TWM579563U - Batch substrate drying equipment and substrate drying air blade device thereof - Google Patents

Abstract

A batch substrate drying equipment includes a tank, a substrate cassette, and a substrate drying air blade device. The substrate cassette is disposed in the tank and is used to carry a plurality of substrates. The substrate drying air blade device is disposed in the chamber and located above the substrate cassette, and includes a plurality of air blade units. Each of the air blade units has a curved air chamber with a curved outlet to output a curved air blade to at least a corresponding substrate. The substrate drying air blade device can blow multiple, three-dimensional air blades to uniformly and quickly dry the substrate.

Description

Batch substrate drying device and substrate drying air knife device

The invention relates to a substrate drying device, in particular to a batch substrate drying device and a substrate drying air knife device thereof, which can blow out a multi-channel air knife in a three-dimensional shape to uniformly and quickly dry the substrate.

Referring to FIG. 1 , in the prior art batch substrate drying process, the substrate 91 and the wafer boat 92 are first disposed in a tank 90, and the substrate 91 and the wafer boat 92 are immersed by the high temperature deionized water in the tank 90, and then The substrate 91 and the boat 92 are slowly pulled up from the high-temperature deionized water by a lifting mechanism (not shown), and the substrate 91 and the boat 92 are separated from the liquid surface of the high-temperature deionized water, and then left for a period of time. Most of the water is dropped downward and evaporated by high temperature, and finally, the nitrogen gas is blown off obliquely by the air blowing means 93 provided on the left and right side walls in the tank 90, and the residual water on the substrate 91 is removed. The air blowing device 93 is a hot air pipe provided on the side of the tank body 90, and a plurality of air jet sub-tubes 931 facing the substrate 91 are formed on the hot air pipe to discharge hot nitrogen gas toward the substrate 91.

However, since the hot nitrogen gas ejected from the jet pipe 931 of the hot air pipe is blown toward the substrate 91 in the form of a linear hot gas beam, the linear hot gas beam is too concentrated to approach the one-dimensional type, rather than the three-dimensional force type. The state is such that the contact area of the linear hot gas beam applied to the substrate 91 is small and concentrated, and it is difficult to comprehensively blow most of the surface of the substrate 91, resulting in the blower 93 being difficult to be comprehensive. The entire substrate 91 is uniformly blow dried. In addition, the obliquely intersecting gas beams blown by the air blowing devices 93 on both sides of the tank body 90 interfere with each other, and the gas beams that intersect obliquely intersect each other before reaching the substrate 91, and the substrate 91 cannot be effectively blown. Therefore, in the above batch substrate drying process, the hot nitrogen gas which is blown out often does not cause problems such as rapid drying of the substrate, uneven drying, or incomplete drying.

The present inventors have in view of the fact that the hot air generated by the air blowing device used in the batch substrate drying process of the prior art is a linear beam rather than a three-dimensional shape, so that the hot nitrogen gas cannot be quickly dried, unevenly dried or dried. Completely waiting for the problem, in order to improve its deficiency and lack, and then create a batch substrate drying equipment and its substrate drying air knife device.

The main object of the present invention is to provide a batch substrate drying apparatus capable of blowing a three-dimensional sheet-shaped multi-channel air knife to uniformly and quickly dry the substrate.

In order to achieve the above object, the batch substrate drying apparatus comprises: a tank body forming a chamber therein; a wafer boat detachably disposed in the chamber and configured to carry a plurality of substrates; and a substrate a dry air knife device, disposed in the chamber, above the boat, and comprising: a plurality of air knife units, the plurality of air knife units are arranged side by side, each of the air knife units having a curved air chamber, the arc The shaped air chamber has an arcuate air outlet for generating a three-dimensional curved air knife and blowing the three-dimensional curved air knife to at least one of the plurality of substrates; A main air supply pipe connecting the plurality of air knife units and for connecting an external air source to supply air to the plurality of arcuate air chambers.

In an embodiment of the present invention, the plurality of air knife units are detachably arranged side by side; each of the air knife units has a curved piece body and an arc-shaped spacer block, and the arc-shaped spacer block is protruded from the arc. a front surface of the shaped body, located at an upper edge of the curved body, the curved air chamber is formed on a front surface of the curved body, below the curved spacer, and located at a lower edge of the curved body Each of the arcuate plenums is configured to generate a downwardly curved arc-shaped air knife; the main air supply tube communicates the plurality of arcuate plenums through the plurality of arcuate spacers.

In an embodiment of the present invention, a through hole is formed in each of the arc-shaped spacer blocks, and the communication hole is in communication with the arc-shaped air chamber; a main air supply hole is formed in the main air supply pipe, and the main air supply pipe is formed in the main air supply pipe a plurality of gas supply branch pipes communicating with the main air supply hole are formed in the upper radial direction, and the plurality of gas supply branch pipes are respectively detachably disposed in the plurality of communication holes, and are used for the plurality of arcuate gas cells Gas supply.

In an embodiment of the present invention, each of the air knife units is formed to extend along a circular arc path.

In an embodiment of the present invention, each of the air knife units is formed to extend along a non-circular arc path.

In an embodiment of the present invention, the arcuate plenum of each of the air knife units is the arcuate piece of the air knife unit, the arcuate spacer block, and the other adjacent air knife unit. The curved sheets define the curved air chamber and the curved air outlet of the curved air chamber as the rear side wall, the upper side wall and the front side wall, respectively.

In an embodiment of the present invention, a plurality of the curved air knives of the plurality of air knife units The blowing directions are parallel to each other and are not interlaced.

In an embodiment of the present invention, a plurality of substrate placement slots are arranged in the wafer boat for placing the plurality of substrates; the plurality of curved air chambers of the plurality of air knife units correspond to the plurality of substrates Place the slot.

In an embodiment of the present invention, a shaft seat is disposed at a bottom of the chamber; a bottom shaft is disposed on a bottom side of the boat, and the shaft is detachably disposed on the shaft seat such that the boat can be opposite to the shaft seat Vertically pivoting; the chamber is provided with a tilting device disposed opposite the axle seat and located on the other side of the bottom of the boat, connecting the boat, and selectively lifting the other of the bottom of the boat The side is such that the boat pivots relative to the axle seat and is tilted relative to the substrate drying air knife device.

In an embodiment of the present invention, the tilting device includes a pneumatic/hydraulic cylinder, a telescopic rod, and a wedge block. The air pressure/hydraulic cylinder is disposed outside the tank body, and the telescopic rod is disposed at the air pressure in a telescopic manner. The hydraulic cylinder extends through the tank and extends into the chamber. The wedge block is disposed at the end of the telescopic rod and is located in the chamber, and contacts the other side of the bottom of the boat with a slope.

Another object of the present invention is to provide a substrate drying air knife device, comprising: a plurality of air knife units, the plurality of air knife units being arranged side by side, each of the air knife units having a curved air chamber, the curved air chamber having An arc-shaped air outlet, wherein the arc-shaped air chamber is configured to generate a three-dimensional curved air knife and blow the three-dimensional curved air knife to at least one of the plurality of substrates; and a main air supply tube connecting the plurality a wind knife unit and for connecting an external air source to supply air to the plurality of arc chambers.

In an embodiment of the present invention, the plurality of air knife units are detachably coupled to each other Each of the air knife units has a curved piece body and an arc-shaped spacer block protrudingly formed on a front surface of the curved piece body at an upper edge of the curved piece body, the arc shape a gas chamber is formed on a front surface of the curved sheet body, below the curved spacer block, and located at a lower edge of the curved sheet body, each of the curved air chambers for generating a downward three-dimensional curved air knife; The main air supply pipe communicates the plurality of arcuate air chambers through the plurality of arcuate spacer blocks.

In an embodiment of the present invention, a through hole is formed in each of the arc-shaped spacer blocks, and the communication hole is in communication with the arc-shaped air chamber; a main air supply hole is formed in the main air supply pipe, and the main air supply pipe is formed in the main air supply pipe a plurality of gas supply branch pipes communicating with the main air supply hole are formed in the upper radial direction, and the plurality of gas supply branch pipes are respectively detachably disposed in the plurality of communication holes, and are used for the plurality of arcuate gas cells Gas supply.

In an embodiment of the present invention, each of the air knife units is formed to extend along a circular arc path.

In an embodiment of the present invention, each of the air knife units is formed to extend along a non-circular arc path.

In an embodiment of the present invention, the arcuate plenum of each of the air knife units is the arcuate piece of the air knife unit, the arcuate spacer block, and the other adjacent air knife unit. The curved sheets define the curved air chamber and the curved air outlet of the curved air chamber as the rear side wall, the upper side wall and the front side wall, respectively.

In an embodiment of the present invention, the blowing directions of the plurality of arc-shaped air knives of the plurality of air knife units are parallel to each other and are not mutually staggered.

Compared with the prior art, the novel batch substrate drying device and the substrate drying air knife device have the following advantages:

1. The novel substrate drying air knife device is connected to a gas source containing hot nitrogen gas, and the plurality of air knife units can blow a plurality of curved air blades with a thickness to the plurality of substrates on the boat, and pass through the air knife. The hot nitrogen inside uniformly and rapidly drys the surface of each substrate to avoid the problem that the linear hot gas beam in the prior art is too concentrated and the drying condition of the substrate is uneven. Therefore, the novel can improve the batch substrate. The efficiency of drying and the problem of poor local drying of the substrate are avoided.

2. The plurality of air knife units of the dry air knife device of the present invention are arranged side by side, so that the blowing directions of the plurality of curved air blades of the plurality of air knife units are parallel and non-interlaced, avoiding the curved air knife The wind pressure of the curved air knife is offset by the mutual interlacing and interference, so that the air knife can blow the substrate stably and strongly.

3. The plurality of arcuate plenums of the plurality of air knife units correspond to a plurality of substrate placement slots, thereby ensuring that each of the substrate sheets can be dried by at least one curved air knife.

10‧‧‧

100‧‧ ‧ room

18‧‧‧ shaft seat

20‧‧‧The boat

200‧‧‧Substrate placement slot

28‧‧‧ shaft

30‧‧‧Substrate dry air knife device

31‧‧‧Air knife unit

310‧‧‧ arc chamber

31‧‧‧Air knife unit

311‧‧‧Shaped sheet

313‧‧‧Arc spacers

317‧‧‧Upper edge

314‧‧‧ lower edge

315‧‧‧Connected holes

316‧‧‧Arc outlet

35‧‧‧Main air supply pipe

350‧‧‧ main air supply hole

351‧‧‧ gas supply branch

36‧‧‧Connecting pipe

40‧‧‧ tilting device

41‧‧‧Pneumatic/hydraulic cylinder

42‧‧‧ Telescopic rod

43‧‧‧Wedge block

50‧‧‧Substrate

90‧‧‧

91‧‧‧Substrate

92‧‧‧ Boat

93‧‧‧Blowing device

931‧‧‧jet tube

1 is a perspective view of a prior art batch substrate drying apparatus.

2 is a front partial cross-sectional view of the batch substrate drying apparatus of the present invention.

3 is a side elevational cross-sectional view of the batch substrate drying apparatus of the present invention.

4 is a side cross-sectional view of the substrate drying air knife device of the batch substrate drying apparatus of the present invention.

FIG. 5 is a partial side cross-sectional view showing the operation of the batch substrate drying apparatus of the present invention.

Referring to FIG. 2 and FIG. 3, the batch substrate drying device of the present invention comprises: a tank body 10; A wafer boat 20 and a substrate drying air knife device 30.

A chamber 100 is formed in the tank 10.

The boat 20 is detachably disposed within the chamber 100 and is used to carry a plurality of substrates 50. In an embodiment of the present invention, a plurality of substrate placement slots 200 are formed in the boat 20 to accommodate and position the substrate 50, respectively.

The substrate drying air knife device 30 is disposed in the chamber 100 above the boat 20 and includes a plurality of air knife units 31 and a main air supply tube 35.

Referring to FIG. 4, the plurality of air knife units 31 are detachably arranged side by side, and the plurality of air knife units 31 are detachably arranged in various forms, for example, at least on the back surface of each air knife unit 31. Forming a groove, and forming at least one joint block matching the shape of the joint groove on the front surface thereof, and inserting and connecting the joint groove and the joint block between the adjacent two air knife units 31, the plurality of joint blocks can be quickly arranged side by side Air knife unit 31.

Each of the air knife units 31 has a curved body 311, an arcuate spacer 313, and an arcuate plenum 310. The arc-shaped spacer block 313 is protruded from the front surface of the curved sheet body 311 and is located at the upper edge 317 of the curved sheet body 311. A through hole 315 is formed in the arc-shaped spacer block 313, and the communication hole 315 is in communication with the arc-shaped plenum 310. The curved plenum 310 is formed on the front surface of the curved sheet body 311, below the curved spacer block, and located at the lower edge 314 of the curved sheet body 311, and the curved plenum 310 has an arc shape. The air outlet 316 is located below the curved air chamber 310, wherein the curved air chamber 310 is configured to generate a downward three-dimensional curved air knife and blow the three-dimensional curved air knife to at least one of the plurality of substrates 50. One.

In an embodiment of the present invention, each of the air knife units 31 is formed to extend along a circular arc path (an arc segment of a circular line). In another embodiment of the present invention, each of the air knife units 31 It is formed along a non-circular arc path (still the arc is still curved, but the arc is not a circular arc segment, and the arc may be a parabolic arc segment).

In an embodiment of the present invention, the curved plenum 310 of each of the air knife units 31 is the curved piece 311 of the wind single-blade unit, the curved spacer 313, and another adjacent wind. The curved body 311 of the knife unit 31 defines a curved air chamber 310 and a curved air outlet 316 of the curved air chamber 310 as a rear side wall, an upper side wall and a front side wall, respectively. In an embodiment of the present invention, the plurality of arcuate plenums 310 of the plurality of air knife units 31 correspond to a plurality of substrate placement slots 200. In an embodiment of the present invention, the blowing directions of the plurality of arcuate blades of the plurality of air knife units 31 are parallel to each other and are not mutually staggered.

The main air supply pipe 35 is connected to the plurality of air knife units 31, and the plurality of arcuate air chambers 310 are connected through the plurality of arc-shaped spacers 313 for connecting an external air source to the plurality of arcuate air chambers 310. Gas supply. In an embodiment of the present invention, a main air supply hole 350 is formed in the main air supply pipe 35, and a plurality of air supply branch pipes 351 communicating with the main air supply hole 350 are formed in the main air supply pipe 35. A plurality of gas supply branch pipes 351 are respectively disposed in the plurality of communication holes 315 in a detachable manner, and are used for supplying air to the plurality of arcuate gas cells 310. In addition, the main air supply pipe 35 is connected to an external hot nitrogen gas source through a connecting pipe 36 to obtain hot nitrogen gas from the gas source, and the hot nitrogen gas is blown to the substrate 50 through the air knife unit 31 in the form of a curved air knife. The substrate is dried.

Referring to FIG. 5, in an embodiment of the present invention, a shaft seat 18 is disposed at the bottom of the chamber 100. A rotating shaft 28 is disposed on a bottom side of the boat 20, and the rotating shaft 28 is detachably disposed on the shaft seat 18 to vertically pivot the boat 20 relative to the shaft seat 18; the chamber 100 is provided with a shaft a tilting device 40, which is disposed opposite the axle seat 18 and located on the other side of the bottom of the boat 20, connects the boat 20, and selectively lifts the other side of the bottom of the boat 20 so that The crystal The boat 20 pivots relative to the axle mount 18 and is tilted relative to the substrate drying air knife device 30. By tilting the wafer boat 20 and the substrate 50 thereon relative to the substrate drying air knife device 30, it is possible to avoid the problem that the substrate 50 is not formed in the wafer boat 20 and cannot be dried.

In an embodiment of the present invention, the tilting device 40 includes a pneumatic/hydraulic cylinder 41, a telescopic rod 42 and a wedge block 43. The air pressure/hydraulic cylinder 41 is disposed outside the tank body 10, and the telescopic rod 42 is A telescopic manner is disposed on the air pressure/hydraulic cylinder 41, penetrates the trough body 10 and extends into the chamber 100. The wedge block 43 is disposed at the end of the telescopic rod 42 and is located in the chamber 100 with a slope The other side of the bottom of the boat 20 is contacted. The tilting device 40 described above is merely an exemplary embodiment and may be replaced with other known tilting device 40 configurations.

Compared with the prior art, the novel batch substrate drying apparatus and the substrate drying air knife device 30 have the following advantages:

1. After the external air blower device 30 of the present invention is externally connected to a gas source containing hot nitrogen gas, the plurality of air knife units 31 can blow the multi-piece substrate 50 on the wafer boat 20 downward to send a three-dimensional curved air knife having a thickness. The surface of each of the substrate 50 is uniformly and rapidly dried by the hot nitrogen gas in the air knife, thereby avoiding the problem that the linear hot air beam is too concentrated in the prior art and the drying condition of the substrate 50 is uneven. The new type can improve the efficiency of batch substrate drying and avoid the problem of poor local drying of the substrate.

2. The plurality of air knife units 31 of the novel substrate drying air knife device 30 are arranged side by side, so that the blowing directions of the plurality of arc-shaped air blades of the plurality of air knife units 31 are parallel to each other and are not interlaced to avoid arcs. The wind blades are intertwined and interfere with each other to offset the wind pressure of the curved air knife, so that the air knife can blow the substrate 50 stably and strongly.

3. The plurality of arcuate plenums 310 of the plurality of air knife units 31 correspond to a plurality of bases The plate is placed in the slot 200 so that each substrate 50 can be dried by at least one curved air knife.

Claims (17)

A batch substrate drying device comprises: a tank body forming a chamber therein; a wafer boat detachably disposed in the chamber and configured to carry a plurality of substrates; and a substrate drying air knife device, Arranging in the chamber, above the boat, and comprising: a plurality of air knife units, the plurality of air knife units are arranged side by side, each of the air knife units having a curved air chamber, the curved air chamber having a a curved air outlet, wherein the curved air chamber is configured to generate a three-dimensional curved air knife and blow the three-dimensional curved air knife to at least one of the plurality of substrates; and a main air supply tube connecting the plurality of The air knife unit is configured to connect an external air source to supply air to the plurality of arcuate air chambers. The batch substrate drying apparatus according to claim 1, wherein the plurality of air knife units are detachably arranged side by side; each of the air knife units has an arc-shaped piece and an arc-shaped spacer block, the arc-shaped interval a block protrudingly formed on a front surface of the curved piece body, located at an upper edge of the curved piece body, the curved air chamber being formed on a front surface of the curved piece body, located below the curved spacer block, and located at the arc a lower edge of the shaped body, each of the curved air chambers for generating a downwardly curved arc-shaped air knife; the main air supply tube communicating the plurality of curved air chambers through the plurality of curved spacer blocks. The batch substrate drying device of claim 2, wherein each of the arc-shaped spacer blocks is formed with a communication hole, the communication hole is in communication with the arc-shaped air chamber; and a main air supply hole is formed in the main air supply tube. a plurality of air supply branch pipes communicating with the main air supply holes are formed in the radial direction of the main air supply pipe, and the plurality of air supply branch pipes are respectively disposed in the plurality of communication holes in a detachable manner, and are used for A plurality of arc chambers supply air. The batch substrate drying apparatus according to any one of claims 1 to 3, wherein each of the air knife units It is formed along an arcuate path. The batch substrate drying apparatus according to any one of claims 1 to 3, wherein each of the air knife units is formed to extend along a non-circular arc path. The batch substrate drying apparatus of claim 2, wherein the arcuate gas chamber of each of the air knife units is the curved piece of the air knife unit, the curved spacer block, and another adjacent one The curved body of the air knife unit defines a curved air chamber and a curved air outlet of the curved air chamber as a rear side wall, an upper side wall and a front side wall, respectively. The batch substrate drying apparatus according to claim 1, wherein a plurality of the arc blades of the plurality of air knife units are parallel to each other and are not mutually staggered. The batch substrate drying apparatus of claim 1, wherein the wafer boat is formed with a plurality of substrate placement grooves arranged side by side for placing the plurality of substrates; the plurality of arcuate gases of the plurality of air knife units The chamber corresponds to a plurality of substrate placement slots. The batch substrate drying apparatus according to claim 1, wherein a bottom of the chamber is provided with a shaft seat; a bottom of the bottom of the boat is provided with a rotating shaft, and the rotating shaft is detachably disposed on the shaft seat to make the crystal The boat can be vertically pivoted relative to the axle seat; the chamber is provided with a tilting device disposed opposite the axle seat and located on the other side of the bottom of the boat, connecting the boat, and selectively lifting the crystal The other side of the bottom of the boat is such that the boat pivots relative to the axle block and is tilted relative to the substrate drying air knife device. The batch substrate drying apparatus according to claim 9, wherein the tilting device comprises a pneumatic/hydraulic cylinder, a telescopic rod and a wedge block, the air pressure/hydraulic cylinder is disposed outside the tank body, and the telescopic rod is retractable The method is disposed on the air pressure/hydraulic cylinder, penetrates the tank body and extends into the chamber, the wedge block is disposed at an end of the telescopic rod, is located in the chamber, and contacts the bottom of the boat with a slope The other side. A substrate drying air knife device comprises: a plurality of air knife units, wherein the plurality of air knife units are arranged side by side, each air knife unit has an arc-shaped air chamber, wherein the curved air chamber has an arc-shaped air outlet, wherein The curved air chamber is configured to generate a three-dimensional curved air knife and blow the three-dimensional curved air knife to at least one of the plurality of substrates; and a main air supply tube connecting the plurality of air knife units and used for An external air source is connected to supply air to the plurality of arcuate air chambers. The substrate drying air knife device according to claim 11, wherein the plurality of air knife units are detachably arranged side by side; each of the air knife units has an arc-shaped piece and an arc-shaped spacer block, the arc-shaped spacer a block protrudingly formed on a front surface of the curved piece body, located at an upper edge of the curved piece body, the curved air chamber being formed on a front surface of the curved piece body, located below the curved spacer block, and located at the arc a lower edge of the shaped body, each of the curved air chambers for generating a downwardly curved arc-shaped air knife; the main air supply tube communicating the plurality of curved air chambers through the plurality of curved spacer blocks. The substrate drying air knife device according to claim 12, wherein each of the arc-shaped spacer blocks is formed with a communication hole, the communication hole is in communication with the arc-shaped air chamber; and a main air supply hole is formed in the main air supply tube. a plurality of air supply branch pipes communicating with the main air supply holes are formed in the radial direction of the main air supply pipe, and the plurality of air supply branch pipes are respectively disposed in the plurality of communication holes in a detachable manner, and are used for A plurality of arc chambers supply air. The substrate drying air knife device according to any one of claims 11 to 13, wherein each of the air knife units is formed to extend along a circular arc path. The substrate drying air knife device according to any one of claims 11 to 13, wherein each of the air knife units is formed to extend along a non-circular arc path. The substrate drying air knife device of claim 12, wherein the arcuate air chamber of each of the air knife units is the curved piece of the air knife unit, the curved spacer, and another adjacent The curved body of the air knife unit defines a curved air chamber and a curved air outlet of the curved air chamber as a rear side wall, an upper side wall and a front side wall, respectively. The substrate drying air knife device according to any one of claims 11 to 13, wherein a plurality of the arc blades of the plurality of air knife units are parallel to each other and are not mutually staggered.