing through itself, a The first high temperature resistant glue 22, a filter 24 and a packaging glue 26, the diameter of the through hole 17 is, for example, 5 microns (μm). In the first embodiment, the filter 24 is an infrared filter (IR-Cut filter) as an example, and the image sensor 14 is a complementary metal oxide semiconductor (CMOS) image sensor, but the present invention does not Limit this. In addition, in some embodiments of the present invention, the substrate 10 may be a printed circuit board (PCB), a ceramic substrate, a polyimide (PI) substrate, a polyethylene terephthalate (PET) substrate, or a poly(ethylene terephthalate) substrate. Vinyl naphthalene (PEN) substrate. The material of the first high temperature resistant adhesive 22 can be PSA, silicone, phenolic resin, temperature resistant acrylic, temperature resistant epoxy or inorganic high temperature adhesive. The material of the wire 16 can be aluminum or silver. Or copper, the material of the filter 24 can be glass or plastic, and the material of the encapsulant 26 can be silicon or epoxy resin. In some embodiments of the present invention, the optical collimator 18 is a microelectromechanical (MEMS) structure, and all the through holes 17 are through silicon vias (TSV).

基板10之周圍設有所有導電接墊12,影像感測器14設於基板10上,具體而言,即影像感測器14設於基板10之中央區域上。影像感測器14之周圍透過所有導線16分別電性連接所有導電接墊12。光學準直器18設於影像感測器14上,即光學準直器18設於影像感測器14之中央區域上。第一耐高溫膠22設於光學準直器18之頂部之邊緣,濾光片24設於第一耐高溫膠22上,即濾光片24位於所有通孔17之正上方,並遮蔽所有通孔17。封裝膠體26設於影像感測器14與基板10之周圍上,並覆蓋光學準直器18之側壁、第一耐高溫膠22之側壁與濾光片24之側壁,且包覆所有導線16與所有導電接墊12。影像感測器14、光學準直器18、第一耐高溫膠22與濾光片24之總厚度等於封裝膠體26之厚度,舉例來說,濾光片24之厚度為0.03~0.5毫米(mm)。由於封裝膠體26可以覆蓋濾光片24之側壁,代表在進行封裝製程之前,濾光片24已經形成在光學準直器18,以遮蔽作為光路之所有通孔17,以防止後續在進行互補式金氧半(CMOS)封裝製程中的水製程時,有粒子(particles)掉入通孔17中,降低光學式影像辨識裝置的光接收效率。All conductive pads 12 are provided around the substrate 10, and the image sensor 14 is provided on the substrate 10, specifically, the image sensor 14 is provided on the central area of the substrate 10. The surroundings of the image sensor 14 are electrically connected to all the conductive pads 12 through all the wires 16 respectively. The optical collimator 18 is disposed on the image sensor 14, that is, the optical collimator 18 is disposed on the central area of the image sensor 14. The first high temperature resistant glue 22 is arranged on the edge of the top of the optical collimator 18, and the filter 24 is arranged on the first high temperature resistant glue 22, that is, the filter 24 is located directly above all the through holes 17 and shields all the through holes.孔17. The encapsulant 26 is disposed on the periphery of the image sensor 14 and the substrate 10, and covers the side walls of the optical collimator 18, the side walls of the first high temperature resistant adhesive 22 and the side walls of the filter 24, and covers all the wires 16 and All conductive pads 12. The total thickness of the image sensor 14, the optical collimator 18, the first high temperature resistant adhesive 22, and the filter 24 is equal to the thickness of the encapsulant 26. For example, the thickness of the filter 24 is 0.03-0.5 millimeters (mm ). Since the encapsulant 26 can cover the side wall of the filter 24, it means that the filter 24 has been formed on the optical collimator 18 before the encapsulation process to shield all the through holes 17 as the optical path to prevent subsequent complementary operations. During the water process in the CMOS packaging process, particles fall into the through holes 17, reducing the light receiving efficiency of the optical image recognition device.

以下請參閱第2圖至第8圖,以介紹本發明之光學式影像辨識裝置之製作方法。首先,如第2圖所示,提供基板10,其周圍設有所有導電接墊12。接著,如第3圖所示,形成影像感測器14於基板10上。再來,如第4圖所示,形成具有所有通孔17之光學準直器18於影像感測器14上。形成完後,如第5圖所示,形成第一耐高溫膠22於光學準直器18之頂部之邊緣。接著,如第6圖所示,形成濾光片24於第一耐高溫膠22上,並利用濾光片24遮蔽所有通孔17。在形成濾光片24後,如第7圖所示,在影像感測器14之周圍透過所有導線16分別電性連接所有導電接墊12。最後,由於濾光片24已經遮蔽所有通孔17,以保護光路,故如第8圖所示,再形成封裝膠體26於影像感測器14與基板10之周圍上,並利用封裝膠體26覆蓋光學準直器18、第一耐高溫膠22與濾光片24之側壁,且包覆所有導線16與所有導電接墊12,以完成封裝製程。Please refer to FIGS. 2 to 8 below to introduce the manufacturing method of the optical image recognition device of the present invention. First, as shown in Figure 2, a substrate 10 is provided with all conductive pads 12 around it. Next, as shown in FIG. 3, the image sensor 14 is formed on the substrate 10. Furthermore, as shown in FIG. 4, an optical collimator 18 with all through holes 17 is formed on the image sensor 14. After the formation, as shown in FIG. 5, the first high temperature resistant glue 22 is formed on the edge of the top of the optical collimator 18. Next, as shown in FIG. 6, a filter 24 is formed on the first high temperature resistant adhesive 22, and all the through holes 17 are shielded by the filter 24. After the filter 24 is formed, as shown in FIG. 7, all the conductive pads 12 are electrically connected to the periphery of the image sensor 14 through all the wires 16 respectively. Finally, since the filter 24 has shielded all the through holes 17 to protect the light path, as shown in Fig. 8, an encapsulant 26 is formed on the periphery of the image sensor 14 and the substrate 10 and covered with the encapsulant 26 The sidewalls of the optical collimator 18, the first high temperature resistant adhesive 22 and the filter 24, and cover all the wires 16 and all the conductive pads 12, to complete the packaging process.

以下請參閱第9圖,並介紹本發明之光學式影像辨識裝置之第二實施例。第二實施例相較第一實施例更包含一軟性印刷電路板(FPC)28,其係設於基板10之底部。第二實施例與第一實施例具有相同之製作方法,並在形成封裝膠體26於影像感測器14與基板10之周圍上之步驟後,利用表面黏著技術(SMT)形成軟性印刷電路板28於基板10之底部。Please refer to FIG. 9 below and introduce the second embodiment of the optical image recognition device of the present invention. Compared with the first embodiment, the second embodiment further includes a flexible printed circuit board (FPC) 28, which is disposed on the bottom of the substrate 10. The second embodiment has the same manufacturing method as the first embodiment, and after the step of forming the encapsulant 26 on the periphery of the image sensor 14 and the substrate 10, the flexible printed circuit board 28 is formed by surface mount technology (SMT) At the bottom of the substrate 10.

以下請參閱第10圖,並介紹本發明之光學式影像辨識裝置之第三實施例。第三實施例相較第二實施例更包含一發光模組30與一第二耐高溫膠32。在本發明之某些實施例中,發光模組30為有機發光二極體(OLED)模組,第二耐高溫膠32之材質可為矽芳炔樹脂(PSA)、矽膠、酚醛樹脂膠、耐溫壓克力膠、耐溫環氧膠或無機高溫膠。發光模組30透過第二耐高溫膠32設於封裝膠體26上,即發光模組30位於濾光片24之正上方,並遮蔽濾光片24。第三實施例與第二實施例具有相同之製作方法,並在形成軟性印刷電路板28於基板10之底部之步驟後,透過第二耐高溫膠32形成發光模組30於封裝膠體26上,並利用發光模組30遮蔽濾光片24。Please refer to FIG. 10 below and introduce the third embodiment of the optical image recognition device of the present invention. Compared with the second embodiment, the third embodiment further includes a light emitting module 30 and a second high temperature resistant adhesive 32. In some embodiments of the present invention, the light-emitting module 30 is an organic light-emitting diode (OLED) module, and the material of the second high-temperature resistant adhesive 32 can be silyl alkyne (PSA), silicone, phenolic resin, Temperature resistant acrylic adhesive, temperature resistant epoxy adhesive or inorganic high temperature adhesive. The light-emitting module 30 is disposed on the packaging glue 26 through the second high-temperature resistant adhesive 32, that is, the light-emitting module 30 is located directly above the filter 24 and shields the filter 24. The third embodiment has the same manufacturing method as the second embodiment, and after the step of forming the flexible printed circuit board 28 on the bottom of the substrate 10, the light-emitting module 30 is formed on the encapsulant 26 through the second high-temperature adhesive 32. The light-emitting module 30 is used to shield the filter 24.

綜上所述,本發明先貼合濾光片,以遮蔽光學準直器之作為光路之通孔,再利用封裝膠體完成封裝製程,進而避免光路受到互補式金氧半(CMOS)封裝製程中有粒子掉入光路中,降低光接收效率。In summary, the present invention first attaches the filter to shield the through hole of the optical collimator as the optical path, and then uses the packaging compound to complete the packaging process, thereby avoiding the optical path from being subjected to the complementary metal oxide semiconductor (CMOS) packaging process Some particles fall into the light path, reducing the light receiving efficiency.

以上所述者,僅為本發明一較佳實施例而已,並非用來限定本發明實施之範圍,故舉凡依本發明申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本發明之申請專利範圍內。The above is only a preferred embodiment of the present invention, and is not used to limit the scope of implementation of the present invention. Therefore, all the shapes, structures, characteristics and spirits described in the scope of the patent application of the present invention are equally changed and modified. , Should be included in the scope of patent application of the present invention.

10:基板 12:導電接墊 14:影像感測器 16:導線 17:通孔 18:光學準直器 22:第一耐高溫膠 24:濾光片 26:封裝膠體 28:軟性印刷電路板 30:發光模組 32:第二耐高溫膠10: substrate 12: Conductive pad 14: Image sensor 16: wire 17: Through hole 18: Optical collimator 22: The first high temperature resistant adhesive 24: filter 26: Encapsulation colloid 28: Flexible printed circuit board 30: Light-emitting module 32: The second high temperature resistant adhesive

第1圖為本發明之光學式影像辨識裝置之第一實施例之結構剖視圖。 第2圖至第8圖為本發明之製作光學式影像辨識裝置之各步驟結構剖視圖。 第9圖為本發明之光學式影像辨識裝置之第二實施例之結構剖視圖。 第10圖為本發明之光學式影像辨識裝置之第三實施例之結構剖視圖。Fig. 1 is a structural cross-sectional view of the first embodiment of the optical image recognition device of the present invention. Figures 2 to 8 are cross-sectional views of the structure of each step of manufacturing the optical image recognition device of the present invention. Fig. 9 is a structural cross-sectional view of the second embodiment of the optical image recognition device of the present invention. FIG. 10 is a structural cross-sectional view of the third embodiment of the optical image recognition device of the present invention.

10:基板 10: substrate

12:導電接墊 12: Conductive pad

14:影像感測器 14: Image sensor

16:導線 16: wire

17:通孔 17: Through hole

18:光學準直器 18: Optical collimator

22:第一耐高溫膠 22: The first high temperature resistant adhesive

24:濾光片 24: filter

26:封裝膠體 26: Encapsulation colloid

Claims (10)

一種光學式影像辨識裝置,包含: 一基板,其周圍設有複數個導電接墊; 一影像感測器,設於該基板上,該影像感測器之周圍透過複數條導線分別電性連接該些導電接墊; 一光學準直器(collimator),具有複數個貫穿自身之通孔,該光學準直器設於該影像感測器上; 一第一耐高溫膠,設於該光學準直器之頂部之邊緣; 一濾光片,設於該第一耐高溫膠上,並遮蔽該些通孔;以及 一封裝膠體,設於該影像感測器與該基板之該周圍上,並覆蓋該光學準直器、該第一耐高溫膠與該濾光片之側壁,且包覆該些導線與該些導電接墊。An optical image recognition device, including: A substrate with a plurality of conductive pads around it; An image sensor is arranged on the substrate, and the periphery of the image sensor is electrically connected to the conductive pads through a plurality of wires; An optical collimator (collimator) having a plurality of through holes penetrating through itself, and the optical collimator is arranged on the image sensor; A first high temperature resistant adhesive, which is arranged on the edge of the top of the optical collimator; A filter arranged on the first high temperature resistant adhesive and shielding the through holes; and An encapsulant is arranged on the periphery of the image sensor and the substrate, and covers the optical collimator, the first high temperature resistant adhesive and the side walls of the filter, and covers the wires and the Conductive pads. 如請求項1所述之光學式影像辨識裝置,更包含一軟性印刷電路板(FPC),其係設於該基板之底部。The optical image recognition device according to claim 1, further comprising a flexible printed circuit board (FPC), which is arranged on the bottom of the substrate. 如請求項2所述之光學式影像辨識裝置,更包含一發光模組與一第二耐高溫膠,該發光模組透過該第二耐高溫膠設於該封裝膠體上,並遮蔽該濾光片。The optical image recognition device according to claim 2, further comprising a light-emitting module and a second high-temperature resistant glue, the light-emitting module is disposed on the packaging glue through the second high-temperature glue, and shields the filter sheet. 如請求項3所述之光學式影像辨識裝置,其中該發光模組為有機發光二極體(OLED)模組。The optical image recognition device according to claim 3, wherein the light-emitting module is an organic light-emitting diode (OLED) module. 如請求項1所述之光學式影像辨識裝置,其中該影像感測器為互補式金氧半(CMOS)影像感測器,該濾光片為紅外線濾光片(IR-Cut filter)。The optical image recognition device according to claim 1, wherein the image sensor is a complementary metal oxide semiconductor (CMOS) image sensor, and the filter is an infrared filter (IR-Cut filter). 如請求項1所述之光學式影像辨識裝置,其中該光學準直器為微機電(MEMS)結構,該些通孔為矽通孔(TSV)。The optical image recognition device according to claim 1, wherein the optical collimator is a microelectromechanical (MEMS) structure, and the through holes are through silicon vias (TSV). 如請求項1所述之光學式影像辨識裝置,其中該影像感測器、該光學準直器、該第一耐高溫膠與該濾光片之總厚度等於該封裝膠體之厚度。The optical image recognition device according to claim 1, wherein the total thickness of the image sensor, the optical collimator, the first high temperature resistant glue and the filter is equal to the thickness of the packaging glue. 一種光學式影像辨識裝置之製作方法,包含下列步驟: 提供一基板,其周圍設有複數個導電接墊; 形成一影像感測器於該基板上; 形成具有複數個貫穿自身之通孔之一光學準直器(collimator)於該影像感測器上; 形成一第一耐高溫膠於該光學準直器之頂部之邊緣; 形成一濾光片於該第一耐高溫膠上,並利用該濾光片遮蔽該些通孔; 在該影像感測器之周圍透過複數條導線分別電性連接該些導電接墊;以及 形成一封裝膠體於該影像感測器與該基板之該周圍上,並利用該封裝膠體覆蓋該光學準直器、該第一耐高溫膠與該濾光片之側壁,且包覆該些導線與該些導電接墊。A manufacturing method of an optical image recognition device includes the following steps: Provide a substrate with a plurality of conductive pads around it; Forming an image sensor on the substrate; Forming an optical collimator (collimator) with a plurality of through holes penetrating through itself on the image sensor; Forming a first high temperature resistant glue on the edge of the top of the optical collimator; Forming a filter on the first high temperature resistant adhesive, and using the filter to shield the through holes; Electrically connect the conductive pads around the image sensor through a plurality of wires; and An encapsulant is formed on the periphery of the image sensor and the substrate, and the encapsulant is used to cover the optical collimator, the first high-temperature resistant adhesive and the sidewalls of the filter, and cover the wires And these conductive pads. 如請求項8所述之光學式影像辨識裝置之製作方法,其中在形成該封裝膠體於該影像感測器與該基板之該周圍上之步驟後,形成一軟性印刷電路板(FPC)於該基板之底部。The method of manufacturing an optical image recognition device according to claim 8, wherein after the step of forming the encapsulant on the periphery of the image sensor and the substrate, a flexible printed circuit board (FPC) is formed on the The bottom of the substrate. 如請求項9所述之光學式影像辨識裝置之製作方法,其中在形成該軟性印刷電路板於該基板之該底部之步驟後,透過一第二耐高溫膠形成一發光模組於該封裝膠體上,並利用該發光模組遮蔽該濾光片。The method for manufacturing an optical image recognition device according to claim 9, wherein after the step of forming the flexible printed circuit board on the bottom of the substrate, a light-emitting module is formed on the encapsulant through a second high-temperature adhesive And use the light-emitting module to shield the filter.
TW108127802A 2019-07-30 2019-08-05 Optical image recognition device and a manufacturing method thereof TWI696280B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910693959.0A CN110416237A (en) 2019-07-30 2019-07-30 Optical image device for identifying and preparation method thereof
CN201910693959.0 2019-07-30

Publications (2)

Publication Number Publication Date
TWI696280B TWI696280B (en) 2020-06-11
TW202105698A true TW202105698A (en) 2021-02-01

Family

ID=68364222

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108127802A TWI696280B (en) 2019-07-30 2019-08-05 Optical image recognition device and a manufacturing method thereof

Country Status (2)

Country Link
CN (1) CN110416237A (en)
TW (1) TWI696280B (en)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100649011B1 (en) * 2004-12-30 2006-11-27 동부일렉트로닉스 주식회사 Image sensor using the optic fiber
US7279782B2 (en) * 2005-01-05 2007-10-09 Advanced Chip Engineering Technology Inc. FBGA and COB package structure for image sensor
CN1956201A (en) * 2005-10-24 2007-05-02 林协裕 Package structure of image sensing device
JP2009260269A (en) * 2008-03-18 2009-11-05 Panasonic Corp Optical device, and method for manufacturing thereof
CN101950751B (en) * 2009-07-10 2012-10-03 菱光科技股份有限公司 Image sensor and encapsulating method thereof
TWI425597B (en) * 2009-12-31 2014-02-01 Kingpak Tech Inc Image sensor package structure with black transmittance encapsulation
CN207557969U (en) * 2017-09-15 2018-06-29 南昌欧菲生物识别技术有限公司 Optical finger print identifies module and electronic device
CN108010931B (en) * 2017-12-28 2021-03-30 苏州晶方半导体科技股份有限公司 Packaging structure and packaging method of optical fingerprint chip
CN108807446A (en) * 2018-08-02 2018-11-13 苏州晶方半导体科技股份有限公司 A kind of encapsulating structure and packaging method of optical finger print chip
CN109065560A (en) * 2018-08-17 2018-12-21 苏州晶方半导体科技股份有限公司 The packaging method and encapsulating structure of image sensing chip
TWI664450B (en) * 2018-09-14 2019-07-01 世界先進積體電路股份有限公司 Optical sensor and method for forming the same
CN109218582A (en) * 2018-09-29 2019-01-15 Oppo广东移动通信有限公司 Mould group and preparation method thereof, camera and electronic device

Also Published As

Publication number Publication date
CN110416237A (en) 2019-11-05
TWI696280B (en) 2020-06-11

Similar Documents

Publication Publication Date Title
TWI485821B (en) Package module of fingerprint identification chip and method of the same
US10043847B2 (en) Image capturing module and electrical apparatus
JP2022106838A (en) Finger-print detection module and method
US20180336393A1 (en) Fingerprint sensing unit
US9978673B2 (en) Package structure and method for fabricating the same
TWI570857B (en) Package structure and method for manufacturing the same
CN211184079U (en) Image sensing module
TW201228370A (en) Camera module and method for fabricating the same
US10529759B2 (en) Optical sensor package module and manufacturing method thereof
US11156796B2 (en) Optical sensor package module
TWI664766B (en) Image capturing module and manufacturing method thereof
US7368795B2 (en) Image sensor module with passive component
TWI625829B (en) Electrical connection structure between front and back of chip and manufacturing method thereof
TWI559464B (en) Package module and its substrate structure
KR102349161B1 (en) Optical Image Recognition Device and Manufacturing Method Thereof
US10734435B2 (en) Image capturing module and manufacturing method thereof
TWI696280B (en) Optical image recognition device and a manufacturing method thereof
US20180239945A1 (en) Fingerprint identification module and manufacturing method thereof
US10340299B2 (en) Optical sensor package module and manufacturing method thereof
TW201713105A (en) Camera module and method for fabricating the same
US20180300524A1 (en) Image capturing module and manufacturing method thereof
TW201907587A (en) Semiconductor device package and method of manufacturing same
US20180301588A1 (en) Image capturing module and manufacturing method thereof
TW201725490A (en) Device for track pad semiconductor package of smart device and method for manufacturing the same
TWM537311U (en) Fingerprint sensor package module