TW201918823A - Manufacturing method of flexible panel, flexible panel and display device - Google Patents

Abstract

A manufacturing method of flexible panel(10), a flexible panel(10) and a display device. The manufacturing method of flexible panel(10) includes the following steps: providing a rigid substrate(20), the rigid substrate(20) including a first surface(22) and a second surface(24) opposite to the first surface(22), and forming a flexible substrate(12) on the first surface(22); forming a device layer(14) on the flexible substrate(12), and forming a protective film(16) on the device layer(14), the protective film(16) attached to the rigid substrate(20), the flexible substrate(12), the device layer(14) and the protective film(16) forming a flexible panel(10); performing a laser lift-off process from one side of the second surface(24) to separate the flexible substrate(12) from the first surface(22); cooling the protective film(16) to separate the protective film(16) from the first surface(22); separating the flexible panel(10) from the rigid substrate(20).

Description

Manufacturing method of flexible panel, flexible panel and display device

The present invention relates to the field of display technology, and in particular, to a method for manufacturing a flexible panel, a flexible panel, and a display device.

In related technologies, a flexible panel generally requires a flexible substrate to be fabricated on a rigid substrate, and a device layer and a protective film to be formed on the flexible substrate. Finally, a laser scanning method is used to separate the flexible substrate from the rigid substrate to form a flexible panel. After the laser scanning, the flexible substrate has been separated from the rigid substrate, but the viscosity of the protective film is not affected by the laser and covers the flexible substrate, so that the flexible substrate, the device layer, and the protective film are still attached to the rigid substrate. In order to completely separate the flexible substrate, device layer, and protective film from the glass substrate, a blade is generally used to cut the adhesive layer between the protective film and the rigid substrate. However, this operation requires precise alignment and the risk of the blade scratching the flexible panel.

An embodiment of the present invention provides a method for manufacturing a flexible panel, a flexible panel, and a display device.

A method for manufacturing a flexible panel according to an embodiment of the present invention includes:

Providing a rigid substrate including a first surface and a second surface opposite to the first surface, forming a flexible substrate on the first surface;

Forming a device layer on the flexible substrate, and forming a protective film on the device layer, the protective film being attached to the rigid substrate, the flexible substrate, the device layer, and the protective film forming the flexible panel;

Performing a laser peeling process from one side of the second surface to separate the flexible substrate from the first surface;

Cooling the protective film to separate the protective film from the first side; and

Separate the flexible panel from the rigid substrate.

In the method for manufacturing a flexible panel according to the embodiment of the present invention, by cooling the protective film, the protective film can be reduced in viscosity and warped, so that the protective film can be separated from the first surface of the rigid substrate, and then the flexible panel and the rigid substrate can be separated. . In this way, a fast, non-destructive, flexible panel separation method that does not require precise alignment can be achieved, and at the same time, the risk of scratching the flexible panel is avoided.

The flexible panel according to the embodiment of the present invention is made by using the manufacturing method according to any one of the above embodiments.

In the flexible panel according to the embodiment of the present invention, the precise alignment of the flexible panel and the rigid substrate is not required, and the risk of scratching the flexible panel can be avoided.

A display device according to an embodiment of the present invention includes the flexible panel described in the above embodiment.

In the display device according to the embodiment of the present invention, the precise alignment of the flexible panel and the rigid substrate is not required, and the risk of scratching the flexible panel can be avoided.

Additional aspects and advantages of the embodiments of the present invention will be partially given in the following description, and part of them will become apparent from the following description, or be learned through the practice of the embodiments of the present invention.

Hereinafter, embodiments of the present invention will be described in detail. An example of the embodiment is shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention, but should not be construed as limiting the present invention.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation or position relationship indicated by "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" Based on the orientation or position relationship shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, structure and operation in a specific orientation, It is understood as a limitation to the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless specifically defined otherwise.

In the description of the present invention, it should be noted that the terms "installation", "connected", and "connected" should be understood in a broad sense unless otherwise specified and limited. For example, they may be fixed connections or removable. Connected or integrated; it can be mechanical, electrical, or can communicate with each other; it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal communication of two components or the mutual connection of two components Effect relationship. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

In the present invention, unless stated and defined otherwise, the "first" or "under" of the second feature may include the first and second features in direct contact, and may also include the first and second features. Not by direct contact, but by another characteristic between them. Moreover, the first feature is "above", "above", and "above" the second feature, including that the first feature is directly above and obliquely above the second feature, or merely indicates that the first feature is higher in level than the second feature. The first feature is “below”, “below”, and “below” of the second feature, including the fact that the first feature is directly below and obliquely below the second feature, or merely indicates that the first feature is less horizontal than the second feature.

The following disclosure provides many different implementations or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the invention. In addition, the present invention may repeat reference numerals and / or reference letters in different examples, and such repetition is for the purpose of simplicity and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides examples of various specific processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and / or the use of other materials.

Referring to FIG. 1 to FIG. 5, a method for manufacturing a flexible panel 10 according to an embodiment of the present invention includes:

Step S11: providing a rigid substrate 20, the rigid substrate 20 includes a first surface 22 and a second surface 24 opposite the first surface 22, and a flexible substrate 12 is formed on the first surface 22;

Step S13: forming a device layer 14 on the flexible substrate 12, and forming a protective film 16 on the device layer 14, the protective film 16 is attached to the rigid substrate 20, and the flexible substrate 12, the device layer 14 and the protective film 16 form a flexible panel 10;

Step S15: performing a laser peeling process from one side of the second surface 24 to separate the flexible substrate 12 from the first surface 22;

Step S17: cooling the protective film 16 to separate the protective film 16 from the first surface 22; and

Step S19: Separate the flexible panel 10 and the rigid substrate 20.

In the manufacturing method of the flexible panel 10 according to the embodiment of the present invention, by cooling the protective film 16, the protective film 16 can be reduced in viscosity and warped, so that the protective film 16 can be separated from the first surface 22 of the rigid substrate 20, and then Separate the flexible panel 10 from the rigid substrate 20. In this way, a fast, non-destructive flexible panel 10 separation method can be realized, and at the same time, the risk of scratching the flexible panel 10 can be avoided.

It can be understood that the flexible panel 10 includes a flexible substrate 12, a device layer 14, and a protective film 16. In the embodiment of the present invention, after the laser stripping process is performed, the flexible substrate 12 has been separated from the rigid substrate 20, but since the protective film 16 is attached to the rigid substrate 20 and the viscosity of the protective film 16 is not affected by the laser, the protective film 16 and The rigid substrate 20 is still not separated, so that the flexible panel 10 is still attached to the rigid substrate 20. Since the thermal expansion of the protective film 16 and the rigid substrate 20 are inconsistent, by cooling the protective film 16, the protective film 16 can be reduced in viscosity and warped to detach the rigid substrate 20. Then, the flexible panel 10 is completely separated from the rigid substrate 20, and the flexible panel 10 is handed over to a tray. After the protective film 16 returns to normal temperature, it becomes flat again. In this way, after the laser stripping process, the flexible panel 10 can be separated from the rigid substrate 20 without using a blade to cut the adhesive layer between the protective film 16 and the rigid base, thereby realizing the flexible panel 10 that is fast, non-destructive, and does not require precise alignment. The separation method also avoids the risk of scratching the flexible panel 10.

In some embodiments, the flexible panel 10 is a flexible OLED panel. The flexible OLED panel has a display device layer 14 formed on the flexible substrate 12. The device layer 14 includes an ITO anode layer, an organic functional layer, and a metal cathode layered.

In some embodiments, forming the flexible substrate 12 on the first surface 22 includes: coating a polyimide solution on the first surface 22 to form the flexible substrate 12.

It can be understood that polyimide (PI) is an organic polymer material with excellent mechanical properties, high temperature resistance above 400 ° C, and long-term use temperature range of -200 to 300 ° C. It is the most commonly used material for making flexible substrates 12. Therefore, the flexible substrate 12 formed of polyimide solution is resistant to impact, is not easily broken, and is thin and light. In the manufacturing process of the flexible panel 10, the flexible substrate 12 is not easily affected by temperature changes.

Of course, the flexible substrate 12 may not be limited to the above-mentioned embodiment, and in other embodiments, other suitable materials may be adopted according to requirements, for example, polyethylene terephthalate (PEN), polyethylene terephthalate (PET).

In some embodiments, referring to FIGS. 3 and 4, a rigid substrate 20 is provided, including: the first surface 22 faces upward and the second surface 24 faces downward;

A laser peeling process is performed from one side of the second surface 24 to separate the flexible substrate 12 from the first surface 22, including: turning the rigid substrate 20 so that the first surface 22 faces downward and the second surface 24 faces upward, from the second surface A laser peeling process is performed on one side of 24 to separate the flexible substrate 12 from the first surface 22.

It can be understood that in the embodiment of the present invention, the flexible substrate 12, the device layer 14, and the protective film 16 are laminated on the first surface 22 of the rigid substrate 20, and the laser is emitted from one side of the second surface 24 of the rigid substrate 20 The peeling process can not only separate the flexible substrate 12 from the first surface 22, but also reduce the influence of the laser on the device layer 14.

In one embodiment, during the laser lift-off process, the rigid substrate 20 is turned so that the first surface 22 faces downward and the second surface 24 faces upward. At this time, the laser is irradiated from top to bottom and penetrates from the rigid substrate 20 to the flexible substrate 12. The flexible substrate 12 and the laser chemically react to separate the flexible substrate 12 from the rigid substrate 20. Of course, in another embodiment, during the laser lift-off process, the rigid substrate 20 may not be inverted, and the first surface 22 and the second surface 24 may be kept downward. At this time, the laser is irradiated from the bottom to the top and penetrates from the rigid substrate 20 to the flexible substrate 12. The flexible substrate 12 and the laser chemically react to separate the flexible substrate 12 from the rigid substrate 20.

In some embodiments, before the protective film 16 is cooled, the method for manufacturing the flexible panel 10 includes: turning the rigid substrate 20 so that the first surface 22 faces upward and the second surface 24 faces downward.

It can be understood that, in the illustrated embodiment, the rigid substrate 20 is turned over before the laser stripping process is performed. Therefore, before the protective film 16 is cooled, the rigid substrate 20 is turned over so that the first surface 22 faces upward and the second surface 24 faces downward. To facilitate cooling of the protective film 16.

In some embodiments, referring to FIG. 5, cooling the protective film 16 includes spraying a refrigerant along an edge of the protective film 16 to cool the protective film 16.

In this way, spraying a refrigerant along the edge of the protective film 16 to cool the protective film 16 is simple and feasible, and the cost is low.

In some embodiments, referring to FIG. 6, spraying the refrigerant along the edge of the protective film 16 to cool the protective film 16 includes spraying the refrigerant 360 degrees along the edge of the protective film 16 to cool the protective film 16.

It can be understood that the edge of the protective film 16 can be cooled by spraying the refrigerant with the spraying device 40, and the method is simple and easy to implement. In the embodiment of the present invention, the spraying device 40 can move according to the dashed trajectory in FIG. 6 and spray the refrigerant 360 degrees along the edge of the protective film 16 to cool the protective film 16 and reduce its viscosity. Specifically, the spraying device 40 can move clockwise or counterclockwise according to the dotted line trajectory in FIG. 6. In this way, it is possible to spray the refrigerant 360 degrees along the edge of the protective film 16.

Further, the spray head of the spraying device 40 can control the spraying amount and spraying distance, thereby indirectly controlling the cooling temperature. A plurality of spraying devices 40 can be used to spray refrigerant at the same time for cooling, thereby increasing the cooling speed. Multiple can be understood as two or more.

Of course, the cooling method may not be limited to the above-mentioned embodiment, but in other embodiments, other suitable methods may be adopted according to requirements. For example, a pipe may be placed beside the edge of the protective film 16, and the pipe surrounds the edge of the protective film 16 360 degrees. When cooling, pass refrigerant into the pipe. The temperature of the refrigerant is transmitted to the edge of the protective film 16 through the pipe, thereby cooling the edge of the protective film 16.

In some embodiments, the refrigerant includes liquid nitrogen.

It can be understood that liquid nitrogen is a common and widely used refrigerant. Under normal pressure, the temperature of liquid nitrogen is -196 ° C. In this way, liquid nitrogen can quickly cool the edges of the protective film 16.

Of course, the refrigerant may not be limited to the foregoing embodiment, and in other embodiments, other suitable refrigerants may be adopted according to requirements.

In some embodiments, separating the flexible panel 10 from the rigid substrate 20 includes: using a suction cup 30 to adsorb the protective film 16 to separate the flexible panel 10 from the rigid substrate 20.

It can be understood that it is convenient and quick to separate the flexible panel 10 from the rigid substrate 20 by using the suction cup 30 to adsorb the protective film 16. In one example of the present invention, the number of the suction cups 30 is plural, and the plurality of suction cups 30 evenly space the protective film 16. The suction cup 30 uses the difference between the internal and external atmospheric pressures to attract objects. The suction force of the plurality of suction cups 30 is stronger. In the process of the suction cup 30 adsorbing the protective film 16 to separate the flexible panel 10 from the rigid substrate 20, a plurality of suction cups 30 adsorb the protective film 16 to ensure that the flexible panel 10 is not easily dropped. The multiple suction cups 30 can be understood as two or more, and the number of the suction cups 30 can be selected according to actual needs.

In some embodiments, the chuck 30 may be a vacuum chuck. The vacuum chuck uses the vacuum principle, that is, the vacuum negative pressure to adsorb the protective film 16 to achieve the purpose of lifting the flexible panel 10. The vacuum chuck includes a vent, and the vent is connected to a vacuum generating device. When the vacuum generating device is started, the vent is vented, and the air inside the suction cup 30 is evacuated to form a vacuum state with a pressure of P2. At this time, the pressure P2 inside the suction cup 30 is lower than the atmospheric pressure P1 outside the suction cup 30, that is, P2 <P1, and the protective film 16 is adsorbed by the external pressure. The higher the degree of vacuum inside the chuck 30, the tighter the adhesion between the chuck 30 and the protective film 16.

In some embodiments, the rigid substrate 20 is a glass substrate, a ceramic substrate, or a quartz substrate.

It can be understood that a variety of rigid substrates 20 are available. When a certain type of rigid substrate 20 is missing, another type may be selected instead. In the embodiment of the present invention, the preferred rigid substrate 20 is a glass substrate.

In some embodiments, the size of the flexible substrate 12 is smaller than the size of the rigid substrate 20.

In this way, it is ensured that the flexible panel 10 can be fabricated on the rigid substrate 20.

In some embodiments, the protective film 16 covers the flexible substrate 12.

It can be understood that the protective film 16 covers the flexible substrate 12, and the size of the device layer 14 is smaller than or equal to the size of the flexible substrate 12. In this way, the protective film 16 can prevent impurities such as moisture and dust in the air from contaminating the device layer 14 and the flexible substrate 12.

Specifically, in the example in FIG. 2, the size of the device layer 14 is smaller than that of the flexible substrate 12, so that there is an edge portion without the device layer 14 on the upper surface of the flexible substrate 12, and the protective film 16 covers the flexible substrate 12 so that the protective film 16 covers the upper surface of the flexible substrate 12 without the edge portion of the device layer 14 and the side of the flexible substrate 12.

In some embodiments, the suction cup 30 includes a transparent soft rubber suction cup.

It can be understood that the cost of the transparent soft glue is low, and the suction cup 30 made of the transparent soft glue has strong adsorption force. Specifically, the suction cup 30 adsorbs the protective film 16 above the flexible panel 10, and then transfers the flexible panel 10 to a tray. The strong suction force of the suction cup 30 can prevent the flexible panel 10 from falling.

A flexible panel 10 according to an embodiment of the present invention is manufactured by using the manufacturing method of any of the foregoing embodiments.

In the flexible panel 10 according to the embodiment of the present invention, the precise alignment of the flexible panel 10 and the rigid substrate 20 is not required, and the risk of scratching the flexible panel 10 can be avoided.

A display device according to an embodiment of the present invention includes the flexible panel 10 of the above embodiment.

In the display device according to the embodiment of the present invention, the precise alignment of the flexible panel 10 and the rigid substrate 20 is not required, and the risk of scratching the flexible panel 10 can be avoided.

Specifically, the display device includes, but is not limited to, a mobile phone, a tablet computer, and a wearable electronic device with a display function.

In the description of this specification, reference is made to the terms "certain embodiments", "one embodiment", "some embodiments", "exemplary embodiments", "examples", "specific examples", or "some examples" The description means that specific features, structures, materials, or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same implementation or example. Moreover, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more implementations or examples.

Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limitations on the present invention. Those skilled in the art can interpret the above within the scope of the present invention The embodiments are subject to change, modification, replacement, and modification, and the scope of the present invention is defined by the scope of patent applications and their equivalents.

10‧‧‧ flexible panel

12‧‧‧ flexible substrate

14‧‧‧device layer

16‧‧‧ protective film

20‧‧‧ rigid substrate

22‧‧‧ the first side

24‧‧‧Second Side

30‧‧‧ Suction cup

40‧‧‧Spraying device

The above and / or additional aspects and advantages of the present invention will become apparent and easy to understand from the description of the embodiments in conjunction with the following drawings, wherein: FIG. 1 is a schematic flow chart of a method for manufacturing a flexible panel according to an embodiment of the present invention. Figure 2 is a structural schematic diagram of a flexible panel according to an embodiment of the present invention; Figure 3 is a schematic diagram of a flexible panel formed on a rigid substrate according to an embodiment of the present invention; Figure 4 is a schematic diagram of a laser peeling process according to an embodiment of the present invention; Fig. 5 is a schematic diagram of the separation between the flexible panel and the rigid substrate according to the embodiment of the present invention; Fig. 6 is a schematic diagram of the movement track of the spraying device according to the embodiment of the present invention.

Description of the main component symbols and figures: Flexible panel 10, flexible substrate 12, device layer 14, protective film 16, rigid substrate 20, first surface 22, second surface 24, suction cup 30, and spraying device 40.

Claims (14)

A method for manufacturing a flexible panel includes: providing a rigid substrate including a first surface and a second surface opposite to the first surface, forming a flexible substrate on the first surface; and forming a flexible substrate on the flexible substrate. A device layer is formed thereon, and a protective film is formed on the device layer, the protective film is attached to the rigid substrate, the flexible substrate, the device layer, and the protective film form the flexible panel; from one side of the second surface A laser peeling process is performed to separate the flexible substrate from the first surface; cooling the protective film to separate the protective film from the first surface; and separating the flexible panel and the rigid substrate. The method for manufacturing a flexible panel according to item 1 of the scope of patent application, wherein forming the flexible substrate on the first surface comprises: coating a polyimide solution on the first surface to form the flexible substrate. The method for manufacturing a flexible panel according to item 1 of the scope of patent application, wherein providing the rigid substrate comprises: making the first side face up and the second side face down; and performing laser irradiation from one side of the second face The peeling process to separate the flexible substrate from the first side includes: turning the rigid substrate so that the first side faces downward and the second side faces upward, and performing a laser peeling process from one side of the second side to make The flexible substrate is separated from the first surface. The method for manufacturing a flexible panel according to item 3 of the scope of patent application, wherein before the protective film is cooled, the method for manufacturing the flexible panel includes: turning the rigid substrate so that the first side faces upward and the second side Facing down. The method for manufacturing a flexible panel according to item 1 of the scope of patent application, wherein cooling the protective film comprises spraying a refrigerant along an edge of the protective film to cool the protective film. The method for manufacturing a flexible panel according to item 5 of the scope of patent application, wherein spraying the refrigerant along the edge of the protective film to cool the protective film includes spraying the refrigerant 360 degrees along the edge of the protective film to cool the protective film. Protective film. The method for manufacturing a flexible panel according to item 5 of the scope of patent application, wherein the refrigerant includes a liquid nitrogen. The method for manufacturing a flexible panel according to item 1 of the scope of patent application, wherein separating the flexible panel from the rigid substrate comprises: using a suction cup to adsorb the protective film to separate the flexible panel from the rigid substrate. The method for manufacturing a flexible panel according to item 1 of the scope of patent application, wherein the rigid substrate is a glass substrate, a ceramic substrate or a quartz substrate. The method for manufacturing a flexible panel according to item 1 of the scope of the patent application, wherein the size of the flexible substrate is smaller than the size of the rigid substrate. The method for manufacturing a flexible panel according to item 1 of the scope of patent application, wherein the protective film covers the flexible substrate. The method for manufacturing a flexible panel according to item 8 of the scope of patent application, wherein the suction cup includes a transparent soft rubber suction cup. A flexible panel, wherein the flexible panel is made by using the manufacturing method described in any one of claims 1 to 3 of the patent application scope. A display device includes the flexible panel described in item 13 of the scope of patent application.