TW202018959A - Cut solar cell, method for manufacturing the same and solar cell module - Google Patents

Cut solar cell, method for manufacturing the same and solar cell module Download PDF

Info

Publication number
TW202018959A
TW202018959A TW107139347A TW107139347A TW202018959A TW 202018959 A TW202018959 A TW 202018959A TW 107139347 A TW107139347 A TW 107139347A TW 107139347 A TW107139347 A TW 107139347A TW 202018959 A TW202018959 A TW 202018959A
Authority
TW
Taiwan
Prior art keywords
back surface
electrode
solar cell
passivation layer
silicon crystal
Prior art date
Application number
TW107139347A
Other languages
Chinese (zh)
Inventor
林峯傑
賴光傑
Original Assignee
茂迪股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 茂迪股份有限公司 filed Critical 茂迪股份有限公司
Priority to TW107139347A priority Critical patent/TW202018959A/en
Publication of TW202018959A publication Critical patent/TW202018959A/en

Links

Images

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

A cut solar cell includes: a silicon substrate having a front surface, a back surface and a plurality of side surfaces, wherein the side surfaces are connected between the front and back surfaces; a passivation layer covering the front surface, the back surface and at least one of the side surfaces; a first patterned electrode passing through the passivation layer to connect the front surface and a first back sub-region of the back surface, and fully covering a first side surface of the side surfaces; and a second patterned electrode passing through the passivation layer to connect a second back sub-region of the back surface; wherein the surface electrical property of the front surface and the first back sub-region is a first electrical property, and the surface electrical property of the second back sub-region is a second electrical property, which is different from the first electrical property.

Description

切片太陽能電池及其製造方法及太陽能電池模組 Sliced solar cell, manufacturing method thereof and solar cell module

本發明是有關於一種切片太陽能電池及其製造方法及太陽能電池模組,且特別是有關於一種切片太陽能電池,其藉由一側面連接電極,使分別連接於射極(emitter)區和表面電場(surface field)的兩種匯流電極都設於在背面。 The invention relates to a sliced solar cell, a method for manufacturing the same, and a solar cell module, and in particular to a sliced solar cell, which is connected to an emitter region and a surface electric field by a side connection electrode (surface field) two kinds of bus electrodes are set on the back.

參考圖1,其簡示現今主流太陽能電池模組中的電池串接方式,太陽能電池9的正面91、背面92分別設有用於導電焊帶(ribbon)93連接用之匯流電極94、95。然而,設於正面的匯流電極94造成電池有效受光面積少。再者,太陽能電池模組內的太陽能電池9之間的連接結構,亦即導電焊帶,其之兩段分別連接於兩相鄰太陽能電池9的正面91及背面92,該兩段之間的部分需彎折,可能會對太陽能電池9之邊緣造成壓力,進而影響太陽能電池模組的可靠度。 Referring to FIG. 1, which briefly illustrates the battery cascading method in current mainstream solar cell modules, the front side 91 and the back side 92 of the solar cell 9 are respectively provided with bus electrodes 94 and 95 for connecting a conductive ribbon 93. However, the bus electrode 94 provided on the front side causes a small effective light receiving area of the battery. Furthermore, the connection structure between the solar cells 9 in the solar cell module, that is, the conductive soldering tape, the two sections are connected to the front side 91 and the back side 92 of two adjacent solar cells 9 respectively. Some parts need to be bent, which may cause pressure on the edge of the solar cell 9, which may affect the reliability of the solar cell module.

為提高發電效率,有以減少電池串之串聯電阻損耗為考量者,例如半切太陽能電池模組,其為將太陽能電池切半後,再以圖一所示方式將半切太陽能電池串接形成模組,如此可使流經電池串的電流變小進而減少串聯電阻所造成的損耗,但其仍有類似傳統模組的可靠度問題。 In order to improve the power generation efficiency, there are considerations for reducing the series resistance loss of the battery string, such as a half-cut solar cell module, which is to cut the solar cell in half and then connect the half-cut solar cell in series to form a module as shown in FIG. 1 In this way, the current flowing through the battery string can be reduced to reduce the loss caused by the series resistance, but it still has the reliability problem similar to the traditional module.

提高模組發電效率的另一種方式為採用高效太陽能電池,而目前主流的高效矽晶太陽電池結構為雙面鈍化矽晶太陽能電池,例如射極鈍化及背電極(Passivated Emitter and Rear Cell,PERC)電池結構或射極鈍化與背面局部擴散(Passivated Emitter Rear Locally-diffused,PERL)電池等,此類太陽能電池的共通點為其矽晶基板之正、背面上各設有鈍化層,並且正、背面其一為p型摻雜表面, 而另一為n型摻雜表面,兩種摻雜表面其一作為射極,另一作為表面電場,此外,兩表面上各設有穿過鈍化層而與射極及表面電場分別連接的射極電極和表面電場電極,兩種電極通常各自包含和導電焊帶連接的對應匯流電極(在本說明書中,分別以射極匯流電極、表面電場匯流電極稱之),此外,此類電池的正面還有複數條載子收集電極,其為和匯流電極相連的多條平行細線狀電極,又稱為指狀電極。匯流電極的寬度遠大於載子收集電極,對電池的有效受光面積影響較大。 Another way to improve the power generation efficiency of the module is to use high-efficiency solar cells, and the current mainstream high-efficiency silicon crystal solar cell structure is a double-sided passivated silicon crystal solar cell, such as emitter passivation and rear electrode (Passivated Emitter and Rear Cell, PERC). Battery structure or emitter passivation and backside diffused (Passivated Emitter Rear Locally-diffused, PERL) batteries, etc. The common point of this type of solar cells is that the silicon substrate has a passivation layer on the front and back of the silicon crystal substrate, and the front and back One is the p-type doped surface, The other is an n-type doped surface. One of the two doped surfaces serves as the emitter and the other as the surface electric field. In addition, the two surfaces are each provided with a passivation layer that is connected to the emitter and the surface electric field. Electrode and surface electric field electrode, the two electrodes usually include corresponding bus electrodes (in this specification, they are called emitter bus electrodes and surface electric field bus electrodes), in addition, the front of such batteries There are also a plurality of carrier collection electrodes, which are a plurality of parallel thin wire electrodes connected to the bus electrode, also known as finger electrodes. The width of the bus electrode is much larger than the carrier collection electrode, which has a great influence on the effective light receiving area of the battery.

為增加電池正面之有效受光面積,有人提出金屬貫穿式(Metal Wrap-Through,MWT)電池結構,其和前述雙面鈍化矽晶太陽能電池的主要差別在於,金屬貫穿式電池的射極匯流電極及表面電場匯流電極都位於電池基板的背面,電池正面只設有載子收集電極,載子收集電極經由基板的穿孔(via-hole)和電池背面的匯流電極連接,換言之,金屬貫穿式電池的兩種匯流電極都位於電池基板背面,因此其正面有效受光面積較大,可提高發電效率。但金屬貫穿式電池的製程包含形成基板的穿孔,再進行相關射極和表面電場區域的摻雜,並且需要在穿孔中填入導電材料以連接正、背面的電極,其製程順序、製程機台遠較主流雙面鈍化電池複雜,製造成本也難以下降。 In order to increase the effective light-receiving area on the front of the battery, a metal-wrap-through (MWT) battery structure has been proposed, which differs from the aforementioned double-sided passivated silicon crystal solar cell in that the emitter bus electrode and The surface electric field bus electrodes are located on the back of the battery substrate. The front of the battery is only provided with a carrier collection electrode. The carrier collection electrode is connected to the bus electrode on the back of the battery through the via-hole of the substrate. In other words, the two The bus electrodes are located on the back of the battery substrate, so the effective light receiving area on the front is large, which can improve the power generation efficiency. However, the process of the metal-penetrating cell includes forming a through-hole of the substrate, and then doping the relevant emitter and surface electric field area, and the conductive material needs to be filled in the through-hole to connect the electrodes on the front and back, the process sequence, the process machine It is far more complicated than mainstream double-sided passivation batteries, and it is difficult to reduce manufacturing costs.

因此,便有需要一種太陽能電池及模組結構可同時達到金屬貫穿式電池、半切電池模組的提效優點,並需要有一對應之太陽能電池製程可大部分沿用主流雙面鈍化電池之製程、設備來減少相關研發、製造成本。 Therefore, there is a need for a solar cell and module structure that can simultaneously achieve the efficiency advantages of metal penetration batteries and half-cut battery modules, and a corresponding solar cell process that can mostly use the mainstream double-sided passivation battery process and equipment To reduce related R&D and manufacturing costs.

本發明之一目的是提供一種切片太陽能電池,其藉由一側面連接電極,使分別連接於射極(emitter)區和表面電場(surface field)的兩種匯流電極都設於背面。 An object of the present invention is to provide a sliced solar cell, which is connected to an electrode by a side surface, so that two types of bus electrodes respectively connected to an emitter region and a surface field are provided on the back surface.

依據上述之目的,本發明提供一種切片太陽能電池,包括:一矽晶基板,具有一正面、一背面及多個側面,該多個側面各自連接該正面及該背面;一鈍化層,覆蓋該正面、該背面及該多個側面之至少一;一第一圖案化電極,穿過該鈍化層而 連接該正面及該背面之一第一背面子區,且覆蓋滿該多個側面中之一第一側面;以及一第二圖案化電極,穿過該鈍化層而連接該背面之一第二背面子區;其中,該正面和該第一背面子區的表面電性為第一電性,且該第二背面子區的表面電性為異於該第一電性之一第二電性。 According to the above purpose, the present invention provides a sliced solar cell, comprising: a silicon crystal substrate having a front surface, a back surface and a plurality of side surfaces, the plurality of side surfaces each connecting the front surface and the back surface; a passivation layer covering the front surface , At least one of the back surface and the plurality of side surfaces; a first patterned electrode passing through the passivation layer and A first back surface sub-region connected to the front surface and the back surface and covering one of the side surfaces; and a second patterned electrode connected to a second back surface of the back surface through the passivation layer Sub-region; wherein, the surface electrical properties of the front surface and the first back surface sub-region are first electrical properties, and the surface electrical properties of the second back surface sub-region are second electrical properties different from the first electrical properties.

根據本發明之切片太陽能電池,(1)具有有金屬貫穿式電池的優點,即連接射極、表面電場的兩種匯流電極都位在該背面,如此可提高太陽能電池正面之有效受光面積。(2)具有切片太陽能電池之電池串的優點,相較於傳統太陽能電池模組以整片太陽能電池串接形成電池串,本發明之切片太陽能電池串接所形成的電池串之電流較小,可減少來自串聯電阻產生的功率損失,因而提高發電效率。(3)射極匯流電極和表面電場匯流電極都在電池背面,不會因導電焊帶彎折而對電池邊緣產生壓力而衍生破片問題。 According to the sliced solar cell of the present invention, (1) has the advantage of having a metal penetrating cell, that is, two kinds of bus electrodes connecting the emitter and the surface electric field are located on the back side, so that the effective light receiving area on the front side of the solar cell can be increased. (2) It has the advantage of slicing solar cell strings. Compared with the traditional solar cell module, the whole solar cells are connected in series to form a battery string. The current of the battery string formed by the slicing solar cell stringing of the present invention is smaller. It can reduce the power loss from the series resistance, thus improving the power generation efficiency. (3) Both the emitter bus electrode and the surface electric field bus electrode are on the back of the battery, which will not cause the fragmentation problem caused by the pressure on the battery edge caused by the bending of the conductive welding tape.

本發明的另一目的,為提供一種切片太陽能電池的製造方法,其系應用一選擇性電極製程,可同步形成位於電池正面的一載子收集電極、位於電池一切片側面的一側面連接電極以及位於電池背面之另一載子匯流電極。 Another object of the present invention is to provide a method for manufacturing a sliced solar cell, which uses a selective electrode manufacturing process to simultaneously form a carrier collection electrode on the front of the battery, a side connection electrode on the side of a slice of the battery, and Another carrier bus electrode located on the back of the battery.

根據本發明之切片太陽能電池之製造方法,其生產設備、流程大部分和目前主流雙面鈍化太陽能電池之生產設備、流程是共通的,而製程亦較金屬貫穿式電池簡單,有利於降低研發、生產成本。 According to the manufacturing method of the sliced solar cell of the present invention, most of its production equipment and processes are common to the current mainstream double-sided passivation solar cell production equipment and processes, and the manufacturing process is also simpler than metal through-type batteries, which is beneficial to reduce research and development, Cost of production.

1‧‧‧切片太陽能電池 1‧‧‧Slice solar cell

1c‧‧‧切片太陽能電池 1c‧‧‧Slice solar cell

1’‧‧‧電池半成品 1’‧‧‧Battery semi-finished products

1c’‧‧‧電池半成品 1c’‧‧‧semi-finished battery

1”‧‧‧母板 1”‧‧‧ Motherboard

10‧‧‧矽晶基板 10‧‧‧Silicon substrate

100‧‧‧主要本體部 100‧‧‧Main body

101‧‧‧表面電場層 101‧‧‧Surface electric field layer

102‧‧‧射極層 102‧‧‧Emitter layer

11‧‧‧正面 11‧‧‧Front

11”‧‧‧母板正面 11”‧‧‧Motherboard front

111‧‧‧矽晶正表面區 111‧‧‧Silicon crystal surface area

12‧‧‧背面 12‧‧‧Back

12”‧‧‧母板背面 12”‧‧‧Back of motherboard

1211‧‧‧第一背面子區 1211‧‧‧The first back sub-region

12110‧‧‧第一矽晶背表面區 12110‧‧‧The first silicon crystal back surface area

1212‧‧‧第二背面子區 1212‧‧‧Second back area

12120‧‧‧第二矽晶背表面區 12120‧‧‧Second silicon back surface area

13‧‧‧側面 13‧‧‧Side

131‧‧‧切片側面 131‧‧‧Slice side

131’‧‧‧切片側面 131’‧‧‧Slice side

14a‧‧‧第一圖案化電極 14a‧‧‧First patterned electrode

14b‧‧‧第二圖案化電極 14b‧‧‧Second patterned electrode

141‧‧‧第一電極 141‧‧‧First electrode

142‧‧‧第二電極 142‧‧‧Second electrode

143‧‧‧第三電極 143‧‧‧The third electrode

1431‧‧‧分段 1431‧‧‧

144‧‧‧第四電極 144‧‧‧The fourth electrode

145‧‧‧第五電極 145‧‧‧ fifth electrode

15‧‧‧鈍化層 15‧‧‧passivation layer

151‧‧‧正面抗反射層 151‧‧‧Front anti-reflection layer

152‧‧‧背面鈍化層 152‧‧‧Backside passivation layer

153‧‧‧正面鈍化層開口 153‧‧‧Front passivation layer opening

154‧‧‧背面鈍化層開口 154‧‧‧Backside passivation layer opening

1541‧‧‧第一背面鈍化層開口 1541‧‧‧The opening of the first back passivation layer

1542‧‧‧第二背面鈍化層開口 1542‧‧‧Second backside passivation layer opening

2‧‧‧太陽能電池模組 2‧‧‧Solar battery module

21‧‧‧電性連接結構 21‧‧‧Electrical connection structure

23‧‧‧封裝材 23‧‧‧Packaging materials

24‧‧‧背面板材 24‧‧‧Back plate

25‧‧‧正面玻璃板 25‧‧‧Front glass plate

8‧‧‧切割線 8‧‧‧Cutting line

8’‧‧‧切割線 8’‧‧‧cutting line

9‧‧‧太陽能電池 9‧‧‧solar battery

91‧‧‧正面 91‧‧‧Front

92‧‧‧背面 92‧‧‧Back

93‧‧‧導電焊帶 93‧‧‧conductive soldering tape

94‧‧‧匯流電極 94‧‧‧Bus electrode

95‧‧‧匯流電極 95‧‧‧Bus electrode

S10~S20‧‧‧步驟 S10~S20‧‧‧Step

S110~S130‧‧‧步驟 S110~S130‧‧‧Step

圖1為習知太陽能電池串之剖面示意圖。 FIG. 1 is a schematic cross-sectional view of a conventional solar cell string.

圖2為本發明之一實施例之切片太陽能電池之上視立體示意圖。 FIG. 2 is a schematic top view of a sliced solar cell according to an embodiment of the invention.

圖3為本發明之一實施例之切片太陽能電池之下視立體示意圖。 FIG. 3 is a schematic perspective view of a sliced solar cell according to an embodiment of the present invention.

圖4a為圖2之切片太陽能電池沿剖線A-A之剖面示意圖。 4a is a schematic cross-sectional view of the sliced solar cell of FIG. 2 along section line A-A.

圖4b為圖2之切片太陽能電池沿剖線B-B之剖面示意圖。 4b is a schematic cross-sectional view of the sliced solar cell of FIG. 2 along section line B-B.

圖5為本發明之另一實施例之切片太陽能電池之下視立體示意圖。 5 is a schematic perspective view of a sliced solar cell according to another embodiment of the invention.

圖6顯示本發明之第一實施例之切片太陽能電池之製造方法之流程圖。 FIG. 6 shows a flowchart of the method for manufacturing a slicing solar cell according to the first embodiment of the present invention.

圖7為本發明之第一實施例之切片太陽能電池之製造方法之剖面示意圖,其顯示準備一電池半成品之母板。 7 is a schematic cross-sectional view of the method for manufacturing a slicing solar cell according to the first embodiment of the present invention, which shows the preparation of a mother board of a semi-finished battery cell.

圖8為本發明之一實施例之電池半成品之母板之上視平面示意圖。 8 is a schematic top plan view of a motherboard of a semi-finished battery product according to an embodiment of the invention.

圖9為本發明之一實施例之電池半成品之母板之下視平面示意圖。 9 is a schematic bottom plan view of a motherboard of a semi-finished battery product according to an embodiment of the invention.

圖10為本發明之一實施例之電池半成品之母板之剖面示意圖,其顯示對鈍化層進行開孔。 FIG. 10 is a schematic cross-sectional view of a motherboard of a semi-finished battery product according to an embodiment of the present invention, which shows the opening of a passivation layer.

圖11為本發明之一實施例之電池半成品之母板之上視平面示意圖,其顯示對鈍化層進行開孔。 FIG. 11 is a schematic top plan view of a motherboard of a battery semi-finished product according to an embodiment of the present invention, which shows the opening of the passivation layer.

圖12為本發明之一實施例之電池半成品之母板之下視平面示意圖,其顯示對鈍化層進行開孔。 FIG. 12 is a schematic bottom plan view of a motherboard of a semi-finished battery cell according to an embodiment of the present invention, which shows the opening of the passivation layer.

圖13為本發明之第一實施例之切片太陽能電池之製造方法之剖面示意圖,其顯示進行一切割製程。 13 is a schematic cross-sectional view of a method for manufacturing a slicing solar cell according to a first embodiment of the present invention, which shows a cutting process.

圖14為本發明之一實施例之電池半成品之上視平面示意圖。 14 is a schematic top plan view of a semi-finished battery product according to an embodiment of the invention.

圖15為本發明之一實施例之電池半成品之下視平面示意圖。 15 is a schematic bottom plan view of a semi-finished battery according to an embodiment of the invention.

圖16為本發明之第一實施例之多個切片太陽能電池之製造方法之剖面示意圖,其顯示進行一選擇性電極沈積製程。 16 is a schematic cross-sectional view of a method for manufacturing a plurality of sliced solar cells according to the first embodiment of the present invention, which shows a selective electrode deposition process.

圖17為本發明之另一實施例之多個切片太陽能電池之製造方法之剖面示意圖,其顯示進行一切割製程及一選擇性電極沈積製程。 FIG. 17 is a schematic cross-sectional view of a method for manufacturing a plurality of sliced solar cells according to another embodiment of the present invention, which shows a cutting process and a selective electrode deposition process.

圖18顯示本發明之第二實施例之切片太陽能電池之製造方法之流程圖。 FIG. 18 shows a flowchart of a method for manufacturing a sliced solar cell according to a second embodiment of the invention.

圖19為本發明之第二實施例之多個切片太陽能電池之製造方法之剖面示意圖,其顯示進行一切割製程及一選擇性電極沈積製程。 FIG. 19 is a schematic cross-sectional view of a method for manufacturing a plurality of sliced solar cells according to a second embodiment of the present invention, which shows a cutting process and a selective electrode deposition process.

圖20為本發明之一實施例之太陽能電池模組之剖面示意圖。 20 is a schematic cross-sectional view of a solar cell module according to an embodiment of the invention.

為讓本發明之上述目的、特徵和特點能更明顯易懂,茲配合圖式將本發明相關實施例詳細說明如下。 In order to make the above objects, features and characteristics of the present invention more obvious and understandable, the relevant embodiments of the present invention are described in detail below with reference to the drawings.

圖2及圖3顯示本發明之一實施例之切片太陽能電池之上視立體示意圖及下視立體示意圖,且圖4a及圖4b顯示本發明之一實施例之切片太陽能電池之剖面示意圖。請參考圖2、圖3、圖4a及圖4b,該切片太陽能電池1包括:一矽晶基板10、一鈍化層15、一第一圖案化電極14a(包括第一至第三電極141、142、143)及一第二圖案化電極14b(包括第四電極144)。該矽晶基板10具有一正面11(亦即受光面)、一背面12及多個側面13,該多個側面13各自連接該正面11及該背面12。該第一圖案化電極14a穿過該鈍化層15而連接該正面11及該背面12之一第一背面子區1211,且覆蓋滿該多個側面13中之一第一側面(亦即切片側面131)。該第二圖案化電極14b穿過該鈍化層15而連接該背面12之一第二背面子區1212。 2 and 3 show a schematic top view and a bottom perspective view of a sliced solar cell according to an embodiment of the present invention, and FIGS. 4a and 4b show schematic cross-sectional views of a sliced solar cell according to an embodiment of the present invention. Please refer to FIG. 2, FIG. 3, FIG. 4a and FIG. 4b, the sliced solar cell 1 includes: a silicon crystal substrate 10, a passivation layer 15, a first patterned electrode 14a (including the first to third electrodes 141, 142) , 143) and a second patterned electrode 14b (including the fourth electrode 144). The silicon substrate 10 has a front surface 11 (that is, a light-receiving surface), a back surface 12 and a plurality of side surfaces 13. The plurality of side surfaces 13 are respectively connected to the front surface 11 and the back surface 12. The first patterned electrode 14a passes through the passivation layer 15 to connect to the first back surface sub-region 1211 of the front surface 11 and the back surface 12, and covers one of the plurality of side surfaces 13 (i.e., the sliced side surface) 131). The second patterned electrode 14b passes through the passivation layer 15 to connect to a second back surface sub-region 1212 of the back surface 12.

詳言之,該第一電極141(亦即側面連接電極),覆蓋滿該些側面13之一第一側面(亦即切片側面131)。該第二電極142(亦即載子收集電極,例如正面指狀電極),配置於該正面11上,並與該第一電極141連接。該第三電極143(亦即第一電性匯流部,其可為射極匯流電極或表面電場匯流電極之一),但配置於該背面12上,並與該第一電極141連接。該第四電極144(亦即背面電極,其可包含射極匯流電極或表面電場匯流電極之另一,以 及其對應的載子收集電極,例如背面指狀電極),配置於該背面12上,並與該第三電極143不相連。在本實施例中,該鈍化層15覆蓋該正面11、該背面12及該多個側面13之至少一側面。例如,當該矽晶基板10之該正面11、該背面12及該些側面13之其他側面不被該第一至第四電極141、142、143、144蓋住的區域,則被該鈍化層15蓋滿。需進一步說明的是,「覆蓋滿」一表面,是指接觸該表面之全部;「覆蓋」一表面,是指接觸該表面之至少部分。前述第一電極141「覆蓋滿」該切片側面131,指的是該第一電極141直接接觸並覆蓋該切片側面131之全部。該切片側面131為經一切片製程而形成的側面,因此其上無鈍化層覆蓋而為全部裸露的矽晶表面,由垂直基板正面的方向入視時,該側面呈一直線形線段,本說明書後續會對切片製程舉例介紹。 In detail, the first electrode 141 (that is, the side connection electrode) covers one of the side surfaces 13 (that is, the slice side 131). The second electrode 142 (ie, carrier collection electrode, such as a front finger electrode) is disposed on the front surface 11 and connected to the first electrode 141. The third electrode 143 (that is, the first electrical bus part may be one of an emitter bus electrode or a surface electric field bus electrode), but is disposed on the back surface 12 and is connected to the first electrode 141. The fourth electrode 144 (that is, the back electrode, which may include an emitter bus electrode or another of the surface electric field bus electrodes, to And its corresponding carrier collection electrode, such as a back finger electrode), is disposed on the back surface 12 and is not connected to the third electrode 143. In this embodiment, the passivation layer 15 covers at least one side surface of the front surface 11, the back surface 12 and the plurality of side surfaces 13. For example, when the front surface 11, the back surface 12, and the other sides of the side surfaces 13 of the silicon substrate 10 are not covered by the first to fourth electrodes 141, 142, 143, and 144, the passivation layer 15 covered. It should be further noted that "covering" a surface means touching all of the surface; "covering" a surface means touching at least part of the surface. The aforementioned “first electrode 141 “covers up” the slice side surface 131 means that the first electrode 141 directly contacts and covers all of the slice side surface 131. The slicing side surface 131 is a side surface formed by a slicing process. Therefore, there is no passivation layer covering the entire exposed silicon crystal surface. The side surface is a straight line segment when viewed from the direction perpendicular to the front surface of the substrate. An example of the slicing process will be introduced.

該正面11和該第一背面子區1211的表面電性為第一電性,該第二背面子區1212的表面電性為異於該第一電性之一第二電性。詳言之,該第二電極142與該正面11的一矽晶正表面區111(例如設有表面電場層101)相連接。該第三電極143與該第一背面子區1211之一第一矽晶背表面區12110(例如設有主要本體部100)相連接,且該正面11和該第一背面子區1211的電性相同。該第四電極144與該第二背面子區1212之一第二矽晶背表面區12120(例如設有射極層102)相連接,且該第二背面子區1212和該第一背面子區1211的電性相反。該第一側面(亦即切片側面131)和該第一背面子區1211的電性相同。再者,該第一背面子區1211之部分被鈍化層15所覆蓋,其餘部分被該第三電極143所覆蓋;而該第二背面子區1212之部分被鈍化層15所覆蓋,其餘部分被該第四電極144所覆蓋。 The surface electrical properties of the front surface 11 and the first back surface sub-region 1211 are first electrical properties, and the surface electrical properties of the second back surface sub-region 1212 are second electrical properties different from the first electrical properties. In detail, the second electrode 142 is connected to a front surface area 111 of the silicon crystal of the front surface 11 (for example, a surface electric field layer 101 is provided). The third electrode 143 is connected to a first silicon back surface area 12110 (for example, provided with a main body portion 100) of one of the first back surface sub areas 1211, and the electrical properties of the front surface 11 and the first back surface sub area 1211 the same. The fourth electrode 144 is connected to a second silicon back surface area 12120 (for example, provided with an emitter layer 102) of one of the second back surface sub-regions 1212, and the second back surface sub-region 1212 and the first back surface sub-region The electrical properties of 1211 are reversed. The first side (that is, the slice side 131) and the first back sub-region 1211 have the same electrical properties. Furthermore, part of the first backside sub-region 1211 is covered by the passivation layer 15 and the rest is covered by the third electrode 143; and part of the second backside sub-region 1212 is covered by the passivation layer 15 and the rest is covered by The fourth electrode 144 is covered.

圖5顯示本發明之另一實施例之切片太陽能電池之下視立體示意圖。該第一圖案化電極14a包括位於該背面12上之該第三電極143(亦即第一電性匯流部),位於該側面13上之該第一電極141(亦即側面連接電極),該第三電極143具有多個不相連 的分段1431,各分段1431各自與該第一電極141相連接。相較於圖3之相連的第三電極143,對於射極層設於背面側的太陽能電池而言,圖5之具有不相連的分段設計的第三電極143則可擴大射極層之可分布區域,有助於電池效率提升。 FIG. 5 shows a schematic perspective view of a sliced solar cell according to another embodiment of the invention. The first patterned electrode 14a includes the third electrode 143 (that is, the first electrical bus) on the back surface 12, and the first electrode 141 (that is, the side connection electrode) on the side surface 13, the The third electrode 143 has multiple unconnected Each segment 1431 is connected to the first electrode 141. Compared to the connected third electrode 143 of FIG. 3, for a solar cell in which the emitter layer is provided on the back side, the third electrode 143 of FIG. 5 with a non-connected segmented design can expand the emitter layer. Distribution area helps to improve battery efficiency.

圖6顯示本發明之第一實施例之切片太陽能電池之製造方法之流程圖。該切片太陽能電池之製造方法包括下列步驟:在步驟S110中,準備一電池半成品之母板。請參考圖7,其顯示該電池半成品之母板的剖面示意圖。該電池半成品之母板1”包括:一矽晶基板10,具有一母板正面11”、一母板背面12”及多個側面13,該些側面13連接該母板正面11”及該母板背面12”;以及一鈍化層15,覆蓋滿該母板正面11”、該母板背面12”及該些側面13。該母板1”可用一般PERC或PERL太陽能電池之製程、生產設備製作。 FIG. 6 shows a flowchart of the method for manufacturing a slicing solar cell according to the first embodiment of the present invention. The manufacturing method of the sliced solar cell includes the following steps: In step S110, prepare a mother board of a semi-finished battery cell. Please refer to FIG. 7, which shows a schematic cross-sectional view of the motherboard of the semi-finished battery. The mother board 1" of the semi-finished battery includes: a silicon crystal substrate 10, having a mother board front 11", a mother board back 12", and a plurality of sides 13, the sides 13 connecting the mother board front 11" and the mother The back surface 12" of the board; and a passivation layer 15 covering the front surface 11" of the mother board, the back surface 12" of the mother board and the side surfaces 13. The mother board 1" can be manufactured by the manufacturing process and production equipment of ordinary PERC or PERL solar cells .

舉例,該鈍化層15可包括一正面抗反射層151及一背面鈍化層152。該正面抗反射層151位於該母板正面11”上,且該背面鈍化層152位於該母板背面12”上。該正面抗反射層151可為具有減少入射光之反射率之層體,可能為單層或多層結構,其亦可兼具有鈍化效果。該背面鈍化層152亦可為單層或多層結構,並具有鈍化效果。該正面抗反射層151及該背面鈍化層152通常並非同時形成,進一步來說該正面抗反射層和該背面鈍化層的材質、結構通常因其對應覆蓋的表面電性而有不同,常用材質選擇例如氧化矽、氮化矽和氧化鋁等。該正面抗反射層151及該背面鈍化層152於形成過程中會把該矽晶基板10的側面覆蓋滿,即兩者之一或共同形成該鈍化層15於母板1”之側面上的部分。 For example, the passivation layer 15 may include a front anti-reflection layer 151 and a back passivation layer 152. The front anti-reflection layer 151 is located on the front surface 11 ″ of the motherboard, and the back passivation layer 152 is located on the rear surface 12 ″ of the motherboard. The front anti-reflection layer 151 may be a layer body with reduced reflectance of incident light, and may be a single-layer or multi-layer structure, which may also have a passivation effect. The back surface passivation layer 152 may also have a single-layer or multi-layer structure and have a passivation effect. The front anti-reflective layer 151 and the back passivation layer 152 are not usually formed at the same time. Furthermore, the materials and structures of the front anti-reflection layer and the back passivation layer are usually different due to the corresponding electrical properties of the covered surface. For example, silicon oxide, silicon nitride and aluminum oxide. The front anti-reflective layer 151 and the back passivation layer 152 will cover the side of the silicon substrate 10 during the formation process, that is, one of them or together form the part of the passivation layer 15 on the side of the motherboard 1" .

該矽晶基板10可以光伏(photovoltaic)效應將光能轉換成電能的基板,例如具有PN接面(P/N junction)或PIN接面(PIN junction)的矽基板,例如單晶矽或多晶矽基板。該矽晶基板10具有一射極層102及一表面電場層101。該矽晶基板10之主要本體 部100及該表面電場層101可為第一導電型,該射極層102可為第二導電型並位於該矽晶基板10內靠近該背面12處,且該表面電場層101位於該矽晶基板10內靠近該母板正面11”處。請參考圖8及圖9,其顯示該電池半成品之母板1”之上視及下視平面示意圖。標號8顯示未來的切割線位置。 The silicon crystal substrate 10 can convert photovoltaic energy into electrical energy by a photovoltaic effect, such as a silicon substrate having a PN junction (P/N junction) or a PIN junction (PIN junction), such as a single crystal silicon or polycrystalline silicon substrate . The silicon crystal substrate 10 has an emitter layer 102 and a surface electric field layer 101. The main body of the silicon substrate 10 The portion 100 and the surface electric field layer 101 may be of the first conductivity type, the emitter layer 102 may be of the second conductivity type and located in the silicon crystal substrate 10 near the back surface 12, and the surface electric field layer 101 is located in the silicon crystal The substrate 10 is located near the front surface 11" of the motherboard. Please refer to FIGS. 8 and 9, which show schematic top and bottom plan views of the motherboard 1" of the semi-finished battery. Reference number 8 shows the future cutting line position.

以n-type太陽能電池基板之半成品作為母板的情形為例:(1)表面電場層101可藉由磷擴散或離子佈植而摻雜。(2)該射極層102可藉由硼擴散或離子佈值而摻雜。(3)該正面抗反射層151及該背面鈍化層152可依現有射極鈍化及背部局部擴散式(PERL)太陽能電池的正面抗反射層及背面鈍化層製程,但背面的兩種表面電性之區域形狀、位置須依後續切片製程的切割線決定。 Take the case where the semi-finished product of the n-type solar cell substrate is used as the mother board: (1) The surface electric field layer 101 can be doped by phosphorus diffusion or ion implantation. (2) The emitter layer 102 can be doped by boron diffusion or ion distribution. (3) The front anti-reflection layer 151 and the back passivation layer 152 can be manufactured according to the processes of the front emitter passivation and back partial diffusion (PERL) solar cell front anti-reflection layer and back passivation layer, but the two surface electrical properties of the back The shape and position of the area must be determined according to the cutting line of the subsequent slicing process.

請參考圖10至圖12,對該母板正面11”上的該鈍化層15進行開孔,使該正面11上的該鈍化層15具有一正面鈍化層開口153,露出該母板正面11”之矽晶正表面區111(例如設有表面電場層101)。也對該母板背面12”上的該鈍化層15進行開孔,使該母板背面12”上的該鈍化層15具有第一及第二背面鈍化層開口1541、1542,分別露出該母板背面12”的第一背面子區1211之第一矽晶背表面區12110(例如設有主要本體部100)及第二背面子區1212之第二矽晶背表面區12120(例如設有射極層102)。標號8顯示未來的切割線位置,前述開口圖案的位置須依切割線位置決定。 10-12, the passivation layer 15 on the front surface 11" of the motherboard is perforated so that the passivation layer 15 on the front surface 11 has a front surface passivation layer opening 153 to expose the front surface 11" of the motherboard The front surface area 111 of the silicon crystal (for example, the surface electric field layer 101 is provided). The passivation layer 15 on the back surface 12" of the mother board is also perforated, so that the passivation layer 15 on the back surface 12" of the mother board has first and second back surface passivation layer openings 1541, 1542, respectively exposing the mother board The first silicon back surface area 12110 of the first back surface sub-area 1211 of the back surface 12" (for example, provided with the main body portion 100) and the second silicon crystal back surface area 12120 of the second back surface sub-area 1212 (for example, provided with the emitter Layer 102). Reference number 8 shows the position of the cutting line in the future, and the position of the aforementioned opening pattern must be determined according to the position of the cutting line.

在步驟S120中,進行一切割製程。請參考圖13、圖11及圖12,該切割製程包括:沿一切割線8將該母板1”切割而得到至少一電池半成品1’。舉例,可利用雷射加上裂片步驟而完成該切割製程。請參考圖14及圖15,該切割線8將該母板1”之母板正面11”、母板背面12”、第一背面子區1211及第二背面子區1212分開成分屬兩個電池半成品1’之正面11、背面12、第一背面子區1211及第二背面子區1212,且該電池半成品1’因該切割製程而具有露出該電池半成品1’的一第一側面(即切片側面131)。該切片側面131為經一切片製程而形成的側面,因此其上無鈍化 層覆蓋而為全部裸露的矽晶表面,由垂直基板正面的方向入視時,該側面呈一直線形線段。在本實施例中,該母板1”平分成兩個電池半成品1’,所形成的電池半成品1’只有一個切片側面131,其他側面仍為該鈍化層15所蓋滿。 In step S120, a cutting process is performed. Please refer to FIG. 13, FIG. 11 and FIG. 12, the cutting process includes: cutting the mother board 1 ″ along a cutting line 8 to obtain at least one battery semi-finished product 1 ′. For example, a laser plus a sliver step can be used to complete the process Cutting process. Please refer to FIG. 14 and FIG. 15, the cutting line 8 separates the mother board front face 11", mother board back face 12", first back face sub-area 1211 and second back face sub-area 1212 The front surface 11, the back surface 12, the first back surface sub-region 1211 and the second back surface sub-region 1212 of the two battery semi-finished products 1', and the battery semi-finished product 1'has a first side that exposes the battery semi-finished product 1'due to the cutting process (That is, the side 131 of the slice). The slicing side 131 is a side formed by a slicing process, so there is no passivation on it The layer is covered by the entire exposed silicon crystal surface, and when viewed from the direction perpendicular to the front surface of the substrate, the side surface is a straight line segment. In this embodiment, the mother board 1" is divided into two semi-finished batteries 1'. The semi-finished battery 1'formed has only one sliced side 131, and the other sides are still covered by the passivation layer 15.

在步驟S130中,進行一電極製程。該電極製程可為選擇性電極沈積製程,本說明書中,選擇性電極沈積製程指電極實質上不沈積上鈍化層上而只沈積於鈍化層開口露出的矽晶基板表面上(例如前述矽晶正表面區或矽晶背表面區)。請參考圖16及圖15,該選擇性電極沈積製程包括:形成彼此相連接的一第一電極141、一第二電極142及一第三電極143於該電池半成品1’的該切片側面131、該矽晶正表面區111、該第一矽晶背表面區12110;以及形成一第四電極144於該電池半成品1’之該第二矽晶背表面區12120,該第四電極144與該三電極143不相連,如此以完成該切片太陽能電池1,其中該第一圖案化電極14a包括第一至第三電極141、142、143,且該第二圖案化電極14b包括第四電極144。在本實施例中,該第四電極144與該第一電極141、該第二電極142及該第三電極143可於同一電極沈積製程形成。 In step S130, an electrode process is performed. The electrode process may be a selective electrode deposition process. In this specification, the selective electrode deposition process means that the electrode is not substantially deposited on the passivation layer, but only deposited on the surface of the silicon crystal substrate exposed by the opening of the passivation layer (such as the aforementioned silicon crystal positive Surface area or silicon back surface area). 16 and 15, the selective electrode deposition process includes: forming a first electrode 141, a second electrode 142, and a third electrode 143 connected to each other on the slice side surface 131 of the semi-finished battery 1', The silicon front surface area 111, the first silicon back surface area 12110; and forming a fourth electrode 144 on the second silicon back surface area 12120 of the semi-finished battery 1', the fourth electrode 144 and the third The electrodes 143 are not connected, so as to complete the sliced solar cell 1, wherein the first patterned electrode 14a includes first to third electrodes 141, 142, 143, and the second patterned electrode 14b includes a fourth electrode 144. In this embodiment, the fourth electrode 144, the first electrode 141, the second electrode 142, and the third electrode 143 can be formed in the same electrode deposition process.

舉例而言,選擇性電極沈積製程可包括選擇性無電鍍步驟及第一及第二直接電鍍步驟。選擇性無電鍍步驟是指無電鍍製程在該太陽能電池基板10(例如該矽基板)之表面上的鍍率遠大於該無電鍍製程在該鈍化層15之表面上的鍍率,即使該太陽能電池基板10之正面11、背面12及鈍化層15可能同時與鍍液接觸,但在該製程期間內,一鍍層(亦即晶種層)實質上只形成在該矽晶基板10所露出的之正面11及背面12上,而鈍化層15上的鍍層沈積量為零或為少到不需額外步驟去除。舉例,台灣專利申請號107128048揭示了選擇性無電鍍步驟可為一種浸金製程,例如本發明可藉由一夾持治具將該電池半成品1’浸入該浸金製程之溶液中而使該切片側面131、該矽晶正表面區111、該第一矽晶背表面區12110及該第二矽晶背表面區12120(即待鍍區域)與該溶液 接觸,該浸金製程之溶液用以提供金離子而沉積為金粒子作為晶種層。該浸金製程之溶液的成分包含一氯金化合物及一表面處理劑。該氯金化合物可選自氯化金(AuCl3或AuCl4 -)、氯金酸(HAuCl4)、氯金酸鉀(KAuCl4)及氯金酸鈉(NaAuCl4)所構成之群組的其中至少一者。 For example, the selective electrode deposition process may include a selective electroless plating step and first and second direct plating steps. The selective electroless plating step means that the plating rate of the electroless plating process on the surface of the solar cell substrate 10 (such as the silicon substrate) is much greater than the plating rate of the electroless plating process on the surface of the passivation layer 15, even if the solar cell The front surface 11, back surface 12 and passivation layer 15 of the substrate 10 may be in contact with the plating solution at the same time, but during this process, a plating layer (ie, a seed layer) is substantially formed only on the exposed front surface of the silicon crystal substrate 10 11 and the back surface 12, and the deposition amount of the plating layer on the passivation layer 15 is zero or so small that no additional steps are required for removal. For example, Taiwan Patent Application No. 107128048 discloses that the selective electroless plating step can be a gold immersion process. For example, the invention can make the slice by immersing the battery semi-finished product 1'in the solution of the gold immersion process by a clamping jig The side surface 131, the silicon crystal front surface area 111, the first silicon crystal back surface area 12110 and the second silicon crystal back surface area 12120 (ie, the area to be plated) are in contact with the solution, and the solution of the gold immersion process is used to provide Gold ions are deposited as gold particles as a seed layer. The components of the solution in the gold immersion process include a chlorogold compound and a surface treatment agent. The gold compound selected from chlorine gold chloride (AuCl 3 or AuCl 4 -), chloroauric acid (HAuCl 4), potassium gold chloride group (KAuCl 4) and sodium chloroaurate (NaAuCl 4) composed of the At least one of them.

該第一直接電鍍步驟是以該晶種層而電鍍形成一第一鍍層(例如鎳層,圖未示)於該第一鍍層上。舉例,直接電鍍步驟是指,將該電池半成品1’之該切片側面131、該矽晶正表面區111、該第一矽晶背表面區12110及該第二矽晶背表面區12120(即待鍍區域)浸入電鍍製程的相關處理液(含有鎳離子),然後藉由多個電鍍探針(plating probe)(圖未示)直接接觸該待鍍區域,以外加偏壓而將一鎳層電鍍形成該待鍍區域上,該鎳層包覆該該切片側面131、該矽晶正表面區111、該第一矽晶背表面區12110及該第二矽晶背表面區12120上的該些金粒子。該第二直接電鍍製程將一第二鍍層(例如銅層,圖未示)形成於該第一鍍層(例如鎳層)上。 The first direct plating step is to form a first plating layer (such as a nickel layer, not shown) on the first plating layer by electroplating the seed layer. For example, the direct plating step refers to the slicing side surface 131 of the battery semi-finished product 1', the silicon crystal front surface area 111, the first silicon crystal back surface area 12110 and the second silicon crystal back surface area 12120 (i.e. Plating area) Immersed in the relevant processing solution (containing nickel ions) of the electroplating process, and then directly contact the area to be plated with a plurality of plating probes (not shown), and apply a bias voltage to electroplat a nickel layer On the area to be plated, the nickel layer covers the gold on the slice side surface 131, the silicon front surface area 111, the first silicon back surface area 12110 and the second silicon back surface area 12120 particle. The second direct plating process forms a second plating layer (such as a copper layer, not shown) on the first plating layer (such as a nickel layer).

該第二電極142與該正面11之矽晶正表面區111相連接。該第三電極143與該第一背面子區1211之第一矽晶背表面區12110相連接,且該正面11和該第一背面子區1211的電性相同。該第四電極144與該第二背面子區1212之第二矽晶背表面區12120相連接,該第一背面子區1211和該第二背面子區1212不相連,且該第二背面子區1212和該第一背面子區1211的電性相反。該切片側面131和該第一背面子區1211的電性相同。 The second electrode 142 is connected to the front surface area 111 of the silicon crystal of the front surface 11. The third electrode 143 is connected to the first silicon back surface region 12110 of the first back surface sub-region 1211, and the front surface 11 and the first back surface sub-region 1211 have the same electrical properties. The fourth electrode 144 is connected to the second silicon back surface region 12120 of the second back surface sub-region 1212, the first back surface sub-region 1211 and the second back surface sub-region 1212 are not connected, and the second back surface sub-region 1212 and the first back surface sub-area 1211 are electrically opposite. The slice side surface 131 and the first back surface sub-region 1211 have the same electrical properties.

在另一個實施例中,鈍化層開口圖案可在切片製程之後進行,即先將如圖7之母板1”切片後,再對個別電池半成品1’進行鈍化層開口製程。 In another embodiment, the passivation layer opening pattern may be performed after the slicing process, that is, after slicing the mother board 1" as shown in FIG. 7, the passivation layer opening process is performed on the individual battery semi-finished products 1'.

在另一個實施例中,該第四電極144可以一獨立電極製程形成,例如,該第四電極144可以網印導電漿再進行燒結的方式形成,而該第一至第三電極141、142及143則以前述選擇性電極沈積製程形成。另外,該第四電極144的獨立電極製程可 在切片製程之後進行,即分別對個別電池半成品1’進行,亦或是在切片製程之前進行,即對該母板1”進行該獨立電極製程後,再進行切片。 In another embodiment, the fourth electrode 144 may be formed by an independent electrode process. For example, the fourth electrode 144 may be formed by screen printing conductive paste and then sintering, and the first to third electrodes 141, 142 and 143 is formed by the aforementioned selective electrode deposition process. In addition, the independent electrode process of the fourth electrode 144 can be It is performed after the slicing process, that is, on the individual battery semi-finished products 1', respectively, or before the slicing process, that is, after performing the independent electrode process on the mother board 1", then slicing.

請再參考圖5,該第三電極143具有多個不相連的分段1431,各分段1431各自與該第一電極141相連接。 Referring again to FIG. 5, the third electrode 143 has a plurality of unconnected segments 1431, and each segment 1431 is connected to the first electrode 141.

根據本發明之切片太陽能電池及其製程,(1)和MWT電池類似,電池正面無匯流電極存在,有效受光面積較大。(2)側面連接電極、正面載子收集電極以及和正面載子電極對應的匯流電極的連結可以一步完成,相對於MWT電池製程較為簡化。(3)在準備本發明所述電池半成品之母板時,可直接沿用目前PERC/PERL之製程及設備,可降低研發及生產成本。 According to the slicing solar cell and its manufacturing process of the present invention, (1) is similar to the MWT cell, there is no bus electrode on the front of the cell, and the effective light receiving area is large. (2) The connection of the side connection electrode, the front carrier collecting electrode and the bus electrode corresponding to the front carrier electrode can be completed in one step, which is relatively simplified compared to the MWT battery manufacturing process. (3) When preparing the mother board of the semi-finished battery of the present invention, the current PERC/PERL process and equipment can be directly used, which can reduce R&D and production costs.

請參考圖17,在另一實施例中,在步驟S120中,該切割製程更包括:沿另一切割線8’將該母板1”切割而更得到另一電池半成品1c’,其中該電池半成品1c’因該切割製程而露出第一及第二側面(亦即兩個切片側面131、131’),其中該第一及第二側面全部為裸露的矽晶表面。在步驟S130中,該選擇性電極沈積製程更包括:形成彼此相連接的又一第一電極141、又一第二電極142及又一第三電極143於該電池半成品1c’的該切片側面131、該矽晶正表面區111及該第一矽晶背表面區12110;形成又一第四電極142於該電池半成品1c’之該第二矽晶背表面區12120,該又一第四電極142與該又一第三電極143不相連;以及形成一第五電極145於該電池半成品1c’之該切片側面131’,該第五電極145與該又一第二電極142相連,如此以完成一切片太陽能電池1c,其中該第一圖案化電極14a(更包括該第五電極145)亦覆蓋滿該第二側面(亦即切片側面131’)。在本實施例中,所述第一電極141、該第二電極142及該第三電極143、該第四電極144及該第五電極145可於同一電極沈積製程形成。 Referring to FIG. 17, in another embodiment, in step S120, the cutting process further includes: cutting the mother board 1" along another cutting line 8'to obtain another battery semi-finished product 1c', wherein the battery The semi-finished product 1c' exposes the first and second sides (that is, the two slicing sides 131, 131') due to the cutting process, wherein the first and second sides are all exposed silicon crystal surfaces. In step S130, the The selective electrode deposition process further includes: forming another first electrode 141, another second electrode 142, and another third electrode 143 connected to each other on the slicing side surface 131 of the battery semi-finished product 1c', and the front surface of the silicon crystal Region 111 and the first silicon crystal back surface region 12110; forming a further fourth electrode 142 on the second silicon crystal back surface region 12120 of the battery semi-finished product 1c', the further fourth electrode 142 and the further third The electrode 143 is not connected; and a fifth electrode 145 is formed on the slicing side surface 131' of the semi-finished battery 1c', the fifth electrode 145 is connected to the further second electrode 142, so as to complete a slicing solar cell 1c, wherein The first patterned electrode 14a (more including the fifth electrode 145) also covers the second side (ie, the slice side 131'). In this embodiment, the first electrode 141 and the second electrode 142 And the third electrode 143, the fourth electrode 144 and the fifth electrode 145 can be formed in the same electrode deposition process.

相較於本發明之分割後的兩個切片太陽能電池,本發明之分割後的三個切片太陽能電池,其串接後之切片太陽能電 池串之工作電流會更稍微下降。 Compared with the divided two sliced solar cells of the present invention, the divided three sliced solar cells of the present invention have the sliced solar cells connected in series The operating current of the pool string will drop slightly.

圖18顯示本發明之第二實施例之切片太陽能電池之製造方法之流程圖。該切片太陽能電池之製造方法包括下列步驟:請參考圖19,在步驟S10中,準備一電池半成品1’,該電池半成品1’包括;一矽晶基板10,具有一正面11、一背面12及連接該正面11及該背面12之多個側面13;以及一鈍化層15,覆蓋該正面11、該背面12及該多個側面13之至少一,其中該多個側面13包括一第一側面(亦即切片側面131),該切片側面131全部為裸露的矽晶表面。該電池半成品1’可為對一母板1”進行一切片製程而得,該切片側面131的位置對應該切片製程之一切割線8位置,如圖13所示。請再參考圖19,該背面12包括一第一背面子區1211及一第二背面子區1212,該正面11和該第一背面子區1211的表面電性為第一電性,該第二背面子區1212的表面電性為第二電性,且該鈍化層15具有一正面鈍化層開口153及一背面鈍化層開口154,該正面鈍化層開口153露出該正面11的一矽晶正表面區111,該背面鈍化層開口154露出該第一背面子區1211之一第一矽晶背表面區12110,該矽晶正表面區111及第一矽晶背表面區12110皆鄰接該切片側面131。 FIG. 18 shows a flowchart of a method for manufacturing a sliced solar cell according to a second embodiment of the invention. The manufacturing method of the sliced solar cell includes the following steps: Please refer to FIG. 19, in step S10, prepare a battery semi-finished product 1', the battery semi-finished product 1'includes; a silicon crystal substrate 10, has a front surface 11, a back surface 12 and A plurality of side surfaces 13 connecting the front surface 11 and the back surface 12; and a passivation layer 15 covering at least one of the front surface 11, the back surface 12 and the plurality of side surfaces 13, wherein the plurality of side surfaces 13 includes a first side surface ( That is, the slice side surface 131), the slice side surface 131 are all exposed silicon crystal surfaces. The semi-finished battery 1'can be obtained by performing a slicing process on a mother board 1". The position of the slicing side 131 corresponds to the position of one of the cutting lines 8 of the slicing process, as shown in FIG. 13. Please refer to FIG. 19 again. The back surface 12 includes a first back surface sub-region 1211 and a second back surface sub-region 1212. The surface electrical properties of the front surface 11 and the first back surface sub-region 1211 are first electrical properties, and the surface electrical properties of the second back surface sub-region 1212 The passivation layer 15 has a front passivation layer opening 153 and a back passivation layer opening 154, the front passivation layer opening 153 exposes a silicon crystal front surface region 111 of the front side 11, the back passivation layer The opening 154 exposes a first silicon crystal back surface area 12110 of one of the first back surface sub-regions 1211. The silicon crystal front surface area 111 and the first silicon crystal back surface area 12110 both adjoin the slice side surface 131.

在步驟S20中,進行一電極製程,包括:形成覆蓋滿該第一矽晶正表面區1110、該第一矽晶背表面區12110及該切片側面131之一第一圖案化電極14a(其包括第一至第三電極141、142、143),以及形成連接該第二背面子區1212之一第二圖案化電極14b(其包括第四電極144),其中該第一圖案化電極14a為經由一選擇性電極製程所形成,該第一圖案化電極14a及該第二圖案化電極14b彼此分離。第二實施例之選擇性電極製程可類似於第一實施例之選擇性電極製程,無庸贅述。 In step S20, an electrode process is performed, including: forming a first patterned electrode 14a (which includes a first patterned electrode 14a (which includes the first silicon crystal front surface area 1110, the first silicon crystal back surface area 12110, and the slice side surface 131 First to third electrodes 141, 142, 143), and a second patterned electrode 14b (which includes a fourth electrode 144) connected to the second back surface sub-region 1212 is formed, wherein the first patterned electrode 14a is via Formed by a selective electrode process, the first patterned electrode 14a and the second patterned electrode 14b are separated from each other. The selective electrode process of the second embodiment may be similar to the selective electrode process of the first embodiment, and will not be described in detail.

在本實施例中,於步驟S10中,該背面鈍化層開口154更露出該第二背面子區1212之一第二矽晶背表面區12120,該第一矽晶背表面區12110和該第二矽晶背表面區12120彼此分 離;且於步驟S20中,該第二圖案化電極14b連接於該第二矽晶背表面區12120。該第二圖案化電極14b亦由該選擇性電極製程所形成,該第二圖案化電極14b覆蓋滿該第二矽晶背表面區12120。另一種該第二圖案化電極14b的形成方式,為先網印一導電漿料層(圖未示)於該第二矽晶背表面區12120,再進行一燒結製程。 In this embodiment, in step S10, the backside passivation layer opening 154 further exposes a second silicon crystal back surface area 12120 of the second backside sub-region 1212, the first silicon crystal back surface area 12110 and the second The silicon back surface regions 12120 are separated from each other In step S20, the second patterned electrode 14b is connected to the second silicon back surface area 12120. The second patterned electrode 14b is also formed by the selective electrode process. The second patterned electrode 14b covers the second silicon back surface area 12120. Another method for forming the second patterned electrode 14b is to first screen print a conductive paste layer (not shown) on the second silicon back surface area 12120, and then perform a sintering process.

在另一實施例中,不需於步驟S10中使該背面鈍化層開口154露出該第二矽晶背表面區12120,而在步驟S20中先網印具有燒穿該鈍化層15能力的一導電漿料層(圖未示)於該背面12的鈍化層15上,再進行一燒結製程,進而形成和第二矽晶背表面區12120相連的該第二圖案化電極14b。 In another embodiment, it is not necessary to expose the back surface passivation layer opening 154 in step S10 to expose the second silicon back surface area 12120, and in step S20 first screen print a conductive material having the ability to burn through the passivation layer 15 A paste layer (not shown) is formed on the passivation layer 15 of the back surface 12, and then a sintering process is performed to form the second patterned electrode 14b connected to the second silicon crystal back surface area 12120.

請參考圖20,其顯示本發明之一實施例之太陽能電池模組之剖面示意圖。該太陽能電池模組2包括多個切片太陽能電池1及多個電性連接結構21。該些切片太陽能電池1為上述之切片太陽能電池。該些電性連接結構21(例如導電焊帶,ribbon)用以將上一個切片太陽能電池1的第三電極143電性連接下一個切片太陽能電池1的第四電極144,如此依序兩兩電性串接該些切片太陽能電池1。該太陽能電池模組2更包括一正面玻璃板25、一背面板材24及一封裝材23。該背面板材24相對於該正面玻璃板25而配置。該些切片太陽能電池1位於該正面玻璃板25與該背面板材24之間。該封裝材23也位於該正面玻璃板25與該背面板材24之間,並包覆該些切片太陽能電池1。 Please refer to FIG. 20, which shows a schematic cross-sectional view of a solar cell module according to an embodiment of the present invention. The solar cell module 2 includes multiple sliced solar cells 1 and multiple electrical connection structures 21. The sliced solar cells 1 are the sliced solar cells mentioned above. The electrical connection structures 21 (for example, conductive ribbons) are used to electrically connect the third electrode 143 of the previous slicing solar cell 1 to the fourth electrode 144 of the next slicing solar cell 1, so that two or two Sexually connected to the sliced solar cells 1. The solar cell module 2 further includes a front glass plate 25, a back plate 24 and a packaging material 23. The back plate 24 is arranged with respect to the front glass plate 25. The sliced solar cells 1 are located between the front glass plate 25 and the back plate 24. The packaging material 23 is also located between the front glass plate 25 and the back plate 24 and covers the sliced solar cells 1.

根據本發明之太陽能電池模組,(1)若電性連接結構採用傳統導電焊帶以焊接而形成太陽能電池模組,則太陽能電池串進行串焊時不需翻面;亦無導電焊帶接觸電池邊緣之應力問題。(2)具有半切或多切太陽能電池模組之提高模組總發電功率之優點。(3)內含正面無匯流電極之太陽能電池,發電效率高。 According to the solar cell module of the present invention, (1) If the electrical connection structure is formed by welding using a traditional conductive welding tape, the solar cell string does not need to be turned over during string welding; there is also no conductive welding tape contact The problem of stress on the edge of the battery. (2) It has the advantages of half-cut or multi-cut solar cell modules to increase the total power generation of the module. (3) The solar cell with no bus electrode on the front has high power generation efficiency.

綜上所述,乃僅記載本發明為呈現解決問題所採用的技術手段之較佳實施方式或實施例而已,並非用來限定本發明專利實施之範圍。即凡與本發明專利申請範圍文義相符,或依本 發明專利範圍所做的均等變化與修飾,皆為本發明專利範圍所涵蓋。 In summary, it only describes the preferred embodiments or examples of the technical means adopted by the present invention to solve the problem, and is not intended to limit the scope of the patent implementation of the present invention. That is, where the meaning of the patent application scope of the present invention is consistent, or according to the text The equal changes and modifications made in the scope of the invention patent are all covered by the scope of the invention patent.

1‧‧‧太陽能電池 1‧‧‧solar battery

10‧‧‧太陽能電池基板 10‧‧‧Solar cell substrate

100‧‧‧主要本體部 100‧‧‧Main body

101‧‧‧表面電場層 101‧‧‧Surface electric field layer

102‧‧‧射極層 102‧‧‧Emitter layer

11‧‧‧正面 11‧‧‧Front

111‧‧‧矽晶正表面區 111‧‧‧Silicon crystal surface area

12‧‧‧背面 12‧‧‧Back

1211‧‧‧第一背面子區 1211‧‧‧The first back sub-region

12110‧‧‧第一矽晶背表面區 12110‧‧‧The first silicon crystal back surface area

1212‧‧‧第二背面子區 1212‧‧‧Second back area

12120‧‧‧第二矽晶背表面區 12120‧‧‧Second silicon back surface area

13‧‧‧側面 13‧‧‧Side

131‧‧‧切片側面 131‧‧‧Slice side

14a‧‧‧第一圖案化電極 14a‧‧‧First patterned electrode

14b‧‧‧第二圖案化電極 14b‧‧‧Second patterned electrode

141‧‧‧第一電極 141‧‧‧First electrode

142‧‧‧第二電極 142‧‧‧Second electrode

143‧‧‧第三電極 143‧‧‧The third electrode

144‧‧‧第第四電極 144‧‧‧ Fourth electrode

15‧‧‧鈍化層 15‧‧‧passivation layer

Claims (11)

一種切片太陽能電池,包括:一矽晶基板,具有一正面、一背面及多個側面,該多個側面各自連接該正面及該背面;一鈍化層,覆蓋該正面、該背面及該多個側面之至少一;一第一圖案化電極,穿過該鈍化層而連接該正面及該背面之一第一背面子區,且覆蓋滿該多個側面中之一第一側面;以及一第二圖案化電極,穿過該鈍化層而連接該背面之一第二背面子區;其中,該正面和該第一背面子區的表面電性為第一電性,且該第二背面子區的表面電性為異於該第一電性之一第二電性。 A sliced solar cell, comprising: a silicon crystal substrate with a front face, a back face and a plurality of side faces, the plurality of side faces are respectively connected to the front face and the back face; a passivation layer covering the front face, the back face and the plurality of side faces At least one; a first patterned electrode that passes through the passivation layer to connect to a first back surface sub-region of the front surface and the back surface and covers one of the plurality of side surfaces; and a second pattern Electrode, which passes through the passivation layer and connects to one of the second back surface sub-regions of the back surface; wherein, the surface electrical properties of the front surface and the first back surface sub-region are first electrical properties, and the surface of the second back surface sub-region The electrical property is a second electrical property different from the first electrical property. 如申請專利範圍第1項所述之切片太陽能電池,其中該第一側面的表面電性和該第一背面子區相同。 The sliced solar cell as described in item 1 of the scope of the patent application, wherein the surface electrical properties of the first side surface are the same as those of the first back surface sub-region. 如申請專利範圍第2項所述之切片太陽能電池,其中該第一圖案化電極包括位於該背面上之一第一電性匯流部,位於該側面上的一側面連接電極,該第一電性匯流部具有多個不相連的分段,各分段各自與該側面連接電極相連接。 The sliced solar cell as described in item 2 of the patent application range, wherein the first patterned electrode includes a first electrical busbar portion on the back surface, a side surface on the side surface is connected to the electrode, the first electrical The bus section has a plurality of unconnected segments, and each segment is connected to the side connection electrode. 一種太陽能電池模組,包括:多個切片太陽能電池,各自為如申請專利範圍第1~3項任一所述之矽晶太陽能電池;以及多個電性連接結構,依序兩兩連接該多個切片太陽能電池。 A solar cell module includes: a plurality of sliced solar cells, each of which is a silicon crystal solar cell as described in any one of patent application items 1 to 3; and a plurality of electrical connection structures, which are sequentially connected to each of the multiple Sliced solar cells. 一種切片太陽能電池製造方法,包括下列步驟:步驟(a):準備一電池半成品,該電池半成品包括;一矽晶基板,具有一正面、一背面及連接該正面及該背面之多個側面;以及一鈍化層,覆蓋該正面、該背面及該多個側面之至少一,其中:該多個側面包含一第一側面,該第一側面全部為裸露 的矽晶表面;該背面包含一第一背面子區及一第二背面子區,該正面和該第一背面子區的表面電性為第一電性,該第二背面子區的表面電性為第二電性;以及該鈍化層具有一正面鈍化層開口及一背面鈍化層開口,該正面鈍化層開口露出該正面的一矽晶正表面區,該背面鈍化層開口露出該第一背面子區之一第一矽晶背表面區,該第一矽晶正表面區及第一矽晶背表面區皆鄰接該第一側面;以及步驟(b):進行一電極製程,包括:形成覆蓋滿該第一矽晶正表面區、該第一矽晶背表面區及該第一側面之一第一圖案化電極,以及形成連接該第二背面子區之一第二圖案化電極,其中:該第一圖案化電極為經由一選擇性電極製程所形成,該第一圖案化電極及該第二圖案化電極彼此分離。 A method for manufacturing a sliced solar cell, including the following steps: Step (a): preparing a semi-finished battery cell, the semi-finished battery cell includes; a silicon crystal substrate having a front surface, a back surface, and a plurality of sides connecting the front surface and the back surface; and A passivation layer covering at least one of the front surface, the back surface and the plurality of side surfaces, wherein: the plurality of side surfaces includes a first side surface, all of the first side surfaces are exposed The surface of the silicon crystal; the back surface includes a first back surface sub-region and a second back surface sub-region, the surface electrical properties of the front surface and the first back surface sub-region are first electrical properties, and the surface electrical properties of the second back surface sub-region The property is the second electrical property; and the passivation layer has a front passivation layer opening and a back passivation layer opening, the front passivation layer opening exposes a front surface area of the silicon crystal on the front surface, and the back passivation layer opening exposes the first back surface A first silicon crystal back surface area of one of the sub-regions, the first silicon crystal front surface area and the first silicon crystal back surface area are adjacent to the first side surface; and step (b): performing an electrode process, including: forming a cover A first patterned electrode that fills the first silicon crystal front surface area, the first silicon crystal back surface area, and the first side surface, and forms a second patterned electrode connected to the second back surface sub-area, wherein: The first patterned electrode is formed through a selective electrode process, and the first patterned electrode and the second patterned electrode are separated from each other. 如申請專利範圍第5項所述之切片太陽能電池製造方法,其中步驟(a)中,該電池半成品為對一母板進行一切片製程而得,該第一側面的位置對應該切片製程之一切割線位置。 The method for manufacturing a sliced solar cell as described in item 5 of the patent application scope, wherein in step (a), the semi-finished battery cell is obtained by performing a slicing process on a mother board, and the position of the first side corresponds to one of the slicing processes Cutting line position. 如申請專利範圍第5項所述之切片太陽能電池製造方法,其中步驟(a)中,該背面鈍化層開口更露出該第二背面子區之一第二矽晶背表面區,該第一矽晶背表面區和該第二矽晶背表面區彼此分離,且於步驟(b)中,該第二圖案化電極連接於該第二矽晶背表面區。 The method for manufacturing a sliced solar cell as described in item 5 of the patent application scope, wherein in step (a), the backside passivation layer opening further exposes a second silicon back surface area of one of the second backside sub-regions, the first silicon The crystal back surface area and the second silicon crystal back surface area are separated from each other, and in step (b), the second patterned electrode is connected to the second silicon crystal back surface area. 如申請專利範圍第7項所述之切片太陽能電池製造方法,其中步驟(b)中,該第二圖案化電極亦由該選擇性電極製程所形成,該第二圖案化電極覆蓋滿該第二矽晶背表面區。 The method for manufacturing a sliced solar cell as described in item 7 of the patent scope, wherein in step (b), the second patterned electrode is also formed by the selective electrode process, and the second patterned electrode covers the second Silicon back surface area. 如申請專利範圍第7項所述之切片太陽能電池製造方法,其中步驟(b)中,該第二圖案化電極之形成方式,為先網印一導電漿料層於該第二矽晶背表面區,再進行一燒結製程。 The method for manufacturing a sliced solar cell as described in item 7 of the patent application scope, wherein in step (b), the second patterned electrode is formed by first screen printing a conductive paste layer on the second silicon crystal back surface Area, and then a sintering process. 如申請專利範圍第5項所述之切片太陽能電池製造方法,其中步驟(b)中,該第二圖案化電極之形成方式,為先網印一導電漿料層於該背面的該鈍化層上,再進行一燒結製程。 The method for manufacturing a sliced solar cell as described in item 5 of the patent application scope, wherein in step (b), the second patterned electrode is formed by first screen printing a conductive paste layer on the passivation layer on the back surface , And then a sintering process. 如申請專利範圍第5項所述之切片太陽能電池製造方法,其中步驟(a)中,該多個側面包括一第二側面,該第二側面全部為裸露的矽晶表面,且於步驟(b)中,該第一圖案化電極亦覆蓋滿該第二側面。 The method for manufacturing a sliced solar cell as described in item 5 of the patent application scope, wherein in step (a), the plurality of side surfaces include a second side surface, all of which are bare silicon crystal surfaces, and in step (b) ), the first patterned electrode also covers the second side.
TW107139347A 2018-11-06 2018-11-06 Cut solar cell, method for manufacturing the same and solar cell module TW202018959A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW107139347A TW202018959A (en) 2018-11-06 2018-11-06 Cut solar cell, method for manufacturing the same and solar cell module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW107139347A TW202018959A (en) 2018-11-06 2018-11-06 Cut solar cell, method for manufacturing the same and solar cell module

Publications (1)

Publication Number Publication Date
TW202018959A true TW202018959A (en) 2020-05-16

Family

ID=71895486

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107139347A TW202018959A (en) 2018-11-06 2018-11-06 Cut solar cell, method for manufacturing the same and solar cell module

Country Status (1)

Country Link
TW (1) TW202018959A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112234120A (en) * 2020-09-04 2021-01-15 英利能源(中国)有限公司 Photovoltaic module laying method
TWI734591B (en) * 2020-08-19 2021-07-21 友達光電股份有限公司 Solar cell and method for fabricating the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI734591B (en) * 2020-08-19 2021-07-21 友達光電股份有限公司 Solar cell and method for fabricating the same
CN112234120A (en) * 2020-09-04 2021-01-15 英利能源(中国)有限公司 Photovoltaic module laying method
CN112234120B (en) * 2020-09-04 2022-07-01 英利能源(中国)有限公司 Photovoltaic module laying method

Similar Documents

Publication Publication Date Title
CN106653912B (en) Grid-line-free full back contact solar cell module
US9691925B2 (en) Light receiving element module and manufacturing method therefor
US7498508B2 (en) High voltage solar cell and solar cell module
US8253213B2 (en) Photoelectric conversion element, photoelectric conversion element assembly and photoelectric conversion module
US20120097245A1 (en) Solar cell with interconnection sheet, solar cell module, and method for producing solar cell with internconnection sheet
US20160126375A1 (en) Solar cell, method for manufacturing the same, and solar cell module
CN105027300B (en) The method for forming photovoltaic cell
EP2261999B1 (en) Solar cell element and solar cell module
JP2018500775A (en) Non-main grid high-efficiency back contact solar cell, assembly and manufacturing process thereof
JP6368714B2 (en) Manufacturing method of back contact solar cell module using linear ribbon connector strip and each solar cell module
JP2002217430A (en) P-n junction solar battery
KR101057124B1 (en) Solar cell and manufacturing method thereof
Braun et al. High efficiency multi-busbar solar cells and modules
CN106098807A (en) A kind of N-type crystalline silicon solar battery structure and preparation method thereof
CN108352417A (en) The manufacturing method of the manufacturing method and crystalline silicon solar cell module of crystalline silicon solar cell
TW202018959A (en) Cut solar cell, method for manufacturing the same and solar cell module
TW201340361A (en) Solar cell and method of manufacturing a solar cell
KR101038967B1 (en) Solar cell and method for manufacturing the same
JP2000164901A (en) Solar battery
JP5153571B2 (en) Solar cell and method for manufacturing solar cell
WO2012128284A1 (en) Rear surface electrode-type solar cell, manufacturing method for rear surface electrode-type solar cell, and solar cell module
CN115148835B (en) Solar cell precursor, preparation method, solar cell and photovoltaic module
CN206595263U (en) The interconnection structure of IBC batteries
JP6028982B2 (en) Manufacturing method of solar cell
CN115148834B (en) Solar cell and photovoltaic module