TW202027871A - Batch substrate drying equipment and substrate drying air blade device thereof - Google Patents

Abstract

A batch substrate drying equipment includes a tank, a substrate cassette, and a substrate drying air blade device. The substrate cassette is disposed in the tank and is used to carry a plurality of substrates. The substrate drying air blade device is disposed in the chamber and located above the substrate cassette, and includes a plurality of air blade units. Each of the air blade units has a curved air chamber with a curved outlet to output a curved air blade to at least a corresponding substrate. The substrate drying air blade device can blow multiple, three-dimensional air blades to uniformly and quickly dry the substrate.

Description

Batch substrate drying equipment and substrate drying air knife device

The present invention relates to a substrate drying equipment, in particular to a batch substrate drying equipment and a substrate drying air knife device, which can blow out three-dimensional sheet-shaped multiple air knives to uniformly and quickly dry the substrate.

Please refer to FIG. 1, in the prior art batch substrate drying process, the substrate 91 and the wafer boat 92 are first placed in a tank 90, and the substrate 91 and the wafer boat 92 are soaked with high-temperature deionized water in the tank 90, and then The substrate 91 and the wafer boat 92 are slowly pulled upward from the high-temperature deionized water by a lifting mechanism (not shown in the figure), and the substrate 91 and the wafer boat 92 are allowed to stand for a period of time after leaving the liquid surface of the high-temperature deionized water. Most of the water drops downward and evaporates at a high temperature. Finally, the air blowing device 93 installed on the left and right side walls of the tank 90 blows hot nitrogen gas diagonally to dry and remove the residual water on the substrate 91. The blowing device 93 is a hot gas pipe arranged on the side of the tank body 90, and a plurality of blowing sub-pipes 931 facing the substrate 91 are formed on the hot gas pipe to spray hot nitrogen gas toward the substrate 91.

However, since the hot nitrogen gas ejected from the gas jet sub-tube 931 of the hot gas pipe is blown toward the substrate 91 in the form of a linear hot air beam, the linear hot air beam is too concentrated and approaches a one-dimensional form instead of a three-dimensional force form. Therefore, the contact area of the linear hot air beam applied to the substrate 91 is small and concentrated, and it is difficult to blow most of the surface of the substrate 91 comprehensively, which makes it difficult for the blowing device 93 to blow the substrate 91 comprehensively and uniformly. dry. In addition, the blowing on both sides of the tank 90 The diagonally crossing air beams blown by the air device 93 interfere with each other, causing the diagonally crossing air beams to disperse before reaching the substrate 91 and cannot effectively blow the substrate 91. Therefore, the above-mentioned batch substrate drying process often occurs The blown hot nitrogen gas cannot quickly dry the substrate, and the drying is uneven or incomplete.

In view of the fact that the hot air generated by the blowing device used in the prior art batch substrate drying process is a linear beam rather than a three-dimensional shape, the blown hot nitrogen gas cannot dry the substrate quickly, unevenly or incompletely. In order to improve its shortcomings and shortcomings, a batch substrate drying equipment and its substrate drying air knife device were created.

The main purpose of the present invention is to provide a batch substrate drying equipment, which can blow out three-dimensional sheet-like air knives to dry the substrates uniformly and quickly.

In order to achieve the above objective, the batch substrate drying equipment of the present invention includes: a tank in which a chamber is formed; a wafer boat, which is detachably arranged in the chamber and used to carry multiple substrates; and a substrate The drying air knife device is arranged in the chamber above the wafer boat, and includes a plurality of air knife units arranged side by side with each other, each of the air knife units has an arc-shaped air chamber, and the arc The air chamber has an arc-shaped air outlet, wherein the arc-shaped air chamber is used to generate a three-dimensional arc-shaped air knife and blow the three-dimensional arc-shaped air knife to at least one of the plurality of substrates; and a main air supply pipe , Connect the multiple air knife units, and used to connect an external A gas source to supply gas to the arc-shaped gas chambers.

In an embodiment of the present invention, the plurality of air knife units are arranged side by side in a detachable manner; each of the air knife units has an arc-shaped sheet body and an arc-shaped spacer block, and the arc-shaped spacer block is protrudingly formed on the arc The front side of the shaped piece is located on the upper edge of the curved piece, and the curved air chamber is formed on the front of the curved piece, located below the curved spacer and at the lower edge of the curved piece Each of the arc-shaped air chambers is used to generate a downward three-dimensional arc-shaped air knife; the main air supply pipe is connected to the plurality of arc-shaped air chambers through the plurality of arc-shaped spacer blocks.

In an embodiment of the present invention, each of the arc-shaped spacers is formed with a communication hole through which the communication hole communicates with the arc-shaped air chamber; a main air supply hole is formed in the main air supply pipe, and the main air supply pipe A plurality of air supply branch pipes communicating with the main air supply hole are formed along the radial direction. The air supply branch pipes are respectively detachably arranged in the plurality of communication holes and are used for the plurality of arc-shaped air chambers. Gas supply.

In an embodiment of the present invention, each of the air knife units is formed to extend along a circular arc path.

In an embodiment of the present invention, each of the air knife units is formed to extend along a non-circular arc path.

In an embodiment of the present invention, the arc-shaped air chamber of each air knife unit is the arc-shaped sheet body of the air knife unit, the arc-shaped spacer, and the other adjacent air knife unit. The arc-shaped sheet serves as a rear side wall, an upper side wall and a front side wall to define the arc-shaped air chamber and the arc-shaped air outlet of the arc-shaped air chamber.

In an embodiment of the present invention, the blowing directions of the arc-shaped air knives of the air knife units are parallel to each other and not interlaced with each other.

In an embodiment of the present invention, a plurality of substrate placement grooves side by side are formed in the wafer boat for placing the plurality of substrates; the plurality of arc-shaped air chambers of the plurality of air knife units correspond to the plurality of substrates Place the slot.

In an embodiment of the present invention, a shaft seat is provided at the bottom of the chamber; a shaft is provided on the bottom side of the wafer boat, and the shaft is detachably arranged on the shaft seat so that the wafer boat can be opposed to the shaft seat Vertical pivoting; the chamber is provided with a tilting device, the tilting device is arranged opposite to the shaft seat and located on the other side of the bottom of the wafer boat, connects the wafer boat, and selectively lifts the other bottom of the wafer boat Side, so that the wafer boat pivots relative to the shaft seat and tilts relative to the substrate drying air knife device.

In an embodiment of the present invention, the tilting device includes a pneumatic/hydraulic cylinder, a telescopic rod, and a wedge block. The pneumatic/hydraulic cylinder is arranged outside the tank, and the telescopic rod is telescopically arranged on the pneumatic/hydraulic cylinder. The hydraulic cylinder penetrates the trough and extends into the chamber. The wedge block is arranged at the end of the telescopic rod, is located in the chamber, and contacts the other side of the bottom of the wafer boat with an inclined surface.

Another object of the present invention is to provide a substrate drying air knife device, comprising: a plurality of air knife units arranged side by side with each other, each of the air knife units has an arc-shaped air chamber, and the arc-shaped air chamber has An arc-shaped air outlet, wherein the arc-shaped air chamber is used to generate a three-dimensional arc-shaped air knife and blow the three-dimensional arc-shaped air knife to at least one of the plurality of substrates; and a main air supply pipe connecting the plurality of An air knife unit is used to connect an external air source to supply air to the arc-shaped air chambers.

In an embodiment of the present invention, the plurality of air knife units are mutually detachable Arranged side by side; each of the air knife units has an arc-shaped sheet body and an arc-shaped spacer block, the arc-shaped spacer block is protrudingly formed on the front surface of the arc-shaped sheet body, and is located on the upper edge of the arc-shaped sheet body. Air chambers are formed on the front of the arc-shaped sheet body, located below the arc-shaped spacer and at the lower edge of the arc-shaped sheet body, each of the arc-shaped air chambers is used to generate a downward three-dimensional arc-shaped air knife; The main air supply pipe communicates with the arc-shaped air chambers through the arc-shaped spacer blocks.

In an embodiment of the present invention, each of the arc-shaped spacers is formed with a communication hole through which the communication hole communicates with the arc-shaped air chamber; a main air supply hole is formed in the main air supply pipe, and the main air supply pipe A plurality of air supply branch pipes communicating with the main air supply hole are formed along the radial direction. The air supply branch pipes are respectively detachably arranged in the plurality of communication holes and are used for the plurality of arc-shaped air chambers. Gas supply.

In an embodiment of the present invention, each of the air knife units is formed to extend along a circular arc path.

In an embodiment of the present invention, each of the air knife units is formed to extend along a non-circular arc path.

In an embodiment of the present invention, the arc-shaped air chamber of each air knife unit is the arc-shaped sheet body of the air knife unit, the arc-shaped spacer, and the other adjacent air knife unit. The arc-shaped sheet serves as a rear side wall, an upper side wall and a front side wall to define the arc-shaped air chamber and the arc-shaped air outlet of the arc-shaped air chamber.

In an embodiment of the present invention, the blowing directions of the arc-shaped air knives of the air knife units are parallel to each other and not interlaced with each other.

Compared with the prior art, the batch substrate drying equipment and the substrate drying air knife device of the present invention have the following advantages:

1. After the substrate drying air knife device of the present invention is connected to an external air source containing hot nitrogen, multiple air knife units can blow down the multiple substrates on the wafer boat and send out a thick three-dimensional arc air knife through the air knife The hot nitrogen gas inside can uniformly and quickly dry all parts of the surface of each substrate, avoiding the problem that the linear hot air beam in the prior art is too concentrated and causing uneven drying conditions throughout the substrate, thereby, the present invention can improve the batch of substrates The efficiency of drying and avoids the problem of poor partial drying of the substrate.

2. The multiple air knife units of the substrate drying air knife device of the present invention are arranged side by side, so the blowing directions of the arc-shaped air knives of the multiple air knife units are parallel to each other and not interlaced with each other, avoiding arc-shaped air knives The interleaving and interference with each other offsets the wind pressure of the arc-shaped wind knife, so the wind knife can blow the substrate stably and strongly.

3. The multiple arc-shaped air chambers of the multiple air knife units correspond to multiple substrate placement grooves, so it can be ensured that each substrate piece can be blown by at least one arc-shaped air knife for drying.

10‧‧‧Slot body

100‧‧‧Containing Room

18‧‧‧Axle seat

20‧‧‧Crystal Boat

200‧‧‧Substrate placement slot

28‧‧‧Shaft

30‧‧‧Substrate drying air knife device

31‧‧‧Air Knife Unit

310‧‧‧Curved air chamber

31‧‧‧Air Knife Unit

311‧‧‧Curved sheet body

313‧‧‧Arc shaped spacer

317‧‧‧Upper edge

314‧‧‧Bottom edge

315‧‧‧Connecting hole

316‧‧‧Curved air outlet

35‧‧‧Main air supply pipe

350‧‧‧Main air supply hole

351‧‧‧Air supply branch

36‧‧‧Connecting pipe

40‧‧‧Tilt device

41‧‧‧Pneumatic/Hydraulic Cylinder

42‧‧‧Telescopic pole

43‧‧‧Wedge block

50‧‧‧Substrate

90‧‧‧Slot body

91‧‧‧Substrate

92‧‧‧Crystal Boat

93‧‧‧Blowing device

931‧‧‧Air jet tube

Fig. 1 is a perspective view of a prior art batch substrate drying equipment.

Figure 2 is a partial cross-sectional view of the front of the batch substrate drying equipment of the present invention.

3 is a partial cross-sectional view of the side surface of the batch substrate drying equipment of the present invention.

4 is a side cross-sectional view of the substrate drying air knife device of the batch substrate drying equipment of the present invention.

Fig. 5 is a schematic diagram of the partial cross-sectional side view of the batch substrate drying equipment of the present invention.

2 and 3, the batch substrate drying equipment of the present invention includes: a tank 10. A wafer boat 20 and a substrate drying air knife device 30.

A chamber 100 is formed in the tank body 10.

The wafer boat 20 is detachably disposed in the chamber 100 and used to carry multiple substrates 50. In an embodiment of the present invention, a plurality of substrate placing grooves 200 side by side are formed in the wafer boat 20 to accommodate and position the substrate 50 respectively.

The substrate drying air knife device 30 is disposed in the chamber 100 above the wafer boat 20 and includes a plurality of air knife units 31 and a main air supply pipe 35.

4, the plurality of air knife units 31 are detachably arranged side by side with each other. There are many detachable configurations of the plurality of air knife units 31. For example, at least one air knife unit 31 may be formed on the back of each air knife unit 31. A coupling groove, and at least one coupling block matching the shape of the coupling groove is formed on the front face of the coupling groove. The coupling groove and the coupling block between the two adjacent air knife units 31 are inserted and combined with each other, so that the multiple Air knife unit 31.

Each air knife unit 31 has an arc-shaped sheet body 311, an arc-shaped spacer 313, and an arc-shaped air chamber 310. The arc-shaped spacer 313 is protrudingly formed on the front surface of the arc-shaped sheet body 311 and is located at the upper edge 317 of the arc-shaped sheet body 311. A communicating hole 315 is formed through the arc-shaped spacer 313, and the communicating hole 315 is communicated with the arc-shaped air chamber 310. The arc-shaped air chamber 310 is formed on the front of the arc-shaped sheet body 311, is located below the arc-shaped spacer, and is located at the lower edge 314 of the arc-shaped sheet body 311, and the arc-shaped air chamber 310 has an arc shape The air outlet 316 is located below the arc-shaped air chamber 310, where the arc-shaped air chamber 310 is used to generate a downward three-dimensional arc-shaped air knife and blow the three-dimensional arc-shaped air knife to at least one of the plurality of substrates 50 One up.

In an embodiment of the present invention, each of the air knife units 31 is formed to extend along a circular arc path (the arc segment of the circular line). In another embodiment of the present invention, each of the air knife Element 31 extends along a non-circular arc path (the path is still an arc, but the arc is not an arc segment of a circular line, and the path can be a parabolic arc segment) form.

In an embodiment of the present invention, the arc-shaped air chamber 310 of each air knife unit 31 is composed of the arc-shaped sheet body 311, the arc-shaped spacer 313, and another adjacent air-knife unit 31. The arc-shaped sheet body 311 of the knife unit 31 serves as a rear side wall, an upper side wall, and a front side wall to define the arc-shaped air chamber 310 and the arc-shaped air outlet 316 of the arc-shaped air chamber 310, respectively. In an embodiment of the present invention, the arc-shaped air chambers 310 of the air knife units 31 correspond to the substrate placing grooves 200. In an embodiment of the present invention, the blowing directions of the arc-shaped air knives of the air knife units 31 are parallel to each other and not interlaced with each other.

The main air supply pipe 35 is connected to the plurality of air knife units 31, and is connected to the plurality of arc-shaped air chambers 310 through the plurality of arc-shaped partition blocks 313, and is used to connect an external air source to the plurality of arc-shaped air chambers 310. Gas supply. In an embodiment of the present invention, a main air supply hole 350 is formed in the main air supply pipe 35, and a plurality of air supply branch pipes 351 communicating with the main air supply hole 350 are formed on the main air supply pipe 35 in a radial direction. A plurality of air supply branch pipes 351 are respectively detachably arranged in the plurality of communication holes 315 and used to supply air to the plurality of arc-shaped air chambers 310. In addition, the main gas supply pipe 35 is connected to an external hot nitrogen gas source through a connecting pipe 36, so as to obtain hot nitrogen gas from the gas source, and blow the hot nitrogen gas to the substrate 50 in the form of an arc-shaped air knife through the air knife unit 31 To dry the substrate.

Please refer to FIG. 5. In an embodiment of the present invention, a shaft seat 18 is provided at the bottom of the chamber 100. A rotating shaft 28 is arranged on the bottom side of the wafer boat 20, and the rotating shaft 28 is detachably arranged on the axle seat 18 so that the wafer boat 20 can pivot vertically relative to the axle seat 18; A tilting device 40, which is arranged opposite to the shaft base 18 and is located on the other side of the bottom of the wafer boat 20, is connected to the wafer boat 20, and selectively lifts the other side of the bottom of the wafer boat 20, In order to make the wafer boat 20 pivot relative to the shaft base 18 and tilt relative to the substrate drying air knife device 30. By tilting the wafer boat 20 and the substrate 50 thereon with respect to the substrate drying air knife device 30, the problem that the substrate 50 cannot be dried due to sticky sheets in the wafer boat 20 can be avoided.

In an embodiment of the present invention, the tilting device 40 includes a pneumatic/hydraulic cylinder 41, a telescopic rod 42 and a wedge block 43. The pneumatic/hydraulic cylinder 41 is arranged outside the tank 10, and the telescopic rod 42 is The telescopic method is arranged on the air/hydraulic cylinder 41, penetrates the tank body 10 and extends into the chamber 100. The wedge block 43 is arranged at the end of the telescopic rod 42 and is located in the chamber 100 with an inclined surface Touch the other side of the bottom of the wafer boat 20. The above-mentioned tilting device 40 is only an exemplary embodiment, and other known tilting device 40 structures can be substituted.

Compared with the prior art, the batch substrate drying equipment and the substrate drying air knife device 30 of the present invention have the following advantages:

1. After the substrate drying air knife device 30 of the present invention is externally connected to an air source containing hot nitrogen, a plurality of air knife units 31 can blow down the multiple substrates 50 on the wafer boat 20 and send out a three-dimensional arc-shaped air knife with a thickness. , The hot nitrogen gas in the air knife can uniformly and quickly dry all parts of the surface of each substrate 50, avoiding the problem that the linear hot air beam in the prior art is too concentrated and causing uneven drying conditions throughout the substrate 50. The invention can improve the efficiency of batch substrate drying and avoid the problem of poor partial drying of the substrate.

2. The multiple air knife units 31 of the substrate drying air knife device 30 of the present invention are arranged side by side, so the blowing directions of the arc-shaped air knives of the multiple air knife units 31 are parallel to each other and not interlaced with each other to avoid arcing The interlacing and interference between the air knives offset the wind pressure of the arc air knives, so that the air knives can blow the substrate 50 stably and strongly.

3. The multiple arc-shaped air chambers 310 of the multiple air knife units 31 correspond to multiple bases The board placement groove 200 can therefore ensure that each board 50 can be blown by at least one arc-shaped air knife for drying.

31‧‧‧Air Knife Unit

310‧‧‧Curved air chamber

31‧‧‧Air Knife Unit

311‧‧‧Curved sheet body

313‧‧‧Arc shaped spacer

314‧‧‧Bottom edge

315‧‧‧Connecting hole

317‧‧‧Upper edge

Claims (17)

A batch substrate drying equipment includes: a tank in which a chamber is formed; a wafer boat, which is detachably arranged in the chamber and used to carry multiple substrates; and a substrate drying air knife device, It is arranged in the chamber, above the wafer boat, and includes: a plurality of air knife units arranged side by side with each other, each of the air knife units has an arc-shaped air chamber, and the arc-shaped air chamber has a An arc-shaped air outlet, wherein the arc-shaped air chamber is used to generate a three-dimensional arc-shaped air knife and blow the three-dimensional arc-shaped air knife to at least one of the plurality of substrates; and a main air supply pipe connecting the plurality of The air knife unit is used to connect an external air source to supply air to the arc-shaped air chambers. The batch substrate drying equipment according to claim 1, wherein the plurality of air knife units are arranged side by side with each other in a detachable manner; each of the air knife units has an arc-shaped sheet body and an arc-shaped spacer block, the arc-shaped spacer The block is protrudingly formed on the front of the arc-shaped sheet body, located at the upper edge of the arc-shaped sheet body, and the arc-shaped air chamber is formed on the front surface of the arc-shaped sheet body, located below the arc-shaped spacer block, and located at the arc Each of the arc-shaped air chambers is used to generate downward three-dimensional arc-shaped air knives on the lower edge of the shaped sheet body; the main air supply pipe is connected to the arc-shaped air chambers through the arc-shaped spacer blocks. The batch substrate drying equipment according to claim 2, wherein each of the arc-shaped spacers is formed with a communication hole through it, and the communication hole is in communication with the arc-shaped air chamber; a main air supply hole is formed in the main air supply pipe A plurality of air supply branch pipes communicating with the main air supply hole are formed along the radial direction on the main air supply pipe, and the plurality of air supply branch pipes are respectively detachably arranged in the plurality of communication holes and are used for Multiple arc-shaped air chambers supply air. The batch substrate drying equipment according to any one of claims 1 to 3, wherein each of the air knife units It is formed along an arc-shaped path. The batch substrate drying equipment according to any one of claims 1 to 3, wherein each of the air knife units is formed to extend along a non-circular arc path. The batch substrate drying equipment according to claim 2, wherein the arc-shaped air chamber of each air knife unit is the arc-shaped sheet body of the air knife unit, the arc-shaped spacer block, and another adjacent The arc-shaped sheet body of the air knife unit serves as a rear side wall, an upper side wall, and a front side wall to define the arc-shaped air chamber and the arc-shaped air outlet of the arc-shaped air chamber. The batch substrate drying equipment according to claim 1, wherein the blowing directions of the arc-shaped air knives of the air knife units are parallel to each other and not interlaced with each other. The batch substrate drying equipment according to claim 1, wherein a plurality of substrate placement grooves arranged side by side are formed in the wafer boat for placing the plurality of substrates; the plurality of arc-shaped air blades of the plurality of air knife units The chamber corresponds to multiple substrate placement grooves. The batch substrate drying equipment according to claim 1, wherein a shaft seat is arranged at the bottom of the chamber; a rotating shaft is arranged on the bottom side of the wafer boat, and the rotating shaft is detachably arranged on the shaft seat to make the crystal The boat can pivot vertically relative to the shaft base; the chamber is provided with a tilting device, which is arranged opposite to the shaft base and is located on the other side of the bottom of the wafer boat, connects the wafer boat, and selectively lifts the wafer The other side of the bottom of the boat is such that the wafer boat pivots relative to the shaft seat and tilts relative to the substrate drying air knife device. The batch substrate drying equipment according to claim 9, wherein the tilting device includes a pneumatic/hydraulic cylinder, a telescopic rod and a wedge block, the pneumatic/hydraulic cylinder is arranged outside the tank, and the telescopic rod is telescopic It is arranged on the air/hydraulic cylinder, penetrates the trough and extends into the chamber, the wedge block is arranged at the end of the telescopic rod, is located in the chamber, and contacts the bottom of the wafer boat with an inclined surface The other side. A substrate drying air knife device includes a plurality of air knife units arranged side by side with each other, each of the air knife units has an arc-shaped air chamber, and the arc-shaped air chamber has an arc-shaped air outlet, wherein The arc-shaped air chamber is used to generate a three-dimensional arc-shaped air knife and blow the three-dimensional arc-shaped air knife to at least one of the plurality of substrates; and a main air supply pipe connected to the plurality of air knife units and used for An external air source is connected to supply air to the arc-shaped air chambers. The substrate drying air knife device according to claim 11, wherein the plurality of air knife units are detachably arranged side by side with each other; each of the air knife units has an arc-shaped sheet body and an arc-shaped spacer block, the arc-shaped spacer The block is protrudingly formed on the front of the arc-shaped sheet body, located at the upper edge of the arc-shaped sheet body, and the arc-shaped air chamber is formed on the front surface of the arc-shaped sheet body, located below the arc-shaped spacer block, and located at the arc Each of the arc-shaped air chambers is used to generate downward three-dimensional arc-shaped air knives on the lower edge of the shaped sheet body; the main air supply pipe is connected to the arc-shaped air chambers through the arc-shaped spacer blocks. The substrate drying air knife device according to claim 12, wherein each of the arc-shaped spacers is formed with a communication hole through which the communication hole communicates with the arc-shaped air chamber; and a main air supply hole is formed in the main air supply pipe A plurality of air supply branch pipes communicating with the main air supply hole are formed along the radial direction on the main air supply pipe, and the plurality of air supply branch pipes are respectively detachably arranged in the plurality of communication holes and are used for Multiple arc-shaped air chambers supply air. The substrate drying air knife device according to any one of claims 11 to 13, wherein each of the air knife units is formed to extend along an arc-shaped path. The substrate drying air knife device according to any one of claims 11 to 13, wherein each of the air knife units is formed by extending along a non-circular arc path. The substrate drying air knife device according to claim 12, wherein the arc-shaped air chamber of each air knife unit is formed by the arc-shaped sheet body, the arc-shaped spacer, and another adjacent one of the air knife unit The arc-shaped sheet body of the air knife unit serves as a rear side wall, an upper side wall, and a front side wall to define the arc-shaped air chamber and the arc-shaped air outlet of the arc-shaped air chamber. The substrate drying air knife device according to any one of claims 11 to 13, wherein the blowing directions of the arc-shaped air knives of the air knife units are parallel to each other and not interlaced with each other.

Images