TWI696754B - Rotor apparatus with modified cover - Google Patents

Abstract

The rotor apparatus with modified cover is disclosed, which is suitable for setting in the turbo molecular vacuum pump. The rotor apparatus with modified cover comp comprises: a rotating shaft, a rotor body, and a cover. One end of the rotating shaft installs to the turbo molecular vacuum pump. The rotor body connects to the rotating shaft, and one end of the rotor body relative to the rotating shaft which is recessed to form a locking space. The cover comprises a link unit and a cover unit, one end of the link unit connects the other end of the rotating shaft, one end of the cover unit connects the other end of the link unit. One end of the cover unit relies one end of the rotor body relative to the rotating shaft, and covers the opening of the lock space. The surface of the sidewall of the cover unit and the other end of the cover unit are smooth surface.

Description

Rotor device with improved cover

The present invention relates to a rotor device for a turbomolecular vacuum pump, in particular to a rotor device with an improved cover.

The currently known turbomolecular vacuum pump used for vacuum pumping can drive the rotor connected to it for vacuum pumping process. In addition, the center of the rotor will be recessed in the direction of the turbomolecular vacuum pump to form a locking space to The rotor and turbo molecular vacuum pump are combined by fixing elements such as bolts. However, when the turbo molecular vacuum pump is used in the etching process of wafers or electronic substrates, the dust particles generated during the process are easy to accumulate in the lock space, and the air flow generated by the rotor during the process is easy to make the lock space The dust particles in the air flow back to the processing area with the airflow, so it may cause the wafer or electronic substrate in the processing area to be contaminated.

Currently known rotors for turbo-molecular vacuum pumps additionally lock the cover on the locking space with bolts to prevent dust particles from floating into the locking space, however, there is a possibility of clearance space after the bolts are locked It causes dust particles to accumulate in it, which may also cause the dust particles to float back to the processing area from the clearance space; in addition, some currently known covers can be locked to the rotating shaft by screwing, but they need to be removed by disassembly The jig is connected to the concave structure on the cover, and then the jig is connected by the pulling element and the force is applied to indirectly drive the cover to rotate out of the rotating shaft. This process is likely to be caused by damage to the concave structure due to improper force angle or force. The user needs to change the lid frequently; in addition, the recessed structure also Dust or process products may accumulate, and the recessed structure will disturb the air flow through the cover, so it is easier to make the dust particles float back to the processing area and cause the wafer or electronic substrate to be contaminated.

In view of the above problems, the inventor of the present invention has designed a rotor device with an improved cover to improve the lack of conventional technology, thereby enhancing the industrial implementation and utilization.

In view of the above-mentioned conventional problems, the object of the present invention is to provide a rotor device with an improved cover, which is suitable for being installed in a turbo molecular vacuum pump. A rotor device with an improved cover includes a rotating shaft, a rotor body, and a cover; one end of the rotating shaft is provided in a turbomolecular vacuum pump; the rotor system is connected to the rotating shaft, and the rotor body is recessed relative to one end of the rotating shaft to form a lock Attached space; the cover includes a connecting unit and a covering unit, one end of the connecting unit is connected to the other end of the rotating shaft, one end of the covering unit is connected to the other end of the connecting unit, and bears on one end of the rotor body relative to the rotating shaft, And cover the opening of the lock space, and cover the side wall of the unit and the surface of the other end are smooth curved surfaces.

Preferably, one end of the covering unit may extend in a direction corresponding to the connecting unit to form an annular rib, and the annular rib is attached to the side wall of the locking space.

Preferably, the covering unit may include a bearing portion, which is located at one end of the covering unit and between the side wall of the covering unit and the annular rib, and the bearing portion bears against the rotor body relative to the rotating shaft One end.

Preferably, one end of the covering unit may be recessed to form a first blind hole, the side wall of the first blind hole includes a first internal thread, and the outer surface of the other end of the connecting unit includes a first external thread, the first external thread The first internal thread is screwed with each other, and the covering unit is fixed to the connecting unit.

Preferably, the other end of the rotating shaft may be recessed to form a second blind hole, the side wall of the second blind hole includes a second internal thread, and the outer surface of one end of the connecting unit includes a second external thread and a second external thread The second internal thread is screwed together, and the connecting unit is fixed to the rotating shaft.

Preferably, the other end of the covering unit may be conical, and the center of the other end of the covering unit extends toward the connecting unit.

Preferably, the rotor device with the improved cover may further include a plurality of fixing elements, the plurality of fixing elements combine the rotor body and the rotating shaft, one end of the plurality of fixing elements is located in the locking space, and the other of the plurality of fixing elements One end is located in the rotating shaft, and a plurality of fixing elements are arranged adjacent to the rotating shaft in an annular array.

Preferably, the connecting unit may be a stainless steel connecting unit, and the covering unit is an aluminum alloy covering unit.

Preferably, the rotor device with the improved cover may further include an expansion sleeve jig. The expansion sleeve jig includes a clamping portion and a swivel portion. One end of the clamping portion is recessed to form a clamping space. The side wall of the holding space is fixed to the side wall of the covering unit, and the turning part is provided at the other end of the clamping part. The turning part receives an external force and drives the lid to rotate by the clamping part.

Preferably, the rotor device with the improved cover may further include a trigger member, the trigger member includes a grip portion and a trigger portion, one end of the grip portion is connected to one end of the trigger portion, and the other of the trigger portion One end is recessed to form a pulling space, and the pulling space is sleeved on the turning part, and the shape of the turning space at the end view corresponds to the shape of the turning part at the end view, and the grip part receives external force The expansion sleeve is driven to rotate by the pulling part.

In summary, the rotor device with an improved cover of the present invention has the following advantages:

(1) Compared with the conventional rotor device for turbomolecular vacuum pump, the rotor device of the invention has an improved cover. The rotor device of the invention has a cover to cover the locking space to avoid operation of the turbomolecular vacuum pump During the process, the dust particles floating into the locked space are once again floating out of the locked space due to the disturbance of the air flow, thereby causing contamination to the wafer or electronic substrate being processed.

(2) The cover of the present invention is a combined structure, which includes a covering unit and a connecting unit. The user can screw the covering unit and the rotating shaft respectively by the two ends of the connecting unit, so the cover can effectively cover the locking space At the same time, the rotating shaft is connected; wherein the outer surface of the side wall and one end of the covering unit are smooth curves, so it can help guide the air flow during the rotation of the rotating shaft to stabilize it, and can prevent dust particles from depositing on the cover.

(3) The cover unit of the cover of the present invention can be held in the clamping part of the expansion sleeve jig, and the turning part of the expansion sleeve jig can be combined with the trigger to further adjust the trigger Apply force to assemble or disassemble the cover on the rotating shaft, so there is no need to design a concave or protruding structure on the cover unit of the cover to increase the possibility of dust particles remaining in it.

In order to make the above-mentioned objectives, technical features and gains after actual implementation more obvious and understandable, in the following, the preferred embodiments will be supplemented with corresponding drawings to explain in more detail.

10: Turbo molecular vacuum pump

20: Rotating axis

30: rotor body

40: lock space

50: lid

60: Link unit

70: Covering unit

80: annular rib

90: Bearing Department

101: the first blind hole

102: Second blind hole

111: first internal thread

112: second internal thread

121: first external thread

122: second external thread

130: fixed element

140: Expansion sleeve fixture

150: clamping part

160: Swivel

170: clamping space

180: trigger

190: Grip

200: Pulling part

Fig. 1 is a component layout diagram of a rotor device with an improved cover according to the present invention.

Figure 2 is a schematic diagram of the screw configuration of the rotor device with an improved cover according to the present invention.

Figure 3 is a perspective view of the lid of the rotor device with an improved lid according to the present invention.

FIG. 4 is a schematic view of the assembly elements of the rotor device with an improved cover according to the present invention.

In the description of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "middle", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, only for the convenience of describing the present invention And simplify the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be construed as limiting the present invention. In addition, the use of the terms "first" and "second" is for descriptive purposes only and cannot be understood as indicating or implying relative importance.

In the description of the present invention, it should be noted that the terms "setup", "link", "fixed", "overlay", "lock", "deposit", "run" unless otherwise clearly specified and limited And "reliance" should be broadly understood. For those of ordinary knowledge in the technical field to which they belong, the specific meaning of the above terms in the present invention can be understood in specific situations.

In the following, embodiments of the rotor device with an improved cover according to the present invention will be described with reference to related drawings. For ease of understanding, the same elements in the following embodiments are marked with the same symbols.

Please refer to FIG. 1, which is a component layout diagram of the rotor device with an improved cover of the present invention. The first figure is shown in a partial cross section. As shown in the figure, the object of the present invention is to provide a rotor device with an improved cover, which is suitable for being installed in a turbomolecular vacuum pump 10. A rotor device with an improved cover includes a rotating shaft 20, a rotor body 30, and a cover 50; one end of the rotating shaft 20 is provided in the turbo-molecular vacuum pump 10, and the connection method may include screw fitting or auxiliary fixing by other components; the rotor The body 30 is connected to the rotating shaft 20, and the rotor body 30 is relative to the rotating shaft 20 One end is recessed to form a locking space 40, wherein the rotor body 30 can be sleeved on the rotating shaft 20 and locked to the rotating shaft 20 by screwing; the cover 50 includes a connecting unit 60 and a covering unit 70, One end of the connecting unit 60 is connected to the other end of the rotating shaft 20, and one end of the covering unit 70 is connected to the other end of the connecting unit 60, and bears on one end of the rotor body 30 relative to the rotating shaft 20, and covers the locking space 40 The opening, and the surface covering the side wall and the other end of the unit 70 are smooth curved surfaces.

For example, with this component arrangement, the user controls the turbomolecular vacuum pump 10 according to the processing requirements. At this time, the turbomolecular vacuum pump 10 can drive the rotating shaft 20 to operate, and the rotating shaft 20 can drive the rotor body 30 connected thereto. Rotate, so that the process of vacuum evacuation can be performed; and by connecting the connecting unit 60 of the cover 50 to the rotating shaft 20, and covering the opening of the locking space 40 with one end of the cover unit 70 of the cover 50, it can be effectively avoided During processing, the dust particles fall into the locking space 40. In addition, the surface of the side wall and the other end of the cover unit 70 is designed as a smooth curved surface, that is, the side wall and the surface of the other end of the cover unit 70 do not contain holes or raised structures. Therefore, the air flow can be effectively guided to stabilize it, and dust particles can be prevented from depositing on the cover 50; the above is only an example, and is not limited thereto.

The other end of the covering unit 70 is conical, and the center of the other end of the covering unit 70 extends in a direction relative to the connecting unit 60; by this structural design, when the covering unit 70 bears against the rotor body 30 and the rotor When the body 30 rotates, the air flow can be guided by the surface with a tapered smooth curve to stabilize it without disturbing the flow of the air flow, so the dust particles in the processing process can be effectively prevented from depositing in the covering unit 70 on.

The rotor device with the improved cover further includes a plurality of fixing elements 130, the plurality of fixing elements 130 is a combination of the rotor body 30 and the rotating shaft 20, one end of the plurality of fixing elements 130 is located in the locking space 40, and the plurality of fixing elements 130 The other end is located in the rotating shaft 20, and a plurality of fixing elements 130 are arranged adjacent to the rotating shaft 20 in a ring array; wherein, the fixing elements 130 It can be a screw, a bolt, a peg or other elements that can effectively combine multiple components. The user can combine the fixing element 130 from the locking space 40 to the rotor body 30 and the rotating shaft 20 to effectively rotate the rotor body 30 It is held on the rotating shaft 20.

The connecting unit 60 is a stainless steel connecting unit 60, and the covering unit 70 is an aluminum alloy covering unit 70; using a composite material system can make the covering unit 70 and the connecting unit 60 load a high-speed torque and can withstand high pH values Environmental impact.

Please refer to FIG. 2 and FIG. 3, FIG. 2 is a schematic view of the screw configuration of the rotor device with the improved cover of the present invention, and FIG. 3 is a perspective view of the cover of the rotor device with the improved cover of the present invention. The second figure is presented as a cross-sectional view. As shown in the figure, one end of the covering unit 70 extends in a direction corresponding to the connecting unit 60 to form a ring-shaped rib 80, and the ring-shaped rib 80 fits the locking space 40. The side wall; through the configuration of the annular rib 80, it can effectively provide a supporting point to withstand the force applied to the cover unit 70 during the rotation of the rotor body 30, and can also assist in limiting the cover unit 70; the above is only an example, Not limited to this.

The covering unit 70 includes a bearing portion 90. The bearing portion 90 is located at one end of the covering unit 70 and between the side wall of the covering unit 70 and the annular rib 80. The bearing portion 90 bears against the rotor body 30 relative to One end of the rotating shaft 20; by the configuration of the bearing portion 90, the covering unit 70 can be firmly supported on the rotor body 30, in addition, by extending the area can avoid the dust particles through the cover 50 and the rotor body 30 junction Enter the lock-up space 40; the above is just an example and not limited to this.

One end of the covering unit 70 is recessed to form a first blind hole 101, the side wall of the first blind hole 101 includes a first internal thread 111, and the outer surface of the other end of the connecting unit 60 includes a first external thread 121, the first external The thread 121 is screwed with the first internal thread 111, and the covering unit 70 is fixed to the connecting unit 60; the other end of the rotating shaft 20 is recessed to form a second blind hole 102, and the side wall of the second blind hole 102 includes In the two internal threads 112, the outer surface of one end of the connecting unit 60 includes a second external thread 122. The second external thread 122 and the second internal thread 112 are screwed to each other. The connecting unit 60 is fixed to the rotating shaft 20. With this screw arrangement, both ends of the coupling unit 60 can be effectively locked to the cover unit 70 and the rotating shaft 20 without falling off. In addition, they can be quickly disassembled for parts replacement.

Please refer to FIG. 4, which is a schematic view of the assembly components of the rotor device with the improved cover of the present invention. FIG. 4 is shown in a partial cross-section. As shown in the figure, the rotor device with the improved cover further includes an expansion sleeve jig 140. The expansion sleeve jig 140 includes a clamping portion 150 and a turning portion 160, one end of the clamping portion 150 is recessed to form a clamping space 170, the side wall of the clamping space 170 is fixed to the side wall of the covering unit 70, and the turning portion 160 is provided at the other end of the clamping portion 150; The rotor device of the improved cover further includes a trigger member 180. The trigger member 180 includes a gripping portion 190 and a triggering portion 200. One end of the gripping portion 190 is connected to one end of the triggering portion 200. The other end is recessed to form a pulling space. The pulling space is sleeved on the swinging portion 160, and the shape of the pulling space at the end view corresponds to the shape of the turning portion 160 at the end view. The external force of the portion 190 is driven by the pulling portion 200 to rotate the expansion sleeve jig 140. The expansion sleeve jig 140 is used to rotate the cover unit 70 of the cover 50 by the clamping portion 150.

For example, the user can correspond the clamping space 170 of the expansion sleeve jig 140 to the covering unit 70 of the cover 50, and hold the outer wall of the covering unit 70 by the sidewall of the clamping portion 150, and then can pull the trigger The pulling part 200 of 180 is sleeved on the turning part 160 of the expansion sleeve jig 140, wherein the pulling part 180 and the end of the turning part 160 have corresponding shapes, and finally the user can change the turning part 180 The holding part 190 exerts force, and the force application method is to rotate the shaft axially about the rotating part 160, so that the expansion sleeve jig 140 can be driven to rotate by the trigger 180, and the expansion sleeve jig 140 series drives the cover 50 to rotate; so use The person can effectively assemble or disassemble the cover 50 to the rotating shaft 20 by the expansion sleeve jig 140 and the pulling member 180; the above is only an example and is not limited thereto.

The rotor device of the present invention having an improved cover is compared with the conventionally known rotor device for turbomolecular vacuum pump 10. The rotor device of the present invention has a cover 50 to cover the locking space 40 to avoid the turbomolecular vacuum pump 10 During the operation, the dust particles floating into the locking space 40 float out of the locking space 40 again due to the disturbance of the air flow, thereby causing contamination to the wafer or electronic substrate being processed.

The cover 50 of the present invention is a combined structure, which includes a covering unit 70 and a connecting unit 60. The user can screw the covering unit 70 and the rotating shaft 20 through the two ends of the connecting unit 60, so the cover 50 can be effectively made The covering lock space 40 is simultaneously connected to the rotating shaft 20; wherein, the outer surface of the side wall and one end of the covering unit 70 are smooth curves, so it can help guide the air flow during the rotation of the rotating shaft 20 to stabilize it, and Avoid depositing dust particles on the cover 50.

The cover unit 70 of the cover 50 of the present invention can be held by the clamping part 150 of the expansion sleeve jig 140, and the turning part 160 of the expansion sleeve jig 140 can be combined with the trigger 180 to further Applying force to the trigger 180 assembles or disassembles the cover 50 on the rotating shaft 20, so there is no need to design a concave or protruding structure on the cover unit 70 of the cover 50 to increase the possibility of dust particles remaining therein.

The above is only exemplary, and not restrictive. Any modifications or changes made without departing from the spirit and scope of the present invention shall be included in the scope of the attached patent application.

10: Turbo molecular vacuum pump

20: Rotating axis

30: rotor body

40: lock space

50: lid

60: Link unit

70: Covering unit

130: fixed element

Claims (9)

A rotor device with an improved cover is suitable for being installed in a turbo molecular vacuum pump, which comprises: a rotating shaft, one end of which is arranged on the turbo molecular vacuum pump; and a rotor body connected to the rotating shaft and the rotor One end of the body relative to the rotating shaft is recessed to form a locking space; and a cover includes: a connecting unit whose one end is connected to the other end of the rotating shaft; and a covering unit whose one end is connected to the link The other end of the unit, and bearing the end of the rotor body relative to the rotating shaft, and covering the opening of the locking space, and the side wall of the covering unit and the surface of the other end are smooth curved surfaces; wherein the covering unit The end is recessed to form a first blind hole, the side wall of the first blind hole includes a first internal thread, and the outer surface of the other end of the connecting unit includes a first external thread, the first external The screw thread is screwed with the first internal screw thread, and the covering unit is fixed to the connecting unit. The rotor device with an improved cover as described in item 1 of the patent application scope, wherein the end of the cover unit extends in a direction corresponding to the connecting unit to form an annular rib, and the annular rib is attached to the lock Attach the side wall of the space. The rotor device with an improved cover as described in item 2 of the patent application scope, wherein the covering unit includes a bearing portion, the bearing portion is located at the end of the covering unit, and is located at the side wall of the covering unit and Between the annular ribs, the bearing portion bears against the end of the rotor body relative to the rotating shaft. A rotor device with an improved cover as described in item 1 of the patent application scope, which The other end of the rotating shaft is recessed to form a second blind hole, the side wall of the second blind hole includes a second internal thread, and the outer surface of the end of the connecting unit includes a second external thread, The second external thread and the second internal thread are screwed to each other, and the connecting unit is fixed to the rotating shaft. The rotor device with an improved cover as described in item 1 of the patent application scope, wherein the other end of the cover unit is conical, and the center of the other end of the cover unit extends convexly relative to the connecting unit Up. The rotor device with an improved cover as described in item 1 of the patent scope further includes a plurality of fixing elements, the plurality of fixing elements combining the rotor body and the rotating shaft, and one end of the plurality of fixing elements is located In the locking space, the other ends of the plurality of fixing elements are located in the rotation axis, and the plurality of fixing elements are arranged adjacent to the rotation axis in a ring-shaped array. The rotor device with an improved cover as described in item 1 of the patent application scope, wherein the connecting unit is a stainless steel connecting unit, and the covering unit is an aluminum alloy covering unit. The rotor device with an improved cover as described in item 1 of the patent application scope further includes an expansion sleeve jig, the expansion sleeve jig includes a clamping part and a turning part, the clamping part One end is recessed to form a clamping space, the side wall of the clamping space is fixed to the side wall of the covering unit, the turning part is provided at the other end of the clamping part, the turning part receives an external force to borrow The lid drives the lid to rotate. The rotor device with an improved cover as described in item 8 of the patent application scope further includes a triggering member including a gripping portion and a triggering portion, one end of the gripping portion is connected One end of the pulling part, the other end of the pulling part is A recessed space forms a triggering space, and the triggering space is sleeved on the pivoting portion, and the shape of the triggering space at the end view corresponds to the shape of the pivoting portion at the end view, the grip The holding part receives the external force through the pulling part to drive the expansion sleeve jig to rotate.

Images