TW201831913A - Electronic component conveying apparatus and electronic component inspection apparatus having a conveying unit, a first holding unit, and an inspection unit that performs the first inspection for improving its units per hour - Google Patents

Abstract

The topic of the present invention is to provide an electronic component conveying apparatus and an electronic component inspection apparatus to improve its UPH (units per hour). An electronic component conveying apparatus of the present invention includes: a conveying unit that can convey electronic components; and a first holding unit that can hold electronic components; and an inspection unit that performs the first inspection of the electronic component and the second inspection different from the first inspection, the inspection unit performs the first inspection on the electronic component, when the result of the first inspection satisfies a predetermined condition, the second inspection is performed on the electronic component that has undergone the first inspection, if the result of the first inspection does not satisfy the predetermined condition, the second inspection is not performed on the electronic component that has undergone the first inspection, but the first inspection is performed on the other electronic component that has not undergone the first inspection.

Description

Electronic component transfer device and electronic component inspection device

The present invention relates to an electronic component transfer device and an electronic component inspection device.

At present, fingerprint identification devices are widely used for the identification and confirmation of personal identities such as building access control management, mobile devices, or personal computers. In a fingerprint recognition device, a fingerprint recognition electronic part is used to detect a user's fingerprint image, and the fingerprint image is compared with a sample fingerprint image in a database to identify the user's identity. A plurality of electrical connectors are provided on the bottom surface of the fingerprint identification electronic part, and a detection portion capable of detecting fingerprints is provided on the top surface. Since the fingerprint identification electronic parts are manufactured through a plurality of steps, in order to ensure the quality of shipment, those skilled in the art, after the production of the fingerprint identification electronic parts, finishes, the fingers (fingerprint) and the fingerprint identification electronic parts are not related by the electronic part inspection device. Check the state of contact and the state of finger (fingerprint) contact to eliminate defective products. For example, there is a disclosure that classifies electronic components (CCD (Charge Coupled Device) sensors) based on a plurality of inspection results (for example, refer to Patent Document 1). In addition, when inspecting electronic components (CCD sensors), it is disclosed that the inspection is performed with or without light irradiation (for example, refer to Patent Document 2). There is also a disclosure that an electronic component (CCD sensor) is inspected by a plurality of inspection items (for example, refer to Patent Document 3). [Prior Art Literature] [Patent Literature] [Patent Literature 1] Japanese Patent Laid-Open No. 2010-78408 [Patent Literature 2] Japanese Patent Laid-Open No. 2008-135211 [Patent Literature 3] Japanese Patent Laid-Open No. 2006-317280 Bulletin

[Problems to be Solved by the Invention] However, in Patent Documents 1 to 3, a plurality of different inspections are not performed continuously, and the existence of the next inspection is judged based on the quality of the previous inspection results. [Technical means for solving the problem] The present invention has been completed in order to solve at least a part of the problems described above, and can be implemented as the following forms or application examples. [Application Example 1] The electronic component transfer device of this application example is characterized in that it has a transfer section that can transfer electronic components, and a first holding section that can hold the electronic components, and can be configured to perform the first inspection on the electronic components. And a second inspection section different from the first inspection, the inspection section performs the first inspection on the electronic component, and when the result of the first inspection satisfies a predetermined condition, the first inspection is performed. The electronic component under inspection is subject to the above-mentioned second inspection. When the result of the first inspection does not satisfy the above-mentioned predetermined conditions, the above-mentioned second inspection is not performed on the electronic parts that have undergone the first inspection, and The aforementioned first inspection is performed on the other electronic components in the aforementioned first inspection. According to this application example, if the result of the first inspection does not satisfy a predetermined condition, the second inspection may be continued without carrying out the transportation. In this way, different inspections of an electronic part can be performed simultaneously and continuously, thereby improving processing capacity (UPH; Units Per Hour). The predetermined condition is, for example, that a defect (defect) of the electronic component is eliminated by executing an inspection program for performing an inspection operation on the electronic component. [Application Example 2] In the electronic component conveying device described in the above application example, it is preferable that at least one of the first inspection and the second inspection is performed a plurality of times. According to this application example, a correct inspection can be performed. [Application Example 3] In the electronic component transporting device described in the above application example, it is preferable that the first inspection is an inspection that does not apply a physical action to the electronic part, and the second inspection is that that applies the physical action to the electronic part. Its check. According to this application example, an inspection for applying a physical action to an electronic part can be performed. [Application Example 4] In the electronic component transporting device described in the above application example, the physical action is preferably at least one of light and electric charge. According to this application example, it is possible to easily perform a physical inspection. [Application Example 5] In the electronic component transfer device described in the above application example, it is preferable that the first inspection is an inspection of a state where a finger (fingerprint) and the electronic component are not connected, and the second inspection is an inspection of the finger ( Fingerprint) Inspection of the state of connection with the above electronic parts. According to this application example, the state where the finger (fingerprint) is not connected to the electronic parts and the state where the finger (fingerprint) is connected can be checked. [Application Example 6] In the electronic component transporting device described in the above application example, it is preferable that the second holding portion has a structure different from that of the first holding portion. According to this application example, a holding section dedicated to inspecting the environment may be provided. [Application Example 7] In the electronic component conveying device described in the above application example, it is preferable that the first holding section includes a fingerprint substitute member used in place of a fingerprint pattern of a finger during fingerprint comparison, and the second holding section The unit does not include the above-mentioned fingerprint substitute member. According to this application example, it is possible to provide a second holding section for inspecting the environment. [Application Example 8] The electronic component transporting device of this application example is characterized by having a first holding portion that can hold the electronic component, and a second holding portion that can hold the electronic component, which is different from the first holding portion. Structure; and an inspection unit having a mounting part on which the electronic parts are placed and capable of inspecting the electronic parts may be arranged; the first holding part transports the electronic parts to the mounting part and is placed on the loading part The placement part and the second holding part are after the first holding part puts the electronic component on the placing part, and then presses the electronic part to perform a specific inspection. According to this application example, it is possible to provide a second holding section for inspecting the environment. Therefore, it can respond to the inspection of electronic parts with different shapes. Moreover, even if it is a structure where an electronic component cannot be adsorbed by a 2nd holding | maintenance part, an electronic component can be conveyed by the 1st holding | maintenance part which mounts an electronic component on a mounting part. [Application Example 9] In the electronic component transporting device described in the application example, it is preferable that the first holding portion has a suction mechanism, and the second holding portion does not include the suction mechanism. According to this application example, it is possible to provide a second holding section for inspecting the environment. [Application Example 10] In the electronic component transporting device described in the above application example, it is preferable that the second holding portion includes a terminal for performing electrical inspection. According to this application example, it is possible to provide a second holding section for inspecting the environment. [Application Example 11] The electronic component inspection device of this application example is characterized in that it includes a transfer section that can transport electronic components, a first holding section that can hold the electronic components, and an inspection section that performs the first electronic component inspection. The inspection and a second inspection different from the first inspection; and the inspection unit performs the first inspection on the electronic parts, and when the result of the first inspection satisfies a predetermined condition, the first inspection is performed. The electronic component under inspection is subject to the above-mentioned second inspection. When the result of the first inspection does not satisfy the above-mentioned predetermined conditions, the above-mentioned second inspection is not performed on the electronic parts that have undergone the first inspection, and The aforementioned first inspection is performed on the other electronic components in the aforementioned first inspection. According to this application example, if the result of the first inspection does not satisfy a predetermined condition, it is possible to continue the conveyance without performing the second inspection. As a result, different inspections can be performed on one electronic part simultaneously and continuously, thereby improving processing capacity (UPH).

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the drawings used are appropriately enlarged or reduced in order to make the description part recognizable. (First Embodiment) FIG. 1 is a schematic plan view showing the structure of an IC processor according to this embodiment, and it is a diagram showing an electronic component transfer including a transfer unit having a fingerprint identification electronic component 74 that can be transferred as an electronic component of this embodiment. An example of the device using an IC processor as an electronic component inspection device. The IC processor of this embodiment includes a supply tray 82, a recovery tray 86, an inspection unit 10, a measurement robot 20, a supply robot 90, a recovery robot 92, and a control device (not shown) on the base 80. The supply tray 82 is provided with at least one cavity (not shown) for placing at least one fingerprint identification electronic component 74 to be inspected. The supply-side robot hand unit 94 of the supply robot 90 takes out the fingerprint identification electronic component 74 from the bag portion and transfers it to the shuttles 62 and 68. The fingerprint identification electronic component 74 includes a detection unit 78 that detects a physical action. The physical action means, for example, at least any one of light, charge, pressure, sound, temperature, vibration, electric field change, and magnetic field change. The inspection section 10 is provided with an inspection circuit board 12 (see FIG. 2) having an inspection socket 14 as at least one placement section. The inspection unit 10 inspects the fingerprint identification electronic component 74. At least one mounting portion on which the fingerprint identification electronic component 74 is mounted is provided on the shuttles 62 and 68. In the present embodiment, a first placement section 64 and a third placement section 70 for placing fingerprint identification electronic components 74 before inspection are provided on the supply robot 90 side of the inspection section 10. On the recovery robot 92 side of the inspection unit 10, a second placement unit 66 and a fourth placement unit 72 for placing the fingerprint identification electronic component 74 that has been inspected are placed. The first placing section 64 and the third placing section 70 put the fingerprint identification electronic parts 74 before the inspection by the supply-side robot hand unit 94 of the supply robot 90, and transfer the fingerprint identification electronic parts 74 before the inspection to the inspection section. 10 sides. FIG. 2 is a schematic front view showing the structure of the measurement robot 20 according to this embodiment. The measurement robot 20 is provided with a pressing and holding portion 34 that is displaced at least in one direction. The holding portion 34 is pressed to put the fingerprint identification electronic component 74 into or from the inspection socket 14, and the fingerprint identification electronic component 74 is brought into contact with the inspection socket 14. Further, a pressing measurement member 48 is provided in the pressing holding portion 34 so as to be displaceable, and abuts on the detecting portion 78 of the fingerprint identification electronic component 74. The conveyance section of this embodiment includes a pressing and holding section 34 as a first holding section capable of holding the fingerprint identification electronic component 74. The electronic component transfer device may be provided with an inspection unit 10 that performs a first inspection of the fingerprint identification electronic component 74 and a second inspection different from the first inspection. When the inspection unit 10 performs the first inspection on the fingerprint identification electronic component 74 and when the result of the first inspection satisfies a predetermined condition, the inspection unit 10 performs the second inspection on the fingerprint identification electronic component 74 that has undergone the first inspection. When the result of the first inspection does not satisfy the predetermined conditions, the inspection unit 10 does not perform the second inspection on the fingerprint identification electronic parts 74 that have been subjected to the first inspection, and other fingerprint identification electronic parts 74 that have not undergone the first inspection. Perform the first inspection. The predetermined condition in this embodiment means that a defect (defect) of the fingerprint identification electronic component 74 is eliminated by executing an inspection program that performs an inspection operation on the fingerprint identification electronic component 74. The IC processor according to this embodiment includes a pressing holding portion 34 capable of holding the fingerprint identification electronic component 74 and an inspection portion 10 that performs a first inspection and a second inspection different from the first inspection on the fingerprint identification electronic component 74. At least one of the first inspection and the second inspection may be performed a plurality of times. Accordingly, a correct inspection can be performed. For example, in the case of conducting multiple inspections, it is possible to comprehensively determine whether they have passed or failed. The first inspection is an inspection in which no physical action is applied to the fingerprint identification electronic component 74. The second inspection is an inspection that exerts a physical action on the fingerprint identification electronic component 74. According to this, it is possible to perform an inspection that exerts a physical effect on the fingerprint identification electronic component 74. The physical effect may be at least any of light and charge. This makes it easy to perform a physical inspection. The first inspection is an inspection of a state where the finger (fingerprint) and the detection section 78 of the fingerprint identification electronic component 74 are not connected. The second inspection is an inspection of the state where the finger (fingerprint) is in contact with the detection section 78 of the fingerprint identification electronic component 74. According to this, the state where the finger (fingerprint) is not connected to the detection part 78 of the fingerprint identification electronic component 74 and the state where the finger (fingerprint) is connected can be checked. The inspection unit 10 is provided with an inspection circuit board 12 having at least one inspection socket 14 and an inspection fingerprint identification electronic component 74. In the present embodiment, a plurality of probes 18 electrically connected to the inspection circuit board 12 are disposed in the inspection socket 14 and electrically connected to an electrical connector 76 of the fingerprint identification electronic component 74. The electrical connector 76 may be a solder ball or a connection pin. The measurement robot 20 is provided with a pressing and holding portion 34 that is displaced in at least one direction. The holding portion 34 is pressed to pick up and place the fingerprint identification electronic component 74 on the inspection socket 14, and abut the non-detected portion of the fingerprint identification electronic component 74 in the inspection socket 14. In the present embodiment, the measurement robot 20 is provided with a transfer device 32 that moves in a first direction and a second direction (for example, the Z direction and the Y direction). A pressing and holding portion 34 is attached to the transfer device 32. One end of the pressing and holding portion 34 is mounted on the bottom of the transfer device 32. A pressing transfer member 36 is provided at the other end and abuts on a non-detection portion of the fingerprint identification electronic component 74. A plurality of suction portions 38 are provided on the bottom surface of the pressing transfer member 36 to pick and place the fingerprint identification electronic parts 74. The suction unit 38 is connected to a suction pump (not shown) through the suction unit 61. A storage space 40 is provided inside the pressing and holding portion 34. A through hole 42 is formed in the bottom surface of the storage space 40 and penetrates to the pressing transfer member 36. The measurement robot 20 is provided with a pressure measurement member 48 that is displaceable in the pressure holding portion 34. A pressing portion 52 is provided below the pressing measurement member 48. A conductive member 56 as a fingerprint substitute member is provided below the pressing portion 52. The conductive member 56 is in contact with the detection portion 78 of the fingerprint identification electronic component 74. The conductive member 56 is a member that is used instead of a fingerprint pattern of a finger when performing fingerprint comparison. In this embodiment, the pressing measurement member 48 provided with the elastic member is arranged in the storage space 40 of the pressing holding portion 34. A flange 50 is provided at one end of the pressing measurement member 48. An elastic member, which is a tensile spring 54, is provided between the pressing measurement member 48 and the upper surface of the inside of the air chamber 44. The spring 54 elastically returns the pressing measurement member 48 upward in the Z direction. The conductive member 56 (in this embodiment, the conductive member 56 may be a conductive plastic sheet) attached to the bottom surface of the pressing portion 52 performs electrostatic discharge. In addition, a pressing portion 52 inserted into the through hole 42 is provided at the other end of the pressing measurement member 48. The conductive member 56 mounted on the bottom surface of the pressing portion 52 is pressed against the detection portion 78 of the fingerprint identification electronic component 74. Further, at least one driving structure that drives the pressing measurement member 48 to displace the pressing measurement member 48 in the Z direction is provided in the pressing holding portion 34. In this embodiment, in the driving structure, an air chamber 44 is provided above one end of the pressure measurement member 48 and communicates with at least one vent 46. The air in the air chamber 44 is pressurized, and the pressing measurement member 48 is pressed in the Z direction to be displaced downward. The air chamber 44 is configured to prevent the pressurized air of the air chamber 44 from leaking by using the sealing member 59. In this embodiment, a first shuttle 62 is provided on one side of the inspection unit 10 and is displaced in the third direction (for example, the X direction). On the supply robot 90 side of the first shuttle 62, at least one first placement portion 64 is provided to place the fingerprint identification electronic component 74 before inspection. Further, at least one second mounting portion 66 of the fingerprint identification electronic component 74 on which the inspection is completed is provided on the recovery robot 92 side of the first shuttle 62. On the other side of the inspection section 10, a second shuttle 68 that is displaced in the third direction is provided. On the supply robot 90 side of the second shuttle 68, there is provided at least one third mounting portion 70 for placing fingerprint identification electronic parts 74 before inspection. In addition, at least one fourth placement portion 72 of the fingerprint identification electronic component 74 on which the inspection is completed is provided on the recovery robot 92 side of the second shuttle 68. In use, the first mounting portion 64 of the first shuttle 62 places the fingerprint identification electronic component 74 before the inspection, and moves it in the X direction, and moves the fingerprint identification electronic component 74 before the inspection to one side of the inspection portion 10. The transfer device 32 of the measurement robot 20 drives the pressure holding portion 34 and the measurement member 48 to displace the same in the Y direction. The transfer device 32 positions the pressing and holding portion 34 above the first placing portion 64. The pressing and holding portion 34 is further driven by the transfer device 32 to be displaced in the Z direction. The non-detection portion of the fingerprint identification electronic component 74 is contacted and attracted by the adsorption portion 38 of the pressing holding portion 34. In addition, the fingerprint identification electronic component 74 before inspection is taken out from the first mounting portion 64 of the first shuttle 62. After the pressing and holding part 34 of the measurement robot 20 takes out the fingerprint identification electronic part 74 before the inspection, the pressing and holding part 34 and the fingerprint identification electronic part 74 before the inspection are driven by the transfer device 32 of the measurement robot 20 so as to make the Y direction Displacement. The fingerprint recognition electronic component 74 before the inspection is positioned above the inspection socket 14 of the inspection section 10 by the transfer device 32. The transfer device 32 further drives the pressing and holding portion 34 in the Z direction to displace it downward. As shown in FIG. 2, the pressing and holding portion 34 disposes the fingerprint identification electronic component 74 before the inspection in the inspection socket 14. The pressing holding portion 34 causes the pressing transfer member 36 to abut against the fingerprint identification electronic component 74. By pressing the holding portion 34, the electrical connector 76 of the fingerprint identification electronic component 74 is reliably brought into contact with the probe 18 of the inspection socket 14. The pressing transfer member 36 of the pressing holding portion 34 abuts on a non-detection portion of the fingerprint identification electronic component 74. Since the pressing of the transfer member 36 does not affect the detection section 78 of the fingerprint identification electronic component 74, the first inspection of the finger (fingerprint) and the detection section 78 of the fingerprint identification electronic component 74 can be performed in the inspection socket 14. Inspection of the contact state (state where the conductive member 56 is not in contact with the detection section 78). The inspection socket 14 sends inspection data to a controller (not shown) via the inspection circuit board 12. FIG. 3 is a schematic front view showing the structure of the measurement robot 20 according to this embodiment. As shown in FIG. 3, the measurement robot 20 performs a check that the finger (fingerprint) is not connected to the detection section 78 of the fingerprint identification electronic component 74, and then injects air into the air chamber 44 through the vent 46. Next, the air in the air chamber 44 is pressurized, and the pressure measurement member 48 is pressed in the Z direction by the pressure of the pressurized air in the air chamber 44 to be displaced downward. The pressing measurement member 48 moves the pressing portion 52 and the conductive member 56 downward in the through hole 42 of the pressing holding portion 34 until the flange 50 abuts the pressing holding portion 34, or the conductive member 56 and the fingerprint identification electronic component 74. The detection section 78 comes into contact. When the conductive member 56 contacts and presses the detection portion 78 of the fingerprint identification electronic component 74, the conductive member 56 performs electrostatic discharge. The inspection of the state where the finger (fingerprint) as the second inspection is connected to the detection unit 78 of the fingerprint identification electronic component 74 (the state where the conductive member 56 is connected to the detection unit 78) is performed in the inspection socket 14 of the inspection unit 10. After the inspection is completed, the measurement robot 20 first exhausts the air in the air chamber 44 through the air vent 46. Since the pressing measurement member 48 is not subjected to external force from the air in the air chamber 44, it can be displaced upward in the Z direction by the reset spring force of the tension spring 54 to drive the conductive member 56 to detect the electronic component 74 from the fingerprint. Department 78 left. The fingerprint recognition electronic component 74 is still held by the holding portion 38 of the pressing holding portion 34. Therefore, when the pressing holding portion 34 is driven in the Z direction by the transfer device 32 and moved upward, the holding portion 34 can be pressed. The suction section 38 sucks the fingerprint-identifying electronic component 74 after the inspection and removes it from the inspection socket 14 of the inspection section 10. After the fingerprint recognition electronic component 74 whose inspection is completed is taken out by the pressing and holding portion 34 of the measurement robot 20, the fourth placement portion 72 of the second shuttle 68 is displaced in the X direction toward the other side of the inspection portion 10. The measurement robot 20 drives the holding unit 34 and the fingerprint recognition electronic component 74 after the inspection to move in the Y direction by the transfer device 32, and transfers the fingerprint recognition electronic component 74 after the inspection to the fourth mounting portion 72. The transfer holding device 34 further moves the pressing and holding portion 34 in the Z direction, and the fingerprint identification electronic component 74 after the inspection is disposed on the fourth placement portion 72 of the second shuttle 68, and the inspection is taken out by the fourth placement portion 72 The finished fingerprint identification electronic part 74. FIG. 4 is a flowchart showing the inspection steps of the IC processor in this embodiment. First, in step S10, the control device places the fingerprint identification electronic component 74 on the inspection socket 14. Next, in step S20, the control device performs an inspection on the fingerprint identification electronic part 74 in a state where the finger (fingerprint) is not connected (a state where the conductive member 56 and the detection section 78 are not connected). Next, in step S30, the control device judges whether the fingerprint (fingerprint) is not connected with the fingerprint identification electronic component 74 to end the inspection normally. When the result of the inspection satisfies a predetermined condition, the process proceeds to step S40 with YES. When the result of the inspection does not satisfy a predetermined condition, the process proceeds to NO in step S32. Next, in step S32, the control device judges whether the fingerprint identification electronic part 74 in a state where the finger (fingerprint) is not connected is not checked twice. If it is the first time, go to step S34 with YES. If it is the second time, proceed to step S70 with NO. Next, in step S34, the control device keeps the inspection unit 10 in a standby state while the fingerprint identification electronic component 74 placed in the inspection socket 14 is re-mounted. The control device causes the measurement robot 20 to reposition the fingerprint identification electronic component 74 placed on the inspection socket 14 (step S36). Next, it is confirmed that the inspection is completed and the process returns to step S20. Next, in step S40, the control device puts the inspection unit 10 in a standby state while changing the inspection environment. The control device causes the measurement robot 20 to change the inspection environment (step S42). Specifically, the measurement robot 20 presses the conductive member 56 mounted on the bottom surface of the pressing portion 52 against the detecting portion 78 of the fingerprint identification electronic component 74. Next, in step S50, the control device performs an inspection on the fingerprint identification electronic part 74 in a state where the finger (fingerprint) is in contact (a state where the conductive member 56 is in contact with the detection section 78). Next, in step S60, the control device judges whether the fingerprint identification electronic part 74 in a state where the fingers (fingerprints) are in contact has ended the inspection normally. When the result of the inspection satisfies a predetermined condition, the process proceeds to step S70 with YES. When the result of the inspection does not satisfy a predetermined condition, the process proceeds to NO in step S62. Next, in step S62, the control device judges whether the fingerprint identification electronic part 74 in the state where the finger (fingerprint) is connected is not checked twice. In the first case, the process proceeds to step S64 with YES. In the second case, proceed to step S70 with NO. Next, in step S64, the control device keeps the inspection unit 10 in a standby state while the conductive member 56 is pressed against the detection unit 78 of the fingerprint identification electronic component 74 again. The control device causes the measurement robot 20 to press the conductive member 56 again against the detection section 78 of the fingerprint identification electronic component 74 (step S66). Next, it is confirmed that the inspection is completed and the process returns to step S50. Next, in step S70, the control device determines whether there is a fingerprint identification electronic part 74 next to be tested. If there is the next fingerprint identification electronic component 74, the process returns to step S10 with YES, and the inspection is repeated. If there is no next fingerprint identification electronic part 74, the inspection is ended with NO. By executing the above steps, the control device can determine whether the fingerprint identification electronic part 74 of the inspection object is normal. In addition, in the above steps, when the result of the inspection does not satisfy the pre-determined conditions, the re-inspection is set to be less than two times, but the re-inspection is not limited to two times. an examination. In this embodiment, as shown in FIG. 1, a first measurement robot 22 and a second measurement robot 24 similar to the measurement robot 20 are provided above the inspection unit 10. The first measurement robot 22 and the second measurement robot 24 each place the fingerprint identification electronic component 74 before the inspection of the first placement section 64 and the third placement section 70 so as to abut the inspection socket 14 of the inspection section 10. Check in. In addition, the fingerprint identification electronic component 74 that has completed the inspection in the inspection socket 14 is taken out and transferred to the second placement portion 66 and the fourth placement portion 72, respectively. The second placing portion 66 and the fourth placing portion 72 take out the fingerprint identification electronic parts 74 that have been inspected by the collection-side robot hand unit 96 of the collection robot 92, and recognize the fingerprints that have finished the inspection by the collection-side robot hand unit 96 The electronic parts 74 are transferred to the collection tray 86. At least one mounting portion for placing at least one fingerprint identification electronic component 74 on which the inspection is completed is provided on the recovery tray 86. The collection-side robot hand unit 96 of the collection robot 92 transfers the fingerprint identification electronic parts 74 that have been inspected to the placement section based on the inspection results, sorts them, and stores them. The control device controls and adjusts the operation of each device to perform automatic inspection, thereby achieving the practical effect of improving production efficiency. According to this embodiment, if the result of the first inspection does not satisfy a predetermined condition, the second inspection can be continued without carrying out the transportation. Thereby, different inspections can be performed on one fingerprint identification electronic part 74 simultaneously and continuously, thereby improving the processing capacity (UPH). The measurement robot 20 may include a second holding portion having a structure different from that of the pressing holding portion 34. Accordingly, it is possible to provide a holding unit for inspecting the environment. For example, the pressing and holding portion 34 may be used exclusively for conveyance, and the second holding portion may be used for pressing and inspection. Further, the pressing and holding portion 34 may be provided with a conductive member 56 which is used instead of the fingerprint pattern of the finger during fingerprint comparison. The second holding portion may not include the conductive member 56. Accordingly, it is possible to provide a second holding unit for inspecting the environment. (Second Embodiment) Fig. 5 is a schematic front view showing the structure of the measurement robot 26 according to this embodiment. FIG. 6 is a schematic front view showing the structure of the measurement robot 28 according to this embodiment. FIG. 7 is a schematic plan view showing the structure of the IC processor of this embodiment. The IC processor of this embodiment differs from the first embodiment in that it includes a first pressing and holding section 35 as a first holding section and a second holding section as a second holding section having a structure different from the first pressing and holding section 35. 2Press the holding portion 37. Hereinafter, the same components as those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted or simplified here. The IC processor according to this embodiment includes a first pressing and holding section 35 that can hold the fingerprint identification electronic component 74, and a second pressing and holding section 37 that can hold the fingerprint identification electronic component 74 and is the same as the first pressing and holding section 35 different constructions. The first pressing and holding unit 35 conveys the fingerprint identification electronic component 74 to the inspection socket 14 and places it on the inspection socket 14. The second pressing and holding unit 37 is a first inspection and holding unit 35 that places the fingerprint identification electronic component 74 on the inspection socket 14 and presses the fingerprint identification electronic component 74 to perform a specific inspection. In the present embodiment, a first measurement robot 26 and a second measurement robot 28 are provided above the inspection unit 10. The measurement robots 26 and 28 are provided with pressing and holding portions 35 and 37 that are displaced at least in one direction. The holding portions 35 and 37 are pressed to pick and place the fingerprint identification electronic component 74 from the inspection socket 14 and abut the non-detection portion of the fingerprint identification electronic component 74 in the inspection socket 14. In the present embodiment, the measurement robots 26 and 28 are provided with a transfer device 32 that is displaced in the first direction and the second direction (for example, the Z direction and the Y direction). The holding devices 35 and 37 are attached to the transfer device 32. One end of the pressing holding portions 35 and 37 is mounted on the bottom of the transfer device 32, and the other side is provided with a pressing transfer member 36 and abuts on a non-detection portion of the fingerprint identification electronic component 74. A plurality of suction portions 38 are provided on the bottom surface of the pressing transfer member 36 to pick and place the fingerprint identification electronic component 74. In the second measurement robot 28, a pressing portion 52 is provided at the other end of the second pressing and holding portion 37. The conductive member 56 mounted on the bottom surface of the pressing portion 52 is pressed against the detecting portion 78 of the fingerprint identification electronic component 74. In the first measurement robot 26, a conductive member is not provided on the bottom surface of the pressing portion 52 at the other end of the first pressing and holding portion 35. The first pressing and holding portion 35 of the first measurement robot 26 does not contact the detection portion 78 of the fingerprint identification electronic component 74. As shown in FIG. 7, the fingerprint identification electronic component 74 of this embodiment is transported along the paths of arrows A, B, and C. Specifically, after the inspection of the state where the finger (fingerprint) is not connected to the detection section 78 of the fingerprint identification electronic component 74 is performed, the first measurement robot 26 leaves the fingerprint identification electronic component 74 in the inspection socket 14 to communicate with the fingerprint. The identification electronic parts 74 are separated. The second measurement robot 28 abuts the pressing transfer member 36 on the fingerprint identification electronic component 74. The second measuring robot displaces the pressing portion 52 and the conductive member 56 downward, contacts the conductive member 56 and presses the detection portion 78 of the fingerprint identification electronic component 74, performs electrostatic discharge through the conductive member 56, and inspects the inspection portion 10. A check of the state where a finger (fingerprint) is in contact with the detection section 78 of the fingerprint identification electronic component 74 is performed in the socket 14. After the fingerprint identification electronic component 74 that has been inspected is taken out by the second pressing and holding portion 37 of the second measurement robot 28, the fourth placement portion 72 of the second shuttle 68 is moved to the other side of the inspection portion 10 in the X direction . The second measurement robot 28 drives the second pressing and holding portion 37 and the fingerprint identification electronic component 74 after the inspection to move in the Y direction by the transfer device 32, and transfers the fingerprint identification electronic component 74 after the inspection to the fourth placement. Above the section 72. The second pressing and holding portion 37 is further displaced in the Z direction by the transfer device 32, and the fingerprint identification electronic component 74 after the inspection is disposed on the fourth placing portion 72 of the second shuttle 68, and the fourth placing portion 72 Take out the fingerprint identification electronic part 74 after the inspection. The transport path of the fingerprint identification electronic component 74 may be transported from the second shuttle 68 side. In addition, the second pressing and holding portion 37 may be provided with a terminal for performing electrical inspection. According to this, it is possible to provide the second pressing and holding portion 37 for inspecting the environment. (Third Embodiment) Fig. 8 is a schematic front view showing the structure of a measurement robot 30 according to this embodiment. FIG. 9 is a schematic plan view showing the structure of the IC processor of this embodiment. The difference between the IC processor of this embodiment and the second embodiment is that the second pressing and holding portion 39 as the second holding portion does not include a suction mechanism. Hereinafter, the same components as those in the second embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted or simplified. The first pressing and holding portion 35 of the IC processor of this embodiment includes a suction mechanism, and the second pressing and holding portion 39 does not include a suction mechanism. According to this, it is possible to provide the second pressing and holding unit 39 for inspecting the environment. In the present embodiment, a first measurement robot 26 and a second measurement robot 30 are provided above the inspection unit 10. In the second measurement robot 30, a pressing portion 52 is provided at the other end of the second pressing and holding portion 39. The conductive member 56 mounted on the bottom surface of the pressing portion 52 is pressed against the detection portion 78 of the fingerprint identification electronic component 74. As shown in FIG. 9, the fingerprint identification electronic component 74 of this embodiment is transported along the paths of the arrows D, E, F, and G. Specifically, after the inspection of the state where the finger (fingerprint) is not connected to the detection section 78 of the fingerprint identification electronic component 74 is performed, the first measurement robot 26 leaves the fingerprint identification electronic component 74 in the inspection socket 14 to communicate with the fingerprint. The identification electronic parts 74 are separated. The second measuring robot 30 displaces the pressing portion 52 and the conductive member 56 downward, contacts the conductive member 56 and presses the detection portion 78 of the fingerprint identification electronic component 74, and performs electrostatic discharge through the conductive member 56. The inspection socket 14 performs an inspection of the state where a finger (fingerprint) is in contact with the detection section 78 of the fingerprint identification electronic component 74. Next, after the inspection of the state where the finger (fingerprint) is in contact with the detection section 78 of the fingerprint identification electronic part 74 is performed, the second measurement robot 30 leaves the fingerprint identification electronic part 74 in the inspection socket 14 to identify the electronic part with the fingerprint. 74 separated. The first measurement robot 26 abuts the pressing transfer member 36 on the fingerprint identification electronic component 74. After the first measurement robot 26 takes out the fingerprint recognition electronic component 74 after the inspection, the second mounting portion 66 of the first shuttle 62 is displaced in the X direction toward the other side of the inspection portion 10. The first measurement robot 26 drives the first pressing and holding portion 35 and the fingerprint identification electronic component 74 after the inspection to move in the Y direction by the transfer device 32, and transfers the fingerprint identification electronic component 74 after the inspection to the second stage. Above the portion 66. The first pressing and holding portion 35 is further displaced in the Z direction by the transfer device 32, and the fingerprint identification electronic component 74 after the inspection is disposed on the second placing portion 66 of the first shuttle 62, and the second placing portion 66 Take out the fingerprint identification electronic part 74 after the inspection. The transport path of the fingerprint identification electronic component 74 can be transported from the second shuttle 68 side. The second pressing and holding unit 39 may be provided with a terminal for performing electrical inspection. According to this, it is possible to provide the second pressing and holding unit 39 for inspecting the environment. According to this embodiment, it is possible to include the second pressing and holding portion 39 for inspecting the environment. Thereby, the inspection of the electronic component 74 can be performed according to the fingerprints of different shapes. In addition, even if the second pressing and holding portion 39 cannot absorb the fingerprint identification electronic component 74, the fingerprint identification electronic component 74 can be transported by the first pressing and holding portion 35 that places the fingerprint identification electronic component 74 on the inspection socket 14.

10‧‧‧ Inspection Department

12‧‧‧ Inspection circuit board

14‧‧‧ Inspection socket

18‧‧‧ Probe

20‧‧‧Determination robot

22‧‧‧The first measurement robot

24‧‧‧The second measurement robot

26‧‧‧The first measurement robot

28‧‧‧The second measurement robot

30‧‧‧The first measurement robot

32‧‧‧ transfer device

34‧‧‧Press and hold

35‧‧‧The first pressing and holding part

36‧‧‧Press the transfer member

37‧‧‧ 2nd press holding part

38‧‧‧ Adsorption Department

39‧‧‧ 2nd press holding part

40‧‧‧Storage space

42‧‧‧through hole

44‧‧‧ air chamber

46‧‧‧Vent

48‧‧‧Press the measurement member

50‧‧‧ flange

52‧‧‧Relief section

54‧‧‧Spring

56‧‧‧ conductive members

59‧‧‧sealing member

61‧‧‧Suction tube

62‧‧‧The first shuttle

64‧‧‧ the first placement section

66‧‧‧ 2nd placement section

68‧‧‧ 2nd shuttle

70‧‧‧ 3rd placement section

72‧‧‧ 4th placement section

74‧‧‧Fingerprint identification electronic parts

76‧‧‧electrical connector

78‧‧‧Testing Department

80‧‧‧ substrate

82‧‧‧Supply Tray

86‧‧‧Recycling tray

90‧‧‧ supply robot

92‧‧‧Recycling robot

94‧‧‧ supply side robot hand unit

96‧‧‧Recycling robot hand unit

A‧‧‧arrow

B‧‧‧ Arrow

C‧‧‧ Arrow

D‧‧‧ Arrow

E‧‧‧Arrow

F‧‧‧ Arrow

G‧‧‧ Arrow

S10‧‧‧step

S20‧‧‧step

S30‧‧‧step

S32‧‧‧step

S34‧‧‧step

S36‧‧‧step

S40‧‧‧step

S42‧‧‧step

S50‧‧‧step

S60‧‧‧step

S62‧‧‧step

S64‧‧‧step

S66‧‧‧step

S70‧‧‧step

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

FIG. 1 is a schematic plan view showing the structure of the IC processor of the first embodiment. Fig. 2 is a schematic front view showing the structure of the measurement robot according to the first embodiment. Fig. 3 is a schematic front view showing the structure of the measurement robot according to the first embodiment. Fig. 4 is a flowchart showing the inspection procedure of the IC processor of the first embodiment. Fig. 5 is a schematic front view showing the structure of the measurement robot according to the second embodiment. Fig. 6 is a schematic front view showing the structure of a measurement robot according to a second embodiment. Fig. 7 is a schematic plan view showing the structure of the IC processor of the second embodiment. Fig. 8 is a schematic front view showing the structure of a measuring robot according to a third embodiment. FIG. 9 is a schematic plan view showing the structure of the IC processor of the third embodiment.

Claims (11)

An electronic component conveying device includes: a conveying section capable of conveying electronic components; and a first holding section capable of retaining the electronic components; and a first inspection of the electronic components and a difference from the first inspection may be arranged. The inspection section of the second inspection; the inspection section performs the first inspection on the electronic parts, and when the result of the first inspection satisfies a predetermined condition, performs the first inspection on the electronic parts that have undergone the first inspection. 2 inspection, when the result of the first inspection does not satisfy the above-mentioned predetermined conditions, the second inspection is not performed on the electronic parts that have undergone the first inspection, and other electronic parts that have not undergone the first inspection The parts are subjected to the first inspection described above. For example, in the electronic component transfer device of claim 1, at least one of the first inspection and the second inspection is performed a plurality of times. For example, the electronic component transfer device of claim 1 or 2, wherein the first inspection is an inspection that does not exert a physical action on the electronic part, and the second inspection is an inspection that exerts the physical action on the electronic part. The electronic component transfer device according to claim 3, wherein the physical action is at least one of light and electric charge. For example, the electronic component transfer device of claim 1 or 2, wherein the first inspection is an inspection of a state where a finger is not connected to the electronic component, and the second inspection is an inspection of a state where the finger is connected to the electronic component. For example, the electronic component transfer device of claim 1 or 2 includes a second holding portion having a structure different from that of the first holding portion. For example, the electronic component transfer device according to claim 6, wherein the first holding portion includes a fingerprint replacement member used instead of a fingerprint pattern of a finger when performing fingerprint comparison, and the second holding portion does not include the fingerprint replacement member. An electronic component conveying device includes: a first holding portion that can hold electronic components; and a second holding portion that can hold the electronic components and has a structure different from that of the first holding portion; An inspection unit that places the mounting part of the electronic part and can inspect the electronic part; the first holding part transports the electronic part to the mounting part and places it on the mounting part, and the second holding part After the electronic component is placed on the placing portion in the first holding portion, the electronic component is pressed and a specific inspection is performed. According to the electronic component transfer device of claim 8, the first holding portion includes a suction mechanism, and the second holding portion does not include the suction mechanism. For example, the electronic component transfer device of claim 8 or 9, wherein the second holding portion has a terminal for performing an electrical inspection. An electronic component inspection device includes: a transporting unit that can transport electronic components; a first holding unit that can hold the electronic components; and an inspection unit that performs a first inspection on the electronic components and is different from the first inspection The second inspection; and the inspection unit performs the first inspection on the electronic parts, and when the result of the first inspection satisfies a predetermined condition, performs the first inspection on the electronic parts that have undergone the first inspection. 2 inspection, when the result of the first inspection does not satisfy the above-mentioned predetermined conditions, the second inspection is not performed on the electronic parts that have undergone the first inspection, and other electronic parts that have not undergone the first inspection The parts are subjected to the first inspection described above.