TW201934649A - Method for manufacturing electronic device - Google Patents

Method for manufacturing electronic device Download PDF

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TW201934649A
TW201934649A TW107146748A TW107146748A TW201934649A TW 201934649 A TW201934649 A TW 201934649A TW 107146748 A TW107146748 A TW 107146748A TW 107146748 A TW107146748 A TW 107146748A TW 201934649 A TW201934649 A TW 201934649A
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electronic device
resin composition
manufacturing
sealing
sealing resin
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TW107146748A
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TWI778200B (en
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山本隼
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日商住友電木股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/62Alcohols or phenols
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/284Applying non-metallic protective coatings for encapsulating mounted components

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

This method for producing an electronic device comprises: a step for preparing a member that is provided with a copper circuit on the surface; a coating step for forming an OSP film on the copper circuit by applying a preflux agent onto the surface of the member; and a sealing step for sealing the copper circuit by means of a resin composition for sealing. The sealing step is carried out without performing a cleaning step for removing the OSP film, which has been formed in the coating step; the resin composition for sealing contains an epoxy resin, a curing agent and an adhesion promoter; and the preflux agent contains an imidazole compound.

Description

電子裝置的製造方法Manufacturing method of electronic device

本發明有關一種電子裝置的製造方法。The invention relates to a method for manufacturing an electronic device.

在使用於電子裝置的製造之模具底部填充用密封材料中,以提高流動性為目的而開發了各種技術。作為該種技術,可舉出例如在專利文獻1中記載的技術。依據專利文獻1,記載有以下內容:在將使用N-苯基-3-胺基丙基三甲氧基矽烷進行了表面處理之填充劑與樹脂材料進行混合時,能夠在廣泛的剪切速率範圍內實現低黏度。又,依專利文獻1,記載有以下內容:以使用N-苯基-3-胺基丙基三甲氧基矽烷進行了表面處理之填充劑來製作樹脂組成物時,填充劑的凝聚性降低。Various techniques have been developed for the purpose of improving the fluidity of sealing materials for mold underfill used in the manufacture of electronic devices. As such a technique, the technique described in patent document 1, for example is mentioned. According to Patent Document 1, it is described that when a filler that has been surface-treated with N-phenyl-3-aminopropyltrimethoxysilane is mixed with a resin material, it can cover a wide range of shear rates. Low viscosity. Further, according to Patent Document 1, it is described that when a resin composition is prepared using a filler having a surface treated with N-phenyl-3-aminopropyltrimethoxysilane, the cohesiveness of the filler decreases.

專利文獻1:日本特開2015-140389號公報Patent Document 1: Japanese Laid-Open Patent Publication No. 2015-140389

關於配置於印刷配線基板等基板之銅電路,例如在其生產步驟中為抑制銅電路的氧化而塗佈前助焊劑 (pre-flux agent)。藉此,在銅電路的表面上形成有避免銅電路的氧化之膜(Organic Solderability Preservative膜:OSP膜,有機保焊膜)。For a copper circuit arranged on a substrate such as a printed wiring board, for example, a pre-flux agent is applied in order to suppress oxidation of the copper circuit in a production step thereof. As a result, an oxide film (Organic Solderability Preservative film: OSP film, organic solder resist film) is formed on the surface of the copper circuit to prevent oxidation of the copper circuit.

在以往的電子裝置的製造方法中,藉由密封用樹脂組成物將銅電路進行密封時,事先洗淨並去除OSP膜。然而,去除OSP膜之步驟會導致電子裝置的生產性的下降。
本發明人為了提高電子裝置的生產性,正在探討著使用在專利文獻1中記載之密封材料,不藉由洗淨來去除OSP膜而製造電子裝置。然而,已確知當使用以往的密封材料時,會導致密封材料的硬化物與銅電路的密接性下降。
In a conventional method of manufacturing an electronic device, when a copper circuit is sealed with a sealing resin composition, the OSP film is washed and removed in advance. However, the step of removing the OSP film causes a reduction in the productivity of the electronic device.
In order to improve the productivity of an electronic device, the present inventors are considering using the sealing material described in Patent Document 1 to manufacture an electronic device without removing the OSP film by washing. However, it has been confirmed that when a conventional sealing material is used, the adhesion between the hardened material of the sealing material and the copper circuit is reduced.

本發明的課題在於,提供一種以不進行去除OSP膜之洗淨步驟為前提,提高密封用樹脂組成物的硬化物與銅電路的密接性之電子裝置的製造方法。An object of the present invention is to provide a method for manufacturing an electronic device that improves the adhesion between a cured resin composition for sealing and a copper circuit on the premise that a cleaning step for removing the OSP film is not performed.

本發明人為了以不進行去除OSP膜之洗淨步驟為前提,提高密封用樹脂組成物的硬化物與銅電路的密接性,對密封用樹脂組成物的原料成分進行了探討。其結果,發現當密封用樹脂組成物含有特定的密接助劑時,在導入密封用樹脂組成物時OSP膜被破壞,即使不進行洗淨步驟,密封用樹脂組成物與銅電路的密接性亦會提高。
依據以上內容,本發明人發現藉由採用特定的密接助劑,密封用樹脂組成物與銅電路的密接得到提高,並完成了本發明。
The present inventors investigated the raw material components of the sealing resin composition in order to improve the adhesion between the hardened material of the sealing resin composition and the copper circuit on the premise that the washing step of removing the OSP film was not performed. As a result, it was found that when the sealing resin composition contains a specific adhesion aid, the OSP film is broken when the sealing resin composition is introduced, and even if the washing step is not performed, the adhesion between the sealing resin composition and the copper circuit is also improved. Will improve.
Based on the above, the present inventors have found that by using a specific adhesion aid, the adhesion between the sealing resin composition and the copper circuit is improved, and the present invention has been completed.

依本發明,提供一種電子裝置的製造方法,其包括:
準備在表面上具備銅電路之構件之步驟;
藉由在前述表面上塗佈前助焊劑而在前述銅電路形成OSP膜之塗佈步驟;及
將前述銅電路藉由密封用樹脂組成物進行密封之密封步驟,
前述密封步驟不進行去除在前述塗佈步驟中形成之前述OSP膜之洗淨步驟而實施,
前述密封用樹脂組成物包含環氧樹脂、硬化劑、密接助劑,
前述前助焊劑包含咪唑化合物。
According to the present invention, a method for manufacturing an electronic device is provided, which includes:
Steps to prepare components with copper circuits on the surface;
A coating step of forming an OSP film on the copper circuit by applying a pre-flux on the surface; and a sealing step of sealing the copper circuit by a sealing resin composition,
The aforementioned sealing step is performed without performing a cleaning step of removing the aforementioned OSP film formed in the aforementioned coating step,
The resin composition for sealing includes an epoxy resin, a hardener, and an adhesion aid,
The aforementioned pre-flux contains an imidazole compound.

依本發明,能夠提供一種即使已將形成有OSP膜之銅電路密封時,密封用樹脂組成物與銅電路的密接性亦提高之電子裝置的製造方法。According to the present invention, it is possible to provide a method for manufacturing an electronic device in which the adhesion between a sealing resin composition and a copper circuit is improved even when a copper circuit having an OSP film is sealed.

以下,對本發明的實施形態進行說明。Hereinafter, embodiments of the present invention will be described.

本實施形態之電子裝置的製造方法係藉由將在表面上具備銅電路之構件以密封用樹脂組成物進行密封來製造電子裝置之方法,前述電子裝置的製造方法包括:準備在表面上具備銅電路之構件之步驟;藉由在上述表面上塗佈前助焊劑而在上述銅電路上形成OSP膜之塗佈步驟;及將上述銅電路藉由密封用樹脂組成物進行密封之密封步驟,前述密封步驟不進行去除在前述塗佈步驟中形成之前述OSP膜之洗淨步驟而實施,上述密封用樹脂組成物包含環氧樹脂、硬化劑、密接助劑,上述前助焊劑包含咪唑化合物。The manufacturing method of an electronic device according to this embodiment is a method of manufacturing an electronic device by sealing a member having a copper circuit on a surface with a sealing resin composition. The method for manufacturing an electronic device includes preparing copper on the surface. A step of circuit components; a coating step of forming an OSP film on the copper circuit by applying a pre-flux on the surface; and a sealing step of sealing the copper circuit by a sealing resin composition, the foregoing The sealing step is performed without performing a cleaning step of removing the OSP film formed in the coating step. The sealing resin composition includes an epoxy resin, a hardener, and an adhesion aid, and the pre-flux includes an imidazole compound.

關於配置於印刷配線基板等基板之銅電路,例如在其生產步驟中被塗佈用於抑制銅電路的氧化之前助焊劑。藉此,在銅電路的表面上形成避免銅電路的氧化之OSP膜。For a copper circuit arranged on a substrate such as a printed wiring board, for example, a pre-flux for suppressing oxidation of the copper circuit is applied in a production step thereof. As a result, an OSP film is formed on the surface of the copper circuit to prevent oxidation of the copper circuit.

在以往的電子裝置的製造方法中,藉由密封用樹脂組成物將銅電路進行密封時,用於抑制銅電路的氧化之OSP膜未藉由洗淨步驟被去除。藉此,若使用以往的密封用樹脂組成物不去除OSP膜而進行銅電路的密封並製造電子裝置,則OSP膜殘留。該殘留OSP膜有時會使銅電路與密封用樹脂組成物之間的密接性下降。
又,當進行去除OSP膜之洗淨步驟時,會導致電子裝置的生產性降低。
In a conventional method of manufacturing an electronic device, when a copper circuit is sealed with a sealing resin composition, an OSP film for suppressing oxidation of the copper circuit is not removed by a washing step. Thereby, if a conventional copper resin circuit is sealed and an electronic device is manufactured using the conventional sealing resin composition without removing the OSP film, the OSP film remains. This residual OSP film may reduce the adhesion between the copper circuit and the sealing resin composition.
In addition, when the cleaning step for removing the OSP film is performed, the productivity of the electronic device is reduced.

因此,本發明人以不進行去除OSP膜之洗淨步驟為前提,為了提高密封用樹脂組成物的硬化物與銅電路的密接性,對密封用樹脂組成物的原料成分進行了探討。其結果,發現當密封用樹脂組成物含有特定的密接助劑時,在導入密封用樹脂組成物時OSP膜被破壞,即使不進行洗淨步驟,密封用樹脂組成物與銅電路的密接性亦會提高。
詳細的機制尚不確定,但其理由推測如下。
首先,將包含咪唑化合物之前助焊劑塗佈到銅電路,藉此藉由咪唑化合物與含有銅電路之銅原子的交互作用來形成錯合物。OSP膜具有由該錯合物構成之錯合物層。而且,當密封用樹脂組成物含有後述之特定的密接助劑時,在密封用樹脂組成物將銅電路進行密封時,能夠破壞由錯合物層中的咪唑化合物和銅原子形成之錯合物。藉此,當使用包含特定的密接助劑之密封用樹脂組成物來將銅電路進行密封時,能夠一面破壞OSP膜,一面進行密封。進而,推測為藉由密接助劑所具備之孤電子對以及銅電路的銅原子的交互作用,密接助劑與銅電路的銅原子形成錯合物。藉此,包含特定的密接助劑之密封用樹脂組成物的硬化物與以往的密封用樹脂組成物相比,能夠提高針對銅電路之密接性。
依據以上內容,推測為本實施形態之電子裝置的製造方法中,即使不進行去除OSP膜之洗淨步驟,亦能夠提高密封用樹脂組成物的硬化物與銅電路的密接性。
Therefore, the present inventors investigated the raw material components of the sealing resin composition in order to improve the adhesion between the hardened material of the sealing resin composition and the copper circuit on the premise that the cleaning step of removing the OSP film was not performed. As a result, it was found that when the sealing resin composition contains a specific adhesion aid, the OSP film is broken when the sealing resin composition is introduced, and even if the washing step is not performed, the adhesion between the sealing resin composition and the copper circuit is also improved. Will improve.
The detailed mechanism is uncertain, but the reason is speculated as follows.
First, a flux is applied to a copper circuit before the imidazole compound is contained, thereby forming a complex by the interaction of the imidazole compound and a copper atom containing the copper circuit. The OSP film has a complex layer composed of the complex. Further, when the sealing resin composition contains a specific adhesion aid described later, when the copper circuit is sealed by the sealing resin composition, the complex formed by the imidazole compound and the copper atom in the complex layer can be destroyed. Accordingly, when a copper circuit is sealed using a sealing resin composition containing a specific adhesion aid, the OSP film can be broken while being sealed. Furthermore, it is speculated that the interaction between the lone electron pair provided in the adhesion promoter and the copper atom of the copper circuit forms a complex with the copper atom of the copper circuit. Thereby, compared with the conventional sealing resin composition, the hardened | cured material of the sealing resin composition containing a specific adhesion adjuvant can improve the adhesiveness with respect to a copper circuit.
Based on the above, it is presumed that in the method for manufacturing an electronic device according to this embodiment, the adhesion between the hardened material of the sealing resin composition and the copper circuit can be improved without performing the cleaning step of removing the OSP film.

另外,OSP膜除了上述錯合物層以外,進而包含例如由不形成錯合物之咪唑化合物形成之咪唑層。在此,咪唑層藉由咪唑化合物的分子間力形成,與藉由錯合物的離子鍵結形成之錯合物層相比,分子間的交互作用弱。藉此,本實施形態之電子裝置的製造方法會破壞由錯合物構成之錯合物層,並且可破壞咪唑層。因此,依本實施形態之電子裝置的製造方法,即使在不進行去除OSP膜之洗淨步驟時,亦能夠提高密封用樹脂組成物的硬化物與銅電路的密接性。The OSP film includes, in addition to the above-mentioned complex layer, an imidazole layer formed of, for example, an imidazole compound that does not form a complex. Here, the imidazole layer is formed by the intermolecular force of the imidazole compound, and the intermolecular interaction is weaker than that of the complex layer formed by the ionic bonding of the complex. As a result, the method for manufacturing an electronic device according to this embodiment may destroy the complex layer made of the complex, and may damage the imidazole layer. Therefore, according to the manufacturing method of the electronic device according to this embodiment, the adhesion between the hardened material of the sealing resin composition and the copper circuit can be improved even when the washing step of removing the OSP film is not performed.

首先,對在本實施形態之電子裝置的製造方法中使用之密封用樹脂組成物的原料成分進行說明。
密封用樹脂組成物包含環氧樹脂、硬化劑、密接助劑。
First, the raw material components of the sealing resin composition used in the manufacturing method of the electronic device of this embodiment are demonstrated.
The resin composition for sealing contains an epoxy resin, a hardener, and a tackifier.

(環氧樹脂)
本實施形態之密封用樹脂組成物包含環氧樹脂。作為環氧樹脂沒有限定,與其分子量、分子結構無關地,能夠使用所有在1個分子內具有2個以上的環氧基之單體、低聚物、聚合物。
作為環氧樹脂的具體例,可舉出:例如聯苯型環氧樹脂;雙酚A型環氧樹脂、雙酚F型環氧樹脂、四甲基雙酚F型環氧樹脂等雙酚型環氧樹脂;茋型環氧樹脂;苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂等酚醛清漆型環氧樹脂;例示為三酚甲烷型環氧樹脂、烷基改質三酚甲烷型環氧樹脂等之三苯型環氧樹脂等多官能環氧樹脂;具有伸苯基骨架之苯酚芳烷基型環氧樹脂、具有伸苯基骨架之萘酚芳烷基型環氧樹脂、具有聯伸苯基骨架之苯酚芳烷基型環氧樹脂(聯苯芳烷基型環氧樹脂)、具有聯伸苯基骨架之萘酚芳烷基型環氧樹脂等苯酚芳烷基型環氧樹脂;二羥基萘型環氧樹脂、將二羥基萘的2聚體進行環氧丙基醚化而獲得之環氧樹脂等萘酚型環氧樹脂;三聚異氰酸三環氧丙酯、單烯丙基三聚異氰酸二環氧丙酯等含有三核之環氧樹脂;二環戊二烯改質酚醛型環氧樹脂等交聯環狀碳氫化合物改質酚醛型環氧樹脂。作為環氧樹脂,在該等之中,可以單獨使用1種,亦可以併用不同的2種以上。
(Epoxy resin)
The sealing resin composition of this embodiment contains an epoxy resin. The epoxy resin is not limited, and regardless of its molecular weight and molecular structure, all monomers, oligomers, and polymers having two or more epoxy groups in one molecule can be used.
Specific examples of the epoxy resin include, for example, biphenyl type epoxy resins; bisphenol type epoxy resins such as bisphenol A type epoxy resin, bisphenol F type epoxy resin, and tetramethylbisphenol F type epoxy resin. Epoxy resins; 茋 -type epoxy resins; novolac-type epoxy resins such as phenol novolac-type epoxy resin, cresol novolac-type epoxy resin; examples are triphenol methane-type epoxy resin, alkyl modified triphenol Multifunctional epoxy resins such as triphenyl epoxy resins such as methane epoxy resins; phenol aralkyl epoxy resins with phenylene skeleton; naphthol aralkyl epoxy resins with phenylene skeleton Phenol aralkyl type epoxy resin having a biphenylene skeleton (biphenyl aralkyl type epoxy resin), naphthol aralkyl epoxy resin having a biphenyl group, etc. Epoxy resins; dihydroxynaphthalene-type epoxy resins, naphthol-type epoxy resins such as epoxy resins obtained by dipropylation of dihydroxynaphthalene dimers; trimeric isocyanate tripropylene oxide Ester, monoallyl trimer isocyanate dipropylene oxide and other epoxy resins containing trinuclear; dicyclopentadiene modification Cross-linked cyclic hydrocarbons such as phenolic epoxy resins are modified by phenolic epoxy resins. As the epoxy resin, one of them may be used alone, or two or more of them may be used in combination.

(硬化劑)
本實施形態之密封用樹脂組成物包含硬化劑。作為密封用樹脂組成物中所含之硬化劑,具體而言,有複加成型硬化劑、觸媒型硬化劑以及聚加成型硬化劑等3種。
(hardener)
The sealing resin composition of this embodiment contains a hardener. As the curing agent contained in the sealing resin composition, specifically, there are three types, such as a compound addition curing agent, a catalyst type curing agent, and a polyaddition curing agent.

作為上述硬化劑使用之複加成型硬化劑,具體而言,除了二伸乙三胺(DETA)、三伸乙四胺(TETA)、間二甲苯二胺(MXDA)等脂肪族多胺、二胺基二苯甲烷(DDM)、間伸苯基二胺(MPDA)、二胺基二苯碸(DDS)等芳香族多胺以外,還可以舉出包含二氰二胺(DICY)、有機酸二酼肼等之多胺化合物;包含六氫酞酸酐(HHPA)、甲基四氫酞酸酐(MTHPA)等脂環族酸酐、1,2,4-苯三甲酸酐(TMA)、焦蜜石酸二酐(PMDA)、二苯甲酮四羧酸(BTDA)等芳香族酸酐等之酸酐;酚醛清漆型酚樹脂、聚乙烯苯酚、芳烷基型酚樹脂等酚樹脂系硬化劑;多硫化物、硫酯、硫醚等多硫醇化合物;異氰酸酯預聚合物、嵌段化異氰酸酯等異氰酸酯化合物;含有羧酸之聚酯樹脂等。作為複加成型硬化劑,能夠包含選自上述具體例中之1種或2種以上。As the hardening agent used for the above-mentioned hardening agent, specifically, in addition to aliphatic polyamines such as diethylene glycol triamine (DETA), triethylene glycol tetramine (TETA), and m-xylene diamine (MXDA), diamine In addition to aromatic polyamines such as aminodiphenylmethane (DDM), m-phenylenediamine (MPDA), and diaminodiphenylhydrazone (DDS), examples include dicyandiamine (DICY) and organic acids. Polyamine compounds such as dihydrazine; including alicyclic anhydrides such as hexahydrophthalic anhydride (HHPA), methyltetrahydrophthalic anhydride (MTHPA), 1,2,4-trimellitic anhydride (TMA), pyromelic acid Acid anhydrides such as dianhydride (PMDA), benzophenone tetracarboxylic acid (BTDA), and other aromatic anhydrides; phenol resin-based hardeners such as novolac phenol resin, polyvinyl phenol, and aralkyl phenol resin; polysulfides Polythiol compounds such as thioesters and thioethers; isocyanate compounds such as isocyanate prepolymers and block isocyanates; polyester resins containing carboxylic acids. The additional molding hardener may include one or two or more kinds selected from the above specific examples.

作為上述硬化劑使用之觸媒型硬化劑,具體而言,可舉出:苄基二甲胺(BDMA)、2,4,6-三(二甲胺)甲基苯酚(DMP-30)等三級胺化合物;2-甲基咪唑、2-乙基-4-甲基咪唑(EMI24)等咪唑化合物;BF3 錯合物等路易斯酸等。作為觸媒型硬化劑,能夠包含選自上述具體例中之1種或2種以上。Specific examples of the catalyst-type hardener used as the hardener include benzyldimethylamine (BDMA), 2,4,6-tris (dimethylamine) methylphenol (DMP-30), and the like. Tertiary amine compounds; 2-methylimidazole, 2-ethyl-4-methylimidazole (EMI24) and other imidazole compounds; BF 3 complex and other Lewis acids. As the catalyst-type curing agent, one kind or two or more kinds selected from the above specific examples can be contained.

作為上述硬化劑使用之聚加成型硬化劑,具體而言,可舉出:可溶酚醛樹脂型酚樹脂(resol type phenol resin);含有羥甲基之脲樹脂等脲樹脂;含有羥甲基之三聚氰胺樹脂等三聚氰胺樹脂等。作為聚加成型硬化劑,能夠包含選自上述具體例中之1種或2種以上。Specific examples of the polyadditive hardener used as the hardener include: resol type phenol resin; urea resin such as methylol-containing urea resin; and methylol-containing resin Melamine resins such as melamine resins. The polyaddition hardening agent may include one or two or more kinds selected from the above specific examples.

在上述硬化劑中,包含酚樹脂系硬化劑為較佳。藉此,能夠較佳地使環氧樹脂硬化。進而,藉由硬化劑與密接助劑進行交互作用,能夠進一步提高密接性。
作為酚樹脂系硬化劑,能夠使用所有在1個分子內具有2個以上的酚性羥基之單體、低聚物、聚合物,其分子量、分子結構沒有限定。
作為硬化劑使用之酚樹脂系硬化劑,具體而言,可舉出:苯酚酚醛清漆樹脂、甲酚酚醛清漆樹脂、雙酚酚醛清漆樹脂、苯酚-聯苯酚醛清漆樹脂等酚醛清漆型酚樹脂;聚乙烯苯酚;三苯甲烷型酚樹脂等多官能型酚樹脂;萜烯改質酚樹脂、二環戊二烯改質酚樹脂等改質酚樹脂;具有伸苯基骨架之苯酚芳烷基樹脂、具有聯伸苯基骨架之苯酚芳烷基樹脂(聯苯芳烷基型酚樹脂)、具有伸苯基骨架之萘酚芳烷基樹脂、具有聯伸苯基骨架之萘酚芳烷基樹脂等苯酚芳烷基型酚樹脂;雙酚A、雙酚F等雙酚化合物等。作為酚醛樹脂系硬化劑,能夠包含選自上述具體例中之1種或2種以上。
Among the hardeners, a phenol resin-based hardener is preferably contained. Thereby, epoxy resin can be hardened suitably. Furthermore, the adhesion between the hardener and the adhesion assistant can be further improved.
As the phenol resin-based hardener, all monomers, oligomers, and polymers having two or more phenolic hydroxyl groups in one molecule can be used, and the molecular weight and molecular structure are not limited.
Specific examples of the phenol resin-based hardener used as the hardener include phenol novolac resins such as phenol novolac resin, cresol novolac resin, bisphenol novolac resin, and phenol-biphenol novolac resin; Polyphenols; polyfunctional phenol resins such as triphenylmethane phenol resins; modified phenol resins such as terpene modified phenol resins and dicyclopentadiene modified phenol resins; phenol aralkyl resins with a phenylene skeleton , Phenol aralkyl resin with biphenylene skeleton (biphenylaralkyl phenol resin), Naphthol aralkyl resin with biphenylene skeleton, Naphthol aralkyl resin with biphenylyl skeleton Phenol aralkyl type phenol resins; bisphenol A, bisphenol F and other bisphenol compounds. The phenol resin-based curing agent may include one or two or more kinds selected from the above specific examples.

(密接助劑)
作為密接助劑,具備特定的官能基者為較佳。
作為特定的官能基,具體而言,可舉出:硫醇基、羧基、胺基等。藉由具備該等特定的官能基,密接助劑能夠破壞OSP膜。又,當密接助劑具備孤電子對時,在破壞OSP膜後,孤電子對與銅電路的銅原子交互作用,能夠提高密封用樹脂組成物的硬化物與銅電路的密接性。
另外,關於密接助劑,能夠組合上述具體例中的1種或2種以上而作為特定的官能基來使用。
(Adhesion aid)
As the adhesion promoter, those having a specific functional group are preferred.
Specific examples of the specific functional group include a thiol group, a carboxyl group, and an amine group. By having these specific functional groups, the adhesion promoter can break the OSP film. When the adhesion aid includes a lone electron pair, after the OSP film is broken, the lone electron pair interacts with copper atoms of the copper circuit, which can improve the adhesion between the hardened material of the sealing resin composition and the copper circuit.
In addition, the adhesion promoter can be used as a specific functional group by combining one or two or more of the specific examples described above.

另外,詳細的機制尚不明確,但作為破壞OSP膜之機制,可推測為如下。
推測為密接助劑包含羧基作為特定的官能基時,OSP膜的錯合物層成為酸性而錯合物變得不穩定,能夠破壞OSP膜。
又,推測為密接助劑包含硫醇基、胺基作為特定的官能基時,在OSP膜的錯合物層中,在密接助劑與前助焊劑的咪唑化合物之間產生錯合物交換反應,能夠破壞OSP膜。
In addition, the detailed mechanism is not clear, but as a mechanism for damaging the OSP film, it is estimated as follows.
When the adhesion promoter contains a carboxyl group as a specific functional group, it is estimated that the complex layer of the OSP film becomes acidic, the complex becomes unstable, and the OSP film can be broken.
In addition, when the adhesion promoter contains a thiol group and an amine group as specific functional groups, it is estimated that in the complex layer of the OSP film, a complex exchange reaction occurs between the adhesion promoter and the imidazole compound of the former flux. , Can destroy the OSP film.

作為本實施形態中的胺基,具體而言,包含未併入到雜環中之一級、二級以及三級胺基、併入到雜環中之一級或二級胺基亦即雜環胺基。作為胺基,例如包含雜環胺基為較佳。藉此,密封用樹脂組成物的密接助劑與銅電路的銅原子強力地交互作用,能夠進一步提高密接性。
在此,作為雜環胺基,具體而言,可舉出:三、三唑等。作為三,例如由下述通式(H1)表示之結構者為較佳。又,作為三唑,例如由下述通式(H2)表示之結構者為較佳。
As the amine group in this embodiment, specifically, it includes a primary, secondary, and tertiary amine group that is not incorporated into a heterocyclic ring, and a heterocyclic amine that is a primary or secondary amine group that is incorporated into a heterocyclic ring. base. As the amine group, for example, a heterocyclic amine group is preferable. Thereby, the adhesion promoter of the sealing resin composition strongly interacts with the copper atom of the copper circuit, and the adhesion can be further improved.
Here, examples of the heterocyclic amino group include tris, triazole, and the like. As three, for example, a structure represented by the following general formula (H1) is preferred. The triazole is preferably a structure represented by the following general formula (H2).


(上述通式(H1)中,R分別獨立地為選自由氫原子、碳原子、矽原子、氮原子、磷原子、氧原子、硫原子、氟原子、氯原子以及溴原子組成之群中之1種或2種以上的原子形成之基團。)

(In the general formula (H1), R is independently selected from the group consisting of a hydrogen atom, a carbon atom, a silicon atom, a nitrogen atom, a phosphorus atom, an oxygen atom, a sulfur atom, a fluorine atom, a chlorine atom, and a bromine atom. A group of one or more atoms.)


(上述通式(H2)中,R分別獨立地為選自由氫原子、碳原子、矽原子、氮原子、磷原子、氧原子、硫原子、氟原子、氯原子以及溴原子組成之群中之1種或2種以上的原子形成之基團。)

(In the above general formula (H2), R is each independently selected from the group consisting of a hydrogen atom, a carbon atom, a silicon atom, a nitrogen atom, a phosphorus atom, an oxygen atom, a sulfur atom, a fluorine atom, a chlorine atom, and a bromine atom. A group of one or more atoms.)

上述通式(H1)、(H2)中,當R包含碳原子時,例如為碳數1以上30以下的有機基團為較佳,碳數1以上10以下的有機基團為更佳,碳數1以上5以下的有機基團為進一步較佳。
又,當R為包含碳原子之有機基團時,R例如包含羥基為較佳。
In the general formulae (H1) and (H2), when R contains a carbon atom, for example, an organic group having a carbon number of 1 to 30 is preferred, and an organic group having a carbon number of 1 to 10 is more preferred. Organic groups having a number of 1 to 5 are more preferred.
When R is an organic group containing a carbon atom, R preferably contains a hydroxyl group, for example.

上述通式(H1)、(H2)中,作為複數個R,例如至少1個為包含選自由羧基、硫醇基以及胺基組成之群中之1種以上者為較佳,至少包含胺基者為更佳。藉此,能夠破壞OSP膜,而提高密封用樹脂組成物的硬化物與銅電路的密接性。In the general formulae (H1) and (H2), as the plurality of R, for example, at least one is preferably one or more selected from the group consisting of a carboxyl group, a thiol group, and an amine group, and at least one amine group is included. It is better. This makes it possible to break the OSP film and improve the adhesion between the hardened material of the sealing resin composition and the copper circuit.

上述通式(H1)、(H2)中,作為複數個R,例如1個以上的R包含選自由羧基、硫醇基以及胺基組成之群中之1種以上為較佳,2個以上的R包含選自由羧基、硫醇基以及胺基組成之群中之1種以上為更佳。藉此,能夠破壞OSP膜,而提高密封用樹脂組成物的硬化物與銅電路的密接性。In the general formulae (H1) and (H2), as the plurality of Rs, for example, one or more Rs preferably include one or more selected from the group consisting of a carboxyl group, a thiol group, and an amine group, and two or more R preferably contains one or more selected from the group consisting of a carboxyl group, a thiol group, and an amine group. This makes it possible to break the OSP film and improve the adhesion between the hardened material of the sealing resin composition and the copper circuit.

在密接助劑中,作為包含羧基者,具體而言,可舉出硬脂酸等。
在密接助劑中,作為包含硫醇基者,具體而言,可舉出:γ-巰基丙基三甲氧基矽烷、γ-巰基丙基三乙氧基矽烷、3-胺基-5-巰基-1,2,4-三唑等。
在密接助劑中,作為包含胺基者,具體而言,可舉出:4,6-二胺基-1,3,5-三-2-乙醇、3-胺基-5-巰基-1,2,4-三唑等。
Specific examples of the adhesion assistant that include a carboxyl group include stearic acid.
Among the adhesion promoters, those containing a thiol group specifically include γ-mercaptopropyltrimethoxysilane, γ-mercaptopropyltriethoxysilane, and 3-amino-5-mercapto -1,2,4-triazole and the like.
Among the adhesion promoters, as those containing an amine group, specifically, 4,6-diamino-1,3,5-tri-2-ethanol, 3-amino-5-mercapto-1 , 2,4-triazole and so on.

前述密封用樹脂組成物中的密接助劑的含量的下限值相對於密封用樹脂組成物的總固體成分,例如為0.010質量份以上為較佳,0.015質量份以上為更佳,0.020質量份以上為進一步較佳,0.025質量份以上為更進一步較佳,0.030質量份以上為特佳。藉此,能夠較佳地破壞OSP膜。
又,前述密封用樹脂組成物中的密接助劑的含量的上限值相對於密封用樹脂組成物的總固體成分,例如為1.0質量份以下為較佳,0.7質量份以下為更佳,0.5質量份以下為進一步較佳,0.3質量份以下為更進一步較佳。藉此,能夠抑制產生粒子的凝聚而在溶劑等中生成不溶解之異物之情形。
另外,在本實施形態中,密封用樹脂組成物的總固體成分表示去除了溶劑之原料成分的合計。
The lower limit value of the content of the adhesion promoter in the sealing resin composition is, for example, preferably 0.010 parts by mass or more, more preferably 0.015 parts by mass or more, and 0.020 parts by mass with respect to the total solid content of the sealing resin composition. The above is further preferred, 0.025 parts by mass or more is further preferred, and 0.030 parts by mass or more is particularly preferred. This makes it possible to better break the OSP film.
The upper limit of the content of the adhesion assistant in the sealing resin composition is preferably 1.0 part by mass or less, more preferably 0.7 part by mass or less with respect to the total solid content of the sealing resin composition, and 0.5 It is more preferable that the content is less than or equal to 0.3 parts by mass. This makes it possible to suppress generation of aggregation of particles and generation of insoluble foreign matter in a solvent or the like.
In addition, in this embodiment, the total solid content of the resin composition for sealing shows the total of the raw material components from which the solvent was removed.

密封用樹脂組成物中的密接助劑的含量的下限值相對於總體樹脂量例如為0.10質量份以上為較佳,0.15質量份以上為更佳,0.20質量份以上為進一步較佳,0.30質量份以上為更進一步較佳,0.40質量份以上為特佳。藉此,破壞OSP膜之後,適當分散於密封用樹脂組成物中之密接助劑與銅原子適當地交互作用,能夠提高密接性。
密封用樹脂組成物中的密接助劑的含量的上限值相對於總體樹脂量,例如為10質量份以下為較佳,8質量份以下為更佳,6質量份以下為進一步較佳。
另外,在本實施形態中,樹脂量表示環氧樹脂與硬化劑的合計量。
The lower limit of the content of the adhesion promoter in the sealing resin composition is, for example, preferably 0.10 parts by mass or more, more preferably 0.15 parts by mass or more, more preferably 0.20 parts by mass or more, and 0.30 parts by mass. It is more preferable that it is more than parts, and it is particularly preferable that it is 0.40 parts by mass or more. By doing so, after the OSP film is broken, the adhesion assistant appropriately dispersed in the sealing resin composition and the copper atom appropriately interact to improve the adhesion.
The upper limit of the content of the adhesion assistant in the resin composition for sealing is, for example, preferably 10 parts by mass or less, more preferably 8 parts by mass or less, and still more preferably 6 parts by mass or less.
In this embodiment, the amount of resin indicates the total amount of the epoxy resin and the hardener.

(其他成分)
配合需要,能夠在密封用樹脂組成物中適當摻合硬化促進劑、無機填充材料、耦合劑、脫模劑、著色劑、阻燃劑、離子捕捉劑、低應力劑等各種添加劑中的1種或2種以上。
(Other ingredients)
According to the needs, one of various additives such as a hardening accelerator, an inorganic filler, a coupling agent, a release agent, a colorant, a flame retardant, an ion trapping agent, and a low stress agent can be appropriately blended in the sealing resin composition. Or 2 or more.

(硬化促進劑)
硬化促進劑只要為促進環氧樹脂以及硬化劑的硬化反應者則沒有限定,能夠配合環氧樹脂以及硬化劑的種類選擇。
作為硬化促進劑,具體而言,可舉出:鎓鹽化合物、有機膦、四取代鏻化合物、磷酸酯甜菜鹼化合物、膦化合物與醌化合物的加成物、鏻化合物與矽烷化合物的加成物等含有磷原子之化合物;2-甲基咪唑、2-乙基-4-甲基咪唑(EMI24)、2-苯基-4-甲基咪唑(2P4MZ)、2-苯基咪唑(2PZ)、2-苯基-4-甲基-5-羥基咪唑(2P4MHZ)、1-苄基-2-苯基咪唑(1B2PZ)等咪唑化合物;例示有1,8-二吖雙環[5.4.0]十一烯-7、苄基二甲胺等之脒或三級胺;上述脒或上述三級胺的四級銨鹽等含氮原子化合物等。作為硬化促進劑,能夠組合上述具體例中的1種或2種以上來使用。
(Hardening accelerator)
The curing accelerator is not limited as long as it promotes the curing reaction of the epoxy resin and the curing agent, and the type of the epoxy resin and the curing agent can be selected.
Specific examples of the hardening accelerator include onium salt compounds, organic phosphines, tetra-substituted phosphonium compounds, phosphate betaine compounds, adducts of phosphine compounds and quinone compounds, and adducts of sulfonium compounds and silane compounds. And other compounds containing phosphorus atoms; 2-methylimidazole, 2-ethyl-4-methylimidazole (EMI24), 2-phenyl-4-methylimidazole (2P4MZ), 2-phenylimidazole (2PZ), Imidazole compounds such as 2-phenyl-4-methyl-5-hydroxyimidazole (2P4MHZ), 1-benzyl-2-phenylimidazole (1B2PZ); exemplified by 1,8-diazine bicyclo [5.4.0] Monoene-7 or tertiary amines such as benzyldimethylamine; nitrogen atom-containing compounds such as quaternary ammonium or tertiary ammonium salts of the tertiary amine; As a hardening accelerator, you may use 1 type, or 2 or more types together in the said specific example.

(無機填充材料)
作為無機填充材料沒有限定,能夠配合電子裝置的結構、電子裝置所要求之機械強度、熱特性來選擇適當的無機填充材料。
作為無機填充材料,具體而言,可舉出:熔融破碎二氧化矽、熔融球狀二氧化矽、結晶性二氧化矽、2次凝聚二氧化矽、球狀微粉二氧化矽等二氧化矽;氧化鋁、氮化矽、氮化鋁、氮化硼、氧化鈦、碳化矽、氫氧化鋁、氫氧化鎂、鈦白等金屬化合物;滑石;黏土;雲母;玻璃纖維等。作為無機填充材料,能夠組合上述具體例中的1種或2種以上來使用。作為無機填充材料,在上述具體例中,例如使用二氧化矽為較佳。藉此,無機填充材料與密接助劑交互作用,能夠進一步提高密接性。
(Inorganic filler)
The inorganic filler is not limited, and an appropriate inorganic filler can be selected in accordance with the structure of the electronic device and the mechanical strength and thermal characteristics required by the electronic device.
Specific examples of the inorganic filler include silicon dioxide such as fused crushed silica, fused spherical silica, crystalline silica, secondary agglomerated silica, and spherical fine powdered silica; Alumina, silicon nitride, aluminum nitride, boron nitride, titanium oxide, silicon carbide, aluminum hydroxide, magnesium hydroxide, titanium white and other metal compounds; talc; clay; mica; glass fiber, etc. As the inorganic filler, one or two or more of the above specific examples can be used in combination. As the inorganic filler, in the above specific examples, for example, it is preferable to use silicon dioxide. Thereby, the interaction between the inorganic filler and the adhesion assistant can further improve the adhesion.

在本實施形態中,填充材料的體積基準的累積50%粒徑(D50 )的下限值,例如為0.1μm以上為較佳,0.3μm以上為更佳,0.5μm以上為進一步較佳。藉此,能夠防止由密封用樹脂組成物的成形時之無機填充材料的凝聚引起之模具的堵塞,能夠提高電子裝置的生產性。
又,無機填充材料的體積基準的累積50%粒徑(D50 )的上限值,例如為50μm以下為較佳,30μm以下為更佳,20μm以下為進一步較佳,10μm以下為更進一步較佳,5μm以下為特佳。藉此,在密封步驟中,能夠確實抑制在模具產生堵塞,能夠提高電子裝置的生產性。
另外,當製造覆晶封裝(FLIP CHIP PACKAGE)等密封用樹脂組成物的進入間隙小的電子裝置時,密封用樹脂組成物為模具底部填充材料。此時,無機填充材料的體積基準的累積50%粒徑(D50 )例如為1μm以上20μm以下為較佳。藉此,能夠提高密封用樹脂組成物的填充性。
另外,填充材料的體積基準的累積50%粒徑(D50 ),例如能夠使用市售的雷射繞射式粒度分佈測量裝置(例如SHIMADZU CORPORATION製、SALD-7000)以體積基準來測量粒子的粒度分佈並進行計算。
In this embodiment, the lower limit value of the cumulative 50% particle diameter (D 50 ) based on the volume of the filler is preferably 0.1 μm or more, more preferably 0.3 μm or more, and even more preferably 0.5 μm or more. This makes it possible to prevent clogging of the mold caused by agglomeration of the inorganic filler during the molding of the sealing resin composition, and to improve the productivity of the electronic device.
In addition, the upper limit of the cumulative 50% particle diameter (D 50 ) of the volume basis of the inorganic filler is, for example, preferably 50 μm or less, more preferably 30 μm or less, more preferably 20 μm or less, and 10 μm or less. It is particularly preferable that it is less than 5 μm. Accordingly, in the sealing step, clogging in the mold can be reliably suppressed, and the productivity of the electronic device can be improved.
In addition, when manufacturing an electronic device with a small entering gap of a sealing resin composition such as a flip chip package, the sealing resin composition is a mold underfill material. At this time, the volume-based cumulative 50% particle diameter (D 50 ) of the inorganic filler is preferably 1 μm or more and 20 μm or less, for example. Thereby, the filling property of the sealing resin composition can be improved.
The volume-based cumulative 50% particle diameter (D 50 ) of the filler can be measured on a volume basis using a commercially available laser diffraction particle size distribution measurement device (for example, manufactured by Shimadzu Corporation, SALD-7000). Particle size distribution and calculation.

(耦合劑)
作為耦合劑沒有限定,能夠使用用於密封用樹脂組成物之公知的耦合劑。
作為耦合劑,具體而言,可舉出:乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷等乙烯基矽烷;2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-環氧丙氧丙基甲基二甲氧基矽烷、3-環氧丙氧丙基三甲氧基矽烷、3-環氧丙氧丙基甲基二乙氧基矽烷、3-環氧丙氧丙基三乙氧基矽烷等環氧矽烷;對苯乙烯基三甲氧基矽烷等苯乙烯基矽烷;3-甲基丙烯醯氧基丙基甲基二甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基甲基二乙氧基矽烷、3-甲基丙烯醯氧基丙基三乙氧基矽烷等甲基丙烯醯基矽烷;3-丙烯醯氧基丙基三甲氧基矽烷等丙烯醯基矽烷;N-2-(胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、N-2-(胺基乙基)-3-胺基丙基三甲氧基矽烷、3-胺基丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、3-三乙氧基矽基-N-(1,3-二甲基-亞丁基)丙胺、N-苯基-3-胺基丙基三甲氧基矽烷、苯基胺基丙基三甲氧基矽烷等胺基矽烷;三聚異氰酸矽烷;烷基矽烷;3-脲基丙基三烷氧基矽烷等脲基矽烷;3-巰基丙基甲基二甲氧基矽烷、3-巰基丙基三甲氧基矽烷等巰基矽烷;3-異氰酸酯丙基三乙氧基矽烷等異氰酸酯矽烷;鈦系化合物;鋁螯合物類;鋁/鋯系化合物等。作為耦合劑,能夠摻合上述具體例中的1種或2種以上。
(Coupling agent)
The coupling agent is not limited, and a known coupling agent used for a sealing resin composition can be used.
Specific examples of the coupling agent include vinylsilanes such as vinyltrimethoxysilane and vinyltriethoxysilane; 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane; 3-glycidoxypropylmethyldimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3-glycidyl Epoxy silanes such as oxypropyl triethoxy silane; styryl silanes such as p-styryl trimethoxy silane; 3-methacryloxypropyl methyl dimethoxy silane, 3-methyl propylene Methoxypropyltrimethoxysilane, such as methoxypropyltrimethoxysilane, 3-methacryloxypropylmethyldiethoxysilane, 3-methacryloxypropyltriethoxysilane, etc. ; 3-propenyloxypropyltrimethoxysilane and other propenylsilylsilane; N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane, N-2- (amine Ethyl) -3-aminopropyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-triethoxysilane-N- (1,3-dimethyl-butylene) propylamine, N-phenyl-3-amino Aminosilanes such as trimethoxysilane and phenylaminopropyltrimethoxysilane; trimeric isocyanates; alkylsilanes; ureidosilanes such as 3-ureidopropyltrialkoxysilane; 3- Mercaptosilanes such as mercaptopropylmethyldimethoxysilane and 3-mercaptopropyltrimethoxysilane; isocyanate silanes such as 3-isocyanatepropyltriethoxysilane; titanium compounds; aluminum chelates; aluminum / Zirconium-based compounds and the like. As the coupling agent, one or two or more of the specific examples described above can be blended.

(脫模劑)
作為脫模劑沒有限定,能夠使用用於密封用樹脂組成物之公知的脫模劑。
作為脫模劑,具體而言,可舉出:棕櫚蠟等天然蠟、二乙醇胺・二褐煤酸酯等合成蠟、硬脂酸鋅等高級脂肪酸及其金屬鹽、石蠟等。作為脫模劑,能夠摻合上述具體例中的1種或2種以上。
(Release Agent)
The release agent is not limited, and a known release agent used for a sealing resin composition can be used.
Specific examples of the release agent include natural waxes such as palm wax, synthetic waxes such as diethanolamine and dimonate, higher fatty acids such as zinc stearate, metal salts thereof, and paraffin wax. As a mold release agent, 1 type, or 2 or more types can be mix | blended in the said specific example.

(著色劑)
作為著色劑沒有限定,能夠使用用於密封用樹脂組成物之公知的著色劑。
作為著色劑,具體而言,能夠舉出:碳黑、紅丹、氧化鈦等。作為著色劑,能夠摻合上述具體例中的1種或2種以上。
(Colorant)
The colorant is not limited, and a known colorant used for a sealing resin composition can be used.
Specific examples of the colorant include carbon black, red dandelion, and titanium oxide. As the colorant, one or two or more of the above specific examples can be blended.

(阻燃劑)
作為阻燃劑沒有限定,能夠使用用於密封用樹脂組成物之公知的阻燃劑。
作為阻燃劑,具體而言,能夠舉出:氫氧化鋁、氫氧化鎂、硼酸鋅、鉬酸鋅、磷腈等。作為阻燃劑,能夠摻合上述具體例中的1種或2種以上。
(Flame retardant)
The flame retardant is not limited, and a known flame retardant used for a sealing resin composition can be used.
Specific examples of the flame retardant include aluminum hydroxide, magnesium hydroxide, zinc borate, zinc molybdate, and phosphazene. As a flame retardant, 1 type, or 2 or more types can be mix | blended in the said specific example.

(離子捕捉劑)
作為離子捕捉劑沒有限定,能夠使用用於密封用樹脂組成物之公知的離子捕捉劑。
作為離子捕捉劑,具體而言,能夠舉出:水滑石、沸石、氫氧化鉍等。
(Ion trapping agent)
The ion trapping agent is not limited, and a known ion trapping agent for a resin composition for sealing can be used.
Specific examples of the ion trapping agent include hydrotalcite, zeolite, and bismuth hydroxide.

(低應力劑)
作為低應力劑沒有限定,能夠使用用於密封用樹脂組成物之公知的低應力劑。
作為低應力劑,具體而言,能夠舉出:聚矽氧油、聚矽氧橡膠等聚矽氧化合物;聚丁二烯化合物;丙烯腈-丁二烯共聚物等。作為低應力劑,能夠摻合上述具體例中的1種或2種以上。
(Low stress agent)
The low-stress agent is not limited, and a known low-stress agent used for the sealing resin composition can be used.
Specific examples of the low stress agent include polysiloxane compounds such as polysiloxane oil and polysiloxane rubber; polybutadiene compounds; acrylonitrile-butadiene copolymers, and the like. As the low-stress agent, one or two or more of the above specific examples can be blended.

(密封用樹脂組成物的製造方法)
接著,對本實施形態之密封用樹脂組成物的製造方法進行說明。
本實施形態之密封用樹脂組成物的製造方法,包含例如混合上述之原料成分來製作混合物之混合步驟(S1)、以及接著混合物成形之成形步驟(S2)。
(Manufacturing method of sealing resin composition)
Next, the manufacturing method of the sealing resin composition of this embodiment is demonstrated.
The method for producing a sealing resin composition according to this embodiment includes, for example, a mixing step (S1) of mixing the above-mentioned raw material components to prepare a mixture, and a molding step (S2) followed by forming the mixture.

(混合步驟(S1))
混合步驟為混合原料成分來製作混合物之步驟。混合之方法沒有限定,能夠配合所使用之成分來使用公知的方法。
作為混合步驟,具體而言,利用混合機等將上述密封用樹脂組成物所包含之原料成分均勻地進行混合。接著,以輥、捏合機或押出機等混煉機進行熔融混煉來製作混合物。
(Mixing step (S1))
The mixing step is a step of mixing raw material ingredients to prepare a mixture. The method of mixing is not limited, and a well-known method can be used according to the component used.
Specifically, as the mixing step, the raw material components included in the sealing resin composition are uniformly mixed using a mixer or the like. Next, the mixture is melt-kneaded with a kneader such as a roll, a kneader, or an extruder to prepare a mixture.

(成形步驟(S2))
接著上述混合步驟(S1)進行使混合物成形之成形步驟(S2)。
作為成形之方法沒有限定,能夠配合密封用樹脂組成物的形狀使用公知的方法。作為密封用樹脂組成物的形狀沒有限定,可舉出例如:顆粒狀、粉末狀、錠狀、片狀等。密封用樹脂組成物的形狀能夠配合成形方法來選擇。
(Forming step (S2))
Following the mixing step (S1), a forming step (S2) of forming the mixture is performed.
The method of forming is not limited, and a known method can be used in accordance with the shape of the resin composition for sealing. The shape of the sealing resin composition is not limited, and examples thereof include a granular shape, a powder shape, an ingot shape, and a sheet shape. The shape of the sealing resin composition can be selected in accordance with the molding method.

作為製作顆粒狀之密封用樹脂組成物之成形步驟,例如可舉出熔融混煉後粉碎冷卻之混合物之步驟。另外,例如亦可以篩選製成顆粒形狀之密封用樹脂組成物來調節顆粒的大小。又,例如亦可以將製成顆粒形狀之密封用樹脂組成物以離心製粉法或熱切割法等方法進行處理來調整分散度或流動性等。
又,作為製作粉末狀之密封用樹脂組成物之成形步驟,例如可舉出將混合物粉碎而製成顆粒狀的密封用樹脂組成物後,將該顆粒狀的密封用樹脂組成物進一步粉碎之步驟。
又,作為製作錠狀之密封用樹脂組成物之成形步驟,可舉出例如將混合物進行粉碎來製成顆粒狀的密封用樹脂組成物後,將該顆粒狀的密封用樹脂組成物進行打錠成型之步驟。
又,作為製作片狀之密封用樹脂組成物之成形步驟,可舉出例如在熔融混煉後,將混合物進行押出成形或壓延成形之步驟。
Examples of the molding step for preparing the granular sealing resin composition include a step of pulverizing and cooling the mixture after melt-kneading. In addition, for example, a sealing resin composition formed into a particle shape may be screened to adjust the particle size. In addition, for example, the sealing resin composition formed into a pellet shape may be processed by a method such as a centrifugal milling method or a thermal cutting method to adjust the degree of dispersion or fluidity.
In addition, as a molding step for preparing a powdery sealing resin composition, for example, a step of pulverizing the mixture to obtain a granular sealing resin composition, and further pulverizing the granular sealing resin composition is exemplified. .
In addition, as a molding step for preparing the ingot-like sealing resin composition, for example, the mixture is pulverized to obtain a granular sealing resin composition, and then the granular sealing resin composition is ingot-molded. Steps of molding.
Moreover, as a shaping | molding process of producing a sheet-like sealing resin composition, the process of extruding or calendering a mixture after melt-kneading is mentioned, for example.

接著,對本實施形態之電子裝置的製造方法的詳細內容進行說明。Next, the details of the manufacturing method of the electronic device of this embodiment are demonstrated.

(電子裝置的製造方法)
本實施形態之電子裝置的製造方法包含藉由將前助焊劑塗佈到在表面上具備銅電路之構件的表面而在銅電路形成OSP膜之塗佈步驟、以及藉由密封用樹脂組成物將銅電路進行密封之密封步驟。
又,在塗佈步驟之後且密封步驟之前,不進行去除OSP膜之洗淨步驟。
又,在塗佈步驟之後且密封步驟之前,可以包含例如進行焊接之迴焊步驟。
(Manufacturing method of electronic device)
The manufacturing method of the electronic device according to this embodiment includes a coating step of forming an OSP film on a copper circuit by applying a front flux to the surface of a member having a copper circuit on the surface, and applying a sealing resin composition to the substrate. The copper circuit is sealed.
In addition, after the coating step and before the sealing step, the cleaning step of removing the OSP film is not performed.
In addition, after the coating step and before the sealing step, for example, a reflow step for performing soldering may be included.

(塗佈步驟)
首先,進行藉由將前助焊劑塗佈到在表面上具備銅電路之構件的表面而在銅電路形成OSP膜之塗佈步驟。藉此,在電子裝置的製造步驟中,能夠抑制銅電路氧化。因此,能夠提高電子裝置的電可靠性。
作為塗佈前助焊劑之方法沒有限定,可舉出例如對於包含前助焊劑之溶液,浸漬在表面上具備銅電路之構件之方法。此時,藉由控制浸漬時間,能夠調整OSP膜的厚度。
如上述,OSP膜具有例如由前助焊劑與銅原子的錯合物構成之錯合物層。又,OSP膜除了上述錯合物層,亦可以進一步包含例如由未形成錯合物之咪唑化合物形成之咪唑層。
(Coating step)
First, a coating step of forming an OSP film on a copper circuit by applying a front flux to the surface of a member having a copper circuit on the surface is performed. Thereby, in the manufacturing process of an electronic device, oxidation of a copper circuit can be suppressed. Therefore, the electrical reliability of the electronic device can be improved.
The method of applying the pre-flux is not limited, and examples thereof include a method of dipping a component including a copper circuit on a surface of a solution containing the pre-flux. At this time, the thickness of the OSP film can be adjusted by controlling the immersion time.
As described above, the OSP film has a complex layer composed of a complex of a front flux and a copper atom, for example. The OSP film may further include, for example, an imidazole layer formed of an imidazole compound in which the complex is not formed, in addition to the complex layer.

作為在表面上具備銅電路之構件沒有限定,例如能夠使用配置有銅電路之基板。
作為本實施形態之基板,具體而言,可舉出:可撓性印刷基板、中介層 (interposer)、引線框等配線基板。
作為形成本實施形態之基板之材料沒有限定,可舉出例如:樹脂等有機物、陶瓷等無機物。
另外,本實施形態之密封用樹脂組成物相對於例如形成有OSP膜之銅焊盤等包含銅之構件,亦能夠不去除OSP膜而顯現較佳的密接性,從該種觀點考慮為較佳。
It does not limit as a member which has a copper circuit on the surface, For example, the board | substrate with which a copper circuit is arrange | positioned can be used.
Specific examples of the substrate of the present embodiment include wiring substrates such as a flexible printed circuit board, an interposer, and a lead frame.
The material for forming the substrate of this embodiment is not limited, and examples thereof include organic materials such as resins and inorganic materials such as ceramics.
In addition, the sealing resin composition according to this embodiment can exhibit better adhesion without removing the OSP film with respect to members containing copper, such as a copper pad on which an OSP film is formed, from this viewpoint. .

作為本實施形態之前助焊劑,使用包含咪唑化合物者。
作為咪唑化合物,只要係用作前助焊劑之以往公知者則沒有限定,例如能夠使用由下述通式(I1)、(I2)表示者。
As the flux before this embodiment, an imidazole compound is used.
The imidazole compound is not limited as long as it is a conventionally known one used as a pre-flux, and for example, those represented by the following general formulae (I1) and (I2) can be used.


(上述通式(I1)、(I2)中,複數個RI 分別獨立為氫或碳數1以上30以下的有機基團。複數個RI 可以彼此相同,亦可以彼此不同。)

(In the above general formulae (I1) and (I2), a plurality of R I are each independently hydrogen or an organic group having 1 to 30 carbon atoms. The plurality of R I may be the same as or different from each other.)

上述通式(I1)、(I2)中,作為RI 的碳數1以上30以下的有機基團,具體而言,可舉出:甲基、乙基、正丙基、異丙基、正丁基、異丁基、二級丁基、三級丁基、戊基、新戊基、己基、庚基、辛基、壬基、癸基等烷基;苯基、萘基、蒽基等芳基;將上述烷基或上述芳基的氫原子中的1個以上以鹵素原子取代之鹵素取代烷基等。In the general formulae (I1) and (I2), examples of the organic group having 1 to 30 carbon atoms in R I include methyl, ethyl, n-propyl, isopropyl, and n- Butyl, isobutyl, secondary butyl, tertiary butyl, pentyl, neopentyl, hexyl, heptyl, octyl, nonyl, decyl and other alkyl groups; phenyl, naphthyl, anthracenyl, etc. Aryl group; a halogen-substituted alkyl group in which one or more of the hydrogen atom of the alkyl group or the aryl group is substituted with a halogen atom;

作為咪唑化合物,具體而言,可舉出:咪唑、2-甲基咪唑、2-(1-甲基戊基)咪唑、2-乙基-4-甲基咪唑、4-甲基咪唑、2,4,5-三甲基咪唑、4,5-二氯-2-乙基咪唑、2-甲基苯并咪唑、2-庚基-5,6-二甲基苯并咪唑、2-辛基-5-氯苯并咪唑、4-氟苯并咪唑、2-戊基-5-碘苯并咪唑、2,4-二苯基咪唑、2-(2,4-二乙基)-4-(3-丙基-5-辛基)-5-異丁基咪唑、2-苯基-4-(1-萘基)咪唑、2-(1-萘基)-4-苯基咪唑、2-苯基苯并咪唑、2-(1-萘基)苯并咪唑、2-環己基苯并咪唑等。
作為咪唑化合物,能夠組合上述具體例中的1種或2種以上來使用。
Specific examples of the imidazole compound include imidazole, 2-methylimidazole, 2- (1-methylpentyl) imidazole, 2-ethyl-4-methylimidazole, 4-methylimidazole, and 2 , 4,5-trimethylimidazole, 4,5-dichloro-2-ethylimidazole, 2-methylbenzimidazole, 2-heptyl-5,6-dimethylbenzimidazole, 2-octyl Methyl-5-chlorobenzimidazole, 4-fluorobenzimidazole, 2-pentyl-5-iodobenzimidazole, 2,4-diphenylimidazole, 2- (2,4-diethyl) -4 -(3-propyl-5-octyl) -5-isobutylimidazole, 2-phenyl-4- (1-naphthyl) imidazole, 2- (1-naphthyl) -4-phenylimidazole, 2-phenylbenzimidazole, 2- (1-naphthyl) benzimidazole, 2-cyclohexylbenzimidazole and the like.
As the imidazole compound, one or two or more of the above specific examples can be used in combination.

藉由塗佈步驟形成之OSP膜的厚度的上限值,例如為:1.0μm以下為較佳,0.8μm以下為更佳,0.6μm以下為進一步較佳,0.4μm以下為更進一步較佳,0.3μm以下為特佳。藉此,在密封步驟中,密封用樹脂組成物容易破壞OSP膜,能夠進一步提高密封用樹脂組成物的硬化物與銅電路的密接性。
又,藉由塗佈步驟形成之OSP膜的厚度的下限值,例如為:0.05μm以上為較佳,0.08μm以上為更佳,0.10μm以上為進一步較佳,0.15μm以上為更進一步較佳。藉此,能夠進一步抑制銅電路氧化。因此,能夠提高電子裝置的電性可靠性。又,依本實施形態之電子裝置的製造方法,即使OSP膜的厚度為上述下限值以上,亦能夠不進行洗淨步驟而破壞OSP膜,並提高密封用樹脂組成物的硬化物與銅電路的密接性,在這一觀點上較佳。
The upper limit of the thickness of the OSP film formed by the coating step is, for example, 1.0 μm or less is preferred, 0.8 μm or less is more preferred, 0.6 μm or less is further preferred, and 0.4 μm or less is further preferred. 0.3 μm or less is particularly preferred. Thereby, in the sealing step, the OSP film is easily broken by the sealing resin composition, and the adhesion between the hardened material of the sealing resin composition and the copper circuit can be further improved.
In addition, the lower limit of the thickness of the OSP film formed by the coating step is, for example, preferably 0.05 μm or more, more preferably 0.08 μm or more, more preferably 0.10 μm or more, and more preferably 0.15 μm or more. good. This can further suppress oxidation of the copper circuit. Therefore, the electrical reliability of the electronic device can be improved. In addition, according to the method for manufacturing an electronic device according to this embodiment, even if the thickness of the OSP film is greater than or equal to the above-mentioned lower limit value, the OSP film can be destroyed without performing a washing step, and the cured resin composition for sealing and the copper circuit can be improved. The adhesion is better from this viewpoint.

(密封步驟)
塗佈步驟之後,不進行去除OSP膜之洗淨步驟而進行藉由密封用樹脂組成物將銅電路進行密封之密封步驟。密封步驟例如能夠藉由模具成形來進行。
(Sealing step)
After the coating step, a sealing step of sealing a copper circuit with a sealing resin composition is performed without performing a cleaning step of removing the OSP film. The sealing step can be performed by, for example, mold forming.

作為模具成形的方法沒有限定,具體而言,能夠使用轉移模具成形法 (transfer molding)、壓模成形法 (compression moding)以及射出成形法 (injection molding)等。作為進行密封時的成形方法,在上述具體例中使用轉移成形法為較佳。The method for mold forming is not limited, and specifically, transfer molding, compression moding, injection molding, and the like can be used. As a molding method when sealing is performed, a transfer molding method is preferably used in the above specific examples.

在本實施形態中,作為模具成形的條件沒有限定,例如能夠在溫度120℃以上200℃以下進行10秒鐘以上30分鐘以下的熱處理來進行預硬化,接著在120℃以上200℃以下的溫度下進行1小時以上24小時以下的熱處理來進行後硬化(post cure)。
另外,在本實施形態中,將後硬化之密封用樹脂組成物作為硬化物來表示。
In this embodiment, the conditions for forming the mold are not limited. For example, it can be pre-cured by heat treatment at a temperature of 120 ° C to 200 ° C for 10 seconds to 30 minutes, and then at a temperature of 120 ° C to 200 ° C. Post-curing is performed by performing heat treatment for 1 hour to 24 hours.
In this embodiment, a post-cured sealing resin composition is shown as a cured product.

作為模具成形溫度的下限值,例如為:100℃以上為較佳,110℃以上為更佳,120℃以上為進一步較佳,150℃以上為更進一步較佳。模具成形的溫度越高,越容易藉由密封用樹脂組成物來破壞OSP膜。藉此,能夠提高密封用樹脂組成物的硬化物與銅電路的密接性。
又,作為模具成形溫度的上限值,例如可以為240℃以下,亦可以設為220℃以下。
As the lower limit value of the mold forming temperature, for example, 100 ° C or higher is preferred, 110 ° C or higher is more preferred, 120 ° C or higher is further preferred, and 150 ° C or higher is further preferred. The higher the mold forming temperature, the easier it is to break the OSP film by the sealing resin composition. Thereby, the adhesiveness of the hardened | cured material of the sealing resin composition and a copper circuit can be improved.
The upper limit of the mold forming temperature may be, for example, 240 ° C or lower, and may be 220 ° C or lower.

(洗淨步驟)
本實施形態之電子裝置的製造方法中,在塗佈步驟之後且密封步驟之前,不進行去除OSP膜之洗淨步驟。藉此,在能夠提高電子裝置的生產性之觀點上較佳。
在以往的電子裝置的製造方法中,未進行例如去除OSP膜之洗淨步驟。藉此,密封用樹脂組成物與銅的密接性有改善的空間。
又,當需要去除OSP膜時,作為在以往的電子裝置的製造方法中實施之洗淨步驟,具體而言,可舉出使用薬水之化學處理。為了去除OSP膜的錯合物層,作為薬水,具體而言,使用了:己二酸、壬二酸、二十烷二酸、檸檬酸、乙醇酸、琥珀酸、水楊酸、二乙醇酸、2,6-吡啶二甲酸、二丁基苯胺二乙醇酸、辛二酸、癸二酸、巰乙酸、對苯二甲酸、十二烷二酸、對羥基苯乙酸、吡啶甲酸、苯琥珀酸、酞酸、反丁烯二酸、順丁烯二酸、丙二酸、月桂酸、苯甲酸、酒石酸、異三聚氰酸三(2-羧乙基)、甘胺酸、1,3-環己烷二甲酸、2,2-雙(羥甲基)丙酸、2,2-雙(羥甲基)丁酸、2,3-二羥基苯甲酸、2,4-二乙基戊二酸、2-喹啉甲酸、3-羥基苯甲酸、蘋果酸、對茴香酸、硬脂酸、12-羥基硬脂酸、油酸、亞麻油酸、次亞麻油酸、二聚酸、氫化二聚酸、三聚酸、氫化三聚酸等有機酸。
另外,例如有在焊接時使用之助焊劑中包含上述有機酸之情形。藉此,存在有助焊劑之部分,焊接周邊之OSP膜被破壞,能夠藉由洗淨助焊劑的殘渣來去除。然而,焊接周邊以外之OSP膜殘留,成為密封材料的硬化物與銅電路的密接性下降之原因。
(Washing step)
In the manufacturing method of the electronic device of this embodiment, the washing step of removing the OSP film is not performed after the coating step and before the sealing step. Thereby, it is preferable from a viewpoint that productivity of an electronic device can be improved.
In the conventional manufacturing method of an electronic device, the washing | cleaning process which removes an OSP film, for example is not performed. Thereby, there is room for improvement in the adhesion between the sealing resin composition and copper.
In addition, when it is necessary to remove the OSP film, as a cleaning step performed in a conventional method of manufacturing an electronic device, specifically, a chemical treatment using rubidium water may be mentioned. In order to remove the complex layer of the OSP film, as osmium water, specifically, adipic acid, azelaic acid, eicosenedioic acid, citric acid, glycolic acid, succinic acid, salicylic acid, and diethanol were used. Acid, 2,6-pyridinedicarboxylic acid, dibutylaniline diglycolic acid, suberic acid, sebacic acid, thioacetic acid, terephthalic acid, dodecanedioic acid, p-hydroxyphenylacetic acid, picolinic acid, benzeneamber Acid, phthalic acid, fumaric acid, maleic acid, malonic acid, lauric acid, benzoic acid, tartaric acid, tris (2-carboxyethyl) isocyanurate, glycine, 1,3 -Cyclohexanedicarboxylic acid, 2,2-bis (hydroxymethyl) propionic acid, 2,2-bis (hydroxymethyl) butanoic acid, 2,3-dihydroxybenzoic acid, 2,4-diethylpentane Diacid, 2-quinolinic acid, 3-hydroxybenzoic acid, malic acid, p-anisic acid, stearic acid, 12-hydroxystearic acid, oleic acid, linoleic acid, hypolinolenic acid, dimer acid, hydrogenation Organic acids such as dimer acid, trimer acid and hydrogenated trimer acid.
In addition, for example, the above-mentioned organic acid may be contained in the flux used at the time of soldering. Thereby, there is a part where the flux exists, and the OSP film around the solder is broken, and the residue of the flux can be removed by washing. However, the remaining OSP film other than the soldering periphery is the cause of the decrease in adhesion between the hardened material of the sealing material and the copper circuit.

(迴焊步驟)
本實施形態之電子裝置的製造方法中,在塗佈步驟之後且密封步驟之前,例如可以包含進行焊接之迴焊步驟。
在迴焊步驟中,焊接例如在180℃以上300℃以下的溫度進行。OSP膜的錯合物層藉由迴焊步驟中之熱處理而變得牢固。本實施形態之電子裝置的製造方法中,藉由經過迴焊步驟,即使OSP膜的錯合物層變得牢固,亦能夠藉由密封步驟來破壞錯合物層,因此較佳。
(Reflow step)
In the manufacturing method of the electronic device according to this embodiment, after the coating step and before the sealing step, for example, a reflow step for performing soldering may be included.
In the reflow step, soldering is performed at, for example, a temperature of 180 ° C. to 300 ° C. The complex layer of the OSP film is strengthened by heat treatment in the reflow step. In the manufacturing method of the electronic device according to this embodiment, it is preferable that the complex layer can be destroyed by the sealing step even if the complex layer of the OSP film is made firm after the reflow step.

接著,對本實施形態之電子裝置進行說明。Next, the electronic device of this embodiment will be described.

(電子裝置)
作為本實施形態之電子裝置沒有限定,具體而言,可舉出:印刷配線基板;成形電路零件(Molded Interconnect Device:MID)等。
在此,作為印刷配線基板沒有限定,具體而言,可舉出:MAP(Mold Array Package,模具陣列封裝)、QFP(Quad Flat Package,四側引腳扁平封裝)、SOP(Small Outline Package,小外形封裝)、CSP(Chip Size Package,晶片尺寸封裝)、QFN(Quad Flat Non-leaded Package,四側無引腳扁平封裝)、SON(Small Outline Non-leaded Package,小外形無引腳封裝)、BGA(Ball Grid Array,球柵陣列封裝)、LF-BGA(Lead Flame BGA,引線框球柵陣列封裝)、FCBGA(Flip Chip BGA,覆晶球柵陣列封裝)、MAPBGA(Molded Array Process BGA,模具陣列工藝球柵陣列封裝)、eWLB(Embedded Wafer-Level BGA,嵌入式晶片級球柵陣列封裝)、Fan-In(扇入)型eWLB、Fan-Out(扇出)型eWLB等半導體封裝;SIP(System In package,系統封裝)等。
又,作為成形電路零件沒有限定,具體而言,可舉出:用於汽車用構件者等。
(Electronic device)
The electronic device according to this embodiment is not limited, and specifically includes a printed wiring board, a molded circuit component (Molded Interconnect Device: MID), and the like.
Here, the printed wiring board is not limited. Specific examples include: MAP (Mold Array Package), QFP (Quad Flat Package), and SOP (Small Outline Package). Outline Package (CSP), Chip Size Package (CSP), Quad Flat Non-leaded Package (QFN), Small Outline Non-leaded Package (SON), Small Outline Non-leaded Package (SON), BGA (Ball Grid Array, Ball Grid Array Package), LF-BGA (Lead Flame BGA, Lead Frame Ball Grid Array Package), FCBGA (Flip Chip BGA, flip-chip ball grid array package), MAPBGA (Molded Array Process BGA, mold Array technology ball grid array package), eWLB (Embedded Wafer-Level BGA, embedded wafer level ball grid array package), Fan-In (fan-in) eWLB, Fan-Out (fan-out) eWLB and other semiconductor packages; SIP (System In package).
In addition, the molded circuit component is not limited, and specific examples thereof include those used in automotive components.

以上,依據實施形態對本發明進行了說明,但本發明並不限定於上述實施形態,在不改變本發明的主旨之範圍內亦能夠改變其構成。
[實施例]
As mentioned above, although this invention was demonstrated based on embodiment, this invention is not limited to the said embodiment, The structure can be changed within the range which does not change the meaning of this invention.
[Example]

以下,使用實施例對本發明進行詳細地說明,但本發明並不受該等實施例的記載的任何限定。Hereinafter, the present invention will be described in detail using examples, but the present invention is not limited at all by the description of these examples.

首先,對密封用樹脂組成物的原料成分進行說明。First, the raw material components of the sealing resin composition will be described.

(環氧樹脂)
・環氧樹脂1:聯苯芳烷基型環氧樹脂(Nippon Kayaku Co., Ltd.製、NC3000)
・環氧樹脂2:三苯甲烷型環氧樹脂與聯苯型環氧樹脂的混合物(Mitsubishi Chemical Corporation製、YL6677)
(Epoxy resin)
・ Epoxy resin 1: Biphenylaralkyl type epoxy resin (manufactured by Nippon Kayaku Co., Ltd., NC3000)
・ Epoxy resin 2: a mixture of a triphenylmethane type epoxy resin and a biphenyl type epoxy resin (manufactured by Mitsubishi Chemical Corporation, YL6677)

(硬化劑)
・硬化劑1:聯苯芳烷基型酚樹脂(Meiwa Plastic Industries, Ltd.製、MEH-7851SS)
・硬化劑2:三苯甲烷型酚樹脂(AIR WATER INC.製、HE910-20)
(hardener)
・ Hardener 1: Biphenylaralkyl-type phenol resin (made by Meiwa Plastic Industries, Ltd., MEH-7851SS)
・ Hardener 2: Triphenylmethane type phenol resin (manufactured by AIR WATER INC., HE910-20)

(密接助劑)
・密接助劑1:具備硫醇基之γ-巰基丙基三甲氧基矽烷(Chisso Corporation 製、S810)
・密接助劑2:具備硫醇基之γ-巰基丙基三乙氧基矽烷(Momentive Performance Materials Japan LLC製、SILQUESTA-1891 SILANE)
・密接助劑3:具備羧基之硬脂酸(NOF CORPORATION製、SR-SACRA)
・密接助劑4:具備三級胺基、雜環胺基之2,4-二胺基-6-(4,5-二羥基戊基)-1,3,5-三(SHIKOKU CHEMICALS CORPORATION製)
・密接助劑5:具備硫醇基、三級胺基、雜環胺基之3-胺基-5-巰基-1,2,4-三唑(NIPPON CARBIDE INDUSTRIES CO.,INC.製)
密接助劑1-5的結構式示於以下式(A1)-(A5)。
(Adhesion aid)
・ Adhesion aid 1: γ-mercaptopropyltrimethoxysilane with thiol group (Chisso Corporation, S810)
・ Adhesion Aid 2: γ-mercaptopropyltriethoxysilane with thiol group (manufactured by Momentive Performance Materials Japan LLC, SILQUESTA-1891 SILANE)
・ Adhesion Aid 3: Stearic acid with carboxyl group (NOF CORPORATION, SR-SACRA)
-Adhesion Aid 4: 2,4-diamino-6- (4,5-dihydroxypentyl) -1,3,5-tri (terminated by SHIKOKU CHEMICALS CORPORATION) )
・ Adhesion aid 5: 3-amino-5-mercapto-1,2,4-triazole (Made by NIPPON CARBIDE INDUSTRIES CO., INC.) With thiol group, tertiary amine group, and heterocyclic amine group
The structural formulas of the adhesion promoters 1-5 are shown in the following formulas (A1) to (A5).

(硬化促進劑)
・硬化促進劑1:將由下述式(P1)表示之鏻化合物與矽烷化合物的加成物進行合成,用作硬化促進劑1。以下對合成方法進行詳細的說明。
首先,在加入了甲醇1800g之燒瓶中,添加苯基三甲氧基矽烷249.5g、2,3-二羥基萘384.0g並使其溶解,接著在室溫下進行攪拌並滴加了28%甲醇鈉-甲醇溶液231.5g。接著,將四苯基溴化鏻503.0g溶解於甲醇600g而成之溶液在室溫下進行攪拌並向燒瓶中滴加,使結晶析出。將析出之結晶進行過濾、水洗、真空乾燥,獲得了作為鏻化合物與矽烷化合物的加成物的粉白色結晶之硬化促進劑1。
(Hardening accelerator)
・ Hardening accelerator 1: Synthesis of an adduct of a hafnium compound and a silane compound represented by the following formula (P1), and using it as a hardening accelerator 1. The synthesis method is described in detail below.
First, in a flask containing 1800 g of methanol, 249.5 g of phenyltrimethoxysilane and 384.0 g of 2,3-dihydroxynaphthalene were added and dissolved, and then stirred at room temperature and 28% sodium methoxide was added dropwise. -231.5 g of a methanol solution. Next, a solution prepared by dissolving 503.0 g of tetraphenylphosphonium bromide in 600 g of methanol was stirred at room temperature and dropped into a flask to precipitate crystals. The precipitated crystals were filtered, washed with water, and dried under vacuum to obtain a hardening accelerator 1 of powdery white crystals as an adduct of an amidine compound and a silane compound.

(無機填充材料)
・無機填充材料1:熔融球狀二氧化矽(龍森公司製、MUF-46V、D50 =4.3μm)
・無機填充材料2:球狀微粉二氧化矽(Admatechs Company Limited製、SC-2500-SQ、D50 =0.6μm)
另外,填充材料的體積基準的累積50%粒徑(D50 )使用雷射繞射式粒度分佈測量裝置(SHIMADZU CORPORATION製、SALD-7000)以體積基準來測量粒子的粒度分佈並進行了計算。
(Inorganic filler)
・ Inorganic filler 1: Fused spherical silica (manufactured by Lonson, MUF-46V, D 50 = 4.3 μm)
・ Inorganic filler 2: Spherical fine powdered silica (manufactured by Admatechs Company Limited, SC-2500-SQ, D 50 = 0.6 μm)
The volume-based cumulative 50% particle diameter (D 50 ) of the filler was measured and calculated using a laser diffraction particle size distribution measurement device (manufactured by Shimadzu Corporation, SALD-7000) on a volume basis.

(耦合劑)
・耦合劑1:N-苯基-3-胺基丙基三甲氧基矽烷(Dow Corning Toray Co.,Ltd.製、CF-4083)
(Coupling agent)
・ Coupling agent 1: N-phenyl-3-aminopropyltrimethoxysilane (manufactured by Dow Corning Toray Co., Ltd., CF-4083)

(脫模劑)
・脫模劑1:二乙醇胺・二褐煤酸酯(Itoh Oil Chemicals Co., Ltd.製、ITOHWAX TP NC 133)
(Release Agent)
・ Releasing agent 1: Diethanolamine ・ Dimonanate (manufactured by Itoh Oil Chemicals Co., Ltd., ITOHWAX TP NC 133)

(著色劑)
・著色劑1:碳黑(Mitsubishi Chemical Corporation製、碳#5)
(Colorant)
・ Colorant 1: Carbon black (manufactured by Mitsubishi Chemical Corporation, carbon # 5)

(阻燃劑)
・阻燃劑1:氫氧化鋁(Sumitomo Chemical Company, Limited製、CL-303)
(Flame retardant)
・ Flame retardant 1: Aluminum hydroxide (manufactured by Sumitomo Chemical Company, Limited, CL-303)

(離子捕捉劑)
・離子捕捉劑1:水滑石(Kyowa Chemical Industry Co., Ltd.製、DHT-4H)
(Ion trapping agent)
・ Ion trapping agent 1: Hydrotalcite (Kyowa Chemical Industry Co., Ltd., DHT-4H)

(低應力劑)
・低應力劑1:羧基末端丙烯腈-丁二烯共聚物(PTI Japan Corporation製、CTBN1008SP)
(Low stress agent)
・ Low stress agent 1: carboxy-terminated acrylonitrile-butadiene copolymer (manufactured by PTI Japan Corporation, CTBN1008SP)

(實施例1)
首先,將記載於下述表1之摻合量的各成分在常溫利用混合機進行混合,接著在70℃以上100℃以下的溫度進行了加熱混煉。接著,冷卻至常溫後,進行粉碎,準備了在實施例1的電子裝置的製作中使用之密封用樹脂組成物。
接著,準備了在長度15mm×寬度15mm的表面上具備銅電路之印刷配線基板。接著,在印刷配線基板上塗佈包含咪唑化合物之前助焊劑(SHIKOKU CHEMICALS CORPORATION製、GLICOAT-SMD F2(LX)PK),形成了厚度0.2μm的OSP膜。
接著,在印刷配線基板上配置長度10mm×寬度10mm×厚度250μm的覆晶封裝,接著,在峰值溫度240℃、峰值溫度時間10秒鐘、氮環境進行迴焊處理,藉此使焊接凸點熔融,使覆晶封裝與印刷配線基板接合。另外,迴焊處理進行了2次。
接著,將上述中獲得之搭載有封裝之基板配置於模具內,使用轉移成形機,在模具溫度175℃、注入壓力9.8MPa的條件,將上述密封用環氧樹脂組成物注入到模具內進行了成形。接著,進行175℃、120秒鐘的硬化處理來製作了電子裝置。
(Example 1)
First, the components described in the blending amounts described in Table 1 below were mixed at room temperature using a mixer, and then heated and kneaded at a temperature of 70 ° C to 100 ° C. Next, after cooling to normal temperature, pulverization was performed to prepare a sealing resin composition used in the production of the electronic device of Example 1.
Next, a printed wiring board having a copper circuit on a surface having a length of 15 mm × width of 15 mm was prepared. Next, a flux containing a imidazole compound (GLICOAT-SMD F2 (LX) PK, manufactured by SHIKOKU CHEMICALS CORPORATION) was coated on the printed wiring board to form an OSP film having a thickness of 0.2 μm.
Next, a flip-chip package with a length of 10 mm × width of 10 mm × a thickness of 250 μm was placed on the printed wiring board, and then a solder bump was melted at a peak temperature of 240 ° C., a peak temperature time of 10 seconds, and a nitrogen atmosphere, thereby melting the solder bumps. To bond the flip-chip package to the printed wiring board. The reflow process was performed twice.
Next, the obtained substrate with the package mounted thereon was placed in a mold, and the above-mentioned sealing epoxy resin composition was injected into the mold using a transfer molding machine under conditions of a mold temperature of 175 ° C and an injection pressure of 9.8 MPa. Forming. Then, a hardening treatment was performed at 175 ° C for 120 seconds to produce an electronic device.

(實施例2~6、比較例1)
將密封用樹脂組成物的摻合組成變更為下述表1的實施例2~6、比較例1中所記載者,除此以外,以與實施例1相同的方式製作了電子裝置。
(Examples 2 to 6, Comparative Example 1)
An electronic device was produced in the same manner as in Example 1 except that the blending composition of the sealing resin composition was changed to those described in Examples 2 to 6 and Comparative Example 1 in Table 1 below.

(Cu密接性)
對於實施例1~6、比較例1的電子裝置,為了評價密封用樹脂組成物與銅電路的密接性而進行了以下實驗。
首先,準備了模仿銅電路之長度10mm×寬度30mm×厚度0.2mm的銅板。接著,將包含咪唑化合物之前助焊劑(SHIKOKU CHEMICALS CORPORATION製、GLICOAT-SMD F2(LX)PK)塗佈到該銅板,形成了厚度0.2μm的OSP膜。
接著,進行了在峰值溫度240℃、峰值溫度時間10秒鐘、氮環境模擬迴焊處理之熱處理。另外,該熱處理進行了2次。
接著,將形成了OSP膜之銅板配置於模具內,利用轉移成形機,在模具溫度175℃、注入壓力9.8MPa的條件,將在各實施例、比較例1的電子裝置的製作中使用之密封用環氧樹脂組成物注入到模具內進行了成形。接著,以溫度175℃進行120秒鐘的硬化處理,在形成有OSP膜之銅板上,製作了底面直徑3.6mmφ、高度3mm的圓筒形狀的密封用樹脂組成物的硬化物。藉此,製作了10個在形成有OSP膜之銅板上配置有密封用樹脂組成物的硬化物之試驗片。
對於使用用於各實施例以及比較例1的電子裝置之密封用樹脂組成物之10個試驗片,在溫度260℃的條件,利用自動晶片剪斷測量裝置(Nordson Advanced Technology(Japan) K.K.製、DAGE4000型)評價了針對密封用樹脂組成物與銅板的密接之剪斷接著力。將10個試驗片的剪斷接著力的平均值作為Cu密接性,示於以下表1。另外,單位為“N/mm”。
(Cu adhesion)
For the electronic devices of Examples 1 to 6 and Comparative Example 1, the following experiments were performed in order to evaluate the adhesion between the sealing resin composition and the copper circuit.
First, a copper plate having a length of 10 mm × width of 30 mm × thickness of 0.2 mm was prepared to simulate a copper circuit. Next, a flux (a GLICOAT-SMD F2 (LX) PK manufactured by Shikoku Chemicals Corporation, manufactured by SHIKOKU CHEMICALS CORPORATION) containing an imidazole compound was applied to the copper plate to form an OSP film having a thickness of 0.2 μm.
Next, a heat treatment was performed at a peak temperature of 240 ° C, a peak temperature time of 10 seconds, and a simulated reflow process in a nitrogen environment. This heat treatment was performed twice.
Next, the copper plate on which the OSP film was formed was placed in a mold, and the seal used in the production of the electronic device of each example and comparative example 1 was sealed using a transfer molding machine under conditions of a mold temperature of 175 ° C and an injection pressure of 9.8 MPa. An epoxy resin composition was injected into the mold and molded. Then, a hardening treatment was performed at a temperature of 175 ° C for 120 seconds, and a hardened product of a cylindrical sealing resin composition having a bottom surface diameter of 3.6 mmφ and a height of 3 mm was produced on the copper plate on which the OSP film was formed. Thereby, ten test pieces in which a hardened material of a sealing resin composition was arranged on a copper plate on which an OSP film was formed were produced.
Ten test pieces using the resin composition for sealing of the electronic device of each Example and Comparative Example 1 were tested at a temperature of 260 ° C using an automatic wafer cutting measurement device (manufactured by Nordson Advanced Technology (Japan) KK, DAGE4000 type) The shear adhesive force for the adhesion between the sealing resin composition and the copper plate was evaluated. The average value of the shear adhesive force of the ten test pieces is shown in Table 1 below as Cu adhesion. The unit is "N / mm".

[表1]
[Table 1]

如表1所示,確認到藉由各實施例的電子裝置的製造方法製作之電子裝置與藉由比較例1的電子裝置的製造方法製作之電子裝置相比,Cu密接性高。As shown in Table 1, it was confirmed that the electronic device manufactured by the electronic device manufacturing method of each example has higher Cu adhesion than the electronic device manufactured by the electronic device manufacturing method of Comparative Example 1.

本申請以2017年12月25日申請之日本特願2017-247284號為基礎主張優先權,其公開的全部內容引用於此。This application claims priority on the basis of Japanese Patent Application No. 2017-247284, filed on December 25, 2017, the entire disclosure of which is hereby incorporated by reference.

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Claims (13)

一種電子裝置的製造方法,其包括以下步驟: 準備在表面上具備銅電路之構件之步驟; 藉由在該表面上塗佈前助焊劑而在該銅電路形成OSP膜之塗佈步驟;及 將該銅電路藉由密封用樹脂組成物進行密封之密封步驟, 該密封步驟不進行去除在該塗佈步驟中形成之該OSP膜之洗淨步驟而實施, 該密封用樹脂組成物包含環氧樹脂、硬化劑、密接助劑, 該前助焊劑包含咪唑化合物。A method for manufacturing an electronic device includes the following steps: Steps to prepare components with copper circuits on the surface; A coating step of forming an OSP film on the copper circuit by applying a pre-flux on the surface; and A sealing step of sealing the copper circuit with a sealing resin composition, The sealing step is performed without performing a cleaning step of removing the OSP film formed in the coating step, The sealing resin composition includes an epoxy resin, a hardener, and an adhesion assistant. The pre-flux contains an imidazole compound. 如申請專利範圍第1項之電子裝置的製造方法,其中,該密接助劑包含選自由硫醇基、羧基以及胺基組成之群中之1種以上。For example, the method for manufacturing an electronic device according to the first claim, wherein the adhesion assistant comprises one or more members selected from the group consisting of a thiol group, a carboxyl group, and an amine group. 如申請專利範圍第2項之電子裝置的製造方法,其中,該密接助劑包含該胺基, 該胺基包含雜環胺基。For example, the manufacturing method of an electronic device according to the second item of the patent application, wherein the adhesion assistant contains the amine group, The amine group contains a heterocyclic amine group. 如申請專利範圍第1項之電子裝置的製造方法,其中,該密封用樹脂組成物中的密接助劑的含量相對於該密封用樹脂組成物的總固體成分為0.010質量份以上且1.0質量份以下。For example, the method for manufacturing an electronic device according to the first patent application range, wherein the content of the adhesion assistant in the sealing resin composition is 0.010 parts by mass or more and 1.0 part by mass relative to the total solid content of the sealing resin composition. the following. 如申請專利範圍第1項之電子裝置的製造方法,其中,該密封用樹脂組成物中的密接助劑的含量相對於該環氧樹脂以及該硬化劑的合計量為0.10質量份以上且10質量份以下。For example, the method for manufacturing an electronic device according to claim 1 in which the content of the adhesion promoter in the sealing resin composition is 0.10 parts by mass or more and 10 parts by mass relative to the total amount of the epoxy resin and the hardener. The following. 如申請專利範圍第1項之電子裝置的製造方法,其中,該密封用樹脂組成物進而包含無機填充材料, 該無機填充材料包含二氧化矽。For example, the method for manufacturing an electronic device according to the first claim, wherein the sealing resin composition further includes an inorganic filler, The inorganic filler contains silicon dioxide. 如申請專利範圍第6項之電子裝置的製造方法,其中,該無機填充材料的體積基準的累積50%粒徑D50 為0.1μm以上且50μm以下。For example, the method for manufacturing an electronic device according to item 6 of the application, wherein the volume-based cumulative 50% particle diameter D 50 of the inorganic filler is 0.1 μm or more and 50 μm or less. 如申請專利範圍第1項之電子裝置的製造方法,其中,該硬化劑包含酚樹脂系硬化劑。For example, the method for manufacturing an electronic device according to claim 1, wherein the hardener includes a phenol resin-based hardener. 如申請專利範圍第1項之電子裝置的製造方法,其中,在該塗佈步驟中,該OSP膜的厚度為0.05μm以上且1.0μm以下。For example, in the method for manufacturing an electronic device according to claim 1, in the coating step, the thickness of the OSP film is 0.05 μm or more and 1.0 μm or less. 如申請專利範圍第1項之電子裝置的製造方法,其中,該密封步驟藉由模具成形來進行。For example, the method for manufacturing an electronic device according to the first patent application range, wherein the sealing step is performed by mold forming. 如申請專利範圍第10項之電子裝置的製造方法,其中,在該密封步驟中,該模具成形的溫度為100℃以上240℃以下。For example, in the method for manufacturing an electronic device according to claim 10, in the sealing step, the temperature of the mold forming is 100 ° C. or higher and 240 ° C. or lower. 如申請專利範圍第10項之電子裝置的製造方法,其中,在該密封步驟中,該模具成形的方法為選自由轉移模具成形法、壓模成形法以及射出成形法組成之群中之1種。For example, in the method for manufacturing an electronic device according to claim 10, in the sealing step, the mold forming method is one selected from the group consisting of a transfer mold forming method, a compression molding method, and an injection molding method. . 如申請專利範圍第1項之電子裝置的製造方法,其中,該電子裝置為印刷配線基板或成形電路零件(Molded Interconnect Device:MID)。For example, the manufacturing method of an electronic device according to item 1 of the patent application scope, wherein the electronic device is a printed wiring board or a molded circuit component (Molded Interconnect Device: MID).
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