TW202037931A - Condensing lens and optical module - Google Patents

Condensing lens and optical module Download PDF

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TW202037931A
TW202037931A TW109103316A TW109103316A TW202037931A TW 202037931 A TW202037931 A TW 202037931A TW 109103316 A TW109103316 A TW 109103316A TW 109103316 A TW109103316 A TW 109103316A TW 202037931 A TW202037931 A TW 202037931A
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light
aforementioned
light receiving
curved surface
curved
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TW109103316A
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今井秀行
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日商阿爾卑斯阿爾派股份有限公司
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • G02B5/10Mirrors with curved faces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0232Optical elements or arrangements associated with the device

Abstract

The present invention provides a condensing lens that implements a light condensing function and an optical path conversion function by a simple configuration, and an optical module using the same. This condensing lens has a bottom surface, an inclined surface extending obliquely at an obtuse angle with respect to the bottom surface, a curved surface formed on the inclined surface, and a reflective film formed on the curved surface. The curved surface changes the traveling direction of incident light, and condenses the incident light at a predetermined position within a plane parallel to the bottom surface.

Description

集光透鏡,及光模組Collecting lens, and light module

本發明係有關於集光透鏡、及光模組。The present invention relates to a light collecting lens and a light module.

因為智慧手機等的行動機器的普及、與IoT (Internet of Things)的導入,以光網路的資料通信量年年增加,要求通信速度與品質的更加提升。另一方面,搭載於光通信機器的各個光電子部件,要求小型化及高密度化。Due to the popularization of mobile devices such as smartphones and the introduction of IoT (Internet of Things), the data communication volume of optical networks is increasing year by year, and there is a demand for higher communication speed and quality. On the other hand, various optoelectronic components mounted in optical communication equipment require miniaturization and high density.

在光通信用的光模組中,光二極體(PD)等的受光元件的受光面位於與基板平行的面內。傳送光信號的光纖,也因為一般在與光模組的基板面平行的方向連接,光纖的傳遞軸與受光面的位置關係成為平行。為了將輸入的光信號集光至受光面,如圖1所示,使用集光透鏡與反射鏡。反射鏡將在集光透鏡集光的光的進行方向彎曲約90度,使其入射至受光面。In an optical module for optical communication, the light receiving surface of a light receiving element such as a photodiode (PD) is located in a plane parallel to the substrate. Since the optical fiber that transmits the optical signal is generally connected in a direction parallel to the substrate surface of the optical module, the positional relationship between the transmission axis of the optical fiber and the light receiving surface becomes parallel. In order to collect the input optical signal to the light receiving surface, as shown in Figure 1, a collecting lens and a reflecting mirror are used. The reflecting mirror bends the light collected by the collecting lens by approximately 90 degrees in the direction in which it is incident on the light-receiving surface.

在圖1的構成中,因為為了集光與光路變換而使用各別的光學元件,妨礙了光模組的小型化。又,需要與集光透鏡與反射鏡的精密對位和組裝的工程。從光模組的小型化的觀點來看,希望使用集光機能與光路變換機能一體化的光學元件。In the configuration of FIG. 1, separate optical elements are used for light collection and optical path conversion, which hinders the miniaturization of the optical module. In addition, a process of precise alignment and assembly with the collecting lens and mirror is required. From the viewpoint of miniaturization of the optical module, it is desirable to use an optical element that integrates a light collection function and an optical path conversion function.

提案有加工半導體基板在基底基板製作彎曲的反射鏡面,變換來自發光元件的輸出光的方向同時準直成平行光的構成(例如,專利文獻1參照)。It is proposed to process a semiconductor substrate to produce a curved mirror surface on a base substrate, and to convert the direction of the output light from the light-emitting element while collimating it into parallel light (for example, refer to Patent Document 1).

又,提案有在底面與形成銳角的傾斜面設置凹面,將從支持於座架之上的點光源出射的光線的擴大角與傳遞方向偏向的光學元件(例如,專利文獻2參照)。 [先前技術文獻] [專利文獻]In addition, an optical element has been proposed in which a concave surface is provided on the bottom surface and the inclined surface forming an acute angle, and the expansion angle of the light emitted from a point light source supported on the mount frame is deflected from the propagation direction (for example, refer to Patent Document 2). [Prior Technical Literature] [Patent Literature]

[專利文獻1]特開2008-83255號公報 [專利文獻2]特開2006-145781號公報[Patent Document 1] JP 2008-83255 A [Patent Document 2] JP 2006-145781 A

[發明所欲解決的問題][The problem to be solved by the invention]

將圖1的集光透鏡與反射鏡就這樣一體化時,需要複數面的精密加工及向複數面的成膜。具體來說,向光入射的集光面形成抗反射膜,在變換光路的反射鏡面形成反射膜,於光的出射面形成抗反射膜的形成是必要的。因為加工的複雜性及複數的成膜工程,難以降低成本。When the light-collecting lens and the reflecting mirror of FIG. 1 are integrated in this way, precise processing of the plural surfaces and film formation on the plural surfaces are required. Specifically, it is necessary to form an anti-reflection film on the light-collecting surface where light enters, to form a reflection film on the mirror surface that changes the optical path, and to form an anti-reflection film on the light exit surface. Because of the complexity of processing and the multiple film-forming processes, it is difficult to reduce costs.

本發明的目的為提供一種以簡單化的構成具有集光機能與光路變換機能的集光透鏡。 [解決問題的手段]The object of the present invention is to provide a light collecting lens having a light collecting function and an optical path conversion function with a simplified configuration. [Means to solve the problem]

為了解決上述課題,本發明的第1態樣中,集光透鏡,具有: 底面; 相對於前述底面以鈍角傾斜延伸的傾斜面; 形成於前述傾斜面的彎曲面; 形成於前述彎曲面的反射膜; 其中, 前述彎曲面變更入射光的進行方向,同時將前述入射光集光至與前述底面平行的面內的預定位置。In order to solve the above-mentioned problems, in the first aspect of the present invention, the collecting lens has: Underside An inclined surface extending at an obtuse angle with respect to the aforementioned bottom surface; The curved surface formed on the aforementioned inclined surface; The reflective film formed on the aforementioned curved surface; among them, The curved surface changes the direction of the incident light while condensing the incident light to a predetermined position in a plane parallel to the bottom surface.

本發明的第2態樣中,光模組,具有: 受光元件; 使入射光入射至前述受光元件的集光透鏡; 前述集光透鏡,具有: 位於前述受光元件的實裝面的底面; 相對於前述底面以鈍角傾斜延伸的傾斜面; 形成於前述傾斜面的彎曲面; 形成於前述彎曲面的反射膜; 其中, 前述彎曲面變更前述入射光的進行方向將前述入射光集光至前述受光元件的受光面。 [發明的效果]In the second aspect of the present invention, the optical module has: Light receiving element Make incident light incident on the condenser lens of the aforementioned light receiving element; The aforementioned light collecting lens has: Located on the bottom surface of the mounting surface of the aforementioned light receiving element; An inclined surface extending at an obtuse angle with respect to the aforementioned bottom surface; The curved surface formed on the aforementioned inclined surface; The reflective film formed on the aforementioned curved surface; among them, The curved surface changes the direction of the incident light to collect the incident light to the light receiving surface of the light receiving element. [Effects of the invention]

根據上述構成,能夠以簡單化的構成實現集光機能與光路變換機能。因為集光透鏡的構成被簡單化,能夠降低使用該集光透鏡的光模組的組裝成本。According to the above configuration, the light collection function and the optical path conversion function can be realized with a simplified configuration. Because the configuration of the collecting lens is simplified, the assembly cost of the optical module using the collecting lens can be reduced.

在詳細說明實施形態的構成前,再詳細說明多一點將圖1的集光透鏡與反射鏡單純一體化的構成中產生的課題。Before describing the configuration of the embodiment in detail, there will be more detailed descriptions of the problems that occur in the configuration in which the collecting lens and the reflecting mirror of FIG. 1 are simply integrated.

圖2表示將圖1的集光透鏡與反射鏡就這樣一體化的構成。該光學元件具有設於光的入射側的凸面、將光的傳遞方向彎曲略90度的傾斜面、對向於受光元件(PD)的出射面。凸面具有集光機能,傾斜面具有反射機能。Fig. 2 shows a configuration in which the collecting lens and the reflecting mirror of Fig. 1 are integrated in this way. The optical element has a convex surface provided on the incident side of light, an inclined surface that bends the transmission direction of light by 90 degrees, and an exit surface facing the light receiving element (PD). The convex surface has a light collection function, and the inclined surface has a reflection function.

在傾斜面形成反射膜,將入射光向受光元件(PD)的方向反射。另一方面,在入射側的凸面與出射面形成抗反射膜,抑制了光損耗,維持高受光效率。A reflective film is formed on the inclined surface to reflect incident light in the direction of the light receiving element (PD). On the other hand, an anti-reflection film is formed on the convex surface and the exit surface on the incident side to suppress light loss and maintain high light receiving efficiency.

該構成中,至少必須在入射側的凸面、及反射用的傾斜面確保成形的精度。又,需要向2個面的抗反射膜的成膜、與向一個面的反射膜的成膜的總計3面的成膜工程。再來,另外需要用來將一體化的光學元件支持於受光元件上方的支持構件。期望需要成形精度的面之數與需要成膜的面之數少者。In this configuration, at least the convex surface on the incident side and the inclined surface for reflection must ensure molding accuracy. In addition, a total of three film-forming processes of film formation on two surfaces of the antireflection film and film formation on one surface of the reflective film are required. Furthermore, a supporting member for supporting the integrated optical element above the light receiving element is additionally required. It is desired that the number of surfaces requiring forming accuracy and the number of surfaces requiring film formation are less.

以下所述的實施形態中,實現降低精密的加工面與成膜工程之數,以簡單化的構成容易進行向基板的實裝的集光透鏡、及使用其的光模組。In the embodiments described below, the number of precise processing surfaces and the number of film forming processes is reduced, and the condensing lens that can be easily mounted on the substrate with a simplified configuration, and the optical module using the same.

圖3為實施形態的集光透鏡10的示意圖。集光透鏡10例如與受光元件40一同使用,構成光接收副組件(ROSA:Receiver Optical Sub-Assembly)30。ROSA30為適用集光透鏡10的光模組的一例。FIG. 3 is a schematic diagram of the collecting lens 10 of the embodiment. The collecting lens 10 is used, for example, together with the light receiving element 40 to constitute a light receiving sub-assembly (ROSA: Receiver Optical Sub-Assembly) 30. ROSA 30 is an example of an optical module to which the collecting lens 10 is applied.

集光透鏡10具有位於配置受光元件40的基板50的表面50S的底面11、及覆蓋受光元件40的受光面41的彎曲面13。受光面41可以位於與配置集光透鏡10的基板50的表面50S相同高度的位置、也可以相對於表面50S在垂直的方向(Z方向)以某程度偏移。The condensing lens 10 has a bottom surface 11 located on the surface 50S of the substrate 50 on which the light receiving element 40 is arranged, and a curved surface 13 covering the light receiving surface 41 of the light receiving element 40. The light-receiving surface 41 may be located at the same height as the surface 50S of the substrate 50 on which the condensing lens 10 is arranged, or may be offset to some extent in the vertical direction (Z direction) with respect to the surface 50S.

彎曲面13如同後述,為形成於相對於底面11以鈍角傾斜的斜面的凹面。覆蓋凹面形成反射膜15。以彎曲面13及反射膜15形成反射鏡。形成反射膜15的彎曲面13,具有變換入射光Lin的傳遞方向的方向變換機能、及將入射光Lin集光至受光元件40的集光機能兩者。入射光Lin在形成於彎曲面13的反射膜15被反射。反射光藉由彎曲面13的透鏡機能直接入射至受光面41。The curved surface 13 is a concave surface formed on an inclined surface inclined at an obtuse angle with respect to the bottom surface 11 as described later. A reflective film 15 is formed to cover the concave surface. The curved surface 13 and the reflective film 15 form a mirror. The curved surface 13 forming the reflective film 15 has both a direction conversion function for converting the transmission direction of the incident light Lin and a light collection function for collecting the incident light Lin to the light receiving element 40. The incident light Lin is reflected by the reflective film 15 formed on the curved surface 13. The reflected light is directly incident on the light receiving surface 41 by the lens function of the curved surface 13.

在該構成中,具有成形的精度的面只有彎曲面13而已。反射膜15形成於彎曲面13,在除此之外的面沒有形成膜的必要。又,集光透鏡10直接位於基板50上,因為彎曲面13以相對於受光面41覆蓋的方式突出,不需要用來支持集光透鏡10的支持構件。In this configuration, only the curved surface 13 is the only surface with molding accuracy. The reflective film 15 is formed on the curved surface 13, and there is no need to form a film on the other surfaces. In addition, the condensing lens 10 is directly located on the substrate 50, and because the curved surface 13 protrudes so as to cover the light-receiving surface 41, no supporting member for supporting the condensing lens 10 is required.

集光透鏡10藉由光學黏接劑等固定於基板50的表面50S也可以。集光透鏡10的固定位置,例如,藉由主動對準法設定在以受光元件40的受光量成為最大的位置。The condensing lens 10 may be fixed to the surface 50S of the substrate 50 with an optical adhesive or the like. The fixed position of the light-collecting lens 10 is set at a position where the amount of light received by the light-receiving element 40 becomes the maximum by an active alignment method, for example.

藉由以相對於受光元件40的受光面41覆蓋的方式設定的反射鏡(或彎曲面13)的配置,能夠使反射鏡的上面成為平坦面。因為將上面設為平坦面,藉由將光學元件即集光透鏡10吸附能夠更容易把持。The arrangement of the reflecting mirror (or the curved surface 13) set so as to cover the light receiving surface 41 of the light receiving element 40 can make the upper surface of the reflecting mirror a flat surface. Since the upper surface is set as a flat surface, it can be easier to hold by attaching the light collecting lens 10 which is an optical element.

集光透鏡10,例如,雖以光學玻璃、石英玻璃、合成石英玻璃等形成,但是高分子或塑膠素材的透鏡也可以。使用石英系的材料時也一樣,在集光透鏡10的成形需要精度的只有彎曲面13的一面而已,與圖2的構成相比較更容易成形。The light-collecting lens 10 is formed of, for example, optical glass, quartz glass, synthetic quartz glass, or the like, but a lens made of polymer or plastic material may be used. The same is true when a quartz-based material is used. Only the curved surface 13 requires precision in the molding of the condensing lens 10, which is easier to mold than the configuration of FIG. 2.

反射膜15以於使用波長的光的吸收極少的材料形成。將集光透鏡10適用ROSA30時,期望使用在1.3μm頻帶或1.5μm頻帶不引起光吸收的材料。作為一例,金屬塗佈的情形中,使用Al、Au、Cr、該等的2種以上的組合。取代金屬,使用將折射率不同的介電質膜層積的多層反射膜也可以。The reflective film 15 is formed of a material that absorbs very little light of the used wavelength. When ROSA 30 is applied to the collecting lens 10, it is desirable to use a material that does not cause light absorption in the 1.3 μm band or the 1.5 μm band. As an example, in the case of metal coating, a combination of two or more of Al, Au, Cr, and these is used. Instead of metal, a multilayer reflective film in which dielectric films with different refractive indexes are laminated may be used.

圖4為說明彎曲面13的集光特性的圖。在彎曲面13反射的光,相對於受光面41的法線n,以1度~數度傾斜入射至受光元件40。藉由使集光軸Ox從受光面41的法線n偏移,防止了在受光面41反射的光回到原來的光路。光通信的情形,因為返回光成為信號雜訊,藉由將集光軸Ox從受光面41的法線n些微傾斜,能夠降低雜訊。FIG. 4 is a diagram illustrating the light collection characteristics of the curved surface 13. The light reflected on the curved surface 13 enters the light receiving element 40 obliquely from 1 to several degrees with respect to the normal line n of the light receiving surface 41. By shifting the light collection axis Ox from the normal line n of the light receiving surface 41, the light reflected on the light receiving surface 41 is prevented from returning to the original optical path. In the case of optical communication, since the returning light becomes signal noise, by slightly tilting the collection axis Ox from the normal line n of the light receiving surface 41, the noise can be reduced.

圖5為集光透鏡10的斜視圖。集光透鏡10具有成為向基板50的實裝面的底面11、相對於底面11以鈍角傾斜的傾斜面14、形成於傾斜面14的凹形狀的彎曲面13。彎曲面13如同上述形成反射膜15(圖3及圖4參照)。FIG. 5 is an oblique view of the collecting lens 10. The condensing lens 10 has a bottom surface 11 that is a mounting surface to the substrate 50, an inclined surface 14 inclined at an obtuse angle with respect to the bottom surface 11, and a concave curved surface 13 formed on the inclined surface 14. The curved surface 13 forms the reflective film 15 as described above (refer to FIGS. 3 and 4).

圖5的例中,傾斜面14在從底面11立起的面17與底面11連接。雖藉由設置面17,形成將集光透鏡10的全體穩定保持的基底部分,但該形狀沒有限定。傾斜面14從底面11的邊緣以鈍角傾斜延伸也可以。與底面11對向的上面12及傾斜面14也在面18連接,但該形狀沒有限定,從上面12的邊緣傾斜也可以。In the example of FIG. 5, the inclined surface 14 is connected to the bottom surface 11 on a surface 17 rising from the bottom surface 11. Although the installation surface 17 forms a base portion that stably holds the entire condensing lens 10, the shape is not limited. The inclined surface 14 may extend obliquely from the edge of the bottom surface 11 at an obtuse angle. The upper surface 12 and the inclined surface 14 facing the bottom surface 11 are also connected to the surface 18, but the shape is not limited, and it may be inclined from the edge of the upper surface 12.

藉由將傾斜面14相對於底面11以鈍角向傾斜上方突出,能夠使在彎曲面13反射的光,不通過其他的光學面而直接導向集光點即受光面。By protruding the inclined surface 14 obliquely upward with respect to the bottom surface 11 at an obtuse angle, the light reflected on the curved surface 13 can be directly guided to the light receiving surface, which is the light collection point, without passing through other optical surfaces.

彎曲面13成為橢圓形的凹面或拋物面也可以。這是因為如同後述,光入射的凹透鏡的拋物面被傾斜面14切開。彎曲面13的曲率半徑、偏心量、圓錐常數等,因應光纖的出射端的位置、受光元件40的受光面41的位置等適宜設計。在較佳的例中,入射光的方向約變換90度,以在受光面41集光的方式設計彎曲面13。此時,在彎曲面13反射的光,以最小且接近真圓的點入射至受光面41。作為一例,彎曲面13的曲率半徑R為0.75mm、圓錐常數K為-1。The curved surface 13 may be an elliptical concave surface or a parabolic surface. This is because the paraboloid of the concave lens into which light enters is cut by the inclined surface 14 as described later. The radius of curvature, eccentricity, conic constant, etc. of the curved surface 13 are appropriately designed in accordance with the position of the exit end of the optical fiber, the position of the light receiving surface 41 of the light receiving element 40, and the like. In a preferred example, the direction of the incident light is changed by about 90 degrees, and the curved surface 13 is designed to collect light on the light receiving surface 41. At this time, the light reflected on the curved surface 13 enters the light receiving surface 41 at the smallest point close to a true circle. As an example, the radius of curvature R of the curved surface 13 is 0.75 mm, and the conic constant K is -1.

圖6為集光透鏡10的正視圖與側視圖。圖6(a)所示的正視圖,為從入射方向(Y方向)看集光透鏡10時的圖。圖6(b)所示的側視圖,為包含入射光的光軸的在YZ面內的圖。FIG. 6 is a front view and a side view of the light collecting lens 10. The front view shown in FIG. 6(a) is a view when the collecting lens 10 is viewed from the incident direction (Y direction). The side view shown in FIG. 6(b) is a view in the YZ plane including the optical axis of incident light.

形成於傾斜面14的彎曲面13的輪廓,如圖5所示雖是橢圓形狀,但從向集光透鏡10的入射光的方向(Y方向)看時,如同圖6(a)所示能看到幾乎呈圓形。The contour of the curved surface 13 formed on the inclined surface 14 is an elliptical shape as shown in FIG. 5, but when viewed from the direction (Y direction) of the incident light to the condenser lens 10, it can be as shown in FIG. 6(a). Seen almost circular.

圖6(b)中,集光透鏡10具有底面11、上面12、背面16、及光入射側的前面17及18。該等面的成形並不需要太高的精度。傾斜面14相對於底面11以135度前後的角度傾斜。因為實際光路的變換與集光在彎曲面13進行,在傾斜面14自體的成形也不需要高度的精度。另一方面,彎曲面13,以向受光面41的集光效率成為最大,且在受光面41的光點成為真圓的方式精密成形。In FIG. 6(b), the collecting lens 10 has a bottom surface 11, an upper surface 12, a back surface 16, and front surfaces 17 and 18 on the light incident side. The forming of this surface does not require too high precision. The inclined surface 14 is inclined at a front-back angle of 135 degrees with respect to the bottom surface 11. Since the actual optical path conversion and light collection are performed on the curved surface 13, the self-forming on the inclined surface 14 does not require high precision. On the other hand, the curved surface 13 is precisely shaped so that the light collection efficiency to the light receiving surface 41 is maximized, and the light spot on the light receiving surface 41 becomes a true circle.

圖7為表示集光透鏡10的彎曲面13的特性的圖、圖8為說明透鏡的偏心的圖。圖7(a)為表示在彎曲面13形成的凹透鏡所致的反射及集光的示意圖、圖7(b)表示凹透鏡的偏心量(mm)與反射角度(degree)的關係。圖7(a)與圖7(b)中,將在彎曲面13形成的凹透鏡的曲率半徑R設為0.75mm、將圓錐常數K設為-1(拋物面)。FIG. 7 is a diagram showing the characteristics of the curved surface 13 of the collecting lens 10, and FIG. 8 is a diagram explaining the decentering of the lens. 7(a) is a schematic diagram showing reflection and light collection by a concave lens formed on the curved surface 13, and FIG. 7(b) shows the relationship between the eccentricity (mm) of the concave lens and the reflection angle (degree). In FIGS. 7(a) and 7(b), the curvature radius R of the concave lens formed on the curved surface 13 is 0.75 mm, and the conic constant K is -1 (paraboloid).

透鏡的偏心量為0mm時,如圖8(a)所示,束在反射鏡的中心從法線方向入射,在入射的方向光被反射。此時的反射角為0度。偏心量0的位置換句話說是入射光束與拋物線的旋轉對稱軸一致的情形也可以。When the eccentricity of the lens is 0 mm, as shown in Fig. 8(a), the beam is incident from the normal direction at the center of the mirror, and the light is reflected in the incident direction. The reflection angle at this time is 0 degrees. The position of the eccentricity 0, in other words, the incident beam may coincide with the rotational symmetry axis of the parabola.

入射光束隨著從拋物線的旋轉對稱軸向徑方向遠離,反射角會變大。其中,將相對於入射束的中心軸的反射束的中心軸的角度稱為「反射角」。又,將從拋物線的旋轉對稱軸向受光面接近的方向的偏心量設為正、從受光面遠離的方向的偏心量設為負。As the incident beam moves away from the parabola's rotational symmetry axis in the radial direction, the reflection angle becomes larger. Here, the angle of the central axis of the reflected beam with respect to the central axis of the incident beam is called the "reflection angle". In addition, the amount of eccentricity in the direction approaching the light receiving surface from the rotationally symmetrical axis of the parabola is positive, and the amount of eccentricity in the direction away from the light receiving surface is negative.

為了將入射至集光透鏡10的光,在彎曲面13彎曲約90度並集光至受光面,如圖8(b)所示,設計成光入射至從在拋物面形成的凹面反射鏡的中心(亦即拋物線的旋轉對稱軸)以-0.75mm偏心的位置即可。In order to make the light incident on the collecting lens 10 bend about 90 degrees on the curved surface 13 and collect the light to the light receiving surface, as shown in FIG. 8(b), it is designed so that the light enters from the center of the concave mirror formed on the parabolic surface. (That is, the rotational symmetry axis of the parabola) is eccentric at -0.75mm.

圖9為表示受光元件的位置偏差與點尺寸的關係的圖。與圖7一樣,在彎曲面13形成的凹透鏡的曲率半徑R為0.75mm、圓錐常數K為-1。Fig. 9 is a diagram showing the relationship between the positional deviation of the light receiving element and the dot size. As in FIG. 7, the curvature radius R of the concave lens formed on the curved surface 13 is 0.75 mm, and the conic constant K is -1.

如圖9(a)所示,在彎曲面13反射的光向受光面集光。圖9(b)為表示受光元件(PD)40的Z方向的位置偏差量(mm)、及受光元件40上的點大小(μm)的關係的圖。如同上述,彎曲面13,以在受光元件40的受光面的點成為真圓且最小的方式設計。受光元件40的高度方向的偏差,相對地為彎曲面的高度方向的位置偏差。As shown in FIG. 9(a), the light reflected on the curved surface 13 is collected toward the light receiving surface. FIG. 9(b) is a diagram showing the relationship between the positional deviation (mm) of the light receiving element (PD) 40 in the Z direction and the dot size (μm) on the light receiving element 40. As described above, the curved surface 13 is designed so that the point on the light receiving surface of the light receiving element 40 becomes a true circle and the smallest. The deviation in the height direction of the light receiving element 40 is relatively the position deviation in the height direction of the curved surface.

集光透鏡10的彎曲面13的位置,設定在受光面的點尺寸成為最小的位置。The position of the curved surface 13 of the collecting lens 10 is set at a position where the spot size of the light receiving surface becomes the smallest.

圖10表示向多通道的集光透鏡的適用例的圖。集光透鏡20,在從底面21以鈍角突出的傾斜面24,形成複數彎曲面23-1~23-4(以下,適宜總稱為「彎曲面23」)。該集光透鏡20能夠適用4通道的光接收器。此時,在基板側使用4個受光元件40的陣列。Fig. 10 shows an example of application to a multi-channel condenser lens. The condensing lens 20 has a plurality of curved surfaces 23-1 to 23-4 (hereinafter, collectively referred to as "curved surface 23" as appropriate) on an inclined surface 24 protruding at an obtuse angle from the bottom surface 21. The collecting lens 20 can be applied to a 4-channel light receiver. At this time, an array of four light receiving elements 40 is used on the substrate side.

彎曲面23-1~23-4參照圖7~圖9說明那樣,以入射光的方向彎曲約90度集光至受光面的方式,設計偏心量與高度位置。在各彎曲面23反射的光,不通過其他的光學面,而直接在對應的受光元件40以最小的點大小集光。藉此,能夠維持高受光效率。As described with reference to FIGS. 7 to 9, the curved surfaces 23-1 to 23-4 are designed so that the direction of the incident light is curved by approximately 90 degrees and the light is collected to the light receiving surface to design the amount of eccentricity and the height position. The light reflected on each curved surface 23 does not pass through other optical surfaces, but is directly collected by the corresponding light receiving element 40 with the smallest spot size. Thereby, high light receiving efficiency can be maintained.

圖11為集光透鏡20的正視圖與側視圖。圖11(a)所示的正視圖,為從入射方向(Y方向)看集光透鏡20時的圖。圖11(b)所示的側視圖,為包含入射光的光軸的在YZ面內的圖。FIG. 11 is a front view and a side view of the light collecting lens 20. The front view shown in FIG. 11(a) is a view when the collecting lens 20 is viewed from the incident direction (Y direction). The side view shown in FIG. 11(b) is a view in the YZ plane including the optical axis of incident light.

在傾斜面24的彎曲面23-1~23-4的底面的輪廓為橢圓形狀,但相對於向集光透鏡20的入射光(在Y方向傳遞的束),如圖11(a)所示幾乎為圓形。The contours of the bottom surfaces of the curved surfaces 23-1 to 23-4 of the inclined surface 24 are elliptical, but with respect to the incident light to the condenser lens 20 (beam transmitted in the Y direction), as shown in FIG. 11(a) Almost circular.

在圖11(b)的側視圖中,集光透鏡20的底面21、上面22、背面26、光入射側的面27、及面28的成形不需要如此高的精度。傾斜面24相對於底面21以135度前後的角度傾斜。因為實際光路的變換與集光在彎曲面23-1~23-4的各者進行,在傾斜面24自體的成形不需要高度的精度。In the side view of FIG. 11(b), the bottom surface 21, the top surface 22, the back surface 26, the light incident side surface 27, and the surface 28 of the condensing lens 20 do not require such high precision in shaping. The inclined surface 24 is inclined at a front-rear angle of 135 degrees with respect to the bottom surface 21. Since the actual optical path conversion and light collection are performed on each of the curved surfaces 23-1 to 23-4, the self-forming on the inclined surface 24 does not require high precision.

另一方面,彎曲面23-1~23-4各者的入射光的方向變換約90度,以向對應的受光元件40的受光面41的集光效率成為最大的方式,精密加工。彎曲面23-1~23-4形成反射膜25。因為彎曲面23-1~23-4形成相同傾斜面24,能夠以一次的成膜在複數彎曲面23形成反射膜25。藉此,實現了小型且集光性能高的多通道集光透鏡20。On the other hand, the direction of the incident light of each of the curved surfaces 23-1 to 23-4 is changed by approximately 90 degrees, and the light collection efficiency on the light receiving surface 41 of the corresponding light receiving element 40 is precisely processed. The curved surfaces 23-1 to 23-4 form the reflective film 25. Since the curved surfaces 23-1 to 23-4 form the same inclined surface 24, it is possible to form the reflective film 25 on the plural curved surfaces 23 in one film formation. In this way, a compact multi-channel light collecting lens 20 with high light-collecting performance is realized.

圖12為使用實施形態的集光透鏡10或20的光收發器100的示意圖。光收發器100為適用實施形態的集光透鏡的光模組的一例。FIG. 12 is a schematic diagram of the optical transceiver 100 using the collecting lens 10 or 20 of the embodiment. The optical transceiver 100 is an example of an optical module to which the condenser lens of the embodiment is applied.

光收發器100具有ROSA30、光發送副組件(TOSA:Transmitter Optical Sub-Assembly)60、數位信號處理器(DSP:Digital Signal Processor)70。集光透鏡10或20(以下,單稱「集光透鏡10」)用於接收側的ROSA30。The optical transceiver 100 includes a ROSA 30, an optical transmission sub-assembly (TOSA: Transmitter Optical Sub-Assembly) 60, and a digital signal processor (DSP: Digital Signal Processor) 70. The collecting lens 10 or 20 (hereinafter, simply referred to as "collecting lens 10") is used for the ROSA 30 on the receiving side.

光收發器100通過光連接器80連接至光纖81及82。在該例中,ROSA30與TOSA60雖以1條光纖連接,但使用圖9那種4通道的集光透鏡20時,在接收側及發送側分別使用4芯的光纖電纜也可以。The optical transceiver 100 is connected to the optical fibers 81 and 82 through the optical connector 80. In this example, ROSA30 and TOSA60 are connected by one optical fiber, but when the 4-channel collecting lens 20 shown in FIG. 9 is used, 4-core fiber optic cables may be used on the receiving side and transmitting side.

ROSA30具有受光元件40、將接收光導至受光元件40的集光透鏡10、將在受光元件40檢出的光電流放大並變換成電壓信號的互阻抗放大器(TIA)。從光纖81的端面出射的光信號,在集光透鏡10傳遞方向變換約90度,且集光至受光元件40的受光面。集光透鏡10以簡單的構成配置於ROSA30的封裝基板等,能夠將ROSA30小型化。又,因為僅在彎曲面13有反射膜15,製造成本降低。彎曲面13,以在受光面的光點成為最小且圓形的方式設計參數,能夠維持高受光效率。The ROSA 30 has a light receiving element 40, a collecting lens 10 that guides the received light to the light receiving element 40, and a transimpedance amplifier (TIA) that amplifies and converts the photocurrent detected by the light receiving element 40 into a voltage signal. The optical signal emitted from the end surface of the optical fiber 81 is converted by approximately 90 degrees in the transmission direction of the collecting lens 10 and the light is collected to the light receiving surface of the light receiving element 40. The condensing lens 10 is arranged on the packaging substrate of ROSA 30 or the like with a simple configuration, and the ROSA 30 can be miniaturized. In addition, since the reflective film 15 is provided only on the curved surface 13, the manufacturing cost is reduced. The curved surface 13 has parameters designed so that the light spot on the light receiving surface becomes the smallest and circular shape, so that high light receiving efficiency can be maintained.

從ROSA30輸出的類比電信號被數位取樣,在DSP70進行處理。The analog electrical signal output from ROSA30 is digitally sampled and processed in DSP70.

發送側的構成因為與本發明沒有直接關係故將說明省略,但從DSP70向TOSA60輸入表示相當於輸入資料的邏輯值的電信號。在TOSA60,從雷射等光源出射的光,以表示輸入資料的類比驅動信號高速調變,光信號被輸出至光纖82。The configuration of the transmission side is not directly related to the present invention, so the description will be omitted, but an electrical signal representing a logical value corresponding to the input data is input from the DSP 70 to the TOSA 60. In TOSA60, the light emitted from a light source such as a laser is modulated at high speed with an analog drive signal representing the input data, and the optical signal is output to the optical fiber 82.

實施形態的光模組使用在光通信有用。The optical module of the embodiment is useful for optical communication.

上述實施形態及申請專利範圍中,將入射光的方向稱為「變換90度」時,並非嚴密地指入射光的中心軸只彎曲90度,而是代表以90度或其前後的角度反射。又,在受光面的光點稱為「真圓」時,不代表形成完全的真圓的點,而是代表集光成接近真圓的形狀,包含在容許範圍內的變形。In the above-mentioned embodiments and the scope of the patent application, when the direction of incident light is referred to as "90-degree conversion", it does not strictly mean that the central axis of the incident light is bent only by 90 degrees, but it means reflection at 90 degrees or its front and back angles. Also, when the light spot on the light-receiving surface is called a "true circle", it does not mean a point that forms a complete true circle, but instead means that the light is collected into a shape close to a true circle, which includes deformation within the allowable range.

本發明並不限於上述的實施形態,包含多樣的變形例。集光透鏡10的背面16未必需要從底面11垂直立起,相對於底面11以銳角或鈍角立起也可以。同樣地,集光透鏡20的背面26未必需要從底面21垂直立起,相對於底面21以銳角或鈍角立起也可以。以多通道集光透鏡20實現的通道數不限於4個,因應光纖陣列的芯數與配列,能夠設為8通道、16通道等。在傾斜面24的彎曲面23的配列不限於一列,例如能夠構成4通道×2列、8通道×2列。The present invention is not limited to the above-mentioned embodiment, and includes various modifications. The back surface 16 of the condensing lens 10 does not necessarily need to stand vertically from the bottom surface 11, and may stand at an acute or obtuse angle with respect to the bottom surface 11. Similarly, the back surface 26 of the condensing lens 20 does not necessarily need to stand vertically from the bottom surface 21, and may stand at an acute or obtuse angle with respect to the bottom surface 21. The number of channels realized by the multi-channel collecting lens 20 is not limited to four, and can be set to 8 channels, 16 channels, etc., according to the number of cores and the arrangement of the optical fiber array. The arrangement of the curved surface 23 on the inclined surface 24 is not limited to one row, and for example, 4 channels×2 rows or 8 channels×2 rows can be formed.

複數彎曲面23因為以一次的成膜工程藉由反射膜25覆蓋,製造工程簡單化。藉由將多通道用的集光透鏡20置於實裝基板,在從底面21以鈍角突出的傾斜面24形成的彎曲面23與受光元件的陣列對向,能夠變換入射光的光路集光至受光面。藉此,能夠將光模組小型化,且維持高受光效率。Since the plural curved surfaces 23 are covered by the reflective film 25 in one film forming process, the manufacturing process is simplified. By placing the multi-channel light collecting lens 20 on the mounting substrate, the curved surface 23 formed on the inclined surface 24 protruding at an obtuse angle from the bottom surface 21 is opposed to the array of light-receiving elements, so that the optical path of the incident light can be converted to Light-receiving surface. Thereby, the optical module can be miniaturized and high light receiving efficiency can be maintained.

10,20:集光透鏡 11,21:底面 13,23-1~23-4:彎曲面 14,24:傾斜面 15,25:反射膜 30:ROSA(光模組) 40:受光元件 41:受光面 50:基板 50S:基板的表面 80:光連接器 100:光收發器(光模組)10, 20: Collecting lens 11, 21: bottom surface 13,23-1~23-4: Curved surface 14,24: Inclined surface 15,25: reflective film 30: ROSA (optical module) 40: Light receiving element 41: Light-receiving surface 50: substrate 50S: The surface of the substrate 80: Optical connector 100: Optical transceiver (optical module)

[圖1]向受光元件入射光信號的從前的光學系統的示意圖。 [圖2]說明集光透鏡與反射鏡就這樣一體化時產生的問題點的圖。 [圖3]實施形態的集光透鏡的示意圖。 [圖4]說明集光透鏡的彎曲面的集光特性的圖。 [圖5]集光透鏡的斜視圖。 [圖6]集光透鏡的正視圖與側視圖。 [圖7]表示集光透鏡的彎曲面的特性的圖。 [圖8]說明透鏡的偏心的圖。 [圖9]表示受光元件的位置偏差與點尺寸的關係的圖。 [圖10]表示向多通道的集光透鏡的適用例的圖。 [圖11]圖9的集光透鏡的正視圖與側視圖。 [圖12]使用實施形態的集光透鏡的光收發器的示意圖。[Fig. 1] A schematic diagram of a conventional optical system in which a light signal is incident on a light receiving element. [Fig. 2] A diagram explaining the problems that occur when the collecting lens and the reflecting mirror are integrated in this way. [Fig. 3] A schematic diagram of the collecting lens of the embodiment. [Fig. 4] A diagram illustrating the light collection characteristics of the curved surface of the light collection lens. [Figure 5] An oblique view of the collecting lens. [Figure 6] Front view and side view of the collecting lens. [Fig. 7] A graph showing the characteristics of the curved surface of the collecting lens. [Fig. 8] A diagram explaining the decentering of the lens. [Fig. 9] A diagram showing the relationship between the positional deviation of the light receiving element and the dot size. [Fig. 10] A diagram showing an example of application to a multi-channel condenser lens. [Fig. 11] A front view and a side view of the collecting lens of Fig. 9. [Fig. 12] A schematic diagram of an optical transceiver using the collecting lens of the embodiment.

10:集光透鏡 10: Collecting lens

11:底面 11: bottom surface

12:上面 12: above

13:彎曲面 13: curved surface

15:反射膜 15: reflective film

16:背面 16: back

30:ROSA(光模組) 30: ROSA (optical module)

40:受光元件 40: Light receiving element

41:受光面 41: Light-receiving surface

50:基板 50: substrate

50S:基板的表面 50S: The surface of the substrate

Claims (11)

一種集光透鏡,具有:底面; 相對於前述底面以鈍角傾斜延伸的傾斜面; 形成於前述傾斜面的彎曲面; 形成於前述彎曲面的反射膜; 其中, 前述彎曲面變更入射光的進行方向,同時將前述入射光集光至與前述底面平行的面內的預定位置。A light collecting lens having: a bottom surface; An inclined surface extending at an obtuse angle with respect to the aforementioned bottom surface; The curved surface formed on the aforementioned inclined surface; The reflective film formed on the aforementioned curved surface; among them, The curved surface changes the direction of the incident light while condensing the incident light to a predetermined position in a plane parallel to the bottom surface. 如請求項1記載的集光透鏡,其中,前述彎曲面為從拋物線的旋轉對稱軸以預定量偏心的凹面。The light collecting lens according to claim 1, wherein the curved surface is a concave surface decentered by a predetermined amount from the rotational symmetry axis of the parabola. 如請求項1或2記載的集光透鏡,其中,前述彎曲面,以在前述預定位置的光點尺寸成為最小的方式設計。The collecting lens according to claim 1 or 2, wherein the curved surface is designed so that the spot size at the predetermined position becomes the smallest. 如請求項1~3中任1項記載的集光透鏡,其中,前述彎曲面將前述入射光的進行方向彎曲90度。The light collecting lens according to any one of claims 1 to 3, wherein the curved surface bends the direction of the incident light by 90 degrees. 如請求項1~4中任1項記載的集光透鏡,其中,在前述傾斜面形成複數前述彎曲面。The light collecting lens according to any one of claims 1 to 4, wherein a plurality of curved surfaces are formed on the inclined surface. 一種光模組,具有:受光元件; 使入射光入射至前述受光元件的集光透鏡; 前述集光透鏡,具有: 位於前述受光元件的實裝面的底面; 相對於前述底面以鈍角傾斜延伸的傾斜面; 形成於前述傾斜面的彎曲面; 形成於前述彎曲面的反射膜; 其中, 前述彎曲面變更前述入射光的進行方向將前述入射光集光至前述受光元件的受光面。An optical module having: a light receiving element; Make incident light incident on the condenser lens of the aforementioned light receiving element; The aforementioned light collecting lens has: Located on the bottom surface of the mounting surface of the aforementioned light receiving element; An inclined surface extending at an obtuse angle with respect to the aforementioned bottom surface; The curved surface formed on the aforementioned inclined surface; The reflective film formed on the aforementioned curved surface; among them, The curved surface changes the direction of the incident light to collect the incident light to the light receiving surface of the light receiving element. 如請求項6記載的光模組,其中,前述集光透鏡的前述傾斜面,從前述底面向前述受光元件的傾斜上方突出。The optical module according to claim 6, wherein the inclined surface of the condensing lens protrudes from the bottom surface obliquely upward of the light receiving element. 如請求項6或7記載的光模組,其中,前述彎曲面為從拋物線的旋轉對稱軸以預定量偏心的凹面。The optical module according to claim 6 or 7, wherein the curved surface is a concave surface eccentric by a predetermined amount from the rotational symmetry axis of the parabola. 如請求項6~8中任1項記載的光模組,其中,前述彎曲面,以在前述受光面的光點尺寸成為最小的方式設計。The optical module according to any one of claims 6 to 8, wherein the curved surface is designed such that the spot size on the light receiving surface becomes the smallest. 如請求項6~9中任1項記載的光模組,更具有:連接前述光模組的光纖; 其中, 前述光纖在與前述實裝面平行的方向連接; 前述彎曲面將從前述光纖的端面的前述入射光的方向變換90度,將前述入射光集光至前述受光面。For example, the optical module described in any one of Claims 6 to 9, further has: an optical fiber connected to the aforementioned optical module; among them, The aforementioned optical fiber is connected in a direction parallel to the aforementioned mounting surface; The curved surface transforms the direction of the incident light from the end surface of the optical fiber by 90 degrees, and collects the incident light to the light receiving surface. 如請求項6~9中任1項記載的光模組,更具有:連接前述光模組的多芯光纖; 其中, 前述傾斜面具有複數前述彎曲面。For example, the optical module described in any one of claims 6 to 9 further has: a multi-core optical fiber connected to the aforementioned optical module; among them, The inclined surface has a plurality of curved surfaces.
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