TW202022957A - Stage apparatus, process equipment and operation method of the process equipment - Google Patents

Abstract

A stage apparatus includes a stage body, a working area and at least one workpiece placement area. The stage body includes a front portion, a rear portion and two side portions. The rear portion is opposite to the front portion. The side portions extend between the front portion and the rear portion. The working area is located on the stage body for processing a workpiece to be processed. The working area is open toward the front portion. The workpiece placement area is located at one of the side portions of the stage body for placing the workpiece. The position of the workpiece placement area corresponds to a position between the working area and the rear portion.

Description

Machine device, process equipment and operation method of process equipment

The present invention relates to a method of operating a machine device, a process equipment, and a process device, and relates to a machine device that can pick and place a workpiece from the rear part of the machine device, a process device including the machine device, and The operating method of the process equipment.

Most of the current wire bond machines are operated by operators for feeding and reclaiming materials, which not only consumes manpower but may increase the idle rate of the machine. In view of this, part of the wire bonding process workstations replaced the operator with automated equipment for feeding and retrieving materials to establish an automated system. Commonly used automation equipment are Over Head Vehicle Controller and Automated Guided Vehicle (AGV). Among them, the overhead crane system erects the track on the ceiling of the factory building, and transports goods through the suspension equipment. The suspension equipment is used for feeding and reclaiming in a straight-up and straight-down manner. However, the magazine of the wire bonding machine is arranged in two layers (that is, the upper magazine is located directly above the lower magazine), so The crane system cannot pass the upper-layer magazine and remove the lower-layer magazine.

The unmanned vehicle is an unmanned vehicle that runs on the ground of the factory and has a robotic arm. The current plant machine configuration is arranged in a face-to-face manner (that is, the front (front side) of one row of wire bonding machines is facing the front (front side) of another row of wire bonding machines), and the width of the aisle between the two rows of wire bonding machines is about 100 Centimeters. The walkway is for the operator to stand on for work (such as troubleshooting). Since the width of the unmanned guided vehicle is about 80 cm, if an unmanned guided vehicle is added to the aisle, industrial safety problems may occur when the unmanned guided vehicle collides with the operator.

According to one aspect, in some embodiments, a machine device includes a machine body, a work area, and at least one workpiece placement area. The machine body has a front part, a rear part and two side parts. The rear part is opposite to the front part, and the side parts extend between the front part and the rear part. The working area is located in the main body of the machine and used for processing a workpiece to be processed. The working area is open toward the front part. The workpiece placement area is located in one of the side parts of the machine body for placing workpieces. The position of the workpiece placement area corresponds to between the work area and the rear part.

According to another aspect, in some embodiments, a process equipment includes a moving channel, at least one machine device, and a transport device. The machine device includes a machine body and a working area. The machine body has a front part and a rear part, and the rear part is opposite to the front part. The working area is located in the main body of the machine and is open toward the front part for an operator to perform operations. The rear part of the machine device faces the moving channel. The conveying device is located in the moving channel to perform picking and placing operations from behind the machine device.

According to another aspect, in some embodiments, a method for operating a process equipment includes: (a) providing a plurality of machine devices, each machine device including a machine body and a work area, the machine body having A front part and a rear part. The rear part is opposite to the front part. The working area is located on the main body of the machine and is open to the front part; wherein, the machine devices are arranged in at least one row, and the The rear part of the machine device is directed to a moving channel; (b) a conveying device is provided in the moving channel; and (c) the conveying device is used to carry out the pick-and-place operation of the material box from the rear part of the machine device, and the machine The device is processed in this work area.

Common reference numbers are used throughout the drawings and detailed description to indicate the same or similar components. The embodiments of the present invention will be more easily understood from the following detailed description in conjunction with the accompanying drawings.

The following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Specific examples of components and configurations are described below to reveal certain aspects of the invention. Of course, these are only examples and are not intended to be limiting. For example, forming the first feature on or on the second feature in the following description may include embodiments in which the first feature and the second feature are formed or arranged in direct contact, and may also include An embodiment in which an additional feature is formed or placed between the first feature and the second feature so that the first feature and the second feature may not directly contact. In addition, the present invention may repeat reference numbers and/or letters in the various examples provided herein. This repetition is for simplicity and clarity and does not in itself indicate the relationship between the various embodiments and/or configurations discussed.

In the wire bonding machine (or wire bonding machine platform) of a comparative embodiment, the supply/discharge box (magazine) is placed on the carrier near the front (front side) of the wire bonding machine to facilitate the operator to carry the supply/discharge material Box, and perform the feeding/discharging operation. Furthermore, the wire bonding area of the wire bonding machine is facing the front (front side) of the wire bonding machine, so that the operator can face the front (front side) of the wire bonding machine to troubleshoot the wire bonding area. That is, the position where the magazine is placed (that is, the stages) corresponds to the front (front side) of the wire bonding machine and the wire bonding area of the wire bonding machine.

In addition, the wire bonding machine includes two elevators, one of which has a chuck to transport the feed box on the carrier to the feeding end of the wire bonding area, and the other has a chuck To transport the discharge box on the carrier to the discharge end of the wire bonding area. The chucks of the lifting devices face the carriers (that is, the front face (front side) of the wire bonding machine). That is, the position where the lifting devices are located corresponds to the back (back side) of the wire bonding machine and the wire bonding area of the wire bonding machine. However, since the position occupied by the operator and the feeding/discharging box are adjacent to the front (front side) of the wire bonding machine, when automatic equipment (for example: Automated Guided Vehicle (AGV)) is installed to replace the operator, Since the automatic equipment (for example: Automated Guided Vehicle (AGV)) needs to automatically supply/discharge materials from the front (front side) of the wire bonding machine, it is prone to the automatic equipment (for example: Automated Guided Vehicle (AGV)). Guided Vehicle, AGV)) and the work safety problem of collision with the operator performing the troubleshooting.

On the other hand, the plant machine configuration is arranged in a face-to-face manner (that is, the front (front side) of one row of wire bonding machines is facing the front (front side) of the other row of wire bonding machines). The aisle is provided with a track and an automatic conveying device (for example: a robotic arm), wherein the automatic conveying device (for example: a robotic arm) can move on the track to automatically feed/out from the front (front side) of the wire bonding machines料工作。 Material operations. However, in this way, because the wire bonding machines and the automatic handling device form a closed area, when the wire bonding machine is abnormal and/or malfunctions, the automatic handling device must be shut down so that the operator can enter the area for processing and failure. Excluded to prevent the operator from colliding with the automatic handling device, which may increase the idle rate of the wire bonding machine.

In addition, if multiple wire bonding machines are combined with multiple automatic handling devices to form multiple enclosed areas, when one of the wire bonding machines is abnormal and/or malfunctions, only the automatic handling devices and wire bonding machines in one of the areas need to be shut down. It will not cause the wire-making machines in all areas to stop, which can increase the utilization rate of the wire-making machines. For example, 12 wire bonding machines can be divided into three enclosed areas A, B, and C. Every 4 wire bonding machines share an automatic handling device. When one of the wire bonding machines in Zone A is abnormal and/or malfunctions, only The automatic handling device in area A needs to be turned off, and areas B and C can continue to operate normally. However, this requires an increase in the number of automatic handling devices and will make all the wire bonding machines in Zone A idle, resulting in an increase in the cost of the wire bonding machines and a decrease in production capacity.

The present invention provides a machine device in which an operator and an automatic transport device can work on different sides. In this way, the operator can eliminate abnormalities or failures on the front (front side, or front) of the machine device. The automatic transport device is Feed/discharge materials at the back (rear side, or back side) of the machine to achieve the function of man-machine separation. Therefore, not only can the automatic handling device and the operator collide with the work safety accident, but also can reduce the idle rate of the machine device.

FIG. 1 illustrates a front perspective view of a machine device 1 according to some embodiments of the present invention. FIG. 2 illustrates a rear perspective assembly view of the machine device 1 shown in FIG. 1. FIG. 3 illustrates a three-dimensional exploded view of the machine device 1 shown in FIG. 1. FIG. 4 illustrates a front partial perspective assembly view of the machine device 1 shown in FIG. 1, in which the first protective cover 181 and the second protective cover 182 are omitted. The machine device 1 includes a machine body 10, a working area 12, a wire bonding device 2, at least one workpiece placement area (including, for example, a first workpiece placement area 14 and a second workpiece placement area 16), At least one first carrier (including, for example, a first upload station 41 and a first download station 42), at least one second carrier (including, for example, a second upload station 43 and a second download station 44), at least one Lifting vehicles (including, for example, a first lifting vehicle 46 and a second lifting vehicle 48), at least one protective cover (including, for example, a first protective cover 181 and a second protective cover 182), a keyboard 191 and a Computer screen 192.

The machine body 10 has a front part 101 (or also called "front", "front", "front side" or "front"), a rear part 102 (or also called "back", "back" , "Rear side" or "rear") and two side parts (including a first side part 103 (such as left part, left side or left side) and a second side part 104 (such as right side part, right side or right side) )). The front part 101 is the part facing the operator. That is, when the operator 59 (Figure 6) performs abnormal troubleshooting or troubleshooting on the machine device 1, the position where the operator 59 (Figure 6) stands (operator standing area 11) is adjacent to the The front part 101 faces the front part 101. The rear part 102 is opposite to the front part 101. That is, the rear part 102 is far away from the position where the operator 59 (Figure 6) is standing. The side portions (including the first side portion 103 and the second side portion 104) extend between the front portion 101 and the rear portion 102. The first side portion 103 is opposite to the second side portion 104.

The working area 12 is located in the main body 10 of the machine table for processing a workpiece 56 to be processed. The working area 12 is open toward the front part 101. In one embodiment, the working area 12 is roughly located in the middle of the machine body 10, and there is no obstruction between the working area 12 and the front part 101. Therefore, the operator 59 (Figure 6) The front part 101 of the machine body 10 can be skipped to eliminate abnormalities or troubles of the components located in the working area 12. That is, the working area 12 is located between the front part 101 of the machine body 10 and the rear part 102 of the machine body 10.

In one embodiment, the machine device 1 is a wire-bonding machine, and the wire-bonding device 2 is located in the work area 12 and attached to the machine body 10 to perform wire-bonding processing on the workpiece 56 to be processed. The wire bonding device 2 includes a working platform 20, a wire box 22, a feeding device 24 and a wire bonding mechanism 26. The working platform 20 is used to carry and move the workpiece 56 to be processed. The wire box 22 is used to store a wire 54. The feeding device 24 is used to adjust the direction of the wire 54 from the wire box 22 so that the wire 54 can be fed downward. The wire bonding mechanism 26 receives the wire 54 from the feeding device 24. The wire bonding mechanism 26 has a wire bonding head 264 (FIG. 5) for connecting the wire 54 to the workpiece 56 to be processed.

The at least one workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16) is located on the side portions of the machine body 10 (including the first side portion 103 and the second One of the two side parts 104) is each for placing the workpiece. The position of the workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16) corresponds to between the work area 12 and the rear portion 102. That is, the workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16) is closer to the rear portion 102 than the work area 12. The working area 12 is closer to the front portion 101 than the workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16 ). The workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16) is located on two sides close to the work area 12 (such as a feed end 32 and a discharge end 34 ( Figure 3)) location. In one embodiment, the first workpiece placement area 14 is located at the first side portion 103 and adjacent to the feed end 32 of the work area 12, and the second workpiece placement area 16 is located at the second side portion 104 and adjacent to the discharge end 34 of the work area 12. As shown in FIGS. 1 and 3, the feed end 32 of the work area 12 is a through hole of the first side plate 31, and the discharge end 34 of the work area 12 is a through hole of the second side plate 33.

As shown in FIG. 2, the at least one first stage (including, for example, the first uploading stage 41 and the first downloading stage 42) is located in the first workpiece placement area 14 and attached to the machine body 10, To carry a magazine 57 (Figure 6). In one embodiment, the first uploading station 41 is located directly above the first downloading station 42, and the feed end 32 of the working area 12 is located at the first uploading station 41 and the first downloading station 42 between. The first loading platform 41 is adjacent to the upper side of the feeding end 32 of the working area 12, and the first downloading platform 42 is adjacent to the lower side of the feeding end 32 of the working area 12. In addition, as shown in FIG. 1, the at least one second stage (including, for example, the second uploading stage 43 and the second downloading stage 44) is located in the second workpiece placement area 16 and attached to the machine body 10 , Used to carry a material box. In one embodiment, the second loading station 43 is located directly above the second downloading station 44, and the discharge end 34 of the working area 12 is located at the second loading station 43 and the second downloading station 44 between. The second loading platform 43 is adjacent to the upper side of the discharge end 34 of the working area 12, and the second downloading platform 44 is adjacent to the lower side of the output end 34 of the working area 12.

As shown in FIG. 1, the second download station 44 has a protruding edge 441, a groove 442 and a front piece 443. The protruding edge 441 is located at the rear end of the second download station 44, and the groove 442 and the front bezel 443 are located at the front end of the second download station 44. That is, the protruding edge 441 of the second download station 44 faces the rear part 102 of the machine body 10, and the groove 442 and the front bezel 443 of the second download station 44 face the machine body 10 The previous part 101. In one embodiment, the shapes of the first upload station 41, the first download station 42 and the second upload station 43 are substantially the same as the second download station 44.

The at least one lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) is located on the side portions of the machine body 10 (including the first side portion 103 and the second side One of the parts 104) is separate and attached to the front part 101 of the machine body 10. In one embodiment, the first lifting carrier 46 is located at the first side part 103 and attached to the front part 101 of the machine body 10; the second lifting carrier 48 is located at the second side part 104, And attached to the front part 101 of the machine body 10. As shown in Figures 2 to 4, the position of the working area 12 corresponds to the lifting carrier (including, for example, the first lifting carrier 46 and the second lifting carrier 48) and the workpiece placement area (including, for example, Between the first workpiece placement area 14 and the second workpiece placement area 16). The feeding end 32 of the working area 12 is located between the first lifting carrier 46 and the at least one first carrier (including, for example, the first uploading station 41 and the first downloading station 42). The discharge end 34 of the working area 12 is located between the second lifting carrier 48 and the at least one second carrier (including, for example, the second uploading station 43 and the second downloading station 44).

As shown in Figure 4, the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) is adjacent to the operator standing area 11, that is, the lifting vehicle (including, for example, the second lifting vehicle) A lifting carrier 46 and the second lifting carrier 48) are smaller than the at least one first carrier (including, for example, the first uploading station 41 and the first downloading station 42) and the at least one second carrier (including, for example, the The second uploading station 43 and the second downloading station 44) are closer to the operator standing area 11. In other words, the position of the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) corresponds to between the operator standing area 11 and the working area 12.

2 and 3, the first lifting carrier 46 has a first frame 461, a first horizontal rail 462, a first vertical rail 463, a plurality of first motors 464, and a first clamp Head 50. The first horizontal rail 462 is horizontally disposed on the first side portion 103 of the machine body 10 and adjacent to the first workpiece placement area 14. The first horizontal rail 462 extends forward and backward. The first frame 461 is a vertical main structure, which is located on the first horizontal rail 462 and can move back and forth on the first horizontal rail 462. The first vertical rail 463 is vertically attached to the first frame 461 and extends up and down. The first chuck 50 is located on the first vertical rail 463 and can move up and down on the first vertical rail 463. The first chuck 50 faces the rear part 102 of the machine body 10, and is used to clamp the at least one first stage (including, for example, the first upper stage 41 and the second stage) located in the first workpiece placement area 14 A magazine 57 (Figure 6) on a download station 42). In one embodiment, the first chuck 50 includes a first upper jaw 501 and a first lower jaw 502. The first lower clamping jaw 502 can pass through the grooves of the first loading platform 41 and the first download platform 42 to contact the lower surface of the magazine 57 (FIG. 6 ). The first motors 464 are attached to the first frame 461. In one embodiment, the first lifting carrier 46 has three first motors 464, which respectively control the first frame 461 to move back and forth in the horizontal direction and the first chuck 50 to move up and down in the vertical direction. And the respective movements of the first upper jaw 501 and the first lower jaw 502.

3 and 4, the second lifting carrier 48 has a second frame 481, a second horizontal rail 482, a second vertical rail 483, a plurality of second motors 484, and a second clamp头52. The second horizontal rail 482 is horizontally disposed on the second side portion 104 of the machine body 10 and adjacent to the second workpiece placement area 16. The second horizontal rail 482 extends forward and backward. The second frame 481 is a vertical main structure, which is located on the second horizontal rail 482 and can move back and forth on the second horizontal rail 482. The second vertical rail 483 is vertically attached to the second frame 481 and extends up and down. The second chuck 52 is located on the second vertical rail 483 and can move up and down on the second vertical rail 483. The second chuck 52 faces the rear part 102 of the machine body 10, and is used to clamp the at least one second stage (including, for example, the second upper stage 43 and the second stage) located in the second workpiece placement area 16 On the second downloading station 44) a material box 57 (Figure 6). In one embodiment, the second chuck 52 includes a second upper jaw 521 and a second lower jaw 522. The second lower clamping jaw 522 can pass through the recesses (for example, recesses 442) of the second loading platform 43 and the second download platform 44 to contact the lower surface of the magazine 57 (FIG. 6 ). The second motors 484 are attached to the second frame 481. In one embodiment, the second lifting carrier 48 has three second motors 484, which respectively control the front and back movement of the second frame 481 in the horizontal direction and the vertical movement of the second chuck 52 in the vertical direction. And the respective movements of the second upper jaw 521 and the second lower jaw 522.

The at least one protective cover (including, for example, the first protective cover 181 and the second protective cover 182) is used to cover and cover the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) to protect the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) and to prevent the operator from touching the lifting vehicle (including, for example, the first lifting vehicle 46 and the The second lifting vehicle 48) and a public security accident occurred. For example, the first protective cover 181 covers the first lifting carrier 46 and the second protective cover 182 covers the second lifting carrier 48.

The computer screen 192 is located above the work area 12 and faces the front part 101 of the machine body 10 for the operator to watch. The keyboard 191 is located at the front part 101 of the machine body 10 for the operator to input instructions to operate the machine device 1. As shown in FIG. 4, the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) are respectively located on the left and right sides of the keyboard 191.

FIG. 5 illustrates a three-dimensional enlarged schematic diagram of the wire bonding mechanism 26 of the machine device 1 shown in FIG. 1. The wire bonding mechanism 26 includes a force adjusting element 261, an alignment element 262, a wire bonding head clamping element 263, a wire bonding head 264 and a heating element 265. The tension adjusting device 261 is located below the feeding device 24 and receives the wire 54 from the feeding device 24. The tension adjusting device 261 is used to adjust the tension of the wire 54 and continuously feed the wire 54 downward. The alignment element 262 is located below the tension adjustment element 261 and receives the wire 54 from the tension adjustment element 261. The alignment element 262 is used to align the wire 54 with the wire bonding head 264. The wire bonding head clamping element 263 is located below the alignment element 262 and clamps the wire bonding head 264. The wire bonding head 264 is used to receive the wire 54 from the alignment element 262 to connect the wire 54 to the workpiece 56 to be processed. The heating element 265 is located below the wire bonding head clamping element 263 to heat the end of the wire 54.

FIG. 6 illustrates a three-dimensional schematic diagram of a process equipment 6 according to some embodiments of the present invention. The process equipment 6 includes a moving channel 62, at least one machine device 1 and a conveying device 58. The machine device 1 is the same as the machine device 1 in FIGS. 1 to 4, and includes a machine body 10, a working area 12, a wire bonding device 2, at least one workpiece placement area (including, for example, a first workpiece Placement area 14 and a second workpiece placement area 16), at least one first stage (including, for example, a first loading stage 41 and a first downloading station 42), at least one second stage (including, for example, a first Two loading stations 43 and a second download station 44), at least one lifting carrier (including, for example, a first lifting carrier 46 and a second lifting carrier 48), at least one protective cover (including, for example, a first protective cover 181 and a second protective cover 182), a keyboard 191 and a computer screen 192. The machine body 10 has a front part 101 and a rear part 102, and the rear part 102 is opposite to the front part 101. The rear part 102 of the machine device 1 faces the moving channel 62. The working area 12 is located in the main body 10 of the machine and is open to the front part 101 for an operator 59 to perform operations (for example, abnormal or troubleshooting operations). The conveying device 58 is located in the moving channel 62 to perform pick-and-place operations from the rear part 102 of the machine device 1 (for example, pick-and-place operations of the magazine 57).

In one embodiment, the processing equipment 6 further includes a track 583 and a moving platform 582. The track 583 is located in the moving channel 62. The mobile platform 582 is located on the track 583 and can move (for example, slide) on the track 583. The lower end of the conveying device 58 is fixed on the moving platform 582 so that the conveying device 58 can move left and right on the rail 583. In one embodiment, the conveying device 58 may be a six-axis robotic arm, and the front end of the conveying device 58 has a chuck 581 for clamping and moving the magazine 57. It can be understood that the transport device 58 may also be an unmanned transport vehicle.

As shown in FIG. 6, the operator 59 is standing in the operator standing area 11, which is adjacent to the front part 101 of the machine body 10, that is, the operator 59 is standing in front of the machine device 1 square. At the same time, the conveying device 58 is adjacent to the rear part 102 of the machine body 10, and picking and placing operations are performed from the rear part 102 of the machine apparatus 1 (for example, the picking and placing operations of the magazine 57), that is, the The conveying device 58 is located behind the machine device 1. Since the operator 59 and the conveying device 58 are located on different sides of the machine tool 1 in front of and behind, there is no industrial safety incident in which the conveying device 58 collides with the worker 59. In addition, the respective operations of the operator 59 and the conveying device 58 are independent and will not affect each other. Therefore, when the operator 59 performs abnormal or malfunctioning removal of the machine device 1, the conveying device 58 The operation can still be continued without shutting down. In this way, the idle rate of the machine device 1 can be reduced to increase productivity.

7 to 15 illustrate the operation method of the process equipment 6 according to some embodiments of the present invention. Referring to FIG. 7, the chuck 581 of the conveying device 58 is used to place a first material box 571 on the first download station 42 of the machine device 1 from the rear part 102 of the machine device 1 (FIG. 6 ). The first material box 571 contains at least one workpiece 56 to be processed. In an embodiment, the first material box 571 is filled with a plurality of workpieces 56 to be processed, that is, the first material box 571 is a cargo box. The first material box 571 has an opening facing the working area 12.

Referring to FIG. 8, the chuck 581 of the conveying device 58 is used to place a second magazine 572 on the second loading platform 43 of the machine device 1 from the rear part 102 (FIG. 6) of the machine device 1. The second material box 572 does not contain any workpieces, that is, the second material box 572 is an empty box. The second material box 572 has an opening facing the working area 12. The state at this time is shown in the three-dimensional schematic diagram of FIG. 9, the first magazine 571 (cargo box) is located on the first download station 42 of the machine device 1, and the second magazine 572 (empty box) is located On the second loading platform 43 of the machine device 1. It can be understood that the second cartridge 572 can also be manually placed on the second loading platform 43 of the machine device 1 by the operator 59.

Next, referring to FIG. 10, the first material box 571 is clamped by the first lifting carrier 46 to the feed end 32 of the working area 12 of the machine device 1. In one embodiment, the first lifting carrier 46 moves rearward along the first horizontal rail 462 to utilize the first chuck 50 (including the first upper jaw 501) of the first lifting carrier 46 And the first lower jaw 502) to clamp the first material box 571. Then, the first lifting carrier 46 moves forward along the first horizontal rail 462, and the first chuck 50 along with the first material box 571 moves upward along the first vertical rail 463, so that the The opening of the first material box 571 faces the feeding end 32 of the working area 12.

Referring to FIG. 11, at the same time as the above-mentioned actions in FIG. 10, the second lifting carrier 48 is used to clamp the second material box 572 to the discharge end 34 of the working area 12 of the machine device 1. In one embodiment, the second lifting carrier 48 moves rearward along the second horizontal rail 482 to utilize the second chuck 52 (including the second upper jaw 521 of the second lifting carrier 48). And the second lower clamping jaw 522) to clamp the second cartridge 572. Then, the second lifting carrier 48 moves forward along the second horizontal rail 482, and the second chuck 52 together with the second magazine 572 moves downward along the second vertical rail 483, so that the The opening of the second material box 572 faces the discharge end 34 of the working area 12.

Next, the machine device 1 extracts the workpiece 56 to be processed in the first magazine 571 from the feeding end 32 for processing in the work area 12 (for example: using the wire bonding device 2 (Figure 1, Figure 3, Figure 4 and Figure 5) wire-bonding processing), and put the processed workpiece into the second magazine 572. After a period of time, all the workpieces 56 to be processed in the first magazine 571 are processed, and they are all placed in the second magazine 572. At this time, the first material box 571 is an empty box, and the second material box 572 is a cargo box.

Next, referring to FIG. 12, the first material box 571 is placed on the first loading platform 41 of the machine device 1 using the first lifting carrier 46. In one embodiment, the first chuck 50 and the first magazine 571 move upward along the first vertical rail 463, and the first lifting carrier 46 moves backward along the first horizontal rail 462 Move to place the first material box 571 on the first loading platform 41 of the machine device 1.

Meanwhile, referring to FIG. 13, the second material box 572 is placed on the second download station 44 of the machine device 1 by using the second lifting carrier 48. In one embodiment, the second chuck 52 and the second magazine 572 move downward along the second vertical track 483, and the second lifting carrier 48 moves backward along the second horizontal track 482 Move to place the second material box 572 on the second download station 44 of the machine device 1. The state at this time is shown in the three-dimensional schematic diagram of Figure 14, the first cartridge 571 (empty box) is located on the first loading platform 41 of the machine device 1, and the second cartridge 572 (cargo box) is located On the second download station 44 of the machine device 1.

Next, referring to FIG. 15, the second material box 572 (cargo box) is collected from the rear part 102 of the machine device 1 by the transporting device 58 and transported to a storage device (For example, the first storage cabinet 64 or the second storage cabinet 66 (Figure 16)). Then, the transporting device 58 transports the first magazine 571 (empty box) from the first loading platform 41 of the platform device 1 to the second loading platform 43 from the rear part 102 of the platform device 1. Then, using the chuck 581 of the conveying device 58 from the rear part 102 (FIG. 6) of the machine device 1 to place a box on the first download station 42 of the machine device 1 to repeat the above steps.

FIG. 16 illustrates a three-dimensional schematic diagram of a process equipment 6a according to some embodiments of the present invention. The process equipment 6a includes a moving channel 62, a plurality of machine devices 1a, 1b, and a conveying device 58. Each of the machine devices 1a, 1b is substantially the same as the machine device 1 of FIGS. 1 to 4, and the difference is that each of the machine devices 1a, 1b is further equipped with a microscope device above the working area 12 . The machine devices 1a, 1b are arranged in at least one row. In one embodiment, the machine devices 1a, 1b are arranged in two rows, namely a first row 67 and a second row 68. The first row 67 includes the machine devices 1 a, the second row 68 includes the machine devices 1 b, and the first row 67 is substantially parallel to the second row 68. The machine body of each of the machine devices 1a has a front part and a rear part 102a, and the rear part 102a is opposite to the front part. The rear parts 102a of the machine devices 1a all face the moving channel 62. In addition, the machine body of each of the machine devices 1b has a front part and a rear part 102b, and the rear part 102b is opposite to the front part. The rear parts 102b of the machine devices 1b are all facing the moving channel 62.

As shown in FIG. 16, the moving channel 62 is located between the first row 67 and the second row 68. Therefore, the rear part 102a of the machine devices 1a of the first row 67 faces the second row 68 of the machine devices 1b after the part 102b. The conveying device 58 is located in the moving channel 62 to perform pick-and-place operations (for example, pick-and-place operations of the magazine) from the rear parts 102a, 102b of the machine devices 1a, 1b.

In one embodiment, the process equipment 6a further includes a track 583, a mobile platform 582 (FIG. 6), and a storage device (including, for example, a first storage cabinet 64 and a second storage cabinet 66). The track 583 is located in the moving channel 62. The mobile platform 582 (FIG. 6) is located on the track 583 and can move (for example, slide) on the track 583. The lower end of the conveying device 58 is fixed on the moving platform 582 so that the conveying device 58 can move on the rail 583. In one embodiment, the conveying device 58 can be a six-axis robotic arm, and the front end of the conveying device 58 has a chuck 581 (FIG. 6) for clamping and moving the magazine. It can be understood that the transport device 58 may also be an unmanned transport vehicle. The moving channel 62 is connected to the stocker (including, for example, the first stocker 64 and the second stocker 66). In the embodiment shown in FIG. 16, the first storage cabinet 64 and the second storage cabinet 66 are located at the two ends of the moving channel 62 respectively. In one embodiment, the transporting device 58 transports the processed cargo box (for example, the second magazine 572 of FIG. 13) to the second storage cabinet 66 for storage, and the transporting device 58 transports the processed goods from the first The storage cabinet 64 takes out the boxes to be processed (for example, the first magazine 571 in FIG. 7) and empty boxes (for example, the second magazine 572 in FIG. 8). In another embodiment, the handling device 58 only takes out the container to be processed from the first storage cabinet 64 (for example, the first container 571 in FIG. 7), that is, the first storage cabinet 64 only Store boxes to be processed (for example, the first magazine 571 in FIG. 7), but not empty boxes (for example, the second magazine 572 in FIG. 8).

The operation method of the process equipment 6a (FIG. 16) according to some embodiments of the present invention will be described below. First, a plurality of machine devices 1a, 1b are provided. The machine devices 1a, 1b are arranged in at least one row. In one embodiment, the machine devices 1a, 1b are arranged in two rows, namely the first row 67 and the second row 68. The first row 67 includes the machine devices 1 a, the second row 68 includes the machine devices 1 b, and the first row 67 is substantially parallel to the second row 68. Each of the machine devices 1a includes a machine body and a working area. The machine body has a front part and a rear part 102a, and the rear part 102a is opposite to the front part. The rear parts 102a of the machine devices 1a all face the moving channel 62. In addition, each of the machine devices 1b includes a machine body and a working area. The machine body has a front part and a rear part 102b, and the rear part 102b is opposite to the front part. The rear parts 102b of the machine devices 1b are all facing the moving channel 62. As shown in FIG. 16, the moving channel 62 is located between the first row 67 and the second row 68. Therefore, the rear part 102a of the machine devices 1a of the first row 67 faces the second row 68 of the machine devices 1b after the part 102b.

Then, a conveying device 58 is provided in the moving channel 62. The conveying device 58 can move in the moving channel 62 to perform pick-and-place operations (for example, pick-and-place operations of the magazine) from the rear parts 102a, 102b of the machine devices 1a, 1b. In one embodiment, the conveying device 58 takes out the boxes to be processed (for example, the first magazine 571 of FIG. 7) and empty boxes (for example, the second magazine 572 of FIG. 8) from the first storage cabinet 64 To a machine device 1a, 1b. In another embodiment, the empty box (for example, the second cartridge 572 in FIG. 8) can also be manually placed on the machine devices 1a, 1b by the operator 59. Next, the operations shown in FIGS. 7 to 15 described above are performed. Then, the conveying device 58 conveys the processed cargo box (for example, the second magazine 572 in FIG. 13) to the second storage cabinet 66 for storage.

Unless otherwise specified, such as "above", "below", "above", "left", "right", "below", "top", "bottom", "vertical" , "Level", "side", "higher", "lower", "upper", "above", "below", etc. The space descriptions are relative to those shown in the figure Directional instructions. It should be understood that the spatial description used herein is for illustrative purposes only, and the actual implementation of the structure described herein can be spatially configured in any orientation or manner, as long as the configuration does not deviate from the advantages of the embodiments of the present invention .

As used herein, the terms "approximately", "basically", "basic" and "about" are used to describe and consider small changes. When used in conjunction with an event or situation, these terms can refer to a situation in which the event or situation clearly occurs and a situation in which the event or situation is close to occurrence. For example, when used in conjunction with numerical values, these terms can refer to a range of variation less than or equal to ±10% of that value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3% , Less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, if the difference between two values is less than or equal to ±10% of the average of these values (for example, less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or Equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%), then these values can be considered substantially the same or equal.

If the displacement between the two surfaces is not greater than 5 µm, not greater than 2 µm, not greater than 1 µm, or not greater than 0.5 µm, the two surfaces may be considered coplanar or substantially coplanar.

As used herein, unless the context clearly dictates otherwise, the singular terms "a", "an" and "the" may include plural objects. In the description of some embodiments, a component provided "on" or "above" another component may include the condition that the latter component is directly on the previous component (for example, physical contact), and one or more of them The intervening component can be located between the previous component and the next component.

In addition, quantities, ratios, and other numerical values are sometimes presented in range format herein. It should be understood that this range format is used for convenience and brevity and should be flexibly understood to include the values clearly defined as the limits of the range, and also include all individual values or subranges included in that range, as if each Values and sub-ranges are clearly defined.

Although the present invention has been described and illustrated with reference to specific examples of the present invention, these descriptions and illustrations are not limiting. Those familiar with this technology should understand that various changes can be made and equivalents can be substituted without departing from the true spirit and scope of the present invention as defined by the scope of the attached patent application. The description does not have to be drawn to scale. Due to the manufacturing process and tolerances, there may be differences between the exquisite presentation in the present invention and the actual device. There may be other embodiments of the invention that are not specifically described. The description and drawings should be regarded as illustrative rather than restrictive. Modifications can be made to adapt specific conditions, materials, material compositions, methods or procedures to the purpose, spirit and scope of the present invention. All such modifications are intended to fall within the scope of the attached patent application. Although the methods disclosed herein have been described with reference to specific operations performed in a specific order, it should be understood that these operations can be combined, subdivided, or reordered to form equivalent methods without departing from the teachings of the present invention. Therefore, unless otherwise specified herein, the order and grouping of operations is not a limitation of the present invention.

1: Machine device 1a: Machine device 1b: Machine device 2: Wire bonding device 6: Process equipment 6a: Process equipment 10: Machine body 11: Operator standing area 12: Work area 14: First workpiece placement area 16: Second workpiece placement area 20: Work platform 22: Wire box 24: Feeding device 26: Wire bonding mechanism 31: First side plate 32: Feed end 33: Second side plate 34: Discharge end 41: First upload Station 42: First download station 43: Second upload station 44: Second download station 46: First lift carrier 48: Second lift carrier 50: First chuck 52: Second chuck 54: Wire 56: Workpiece to be processed 57: material box 58: handling device 59: operator 62: moving channel 64: first storage cabinet 66: second storage cabinet 67: first row 68: second row 101: front part 102: rear Part 102a: Rear part 102b: Rear part 103: First side part 104: Second side part 181: First protective cover 182: Second protective cover 191: Keyboard 192: Computer screen 261: Tension adjustment element 262: Alignment element 263: Threading head clamping element 264: Threading head 265: heating element 441: protruding edge 442: groove 443: front stop piece 461: first frame 462: first horizontal rail 463: first vertical rail 464: first Motor 481: second frame body 482: second horizontal rail 483: second vertical rail 484: second motor 501: first upper jaw 502: first lower jaw 521: second upper jaw 522: second lower Gripper 571: first cartridge 572: second cartridge 581: chuck 582: mobile platform 583: rail

When read together with the drawings, the aspects of some embodiments of the present invention can be easily understood from the following detailed description. It should be noted that the various structures may not be drawn to scale, and the size of the various structures can be increased or decreased arbitrarily for clarity of discussion. Fig. 1 illustrates a front three-dimensional assembly diagram of a machine device according to some embodiments of the present invention. Fig. 2 illustrates a rear-view stereoscopic assembly diagram of the machine device 1 shown in Fig. 1. Fig. 3 illustrates a three-dimensional exploded view of the machine device 1 shown in Fig. 1. Fig. 4 illustrates a front-view partial three-dimensional assembly view of the machine device 1 shown in Fig. 1, in which the first protective cover and the second protective cover are omitted. Fig. 5 illustrates a three-dimensional enlarged schematic diagram of the wire bonding mechanism of the machine device 1 shown in Fig. 1. Fig. 6 illustrates a three-dimensional schematic diagram of a process equipment according to some embodiments of the present invention. Fig. 7 illustrates one or more stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. Fig. 8 illustrates one or more stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. Fig. 9 illustrates one or multiple stages of an example of a method of operating a process equipment according to some embodiments of the present invention. Fig. 10 illustrates one or a plurality of stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. FIG. 11 illustrates one or more stages of an example of a method of operating a process equipment according to some embodiments of the present invention. Fig. 12 illustrates one or more stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. Fig. 13 illustrates one or a plurality of stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. Fig. 14 illustrates one or more stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. Fig. 15 illustrates one or a plurality of stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. FIG. 16 illustrates a three-dimensional schematic diagram of a process equipment according to some embodiments of the present invention.

1: Machine device

2: Wire bonding device

10: Machine body

11: Operator standing area

12: Work area

14: The first workpiece placement area

16: The second workpiece placement area

20: Work platform

22: wire box

24: Feeding device

26: Wire bonding mechanism

31: The first side panel

32: feed end

33: second side panel

41: The first loading platform

43: The second loading platform

44: The second download station

54: Wire

56: Workpiece to be processed

101: front part

102: rear part

103: The first side part

104: second side part

181: The first protective cover

182: Second protective cover

191: keyboard

192: computer screen

441: Prominent Edge

442: groove

443: front file

Claims (24)

A machine device includes: a machine body with a front part, a rear part, and two side parts. The rear part is opposite to the front part, and the side parts extend between the front part and the rear part. Between; a work area located in the main body of the machine for processing a workpiece to be processed, wherein the work area is open toward the front part; and at least one work area is located in the main body of the machine One of the side parts is separately used for placing workpieces, wherein the position of the workpiece placing area corresponds to between the working area and the rear part. For example, the machine device of claim 1 further includes a wire bonding device located in the work area and attached to the main body of the machine for wire bonding to the workpiece to be processed. For example, the machine device of claim 2, where the wire bonding device includes: a working platform for carrying a workpiece to be processed; a wire box for storing a wire; a feeding device for adjusting the direction of the wire, and Feeding the wire; and a wire bonding mechanism that receives the wire from the feeding device, wherein the wire bonding mechanism includes a wire bonding head for connecting the wire to the workpiece to be processed. Such as the machine device of claim 1, wherein the position of the working area is between the front part of the machine body and the rear part of the machine body. For example, the machine device of claim 1, wherein the side portions include a first side portion and a second side portion, the first side portion is opposite to the second side portion; the at least one workpiece placement area includes a first side portion A workpiece placement area and a second workpiece placement area, wherein the first workpiece placement area is located on the first side portion of the machine body and is adjacent to a feeding end of the work area, the second The workpiece placement area is located on the second side part of the machine body and is adjacent to a discharge end of the work area. For example, the machine device of claim 5 further includes at least one first carrier and at least one second carrier. The at least one first carrier is located in the first workpiece placement area and is attached to the machine body. To carry a magazine; the at least one second carrier is located in the second workpiece placement area and is attached to the machine body to carry a magazine. For example, the machine device of claim 6, wherein the at least one first carrier includes a first upload station and a first download station, the first upload station is located above the first download station, and the work area The feed end is located between the first loading station and the first downloading station; the at least one second loading station includes a second loading station and a second downloading station, and the second loading station is located at the second downloading station Above the station, the discharge end of the work area is located between the second loading station and the second download station. For example, the machine device of claim 1, further comprising at least one carrier, located in the workpiece placement area and attached to the machine body, for carrying a magazine. For example, the machine device of claim 8, wherein the carrier has a protruding edge and a groove, the protruding edge is located at a rear end of the carrier, and the groove is located at a front end of the carrier. For example, the machine device of claim 1, further comprising at least one lifting carrier, located in one of the side parts of the machine body, and attached to the front part of the machine body. For example, the machine device of claim 10, wherein the lifting carrier has a chuck, and the chuck is facing the rear part of the machine body for clamping a material box located in the workpiece placement area. For example, the machine device of claim 10, wherein the position of the working area corresponds to between the lifting carrier and the workpiece placement area. A process equipment that includes: a moving channel; at least one machine device, which includes: a machine body with a front part and a rear part, the rear part being opposite to the front part; and a working area located in the The machine body is open toward the front part for an operator to perform operations; the rear part of the at least one machine device is toward the moving channel; and a conveying device is located in the moving channel to move from the machine device Afterwards, part of the pick-and-place operation. For example, the process equipment of claim 13 further includes a track located in the moving channel, and the conveying device can move on the track. For example, the process equipment of claim 13, wherein the conveying device is a six-axis robotic arm. For example, the process equipment of claim 13 further includes a stocker, and the moving channel is connected to the stocker. For example, the process equipment of claim 13, wherein the at least one machine device includes a plurality of machine devices, the machine devices are arranged in at least one row, and the subsequent parts of the machine devices all face the moving channel. For the process equipment of claim 17, the machine devices are arranged in a first row and a second row, the first row is approximately parallel to the second row, and the moving channel is located in the first row and the second row. Between the two rows, and the rear part of the machine devices in the first row faces the rear part of the machine devices in the second row. A method for operating process equipment includes: (a) Providing a plurality of machine devices, each machine device includes a machine body and a work area, the machine body has a front part and a rear part, the rear part The part is relative to the front part, the working area is located in the main body of the machine, and is open to the front part; wherein the machine devices are arranged in at least one row, and the rear part of the machine devices faces a moving channel (B) Provide a conveying device in the moving channel; and (c) Use the conveying device to pick and place the cassettes from behind the machine devices, and the machine device performs processing in the work area. Such as the actuation method of claim 19, wherein in (a), the machine devices are arranged in a first row and a second row, the first row is substantially parallel to the second row, and the moving channel is located Between the first row and the second row, and the rear part of the machine devices of the first row faces the rear part of the machine devices of the second row. Such as the actuation method of claim 19, wherein in (b), the conveying device can move in the moving channel. For example, the action method of claim 19, where (c) includes: (c1) using the transport device to partially place a first cartridge on one of the first download stations of the machine device from behind the machine device, where the first The material box contains at least one workpiece to be processed; (c2) using the conveying device to place a second material box on a second upper stage of the machine device from the rear part of the machine device, wherein the second material box is Empty box; (c3) Use a first lifting carrier to clamp the first material box to the feed end of the working area of the machine device, and use a second lifting carrier to clamp the second material box To the discharge end of the work area of the machine device; (c4) The machine device extracts the workpiece to be processed in the first magazine for processing in the work area, and puts the processed workpiece in the first magazine Two cartridges; (c5) Use the first lifting carrier to place the first cartridge on a first loading platform of the machine device, and use the second lifting carrier to place the second cartridge on the A second download station of one of the machine devices; and (c6) use the transport device to partially collect the second material box from behind the machine device. For example, the action method of claim 22, where (c6) further includes: (c61) using the transport device to transport the second material box to a stocker. For example, the actuation method of claim 22, where after (c6), the actuation method further includes: (c7) first uploading the first cartridge from one of the machine devices using the transport device from the back of the machine device The platform is transported to the second loading platform.

Images