TW202045876A - Heat treatment furnace - Google Patents

Abstract

The present invention provides a technique for appropriately maintaining the atmosphere temperature of each space in a heat treatment furnace. The heat treatment furnace performs heat treatment on an object to be treated. The heat treatment furnace comprises a furnace body and a conveying device. The furnace body is provided with: a first space for performing heat treatment on an object to be treated at a first temperature, a second space for performing heat treatment on the object to be treated at a second temperature different from the first temperature, and a partition wall for separating the first space from the second space; the conveying device conveys the object to be treated from one end of the first space to the other end of the second space. The partition wall is provided with a communication passage that communicates the first space and the second space, and a third space that is provided inside the partition wall, is separated from the first space and the second space, and communicates with the communication passage.

Description

Heat treatment furnace

The technology disclosed in this specification relates to a heat treatment furnace for heat treatment of the object to be processed.

In some cases, a heat treatment furnace (for example, a roller furnace, etc.) is used to heat treat the object. In such a heat treatment furnace, the internal space of the furnace body is divided into a plurality of spaces, and the objects to be processed are sequentially transported to these spaces. By adjusting the furnace atmosphere temperature of each space inside the furnace body, each step (for example, a debinding step, a firing step, etc.) required for the heat treatment of the object to be processed is performed. The multiple spaces are adjusted to different furnace atmosphere temperatures in accordance with each step. For example, Patent Document 1 discloses an example of a heat treatment furnace. [Prior Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Application Publication No. 2016-156612

[The problem to be solved by the invention]

In order to heat-treat the object to be processed with a desired temperature distribution, it is necessary to separately control the furnace atmosphere temperature of each space inside the furnace body and maintain the furnace atmosphere temperature of each space appropriately. However, in each space, in the vicinity of the area adjacent to other spaces with different furnace atmosphere temperature, due to the influence of heat conduction from one adjacent space to another space, it may not be possible to properly adjust the furnace atmosphere temperature of the space. Maintain the desired temperature. Therefore, a problem arises in that it is difficult to control the object to be processed to a desired temperature distribution in the vicinity of the boundary between two spaces where adjacent furnace atmosphere temperatures are different. This specification discloses a technique for appropriately maintaining the furnace atmosphere temperature of each space in the heat treatment furnace. [The way to solve the problem]

The heat treatment furnace disclosed in this specification heats the object to be processed. The heat treatment furnace includes a furnace body and a conveying device. The furnace body includes a first space for heat-treating the object to be processed at a first temperature, a second space for heat-treating the object to be processed at a second temperature different from the first temperature, And a partition wall separating the first space and the second space, and the conveying device conveys the processed object from one end of the first space to the other end of the second space. The partition wall is provided with a communication channel and a third space, the communication channel communicates the first space with the second space, the third space is provided in the partition wall, and is separated from the first space and the second space by the partition wall, and Connect with the communication channel.

In the heat treatment furnace described above, the third space is provided in the partition wall separating the first space and the second space. Thereby, the influence of heat transfer from one of the first space and the second space to the other space can be suppressed. Therefore, the furnace atmosphere temperature in the first space and the furnace atmosphere temperature in the second space can be appropriately maintained, respectively.

[Preferable form for implementing invention]

The main features of the embodiments described below are listed in advance. In addition, the technical elements described below are independent technical elements, which are used alone or in various combinations to exert technical usefulness, and are not limited to the combinations described in the claims at the time of application.

(Feature 1) The heat treatment furnace disclosed in this specification may further include: an exhaust runner, which is provided in the furnace body, one end of which is connected to the third space, and the other end is connected to the outside of the furnace body, and the gas in the third space Discharge to the outside of the furnace. According to such a structure, the gas flowing into the first space in the third space and the gas in the second space through the communication passage are discharged to the outside of the furnace body by the exhaust flow passage. As a result, it is possible to suppress gas from moving between the first space and the second space via the communication passage.

(Feature 2) The heat treatment furnace disclosed in this specification may further include: a gas flow passage provided in the furnace body, one end of which communicates with the third space, and the other end communicates with the outside of the furnace body, and extends from the outside of the furnace body to the third space. Gas is supplied in the space. According to such a structure, the temperature in the third space can be adjusted by the gas supplied from the gas flow path. Therefore, the temperature of the third space can be adjusted to an appropriate temperature for the furnace atmosphere temperature of the first space and the furnace atmosphere temperature of the second space, thereby suppressing the gas from passing between the first space and the second space via the communication channel. mobile.

(Feature 3) In the heat treatment furnace disclosed in this specification, the partition wall may further include a first partition wall that partitions the first space and the third space, and a second partition wall that partitions the second space and the third space. The size of the third space in the conveying direction may be smaller than the size of the first partition in the conveying direction when the first temperature is higher than the second temperature, and smaller than the size of the second partition in the conveying direction when the second temperature is higher than the first temperature . According to this structure, the dimensions of the transport direction of the first partition wall, the second partition wall, and the third space can be adjusted appropriately, and the first space and the second space can be thermally separated while reducing the purpose of not heating the processed object. The size of the third space in the conveying direction. As a result, the size of the entire partition wall in the conveying direction can be reduced, and the time for conveying the object to be processed in the communication channel where the heat treatment step is not performed can be shortened.

(Feature 4) In the heat treatment furnace disclosed in this specification, a first heater and a second heater are provided in the furnace body. The first heater is provided in the first space, and the first space can be adjusted to the first Temperature, the above-mentioned second heater is installed in the second space, and the inside of the second space can be adjusted to the second temperature. On the other hand, the heater may not be installed in the third space. Since the partition wall thermally isolates the first space and the second space, there is no need to heat the object to be processed in the third space provided in the partition wall, and there is no need to install a heater in the third space. In addition, since the heater is not provided in the third space, the size of the third space in the conveying direction can be reduced, and the time for conveying the object to be processed in the communication channel where the heat treatment step is not performed can be shortened. [Example]

Hereinafter, the heat treatment furnace 10 related to the embodiment will be described. As shown in Fig. 1, the heat treatment furnace 10 includes a furnace body 20 and conveying devices (52, 54, 56, 58) that convey the object 12 to be processed. The heat treatment furnace 10 heat-treats the object 12 while transporting the object 12 into the furnace body 20 by the conveyor.

As the to-be-processed object 12, the laminated body which laminated|stacked the dielectric material (base material) made of ceramics and an electrode, the positive electrode material or negative electrode material of a lithium ion battery, etc. are mentioned, for example. When heat-treating ceramic laminates using the heat-treating furnace 10, they can be placed on a flat setter and transported in the furnace. In addition, when the heat treatment furnace 10 is used to heat the positive electrode material or the negative electrode material of a lithium ion battery, they can be housed in a box-shaped sagger and transported in the furnace. In the heat treatment furnace 10 of the present embodiment, a plurality of setter plates and saggers can be placed and transported in a state aligned in the transport direction on a transport roller 52 (described later). Hereinafter, in the present embodiment, the entirety of the substance to be heat-treated, the setter on which the heat-treated substance is placed, and the sagger in which the heat-treated substance is placed is collectively referred to as "to-be-treated 12".

As shown in Figs. 1 and 2, the furnace body 20 is surrounded by a top wall 22, a bottom wall 24, and side walls 26a to 26d, and includes partition walls (30a, 30b) inside. The furnace body 20 is substantially rectangular, and the top wall 22 is arranged parallel to the bottom wall 24 (that is, parallel to the XY plane). As shown in FIG. 1, the side wall 26a is arrange|positioned at the entrance end of a conveyance path, and is arrange|positioned perpendicularly to the conveyance direction (that is, parallel to the YZ plane). The side wall 26b is arranged at the exit end of the conveying path, and is arranged parallel to the side wall 26a (that is, parallel to the YZ plane). As shown in FIG. 2, the side walls 26c and 26d are arranged parallel to the conveying direction and perpendicular to the top wall 22 and the bottom wall 24 (that is, parallel to the XZ plane).

As shown in Fig. 1, the internal space of the furnace body 20 is divided into a first space 40 and a second space 42 by partition walls (30a, 30b). Specifically, the partition wall 30a is fixed to the top wall 22 at a position substantially in the middle between the side walls 26a and 26b, and extends vertically downward from the top wall 22. The partition wall 30b is fixed to the bottom wall 24 at a position corresponding to the partition wall 30a, and extends vertically upward from the bottom wall 24. The inside of the furnace body 20 is divided into a first space 40 and a second space 42 with partition walls (30a, 30b) as a boundary. The partition wall 30a and the partition wall 30b are separated in the vertical direction (Z direction), and a communication passage 36 is provided in the space between the partitions. An opening 28a is formed in the side wall 26a of the furnace body 20, and an opening 28b is formed in the side wall 26b. The to-be-processed object 12 is conveyed into the heat treatment furnace 10 from the opening 28a by the conveying device, and is conveyed to the outside of the heat treatment furnace 10 from the opening 28b through the communication passage 36. That is, the opening 28a is used as a shipping port, and the opening 28b is used as a shipping port.

The first space 40 is surrounded by the top wall 22, the bottom wall 24, the side walls 26a, 26c, 26d, and partition walls (30a, 30b). The first space 40 is partitioned from the second space 42 by partition walls (30a, 30b) in the furnace body 20, so that a furnace atmosphere temperature different from that of the second space 42 can be maintained. The first space 40 communicates with the outside of the heat treatment furnace 10 through the opening 28a provided in the side wall 26a, and communicates with the second space 42 through the communication passage 36 between the partition wall 30a and the partition wall 30b. In the first space 40, a plurality of conveying rollers 52 and a plurality of heaters 44a and 44b are arranged. The heaters 44a are arranged at equal intervals in the conveying direction at positions above the conveying roller 52, and the heaters 44b are arranged at equal intervals in the conveying direction at positions below the conveying roller 52. The inside of the first space 40 is heated by heating the heaters 44a and 44b.

The second space 42 is surrounded by the top wall 22, the bottom wall 24, the side walls 26b, 26c, 26d, and the partition walls (30a, 30b). The second space 42 is partitioned from the first space 40 in the furnace body 20 by partition walls (30a, 30b), so that a furnace atmosphere temperature different from that of the first space 40 can be maintained. The second space 42 communicates with the outside of the heat treatment furnace 10 through the opening 28b provided in the side wall 26b, and communicates with the first space 40 through the communication passage 36 between the partition wall 30a and the partition wall 30b. A plurality of transport rollers 52 and a plurality of heaters 44c and 44d are arranged in the second space 42. The heaters 44c are arranged at equal intervals in the conveying direction at positions above the conveying roller 52, and the heaters 44d are arranged at equal intervals in the conveying direction at positions below the conveying roller 52. The inside of the second space 42 is heated by heating the heaters 44c and 44d. The second space 42 is set to a furnace atmosphere temperature different from that of the first space 40. In this embodiment, the furnace atmosphere temperature of the second space 42 is made higher than the furnace atmosphere temperature of the first space 40.

The furnace body 20 is provided with a plurality of supply gas channels 46 a to 46 c for supplying gas into the furnace body 20 and a plurality of exhaust gas channels 48 a to 48 c for discharging the gas in the furnace body 20. Specifically, the air supply channel 46a is provided on the bottom wall 24, and is arranged between the side wall 26a and the partition wall 30b and is near the partition wall 30b. That is, the air supply passage 46a is provided on the downstream side in the conveying direction in the first space 40. The air supply channel 46 a communicates with the first space 40, and supplies furnace atmosphere gas into the first space 40 from the outside of the furnace body 20. The furnace atmosphere in the first space 40 is controlled by supplying furnace atmosphere gas from the air supply channel 46 a to the first space 40. The air supply channel 46b is provided on the bottom wall 24, and is arranged between the partition wall 30b and the side wall 26b and near the side wall 26b. That is, the air supply channel 46b is provided on the downstream side in the conveying direction in the second space 42. The air supply channel 46b communicates with the second space 42 and supplies furnace atmosphere gas into the second space 42 from the outside of the furnace body 20. The furnace atmosphere in the second space 42 is controlled by supplying furnace atmosphere gas from the gas supply channel 46b to the second space 42. The air supply channel 46c is provided on the bottom wall 24, and is disposed between the first partition wall 32b and the second partition wall 34b (described later) of the partition wall 30b. The gas flow path 46c communicates with the third space 38 (described later), and supplies gas into the third space 38. The gas is supplied to the gas supply channels 46a to 46c from a gas supply source (not shown) arranged outside the furnace body 20. The flow rate of the gas supplied to each of the gas supply channels 46 a to 46 c is controlled by the control device 60.

The exhaust runner 48a is provided on the top wall 22, and is arranged between the side wall 26a and the partition wall 30a and near the side wall 26a. That is, the exhaust flow path 48a is provided on the upstream side in the conveying direction in the first space 40. The exhaust flow passage 48 a communicates with the first space 40 and discharges the atmosphere gas in the first space 40 to the outside of the furnace body 20. The exhaust runner 48b is provided on the top wall 22, and is arranged between the partition wall 30a and the side wall 26b and near the partition wall 30a. That is, the exhaust runner 48b is provided on the upstream side in the conveying direction in the second space 42. The exhaust flow passage 48b communicates with the second space 42 and discharges the atmosphere gas in the second space 42 to the outside of the furnace body 20. The exhaust flow passage 48c is provided on the top wall 22 and is arranged between the first partition wall 32a and the second partition wall 34a (described later) of the partition wall 30a. The exhaust runner 48c communicates with the third space 38 (described later), and exhausts the gas in the third space 38 to the outside of the furnace body 20. The flow rate of the gas discharged from the exhaust flow passages 48a to 48c is controlled by the control device 60 to correspond to the flow rate of the gas respectively supplied from the gas supply passages 46a to 46c.

In addition, in this embodiment, exhaust flow passages 48a, 48b are provided on the upstream side of the conveying direction in each space 40, 42, and air supply passages 46a are provided on the downstream side of the conveying direction in each space 40, 42 , 46b. In addition, air supply channels 46a to 46c are provided on the bottom wall 24 surrounding the respective spaces 40, 42, 38, and exhaust air channels 48a to 48c are provided on the top wall 22 surrounding the respective spaces 40, 42, 38. However, the arrangement position and number of the air supply flow passages and the exhaust flow passages are not limited to the configuration of this embodiment, and can be appropriately changed according to heat treatment conditions and the like.

Next, the structure of the partition walls (30a, 30b) will be described. The partition wall 30 a includes a first partition wall 32 a arranged at a position adjacent to the first space 40 and a second partition wall 34 a arranged at a position adjacent to the second space 42. The first partition wall 32a and the second partition wall 34a are separated in the conveying direction, and a part of the third space 38 is provided between the first partition wall 32a and the second partition wall 34a. The partition wall 30 b includes a first partition wall 32 b arranged at a position adjacent to the first space 40 and a second partition wall 34 b arranged at a position adjacent to the second space 42. The first partition wall 32b is arranged at a position corresponding to the first partition wall 32a, and the second partition wall 34b is arranged at a position corresponding to the second partition wall 34a. The first partition wall 32b and the second partition wall 34b are separated in the conveying direction, and another part of the third space 38 is provided between the first partition wall 32b and the second partition wall 34b. That is, the third space 38 is surrounded by the top wall 22, the bottom wall 24, the first partition wall 32a and the second partition wall 34a of the partition wall 30a, and the first partition wall 32b and the second partition wall 34b of the partition wall 30b, And it communicates with the communication channel 36.

As shown in FIG. 3, the size L1 of the conveyance direction (that is, X direction) of the third space 38 is smaller than the size L2 of the conveyance direction (that is, X direction) of the second partition walls 34a and 34b. That is, in order to suppress the influence of heat conduction from the second space 42 side to the first space 40 side, it is necessary to extend the dimensions of the second partition walls 34a and 34b in the transport direction to some extent. Therefore, by making the dimension L1 in the conveying direction of the third space 38 smaller than the dimension in the conveying direction of the second partition walls 34a and 34b, the conveyance of the partition walls (30a, 30b) that do not contribute to the heat treatment of the object 12 is suppressed. The size of the direction becomes longer. Similarly, in order to suppress the influence of heat conduction from the first space 40 side to the second space 42 side, it is necessary to extend the dimensions of the first partition walls 32a and 32b in the transport direction to some extent. By making the dimension L1 in the conveying direction of the third space 38 smaller than the dimension L3 in the conveying direction (that is, the X direction) of the first partition walls 32a, 32b, it is suppressed that the dimension of the partition walls (30a, 30b) in the conveying direction becomes longer . In addition, as shown in FIG. 1, in the third space 38, unlike the first space 40 and the second space 42, a heater is not arranged.

For example, in the case where the third space 38 is not provided in the partition walls (30a, 30b), if the furnace atmosphere temperature of the first space 40 is different from the furnace atmosphere temperature of the second space 42, the furnace atmosphere gas tends to change from the furnace atmosphere temperature higher. Move from the space to the space where the furnace atmosphere temperature is low. For example, if the furnace atmosphere temperature of the second space 42 is set to be higher than the furnace atmosphere temperature of the first space 40 as in this embodiment, the furnace atmosphere gas in the second space 42 can easily pass through the communication passage 36 and flow into the second space. A space within 40. In the heat treatment furnace 10 of the present embodiment, the partition walls (30a, 30b) are provided with a third space 38 which is separated from the first space 40 and the second space 42 and communicates with the communication passage 36. Therefore, even if the furnace atmosphere gas in the second space 42 having a higher furnace atmosphere temperature than the first space 40 moves from the second space 42 to the third space 38 through the communication channel 36, it moves to the furnace atmosphere gas in the third space 38. It is also difficult to move further to the first space 40 through the communication passage 36. Therefore, the furnace atmosphere gas in the second space 42 can be prevented from flowing into the first space 40.

In addition, since a heater for heating the space is not provided in the third space 38, the temperature in the third space 38 is difficult to be higher than the temperature in the heated first space 40 and the temperature in the second space 42 in the space. Therefore, even if the furnace atmosphere gas in the first space 40 moves into the third space 38, the furnace atmosphere gas moved into the third space 38 is difficult to move to the second space 42 having a higher temperature than the third space 38. Similarly, even if the furnace atmosphere gas in the second space 42 moves into the third space 38, it is difficult for the furnace atmosphere gas moved into the third space 38 to move to the first space 40 whose temperature is higher than that in the third space 38. . Therefore, the furnace atmosphere gas in the second space 42 can be suppressed from flowing into the first space 40 and the furnace atmosphere gas in the first space 40 can be suppressed from flowing into the second space 42.

In addition, as described above, the third space 38 communicates with the air supply channel 46c and the exhaust air channel 48c. The temperature of the gas supplied from the gas flow path 46 c is lower than the furnace atmosphere gas heated in the first space 40 and the furnace atmosphere gas heated in the second space 42. Therefore, the temperature in the third space 38 can be adjusted to be lower than the temperature in the first space 40 and the second space 42 by using the gas supplied from the air supply channel 46 c into the third space 38. Thereby, it is difficult for the gas in the third space 38 to move to the first space 40 and the second space 42, and it is possible to suppress the gas from moving between the first space 40 and the second space 42. In addition, the exhaust flow passage 48c is provided to exhaust the gas in the third space 38. Therefore, even if the furnace atmosphere gas in the first space 40 moves into the third space 38, the furnace atmosphere gas that has moved into the third space 38 will be discharged from the third space 38 to the furnace body 20 through the exhaust runner 48c. Outside, it is difficult to move from the third space 38 to the second space 42. Similarly, even if the furnace atmosphere gas in the second space 42 moves into the third space 38, the furnace atmosphere gas moved into the third space 38 will be discharged from the third space 38 to the furnace body 20 via the exhaust runner 48c. It is difficult to move from the third space 38 to the first space 40 on the outside. Thereby, it is possible to suppress the movement of gas between the first space 40 and the second space 42.

The conveying device includes a plurality of conveying rollers 52, a first drive device 54, a second drive device 56, a third drive device 58, and a control device 60. The conveying device conveys the processed object 12 from one end of the first space 40 on the side of the opening 28 a to the other end of the second space 42 on the side of the opening 28 b via the communication channel 36. The workpiece 12 is transported by the transport roller 52.

The conveying roller 52 has a cylindrical shape and is provided in the first space 40, the communication passage 36, and the second space 42, and its axis extends in a direction perpendicular to the conveying direction (that is, in the Y direction). The plurality of conveying rollers 52 all have the same diameter, and are arranged in the conveying direction at regular intervals at regular intervals. The conveying roller 52 is supported so as to be rotatable around its axis, and is rotated by the driving force of the transmission driving device.

The first driving device 54 is a driving device (for example, a motor) that drives the conveying roller 52 arranged in the first space 40. The first driving device 54 is connected to the conveying roller 52 arranged in the first space 40 via a power transmission mechanism. When the driving force of the first driving device 54 is transmitted to the conveying roller 52 in the first space 40 via the power transmission mechanism, the conveying roller 52 in the first space 40 rotates. Similarly, the second driving device 56 is a driving device (for example, a motor) that drives the conveying roller 52 arranged in the second space 42. The second driving device 56 is connected to the transport roller 52 arranged in the second space 42 via a power transmission mechanism. When the driving force of the second driving device 56 is transmitted to the conveying roller 52 in the second space 42 via the power transmission mechanism, the conveying roller 52 in the second space 42 rotates. As the power transmission mechanism, a known power transmission mechanism can be used, for example, a mechanism formed by using a sprocket and a chain. The first driving device 54 and the second driving device 56 drive the corresponding conveying roller 52 so that the conveying roller 52 in the first space 40 and the conveying roller 52 in the second space 42 rotate at substantially the same speed. The first driving device 54 and the second driving device 56 are controlled by the control device 60 respectively.

The third driving device 58 is a pair of conveying rollers 52 arranged in the communicating passage 36, conveying rollers 52 arranged on the communicating passage 36 side in the first space 40, and conveying on the communicating passage 36 side in the second space 42 A driving device (for example, a motor) that drives the roller 52. The third driving device 58 is connected to the conveying roller 52 arranged in the communication passage 36, a part of the first space 40 and a part of the second space 42 via a power transmission mechanism. When the driving force of the third driving device 58 is transmitted to the conveying roller 52 via the power transmission mechanism, the conveying roller 52 rotates. As the power transmission mechanism, a known power transmission mechanism can be used, for example, a mechanism formed by using a sprocket and a chain. The third driving device 58 has a structure capable of changing the rotation speed of the conveying roller 52 by adjusting the output. By adjusting the output of the third driving device 58, the conveying roller 52 connected to the third driving device 58 rotates at approximately the same speed as the conveying roller 52 connected to the first driving device 54 or the second driving device 56 (hereinafter, also This is referred to as low-speed rotation), or it rotates at a higher speed than the conveying roller 52 connected to the first drive device 54 or the second drive device 56 (hereinafter, also referred to as high-speed rotation). The third driving device 58 is controlled by the control device 60 respectively.

In this embodiment, the conveying roller 52 in the first space 40 is connected to the first driving device 54, and the conveying roller 52 in the second space 42 is connected to the second driving device 56, but it is not limited to this structure. For example, the conveying roller 52 in the first space 40 and the conveying roller 52 in the second space 42 may also be connected to one driving device. In addition, the third drive device 58 has a structure capable of adjusting output, but is not limited to such a structure. It may be configured such that the conveying roller 52 arranged in the communication path 36, a part of the first space 40, and a part of the second space 42 can be rotated at a low speed or a high speed without switching the output of the third driving device 58. For example, the conveying device may be provided with a fourth drive device that drives the conveying roller 52 to rotate at a higher speed than the first drive device 54 and the second drive device 56. In this case, the conveying roller 52 arranged in the communication passage 36 can be switched between a driving device that rotates the conveying roller 52 at a low speed (ie, the first driving device 54 or the second driving device 56) and the conveying roller 52 using a clutch mechanism. Between high-speed rotating drive devices (ie, the fourth drive device).

Next, the operation of the heat treatment furnace 10 when the workpiece 12 is heat-treated will be described. In order to heat-treat the to-be-processed object 12, first, the heaters 44a to 44d are operated so that the furnace atmosphere temperature of the first space 40 and the second space 42 becomes the set temperature. Next, the object 12 to be processed is placed on the conveying roller 52. Next, the first driving device 54, the second driving device 56, and the third driving device 58 are operated, and the processed object 12 is transported from the opening 28a of the heat treatment furnace 10 through the first space 40, the communication passage 36 and the second space 42 To the opening 28b of the heat treatment furnace 10. In this way, the object 12 is heat-treated. In addition, as shown in FIG. 2, in the embodiment, one to-be-processed object 12 is placed in the axial direction of the conveying roller 52 (ie, Y direction) and conveyed in the heat treatment furnace 10, but it is not limited to such a structure. For example, the heat treatment furnace may be configured to transport the objects 12 to be treated in a state in which a plurality of objects 12 are arranged in the axial direction of the transport roller 52.

The conveyance of the to-be-processed object 12 is demonstrated in further detail. First, the processed object 12 is transported in the first space 40 after being carried in through the opening 28a. In the first space 40, the operation of the first driving device 54 rotates the conveying roller 52 to convey the processed object 12. At this time, the third drive device 58 is driven with approximately the same output as the first drive device 54, and the transport roller 52 connected to the third drive device 58 is approximately the same as the transport roller 52 connected to the first drive device 54 Speed rotation. Therefore, the workpiece 12 is conveyed at substantially the same speed during the period from the opening 28a being conveyed to the first space 40 to being conveyed out of the first space 40. While the to-be-processed object 12 is being conveyed in the first space 40, heat treatment is performed at the furnace atmosphere temperature in the first space 40.

When the processed object 12 is conveyed to the downstream side of the first space 40, the third driving device 58 is driven by an output that rotates the conveying roller 52 at a high speed. The sensor 62a provided on the first space 40 side of the first partition wall 32a of the partition wall 30a detects the object 12 to change the output of the third drive device 58. For example, optical sensors can be used for the sensor 62a and the sensor 62b described later, and the sensors 62a and 62b can detect whether the object 12 blocks the light path. When the sensor 62a detects the front end of the object 12, the control device 60 increases the output of the third driving device 58. In this way, the processed object 12 is conveyed from the first space 40 to the communication passage 36 at a high speed.

As mentioned above, the partition walls 30a and 30b are provided to separate the furnace atmosphere temperature of the first space 40 and the furnace atmosphere temperature of the second space 42, and the communication channel 36 formed between the partition walls 30a and 30b is to be processed The objects 12 are transported from the first space 40 to the second space 42 and installed. Therefore, during the conveyance in the communication passage 36, the to-be-processed object 12 is not heat-treated. The to-be-processed object 12 is conveyed in the communication path 36 at a high speed, so that the to-be-processed object 12 can be conveyed in the communication path 36 which does not contribute to heat processing in a short time. In addition, when changing the temperature at which the object 12 is heat-treated, it is preferable to set the temperature difference before and after the temperature change to a temperature corresponding to the object 12 to be processed. By conveying the object 12 at a high speed in the communication passage 36, the object 12 can be rapidly raised from the furnace atmosphere temperature of the first space 40 to the furnace atmosphere temperature of the second space 42.

In addition, as described above, no heater is arranged in the third space 38. Therefore, the size of the third space 38 in the conveying direction does not need to be a size capable of installing a heater, and the size can be reduced. In addition, the size of the third space 38 in the transport direction is smaller than the size of the first partition walls 32a and 32b and the second partition walls 34a and 34b in the transport direction. With such a size, it is possible to ensure the size (thickness) of the first partition walls 32a, 32b and the second partition walls 34a, 34b in the conveying direction, and reduce the size of the entire partition walls 30a, 30b in the conveying direction (ie, The size of the conveying direction of the communication passage 36). In this embodiment, the furnace atmosphere temperature of the second space 42 is set to be higher than the furnace atmosphere temperature of the first space 40, so it is particularly necessary to sufficiently ensure the thickness of the second partition walls 34a, 34b in the conveying direction. The transport direction dimension L2 of the second partition walls 34a, 34b arranged on the second space 42 side is larger than the transport direction dimension L1 of the third space 38, so that the transport direction of the second partition walls 34a, 34b can be sufficiently ensured. The thickness of the partition walls 30a and 30b can be reduced in the conveying direction. In this way, it is possible to reduce the size of the communication passage 36 in the conveying direction, and to convey the object 12 in the communication passage 36 that does not contribute to the heat treatment in a short time.

When the to-be-processed object 12 is conveyed in the communication passage 36, the output of the third drive device 58 is switched to an output substantially the same as that of the second drive device 56. In this way, the conveying roller 52 connected to the third driving device 58 rotates at approximately the same speed as the conveying roller 52 connected to the second driving device 56. The sensor 62b provided on the second space 42 side of the second partition 34a of the partition 30a detects the object 12 to change the output of the third driving device 58. Specifically, when the sensor 62b detects the rear end of the object 12, the control device 60 reduces the output of the third driving device 58. In this way, the processed object 12 is conveyed in the second space 42 at a low speed. While the to-be-processed object 12 is being conveyed in the second space 42, heat treatment is performed at the furnace atmosphere temperature in the second space 42. The to-be-processed object 12 is conveyed in the 2nd space 42, and is conveyed out of the heat processing furnace 10 from the opening 28b.

Above, specific examples of the technology disclosed in this specification have been described in detail, but these are only examples and do not limit the scope of patent applications. The technology described in the scope of the patent application includes various modifications and changes to the specific examples illustrated above. In addition, the technical elements described in this specification or the drawings are technically useful alone or in various combinations, and are not limited to the combinations described in the technical solutions at the time of application.

10: Heat treatment furnace 12: Object to be processed 20: Furnace 22: top wall 24: bottom wall 26a~26d: side wall 28a, 28b: opening 30a, 30b: partition wall 32a, 32b: the first partition 34a, 34b: second partition wall 36: Connecting channel 38: Third Space 40: First Space 42: second space 44a~44d: heater 46a~46c: air supply channel 48a~48c: Exhaust runner 52: conveyor roller 54: The first driving device 56: second drive device 58: Third drive device 60: control device 62a, 62b: sensor L1~L3: size

Fig. 1 shows the schematic structure of the heat treatment furnace of the embodiment, and is a longitudinal sectional view when the heat treatment furnace is cut by a plane parallel to the conveying direction of the object to be processed. Fig. 2 is a cross-sectional view taken along line II-II of Fig. 1. Fig. 3 is for explaining the size of the partition wall in the conveying direction.

10: Heat treatment furnace

12: Object to be processed

20: Furnace

22: top wall

24: bottom wall

26a~26d: side wall

28a, 28b: opening

30a, 30b: partition wall

32a, 32b: the first partition

34a, 34b: second partition wall

36: Connecting channel

38: Third Space

40: First Space

42: second space

44a~44d: heater

46a~46c: air supply channel

48a~48c: Exhaust runner

52: conveyor roller

54: The first driving device

56: second drive device

58: Third drive device

60: control device

62a, 62b: sensor

Claims (5)

A heat treatment furnace for heat treatment of the processed objects, The heat treatment furnace is equipped with a furnace body and a conveying device, The furnace body includes: a first space for heat-treating the object to be processed at a first temperature; a second space for heat-treating the object to be processed at a second temperature different from the first temperature; and partition walls to separate The first space and the second space, The conveying device conveys the processed object from one end of the first space to the other end of the second space, The partition wall has: A communication channel to connect the first space with the second space; and The third space is arranged in the partition wall, separated from the first space and the second space, and communicated with the communication channel. For example, the heat treatment furnace of claim 1, which also has: The exhaust runner is arranged in the furnace body, one end of which is in communication with the third space, and the other end is in communication with the outside of the furnace body, and exhausts the gas in the third space to the outside of the furnace body. Such as the heat treatment furnace of claim 1 or 2, in which, The heat treatment furnace is further equipped with: a gas supply channel, provided in the furnace body, one end of which is in communication with the third space, and the other end thereof is in communication with the outside of the furnace body, and supplies are supplied from the outside of the furnace body into the third space gas. Such as the heat treatment furnace of any one of claims 1 to 3, wherein: The partition wall further includes: a first partition wall that separates the first space and the third space; and a second partition wall that separates the second space and the third space, When the first temperature is higher than the second temperature, the size of the third space in the conveying direction is smaller than that of the first partition wall, and when the second temperature is higher than the first temperature, it is smaller than The size of the second partition wall in the conveying direction. Such as the heat treatment furnace of any one of claims 1 to 4, wherein: The furnace body is provided with a first heater and a second heater, The first heater is arranged in the first space, and can be adjusted to the first temperature in the first space, The second heater is arranged in the second space, and can be adjusted to the second temperature in the second space, And no heater is provided in the third space.

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