TW201823727A - Probe card - Google Patents

Abstract

Provided is a probe card capable of preventing slippage of needle front when contacting with an object-to-be-measured, and having stable contact resistance. A probe card 10 has a substrate 12, a guide plate 14 having a plurality of circular through holes 18 penetrating perpendicularly to a plate surface, and a plurality of needles 16 having one end connected to a needle connection portion 20 of the substrate 12 and the other end, which extends toward a central side of the substrate 12 via a needle middle fixing portion 22, connected to a pad of an object-to-be-measured, with the same diameter over the whole length except a portion of the needle connection portion at the one end and a portion of the contacting end at the other end. Each needle 16 includes a beam 24 fixed by the needle middle fixing portion 22 and sticking-out from a central-side end surface thereof, and a needle front 26 with a portion having the same diameter bending from a front end of the beam 24 in a direction perpendicular to the guide plate 14 side and vertically penetrating the circular through hole 18, wherein the shape of a contact end of the needle front 26 is a rounded shape.

Description

 Probe card  

The present invention relates to a probe card.

The probe card comprises the following components: a substrate electrically connected to a tester device by a signal line or the like; and a needle called a probe connected to the substrate and contacting the object to be measured Pad of LSI (Large Scale Integration) wafer. As the type of probe card, a cantilever type probe card and a vertical type probe card are known.

The cantilever type probe card is configured such that one end of the needle is fixed to the outer peripheral side of the substrate, and the needle extends toward the center side of the substrate in an oblique direction, and the cantilever beam is bent obliquely toward the pad, which is simple structure. For example, Patent Document 1 discloses a cantilever type probe card including a probe having a smaller needle diameter toward the distal end side.

Further, Patent Document 2 discloses a cantilever type probe card in which a distal end portion of a needle penetrates a guide hole provided on a guide plate that restricts a moving direction of the needle. The guide hole has a long hole shape.

Further, Patent Document 3 discloses a cantilever type probe card including a probe that penetrates a through hole of a guide sheet, and the tip end of the needle is pressed into contact with the pad. The through hole of the guide piece has an inverted conical shape in which the hole area is reduced from the top surface to the bottom surface.

In addition, the vertical probe card mounts a needle that is lowered vertically from the substrate toward the pad, preventing slippage of the needle when it comes into contact with the pad. In the case of a vertical type probe card, Patent Document 4 discloses a vertical type probe card including a probe needle which is a pin shape having a curved portion and a front end. The electrode is electrically contacted to the wafer belonging to the substrate to be inspected; the upper guiding plate is mounted to fix a plurality of probe pins; and the lower guiding plate is provided with a guiding hole through which the probe needle passes.

 [Previous Technical Literature]    [Patent Literature]  

Patent Document 1: Japanese Laid-Open Patent Publication No. 2001-108708

Patent Document 2: Japanese Laid-Open Patent Publication No. 2011-99698

Patent Document 3: Japanese Patent Laid-Open No. 7-183341

Patent Document 4: Japanese Patent Laid-Open No. Hei 11-038044

As described above, since the needle of the cantilever type probe card extends obliquely toward the center side of the substrate, it abuts against the surface of the pad. Therefore, when the needle comes into contact with the pad, the needle slips beyond the predetermined pad area.

On the other hand, the vertical type probe card does not have the above-mentioned concerns, but it is a complicated structure in which a needle including a flexible bent portion is passed through both the upper guide plate and the lower guide plate. Therefore, the labor or component cost in the probe card manufacturing step is increased.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a probe card that achieves both a cantilever type configuration and a tip portion that slides over the surface of the pad when in contact with the pad.

Further, another object of the present invention is to provide a probe card having a stable contact resistance.

The probe card of the present invention includes: a substrate including wiring connected to an external device; and a guiding plate disposed on a lower side of the substrate and parallel to the substrate, and having a plurality of circles penetrating perpendicularly to the surface of the plate a through hole; and a plurality of pins, wherein one end is connected to the needle connecting portion on the outer peripheral side of the substrate, and extends toward the center side of the substrate, and the other end extending further toward the center side of the substrate via the needle intermediate fixing portion becomes The contact end of the contact pad of the object to be measured has an equal diameter throughout the length of the portion other than the portion of the needle connection portion of the other end and the contact end of the other end; each needle system includes: a beam portion, which is attached to the needle The intermediate fixing portion is fixed and protrudes from the end surface of the center side of the needle intermediate fixing portion; and the vertical portion has a portion having a uniform diameter which is bent from the front end of the beam portion in the vertical direction with respect to the side of the guide sheet, and is vertically worn. a circular through hole, wherein a gap size between a diameter of the circular through hole and an equal diameter of the needle is set to a predetermined value; and a contact end shape of the vertical portion is An arc shape.

Further, in the probe card of the present invention, it is preferable that the contact end shape is a hemispherical shape in which 1/2 of the equal diameter of the vertical portion is a radius.

Further, in the probe card of the present invention, it is preferable that the shape of the contact end extends in a predetermined tapered shape from the front end side of the equal diameter of the vertical portion, and the foremost end portion thereof is a partial spherical surface having a predetermined radius.

Further, in the probe card of the present invention, it is preferable that the diameter of the needle is set according to the shortest pitch between the adjacent needle tips; the length of the beam portion is set to be at the target needle pressure value, The diameter of the needle becomes smaller and shorter.

Further, in the probe card of the present invention, it is preferable that the tip end portion has a bent portion between the tip end of the beam portion and the vertical portion of the needle tip portion.

Further, in the probe card of the present invention, it is preferable that the needle intermediate fixing portion is provided on the guide plate or the substrate.

According to the above configuration, the vertical portion of the tip portion is perpendicularly passed through the circular through hole of the guide sheet to be in contact with the pad. Thereby, the vertical portion of the needle tip portion is in contact with the surface of the pad substantially perpendicularly or at the maximum extent, so that the sliding of the needle tip portion can be suppressed.

Further, according to the above configuration, the contact end shape of the vertical portion has a circular arc shape, and therefore the contact resistance with respect to the pad is smaller than the circular flat surface which is formed by cutting the needle of the uniform diameter perpendicularly to the axial direction. More stable. According to the experimental results, it is preferable that the shape of the contact end is a hemispherical shape in which 1/2 of the diameter of the vertical portion is set to a radius. Further, it is preferable that the shape of the contact end is extended from a front end side of the equal diameter of the vertical portion by a predetermined tapered shape, and the foremost end is set to a partial spherical surface having a predetermined radius.

Further, according to the above configuration, the gap size between the diameter of the needle tip portion and the circular through hole is set to a predetermined value. Thereby, when the tip portion is brought into contact with the pad, the vertical portion of the tip portion is inclined with respect to the surface of the pad, and the sliding of the tip portion can be suppressed.

Further, according to the above configuration, since the vertical type probe card is not used as the conventional guide card and the two guide plates of the lower guide plate, the through hole of the plurality of guide plates is not required to be passed through the plurality of guide plates. Therefore, the number of parts of the member can be reduced, and it can be manufactured more simply.

6‧‧‧Test head

10, 10a, 10b‧‧‧ probe card

12‧‧‧Substrate

14‧‧‧Guideboard

16‧‧‧ needle

17‧‧‧through holes

18‧‧‧Circular through hole

19‧‧‧ Guide plate connecting member

20‧‧‧needle connection

22‧‧‧needle intermediate fixation

24‧‧ ‧ Beam Department

25‧‧‧Bend

26‧‧‧Needle

28‧‧‧Vertical

30‧‧‧1st contact shape

32‧‧‧2nd contact end shape

34‧‧‧round flat shape

B‧‧‧dotted line

d ₁ ‧‧‧diameter

d ₂ ‧‧‧ aperture

E‧‧‧elastic coefficient

L‧‧‧ length

P‧‧‧ spacing

P _n ‧‧‧needle pressure

r ₁ , r ₂ ‧‧‧ radius

T _p ‧‧‧target needle pressure

θ ₁ , θ ₂ ‧‧‧ angle

Fig. 1 is a side view showing a probe card according to an embodiment of the present invention.

Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

Fig. 3 (a) to (c) are views showing an example of the shape of the contact end of the probe card according to the embodiment of the present invention.

Fig. 4 (a) to (c) are diagrams for comparing the contact resistance with respect to the shape of each contact end of Fig. 3.

Fig. 5 is a view showing a probe card of another configuration.

Fig. 6 is a view showing a probe card of another configuration.

Fig. 7 is a view showing a probe card additionally constructed.

Hereinafter, embodiments of the present invention will be described in detail using the drawings. In the following, the same reference numerals are given to the corresponding elements in all the drawings, and overlapping description will be omitted.

The first figure is a side view of the probe card 10. Fig. 2 is a cross-sectional view taken along line A-A of the probe card 10 of Fig. 1. Further, a partial enlarged view of the broken line B is displayed on the lower right side of the first figure.

The probe card 10 includes a substrate 12, a guiding plate 14 disposed on the lower side of the substrate 12 and parallel to the substrate 12, and a needle 16 having one end connected to the outer peripheral side of the substrate 12, and the needle system It extends toward the center side of the substrate 12 and further extends toward the center side of the substrate 12 via the needle intermediate fixing portion 22 . Further, the test head 6 electrically connected to the substrate 12 is not a component of the probe card 10, but is attached to a tester device (not shown). In the first and second figures, the two axes orthogonal to each other in the plane parallel to the surface of the substrate 12 are defined as the X-axis and the Y-axis, and the axis perpendicular to the surface of the substrate 12 is defined as the Z-axis.

The substrate 12 is a wiring substrate having a circular or square outer shape. The substrate 12 is made of glass epoxy resin or the like. The substrate 12 has a top surface for a plurality of electrode arrangements connected to the test head 6, and a bottom surface for mounting a plurality of pins 16. The wiring on the top surface and the wiring on the bottom surface are connected by a through hole (not shown) or the like as needed.

The needle connecting portion 20 is a pad for needle connection that is disposed at a predetermined position on the outer peripheral side of the lower surface of the substrate 12. The needle connecting portion 20 is made of copper or the like. The needle connecting portion 20 is electrically connected to the wiring on the top surface of the substrate 12 through a conductive member (not shown). In the needle connecting portion 20, one end of a plurality of needles 16 is fixed.

The guide plate 14 is a plate member having a circular or square outer shape. The guide sheets 14 are disposed on the lower side of the substrate 12 and in parallel with the substrate 12. The guide plate 14 is made of a material having high insulation, and is made of, for example, ceramic or glass. The guide plate 14 has a plurality of circular through holes 18 that vertically penetrate the surface of the plate.

The circular through hole 18 has a predetermined diameter d ₂ . The circular through holes 18 are formed to be aligned in the Y direction at a predetermined pitch p.

The guide plate connecting member 19 has an annular outer shape and is a spacer member for connecting the guide plates 14 to the substrate 12 with a predetermined parallel interval therebetween. The guide plate connecting member 19 is disposed substantially in the middle of the outer peripheral side and the center side of the substrate 12. The guide plate connecting member 19 is made of an epoxy resin, an insulating material such as ceramics or glass.

The guide plate connecting member 19 has a through hole 17 having a proper aperture for the needle 16 to pass through. The through hole 17 may be a hole that is opened in parallel with respect to the substrate 12 and the guide plate 14, or may be a hole that is opened at a predetermined inclination angle with respect to the substrate 12 and the guide plate 14. The through hole 17 may be a guide hole that maintains a gap state with the needle 16, and a gap between the needle 16 and the through hole 17 may be filled with an epoxy resin or the like.

The needle 16 is a probe having the other end belonging to the contact end, and the other end is extended from the one end of the fixed end of the needle connecting portion 20 on the outer peripheral side of the substrate 12, and extends toward the center side of the substrate 12, and is appropriate The position is bent toward the lower side and is in contact with the pads of the LSI wafer. The needle 16 is made of a material such as tungsten, beryllium copper or a precious metal alloy.

The needle 16 has a shape suitable for being connected to the needle connecting portion 20 at the fixed end, and is subjected to surface treatment or the like which is easy to perform welding or the like. At the contact end, there is a shape suitable for stably contacting the pads of the LSI wafer. Details regarding the shape of the contact end will be described later. The needle 16 has an equal diameter d ₁ throughout its length except for the portion of the fixed end of one end and the portion of the contact end of the other end. The size of the diameter d ₁ is determined by the shortest pitch p between adjacent needles 16.

The needle 16 extends from the one end of the needle connecting portion 20 belonging to the fixed end toward the through hole 17 of the guide plate connecting member 19 and is inclined with an appropriate downward inclination. After the needle 16 passes through the through hole 17, it is then fixed at the needle intermediate fixing portion 22. Since the needle 16 is a free end from the position where the needle intermediate fixing portion 22 is fixed, the needle intermediate fixing portion 22 functions to make the needle 16 a cantilever type probe card belonging to the cantilever. The needle intermediate fixing portion 22 is a resin molded body in which the entire needle 16 is placed at a predetermined interval. Alternatively, a member having a fixing hole for each needle 16 in the insulator may be used, and each of the needles 16 may be passed through a fixing hole and fixed by an epoxy resin or the like. The needle 16 enters from the end surface on the outer peripheral side of the substrate 12 in the needle intermediate fixing portion 22, and protrudes toward the end surface on the center side of the substrate 12 which is the end surface on the opposite side. The portion of the needle 16 between the end faces is a fixed portion. As shown in Fig. 1, the fixed portion of the needle intermediate fixing portion 22 of the needle 16 is parallel to the substrate 12 and the guide plate 14. This is an example, and may be maintained at an appropriate inclination angle with respect to the substrate 12 and the guide plate 14 depending on the specifications of the probe card 10.

The needle 16 is fixed to the needle intermediate fixing portion 22, and protrudes from the end surface of the center side of the substrate 12 from the end surface of the needle intermediate fixing portion 22, and then is bent toward the guide plate 14 side at an appropriate position. The portion of the needle intermediate fixing portion 22 is referred to as a beam portion 24 with the bent position as a boundary, and a portion bent from the front end of the beam portion 24 toward the guide plate 14 side is referred to as a needle tip portion 26. As shown in FIG. 1, when the fixed portion of the needle intermediate fixing portion 22 of the needle 16 is parallel with respect to the substrate 12 and the guide plate 14, the beam portion 24 is parallel with respect to the substrate 12 and the guide plate 14. The portion having the equal diameter d ₁ on the front end side of the needle tip portion 26 is a vertical portion 28 that is vertically lowered with respect to the substrate 12 and the guide plate 14, and is formed by a circular through hole 18 that is vertically opened to the guide plate 14. .

The needle 16 is a free end portion, and after the needle intermediate fixing portion 22 is fixed to the fixing portion, the beam portion 24 and the needle tip portion 26 of the front surface portion are protruded toward the end surface of the center side of the substrate 12. The position from the end face of the center side of the substrate 12 in the needle intermediate fixing portion 22 is measured in the vertical direction until the height of the front end of the vertical portion 28 of the needle tip portion 26 corresponds to the needle 16 as the cantilever. Needle height. The height of the needle 16 from the end surface of the center side of the substrate 12 in the needle intermediate fixing portion 22 with respect to the height of the substrate 12 or the guide plate 14 is set in accordance with the needle height of the needle 16 as the cantilever beam.

Here, in the needle tip portion 26, the length L of the beam portion 24 from the end surface on the center side of the substrate 12 to the front end of the beam portion 24 from the end surface of the needle intermediate fixing portion 22 is based on the target needle pressure value Tp, and The diameter d _{1 of the} needle 16 is set. Here, when the deflection amount of the beam portion 24 is δ, E is the elastic coefficient, and the needle pressure is P _n , the deflection amount δ can be obtained by δ = (P _n × L ³ ) / (3 × E × The formula of d ₁ ⁴ × π / 64) is obtained. In this formula, when the amount of deflection δ, the modulus of elasticity E, and the diameter d ₁ are fixed, it is known that the needle pressure P _n is inversely proportional to the L ^{3 of the} length L. I.e., L the longer the more the needle pressure drop P _n, L shorter needle the more increased pressure P _n. Furthermore, when the amount of deflection δ, the coefficient of elasticity E, and the diameter d ₁ are fixed, and below a predetermined target needle pressure value T _p , the ratio of d ₁ ⁴ to L ³ of 4 times the diameter d ₁ is Therefore, the length L of the beam portion 24 is set to be shorter as the diameter d ₁ becomes smaller.

The needle intermediate fixing portion 22 is made of an epoxy resin, an insulating material such as ceramics or glass. Fixing the intermediate portion 22 the needle system is provided even in the case the entire length of the needle 16 becomes longer, can be improved by shortening the length L of the needle pressure P _n. The needle intermediate fixing portion 22 is disposed on the center side of the guide plate 14 for fixing a plurality of needles 16. Further, the needle intermediate fixing portion 22 may be disposed on the substrate 12 side. Here, although the needle intermediate fixing portion 22 and the guide plate connecting member 19 are described as individual members, they may be integrally formed.

Here, the shape of the contact end of the needle tip portion 26 will be described. The contact end of the needle tip portion 26 refers to the foremost end portion of the vertical portion 28 which is a portion having the equal diameter d ₁ on the front end side of the needle tip portion 26, and is the portion where the other end of the needle 16 contacts the pad of the LSI wafer. . The shape of the contact end is not a circular flat surface that cuts the needle 16 of the uniform diameter d ₁ perpendicularly to the axial direction, but has a circular arc shape at the front end. In Fig. 3, the first contact end shape 30 is shown in Fig. 3(a), and the second contact end shape 32 is shown in Fig. 3(b) as an example in which the tip end has a contact end of a circular arc. Further, in Fig. 3(c), a circular flat surface shape 34 is shown as a comparative example.

The first contact end shape 30 is a hemispherical shape in which (d ₁ /2) which is equal to 1/2 of the diameter d ₁ of the vertical portion 28 is a radius r ₁ . The length along the axial direction of the tip end portion 26 of the first contact end shape 30 is r ₁ = (d ₁ /2). As an example of the dimension, the equal diameter d _{1 of the} vertical portion 28 is 35 μm, and the radius r ₁ of the hemispherical shape of the first contact end shape 30 is 17.5 μm. The values of the diameter d ₁ and the radius r ₁ are exemplified for the description, and can be appropriately changed depending on the specifications of the needle 16 of the probe card 10.

The second contact end shape 32 extends from a front end side of the equal diameter d ₁ of the vertical portion 28 in a predetermined tapered shape, and a front end thereof is a partial spherical surface having a predetermined radius r ₂ . The predetermined tapered shape is a conical tip end shape which is tapered at a predetermined taper angle. In other words, the predetermined radius r ₂ of the spherical portion of the foremost end is initially set, and the angle of the tapered cone is defined to be smoothly connected thereto. The predetermined radius r _{2 is} determined in advance by an experiment or the like to determine the size of the pad suitable for stably contacting the LSI wafer, and is set to a value. The predetermined radius r _{2 is} preferably about 15% to 30% of the equal diameter d ₁ of the vertical portion 28. As an example of the size, d _{1 is} set to 35 μm, and the radius r ₂ of the partial spherical surface at the front end of the tapered tip end shape of the second contact end shape 32 is 7.5 μm which is about 22% of d ₁ . This is an illustration for illustrative purposes, and can be appropriately changed depending on the specifications of the needle 16 of the probe card 10.

In the above, the predetermined tapered shape is a tapered front end shape having a tapered shape at a predetermined tapered angle, but may be a tapered shape having an appropriate expanded circular arc shape instead of having a linear oblique shape. Conical angle of the front end of the cone. For example, it may be a shape of a bullet which is tapered to a greater extent toward the front end. Further, the connecting shape between the portion of the diameter d ₁ and the tapered shape may have an appropriate circular arc, or the connecting shape between the tapered shape and the spherical portion of the foremost end portion may have an appropriate circular arc.

Next, the action of the probe card 10 having the above configuration will be described. In the needle 16 of the probe card 10 belonging to the distal end of the tip portion 26 of the vertical side portion has a uniform diameter d ₁ of the portion 28, the vertical line through the circular through hole 18 of the guide plate 14 with the contact pads . Thereby, the vertical portion 28 on the front end side of the needle tip portion 26 is in contact with the surface of the pad substantially perpendicularly or at the maximum extent, so that the sliding of the needle tip portion 26 when the vertical portion 28 contacts the pad can be suppressed.

Furthermore, according to the above-described probe card 10, the tip portion 28 of the vertical portion 26 of uniform diameter d of the circular _{aperture. 1} of the through hole 18 between _the size of the gap d, is set to a predetermined line value. An example of a predetermined value is about 10 to 20% of d ₁ or d ₂ . This is an example and may be appropriately changed depending on the specifications of the probe card 10. Thereby, even when the needle tip portion 26 contacts the pad, when the force of the inclination of the vertical portion 28 of the needle tip portion 26 acts, the movement of the vertical portion 28 is blocked by the circular through hole 18. Therefore, it is possible to suppress the tip end portion 26 from being inclined with respect to the surface of the pad.

Furthermore, in the probe card 10, the vertical guide card is not used as the conventional guide card and the two guide plates of the lower guide plate, but only one guide plate 14 is used. . Therefore, it is not necessary to pass the needle tip portion 26 through the through holes of the plurality of guide sheets, so that the manufacturing can be performed more easily than the conventional vertical type probe card, and the number of parts of the member can be reduced.

In the probe card 10, as described above, the length of the beam portion 24 is L, the needle under pressure target value T _p, as the system is set smaller diameter d ₁ becomes shorter. Therefore, even in the case where the diameter d ₁ is reduced in order to make the pitch p between the adjacent needle tip portions 26 narrow, the needle pressure P _n can be adjusted to match the target needle pressure value T _p by adjusting the length L.

Fig. 4 is an effect showing the shape of the contact end of the needle tip portion 26. In the horizontal axis of each of the graphs of Fig. 4, the number of times the contact end of the needle 16 contacts the pad of the LSI wafer is used as the number of contacts, and the number of times of contact is obtained from one to 200 times. The vertical axis shows the contact resistance of each contact number. Fig. 4(a) shows the result of the needle 16 having the first contact end shape 30 of d ₁ = 35 μm, and Fig. 4(b) shows the needle of the second contact end shape 32 having the radius r ₂ = 7.5 μm. The result of 16. In the second contact end shape 32, if the radius r ₂ = 7.5 μm is the same, even if the predetermined tapered shape is slightly changed, a large difference does not occur as a result. In Fig. 4(b), a bullet shape is used as a predetermined tapered shape. Fig. 4(c) shows the result of the needle 16 having the circular flat surface shape 34 as a comparative example.

As can be seen from the comparison of the results of the three experiments in FIG. 4, the contact resistance at the contact end of the other end of the needle 16 contacting the pad of the LSI wafer and the contact resistance at the time of the reverse contact are caused by the tip portion 26 The shape of the contact end is greatly different. In Fig. 4(c) of the comparative example, the contact resistance increases with repeated contact, and the maximum value of the contact resistance becomes about 3.5 Ω. On the other hand, in the first contact end shape 30 of FIG. 4( a ), the increase in the contact resistance at the time of the reverse contact is less than that in FIG. 4( c ), and the maximum value of the contact resistance is also reduced to 2.7 Ω or less. In the second contact end shape 32 of Fig. 4(b), even if the contact is repeated, almost no change in contact resistance is observed, and the initial contact resistance state is maintained. From the results, the shape of the contact end of the needle tip portion 26 is preferably a shape having a circular arc on the distal end side, as compared with the circular flat surface shape 34 of the fourth embodiment (c) of the comparative example. To use the first contact end shape 30, a second contact end shape 32 can be used, more preferably.

Next, the probe card 10a belonging to the first modification of the probe card 10 will be described. Fig. 5 is a view showing a partial enlarged view corresponding to a broken line B in Fig. 1 in the probe card 10a. The difference between the probe card 10a and the probe card 10 is that the needle tip portion 26 is composed of two of the curved portion 25 and the vertical portion 28. The differences are explained below.

The curved portion 25 is bent so that the angle formed between the beam portion 24 and the beam portion 24 becomes a predetermined angle θ ₁ , and the angle formed between the curved portion 25 and the vertical portion 28 becomes a predetermined angle θ ₂ . In general, the shorter the length L of the beam portion 24, the higher the needle pressure when the needle 16 contacts the pad, and therefore the needle 16 is preferably formed to be easily deflected. Since the probe card 10a is subjected to bending as described above, there is an advantage that the needle 16 is easily deflected when it contacts the pad as compared with the case where the bending process is not performed. Further, by making θ ₂ close to 180° or increasing the length of the needle tip portion 26, it is also possible to achieve easier deflection.

Further, in the probe cards 10 and 10a, it has been described that the pads of the LSI wafer are arranged in a row in the Y direction, but the pads may be alternately arranged in two rows. Fig. 6 is a view showing the probe card 10b in which the pads are alternately arranged in two rows. In the probe cards 10, 10a, and 10b, when the staggered pads are formed to have a narrow pitch, the pins 16 are sometimes divided into upper and lower sections as shown in Fig. 6. In this case, since the length from the front end of the beam portion 24 of the upper needle 16 to the vertical portion 28 is longer than the probe cards 10, 10a, the pressure can be preferably suppressed by providing the curved portion 25. The production of music. Further, in the probe card 10, the needle 16 has been described as being arranged on two sides as shown in Fig. 2, but the present invention is not limited to this example, and may be arranged, for example, on four sides. In the probe card 10, the needle 16 has been described as extending in a straight line as shown in Fig. 2, but a curved shape may be used as shown in Fig. 7.

Claims (6)

 A probe card includes: a substrate including a wire connected to an external device; and a guiding plate disposed on a lower side of the substrate and parallel to the substrate, and having a plurality of wires penetrating perpendicularly to the surface of the plate a circular through hole; and a plurality of needles, wherein one end is connected to the needle connecting portion on the outer peripheral side of the substrate, and the other end extending toward the center side of the substrate and extending further toward the center side of the substrate via the needle intermediate fixing portion a contact end that is in contact with the pad of the object to be measured, and has an equal diameter over the entire length of the portion other than the contact end of the needle connecting portion of the one end and the other end; the needle system includes: a beam a portion that is fixed to the needle intermediate fixing portion and protrudes from an end surface of the needle intermediate fixing portion on the center side; and a vertical portion that has the equal diameter portion from the front end of the beam portion with respect to the guide portion The side of the lead plate is bent in a vertical direction and vertically passes through the circular through hole, wherein the diameter of the circular through hole is equal to the aforementioned needle Gap size between the diameter is set to a predetermined value; contact end shape of the vertical line portion having a circular arc shape.    The probe card according to claim 1, wherein the contact end shape is a hemispherical shape in which a half of the equal diameter of the vertical portion is a radius.    The probe card according to claim 1, wherein the contact end shape extends from a front end side of the equal diameter of the vertical portion in a predetermined tapered shape, and a front end thereof has a predetermined radius Partially spherical.    The probe card according to any one of claims 1 to 3, wherein the diameter of the needle is set according to a shortest distance between the adjacent needle tips; the beam portion The length is set to be shorter at the target acupressure value as the diameter of the aforementioned needle becomes smaller.    The probe card according to any one of claims 1 to 4, wherein the needle tip portion has a curved portion between a distal end of the beam portion and a vertical portion of the needle tip portion.    The probe card according to any one of the items 1 to 5, wherein the needle intermediate fixing portion is provided on the guide plate or the substrate.