TW202016358A - Electrolytic synthesis anode and method for producing fluorine gas - Google Patents

Electrolytic synthesis anode and method for producing fluorine gas Download PDF

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TW202016358A
TW202016358A TW108128169A TW108128169A TW202016358A TW 202016358 A TW202016358 A TW 202016358A TW 108128169 A TW108128169 A TW 108128169A TW 108128169 A TW108128169 A TW 108128169A TW 202016358 A TW202016358 A TW 202016358A
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mass
iron
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福地陽介
小黒慎也
小林浩
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日商昭和電工股份有限公司
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Abstract

Provided are an electrolytic synthesis anode and an electrolytic synthesis method capable of electrolytically synthesizing fluorine gas or a fluorine-containing compound with low power consumption by suppressing electrolytic resistance. An electrolytic synthesis anode (3) for electrolytically synthesizing fluorine gas includes: an anode substrate (31) formed of a metallic material; and a carbonaceous layer (33) that is formed of a carbonaceous material and that is disposed on a surface of the anode substrate (31). In addition, the metallic material is an iron-based alloy containing iron and nickel.

Description

電解合成用陽極,及氟氣體的製造方法Anode for electrolytic synthesis, and method for producing fluorine gas

本發明有關用來將氟氣體或含氟化合物予以電解合成之陽極,及氟氣體或含氟化合物的電解合成方法。The invention relates to an anode for electrolytic synthesis of fluorine gas or fluorine-containing compound, and an electrolytic synthesis method of fluorine gas or fluorine-containing compound.

氟氣體或含氟化合物(例如三氟化氮),能夠藉由將含有氟化物離子的電解液做電氣分解而予以合成(電解合成)。在此電解合成中,一般作為陽極會使用碳電極,但若使用碳電極,則即使以非常小的電流密度做電氣分解,仍可能發生為了得到規定的電流所必要的電解槽電壓成為超過12V這樣的高壓之問題。此現象被稱為陽極效應。 陽極效應產生的原因如以下所述。若進行電解液的電氣分解,則在陽極的表面產生的氟氣體,會和形成陽極的碳反應,因此在陽極的表面,會形成具有共價鍵性的碳-氟鍵結之被膜。此被膜為絕緣性而與電解液之潤濕性(wettability)亦差,因此電流會變得難以流至陽極,而產生陽極效應。Fluorine gas or fluorine-containing compounds (for example, nitrogen trifluoride) can be synthesized by electrically decomposing an electrolyte containing fluoride ions (electrolytic synthesis). In this electrolytic synthesis, a carbon electrode is generally used as an anode. However, if a carbon electrode is used, even if it is electrically decomposed at a very small current density, the electrolytic cell voltage necessary to obtain a predetermined current may exceed 12V. The problem of high pressure. This phenomenon is called the anode effect. The reason for the anode effect is as follows. When the electrolytic decomposition of the electrolyte is carried out, the fluorine gas generated on the surface of the anode will react with the carbon forming the anode, so that a carbon-fluorine-bonded film having covalent bonding will be formed on the surface of the anode. This coating is insulative and has poor wettability with the electrolyte. Therefore, it becomes difficult for current to flow to the anode, which causes an anode effect.

另一方面,當使用金屬電極作為陽極的情形下,可能發生金屬電極溶解的問題、或由於在金屬電極的表面形成氧化物或氟化物所成之絕緣性被膜而電流變得難以流通而消費電力量變高的問題。 此外,當使用以具有鑽石結構的導電性碳質被膜來被覆金屬基體而成之電極(例如參照專利文獻1)作為陽極的情形下,雖可能抑制電解電阻而抑制消費電力量,但其效果說不上充分。 先前技術文獻 專利文獻On the other hand, when a metal electrode is used as the anode, the problem of dissolution of the metal electrode may occur, or an insulating film formed of oxide or fluoride on the surface of the metal electrode may make it difficult for current to flow and consume power. The amount becomes higher. In addition, when an electrode formed by coating a metal substrate with a conductive carbon film having a diamond structure (for example, refer to Patent Document 1) is used as an anode, although the electrolytic resistance may be suppressed and the amount of power consumption may be suppressed, the effect is not high. full. Prior technical literature Patent Literature

專利文獻1:日本國專利公開公報 2011年第46994號Patent Literature 1: Japanese Patent Publication Gazette No. 46994 of 2011

發明所欲解決之問題Problems to be solved by the invention

本發明所欲解決之問題在於,提供一種抑制電解電阻而能夠以低消費電力量來將氟氣體或含氟化合物予以電解合成之電解合成用陽極及電解合成方法。 解決問題之技術手段The problem to be solved by the present invention is to provide an anode for electrolytic synthesis and an electrolytic synthesis method capable of electrolytically synthesizing a fluorine gas or a fluorine-containing compound with low power consumption while suppressing electrolytic resistance. Technical means to solve problems

為解決前述待解問題,本發明的一態樣如以下的[1]~[8]所述。 [1] 一種電解合成用陽極,係用來將氟氣體予以電解合成之陽極, 具備:由金屬質材料所形成之陽極基體、及由碳質材料所形成且配置於前述陽極基體的表面上之碳質層; 前述金屬質材料,為含有鐵與鎳之鐵基合金。To solve the aforementioned problem to be solved, one aspect of the present invention is as described in the following [1] to [8]. [1] An anode for electrolytic synthesis, which is an anode for electrolytic synthesis of fluorine gas, Equipped with: an anode substrate formed of a metallic material, and a carbonaceous layer formed of a carbonaceous material and arranged on the surface of the anode substrate; The aforementioned metallic material is an iron-based alloy containing iron and nickel.

[2] 如[1]所述之電解合成用陽極,其中,前述金屬質材料,為含有鐵與鎳與鈷之鐵基合金。 [3] 如[1]所述之電解合成用陽極,其中,前述金屬質材料,為含有鐵與鎳與鈷與碳之鐵基合金。 [4] 如[1]所述之電解合成用陽極,其中,前述鐵基合金含有32質量%以上40質量%以下的鎳。[2] The anode for electrolytic synthesis as described in [1], wherein the metallic material is an iron-based alloy containing iron and nickel and cobalt. [3] The anode for electrolytic synthesis according to [1], wherein the metallic material is an iron-based alloy containing iron and nickel and cobalt and carbon. [4] The anode for electrolytic synthesis according to [1], wherein the iron-based alloy contains 32% by mass or more and 40% by mass or less of nickel.

[5] 如[2]所述之電解合成用陽極,其中,前述鐵基合金含有30質量%以上38質量%以下的鎳、與3質量%以上12質量%以下的鈷。 [6] 如[3]所述之電解合成用陽極,其中,前述鐵基合金含有20質量%以上36質量%以下的鎳、與3質量%以上20質量%以下的鈷、與0.01質量%以上1.5質量%以下的碳。[5] The anode for electrolytic synthesis according to [2], wherein the iron-based alloy contains 30% by mass or more and 38% by mass or less nickel, and 3% by mass or more and 12% by mass or less cobalt. [6] The anode for electrolytic synthesis according to [3], wherein the iron-based alloy contains 20% by mass or more and 36% by mass or less nickel, 3% by mass or more and 20% by mass or less cobalt, and 0.01% by mass or more 1.5% by mass or less of carbon.

[7] 如[1]~[6]中任一項所述之電解合成用陽極,其中,前述碳質層,由和前述陽極基體相接之內層、及該內層的外側之外層所構成,前述內層為構成前述鐵基合金的金屬當中至少一種與碳混合存在之層,前述外層為由碳所形成之層。 [8] 一種氟氣體的製造方法,包含使用如[1]~[7]中任一項所述之電解合成用陽極來將含有氟化氫的電解液做電氣分解,而將氟氣體予以電解合成。 發明之功效[7] The anode for electrolytic synthesis according to any one of [1] to [6], wherein the carbonaceous layer is composed of an inner layer in contact with the anode substrate and an outer layer outside the inner layer In the configuration, the inner layer is a layer in which at least one of the metals constituting the iron-based alloy is mixed with carbon, and the outer layer is a layer formed of carbon. [8] A method for producing fluorine gas, comprising using the anode for electrolytic synthesis according to any one of [1] to [7] to electrically decompose an electrolyte containing hydrogen fluoride, and electrolytically synthesize fluorine gas. Effect of invention

按照本發明,能夠抑制電解電阻而以低消費電力量來將氟氣體或含氟化合物予以電解合成。According to the present invention, it is possible to suppress the electrolytic resistance and electrolytically synthesize a fluorine gas or a fluorine-containing compound with low power consumption.

以下說明本發明的一實施形態。另,本實施形態為示意本發明的一例者,本發明不限定於本實施形態。此外,對於本實施形態可施加種種變更或改良,施加了該些變更或改良之形態亦可被包含於本發明。An embodiment of the present invention will be described below. In addition, this embodiment is merely an example of the present invention, and the present invention is not limited to this embodiment. In addition, various changes or improvements can be applied to the present embodiment, and the forms to which these changes or improvements are applied may also be included in the present invention.

參照圖1及圖2,說明本實施形態之具備電解合成用陽極的電解裝置的構造。另,圖1為以正交於電解裝置的電解合成用陽極3及電解合成用陰極5的板面且平行於鉛直方向之平面,來將電解裝置假想地切斷而示意之截面圖。此外,圖2為以平行於電解裝置的電解合成用陽極3及電解合成用陰極5的板面且平行於鉛直方向之平面,來將電解裝置假想地切斷而示意之截面圖。1 and 2, the structure of an electrolysis device provided with an anode for electrolytic synthesis according to this embodiment will be described. In addition, FIG. 1 is a schematic cross-sectional view of the plane of the electrolytic synthesis anode and the cathode 5 for electrosynthesis that are orthogonal to the planes of the electrolysis apparatus and parallel to the vertical direction. In addition, FIG. 2 is a schematic cross-sectional view of a plane in which the electrolytic device is virtually cut with a plane parallel to the plate surfaces of the electrolytic synthesis anode 3 and the electrolytic synthesis cathode 5 of the electrolytic device and parallel to the vertical direction.

圖1、2所示之電解裝置,具備供電解液10貯留之電解槽1、及配置於電解槽1內而被浸漬於電解液10之電解合成用陽極3及電解合成用陰極5。電解槽1的內部,藉由從電解槽1的蓋1a朝鉛直方向下方延伸之筒狀的隔壁7而被區隔成陽極室12與陰極室14。也就是說,被筒狀的隔壁7圍繞之內側的區域為陽極室12,筒狀的隔壁7之外側的區域為陰極室14。The electrolytic device shown in FIGS. 1 and 2 includes an electrolytic cell 1 for storing the electrolytic solution 10, and an anode 3 for electrolytic synthesis and a cathode 5 for electrolytic synthesis disposed in the electrolytic cell 1 and immersed in the electrolytic solution 10. The inside of the electrolytic cell 1 is divided into an anode chamber 12 and a cathode chamber 14 by a cylindrical partition 7 extending downward from the cover 1 a of the electrolytic cell 1 in the vertical direction. That is, the area inside the cylindrical partition 7 is the anode chamber 12, and the area outside the cylindrical partition 7 is the cathode chamber 14.

電解合成用陽極3,就形狀而言不受限定而例如亦可為圓柱狀,惟本例中呈板狀,其板面以平行於鉛直方向之方式配置於陽極室12內。此外,電解合成用陰極5呈板狀,其板面和電解合成用陽極3的板面平行且以藉由2個電解合成用陰極5、5來包夾電解合成用陽極3之方式配置於陰極室14內。 又,在電解合成用陰極5、5的表裏兩板面當中,和相向於電解合成用陽極3的板面為相反側的板面,裝配有用來將電解合成用陰極5、5或電解液10冷卻之冷卻器。圖1、2所示之電解裝置的例子中,冷卻用流體流通的冷卻管16,被裝配於電解合成用陰極5、5作為冷卻器。The anode 3 for electrolytic synthesis is not limited in shape and may be, for example, cylindrical, but in this example, it has a plate shape, and its plate surface is arranged in the anode chamber 12 so as to be parallel to the vertical direction. In addition, the cathode 5 for electrolytic synthesis has a plate shape, the plate surface of which is parallel to the surface of the anode 3 for electrolytic synthesis, and is arranged on the cathode such that the anode 3 for electrolytic synthesis is sandwiched between the cathodes 5 and 5 for electrolytic synthesis Room 14. In addition, between the front and back surfaces of the cathodes 5 and 5 for electrolytic synthesis, the surface opposite to the surface of the anode 3 for electrolytic synthesis is equipped with a cathode 5, 5 or electrolyte 10 for electrolytic synthesis Cooler for cooling. In the example of the electrolysis device shown in FIGS. 1 and 2, the cooling pipe 16 through which the cooling fluid flows is installed in the cathodes 5 and 5 for electrolytic synthesis as a cooler.

作為電解合成用陽極3,能夠使用以下這樣的構成的電極。也就是說,電解合成用陽極3,如圖3所示,為具備由金屬質材料所形成之陽極基體31、及由碳質材料所形成且配置於陽極基體31的表面上之碳質層33的電極。又,形成陽極基體31的金屬質材料,為含有鐵與鎳之鐵基合金。此鐵基合金,可為由鐵及鎳與不可避免雜質所成之合金,亦可為含有鐵及鎳與其以外的合金成分之合金。另,本發明中的鐵基合金,意指以鐵為主成分之合金,也就是說合金成分當中鐵的含有量為最多之合金。As the anode 3 for electrolytic synthesis, an electrode having the following configuration can be used. That is, as shown in FIG. 3, the anode 3 for electrolytic synthesis includes an anode base 31 formed of a metallic material and a carbonaceous layer 33 formed of a carbonaceous material and disposed on the surface of the anode base 31. Electrode. In addition, the metallic material forming the anode base 31 is an iron-based alloy containing iron and nickel. The iron-based alloy may be an alloy made of iron and nickel and unavoidable impurities, or may be an alloy containing iron and nickel and other alloy components. In addition, the iron-based alloy in the present invention means an alloy containing iron as a main component, that is, an alloy having the largest content of iron among alloy components.

金屬的電阻遠比碳的電阻還低,為數十分之一至數百分之一,故若採用金屬基體作為電解合成用陽極3的基體(陽極基體31),則能降低電解合成時的電解電阻。又,若將形成陽極基體31的金屬質材料訂為具有特定的合金組成之鐵基合金,則能夠將配置於陽極基體31的表面上之碳質層33的電解電阻抑制得較低。故,若使用本實施形態之電解合成用陽極3,能夠抑制電解電阻而以低消費電力量來將氟氣體或含氟化合物予以電解合成。The resistance of the metal is much lower than that of carbon, which is one tenth to one hundredth. Therefore, if a metal substrate is used as the substrate of the anode 3 for electrosynthesis (anode substrate 31), it can reduce the Electrolytic resistance. In addition, if the metallic material forming the anode base 31 is made of an iron-based alloy having a specific alloy composition, the electrolytic resistance of the carbonaceous layer 33 disposed on the surface of the anode base 31 can be suppressed low. Therefore, if the anode 3 for electrolytic synthesis of the present embodiment is used, it is possible to electrolytically synthesize a fluorine gas or a fluorine-containing compound with low power consumption while suppressing the electrolytic resistance.

此外,當在含有氟化物離子的電解液中使用碳電極作為陽極而進行電解合成的情形下,碳電極會逐漸崩塌而電解電壓會逐漸上昇,並且由於電壓的上昇會進一步誘發碳電極的崩塌,故若碳電極崩塌到一定程度,便必須暫時中斷電解合成而更換碳電極。此外,使用過一次的碳電極便無法以鑽石被膜被覆,故使用完的碳電極只能廢棄。In addition, in the case of electrolytic synthesis using a carbon electrode as an anode in an electrolyte containing fluoride ions, the carbon electrode will gradually collapse and the electrolytic voltage will gradually rise, and the rise of the voltage will further induce the collapse of the carbon electrode. Therefore, if the carbon electrode collapses to a certain extent, it is necessary to temporarily interrupt the electrolytic synthesis and replace the carbon electrode. In addition, the used carbon electrode cannot be covered with a diamond film, so the used carbon electrode can only be discarded.

相對於此,本實施形態之電解合成用陽極3,不易發生電解所造成的崩塌,因此能夠進行穩定的電解合成。故,幾乎沒有中斷電解合成而更換陽極等進行電解槽的維護之必要性,能夠使維護頻率遽減。又,即使是使用過一次的陽極,仍可在表面形成碳質層,故只要陽極基體沒有消失,仍能在表面形成碳質層而繼續使用。 又,亦能以電解合成的氟氣體作為起始原料,來將六氟化鈾(UF6 )、六氟化硫(SF6 )、四氟化碳(CF4 )、三氟化氮等含氟化合物予以化學合成。氟氣體,或六氟化鈾、六氟化硫、四氟化碳、三氟化氮等含氟化合物,在核能產業領域、半導體產業領域、醫農藥品領域、民生用領域等都有用處。On the other hand, the anode 3 for electrolytic synthesis of the present embodiment is less likely to collapse due to electrolysis, so stable electrolytic synthesis can be performed. Therefore, there is almost no need to interrupt the electrolytic synthesis and replace the anode to perform maintenance of the electrolytic cell, so that the maintenance frequency can be reduced. In addition, even if the anode is used once, a carbonaceous layer can still be formed on the surface, so as long as the anode substrate does not disappear, a carbonaceous layer can still be formed on the surface and continue to be used. In addition, it can also use electrolytically synthesized fluorine gas as the starting material to contain uranium hexafluoride (UF 6 ), sulfur hexafluoride (SF 6 ), carbon tetrafluoride (CF 4 ), nitrogen trifluoride, etc. Fluorine compounds are chemically synthesized. Fluorine gas, or fluorinated compounds such as uranium hexafluoride, sulfur hexafluoride, carbon tetrafluoride, and nitrogen trifluoride, are useful in the nuclear energy industry, semiconductor industry, medical pesticides, and civilian use fields.

形成碳質層33的碳質材料,只要是含有碳的材料則無特別限定,惟作為碳質材料中含有的碳,例如可舉出鑽石、石墨等結晶性的碳、或碳黑等無定形的碳,此外還有奈米碳管、石墨烯、類鑽碳等。 此外,形成碳質層33的碳質材料,可為僅由碳所成之材料,亦可為由碳與其他成分之混合物(例如碳與金屬之混合物或碳與陶瓷之混合物)所成之材料。當碳質材料為碳與金屬之混合物的情形下,該金屬亦可為形成陽極基體31的金屬質材料中含有之金屬(鐵、鎳、鈷等)。The carbonaceous material forming the carbonaceous layer 33 is not particularly limited as long as it contains carbon, but examples of the carbon contained in the carbonaceous material include crystalline carbon such as diamond and graphite, and amorphous materials such as carbon black. Carbon, in addition to carbon nanotubes, graphene, diamond-like carbon and so on. In addition, the carbonaceous material forming the carbonaceous layer 33 may be a material made of only carbon, or a mixture of carbon and other components (such as a mixture of carbon and metal or a mixture of carbon and ceramic) . When the carbonaceous material is a mixture of carbon and metal, the metal may also be the metal (iron, nickel, cobalt, etc.) contained in the metal material forming the anode base 31.

當碳質材料為碳與其他成分之混合物的情形下,碳質材料中的碳的含有量,較佳是比形成陽極基體31的金屬質材料中的碳的含有量還多且未滿100質量%。例如,當形成陽極基體31的金屬質材料不含有碳的情形下,碳質材料中的碳的含有量較佳是超過0質量%未滿100質量%,當形成陽極基體31的金屬質材料含有碳1.5質量%的情形下,碳質材料中的碳的含有量較佳是超過1.5質量%未滿100質量%。When the carbonaceous material is a mixture of carbon and other components, the carbon content of the carbonaceous material is preferably greater than the carbon content of the metal material forming the anode base 31 and less than 100 mass %. For example, when the metallic material forming the anode base 31 does not contain carbon, the content of carbon in the carbonaceous material is preferably more than 0% by mass but less than 100% by mass. When the metallic material forming the anode base 31 contains When carbon is 1.5% by mass, the content of carbon in the carbonaceous material is preferably more than 1.5% by mass and less than 100% by mass.

含有鐵與鎳之鐵基合金中的鎳的含有量並無特別限定,惟為了將碳質層33的電解電阻抑制得更低,較佳是訂為32質量%以上40質量%以下,更佳是訂為34質量%以上38質量%以下。 亦能將形成陽極基體31的金屬質材料,訂為含有鐵與鎳與鈷之鐵基合金。此鐵基合金,可為由鐵、鎳、及鈷與不可避免雜質所成之合金,亦可為含有鐵、鎳、及鈷與其以外的合金成分之合金。The content of nickel in the iron-based alloy containing iron and nickel is not particularly limited, but in order to suppress the electrolytic resistance of the carbonaceous layer 33 to be lower, it is preferably set to 32% by mass or more and 40% by mass or less. It is set to 34% by mass or more and 38% by mass or less. The metallic material forming the anode base 31 can also be defined as an iron-based alloy containing iron and nickel and cobalt. The iron-based alloy may be an alloy made of iron, nickel, cobalt and unavoidable impurities, or it may be an alloy containing iron, nickel, cobalt and other alloy components.

含有鐵與鎳與鈷之鐵基合金中的鎳的含有量並無特別限定,惟為了將碳質層33的電解電阻抑制得更低,較佳是訂為30質量%以上38質量%以下,更佳是訂為31質量%以上35質量%以下。此外,含有鐵與鎳與鈷之鐵基合金中的鈷的含有量並無特別限定,惟為了將碳質層33的電解電阻抑制得更低,較佳是訂為3質量%以上12質量%以下,更佳是訂為4質量%以上7質量%以下。The content of nickel in the iron-based alloy containing iron and nickel and cobalt is not particularly limited, but in order to suppress the electrolytic resistance of the carbonaceous layer 33 to be lower, it is preferably set to 30% by mass or more and 38% by mass or less, More preferably, it is set at 31% by mass or more and 35% by mass or less. In addition, the content of cobalt in the iron-based alloy containing iron and nickel and cobalt is not particularly limited, but in order to suppress the electrolytic resistance of the carbonaceous layer 33 to be lower, it is preferably set to 3% by mass or more and 12% by mass In the following, it is more preferably 4% by mass or more and 7% by mass or less.

又,亦能將形成陽極基體31的金屬質材料,訂為含有鐵與鎳與鈷與碳之鐵基合金。此鐵基合金,可為由鐵、鎳、鈷、及碳與不可避免雜質所成之合金,亦可為含有鐵、鎳、鈷、及碳與其以外的合金成分之合金。 含有鐵與鎳與鈷與碳之鐵基合金中的鎳的含有量並無特別限定,惟為了將碳質層33的電解電阻抑制得更低,較佳是訂為20質量%以上36質量%以下,更佳是訂為21質量%以上28質量%以下。In addition, the metallic material forming the anode base 31 can also be defined as an iron-based alloy containing iron and nickel and cobalt and carbon. The iron-based alloy may be an alloy made of iron, nickel, cobalt, and carbon and inevitable impurities, or may be an alloy containing iron, nickel, cobalt, and carbon and other alloy components. The content of nickel in the iron-based alloy containing iron and nickel and cobalt and carbon is not particularly limited, but in order to suppress the electrolytic resistance of the carbonaceous layer 33 to be lower, it is preferably set to 20% by mass or more and 36% by mass Below, it is more preferably set to 21% by mass or more and 28% by mass or less.

此外,含有鐵與鎳與鈷與碳之鐵基合金中的鈷的含有量並無特別限定,惟為了將碳質層33的電解電阻抑制得更低,較佳是訂為3質量%以上20質量%以下,更佳是訂為6質量%以上16質量%以下。 又,含有鐵與鎳與鈷與碳之鐵基合金中的碳的含有量並無特別限定,惟為了將碳質層33的電解電阻抑制得更低,較佳是訂為0.01質量%以上1.5質量%以下,更佳是訂為0.5質量%以上1.0質量%以下。In addition, the content of cobalt in the iron-based alloy containing iron and nickel and cobalt and carbon is not particularly limited, but in order to suppress the electrolytic resistance of the carbonaceous layer 33 to be lower, it is preferably set to 3% by mass or more 20 If the mass% or less, it is more preferable to set it as 6 mass% or more and 16 mass% or less. In addition, the content of carbon in the iron-based alloy containing iron and nickel and cobalt and carbon is not particularly limited, but in order to suppress the electrolytic resistance of the carbonaceous layer 33 to be lower, it is preferably set to 0.01% by mass or more and 1.5 The mass% or less, more preferably 0.5 mass% or more and 1.0 mass% or less.

又,碳質層33,可為如圖3所示般的一層構造,亦可為如圖4所示般的二層構造。也就是說,碳質層33,亦可由和陽極基體31相接之內層331、與該內層331的外側的外層332所構成。此處,內層331為構成形成陽極基體31的鐵基合金之金屬(鐵、鎳、鈷等)當中至少一種與碳混合存在之層,外層332為由碳所形成之層。In addition, the carbonaceous layer 33 may have a one-layer structure as shown in FIG. 3 or a two-layer structure as shown in FIG. 4. In other words, the carbonaceous layer 33 may also be composed of an inner layer 331 that is in contact with the anode base 31 and an outer layer 332 that is outside the inner layer 331. Here, the inner layer 331 is a layer in which at least one of metals (iron, nickel, cobalt, etc.) constituting the iron-based alloy forming the anode base 31 is mixed with carbon, and the outer layer 332 is a layer formed of carbon.

內層331,如上述般,由構成形成陽極基體31的鐵基合金之金屬與碳所成,惟內層331中的碳的含有量,較佳是比形成陽極基體31的金屬質材料中的碳的含有量還多且未滿100質量%。例如,當形成陽極基體31的金屬質材料不含有碳的情形下,內層331中的碳的含有量較佳是超過0質量%未滿100質量%,當形成陽極基體31的金屬質材料含有碳1.5質量%的情形下,內層331中的碳的含有量較佳是超過1.5質量%未滿100質量%。The inner layer 331 is composed of metal and carbon constituting the iron-based alloy forming the anode base 31 as described above, but the content of carbon in the inner layer 331 is preferably higher than that of the metallic material forming the anode base 31 The carbon content is still large and less than 100% by mass. For example, when the metallic material forming the anode base 31 does not contain carbon, the content of carbon in the inner layer 331 is preferably more than 0% by mass but less than 100% by mass. When the metallic material forming the anode base 31 contains In the case of 1.5% by mass of carbon, the content of carbon in the inner layer 331 is preferably more than 1.5% by mass and less than 100% by mass.

在陽極基體31的表面上形成碳質層33之方法並無特別限定,惟當如圖3所示般的一層構造的碳質層33的情形下,可舉出在陽極基體31的表面上將碳質層33成膜之方法、或將陽極基體31的表層部予以改質而形成碳質層33之方法。作為成膜方法,例如可舉出以電阻加熱蒸鍍法、電子束蒸鍍法為代表之真空蒸鍍法,濺鍍法,離子鍍(ion plating)法,熱燈絲化學蒸鍍(CVD)法,微波電漿CVD法,電漿電弧噴射(plasma arc jet)CVD法,電漿離子植入法等的乾式成膜方法。特別是,較佳是在陽極基體31的溫度成為比450℃還低的溫度之條件下,將碳質層33成膜。此外,作為改質方法,例如可舉出使用碳氫化合物系氣體等之離子植入法。The method of forming the carbonaceous layer 33 on the surface of the anode substrate 31 is not particularly limited, but in the case of the one-layer structured carbonaceous layer 33 as shown in FIG. 3, the surface of the anode substrate 31 may be A method of forming the carbonaceous layer 33 or a method of modifying the surface layer portion of the anode substrate 31 to form the carbonaceous layer 33. As the film forming method, for example, a vacuum vapor deposition method typified by a resistance heating vapor deposition method, an electron beam vapor deposition method, a sputtering method, an ion plating method, a thermal filament chemical vapor deposition (CVD) method , Microwave plasma CVD method, plasma arc jet (plasma arc jet) CVD method, plasma ion implantation method and other dry film forming methods. In particular, it is preferable to form the carbonaceous layer 33 under the condition that the temperature of the anode base 31 becomes lower than 450°C. In addition, as a modification method, for example, an ion implantation method using a hydrocarbon-based gas or the like can be mentioned.

此外,當如圖4所示般的二層構造的碳質層33的情形下,可舉出在陽極基體31的表面上接連將碳質層33的內層331與外層332成膜之方法、或將陽極基體31的表層部予以改質而形成內層331以後在內層331之上將外層332成膜之方法。In addition, in the case of the carbonaceous layer 33 having a two-layer structure as shown in FIG. 4, a method of forming the inner layer 331 and the outer layer 332 of the carbonaceous layer 33 in succession on the surface of the anode base 31 may be mentioned. Or a method of modifying the surface layer portion of the anode substrate 31 to form the inner layer 331 and then forming the outer layer 332 on the inner layer 331.

當在陽極基體31的表面上接連將碳質層33的內層331與外層332成膜的情形下,例如能夠採用以下方法,即,使用上述的乾式成膜方法,一面連續性地改變金屬與碳的組成比一面在陽極基體31的表面上將內層331成膜以後,在內層331之上將外層332成膜。此外,當將陽極基體31的表層部予以改質而形成內層331以後在內層331之上將外層332成膜的情形下,例如能夠採用以下方法,即,藉由使用碳氫化合物系氣體等之離子植入法在陽極基體31的表層部植入碳離子而將該表層部改質,而形成金屬與碳的組成比連續性地變化之內層331以後,藉由上述的乾式成膜方法在內層331之上將外層332成膜。In the case where the inner layer 331 and the outer layer 332 of the carbonaceous layer 33 are formed on the surface of the anode substrate 31 in succession, for example, the following method can be adopted, that is, the above-described dry film forming method can be used to continuously change the metal and After forming the inner layer 331 on the surface of the anode substrate 31 with the carbon composition ratio, the outer layer 332 is formed on the inner layer 331. In addition, when the surface layer portion of the anode substrate 31 is modified to form the inner layer 331 and then the outer layer 332 is formed on the inner layer 331, for example, the following method can be adopted, that is, by using a hydrocarbon-based gas The plasma implantation method implants carbon ions in the surface layer portion of the anode substrate 31 to modify the surface layer portion to form an inner layer 331 in which the composition ratio of metal to carbon continuously changes, and then the above-mentioned dry film formation Method The outer layer 332 is formed on the inner layer 331.

作為電解合成用陰極5,能夠使用金屬製電極,能夠使用由例如鐵所成之電極。 作為電解液10,能夠使用熔融鹽(molten salt),例如能夠使用含有氟化氫(HF)之熔融氟化鉀(KF)。 若在電解合成用陽極3與電解合成用陰極5之間,供給例如電流密度0.01A/cm2 以上1A/cm2 以下的電流,則在電解合成用陽極3會生成以氟氣體(F2 )為主成分之陽極氣體,在電解合成用陰極5會生成以氫氣體(H2 )為主成分之陰極氣體作為副產物。As the cathode 5 for electrolytic synthesis, a metal electrode can be used, and an electrode made of iron, for example, can be used. As the electrolytic solution 10, a molten salt can be used, and for example, molten potassium fluoride (KF) containing hydrogen fluoride (HF) can be used. When an electric current of, for example, a current density of 0.01 A/cm 2 or more and 1 A/cm 2 or less is supplied between the anode 3 for electrolytic synthesis and the cathode 5 for electrolytic synthesis, fluorine gas (F 2 ) is generated in the anode 3 for electrolytic synthesis The anode gas as the main component generates cathode gas containing hydrogen gas (H 2 ) as a by-product in the cathode 5 for electrolytic synthesis.

陽極氣體會在陽極室12內的電解液10的液面上的空間蓄積,陰極氣體會在陰極室14內的電解液10的液面上的空間蓄積。電解液10的液面上的空間,藉由隔壁7而被區隔成陽極室12內的空間與陰極室14內的空間,故不會使得陽極氣體與陰極氣體混合。 另一方面,電解液10,針對比隔壁7的下端還上方側的部分是藉由隔壁7而被區隔,但針對比隔壁7的下端還下方側的部分則未被隔壁7區隔而是連續。The anode gas is accumulated in the space on the liquid surface of the electrolyte 10 in the anode chamber 12, and the cathode gas is accumulated in the space on the liquid surface of the electrolyte 10 in the cathode chamber 14. The space on the liquid surface of the electrolyte 10 is partitioned by the partition 7 into a space in the anode chamber 12 and a space in the cathode chamber 14, so that the anode gas and the cathode gas are not mixed. On the other hand, the electrolyte 10 is partitioned by the partition 7 for the portion above the lower end of the partition 7, but is not partitioned by the partition 7 for the portion below the lower end of the partition 7 continuous.

此外,在陽極室12,設有將在電解合成用陽極3生成的陽極氣體從陽極室12內排出至電解槽1的外部之排氣口21,在陰極室14,設有將在電解合成用陰極5、5生成的陰極氣體從陰極室14內排出至電解槽1的外部之排氣口23。In addition, the anode chamber 12 is provided with an exhaust port 21 for exhausting the anode gas generated in the anode 3 for electrolytic synthesis from the anode chamber 12 to the outside of the electrolytic cell 1, and the cathode chamber 14 is provided with a The cathode gas generated by the cathodes 5 and 5 is discharged from the cathode chamber 14 to the exhaust port 23 outside the electrolytic cell 1.

以下,進一步詳細說明本實施形態之電解合成用陽極,及使用它之氟氣體或含氟化合物的電解合成方法。 (1)電解槽 進行電解合成之電解槽的材質並無特別限定,惟從耐蝕性的觀點看來,較佳是使用銅、軟鋼、Monel(商標)、鎳合金、氟樹脂等。 為了防止在電解合成用陽極被電解合成的氟氣體或含氟化合物與在電解合成用陰極生成的氫氣體混合,配置有電解合成用陽極的陽極室與配置有電解合成用陰極的陰極室,較佳是如圖1、2所示之電解裝置般,藉由隔壁、隔膜等而其全部或一部分被區隔。Hereinafter, the anode for electrolytic synthesis according to this embodiment and the electrolytic synthesis method using the fluorine gas or fluorine-containing compound will be described in further detail. (1) Electrolysis cell The material of the electrolytic cell for electrolytic synthesis is not particularly limited, but from the viewpoint of corrosion resistance, copper, mild steel, Monel (trademark), nickel alloy, fluororesin, etc. are preferably used. In order to prevent the fluorine gas or fluorine-containing compound that is electrolytically synthesized at the anode for electrolytic synthesis from being mixed with the hydrogen gas generated at the cathode for electrolytic synthesis, the anode chamber provided with the anode for electrolytic synthesis and the cathode chamber provided with the cathode for electrolytic synthesis are Preferably, as in the electrolysis device shown in FIGS. 1 and 2, all or a part of it is partitioned by partition walls, diaphragms, and the like.

(2)電解液 說明將氟氣體予以電解合成的情形下使用之電解液的一例。當將氟氣體予以電解合成的情形下,能夠使用氟化氫與氟化鉀之混合熔融鹽作為電解液。此電解液中的氟化氫與氟化鉀之莫耳比,例如能夠訂為1.5~2.5:1。 或是,氟化氫與氟化銫(CsF)之混合熔融鹽、或氟化氫與氟化鉀與氟化銫之混合熔融鹽,亦能使用作為電解液。含有氟化銫之電解液的組成比,亦可訂為如以下般。也就是說,電解液中的氟化銫與氟化氫之莫耳比,亦可訂為1:1.0~4.0。此外,電解液中的氟化銫與氟化氫與氟化鉀之莫耳比,亦可訂為1:1.5~4.0:0.01~1.0。(2) Electrolyte An example of the electrolyte used when electrolytically synthesizing fluorine gas will be described. In the case of electrolytic synthesis of fluorine gas, a mixed molten salt of hydrogen fluoride and potassium fluoride can be used as an electrolyte. The molar ratio of hydrogen fluoride to potassium fluoride in this electrolyte can be set to 1.5 to 2.5:1, for example. Alternatively, a mixed molten salt of hydrogen fluoride and cesium fluoride (CsF), or a mixed molten salt of hydrogen fluoride and potassium fluoride and cesium fluoride can also be used as the electrolyte. The composition ratio of the electrolyte containing cesium fluoride can also be set as follows. In other words, the molar ratio of cesium fluoride to hydrogen fluoride in the electrolyte can also be set to be 1: 1.0 to 4.0. In addition, the molar ratio of cesium fluoride, hydrogen fluoride, and potassium fluoride in the electrolyte can also be set at 1:1.5 to 4.0:0.01 to 1.0.

接下來,說明將含氟化合物予以電解合成的情形下使用之電解液的一例。當將含氟化合物予以電解合成的情形下,能夠使用具有欲合成的含氟化合物的氟化前的化學結構之化合物、與氟化氫、與氟化鉀之混合熔融鹽作為電解液。可將具有氟化前的化學結構之化合物做成氣體狀,一面噴入氟化氫與氟化鉀之混合熔融鹽一面進行電解合成,亦可使用令具有氟化前的化學結構之化合物溶解於氟化氫與氟化鉀之混合熔融鹽而成之電解液來進行電解合成。具有氟化前的化學結構之化合物,會和在電解合成用陽極的反應中生成的氟氣體反應,成為含氟化合物。Next, an example of the electrolyte used when electrolytically synthesizing a fluorine-containing compound will be described. In the case of electrolytically synthesizing a fluorine-containing compound, a compound having a chemical structure before fluorination of the fluorine-containing compound to be synthesized, a mixed molten salt with hydrogen fluoride and potassium fluoride can be used as an electrolyte. Compounds with the chemical structure before fluorination can be made into a gaseous state, while spraying a mixed molten salt of hydrogen fluoride and potassium fluoride for electrolytic synthesis, or using compounds with the chemical structure before fluorination dissolved in hydrogen fluoride and Electrolyte is synthesized by electrolytic solution of potassium fluoride mixed with molten salt. The compound having the chemical structure before fluorination will react with the fluorine gas generated in the reaction of the anode for electrolytic synthesis to become a fluorine-containing compound.

例如當將三氟化氮予以電解合成的情形下,能夠使用氟化氫與氟化銨(NH4 F)之混合熔融鹽、或氟化氫與氟化鉀與氟化銨之混合熔融鹽作為電解液。 氟化氫與氟化銨之混合熔融鹽的情形下,電解液中的氟化氫與氟化銨之莫耳比,例如能夠訂為1.5~2.5:1。 氟化氫中,一般而言含有0.1質量%以上5質量%以下的水分。當氟化氫中含有的水分比3質量%還多的情形下,亦可藉由例如日本特開平7-2515號公報記載之方法,使氟化氫中含有的水分降低至3質量%以下以後,再使用於電解液。一般而言,要使氟化氫中的水分量簡便地降低並不容易,故當將氟氣體或含氟化合物予以工業地電解合成的情形下,由成本面看來,較佳是使用水分的含有量為3質量%以下的氟化氫。For example, in the case of electrolytic synthesis of nitrogen trifluoride, a mixed molten salt of hydrogen fluoride and ammonium fluoride (NH 4 F), or a mixed molten salt of hydrogen fluoride and potassium fluoride and ammonium fluoride can be used as an electrolyte. In the case of a mixed molten salt of hydrogen fluoride and ammonium fluoride, the molar ratio of hydrogen fluoride and ammonium fluoride in the electrolyte can be set to 1.5 to 2.5:1, for example. Hydrogen fluoride generally contains 0.1% by mass or more and 5% by mass or less of water. When the water content in hydrogen fluoride is more than 3% by mass, the water content in hydrogen fluoride can be reduced to 3% by mass or less by the method described in Japanese Patent Laid-Open No. 7-2515, for example. Electrolyte. Generally speaking, it is not easy to simply reduce the amount of water in hydrogen fluoride, so in the case of industrially electrolytically synthesizing fluorine gas or fluorine-containing compounds, from the cost side, it is preferable to use the water content It is hydrogen fluoride of 3% by mass or less.

(3)電解合成用陽極 電解合成用陽極的形狀並無特別限定,如板狀、網目狀、衝孔板狀、將板彎折成圓般的形狀、將產生的氣泡引導至電極的背面之類的形狀、將電解液的循環納入考量之三維結構者等,因陽極基體是由金屬質材料所形成因此能夠自由選擇形狀。(3) Anode for electrolytic synthesis The shape of the anode for electrolytic synthesis is not particularly limited, such as a plate shape, a mesh shape, a punched plate shape, bending the plate into a round shape, guiding the generated bubbles to the back surface of the electrode, etc. Those who consider the three-dimensional structure of the cycle considered, because the anode substrate is formed of a metallic material, so the shape can be freely selected.

(4)電解合成用陰極 如前述般,作為電解合成用陰極能夠使用金屬製電極。作為形成金屬製電極的金屬的種類,例如可舉出鐵、銅、鎳、Monel(商標)。針對電解合成用陰極的形狀,如同電解合成用陽極。 實施例(4) Cathode for electrolytic synthesis As described above, a metal electrode can be used as a cathode for electrolytic synthesis. Examples of the type of metal forming the metal electrode include iron, copper, nickel, and Monel (trademark). The shape of the cathode for electrolytic synthesis is similar to the anode for electrolytic synthesis. Examples

以下揭示實施例及比較例,更具體地說明本發明。 [比較例1] 將SGL Carbon公司製的粒狀石墨「SIGRAFINE(註冊商標) ABR」加工成長2cm、寬1cm、厚度0.5cm的板,裝上供電用金屬棒,以電極面成為長1cm、寬1cm的矩形狀之方式予以掩蔽(masking),做成電極。 將此電極訂為陽極,將Monel(商標)板訂為陰極,製造出和圖1、2所示電解裝置同樣構成的電解裝置。參照電極訂為鎳的腐蝕電位。此外,作為電解液,使用氟化鉀與氟化氫之混合熔融鹽(KF・2HF)。 在鎳的腐蝕電位基準下以陽極的電位成為恆定6V之方式進行定電壓電解,將氟氣體予以電解合成。此時的電流為0.148A,表觀的電流密度為0.148A/cm2 。故,陽極的電解電阻為40.5Ω(=6/0.148)。Examples and comparative examples are disclosed below to explain the present invention more specifically. [Comparative Example 1] Granular graphite "SIGRAFINE (registered trademark) ABR" manufactured by SGL Carbon was processed into a plate 2 cm long, 1 cm wide, and 0.5 cm thick, and a metal rod for power supply was installed. It is masked in a rectangular shape of 1 cm to make an electrode. This electrode was designated as the anode, and the Monel (trademark) plate was designated as the cathode, to produce an electrolytic device having the same configuration as the electrolytic device shown in FIGS. The reference electrode is defined as the corrosion potential of nickel. In addition, as the electrolyte, a mixed molten salt of potassium fluoride and hydrogen fluoride (KF·2HF) is used. Under the reference of the corrosion potential of nickel, constant-voltage electrolysis was carried out so that the potential of the anode became constant at 6 V, and the fluorine gas was electrolytically synthesized. The current at this time was 0.148A, and the apparent current density was 0.148A/cm 2 . Therefore, the electrolytic resistance of the anode is 40.5Ω (=6/0.148).

[比較例2] 在陽極的表面藉由熱CVD法使導電性鑽石被膜形成,除這點以外如同比較例1,進行電解合成。此時的電流為0.260A,表觀的電流密度為0.260A/cm2 。故,陽極的電解電阻為23.1Ω(=6/0.260)。[Comparative Example 2] A conductive diamond film was formed on the surface of the anode by a thermal CVD method. Except for this point, as in Comparative Example 1, electrolytic synthesis was performed. The current at this time was 0.260 A, and the apparent current density was 0.260 A/cm 2 . Therefore, the electrolytic resistance of the anode is 23.1Ω (=6/0.260).

[比較例3] 不訂為定電壓電解而是訂為定電流電解,除這點以外如同比較例2,進行電解合成。電流為0.148A,電流密度為0.148A/cm2 。此時的參照電極基準的陽極的電壓為5.23V。故,陽極的電解電阻為35.3Ω(=5.23/0.148)。[Comparative Example 3] Instead of constant voltage electrolysis but constant current electrolysis, other than this point, as in Comparative Example 2, electrolytic synthesis was performed. The current was 0.148A, and the current density was 0.148A/cm 2 . The voltage of the anode of the reference electrode reference at this time was 5.23V. Therefore, the electrolytic resistance of the anode is 35.3Ω (=5.23/0.148).

[實施例1] 作為陽極使用下記之電極,除這點以外如同比較例1,進行電解合成。實施例1中使用之陽極,具備由金屬質材料所形成之陽極基體、及由碳質材料所形成且配置於陽極基體的表面上之碳質層。形成陽極基體的金屬質材料,為由鐵與鎳與鈷所成之鐵基合金,鐵的含有量為63.5質量%,鎳的含有量為31.5質量%,鈷的含有量為5.0質量%。另,陽極基體的尺寸為長2cm、寬1cm、厚度1mm,以電極面成為長1cm、寬1cm的矩形狀之方式予以掩蔽。[Example 1] As the anode, the electrode described below was used, and except for this point, as in Comparative Example 1, electrolytic synthesis was performed. The anode used in Example 1 includes an anode base formed of a metallic material and a carbonaceous layer formed of a carbonaceous material and disposed on the surface of the anode base. The metallic material forming the anode matrix is an iron-based alloy formed of iron, nickel, and cobalt. The iron content is 63.5% by mass, the nickel content is 31.5% by mass, and the cobalt content is 5.0% by mass. In addition, the size of the anode substrate was 2 cm long, 1 cm wide, and 1 mm thick, and the electrode surface was masked so as to have a rectangular shape of 1 cm long and 1 cm wide.

配置於陽極基體的表面上之碳質層,具有由內層與外層所成之二層構造,藉由使用X射線光電子光譜法(XPS)之分析,內層為由碳及金屬(鐵、鎳、鈷)所成之層,外層為實質上僅由碳所成之類鑽碳層。 此內層,是藉由以電漿離子植入法在陽極基體的表層部植入碳離子來將該表層部改質而形成。此外,外層是以電漿離子植入法在內層之上將碳層積而形成。The carbonaceous layer arranged on the surface of the anode substrate has a two-layer structure composed of an inner layer and an outer layer. By analysis using X-ray photoelectron spectroscopy (XPS), the inner layer is composed of carbon and metals (iron, nickel , Cobalt) layer, the outer layer is essentially a drilled carbon layer made of only carbon. This inner layer is formed by implanting carbon ions in the surface layer portion of the anode substrate by plasma ion implantation to modify the surface layer portion. In addition, the outer layer is formed by laminating carbon on the inner layer by plasma ion implantation.

定電壓電解時的電流為0.454A,表觀的電流密度為0.454A/cm2 。故,陽極的電解電阻為13.2Ω(=6/0.454)。此陽極的電解電阻的值為比較例2的一半程度,可知陽極的電解電阻大大地降低。The current during constant voltage electrolysis was 0.454A, and the apparent current density was 0.454A/cm 2 . Therefore, the electrolytic resistance of the anode is 13.2Ω (=6/0.454). The value of the electrolytic resistance of this anode is about half that of Comparative Example 2, and it can be seen that the electrolytic resistance of the anode is greatly reduced.

[比較例4] 使用由鎳所形成之陽極基體,除這點以外如同實施例1,進行電解合成。此時的電流為0.27A,表觀的電流密度為0.27A/cm2 。故,陽極的電解電阻為22.2Ω(=6/0.27)。此外,若持續定電壓電解則電流逐漸變得難以流通,電流降低至0.14A,陽極的電解電阻上昇至42.9Ω(=6/0.14)。[Comparative Example 4] An anode substrate made of nickel was used, and the electrolysis synthesis was performed as in Example 1 except for this point. The current at this time was 0.27A, and the apparent current density was 0.27A/cm 2 . Therefore, the electrolytic resistance of the anode is 22.2Ω (=6/0.27). In addition, when constant-voltage electrolysis continues, the current gradually becomes difficult to flow, the current decreases to 0.14A, and the electrolytic resistance of the anode increases to 42.9Ω (=6/0.14).

[比較例5] 使用由鐵所形成之陽極基體,除這點以外如同實施例1,進行電解合成。此時的電流為0.24A,表觀的電流密度為0.24A/cm2 。故,陽極的電解電阻為25.0Ω(=6/0.24)。此外,若持續定電壓電解則電流逐漸變得難以流通,電流降低至0.14A,陽極的電解電阻上昇至42.9Ω(=6/0.14)。[Comparative Example 5] An anode substrate made of iron was used, and the electrolysis synthesis was performed as in Example 1 except for this point. The current at this time was 0.24A, and the apparent current density was 0.24A/cm 2 . Therefore, the electrolytic resistance of the anode is 25.0Ω (=6/0.24). In addition, as the constant-voltage electrolysis continues, the current gradually becomes difficult to flow, the current decreases to 0.14A, and the electrolytic resistance of the anode increases to 42.9Ω (=6/0.14).

[實施例2] 不訂為定電壓電解而是訂為定電流電解,除這點以外如同實施例1,進行電解合成。電流為0.148A,電流密度為0.148A/cm2 。此時的參照電極基準的陽極的電壓為4.60V。故,陽極的電解電阻為31.1Ω(=4.60/0.148)。消費電力量和電壓成比例,故比起比較例1之情形會使消費電力量降低20%以上(100-4.6/6×100)。 一面供給氟化氫,進一步在500小時的期間以相同電流進行定電流電解。其結果,電壓沒有變化,氟氣體的產生電流效率為99%,在電解結束後的陽極的表面亦未發現劣化。[Embodiment 2] Instead of constant voltage electrolysis but constant current electrolysis, except for this point, electrolysis synthesis was performed as in Example 1. The current was 0.148A, and the current density was 0.148A/cm 2 . The voltage of the anode of the reference electrode reference at this time was 4.60V. Therefore, the electrolytic resistance of the anode is 31.1Ω (=4.60/0.148). The power consumption is proportional to the voltage, so compared to the case of Comparative Example 1, the power consumption will be reduced by more than 20% (100-4.6/6×100). While supplying hydrogen fluoride, constant current electrolysis was performed at the same current for 500 hours. As a result, the voltage did not change, the current efficiency of fluorine gas generation was 99%, and no deterioration was observed on the surface of the anode after the electrolysis.

[實施例3] 形成陽極基體的金屬質材料,為由鐵與鎳與鈷所成之鐵基合金,鐵的含有量為61.8質量%,鎳的含有量為32.0質量%,鈷的含有量為6.2質量%,除這點以外如同實施例1,進行電解合成。此時的電流為0.472A,表觀的電流密度為0.472A/cm2 。故,陽極的電解電阻為12.7Ω(=6/0.472)。[Example 3] The metallic material forming the anode substrate is an iron-based alloy composed of iron, nickel, and cobalt. The iron content is 61.8% by mass, the nickel content is 32.0% by mass, and the cobalt content is 6.2% by mass, except for this point, as in Example 1, electrolytic synthesis was performed. The current at this time was 0.472A, and the apparent current density was 0.472A/cm 2 . Therefore, the electrolytic resistance of the anode is 12.7Ω (=6/0.472).

[實施例4] 形成陽極基體的金屬質材料,為由鐵與鎳與鈷所成之鐵基合金,鐵的含有量為52.0質量%,鎳的含有量為38.0質量%,鈷的含有量為10.0質量%,除這點以外如同實施例1,進行電解合成。此時的電流為0.411A,表觀的電流密度為0.411A/cm2 。故,陽極的電解電阻為14.6Ω(=6/0.411)。[Example 4] The metallic material forming the anode substrate is an iron-based alloy formed of iron, nickel, and cobalt. The iron content is 52.0% by mass, the nickel content is 38.0% by mass, and the cobalt content is 10.0% by mass, except for this point, as in Example 1, electrolytic synthesis was performed. The current at this time was 0.411A, and the apparent current density was 0.411A/cm 2 . Therefore, the electrolytic resistance of the anode is 14.6Ω (=6/0.411).

[實施例5] 形成陽極基體的金屬質材料,為由鐵與鎳所成之鐵基合金,鐵的含有量為65.0質量%,鎳的含有量為35.0質量%,除這點以外如同實施例1,進行電解合成。此時的電流為0.373A,表觀的電流密度為0.373A/cm2 。故,陽極的電解電阻為16.1Ω(=6/0.373)。[Example 5] The metallic material forming the anode substrate is an iron-based alloy formed of iron and nickel. The iron content is 65.0% by mass, and the nickel content is 35.0% by mass. 1. Perform electrolytic synthesis. The current at this time was 0.373A, and the apparent current density was 0.373A/cm 2 . Therefore, the electrolytic resistance of the anode is 16.1Ω (=6/0.373).

[實施例6] 形成陽極基體的金屬質材料,為由鐵與鎳與鈷與碳所成之鐵基合金,鐵的含有量為61.2質量%,鎳的含有量為30.0質量%,鈷的含有量為8.0質量%,碳的含有量為0.8質量%,除這點以外如同實施例1,進行電解合成。此時的電流為0.448A,表觀的電流密度為0.448A/cm2 。故,陽極的電解電阻為13.4Ω(=6/0.448)。[Example 6] The metallic material forming the anode substrate is an iron-based alloy composed of iron and nickel and cobalt and carbon. The iron content is 61.2% by mass, the nickel content is 30.0% by mass, and the cobalt content The amount was 8.0% by mass and the carbon content was 0.8% by mass. Except for this point, as in Example 1, electrolytic synthesis was performed. The current at this time was 0.448A, and the apparent current density was 0.448A/cm 2 . Therefore, the electrolytic resistance of the anode is 13.4Ω (=6/0.448).

[實施例7] 配置於陽極基體的表面上之碳質層,為藉由電漿CVD法而形成之一層構造的類鑽碳層,除這點以外如同實施例1,進行電解合成。此時的電流為0.432A,表觀的電流密度為0.432A/cm2 。故,陽極的電解電阻為13.9Ω(=6/0.432)。[Example 7] The carbonaceous layer disposed on the surface of the anode substrate is a diamond-like carbon layer having a one-layer structure formed by the plasma CVD method. Except for this point, as in Example 1, electrolytic synthesis is performed. The current at this time was 0.432A, and the apparent current density was 0.432A/cm 2 . Therefore, the electrolytic resistance of the anode is 13.9Ω (=6/0.432).

Figure 02_image001
Figure 02_image001

由表1可知,實施例1~7是使用以含有鐵與鎳之鐵基合金來形成陽極基體,而在該陽極基體的表面上具備碳質層之陽極,因此比起使用碳製陽極之比較例1、2或使用金屬製陽極之比較例4、5,能夠將定電壓電解時的電阻穩定地減低。此外,可知當以含有鐵與鎳與鈷之鐵基合金來形成陽極基體的情形下,比起使用碳製陽極之比較例3,定電流電解時的電阻亦能減低。As can be seen from Table 1, Examples 1 to 7 use an iron-based alloy containing iron and nickel to form the anode substrate, and the anode substrate has a carbonaceous layer on the surface of the anode substrate, so compared with the use of carbon anode Examples 1 and 2 or Comparative Examples 4 and 5 using metal anodes can stably reduce the resistance during constant voltage electrolysis. In addition, it can be seen that when an anode substrate is formed of an iron-based alloy containing iron, nickel, and cobalt, the resistance during constant current electrolysis can also be reduced compared to Comparative Example 3 using a carbon anode.

1:電解槽 3:電解合成用陽極 5:電解合成用陰極 10:電解液 31:陽極基體 33:碳質層 331:內層 332:外層1: electrolytic cell 3: anode for electrolytic synthesis 5: Cathode for electrolytic synthesis 10: electrolyte 31: anode substrate 33: Carbonaceous layer 331: inner layer 332: outer layer

[圖1] 本發明的一實施形態之具備電解合成用陽極的電解裝置的構造說明截面圖。 [圖2] 將圖1的電解裝置以和圖1相異的平面予以假想地切斷示意之截面圖。 [圖3] 電解合成用陽極的一例示意截面圖。 [圖4] 電解合成用陽極的另一例示意截面圖。[Fig. 1] A cross-sectional view illustrating the structure of an electrolytic device equipped with an anode for electrolytic synthesis according to an embodiment of the present invention. [Fig. 2] A schematic cross-sectional view of the electrolytic device of Fig. 1 being cut imaginarily on a plane different from that of Fig. 1. [Figure 3] A schematic cross-sectional view of an example of an anode for electrolytic synthesis. [Fig. 4] Another schematic sectional view of an anode for electrolytic synthesis.

3:電解合成用陽極 3: anode for electrolytic synthesis

31:陽極基體 31: anode substrate

33:碳質層 33: Carbonaceous layer

Claims (8)

一種電解合成用陽極,係用來將氟氣體予以電解合成之陽極, 具備:由金屬質材料所形成之陽極基體、及由碳質材料所形成且配置於前述陽極基體的表面上之碳質層; 前述金屬質材料,為含有鐵與鎳之鐵基合金。An anode for electrolytic synthesis is an anode for electrolytic synthesis of fluorine gas, Equipped with: an anode substrate formed of a metallic material, and a carbonaceous layer formed of a carbonaceous material and arranged on the surface of the anode substrate; The aforementioned metallic material is an iron-based alloy containing iron and nickel. 如申請專利範圍第1項所述之電解合成用陽極,其中,前述金屬質材料,為含有鐵與鎳與鈷之鐵基合金。The anode for electrolytic synthesis as described in item 1 of the scope of the patent application, wherein the metallic material is an iron-based alloy containing iron and nickel and cobalt. 如申請專利範圍第1項所述之電解合成用陽極,其中,前述金屬質材料,為含有鐵與鎳與鈷與碳之鐵基合金。The anode for electrolytic synthesis as described in item 1 of the patent application range, wherein the metallic material is an iron-based alloy containing iron and nickel and cobalt and carbon. 如申請專利範圍第1項所述之電解合成用陽極,其中,前述鐵基合金含有32質量%以上40質量%以下的鎳。The anode for electrolytic synthesis as described in item 1 of the patent application range, wherein the iron-based alloy contains 32% by mass or more and 40% by mass or less of nickel. 如申請專利範圍第2項所述之電解合成用陽極,其中,前述鐵基合金含有30質量%以上38質量%以下的鎳、與3質量%以上12質量%以下的鈷。The anode for electrolytic synthesis as described in item 2 of the patent application range, wherein the iron-based alloy contains 30% by mass or more and 38% by mass or less nickel, and 3% by mass or more and 12% by mass or less cobalt. 如申請專利範圍第3項所述之電解合成用陽極,其中,前述鐵基合金含有20質量%以上36質量%以下的鎳、與3質量%以上20質量%以下的鈷、與0.01質量%以上1.5質量%以下的碳。The anode for electrolytic synthesis as described in item 3 of the patent application range, wherein the iron-based alloy contains 20% by mass or more and 36% by mass or less nickel, 3% by mass or more and 20% by mass or less cobalt, and 0.01% by mass or more 1.5% by mass or less of carbon. 如申請專利範圍第1~6項中任一項所述之電解合成用陽極,其中,前述碳質層,由和前述陽極基體相接之內層、及該內層的外側之外層所構成,前述內層為構成前述鐵基合金的金屬當中至少一種與碳混合存在之層,前述外層為由碳所形成之層。The anode for electrolytic synthesis according to any one of claims 1 to 6, wherein the carbonaceous layer is composed of an inner layer in contact with the anode substrate and an outer layer outside the inner layer, The inner layer is a layer in which at least one of the metals constituting the iron-based alloy is mixed with carbon, and the outer layer is a layer formed of carbon. 一種氟氣體的製造方法,包含使用如申請專利範圍第1~7項中任一項所述之電解合成用陽極來將含有氟化氫的電解液做電氣分解,而將氟氣體予以電解合成。A method for producing fluorine gas includes using an anode for electrolytic synthesis as described in any one of claims 1 to 7 to electrically decompose an electrolyte containing hydrogen fluoride, and electrolytically synthesize fluorine gas.
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