TW202035869A - Rotor apparatus with modified cover - Google Patents

Abstract

The rotor apparatus with modified cover is disclosed, which is suitable for setting in the turbo molecular vacuum pump. The rotor apparatus with modified cover comp comprises: a rotating shaft, a rotor body, and a cover. One end of the rotating shaft installs to the turbo molecular vacuum pump. The rotor body connects to the rotating shaft, and one end of the rotor body relative to the rotating shaft which is recessed to form a locking space. The cover comprises a link unit and a cover unit, one end of the link unit connects the other end of the rotating shaft, one end of the cover unit connects the other end of the link unit. One end of the cover unit relies one end of the rotor body relative to the rotating shaft, and covers the opening of the lock space. The surface of the sidewall of the cover unit and the other end of the cover unit are smooth surface.

Description

Rotor device with improved cover

The present invention relates to a rotor device for turbo molecular vacuum pumps, in particular to a rotor device with an improved cover.

The conventional turbomolecular vacuum pump used for vacuum pumping can drive the rotor connected to it to perform the vacuum pumping process. In addition, the center of the rotor will be recessed toward the turbomolecular vacuum pump to form a lock space to The rotor and turbo molecular vacuum pump are combined by fixing elements such as bolts. However, when the turbomolecular vacuum pump is used in the etching process of wafers or electronic substrates, the dust particles generated during the processing are easy to accumulate in the lock space, and the air flow generated by the rotor during the processing is easy to make the lock space The dust particles in the air flow back to the processing area, which may cause the wafer or electronic substrate in the processing area to be contaminated.

The rotor of the conventional turbomolecular vacuum pump uses bolts to lock the cover on the lock space to prevent dust particles from floating into the lock space. However, after the bolts are locked, there is a clearance space. It causes dust particles to accumulate in it, which may also cause dust particles to float back to the processing area from the clearance space. In addition, some conventional lids can be locked to the rotating shaft by screwing, but they need to be disassembled by The jig is connected to the recessed structure on the cover, and then the jig is connected by pulling the component and applying force to it to indirectly drive the cover to rotate out of the rotating shaft. This process is likely to cause damage to the recessed structure due to improper force angle or force. Users need to replace the cover frequently; in addition, the recessed structure may also accumulate dust or process products, and the recessed structure will disrupt the air flow through the cover, so it is easier for dust particles to float back to the processing area and cause damage to the wafer or electronic substrate. Pollution.

In view of the above-mentioned problems, the inventor of the present invention designed a rotor device with an improved cover to improve the lack of conventional technology and further enhance its industrial application.

In view of the above-mentioned conventional problems, the object of the present invention is to provide a rotor device with an improved cover, which is suitable for installation in a turbo molecular vacuum pump. The rotor device with an improved cover includes a rotating shaft, a rotor body, and a cover; one end of the rotating shaft is set in the turbo molecular vacuum pump; the rotor system is connected to the rotating shaft, and the rotor body is recessed to form a lock with one end of the rotating shaft Attached space; the cover includes a connecting unit and a covering unit, one end of the connecting unit is connected to the other end of the rotating shaft, and one end of the covering unit is connected to the other end of the connecting unit, and bears against one end of the rotor body relative to the rotating shaft, And cover the opening of the lock space, and the side wall and the other end surface of the covering unit are smooth curved surfaces.

Preferably, one end of the covering unit can extend in a direction corresponding to the connecting unit to form an annular rib, and the annular rib is attached to the side wall of the locking space.

Preferably, the covering unit may include a supporting portion, the supporting portion is located at one end of the covering unit and between the side wall of the covering unit and the annular rib, and the supporting portion is supported against the rotor body relative to the rotating shaft. One end.

Preferably, one end of the covering unit can be recessed to form a first blind hole, the side wall of the first blind hole includes a first internal thread, and the outer surface of the other end of the connecting unit includes a first external thread. It is screwed with the first internal thread, and the covering unit is fixed to the connecting unit.

Preferably, the other end of the rotating shaft can be recessed to form a second blind hole, the side wall of the second blind hole includes a second internal thread, and the outer surface of one end of the connecting unit includes a second external thread. The system is screwed with the second internal thread, and the connecting unit is fixed to the rotating shaft.

Preferably, the other end of the covering unit may be conical, and the center of the other end of the covering unit extends and protrudes in a direction relative to the connecting unit.

Preferably, the rotor device with an improved cover may further include a plurality of fixing elements, the plurality of fixing elements are combined with the rotor body and the rotating shaft, one end of the plurality of fixing elements is located in the locking space, and the other of the plurality of fixing elements One end is located in the rotating shaft, and a plurality of fixed elements are adjacently arranged around the rotating shaft in a ring-shaped array.

Preferably, the connecting unit may be a stainless steel connecting unit, and the covering unit may be an aluminum alloy covering unit.

Preferably, the rotor device with an improved cover may further include an expansion sleeve jig. The expansion sleeve jig includes a clamping portion and a rotating plate. One end of the clamping portion is recessed to form a clamping space, The side wall of the holding space is fixed on the side wall of the covering unit, the rotating plate part is arranged at the other end of the clamping part, the rotating plate part bears an external force and the clamping part drives the cover to rotate.

Preferably, the rotor device with an improved cover can further include a flipping member, the flipping member includes a gripping portion and a flipping portion, one end of the gripping portion is connected to one end of the flipping portion, and the other end of the flipping portion One end is recessed to form a turning space, the turning space is sleeved on the turning part, and the shape of the turning space at the end view corresponds to the shape of the turning part at the end view, and the holding part bears external force The turning part drives the expansion sleeve fixture to rotate.

In summary, the rotor device with an improved cover of the present invention has the following advantages:

(1) Compared with conventional rotor devices for turbomolecular vacuum pumps, the rotor device with an improved cover of the present invention has a cover that can cover the lock space to avoid operation of the turbomolecular vacuum pump. During the process, the dust particles floating into the locked space will once again float out of the locked space due to the disturbance of the airflow, thereby causing pollution to the wafer or electronic substrate being processed.

(2) The cover of the present invention is a combined structure, which includes a cover unit and a connecting unit. The user can screw the cover unit and the rotating shaft through the two ends of the connecting unit, so that the cover can effectively cover the lock space At the same time, the rotating shaft is connected; among them, the side wall of the covering unit and one end of the outer surface are smoothly curved, so it can help guide the airflow to stabilize during the rotation of the rotating shaft, and can prevent dust particles from depositing on the cover.

(3) The cover unit of the cover of the present invention can be fixed to the clamping part of the expansion sleeve fixture, and can be combined with the turning part of the expansion sleeve fixture by the puller, so as to further increase The cover is assembled or disassembled on the rotating shaft by applying force, so that there is no need to design a recessed or protruding structure in the cover unit of the cover to increase the possibility of dust particles remaining in it.

In order to make the above objectives, technical features, and gains after actual implementation more obvious and easy to understand, a more detailed description will be given below with a preferred implementation example to assist the corresponding diagrams.

In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "中", "inner" and "outer" are based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention. And to simplify the description, rather than indicating or implying that the pointed device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, if the terms "first" and "second" are used for descriptive purposes only, they cannot be understood as indicating or implying relative importance.

In the description of the present invention, it should be noted that the terms "set", "link", "fixed", "covered", "locked", "deposited", "running", unless otherwise clearly specified and limited. And "reliance" should be understood in a broad sense. For those skilled in the art, they can understand the specific meanings of the above terms in the present invention under specific circumstances.

Hereinafter, embodiments of the rotor device with an improved cover according to the present invention will be described with reference to related drawings. For ease of understanding, the same components in the following embodiments are described with the same symbols.

Please refer to Figure 1, which is a component layout diagram of the rotor device with an improved cover of the present invention. The first figure is presented in a partial cross section. As shown in the figure, the object of the present invention is to provide a rotor device with an improved cover, which is suitable for installation in a turbo molecular vacuum pump 10. The rotor device with an improved cover includes a rotating shaft 20, a rotor body 30, and a cover 50; one end of the rotating shaft 20 is set on the turbo molecular vacuum pump 10, and its connection method can include threaded fitting or auxiliary fixing by other components; the rotor The main body 30 is connected to the rotating shaft 20, and one end of the rotor main body 30 relative to the rotating shaft 20 is recessed to form a locking space 40. The rotor main body 30 can be sleeved on the rotating shaft 20 and locked by threaded fitting Fixed to the rotating shaft 20; the cover 50 includes a connecting unit 60 and a covering unit 70. One end of the connecting unit 60 is connected to the other end of the rotating shaft 20, and one end of the covering unit 70 is connected to the other end of the connecting unit 60 and supports One end of the rotor body 30 opposite to the rotating shaft 20 covers the opening of the locking space 40, and the side walls and the other end of the covering unit 70 are smoothly curved.

For example, with this component configuration method, the user controls the turbomolecular vacuum pump 10 according to processing requirements. At this time, the turbomolecular vacuum pump 10 can drive the rotating shaft 20 to operate, and the rotating shaft 20 can drive the rotor body 30 connected to it. By rotating, the vacuum pumping process can be performed; and by connecting the connecting unit 60 of the cover 50 to the rotating shaft 20, and making one end of the covering unit 70 of the cover 50 cover the opening of the locking space 40, it can effectively avoid During the processing, dust particles fall into the lock space 40. In addition, the surface of the side wall and the other end of the covering unit 70 is designed as a smooth curved surface, that is, the surface of the side wall and the other end of the covering unit 70 does not contain holes or protrusions. Therefore, the airflow can be effectively guided to stabilize it, and dust particles can be prevented from being deposited on the cover 50; the above is only an example, and is not limited thereto.

The other end of the covering unit 70 is cone-shaped, and the center of the other end of the covering unit 70 extends and protrudes in the direction relative to the connecting unit 60; with this structure design, when the covering unit 70 bears against the rotor body 30 and the rotor When the main body 30 rotates, the airflow can be guided by the tapered smooth curve surface to stabilize the airflow without disturbing the airflow. Therefore, it can effectively prevent dust particles from being deposited on the covering unit 70 during processing. on.

The rotor device with an improved cover further includes a plurality of fixing elements 130, the plurality of fixing elements 130 are combined with the rotor body 30 and the rotating shaft 20, one end of the plurality of fixing elements 130 is located in the locking space 40, and the plurality of fixing elements 130 The other end is located in the rotating shaft 20, and a plurality of fixing elements 130 are adjacently arranged around the rotating shaft 20 in a ring-shaped array; wherein, the fixing elements 130 can be screws, bolts, studs or other effective Combining multiple components, the user can combine the fixing element 130 from the locking space 40 to the rotor body 30 and the rotating shaft 20 to effectively hold the rotor body 30 on the rotating shaft 20.

The connecting unit 60 is a stainless steel connecting unit 60, and the covering unit 70 is an aluminum alloy covering unit 70; the use of composite materials enables the covering unit 70 and the connecting unit 60 to load high-speed torque, and can withstand excessive pH Environmental impact.

Please refer to Figures 2 and 3. Figure 2 is a schematic view of the thread arrangement of the rotor device with an improved cover of the present invention, and Figure 3 is a perspective view of the cover of the rotor device with an improved cover of the present invention. The second figure is presented as a cross-sectional view. As shown in the figure, one end of the covering unit 70 extends in the direction corresponding to the connecting unit 60 to form an annular rib 80, which is attached to the locking space 40 The side wall; by the configuration of the annular rib 80, it can effectively provide a supporting point to withstand the force applied to the covering unit 70 during the rotation of the rotor body 30, and it can also assist the limiting covering unit 70; the above is only an example, Not limited to this.

The covering unit 70 includes a supporting portion 90. The supporting portion 90 is located at one end of the covering unit 70 and between the side wall of the covering unit 70 and the annular rib 80. The supporting portion 90 is supported against the rotor body 30 relative to One end of the rotating shaft 20; by the configuration of the supporting portion 90, the covering unit 70 can be firmly supported on the rotor body 30. In addition, the extended area can prevent dust particles from passing through the joint between the cover 50 and the rotor body 30 Enter the locked space 40; the above is only an example and not a limitation.

One end of the cover unit 70 is recessed to form a first blind hole 101, the side wall of the first blind hole 101 includes a first internal thread 111, and the outer surface of the other end of the connecting unit 60 includes a first external thread 121. The thread 121 is screwed with the first internal thread 111, the covering unit 70 is fixed to the connecting unit 60; the other end of the rotating shaft 20 is recessed to form a second blind hole 102, and the side wall of the second blind hole 102 includes a second For the internal thread 112, the outer surface of one end of the connecting unit 60 includes a second external thread 122, the second external thread 122 is screwed with the second internal thread 112, and the connecting unit 60 is fixed to the rotating shaft 20. With this thread arrangement, the two ends of the connecting unit 60 can be effectively locked to the cover unit 70 and the rotating shaft 20 to prevent falling off. In addition, it can be quickly disassembled for replacement of parts.

Please refer to Fig. 4, which is a schematic diagram of the assembly element arrangement of the rotor device with an improved cover of the present invention. Figure 4 is shown in partial section. As shown in the figure, the rotor device with an improved cover further includes an expansion sleeve jig 140, which includes a clamping portion 150 and a rotating part 160. One end of the clamping portion 150 is recessed to form a clamping space 170. The side wall of the clamping space 170 is fixed to the side wall of the covering unit 70. The swivel portion 160 is disposed at the other end of the clamping portion 150; in addition, it has The rotor device of the improved cover further includes a flipping member 180. The flipping member 180 includes a gripping portion 190 and a flipping portion 200. One end of the gripping portion 190 is connected to one end of the flipping portion 200. The other end is recessed to form a flipping space, the flipping space is sleeved on the flip part 160, and the shape of the flipping space at the end view corresponds to the shape of the flipping part 160 at the end view, holding The portion 190 receives the external force by driving the expansion sleeve fixture 140 to rotate by the pulling portion 200, and the expansion sleeve fixture 140 drives the cover unit 70 of the cover 50 to rotate by the clamping portion 150.

For example, the user can set the clamping space 170 of the expansion sleeve fixture 140 to correspond to the covering unit 70 of the cover 50, and hold the outer side wall of the covering unit 70 by the side wall of the clamping portion 150, and then can turn the trigger The pull part 200 of 180 is sleeved on the pull part 160 of the expansion sleeve jig 140. The ends of the pull part 180 and the pull part 160 have corresponding shapes. Finally, the user can adjust the pull part 180 The gripping part 190 applies force, and the way of applying force is to rotate the axis axially with the turning part 160 as the center. In this way, the expansion sleeve fixture 140 can be driven to rotate by the pulling member 180, and the expansion sleeve fixture The 140 drives the cover 50 to rotate; therefore, the user can effectively assemble or disassemble the cover 50 to the rotating shaft 20 by using the expansion sleeve fixture 140 and the flipping member 180; the above is only an example and not a limitation.

Compared with the conventional rotor device for turbomolecular vacuum pump 10, the rotor device with an improved cover of the present invention has a cover 50 that can cover the lock space 40, so as to avoid the problem of the turbomolecular vacuum pump 10. During the operation, the dust particles floating into the locked space 40 will once again float out of the locked space 40 due to the disturbance of the airflow, thereby causing pollution to the wafer or electronic substrate being processed.

The cover 50 of the present invention is a combined structure, which includes a covering unit 70 and a connecting unit 60. The user can screw the covering unit 70 and the rotating shaft 20 through the two ends of the connecting unit 60, so that the cover 50 can be effectively made The covering and locking space 40 is connected to the rotating shaft 20 at the same time; wherein, the outer surface of the side wall and one end of the covering unit 70 is a smooth curve, so it can assist in guiding the airflow to stabilize the rotating shaft 20 during the rotation process, and can Avoid depositing dust particles on the cover 50.

The cover unit 70 of the cover 50 of the present invention can be fixed to the clamping portion 150 of the expansion sleeve jig 140, and can be combined with the turning portion 160 of the expansion sleeve jig 140 by the flipping member 180 to further Applying force to the flipping member 180 to assemble or disassemble the cover 50 on the rotating shaft 20, there is no need to design a recessed or protruding structure on the cover unit 70 of the cover 50 to increase the possibility of dust particles remaining therein.

The above description is only illustrative, and not restrictive. Any revisions or changes made without departing from the spirit and scope of the present invention shall be included in the scope of the attached patent application.

10: Turbo molecular vacuum pump 20: Rotating shaft 30: Rotor body 40: Locking space 50: Cover 60: Connecting unit 70: Covering unit 80: Ring-shaped rib 90: Bearing part 101: First blind hole 102: Second blind Hole 111: first internal thread 112: second internal thread 121: first external thread 122: second external thread 130: fixing element 140: expansion sleeve fixture 150: clamping part 160: rotating part 170: clamping Space 180: Trigger 190: Grip 200: Trigger

Figure 1 is a component layout diagram of a rotor device with an improved cover according to the present invention. Figure 2 is a schematic diagram of the thread arrangement of the rotor device with an improved cover according to the present invention. Figure 3 is a perspective view of the cover of the rotor device with an improved cover according to the present invention. Figure 4 is a schematic diagram of the assembly element arrangement of the rotor device with an improved cover according to the present invention.

10: Turbo molecular vacuum pump

20: Rotation axis

30: Rotor body

40: lock space

50: Lid

60: link unit

70: Cover unit

130: fixed element

Claims (10)

A rotor device with an improved cover is suitable for installation in a turbomolecular vacuum pump. It includes: a rotating shaft, one end of which is installed on the turbomolecular vacuum pump; a rotor body connected to the rotating shaft, and the rotor One end of the body relative to the rotating shaft is recessed to form a locking space; and a cover includes: a connecting unit, one end of which is connected to the other end of the rotating shaft; and a covering unit, one end of which is connected to the connection The other end of the unit bears against the end of the rotor body relative to the rotating shaft and covers the opening of the locking space, and the side wall of the covering unit and the surface of the other end are smooth curved surfaces. The rotor device with an improved cover described in item 1 of the scope of patent application, wherein the end of the covering unit extends in a direction corresponding to the connecting unit to form an annular rib, and the annular rib is attached to the lock Side wall with space. The rotor device with an improved cover as described in the second item of the scope of patent application, wherein the covering unit includes a supporting portion located at the end of the covering unit and located on the side wall of the covering unit and Between the annular protruding ribs, the supporting portion is supported against the end of the rotor body relative to the rotating shaft. The rotor device with an improved cover as described in the first item of the scope of patent application, wherein the end of the covering unit is recessed to form a first blind hole, and the side wall of the first blind hole includes a first internal thread, The outer surface of the other end of the connecting unit includes a first external thread, the first external thread is screwed with the first internal thread, and the covering unit is fixed to the connecting unit. The rotor device with an improved cover as described in the first item of the patent application, wherein the other end of the rotating shaft is recessed to form a second blind hole, and the side wall of the second blind hole includes a second internal thread The outer surface of the end of the connecting unit includes a second external thread, the second external thread is screwed with the second internal thread, and the connecting unit is fixed to the rotating shaft. The rotor device with an improved cover as described in claim 1, wherein the other end of the covering unit is conical, and the center of the other end of the covering unit extends convexly in the direction relative to the connecting unit Up. The rotor device with an improved cover described in the first item of the scope of patent application further includes a plurality of fixing elements, the plurality of fixing elements are combined with the rotor body and the rotating shaft, and one end of the plurality of fixing elements is located at In the locking space, the other ends of the plurality of fixing elements are located in the rotating shaft, and the plurality of fixing elements are adjacently arranged around the rotating shaft in a ring-shaped array. As described in the first item of the scope of patent application, the rotor device with an improved cover, wherein the connecting unit is a stainless steel connecting unit, and the covering unit is an aluminum alloy covering unit. The rotor device with an improved cover as described in the first item of the scope of the patent application further includes an expansion sleeve jig, the expansion sleeve jig includes a clamping part and a rotating part, the clamping part One end is recessed to form a clamping space, the side wall of the clamping space is fixed to the side wall of the covering unit, the rotating part is arranged at the other end of the clamping part, and the rotating part bears an external force. The cover is driven to rotate by the clamping part. As described in item 9 of the scope of patent application, the rotor device with an improved cover further includes a puller, the puller includes a grip portion and a pull portion, one end of the grip portion is connected One end of the turning portion and the other end of the turning portion are recessed to form a turning space, the turning space is sleeved on the turning portion, and the shape of the turning space at the end view corresponds to In the shape of the end view of the turning part, the gripping part receives the external force and the turning part drives the expansion sleeve fixture to rotate.

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