TW202019545A - Local air purification device - Google Patents

Abstract

This local air purification device (1) is provided with: a push hood (2) having an air flow open surface (23) for blowing out a purified uniform air flow; a guide (3) which is provided on the air flow open surface (23) side of the push hood (2), extends the uniform air flow from the air flow open surface (23) side toward a downstream side, and forms an open surface (31) on a downstream-side end section; and a first laminar flow generation device (41) which is arranged inside the guide (3) and blows out a laminar flow (41a) in a direction approximately perpendicular to the direction in which the uniform air flow is blown out from the air flow open surface (23). The first laminar flow generation device (41) moves dust generated inside the guide (3) to the peripheral edge of the inside of the guide (3) by means of the laminar flow (41a) blown out in the approximately perpendicular direction, and the push hood (2) discharges the dust, moved to the peripheral edge of the inside of the guide (3) by the first laminar flow generation device (41), out of the guide (3) by the uniform air flow blown out from the air flow open surface (23).

Description

Local area air purification device

The invention relates to a local area air purification device.

In the past, a clean bench was often used as a device to improve the air cleanliness of the work space in a local area. An ordinary washing table only has an opening for operation on the surface on the front side of the work table, and the other surfaces are enclosed to maintain cleanliness. In such a washing station, a clean air outlet is arranged in the enclosed area, and the operator's hand extends from the opening for operation near the front side to perform the operation.

However, due to the narrow opening for the operation of the cleaning table, the operator has a problem in workability when performing assembly work of precision machinery and the like. Furthermore, in the case where products and manufactured parts are moved together like a production line, although measures such as putting the entire production line into a clean room have been taken, this will cause a problem that the scale of the equipment becomes large.

Therefore, a local area air purification device (Patent Document 1) is proposed, in which the air flow opening surfaces of a pair of push hoods capable of blowing a uniform flow of purified air are opposed to each other, The airflow of the airflow opening face collides, so that the area between the pair of exhaust hoods becomes a clean air space with high-definition clarity compared to other areas.

Furthermore, a local area air purification device (Patent Document 2) is also proposed in which an airflow opening surface of one exhaust hood is opposed to an air collision surface such as a wall, and the airflow from the airflow opening surface collides with air collision Surface, and the area between the exhaust hood and the air collision surface becomes a clean air space with high definition clarity compared to other areas. [Prior Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2008-275266. Patent Document 2: Japanese Patent Laid-Open No. 2013-068396.

[Problems to be solved by the invention]

Therefore, in some cases, when an operator performs work in the clean air space or activates a production line arranged in the clean air space, dust may be generated. The conventional local area air purification device moves the generated dust to the downstream side (for example, the air collision surface side facing the airflow opening surface) by the airflow blown from the airflow opening surface, and after a while Clean air space is discharged. However, when dust is generated and work is performed on the downstream side, there is also a desire to be quickly discharged from the work space.

The present invention has been completed in view of the above-mentioned problems, and an object of the present invention is to provide a local area air purification device, which can maintain high-definition clarity in the working space in actual operation by moving the dust generated in the clean air space due to the operation outside the working space . [Means to solve the problem]

In order to achieve the above object, the local area air purification device of the first aspect of the present invention includes: an exhaust hood having an air flow opening surface that blows out a purified uniform air flow; and a guide plate, an air flow provided in the exhaust hood The opening surface side extends from the airflow opening surface side toward the downstream side of the uniform airflow and forms an opening surface at the downstream end; the purified uniform airflow blown out from the airflow opening surface passes through the guide plate After the inside, the exhaust hood is arranged so as to collide with the air collision surface on the downstream side of the opening surface of the guide plate, and the opening surface of the guide plate is spaced and opposed to the air collision surface, whereby the guide plate An open area is formed between the opening surface and the air collision surface; the purified uniform air flow blown out from the air flow opening surface collides with the air collision surface and flows out of the open area, thereby making the guide plate and The cleanliness in the open area is higher than the cleanliness in other areas. The local area air purification device further includes: a first laminar flow generating device, which is arranged in the guide plate downstream of the position where the dust is generated. And blow the laminar flow in a direction substantially orthogonal to the direction in which the uniform air flow is blown out from the opening surface of the air flow; the first laminar flow generating device makes the guide plate into the guide plate by the laminar flow blown in the substantially orthogonal direction The generated dust moves to the periphery of the guide plate; the exhaust hood discharges the dust that has moved from the first laminar flow generating device to the periphery of the guide plate by the uniform air flow blown from the air flow opening surface Outside the aforementioned guide plate.

A local area air purification device according to a second aspect of the present invention includes: an exhaust hood having an airflow opening surface for blowing out a purified uniform airflow; and a guide plate provided on the airflow opening surface side of the exhaust hood, from The air flow opening face side extends toward the downstream side of the uniform air flow and forms an opening face at the downstream end; the purified uniform air flow blown out from the air flow opening face passes through the guide plate and then passes through the guide plate The exhaust hood is arranged such that the downstream side of the opening face collides with the air collision face, and the opening face of the guide plate is separated and opposed to the air collision face, whereby the opening face of the guide plate and the An open area is formed between the air collision surfaces; the purified uniform air flow blown from the air flow opening surface collides with the air collision surface and flows out of the open area, thereby cleaning the inside of the guide plate and the open area The degree of cleanliness is higher than that of other areas; the local area air purification device further includes: a first laminar flow generating device, which is arranged in the guide plate downstream of the position where the dust is generated, and is directed toward and away from the air The direction in which the uniform air flow is blown out of the airflow opening surface blows out the laminar flow in a direction substantially orthogonal; the guide plate has holes formed at the position where the laminar flow blown from the first laminar flow generating device hits the guide plate; the first The laminar flow generating device blows out the laminar flow in the substantially orthogonal direction, thereby discharging the dust generated in the guide plate from the hole to the outside of the guide plate.

The local air purification device of the first aspect further includes: a second laminar flow generating device disposed in the periphery of the guide plate colliding with the laminar flow blown from the first laminar flow generating device to the guide plate Laminar flow is blown toward the opening surface at a position close to the downstream side of the first laminar flow generating device and substantially parallel to the direction of blowing the uniform air flow from the air flow opening surface; the second layer The flow generating device blows out the laminar flow substantially parallel to the flow rate faster than the uniform air flow; the second laminar flow generating device will have the first laminar flow generating device by the laminar flow blown substantially parallel Dust moved to the periphery of the guide plate is discharged outside the guide plate.

Furthermore, in the local air purification apparatus of the first and second viewpoints, the flow rate of the laminar flow blown by the first laminar flow generating device in the substantially orthogonal direction is the flow rate of the uniform air flow blown by the exhaust hood Three times to twenty-five times.

Furthermore, in the local air purification apparatus of the first aspect and the second aspect, the first laminar flow generating device sucks air upstream of the first laminar flow generating device in the uniform air flow. [Effect of invention]

According to the present invention, it is possible to provide a local area air purification device which can maintain high-definition clarity in the working space in actual operation by moving the dust generated in the clean air space due to the work out of the working space.

Hereinafter, the local area air purification device of the present invention will be described with reference to FIGS. 1 to 15.

(Embodiment 1) As shown in FIG. 1, the local air purification device 1 of the present embodiment includes an exhaust hood 2 arranged so as to face an air collision surface W of a wall, a partition plate, etc., and a guide provided in the exhaust hood 2 The plate 3 and the first laminar flow generating device 41 disposed in the guide plate 3. FIG. 1 is a view of the local area air purification device 1 viewed from the side. In this embodiment and the embodiments shown below, a case in which a table 5 is arranged in the guide plate 3 and a device 6 as a dust generating source for generating dust is provided on the table 5 as an example The local air purification device 1 will be described.

FIG. 1 shows a state where the device 6 generates dust and the first laminar flow generating device 41 is not in operation. The arrow in FIG. 1 (for example, arrow 28) shows the flow of the uniform air flow blown from the exhaust hood 2. Moreover, the color of the arrow indicates the degree of contamination in the guide plate 3. The darker the arrow, the more dust there is in the location. In FIG. 1, at the same height as the dust-generating device 6, the dust moves in the guide plate with a uniform air flow, and the clean air space in the guide plate is most polluted.

The uniform air flow and uniform flow mentioned here have the same meaning as the uniform flow described in "Workplace Ventilation" by Lin Taro (Air Conditioning, Sanitary Engineering Society, 1982), which means that it is uniform and continuous but not produced. The flow of the breeze at the large vortex section. However, the present invention does not provide an air blowing device that strictly regulates the flow velocity and velocity distribution of air. The uniform air flow is preferably such that, for example, the difference in velocity distribution in a state where there is no obstacle is within ±50% of the average value, and more preferably within ±30%.

The exhaust hood 2 only needs to have a mechanism for blowing out the purified uniform air flow, and can adopt the exhaust hood used in the push-pull type ventilation device as a basic structure and a filter for cleaning inside. structure.

The exhaust hood 2 of this embodiment connects nine (three vertical × three horizontal) exhaust hoods 2a with the aforementioned exhaust hood 2a so that the air flow opening faces are in the same direction and the exhaust hood 2a The short sides and the long sides are arranged adjacent to each other and connected together. The structure of the exhaust hood 2a is shown in FIG. In addition, the structure of the other connected exhaust hoods 2a is basically the same.

As shown in FIG. 2, the casing 21 of the exhaust hood 2 a is formed in a substantially rectangular parallelepiped shape, and an air flow suction surface 22 is formed on one surface of the casing 21. The air flow suction surface 22 is composed of, for example, a surface in which a plurality of holes are formed on the entire surface of the housing 21. At the air flow suction surface 22, the outdoor air or indoor air of the surrounding air outside the exhaust hood 2a is sucked from the aforementioned hole. Furthermore, an air blowing surface (air flow opening surface) 23 is formed on the other surface of the case 21 facing the air flow suction surface 22. The air flow opening surface 23 is, for example, a surface formed with a plurality of holes on the entire surface of the housing 21. At the air flow opening surface 23, a uniform air flow of clean air formed in the exhaust hood 2a is blown out of the hole to the outside of the exhaust hood 2a. Although the size of the air flow opening surface 23 of the exhaust hood 2a is not particularly limited, it may be 1050 mm×850 mm, for example.

The exhaust hood 2 is arranged such that the air flow opening surface 23 faces the air collision surface W such as a wall. Here, when the airflow opening surface 23 is opposed to the air collision surface W, the exhaust hood 2 is not limited to the state where the airflow opening surface 23 is directly facing the air collision surface W, for example, including the exhaust hood 2 The air flow opening surface 23 and the air collision surface W are slightly inclined. Regarding the inclination between the air flow opening surface 23 of the exhaust hood 2 and the air collision surface W, it is preferable that the angle formed by the air flow opening surface 23 and the air collision surface W is within a range of about 30°.

Inside the casing 21, an air blowing mechanism 24, a high-performance filter 25, and a rectifying mechanism 26 are arranged.

The air blowing mechanism 24 is arranged on the side of the air flow suction surface 22 in the casing 21. The air blowing mechanism 24 is constituted by a fan for blowing air, and the like. The air blowing mechanism 24 introduces outdoor air or indoor air that is the surrounding air of the exhaust hood 2 a from the air flow suction surface 22, and blows out the air flow from the air flow opening surface 23. In addition, the air blowing mechanism 24 is formed in such a manner that the flow rate of the airflow blown from the airflow opening surface 23 becomes variable by controlling the blowing force of the fan.

The high-performance filter 25 is arranged between the air blowing mechanism 24 and the rectifying mechanism 26. The high-performance filter 25 is composed of a HEPA filter (High Efficiency Particulate Air Filter) or a ULPA filter (Ultra Low Penetration Air Filter; ultra-low permeability air Filter) and other high-performance filters that meet the purification level. The high-performance filter 25 purifies the surrounding air introduced by the blower mechanism 24 into clean air of a desired clean level. The clean air purified by the high-performance filter 25 to the desired cleanliness level is sent to the rectification mechanism 26 by the air blowing mechanism 24.

The rectifying mechanism 26 is arranged between the high-performance filter 25 and the air flow opening surface 23. The rectifying mechanism 26 includes an air resistance body (not shown), and is formed of a punching plate, a mesh member, or the like. The rectifying mechanism 26 corrects (rectifies) the supply air that is biased with respect to the entire airflow opening surface 23 of the airflow blown from the high-performance filter 25 to the airflow opening surface 23 as a whole The amount becomes an unbiased uniform air flow (uniform air flow). The uniform air flow after rectification is blown out from the entire air flow opening surface 23 to the outside of the exhaust hood 2 by the air blowing mechanism 24.

Furthermore, as shown in FIG. 2, the exhaust hood 2 a is preferably provided with a prefilter 27 between the air flow suction surface 22 in the casing 21 and the air blowing mechanism 24. Examples of the pre-filter 27 include a medium-performance filter. By arranging the pre-filter 27 between the air flow suction surface 22 and the air blowing mechanism 24, the relatively large dust contained in the surrounding air drawn into the housing 21 through the air flow suction surface 22 can be removed, and it can be easily generated The performance of the high-performance filter 25 such as clogging can be maintained for a long time.

In the exhaust hood 2a configured in this way, the surrounding air introduced by the air blowing mechanism 24 is purified by the pre-filter 27 and the high-performance filter 25 to a desired level of clean air. Then, the purified clean air is rectified by the rectifying mechanism 26 into a uniform air flow. In this way, the purified uniform airflow is blown out from the entire airflow opening surface 23 to a direction substantially perpendicular to the airflow opening surface 23 of the exhaust hood 2a.

In addition, the flow velocity of the uniform air flow blown out from the air flow opening surface 23 is preferably 0.2 m/s to 0.7 m/s. This is because the uniform air flow moves in the guide plate 3 by extrusion when it is blown out at the flow rate in the aforementioned range, and it is easy to maintain the state of the uniform air flow in the guide plate 3.

One end of the guide plate 3 is provided on the air flow opening surface 23 side of the exhaust hood 2. The guide plate 3 is provided on the airflow opening surface 23 and extends from the airflow opening surface 23 toward the downstream side of the blown uniform airflow and is formed so as to cover the outer peripheral contour of the airflow opening surface 23 . For example, when the shape of the air flow opening surface 23 is a quadrangle, the cross-sectional shape of the guide plate 3 extends to form a U-shape. With such a U-shaped open side and the ground, the outer peripheral contour portion is covered in the blowing direction of the uniform air flow, and from the outer peripheral contour portion, parallel to the flow of the uniform air flow blown, it becomes the surrounding of the air flow Surrounded by a tunnel. The guide plate 3 is formed with an open area between the other end (opening surface 31) of the guide plate 3 and the air collision surface W. In addition, when the shape of the airflow opening surface 23 is a quadrangle, the cross-sectional shape may not be formed into a U-shape but may be formed into an O-shape.

The guide plate 3 can be formed of any material as long as it can maintain the airflow blown out from the opening surface 31 at a state of purified uniform airflow from the airflow opening surface 23. In addition, as long as the guide plate 3 can maintain the state of the purified uniform air flow from the air flow opening surface 23, the entire surrounding of the uniform air flow may not be completely covered, for example, a hole may be cut in a part, or a slit may be formed.

The guide plate 3 is arranged so that the opening surface 31 faces the air collision surface W. By arranging the opening surface 31 and the air collision surface W to face each other, the air flow blown from the opening surface 31 collides with the air collision surface W. For example, in the case where the opening surface 31 is directly facing the wall, when the uniform air current collides with the air collision surface W, it shows a behavior of changing to a substantially vertical flow direction. By flowing in this way, the airflow impinging on the air collision surface W flows out of the collision surface. As a result, a clean air space can be obtained in the area from the surface where the airflow hits to the end of the opening surface 31.

The shape of the opening surface 31 is preferably formed to be substantially the same shape as the air flow opening surface 23. This is because, by forming the opening surface 31 and the airflow opening surface 23 into substantially the same shape, it is easy to maintain the state of the uniform airflow blown out from the airflow opening surface 23 in the opening surface 31.

As shown in FIG. 1, the guide plate 3 configured in this way is provided (installed) from the air flow opening surface 23 side of the exhaust hood 2 toward the downstream side of the uniform air flow, and is provided at the downstream side end of the aforementioned guide plate 3 The opening surface 31 of the portion is arranged so as to face the air collision surface W. Thereby, an open area is formed between the opening surface 31 and the air collision surface W.

The first laminar flow generating device 41 blows out the laminar flow in a direction substantially orthogonal to the direction in which the uniform air flow is blown from the air flow opening surface 23. Then, the first laminar flow generating device 41 moves the dust generated in the guide plate 3 to the peripheral edge in the guide plate 3 by the laminar flow blown in a substantially orthogonal direction.

FIG. 3 shows how the first laminar flow generating device 41 blows out the laminar flow 41a.

Here, substantially orthogonal means that the direction in which the uniform air flow is blown (the direction of arrow 28) and the direction in which the laminar flow 41a is blown form an angle of approximately 90°, and an error of about ±10° is allowed, for example.

Furthermore, the peripheral edge in the guide plate 3 is the peripheral edge side (upper, lower, right, and left end sides) of a surface perpendicular to the flow of the uniform air flow. For example, in the case where the guide plate 3 extends into a U-shape, the periphery in the guide plate 3 is the inner top wall of the guide plate 3, both inner side surfaces of the guide plate 3, and the ground. In addition, when the guide plate 3 is extended and formed in a zigzag shape, the periphery in the guide plate 3 is the inner top wall of the guide plate 3, the inner side surface of the guide plate 3, and the inner bottom of the guide plate 3.

The first laminar flow generating device 41 is arranged on the downstream side of the device 6 for generating dust in the guide plate 3. The first laminar flow generating device 41 moves the dust that has flowed by the uniform air flow to the top wall side in the guide plate 3 by blowing the laminar flow 41a upward. In addition, it is desirable that the first laminar flow generating device 41 is close to the position where dust is generated.

The first laminar flow generating device 41 may be any device as long as it can generate a laminar flow. A device such as an electric fan that generates turbulent flow and causes dust to spread is not suitable.

Typically, a cross flow fan (or linear flow fan) is used as the first laminar flow generating device 41. As shown in FIG. 3, the cross-flow fan arranged on the downstream side of the table 5 sucks in the air 41b on the downstream side of the uniform air flow and blows out the laminar flow 41a. The first laminar flow generating device 41 includes a perforated plate and a mesh filter at the intake port of the intake air 41b. In addition, the first laminar flow generating device 41 includes a plate-like member having a honeycomb structure at the outlet of the laminar flow 41a. Since the outlet is provided with a plate-like member having a honeycomb structure, it is possible to reduce the deviation of the wind speed in the width direction of the laminar flow 41a.

The first laminar flow generating device 41 continuously blows out the laminar flow 41a while blowing a uniform air flow. The flow rate of the laminar flow 41a blown by the first laminar flow generating device 41 in a substantially orthogonal direction is preferably three times to twenty-five times the flow rate of the uniform air flow blown by the exhaust hood 2 and more preferably five times to Twenty times, and more preferably five to fifteen times.

By setting the flow velocity of the laminar flow 41a within the above range, the dust can be moved to the periphery of the guide plate 3 before the dust flows to the downstream side by the uniform air flow.

Moreover, the thickness of the laminar flow 41a blown out by the first laminar flow generating device 41 is preferably 50 mm to 200 mm.

By setting the thickness of the laminar flow 41a within the above range, the dust can be moved out of the working space. If it is thinner than the above range, the dust cannot move sufficiently, and the dust can flow to the downstream side. Furthermore, if it is thicker than the above range, it will affect the uniform air flow flowing in the horizontal direction.

Moreover, the width of the laminar flow 41a blown out by the first laminar flow generating device 41 preferably varies according to the width of the dust generating source (device 6), and it is further preferable to add at least about 200 mm to the width of the dust generating source .

By setting the width of the laminar flow 41a as described above, it is possible to prevent the dust from flowing downstream from the position where the dust is generated. In addition, the laminar flow 41a is covered with the airflow flowing beside the laminar flow 41a, and the airflow on the back side (downstream side) of the laminar flow 41a is attracted by the uniform airflow and merges with the uniform airflow. If the width of the dust generating source is too wide, the airflow on the back side will not be sufficiently attracted by the uniform airflow. If it is not sufficiently attracted, for example, in the case where the uniform air flow is 0.3 m/s, the velocity of the center of the air flow on the back side becomes 0.1 m/s, and the uniform air flow cannot be maintained in the part of the air flow on the back side. Therefore, the width of the laminar flow 41a blown out by the first laminar flow generating device 41 must be set to such a width that the airflow on the side and the back side can merge with the uniform airflow.

The exhaust hood 2 discharges the dust that has moved from the first laminar flow generating device 41 to the periphery of the guide plate 3 to the outside of the guide plate 3 by the uniform air flow blown from the air flow opening surface 23.

As shown in FIG. 3, the dust moved to the top wall side of the guide plate 3 is discharged along the top wall to the outside of the guide plate 3 along with the uniform air flow. Although the top wall side of the guide plate 3 is contaminated, it is possible to reduce the degree of contamination of the height of the table 5 where the dust-generating device 6 is placed. In addition, in the open area of FIG. 3, the arrow of the uniform air flow is described as an upward direction, but it is not limited thereto, and the uniform air flow in the open area is also blown out to the horizontal direction.

In general, work is rarely performed on the periphery of the guide plate near the top wall, side surface, or floor of the guide plate, and other areas are used as the work space. That is, according to the present embodiment, by moving the dust outside the work space that does not hinder the work, high-definition clarity can be maintained in the work space in actual work.

Moreover, the local area air purification device 1 of the present embodiment does not suck dust, but moves the dust outside the work space by the laminar flow blown from the first laminar flow generating device 41. Generally speaking, when the dust is moved by the blown laminar flow compared to the case where the dust is moved by suction, it can be moved farther with less flow. Thereby, according to the present embodiment, the dust can be moved out of the work space with a small flow rate, so the power required to discharge the dust generated during the work can be reduced.

In addition, in a local area air purification device that does not include the first laminar flow generating device 41, in the case where dust (contaminants) is generated in the guide plate, the flow rate of the uniform air flow is set to 0.2 m/s Compared with the situation in the case, it has been confirmed that the dust can be quickly removed by setting the velocity of the uniform air flow to about 0.5 m/s. That is, in the local area air purification device where the first laminar flow generating device 41 is not arranged, in order to quickly remove dust, it is necessary to accelerate the flow rate of the uniform air flow. On the other hand, in the local air purification device 1 of the present invention, dust can be quickly removed at a uniform air flow rate of 0.3 m/s.

The local area air purification device without the first laminar flow generating device 41 must quickly set the flow rate of the uniform air flow in order to quickly move the dust from the guide plate. However, the local area air purification device 1 of the present embodiment is based on The laminar flow blown from the first laminar flow generating device 41 moves the dust outside the working space, so there is no need to set the flow rate of the uniform air flow fast. Thereby, since the local area air purification device 1 of the present embodiment can set the flow rate to be slow, the noise value and power consumption can be suppressed, and the load of the pre-filter 27 and the high-performance filter 25 can be reduced.

In addition, the direction of the laminar flow 41a blown out by the first laminar flow generating device 41 is not limited to the upper direction, and can be any direction as long as it can move to the peripheral edge in the guide plate.

In addition, the first laminar flow generating device 41 may be configured to blow out the laminar flow 41a according to the timing of generating dust. For example, the first laminar flow generating device 41 has a function of detecting the generation of dust, and when the number of dust exceeds a predetermined first threshold, the first laminar flow generating device 41 can blow out the laminar flow 41a. Moreover, in the case where the number of dusts is below a predetermined second threshold, the first laminar flow generating device 41 may stop the blowing of the laminar flow 41a. Compared with the case where laminar flow is always blown out, this configuration can maintain high-definition clarity in actual operation with less power.

In the above embodiment, the present invention has been described by taking the case where the dust generating device 6 is provided on the table 5 disposed in the guide plate 3, for example, the present invention can also be applied to the air flow opening surface 23 When the device 6 for generating dust is provided on the downstream side floor, it is not limited to the case where the device 6 is provided on the table 5 disposed in the guide plate 3.

For example, in the case where the device 6 for generating dust is provided on the floor, the first laminar flow generating device 41 is arranged on the downstream side of the device 6 above the device 6, and the laminar flow can also be blown down to make the dust flow toward the floor Direction of movement.

In the above embodiment, the present invention has been described by taking the case where the dust generating source device 6 is provided in the guide plate 3 as an example, but it can also be applied to a local air purification device 1 that does not have a dust generating source .

Moreover, the local air purification device is not limited to the local air purification device 1 that is arranged such that the exhaust hood 2 faces the air collision surface W, for example, a pair of exhaust hoods 2 that are arranged to face each other may be used. Each exhaust hood 2 is provided with a partial area air purification device 1 of the guide plate 3.

(Embodiment 2) As shown in FIG. 4, the local air purification device 1 of the present embodiment includes an exhaust hood 2 arranged so as to face an air collision surface W of a wall, a partition plate, etc., and a guide provided in the exhaust hood 2 The plate 3 and the first laminar flow generating device 41 disposed in the guide plate 3.

The exhaust hood 2 and the first laminar flow generating device 41 of the present embodiment have the same structure as that of the first embodiment, so their description is omitted. Hereinafter, a configuration different from the first embodiment in the guide plate 3 will be described.

A hole is formed in the guide plate 3 at a position where the laminar flow 41 a blown out from the first laminar flow generating device 41 collides with the guide plate 3.

It is desirable that the size of the hole is larger than the collision surface of the laminar flow 41a when the laminar flow 41a collides with the guide plate 3 in a state where no hole is formed.

By forming the holes of the above-mentioned size, it is possible to prevent the dust moving in the laminar flow 41a from colliding with the inside of the guide plate 3 and staying in the guide plate 3, and efficiently discharged outside the guide plate 3.

The shape of the aforementioned cavity can be various shapes such as a circle and a rectangle, but it is expected to be similar to the shape of the laminar flow 41a blown out by the first laminar flow generating device 41.

For example, as shown in FIG. 4, in the case where the first laminar flow generating device 41 blows out the laminar flow 41 a upward, the cavity 32 is formed at the position of the top wall where the laminar flow 41 a collides. The first laminar flow generating device 41 discharges the dust generated in the guide plate 3 from the cavity 32 of the guide plate 3 by the laminar flow 41a blown out in a substantially orthogonal direction.

According to the present embodiment, since the dust does not need to be moved to the downstream side in the guide plate, the dust is quickly discharged to the outside of the guide plate, so it is possible to prevent contamination on the downstream side. In addition, in this embodiment, the flow rate of the laminar flow 41a blown out by the first laminar flow generating device 41 in a substantially orthogonal direction is preferably three to twenty-five times the flow rate of the uniform air flow blown by the exhaust hood 2, It is more preferably five times to twenty times, and even more preferably fifteen times to twenty times.

(Embodiment 3) As shown in FIG. 5, the local area air purification device 1 of the present embodiment includes an exhaust hood 2 arranged so as to face an air collision surface W of a wall, partition plate, etc., and a guide provided in the exhaust hood 2 The plate 3 is a first laminar flow generating device 41 arranged in the guide plate 3 and a second laminar flow generating device 42 arranged in the guide plate 3.

The exhaust hood 2, the guide plate 3, and the first laminar flow generating device 41 of the present embodiment have the same structure as that of the first embodiment, and therefore their description is omitted. Hereinafter, the second laminar flow generating device 42 will be described.

The second laminar flow generating device 42 has the same function as the first laminar flow generating device 41. The second laminar flow generating device 42 is disposed at a position close to the position where the laminar flow 41a blown from the first laminar flow generating device 41 collides with the guide plate 3 in the periphery of the guide plate 3, and is lower than the first laminar flow The generating device 41 is located on the downstream side.

The second laminar flow generating device 42 blows out the laminar flow 42a toward the opening surface 31 substantially parallel to the direction in which the uniform air flow is blown from the air flow opening surface 23.

Here, substantially parallel means that the direction in which the uniform air flow is blown and the direction in which the laminar flow 42a is blown form an angle of approximately 0°, for example, an error of about ±10° is allowed.

Furthermore, the second laminar flow generating device 42 blows out the laminar flow 42a substantially parallel to the flow rate of the uniform air flow. For example, as long as the flow velocity of the laminar flow 42a blown out by the second laminar flow generating device 42 is about thirty to forty times the uniform air flow, the dust can be discharged out of the guide plate 3 before being diffused into the work space.

Typically, a cross-flow fan is used as the second laminar flow generating device 42. As shown in FIG. 5, the cross-flow fan disposed on the top wall of the guide plate 3 sucks in the air 42 b below the cross-flow fan and blows out the laminar flow 42 a.

In this way, the second laminar flow generating device 42 discharges the dust that has moved from the first laminar flow generating device 41 into the periphery of the guide plate 3 to the outside of the guide plate 3 by the laminar flow 42 a blown out in substantially parallel. With this, the time during which the dust stays in the guide plate 3 can be shortened.

According to this embodiment, even if the guide plate is not deformed, dust can be quickly discharged outside the guide plate, and high-definition clarity can be maintained in the work space in actual work.

Moreover, according to the present embodiment, the suction effect achieved by the rapid airflow blown from the second laminar flow generating device can efficiently move the dust to the peripheral edge in the guide plate, thereby preventing the dust from falling to a low level s position.

(Embodiment 4) As shown in FIG. 6, the local air purification device 1 of the present embodiment includes an exhaust hood 2 disposed so as to face an air collision surface W of a wall, a partition plate, etc., and a guide provided in the exhaust hood 2 The plate 3 and the first laminar flow generating device 41 disposed in the guide plate 3.

The exhaust hood 2 and the guide plate 3 of the present embodiment have the same structure as the structure of the first embodiment, so their description is omitted. Hereinafter, the first laminar flow generating device 41 will be described.

Typically, a cross flow fan (or linear flow fan) is used as the first laminar flow generating device 41. As shown in FIG. 6, the cross-flow fan arranged on the downstream side of the table 5 sucks in the air 41 c on the upstream side of the uniform air flow and blows out the laminar flow 41 a. The first laminar flow generating device 41 is provided with a perforated plate and a mesh filter at the intake port of the intake air 41c. Furthermore, the first laminar flow generating device 41 includes a plate-like member having a honeycomb structure at the outlet of the laminar flow 41a.

The localized area air purification device 1 of the present embodiment achieves the same effect as the localized area air purification device 1 of the first embodiment, and can obtain a local area air purification device 1 superior to the first embodiment in terms of the reduction rate of the number of dusts. the result of.

In addition, the configuration of the first laminar flow generating device 41 having this embodiment is not limited to the aspect shown in FIG. 6. The first laminar flow generating device 41 of this embodiment can be replaced with the first laminar flow generating device 41 of the second and third embodiments. [Example]

Hereinafter, specific examples of the present invention are shown to further explain the present invention in detail.

(Example 1) Using the local area air purification device 1 of FIG. 3, the number of dust is measured at a plurality of measurement positions where the distance and height are changed.

FIG. 7 is a plan view of the partial area air purification device 1 in Embodiment 1.

The exhaust hood 2 of the local area air purification device 1 has an exhaust hood 2a having a width of 1050 mm and a length of 850 mm with the air flow opening surface of the exhaust hood 2 a in the same direction, and the short sides and long sides of the exhaust hood 2 a are It is formed by arranging them adjacent to each other (three in the vertical direction and nine in the horizontal direction). The size of the opening surface 31 of the exhaust hood 2 is 3150 mm in width and 2570 mm in height. In the local area air purification device 1, the purified uniform air flow flows at a flow rate of 0.3 m/s to form a clean air space.

In the local area air purification device 1 in which the uniform air flow flows in this way, 5.0×10 ⁷ [pieces/m ³ ] to 6.7×10 ⁷ [pieces/m ³ ] are generated from the device 6 provided on the table 5 Atmospheric dust. The device 6 blows out atmospheric dust by a pump. The height of the table 5 is 800 mm.

Furthermore, the first laminar flow generating device 41 is arranged at a position close to the device 6 and on the downstream side of the device 6. In the plane of FIG. 7, the center of the first laminar flow generating device 41 and the center of the device 6 are located on a straight line 7 extending in the x direction, and each center is located at a distance of 900 mm from the side of the guide plate in the y direction. The first laminar flow generating device 41 blows out a laminar flow 41a having a thickness (x direction in FIG. 7) of 55.7 mm and a width (y direction in FIG. 7) of 760 mm at a flow rate of 2.1 m/s or 4.6 m/s from above.

The measurement position of the number of dusts in the local air purification device 1 of FIG. 3 will be described using FIGS. 7 and 8.

As shown in FIG. 7, the distances from the upstream end of the first laminar flow generating device 41 in the uniform air flow on the straight line 7 to the downstream side of the uniform air flow are 1000mm, 2000mm, 3000mm, 4000mm, and 5000mm Let the measurement position be the x direction (hereinafter, referred to as "distance direction"). In addition, the positions where the distances from the straight line 7 to the y direction are 0 mm, 900 mm, and 1800 mm are used as the measurement positions in the depth direction.

FIG. 8 shows a side view of the local air purification device 1. At each measurement position on the plane shown in FIG. 7, positions at heights of 400 mm, 800 mm, 1500 mm, and 2200 mm from the floor are taken as measurement positions in the height direction.

Based on the above, the number of dust [pieces/m ³ ] is measured at a total of sixty measurement positions of five distance directions, three depth directions, and four height directions. The number of dusts [pieces/m ³ ] was measured by using LASAIR-II manufactured by PMS, and the number of dusts with a particle size of 0.1 μm at each measurement position was measured [pieces/m ³ ]. The measurement result is displayed by a class indicating the cleanliness of ISO14644-1. The levels representing the degree of cleanliness are divided into "level 1" to "level 9" based on the amount and particle size of dust. "Level 1" shows that the measured amount of dust [pieces/m ³ ] is the smallest, so the cleanliness is the highest. Each time the number of levels increases by one, the measured dust number [pieces/m ³ ] increases by one bit, so the display clarity decreases. Generally speaking, the level required for the clean room is below "level 5". Table 1 shows the measurement results.

[Table 1]

In Table 1, "the upward fan is turned off" means that the first laminar flow generating device 41 does not blow out the laminar flow. In addition, at a depth of 0mm, the velocity of 2.1m/s is better than the velocity of 4.6m/s. Therefore, at a velocity of 4.6m/s, the depth of 900mm and the depth of 1800mm are not performed. The determination.

As shown in Table 1, it was confirmed that at 800 mm near the height of the table 5, compared with the case where the laminar flow was not blown, the conditions of the flow velocity of 2.1 m/s and the condition of 4.6 m/s are all in the device that generates dust. The downstream side of 6 improves the cleanliness. That is, it was confirmed that contamination of the working space can be prevented on the downstream side of the dust generating device 6. Furthermore, it was confirmed that, at a height of 2200 mm and a height of 1500 mm, the conditions of the flow velocity of 2.1 m/s and the condition of 4.6 m/s are both on the downstream side of the dust generating device 6 compared with the case where the laminar flow is not blown out [ /M ³ ] increase. That is, it was confirmed that, on the downstream side of the dust-generating device 6, the dust moved to the top wall side of the guide plate 3 outside the work space. Furthermore, it was confirmed that at a height of 800 mm and a height of 400 mm, the conditions of a flow velocity of 2.1 m/s and the condition of a flow velocity of 4.6 m/s can achieve a degree of cleanliness of 5 or less at any distance. In addition, the conditions of flow velocity 2.1m/s obtained better results. In the case of having a top wall as in Example 1, if the flow velocity of the blown laminar flow is fast, the dust is diffused due to reflection, so it is considered that the condition of the flow velocity of 2.1 m/s can obtain better results.

(Example 2) Using the local-area air purification device 1 shown in FIG. 4, the number of dust is measured at a plurality of measurement positions where the distance and height are changed.

The exhaust hood 2 and the method for measuring the cleanliness of the local air purification device 1 are the same as in Example 1. In addition, as in Example 1, the flow velocity of the uniform air flow is 0.3 m/s, and the flow velocity of the laminar flow 41a generated by the first laminar flow generating device 41 is 2.1 m/s or 4.6 m/s. The number of atmospheric dust generated from the device 6 is 3.3×10 ⁷ [pieces/m ³ ] to 4.0×10 ⁷ [pieces/m ³ ].

The measurement position of the number of dusts in the local air purification device 1 of FIG. 4 will be described using FIGS. 7 and 9.

The measurement position of the plane is the same as in Example 1 (FIG. 7). FIG. 9 is a side view showing the local air purification device 1. The measurement position in the height direction is also the same as in Example 1 (FIG. 8 ).

Here, the cavity 32 formed in the guide plate 3 is provided at a position where the laminar flow 41 a blown out from the first laminar flow generating device 41 hits the guide plate 3. In detail, a straight line passing through the end of the upstream side of the first laminar flow generating device 41 in the vertical direction (the direction of the top wall of the guide plate 3 in FIG. 8) in the distance direction (the x direction in FIG. 7) will hit the guide plate The position of the top wall of 3 serves as the starting point of the hole. The shape of the cavity 32 formed in the guide plate 3 is rectangular, and the size is set to a size of 500 mm in the vertical direction (x direction in FIG. 7) and 1000 mm in the horizontal direction (y direction in FIG. 7 ).

Based on the above, the number of dust [pieces/m ³ ] was measured at a total of sixty measurement positions of five distance directions, three depth directions, and four height directions. In the same manner as in Example 1, the measurement result is displayed by a level indicating the degree of clarity of ISO14644-1. Table 2 shows the measurement results.

[Table 2]

As shown in Table 2, it was confirmed that at a height of 800 mm and a height of 400 mm, the conditions of a flow velocity of 2.1 m/s and 4.6 m/s are both downstream of the device 6 that generates dust, compared with the case where laminar flow is not blown out The lateral center improves the clarity. That is, it was confirmed that contamination of the working space can be prevented on the downstream side of the dust generating device 6. Furthermore, it was confirmed that even at a height of 1500 mm, when the flow velocity is 4.6 m/s, the degree of clarity is also improved. Furthermore, it was confirmed that at the height of 2200 mm, the conditions of the flow velocity of 2.1 m/s and the condition of the flow velocity of 4.6 m/s both increased on the downstream side of the dust generating device 6 [number/m ³ ]. That is, it was confirmed that the dust moved to the vicinity of the top wall outside the work space on the downstream side of the dust-generating device 6. It was also confirmed that at a height of 800 mm and a height of 400 mm, the conditions of a flow velocity of 2.1 m/s and a flow velocity of 4.6 m/s can achieve a degree of cleanliness of ISO14644-1 level 4 or less at any distance, but the approximate flow velocity is 4.6 m /s condition can get better results. Furthermore, it was confirmed that, at a flow velocity of 4.6 m/s, even at a height of 1500 mm, it had a degree of cleanliness of 5 or less. As in Example 2 in the case where the top wall has holes, it is confirmed that the faster the flow rate of the blown laminar flow, the better the result obtained. Furthermore, when the conditions of the flow velocity of 2.1 m/s in Example 1 and the condition of the velocity of 4.6 m/s in Example 2 were compared, it was confirmed that at a height of 800 mm, under the condition of the velocity of 4.6 m/s in Example 2, The level below 3 is more, and the dust quantity [pieces/m ³ ] is less. That is, it was confirmed that the dust can be discharged to the outside of the guide plate 3 more quickly than in Example 1.

(Example 3) Using the local area air purification device 1 shown in FIG. 5, the number of dust is measured at a plurality of measurement positions where the distance and height are changed.

The exhaust hood 2 and the method for measuring the cleanliness of the local air purification device 1 are the same as in Example 1. In addition, as in Example 1, the flow velocity of the uniform air flow is 0.3 m/s, and the flow velocity of the laminar flow 41a generated by the first laminar flow generating device 41 is 2.1 m/s or 4.6 m/s. The number of atmospheric dust generated from the device 6 is 2.9×10 ⁷ [pieces/m ³ ] to 4.8×10 ⁷ [pieces/m ³ ].

Furthermore, the second laminar flow generating device 42 directs the laminar flow 42a having a thickness (x direction in FIG. 7) of 55.7 mm and a width (y direction in FIG. 7) of 760 mm toward the opening of the guide plate at a flow rate of 9.5 m/s or 11.5 m/s. Face 31 blows out.

The measurement position of the number of dusts in the local air purification device 1 of FIG. 5 will be described using FIGS. 7 and 10.

The measurement position of the plane is the same as in Example 1 (FIG. 7). FIG. 10 is a side view showing the local air purification device 1. The measurement position in the height direction is also the same as in Example 1 (FIG. 8 ).

Here, the second laminar flow generating device 42 is arranged at a position close to the position where the laminar flow 41a blown out from the first laminar flow generating device 41 collides with the guide plate 3, and is downstream of the first laminar flow generating device 41 Sideways. As shown in FIG. 10, the position in the distance direction where the second laminar flow generating device 42 is arranged is a point where the distance from the upstream end of the first laminar flow generating device 41 to the downstream side of the uniform air flow is 1000 mm. Moreover, in the plane of FIG. 7, the center of the second laminar flow generating device 42 is located on the straight line 7, and the center is a position that is 900 mm away from the side surface of the guide plate 3 in the depth direction.

Based on the above, the number of dust [pieces/m ³ ] was measured at a total of sixty measurement positions of five distance directions, three depth directions, and four height directions. In the same manner as in Example 1, the measurement result is displayed by a level indicating the degree of clarity of ISO14644-1. The measurement results of the case where the flow velocity of the laminar flow 42a blown by the second laminar flow generating device 42 is 9.5 m/s are shown in Table 3, and the measurement results when the flow velocity is 11.5 m/s are shown in Table 4.

[table 3]

[Table 4]

In addition, both conditions of the flow velocity of the laminar flow 42a blown out from the second laminar flow generating device 42 are 9.5 m/s and the flow velocity 11.5 m/s are at a depth of 0 mm, because the layer blown out from the first laminar flow generating device 41 The condition of the flow rate of 2.1 m/s of the flow 41a obtained better results than the condition of the flow rate of 4.6 m/s. Therefore, at a flow rate of 4.6 m/s, the depth of 900 mm and the depth of 1800 mm were not measured.

As shown in Table 3 and Table 4, it was confirmed that at 800 mm and 400 mm near the height of the table 5, the condition of the flow velocity of 2.1 m/s and the condition of the velocity of 4.6 m/s were compared with the case where the laminar flow was not blown out Both improve the cleanliness on the downstream side of the dust generating device 6. That is, it was confirmed that contamination of the working space can be prevented on the downstream side of the dust generating device 6. Furthermore, it was confirmed that at the height of 2200 mm and the height of 1500 mm, the conditions of the flow velocity of 2.1 m/s and the condition of the flow velocity of 4.6 m/s both increased on the downstream side of the dust generating device 6 [number/m ³ ]. That is, it was confirmed that, on the downstream side of the dust-generating device 6, the dust moved to the top wall side of the guide plate 3 outside the work space. Furthermore, it was confirmed that at a height of 800 mm and a height of 400 mm, the degree of cleanliness of ISO14644-1 level 5 or less can be achieved at any distance. Furthermore, when the conditions of 11.5 m/s in Example 1 and Example 3 were compared, it was confirmed that under the condition of 11.5 m/s in Example 3 at a height of 800 mm, there were more grade 3 or less and the number of dusts [number /m ³ ] less. That is, it can be confirmed that the dust can be quickly discharged out of the guide plate 3 without applying deformation such as openings to the guide plate 3.

(Example 4) In the local area air purification device 1 of FIG. 5, the position of the second laminar flow generating device 42 is changed and the number of dust is measured at a plurality of measurement positions.

The exhaust hood 2 and the method for measuring the cleanliness of the local air purification device 1 are the same as in Example 1. Further, as in Example 1, the flow velocity of the uniform air flow is 0.3 m/s, and the flow velocity of the laminar flow 41a generated by the first laminar flow generating device 41 is 2.1 m/s. The number of atmospheric dust generated from the device 6 is 5.0×10 ⁷ [pieces/m ³ ] to 6.7×10 ⁷ [pieces/m ³ ].

Then, the second laminar flow generating device 42 blows out the laminar flow 42a having a thickness (x direction in FIG. 7) of 55.7 mm and a width (760 direction in FIG. 7) of 760 mm toward the opening surface 31 of the guide plate at a flow rate of 11.5 m/s.

The position of the second laminar flow generating device 42 will be explained using FIGS. 11A to 11C. The second laminar flow generating device 42 is arranged at three positions based on the first laminar flow generating device 41. As shown in FIG. 11A, in the first position, the second laminar flow generating device 42 is arranged at a downstream side of 1000 mm from the upstream end of the first laminar flow generating device 41. Specifically, it is arranged so that the laminar flow 42a of the second laminar flow generating device 42 is blown out from a position that is 1000 mm downstream from the upstream end of the first laminar flow generating device 41. As shown in FIG. 11B, the second position is to arrange the second laminar flow generating device 42 directly above the first laminar flow generating device 41. In detail, the upstream end of the first laminar flow generating device 41 and the upstream end of the second laminar flow generating device 42 in the distance direction (x direction in FIG. 7) are arranged in the same manner. As shown in FIG. 11C, the third position is arranged on the upstream side of the first laminar flow generating device 41 on the upstream side by 1000 mm. In detail, the laminar flow 42a of the second laminar flow generating device 42 is blown out from the position on the upstream side of the upstream side of the first laminar flow generating device 41 by 1000 mm.

In FIGS. 11A to 11C, the measurement position of the number of dusts [pieces/m ³ ] in the local air purification device 1 is set to a location at a distance of 1000 mm, a depth of 0 mm, a height of 400 mm, 800 mm, 1500 mm, and 2200 mm. That is, the number of dusts [number/m ³ ] is measured at a total of twelve measurement positions at three positions in the second laminar flow generating device 42, one in the distance direction, one in the depth direction, and four in the height direction. In the same manner as in Example 1, the measurement results are displayed in a level indicating the degree of clarity of ISO14644-1. Table 5 shows the measurement results.

In addition, in Table 5, the position of the second laminar flow generating device 42 shown in FIG. 11A is defined as the position of the top wall fan + 1000 mm, and the position of the second laminar flow generating device 42 shown in FIG. 11B is defined as the position of the top wall fan 0mm, the position of the second laminar flow generating device 42 shown in FIG. 11C is defined as the position of the top wall fan-1000mm.

[table 5]

As shown in Table 5, it was confirmed that when the second laminar flow generating device 42 is disposed on the downstream side of the first laminar flow generating device 41 (FIG. 11A) at a height of 800 mm and a height of 400 mm, the highest definition clarity is displayed. . This is considered to be because the laminar flow 42a of the second laminar flow generating device 42 disposed directly above (FIG. 11B) and upstream (FIG. 11C) will wash away the dust below the second laminar flow generating device 42.

(Example 5) The number of dust is measured in the local area air purification device 1 of the first laminar flow generating device 41 having different suction port positions.

12A to 12C are side views of the local air purification device 1. The first laminar flow generating device 41 of the local area air purification device 1 of FIGS. 12A to 12C is disposed at a position close to the device 6 and at the downstream side of the device 6, the center of the first laminar flow generating device 41 and the device The center of 6 is arranged on the same straight line. The first laminar flow generating device 41 of FIG. 12A sucks in the air 41b on the downstream side and blows out the laminar flow 41a. The first laminar flow generating device 41 of FIG. 12B sucks in the air 41c on the upstream side and blows out the laminar flow 41a. The first laminar flow generating device 41 of FIG. 12C sucks in air 41d from the ground and blows out the laminar flow 41a.

The method of measuring the exhaust hood 2 and the number of dusts in the local air purification device 1 in FIGS. 12A to 12C is the same as in Example 1. The velocity of the uniform air flow is 0.3 m/s, and the number of atmospheric dust generated from the device 6 is 5.0×10 ⁷ [pieces/m ³ ] to 6.7×10 ⁷ [pieces/m ³ ].

With respect to the measurement position of the dust in the local air purification device 1 of FIGS. 12A to 12C, the distance from the downstream end of the first laminar flow generating device 41 in the uniform air flow to the downstream side of the uniform air flow is 1000 mm, the height from the floor is 800 mm, and the position on the straight line passing through the centers of the first laminar flow generating device 41 and the device 6 is the measurement position.

In the above measurement positions, the number of dusts in the case where the outlet size of the first laminar flow generating device 41 of FIGS. 12A to 12C is 25 mm, 50 mm, and 100 mm, and the blowing wind speed is 1 m/s to 6 m/s is measured. In the same manner as in Example 1, the measurement result is displayed by a level indicating the degree of clarity of ISO14644-1. Table 6 shows the measurement results.

[Table 6]

In Table 6, “closed” indicates that the first laminar flow generating device 41 does not blow out the laminar flow, and “open” indicates that the first laminar flow generating device 41 is blowing out the laminar flow. As shown in Table 6, it was confirmed that, compared with the case where the laminar flow was not blown, one of the conditions of suction on the downstream side (Figure 12A), suction on the upstream side (Figure 12B), and suction on the floor surface (Figure 12C) Under the condition of upstream suction (Fig. 12B), the cleanliness is maximized. Furthermore, it was confirmed that, under the condition that the position of the inhalation is the inhalation on the upstream side (FIG. 12B ), compared with the case where the laminar flow is not blown, the cleanliness is obtained in the case where the outlet size is 50 mm among 25 mm, 50 mm, and 100 mm. Maximum improvement. That is, it was confirmed that the size of the blowout outlet is preferably 50 mm. Furthermore, it was confirmed that the cleanliness was the highest under the conditions where the position of inhalation was upstream inhalation, the outlet size was 50 mm, and the blowing wind speed was 4 m/s.

(Example 6) Using the local area air purification device 1 provided with the first laminar flow generating device 41 whose suction port is located on the upstream side, the number of dust is measured at a plurality of measurement positions where the distance and height are changed.

13 is a side view of the partial area air purification device 1 including the first laminar flow generating device 41 whose suction port is located on the upstream side.

The method of measuring the exhaust hood 2 and the number of dusts in the local air purification device 1 of FIG. 13 is the same as that of the first embodiment. The velocity of the uniform air flow is 0.3 m/s, and the number of atmospheric dust generated from the device 6 is 5.0×10 ⁷ [pieces/m ³ ] to 6.7×10 ⁷ [pieces/m ³ ].

As shown in FIG. 13, the distance from the downstream end of the first laminar flow generating device 41 to the downstream side of the uniform air flow is 1000 mm, 2000 mm, and 3000 mm, and the height from the floor is 800 mm, 1200 mm, and passes through the first The positions on the straight lines of the centers of the laminar flow generating device 41 and the device 6 are defined as measurement positions.

At the above measurement position, the number of dusts in the case where the outlet size of the first laminar flow generating device 41 in FIG. 13 is 50 mm and the blowing wind speed is 2 m/s to 4 m/s is measured. In the same manner as in Example 1, the measurement result is displayed by a level indicating the degree of clarity of ISO14644-1. Table 7 shows the measurement results.

[Table 7]

In Table 7, "closed" indicates that the first laminar flow generating device 41 does not blow laminar flow, and "open" indicates that the first laminar flow generating device 41 blows laminar flow. As shown in Table 7, it was confirmed that at a height of 800 mm and a height of 1200 mm, the wind speed is 2 m/s and 3 m/s, and the wind speed is 4 m/s. Compared with the case where no laminar flow is blown, the cleanliness is Improved. That is, it was confirmed that the blowing wind speed of the first laminar flow generating device 41 is preferably 4 m/s.

(Example 7) The wind speed in the local air purification device 1 when the laminar flow was blown by the first laminar flow generating device 41 was measured.

14A, 14B, 15A, and 15B, the exhaust hood 2 of the partial-area air purification device 1 has an exhaust hood 2a with a width of 1050 mm and a length of 850 mm in the same direction as the air flow opening surface of the exhaust hood 2a. The short sides and the long sides of the exhaust hood 2a are arranged adjacent to each other (three in the vertical direction × fifteen in the horizontal direction), and the size of the opening surface 31 of the exhaust hood 2 is 5250mm wide. The height is 2570mm. The uniform air flow blown from the exhaust hood 2 flows at a flow rate of 0.3 m/s and a clean air space is formed.

FIGS. 14A and 14B show a top view and a side view of the partial area air purification device 1 when the first laminar flow generating device 41 blows out the laminar flow 41a, and FIGS. 15A and 15B show the direction of the first laminar flow generating device 41. A plan view and a side view of the partial area air purification device 1 when the laminar flow 41a is blown out laterally (y direction).

The workbench 5 is located in the center of the local area air purification device 1 in the y direction, and the first laminar flow generating device 41 of FIGS. 14A, 14B, 15A, and 15B is disposed close to the workbench 5 and the workbench 5 on the downstream side. As shown in FIGS. 14A and 14B, the center of the first laminar flow generating device 41 that blows up the laminar flow and the center of the table 5 are located on the straight line 8. Further, as shown in FIGS. 15A and 15B, the first laminar flow generating device 41 that laterally blows out the laminar flow is located at the downstream end of the table 5.

In the case where the laminar flow first laminar flow generating device 41 is blown upward, as shown in FIG. 14A, the downstream side end of the first laminar flow generating device 41 in the uniform air flow is directed toward the downstream side of the uniform air flow The locations where the distances in the (x direction) are 1000 mm, 2000 mm, and 3000 mm are the measurement positions in the distance direction. In addition, the point where the distance from the straight line 8 in the y direction is -400 mm, 0 mm, and +400 mm is used as the measurement position in the depth direction. Further, as shown in FIG. 14B, the locations with heights of 400 mm, 800 mm, 1200 mm, and 1600 mm from the floor are taken as the measurement positions in the height direction.

In the case of the first laminar flow generating device 41 that blows out the laminar flow laterally, as shown in FIG. 15A, the downstream side end of the first laminar flow generating device 41 in the uniform air flow is directed to the downstream side of the uniform air flow The locations where the distances in the (x direction) are 1000 mm, 2000 mm, and 3000 mm are the measurement positions in the distance direction. In addition, the point where the distance from the outlet of the first laminar flow generating device 41 in the y direction is 0 mm, 400 mm, 800 mm, and 1200 mm is the measurement position in the depth direction. Further, as shown in FIG. 15B, the locations with heights of 400 mm, 800 mm, and 1200 mm from the floor are measured positions in the height direction.

At the above measurement position, the wind speed [m/s] was measured. Table 8 shows the measurement results of the first laminar flow generating device 41 in which the laminar flow is blown upward, and Table 9 shows the measurement results of the first laminar flow generating device 41 in which the laminar flow is blown laterally.

[Table 8]

[Table 9]

In Table 8, "upflow upward" indicates the case where the first laminar flow generating device 41 blows out the laminar flow, and "upstream flow closed" indicates the case where the first laminar flow generating device 41 does not blow out the laminar flow. As shown in Table 8, it was confirmed that under the conditions of "upward airflow open" and "upward airflow closed", the wind speed distribution was within ±50%, respectively. Furthermore, it was confirmed that there is almost no difference in the distribution of airflow under the conditions of "upflow is on" and "upflow is off".

In Table 9, "lateral air flow open" indicates the case where the first laminar flow generating device 41 blows out the laminar flow, and "lateral air flow closed" indicates the case where the first laminar flow generating device 41 does not blow out the laminar flow. As shown in Table 9, it was confirmed that under the conditions of "lateral air flow open" and "lateral air flow closed", the wind speed distribution was within ±50%, respectively. Furthermore, it was confirmed that there was almost no difference in the distribution of airflow under the conditions of "lateral airflow open" and "lateral airflow closed".

As shown in Table 8 and Table 9, it is confirmed that the direction of the laminar flow of the first laminar flow generating device 41 and whether or not the laminar flow does not affect the wind speed distribution. That is, it is confirmed that the laminar flow blown by the first laminar flow generating device 41 does not affect the flow of the uniform air flow.

In addition, as long as the present invention does not depart from the broad spirit and scope of the present invention, various embodiments and changes can be made. Moreover, the foregoing embodiments are used to explain the present invention, not to limit the scope of the present invention. That is, the scope of the present invention is not indicated by the embodiment, but by the scope of patent application. In addition, various changes implemented within the scope of the patent application and within the scope of the meaning of the invention equivalent to the scope of the patent application are also deemed to be within the scope of the present invention.

The present invention is based on Japanese Patent Application No. 2018-157443 filed at the Japan Patent Office on August 24, 2018. This specification refers to the specification of Japanese Patent Application No. 2018-157443, the scope of patent application, and the drawings as a whole and is incorporated herein. (Industry availability)

According to the present invention, it is possible to provide a local area air purification device which can maintain high-definition clarity in the working space in actual operation by moving the dust generated in the clean air space due to the operation outside the working space.

1: Local area air purification device 2. 2a: exhaust hood 3: Guide 5: Workbench 6: device 7, 8: straight line 21: Shell 22: Air flow suction surface 23: Air blowing surface (air flow opening surface) 24: Air supply mechanism 25: High performance filter 26: Rectifier 27: Pre-filter 28: Arrow 31: Open face 32: Hole 41: The first laminar flow generating device 41a: Laminar flow 41b, 41c, 41d: air 42: Second laminar flow generating device 42a: Laminar flow 42b: Air W: Air collision surface x, y: direction

FIG. 1 is a diagram showing an example of a local area air purification device of Embodiment 1. FIG. FIG. 2 is a diagram showing the structure of the exhaust hood. FIG. 3 is a diagram showing an example of a local area air purification device of Embodiment 1. FIG. FIG. 4 is a diagram showing an example of a local area air purification device of Embodiment 2. FIG. FIG. 5 is a diagram showing an example of a local area air purification device of Embodiment 3. FIG. FIG. 6 is a diagram showing an example of a local area air purification device of Embodiment 4. FIG. FIG. 7 is a plan view of the partial area air purification device of Embodiment 1 to Embodiment 3. FIG. 8 is a side view of the local area air purification device of Embodiment 1. FIG. 9 is a side view of the local area air purification device of Embodiment 2. FIG. FIG. 10 is a side view of the partial area air purification device of Embodiment 3. FIG. 11A is a side view of the local area air purification device of Embodiment 4. FIG. 11B is a side view of the local area air purification device of Embodiment 4. FIG. 11C is a side view of the local area air purification device of Embodiment 4. FIG. 12A is a side view of the local area air purification device of Embodiment 5. FIG. 12B is a side view of the local area air purification device of Embodiment 5. FIG. 12C is a side view of the local area air purification device of Embodiment 5. FIG. FIG. 13 is a side view of the local area air purification device of Embodiment 6. FIG. 14A is a plan view of a partial area air purification device of Embodiment 7. FIG. 14B is a side view of the partial area air purification device of Embodiment 7. FIG. 15A is a plan view of a partial area air purification device of Embodiment 7. 15B is a side view of the partial area air purification device of Embodiment 7. FIG.

1: Local area air purification device

2: exhaust hood

3: Guide

5: Workbench

6: device

23: Air blowing surface (air flow opening surface)

31: Open face

41: The first laminar flow generating device

41a: Laminar flow

41b: Air

W: Air collision surface

Claims (5)

A local area air purification device, including: The exhaust hood has an air flow opening face for blowing out the purified uniform air flow; and The guide plate is provided on the air flow opening face side of the exhaust hood, extends from the air flow opening face side toward the downstream side of the uniform air flow, and forms an opening face at the downstream end; The exhaust hood is arranged such that the purified uniform air flow blown out from the opening surface of the air flow hits the air collision surface on the downstream side of the opening surface of the guide plate after passing through the guide plate, and the guide plate The opening surface of the is separated from and facing the air collision surface, thereby forming an open area between the opening surface of the guide plate and the air collision surface; The purified uniform airflow blown out from the airflow opening surface collides with the air collision surface and flows out of the open area, thereby making the cleanliness inside the guide plate and the open area higher than the cleanliness of other areas Cleanliness The local area air purification device further includes: a first laminar flow generating device, which is disposed downstream of the dust generation position in the guide plate, and is substantially positive in the direction of blowing the uniform air flow from the air flow opening surface Laminar flow is blown in the direction of intersection; The first laminar flow generating device moves the dust generated in the guide plate to the peripheral edge in the guide plate by the laminar flow blown out in the substantially orthogonal direction; The exhaust hood discharges the dust that has moved from the first laminar flow generating device into the periphery of the guide plate to the outside of the guide plate by the uniform air flow blown from the air flow opening surface. The local area air purification device according to claim 1, further comprising: a second laminar flow generating device disposed in the periphery of the guide plate collides with the laminar flow blown from the first laminar flow generating device The guide plate is located at a position close to and downstream of the first laminar flow generating device, and blows out the laminar flow toward the opening surface substantially parallel to the direction in which the uniform air flow is blown from the air flow opening surface; The second laminar flow generating device blows out the laminar flow substantially parallel to the flow rate faster than the flow rate of the uniform air flow; The second laminar flow generating device discharges the dust that has moved from the first laminar flow generating device into the peripheral edge of the guide plate to the outside of the guide plate by the laminar flow blown out substantially in parallel. A local area air purification device, including: The exhaust hood has an air flow opening face for blowing out the purified uniform air flow; and The guide plate is provided on the air flow opening face side of the exhaust hood, extends from the air flow opening face side toward the downstream side of the uniform air flow, and forms an opening face at the downstream end; The exhaust hood is arranged such that the purified uniform air flow blown out from the opening surface of the air flow passes through the guide plate and collides with the air collision surface on the downstream side of the opening surface of the guide plate, and the The opening surface is separated from and facing the air collision surface, thereby forming an open area between the opening surface of the guide plate and the air collision surface; The purified uniform airflow blown out from the airflow opening surface collides with the air collision surface and flows out of the open area, thereby making the cleanliness inside the guide plate and the open area higher than the cleanliness of other areas Cleanliness The local area air purification device further includes: a first laminar flow generating device, which is disposed downstream of the dust generation position in the guide plate, and is substantially positive in the direction of blowing the uniform air flow from the air flow opening surface Laminar flow is blown in the direction of intersection; A hole is formed in the guide plate at a position where the laminar flow blown from the first laminar flow generating device collides with the guide plate; The first laminar flow generating device blows out the laminar flow in the substantially orthogonal direction, thereby discharging the dust generated in the guide plate from the hole to the outside of the guide plate. The local area air purification device according to any one of claims 1 to 3, wherein the flow rate of the laminar flow blown by the first laminar flow generating device in the substantially orthogonal direction is the uniform air blown by the exhaust hood The flow rate of air flow is three times to twenty-five times. The partial area air purification device as described in any one of claims 1 to 3, wherein the first laminar flow generating device sucks air upstream of the first laminar flow generating device in the uniform air flow.

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