TW201930804A - Heat treatment furnace and method for manufacturing heat treatment furnace - Google Patents

Heat treatment furnace and method for manufacturing heat treatment furnace Download PDF

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Publication number
TW201930804A
TW201930804A TW107146621A TW107146621A TW201930804A TW 201930804 A TW201930804 A TW 201930804A TW 107146621 A TW107146621 A TW 107146621A TW 107146621 A TW107146621 A TW 107146621A TW 201930804 A TW201930804 A TW 201930804A
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heat treatment
conveyance
conveyance roller
rollers
workpiece
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TW107146621A
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Chinese (zh)
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TWI793235B (en
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山田豊
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日商日本碍子股份有限公司
日商日本碍子燒成爐科技股份有限公司
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/40Arrangements of controlling or monitoring devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Abstract

This heat treatment furnace performs a heat treatment on an object to be treated. The heat treatment furnace is provided with: a heat treatment part that is provided with a space for performing a heat treatment on the object to be treated; and a plurality of conveyance rollers that are arranged in the heat treatment part and that convey the object. The conveyance rollers arranged within the prescribed range of the heat treatment part include, when the conveyance rollers are divided into n number of regions in the axial direction, mi (i=1-n; mi ≥ 0) number of conveyance rollers of an i type (i=1-n) having a position, where the magnitude of the curvature of the conveyance rollers in an axis perpendicular direction is largest, located in an i region (i=1-n). Regarding at least one of the conveyance rollers of a type in which mi is more than one, the number the conveyance rollers of said type arranged successively is less than a prescribed number.

Description

熱處理爐及其製造方法Heat treatment furnace and manufacturing method thereof

在本專利說明書所揭示之技術係有關於一種對被處理物進行熱處理之熱處理爐及其製造方法。The technique disclosed in this patent specification relates to a heat treatment furnace for heat-treating a workpiece and a method of manufacturing the same.

有時會使用熱處理爐(例如,輥底式爐等),對被處理物進行熱處理。這種熱處理爐係包括複數支搬運輥,藉由將被處理物載置於搬運輥之狀態下使搬運輥轉動,來搬運被處理物。例如,在特開2015-64189號公報,係揭示熱處理爐之一例。The object to be treated is sometimes subjected to heat treatment using a heat treatment furnace (for example, a roller hearth furnace or the like). The heat treatment furnace includes a plurality of conveyance rollers, and the workpiece is conveyed by rotating the conveyance roller while the workpiece is placed on the conveyance roller. An example of a heat treatment furnace is disclosed in Japanese Laid-Open Patent Publication No. 2015-64189.

[發明所欲解決之課題][Problems to be solved by the invention]

在這種熱處理爐中,為了提高生產力,有時會在搬運輥上在與搬運方向(以下亦稱為第1方向)垂直且水平之方向(以下稱為第2方向)排列並載置複數個被處理物,並同時搬運這些複數個被處理物。在這種情況,複數個被處理物係在第2方向排列之狀態下在熱處理爐內被搬運。可是,搬運輥有時會發生在製造時所產生之翹曲等的變形。因此,因在搬運輥所產生之變形,有時會傾斜地搬運被處理物。傾斜地搬運被處理物時,會發生妨礙在第2方向所排列並載置之其他之被處理物的搬運,或碰撞熱處理爐內之側壁的問題。此問題在被處理物之搬運距離長的熱處理爐中特別顯著。In such a heat treatment furnace, in order to increase the productivity, a plurality of the conveyance rollers may be arranged in a direction perpendicular to the conveyance direction (hereinafter also referred to as the first direction) and horizontally (hereinafter referred to as a second direction). The processed object and the plurality of processed objects are simultaneously carried. In this case, a plurality of objects to be processed are conveyed in the heat treatment furnace in a state in which they are aligned in the second direction. However, the conveyance roller may be deformed by warpage or the like which occurs at the time of manufacture. Therefore, the workpiece may be conveyed obliquely due to deformation caused by the conveyance roller. When the workpiece is conveyed obliquely, there is a problem that the conveyance of another workpiece to be placed and placed in the second direction is hindered or the side wall of the heat treatment furnace is collided. This problem is particularly remarkable in a heat treatment furnace in which the handling distance of the workpiece is long.

本專利說明書係揭示一種抑制蛇行地搬運在水平且與搬運方向垂直之方向(第2方向)所排列並載置之複數個被處理物的技術。
[解決課題之手段]
This patent specification discloses a technique for suppressing a plurality of objects to be processed which are arranged in a horizontal direction and arranged in a direction perpendicular to the conveyance direction (second direction) and placed thereon.
[Means for solving the problem]

在本專利說明書所揭示之熱處理爐係對被處理物進行熱處理。熱處理爐係包括:熱處理部,係包括對被處理物進行熱處理的空間;及複數支搬運輥,係被配置於熱處理部,並搬運被處理物。在熱處理部之既定範圍所配置的複數支搬運輥,係在將該搬運輥在軸向分割成n個區域時,包含mi個(i=1~n,mi≧0)在第i區域(i=1~n)內具有該搬運輥之在軸直角方向之翹曲的大小成為最大之位置之第i種類(i=1~n)的搬運輥。對mi成為複數個之種類的搬運輥中至少一種,係將該種類之搬運輥不配置成連續既定支數以上。The object to be treated is heat-treated in the heat treatment furnace disclosed in this patent specification. The heat treatment furnace includes a heat treatment portion including a space for heat-treating the workpiece, and a plurality of conveyance rollers disposed in the heat treatment portion to carry the workpiece. The plurality of transport rollers disposed in a predetermined range of the heat treatment portion include mi (i=1 to n, mi≧0) in the i-th region when the transport roller is divided into n regions in the axial direction. =1 to n) The conveyance roller of the i-th type (i=1 to n) having the position where the warpage of the conveyance roller in the direction perpendicular to the axis is the largest. At least one of the plurality of conveyance rollers of the type of mi is not disposed at a predetermined number or more of the conveyance rollers of the type.

本發明者們檢討後,得知當在熱處理部之既定範圍翹曲大之部位位於特定之區域(例如,同一端部側之區域)的搬運輥連續既定支數以上時,在該特定之區域的附近所載置之被處理物成為易蛇行。在上述之熱處理爐,係因為翹曲大之部位位於特定之區域之第i種類的搬運輥中之至少一個不連續既定支數以上,所以可抑制在該區域的附近所載置之被處理物的蛇行。After the review by the inventors of the present invention, it is found that when the conveyance roller which is located in a specific region (for example, the region on the same end side) in a predetermined region of the heat treatment portion has a predetermined number of continuous or more, the specific region is The processed objects placed in the vicinity of the house become easy to snake. In the heat treatment furnace described above, since at least one of the conveyance rollers of the i-th type in which the warpage is large is located in a specific region is not more than a predetermined number of discontinuities, it is possible to suppress the workpiece to be placed in the vicinity of the region. Snake.

又,在本專利說明書所揭示之熱處理爐的製造方法係製造熱處理爐,該熱處理爐係包括:熱處理部,係包括對被處理物進行熱處理的空間;及複數支搬運輥,係被配置於熱處理部,並搬運被處理物;在熱處理部之既定範圍所配置的複數支搬運輥,係在將該搬運輥在軸向分割成n個區域時,包含mi個(i=1~n,mi≧0)在第i區域(i=1~n)內具有該搬運輥之在軸直角方向之翹曲的大小成為最大之位置之第i種類(i=1~n)的搬運輥;該熱處理爐之製造方法係包括:測量步驟,係對在熱處理部之至少既定範圍所配置的複數支搬運輥之各支,在該搬運輥之在軸向的複數個測量位置的各個,測量該搬運輥之在軸直角方向之翹曲的大小;及設置步驟,係對從在該測量步驟所得之測量結果該mi成為複數個之種類的搬運輥中至少一種,以將該種類之搬運輥不配置成連續既定支數以上的方式在該既定範圍設置在該測量步驟已被測量翹曲之複數支搬運輥。Further, in the method for producing a heat treatment furnace disclosed in the present specification, a heat treatment furnace is provided, the heat treatment furnace comprising: a heat treatment portion including a space for heat-treating the workpiece; and a plurality of conveyance rollers disposed in the heat treatment And transporting the workpiece; the plurality of transport rollers disposed in a predetermined range of the heat treatment unit include mi (i=1~n, mi≧) when the transport roller is divided into n regions in the axial direction. 0) a conveyance roller having an i-th type (i=1 to n) in which the size of the warpage of the conveyance roller in the direction perpendicular to the axis is the largest in the i-th region (i=1 to n); The manufacturing method includes a measuring step of measuring each of a plurality of conveying rollers disposed in at least a predetermined range of the heat treatment portion, and measuring the conveying roller at each of a plurality of measurement positions of the conveying roller in the axial direction. The size of the warp in the direction perpendicular to the axis; and the setting step of at least one of the plurality of types of transport rollers from the measurement result obtained in the measuring step, so that the transport roller of the type is not configured to be continuous More than the predetermined count The manner in which the set range is set in the measuring step has been measured by the warping of the plurality of carrying rolls.

在上述之熱處理爐的製造方法,係在熱處理部之既定範圍,將複數支搬運輥設置成將在相同的區域具有該搬運輥之在軸直角方向之翹曲的大小成為最大之位置之搬運輥中至少一個不配置成連續既定支數以上。因此,可抑制在該區域附近所載置之被處理物蛇行。In the method of manufacturing the heat treatment furnace described above, the plurality of conveyance rollers are provided in a predetermined range of the heat treatment unit, and the conveyance roller having the position where the warpage of the conveyance roller in the direction perpendicular to the axis is maximized in the same region is provided. At least one of them is not configured to be continuously more than a predetermined number. Therefore, the object to be processed placed in the vicinity of the area can be suppressed from being snaked.

預先列舉以下所說明之實施例之主要特徵。此外,在以下所記載之技術要素係各自獨立的技術要素,是單獨或藉各種組合發揮技術上的有用性,不是被限定為申請專利時申請專利範圍所記載的組合。The main features of the embodiments described below are listed in advance. Further, the technical elements described below are independent of each other, and are technically useful individually or in various combinations, and are not limited to the combinations described in the patent application scope when the patent is filed.

(特徵1)亦可在本專利說明書所揭示之熱處理爐,係既定支數可以是在將被處理物之一載置於搬運輥時該被處理物所抵接的搬運輥之最大支數的一半。若依據這種構成,在未連續地配置既定支數以上之種類的搬運輥,在搬運翹曲大之部位所在之區域的附近所載置之被處理物時,可避免在該被處理物之與搬運輥接觸的部位中,與翹曲大之部位接觸的個數成為一半以上。因此,可適合地抑制被處理物之搬運方向傾斜。
[實施例]
(Feature 1) The heat treatment furnace disclosed in this patent specification may be a predetermined number of the maximum number of conveyance rollers to which the workpiece abuts when one of the objects to be processed is placed on the conveyance roller. half. According to this configuration, when the conveyance roller of a predetermined number or more is not continuously disposed, when the workpiece to be processed is placed in the vicinity of the region where the warpage is large, the object to be treated can be avoided. Among the portions in contact with the conveyance roller, the number of contacts with the portion having large warpage is half or more. Therefore, it is possible to suitably suppress the inclination of the conveyance direction of the workpiece.
[Examples]

以下,說明實施例之熱處理爐10。如圖1所示,熱處理爐10係包括熱處理部20、搬入部34、搬出部40以及搬運裝置50。熱處理爐10係在藉搬運裝置50在熱處理部20內搬運被處理物12之間,對被處理物12進行熱處理。Hereinafter, the heat treatment furnace 10 of the embodiment will be described. As shown in FIG. 1 , the heat treatment furnace 10 includes a heat treatment unit 20 , a loading unit 34 , a carry-out unit 40 , and a conveyance device 50 . In the heat treatment furnace 10, the workpiece 12 is conveyed between the workpieces 12 in the heat treatment unit 20 by the conveyance device 50, and the workpiece 12 is heat-treated.

作為被處理物12,例如列舉由陶瓷製之電介質體(基材)與電極所積層的積層體、或者鋰離子電池之正極材料或負極材料等。在使用熱處理爐10對陶瓷製之積層體進行熱處理的情況,係可在將這些被處理物載置於平板狀的承載板下,在爐內搬運。又,在使用熱處理爐10對鋰離子電池之正極材料或負極材料進行熱處理的情況,係可在將這些被處理物收容於箱狀的匣鉢下,在爐內搬運。在本實施例之熱處理爐10中,係可在搬運輥52(後述)上在搬運方向排列複數片承載板或匣鉢之狀態下搬運。以下,在本實施例中,將由進行熱處理之物質、與已載置該進行熱處理之物質的承載板或收容該物質之匣鉢所合在一起的整體稱為「被處理物12」。又,在以下的說明中,有時會將搬運被處理物12之方向(與圖1之YZ平面垂直的方向)稱為「搬運方向」或「第1方向」,將水平且與第1方向垂直之方向(與圖1之XZ平面垂直的方向)稱為「第2方向」。The material to be processed 12 is, for example, a laminate in which a dielectric body (base material) made of ceramics and an electrode are laminated, or a positive electrode material or a negative electrode material of a lithium ion battery. When the ceramic laminate is heat-treated using the heat treatment furnace 10, the objects to be processed are placed in a flat carrier plate and conveyed in the furnace. Further, when the positive electrode material or the negative electrode material of the lithium ion battery is heat-treated by using the heat treatment furnace 10, the objects to be processed are stored in a box-shaped crucible and conveyed in the furnace. In the heat treatment furnace 10 of the present embodiment, the conveyance roller 52 (described later) can be conveyed in a state in which a plurality of sheet carriers or rafts are arranged in the conveyance direction. Hereinafter, in the present embodiment, the entirety of the substance to be heat-treated, the carrier plate on which the material to be heat-treated, or the material containing the substance is placed is referred to as "substance 12". In addition, in the following description, the direction in which the workpiece 12 is conveyed (the direction perpendicular to the YZ plane in FIG. 1) may be referred to as "transport direction" or "first direction", and the level and the first direction may be horizontal. The vertical direction (the direction perpendicular to the XZ plane of Fig. 1) is referred to as the "second direction".

熱處理部20係包括大致長方形之箱型的爐體,在爐體之內部係設置以外壁22包圍周圍的空間24。在外壁22的前端面(圖1之-X側的端面),係形成開口26,在外壁22的後端面(圖1之+X側的端面),係形成開口28。被處理物12係藉搬運裝置50從開口26被搬運至熱處理部20內,再從開口28向熱處理部20外被搬運。即,開口26係被用作熱處理部20的搬入口,開口28係被用作熱處理部20的搬出口。The heat treatment unit 20 includes a substantially rectangular box-shaped furnace body, and an outer wall 22 is provided inside the furnace body to surround the surrounding space 24. An opening 26 is formed in the front end surface (the end surface on the -X side in Fig. 1) of the outer wall 22, and an opening 28 is formed in the rear end surface (the end surface on the +X side in Fig. 1) of the outer wall 22. The workpiece 12 is transported from the opening 26 into the heat treatment unit 20 by the transport device 50, and is transported from the opening 28 to the outside of the heat treatment unit 20. That is, the opening 26 is used as the carry-in port of the heat treatment portion 20, and the opening 28 is used as the carry-out port of the heat treatment portion 20.

在空間24中,配置複數支搬運輥52、與複數個加熱器30、32。加熱器30係在搬運方向以等間隔被配置於搬運輥52之上方的位置,加熱器32係在搬運方向以等間隔被配置於搬運輥52之下方的位置。加熱器30、32係藉由發熱,而使空間24內被加熱。此外,在本實施例,加熱器30、32係分別在搬運方向以等間隔所配置,但是不限定為這種構成。加熱器亦可係例如配合被處理物12之種類或熱處理部20之熱處理的條件等,適當地變更成所要之位置並配置。又,在本實施例中,係在空間24內配置加熱器30、32,但是不限定為這種構成。只要可在空間24內進行加熱即可,例如亦可在空間24內設置氣體燃燒器等。In the space 24, a plurality of conveyance rollers 52 and a plurality of heaters 30 and 32 are disposed. The heaters 30 are disposed at a position above the conveyance roller 52 at equal intervals in the conveyance direction, and the heaters 32 are disposed at positions below the conveyance rollers 52 at equal intervals in the conveyance direction. The heaters 30, 32 heat up the space 24 by heating. Further, in the present embodiment, the heaters 30 and 32 are arranged at equal intervals in the conveyance direction, but are not limited to such a configuration. The heater may be appropriately changed to a desired position and disposed, for example, in accordance with the type of the workpiece 12 or the heat treatment condition of the heat treatment portion 20. Further, in the present embodiment, the heaters 30 and 32 are disposed in the space 24, but the configuration is not limited thereto. As long as the heating can be performed in the space 24, for example, a gas burner or the like may be provided in the space 24.

如圖2所示,熱處理部20係在第2方向排列並搬運複數個被處理物12。本實施例係在熱處理部20(即熱處理爐10整體)中,在第2方向排列並搬運3個被處理物12。因此,在本實施例中,熱處理部20之在第2方向的尺寸係作成比在第2方向排列3個被處理物12的尺寸大,但是熱處理部20之在第2方向的尺寸係無特別的限定。熱處理部20之在第2方向的尺寸亦可係在第2方向排列並搬運比3個還多之被處理物12的大小。又,熱處理部20之在搬運方向的尺寸係比較大的,約100m,但是熱處理部20之在搬運方向的尺寸係無特別的限定。例如,熱處理部20之在搬運方向的尺寸係亦可比100m小,亦可是30m~100m,亦可比100m大。此外,在以下之說明,有時會將被處理物12在第2方向上複數排列的情況之第2方向的中央側稱為「內側」,對第2方向之中央將端部側(+Y方向及-Y方向)稱為「外側」。此外,被處理物12係隔著既定間隔地連續地被搬入熱處理部20。因此,被處理物12係被配置成不僅在第2方向排列,而且在搬運方向亦排列。As shown in FIG. 2, the heat processing unit 20 arranges and conveys a plurality of objects 12 to be processed in the second direction. In the present embodiment, in the heat treatment unit 20 (that is, the entire heat treatment furnace 10), three objects 12 to be processed are arranged and transported in the second direction. Therefore, in the present embodiment, the dimension of the heat treatment portion 20 in the second direction is larger than the size of the three workpieces 12 arranged in the second direction, but the dimension of the heat treatment portion 20 in the second direction is not special. Limited. The size of the heat treatment unit 20 in the second direction may be arranged in the second direction and the size of the workpiece 12 that is more than three may be transported. Further, the dimension of the heat treatment portion 20 in the conveyance direction is relatively large, about 100 m, but the dimension of the heat treatment portion 20 in the conveyance direction is not particularly limited. For example, the dimension of the heat treatment portion 20 in the conveyance direction may be smaller than 100 m, may be 30 m to 100 m, or may be larger than 100 m. In addition, in the following description, the center side of the second direction in the case where the workpiece 12 is plurally arranged in the second direction is referred to as "inside", and the center side in the second direction is referred to as "end side" (+Y direction) And the -Y direction) is called "outside". Further, the workpiece 12 is continuously carried into the heat treatment portion 20 at a predetermined interval. Therefore, the objects 12 to be processed are arranged not only in the second direction but also in the conveyance direction.

此外,如圖2所示,在本實施例,係在第2方向所排列並載置之3個被處理物12中,將在第2方向之+Y方向側所載置者當作被處理物12a,將在第2方向之中央(內側)所載置者當作被處理物12b,將在第2方向之-Y方向側所載置者當作被處理物12c,來加以區別。以下,關於其他的構成元件,有時亦會在需要區別該構成元件時,使用沿字之字母來記載,而在不必區別該構成元件時,省略沿字之字母,而只以數字來記載。Further, as shown in FIG. 2, in the present embodiment, among the three objects 12 to be placed and placed in the second direction, the person placed on the +Y direction side in the second direction is regarded as the object to be processed. In the 12a, the center (inside) of the second direction is regarded as the object to be processed 12b, and the person placed on the -Y direction side in the second direction is treated as the object to be processed 12c. Hereinafter, other constituent elements may be described using letters along the word when it is necessary to distinguish the constituent elements. When it is not necessary to distinguish the constituent elements, the letters along the word are omitted, and only the numbers are described.

搬入部34係位於熱處理部20之上游側(即,搬運方向之上游側,在圖1係熱處理部20之-X方向)。搬入部34係接受從熱處理爐10之外部所搬運的被處理物12,再將所接受之被處理物12搬入熱處理部20的空間24內。在搬入部34中,設置搬運輥52,並藉搬運輥52搬運從熱處理爐10之外部所搬運之被處理物12。The loading unit 34 is located on the upstream side of the heat treatment unit 20 (that is, on the upstream side in the conveyance direction, and in the -X direction of the heat treatment unit 20 in Fig. 1). The loading unit 34 receives the workpiece 12 conveyed from the outside of the heat treatment furnace 10, and carries the received workpiece 12 into the space 24 of the heat treatment unit 20. The conveyance unit 34 is provided with a conveyance roller 52, and conveys the workpiece 12 conveyed from the outside of the heat treatment furnace 10 by the conveyance roller 52.

搬出部40係位於熱處理部20之下游側(即,搬運方向之下游側,在圖1係熱處理部20之+X方向)。搬出部40係從熱處理部20之空間24搬出被處理物12,再將所搬出之被處理物12交給熱處理爐10之外部。在搬出部40中,設置搬運輥52,並藉搬運輥52將被處理物12搬運至空間24外。The carry-out portion 40 is located on the downstream side of the heat treatment portion 20 (that is, on the downstream side in the conveyance direction, and in the +X direction of the heat treatment portion 20 in Fig. 1). The unloading unit 40 carries out the workpiece 12 from the space 24 of the heat treatment unit 20, and then delivers the workpiece 12 that has been carried out to the outside of the heat treatment furnace 10. In the carry-out unit 40, the conveyance roller 52 is provided, and the workpiece 12 is conveyed to the outside of the space 24 by the conveyance roller 52.

搬運裝置50係包括複數支搬運輥52、驅動裝置60以及控制裝置62。搬運裝置50係將被搬運至搬入部34之被處理物12從搬入部34經由開口26搬運至熱處理部20的空間24內。進而,搬運裝置50係在空間24內,將被處理物12從開口26搬運至開口28。而且,搬運裝置50係將被處理物12從空間24經由開口28搬運至搬出部40。被處理物12係藉搬運輥52從搬入部34搬運至搬出部40。The conveying device 50 includes a plurality of conveying rollers 52, a driving device 60, and a control device 62. The conveyance device 50 conveys the workpiece 12 conveyed to the loading unit 34 from the loading unit 34 through the opening 26 into the space 24 of the heat treatment unit 20 . Further, the conveying device 50 is placed in the space 24, and conveys the workpiece 12 from the opening 26 to the opening 28. Further, the transport device 50 transports the workpiece 12 from the space 24 to the carry-out unit 40 via the opening 28 . The workpiece 12 is transported from the loading unit 34 to the carry-out unit 40 by the transport roller 52.

搬運輥52係圓筒狀,其軸線係在與搬運方向正交之方向延伸。複數支搬運輥52係全部具有相同的直徑,並在搬運方向上以固定間距被配置成等間隔。此外,在熱處理部20所設置之搬運輥的直徑亦可係與在搬入部34及搬出部40所設置之搬運輥的直徑相異。又,在熱處理部20所設置之搬運輥52亦可係以與在搬入部34及搬出部40所設置之搬運輥52相異的間距所配置。搬運輥52係在熱處理部20、搬入部34以及搬出部40被配置複數支。搬運輥52之軸線方向的尺寸係比熱處理部20之第2方向的尺寸大(參照圖2)。搬運輥52係被支撐成可繞其軸線轉動,藉由傳達驅動裝置60之驅動力而轉動。詳細地說明之,搬運輥52係軸線方向的一端(在圖2係+Y方向側的端部)與驅動裝置60連接,而另一端(在圖2係-Y方向側的端部)成為自由端。在以下之說明中,在搬運輥52之軸線方向,有時會將搬運輥52之與驅動裝置60連接的端部側(即,+Y方向側)稱為「驅動側」,有時會將搬運輥52之自由端側(即,-Y方向側)稱為「從動側」。The conveyance roller 52 has a cylindrical shape, and its axis extends in a direction orthogonal to the conveyance direction. The plurality of transport rollers 52 all have the same diameter and are arranged at equal intervals at a fixed pitch in the transport direction. Further, the diameter of the transport roller provided in the heat treatment portion 20 may be different from the diameter of the transport roller provided in the carry-in portion 34 and the carry-out portion 40. Further, the conveyance roller 52 provided in the heat treatment unit 20 may be disposed at a different pitch from the conveyance roller 52 provided in the loading unit 34 and the delivery unit 40. The conveyance roller 52 is disposed in a plurality of branches in the heat treatment unit 20, the carry-in unit 34, and the carry-out unit 40. The dimension of the conveyance roller 52 in the axial direction is larger than the dimension of the heat treatment part 20 in the 2nd direction (refer FIG. 2). The carrying roller 52 is supported to be rotatable about its axis and rotated by the driving force of the driving device 60. Specifically, the conveyance roller 52 is connected to the drive unit 60 at one end in the axial direction (the end on the +Y direction side in Fig. 2), and the other end (the end on the -Y direction side in Fig. 2) is a free end. . In the following description, the end side of the conveyance roller 52 connected to the drive unit 60 (that is, the +Y direction side) may be referred to as the "drive side" in the axial direction of the conveyance roller 52, and may be carried. The free end side of the roller 52 (i.e., the -Y direction side) is referred to as a "driven side".

驅動裝置60(參照圖1)係驅動搬運輥52之驅動裝置(例如馬達)。驅動裝置60係經由動力傳達機構,與搬運輥52連接。驅動裝置60之驅動力經由動力傳達機構被傳達至搬運輥52時,搬運輥52係轉動。作為動力傳達機構,可使用周知者,例如,使用由鏈輪與鏈條所構成的機構(省略圖示)。驅動裝置60係將各支搬運輥52驅動成搬運輥52以大致相同的速度轉動。此外,本實施例係驅動裝置60將各支搬運輥52驅動成搬運輥52以大致相同的速度轉動,但是不限定為這種構成。例如,熱處理爐10亦可係包括驅動力相異的複數台驅動裝置,並藉複數台驅動裝置,構成為在熱處理部20所設置之搬運輥52以與在搬入部34及搬出部40所設置之搬運輥52相異的速度轉動。驅動裝置60係由控制裝置62所控制。The drive unit 60 (see FIG. 1) is a drive unit (for example, a motor) that drives the conveyance roller 52. The drive unit 60 is connected to the conveyance roller 52 via a power transmission mechanism. When the driving force of the driving device 60 is transmitted to the conveying roller 52 via the power transmission mechanism, the conveying roller 52 rotates. As the power transmission mechanism, a well-known person can be used, for example, a mechanism (not shown) composed of a sprocket and a chain is used. The drive unit 60 drives the respective conveyance rollers 52 to rotate the conveyance rollers 52 at substantially the same speed. Further, in the present embodiment, the driving device 60 drives the respective conveying rollers 52 to rotate the conveying rollers 52 at substantially the same speed, but the configuration is not limited thereto. For example, the heat treatment furnace 10 may include a plurality of driving devices having different driving forces, and the plurality of driving devices may be configured to be disposed in the conveying roller 52 provided in the heat treatment portion 20 and in the loading portion 34 and the carrying portion 40. The conveying roller 52 rotates at a different speed. The drive unit 60 is controlled by the control unit 62.

在本實施例,在熱處理部20所配置之複數支搬運輥52係根據翹曲量(軸直角方向之翹曲量)成為最大之位置(軸向之位置)被分類成複數個組。具體而言,各搬運輥52係在軸向被分割成複數個區域,在各區域設定測量翹曲量的測量點。而且,對各支搬運輥52,在各測量點測量翹曲量,並特定翹曲量成為最大之測量點。特定翹曲量成為最大之測量點後,根據設定該測量點的區域,將複數支搬運輥52分組。例如,將搬運輥52在軸向分割成n個區域Ri(i=1~n),並在各區域Ri設定一個測量點Pi(i=1~n)。而且,將翹曲量成為最大之測量點屬於區域R1 者當作第1組,將翹曲量成為最大之測量點屬於區域R2 者當作第2組,以下一樣地被分組。在本實施例,將如在上述之舉例所示被分組的複數個組中屬於特定組的搬運輥稱為搬運輥52a、52b。因此,搬運輥52a、52b係可意指在將搬運輥52在軸向分割成複數個區域時,該搬運輥52之軸直角方向之翹曲的大小成為最大之位置成為所分割之區域中之特定的區域者。作為將搬運輥52在軸向分割成複數個區域的方法,係例如可將搬運輥52分割成驅動側之區域、中央附近之區域以及從動側之區域的3個區域。又,作為特定之區域,例如可當作在將搬運輥52在軸向分割成複數個時之搬運輥52之端部側的區域,即搬運輥52之驅動側的區域或從動側的區域。In the present embodiment, the plurality of transport rollers 52 disposed in the heat treatment portion 20 are classified into a plurality of groups in accordance with the position at which the amount of warpage (the amount of warpage in the direction perpendicular to the axis) is maximized (the position in the axial direction). Specifically, each of the transport rollers 52 is divided into a plurality of regions in the axial direction, and measurement points for measuring the amount of warpage are set in the respective regions. Further, for each of the transport rollers 52, the amount of warpage is measured at each measurement point, and the specific warpage amount becomes the largest measurement point. After the specific warpage amount becomes the largest measurement point, the plurality of conveyance rollers 52 are grouped according to the region where the measurement point is set. For example, the conveyance roller 52 is divided into n regions Ri (i = 1 to n) in the axial direction, and one measurement point Pi (i = 1 to n) is set in each region Ri. In addition, the measurement point in which the amount of warpage is the largest belongs to the region R 1 as the first group, and the measurement point in which the amount of warpage is the largest belongs to the region R 2 as the second group, and is grouped as follows. In the present embodiment, the conveying rollers belonging to a specific group among the plurality of groups grouped as exemplified above are referred to as conveying rollers 52a, 52b. Therefore, the conveyance rollers 52a and 52b may mean that the position where the warpage of the conveyance roller 52 in the direction perpendicular to the axis is the largest when the conveyance roller 52 is divided into a plurality of regions in the axial direction becomes the divided region. Specific area. As a method of dividing the conveyance roller 52 into a plurality of regions in the axial direction, for example, the conveyance roller 52 can be divided into three regions of a region on the driving side, a region in the vicinity of the center, and a region on the driven side. In addition, as a specific area, for example, it can be regarded as a region on the end side of the conveyance roller 52 when the conveyance roller 52 is divided into a plurality of portions in the axial direction, that is, a region on the drive side or a region on the driven side of the conveyance roller 52. .

使用圖3更具體地說明之。如圖3所示,在本實施例中,在搬運輥52於第2方向排列並載置3個被處理物12a~12c。因此,搬運輥52係將比在驅動側所載置之被處理物12a的中央附近靠近驅動側的區域當作第1區域54,將在驅動側所載置之被處理物12a的中央附近與在從動側所載置之被處理物12c的中央附近之間的區域當作第2區域56,比在從動側所載置之被處理物12c的中央附近靠近從動側的區域當作第3區域58。在第1區域54係設定一個測量點A,在第2區域56係設定3個測量點B、C、D,在第3區域58係設定一個測量點E。在本實施例中,係將搬運輥52之軸直角方向之翹曲的大小成為最大之位置存在於第1區域54者當作搬運輥52a(即,測量點A之翹曲量最大的搬運輥),將搬運輥52之軸直角方向之翹曲的大小成為最大之位置存在於第3區域58者當作搬運輥52b(即,測量點E之翹曲量最大的搬運輥)。This will be more specifically explained using FIG. As shown in FIG. 3, in the present embodiment, the conveyed rollers 52 are arranged in the second direction and placed on the three objects 12a to 12c. Therefore, the conveyance roller 52 is a first region 54 as a region closer to the drive side than the center of the workpiece 12a placed on the drive side, and the vicinity of the center of the workpiece 12a placed on the drive side is A region between the vicinity of the center of the workpiece 12c placed on the driven side is regarded as the second region 56, and is regarded as a region closer to the driven side than the center of the workpiece 12c placed on the driven side. Third region 58. One measurement point A is set in the first area 54, three measurement points B, C, and D are set in the second area 56, and one measurement point E is set in the third area 58. In the present embodiment, the position where the warpage of the conveyance roller 52 in the direction perpendicular to the axis is maximized is present in the first region 54 as the conveyance roller 52a (that is, the conveyance roller having the largest amount of warpage at the measurement point A). The position where the warpage of the conveyance roller 52 in the direction perpendicular to the axis is the largest is present in the third region 58 as the conveyance roller 52b (that is, the conveyance roller having the largest amount of warpage of the measurement point E).

搬運輥52a、52b係分別在熱處理部20被配置成不連續既定支數以上。在本實施例中,搬運輥52a、52b被配置成不連續載置一個被處理物12之搬運輥52之支數的一半以上。此處,在搬運被處理物12之間,載置一個被處理物12之搬運輥52之支數變動的情況,搬運輥52a、52b係被配置成不連續載置一個被處理物12之搬運輥52的支數成為最多時的一半以上。例如,在被處理物12是被載置於最多6支搬運輥52之尺寸(即,總是被載置於6支搬運輥52的尺寸,或者被載置於6支搬運輥52或被載置於5支搬運輥52的尺寸)的情況,係在熱處理部20將搬運輥52a、52b分別配置成不連續3支以上。或者,如圖1所示,在被處理物12是被載置於最多3支搬運輥52之尺寸的情況,係在熱處理部20將搬運輥52a、52b分別配置成不連續2支以上。例如,在與搬運輥52a鄰接的位置,係配置與搬運輥52a相異之搬運輥52b或搬運輥52c(此外,搬運輥52c係表示翹曲最大之位置位於特定之位置以外的搬運輥)。作為一例,如圖1所示,在與搬運輥52a鄰接的位置(下游側),配置搬運輥52c。一樣地,在與搬運輥52b鄰接的位置(上游側),配置搬運輥52c。依此方式,搬運輥52a、52b分別被配置成不連續2支以上。藉由依此方式配置,可抑制在端部側所載置之被處理物12a、12c的蛇行。The conveyance rollers 52a and 52b are arranged in the heat treatment unit 20 so as to be discontinuous or more than a predetermined number. In the present embodiment, the conveyance rollers 52a and 52b are disposed to be half or more of the number of the conveyance rollers 52 on which the workpiece 12 is not continuously placed. Here, when the number of the conveyance rollers 52 on which the workpiece 12 is placed is changed between the conveyed objects 12, the conveyance rollers 52a and 52b are disposed so that the conveyance of one workpiece 12 is not continuously placed. The number of rolls 52 is more than half of the maximum. For example, the workpiece 12 is placed in a size of up to six transport rollers 52 (i.e., is always placed in the size of six transport rollers 52, or placed on six transport rollers 52 or loaded In the case where the size of the five transport rollers 52 is placed, the heat transfer unit 20 arranges the transport rollers 52a and 52b so as to be discontinuous three or more. Alternatively, as shown in FIG. 1, when the workpiece 12 is placed on the size of a maximum of three transport rollers 52, the transport rollers 52a and 52b are disposed in the heat treatment unit 20 so as to be discontinuous or more. For example, at a position adjacent to the conveyance roller 52a, a conveyance roller 52b or a conveyance roller 52c that is different from the conveyance roller 52a is disposed (the conveyance roller 52c is a conveyance roller in which the position where the warpage is the largest is located at a specific position). As an example, as shown in FIG. 1, the conveyance roller 52c is arrange|positioned at the position (downstream side) adjacent to the conveyance roller 52a. In the same manner, the conveyance roller 52c is disposed at a position (upstream side) adjacent to the conveyance roller 52b. In this manner, the conveyance rollers 52a and 52b are each arranged in two or more discontinuous positions. By disposing in this manner, it is possible to suppress the meandering of the objects 12a and 12c placed on the end side.

其次,參照圖3,說明熱處理爐10之製造方法。此外,在本實施例中,在測量搬運輥52之翹曲之大小的步驟、及在熱處理部20配置包含搬運輥52a、52b之搬運輥52的步驟具有特徵,關於其他的步驟,係可使用以往周知的步驟。因此,以下僅說明本實施例之特徵部分,關於其他的步驟則省略說明。Next, a method of manufacturing the heat treatment furnace 10 will be described with reference to Fig. 3 . Further, in the present embodiment, the step of measuring the warpage of the conveyance roller 52 and the step of disposing the conveyance roller 52 including the conveyance rollers 52a and 52b in the heat treatment section 20 are characterized, and other steps can be used. A well-known step in the past. Therefore, only the features of the embodiment will be described below, and the description of the other steps will be omitted.

本實施例之熱處理爐10的製造方法係包括:測量步驟,係在搬運輥52之在軸向的複數個測量位置(測量點A~E)的各個,測量搬運輥52之在軸直角方向之翹曲的大小;及配置步驟,係從在測量步驟所得之測量結果特定搬運輥52a、52b,並在熱處理部20將搬運輥52不配置成連續地配置既定支數以上的搬運輥52a、52b。The manufacturing method of the heat treatment furnace 10 of the present embodiment includes a measuring step of measuring a plurality of measurement positions (measurement points A to E) of the conveyance roller 52 in the axial direction, and measuring the direction of the conveyance roller 52 at a right angle of the shaft. The size of the warpage and the arrangement step are the specific conveyance rollers 52a and 52b from the measurement results obtained in the measurement step, and the conveyance rollers 52 are not disposed in the heat treatment unit 20 so as to continuously arrange the conveyance rollers 52a and 52b having a predetermined number or more. .

首先,藉測量步驟,在搬運輥52之在軸向的複數個測量位置(測量點A~E)的各個,測量搬運輥52之在軸直角方向之翹曲的大小。測量步驟係按照以下之程序所實施。首先,將搬運輥52之兩端支撐成可轉動。例如,使用2個V字塊來支撐搬運輥52之兩端。First, by the measurement step, the amount of warpage of the conveyance roller 52 in the direction perpendicular to the axis is measured at each of a plurality of measurement positions (measurement points A to E) of the conveyance roller 52 in the axial direction. The measurement steps were carried out in accordance with the following procedures. First, both ends of the conveying roller 52 are supported to be rotatable. For example, two V-shaped blocks are used to support both ends of the conveying roller 52.

接著,使用例如度盤規之測量器來測量搬運輥52之在軸向的複數個部位(測量點A~E)之翹曲的大小。作為搬運輥52之在軸向的複數個部位,例如,可採用搬運輥52之中心附近的部位、及在搬運輥52於第2方向排列並載置複數個被處理物12時搬運輥52之與各被處理物12之第2方向的端部接觸的部位之附近的部位。在本實施例中,如圖3所示,因為在搬運輥52於第2方向排列並載置3個被處理物12a~12c,所以將被處理物12a之端部側(+Y方向側)的端部附近當作部位A,將被處理物12a與被處理物12b之邊界附近當作部位B,將搬運輥52之軸向的中央附近當作部位C,將被處理物12b與被處理物12c之邊界附近當作部位D,將被處理物12c之端部側(-Y方向側)的端部附近當作部位E。因此,在測量步驟中,測量搬運輥52之在軸向的各部位A~E(測量點A~E)之翹曲的大小。具體而言,在部位A設置度盤規,使搬運輥52繞軸線轉動一圈,測量搬運輥52位於最上方時與在搬運輥52無翹曲之狀態的差(以下亦稱為翹曲的大小)。對部位B~E,亦進行與上述相同之測量。Next, the magnitude of the warpage of the plurality of portions (measurement points A to E) of the conveyance roller 52 in the axial direction is measured using, for example, a gauge of a dial gauge. As a plurality of portions of the conveyance roller 52 in the axial direction, for example, a portion near the center of the conveyance roller 52 and a conveyance roller 52 when the conveyance roller 52 is arranged in the second direction and placed in a plurality of objects 12 are placed. A portion in the vicinity of a portion in contact with the end portion of each of the workpieces 12 in the second direction. In the present embodiment, as shown in FIG. 3, since the conveyance rollers 52 are arranged in the second direction and placed on the three objects 12a to 12c, the end portion side (+Y direction side) of the workpiece 12a is placed. The vicinity of the end portion is referred to as the portion A, and the vicinity of the boundary between the workpiece 12a and the workpiece 12b is referred to as the portion B, and the vicinity of the center of the conveyance roller 52 in the axial direction is referred to as the portion C, and the workpiece 12b and the workpiece are treated. The vicinity of the boundary of 12c is regarded as the portion D, and the vicinity of the end portion on the end side (-Y direction side) of the workpiece 12c is regarded as the portion E. Therefore, in the measuring step, the magnitude of the warpage of each of the portions A to E (measuring points A to E) of the conveyance roller 52 in the axial direction is measured. Specifically, a gauge is placed on the portion A, and the conveyance roller 52 is rotated one turn around the axis, and the difference between the conveyance roller 52 at the uppermost position and the state where the conveyance roller 52 is not warped (hereinafter also referred to as warpage) is also described. size). For the portions B to E, the same measurements as above were also performed.

測量複數支搬運輥52之在軸向的各部位A~E之翹曲的大小後,藉設置步驟,在熱處理部20設置包含搬運輥52a、52b之複數支搬運輥52。配置步驟係按照以下之程序來實施。首先,從在測量步驟所得之測量結果,對各搬運輥52,判定在測量步驟所測量之各部位A~E之翹曲的大小中哪一個部位之翹曲的大小最大。而且,將翹曲之大小最大的部位存在於第1區域54的搬運輥52特定為搬運輥52a,並將翹曲之大小最大的部位存在於第3區域58的搬運輥52特定為搬運輥52b。After measuring the warpage of each of the plurality of support rollers 52 in the axial direction A to E, a plurality of transport rollers 52 including the transport rollers 52a and 52b are provided in the heat treatment portion 20 by the installation step. The configuration steps are implemented according to the following procedures. First, from the measurement results obtained in the measurement step, it is determined for each of the conveyance rollers 52 which of the sizes of the warpages of the respective portions A to E measured in the measurement step has the largest warpage. Further, the portion where the size of the warpage is the largest is present in the transport roller 52 of the first region 54 as the transport roller 52a, and the transport roller 52 having the largest warpage in the third region 58 is specified as the transport roller 52b. .

如上述所示,在搬運輥52於第2方向排列並載置3個被處理物12a~12c時,將比在驅動側所載置之被處理物12a的中央附近靠近驅動側的區域當作第1區域54。因此,如圖3所示,第1區域54係在各部位A~E中僅包含部位A。因此,將部位A之翹曲之大小最大的搬運輥52特定為搬運輥52a。又,因為將比在從動側所載置之被處理物12c的中央附近靠近從動側的區域當作第3區域58,所以第3區域58係在各部位A~E中僅包含部位E。因此,將部位E之翹曲之大小最大的搬運輥52特定為搬運輥52b。另一方面,因為將在驅動側所載置之被處理物12a的中央附近與在從動側所載置之被處理物12c的中央附近之間的區域當作第2區域56,所以第2區域56係在各部位A~E中包含部位B、C、D。因此,對部位B、C、D之任一個部位之翹曲之大小最大的搬運輥52,係不被特定為搬運輥52a、52b。依此方式,從複數支搬運輥52中特定搬運輥52a、52b。As described above, when the conveyance rollers 52 are arranged in the second direction and the three objects to be processed 12a to 12c are placed, the area closer to the drive side than the center of the workpiece 12a placed on the drive side is regarded as The first area 54. Therefore, as shown in FIG. 3, the first region 54 includes only the portion A in each of the portions A to E. Therefore, the conveyance roller 52 which has the largest magnitude of the warpage of the location A is specified as the conveyance roller 52a. In addition, since the region closer to the driven side than the center of the workpiece 12c placed on the driven side is regarded as the third region 58, the third region 58 includes only the portion E in each of the portions A to E. . Therefore, the conveyance roller 52 which has the largest magnitude of the warpage of the location E is specified as the conveyance roller 52b. On the other hand, the area between the vicinity of the center of the workpiece 12a placed on the driving side and the vicinity of the center of the workpiece 12c placed on the driven side is regarded as the second area 56, so the second The region 56 includes the portions B, C, and D in each of the portions A to E. Therefore, the conveyance rollers 52 having the largest warpage of any of the portions B, C, and D are not specified as the conveyance rollers 52a and 52b. In this manner, the conveyance rollers 52a and 52b are specified from the plurality of conveyance rollers 52.

接著,將搬運輥52a設置成不連續既定支數以上,且將搬運輥52b設置成不連續既定支數以上。例如,在進行熱處理之被處理物12成為被載置於最多6支搬運輥52之尺寸的情況,作成搬運輥52a不連續3支以上,且作成搬運輥52b不連續3支以上。此外,在本實施例中,具有將搬運輥52a、52b分別設置成不連續既定支數以上之特徵,關於設置步驟之其他的程序,因為可使用以往周知的方法,所以省略關於設置步驟之其他的程序之詳細的說明。Next, the conveyance roller 52a is provided in a predetermined number of discontinuities or more, and the conveyance roller 52b is set to be a predetermined number of discontinuous or more. For example, when the workpiece 12 to be heat-treated is placed on the size of a maximum of six transport rollers 52, the transport roller 52a is formed to be discontinuously three or more, and the transport roller 52b is formed to be three or more discontinuous. Further, in the present embodiment, the conveyance rollers 52a and 52b are each provided with a predetermined number of discontinuous or more. For the other procedures of the installation procedure, since a conventionally known method can be used, the other steps regarding the installation steps are omitted. Detailed description of the program.

其次,說明對被處理物12進行熱處理時之熱處理爐10的動作。為了對被處理物12進行熱處理,首先,使加熱器30、32動作,將空間24之環境氣體溫度設定成所設定之溫度。接著,使3個被處理物12分別從熱處理爐10之外部移至在搬入部34所設置之搬運輥52上。在此時,被處理物12係在第2方向被排列並載置3個。接著,使驅動裝置60動作,將在第2方向所排列之3個被處理物12從搬入部34經由開口26,搬運至熱處理部20的空間24內。被搬運至空間24內的被處理物12係在空間24內從開口26被搬運至開口28。藉此,被處理物12係被進行熱處理。然後,已被進行熱處理之被處理物12係通過開口28,被搬運至搬出部40,再從搬出部40被搬出。Next, the operation of the heat treatment furnace 10 when the workpiece 12 is subjected to heat treatment will be described. In order to heat-treat the workpiece 12, first, the heaters 30 and 32 are operated to set the ambient gas temperature of the space 24 to the set temperature. Next, the three objects 12 to be processed are respectively moved from the outside of the heat treatment furnace 10 to the conveyance rollers 52 provided on the loading unit 34. At this time, the objects 12 to be processed are arranged in the second direction and placed three. Next, the drive device 60 is operated to transport the three objects 12 arranged in the second direction from the loading unit 34 to the space 24 of the heat treatment unit 20 via the opening 26 . The workpiece 12 conveyed into the space 24 is transported from the opening 26 to the opening 28 in the space 24. Thereby, the workpiece 12 is subjected to heat treatment. Then, the workpiece 12 that has been subjected to the heat treatment is conveyed to the carry-out portion 40 through the opening 28, and is then carried out from the carry-out portion 40.

被處理物12係為了提高生產力,而在第2方向所排列並載置。搬運輥52係因為在製造時發生翹曲或變形,所以無法將在熱處理爐10所設置之全部的搬運輥52作成完全相同的形狀。又,連續地配置在搬運輥52之軸向的同一端部側(即,驅動側或從動側)所發生之翹曲大的搬運輥52a、52b時,易傾斜地搬運在搬運輥52之外側所載置的被處理物12a、12c。朝向內側傾斜地搬運被處理物12a、12c時,可能妨礙在第2方向所排列並載置之其他的被處理物12b(即,中央之被處理物12b)的搬運。又,朝向外側傾斜地搬運被處理物12a、12c時,可能碰撞熱處理部20之爐體的側壁。尤其,因為本實施例之熱處理爐10係熱處理部20之搬運方向的尺寸比較長,所以在搬運輥52之外側所載置之被處理物12的傾斜容易在熱處理部20搬運之間變大。The objects to be processed 12 are arranged and placed in the second direction in order to increase productivity. Since the conveyance roller 52 is warped or deformed at the time of manufacture, it is impossible to make all the conveyance rollers 52 provided in the heat treatment furnace 10 into the identical shape. In addition, when the conveyance rollers 52a and 52b having large warpage generated on the same end side (that is, the drive side or the driven side) in the axial direction of the conveyance roller 52 are continuously disposed, they are easily conveyed obliquely on the outer side of the conveyance roller 52. The processed objects 12a and 12c are placed. When the objects 12a and 12c are conveyed obliquely toward the inside, the conveyance of the other objects 12b (that is, the objects 12b in the center) arranged and placed in the second direction may be hindered. Further, when the objects 12a and 12c are conveyed obliquely toward the outside, the side walls of the furnace body of the heat treatment unit 20 may be collided. In particular, since the heat treatment furnace 10 of the present embodiment has a relatively long dimension in the conveyance direction, the inclination of the workpiece 12 placed on the outer side of the conveyance roller 52 is likely to increase between the conveyance of the heat treatment unit 20.

在本實施例中,將搬運輥52a設置成不連續既定支數以上,且將搬運輥52b設置成不連續既定支數以上。藉由將搬運輥52a設置成不連續既定支數以上,可抑制在驅動側所載置之被處理物12a的蛇行。又,藉由將搬運輥52b設置成不連續既定支數以上,可抑制在從動側所載置之被處理物12c的蛇行。因此,可避免在搬運輥52之外側所載置的被處理物12a、12c妨礙在搬運輥52之內側所載置之被處理物12b的搬運,而可避免使藉熱處理爐10之熱處理停止。又,可避免被處理物12a、12c與爐體的側面接觸,而可抑制爐體之側壁的損傷。In the present embodiment, the conveyance roller 52a is set to have a predetermined number of discontinuities or more, and the conveyance roller 52b is set to be a predetermined number of discontinuous or more. By setting the conveyance roller 52a to a predetermined number of discontinuities or more, it is possible to suppress the meandering of the workpiece 12a placed on the driving side. In addition, by setting the conveyance roller 52b to a predetermined number of discontinuities or more, it is possible to suppress the meandering of the workpiece 12c placed on the driven side. Therefore, it is possible to prevent the objects 12a and 12c placed on the outer side of the conveyance roller 52 from interfering with the conveyance of the workpiece 12b placed on the inside of the conveyance roller 52, and to avoid stopping the heat treatment of the heat treatment furnace 10. Further, it is possible to prevent the objects 12a and 12c from coming into contact with the side surfaces of the furnace body, and it is possible to suppress damage of the side walls of the furnace body.

此外,在本實施例中,搬運輥52係以以下之方式被分割成3個區域,第1區域54係在各部位A~E中僅包含部位A,第2區域56係在各部位A~E中包含部位B、C、D,第3區域58係在各部位A~E中僅包含部位E,但是不限定為這種構成。鄰接之區域之邊界的位置係不是被限定為上述的例子,例如亦可以第1區域在各部位A~E中包含部位A、B、第2區域僅包含部位C、第3區域包含部位D、E的方式將搬運輥52在軸向分割成3個區域。又,在本實施例,搬運輥52在軸向被分割成3個區域,但是亦可將搬運輥52分割成比3個多的區域。Further, in the present embodiment, the conveyance roller 52 is divided into three regions in such a manner that the first region 54 includes only the portion A in each of the portions A to E, and the second region 56 is in each portion A~ E includes the portions B, C, and D, and the third region 58 includes only the portion E in each of the portions A to E, but the configuration is not limited thereto. The position of the boundary between the adjacent regions is not limited to the above example. For example, the first region may include the portions A and B in each of the portions A to E, and the second region includes only the portion C and the third region including the portion D. In the manner of E, the conveyance roller 52 is divided into three regions in the axial direction. Further, in the present embodiment, the conveyance roller 52 is divided into three regions in the axial direction, but the conveyance roller 52 may be divided into regions larger than three.

又,本實施例係將搬運輥52之翹曲的大小最大之部位存在於最靠近端部側之區域的搬運輥52特定為搬運輥52a、52b,但是不限定為這種構成。只要搬運輥52之翹曲的大小最大之部位存在於特定區域的搬運輥被配置成不連續既定支數以上即可,亦可將在軸向分割搬運輥52時之任一個區域當作「特定的區域」。即使將最靠近端部側之區域以外的區域設定成「特定的區域」,亦可抑制在該「特定的區域」附近所載置之被處理物12蛇行。In the present embodiment, the transport roller 52 in which the portion of the transport roller 52 having the largest warpage is present in the region closest to the end portion side is specified as the transport rollers 52a and 52b, but the configuration is not limited thereto. As long as the transport roller having the largest size of the transport roller 52 in the specific region is disposed at a predetermined number of discontinuous or more, it is also possible to treat any one of the regions in which the transport roller 52 is divided in the axial direction as "specific" Area". Even if the area other than the area closest to the end side is set to the "specific area", it is possible to suppress the object 12 placed in the vicinity of the "specific area" from being snaked.

又,本實施例係測量搬運輥52之在軸向之5個部位A~E之翹曲的大小,但是不限定為這種構成。測量搬運輥52之翹曲之大小的部位係亦可採用比5個多的部位,亦可採用比5個少的部位。又,本實施例係根據在第2方向所排列並載置之被處理物12的位置來決定測量部位,但是亦可與在搬運輥52所載置之被處理物12的位置無關地設定測量翹曲之大小的部位。Further, in the present embodiment, the size of the warpage of the five portions A to E in the axial direction of the conveyance roller 52 is measured, but the configuration is not limited thereto. The portion where the warpage of the transport roller 52 is measured may be a portion larger than five, or a portion smaller than five. Further, in the present embodiment, the measurement portion is determined based on the position of the workpiece 12 arranged and placed in the second direction, but the measurement may be set regardless of the position of the workpiece 12 placed on the conveyance roller 52. The part of the size of the warp.

又,本實施例係在熱處理部20所設置之全部的搬運輥52中,將搬運輥52a、52b分別配置成不連續,但是不限定為這種構成。例如,亦可在熱處理部20所設置之搬運輥52中的一部分(例如搬入口側之區域),將搬運輥52a、52b分別配置成不連續。In the present embodiment, the conveyance rollers 52a and 52b are arranged discontinuously in all of the conveyance rollers 52 provided in the heat treatment unit 20, but the configuration is not limited thereto. For example, a part of the conveyance rollers 52 provided in the heat treatment unit 20 (for example, a region on the inlet side) may be arranged such that the conveyance rollers 52a and 52b are discontinuous.

以上,詳細地說明了在本專利說明書所揭示之技術的具體例,但是這些係只不過是舉例表示,不是限定申請專利範圍者。在申請專利範圍所記載之技術,係包含對以上所舉例表示之具體例進行各種的變形、變更者。又,在本專利說明書或圖面所說明之技術要素係單獨或藉各種的組合發揮技術上的有用性者,不是被限定為申請專利時請求項所記載之組合。The specific examples of the technology disclosed in the present specification are described in detail above, but these are merely examples and are not intended to limit the scope of the patent application. The technology described in the patent application scope includes various modifications and changes to the specific examples described above. Further, the technical elements described in the specification or the drawings are technically useful individually or in various combinations, and are not limited to the combinations described in the claims.

10‧‧‧熱處理爐10‧‧‧heat treatment furnace

12‧‧‧被處理物 12‧‧‧Processed objects

20‧‧‧熱處理部 20‧‧‧ Heat Treatment Department

22‧‧‧外壁 22‧‧‧ outer wall

24‧‧‧空間 24‧‧‧ Space

26‧‧‧開口 26‧‧‧ openings

28‧‧‧開口 28‧‧‧ openings

30‧‧‧加熱器 30‧‧‧heater

32‧‧‧加熱器 32‧‧‧heater

34‧‧‧搬入部 34‧‧‧ Moving into the Department

40‧‧‧搬出部 40‧‧‧ Moving out

50‧‧‧搬運裝置 50‧‧‧Transportation device

52、52a、52b、52c‧‧‧搬運輥 52, 52a, 52b, 52c‧‧‧ carrying rollers

60‧‧‧驅動裝置 60‧‧‧ drive

62‧‧‧控制裝置 62‧‧‧Control device

[圖1] 係表示實施例之熱處理爐之示意構成的圖,係在與被處理物之搬運方向平行的平面剖開熱處理爐時的縱向剖面圖。1 is a view showing a schematic configuration of a heat treatment furnace of an embodiment, and is a longitudinal cross-sectional view when the heat treatment furnace is cut in a plane parallel to the conveyance direction of the workpiece.

[圖2] 係在圖1之Ⅱ-Ⅱ線的剖面圖。 Fig. 2 is a cross-sectional view taken along line II-II of Fig. 1.

[圖3] 係表示測量搬運輥之翹曲之大小的部位、與將搬運輥在軸向分割成複數個之各區域的圖。 3 is a view showing a portion where the size of the warpage of the conveyance roller is measured, and a region in which the conveyance roller is divided into a plurality of portions in the axial direction.

Claims (3)

一種熱處理爐,係對被處理物進行熱處理的熱處理爐,其係包括: 熱處理部,係包括對該被處理物進行熱處理的空間;及 複數支搬運輥,係被配置於該熱處理部,並搬運該被處理物; 在該熱處理部之既定範圍所配置的複數支搬運輥,係在將該搬運輥在軸向分割成n個區域時,包含mi個(i=1~n,mi≧0)在第i區域(i=1~n)內具有該搬運輥之在軸直角方向之翹曲的大小成為最大之位置之第i種類(i=1~n)的搬運輥; 對該mi成為複數個之種類的搬運輥中至少一種,係將該種類之搬運輥不配置成連續既定支數以上。A heat treatment furnace is a heat treatment furnace for heat-treating a workpiece, and the system includes: The heat treatment portion includes a space for heat-treating the object to be processed; and a plurality of transport rollers are disposed in the heat treatment portion and transport the processed object; The plurality of conveyance rollers disposed in a predetermined range of the heat treatment portion include mi (i=1 to n, mi≧0) in the i-th region when the conveyance roller is divided into n regions in the axial direction ( i = 1 to n) a conveyance roller having an i-th type (i = 1 to n) in which the size of the warpage of the conveyance roller in the direction perpendicular to the axis is the maximum; At least one of the plurality of conveyance rollers of the type of the mi is not disposed at a predetermined number or more of the conveyance rollers of the type. 如申請專利範圍第1項之熱處理爐,其中該既定支數係在將該被處理物之一載置於該搬運輥時該被處理物所抵接的該搬運輥之最多的支數之一半。The heat treatment furnace according to claim 1, wherein the predetermined number is one of a maximum number of the conveyance rollers to which the workpiece is abutted when one of the objects to be processed is placed on the conveyance roller . 一種熱處理爐之製造方法,該熱處理爐係包括: 熱處理部,係包括對該被處理物進行熱處理的空間;及 複數支搬運輥,係被配置於該熱處理部,並搬運該被處理物; 在該熱處理部之既定範圍所配置的複數支搬運輥,係在將該搬運輥在軸向分割成n個區域時,包含mi個(i=1~n,mi≧0)在第i區域(i=1~n)內具有該搬運輥之在軸直角方向之翹曲的大小成為最大之位置之第i種類(i=1~n)的搬運輥; 該製造方法係包括: 測量步驟,係對在該熱處理部之至少既定範圍所配置的複數支搬運輥之各支,在該搬運輥之在軸向的複數個測量位置的各個,測量該搬運輥之在軸直角方向之翹曲的大小;及 設置步驟,係對從在該測量步驟所得之測量結果該mi成為複數個之種類的搬運輥中至少一種,以將該種類之搬運輥不配置成連續既定支數以上的方式在該既定範圍設置在該測量步驟已被測量翹曲之複數支搬運輥。A method of manufacturing a heat treatment furnace, the heat treatment furnace comprising: The heat treatment portion includes a space for heat-treating the object to be processed; and a plurality of transport rollers are disposed in the heat treatment portion and transport the processed object; The plurality of conveyance rollers disposed in a predetermined range of the heat treatment portion include mi (i=1 to n, mi≧0) in the i-th region when the conveyance roller is divided into n regions in the axial direction ( i = 1 to n) a conveyance roller having an i-th type (i = 1 to n) in which the size of the warpage of the conveyance roller in the direction perpendicular to the axis is the maximum; The manufacturing method includes: The measuring step is to measure each of the plurality of conveying rollers disposed in at least a predetermined range of the heat treatment portion, and measure the direction of the conveying roller at a right angle of the shaft at each of a plurality of measurement positions of the conveying roller in the axial direction. The size of the warp; and In the setting step, at least one of the plurality of conveyance rollers of the type obtained from the measurement result obtained in the measurement step is set in the predetermined range so that the conveyance roller of the type is not continuously set to a predetermined number or more. A plurality of transport rollers have been measured for warpage at this measurement step.
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