TW201917093A - Mass production manufacturing method of the nanowire and manufacturing device thereof capable of manufacturing single crystal nanowires for gas sensing field - Google Patents

Mass production manufacturing method of the nanowire and manufacturing device thereof capable of manufacturing single crystal nanowires for gas sensing field Download PDF

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TW201917093A
TW201917093A TW106136167A TW106136167A TW201917093A TW 201917093 A TW201917093 A TW 201917093A TW 106136167 A TW106136167 A TW 106136167A TW 106136167 A TW106136167 A TW 106136167A TW 201917093 A TW201917093 A TW 201917093A
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cavity
nanowires
nanoporous
substrate
powder
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TW106136167A
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林明宏
陳昆煜
陳錦華
蔡明君
賀璞
胡念祖
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東方學校財團法人東方設計大學
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Priority to TW106136167A priority Critical patent/TW201917093A/en
Priority to CN201810027555.3A priority patent/CN109694036A/en
Publication of TW201917093A publication Critical patent/TW201917093A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82BNANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0009Forming specific nanostructures
    • B82B3/0038Manufacturing processes for forming specific nanostructures not provided for in groups B82B3/0014 - B82B3/0033
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

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Abstract

The present relates to a mass production manufacturing method of nanowire and a manufacturing device thereof. The mass production manufacturing method of nanowire comprises the following steps of: preparing a nanoporous substrate, of which the surface is covered with a plurality of parallelly arranged through holes; providing one or multiple kinds of metal powders, wherein the metal powders have particle diameters smaller than 100[mu]m and is uniformly spread on the nanoporous substrate; putting the nanoporous substrate into a cavity and establishing a high vacuum environment in the cavity; heating the interior of the cavity to melt the metal powders into a molten metal; and pressing the molten metal inside the cavity to fill into the holes of the nanoporous substrate, so as to die cast the molten metal into a plurality of nanowires.

Description

奈米線材之量產製造方法及其製造裝置    Mass production manufacturing method and manufacturing device of nano wire   

本發明係關於一種線材之製造方法及其製造裝置,特別是關於一種奈米線材之量產製造方法及其製造裝置。 The invention relates to a method for manufacturing a wire and a manufacturing device thereof, and more particularly to a method for mass-producing a nano wire and a manufacturing device thereof.

由於日趨嚴重的環境污染及工業上之需求,使得感測器的發展倍受重視。在空氣污染防治日益複雜及工業上迫切需要的今日,高效能的氣體感測器愈來愈受重視。 Due to the increasingly serious environmental pollution and industrial needs, the development of sensors has received much attention. In today's increasingly complex air pollution control and urgent industrial needs, high-efficiency gas sensors are receiving more and more attention.

近年來奈米結構材料之氣體感測器的出現,其靈敏度能隨著構成團聚尺寸的減少而有明顯的增加,小於100奈米之奈米微粒材料由於粒徑小、可提供反應之表面積大,因此對於必須具備良好表面效應之氣體感測器而言,實具有相當的應用價值。奈米晶粒由於其粒徑極為細微,因此具有極大的比表面積,使表面能量佔全能量的比例會大幅增高。 In recent years, the appearance of gas sensors with nano-structured materials has a significant increase in sensitivity with the decrease in the size of the agglomeration. Nano-particulate materials smaller than 100 nanometers have a large surface area that can provide reactions due to their small particle size. Therefore, it has considerable application value for gas sensors that must have good surface effects. Due to the extremely fine particle size, nanometer crystal grains have a large specific surface area, so that the ratio of surface energy to total energy will increase significantly.

當前,奈米線均在實驗室中生產,尚未在自然界中發現。奈米線可以被懸置法、沉積法或者由元素合成法製得。 Nanowires are currently produced in laboratories and have not been found in nature. Nanowires can be made by suspension, deposition or elemental synthesis.

懸置奈米線指奈米線在真空條件下末端被固定,懸置奈米線可以通過對粗線的化學刻蝕得來,也可以用高能粒子(原子或分子)轟擊粗線產生;沉積奈米線指奈米線被沉積在其他物質的表面上:例如它可以是一條覆蓋在絕緣體表面上的 金屬原子線;元素合成法中一種常用的技術則是VLS合成法(Vapor-Liquid-Solid),這種技術採用雷射融化的粒子或者一種原料氣矽烷作源(材料),然後把源(材料)暴露在一種催化劑中。對奈米線來說,最好的催化材料是液體金屬(比如金)的奈米簇,它可以被以膠質的形式購買,然後被沉積在基質上或通過去濕法從薄膜上自我組裝。 Suspended nanowire refers to that the nanowire is fixed at the end under vacuum conditions. Suspended nanowires can be obtained by chemical etching of thick lines, or they can be produced by bombarding thick lines with high-energy particles (atoms or molecules); deposition Nanowire refers to the deposition of nanowires on the surface of other substances: for example, it can be a metal atom wire covering the surface of an insulator; a commonly used technique in elemental synthesis is VLS-Liquid-Solid ), This technology uses laser-melted particles or a raw material gas silane as the source (material), and then exposes the source (material) to a catalyst. For nanowires, the best catalytic material is nanocluster of liquid metal (such as gold), which can be purchased as a colloid and then deposited on a substrate or self-assembled from a film by dewetting.

本發明所欲解決的主要問題,係提供一種奈米線材的量產製造方式及其製造裝置,特別是用於製造氣體感測領域的單晶奈米線材。 The main problem to be solved by the present invention is to provide a mass production manufacturing method of nanowires and a manufacturing device thereof, particularly for manufacturing single-crystal nanowires in the field of gas sensing.

為達成上述的目的,本發明公開了一種奈米線材的量產製造方法,包括:製備一奈米多孔隙基板,該奈米多孔隙基板表面佈滿多個平行排列的貫穿孔洞;提供一種或多種金屬粉末,該些金屬粉末的粒徑小於100μm,均勻平舖於該奈米多孔隙基板上;將該奈米多孔隙基板製入一腔體中,並於該腔體中建立一高真空環境;加熱該腔體內部使該些金屬粉末熔融為一金屬熔液;以及加壓該腔體內部的該金屬熔液使灌入該奈米多孔隙基板的該些孔洞壓鑄成形為多個奈米線材。 In order to achieve the above object, the present invention discloses a method for mass production of nanowires, including: preparing a nanoporous substrate, and the surface of the nanoporous substrate is covered with a plurality of through-holes arranged in parallel; A variety of metal powders with a particle size of less than 100 μm, evenly spread on the nanoporous substrate; the nanoporous substrate is made into a cavity, and a high vacuum is established in the cavity Environment; heating the inside of the cavity to melt the metal powders into a metal melt; and pressurizing the metal melt inside the cavity to die-cast the holes filled into the nanoporous substrate into a plurality of nanometers Rice wire.

在一實施例中,所述奈米多孔隙基板係透過奈米多孔隙氧化鋁之成長機制製成,其製程方式包括一前處理步驟、一電解拋光步驟、一第一次陽極處理步驟、一溶解氧化鋁層步驟、一第二次陽極處理步驟、一除去純鋁層步驟以及一除去阻障層步驟。 In one embodiment, the nanoporous substrate is made through the growth mechanism of nanoporous alumina, and the manufacturing method includes a pre-processing step, an electrolytic polishing step, a first anodizing step, a A step of dissolving the alumina layer, a second anodizing step, a step of removing the pure aluminum layer, and a step of removing the barrier layer.

在一實施例中,所述一種或多種金屬粉末包括有 鉛粉、錫粉以及鉍粉,該些鉛粉、錫粉及鉍粉的質量比為鉛粉21.12%、錫粉36.29%、鉍粉42.59%。 In one embodiment, the one or more metal powders include lead powder, tin powder, and bismuth powder. The mass ratio of the lead powder, tin powder, and bismuth powder is 21.12% of lead powder, 36.29% of tin powder, and bismuth powder. 42.59%.

在一實施例中,建立該高真空環境的方式是利用一機械幫浦將腔體內的氣體抽吸至0.05托耳,再通入氬氣達760托耳,再將腔體內的氣體抽吸至0.05托耳,再通入氬氣達760托耳,將腔體內的氣體抽吸至0.05托耳。 In one embodiment, the way to establish the high vacuum environment is to use a mechanical pump to suck the gas in the cavity to 0.05 Torr, and then pass argon to 760 Torr, and then suck the gas in the cavity to 0.05 Torr, and then argon gas was introduced up to 760 Torr, and the gas in the cavity was sucked to 0.05 Torr.

在一實施例中,加熱該腔體直到攝氏360度,並維持20分鐘使該些金屬粉末熔融為該金屬熔液,加熱該些金屬粉末熔融為該金屬熔液的過程中,對該金屬熔液進行轉動及攪拌。 In one embodiment, the cavity is heated to 360 degrees Celsius and maintained for 20 minutes to melt the metal powder into the metal melt. During the process of heating the metal powder to melt into the metal melt, the metal is melted. The liquid is rotated and stirred.

在一實施例中,使用一可程式邏輯控制壓鑄機台加壓該腔體內部的該金屬熔液使灌入該奈米多孔隙基板的多個孔洞壓鑄成形為多個奈米線材。 In one embodiment, a programmable logic-controlled die-casting machine is used to pressurize the metal melt in the cavity to die-cast a plurality of holes filled in the nano-porous substrate into a plurality of nano wires.

在一實施例中,壓鑄成形為多個奈米線材後更包括進行一熱處理程序,使該些奈米線材形成多個單晶奈米線材。 In an embodiment, after the die-casting into a plurality of nanowires, a heat treatment process is further performed to form the nanowires into a plurality of single-crystal nanowires.

在上述實施例中,該熱處理程序包括一第一熱處理程序以及一第二熱處理程序,該第一熱處理程序為以攝氏120度進行96小時的退火處理,該第二熱處理程序為以攝氏零度以下進行1小時的淬火處理。 In the above embodiment, the heat treatment program includes a first heat treatment program and a second heat treatment program. The first heat treatment program is an annealing treatment at 120 degrees Celsius for 96 hours, and the second heat treatment program is performed at a temperature below zero degrees Celsius. 1 hour quenching treatment.

本發明還包括提供一種奈米線材的製造裝置,用以量產製造奈米線材,其結構包括:一腔體,該腔體內部具有一容置空間;一奈米多孔隙基板,該奈米多孔隙基板表面佈滿多個平行排列的孔洞,該些孔洞之孔徑介於60~80nm,每平方 公分約有1012個孔洞,該奈米多孔隙基板放置於該腔體內部的該容置空間;一種或多種金屬粉末,該些金屬粉末的粒徑小於100μm,均勻平舖於該奈米多孔隙基板上;一幫浦單元,用以抽吸或通入氣體於該腔體內部,改變該腔體內部的氣體種類及氣體壓力;一溫度控制單元,用以加熱該腔體內部的溫度,使置於該腔體內部的奈米多孔隙基板上的該些金屬粉末熔融為一金屬熔液;一壓鑄單元,用以加壓該金屬熔液使灌入該奈米多孔隙基板的該些孔洞,壓鑄成形為多個奈米線材。 The invention also includes providing a nanowire manufacturing device for mass-producing nanowires. The structure includes: a cavity, the cavity has a receiving space inside; a nanoporous substrate, the nano The surface of the multi-porous substrate is covered with a plurality of holes arranged in parallel. The pores have a pore diameter ranging from 60 to 80 nm, and there are about 10 12 holes per square centimeter. The nano-porous substrate is placed in the accommodation inside the cavity. Space; one or more metal powders with a particle size of less than 100 μm, evenly spread on the nanoporous substrate; a pump unit for sucking or passing gas into the cavity to change Gas type and gas pressure inside the cavity; a temperature control unit for heating the temperature inside the cavity to melt the metal powders on the nanoporous substrate inside the cavity into a metal melt A die-casting unit for pressurizing the molten metal into the holes of the nano-porous substrate, and die-casting into a plurality of nano-wires.

在一實施例中,更可包括一氣氛爐,該氣氛爐中充滿氬氣,以攝氏120度對該些奈米線材進行96小時的退火處理。 In one embodiment, an atmosphere furnace may be further included. The atmosphere furnace is filled with argon gas, and the nanowires are annealed at 120 degrees Celsius for 96 hours.

在上述之實施例中,更可包括一冷凍庫,用以置入該些經退火處理的奈米線材,以攝氏零度以下的低溫對該些奈米線材進行1小時的淬火處理。 In the above-mentioned embodiment, it may further include a freezer for placing the annealed nanowires, and quenching the nanowires for 1 hour at a low temperature below zero degrees Celsius.

在一實施例中,該奈米多孔隙基板係為氧化鋁材質基板。 In one embodiment, the nanoporous substrate is an alumina substrate.

在一實施例中,該些孔洞係為蜂巢狀孔洞。 In one embodiment, the holes are honeycomb holes.

在一實施例中,所述一種或多種金屬粉末包括有鉛粉、錫粉以及鉍粉;其中,該些鉛粉、錫粉及鉍粉的質量比為鉛粉21.12%、錫粉36.29%、鉍粉42.59%。 In an embodiment, the one or more metal powders include lead powder, tin powder, and bismuth powder; wherein the mass ratio of the lead powder, tin powder, and bismuth powder is 21.12% of lead powder, 36.29% of tin powder, Bismuth powder was 42.59%.

在一實施例中,該幫浦單元係為機械幫浦。 In one embodiment, the pump unit is a mechanical pump.

在一實施例中,該壓鑄單元係為可程式邏輯控制壓鑄機台。 In one embodiment, the die casting unit is a programmable logic controlled die casting machine.

本發明還提供一種單晶奈米線材,應用於氣體感 測器,其成分包括:質量比21.12%的鉛粉、質量比36.29%的錫粉以及質量比42.59%的鉍粉,線徑介於60~80nm。 The invention also provides a single crystal nano wire, which is applied to a gas sensor. The composition includes: lead powder with a mass ratio of 21.12%, tin powder with a mass ratio of 36.29%, and bismuth powder with a mass ratio of 42.59%. 60 ~ 80nm.

本發明所製造的奈米線材應用於氣體感測機制中時,位於顆粒表面上的原子與位於顆粒內部的原子之比值隨著顆粒變小而增加,導致表層原子容易偏離晶格位置,散亂到類似於氣態,此現象稱為表面效應(surface effect)。由於奈米材料的表面效應,使內外層原子之間的鍵結力減弱,故表層原子極易與氣體分子的凡德瓦力產生化學鍵結,進而吸附氣體分子。若吸附過程是還原反應,則將降低表面能障,有助於電子流通,減少電阻。相反地,若吸附的是氧化性氣體,則將增加電阻。因此,可藉由電阻量測驗證奈米材料吸附特定氣體分子的能力。 When the nanowire manufactured by the present invention is applied to a gas sensing mechanism, the ratio of atoms located on the surface of the particles to atoms located inside the particles increases as the particles become smaller, causing the surface atoms to easily deviate from the lattice position and scatter. To a gaseous state, this phenomenon is called surface effect. Due to the surface effect of nanomaterials, the bonding force between the inner and outer layer atoms is weakened. Therefore, the surface layer atoms are likely to chemically bond with the van der Waals force of gas molecules, and then adsorb gas molecules. If the adsorption process is a reduction reaction, it will reduce the surface energy barrier, help electrons flow, and reduce resistance. Conversely, if an oxidizing gas is adsorbed, the resistance will increase. Therefore, resistance measurement can be used to verify the ability of nanomaterials to adsorb specific gas molecules.

1‧‧‧奈米線材 1‧‧‧Nano wire

10‧‧‧奈米多孔隙基板 10‧‧‧ nanoporous substrate

10’‧‧‧鋁箔裝置 10’‧‧‧aluminum foil device

10A‧‧‧氧化鋁層 10A‧‧‧ alumina layer

10B‧‧‧氧化鋁層 10B‧‧‧ alumina layer

10C‧‧‧純鋁層 10C‧‧‧Pure aluminum layer

10D‧‧‧阻障層 10D‧‧‧Barrier layer

101‧‧‧鋁箔 101‧‧‧ aluminum foil

102‧‧‧孔洞 102‧‧‧ Hole

11‧‧‧銅板 11‧‧‧ copper plate

111‧‧‧細縫 111‧‧‧Slit

12‧‧‧石墨棒 12‧‧‧graphite rod

14‧‧‧電解液 14‧‧‧ Electrolyte

15‧‧‧草酸溶液 15‧‧‧oxalic acid solution

16‧‧‧氫氧化鈉 16‧‧‧Sodium hydroxide

17‧‧‧混合溶液 17‧‧‧ mixed solution

20’‧‧‧金屬粉末 20’‧‧‧ metal powder

20A‧‧‧鉛粉 20A‧‧‧Lead powder

20B‧‧‧錫粉 20B‧‧‧tin powder

20C‧‧‧鉍粉 20C‧‧‧bismuth powder

20‧‧‧金屬熔液 20‧‧‧Metal melt

30‧‧‧腔體 30‧‧‧ Cavity

30A‧‧‧氬氣 30A‧‧‧Argon

30’‧‧‧容置空間 30’‧‧‧accommodation space

300‧‧‧溫度控制系統 300‧‧‧Temperature control system

301‧‧‧幫浦單元 301‧‧‧pu unit

302‧‧‧壓鑄單元 302‧‧‧Die-casting unit

D‧‧‧孔徑 D‧‧‧ Aperture

S1‧‧‧奈米線材的量產製造方法 S1‧‧‧Nano wire mass production manufacturing method

S1A‧‧‧奈米線材的量產製造方法 Mass production manufacturing method of S1A‧‧‧nano wire

S11~S16‧‧‧步驟 S11 ~ S16‧‧‧step

S110‧‧‧奈米多孔隙基板的製程方式 S110‧‧‧Nano porous substrate manufacturing method

S111~S117‧‧‧步驟 S111 ~ S117‧‧‧step

S2‧‧‧單晶奈米線材的量產製造方法 S2‧‧‧ Monocrystalline Nano Wire Mass Production Manufacturing Method

S21~S27‧‧‧步驟 S21 ~ S27‧‧‧ steps

圖1A為本發明所述製造方法第一實施例之流程圖;圖1B為本發明所述奈米多孔隙基板的製程方式流程圖;圖2A至圖2D為本發明所述奈米多孔隙基板的製程裝置結構示意圖;圖3A至圖3H為本發明所述奈米多孔隙基板的孔隙成形示意圖;圖4A及圖4B為本發明以真空壓鑄法成形奈米線材之裝置示意圖;圖5為本發明所述製造方法第二實施例之流程圖;圖6為本發明所述製造方法第三實施例之流程圖。 1A is a flowchart of a first embodiment of a manufacturing method according to the present invention; FIG. 1B is a flowchart of a manufacturing method of a nanoporous substrate according to the present invention; and FIGS. 2A to 2D are nanoporous substrates according to the present invention. 3A to 3H are schematic diagrams of pore forming of a nanoporous substrate according to the present invention; FIGS. 4A and 4B are schematic diagrams of an apparatus for forming nanowires by vacuum die casting according to the present invention; FIG. 5 is The flowchart of the second embodiment of the manufacturing method of the invention; FIG. 6 is the flowchart of the third embodiment of the manufacturing method of the invention.

接下來便結合圖式和具體實施例對本發明作進一步說明,以使本領域的技術人員可以更輕易理解本發明並加以實施運用。 Next, the present invention will be further described with reference to the drawings and specific embodiments, so that those skilled in the art can more easily understand the present invention and implement it.

本發明所欲解決的主要問題,係提供一種奈米線材的量產製造方式及其製造裝置,特別是用於製造氣體感測領域的單晶奈米線材。 The main problem to be solved by the present invention is to provide a mass production manufacturing method of nanowires and a manufacturing device thereof, particularly for manufacturing single-crystal nanowires in the field of gas sensing.

為達成上述的目的,本發明公開了一種奈米線材的量產製造方法S1,請參閱圖1A,包括:步驟S11:製備一奈米多孔隙基板,該奈米多孔隙基板表面佈滿多個平行排列的貫穿孔洞;步驟S12:提供一種或多種金屬粉末,該些金屬粉末的粒徑小於100μm,均勻平舖於該奈米多孔隙基板上;步驟S13:將該奈米多孔隙基板製入一腔體中,並於該腔體中建立一高真空環境;步驟S14:加熱該腔體內部使該些金屬粉末熔融為一金屬熔液;以及步驟S15:加壓該腔體內部的該金屬熔液使灌入該奈米多孔隙基板的該些孔洞壓鑄成形為多個奈米線材。 In order to achieve the above-mentioned object, the present invention discloses a mass production method S1 of nanowires. Please refer to FIG. 1A, including: Step S11: preparing a nanoporous substrate, and the surface of the nanoporous substrate is covered with a plurality of Steps S12: providing one or more metal powders having a particle size of less than 100 μm and evenly spreading on the nanoporous substrate; step S13: making the nanoporous substrate into A cavity, and establish a high vacuum environment in the cavity; step S14: heating the inside of the cavity to melt the metal powder into a molten metal; and step S15: pressurizing the metal inside the cavity The molten metal is die-casted into a plurality of nanowires through the holes filled in the nanoporous substrate.

在一實施例中,製備一奈米多孔隙基板的製程方式S110如圖1B所示,包括:一前處理步驟S111:準備多個鋁箔,去除該些鋁箔的表面雜質後置入一高溫爐中烘烤後取出;一電解拋光步驟S112:該些鋁箔各包覆一銅板, 交叉固定為格子狀後於各該格子中置入一石墨棒並接上正負極導線形成一鋁箔裝置,將該鋁箔裝置置入電解液中通電進行電解拋光後取出;一第一次陽極處理步驟S113:將該鋁箔裝置置入草酸溶液中進行通電,使該些鋁箔表面形成一氧化鋁層後取出;一溶解氧化鋁層步驟S114:將該鋁箔裝置置入氫氧化鈉溶液中,等待該氧化鋁層溶解消失後取出;一第二次陽極處理步驟S115:將該鋁箔裝置再置入草酸溶液中進行通電,使該些鋁箔表面再形成一氧化鋁層後取出;一除去純鋁層步驟S116:將該些鋁箔由該鋁箔裝置上取下,並將該些鋁箔置入由氯化銅、鹽酸及去離子水混合而成的溶液中,等待該些鋁箔底部的純鋁層溶解消失後取出;以及一除去阻障層步驟S117:將該些鋁箔置入氫氧化鈉溶液中,等待該些鋁箔底部的阻障層溶解消失後完成,得到一奈米多孔隙氧化鋁板,該奈米多孔隙基板表面佈滿多個平行排列的貫穿孔洞,該些孔洞之孔徑介於60~80nm,每平方公分約有1012個孔洞。 In an embodiment, the manufacturing method S110 for preparing a nanoporous substrate is shown in FIG. 1B and includes: a pre-processing step S111: preparing a plurality of aluminum foils, removing surface impurities of the aluminum foils, and placing the aluminum foils in a high-temperature furnace Take out after baking; an electrolytic polishing step S112: each of the aluminum foils is covered with a copper plate, cross-fixed in a grid shape, a graphite rod is placed in each of the grids, and positive and negative leads are connected to form an aluminum foil device, and the aluminum foil is The device is placed in an electrolytic solution and electrified for electrolytic polishing. A first anodizing step S113: the aluminum foil device is placed in an oxalic acid solution and energized to form an aluminum oxide layer on the surfaces of the aluminum foils. Step S114 of aluminum layer: put the aluminum foil device into a sodium hydroxide solution, wait for the aluminum oxide layer to dissolve and take it out; a second anodizing step S115: put the aluminum foil device into an oxalic acid solution again to energize, An aluminum oxide layer is formed on the surface of the aluminum foils and taken out; a step S116 of removing the pure aluminum layer: removing the aluminum foils from the aluminum foil device, and placing the aluminum foils in copper chloride, In a solution of hydrochloric acid and deionized water, wait for the pure aluminum layer at the bottom of the aluminum foils to dissolve and remove; and remove the barrier layer step S117: place the aluminum foils in a sodium hydroxide solution and wait for the After the barrier layer at the bottom of the aluminum foil is dissolved and disappeared, a nanoporous alumina plate is obtained. The surface of the nanoporous substrate is covered with a plurality of parallel through holes. There are about 10 12 holes in cm.

在上述的奈米多孔隙基板的製程方式S110中,所述奈米多孔隙基板係透過奈米多孔隙氧化鋁之成長機制製成,其製程裝置及結構示意圖敬請參閱圖2A至圖2D。 In the above-mentioned nanoporous substrate manufacturing method S110, the nanoporous substrate is made through the growth mechanism of nanoporous alumina. For the process device and structure diagram, please refer to FIGS. 2A to 2D.

如圖2A所示,準備2n片鋁箔101,去除該些鋁 箔101的表面雜質後置入一高溫爐中烘烤後取出,該些鋁箔101各包覆一銅板11,並如圖2B所示用剪刀在各該包覆有銅片11的鋁箔101下端剪出n條細縫111,如圖2C交叉固定為格子狀後於各該格子中置入一石墨棒12並接上正負極導線形成一鋁箔裝置10’,將該鋁箔裝置10’置入電解液14中通電進行電解拋光後取出,所述鋁箔裝置10’中的鋁箔101取下後結構如圖2D所示,為具有多個孔洞102的結構,各該孔洞102的孔徑D介於60~80nm,每平方公分約有1012個孔洞102。孔洞102與孔洞102之間係為氧化鋁層10B,於氧化鋁層10B的底部具有一阻障層10D,而於阻障層的下方還有所述鋁箔101尚未被電解反應氧化的純鋁層10C。 As shown in FIG. 2A, 2n pieces of aluminum foil 101 are prepared, and the surface impurities of the aluminum foils 101 are removed. The aluminum foils 101 are baked in a high temperature oven and then taken out. Each of the aluminum foils 101 is covered with a copper plate 11 and used as shown in FIG. 2B. Scissors cut n thin slits 111 at the lower end of each of the aluminum foil 101 covered with the copper sheet 11. As shown in FIG. 2C, they are fixed in a grid pattern. A graphite rod 12 is placed in each grid and the positive and negative lead wires are connected to form a grid. The aluminum foil device 10 'is placed in an electrolytic solution 14 for electrification and electropolishing after the aluminum foil device 10' is removed. The structure of the aluminum foil 101 in the aluminum foil device 10 'after removal is shown in FIG. 2D, which has a plurality of holes 102. Structure, the pore diameter D of each of the holes 102 is between 60 and 80 nm, and there are about 10 12 holes 102 per square centimeter. Between the hole 102 and the hole 102 is an alumina layer 10B. A barrier layer 10D is provided at the bottom of the alumina layer 10B, and a pure aluminum layer of the aluminum foil 101 that has not been oxidized by electrolytic reaction is located below the barrier layer. 10C.

在上述的奈米多孔隙基板的製程方式S110中,所述奈米多孔隙基板係透過奈米多孔隙氧化鋁之成長機制製成,其製程方式包括一前處理步驟S111、一電解拋光步驟S112、一第一次陽極處理步驟S113、一溶解氧化鋁層步驟S114、一第二次陽極處理步驟S115、一除去純鋁層步驟S116以及一除去阻障層步驟S117,其製程裝置及結構示意圖敬請相應參閱圖3A至圖3H。 In the above-mentioned nanoporous substrate manufacturing method S110, the nanoporous substrate is made through a nanoporous alumina growth mechanism, and the manufacturing method includes a pre-processing step S111 and an electrolytic polishing step S112. A first anodizing step S113, a dissolving alumina layer step S114, a second anodizing step S115, a step of removing pure aluminum layer S116, and a step of removing barrier layer S117. Please refer to FIGS. 3A to 3H accordingly.

如圖3A所示,於前處理步驟中,可將所述鋁箔101置於超音波震盪機內,倒入丙酮並震盪約5分鐘,以去除表面雜質;再用去離子水清洗之,並擦拭乾淨。為了減少鋁箔101中的應力以便得到大範圍且整齊排列的孔洞102(如圖2D所示),可將鋁箔101放進高溫爐進行烘烤。 As shown in FIG. 3A, in the pre-processing step, the aluminum foil 101 can be placed in an ultrasonic vibration machine, poured into acetone and shaken for about 5 minutes to remove surface impurities; then washed with deionized water and wiped clean. In order to reduce the stress in the aluminum foil 101 so as to obtain a large range and neatly arranged holes 102 (as shown in FIG. 2D), the aluminum foil 101 may be placed in a high-temperature furnace for baking.

接下來如圖3B所示,於電解拋光步驟中,先以 特定質量比調配14M磷酸、18M硫酸、去離子水,充分混合以作為電解液14。如圖2A至圖2D所示,用鋁箔101完全包覆銅板11,取其中n片,用剪刀在下端剪出n條細縫111;至於另外n片也剪出n條細縫111,以便後續的交叉固定。於該鋁箔101上開一小縫給銅板11銲接上導線,並將鋁箔101與銅板11組合排列成矩陣型式如圖2C所示,石墨棒12置於各板中央並固定於容器底部。石墨棒12接負極,銅板11接正極,緩慢放入電解液14中,其中電解液14之液面不淹沒正極。在室溫下開啟電源,對(n+1)2組並聯的子系統同時施加電壓進行電解,可得到表面極為光滑的鋁箔101,如圖3B所示。 Next, as shown in FIG. 3B, in the electrolytic polishing step, 14M phosphoric acid, 18M sulfuric acid, and deionized water are firstly mixed at a specific mass ratio, and are sufficiently mixed to serve as the electrolytic solution 14. As shown in FIG. 2A to FIG. 2D, the copper plate 11 is completely covered with aluminum foil 101, and n pieces are taken out, and n fine slits 111 are cut at the lower end with scissors; as for the other n pieces, n fine slits 111 are also cut out for subsequent The cross is fixed. A small slit is opened on the aluminum foil 101 to wire the copper plate 11, and the aluminum foil 101 and the copper plate 11 are arranged in a matrix pattern as shown in FIG. 2C. The graphite rod 12 is placed in the center of each plate and fixed to the bottom of the container. The graphite rod 12 is connected to the negative electrode, and the copper plate 11 is connected to the positive electrode. The graphite rod 12 is slowly put into the electrolytic solution 14, wherein the liquid surface of the electrolytic solution 14 does not submerge the positive electrode. Turn on the power at room temperature and apply voltage to two (n + 1) parallel subsystems for electrolysis at the same time to obtain aluminum foil 101 with extremely smooth surface, as shown in Figure 3B.

接下來如圖3C所示,於第一次陽極處理步驟中,先倒入草酸溶液15,將經過拋光的鋁箔裝置10’與石墨棒12分別接上正、負極,按照上述排列方式配置。開啟電源對(n+1)2組並聯的子系統同時施加電壓進行電解,此時鋁箔表面已佈滿一層氧化鋁10A,其厚度與電解時間和電壓成正相關。 Next, as shown in FIG. 3C, in the first anodizing step, the oxalic acid solution 15 is first poured, and the polished aluminum foil device 10 ′ and the graphite rod 12 are respectively connected with the positive electrode and the negative electrode, and are arranged in the above-mentioned arrangement. Turn on the power and apply voltage to two (n + 1) parallel subsystems for electrolysis. At this time, the surface of the aluminum foil has been covered with a layer of alumina 10A, and its thickness is directly related to the electrolysis time and voltage.

接下來如圖3D所示,於第二次陽極處理步驟中,取下鋁箔裝置10’上的鋁箔,浸泡於氫氧化鈉溶液16中,直至氧化鋁層10A消失,留下純鋁層10C。 Next, as shown in FIG. 3D, in the second anodizing step, the aluminum foil on the aluminum foil device 10 'is removed and immersed in the sodium hydroxide solution 16 until the aluminum oxide layer 10A disappears, leaving a pure aluminum layer 10C.

接下來如圖3E所示,沿用第一次陽極處理的裝置,將該鋁箔至於草酸溶液15中進行第二次陽極處理,經過第二次陽極處理的鋁箔上半部為氧化鋁層10B,下半部為較薄的純鋁層10C,其剖面結構如圖2D所示。 Next, as shown in FIG. 3E, the first anodizing apparatus was used. The aluminum foil was subjected to the second anodization in the oxalic acid solution 15. The upper half of the aluminum foil subjected to the second anodization was the alumina layer 10B. The half is a thinner pure aluminum layer 10C, and its cross-sectional structure is shown in FIG. 2D.

接下來如圖3F所示,於除去純鋁層步驟中,將鋁箔再浸入以特定質量比混合氯化銅、10wt%鹽酸、去離子水 所組成的混合溶液17中除去純鋁層10C,此時的鋁箔底部為氧化鋁阻障層10D所封閉,而頂部則佈滿蜂巢狀且平行排列的孔洞102,其孔徑D可達60~80nm,其分佈形態如圖2D所示。 Next, as shown in FIG. 3F, in the step of removing the pure aluminum layer, the aluminum foil is immersed in a mixed solution 17 composed of copper chloride, 10 wt% hydrochloric acid, and deionized water in a specific mass ratio to remove the pure aluminum layer 10C. At the time, the bottom of the aluminum foil was closed by the alumina barrier layer 10D, and the top was covered with honeycomb-shaped and parallel-arranged holes 102, the diameter D of which can reach 60 ~ 80nm, and its distribution form is shown in FIG. 2D.

接下來如圖3G所示,進行除去阻障層步驟,於此一步驟中,除去純鋁層10C後將裸露出氧化鋁阻障層10D,可用氫氧化鈉溶液16腐蝕之,得到上下貫穿的奈米多孔隙基板10,如圖3H所示。於圖3H中,奈米多孔隙基板10每平方公分約有1012個孔洞102,該些孔洞102之孔徑D介於60~80nm。 Next, as shown in FIG. 3G, a step of removing the barrier layer is performed. In this step, after removing the pure aluminum layer 10C, the alumina barrier layer 10D is exposed and can be etched with a sodium hydroxide solution 16 to obtain a vertical penetration. The nanoporous substrate 10 is shown in FIG. 3H. In FIG. 3H, the nanoporous substrate 10 has about 10 12 holes 102 per square centimeter, and the pore diameter D of these holes 102 is between 60 and 80 nm.

本發明同時提供一種奈米線材的製造裝置,用以量產製造奈米線材,請參閱圖4A及圖4B,其結構包括:一腔體30,該腔體30內部具有一容置空間30’;一奈米多孔隙基板10,該奈米多孔隙基板10表面佈滿多個平行排列的孔洞102(如圖3G所示),該些孔洞102之孔徑介於60~80nm,每平方公分約有1012個孔洞102,該奈米多孔隙基板10放置於該腔體30內部的該容置空間30’;一種或多種金屬粉末20’,該些金屬粉末20’的粒徑小於100μm,均勻平舖於該奈米多孔隙基板10上;一幫浦單元301,用以抽吸或通入氣體於該腔體30內部,改變該腔體30內部的氣體種類及氣體壓力;一溫度控制單元300,用以加熱該腔體30內部的溫度,使置於該腔體30內部的奈米多孔隙基板10上的該些金屬粉末20’熔融為一金屬熔液20;一壓鑄單元302,用以加壓該金屬熔液20使灌入該奈米多孔隙基板10的該些孔洞102(如圖3G所示),壓鑄成形為多個奈米線材1。 The present invention also provides a nanowire manufacturing device for mass-producing nanowires. Please refer to FIGS. 4A and 4B. The structure includes a cavity 30 having an accommodating space 30 'therein. A nanoporous substrate 10, the surface of the nanoporous substrate 10 is covered with a plurality of holes 102 arranged in parallel (as shown in FIG. 3G), and the pores 102 have a pore diameter of 60 ~ 80nm, each square centimeter is about There are 10 12 holes 102. The nanoporous substrate 10 is placed in the accommodating space 30 'inside the cavity 30; one or more metal powders 20', and the particle sizes of the metal powders 20 'are less than 100 μm, uniform. Tiled on the nanoporous substrate 10; a pump unit 301 for sucking or passing gas into the cavity 30 to change the gas type and gas pressure inside the cavity 30; a temperature control unit 300, for heating the temperature inside the cavity 30, to melt the metal powders 20 'on the nanoporous substrate 10 inside the cavity 30 into a metal melt 20; a die-casting unit 302, By pressing the metal melt 20, the holes 102 (such as 3G shown), a plurality of die casting is the wire rod 1 nm.

在一實施例中,所述一種或多種金屬粉末20’包 括有鉛粉20A、錫粉20B以及鉍粉20C;其中,該些鉛粉20A、錫粉20B及鉍粉20C的質量比為21.12:36.29:42.59。 In one embodiment, the one or more metal powders 20 'include a lead powder 20A, a tin powder 20B, and a bismuth powder 20C; wherein the mass ratio of the lead powder 20A, tin powder 20B, and bismuth powder 20C is 21.12: 36.29: 42.59.

在一實施例中,該幫浦單元係為機械幫浦,用以將腔體內的氣體抽吸至0.05托耳,再通入氬氣30A達760托耳,再將腔體內的氣體抽吸至0.05托耳,再通入氬氣30A達760托耳,將腔體內的氣體抽吸至0.05托耳。 In an embodiment, the pump unit is a mechanical pump, which is used to suck the gas in the cavity to 0.05 Torr, and then pass 30A of argon to 760 Torr, and then suck the gas in the cavity to 0.05 Torr, and then argon gas 30A to 760 Torr, the gas in the cavity was sucked to 0.05 Torr.

在一實施例中,該溫度控制單元300加熱該腔體30直到攝氏360度,並維持20分鐘使該些金屬粉末20’熔融為該金屬熔液20,加熱該些金屬粉末20’熔融為該金屬熔液20的過程中,對該金屬熔液20進行轉動及攪拌。 In one embodiment, the temperature control unit 300 heats the cavity 30 until 360 degrees Celsius, and maintains the metal powder 20 'to melt into the metal melt 20 for 20 minutes, and heats the metal powder 20' to melt into the During the process of the molten metal 20, the molten metal 20 is rotated and stirred.

在一實施例中,該壓鑄單元為一可程式邏輯控制壓鑄機台,用以加壓該腔體30內部的該金屬熔液20使灌入該奈米多孔隙基板10的多個孔洞102(如圖3G所示)壓鑄成形為多個奈米線材1。 In an embodiment, the die-casting unit is a programmable logic-controlled die-casting machine table for pressurizing the molten metal 20 inside the cavity 30 to fill the plurality of holes 102 of the nanoporous substrate 10 ( As shown in FIG. 3G), a plurality of nanowires 1 are formed by die-casting.

在一實施例中,本發明的製造方法S1A更可如圖5所示,於圖1A的步驟S15後進行一熱處理程序步驟S16,使該些奈米線材形成多個單晶奈米線材。 In an embodiment, the manufacturing method S1A of the present invention may be as shown in FIG. 5. After step S15 in FIG. 1A, a heat treatment process step S16 is performed to form the nanowires into a plurality of single crystal nanowires.

本發明還提供一種單晶奈米線材,應用於氣體感測器,其成分包括:質量比21.12%的鉛粉、質量比36.29%的錫粉以及質量比42.59%的鉍粉,線徑介於60~80nm。 The invention also provides a single crystal nano wire, which is applied to a gas sensor. The composition includes: lead powder with a mass ratio of 21.12%, tin powder with a mass ratio of 36.29%, and bismuth powder with a mass ratio of 42.59%. 60 ~ 80nm.

亦即,本發明提出一種單晶奈米線材的量產製造方法S2,包括:步驟S21:製備一奈米多孔隙氧化鋁基板,該奈米多孔隙氧化鋁基板表面佈滿多個平行排列的貫穿孔洞,該些 貫穿孔洞的孔徑介於60~80nm,每平方公分約有1012個貫穿孔洞;步驟S22:提供鉛、錫以及鉍三種金屬粉末,該些鉛粉、錫粉及鉍粉的質量比為鉛粉21.12%、錫粉36.29%、鉍粉42.59%,該些金屬粉末的粒徑小於100μm,均勻平舖於該奈米多孔隙氧化鋁基板上;步驟S23:將該奈米多孔隙氧化鋁基板製入一腔體中,並於該腔體中利用一機械幫浦將腔體內的氣體抽吸至0.05托耳,再通入氬氣達760托耳,再將腔體內的氣體抽吸至0.05托耳,再通入氬氣達760托耳,將腔體內的氣體抽吸至0.05托耳以建立一高真空環境;步驟S24:加熱該腔體內部至360度並維持20分鐘使該些金屬粉末熔融為一金屬熔液,加熱該些金屬粉末熔融為該金屬熔液的過程中,對該金屬熔液進行轉動及攪拌;步驟S25:使用一可程式邏輯控制壓鑄機台加壓該腔體內部的該金屬熔液使灌入該奈米多孔隙氧化鋁基板的該些孔洞壓鑄成形為多個奈米線材;步驟S26:對該些奈米線材以攝氏120度進行96小時的退火處理;以及步驟S27:對該些奈米線材以攝氏零度以下進行1小時的淬火處理形成多個單晶奈米線材。 That is, the present invention proposes a method S2 for mass production of single crystal nanowires, including: Step S21: preparing a nanoporous alumina substrate, and the surface of the nanoporous alumina substrate is covered with a plurality of parallel-arranged Through-holes, the pore diameters of these through-holes range from 60 to 80 nm, and there are about 10 12 through-holes per square centimeter; step S22: providing three metal powders of lead, tin, and bismuth. The mass ratio is 21.12% of lead powder, 36.29% of tin powder, and 42.59% of bismuth powder. The particle size of these metal powders is less than 100 μm, and they are evenly spread on the nanoporous alumina substrate. The porous alumina substrate is made into a cavity, and a mechanical pump is used in the cavity to suck the gas in the cavity to 0.05 Torr, and then pass argon to 760 Torr, and then the gas in the cavity Suction to 0.05 Torr, and then pass argon to 760 Torr, draw the gas in the cavity to 0.05 Torr to establish a high vacuum environment; step S24: heat the interior of the cavity to 360 degrees and maintain for 20 minutes Melting the metal powder into a molten metal, heating the metals During the process of melting the powder into the molten metal, the molten metal is rotated and stirred; step S25: a programmable logic control die-casting machine is used to pressurize the molten metal inside the cavity to fill the nanometer. The holes of the porous alumina substrate are die-cast into a plurality of nanowires; step S26: the nanowires are annealed at 120 degrees Celsius for 96 hours; and step S27: the nanowires are subjected to Celsius A single hour quenching treatment was performed below zero to form a plurality of single crystal nanowires.

本發明所製造的奈米線材應用於氣體感測機制中時,位於顆粒表面上的原子與位於顆粒內部的原子之比值隨著顆粒變小而增加,導致表層原子容易偏離晶格位置,散亂到類 似於氣態,此現象稱為表面效應(surface effect)。由於奈米材料的表面效應,使內外層原子之間的鍵結力減弱,故表層原子極易與氣體分子的凡德瓦力產生化學鍵結,進而吸附氣體分子。若吸附過程是還原反應,則將降低表面能障,有助於電子流通,減少電阻。相反地,若吸附的是氧化性氣體,則將增加電阻。因此,可藉由電阻量測驗證奈米材料吸附特定氣體分子的能力。 When the nanowire manufactured by the present invention is applied to a gas sensing mechanism, the ratio of atoms located on the surface of the particles to atoms located inside the particles increases as the particles become smaller, causing the surface atoms to easily deviate from the lattice position and scatter. To a gaseous state, this phenomenon is called surface effect. Due to the surface effect of nanomaterials, the bonding force between the inner and outer layer atoms is weakened. Therefore, the surface layer atoms are likely to chemically bond with the van der Waals force of gas molecules, and then adsorb gas molecules. If the adsorption process is a reduction reaction, it will reduce the surface energy barrier, help electrons flow, and reduce resistance. Conversely, if an oxidizing gas is adsorbed, the resistance will increase. Therefore, resistance measurement can be used to verify the ability of nanomaterials to adsorb specific gas molecules.

上述本發明所採用的技術手段之實施方式或實施例,並非用來限定本發明專利實施之範圍。即凡與本發明專利申請範圍文義相符,或依本發明專利範圍所做的均等變化與修飾,皆為本發明專利範圍所涵蓋。 The foregoing implementation manners or embodiments of the technical means adopted by the present invention are not intended to limit the scope of patent implementation of the present invention. That is, all changes and modifications that are consistent with the meaning of the scope of patent application of the present invention, or made according to the scope of patent of the present invention, are covered by the scope of patent of the present invention.

Claims (10)

一種奈米線材的量產製造方法,包括:製備一奈米多孔隙基板,該奈米多孔隙基板表面佈滿多個平行排列的貫穿孔洞;提供一種或多種金屬粉末,該些金屬粉末的粒徑小於100μm,均勻平舖於該奈米多孔隙基板上;將該奈米多孔隙基板製入一腔體中,並於該腔體中建立一高真空環境;加熱該腔體內部使該些金屬粉末熔融為一金屬熔液;以及加壓該腔體內部的該金屬熔液使灌入該奈米多孔隙基板的該些孔洞壓鑄成形為多個奈米線材。     A method for mass production of nanowires includes: preparing a nanoporous substrate, and the surface of the nanoporous substrate is covered with a plurality of through-holes arranged in parallel; and one or more metal powders are provided. The diameter is less than 100 μm, evenly spread on the nanoporous substrate; the nanoporous substrate is made into a cavity, and a high vacuum environment is established in the cavity; the interior of the cavity is heated to make the The metal powder is melted into a metal melt; and the metal melt inside the cavity is pressurized, so that the holes filled in the nanoporous substrate are die-cast into a plurality of nanowires.     如申請專利範圍第1項所述的奈米線材的量產製造方法,其中,製備一奈米多孔隙基板的製程方式為:一前處理步驟:準備多個鋁箔,去除該些鋁箔的表面雜質後置入一高溫爐中烘烤後取出;一電解拋光步驟:該些鋁箔各包覆一銅板,交叉固定為格子狀後於各該格子中置入一石墨棒並接上正負極導線形成一鋁箔裝置,將該鋁箔裝置置入電解液中通電進行電解拋光後取出;一第一次陽極處理步驟:將該鋁箔裝置置入草酸溶液中進行通電,使該些鋁箔表面形成一氧化鋁層後取出;一溶解氧化鋁層步驟:將該鋁箔裝置置入氫氧化鈉溶液 中,等待該氧化鋁層溶解消失後取出;一第二次陽極處理步驟:將該鋁箔裝置再置入草酸溶液中進行通電,使該些鋁箔表面再形成一氧化鋁層後取出;一除去純鋁層步驟:將該些鋁箔由該鋁箔裝置上取下,並將該些鋁箔置入由氯化銅、鹽酸及去離子水混合而成的溶液中,等待該些鋁箔底部的純鋁層溶解消失後取出;以及一除去阻障層步驟:將該些鋁箔置入氫氧化鈉溶液中,等待該些鋁箔底部的阻障層溶解消失後完成,得到一奈米多孔隙氧化鋁板,該奈米多孔隙基板表面佈滿多個平行排列的貫穿孔洞,該些孔洞之孔徑介於60~80nm,每平方公分約有10 12個孔洞。 According to the mass production and manufacturing method of nanowires according to item 1 of the scope of patent application, the method for preparing a nanoporous substrate is: a pretreatment step: preparing multiple aluminum foils to remove surface impurities of the aluminum foils It is then placed in a high-temperature furnace and then taken out after baking; an electrolytic polishing step: each of the aluminum foils is coated with a copper plate, cross-fixed into a grid shape, and a graphite rod is placed in each of the grids, and positive and negative lead wires are connected to form a An aluminum foil device, which is placed in an electrolytic solution and electrified for electrolytic polishing, and then taken out; a first anodizing step: the aluminum foil device is placed in an oxalic acid solution to be energized, and an aluminum oxide layer is formed on the surfaces of the aluminum foils Take out; a step of dissolving the alumina layer: put the aluminum foil device into a sodium hydroxide solution, wait for the alumina layer to dissolve and take it out; a second anodizing step: put the aluminum foil device into an oxalic acid solution again Apply electricity to make an aluminum oxide layer on the surface of the aluminum foils and take it out; a step of removing the pure aluminum layer: remove the aluminum foils from the aluminum foil device and place the aluminum foils into In a solution of copper chloride, hydrochloric acid, and deionized water, wait for the pure aluminum layer at the bottom of the aluminum foils to dissolve and remove; and remove the barrier layer: put the aluminum foils into a sodium hydroxide solution. Wait for the barrier layer at the bottom of the aluminum foil to dissolve and disappear to complete a nanoporous alumina plate. The surface of the nanoporous substrate is covered with a plurality of parallel through holes, and the pores have a pore diameter of 60 ~ 80nm. There are about 10 12 holes per square centimeter. 如申請專利範圍第1項所述的奈米線材的量產製造方法,其中,所述一種或多種金屬粉末包括有鉛粉、錫粉以及鉍粉,該些鉛粉、錫粉及鉍粉的質量比為鉛粉21.12%、錫粉36.29%、鉍粉42.59%。     The method for mass-producing nanowires according to item 1 of the scope of patent application, wherein the one or more metal powders include lead powder, tin powder, and bismuth powder. The mass ratio is 21.12% of lead powder, 36.29% of tin powder, and 42.59% of bismuth powder.     如申請專利範圍第1項所述的奈米線材的量產製造方法,其中,建立該高真空環境的方式是利用一機械幫浦將腔體內的氣體抽吸至0.05托耳,再通入氬氣達760托耳,再將腔體內的氣體抽吸至0.05托耳,再通入氬氣達760托耳,將腔體內的氣體抽吸至0.05托耳。     The mass production manufacturing method of nanowires as described in the first item of the patent application scope, wherein the way to establish the high vacuum environment is to use a mechanical pump to suck the gas in the cavity to 0.05 Torr, and then pass argon The gas in the cavity is 760 Torr, and then the gas in the cavity is sucked to 0.05 Torr, and then the argon gas is sucked in to 760 Torr, and the gas in the cavity is sucked to 0.05 Torr.     如申請專利範圍第1項所述的奈米線材的量產製造方法,其中,加熱該腔體直到攝氏360度,並維持20分鐘使該些金屬粉末熔融為該金屬熔液,加熱該些金屬粉末熔融為該金屬熔液的過程中,對該金屬熔液進行轉動及攪拌。     The mass production manufacturing method for nanowires according to item 1 of the scope of patent application, wherein the cavity is heated to 360 degrees Celsius, and the metal powder is melted into the metal melt for 20 minutes, and the metals are heated During the process of melting the powder into the molten metal, the molten metal is rotated and stirred.     如申請專利範圍第1項所述的奈米線材的量產製造方法,其中,使用一可程式邏輯控制壓鑄機台加壓該腔體內部的該金屬熔液使灌入該奈米多孔隙基板的多個孔洞壓鑄成形為多個奈米線材。     The mass production manufacturing method for nanowires according to item 1 of the scope of patent application, wherein a programmable logic-controlled die-casting machine is used to pressurize the metal melt inside the cavity to fill the nanoporous substrate. The multiple holes are die-cast into multiple nano wires.     如申請專利範圍第1項所述的奈米線材的量產製造方法,其中,壓鑄成形為多個奈米線材後更包括進行一熱處理程序,使該些奈米線材形成多個單晶奈米線材。     The method for mass production of nanowires according to item 1 of the scope of patent application, wherein, after die-casting into a plurality of nanowires, a heat treatment process is performed to form the nanowires into a plurality of single-crystal nanometers. Wire.     如申請專利範圍第7項所述的奈米線材的量產製造方法,其中,該熱處理程序包括一第一熱處理程序以及一第二熱處理程序,該第一熱處理程序為以攝氏120度進行96小時的退火處理,該第二熱處理程序為以攝氏零度以下進行1小時的淬火處理。     The mass production manufacturing method of nanowires according to item 7 of the scope of patent application, wherein the heat treatment process includes a first heat treatment process and a second heat treatment process, and the first heat treatment process is performed at 120 ° C for 96 hours. Annealing treatment, the second heat treatment program is a quenching treatment at zero degrees Celsius or less for 1 hour.     一種單晶奈米線材的量產製造方法,包括:製備一奈米多孔隙氧化鋁基板,該奈米多孔隙氧化鋁基板表面佈滿多個平行排列的貫穿孔洞,該些貫穿孔洞的孔徑介於60~80nm,每平方公分約有10 12個貫穿孔洞;提供鉛、錫以及鉍三種金屬粉末,該些鉛粉、錫粉及鉍粉的質量比為鉛粉21.12%、錫粉36.29%、鉍粉42.59%,該些金屬粉末的粒徑小於100μm,均勻平舖於該奈米多孔隙氧化鋁基板上;將該奈米多孔隙氧化鋁基板製入一腔體中,並於該腔體中利用一機械幫浦將腔體內的氣體抽吸至0.05托耳,再通入氬氣達760托耳,再將腔體內的氣體抽吸至0.05托耳,再通入氬氣達760托耳,將腔體內的氣體抽吸至0.05托耳以建立 一高真空環境;加熱該腔體內部至360度並維持20分鐘使該些金屬粉末熔融為一金屬熔液,加熱該些金屬粉末熔融為該金屬熔液的過程中,對該金屬熔液進行轉動及攪拌;使用一可程式邏輯控制壓鑄機台加壓該腔體內部的該金屬熔液使灌入該奈米多孔隙氧化鋁基板的該些孔洞壓鑄成形為多個奈米線材;對該些奈米線材以攝氏120度進行96小時的退火處理;以及對該些奈米線材以攝氏零度以下進行1小時的淬火處理形成多個單晶奈米線材。 A method for mass production of single-crystal nanowires includes preparing a nanoporous alumina substrate, and the surface of the nanoporous alumina substrate is covered with a plurality of parallel-arranged through-holes. At 60 ~ 80nm, there are about 10 12 through holes per square centimeter; three metal powders of lead, tin and bismuth are provided. The mass ratio of these lead powder, tin powder and bismuth powder is 21.12% of lead powder, 36.29% of tin powder, Bismuth powder is 42.59%. The particle size of these metal powders is less than 100 μm, and they are evenly spread on the nanoporous alumina substrate. The nanoporous alumina substrate is made into a cavity and placed in the cavity. A mechanical pump is used to suck the gas in the cavity to 0.05 Torr, and then pass argon to 760 Torr, and then suck the gas in the cavity to 0.05 Torr, and then pass argon to 760 Torr. The gas in the cavity is pumped to 0.05 Torr to establish a high vacuum environment; the inside of the cavity is heated to 360 degrees and maintained for 20 minutes to melt the metal powders into a metal melt, and heat the metal powders to melt into In the process of the metal melt, the metal melt is transferred. And stirring; using a programmable logic-controlled die-casting machine to pressurize the metal melt inside the cavity to die-cast the holes filled into the nanoporous alumina substrate into a plurality of nano-wires; The nanowires are annealed at 120 degrees Celsius for 96 hours; and the nanowires are quenched at zero degrees Celsius for 1 hour to form a plurality of single crystal nanowires. 一種奈米線材的製造裝置,用以量產製造奈米線材,其結構包括:一腔體,該腔體內部具有一容置空間;一奈米多孔隙基板,該奈米多孔隙基板表面佈滿多個平行排列的孔洞,該些孔洞之孔徑介於60~80nm,每平方公分約有10 12個孔洞,該奈米多孔隙基板放置於該腔體內部的該容置空間;一種或多種金屬粉末,該些金屬粉末的粒徑小於100μm,均勻平舖於該奈米多孔隙基板上;一幫浦單元,用以抽吸或通入氣體於該腔體內部,改變該腔體內部的氣體種類及氣體壓力;一溫度控制單元,用以加熱該腔體內部的溫度,使置於該腔體內部的奈米多孔隙基板上的該些金屬粉末熔融為一 金屬熔液;一壓鑄單元,用以加壓該金屬熔液使灌入該奈米多孔隙基板的該些孔洞,壓鑄成形為多個奈米線材。 A nano-wire manufacturing device is used for mass-producing nano-wires. The structure includes: a cavity having an accommodation space inside the cavity; a nano-porous substrate; and a surface of the nano-porous substrate. Filled with a plurality of holes arranged in parallel, the pores having a pore diameter ranging from 60 to 80 nm, and about 10 12 holes per square centimeter, the nanoporous substrate is placed in the accommodation space inside the cavity; one or more Metal powder with a particle size of less than 100 μm, evenly spread on the nanoporous substrate; a pump unit for sucking or passing gas into the cavity to change the inside of the cavity Gas type and gas pressure; a temperature control unit for heating the temperature inside the cavity to melt the metal powders on the nanoporous substrate inside the cavity into a molten metal; a die casting unit Is used to pressurize the metal melt to fill the holes of the nanoporous substrate, and die-cast into a plurality of nanowires.
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