TW202037864A - High-purity oxygen and nitrogen production system capable of producing a large amount of high-purity oxygen without impairing the nitrogen recovery rate with respect to the supplied raw material air amount - Google Patents

High-purity oxygen and nitrogen production system capable of producing a large amount of high-purity oxygen without impairing the nitrogen recovery rate with respect to the supplied raw material air amount Download PDF

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TW202037864A
TW202037864A TW108122807A TW108122807A TW202037864A TW 202037864 A TW202037864 A TW 202037864A TW 108122807 A TW108122807 A TW 108122807A TW 108122807 A TW108122807 A TW 108122807A TW 202037864 A TW202037864 A TW 202037864A
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nitrogen
oxygen
boil
condenser
gas
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TW108122807A
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TWI826478B (en
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廣瀬献児
富田伸二
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法商液態空氣喬治斯克勞帝方法研究開發股份有限公司
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04406—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system
    • F25J3/04424—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system without thermally coupled high and low pressure columns, i.e. a so-called split columns
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04048—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of cold gaseous streams, e.g. intermediate or oxygen enriched (waste) streams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04078—Providing pressurised feed air or process streams within or from the air fractionation unit providing pressurized products by liquid compression and vaporisation with cold recovery, i.e. so-called internal compression
    • F25J3/0409—Providing pressurised feed air or process streams within or from the air fractionation unit providing pressurized products by liquid compression and vaporisation with cold recovery, i.e. so-called internal compression of oxygen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04151—Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
    • F25J3/04187—Cooling of the purified feed air by recuperative heat-exchange; Heat-exchange with product streams
    • F25J3/0423—Subcooling of liquid process streams
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04333—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04333—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams
    • F25J3/04363—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams of oxygen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763—Start-up or control of the process; Details of the apparatus used
    • F25J3/04866—Construction and layout of air fractionation equipments, e.g. valves, machines
    • F25J3/04872—Vertical layout of cold equipments within in the cold box, e.g. columns, heat exchangers etc.
    • F25J3/04884—Arrangement of reboiler-condensers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/90—Details relating to column internals, e.g. structured packing, gas or liquid distribution
    • F25J2200/94—Details relating to the withdrawal point
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/50—Oxygen or special cases, e.g. isotope-mixtures or low purity O2
    • F25J2215/56—Ultra high purity oxygen, i.e. generally more than 99,9% O2
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2245/00—Processes or apparatus involving steps for recycling of process streams
    • F25J2245/02—Recycle of a stream in general, e.g. a by-pass stream
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2250/00—Details related to the use of reboiler-condensers
    • F25J2250/10—Boiler-condenser with superposed stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2250/00—Details related to the use of reboiler-condensers
    • F25J2250/20—Boiler-condenser with multiple exchanger cores in parallel or with multiple re-boiling or condensing streams

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
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Abstract

This invention provides a high-purity oxygen and nitrogen production system capable of producing a large amount of high-purity oxygen without impairing the nitrogen recovery rate with respect to the supplied raw material air amount. The high-purity oxygen and nitrogen production system includes: a main heat exchanger 1, a nitrogen rectification tower 2, a first nitrogen condenser 3 installed above the nitrogen rectification tower 2, a high-purity oxygen rectification tower 4 supplying high-purity oxygen feed liquid taken out from a nitrogen rectification unit 22, a high-purity oxygen evaporator 5 installed under the oxygen rectification unit 43 of the high-purity oxygen rectification tower 4, a compressor 6 that compresses the recycled gas taken out from the top of the high-purity oxygen rectification tower 4 after passing through the main heat exchanger 1, and a recycled gas introduction line for introduction of the recycled gas compressed by the compressor 6 as a heat source for the high-purity oxygen evaporator 5.

Description

高純度氧及氮製造系統High purity oxygen and nitrogen manufacturing system

本發明係關於一種製造高純度氧及氮之裝置。The present invention relates to a device for producing high-purity oxygen and nitrogen.

面向半導體產業等，需要不包含烴等高沸點成分之高純度氧。為了製造該高純度氧，例如專利文獻1所揭示，存在如下方法：從具有至少一個精餾塔之氮發生裝置之氮精餾塔之中間，導出高沸點成分經去除之高純度氧進料液，導入至高純度氧精餾塔中而從塔底部回收。該方法中，利用經過氮精餾塔之原料空氣來作為高純度精餾塔底部之再沸源之熱源。 又，專利文獻2揭示有：將原料空氣不經過氮精餾塔而用於再沸源之熱源的方法、或將高純度氧進料液用於該熱源之方法。 又，專利文獻3揭示有將從氮精餾塔底部導出之富氧液作為該熱源而利用。 [先前技術文獻] [專利文獻]For the semiconductor industry, high purity oxygen that does not contain high boiling point components such as hydrocarbons is required. In order to produce this high-purity oxygen, for example, as disclosed in Patent Document 1, there is a method of deriving a high-purity oxygen feed liquid from which high-boiling components have been removed from the middle of a nitrogen rectification column having a nitrogen generator having at least one rectification column , Introduced into the high purity oxygen distillation tower and recovered from the bottom of the tower. In this method, the raw material air passing through the nitrogen distillation tower is used as the heat source of the reboiler at the bottom of the high-purity distillation tower. In addition, Patent Document 2 discloses a method of using raw material air as a heat source of a reboil source without passing through a nitrogen rectification tower, or a method of using a high-purity oxygen feed liquid as the heat source. In addition, Patent Document 3 discloses that the oxygen-enriched liquid derived from the bottom of the nitrogen distillation tower is used as the heat source. [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本專利第3719832號公報 [專利文獻2]國際專利公開第2014/173496公報 [專利文獻3]國際專利公開第2018/219685公報[Patent Document 1] Japanese Patent No. 3719832 [Patent Document 2] International Patent Publication No. 2014/173496 [Patent Document 3] International Patent Publication No. 2018/219685 Bulletin

[發明所欲解決之問題][The problem to be solved by the invention]

然而，於將原料空氣用於用以將高純度氧進行精餾之熱源之情形時，相對地，供給至氮精餾塔之原料空氣減少，擔憂氮之製造量減少。 又，於使用高純度氧進料液或富氧液來作為上述熱源之情形時，由於不使用原料空氣，故而不損及氮回收，但僅能夠利用與該等液之各個和高純度氧精餾塔底部之溫度差相當之顯熱，故而擔憂對於獲得大量之高純度氧，熱不足的情況。 鑒於上述實際情況，本發明之目的為提供一種不損及相對於所供給之原料空氣量之氮回收率，可製造大量之高純度氧之高純度氧及氮製造系統。 [解決問題之技術手段]However, when the raw material air is used as a heat source for rectifying high-purity oxygen, the raw material air supplied to the nitrogen rectification tower is relatively reduced, and there is a concern that the production amount of nitrogen may decrease. In addition, when high-purity oxygen feed liquid or oxygen-enriched liquid is used as the above-mentioned heat source, since the raw material air is not used, nitrogen recovery is not compromised, but only the individual and high-purity oxygen liquids can be used. The temperature difference at the bottom of the distillation column is quite sensible, so there is a concern about insufficient heat for obtaining large amounts of high-purity oxygen. In view of the above-mentioned actual situation, the purpose of the present invention is to provide a high-purity oxygen and nitrogen production system that can produce a large amount of high-purity oxygen without compromising the nitrogen recovery rate relative to the amount of supplied raw air. [Technical means to solve the problem]

本發明之高純度氧及氮製造系統具備： 主熱交換器（1），其將原料空氣（Feed air）進行熱交換； 氮精餾塔（2），其係導入通過上述主熱交換器（1）之原料空氣者，其具有：積存富氧液之塔底部（21）、將上述原料空氣進行精餾之氮精餾部（22）、以及導出氮氣（Nitrogen gas）之塔頂部（23）； 第一氮冷凝器（3），其設置於上述氮精餾塔（2）之上述塔頂部（23）之上方； 高純度氧精餾塔（4），其具有供給從上述氮精餾部（22）之中間部（221）中取出之高純度氧進料液之氧精餾部（43）； 高純度氧蒸發器（5），其設置於上述高純度氧精餾塔（4）之上述氧精餾部（43）之下部（42）； 壓縮機（6），其使從上述高純度氧精餾塔（4）之塔頂部（44）中取出之再循環氣體通過上述主熱交換器（1）後進行壓縮；以及 再循環氣體導入管線（L7；L71、L72），其用以將經上述壓縮機（6）所壓縮之再循環氣體（壓縮再循環氣體）作為上述高純度氧蒸發器（5）之熱源而導入。 上述本發明之高純度氧及氮製造系統亦可更具備： 原料空氣導入管線（L1），其用以將通過上述主熱交換器（1）之原料空氣導入至上述氮精餾塔（2）（之上述塔底部（21）或者氮精餾部（22））中。 藉由該構成，可將從高純度氧精餾塔（4）之塔頂部（44）獲得之再循環氣體於主熱交換器（1）中釋放出寒冷後，導入至壓縮機（6）中，於熱交換器（1）中進行冷卻後作為熱源而供給至蒸發器（5）中，可於不增加原料空氣之量之情況下獲得大量之高純度氧。The high-purity oxygen and nitrogen manufacturing system of the present invention has: Main heat exchanger (1), which exchanges heat with feed air; Nitrogen rectification tower (2), which introduces the raw material air passing through the above-mentioned main heat exchanger (1), and has: the bottom of the tower (21) where the oxygen-enriched liquid is stored, and the nitrogen rectification for rectifying the above-mentioned raw material air Section (22), and the top (23) of the tower for deriving nitrogen (Nitrogen gas); The first nitrogen condenser (3) is arranged above the top (23) of the nitrogen rectification tower (2); A high-purity oxygen rectification tower (4), which has an oxygen rectification section (43) that supplies the high-purity oxygen feed liquid taken out from the middle section (221) of the above-mentioned nitrogen rectification section (22); A high-purity oxygen evaporator (5), which is arranged at the lower part (42) of the above-mentioned oxygen rectification part (43) of the above-mentioned high-purity oxygen rectification tower (4); A compressor (6), which compresses the recycled gas taken from the top (44) of the high-purity oxygen rectification tower (4) through the main heat exchanger (1); and Recirculation gas introduction line (L7; L71, L72), which is used to introduce the recirculation gas (compressed recirculation gas) compressed by the compressor (6) as the heat source of the high purity oxygen evaporator (5) . The above-mentioned high-purity oxygen and nitrogen production system of the present invention can also be further equipped with: The raw material air introduction line (L1) is used to introduce the raw material air passing through the main heat exchanger (1) to the nitrogen distillation tower (2) (the bottom of the tower (21) or the nitrogen distillation section (22) )in. With this structure, the recycled gas obtained from the top (44) of the high-purity oxygen rectification tower (4) can be released into the main heat exchanger (1) after being cold, and then introduced into the compressor (6) After cooling in the heat exchanger (1), it is supplied as a heat source to the evaporator (5), and a large amount of high-purity oxygen can be obtained without increasing the amount of raw air.

上述本發明之高純度氧及氮製造系統亦可更具備： 氧泵（7），其用以將從上述氧精餾部（43）之下部（42）之液相中導出之高純度液態氧進行升壓而導入至上述主熱交換器（1）中。 上述本發明之高純度氧及氮製造系統亦可更具備： 高壓空氣導入管線（L11），其用以將高壓空氣作為上述高純度液態氧之蒸發之熱源而供給至上述主熱交換器（1）中，導入至上述氮精餾塔（2）（之上述塔底部（21）或者氮精餾部（22））中。 藉由該構成，可使經氧泵（7）所升壓之高純度液態氧於主熱交換器（1）中蒸發，高壓空氣作為上述液態氧蒸發之熱源而供給至主熱交換器（1）中，且經冷卻之高壓空氣供給至氮精餾塔（2）中，藉此可以高壓來供給高純度氧。The above-mentioned high-purity oxygen and nitrogen production system of the present invention can also be further equipped with: An oxygen pump (7) for boosting the high-purity liquid oxygen derived from the liquid phase of the lower part (42) of the oxygen rectification part (43) and introducing it into the main heat exchanger (1). The above-mentioned high-purity oxygen and nitrogen production system of the present invention can also be further equipped with: The high-pressure air introduction line (L11) is used to supply high-pressure air as the heat source for the evaporation of the high-purity liquid oxygen to the main heat exchanger (1), and to introduce it to the nitrogen rectification tower (2) (the above The bottom of the tower (21) or the nitrogen rectification section (22)). With this structure, the high-purity liquid oxygen boosted by the oxygen pump (7) can be evaporated in the main heat exchanger (1), and the high-pressure air is supplied to the main heat exchanger (1) as the heat source for the evaporation of the liquid oxygen. ), and the cooled high-pressure air is supplied to the nitrogen rectification tower (2), whereby high-pressure oxygen can be supplied with high purity.

上述本發明之高純度氧及氮製造系統亦可具備： 第一過冷卻器（8），其將上述高純度氧進料液進行過冷卻。 上述本發明之高純度氧及氮製造系統亦可具備： 第二過冷卻器，其將從上述氮精餾塔（2）之上述塔底部（21）中導出之富氧液進行過冷卻。 作為上述第一過冷卻器（8）或者第二過冷卻器之寒冷源，亦可為利用從上述高純度氧精餾塔（4）之塔頂部（44）取出之再循環氣體、從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體（亦稱為「廢氣」）之構成。 藉由該構成，可減少由高純度氧進料液供給至高純度氧精餾塔（4）中時之減壓所引起之蒸發損耗，可進一步改善高純度氧之回收。The above-mentioned high-purity oxygen and nitrogen production system of the present invention may also have: The first subcooler (8), which subcools the above-mentioned high purity oxygen feed liquid. The above-mentioned high-purity oxygen and nitrogen production system of the present invention may also have: The second subcooler supercools the oxygen-enriched liquid derived from the bottom (21) of the nitrogen rectification tower (2). As the cold source for the first subcooler (8) or the second subcooler, it can also be the use of recycled gas taken from the top (44) of the high purity oxygen rectification tower (4), from the first subcooler The composition of the boil-off gas (also called "exhaust gas") derived from the upper part (31) of a nitrogen condenser (3). With this configuration, the evaporation loss caused by the decompression when the high-purity oxygen feed liquid is supplied to the high-purity oxygen rectification column (4) can be reduced, and the recovery of high-purity oxygen can be further improved.

上述本發明之高純度氧及氮製造系統亦可具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 空氣壓縮機（10），其利用膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分進行壓縮； 廢氣管線（L41），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且從上述主熱交換器（1）之中間部導出而於上述膨脹渦輪機（9）中膨脹之蒸發氣體，通過上述主熱交換器（1）而作為廢氣來回收；以及 再循環空氣導入管線（L42），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且經上述空氣壓縮機（10）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）。 該構成中，可將從上述膨脹渦輪機（9）中導出之膨脹而冷卻之蒸發氣體從上述熱交換器（1）之冷端導入，使寒冷釋放出後，作為廢氣而回收。藉此，可進行高效率地維持寒冷平衡之裝置運轉。又，可將經空氣壓縮機（10）所壓縮之蒸發氣體作為再循環空氣而再利用，因此可改善氮回收。又，藉由將膨脹渦輪機（9）中所獲得之動力之至少一部分用於空氣壓縮機（10）之動力，可高效率地利用可由膨脹渦輪機回收之動力。The above-mentioned high-purity oxygen and nitrogen production system of the present invention may also have: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; An air compressor (10), which uses at least a part of the power obtained in the expansion turbine (9) to compress a part of the boil-off gas derived from the upper portion (31) of the first nitrogen condenser (3); The exhaust gas line (L41) is used to lead from the upper part (31) of the first nitrogen condenser (3) and from the middle part of the main heat exchanger (1) to be in the expansion turbine (9) The expanded boil-off gas is recovered as waste gas through the above-mentioned main heat exchanger (1); and The recirculation air introduction line (L42) is used to introduce the boil-off gas taken out from the upper part (31) of the first nitrogen condenser (3) and compressed by the air compressor (10) to the main heat After being cooled in the exchanger (1), it is supplied as recirculation air to the bottom (21) of the above-mentioned nitrogen rectification column (2). In this configuration, the expanded and cooled boil-off gas derived from the expansion turbine (9) can be introduced from the cold end of the heat exchanger (1), released from cold, and recovered as exhaust gas. As a result, it is possible to efficiently maintain the cold balance of the device operation. In addition, the boil-off gas compressed by the air compressor (10) can be reused as recirculating air, thereby improving nitrogen recovery. In addition, by using at least a part of the power obtained in the expansion turbine (9) for the power of the air compressor (10), the power that can be recovered by the expansion turbine can be used efficiently.

上述本發明之高純度氧及氮製造系統亦可具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 第二氮冷凝器（13），其設置於上述第一氮冷凝器（3）之上部（31）； 空氣壓縮機（101），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第二氮冷凝器（13）之上部（131）中導出之蒸發氣體進行壓縮； 再循環空氣導入管線（L9），其用以將從上述第二氮冷凝器（13）之上部（131）中導出且經上述空氣壓縮機（101）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）； 富氧液導入管線（L21），其將從上述氮精餾塔（2）之塔底部（21）中導出之富氧液導入至第二氮冷凝器（13）中；以及 冷凝器間管線（L130），其將於上述第二氮冷凝器（13）中濃縮之富氧液導入至上述第一氮冷凝器（3）中。 上述本發明之高純度氧及氮製造系統亦可具備蒸發氣體管線（L4），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且從上述主熱交換器（1）之中間部導出而於上述膨脹渦輪機（9）中膨脹之蒸發氣體，通過上述主熱交換器（1）而作為廢氣來回收。 藉由該構成，可提高再循環空氣之壓力，可降低空氣壓縮機（101）之負荷。The above-mentioned high-purity oxygen and nitrogen production system of the present invention may also have: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; The second nitrogen condenser (13) is arranged on the upper part (31) of the above-mentioned first nitrogen condenser (3); An air compressor (101), which uses at least a part of the power obtained in the expansion turbine (9) to compress the boil-off gas derived from the upper portion (131) of the second nitrogen condenser (13); The recirculation air introduction line (L9) is used to introduce the boil-off gas taken out from the upper part (131) of the second nitrogen condenser (13) and compressed by the air compressor (101) to the main heat After being cooled in the exchanger (1), it is supplied as recirculated air to the bottom (21) of the above-mentioned nitrogen distillation column (2); The oxygen-enriched liquid introduction line (L21), which introduces the oxygen-enriched liquid derived from the bottom (21) of the above-mentioned nitrogen rectification column (2) into the second nitrogen condenser (13); and The inter-condenser pipeline (L130) introduces the oxygen-rich liquid concentrated in the second nitrogen condenser (13) to the first nitrogen condenser (3). The above-mentioned high-purity oxygen and nitrogen production system of the present invention may also be equipped with a boil-off gas line (L4) for leading out from the upper part (31) of the first nitrogen condenser (3) and from the main heat exchanger ( 1) The boil-off gas derived from the middle part of the expansion turbine (9) and expanded in the expansion turbine (9) is recovered as exhaust gas through the main heat exchanger (1). With this structure, the pressure of the recirculated air can be increased, and the load of the air compressor (101) can be reduced.

（作用效果） 藉由使用壓縮為高純度氧之再沸熱源的再循環氣體，而獲得與將富氧液作為熱源之情形相比充分的高純度氧之再沸熱源，可於不增加原料空氣之量之情況下製造大量之高純度氧。(Effect) By using recycled gas compressed into a reboiling heat source of high-purity oxygen, a sufficient reboiling heat source of high-purity oxygen can be obtained compared with the case where oxygen-enriched liquid is used as a heat source, which can be used without increasing the amount of raw air Produce large amounts of high-purity oxygen.

以下對本發明之若干實施形態進行說明。以下所說明之實施形態係對本發明之一例加以說明者。本發明不受以下實施形態之任何限定，亦包含於不變更本發明要旨之範圍內實施之各種變形形態。此外，以下所說明之構成並不限定全部為本發明之必需的構成。Several embodiments of the present invention will be described below. The embodiment described below is an example of the present invention. The present invention is not limited to the following embodiments at all, and is also included in various modified forms implemented within the scope not changing the gist of the present invention. In addition, the configurations described below are not limited to all the necessary configurations of the present invention.

（實施形態1） 使用圖1A，對實施形態1之高純度氧及氮製造系統進行說明。 本系統具備：主熱交換器1、氮精餾塔2、第一氮冷凝器3、高純度氧精餾塔4、高純度氧蒸發器5等。(Embodiment 1) 1A, the high-purity oxygen and nitrogen production system of Embodiment 1 will be described. This system has: main heat exchanger 1, nitrogen rectification tower 2, first nitrogen condenser 3, high-purity oxygen rectification tower 4, high-purity oxygen evaporator 5, etc.

原料空氣（Feed air）經由原料空氣導入管線L1而通過主熱交換器1，向氮精餾塔2之塔底部21（或者氮精餾部22）供給。 氮精餾塔2具有：積存富氧液之塔底部21、將原料空氣進行精餾之氮精餾部22、以及將經精餾之高純度之氮氣導出之塔頂部23。 氮氣（Nitrogen gas）係從塔頂部23中導出，經由氮導出管線L3而通過主熱交換器1來回收。Feed air (Feed air) passes through the main heat exchanger 1 via the feed air introduction line L1, and is supplied to the bottom 21 (or the nitrogen rectification section 22) of the nitrogen rectification tower 2. The nitrogen distillation tower 2 has a tower bottom 21 that stores oxygen-enriched liquid, a nitrogen rectification portion 22 that rectifies the raw material air, and a tower top 23 that leads out the rectified high-purity nitrogen. Nitrogen gas (Nitrogen gas) is led out from the tower top 23, and is recovered by the main heat exchanger 1 via the nitrogen lead-out line L3.

第一氮冷凝器3設置於氮精餾塔2之塔頂部23之上方。富氧液從塔底部21中導出，經由富氧液導出管線L2而導入至第一氮冷凝器3之上部31（形成氣相之上部）。 第一氮冷凝器3將從塔頂部23中供給之氮氣（蒸發氣體）進行冷凝而形成液態氮，返送至塔頂部23。作為寒冷源之富氧液蒸發。富氧液之蒸發氣體從第一氮冷凝器3之上部31，經由蒸發氣體管線L4而供給至主熱交換器1之冷端，於主熱交換器1中釋放出寒冷後，從溫端作為廢氣（Waste gas）而排出。The first nitrogen condenser 3 is arranged above the top 23 of the nitrogen distillation column 2. The oxygen-enriched liquid is led out from the tower bottom 21 and is introduced to the upper portion 31 of the first nitrogen condenser 3 (forms the upper portion of the gas phase) via the oxygen-enriched liquid exit line L2. The first nitrogen condenser 3 condenses the nitrogen (boiling gas) supplied from the tower top 23 to form liquid nitrogen, which is returned to the tower top 23. The oxygen-rich liquid as a source of cold evaporates. The boil-off gas of the oxygen-enriched liquid is supplied from the upper part 31 of the first nitrogen condenser 3 through the boil-off gas line L4 to the cold end of the main heat exchanger 1. After the cold is released in the main heat exchanger 1, the warm end is used as Exhaust gas (Waste gas).

高純度氧精餾塔4具有：從氮精餾部22之中間部221中取出之高純度氧進料液經由進料液管線L5而供給之氧精餾部43、取出再循環氣體之塔頂部44、以及再循環氣體液化而成之再循環液所積存之塔底部41。此外，高純度氧進料液亦可由減壓閥300進行減壓後導入至氧精餾部43中。 高純度氧蒸發器5設置於氧精餾部43之下部42。於高純度氧蒸發器5中，使從氧精餾部43落下而來之富氧液進而蒸發，獲得高純度液態氧及高純度氧氣。 從氧精餾部43之下部42之氣相中導出之高純度氧氣經由高純度氧氣管線L9而於主熱交換器1中輸送，成為常溫之氣體而回收。此外，亦可作為由未圖示之壓縮機所壓縮之壓縮氣體而回收。The high-purity oxygen rectification tower 4 has: an oxygen rectification section 43 where the high-purity oxygen feed liquid taken out from the middle section 221 of the nitrogen rectification section 22 is supplied via the feed liquid line L5, and the top of the tower where the recycled gas is taken out 44. And the bottom 41 of the tower where the recycled liquid formed by the liquefaction of the recycled gas is stored. In addition, the high-purity oxygen feed liquid may also be decompressed by the pressure reducing valve 300 and then introduced into the oxygen rectification section 43. The high-purity oxygen evaporator 5 is installed in the lower part 42 of the oxygen rectification part 43. In the high-purity oxygen evaporator 5, the oxygen-enriched liquid dropped from the oxygen rectification part 43 is further evaporated to obtain high-purity liquid oxygen and high-purity oxygen. The high-purity oxygen derived from the gas phase of the lower part 42 of the oxygen rectification part 43 is transported to the main heat exchanger 1 via the high-purity oxygen line L9, and recovered as a normal temperature gas. In addition, it can also be recovered as compressed gas compressed by a compressor not shown.

再循環氣體從塔頂部44導出，經由再循環氣體管線L6而通過主熱交換器1，然後，於壓縮機6中進行壓縮。經壓縮之再循環氣體（壓縮再循環氣體）經由壓縮再循環氣體管線L7而通過主熱交換器1，然後作為高純度氧蒸發器5之熱源而直接導入至溫端。 壓縮再循環氣體係作為高純度氧蒸發器5之熱源而利用，放熱而液化，作為再循環液而積存於塔底部41中。The recycled gas is led out from the tower top 44, passes through the main heat exchanger 1 via the recycled gas line L6, and then is compressed in the compressor 6. The compressed recirculation gas (compressed recirculation gas) passes through the main heat exchanger 1 through the compressed recirculation gas line L7, and is then directly introduced to the warm end as the heat source of the high-purity oxygen evaporator 5. The compressed recycled gas system is used as a heat source for the high-purity oxygen evaporator 5, radiates heat and liquefies, and is stored as a recycled liquid in the bottom 41 of the tower.

於高純度氧精餾塔4之塔底部41上連接循環管線L8。循環管線L8分支為第一循環管線L81及第二循環管線L82。再循環液之一部分經由第一循環管線L81，作為回流液而向塔頂部44供給。又，再循環液之一部分經由第二循環管線L82，作為寒冷源而向第一氮冷凝器3之上部31供給。循環管線L8可為分支構造，亦可為第一循環管線、第二循環管線分別與塔底部41連接之構造。A circulating line L8 is connected to the bottom 41 of the high-purity oxygen distillation column 4. The circulation line L8 branches into a first circulation line L81 and a second circulation line L82. A part of the recirculation liquid is supplied to the tower top 44 as a reflux liquid via the first circulation line L81. In addition, a part of the recirculation liquid is supplied to the upper part 31 of the first nitrogen condenser 3 as a cold source via the second circulation line L82. The circulation line L8 may have a branch structure, or a structure in which the first circulation line and the second circulation line are respectively connected to the bottom 41 of the tower.

（實施形態1之變形例） 將實施形態1之變形例示於圖1B中。 壓縮再循環氣體係經由壓縮再循環氣體管線L71而暫時導入至高純度氧精餾塔4之下部且高純度氧蒸發器5之下部421（氣相），經由連接管線L72而導入至高純度氧蒸發器5之溫端。(Modification of Embodiment 1) A modification example of Embodiment 1 is shown in FIG. 1B. The compressed recycled gas system is temporarily introduced to the lower part of the high-purity oxygen rectification column 4 through the compressed recycled gas line L71 and the lower part 421 (gas phase) of the high-purity oxygen evaporator 5, and is introduced to the high-purity oxygen evaporator through the connecting line L72 The warm end of 5.

（實施形態1之變形例） 將實施形態1之其他變形例示於圖1C中。 從氧精餾部43之下部42之液相中導出之高純度液態氧經由高純度液態氧管線L91而於主熱交換器1中輸送，且經由高純度液態氧管線L91而向主熱交換器1輸送，氣化而回收。此外，亦可由未圖示之壓縮機進行壓縮而作為壓縮氣體來回收。 又，於高純度液態氧管線L91上，亦可配置將高純度液態氧進行升壓之氧泵7。(Modification of Embodiment 1) Another modification of Embodiment 1 is shown in FIG. 1C. The high-purity liquid oxygen derived from the liquid phase of the lower part 42 of the oxygen rectification part 43 is transported to the main heat exchanger 1 through the high-purity liquid oxygen line L91, and to the main heat exchanger through the high-purity liquid oxygen line L91 1 Transport, gasification and recovery. In addition, it may be compressed by a compressor not shown and recovered as compressed gas. Moreover, on the high-purity liquid oxygen pipeline L91, an oxygen pump 7 for boosting the high-purity liquid oxygen can also be arranged.

（實施形態2） 使用圖2，對實施形態2之高純度氧及氮製造系統進行說明。對與實施形態1之圖1C不同之構成進行說明，對於相同之構成則省略或簡化說明。 高壓空氣（HP Air）係經由高壓空氣導入管線L11，作為高純度液態氧之蒸發之熱源而供給至主熱交換器1中，其次，向氮精餾塔2之上述塔底部21之氣相導入。 於高純度液態氧管線L91上，配置有將高純度液態氧進行升壓之氧泵7，經氧泵7所升壓之高純度液態氧輸送至主熱交換器1中而蒸發，作為高純度氧氣而回收。從主熱交換器1中導出之冷卻後之高壓空氣供給至氮精餾塔2中。(Embodiment 2) Using FIG. 2, the high-purity oxygen and nitrogen production system of Embodiment 2 will be described. The configuration different from that of FIG. 1C of the first embodiment will be described, and the description of the same configuration will be omitted or simplified. High-pressure air (HP Air) is supplied to the main heat exchanger 1 through the high-pressure air introduction line L11 as a heat source for the evaporation of high-purity liquid oxygen, and secondly, it is introduced into the gas phase at the bottom 21 of the nitrogen rectification tower 2 . On the high-purity liquid oxygen pipeline L91, an oxygen pump 7 that boosts the high-purity liquid oxygen is arranged. The high-purity liquid oxygen boosted by the oxygen pump 7 is transported to the main heat exchanger 1 and evaporated as a high-purity liquid oxygen. Oxygen is recovered. The cooled high-pressure air derived from the main heat exchanger 1 is supplied to the nitrogen distillation tower 2.

（實施形態3） 使用圖3，對實施形態3之高純度氧及氮製造系統進行說明。對與實施形態2（圖2）不同之構成進行說明，對於相同之構成則省略或簡化說明。 從氮精餾部22之中間部221中取出之高純度氧進料液通過第一過冷卻器8而冷卻。作為第一過冷卻器8之寒冷源，係利用從高純度氧精餾塔4之塔頂部44中取出之再循環氣體。(Embodiment 3) Using FIG. 3, the high-purity oxygen and nitrogen production system of Embodiment 3 will be described. The configuration different from Embodiment 2 (FIG. 2) will be described, and the description of the same configuration will be omitted or simplified. The high-purity oxygen feed liquid taken out from the middle part 221 of the nitrogen rectification part 22 is cooled by the first subcooler 8. As the cold source of the first subcooler 8, the recycled gas taken from the top 44 of the high-purity oxygen rectification tower 4 is used.

（實施形態4） 使用圖4，對實施形態4之高純度氧及氮製造系統進行說明。對與實施形態3（圖3）不同之構成進行說明，對於相同之構成則省略或簡化說明。 經由蒸發氣體管線L4而從第一氮冷凝器3之上部31（形成氣相之上部）中導出之蒸發氣體之一部分經由廢氣管線41而導入至主熱交換器1中，其次，從主熱交換器1之中間部導出而於膨脹渦輪機9中膨脹。經膨脹之蒸發氣體通過主熱交換器1而作為廢氣來回收。 又，經由蒸發氣體管線L4而從第一氮冷凝器3之上部31中導出之蒸發氣體之一部分係經由再循環空氣導入管線L42而輸送至空氣壓縮機10中，進行壓縮，其次，導入至主熱交換器1中而冷卻後，作為再循環空氣而向氮精餾塔2之塔底部21之氣相中供給。 膨脹渦輪機9中所獲得之動力之至少一部分用於空氣壓縮機10之動力。(Embodiment 4) Using FIG. 4, the high-purity oxygen and nitrogen production system of Embodiment 4 will be described. The configuration different from Embodiment 3 (FIG. 3) will be described, and the description of the same configuration will be omitted or simplified. A part of the boil-off gas discharged from the upper part 31 of the first nitrogen condenser 3 (forming the upper part of the gas phase) through the boil-off gas line L4 is introduced into the main heat exchanger 1 through the exhaust gas line 41, and secondly, from the main heat exchange The middle part of the device 1 is led out and expanded in the expansion turbine 9. The expanded boil-off gas passes through the main heat exchanger 1 and is recovered as exhaust gas. In addition, a part of the boil-off gas derived from the upper portion 31 of the first nitrogen condenser 3 through the boil-off gas line L4 is sent to the air compressor 10 through the recirculation air introduction line L42, where it is compressed, and then introduced to the main After being cooled in the heat exchanger 1, it is supplied to the gas phase at the bottom 21 of the nitrogen rectification tower 2 as recycled air. At least a part of the power obtained in the expansion turbine 9 is used for the power of the air compressor 10.

（實施形態5） 使用圖5，對實施形態5之高純度氧及氮製造系統進行說明。對與實施形態4（圖4）不同之構成進行說明，對於相同之構成則省略或簡化說明。 第二氮冷凝器13設置於第一氮冷凝器3之上部31（形成氣相之上部）之上。 從第一氮冷凝器3之上部31中導出之蒸發氣體經由蒸發氣體管線L4而導入至主熱交換器1中，其次，從主熱交換器1之中間部導出而於膨脹渦輪機9中膨脹。經膨脹之蒸發氣體通過主熱交換器1而作為廢氣來回收。 從第二氮冷凝器13之上部131中導出之蒸發氣體經由再循環空氣導入管線L9而輸送至空氣壓縮機101中，進行壓縮，其次，經壓縮之蒸發氣體導入至主熱交換器1中而冷卻後，作為再循環空氣而供給至氮精餾塔2之塔底部21之氣相。 從氮精餾塔2之塔底部21中導出之富氧液經由富氧液導入管線L21而導入至第二氮冷凝器13中。 第二氮冷凝器13內之富氧液可經由冷凝器間管線L130以及閥（未圖示）而向第一氮冷凝器3內之富氧液中流通。又，設置用以將從氮精餾塔2之塔頂部23中導出之蒸發氣體作為第一氮冷凝器3以及第二氮冷凝器13之熱源而導入，蒸發氣體冷卻而再次返回至塔頂部23之管線（未圖示）。(Embodiment 5) Using FIG. 5, the high-purity oxygen and nitrogen production system of Embodiment 5 will be described. The configuration different from Embodiment 4 (FIG. 4) will be described, and the description of the same configuration will be omitted or simplified. The second nitrogen condenser 13 is provided on the upper part 31 (forming the upper part of the gas phase) of the first nitrogen condenser 3. The boil-off gas derived from the upper portion 31 of the first nitrogen condenser 3 is introduced into the main heat exchanger 1 through the boil-off gas line L4, and then, is derived from the middle portion of the main heat exchanger 1 and expanded in the expansion turbine 9. The expanded boil-off gas passes through the main heat exchanger 1 and is recovered as exhaust gas. The boil-off gas derived from the upper portion 131 of the second nitrogen condenser 13 is sent to the air compressor 101 via the recirculation air introduction line L9 for compression, and then the compressed boil-off gas is introduced into the main heat exchanger 1 and After cooling, it is supplied to the gas phase at the bottom 21 of the nitrogen rectification tower 2 as recycled air. The oxygen-enriched liquid derived from the bottom 21 of the nitrogen rectification column 2 is introduced into the second nitrogen condenser 13 via the oxygen-enriched liquid introduction line L21. The oxygen-enriched liquid in the second nitrogen condenser 13 can circulate into the oxygen-enriched liquid in the first nitrogen condenser 3 through the inter-condenser line L130 and a valve (not shown). In addition, it is provided for introducing the boil-off gas derived from the top 23 of the nitrogen rectification tower 2 as the heat source of the first nitrogen condenser 3 and the second nitrogen condenser 13, and the boil-off gas is cooled and returned to the top 23 of the tower again The pipeline (not shown).

（實施例） 對上述實施形態5（圖5）之系統進行更具體之說明。 原料空氣（975 Nm3 /h）係以11 barA、40℃而導入至主熱交換器1中。於主熱交換器1中，原料空氣冷卻至-163℃，其次，導入至氮精餾塔2之氮精餾部22之下部。 氮精餾塔2係以10.8 barA而運轉，理論板數為65。從氮精餾塔2之塔頂部23中，以579 Nm3 /h導出製品氮氣，導入至主熱交換器1之冷端後，釋放出寒冷後從溫端導出，供給至消耗地。 從氮精餾塔2之塔底部21中，以826 Nm3 /h導出富氧液，導入至以6.7 barA而運轉之第二氮冷凝器13中。 再循環空氣（550 Nm3 /h）係從第二氮冷凝器13中導出，於空氣壓縮機10中壓縮至11 barA後，於主熱交換器1中冷卻至-163℃，導入至氮精餾塔2之塔底部21。 從第二氮冷凝器13中，以394 Nm3 /h導出富氧液，導入至第一氮冷凝器3中。 於第一氮冷凝器3中蒸發之富氧液作為蒸發氣體（廢氣）而從第一氮冷凝器3中導出，於主熱交換器1中釋放出一部分之寒冷後，於膨脹渦輪機9中從5.3 barA膨脹至1.3 barA，進行冷卻。經冷卻之廢氣導入至主熱交換器1之冷端，釋放出寒冷後從主熱交換器1之溫端排出。 高純度氧進料液（170 Nm3 /h）係從氮精餾塔2之氮精餾部22之中間部221中導出。該中間部221之位置相當於從氮精餾塔2之下部起數5段至30段中之任一段。所導出之高純度氧進料液於第一過冷卻器8中由再循環氣體進行冷卻後，導入至高純度氧精餾塔4之氧精餾部43之中間。此外，高純度氧進料液亦可由減壓閥300進行減壓後導入至氧精餾部43中。 高純度氧精餾塔4係以3.2 barA而運轉，理論板數為60。從高純度氧精餾塔4之塔底部41中導出高純度液態氧（37 Nm3 /h），由氧泵7升壓至9.8 barA後，於主熱交換器1中蒸發，作為高純度氧氣而從溫端供給至消耗地。 由於高純度液態氧之蒸發，高壓空氣（50 Nm3 /h）以22.9 barA之壓力而導入至主熱交換器1之溫端，冷卻後以-163℃之溫度而從冷端導出。經冷卻之高壓空氣於減壓後導入至氮精餾塔2之下部。減壓可由減壓閥300來進行。 從高純度氧精餾塔4之塔頂部44中，以236 Nm3 /h導出再循環氣體，導入至主熱交換器1之冷端，釋放出寒冷後從溫端導出，於壓縮機6中壓縮至9.8 barA。經壓縮之再循環氣體導入至主熱交換器1中，冷卻至-163℃後，作為熱源而供給至高純度氧蒸發器5中。高純度氧蒸發器5係以對高純度氧精餾塔4供給蒸氣流之方式來配置。經高純度氧蒸發器5所冷凝之再循環氣體中，一部分作為回流液而供給至高純度氧精餾塔4之塔頂部44中，另一部分作為寒冷源而供給至第二氮冷凝器13中。(Embodiment) The system of Embodiment 5 (Figure 5) above will be described in more detail. The raw material air (975 Nm 3 /h) was introduced into the main heat exchanger 1 at 11 barA and 40°C. In the main heat exchanger 1, the raw material air is cooled to -163°C, and then introduced into the lower part of the nitrogen rectification section 22 of the nitrogen rectification tower 2. The nitrogen distillation column 2 is operated at 10.8 barA, and the theoretical plate number is 65. From the top 23 of the nitrogen rectification tower 2, the product nitrogen is led out at 579 Nm 3 /h, and after being introduced to the cold end of the main heat exchanger 1, the cold is released and then led out from the warm end and supplied to the consumer. From the bottom 21 of the nitrogen distillation column 2, the oxygen-enriched liquid was discharged at 826 Nm 3 /h, and introduced into the second nitrogen condenser 13 operating at 6.7 barA. The recirculation air (550 Nm 3 /h) is taken out from the second nitrogen condenser 13 and compressed to 11 barA in the air compressor 10, then cooled to -163°C in the main heat exchanger 1 and introduced into the nitrogen concentrate The bottom 21 of the distillation column 2. From the second nitrogen condenser 13, the oxygen-enriched liquid was led out at 394 Nm 3 /h, and introduced into the first nitrogen condenser 3. The oxygen-enriched liquid evaporated in the first nitrogen condenser 3 is taken out as boil-off gas (exhaust gas) from the first nitrogen condenser 3, and after part of the cold is released in the main heat exchanger 1, it is removed from the expansion turbine 9 Expansion from 5.3 barA to 1.3 barA for cooling. The cooled exhaust gas is introduced to the cold end of the main heat exchanger 1 and discharged from the warm end of the main heat exchanger 1 after the cold is released. The high-purity oxygen feed liquid (170 Nm 3 /h) is led out from the middle part 221 of the nitrogen rectification section 22 of the nitrogen rectification tower 2. The position of the intermediate portion 221 corresponds to any one of five to thirty stages from the lower part of the nitrogen distillation tower 2. The derived high-purity oxygen feed liquid is cooled by the recycled gas in the first subcooler 8 and then introduced into the middle of the oxygen rectification part 43 of the high-purity oxygen rectification tower 4. In addition, the high-purity oxygen feed liquid may also be decompressed by the pressure reducing valve 300 and then introduced into the oxygen rectification section 43. The high purity oxygen distillation column 4 is operated at 3.2 barA, and the theoretical plate number is 60. High-purity liquid oxygen (37 Nm 3 /h) is taken out from the bottom 41 of the high-purity oxygen rectification tower 4, and the pressure is increased to 9.8 barA by the oxygen pump 7, and then evaporated in the main heat exchanger 1 as high-purity oxygen And from the warm end to the consumption area. Due to the evaporation of high-purity liquid oxygen, high-pressure air (50 Nm 3 /h) is introduced to the warm end of the main heat exchanger 1 at a pressure of 22.9 barA, and is discharged from the cold end at a temperature of -163°C after cooling. The cooled high-pressure air is introduced into the lower part of the nitrogen distillation tower 2 after decompression. The pressure reduction can be performed by the pressure reducing valve 300. From the top 44 of the high-purity oxygen rectification tower 4, the recycled gas is led out at 236 Nm 3 /h, and introduced to the cold end of the main heat exchanger 1, released from the cold, and then led out from the warm end in the compressor 6 Compressed to 9.8 barA. The compressed recycled gas is introduced into the main heat exchanger 1, cooled to -163°C, and then supplied to the high-purity oxygen evaporator 5 as a heat source. The high-purity oxygen evaporator 5 is configured to supply a vapor stream to the high-purity oxygen rectification tower 4. Part of the recycled gas condensed by the high-purity oxygen evaporator 5 is supplied as reflux to the top 44 of the high-purity oxygen rectification column 4, and the other part is supplied to the second nitrogen condenser 13 as a cold source.

於將先前技術之富氧液作為高純度氧蒸發器之熱源（再沸源）而利用之情形時，相對於氮製造量，約3莫耳%（例如相對於579 Nm3 /h之氮，回收17.4 Nm3 /h之高純度氧）為極限，但藉由本實施形態，可回收2倍以上之37 Nm3 /h之高純度氧。 又，藉由將再循環氣體而非原料空氣來作為再沸源，由於再循環氣體係與以大氣為原料之原料空氣不同，且有3 barA左右之壓力，故而與壓縮有關之動力亦小，又，由於不需要對以低溫運轉之氮精餾塔（氮發生裝置）有害之水分或二氧化碳之去除裝置，故而於消耗電力或設備投資方面亦優異。When the oxygen-enriched liquid of the prior art is used as the heat source (reboiling source) of the high-purity oxygen evaporator, relative to the amount of nitrogen produced, about 3 mol% (for example, relative to 579 Nm 3 /h nitrogen, The recovery of 17.4 Nm 3 /h of high-purity oxygen is the limit, but with this embodiment, high-purity oxygen of 37 Nm 3 /h can be recovered twice or more. In addition, by using recycled gas instead of raw material air as the reboiling source, since the recycled gas system is different from the raw material air using the atmosphere as raw material, and has a pressure of about 3 barA, the power related to compression is also small. In addition, since it does not require a device for removing moisture or carbon dioxide that is harmful to a nitrogen rectification tower (nitrogen generator) operating at low temperatures, it is also excellent in terms of power consumption and equipment investment.

（優越性評價） 與比較例1、2進行對比，對相當於實施形態1～5之實施例1～5之優越性進行說明。 比較例1：專利文獻1（日本專利第3719832號）之圖1 比較例2：專利文獻2（國際專利公開第2014/173496公報） 實施例1：實施形態1之圖1B 實施例2：實施形態2之圖2 實施例3：實施形態3之圖3 實施例4：實施形態4之圖4 實施例5：實施形態5之圖5(Evaluation of Superiority) Compared with Comparative Examples 1 and 2, the advantages of Examples 1 to 5 corresponding to Embodiments 1 to 5 will be described. Comparative Example 1: Figure 1 of Patent Document 1 (Japanese Patent No. 3719832) Comparative Example 2: Patent Document 2 (International Patent Publication No. 2014/173496) Embodiment 1: Figure 1B of Embodiment 1 Embodiment 2: Figure 2 of Embodiment 2 Embodiment 3: Figure 3 of Embodiment 3 Embodiment 4: Figure 4 of Embodiment 4 Embodiment 5: Figure 5 of Embodiment 5

將實施例1與比較例1進行對比。實施例1中，再循環氣體於高純度氧蒸發器5中液化，該液化氣體之一部分作為回流液而供給至高純度氧精餾塔4之塔頂部44中。該回流液有助於高純度氧精餾塔4之回收率提高，與比較例1相比，可使高純度氧之回收增加至約15%。Compare Example 1 with Comparative Example 1. In Example 1, the recycled gas is liquefied in the high-purity oxygen evaporator 5, and a part of the liquefied gas is supplied to the top 44 of the high-purity oxygen rectification tower 4 as a reflux liquid. This reflux liquid helps to increase the recovery rate of the high-purity oxygen rectification tower 4, and compared with Comparative Example 1, the recovery of high-purity oxygen can be increased to about 15%.

實施例2與實施例1相比，追加氧泵7及高壓空氣之利用。該等可於不使用安全性低且高成本之氧壓縮機之情況下，製造更高壓之氧（例如8.5 barG）。 由氧泵7所升壓之高純度液態氧主要於主熱交換器1中與高壓空氣進行熱交換，蒸發、加溫而從主熱交換器1之溫端，作為高純度氧氣而回收（輸送）。高壓空氣於主熱交換器1中液化，經減壓後供給至氮精餾塔2中。高壓空氣中之高沸點成分係於作為冷媒而供給至第一氮冷凝器3中之富氧液中濃縮，因此，對高純度氧之成分品質無影響。如此一來，藉由實施例2，可安全且低成本地製造高壓高純度氧氣。Compared with Example 1, Example 2 adds the use of oxygen pump 7 and high-pressure air. These can produce higher pressure oxygen (such as 8.5 barG) without using oxygen compressors with low safety and high cost. The high-purity liquid oxygen boosted by the oxygen pump 7 mainly exchanges heat with high-pressure air in the main heat exchanger 1, evaporates and heats, and is recovered as high-purity oxygen from the warm end of the main heat exchanger 1 (transported) ). The high-pressure air is liquefied in the main heat exchanger 1 and supplied to the nitrogen rectification tower 2 after decompression. The high boiling point components in the high-pressure air are concentrated in the oxygen-enriched liquid supplied to the first nitrogen condenser 3 as a refrigerant, so it has no effect on the quality of the high-purity oxygen components. In this way, with Embodiment 2, high-pressure and high-purity oxygen can be produced safely and at low cost.

實施例3與實施例1或2相比，配置有第一過冷卻器8，其用以將供給至高純度氧精餾塔4中之高純度氧進料液以再循環氣體進行冷卻後，供給至高純度氧精餾塔4中。利用第一過冷卻器8，將高純度氧進料液冷卻，藉此於供給至高純度氧精餾塔4中之前之減壓時（可以減壓閥300進行調壓）氣化之液量減少，因此可使高純度氧之回收率提高。例如，於從9.7 barG之氮精餾塔2中，向2.2 barG之高純度氧精餾塔4中導入高純度氧進料之情形時，藉由應用第一過冷卻器8，可將進料液減壓時之氣化量降低至約65%，因此可改善高純度氧之回收。Compared with embodiment 1 or 2, embodiment 3 is equipped with a first subcooler 8, which is used to cool the high-purity oxygen feed liquid supplied to the high-purity oxygen rectification tower 4 with recycled gas and then supply To high purity oxygen distillation tower 4. The first subcooler 8 is used to cool the high-purity oxygen feed liquid, thereby reducing the amount of liquid vaporized during the decompression before being supplied to the high-purity oxygen rectification tower 4 (the pressure can be adjusted by the pressure reducing valve 300) , So the recovery rate of high purity oxygen can be improved. For example, in the case of introducing high-purity oxygen feed from the 9.7 barG nitrogen rectification tower 2 into the 2.2 barG high-purity oxygen rectification tower 4, by applying the first subcooler 8, the feed When the liquid is decompressed, the vaporization amount is reduced to about 65%, so the recovery of high-purity oxygen can be improved.

實施例4與比較例2相比，以再循環氣體將高純度氧進行精餾，因此可回收更多之高純度氧。於將原料空氣量假定為一定之情形時，比較例2中，高純度氧之回收量之上限以物質量比（或者莫耳比）計為製品氮氣之約3%，但實施例4中，可使高純度氧之回收量之上限成為約12%。Compared with Comparative Example 2, Example 4 uses recycled gas to rectify high-purity oxygen, so more high-purity oxygen can be recovered. When the amount of raw air is assumed to be constant, in Comparative Example 2, the upper limit of the recovery amount of high-purity oxygen is about 3% of the product nitrogen in terms of the mass ratio (or molar ratio), but in Example 4, The upper limit of the recovery amount of high-purity oxygen can be made about 12%.

實施例5與實施例4相比，可回收更多之製品氮。Compared with Example 4, Example 5 can recover more product nitrogen.

（其他實施形態） 雖未特別明示，但亦可於各管線中設置壓力調整裝置、流量控制裝置等，來進行壓力調整或者流量調整。 於實施形態2～5中，雖為使壓縮再循環氣體經由壓縮再循環氣體管線L71以及連接管線L72而導入至高純度氧蒸發器5之溫端的構成，但並不限定於此，亦可為如圖1A所示，使壓縮再循環氣體經由壓縮再循環氣體管線L7而直接導入至高純度氧蒸發器5之溫端的構成。(Other implementation forms) Although not specifically shown, pressure adjustment devices, flow control devices, etc. may be installed in each pipeline to perform pressure adjustment or flow adjustment. In Embodiments 2 to 5, although the compressed recycled gas is introduced to the warm end of the high-purity oxygen evaporator 5 via the compressed recycled gas line L71 and the connecting line L72, it is not limited to this, and may be as As shown in FIG. 1A, the compressed recycled gas is directly introduced to the warm end of the high-purity oxygen evaporator 5 through the compressed recycled gas line L7.

1:主熱交換器 2:氮精餾塔 21:塔底部 22:氮精餾部 221:氮精餾部22之中間部 23:塔頂部 3:第一氮冷凝器 300:減壓閥 31:第一氮冷凝器3之上部 4:高純度氧精餾塔 41:高純度氧精餾塔4之塔底部 42:氧精餾部43之下部 43:氧精餾部 44:高純度氧精餾塔4之塔頂部 5:高純度氧蒸發器 6:壓縮機 7:氧泵 9:膨脹渦輪機 10:空氣壓縮機 13:第二氮冷凝器 L1:原料空氣導入管線 L2:富氧液導出管線 L3:氮導出管線 L4:蒸發氣體管線 L5:進料液管線 L6:再循環氣體管線 L7:壓縮再循環氣體管線 L8:循環管線 L81:第一循環管線 L82:第二循環管線L82 L9:再循環空氣導入管線 1: Main heat exchanger 2: Nitrogen distillation tower 21: bottom of the tower 22: Nitrogen Distillation Department 221: Middle part of nitrogen distillation part 22 23: top of the tower 3: The first nitrogen condenser 300: Pressure reducing valve 31: The upper part of the first nitrogen condenser 3 4: High purity oxygen distillation tower 41: The bottom of the high purity oxygen distillation column 4 42: Lower part of oxygen distillation part 43 43: Oxygen Distillation Department 44: The top of the high purity oxygen distillation tower 4 5: High purity oxygen evaporator 6: Compressor 7: Oxygen pump 9: Expansion turbine 10: Air compressor 13: The second nitrogen condenser L1: Raw air inlet pipeline L2: Oxygen-rich liquid outlet pipeline L3: Nitrogen export pipeline L4: Boiling gas pipeline L5: Feed liquid pipeline L6: Recirculation gas line L7: Compressed recirculation gas pipeline L8: Circulation pipeline L81: The first circulation pipeline L82: Second circulation line L82 L9: Recirculation air introduction line

圖1A係表示實施形態1之高純度氧及氮製造系統之圖。 圖1B係表示實施形態1之變形例之圖。 圖1C係表示實施形態1之變形例之圖。 圖2係表示實施形態2之高純度氧及氮製造系統之圖。 圖3係表示實施形態3之高純度氧及氮製造系統之圖。 圖4係表示實施形態4之高純度氧及氮製造系統之圖。 圖5係表示實施形態5之高純度氧及氮製造系統之圖。Fig. 1A is a diagram showing the high-purity oxygen and nitrogen production system of the first embodiment. Fig. 1B is a diagram showing a modification of the first embodiment. Fig. 1C is a diagram showing a modification of the first embodiment. Fig. 2 is a diagram showing a high-purity oxygen and nitrogen production system of the second embodiment. Fig. 3 is a diagram showing a high-purity oxygen and nitrogen production system of the third embodiment. Fig. 4 is a diagram showing a high-purity oxygen and nitrogen production system of the fourth embodiment. Fig. 5 is a diagram showing a high-purity oxygen and nitrogen production system of the fifth embodiment.

1:主熱交換器 1: Main heat exchanger

2:氮精餾塔 2: Nitrogen distillation tower

21:塔底部 21: bottom of the tower

22:氮精餾部 22: Nitrogen Distillation Department

221:氮精餾部22之中間部 221: Middle part of nitrogen distillation part 22

23:塔頂部 23: top of the tower

3:第一氮冷凝器 3: The first nitrogen condenser

300:減壓閥 300: Pressure reducing valve

31:第一氮冷凝器3之上部 31: The upper part of the first nitrogen condenser 3

4:高純度氧精餾塔 4: High purity oxygen distillation tower

41:高純度氧精餾塔4之塔底部 41: The bottom of the high purity oxygen distillation column 4

42:氧精餾部43之下部 42: Lower part of oxygen distillation part 43

43:氧精餾部 43: Oxygen Distillation Department

44:高純度氧精餾塔4之塔頂部 44: The top of the high purity oxygen distillation tower 4

5:高純度氧蒸發器 5: High purity oxygen evaporator

6:壓縮機 6: Compressor

L1:原料空氣導入管線 L1: Raw air inlet pipeline

L2:富氧液導出管線 L2: Oxygen-rich liquid outlet pipeline

L3:氮導出管線 L3: Nitrogen export pipeline

L4:蒸發氣體管線 L4: Boiling gas pipeline

L5:進料液管線 L5: Feed liquid pipeline

L6:再循環氣體管線 L6: Recirculation gas line

L7:壓縮再循環氣體管線 L7: Compressed recirculation gas pipeline

L8:循環管線 L8: Circulation pipeline

L81:第一循環管線 L81: The first circulation pipeline

L82:第二循環管線L82 L82: Second circulation line L82

L9:再循環空氣導入管線 L9: Recirculation air introduction line

Claims (13)

一種高純度氧及氮製造系統，其具備： 主熱交換器（1），其將原料空氣進行熱交換； 氮精餾塔（2），其係導入通過上述主熱交換器（1）之原料空氣者，其具有：積存富氧液之塔底部（21）、將上述原料空氣進行精餾之氮精餾部（22）、以及導出氮氣之塔頂部（23）； 第一氮冷凝器（3），其設置於上述氮精餾塔（2）之上述塔頂部（23）之上方； 高純度氧精餾塔（4），其具有供給從上述氮精餾部（22）之中間部（221）中取出之高純度氧進料液的氧精餾部（43）； 高純度氧蒸發器（5），其設置於上述高純度氧精餾塔（4）之上述氧精餾部（43）之下部（42）； 壓縮機（6），其使從上述高純度氧精餾塔（4）之塔頂部（44）中取出之再循環氣體通過上述主熱交換器（1）後進行壓縮；以及 再循環氣體導入管線（L7；L71、L72），其用以將經上述壓縮機（6）所壓縮之再循環氣體作為上述高純度氧蒸發器（5）之熱源而導入。A high-purity oxygen and nitrogen manufacturing system, which has: Main heat exchanger (1), which exchanges heat with raw air; Nitrogen rectification tower (2), which introduces the raw material air passing through the above-mentioned main heat exchanger (1), and has: the bottom of the tower (21) where the oxygen-enriched liquid is stored, and the nitrogen rectification for rectifying the above-mentioned raw material air Section (22), and the top of the tower (23) for nitrogen out; The first nitrogen condenser (3) is arranged above the top (23) of the nitrogen rectification tower (2); A high-purity oxygen rectification tower (4), which has an oxygen rectification section (43) that supplies the high-purity oxygen feed liquid taken out from the middle section (221) of the above-mentioned nitrogen rectification section (22); A high-purity oxygen evaporator (5), which is arranged at the lower part (42) of the above-mentioned oxygen rectification part (43) of the above-mentioned high-purity oxygen rectification tower (4); A compressor (6), which compresses the recycled gas taken from the top (44) of the high-purity oxygen rectification tower (4) through the main heat exchanger (1); and The recirculation gas introduction line (L7; L71, L72) is used to introduce the recirculation gas compressed by the compressor (6) as the heat source of the high purity oxygen evaporator (5). 如請求項1所述之高純度氧及氮製造系統，其更具備： 氧泵（7），其用以將從上述氧精餾部（43）之下部（42）之液相中導出之高純度液態氧進行升壓而導入至上述主熱交換器（1）中。The high-purity oxygen and nitrogen manufacturing system described in claim 1, which is further equipped with: An oxygen pump (7) for boosting the high-purity liquid oxygen derived from the liquid phase of the lower part (42) of the oxygen rectification part (43) and introducing it into the main heat exchanger (1). 如請求項1或2所述之高純度氧及氮製造系統，其更具備： 高壓空氣導入管線（L11），其用以將高壓空氣作為上述高純度液態氧之蒸發之熱源而供給至上述主熱交換器（1）中，導入至上述氮精餾塔（2）中。The high-purity oxygen and nitrogen manufacturing system described in claim 1 or 2, which is further equipped with: The high-pressure air introduction line (L11) is used to supply high-pressure air as a heat source for the evaporation of the high-purity liquid oxygen to the main heat exchanger (1), and to introduce it into the nitrogen rectification tower (2). 如請求項1或2所述之高純度氧及氮製造系統，其具備： 第一過冷卻器（8），其將上述高純度氧進料液進行過冷卻。The high-purity oxygen and nitrogen manufacturing system as described in claim 1 or 2, which has: The first subcooler (8), which subcools the above-mentioned high purity oxygen feed liquid. 如請求項3所述之高純度氧及氮製造系統，其具備： 第一過冷卻器（8），其將上述高純度氧進料液進行過冷卻。The high-purity oxygen and nitrogen manufacturing system as described in claim 3, which has: The first subcooler (8), which subcools the above-mentioned high purity oxygen feed liquid. 如請求項1或2所述之高純度氧及氮製造系統，其具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 空氣壓縮機（10），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分進行壓縮； 廢氣管線（L41），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且從上述主熱交換器（1）之中間導出而於上述膨脹渦輪機（9）中膨脹之蒸發氣體，通過上述主熱交換器（1）而作為廢氣來回收；以及 再循環空氣導入管線（L42），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且經上述空氣壓縮機（10）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）。The high-purity oxygen and nitrogen manufacturing system as described in claim 1 or 2, which has: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; An air compressor (10), which uses at least a part of the power obtained in the expansion turbine (9) to compress a part of the boil-off gas derived from the upper portion (31) of the first nitrogen condenser (3); The exhaust gas line (L41) is used to lead from the upper part (31) of the first nitrogen condenser (3) and from the middle of the main heat exchanger (1) to expand in the expansion turbine (9) The boil-off gas is recovered as exhaust gas through the above-mentioned main heat exchanger (1); and The recirculation air introduction line (L42) is used to introduce the boil-off gas taken out from the upper part (31) of the first nitrogen condenser (3) and compressed by the air compressor (10) to the main heat After being cooled in the exchanger (1), it is supplied as recirculation air to the bottom (21) of the above-mentioned nitrogen rectification column (2). 如請求項3所述之高純度氧及氮製造系統，其具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 空氣壓縮機（10），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分進行壓縮； 廢氣管線（L41），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且從上述主熱交換器（1）之中間導出而於上述膨脹渦輪機（9）中膨脹之蒸發氣體，通過上述主熱交換器（1）而作為廢氣來回收；以及 再循環空氣導入管線（L42），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且經上述空氣壓縮機（10）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）。The high-purity oxygen and nitrogen manufacturing system as described in claim 3, which has: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; An air compressor (10), which uses at least a part of the power obtained in the expansion turbine (9) to compress a part of the boil-off gas derived from the upper portion (31) of the first nitrogen condenser (3); The exhaust gas line (L41) is used to lead from the upper part (31) of the first nitrogen condenser (3) and from the middle of the main heat exchanger (1) to expand in the expansion turbine (9) The boil-off gas is recovered as exhaust gas through the above-mentioned main heat exchanger (1); and The recirculation air introduction line (L42) is used to introduce the boil-off gas taken out from the upper part (31) of the first nitrogen condenser (3) and compressed by the air compressor (10) to the main heat After being cooled in the exchanger (1), it is supplied as recirculation air to the bottom (21) of the above-mentioned nitrogen rectification column (2). 如請求項4所述之高純度氧及氮製造系統，其具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 空氣壓縮機（10），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分進行壓縮； 廢氣管線（L41），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且從上述主熱交換器（1）之中間導出而於上述膨脹渦輪機（9）中膨脹之蒸發氣體，通過上述主熱交換器（1）而作為廢氣來回收；以及 再循環空氣導入管線（L42），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且經上述空氣壓縮機（10）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）。The high-purity oxygen and nitrogen manufacturing system described in claim 4, which has: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; An air compressor (10), which uses at least a part of the power obtained in the expansion turbine (9) to compress a part of the boil-off gas derived from the upper portion (31) of the first nitrogen condenser (3); The exhaust gas line (L41) is used to lead from the upper part (31) of the first nitrogen condenser (3) and from the middle of the main heat exchanger (1) to expand in the expansion turbine (9) The boil-off gas is recovered as exhaust gas through the above-mentioned main heat exchanger (1); and The recirculation air introduction line (L42) is used to introduce the boil-off gas taken out from the upper part (31) of the first nitrogen condenser (3) and compressed by the air compressor (10) to the main heat After being cooled in the exchanger (1), it is supplied as recirculation air to the bottom (21) of the above-mentioned nitrogen rectification column (2). 如請求項5所述之高純度氧及氮製造系統，其具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 空氣壓縮機（10），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分進行壓縮； 廢氣管線（L41），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且從上述主熱交換器（1）之中間導出而於上述膨脹渦輪機（9）中膨脹之蒸發氣體，通過上述主熱交換器（1）而作為廢氣來回收；以及 再循環空氣導入管線（L42），其用以將從上述第一氮冷凝器（3）之上部（31）中導出且經上述空氣壓縮機（10）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）。The high-purity oxygen and nitrogen manufacturing system described in claim 5, which has: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; An air compressor (10), which uses at least a part of the power obtained in the expansion turbine (9) to compress a part of the boil-off gas derived from the upper portion (31) of the first nitrogen condenser (3); The exhaust gas line (L41) is used to lead from the upper part (31) of the first nitrogen condenser (3) and from the middle of the main heat exchanger (1) to expand in the expansion turbine (9) The boil-off gas is recovered as exhaust gas through the above-mentioned main heat exchanger (1); and The recirculation air introduction line (L42) is used to introduce the boil-off gas taken out from the upper part (31) of the first nitrogen condenser (3) and compressed by the air compressor (10) to the main heat After being cooled in the exchanger (1), it is supplied as recirculation air to the bottom (21) of the above-mentioned nitrogen rectification column (2). 如請求項1或2所述之高純度氧及氮製造系統，其具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 第二氮冷凝器（13），其設置於上述第一氮冷凝器（3）之上部（31）； 空氣壓縮機（101），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第二氮冷凝器（13）之上部（131）中導出之蒸發氣體進行壓縮； 再循環空氣導入管線（L9），其用以將從上述第二氮冷凝器（13）之上部（131）中導出且經上述空氣壓縮機（101）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）； 富氧液導入管線（L21），其將從上述氮精餾塔（2）之塔底部（21）中導出之富氧液導入至第二氮冷凝器（13）中；以及 冷凝器間管線（L130），其將於上述第二氮冷凝器（13）中濃縮之富氧液導入至上述第一氮冷凝器（3）中。The high-purity oxygen and nitrogen manufacturing system as described in claim 1 or 2, which has: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; The second nitrogen condenser (13) is arranged on the upper part (31) of the above-mentioned first nitrogen condenser (3); An air compressor (101), which uses at least a part of the power obtained in the expansion turbine (9) to compress the boil-off gas derived from the upper portion (131) of the second nitrogen condenser (13); The recirculation air introduction line (L9) is used to introduce the boil-off gas taken out from the upper part (131) of the second nitrogen condenser (13) and compressed by the air compressor (101) to the main heat After being cooled in the exchanger (1), it is supplied as recirculated air to the bottom (21) of the above-mentioned nitrogen distillation column (2); The oxygen-enriched liquid introduction line (L21), which introduces the oxygen-enriched liquid derived from the bottom (21) of the above-mentioned nitrogen rectification column (2) into the second nitrogen condenser (13); and The inter-condenser pipeline (L130) introduces the oxygen-rich liquid concentrated in the second nitrogen condenser (13) to the first nitrogen condenser (3). 如請求項3所述之高純度氧及氮製造系統，其具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 第二氮冷凝器（13），其設置於上述第一氮冷凝器（3）之上部（31）； 空氣壓縮機（101），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第二氮冷凝器（13）之上部（131）中導出之蒸發氣體進行壓縮； 再循環空氣導入管線（L9），其用以將從上述第二氮冷凝器（13）之上部（131）中導出且經上述空氣壓縮機（101）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）； 富氧液導入管線（L21），其將從上述氮精餾塔（2）之塔底部（21）中導出之富氧液導入至第二氮冷凝器（13）中；以及 冷凝器間管線（L130），其將於上述第二氮冷凝器（13）中濃縮之富氧液導入至上述第一氮冷凝器（3）中。The high-purity oxygen and nitrogen manufacturing system as described in claim 3, which has: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; The second nitrogen condenser (13) is arranged on the upper part (31) of the above-mentioned first nitrogen condenser (3); An air compressor (101), which uses at least a part of the power obtained in the expansion turbine (9) to compress the boil-off gas derived from the upper portion (131) of the second nitrogen condenser (13); The recirculation air introduction line (L9) is used to introduce the boil-off gas taken out from the upper part (131) of the second nitrogen condenser (13) and compressed by the air compressor (101) to the main heat After being cooled in the exchanger (1), it is supplied as recirculated air to the bottom (21) of the above-mentioned nitrogen distillation column (2); The oxygen-enriched liquid introduction line (L21), which introduces the oxygen-enriched liquid derived from the bottom (21) of the above-mentioned nitrogen rectification column (2) into the second nitrogen condenser (13); and The inter-condenser pipeline (L130) introduces the oxygen-rich liquid concentrated in the second nitrogen condenser (13) to the first nitrogen condenser (3). 如請求項4所述之高純度氧及氮製造系統，其具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 第二氮冷凝器（13），其設置於上述第一氮冷凝器（3）之上部（31）； 空氣壓縮機（101），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第二氮冷凝器（13）之上部（131）中導出之蒸發氣體進行壓縮； 再循環空氣導入管線（L9），其用以將從上述第二氮冷凝器（13）之上部（131）中導出且經上述空氣壓縮機（101）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）； 富氧液導入管線（L21），其將從上述氮精餾塔（2）之塔底部（21）中導出之富氧液導入至第二氮冷凝器（13）中；以及 冷凝器間管線（L130），其將於上述第二氮冷凝器（13）中濃縮之富氧液導入至上述第一氮冷凝器（3）中。The high-purity oxygen and nitrogen manufacturing system described in claim 4, which has: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; The second nitrogen condenser (13) is arranged on the upper part (31) of the above-mentioned first nitrogen condenser (3); An air compressor (101), which uses at least a part of the power obtained in the expansion turbine (9) to compress the boil-off gas derived from the upper portion (131) of the second nitrogen condenser (13); The recirculation air introduction line (L9) is used to introduce the boil-off gas taken out from the upper part (131) of the second nitrogen condenser (13) and compressed by the air compressor (101) to the main heat After being cooled in the exchanger (1), it is supplied as recirculated air to the bottom (21) of the above-mentioned nitrogen distillation column (2); The oxygen-enriched liquid introduction line (L21), which introduces the oxygen-enriched liquid derived from the bottom (21) of the above-mentioned nitrogen rectification column (2) into the second nitrogen condenser (13); and The inter-condenser pipeline (L130) introduces the oxygen-rich liquid concentrated in the second nitrogen condenser (13) to the first nitrogen condenser (3). 如請求項5所述之高純度氧及氮製造系統，其具備： 膨脹渦輪機（9），其將從上述第一氮冷凝器（3）之上部（31）中導出之蒸發氣體之一部分導入至上述主熱交換器（1）中，其次，使從上述主熱交換器（1）之中間部導出之蒸發氣體膨脹； 第二氮冷凝器（13），其設置於上述第一氮冷凝器（3）之上部（31）； 空氣壓縮機（101），其利用上述膨脹渦輪機（9）中所獲得之動力之至少一部分，將從上述第二氮冷凝器（13）之上部（131）中導出之蒸發氣體進行壓縮； 再循環空氣導入管線（L9），其用以將從上述第二氮冷凝器（13）之上部（131）中導出且經上述空氣壓縮機（101）所壓縮之蒸發氣體，導入至上述主熱交換器（1）中而冷卻後，作為再循環空氣而供給至上述氮精餾塔（2）之塔底部（21）； 富氧液導入管線（L21），其將從上述氮精餾塔（2）之塔底部（21）中導出之富氧液導入至第二氮冷凝器（13）中；以及 冷凝器間管線（L130），其將於上述第二氮冷凝器（13）中濃縮之富氧液導入至上述第一氮冷凝器（3）中。The high-purity oxygen and nitrogen manufacturing system described in claim 5, which has: An expansion turbine (9), which introduces a part of the boil-off gas derived from the upper part (31) of the first nitrogen condenser (3) into the main heat exchanger (1), and secondly, exchanges heat from the main The boil-off gas derived from the middle part of the device (1) expands; The second nitrogen condenser (13) is arranged on the upper part (31) of the above-mentioned first nitrogen condenser (3); An air compressor (101), which uses at least a part of the power obtained in the expansion turbine (9) to compress the boil-off gas derived from the upper portion (131) of the second nitrogen condenser (13); The recirculation air introduction line (L9) is used to introduce the boil-off gas taken out from the upper part (131) of the second nitrogen condenser (13) and compressed by the air compressor (101) to the main heat After being cooled in the exchanger (1), it is supplied as recirculated air to the bottom (21) of the above-mentioned nitrogen distillation column (2); The oxygen-enriched liquid introduction line (L21), which introduces the oxygen-enriched liquid derived from the bottom (21) of the above-mentioned nitrogen rectification column (2) into the second nitrogen condenser (13); and The inter-condenser pipeline (L130) introduces the oxygen-rich liquid concentrated in the second nitrogen condenser (13) to the first nitrogen condenser (3).
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