TW202104880A - Coaxial multi-wavelength optical component detection system including a base, a stage, an optical projection unit, an optical focusing unit, a wavefront sensing unit and a comparison unit - Google Patents

Abstract

This invention relates to a coaxial multi-wavelength optical component detection system and in particular to a lens detection system for detecting the quality of a lens using a coaxial multi-frequency light source in conjunction with a wavefront detector. The coaxial multi-wavelength optical component detection system includes a base, a stage, an optical projection unit, an optical focusing unit, a wavefront sensing unit and a comparison unit, wherein the optical projection unit includes a plurality of light emitting sources and a coaxial lens. In this way, by adopting the light emitting units such as He-Ne laser, H-F laser, YAG laser or gallium aluminum arsenide and in combination with the design of the Hartmann-Shack wavefront detector serving as hardware, a wavefront graph formed by a light beam passing through the sample to be tested and entering the wavefront detector is effectively detected, and a difference of the wavefront graph and a control wavefront graph of a normal control group is compared, so that the lens detection system provided by this invention has the main advantages that the sample to be tested is effectively detected, testing time and cost are saved, and nondestructive testing purpose is achieved.

Description

Coaxial multi-wavelength optical element detection system

The present invention relates to a coaxial multi-wavelength optical element detection system, in particular to a detection system that uses a complex number of light sources with a wavefront detector to detect the quality of the optical lens or optical medium combination of the sample to be tested.

According to recent years, with the advancement and development of science and technology, the application of optical lenses installed in optical products has also increased. For example, in digital cameras, smart phones, or laptops and other electronic devices with camera functions, they are all The long-term application of optical lenses can be seen; in general, after the optical lenses are formed, relevant inspection actions are carried out, such as the detection procedures of optical axis deviation, curvature or thickness, etc., in order to ensure the quality of the production of optical lenses.

In the current lens-related inspection procedures of lens processing factories, interferometers are used to detect the curvature of the lenses. However, the inspection procedures of interferometers have the disadvantages of relying on manual operation and time-consuming operation. Therefore, the lens processing factories can only check the curvature of the lenses. The lens undergoes random inspection procedures, and the purpose of full inspection cannot be achieved; therefore, how to effectively detect the pros and cons of the lens to be tested through innovative hardware design, and indeed save the time and cost of lens inspection, is still in related industries such as lens inspection systems Developers and related researchers need to continue their efforts to overcome and solve problems.

In recent years, although a detection system that uses the wavefront of the system to analyze and diagnose the curvature of the lens has been developed, it is often limited by the inertia of thinking that the optical system has been used in portable equipment for a long time; The quality of imaging is ultimately judged by the human eye Therefore, the inspection equipment uses green laser light to evaluate the quality of optical components. However, since 2015, self-driving car systems have gradually become popular, and countries have set to introduce automatic driving in 2022~2025. In this prospect, the vehicle environment will be directly connected to the outdoor environment and become a part of the public safety system.

However, the vehicle-mounted camera lens will withstand temperature differences, wind and rain, heat radiation, and even frost and snow conditions as it is used in the outdoor dynamic environment. In this harsh situation, the vehicle-mounted camera lens still needs to clearly and faithfully image And instead of human eyes to intelligently judge the next step of driving. Every morning, the morning light rises from one end of the horizon. In this environment, the vehicle camera lens must instantly adjust the automatic exposure corresponding to the external strong light source environment, at sunset; the brilliant brilliance is reflected in the vehicle camera lens horizontally, and the light is from At the beginning of the day, from the horizontal elevation angle towards the middle of the sun and then into the night in the other direction. It repeats every day but presents different light illuminances, colors and changes in light and dark situations, such as sunny, overcast, rainy, haze, etc. The self-driving car camera lens must respond in time to the outdoor dynamic light source environment, in other words: The photographic lens must operate at a broad range of wavelengths to meet the basic operation of a self-driving car.

At this stage, the imaging quality of vehicle-mounted camera lenses is mostly detected by green lasers with a spectrum equivalent to 532nm, which is seriously inadequate in the coverage of detection wavelengths. However, individual switching of light sources of different wavelengths is not only time-consuming and laborious, but also in the calibration of inspection equipment. Unrealistic choice.

Nowadays, the inventor has made improvements in view of the fact that there are still many shortcomings in the actual implementation of the traditional lens inspection system, so he has a tireless spirit and is assisted by his wealth of professional knowledge and years of practical experience. Based on this, the invention was developed.

The main purpose of the present invention is to provide a coaxial multi-wavelength optical element detection system System, especially refers to an optical element detection system that uses a plurality of different laser light sources and wavefront detectors to combine the curvature of the sample optical elements to be tested, mainly by helium-neon lasers, hydrogen fluorine lasers, and YAG Laser or arsenic aluminum and other light-emitting units combined with the hardware design of the Hartmann-Shack wavefront detector can effectively detect the wavefront pattern formed by the laser beam of different wavelengths after penetrating the lens under test and entering the wavefront detector. The difference between the contrast wavefront pattern comparison of the normal lens, to effectively detect the curvature of the optical lens or optical medium combination of the sample to be tested, to save the inspection time and inspection cost, to achieve the purpose of full inspection of the lens, and to achieve non-destructive The main advantages such as the purpose of sex testing.

In order to achieve the above-mentioned implementation objectives, the inventor proposes a coaxial multi-wavelength optical element detection system, which at least includes a base, a carrier, an optical projection unit, an optical focusing unit, a wavefront sensing unit, and a The comparison unit; the base is used to carry the coaxial multi-wavelength optical element detection system; the carrier is arranged on the base with an opening in its middle part, and the carrier is used to carry at least one sample to be tested. The test sample can be any form of optical element; the optical projection unit is arranged at the lower end of the base, the optical projection unit includes a plurality of light-emitting sources and a coaxial lens, and the light beams of different wavelengths emitted by the plurality of light-emitting sources pass through The coaxial lens emits a light beam toward the opening of the carrier after coaxializing the optical path to pass through the sample to be tested; the optical focusing unit includes a first lens module arranged under the carrier and a second lens module arranged above the carrier. Two lens modules, in which the first lens module focuses the light beam of the light-emitting unit on the lens to be tested, and the second lens module is used to receive a penetrating light beam that penetrates the sample to be tested and focus it upwards; The front sensing unit is arranged above the second lens module. The wavefront sensing unit includes a diffractive optical element module, a photosensitive coupling element module connected to the diffractive optical element module, and a photosensitive coupling element module connected to the diffractive optical element module. Waveform production of the photosensitive coupling element module of the optical element module The diffractive optical element module receives the penetrating light beam and forms a plurality of light spots and transmits them to the waveform generation module through the photosensitive coupling element module. The waveform generation module receives the light spots to generate a wave through a conversion formula Front pattern; the comparison unit is electrically connected to the wavefront sensing unit to receive the wavefront pattern, and the comparison unit performs a comparison action between the wavefront pattern and a built-in control wavefront pattern. When the comparison result is less than a valve Value, the sample to be tested is judged to be normal.

In the above-mentioned coaxial multi-wavelength optical element detection system, the coaxial lens is a polygonal rhombus lens.

In the above-mentioned coaxial multi-wavelength optical element detection system, a spatial filter unit is included between the first lens module and the tape test sample, and the spatial filter unit is used to filter the spatial noise other than the ideal light spot and amplify the optical projection The beam emitted by the unit.

In the coaxial multi-wavelength optical element detection system as described above, a shutter device is further provided between the polygonal rhombus lens and the plurality of light-emitting sources; the shutter device is provided with shutters of the same number corresponding to the number of light-emitting sources. In order to control the light beam passing through the polygonal diamond lens.

In the above-mentioned coaxial multi-wavelength optical element detection system, the carrier system can be further provided with a feeding device, and the feeding device is used to carry the sample to be tested.

In the above-mentioned coaxial multi-wavelength optical element detection system, the feeding device is one of a tray, a movable tray, a fixed tray, a conveyor belt, or a cassette.

In the coaxial multi-wavelength optical element detection system as described above, the carrier system may be further provided with a mobile platform.

In the above-mentioned lens detection system, the mobile platform is provided with an X-axis adjustment module and a Y-axis adjustment module, and the X-axis adjustment module and the Y-axis adjustment module carry the feeding device to Move the X axis and Y axis respectively.

In the lens detection system as described above, the carrier system can be further provided with a Z-axis adjustment module, and the Z-axis adjustment module adjusts the carrier to move in the Z-axis on the base.

In the above-mentioned lens detection system, the light-emitting unit is a laser device.

In the above-mentioned lens detection system, the light-emitting unit is an LED device.

In the above-mentioned lens detection system, the light-emitting unit is a light-emitting unit such as a helium-neon laser, a hydrogen-fluorine laser, a YAG laser, or an aluminum arsenide.

In the lens detection system as described above, the wavefront sensing unit is a Hartmann-Shack wavefront detector.

In the above-mentioned lens detection system, the conversion formula is Zernike polynomial algorithm.

In the above-mentioned lens detection system, the lens detection system can be further installed inside a casing which is made of opaque material.

In this way, the lens detection system of the present invention mainly uses light-emitting units such as He-Ne lasers, hydrogen-fluorine lasers, YAG lasers or arsenic aluminum to emit multiple light-emitting sources through the diamond-shaped polygonal lens in the light source projection unit. The beams of different wavelengths are coaxial, and the wavelength of the beam entering the rhombus polygonal lens can be adjusted through the shutter device arranged in front of the rhombus polygonal lens; combined with the hardware design of the Hartmann-Shack wavefront detector, it can effectively detect the penetration of the beams of different wavelengths The sample to be tested enters the wavefront pattern formed by the wavefront detector, and compares the difference between the wavefront pattern with the control wavefront pattern of the normal lens, so as to effectively detect the curvature of the optical element combination of the sample to be tested, and it does save testing. The main advantages of time and inspection cost, as well as achieving the purpose of non-destructive inspection; in addition, the coaxial multi-wavelength optical element inspection system of the present invention mainly combines multiple light-emitting sources The hardware design of the optical projection unit and the wavefront detector can effectively achieve the requirement that the inspection time of the lens to be tested or the lens to be tested is less than 1.5 seconds, and it does achieve the goal of full inspection, so as to effectively save the inspection time and shorten the process time. The main advantage.

(1)‧‧‧Coaxial multi-wavelength optical component detection system

(2)‧‧‧Sample to be tested

(11)‧‧‧Base

(12)‧‧‧Carrier

(121)‧‧‧Feeding device

(122)‧‧‧Mobile Platform

(1221)‧‧‧X-axis adjustment module

(1222)‧‧‧Y-axis adjustment module

(123)‧‧‧Z axis adjustment module

(13)‧‧‧Optical projection unit

(131)‧‧‧Multiple light-emitting units

(132)‧‧‧Shutter Module

(133)‧‧‧Coaxial lens

(14)‧‧‧Optical Focus Unit

(141)‧‧‧The first lens module

(142)‧‧‧Second lens module

(143)‧‧‧Spatial Filter Unit

(15)‧‧‧Wavefront sensing unit

(16)‧‧‧Display unit

(3)‧‧‧Chassis

Figure 1: A perspective view of the overall structure of a preferred embodiment of the coaxial multi-wavelength optical component inspection system of the present invention

Figure 2: A side view of the overall architecture of a preferred embodiment of the coaxial multi-wavelength optical component inspection system of the present invention

Figure 3: A schematic diagram of the coaxial optical path design of the complex light source and the rhombic lens in a preferred embodiment of the coaxial multi-wavelength optical element detection system of the present invention.

Figure 4: A schematic diagram of the chassis and display unit of a preferred embodiment of the coaxial multi-wavelength optical element detection system of the present invention

In order to facilitate the reviewers to understand the technical features, content, advantages, and effects of the present invention, the present invention is described in detail in the form of embodiments with accompanying drawings as follows, and the diagrams used therein are: The subject matter is only for the purpose of illustration and auxiliary description, and may not be the true proportions and precise configuration after the implementation of the present invention. Therefore, it should not be interpreted in terms of the proportions and configuration relationships of the attached drawings, and should not limit the scope of rights of the present invention in actual implementation. , Hexian explained.

First of all, in order to let your reviewer better understand the technical features of the present invention, the basic concept of wavefront will be briefly explained. When the optical element is manufactured and assembled in the optical system, due to the environmental temperature, gravity or external force, the lens will produce tiny amounts. Deformation, and these small changes The shape will have a certain impact on the imaging quality of the optical system. Among them, the optical element can be transformed into the deformation of the optical axis direction (sag) by calculating the deformation of the X, Y, and Z of the surface grid points; Dutch Physics The scientist Frits Zernike studied the phase contrast microscope (phase contrast microscope) in 1953, which observes the internal structure of living cells in a way that does not damage the cells, and thus won the Nobel Prize. In addition, his Zernike polynomial algorithm was also published in the optical field to facilitate the evaluation of the influence of various aberrations on the optical system. It is widely used in the field of optical design. The deformation of the optical axis direction on the surface of the optical system can be converted into optics using the Zernike polynomial algorithm. Wavefront aberrations. The aberration items fitted by the Zernike polynomial algorithm can represent the aberrations caused by the deformation of the mirror. The aberrations are brought into the optical software, which can effectively calculate the Modulation Transfer Function (MTF) of the lens. ) And evaluate the overall performance; then, please refer to Figures 1 and 2, which are a perspective view of the overall architecture and a side view of the overall architecture of a preferred embodiment of the coaxial multi-wavelength optical component inspection system of the present invention, in which the present invention The coaxial multi-wavelength optical element detection system (1) at least includes: a base (11) for carrying the lens detection system (1); in a preferred embodiment of the present invention, it is made of metal material The resulting base (11) is used to support the overall structure of the coaxial multi-wavelength optical element detection system (1) of the present invention; a carrier (12) is set on the base (11) and the middle part is An opening (not shown in the figure) is opened, in which the carrier (12) is used to carry at least one sample (2) to be tested; in addition, the carrier (12) can be further provided with a feeding device (121) for feeding The device (121) is used to carry the sample (2) to be tested; in addition, the feeding device (121) is one of a Tray tray, a movable tray, a fixed tray, a conveyor belt or a cassette; In addition, the carrier (12) can be further provided with a mobile platform (122); in addition, the mobile platform (122) is provided with an X-axis adjustment module (1221) and a Y-axis adjustment module. The module (1222), the X-axis adjustment module (1221) and the Y-axis adjustment module (1222) carry the feeding device (121) to move the X-axis and Y-axis respectively; in addition, the carrier (12 ) Can be further provided with a Z-axis adjustment module (123), the Z-axis adjustment module (123) adjusts the stage (12) to move in the Z-axis on the base (11); In a preferred embodiment, a plurality of samples to be tested (2) are placed on the feeding device (121) presented in the form of a Tray plate, and the feeding device (121) is set on the mobile platform (122), and The mobile platform (122) is arranged on the carrier (12), and the carrier (12) is arranged on the base (11) with an opening in the middle part, and the movable platform (122) is provided with an X axis The adjustment module (1221) and the Y-axis adjustment module (1222) respectively carry the feeding device (121) to move in the X-axis and Y-axis directions. The carrier (12) is also provided with a Z-axis adjustment module ( 123), to adjust the stage (12) on the base (11) to move in the Z axis, that is to say, the moving platform (122) carrying the sample (2) to be tested can perform X, Y, Z, etc. Movement in three axes, so that the sample (2) to be tested can be moved to an appropriate position according to the needs of the test; an optical projection unit (13) is arranged at the lower end of the base (11), the optical projection unit (13) ) Is a complex light source (131) containing different wavelengths that emits a light beam (not shown in the figure) toward the opening of the stage (12) through a coaxial lens (133) after coaxializing the optical path to pass through the sample (2) ); In addition, the plurality of light-emitting sources (131) can be a laser device or an LED device, preferably a helium-neon laser device; in a preferred embodiment of the present invention, it is presented in the form of a helium-neon laser device The plural luminous sources (131) are arranged at the lower end of the base (11), after coaxializing the optical path through the coaxial lens (133), they emit a light beam toward the opening of the stage (12) and pass through the sample (2) An optical focusing unit (14) includes a first lens module (141) arranged below the carrier (12), and a second lens module (142) arranged above the carrier (12), Among them, the first lens module (141) focuses the beam projected by the optical projection unit (13) on the sample to be tested (2) The second lens module (142) is used to receive a penetrating light beam (not shown in the figure) that penetrates the sample (2) and focus it upwards; in addition, the optical projection unit (13) and the first A spatial filter unit (143) is further provided between the lens modules (141); in a preferred embodiment of the present invention, the optical focusing unit (14) is composed of a first lens module (141) and a second lens The module (142) is assembled, wherein the first lens module (141) is arranged between the carrier (12) and the optical projection unit (13) to receive and focus the light beam emitted by the optical projection unit (13) On the sample (2) to be tested, and the second lens module (142) is arranged above the stage (12) to receive the penetrating beam formed by the beam penetrating the sample (2) and focus and transmit it upward To the wavefront sensing unit (15), and between the optical projection unit (13) and the first lens module (141), a spatial filter unit (143) is arranged, wherein the spatial filter unit (143) filters the unnecessary Wave band light source; a wavefront sensing unit (15) is arranged above the second lens module (142), and the wavefront sensing unit (15) includes a diffractive optical element module (not shown in the figure) ), a photosensitive coupling element module (not shown in the figure) connected to the diffractive optical element module, and a photosensitive coupling element module connected to the diffractive optical element module and a photosensitive coupling element module connected to the diffractive optical element module Waveform generating module (not shown in the figure), the diffractive optical element module receives the penetrating light beam and forms a plurality of light spots which are transmitted to the photosensitive coupling element module and then transmitted to the waveform generating module, and the waveform generating module receives the light The point is to generate a wavefront pattern through a conversion formula; in addition, the wavefront sensing unit (15) is a Hartmann-Shack wavefront detector; in addition, the conversion formula is a Zernike polynomial algorithm; In a preferred embodiment, the wavefront sensing unit (15) disposed above the second lens module (142) receives the penetrating light beam penetrated by the sample (2) to be tested, and the wavefront sensing unit (15) is built-in The unit (15) uses a diffractive optical element module to form a plurality of light spots, which are received by the photosensitive coupling element module and then transferred to the waveform generating module to receive the multiple light spots and converted into a wavefront pattern by a conversion formula (graphic Unmarked (Shown), where the conversion formula is a Zernike polynomial algorithm, which mainly converts a plurality of light points generated by the diffractive optical element module into a wavefront pattern; and a comparison unit (the drawing is not marked), which is electrical The wavefront sensing unit (15) is connected to receive the wavefront pattern, and the comparison unit performs a comparison action between the wavefront pattern and a built-in control wavefront pattern (the figure is not marked). When the comparison result is less than a valve When the value, the test sample (2) is judged to be a normal lens; in a preferred embodiment of the present invention, the comparison unit is preferably a computer device, and the comparison unit is a receiving wavefront sensing unit (15 ) The wavefront pattern generated by the comparison unit is compared with the control wavefront pattern built in the comparison unit. When the comparison result is less than a threshold, the test sample (2) is judged to be a normal lens. The control wavefront pattern is the wavefront pattern obtained by the detection of the normal lens in the coaxial multi-wavelength optical element detection system (1) of the present invention, so only the wavefront pattern of the test sample (2) and the control wavefront pattern of the normal lens If the difference is within a certain range, the sample (2) to be tested is regarded as normal.

In addition, the coaxial multi-wavelength optical element detection system (1) can be further installed inside an opaque casing (3); furthermore, the comparison unit can be further electrically connected to a display unit (16) to display The unit (16) is erected on the upper end of the casing (3) to display the result of the comparison unit; please also refer to Figure 3, which is a preferred embodiment of the lens inspection system of the present invention. A schematic diagram of the erection of the housing and the display unit, where the housing (3) is a square opaque box, and there is an accommodating space inside the box (not shown in the figure), and the coaxial multi-wavelength optical element of the present invention The detection system (1) is installed in the accommodating space of the box to prevent unnecessary external interference during the detection of the sample to be tested (2), and the upper end of the casing (3) is equipped with a comparison unit electric The display unit (16), which is sexually connected, can display the comparison result of the wavefront graph and the comparison unit for the reference of the measurer.

Next, in order to enable your reviewer to further understand the purpose and features of the present invention, As well as the desired effect, the following specific examples of the coaxial multi-wavelength optical element inspection system (1) of the present invention are given below to further prove the scope of practical application of the lens inspection system (1) of the present invention, but it is not intended to be any The form limits the scope of the present invention; when a user wants to detect at least one sample (2) to be tested, the coaxial multi-wavelength optical element detection system (1) of the present invention can be used to perform the test procedure of the sample (2) to be tested , The effective detection beam penetrates the sample (2) and enters the wavefront pattern formed by a wavefront sensing unit (15), and compares the difference with the contrast wavefront pattern of the normal lens to effectively detect the difference The pros and cons of the test sample (2) have indeed achieved the main advantages of saving lens inspection time and cost, and achieving the purpose of non-destructive lens inspection; first, prepare a base (11), where the base (11) is used for Carrying the coaxial multi-wavelength optical element detection system (1); then, prepare a carrier (12), wherein the carrier (12) is set on the base (11) with an opening in the middle part, and the carrier (12) 12) is used to carry at least one sample (2) to be tested; continue, prepare an optical projection unit (13), wherein the optical projection unit (13) is arranged at the lower end of the base (11), and the optical projection unit (13) A complex light source (131) of different wavelengths passes through a coaxial lens (133) to coaxialize the light path and emits a light beam toward the opening of the stage (12) to pass through the sample (2) to be tested; then, prepare an optical focus Unit (14), wherein the optical focusing unit (14) includes a first lens module (141) arranged below the carrier (12), and a second lens module (141) arranged above the carrier (12) 142), where the first lens module (141) is a polygonal rhombus lens to focus the beam of the optical projection unit (13) on the sample (2), and the second lens module (142) is used To receive a penetrating light beam that penetrates the lens (2) to be tested and focus it upwards; then, prepare a wavefront sensing unit (15), wherein the wavefront sensing unit (15) is arranged in the second lens module Above (142), the wavefront sensing unit (15) includes a diffractive optical element module (not shown in the figure) and a photosensitive coupling element module connected to the diffractive optical element module (figure (Not marked), and a module connected with a diffractive optical element, and a module connected with the diffractive optical element Waveform generation module (not shown in the figure) of the photosensitive coupling element module. The diffractive optical element module receives the penetrating light beam and forms a plurality of light spots which are transmitted to the photosensitive coupling element module and then transmitted to the waveform generation module. The waveform generation module receives the light points to generate a wavefront pattern through a conversion formula; finally, a comparison unit is prepared, wherein the comparison unit is electrically connected to the wavefront sensing unit (15) to receive the wavefront pattern, and compare Perform a comparison action between the wavefront pattern and a built-in control wavefront pattern on the unit. When the comparison result is less than a threshold, the test sample (2) is judged to be a normal lens, and the control wavefront pattern is The wavefront pattern of the normal lens is detected by the lens detection system (1) of the present invention, so as long as the difference between the wavefront pattern of the lens to be tested (2) and the contrast wavefront pattern of the normal lens is within a certain range, then The lens to be tested (2) is recognized as a normal lens; after the hardware equipment of the lens detection system (1) of the present invention is completed, the user only needs to place the feeding device (121) of the sample to be tested (2) on the carrier The moving platform (122) on the table (12), and then adjust the orientation of the lens (2) to be tested through the X-axis adjustment module (1221), Y-axis adjustment module (1222) and Z-axis adjustment module (123) , So that the light beam emitted by the optical projection unit (13) passes through the sample (2) through the first lens module (141) and the opening of the optical focusing unit (14), and then is received and passed through by the second lens module (142) The transmitted light beam is focused and transmitted upward to the wavefront sensing unit (15) of the Hartmann-Shack wavefront detector, and then the light beam is converted into a wavefront pattern by the wavefront sensing unit (15), and the comparison unit is compared with the built-in wavefront pattern. Wavefront pattern comparison, when the comparison result is less than a threshold, the sample (2) to be tested is judged to be normal. The coaxial multi-wavelength optical element detection system (1) of the present invention can indeed save detection time and cost. And the main advantages of achieving the purpose of non-destructive testing.

As can be seen from the above implementation description, compared with the prior art, the coaxial multi-wavelength optical element detection system of the present invention has the following advantages:

1. The coaxial multi-wavelength optical component detection system of the present invention is mainly based on the combination of multiple coaxial light sources with different wavelengths and the hardware design of the Hartmann-Shack wavefront detector, which can effectively detect The measurement laser beam penetrates the sample to be tested and enters the wavefront pattern formed by the wavefront detector, and compares the difference with the contrast wavefront pattern of the normal sample to effectively detect the quality of the tested object. To achieve the main advantages of saving inspection time and inspection cost, and achieving the purpose of non-destructive inspection.

2. The coaxial multi-wavelength optical element detection system of the present invention is mainly combined with the hardware design of multiple coaxial light sources of different wavelengths and wavefront detectors, which can effectively realize that the detection time of a lens to be tested or a lens to be tested is less than 1.5 The demand of seconds really achieves the purpose of full inspection of the lens to be tested or the lens to be tested, which is the main advantage of effectively saving the inspection time and shortening the process time.

In summary, the lens inspection system of the present invention can indeed achieve the expected use effect through the embodiments disclosed above, and the present invention has not been disclosed before the application, and it has fully complied with the provisions and requirements of the patent law. . If you file an application for a patent for invention in accordance with the law, you are kindly requested to review and grant a quasi-patent.

However, the figures and descriptions disclosed above are only preferred embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. Anyone familiar with the art will do other things based on the characteristic scope of the present invention. Equivalent changes or modifications should be regarded as not departing from the design scope of the present invention.

(1)‧‧‧Coaxial multi-wavelength optical component detection system

(2)‧‧‧Sample to be tested

(11)‧‧‧Base

(12)‧‧‧Carrier

(121)‧‧‧Feeding device

(122)‧‧‧Mobile Platform

(1221)‧‧‧X-axis adjustment module

(1222)‧‧‧Y-axis adjustment module

(123)‧‧‧Z axis adjustment module

(13)‧‧‧Optical projection unit

(131)‧‧‧Multiple light-emitting units

(132)‧‧‧Shutter Module

(133)‧‧‧Coaxial lens

(14)‧‧‧Optical Focus Unit

(141)‧‧‧The first lens module

(142)‧‧‧Second lens module

(143)‧‧‧Spatial Filter Unit

(15)‧‧‧Wavefront sensing unit

Claims (11)

A coaxial multi-wavelength optical element detection system at least includes: a base for carrying the coaxial multi-wavelength optical element detection system; a carrier set on the base with an opening in the middle part , Wherein the stage is used to carry at least one sample to be tested; an optical projection unit is arranged at the lower end of the base, the optical projection unit includes a plurality of light sources, emits a plurality of beams of different wavelengths, and a coaxial lens , The multiple light beams of different wavelengths emitted by the multiple light-emitting sources pass through the coaxial lens to coaxialize the optical path, and then emit a light beam toward the opening of the stage to pass through the sample to be tested; an optical focusing unit includes a A first lens module set below the carrier, and a second lens module set above the carrier, wherein the first lens module focuses the light beam of the optical projection unit on the lens to be tested , And the second lens module is used to receive a penetrating light beam penetrating the lens to be tested and focused and transmitted upward; a wavefront sensing unit is arranged above the second lens module, the wavefront The sensing unit includes a diffractive optical element module, a photosensitive coupling element module connected to the diffractive optical element module, and a wavefront waveform generating module, the diffractive optical element module receives the penetrating light beam A plurality of light points are formed and transmitted to the waveform generation module, the waveform generation module receives the light points to generate a wavefront pattern through a conversion formula; and a comparison unit is electrically connected to the wavefront sensor The measuring unit receives the wavefront pattern, and the comparison unit performs a comparison action between the wavefront pattern and a built-in contrast wavefront pattern. The coaxial multi-wavelength optical element detection system according to claim 1, wherein the coaxial lens is a polygonal diamond mirror. The coaxial multi-wavelength optical element detection system according to claim 2, wherein a spatial filter unit is included between the first lens module and the sample to be tested, and the spatial filter unit is used to filter spatial noise other than the ideal light spot and Amplify the light beam emitted by the optical projection unit. The coaxial multi-wavelength optical element detection system according to claim 3, wherein a plurality of shutter devices are further provided between the polygonal diamond mirror and the plurality of light-emitting sources. The coaxial multi-wavelength optical element detection system according to claim 3, wherein the number of the plurality of shutter devices is equivalent to the number of light-emitting sources. For the coaxial multi-wavelength optical component inspection system described in items 4 and 5 of the scope of patent application, the carrier is further provided with a mobile platform for carrying a feeding device, and the mobile platform is provided with an X-axis adjustment module and A Y-axis adjustment module. The X-axis adjustment module and the Y-axis adjustment module carry the feeding device to move in the X-axis and Y-axis respectively. For example, in the coaxial multi-wavelength optical component inspection system described in item 6 of the scope of patent application, the carrier is further provided with a Z-axis adjustment module, and the Z-axis adjustment module adjusts the carrier on the base to perform Z Axial movement. In the coaxial multi-wavelength optical element detection system described in item 7 of the scope of patent application, the wavefront sensing unit is a Hartmann-Shack wavefront detector. For the coaxial multi-wavelength optical element detection system described in item 8 of the scope of patent application, the conversion formula is a Zernike polynomial algorithm. For the coaxial multi-wavelength optical element detection system described in item 9 of the scope of patent application, the lens detection system is further installed inside a casing, and the inside of the casing is made of an opaque material. The coaxial multi-wavelength optical element inspection system as described in item 10 of the scope of patent application, wherein the The sample to be tested contains a plurality of optical lenses.

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