TW201929991A - Light emitting method and light emitting device - Google Patents

Abstract

A light emitting method comprises a laser beam passing through at least one offset assembly and a focusing assembly in sequence and operating the offset assembly by a control mechanism to cause the laser beam to be offset so that the laser beam can quickly produce any shape of the controllable openings in the drilling process.

Description

Light-emitting method and light-emitting device

The disclosure relates to a light-emitting method and a device thereof, and more particularly to a method and device for adjusting an light-emitting path.

Laser micropore processing technology has been widely used in many industries, such as probe cards for semiconductor process inspection, transparent hard and brittle materials, engine oil injection holes, metal cutting holes and other processes. However, the micro-holes produced by the current laser processing equipment are tapered round holes, so it is necessary to cooperate with the drilling module to have the micro-hole shape that can control the taper angle and generate different requirements. Rectangular micro-hole processing of needle card, straight hole of tempered glass, taper hole of engine nozzle, etc.

However, laser processing equipment is often limited by the diffraction characteristics of the laser beam, and the micropore cone angle cannot be arbitrarily adjusted, so that the drilling module does not have the flexible taper processing capability, and thus cannot meet the single laser drilling process. The need to locally adjust to a through hole or a tapered hole, for example, when the inclination of the edge side of the rectangular hole is different from the inclination of the corner.

Moreover, in the prior art, the glass plate or the cymbal-type round module (Trepan) is rotated by the hollow motor, but only the circular path offset can be completed, and the rotational speed of the hollow motor is too low ( Less than 4,000 rpm), resulting in production It can be too low, so it can not only meet the conditions of high-speed and adjustable offset path required for rectangular taper or other hole-shaped processes, and its drilling size is also limited. For example, it is impossible to make a diameter of less than 50 micrometers (μm). The hole.

Therefore, how to overcome the shortcomings of the prior art is a technical problem that is currently being solved by all walks of life.

In view of the above-mentioned various deficiencies of the prior art, the present disclosure discloses a light-emitting method, comprising: sequentially passing a light beam through at least one offset component and a focusing component; and actuating the offset component by a regulating mechanism to make the light beam An offset is generated, wherein the regulating mechanism plans a displacement path of the offset component through the programmable logic controller to drive the offset component to shift and adjust an offset path of the beam.

The present disclosure discloses a light-emitting device comprising: an offset component for passing a light beam; a focusing component for receiving a light beam from the offset component; and a regulating mechanism for actuating the offset component to generate the light beam Offset, wherein the regulating mechanism plans a displacement path of the offset component through the programmable logic controller to drive the offset component to shift and adjust an offset path of the beam.

In the foregoing light-emitting method, the displacement path of the offset component is a change of a moving distance or an angular deflection.

In the above-described light-emitting method and light-emitting device, the light-emitting device is a laser device, and the light beam is a laser.

In the above-described light-emitting method and light-emitting device, the shift of the light beam is a parallel displacement.

In the above-described light-emitting method and light-emitting device, the light beam is used to form an opening. For example, the programmable logic controller plans the displacement path of the offset component according to the beam moving distance and the tilt angle of the opening wall.

In the above light-emitting method and light-emitting device, the offset component includes: a beam splitter; a wave plate disposed above the beam splitter; and a mirror disposed above the wave plate to cause the light beam to enter from the beam splitter After being reflected by the spectroscope, the wave plate passes through the wave plate and is reflected by the mirror to pass through the wave plate again, and then reflected by the beam splitter.

In the foregoing light-emitting method and the light-emitting device, the adjusting mechanism has a galvanometer motor for deflecting the offset component at a deflection angle, and the offset distance of the light beam is correlated with the deflection angle.

In the foregoing light-emitting method and light-emitting device, the light beam passes through two sets of the offset components, and one set of the offset component is used to make the light beam shift in the X direction, and the other set of the offset component is The light beam is caused to shift in the Y direction, wherein the X direction and the Y direction are perpendicular to each other.

In the foregoing light-emitting method and light-emitting device, the light beam passing through the offset component is guided to the focusing component by the scanning component. For example, the scanning component and the programmable logic controller are used to adjust the offset path of the beam, which may be a circular, square, triangular, polygonal or tortuous path for a laser process of complex components.

It can be seen from the above that in the light-emitting method and the light-emitting device of the present disclosure, the arrangement of the adjusting mechanism and the offset component are mainly used to regulate the path of the light beam, so that it can be applied not only to the drilling process of laser processing but also to the laser drilling process. Demands quickly produce tapered or straight through holes of controllable and arbitrarily shaped shape Inch small holes.

1,3‧‧‧Lighting device

10‧‧‧Light source

11,21,31x,31y‧‧‧Offset components

12‧‧‧Regulatory agencies

13‧‧‧ Focus components

20,310‧‧‧Polarizing beam splitter

20a‧‧‧ first surface

20b‧‧‧second surface

21a, 21b, 311‧‧‧1/4 wave plate

22a, 22b, 312‧‧ ‧ mirror

32‧‧‧Scanning components

320‧‧‧ guided mirror

8‧‧‧ Targets

80‧‧‧round cone

81‧‧‧round inverted cone

82‧‧‧ star opening

83‧‧‧cross opening

9‧‧‧ Probe Card

90‧‧‧Opening

A‧‧‧ origin

b‧‧‧Offset point

D‧‧‧parallel displacement distance

E‧‧‧ inclination

W‧‧‧Longside

L, L1, L2, L3, L4, L, L6, L7, L9‧‧ beams

R1‧‧‧Rectangular path

R2‧‧‧round path

R3‧‧‧ offset path

Θ‧‧‧ deflection angle

1 is a schematic view showing a first embodiment of the light-emitting device of the present disclosure; FIGS. 1A and 1B are schematic views showing other aspects of the beam path planning of FIG. 1; FIGS. 1C and 1D are the first FIG. 2A is a partial schematic view of a second embodiment of the light-emitting device of the present disclosure; FIG. 2B is a schematic diagram of a beam offset state of FIG. 2A; FIG. 2C is a A schematic diagram of the result of the light beam of FIG. 2B on the target; and FIG. 3 is a schematic view of the third embodiment of the light-emitting device of the present disclosure.

The other embodiments of the present invention will be readily understood by those skilled in the art from this disclosure.

It is to be understood that the structure, the proportions, the size, and the like of the present invention are intended to be used in conjunction with the disclosure of the specification, and are not intended to limit the invention. The qualifications are not technically meaningful, and any modification of the structure, change of the proportional relationship or adjustment of the size does not affect the work that can be produced by the present invention. Both the effects and the achievable objectives should still fall within the scope of the technical contents disclosed in the present invention. In the meantime, the terms "upper", "lower", "first", "second" and "one" are used in this description for convenience of description and are not intended to limit the invention. Changes in the scope of implementation, changes or adjustments in their relative relationship, are considered to be within the scope of the present invention.

Please refer to FIG. 1 , which is a schematic diagram of a first embodiment of the light-emitting device 1 of the present disclosure. As shown in FIG. 1, the light-emitting device 1 is modularized and includes an offset assembly 11, a regulating mechanism 12, and a focusing assembly 13.

The offset component 11 includes a beam splitter.

The regulating mechanism 12 activates the offset component 11 and includes a galvo motor to plan a displacement path of the offset component 11 by a programmable logic controller (PLC) ( The rectangular path R1) shown in FIG. 1 causes the galvanometer motor to drive the displacement component, wherein the programmable logic controller is planned according to the beam moving distance (eg, the probe card 9 guide probe) The length of the long side W of the opening 90 is inclined to the wall surface of the beam opening (ie, the inclination e of the tapered surface of the opening 90), that is, the programmable logic controller is planned to be the beam moving distance and The correlation equation of the inclination angle of the wall of the beam opening.

The focusing assembly 13 includes a focusing lens.

In operation, a light beam L such as a laser is generated by a light source 10, and the light beam L is passed through the offset assembly 11 and then through the focusing assembly 13 to focus the light beam L on the target (such as the probe card 9). On the opening 90, and by The regulating mechanism 12 displaces the offset component 11 (as in the rectangular path R1 shown in FIG. 1) to adjust the offset path of the light beam L (becoming the light beam L or the light beam L9 according to different offset paths).

Therefore, the light-emitting device 1 of the present disclosure is designed by the galvanometer motor and the programmable logic controller of the control mechanism 12 to adjust the offset of the offset component 11 to make the path of the light beam L (as shown in FIG. 1). The rectangular path R1 shown or the circular path R2 shown in FIGS. 1A and 1B can be planned according to requirements, so the light-emitting device 1 can arbitrarily adjust the taper angle of the opening (such as the inclination of the long side W of the rectangular opening 90). e is different from the inclination e at the corner), and thus can be applied to the production of various hole shapes, such as the circular taper hole 80 and the circular inverted taper hole 81 of the target 8 shown in FIGS. 1A and 1B, and the 1Cth drawing. The star-shaped opening 82 and the intersecting opening 83 of the target 8 as shown, or the chamfered rectangular opening 90 of the probe card 9 as shown in FIG. 1D, in particular, can be made to have a diameter of less than 50 micrometers ( A hole of μm) (such as the rectangular opening 90 of the probe card 9).

Please refer to FIGS. 2A and 2B , which are partial schematic views of a second embodiment of the light-emitting device of the present disclosure. The difference between this embodiment and the first embodiment lies in the components of the offset component, and the other configurations are substantially the same, so the same points will not be described below.

As shown in FIG. 2A, the offset component 21 includes a polarization concentrating splitter (PBS) 20, two 1/4 wave plates 21a, 21b and two mirrors 22a. 22b.

In this embodiment, the polarization beam splitter 20 has a first surface 20a and a second surface 20b opposite to each other, and the two quarter-wave plates 21a, 21b are respectively disposed on the first surface 20a and the second surface 20b. One side, and the two mirrors 22a and 22b are respectively provided on one side of the two quarter-wave plates 21a and 21b.

In use, the light beam L1 of the light source 10 is S-polarized light, which is incident from the first surface 20a of the polarization beam splitter 20, is reflected by the first surface 20a of the polarization beam splitter 20, and passes through the first surface 20a. The 1/4 wave plate 21a on one side is again reflected by the mirror 22a thereon and passes through the 1/4 wave plate 21a on the first surface 20a again. At this time, the light beam L2 becomes P-polarized light, so it will be worn. The first surface 20a and the second surface 20b of the polarization beam splitter 20 are passed through. Thereafter, the light beam L2 (P-polarized light) passes through the polarization beam splitter 20 and passes through the quarter-wave plate 21b on the second surface 20b, and is reflected by the mirror 22b thereon to pass through the second surface again. The quarter-wave plate 21b on one side of the 20b, at this time, the light beam L3 changes back to the S-polarized light, and is reflected by the second surface 20b of the polarization beam splitter 20 to emit light.

Therefore, the polarization beam splitter 20 has high reflection characteristics for S-polarized light and high-transmission characteristics for P-polarized light to adjust the polarization characteristics of the light beam L1 so that the light beam L3 is on the second surface 20b of the polarization beam splitter 20. Reflecting light produces a controllable and arbitrary offset position.

Furthermore, as shown in FIG. 2B, the angle of the polarization beam splitter 20 is adjusted by clockwise deflection using the Galvo motor of the control mechanism 12, so that the beam L3 is displaced in parallel (eg, the beam after displacement). L4), and high speed regulation can be achieved (for example, the motor rotates more than 20,000 rpm per minute). Specifically, the initial position of the polarization beam splitter 20 is a dotted line position (or as shown in FIG. 2A), and the galvanometer motor deflects the deflection angle of the polarization beam splitter 20 by ±θ when it is clockwise or counterclockwise. The parallel displacement distance D of the light beam L3 is 2 (D1+D2)tan(2θ), where D1 The distance from the mirror 22a on the first surface 20a to the polarization beam splitter 20 is shown, and D2 is the distance from the mirror 22b on the second surface 20b to the polarization beam splitter 20. For example, when the deflection angle θ of the polarization beam splitter 20 is 1 degree and the length of the offset component 21 is 86 mm (ie, D1 and D2 are regarded as 43 mm), then D=2 (43+43) tan (2.1) )=6.006mm, the parallel displacement of the light beam L3 is 6.006 mm to become the lower beam L4 shown in FIG. 2B, that is, the origin a (the light beam L3 before the displacement is focused on the target as shown in FIG. 2C). The opening on the object 8 is displaced to the offset point b (the displaced beam L4 is at the opening on the target 8 after focusing). It should be understood that if the galvanometer motor deflects the polarization beam splitter 20 counterclockwise, the beam L3 before displacement will be shifted upward to the other beam L5.

Moreover, according to the above formula, the parallel displacement distance D is related to the deflection angle θ of the polarization beam splitter 20, so in the actual operation (such as the drilling process), the control mechanism 12 can be used. The programming logic controller (PLC) is a method of correlating the beam moving distance (such as the parallel displacement distance D) with the inclination angle of the opening wall (ie, the taper of the hole), so as long as the value of the desired displacement is input (parallel The displacement distance D) can be used to derive the required deflection angle θ, which in turn causes the programmable logic controller (PLC) to manipulate the galvanometer motor to deflect the polarization beam splitter 20.

According to the design of the adjusting mechanism 12, the offset component 21 can not only adjust the offset of the light beam L3, but also has a high control speed. Therefore, the light-emitting device can adjust the taper angle of the opening arbitrarily, and thus can be applied to various holes. Shape production.

Moreover, the volume of the offset component 21 is small, so the module of the light-emitting device Space has also been miniaturized.

Figure 3 is a schematic view of a third embodiment of the light-emitting device 3 of the present disclosure. The difference between this embodiment and the first embodiment lies in the arrangement of the offset components, and the other configurations are substantially the same, so the same points will not be described below.

As shown in FIG. 3, the light exiting device 3 includes at least two sets of offset components 31x, 31y and a scanning component 32.

The offset component 31x, 31y can adopt the offset component 21 as shown in the second embodiment, and includes a polarization beam splitter 310, two quarter-wave plates 311 and two mirrors 312 to utilize the adjustment mechanism. The galvanometer motor of 12 adjusts the deflection angle of the polarization beam splitter 310, wherein one set of the offset component 31y is used to shift the light beam in the Y-axis direction, and the other set of the offset component 31x is used to make the light beam The X-axis direction is offset.

The scanning component 32 is a galvanometer type, such as a finite-state machine (FSM) scanner or a two-dimensional scanner such as an XY scanner, which has two vertically arranged guiding mirrors. 320. There are many types of scanning components 32, and are not limited to the above types, and may be, for example, a one-dimensional scanner.

In use, the light beam L6 of the light source 10 passes through the two offset components 31x, 31y, and is then guided to the focusing component 13 via the guiding mirror 320 of the scanning component 32 to focus the light beam on the target. . If applied to the drilling process, the inclination of the taper of the opening (ie, the taper of the hole) can be adjusted by the two offset components 31x, 31y. For related description, refer to the second embodiment, as shown by the dotted line in FIG. Representing the adjusted beam L7), and the scanning component 32 and the programmable logic controller (PLC) are used to regulate the beam L6 The offset path R3, which is illustrated as a circular path, but in other embodiments, the offset path R3 can be any path, such as a square, triangle, polygon or zigzag path, for application to complex components. Laser process.

The present disclosure causes the beam L6 to be offset in the X and Y directions by two sets of independent offset components 31x, 31y, respectively, and the scan assembly 32 produces a controllable and arbitrary cone on the XY plane and the focused optical axis. angle.

In summary, the light-emitting method and the light-emitting device of the present disclosure are configured by the adjustment mechanism and the offset component to regulate the path of the light beam, so that it can be applied not only in the drilling process of laser processing but also in the drilling process of laser processing. There is a need to rapidly produce tapered or through-holes of controllable and arbitrarily shaped shapes, and to make holes having dimensions greater than, equal to, or less than 50 microns.

Further, the galvanometer motor of the regulating mechanism 12 may be replaced by a voice coil motor or a torque motor, and is not particularly limited.

The above embodiments are intended to illustrate the principles of the invention and its effects, and are not intended to limit the invention. Any of the above-described embodiments may be modified by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the appended claims.

Claims (22)

A light-emitting method includes: sequentially passing a light beam through at least one offset component and a focusing component; and actuating the offset component by a regulating mechanism to shift the light beam, wherein the adjusting mechanism is transparent The program logic controller plans a displacement path of the offset component to drive the offset component displacement and adjust the offset path of the beam. The light-emitting method according to claim 1, wherein the light beam is a laser. The light-emitting method according to claim 1, wherein the shift of the light beam is a parallel displacement. The light-emitting method of claim 1, wherein the light beam is used to form an opening. The light-emitting method of claim 4, wherein the programmable logic controller plans a displacement path of the offset component according to a beam moving distance and an inclination angle of the opening wall. The light-emitting method of claim 1, wherein the displacement path of the offset component is a change in a moving distance or an angular deflection. The light-emitting method of claim 1, wherein the offset component comprises: a beam splitter; a wave plate disposed above the beam splitter; and a mirror disposed above the wave plate, such that Beam incident on this point The light mirror is reflected by the beam splitter, passes through the wave plate, is reflected by the mirror, passes through the wave plate again, and is then reflected by the beam splitter. The light-emitting method of claim 1, wherein the control mechanism has a galvanometer motor to deflect the offset assembly at a deflection angle, and the offset distance of the beam is associated with the deflection angle. The light-emitting method of claim 1, wherein the light beam passes through two sets of the offset components, and one of the offset components is used to cause the light beam to shift in the X direction, and the other The set of offset components is configured to cause the beam to be offset in the Y direction, wherein the X direction and the Y direction are perpendicular to each other. The light-emitting method of claim 1, wherein the light beam passing through the offset component is guided to the focusing component by the scanning component. An light-emitting device includes: an offset component for passing a light beam; a focusing component for receiving a light beam from the offset component; and a regulating mechanism for actuating the offset component to cause the light beam to shift, wherein The regulating mechanism plans the displacement path of the offset component through the programmable logic controller to drive the displacement component to shift and adjust the offset path of the beam. The light-emitting device of claim 11, wherein the light beam is a laser. The light-emitting device of claim 11, wherein the shift of the light beam is a parallel displacement. The light-emitting device of claim 11, wherein the light The bundle is used to form an opening. The light-emitting device of claim 14, wherein the programmable logic controller plans a displacement path of the offset component according to a beam moving distance and an inclination angle of the opening wall. The light-emitting device of claim 11, wherein the offset component comprises a beam splitter. The light-emitting device of claim 16, wherein the offset component comprises: a wave plate disposed above the beam splitter; and a mirror disposed above the wave plate. The light-emitting device of claim 11, wherein the control mechanism has a galvanometer motor to deflect the offset assembly at a deflection angle, and the offset distance of the light beam is associated with the deflection angle. The light-emitting device of claim 11, wherein the light beam passes through two sets of the offset components, and one of the offset components is configured to cause the light beam to shift in the X direction, and the other The set of offset components is configured to cause the beam to be offset in the Y direction, wherein the X direction and the Y direction are perpendicular to each other. The light-emitting device of claim 11, further comprising a scanning component disposed between the offset component and the focusing component to guide a light beam passing through the offset component to the focusing component. The light-emitting device of claim 20, wherein the scanning component and the programmable logic controller are used to adjust an offset path of the light beam. The light exiting device of claim 21, wherein the offset path is a circular, square, triangular, polygonal or tortuous path for a laser process of complex components.