TW201925145A - Solvent dehydration system and solvent dehydration method - Google Patents

Abstract

An object of the present invention is to provide a solvent dehydration system and a solvent dehydration method, wherein the solvent dehydration system can supply the stable-temperature mixed liquid to the permeation vaporization device, and efficiently dehydrate the mixture. The present invention is characterized by a solvent dehydration system including a permeation vaporization device, a third supply path and a heating means. The permeation vaporization device is used for dehydrating mixed liquid including a water-soluble hydrocarbon solvent and water. The third supply path is used for supplying the mixed liquid to permeation vaporization device. The heating means is used for heating the mixed liquid supplied to the permeation vaporization device. The solvent dehydration system further includes a vacuum distillation regeneration device which is used for generating the mixed liquid. The vacuum distillation regeneration device passes through the second supply path and the third supply path to connect to the permeation vaporization device.

Description

Solvent dehydration system and solvent dehydration method

The present invention relates to a solvent dehydration system and a solvent dehydration method for separating a mixture of an organic solvent (for example, a metal mask for washing an organic light-emitting diode) and water into an organic solvent and water.

For example, when washing a metal object such as a metal mask for an organic material for attaching an organic light-emitting diode, the object to be washed is immersed several times in a water-soluble organic solvent (for example, a hydrocarbon solvent) stored in the cleaning device. HC), etc., and washed.

Since such a water-soluble organic solvent easily absorbs moisture, for example, as it is taken out and put into the object to be washed, the content of water may gradually increase due to contact with air, and the performance as a cleaning liquid may be lowered. Thus, various solvent dehydration techniques have been proposed to remove water absorbed by the water-soluble organic solvent.

For example, an organic solvent purification system described in Patent Document 1 includes a deaeration device 21 that removes a gas component from a mixture of water and an organic solvent, and an ion exchange device 11 that removes ions from the degassed mixture. Impurities; a heat exchanger 12 that heats the mixture of ionic impurities removed; and a pervaporation device 13 that separates the mixture into an organic solvent and water. Thereby, Patent Document 1 has superior energy-saving performance while suppressing oxidative deterioration and separating the organic solvent from the mixed liquid.

However, in the above-described permeation vaporization apparatus, in order to efficiently separate the organic solvent and water, it is preferred to supply a mixed liquid heated to a temperature suitable for pervaporation. However, in Patent Document 1, since the mixed liquid is heated by the heat exchanger 12 using steam, the temperature of the mixed liquid supplied to the vaporization device is unstable depending on the temperature or flow rate of the mixed liquid and the temperature of the vapor. . Therefore, Patent Document 1 may not efficiently separate the organic solvent and water.

Patent literature

Patent Document 1: JP-A-2016-030232

In view of the above problems, an object of the present invention is to provide a solvent dehydration system and a solvent dehydration method which supply a temperature-stable mixed liquid to a pervaporation apparatus and can efficiently dehydrate the mixture.

The present invention is characterized by a solvent dehydration system comprising: a pervaporation device for dehydrating a mixture of a water-soluble organic solvent and water; a supply path for supplying the mixture to the pervaporation device; and a heating means The mixture supplied to the vaporization device is heated; wherein the solvent dehydration system further comprises a distillation regeneration device for generating a mixed liquid, and the distillation regeneration device is connected to the pervaporation device via a supply path.

Further, the present invention features a solvent dehydration method using a system comprising: a pervaporation device for dehydrating a mixture of a water-soluble organic solvent and water; a supply path for supplying the mixture to the pervaporation device; Heating means, heating the mixed liquid supplied to the vaporization device; wherein the solvent dehydration method comprises: a step of generating a mixed liquid by the distillation regeneration device; a step of heating the mixed liquid by heating means; and discharging the mixed liquid from the distillation path through the supply path a step of supplying the regeneration device to the pervaporation device; and a step of dehydrating the mixture with the pervaporation device.

The organic solvent is, for example, a water-soluble hydrocarbon solvent (HC), and specifically, a hygroscopic N-methyl-2-pyrrolidone (NMP) or the like. According to the present invention, the solvent dehydration system and the solvent dehydration method can supply a temperature-stable mixed liquid to the permeation vaporization device, and the mixture can be efficiently dehydrated. Specifically, the distillation regeneration device vaporizes and vaporizes the mixed solution containing the impurities, and then forms a mixed liquid from which impurities have been removed by cooling.

Therefore, the distillation regeneration apparatus can easily discharge the mixed liquid having a relatively high temperature and a stable temperature. Thereby, the solvent dehydration system and the solvent dehydration method can easily and stably supply the mixed liquid having a relatively high temperature to the pervaporation vaporization device.

Further, for example, even if the distillation regeneration device discharges a mixture having a temperature higher than a normal temperature and lower than a temperature suitable for pervaporation, by heating the mixture by heating means, the solvent dehydration system and the solvent dehydration method, it is possible to quickly use less Thermal energy heats the mixture to the desired temperature.

Alternatively, the mixture is supplied to the pervaporation device, the solvent dehydration system and the solvent dehydration method by directly supplying the mixed solution having a temperature suitable for pervaporation by a distillation regeneration device, and the distillation regenerative device can be used as a heating means to heat the mixture supplied to the pervaporation device. .

In this case, the solvent dehydration system and the solvent dehydration method, for example, a heat exchanger using steam and a device for supplying steam to the heat exchanger can be omitted, so that the mixed liquid can be efficiently dehydrated with a simple structure. Therefore, the solvent dehydration system and the solvent dehydration method can supply a temperature-stable mixed liquid to the permeation vaporization device, and efficiently dehydrate the mixed liquid.

As an embodiment of the present invention, the configuration is such that the distillation regeneration device and the pervaporation vaporization device comprise: a temporary storage tank for temporarily storing the mixed liquid supplied to the vaporization device; and a preheating means; the preheating is temporarily stored a mixed solution of the storage tank; wherein the heating means heats the mixed liquid supplied from the temporary storage tank to the vaporization device.

According to the present invention, for example, even in the case where the ignition point of the organic solvent is lower than the distillation temperature of the distillation regeneration apparatus, the solvent dehydration system can safely supply the temperature-stable mixed liquid to the pervaporation vaporization apparatus. Specifically, when the ignition point of the organic solvent is lower than the distillation temperature, if the high-temperature mixed liquid is discharged from the distillation regeneration device, the risk of ignition is increased.

In this case, the distillation regenerating apparatus is configured such that the mixed liquid is cooled to a temperature lower than the ignition point of the organic solvent (for example, normal temperature) and discharged. Therefore, if the mixed liquid is heated only by heating means, it is feared that the temperature-stable mixed liquid cannot be supplied to the pervaporation vaporization device.

Thus, the solvent dehydration system temporarily stores the mixed liquid supplied to the vaporization device by a temporary storage tank; and a preheating means; preheating the stored mixed liquid, for example, supplying the mixed liquid at normal temperature to the saturated solution The vaporizer is preheated to a predetermined temperature. Therefore, the solvent dehydration system can supply the mixed liquid to the pervaporation apparatus more safely than the case where the mixed liquid is directly supplied from the distillation regeneration device to the pervaporation vaporization device.

Further, by heating the preheated mixture with heating, the solvent dewatering system can quickly heat the mixture to the desired temperature with less heat. Therefore, the solvent dehydration system can supply a more stable temperature mixture to the pervaporation vaporizer. Therefore, for example, even in the case where the ignition point of the organic solvent is lower than the distillation temperature of the distillation regeneration apparatus, the solvent dehydration system can safely supply the temperature-stable mixed liquid to the pervaporation vaporization apparatus.

Further, as an embodiment of the present invention, the pervaporation vaporization apparatus comprises: a permeation vaporization membrane module for dehydrating the mixture; wherein the pervaporation membrane module is a laminate of the porous ceramic support and the microporous ceramic separation membrane. Composition. The microporous ceramic separation membrane refers to a zeolite separation membrane, a ceria separation membrane, a carbon separation membrane, and the like. By the present invention, the solvent dehydration system can efficiently and more stably separate the organic solvent and water by the temperature-stable mixture and the pervaporation membrane module.

Further, an embodiment of the present invention includes: a cleaning device that removes an adhering matter attached to the object to be washed with an organic solvent; and a liquid supply path that mixes impurities, water, and an organic solvent generated in the cleaning device. The liquid is sent from the cleaning device to the distillation regeneration device; and a reflux path is used to reflux the organic solvent dehydrated by the vaporization device to the cleaning device. According to the present invention, the solvent dehydration system can repeatedly use the organic solvent dehydrated by the pervaporation apparatus to wash the washed matter.

According to the present invention, it is possible to provide a solvent dehydration system and a solvent dehydration method which supply a temperature-stable mixed liquid to a pervaporation vaporization apparatus and can efficiently dehydrate the mixed liquid.

An embodiment of the present invention will be described together with the following drawings. First, the solvent dehydration system 1 of the present embodiment will be described with reference to Figs. 1 and 2 . 1 is a configuration diagram of the solvent dehydration system 1, and FIG. 2 is a configuration diagram of the apparatus main body portion 41 which is impregnated into the vaporization device 40.

As shown in Fig. 1, the solvent dehydration system 1 is a cleaning device 10 for washing the washed matter with a hydrocarbon solvent (HC) S (which is a water-soluble organic solvent); a hydrocarbon solvent and water and impurities. a vacuum distillation regeneration device 20 for removing impurities from the mixture X1; a preheating tank 30 for preheating the mixed liquid X2 from which impurities have been removed by a predetermined temperature; and a pervaporation device 40 for dehydrating the preheated mixed liquid X2 .

Further, the solvent dehydration system 1 includes a first supply path P1, the mixed liquid X1 is supplied from the cleaning device 10 to the vacuum distillation regeneration device 20, a second supply path P2, and the mixed liquid X2 is removed from the vacuum distillation regeneration device. 20 is supplied to the preheating tank 30; a third supply path P3, the mixed liquid X2 is supplied from the preheating tank 30 to the permeation vaporization device 40; and a fourth supply path P4, the hydrocarbon solvent S is supplied from the permeation vaporization device 40. Go to the cleaning device 10.

As shown in Fig. 1, the cleaning device 10 is a device that removes impurities such as organic materials by dividing the metal mask M used in the vapor deposition process of the organic light-emitting diode by a water-soluble hydrocarbon solvent S, for example. Further, it is a water-soluble hydrocarbon solvent S which is hygroscopic N-methyl-2-pyrrolidone (NMP). Specifically, the cleaning device 10 includes three cleaning units including a first cleaning unit 11, a second cleaning unit 12, and a third cleaning unit 13, and a second cleaning unit 12 and a second unit. The first liquid supply path 14 of the cleaning unit 13 and the second liquid supply path 15 that connects the first cleaning unit 11 and the second cleaning unit 12. In addition, the cleaning apparatus 10 is configured to transport and clean the metal mask M in the order of the first cleaning unit 11, the second cleaning unit 12, and the third cleaning unit 13, although the detailed drawings are omitted.

The first cleaning unit 11 is composed of a first cleaning tank 111 for storing the hydrocarbon solvent S and a first storage tank 112 provided adjacent to the first cleaning tank 111. The first cleaning tank 111 stores a hydrocarbon solvent S which is not used or has less impurities or moisture.

Further, the ultrasonic vibrator 113 is provided at the bottom of the first cleaning tank 111 for causing ultrasonic vibration to the hydrocarbon solvent S. Further, the first cleaning tank 111 replenishes the unused hydrocarbon solvent from the replenishing tank (omitted from the drawing) at an appropriate timing.

The first storage tank 112 has a configuration in which the mixed liquid overflowing from the first washing tank 111 is stored. Further, the mixed liquid is a mixture of impurities such as an organic material separated from the metal mask M and water and a hydrocarbon solvent S absorbed from the air.

The second cleaning unit 12 includes a second cleaning tank 121 that stores the hydrocarbon solvent S, a second storage tank 122 that is adjacent to the second cleaning tank 121, and a second cleaning tank 121 that is disposed in the second cleaning tank 121. The bottom ultrasonic vibrator 123 is constructed. In addition, since the second cleaning tank 121, the second storage tank 122, and the ultrasonic vibrator 123 have the same configuration as that of the first cleaning unit 11, detailed description thereof will be omitted.

The third cleaning unit 13 includes a third cleaning tank 131 that stores the hydrocarbon solvent S, a third storage tank 132 that is adjacent to the third cleaning tank 131, and a third cleaning tank 131 that is disposed in the third cleaning tank 131. The bottom ultrasonic vibrator 133 is constructed. Further, since the third cleaning tank 131, the third storage tank 132, and the ultrasonic vibrator 133 have the same configuration as that of the first cleaning unit 11, detailed description thereof will be omitted.

As shown in FIG. 1, the first liquid supply path 14 is configured as a flow path, and the mixed liquid is sent from the vicinity of the liquid surface of the third storage tank 132 to the bottom of the second storage tank 122. As shown in FIG. 1, the second liquid supply path 15 is configured as a flow path for supplying the mixed liquid from the vicinity of the liquid surface of the second storage tank 122 to the bottom of the first storage tank 112.

Therefore, the first storage tank 112 of the first cleaning unit 11 stores the mixed liquid overflowing from the first cleaning tank 111 and the storage tank 122 of the second cleaning unit 12 and the third cleaning unit 13 The mixed liquid X1 of the mixed liquid sent from the storage tank 132. As shown in FIG. 1, the cleaning apparatus 10 of the above-described configuration is connected to the vacuum distillation regeneration apparatus 20 via the first supply path P1 connected to the vicinity of the liquid surface of the first storage tank 112 of the first cleaning unit 11.

Further, as shown in FIG. 1, the vacuum distillation regenerating apparatus 20 includes an evaporation tank 21 having a slightly sealed internal space, a condensation tank 22 having a slightly sealed internal space, and an upper portion and a condensation chamber connecting the evaporation tanks 21. The upper communication path 23 of 22 is formed.

The evaporation tank 21 stores the mixed liquid X1 supplied from the cleaning device 10 via the first supply path P1 connected to the bottom thereof. Further, the evaporation tank 21 includes a heater 24 located near the bottom of the evaporation tank 21 to heat the mixed liquid X1 stored in the evaporation tank 21. The heater 24 is controlled by a hydrocarbon solvent S and a temperature at which water vaporizes and vaporizes, and the mixture X1 is heated.

The upper portion of the condensing tank 22 is filled with a gas of a hydrocarbon solvent S and water evaporated by evaporation in the evaporation tank 21, and a lower portion of the condensing tank 22 stores a mixed liquid X2 of a hydrocarbon solvent S and water. Further, the upper portion of the condensing tank 22 includes a cooler 25 for cooling the upper space of the evaporation tank 21. The cooler 25 is controlled to cool the upper space of the condensing tank 22 by a temperature at which the vaporized hydrocarbon solvent S and the gas of the water are liquefied. The communication path 23 is configured as a flow path for introducing the hydrocarbon solvent S and the water gas evaporated by evaporation in the evaporation tank 21 into the condensation tank 22.

The vacuum distillation regeneration device 20 having the above configuration is connected to the preheating tank 30 via a second supply path connected to the bottom of the condensation tank 22. Further, the second supply path P2 is caused to flow through the mixed liquid X2 cooled at a temperature lower than the temperature of the ignition point of the hydrocarbon solvent S.

Further, as shown in FIG. 1, the preheating tank 30 serves as a storage tank for temporarily storing the mixed liquid X2 supplied from the condensing tank 22 of the vacuum distillation regeneration apparatus 20 via the second supply path P2. Further, the preheating tank 30 includes a preheating heater 31 for preheating the stored mixed liquid X2 with a predetermined temperature.

The preheating heater 31 is controlled to preheat the mixed liquid X2 at a temperature equal to or higher than a normal temperature or higher and a temperature at which the hydrocarbon solvent S does not evaporate. Further, as the temperature of the mixed liquid X2, the temperature is 50 degrees or more and 80 degrees or less, preferably 70 degrees or more and 80 degrees or less. This is to shorten the heating time of the heating device 60 to be described later and to promote the permeation vaporization of the permeation vaporization device 40.

The preheating tank 30 configured as above is connected to the permeation vaporization device 40 via the third supply path P3 connected to the bottom thereof. As shown in FIG. 1, the third supply path P3 is disposed from the upstream in the following order: a pressure feed pump 50, pressurizing the mixed liquid X2 from the preheating tank 30 to the permeation vaporization device 40; and a heating device 60 The mixed liquid X2 flowing through the third supply path P3 is heated.

The heating device 60 is constituted by, for example, a heater that covers the outer surface of the third supply path P3. The heating device 60 is controlled to heat the mixed liquid X2 flowing through the vaporizing device 40 with a temperature suitable for pervaporation (for example, about 120 degrees).

Further, the vaporization device 40 is impregnated into a device in which the heated mixed liquid X2 is vaporized by a separation membrane module 412 to be described later and separated into a hydrocarbon solvent S and water. As shown in Fig. 1, the permeation vaporization device 40 is composed of a device main body portion 41 through which the heated mixed liquid X2 flows; a drainage path 42 having one end connected to the device main body portion 41 and the other end open to the outside; The vacuum pump 43 connected to the apparatus main body portion 41 via the drain path 42; the first cooling device 44 inside the cooling drain path 42; the solvent discharge at one end connected to the device main body portion 41 and the other end connected to the fourth supply path P4 The path 45 is formed by a second cooling device 46 inside the cooling solvent discharge path 45.

As shown in Fig. 2, the apparatus main body portion 41 is composed of a substantially cylindrical outer casing 411 and a separation membrane module 412 housed inside the outer casing 411. The outer casing 411 is formed with a substantially cylindrical upstream connection portion 411a connected to the third supply path P3, a substantially cylindrical main body portion 411b for holding the separation membrane module 412, and a solvent discharge The path 45 and the substantially cylindrical downstream side connecting portion 411c are coaxially arranged.

The upstream side connecting portion 411a and the downstream side connecting portion 411c are formed in a substantially cylindrical shape having slightly the same inner and outer diameters. The main body portion 411b is formed in a substantially cylindrical shape having an inner and outer diameter larger than the inner and outer diameters of the upstream side connecting portion 411a and the downstream side connecting portion 411c. Further, a side connecting portion 411d is formed outside the main body portion 411b to be connected to the drain path 42.

The separation membrane module 412 is used as a separation membrane to separate the mixed liquid X2 into a hydrocarbon solvent S and water. In more detail, as shown in FIG. 2, the separation membrane module 412 has an axial length slightly the same as the axial length of the main body portion 411b, and is formed to have a slightly smaller outer shape than the inner diameter of the main body portion 411b. Cylindrical.

The separation membrane module 412 is integrally formed of a substantially cylindrical porous ceramic support 412a and a zeolite separation membrane 412b covering the outer surface of the porous ceramic support 412a. Further, the separation membrane module 412 is disposed to be slightly coaxial with the main body portion 411b inside the outer casing 411.

The apparatus main body portion 41 having the above configuration constitutes a mixed liquid flow path L1 by the internal space of the upstream side connecting portion 411a, the inner diameter space of the separation membrane module 412, and the inner space of the downstream side connecting portion 411c, so that the heated mixture is mixed. The liquid X2 and the hydrocarbon solvent S flow.

Further, the apparatus main body portion 41 constitutes a steam flow path L2 between the inner surface of the outer casing 411 and the outer surface of the separation membrane module 412 to allow the permeated steam W to be described later to flow. Further, the steam flow path L2 is maintained in a slightly vacuum state by the vacuum pump 43 connected via the drain path 42.

The first cooling device 44 is composed of a heat exchanger or the like, and the permeated steam W discharged from the apparatus main body portion 41 is controlled to a temperature at which liquefaction is performed. The second cooling device 46 is constituted by a heat exchanger or the like and has a function of cooling the hydrocarbon solvent S discharged from the apparatus main body portion 41.

As shown in Fig. 1, the permeation vaporization device 40 having the above configuration is connected to the upper portion of the third cleaning tank 131 of the cleaning device 10 via the fourth supply path P4 connected to the solvent discharge path 45. The fourth supply path P4 is provided with a pressure feed pump 70 for pumping the hydrocarbon solvent S from the permeation vaporization device 40 to the cleaning device 10.

Next, a solvent dehydration method for removing impurities and water from a mixed liquid of impurities and water and a hydrocarbon solvent in the above-described solvent dehydration system 1 will be described. The solvent dehydration method in the present embodiment is a distillation regeneration step of supplying the mixed liquid X1 from the cleaning device 10 to the vacuum distillation regeneration device 20 via the first supply path P1, and a heating step of heating the mixed liquid X2 that has been distilled and regenerated. A separation step of separating the heated mixed liquid X2 into a hydrocarbon solvent S and water; and a step of refluxing the separated hydrocarbon solvent S to the cleaning device 10.

When the mixed liquid X1 supplied from the cleaning device 10 to the vacuum distillation regeneration device 20 via the first supply path P1 is stored in the evaporation tank 21 of the vacuum distillation regeneration device 20, the vacuum distillation regeneration device 20 is used as a distillation regeneration step. 24, the mixed liquid X1 of the evaporation tank 21 is heated to evaporate and vaporize the hydrocarbon solvent S and water.

Further, in the vacuum distillation/regeneration apparatus 20, the gas of the hydrocarbon solvent S introduced into the condensation tank 22 via the communication path 23 and the gas of water are cooled by the cooler 25, and the phase is changed into a mixture of the hydrocarbon solvent S and water. Liquid X2. In this way, the vacuum distillation/regeneration apparatus 20 generates the mixed liquid X2 from which the impurities are removed from the mixed liquid X1, and supplies the mixed liquid X2 to the preheating tank 30. At this time, the vacuum distillation regeneration device 20 supplies the mixed liquid X2 cooled to a temperature lower than the ignition point of the hydrocarbon solvent S to the preheating tank 30.

Next, as a heating step, the preheating tank 30 preheats the mixed liquid X2 with the preheating heater 31, for example, to a temperature of 70 degrees or more and 80 degrees or less. Next, the preheating tank 30 supplies the mixed liquid X2 heated by the preheating heater 31 to the permeation vaporization device 40 via the third supply path P3. At this time, the heating device 60 heats the mixed liquid X2 flowing through the third supply path P3 to, for example, about 120 degrees.

Thereafter, as a separation step, the vaporization device 40 is permeated, and the mixed liquid X2 supplied to the mixed solution flow path L1 via the third supply path P3 is separated into a hydrocarbon solvent S and water by the separation membrane module 412. Specifically, since the steam flow path L2 is in a slightly vacuum state, the saturated vaporization device 40 evaporates the water in the vaporized mixture X2 via the separation membrane module 412.

At this time, as shown in FIG. 2, the separation membrane module 412 does not allow the hydrocarbon solvent S to permeate, and only transmits the vapor W (water gas) to the vapor flow path L2. The steam W is discharged from the side connecting portion 411d to the drain path 42 by the vacuum pump 43. Then, the vaporization device 40 is permeated, and the permeated steam W flowing through the drain path 42 is cooled by the first cooling device 44, and the liquid which is converted into water is discharged to the outside.

On the other hand, the hydrocarbon solvent S that cannot pass through the separation membrane module 412 is discharged from the downstream side connecting portion 411c to the solvent discharge path 45. At this time, the vaporization device 40 is permeated, and the hydrocarbon solvent S flowing through the solvent discharge path 45 is cooled by the second cooling device 46, and is discharged to the fourth supply path P4. Thereafter, the hydrocarbon solvent S from which the impurities and water have been removed is returned to the third cleaning tank 131 of the third cleaning unit 13 via the fourth supply path P4.

As described above, the solvent dehydration system 1 and the solvent dehydration method for dehydrating the hydrocarbon solvent can supply the temperature-stable mixed liquid X2 to the permeation vaporization device 40, and the mixture liquid X2 can be efficiently dehydrated. Specifically, the vacuum distillation regenerating device 20 cools the mixed liquid X1 containing impurities by vaporization to form a mixed liquid X2 from which impurities have been removed.

Therefore, the vacuum distillation regeneration device 20 can easily discharge the mixed liquid X2 having a high temperature and a stable temperature. Thereby, the solvent dehydration system 1 and the solvent dehydration method can easily and stably supply the mixed liquid X2 having a relatively high temperature to the permeation vaporization device 40.

Further, by heating the mixture X2, the solvent dehydration system 1 and the solvent dehydration method with the heating device 60, the mixture X2 can be heated to a desired temperature with less heat. Therefore, in the solvent dehydration system 1 and the solvent dehydration method, the temperature-stable mixed liquid X2 can be supplied to the permeation vaporization device 40, and the mixed liquid X2 can be efficiently dehydrated.

Further, the solvent dehydration system 1 includes a preheating tank 30 for temporarily storing the mixed liquid X2 supplied to the vaporization device 40; and a preheating heater 31 for preheating the stored mixed liquid X2; and preheating by heating The tank 30 is supplied to the mixed liquid X2 that has permeated the vaporization device 40, and even when the ignition point of the hydrocarbon solvent S is lower than the distillation temperature of the vacuum distillation regeneration device 20, the temperature-stable mixed liquid X2 can be safely supplied to the saturated solution. Vaporization unit 40.

Specifically, when the ignition point of the hydrocarbon solvent S is lower than the distillation temperature, if the high-temperature mixed liquid X2 is discharged from the vacuum distillation regeneration device 20, the risk of ignition is increased. In this case, the vacuum distillation regenerating device 20 is configured such that the mixed liquid X2 is cooled to a temperature lower than the ignition point of the hydrocarbon solvent S and discharged. Therefore, if the mixed liquid X2 is heated only by the heating means, the temperature-stable mixed liquid X2 may not be supplied to the pervaporation vaporizer 40.

Thus, the solvent dehydration system 1 temporarily stores the mixed liquid X2 supplied to the pervaporation vaporization device 40 by including a preheating tank 30; and a preheating heater 31; preheating the stored mixed liquid X2, which can be cooled to The mixed liquid X2 which is lower than the temperature of the ignition point of the hydrocarbon solvent S is preheated to a predetermined temperature before being supplied to the pervaporation device 40. Therefore, the solvent dehydration system 1 can supply the mixed liquid X2 to the permeation vaporization device 40 more safely than the case where the mixed liquid X2 is directly supplied from the vacuum distillation regeneration device 20 to the pervaporation vaporization device 40.

Further, by heating the preheated mixed liquid X2 with the heating device 60, the solvent dehydration system 1 can heat the mixed liquid X2 to a desired temperature with less heat. Therefore, the solvent dehydration system 1 can supply the temperature-stable mixture X2 to the pervaporation vaporizer 40. Therefore, even in the case where the ignition point of the hydrocarbon solvent S is lower than the distillation temperature, the solvent dehydration system 1 can safely supply the temperature-stable mixed liquid X2 to the pervaporation vaporization device 40.

Further, the pervaporation vaporizer 40 includes a separation membrane module 412 for dehydrating the mixture X2, the separation membrane module 412 is provided by a porous ceramic support 412a disposed on one side of the supply mixture X2; The zeolite separation membrane 412b on one side is formed. Thereby, the solvent dehydration system 1 can efficiently and stably separate the hydrocarbon solvent S and water by the temperature-stable mixed liquid X2 and the separation membrane module 412.

Further, the solvent dehydration system 1 includes a cleaning device 10, and the deposit attached to the metal mask M is removed by the hydrocarbon solvent S. The first supply path P1 is used to wash the mixed liquid X1 produced by the cleaning device 10. The cleaning device 10 is sent to the vacuum distillation regeneration device 20; and a fourth supply path P4, and the hydrocarbon solvent S dehydrated by the pervaporation vaporization device 40 is returned to the cleaning device 10. Thereby, the solvent dehydration system 1 can repeatedly use the hydrocarbon solvent S dehydrated by the pervaporation vaporization apparatus 40 to wash the metal mask M.

In the correspondence between the configuration of the present invention and the above embodiment, the water-soluble organic solvent of the present invention corresponds to the hydrocarbon solvent S of the embodiment; in the following, the mixed liquid of the organic solvent and water corresponds to the mixed liquid X2; The supply path corresponds to the second supply path P2 and the third supply path P3; the heating means corresponds to the heating device 60; the temporary storage tank corresponds to the preheating tank 30; the preheating means corresponds to the preheating heater 31; and the saturated vaporization membrane module is equivalent The separation membrane module 412; the object to be washed corresponds to the metal mask M; the organic solvent containing impurities and water corresponds to the mixed liquid X1; the liquid supply path corresponds to the first supply path P1; and the return path corresponds to the fourth supply path P4 . However, the present invention is not limited to the configuration of the above embodiment, and many embodiments are available.

For example, in the above embodiment, the hydrocarbon solvent S is used as the water-soluble organic solvent. However, it is not limited thereto, and may be a suitable organic solvent as long as it is water-soluble. Moreover, the metal mask M used for the vapor deposition process of an organic light-emitting diode is demonstrated as a to-be-cleaned material. However, the present invention is not limited thereto, and may be an appropriate material to be washed as long as it is washed with a water-soluble hydrocarbon solvent.

Further, the cleaning device 10 is constituted by three cleaning portions (the first cleaning portion 11, the second cleaning portion 12, and the third cleaning portion 13). However, the present invention is not limited thereto, and may be an appropriate configuration as long as it is a cleaning device 10 composed of one or more cleaning portions. For example, a washing device composed of eight washing portions may be used.

Further, in addition to the cleaning device 10, it may be a solvent dehydration system that includes a washing device for washing the washed cleaning device 10. In this case, the hydrocarbon solvent for rinsing the object to be washed is a non-chlorinated hydrocarbon solvent (HFE) or the like. Further, the separation membrane module 412 is composed of a porous ceramic support 412a and a zeolite separation membrane 412b. However, the present invention is not limited thereto, and a separation membrane module which is appropriately configured may be used as long as it can separate the mixed liquid X2 into a hydrocarbon solvent S and water by pervaporation.

For example, the separation membrane module 412 coated with the microporous ceramic separation membrane such as the zeolite separation membrane 412b, the ceria separation membrane or the carbon separation membrane may be used as the outer surface of the porous ceramic support 412a. Further, the separation membrane module 412 whose outer surface of the porous ceramic support 412a is covered with the zeolite separation membrane 412b is not limited thereto, and the inner surface of the porous ceramic support may be a microporous ceramic separation membrane such as a zeolite separation membrane. Coated separation membrane module.

Further, the solvent dehydration system 1 includes a preheating tank 30. However, the present invention is not limited thereto. For example, the configuration of the solvent dehydration system 1 of another embodiment shown in Fig. 3 may be employed, and the preheating tank 30 may not be required. The vacuum distillation regeneration device 20 and the pervaporation vaporization device 40 are connected via the second supply path P2 and the heating device 60. Alternatively, the solvent dehydration system 1 of FIG. 3 may be further configured without the need for the heating device 60. In this case, the vacuum distillation regeneration device 20 may supply the mixed liquid X2 having a temperature suitable for pervaporation to the permeation vaporization device 40 via the second supply path P2.

Thereby, the solvent dehydration system 1 and the solvent dehydration method can be used to heat the supply liquid X2 supplied to the vaporization device 40 by using the vacuum distillation regeneration device 20 as a heating means. Since the solvent dehydration system 1 and the solvent dehydration method do not require the heating device 60, the mixed solution X2 can be efficiently dehydrated with a simple configuration.

1‧‧‧ solvent dehydration system

10‧‧‧cleaning device

11‧‧‧1st cleaning department

111‧‧‧1st cleaning tank

112‧‧‧1st storage tank

113‧‧‧Supersonic vibrator

12‧‧‧2nd cleaning department

121‧‧‧2nd cleaning tank

122‧‧‧2nd storage tank

123‧‧‧Supersonic vibrator

13‧‧‧3rd Washing Department

131‧‧‧3rd cleaning tank

132‧‧‧3rd storage tank

133‧‧‧Ultrasonic vibrator

14‧‧‧1st liquid supply path

15‧‧‧2nd liquid supply path

20‧‧‧Vacuum distillation regeneration unit

21‧‧‧Evaporation tank

22‧‧‧Condensation tank

23‧‧‧Connected path

24‧‧‧heater

25‧‧‧cooler

30‧‧‧Preheating tank

31‧‧‧Preheating heater

40‧‧‧Infiltration vaporization unit

41‧‧‧The main body of the device

411‧‧‧ Shell

411a‧‧‧ upstream side connection

411b‧‧‧ Main Body

411c‧‧‧ downstream side connection

411d‧‧‧Side joints

412‧‧‧Separation membrane module

412a‧‧‧Porous ceramic support

412b‧‧‧Zeolite separation membrane

42‧‧‧Drainage path

43‧‧‧vacuum pump

44‧‧‧1st cooling unit

45‧‧‧Solvent discharge path

46‧‧‧2nd cooling device

50‧‧‧Pumping pump

60‧‧‧ heating device

70‧‧‧Pumping pump

L1‧‧‧ mixture flow path

L2‧‧‧ steam flow path

M‧‧‧Metal mask

P1‧‧‧1st supply path

P2‧‧‧2nd supply path

P3‧‧‧3rd supply path

P4‧‧‧4th supply path

S‧‧‧ hydrocarbon solvent

W‧‧‧through steam

X1‧‧‧ mixture

X2‧‧‧ mixture

Fig. 1 is a view showing the configuration of a solvent dehydration system. Fig. 2 is a view showing the configuration of a main body of a device that is saturated with a vaporization device; Fig. 3 is a configuration diagram showing a configuration of a solvent dehydration system according to another embodiment.

Claims (5)

A solvent dehydration system comprising: a pervaporation device for dehydrating a mixture of a water-soluble organic solvent and water; a supply path for supplying the mixture to the pervaporation device; and a heating means for supplying the solution The mixture of the vaporization device is heated; wherein the solvent dehydration system further comprises a distillation regeneration device for generating the mixed liquid, the distillation regeneration device being connected to the pervaporation device via the supply path. The solvent dehydration system of claim 1, wherein the distillation regeneration device and the permeation vaporization device comprise: a temporary storage tank for temporarily storing the mixed liquid supplied to the pervaporation vaporization device; a heat means; preheating the mixed liquid stored in the temporary storage tank; wherein the heating means heats the mixed liquid supplied from the temporary storage tank to the pervaporation vaporization device. The solvent dehydration system of claim 1, wherein the pervaporation apparatus comprises: a pervaporation membrane module for dehydrating the mixture; wherein the pervaporation membrane module is a porous ceramic support It is composed of a laminate of a microporous ceramic separation membrane. The solvent dehydration system according to claim 1, comprising: a cleaning device for removing the adhering matter attached to the object to be washed; and a liquid feeding path for impurities generated in the cleaning device a mixture of the water and the organic solvent is sent from the cleaning device to the distillation regeneration device; and a reflux path is used to reflux the organic solvent dehydrated by the pervaporation device to the cleaning device. A solvent dehydration method, the system used comprising: a pervaporation device for dehydrating a mixture of a water-soluble organic solvent and water; a supply path for supplying the mixture to the pervaporation device; and a heating means for supplying Heating the mixture into the vaporization device; wherein the solvent dehydration method comprises: a step of generating a mixture by a distillation regeneration device; a step of heating the mixture by heating; and a mixture of the mixture via the supply path a step of supplying the distillation regeneration device to the pervaporation vaporization device; and a step of dehydrating the mixed liquid with the pervaporation vaporization device.