JP7141363B2 - air shower device - Google Patents

Description

The present invention relates to an air shower device that is installed at the entrance/exit of a work space where semiconductors, precision machinery, etc. are manufactured and food processing is performed, and removes dust, pollen, etc. adhering to workers with an air shower.

Japanese Patent Laid-Open No. 2002-200001 describes an "air cleaning system for a front chamber of a clean room" in which a large number of air showers are arranged to form a continuous walkway. In this patent document 1, it is also possible to provide a curved path in the walking path and use the corner part as an air shower zone so that the whole body can be washed evenly by changing the walking direction of the pedestrian. ” is stated.

JP-A-2-101339

The aforementioned Patent Document 1 describes an air cleaning system for a front room of a clean room in which a winding path is provided in a walkway. However, the air cleaning method described in Patent Document 1 does not remove dust even if the walking direction of the occupant is changed due to the winding road, because there are few places where air is blown to the front and back of the body and the air blowing time is short. I have a problem that I can't solve. In addition, if a winding path is to be provided, a large space is required at the installation location, and if there is no space and the winding path cannot be provided, the dust adhering to the front and back of the body will not be sufficiently removed. In addition, the air blown out from the air shower in the final process becomes a turbulent air flow when it is blown to the people entering the room, so there is a risk that the air curtain in the exit area will not be able to suppress the floating dust and may flow into the clean room. be.

To provide an air shower device capable of blowing air to the front and back of the body to remove dust on the front and back even if the user walks in the air shower without changing the direction of the body. That's what it is.

To give an example of a representative "air shower device" of the present invention for solving the above problems,
This is an air shower device that removes dust by blowing air from air blowing nozzles installed on the side and ceiling of the walkway to the people entering the room. Alternately, a plurality of projecting parts of the housing are provided protruding into the walking passage, and an air blowing nozzle inclined with respect to the center line connecting the entrance and the exit is arranged on the projecting parts of the housing, so that the front and back of the occupants can be seen. and the air blowing nozzles provided on the side of the walking passage and the inclined air blowing nozzles are arranged so that the height positions thereof are gradually lowered at predetermined intervals from the entrance to the exit. It is something to do.

To provide an air shower device capable of blowing air to the front and rear surfaces of a person's body to remove dust on the front and rear surfaces even if the person walks in the air shower without changing the direction of the body. be able to.

Problems, configurations, and effects other than those described above will be clarified by the following description of the embodiments.

1 is a cross-sectional plan view showing an air shower device according to Embodiment 1 of the present invention; FIG. FIG. 2 is an explanatory diagram showing a configuration form of a side wall of a walking passage of the air shower device shown in FIG. 1; FIG. 2 is a sectional front view of the air shower device shown in FIG. 1; FIG. 2 is a perspective view of a walkway side wall of the air shower device shown in FIG. 1, seen through the front unit; FIG. 2 is a cross-sectional plan view showing an air shower device according to Embodiment 2 of the present invention; FIG. 10 is an explanatory view showing the configuration of the side wall of the walking passage of the air shower device of Example 3 of the present invention;

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in each drawing for explaining the embodiments, the same components are given the same names and symbols as much as possible, and the repeated description thereof is omitted.

FIG. 1 is a cross-sectional plan view of an air shower device according to Embodiment 1 of the present invention, FIG. 2 is an explanatory view showing the configuration of the side wall of the walkway, FIG. 3 is a cross-sectional front view of the air shower device, and FIG. Fig. 10 is a perspective view of the walkway sidewall through the side housing;

In the figure, the air shower device has a large number of air shower units 2 arranged in a straight line to form a continuous walking path. The air shower device is provided with a plurality of air blowing nozzles for blowing out air, and a top nozzle 10 is provided on the ceiling of the walkway, and a side nozzle 11 is provided on the side. The nozzle 11 is provided in a direction perpendicular to a center line 7 connecting the inlet 5 and the outlet 6 of the air shower device. Furthermore, a direction inclined at an angle θ with respect to the center line 7 so that air is also blown against the front and back of the person entering the room 1 to the housing projecting portion 20 projecting from the side of the walkway toward the walkway. A nozzle 12 for the front surface and a nozzle 13 for the rear surface for blowing air are provided. A plurality of housing protrusions 20 are provided so as to alternately protrude into the walking path from both side surfaces of the linear walking path while shifting their positions in the direction of the walking path. The inclination angle θ of the front nozzle 12 and the rear nozzle 13 with respect to the center line is preferably 30°<θ<60°, but is not limited to this. At this time, as shown in FIG. 2, the side nozzles 11, the front nozzles 12, and the rear nozzles 13 are arranged so that the height of the nozzles gradually decreases from the inlet 5 toward the outlet 6 at predetermined intervals. is doing. Further, as indicated by arrows in FIG. 2, the wind speed of the air blown out from the top surface nozzle 10 provided on the ceiling is gradually weakened from the inlet 5 to the outlet 6 . In order to weaken the wind speed of the blown air, for example, the number of revolutions of the fan that blows the air should be lowered.

In the air shower unit 2, 21 is an air inlet for sucking air in the air shower chamber, 22 is a pre-filter for collecting large dust in the air, 23 is a main filter for collecting dust in the air and filtering the air. 25 is a fan rotated by a motor. Also, 26 on the side of the air shower unit 2 is a guide light. The final unit 3 facing the clean room is provided with an air curtain device 4 to form an air curtain extending from the ceiling to the bottom. The numbers of air shower units 2 and nozzles are not limited to those shown in the figure.

When the occupant 1 advances through the air shower device from the entrance 5 toward the exit 6, the occupant 1 is showered with air blown from the side nozzles 11, blowing off the dust adhering to the body of the occupant 1. removed. As with the side nozzle 11, the air blown from the top nozzle 10, the front nozzle 12, and the back nozzle 13 blows off and removes the dust that could not be removed by the side nozzle 11. - 特許庁The removed dust floats in the air shower device and is sucked into the air suction port 21 at the bottom of the air shower unit 2 . The sucked dust is blown out from the nozzle again through the pre-filter 22 and the main filter 23 by the fan 25 rotated by the motor, and the occupant 1 is showered with the dust.

As shown in FIG. 1, the front nozzle 12 and the rear nozzle 13 are arranged on a housing projecting portion 20 projecting from the housing surface of the air shower unit 2 into the walkway. Since these nozzles are arranged on the housing protruding portion 20 at an angle .theta. As a result, dust adhering to the front and back surfaces of the occupant 1 can be removed without providing a winding path or rotating the occupant 1 in the air shower device.

As shown in FIG. 2, the side nozzles 11, the front nozzles 12, and the back nozzles 13 are arranged so that their heights gradually decrease from the inlet 5 toward the outlet 6 at predetermined intervals. Even if the nozzle position is changed, if the air is blown for a certain period of time, the dust adhering to the body can be removed. There is no risk that the removed dust will be re-deposited on the upper part of the body by suctioning. Therefore, dust removal efficiency does not decrease. As a result, the position of the nozzle of the air shower unit 2 can be lowered near the outlet 6 . In addition, the wind speed of the air blown from the top surface nozzle 10 provided on the ceiling is gradually weakened from the inlet 5 to the outlet 6. - 特許庁Therefore, it is possible to suppress the height at which the dust blown away from the room occupant 1 rises. As a result, the effect of the air curtain airflow from the air curtain device 4 in the final unit 3 is enhanced, so that dust can be prevented from entering the clean room.

A guide light 26 is provided on the side surface inside the air shower unit 2, and by sequentially blinking from the entrance 5 to the exit 6 according to the walking distance and cleanliness in the air shower device, a person entering the room is properly guided. As a result, the person entering the room can be kept in the air shower device for an appropriate period of time, and the reduction in the dust removal effect can be prevented.

FIG. 5 shows a cross-sectional plan view of an air shower device according to Embodiment 2 of the present invention.
In the air shower device of the second embodiment, the amount of protrusion of the housing protrusions 20 provided on the housing surface of the air shower unit 2 toward the walking path is increased, and the number of the housing protrusions 20 is increased to form a zigzag shape. A pedestrian passage is formed. By changing the number and shape of the housing protrusions 20, even in an air shower device in which a large number of air shower units 2 are arranged in the straight direction, the occupant 1 can meander and walk in the air shower device. As a result, the walking distance and walking time in the air shower device are extended, and the air can be evenly blown to the front, back, left and right of the person entering the room 1 for a long time compared to the case where there is no projecting part, so that the efficiency of dust removal is improved. can be done.

FIG. 6 shows the structure of the side wall of the walking passage of the air shower device of Example 3 of the present invention.
The air shower device of the third embodiment does not provide an air curtain device in the final unit 3, and blows the air sucked from the air suction port 21 through the housing of the air shower unit 2 in the inlet direction and blows it out from the nozzle. As indicated by the arrows in the figure, since the inside of the final unit 3 is made to have a negative pressure and an air flow is generated from the clean room side to the air suction port 21, the inflow of dust into the clean room can be prevented without providing an air curtain device. can.

1 Room entrant 2 Air shower unit 3 Final unit 4 Air curtain device 5 Entrance 6 Exit 7 Center line 10 Top nozzle 11 Side nozzle 12 Front nozzle 13 Rear nozzle 20 Case protrusion 21 Air suction port 22 Pre-filter 23 Main filter 25 Fan 26 Guide light

Claims (8)

An air shower device that removes dust by blowing air from air blowing nozzles provided on the side of the walkway and on the ceiling to the person entering the room,
A plurality of housing protrusions protruding into the walking path are provided alternately from both sides of the linear walking path in a staggered manner in the direction of the walking path. By arranging an air blowing nozzle inclined against the room, air is blown to the front and back of the person entering
An air shower device, wherein the height positions of the air blow-out nozzles provided on the side surface of the walkway and the inclined air blow-out nozzles are arranged so as to be gradually lowered at predetermined intervals from the entrance toward the exit. The air shower device according to claim 1,
An air shower device comprising a plurality of air shower units arranged in a straight line. The air shower device according to claim 1,
An air shower device according to claim 1, wherein an inclination angle θ of the inclined air blowing nozzle with respect to a center line connecting an inlet and an outlet is in a range of 30°<θ<60°. The air shower device according to claim 1,
An air shower device characterized in that the wind speed of the air blown out from the air blowing nozzle provided on the ceiling is gradually weakened from the inlet toward the outlet. In the air shower device according to claim 2,
An air shower device characterized in that an air curtain device is provided in a unit facing the entrance of a clean room to prevent dust from entering the clean room. In the air shower device according to claim 2,
Without installing an air curtain device in the unit facing the entrance of the clean room, the air sucked from the air suction port is sent to another air shower unit to create a negative pressure inside the unit facing the entrance of the clean room, thereby preventing dust from entering the clean room. An air shower device characterized by preventing the inflow of The air shower device according to claim 1,
An air shower device characterized by providing a guide light on the side of a walkway to guide a person entering the room so that the person entering the room stays in the air shower device for an appropriate time. The air shower device according to claim 1,
1. An air shower device, wherein said housing projections are provided so as to protrude alternately from both sides of said walking passage to form said walking passage in a zigzag shape.

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