TW202042911A - Cyclone separator apparatus - Google Patents

Abstract

Apparatus for a cyclone separator are disclosed. A collection tray for an abatement apparatus cyclone separator operable to separate particles from a processing tool effluent stream, the collection tray comprising: sidewalls; and an inclined floor positionable to receive the particles from a plurality of cyclone separators locatable above the collection tray and to convey the particles to a drain aperture. In this way, the accumulation of particles in the vicinity of the cyclone separators is reduced which helps to prevent the operation of the cyclone separators from being impaired.

Description

Cyclone separation device

The field of the invention relates to devices used in a cyclone separator.

The cyclone separator of a reduction device is known. These cyclones are used to remove particulate matter from an exhaust gas stream processed by an abatement device. Such abatement devices are generally used to treat an exhaust gas stream from a process tool used in, for example, the semiconductor or flat panel display manufacturing industry. During this manufacturing period, residual perfluorinated compounds (PFC) and other compounds are present in the waste gas stream pumped from the treatment tool. PFC is difficult to remove from exhaust gas and it is undesirable to release it into the environment because PFC is known to have relatively high greenhouse activity. Known abatement devices use combustion to remove PFC and other compounds from the exhaust gas stream. Generally, the exhaust gas stream is a nitrogen stream containing PFC and other compounds. A fuel gas is mixed with an exhaust gas stream and the gas stream mixture is conveyed into a combustion chamber laterally surrounded by the outlet surface of a porous gas burner. Fuel gas and air are simultaneously supplied to the porous burner to achieve flameless combustion at the outlet surface. The amount of air passing through the porous burner consumes not only the fuel gas supplied to the burner, but also the gas flow mixture injected into the combustion chamber All combustibles in it.

Although such abatement device cyclones help separate particles from the exhaust gas stream, their use can have undesirable consequences. Accordingly, it is desirable to provide an improved cyclone separator with a reduction device.

According to a first aspect, there is provided a collection tray for a cyclone separator of a reducing device operable to separate particles from an exhaust stream of a processing tool. The collection tray includes: side walls; and an inclined bottom plate, which can be positioned to A plurality of cyclones can be located above the collecting tray to receive the particles and deliver the particles to a drain hole.

The first aspect recognizes that one of the problems with the cyclone separator of the existing reduction device is that particles separated from the exhaust gas stream and exiting an outlet of a cyclone separator can accumulate near the outlet and eventually block or damage the outlet, which affects The operation of these cyclones. Accordingly, a collection tray can be provided. The collection tray can be a cyclone separator collection tray of a weight reduction device. The collection tray may include side walls. The collection tray may include an inclined or inclined bottom plate, which may be positioned to receive or receive particles from a cyclone that is positioned or positioned with the collection tray. The inclined bottom plate can transport or transport the particles to a drain for removal from the collection tray. In this way, the accumulation of particles near the cyclones is reduced, which helps prevent the operation of the cyclones from being damaged.

In one embodiment, the height of one of the inclined bottom plates of adjacent cyclones is different. According to this, the inclined bottom plate can be inclined along its length, so that the height difference between the bottom plate and a cyclone separator changes between the cyclones.

In one embodiment, the height varies linearly and non-linearly. Accordingly, the height can be continuously changed or the bottom plate can be bent.

In one embodiment, a surface of the inclined bottom plate is one of a flat surface and a non-flat surface. Accordingly, the bottom plate can be flat or ridged.

In one embodiment, the drain hole is located at the lowest height. Accordingly, the drain holes can be positioned at a low point of the bottom plate.

In one embodiment, the tray is annular. The tray may be annular to match the positioning of the separating cyclones.

In one embodiment, the side walls include an inner cylinder separated from the concentric outer cylinder by the inclined bottom plate.

In one embodiment, the inclined bottom plate is inclined between the inner cylinder and the outer cylinder. Accordingly, the bottom plate can be inclined radially and or instead of inclined circumferentially.

In an embodiment, the collection tray includes a plurality of the drain ports, and each circumferential direction is positioned around the inclined bottom plate.

In one embodiment, the collection tray includes a cover having a sealable hole for receiving a corresponding one of the plurality of cyclones. Providing a cover helps prevent interaction between the space in the collector tray and other fluids flowing in the cyclone of the reduction device.

According to a second aspect, there is provided a cleaner for a reducing device cyclone operable to separate particles from an exhaust stream of a processing tool, the cleaner comprising: a mechanism which can be activated to interact with the cyclone The fluid flow inside interacts to remove the aggregated particles from the cyclone separator.

The second aspect recognizes that particle accumulation can occur at other locations within the cyclone, which can impair its operation. Accordingly, a cyclone separator cleaner with a reduction device can be provided. The cleaner may include a mechanism or assembly that can interact with or change the fluid flow in the cyclone separator. This interaction allows the particles accumulated in the cyclone to be removed or displaced. In this way, the accumulation of particles in the cyclone is reduced, which helps prevent the operation of the cyclones from being damaged.

In one embodiment, the mechanism includes a nozzle operable to spray fluid into an inlet of the cyclone separator. Accordingly, the nozzle can spray or inject fluid into the inlet of the cyclone separator. Injecting the fluid into the inlet of the cyclone allows the fluid to flow in the cyclone to help wash away accumulated particles.

In one embodiment, the reduction device cyclone includes a plurality of cyclones and the nozzle includes a plurality of outlets, each operable to spray a fluid into one of the inlets of one of the plurality of cyclones. Accordingly, several outlets can be provided in the nozzle to inject fluid into each inlet of an associated cyclone separator. This makes it possible to clean multiple cyclones with one universal nozzle.

In one embodiment, the nozzle is operable to spray the fluid into the inlets either continuously and simultaneously. Accordingly, the cyclone separators can be cleaned individually or together.

In one embodiment, the plurality of cyclones are arranged circumferentially and the nozzle can be rotated to continuously spray the fluid into each of the inlets. According to this, the nozzle can be rotated to deliver the fluid to each cyclone in turn.

In one embodiment, the mechanism includes a restrictor operable to restrict fluid flow from an outlet of the cyclone separator. Accordingly, a restrictor or baffle can be provided, which restricts or weakens the fluid flow from the cyclone separator. This restriction in the fluid flow helps to generate a pressure pulse in the cyclone, which helps to remove accumulated particles.

In one embodiment, the flow restrictor includes a component and an actuator that is structurally designed to translate the component between a position covering and exposing the outlet. Accordingly, the component can be moved to different positions to block and unblock the outlet so as to generate the pressure pulse in the separating cyclones.

In one embodiment, the actuator is structurally designed to translate the part to instantaneously cover the outlet.

In one embodiment, the reducing device cyclone includes a plurality of cyclones and the actuator is structured to translate the part between positions covering and exposing the outlets of the cyclones.

In one embodiment, the plurality of cyclones are arranged circumferentially and the actuator can be rotated to transport the component across the outlets of the cyclones.

In one embodiment, the actuator is structurally designed to translate a plurality of these components between covering and exposing a position corresponding to the outlet of the cyclone separator.

In one embodiment, the actuator is operable to cover and expose the outlets either continuously and simultaneously.

According to a third aspect, a reduction device cyclone is provided, which includes the collection tray of the first aspect and its embodiments and/or the cleaner of the second aspect and its embodiments.

Further specific and better aspects are proposed in the accompanying independent and subsidiary technical solutions. The features of the subsidiary technical solution can be appropriately combined with the features of the independent technical solution, and can be combined according to different combinations of their features clearly stated in the technical solution.

In the case of describing a device feature as being operable to provide a function, it will be understood that this includes a device feature that provides the function or is adapted or designed to provide the function.

Overview

Before discussing the embodiments in more detail, an overview will first be provided. When separating gases from heavy or high particle processes, some cyclones suffer from clogging. For example, the particles themselves may tend to clump together or be sprayed into an environment where another fluid may cause the particles to accumulate near the outlet of the separating cyclone. Moreover, particles can accumulate in the cyclone separator. Accordingly, a mechanism is provided that helps prevent accumulation and/or removal of accumulated particles in the cyclone separator and/or at its outlet. In one method, the mechanism involves a receiving tray positioned at one of the outlets of the separating cyclone. The outlet tray is shaped to prevent accumulation of particles sprayed from the outlet and transport the particles to a drain for removal. Generally, the tray has an inclination that helps the particles to move from the outlet toward the drain.

In addition, the tray is usually closed to prevent other fluids from being used for pretreatment of the waste gas stream to be separated by the cyclone to enter the tray or interact with the outlet of the cyclone. The mechanism can also or alternatively interact with the fluid flow in the cyclone or modify it to remove any accumulated particles. For example, a fluid may be provided at one of the inlets of the cyclone, which fluid helps to wash away the particles accumulated in the cyclone. Similarly, an outlet of the cyclone can be quickly covered and/or exposed to generate a transient pressure pulse in the cyclone to remove accumulated particles again.

Cyclone separator

Fig. 1 shows a cyclone separator 10 of a reduction device according to an embodiment. A plurality of separating cyclones 30 are located in a shell 20. Located at one end of the separating cyclone 30 is a nozzle mechanism 40. Located at the other end of the separating cyclone 30 is a collector tray 50. A water quench 60 is located at the center of the separating cyclones 30 distributed in the circumference.

In operation, an exhaust gas stream enters the housing 20 through an inlet 70 and passes through a central hole 80 provided in the collector tray 50. The exhaust gas flow passes through a water curtain 90 provided by the water quenching 60 and is delivered to the inlet of the separating cyclone 30 by the nozzle mechanism 40. The particles in the exhaust gas flow are discharged through the particle outlet 100 of the separating cyclone 30 and the clean exhaust gas leaves the separating cyclone 30 through an air outlet 110. The clean waste gas flow then leaves the abatement device cyclone 10 through an outlet 120.

Collector tray

Figure 2 shows the collector tray 50 in more detail. As can be seen, the collector tray 50 forms an annular ring. The annular ring has an inner side wall 130, a concentrically positioned outer side wall 140, a cover 150 and a bottom plate 160. The cover 150 has sealable holes 170 that are shaped to receive at least a part of the separating cyclone 30 that defines the particle outlet 100. The separating cyclone 30 is positioned in the sealable hole 170 to seal the inner cavity of the collector tray 50 to protect it from the water curtain 90 and any conveying fluid flow through the central hole 80.

The bottom plate 160 has a pair of drain ports 180. As can be seen in FIG. 3, the cover 140 has been removed to show the bottom plate 160 more clearly. The bottom plate 160 is inclined or sloped so that the height of the bottom plate 160 in the collector tray 50 changes. In particular, the height of the bottom plate is the lowest near the drainage openings 180 and the highest between the drainage openings 180. Although in this example, the bottom plate 160 has a constant gradient, it should be understood that a variable gradient may be provided depending on the nature of the particles leaving the separating cyclone 30 in order to force them to be uniformly toward the drain 180. Moreover, although the surface of the bottom plate 160 is flat and horizontal in the radial direction, it should be understood that the surface can be non-planar and/or can be inclined in the radial direction, which again depends on the nature of the particles in order to Prompt them to face the drain 180.

In operation, the particles leaving the air outlet 110 fall onto the bottom plate 160 and are transported to the drain port 180 by the slope of the bottom plate 160. The presence of the cover 150 helps prevent the entry of the water curtain 90 and prevents any back pressure caused by the flow of exhaust gas through the central hole 80.

Nozzle mechanism

Figure 4 shows a perspective view of the nozzle mechanism 40 in more detail. As can be seen, the nozzle mechanism 40 receives the air outlet 110. In one configuration, a paddle 190 is provided that rotates about a central axis 200 when needed. The paddle 190 is sized to close the particle outlet 100 when rotating. The blade 190 does not need to completely seal the gas outlet 110, but only needs to weaken the flow of gas from the gas outlet 110. When the blade 190 blocks the outlet 110, a pressure pulse is generated in the separating cyclone 30, which helps to remove any accumulated particles. Although a rotating blade configuration is shown, it will be appreciated that other shielding mechanisms may be provided that cover the air outlet 110 individually or together.

FIG. 5 is a cross-sectional view through the nozzle mechanism 40. As can be seen, a set of radially extending ducts 210 are coupled to one of the exhaust gas inlets 220 of each of the separation cyclones 30. The exhaust gas inlet 220 receives the exhaust gas stream containing particles to be separated by the separating cyclone 30. A nozzle 230 is positioned at a center of the radially extending pipe 210.

In operation, the nozzle 230 sprays a fluid stream (usually water) from a spray hole (not shown) radially aligned with the duct 210 and the exhaust gas inlet 220. This causes the fluid to enter the exhaust gas inlet 220 along with the exhaust gas flow and helps move the particles into the separation cyclone 30. Although in this configuration, fluid enters each exhaust gas inlet 220 at the same time, it will be appreciated that fluid may be provided to each separation cyclone 30 individually and generally continuously. In addition, a rotating nozzle can be provided to reduce the number of orifices required. The fluid leaving the outlet 120 helps to transport the particles on the bottom plate 160 toward the drain 180.

Although both a blade 190 and nozzle 230 are provided in this embodiment, it will be understood that this is not necessary and only one of these may be provided to move the particles into the separating cyclone 30.

As mentioned above, an air cyclone is designed to extract heavy particles and moisture from a gas stream in a negative or positive atmosphere. Existing cyclones used for heavy/high particle procedures failed due to particles clogging the outlet, which means that water started to oscillate in the cyclone. The number of particles may be unexpectedly high, and the type of particles may be uniformly dense, "muddy" powder. The failure is also due to the fact that the cyclone outlet is located in a high flow area with only a baffle below to prevent backflow of gas op into the cyclone outlet. Active water injection is used to prevent the accumulation of particles and allow the particles to be actively flushed out of the system. In one embodiment, jet nozzles are used to wash the cyclone separator. A jet is injected into the inlet of each cyclone separator. In one embodiment, the pump and nozzle are controlled by software. The duration of cyclone jet and pump operation can be selected from 1 second to 120 seconds. The operation of the cyclone separator and the pump can be selected simultaneously or sequentially. A startup sequence is provided to achieve a longer pre-flush (to fill the tray) at startup. In one embodiment, the outlet of the cyclone separator is in a sealed environment to stop backflow and ensure drainage. The bottom water tray is inclined towards the outlet to facilitate drainage. Provide dual outlets on the bottom side of the water pan to help reduce restrictions on passing through a single outlet. Accordingly, the outlet of the cyclone separator has been redesigned and the backflow is prevented by sealing the outlet in a ring to prevent the flow/pressure of the ambient gas. Seal the outlet of the cyclone separator in its own environment and activate a water flushing system. As part of the design of this water washing system, it needs to deal with the removal of particles. This is implemented by providing two outlets from a sealed environment, which can reach an area for removal, which does not affect the outlet of the cyclone separator The pressure or flow rate. It can also be actively pumped to ensure particle removal, or it can be passive, using a collected water head to discharge the sealed environment.

Based on this, it can be seen that one embodiment provides a sealed cyclone outlet-the cyclone outlet is sealed in a "ring", which means that it is not interfered by a positive or high flow/pressure environment. This means that the cyclone separator can be used in different types of atmosphere and whether the cyclone separator has sufficient flow rate through the inlet. It also allows captured particles to be contained and managed actively or passively, such as flushing/pumping particles. One embodiment provides a curved/tilted tray design. This design allows the particles to flow naturally towards/fall towards the exit of the tray and then passively or actively discharge from the tray. One embodiment provides active flushing. The tray can optionally be flushed with fluid to help remove particles. One embodiment provides active pumping of the outlet of the sealed cyclone separator. A pump can optionally be attached to the tray outlet port to actively pump the particles out for processing. This pump can be used permanently or intermittently in combination with active flushing or used alone.

Although the illustrative embodiments of the present invention have been disclosed in detail herein with reference to the accompanying drawings, it should be understood that the present invention is not limited to precise embodiments and those skilled in the art can do so without departing from the scope of the attached patent application and its equivalents. Various changes and modifications are made while defining the scope of the present invention.

10: Reduction device cyclone separator 20: shell 30: Separating cyclone 40: nozzle mechanism 50: Collector tray 60: water quenching 70: entrance 80: Center hole 90: Water curtain 100: pellet outlet 110: air outlet 120: Exit 130: inner wall 140: Outer wall 150: cover 160: bottom plate 170: hole 180: excretion 190: Paddle 200: central axis 210: Catheter 220: exhaust gas inlet 230: nozzle

The embodiments of the present invention will now be further described with reference to the accompanying drawings, in which:

Figure 1 illustrates a cyclone separator of a reduction device according to an embodiment;

Figure 2 shows a collector tray in more detail;

Figure 3 shows the collector tray with one cover removed;

Figure 4 shows a nozzle mechanism 40 in more detail; and

Figure 5 is a cross-sectional view of one of the nozzle mechanisms.

10: Reduction device cyclone separator

20: shell

30: Separating cyclone

40: nozzle mechanism

50: Collector tray

60: water quenching

70: entrance

80: Center hole

90: Water curtain

100: pellet outlet

110: air outlet

120: Exit

Claims (15)

A collection tray for a cyclone separator of a reducing device operable to separate particles from an exhaust gas stream of a processing tool, the collection tray comprising: Side wall; and An inclined bottom plate that can be positioned to receive the particles from a plurality of cyclones that can be located above the collection tray and deliver the particles to a drain hole. Such as the collection tray of claim 1, wherein one of the inclined bottom plates used for adjacent cyclones is different in height. Such as the collection tray of claim 2, wherein the height varies linearly and non-linearly. Such as the collection tray of claim 1, wherein the side walls include an inner cylinder separated from the concentric outer cylinder by the inclined bottom plate, and the inclined bottom plate is inclined between the inner cylinder and the outer cylinder. For example, the collection tray of claim 1, which includes a cover with a sealable hole for receiving a corresponding one of the plurality of cyclones. A cleaner for a cyclone separator of a reducing device operable to separate particles from an exhaust gas stream of a treatment tool, the cleaner comprising: A mechanism that can be activated to interact with the fluid flow in the cyclone to remove the aggregated particles from the cyclone. The cleaner of claim 6, wherein the mechanism includes a nozzle operable to spray fluid into an inlet of the cyclone separator. The cleaner of claim 7, wherein the reducing device cyclone includes a plurality of cyclones and the nozzle includes a plurality of outlets, each of which is operable to spray a fluid to one of the inlets of one of the plurality of cyclones in. The cleaner of claim 8, wherein the nozzle is operable to spray the fluid into the inlets in one of continuous and simultaneous manner. Such as the cleaner of claim 8, wherein the plurality of cyclones are arranged circumferentially and the nozzle is rotatable to continuously spray the fluid into each of the inlets. The cleaner of claim 6, wherein the mechanism includes a flow restrictor operable to restrict fluid flow from an outlet of the cyclone separator. Such as the cleaner of claim 11, wherein the flow restrictor includes a component and an actuator designed to translate the component between a position covering and exposing the outlet. Such as the cleaner of claim 12, wherein the reducing device cyclone includes a plurality of cyclones and the actuator is structured to translate the part between positions covering and exposing the outlets of the cyclones. Such as the cleaner of claim 13, wherein the actuator is structurally designed to translate a plurality of these components between covering and exposing a position corresponding to the outlet of the cyclone. A cyclone separator of a weight reduction device, which includes at least one of a collection tray such as claim 1 and a cleaner such as claim 6.

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