TW202041693A - Soft magnetic alloy powder, electronic component and manufacturing method thereof - Google Patents

Soft magnetic alloy powder, electronic component and manufacturing method thereof Download PDF

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TW202041693A
TW202041693A TW109109536A TW109109536A TW202041693A TW 202041693 A TW202041693 A TW 202041693A TW 109109536 A TW109109536 A TW 109109536A TW 109109536 A TW109109536 A TW 109109536A TW 202041693 A TW202041693 A TW 202041693A
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soft magnetic
alloy powder
magnetic alloy
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小林久也
林慎吾
木野泰志
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日商新東工業股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/16Metallic particles coated with a non-metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/22Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip
    • B22F3/225Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip by injection molding
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006Details, accessories not peculiar to any of the following furnaces
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/02Ferrous alloys, e.g. steel alloys containing silicon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/06Ferrous alloys, e.g. steel alloys containing aluminium
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding
    • H05K9/0084Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising a single continuous metallic layer on an electrically insulating supporting structure, e.g. metal foil, film, plating coating, electro-deposition, vapour-deposition

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
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  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Powder Metallurgy (AREA)
  • Soft Magnetic Materials (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Abstract

The present invention provides a soft magnetic alloy powder that can miniaturize electronic components for use in a high temperature environment, and also provides electronic components. The soft magnetic alloy powder contains Si and Al in amounts satisfying the relationship of Si ≥ 2% by weight, Al ≥ 1% by weight, and Si+Al ≤ 12% by weight, and the remainder is Fe and unavoidable impurities. Using this soft magnetic alloy powder, electronic component such as a magnetic powder core, an electromagnetic wave absorption shield, or an electromagnetic wave absorber can be obtained.

Description

軟磁性合金粉末、電子零件及其製造方法Soft magnetic alloy powder, electronic part and manufacturing method thereof

本發明係關於軟磁性合金粉末、電子零件及其製造方法。The present invention relates to soft magnetic alloy powder, electronic parts and manufacturing methods thereof.

近年來,作為在電源電路中所使用的功率電感器,係根據小型化、低高度化的要求,而期望一種能夠在大電流、高頻下使用的軟磁性材料。習知,使用屬於氧化物的肥粒鐵系材料作為電感器的主要材料,但是由於飽和磁化強度低而不利於小型化。於是,近年來,使用飽和磁化強度高、且有利於小型化、低高度化的合金系材料的金屬電感器急速增加。在金屬電感器中,已知有使用以鐵為主材料的軟磁性合金粉末,將軟磁性合金粉末及樹脂混合,並進行壓縮成形而得的壓粉磁心等。In recent years, as power inductors used in power supply circuits, there is a demand for a soft magnetic material that can be used at high currents and high frequencies in response to requirements for miniaturization and low height. Conventionally, ferrite-based materials belonging to oxides are used as the main material of inductors, but they are not conducive to miniaturization due to low saturation magnetization. Therefore, in recent years, there has been a rapid increase in metal inductors using alloy-based materials that have high saturation magnetization and are advantageous for miniaturization and low profile. Among the metal inductors, there are known powder cores obtained by using soft magnetic alloy powder mainly made of iron, mixing the soft magnetic alloy powder and resin, and performing compression molding.

在對能源問題的關心增長的過程中,促進了汽車的電動化及電子設備的省電化,要求能夠更小型化、且能量損耗較少的壓粉磁心。舉一個具體例子,為了應對汽車中用於實現高環境性能及駕駛性能的高度化控制,伴隨著在電動機或螺線管等致動器上安裝ECU(Electronic Control Unit:電子控制單元)的「機電一體化」,在具有更高溫環境的發力機室等中設置ECU的需求不斷增加,要求一種可於更高溫環境下使用之以ECU為對象的壓粉磁心。In the process of increasing interest in energy issues, the electrification of automobiles and the power saving of electronic equipment have been promoted, and powder magnetic cores that can be smaller and have less energy loss are required. To give a specific example, in order to cope with the advanced control used to achieve high environmental performance and driving performance in automobiles, it is accompanied by the installation of ECU (Electronic Control Unit) on actuators such as motors and solenoids. "Integration", the need to install ECUs in power generator rooms with higher temperature environments is increasing, and there is a demand for a powder core that can be used in higher temperature environments for ECUs.

現有的使用軟磁性合金粉末的壓粉磁心等電子零件,已知隨著溫度的上升磁心損耗增大,由於使用時的磁心損耗產生的發熱,磁心本身的溫度升高。隨著該溫度的上升,磁心損耗增大,發熱增加,由於重複該過程,有時會引起熱失控。因此,正在研究改善高溫區域的磁心損耗的溫度特性。例如,在專利文獻1中記載有對成形體進行熱處理,該成形體係對具有特定組成的Fe-Si-Al系合金粉末進行加壓成形而獲得;在引用文獻2中記載有在具有特定組成的Fe-Si-Al系合金粉末的表面形成了絕緣被膜的軟磁性合金粉末。但是,Fe-Si-Al系合金粉末因為硬、塑性變形性差,所以難以高密度成形,且難以獲得對電子零件的小型化有利的高飽和磁通密度。 [先前技術文獻] [專利文獻]The existing electronic parts such as powder cores using soft magnetic alloy powders have known that the core loss increases as the temperature rises, and the temperature of the core itself increases due to heat generated by the core loss during use. As the temperature rises, the core loss increases and heat generation increases. Repeating this process sometimes causes thermal runaway. Therefore, research is under way to improve the temperature characteristics of the core loss in the high-temperature region. For example, Patent Document 1 describes that a formed body is heat-treated, and the forming system is obtained by press-forming Fe-Si-Al alloy powder having a specific composition; The Fe-Si-Al alloy powder has soft magnetic alloy powder with an insulating film formed on the surface. However, Fe-Si-Al alloy powders are hard and have poor plastic deformability, so it is difficult to high-density molding, and it is difficult to obtain a high saturation magnetic flux density that is advantageous for miniaturization of electronic parts. [Prior Technical Literature] [Patent Literature]

專利文獻1:國際公開公報第2011/016207號 專利文獻2:日本專利特開2012-9825號公報Patent Document 1: International Publication No. 2011/016207 Patent Document 2: Japanese Patent Laid-Open No. 2012-9825

(發明所欲解決之問題)(The problem to be solved by the invention)

本發明的目的係提供能夠將電子零件小型化、且能夠實現在高溫環境下使用的軟磁性合金粉末,進而,提供電子零件。 (解決問題之技術手段)The object of the present invention is to provide soft magnetic alloy powder that can reduce the size of electronic parts and can be used in a high-temperature environment, and further provide electronic parts. (Technical means to solve the problem)

本發明人等進行了各種研究的結果,發現具有高飽和磁通密度及負的磁心損耗溫度特性的Fe-Si-Al系合金的組成,遂完成本發明。As a result of various studies conducted by the inventors, they discovered the composition of an Fe-Si-Al alloy having high saturation magnetic flux density and negative core loss temperature characteristics, and completed the present invention.

即,本發明係一種軟磁性合金粉末,其包含滿足Si≧2重量%、Al≧1重量%、及Si+Al≦12重量%的關係之量的Si和Al,且剩餘部分係Fe及不可避免的雜質。That is, the present invention is a soft magnetic alloy powder that contains Si and Al in an amount that satisfies the relationship of Si≧2% by weight, Al≧1% by weight, and Si+Al≦12% by weight, and the remainder is Fe. Impurities to avoid.

根據本發明的一態樣,提供上述的軟磁性合金粉末,其在25℃~120℃時具有負的磁心損耗溫度特性。According to an aspect of the present invention, the above-mentioned soft magnetic alloy powder is provided, which has a negative core loss temperature characteristic at 25°C to 120°C.

根據本發明的一態樣,提供上述的軟磁性合金粉末,其包含滿足Si≧3.5重量%、Al≧2.5重量%、及Si+Al≦12重量%的關係之量的Si和Al。According to an aspect of the present invention, the above-mentioned soft magnetic alloy powder is provided, which contains Si and Al in amounts satisfying the relationship of Si≧3.5% by weight, Al≧2.5% by weight, and Si+Al≦12% by weight.

根據本發明的一態樣,提供上述的軟磁性合金粉末,其在120℃~150℃時具有負的磁心損耗溫度特性。According to one aspect of the present invention, the above-mentioned soft magnetic alloy powder is provided, which has a negative core loss temperature characteristic at 120°C to 150°C.

根據本發明的一態樣,提供上述的軟磁性合金粉末,其粒徑(D50)為1~50μm。According to one aspect of the present invention, the above-mentioned soft magnetic alloy powder is provided, the particle size (D50) of which is 1-50 μm.

根據本發明的一態樣,提供一種包含上述的軟磁性合金粉末的電子零件。According to an aspect of the present invention, there is provided an electronic component containing the above-mentioned soft magnetic alloy powder.

根據本發明的一態樣,提供上述的電子零件,其係壓粉磁心、電磁波吸收遮罩體或電磁波吸收體。According to an aspect of the present invention, there is provided the above-mentioned electronic component, which is a powder magnetic core, an electromagnetic wave absorbing shield body, or an electromagnetic wave absorbing body.

根據本發明的一態樣,提供一種電子零件的製造方法,其包括:在上述的軟磁性合金粉末的表面形成被膜,獲得造粒粉的步驟;對造粒粉進行加壓成形獲得成形體的步驟;以及在550℃~950℃的溫度下對成形體進行熱處理的步驟。According to an aspect of the present invention, there is provided a method of manufacturing an electronic component, which includes: forming a film on the surface of the soft magnetic alloy powder described above to obtain granulated powder; and pressing the granulated powder to obtain a compact Step; and a step of heat-treating the formed body at a temperature of 550°C to 950°C.

根據本發明的一態樣,提供一種電子零件的製造方法,其包括:在上述的軟磁性合金粉末的表面形成被膜,獲得造粒粉的步驟;對造粒粉進行射出成形獲得成形體的步驟;以及在550℃~950℃的溫度下對成形體進行熱處理的步驟。 (對照先前技術之功效)According to one aspect of the present invention, there is provided a method of manufacturing an electronic component, which includes: forming a film on the surface of the soft magnetic alloy powder described above to obtain granulated powder; and injection molding the granulated powder to obtain a molded body ; And the step of heat-treating the formed body at a temperature of 550°C to 950°C. (Compared with the effect of previous technology)

本發明可提供能夠將電子零件小型化、且能夠實現在高溫環境下使用的軟磁性合金粉末。The present invention can provide soft magnetic alloy powder that can reduce the size of electronic parts and can be used in a high-temperature environment.

以下,針對本發明的一實施形態進行詳細說明。本發明並不限定於以下的實施形態,可以在不損害本發明的效果的範圍內施加適當變更而實施。另外,在以下的說明中,「A~B」係指「A以上且B以下」。Hereinafter, an embodiment of the present invention will be described in detail. The present invention is not limited to the following embodiments, and can be implemented with appropriate changes within a range that does not impair the effects of the present invention. In addition, in the following description, "A-B" means "A or more and B or less".

本實施形態的軟磁性合金粉末,係包含滿足Si≧2重量%、Al≧1重量%、及Si+Al≦12重量%的關係之量的Si和Al,且剩餘部分是Fe及不可避免的雜質。本實施形態的軟磁性合金粉末,較佳係包含滿足Si≧3.5重量%、Al≧2.5重量%、以及Si+Al≦12重量%的關係之量的Si和Al。藉由包含滿足上述關係之量的Si和Al,軟磁性合金粉末的飽和磁通密度(Bs)及透磁率提高。由於該效果,本實施形態的軟磁性合金粉末係有利於電子零件的小型化。The soft magnetic alloy powder of this embodiment contains Si and Al in amounts satisfying the relationship of Si≧2% by weight, Al≧1% by weight, and Si+Al≦12% by weight, and the remainder is Fe and unavoidable Impurities. The soft magnetic alloy powder of the present embodiment preferably contains Si and Al in an amount satisfying the relationship of Si≧3.5% by weight, Al≧2.5% by weight, and Si+Al≦12% by weight. By including Si and Al in amounts satisfying the above relationship, the saturation magnetic flux density (Bs) and permeability of the soft magnetic alloy powder are improved. Due to this effect, the soft magnetic alloy powder of this embodiment contributes to the miniaturization of electronic parts.

<其他元素> 本實施形態的軟磁性合金粉末中,作為不可避免的雜質,可在不影響目標特性的程度下包含N、S、O等元素。<Other elements> In the soft magnetic alloy powder of the present embodiment, elements such as N, S, and O can be contained as unavoidable impurities to the extent that the target characteristics are not affected.

此外,包含滿足上述關係之量的Si和Al,且剩餘部分係Fe及不可避免的雜質的軟磁性合金粉末,在25℃~120℃時,具有負的磁心損耗溫度特性。包含滿足Si≧3.5重量%、Al≧2.5重量%、及Si+Al≦12重量%的關係之量的Si和Al的本實施形態的軟磁性合金粉末,在120℃~150℃時,亦具有負的磁心損耗溫度特性。In addition, a soft magnetic alloy powder containing Si and Al in amounts satisfying the above relationship, and the remainder being Fe and inevitable impurities, has a negative core loss temperature characteristic at 25°C to 120°C. The soft magnetic alloy powder of the present embodiment, which contains Si and Al in an amount satisfying the relationship of Si≧3.5% by weight, Al≧2.5% by weight, and Si+Al≦12% by weight, also has properties at 120°C to 150°C Negative core loss temperature characteristics.

(負的磁心損耗溫度特性) 負的磁心損耗溫度特性係指軟磁性合金粉末的磁心損耗相對於溫度具有負的係數,亦即,軟磁性合金粉末的磁心損耗隨著溫度的上升而下降的特性。具有負的磁心損耗溫度特性的本實形態的軟磁性合金粉末,因為磁心損耗隨著溫度的上升而下降,所以能夠抑制由使用時的磁心損耗產生的發熱造成的磁心本身的溫度的升高,具有作為習知難以在高溫環境下使用的壓粉磁心等電子零件的材料的適宜特性。本實施形態的軟磁性合金粉末具有負的磁心損耗溫度特性,可認為是因為由組成所決定的磁致伸縮常數具有正的值。(Negative core loss temperature characteristics) The negative core loss temperature characteristic means that the core loss of the soft magnetic alloy powder has a negative coefficient with respect to temperature, that is, the core loss of the soft magnetic alloy powder decreases as the temperature rises. The actual form of the soft magnetic alloy powder with negative core loss temperature characteristics, because the core loss decreases as the temperature rises, it can suppress the increase in the temperature of the core itself caused by the heat generated by the core loss during use. It has suitable characteristics as a material for electronic parts such as powder magnetic cores, which are conventionally difficult to use in high-temperature environments. The soft magnetic alloy powder of the present embodiment has a negative core loss temperature characteristic, which is considered to be because the magnetostriction constant determined by the composition has a positive value.

本實施形態的軟磁性合金粉末,較佳係粒徑(D50)為1~50μm。「粒徑」係指中值粒徑:D50,可利用習知公知的方法、例如雷射繞射-散射法進行測定。關於上述的軟磁性合金粉末的飽和磁通密度(Bs)、透磁率及負的磁心損耗溫度特性的效果,可在具有廣泛粒徑的軟磁性合金粉末中獲得,但藉由粒徑(D50)為1~50μm、較佳為2~40μm、更佳為2.5~35μm、再更佳為3~30μm,可獲得特別高的效果。The soft magnetic alloy powder of the present embodiment preferably has a particle size (D50) of 1 to 50 μm. "Particle diameter" refers to the median diameter: D50, which can be measured by a conventionally known method, such as a laser diffraction-scattering method. Regarding the effects of the saturation magnetic flux density (Bs), magnetic permeability, and negative core loss temperature characteristics of the soft magnetic alloy powder described above, it can be obtained in soft magnetic alloy powders with a wide range of particle sizes, but the particle size (D50) It is 1 to 50 μm, preferably 2 to 40 μm, more preferably 2.5 to 35 μm, still more preferably 3 to 30 μm, and particularly high effects can be obtained.

(製造方法) 本實施形態的軟磁性合金粉末,係可藉由以下作為金屬粉末的製造方法例示的習知公知的方法進行製造,但是只要具有本實施形態的組成,便具有上述的磁特性,所以對製造方法無特別限定。 ・霧化法:水霧化法、氣體霧化法、離心力霧化法等 ・機械處理法:粉碎法、機械合金化法等 ・熔融紡絲法 ・旋轉電解法(REP法):電漿REP法等 ・化學處理法:氧化物還原法、氯化物還原法、濕式冶金技術、羰基反應法等(Manufacturing method) The soft magnetic alloy powder of this embodiment can be produced by a conventionally known method exemplified below as the production method of metal powder. However, as long as it has the composition of this embodiment, it has the above-mentioned magnetic properties. There is no particular limitation. ・Atomization method: water atomization method, gas atomization method, centrifugal force atomization method, etc. ・Mechanical treatment method: crushing method, mechanical alloying method, etc. ・Melt spinning method ・Rotating electrolysis method (REP method): Plasma REP method, etc. ・Chemical treatment methods: oxide reduction method, chloride reduction method, hydrometallurgical technology, carbonyl reaction method, etc.

以上例示的製造方法中,特別是霧化法可以在大氣壓下大量生產小徑且球形的軟磁性合金粉末。其中,若採用水霧化法,則可以低成本進行製造。 在使用水霧化法製造軟磁性合金粉末的情況下,藉由對將調整為所需組成的材料熔化而得的熔液,噴射以成為所需的冷卻條件及粒徑的方式設定參數的高壓水,可使熔液飛散及凝固而獲得粉末。然後,對所獲得的粉末進行乾燥、分級,根據需要進行表面處理,可獲得目標的軟磁性合金粉末。Among the manufacturing methods exemplified above, in particular, the atomization method can mass-produce small-diameter and spherical soft magnetic alloy powders under atmospheric pressure. Among them, if the water atomization method is adopted, it can be manufactured at low cost. When the soft magnetic alloy powder is produced by the water atomization method, the molten material obtained by melting the material adjusted to the required composition is sprayed with a high pressure setting the parameters so that the required cooling conditions and particle size Water can scatter and solidify the melt to obtain powder. Then, the obtained powder is dried, classified, and surface treated as necessary to obtain the target soft magnetic alloy powder.

本實施形態的電子零件,係包含上述的軟磁性合金粉末。本實施形態的電子零件不僅係電動機、電抗器、變壓器等通常所使用的電子零件,亦係作為電磁閥、螺線管、感測器等在汽車等運輸設備等廣泛且多樣的產業領域中所使用的電子零件。此外,本實施形態的電子零件,係為了吸收特定頻率的電磁波的目的而使用的電磁波吸收遮罩體或電磁波吸收體。 本實施形態的電子零件較佳為壓粉磁心、電磁波吸收遮罩體或電磁波吸收體。The electronic component of this embodiment contains the soft magnetic alloy powder described above. The electronic components of this embodiment are not only commonly used electronic components such as motors, reactors, and transformers, but also used as solenoid valves, solenoids, sensors, etc. in a wide and diverse industrial field such as transportation equipment such as automobiles. Electronic parts used. In addition, the electronic component of the present embodiment is an electromagnetic wave absorption mask or electromagnetic wave absorber used for the purpose of absorbing electromagnetic waves of a specific frequency. The electronic component of this embodiment is preferably a powder magnetic core, an electromagnetic wave absorption mask body, or an electromagnetic wave absorber.

本實施形態的壓粉磁心、電磁波吸收遮罩體或電磁波吸收體,係包含上述的軟磁性合金粉末。較佳係,本實施形態的壓粉磁心包含與賦予絕緣性及成形加工性的樹脂等混合、並被造粒的形態的軟磁性合金粉末。較佳係,本實施形態的電磁波吸收遮罩體的至少一部分塗佈有將軟磁性合金粉末、樹脂及油墨等混合調製而得的糊料。較佳係,本實施形態的電磁波吸收體的至少一部分黏貼有將軟磁性合金粉末、樹脂及橡膠等混合並成形加工為所需厚度的片材。The powder magnetic core, electromagnetic wave absorption mask, or electromagnetic wave absorber of this embodiment contains the soft magnetic alloy powder described above. Preferably, the powder magnetic core of the present embodiment contains soft magnetic alloy powder in a form in which it is mixed with resin or the like that imparts insulating properties and moldability, and then granulated. Preferably, at least a part of the electromagnetic wave absorption mask of this embodiment is coated with a paste prepared by mixing soft magnetic alloy powder, resin, ink, and the like. Preferably, at least a part of the electromagnetic wave absorber of the present embodiment is adhered to a sheet of a mixture of soft magnetic alloy powder, resin, rubber, etc., and formed into a desired thickness.

本實施形態的電子零件的製造方法,係包括:在上述的軟磁性合金粉末的表面形成絕緣被膜,獲得造粒粉的步驟;對造粒粉進行加壓成形獲得成形體的步驟;以及在550℃~950℃的溫度下對成形體進行熱處理的步驟。 進行熱處理的步驟中的溫度為550℃~950℃、較佳為600℃~900℃。此外,加熱時間較佳係設為30分鐘~2小時左右。對於構成熱處理前的成形體的軟磁性合金粉末,藉由加壓成形,導入屬於透磁率降低、磁心損耗的主要原因之一的磁滯損耗增大的原因的應變,藉由在上述條件下對成形體進行熱處理,可以充分除去應變。熱處理較佳係在氮環境等惰性氣體環境、或減壓環境下進行。The method of manufacturing an electronic component of the present embodiment includes: forming an insulating film on the surface of the soft magnetic alloy powder described above to obtain granulated powder; pressing the granulated powder to obtain a compact; and at 550 The step of heat-treating the formed body at a temperature of from ℃ to 950°C. The temperature in the step of performing the heat treatment is 550°C to 950°C, preferably 600°C to 900°C. In addition, the heating time is preferably set to about 30 minutes to 2 hours. For the soft magnetic alloy powder that constitutes the molded body before the heat treatment, by press molding, strain is introduced, which is one of the main causes of the decrease in magnetic permeability and the increase in hysteresis loss of the magnetic core. The formed body is heat-treated to sufficiently remove strain. The heat treatment is preferably performed in an inert gas environment such as a nitrogen environment, or a reduced pressure environment.

本實施形態的電子零件的製造方法,係包括:在上述的軟磁性合金粉末的表面形成絕緣被膜,獲得造粒粉的步驟;對造粒粉進行射出成形而獲得成形體的步驟;以及在550℃~950℃的溫度下對成形體進行熱處理的步驟。 進行熱處理的步驟中的溫度為550℃~950℃、較佳為600℃~900℃。此外,加熱時間較佳係設為30分鐘~2小時左右。藉由射出成形,能夠以更高精度成形加工為複雜的形狀。 在成形加工後,根據需要進行脫脂、熱處理等,獲得具有所需的形狀、特性的電子零件。 [實施例]The method of manufacturing an electronic component of the present embodiment includes: forming an insulating film on the surface of the soft magnetic alloy powder described above to obtain granulated powder; injection molding the granulated powder to obtain a molded body; and at 550 The step of heat-treating the formed body at a temperature of from ℃ to 950°C. The temperature in the step of performing the heat treatment is 550°C to 950°C, preferably 600°C to 900°C. In addition, the heating time is preferably set to about 30 minutes to 2 hours. By injection molding, it is possible to form complex shapes with higher precision. After the forming process, degreasing, heat treatment, etc. are carried out as needed to obtain electronic parts with the desired shape and characteristics. [Example]

以下表示本發明的實施例。本發明的內容並非由該等實施例限定而解釋。The following shows examples of the present invention. The content of the present invention is not limited and interpreted by these embodiments.

(軟磁性合金粉末的製造) 將調整為表1所示各組成的材料利用高頻感應爐熔化,使用水霧化法獲得軟磁性合金粉末。水噴霧法的條件係如下所述。 <水噴霧條件> ・水壓:100MPa ・水量:100L/分鐘 ・水溫:20℃ ・孔徑:φ4mm ・熔液溫度:1800℃(Manufacturing of soft magnetic alloy powder) The materials adjusted to each composition shown in Table 1 were melted in a high-frequency induction furnace, and soft magnetic alloy powder was obtained by a water atomization method. The conditions of the water spray method are as follows. <Water spray conditions> ・Water pressure: 100MPa ・Water volume: 100L/min ・Water temperature: 20℃ ・Aperture: φ4mm ・Molten temperature: 1800℃

利用振動真空乾燥機(VU-60:中央化工機製造)使所獲得的軟磁性合金粉末乾燥。乾燥條件係如下所述。 <乾燥條件> ・溫度:100℃ ・壓力:10kPa以下 ・時間:60分鐘 對於乾燥後的軟磁性合金粉末的組成,使用ICP發光分析裝置(SPS3500DD:日立高新科技製)進行定量分析。The obtained soft magnetic alloy powder was dried using a vibration vacuum dryer (VU-60: manufactured by Central Chemical Machinery). The drying conditions are as follows. <Drying conditions> ・Temperature: 100℃ ・Pressure: 10kPa or less ・Time: 60 minutes The composition of the dried soft magnetic alloy powder was quantitatively analyzed using an ICP emission analyzer (SPS3500DD: manufactured by Hitachi High-Technologies).

使用氣流分級裝置(TURBO-CLASSIFIER:日清工程製)對乾燥後的軟磁性合金粉末進行分級,獲得目標的軟磁性合金粉末。使用濕式粒度分析裝置(MT3300EX II:麥奇克拜爾製)測定所獲得的軟磁性合金粉末的粒徑(D50)。The dry soft magnetic alloy powder was classified by an air current classifier (TURBO-CLASSIFIER: Nissin Engineering Co., Ltd.) to obtain the target soft magnetic alloy powder. The particle diameter (D50) of the obtained soft magnetic alloy powder was measured using a wet particle size analyzer (MT3300EX II: manufactured by Microchick Bayer).

(試樣的製作) 將依上述方式製造的各軟磁性合金粉末與矽樹脂及丙烯酸樹脂混合,製造造粒粉。軟磁性合金粉末與矽樹脂及丙烯酸樹脂的調配量以重量比計,軟磁性合金粉末:有機矽樹脂:丙烯酸樹脂=98.5:0.5:1.0。 將各造粒粉壓粉成形(成形壓力:980MPa)為環狀,製作壓粉磁心(外徑:15mm、內徑:9mm、厚度:3mm),在表1所示的磁心燒成溫度下進行熱處理。 對各壓粉磁心進行以下的評價。 (評價項目) 1. 磁心填充率 根據各壓粉磁心的重量與外形尺寸算出磁心填充率。 2. 磁特性 2-1. 飽和磁化強度 使用試樣振動型磁力計(型號VSM-C7-10A:東英工業股份有限公司製),由各壓粉磁心的磁化曲線測定飽和磁化強度值(Bs)。 2-2. 透磁率、磁心損耗 製作以線徑:0.3mm的銅線雙線纏繞在壓粉磁心上的環形磁心,並作為評價試樣。使用BH分析儀(SY8258:岩通計測製),在測定頻率:100kHz、最大磁通密度:100mT的條件下,在25℃~150℃的溫度範圍內測定透磁率和磁心損耗。(Production of sample) The soft magnetic alloy powder produced in the above-mentioned manner is mixed with silicone resin and acrylic resin to produce granulated powder. The blending amount of soft magnetic alloy powder, silicone resin and acrylic resin is based on the weight ratio, soft magnetic alloy powder: silicone resin: acrylic resin = 98.5: 0.5: 1.0. Each granulated powder was pressed into a ring shape (molding pressure: 980MPa) to produce a powder core (outer diameter: 15mm, inner diameter: 9mm, thickness: 3mm), and it was performed at the core firing temperature shown in Table 1. Heat treatment. The following evaluations were performed on each dust core. (Evaluation item) 1. Magnetic core filling rate Calculate the core filling rate based on the weight and external dimensions of each powder core. 2. Magnetic properties 2-1. Saturation magnetization Using a sample vibration magnetometer (model VSM-C7-10A: manufactured by Toei Industrial Co., Ltd.), the saturation magnetization value (Bs) was measured from the magnetization curve of each dust core. 2-2. Magnetic permeability, core loss A toroidal magnetic core with a wire diameter: 0.3mm copper wire double-wire wound on the powder magnetic core was made and used as an evaluation sample. Using a BH analyzer (SY8258: manufactured by Iwatogyo Co., Ltd.), the magnetic permeability and core loss were measured in the temperature range of 25℃~150℃ under the conditions of measuring frequency: 100kHz and maximum magnetic flux density: 100mT.

(評價結果) 評價結果示於表1。 表1中的「有利於小型化」中的◎、〇等記號,係指:飽和磁化強度值(Bs)在未滿1.1T(特斯拉)的情況為×;在1.1T(特斯拉)以上且未滿1.4T(特斯拉)的情況為△;在1.4T(特斯拉)以上且未滿1.6T(特斯拉)的情況為〇;在1.6T以上的情況為◎。 表1中的「溫度特性」中的◎、〇等記號,係指:隨著溫度升高,磁心損耗上升的情況為×;在25℃~120℃的溫度區域內具有負的磁心損耗溫度特性,但在超過120℃的溫度區域內磁心損耗上升的情況為△;在120℃~150℃的溫度區域內具有負的磁心損耗溫度特性的情況為○;在120℃~150℃的溫度區域內具有負的磁心損耗溫度特性,且相較於在25℃和150℃下的磁心損耗,磁心損耗減少20%以上的情況為◎。 表1中的「磁特性」中的◎、〇等記號,係指: 在下述條件中, 1) 25℃下的透磁率為60以上、及 2) 25℃下的磁心損耗為800kw/m3 以下, 不滿足兩者的情況為×;滿足任一者的情況為△;滿足兩者的情況為〇, 滿足下述條件的兩者的情況為◎, 1) 25℃下的透磁率為60以上、及 2) 25℃下的磁心損耗為650kw/m3 以下。(Evaluation results) The evaluation results are shown in Table 1. The signs such as ◎ and ○ in the "conducive to miniaturization" in Table 1 mean: when the saturation magnetization value (Bs) is less than 1.1T (Tesla), it is ×; at 1.1T (Tesla) ) Or more and less than 1.4T (Tesla) is △; more than 1.4T (Tesla) and less than 1.6T (Tesla) is 0; and more than 1.6T is ◎. The symbols such as ◎ and ○ in the "temperature characteristics" in Table 1 refer to the case where the core loss increases as the temperature increases; it has a negative core loss temperature characteristic in the temperature range of 25°C to 120°C , But when the core loss increases in the temperature range over 120℃, it is △; when it has negative core loss temperature characteristics in the temperature range of 120℃~150℃, it is ○; in the temperature range of 120℃~150℃ It has negative core loss temperature characteristics, and compared with the core loss at 25°C and 150°C, the case where the core loss is reduced by more than 20% is ◎. The symbols such as ◎ and ○ in the "magnetic properties" in Table 1 refer to: Under the following conditions, 1) the permeability at 25°C is 60 or more, and 2) the core loss at 25°C is 800kw/m 3 Below, the case where both are not satisfied is ×; the case where either is satisfied is △; the case that both is satisfied is ○, and the case that both of the following conditions are satisfied is ◎, 1) The permeability at 25°C is 60 Above and 2) The core loss at 25°C is 650kw/m 3 or less.

[表1]

Figure 02_image001
[Table 1]
Figure 02_image001

如表1所示,使用了實施例的軟磁性合金粉末的壓粉磁心與使用了比較例的軟磁性合金粉末(所謂的鋁矽鐵粉(Sendust)係已知的現有的Fe-Si-Al系合金)的壓粉磁心相比,令人驚訝的是,儘管同為Fe-Si-Al系合金粉末,但具有高飽和磁化強度值,磁心填充率亦提高。亦即,本發明的軟磁性合金粉末能夠高密度成形、獲得高飽和磁通密度,所以對於壓粉磁心的小型化具有優異的特性。 此外,使用了實施例的軟磁性合金粉末的壓粉磁心,令人驚訝的是,不僅在25℃~120℃的溫度區域,而且在120℃~150℃的非常高的溫度區域內亦具有負的磁心損耗溫度特性。亦即,本發明的軟磁性合金粉末具有作為能夠實現在高溫環境下使用的壓粉磁心的材料等的優異特性。 如表1所示,可知本發明不依存於粉末的粒徑(D50),可以實現上述的效果。 如上所述,本發明的軟磁性合金粉末具有能夠實現壓粉磁心的小型化以及在高溫環境下使用的優異特性。As shown in Table 1, the powder magnetic core using the soft magnetic alloy powder of the example and the soft magnetic alloy powder using the comparative example (the so-called Sendust) is a known existing Fe-Si-Al Compared with the powder cores based on alloys), it is surprising that despite the same Fe-Si-Al alloy powders, they have a high saturation magnetization value and the core filling rate is also improved. That is, the soft magnetic alloy powder of the present invention can be formed at a high density and obtain a high saturation magnetic flux density, so it has excellent characteristics for miniaturization of the powder magnetic core. In addition, the powder magnetic core using the soft magnetic alloy powder of the example is surprisingly negative not only in the temperature range of 25°C to 120°C, but also in the very high temperature range of 120°C to 150°C. The core loss temperature characteristics. That is, the soft magnetic alloy powder of the present invention has excellent characteristics as a material for a powder magnetic core that can be used in a high-temperature environment. As shown in Table 1, it can be seen that the present invention does not depend on the particle size (D50) of the powder and can achieve the above-mentioned effects. As described above, the soft magnetic alloy powder of the present invention has excellent characteristics that can achieve miniaturization of the powder magnetic core and use in a high-temperature environment.

(變形例) 在上述實施例中,作為使用了一實施形態的軟磁性合金粉末的電子零件,以藉由加壓成形製造的壓粉磁心為例進行了說明,但是一實施形態並不限定於該例示。例如,可以是藉由射出成形而製造的電子零件。從上述實施例的結果亦可知,使用具有負的磁心損耗溫度特性的本發明的軟磁性合金粉末的電子零件能夠適合在高溫環境下使用。(Modification) In the above-mentioned embodiment, as an electronic component using the soft magnetic alloy powder of one embodiment, a powder magnetic core manufactured by press molding has been described as an example, but one embodiment is not limited to this example. For example, it may be an electronic component manufactured by injection molding. It can also be seen from the results of the foregoing examples that electronic components using the soft magnetic alloy powder of the present invention having a negative core loss temperature characteristic can be suitably used in a high-temperature environment.

作為一實施形態的電子零件的其他例示,可例舉電磁波吸收遮罩體或電磁波吸收體。電磁波吸收遮罩體係為了截止特定頻率的電磁波的目的而使用,例如可以設置於手機等移動設備的殼等。電磁波吸收遮罩體係以獲得目標特性的方式將磁性粉末、樹脂和油墨等調製、混合並製成糊料,將該糊料塗佈在適當部位而獲得。另外,在製作糊料時,為了促進磁性粉末的分散,亦可以進行真空脫泡。As another example of the electronic component of one embodiment, an electromagnetic wave absorption mask or an electromagnetic wave absorber may be mentioned. The electromagnetic wave absorption mask system is used for the purpose of cutting electromagnetic waves of a specific frequency. For example, it can be installed in the case of mobile devices such as mobile phones. The electromagnetic wave absorption mask system is obtained by preparing and mixing magnetic powder, resin, ink, etc. into a paste in a way to obtain the target characteristics, and coating the paste on an appropriate part. In addition, in order to promote the dispersion of the magnetic powder when making the paste, vacuum degassing may also be performed.

電磁波吸收體是為了截止特定頻率的電磁波的目的而使用,例如在ETC(電子收費系統)的出入口或EMC試驗等中使用的電波暗室中使用。電磁波吸收體係以獲得目標特性的方式將磁性粉末、樹脂和橡膠調製、混合並成形為片狀,將該片黏貼在適當部位而獲得。The electromagnetic wave absorber is used for the purpose of cutting electromagnetic waves of a specific frequency. For example, it is used in an anechoic chamber used in ETC (electronic toll collection system) entrances and exits or EMC tests. The electromagnetic wave absorption system is obtained by preparing magnetic powder, resin, and rubber, mixing, and forming into a sheet in a way to obtain the target characteristics, and then sticking the sheet on the appropriate part.

Claims (9)

一種軟磁性合金粉末,其包含滿足Si≧2重量%、Al≧1重量%、及Si+Al≦12重量%的關係之量的Si和Al,且剩餘部分是Fe及不可避免的雜質。A soft magnetic alloy powder containing Si and Al in an amount satisfying the relationship of Si≧2% by weight, Al≧1% by weight, and Si+Al≦12% by weight, and the remainder is Fe and unavoidable impurities. 如請求項1之軟磁性合金粉末,其在25℃~120℃具有負的磁心損耗溫度特性。Such as the soft magnetic alloy powder of claim 1, which has a negative core loss temperature characteristic at 25°C to 120°C. 如請求項1或2之軟磁性合金粉末,其包含滿足Si≧3.5重量%、Al≧2.5重量%、以及Si+Al≦12重量%的關係之量的Si和Al。For example, the soft magnetic alloy powder of claim 1 or 2 contains Si and Al in amounts satisfying the relationship of Si≧3.5% by weight, Al≧2.5% by weight, and Si+Al≦12% by weight. 如請求項1至3中任一項之軟磁性合金粉末,其在120℃~150℃具有負的磁心損耗溫度特性。The soft magnetic alloy powder according to any one of claims 1 to 3, which has a negative core loss temperature characteristic at 120°C to 150°C. 如請求項1至4中任一項之軟磁性合金粉末,其粒徑(D50)為1~50μm。The soft magnetic alloy powder of any one of claims 1 to 4 has a particle size (D50) of 1 to 50 μm. 一種電子零件,其包含請求項1至5中任一項之軟磁性合金粉末。An electronic component comprising the soft magnetic alloy powder of any one of claims 1 to 5. 如請求項6之電子零件,其係壓粉磁心、電磁波吸收遮罩體或電磁波吸收體。For example, the electronic parts of claim 6, which are powder magnetic cores, electromagnetic wave absorption shields or electromagnetic wave absorbers. 一種電子零件的製造方法,其包括: 在請求項1至5中任一項之軟磁性合金粉末的表面形成被膜,獲得造粒粉的步驟; 對造粒粉進行加壓成形獲得成形體的步驟;以及 在550℃~950℃的溫度下對成形體進行熱處理的步驟。A manufacturing method of electronic parts, which includes: The step of forming a film on the surface of the soft magnetic alloy powder of any one of claims 1 to 5 to obtain granulated powder; The step of press-forming the granulated powder to obtain a shaped body; and A step of heat-treating the formed body at a temperature of 550°C to 950°C. 一種電子零件的製造方法,其包括: 在請求項1至5中任一項之軟磁性合金粉末的表面形成被膜,獲得造粒粉的步驟; 對造粒粉進行射出成形獲得成形體的步驟;以及 在550℃~950℃的溫度下對成形體進行熱處理的步驟。A manufacturing method of electronic parts, which includes: The step of forming a film on the surface of the soft magnetic alloy powder of any one of claims 1 to 5 to obtain granulated powder; A step of injection molding the granulated powder to obtain a molded body; and A step of heat-treating the formed body at a temperature of 550°C to 950°C.
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