TW201823127A - Device capable of laminating curved surface object and fitting device using the same improves the yield of products - Google Patents

Device capable of laminating curved surface object and fitting device using the same improves the yield of products Download PDF

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TW201823127A
TW201823127A TW105142707A TW105142707A TW201823127A TW 201823127 A TW201823127 A TW 201823127A TW 105142707 A TW105142707 A TW 105142707A TW 105142707 A TW105142707 A TW 105142707A TW 201823127 A TW201823127 A TW 201823127A
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curved
electrode
holding device
vacuum chamber
curved surface
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TW105142707A
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TWI601677B (en
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黃秋逢
黃國書
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陽程科技股份有限公司
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Abstract

The invention provides a device capable of laminating a curved surface object and a fitting device using the same. A curved surface-shaped first positioning part and a second positioning portion whose shape corresponds and complements to the first positioning part are arranged respectively on the surface of a lower substrate and an upper substrate of a lower adsorption platform and an upper adsorption platform, and a lower electrostatic holding device and an upper electrostatic holding device are respectively arranged on the first positioning part and the second positioning part. The lower electrostatic holding device and the upper electrostatic holding device are respectively electrically connected to two sets of first electrode connector set and second electrode connector set, which are connected to an external power supply, so that high-voltage current can be conducted through the electrode part of the lower electrostatic holding device and the upper electrostatic holding device. Under the condition that electrical charges cannot be conducted and released, an insulating film layer located thereon can generate electrostatic forces for being tightly adsorbed onto an upper curved surface object and a lower curved surface object to be laminated. Not only can the curved surface object be adsorbed, the bonding process can also be carried out in a vacuum environment, thereby satisfying the manufacturing process requirement for precise lamination, and improving the yield of products.

Description

可吸附曲面物件之裝置及應用該裝置之貼合設備  Device capable of adsorbing curved objects and bonding device using the same  

本發明係提供一種可吸附曲面物件之裝置及應用該裝置之貼合設備,尤指下吸附平台與上吸附平台之基板表面上為分別設有下靜電保持裝置及上靜電保持裝置,不僅可使用於吸附曲面物件,並可在真空環境下進行貼合製程,進而達到精密貼合製程要求。 The present invention provides a device capable of adsorbing curved objects and a bonding device using the same, in particular, a lower static holding device and an upper static holding device are respectively disposed on the surface of the lower adsorption platform and the upper adsorption platform, which can be used not only It absorbs curved objects and can be bonded in a vacuum environment to meet the requirements of precision bonding process.

按,現今製造產業面臨勞工需求短缺、加工作業容易對環境造成污染的嚴重問題,並在環保意識高漲、人工與經營所需成本等提高的情況下,以及勞力密集而轉型成技術性密集的壓力,業者大都以產業外移或引進外籍勞工的方式來因應生產成本的上漲,或者是運用生產線自動化技術及治具輔助加工的作業模式來改善經營體質與降低成本,以此達到縮減人力、節省製造工時而提高產能之目的。 According to the current situation, the manufacturing industry is facing serious shortages of labor demand, and the processing operations are likely to cause serious pollution to the environment. In the case of high environmental awareness, labor and management costs, and labor-intensive transformation into technically intensive pressures. Most of the operators are responding to the increase in production costs by means of industrial shifts or the introduction of foreign workers, or by using the production line automation technology and the tool-assisted processing mode to improve the management quality and reduce costs, thereby reducing manpower and saving manufacturing. The purpose of increasing production capacity during working hours.

再者,由於液晶顯示器、薄膜觸控面板製作的技術不斷研發與精進,使得新一代的產品應用皆朝向更為輕、薄、省能源、低輻射、可撓性或曲面以及大尺寸化的方向設計,其目的都是為了能提供人類更寬大的視覺介面與更高解析度的色彩,並為人類帶來極佳的便利性與樂趣,因此,顯示介面已成為產業關注的焦點,相關廠商莫不投注資源開發新的顯示技術、新應用,共同為了提升人類的視覺享受而努力。 Furthermore, due to the continuous development and advancement of liquid crystal display and thin film touch panel manufacturing technologies, the new generation of products are oriented toward lighter, thinner, energy-saving, low-radiation, flexible or curved surfaces and large-sized directions. Design, the purpose is to provide humans with a wider visual interface and higher resolution colors, and bring great convenience and fun to humans. Therefore, the display interface has become the focus of industry attention, the relevant manufacturers are not Betting resources develop new display technologies and new applications, and work together to enhance the visual enjoyment of human beings.

然而,隨著液晶顯示器、薄膜觸控面板需求的高速成長,如何提高生產效率及良率是所有製造廠商的期待,面板製程的瓶頸主要是在塗膠及貼合製程,例如偏光板、玻璃基板、光學膜、觸控膜,或者是可撓式主動矩陣有機發光二極體顯示面板之上、下膜、功能膜及封裝膜等,都會對其表面有嚴格的要求,並於各種二基板間的貼合上,常使用透光度較好之光學膠(俗稱水膠)或固態光學膠(OCA膠)作結合,但一般塗膠再壓合的技術容易產生有氣泡、製程時間長與良率低等問題,更加無法應付大尺寸面板的需求,因此製造廠商大都是在真空的環境下進行貼合,並利用網板吸附於基板位移至另一基板下方,再由機台之滾筒在網板的網面上進行加壓滾動,使基板滾貼於另一基板上後結合成為一體,且二基板間之貼合過程為真空狀態不會產生氣泡,便不會導致有光學折射的問題,所以可提高貼合製程的良率,惟該網板滾貼的過程中,為了使網板吸附之基板能夠確實的貼著於另一基板上,滾筒便會施加較大作用力進行滾壓,造成網板反覆的使用下容易受到拉扯而破裂,導致網板破真空而無法緊密吸附於基板上,整體結構相當的不穩定,進而影響到面板貼合製程上的品質與良率,難以達成產能及成本的要求。 However, with the rapid growth of demand for liquid crystal displays and thin film touch panels, how to improve production efficiency and yield is the expectation of all manufacturers. The bottleneck of the panel process is mainly in the coating and bonding processes, such as polarizing plates and glass substrates. , optical film, touch film, or flexible active matrix organic light-emitting diode display panel upper and lower film, functional film and packaging film, etc., have strict requirements on its surface, and between various substrates For the bonding, optical glue (commonly known as water gel) or solid optical glue (OCA glue) with good transparency is often used for bonding, but the technique of applying rubber and re-compression is easy to produce bubbles, and the process time is long and good. The problem of low rate is even more difficult to cope with the demand for large-sized panels. Therefore, most of the manufacturers are laminating in a vacuum environment, and the stencil is adsorbed on the substrate and displaced to the bottom of another substrate, and then the roller of the machine is on the net. Pressing and rolling on the mesh surface of the board, the substrate is rolled onto the other substrate and integrated into one body, and the bonding process between the two substrates is in a vacuum state, no bubbles are generated, and no light is caused. Learning the problem of refraction, so the yield of the bonding process can be improved. However, in the process of rolling the stencil, the roller will exert a large effect in order to make the substrate adsorbed by the stencil adhere to another substrate. The rolling force causes the stencil to be easily pulled and ruptured under the repeated use of the stencil, which causes the stencil to be vacuumed and cannot be closely adhered to the substrate, and the overall structure is rather unstable, thereby affecting the quality and goodness of the panel bonding process. Rate, it is difficult to meet the requirements of capacity and cost.

由於一般液晶面板、觸控面板等大都為一平面,其面板之貼合技術發展已經相當的成熟,雖然貼合技術不斷的改進,但要有極大的創新技術也相對的困難,不過隨著面板製造廠商研發出新的有機發光二極體(OLED)可撓性曲面之面板顯示技術,相較於傳統液晶面板具有視角更廣泛、對比度更佳、低耗電及高反應速率等優點,所以曲面貼合技術的開發是一重要的關鍵,必須尋求能夠穩定的吸附曲面基板之方式,達到 精密貼合、提升製程良率及產能的要求,此即為從事於此行業者所亟欲研究改善之方向所在。 Since the general LCD panel, touch panel, etc. are mostly flat, the development of the panel bonding technology has been quite mature. Although the bonding technology is continuously improved, it is relatively difficult to have great innovation technology, but with the panel. Manufacturers have developed new organic light-emitting diode (OLED) flexible surface panel display technology, which has wider viewing angle, better contrast, lower power consumption and higher reaction rate than traditional liquid crystal panels. The development of the bonding technology is an important key. It is necessary to find a way to stably adsorb the curved substrate to achieve precise fit, improve process yield and productivity. This is what the researchers in this industry want to study and improve. Direction.

故,發明人有鑑於上述習用之問題與缺失,乃搜集相關資料經由多方的評估及考量,並利用從事於此行業之多年研發經驗不斷的試作與修改,始設計出此種可利用靜電力緊密吸附於曲面物件上,並可在真空環境下進行貼合製程之可吸附曲面物件之裝置及應用該裝置之貼合設備發明專利誕生。 Therefore, in view of the above-mentioned problems and shortcomings, the inventors have collected and collected relevant data through various evaluations and considerations, and have used the trial and modification of many years of research and development experience in this industry to design such an electrostatic force. A device for adsorbing a curved object and capable of adhering a process for adsorbing a curved object in a vacuum environment and a patent for a fitting device using the device are born.

本發明之主要目的乃在於下吸附平台、上吸附平台之下基板、上基板表面上為分別設有曲面狀之第一定位部及與第一定位部形成對應互補狀之第二定位部,並於第一、第二定位部上分別設置有下靜電保持裝置及上靜電保持裝置,且各下、上靜電保持裝置分別電性連接有與外部電源相連接之二組第一電極接頭組及第二電極接頭組,便可藉由下、上靜電保持裝置之電極部導通高壓電流,由於電極部之第一電極與第二電極產生之電荷在無法導通釋放的情況下,可使其上的絕緣覆膜層產生靜電力緊密吸附於待貼合之下曲面物件與上曲面物件,不僅可使用於吸附曲面物件以保持一致的曲面形狀,也可在真空的環境下達到精密貼合之製程要求,並提高產品的良率。 The main purpose of the present invention is to provide a first positioning portion having a curved surface and a second positioning portion corresponding to the first positioning portion, respectively, on the lower adsorption platform, the lower substrate of the upper adsorption platform, and the upper substrate surface, and A lower static electricity holding device and an upper static electricity holding device are respectively disposed on the first and second positioning portions, and each of the lower and upper static electricity holding devices is electrically connected to the two sets of first electrode joint groups and the first connected to the external power source The two-electrode connector group can conduct a high-voltage current through the electrode portions of the lower and upper electrostatic holding devices, and the electric charge generated by the first electrode and the second electrode of the electrode portion can be insulated according to the unchargeable discharge. The coating layer generates electrostatic force and is closely adhered to the curved object and the upper curved object to be attached, which can not only be used for adsorbing curved objects to maintain a uniform curved shape, but also can achieve precise fitting process requirements in a vacuum environment. And improve the yield of the product.

本發明之次要目的乃在於該可吸附曲面物件之裝置為可進一步應用於工作機台上,並於下真空腔體與上真空腔體內部之腔室分別設置有下吸附平台及上吸附平台,且下真空腔體與上真空腔體底部分別穿設有複數高度控制器,當工作機台以第二驅動部驅動升降座使上真空腔體移 動靠合至下真空腔體上形成密閉狀態後,便可進行抽氣使腔室內真空度降低至高度真空,再由複數高度控制器帶動上吸附平台朝下吸附平台位移,使下曲面物件與上曲面物件接觸後完成更準確的對位,以及平穩的貼附而不易產生皺褶,進而達到提高產能及降低成本之效用。 The secondary object of the present invention is that the device for adsorbing curved objects can be further applied to the working machine, and the lower adsorption platform and the upper adsorption platform are respectively disposed in the lower vacuum chamber and the inner chamber of the upper vacuum chamber. And the lower vacuum chamber and the bottom of the upper vacuum chamber are respectively provided with a plurality of height controllers, and when the working machine drives the lifting seat with the second driving portion, the upper vacuum chamber moves to the lower vacuum chamber to form a sealed state. After that, the air can be evacuated to reduce the vacuum in the chamber to a high vacuum, and then the plurality of height controllers drive the upper adsorption platform to move downward toward the adsorption platform, so that the lower curved object contacts the upper curved object to complete a more accurate alignment. And the smooth attachment is not easy to produce wrinkles, thereby increasing the productivity and reducing the cost.

本發明之另一目的乃在於當下曲面物件與上曲面物件完成貼合之動作後,工作機台便會驅動上真空腔體退回至原位,由於已貼合之下曲面物件與上曲面物件於下靜電保持裝置、上靜電保持裝置斷電後會因殘留的靜電力使其不易脫離,便可利用第一配氣切換組或第二配氣切換組將外部氣流導入下基板、上基板之複數第一曲面真空孔與第二曲面真空孔形成正壓狀態,使外部氣流通過下靜電保持裝置、上靜電保持裝置上之複數透孔處,再吹向於下曲面物件與上曲面物件使其逐漸脫離於下靜電保持裝置、上靜電保持裝置,即可方便使用者將已貼合之曲面物件取下,以確保下曲面物件與上曲面物件完成穩定貼合的動作。 Another object of the present invention is that after the lower curved object and the upper curved object are finished, the working machine will drive the upper vacuum chamber to return to the original position, because the curved object and the upper curved object have been attached. After the static electricity holding device and the upper static electricity retaining device are powered off, they may be easily separated by the residual electrostatic force, and the first gas distribution group or the second gas distribution switch group may be used to introduce the external gas flow into the lower substrate and the upper substrate. The first curved vacuum hole and the second curved vacuum hole form a positive pressure state, so that the external airflow passes through the lower electrostatic holding device, the plurality of through holes on the upper static holding device, and then blows toward the lower curved object and the upper curved object to gradually Separating from the lower static holding device and the upper static holding device, the user can easily remove the attached curved object to ensure a stable fit of the lower curved object and the upper curved object.

1‧‧‧下吸附平台 1‧‧‧ Lower adsorption platform

11‧‧‧下基板 11‧‧‧ Lower substrate

110‧‧‧下吸附區 110‧‧‧ Lower adsorption zone

111‧‧‧第一定位部 111‧‧‧First Positioning Department

1111‧‧‧第一曲面 1111‧‧‧First surface

112‧‧‧第一曲面真空孔 112‧‧‧First curved vacuum hole

12‧‧‧下靜電保持裝置 12‧‧‧Electrostatic holding device

121‧‧‧電極部 121‧‧‧Electrode

122‧‧‧絕緣覆膜層 122‧‧‧Insulation coating

123‧‧‧透孔 123‧‧‧through hole

13‧‧‧第一電極接頭組 13‧‧‧First electrode joint set

131‧‧‧接頭主體 131‧‧‧Connector body

1311‧‧‧穿置通道 1311‧‧‧through passage

132‧‧‧電極針頭 132‧‧‧electrode needle

133‧‧‧電源引入線 133‧‧‧Power supply line

134‧‧‧O型環 134‧‧‧O-ring

135‧‧‧封合蓋 135‧‧‧ Sealing cover

14‧‧‧第一配氣切換組 14‧‧‧First gas distribution group

141‧‧‧配氣基座 141‧‧‧Gas base

1411‧‧‧流道 1411‧‧‧ runner

142‧‧‧快速接頭 142‧‧‧Quick joint

143‧‧‧塞頭 143‧‧‧ 塞头

144‧‧‧O型環 144‧‧‧O-ring

2‧‧‧上吸附平台 2‧‧‧Upper adsorption platform

21‧‧‧上基板 21‧‧‧Upper substrate

210‧‧‧上吸附區 210‧‧‧Upper adsorption zone

211‧‧‧第二定位部 211‧‧‧Second Positioning Department

2111‧‧‧第二曲面 2111‧‧‧Second surface

212‧‧‧第二曲面真空孔 212‧‧‧Second curved vacuum hole

22‧‧‧上靜電保持裝置 22‧‧‧Upper electrostatic holding device

221‧‧‧電極部 221‧‧‧Electrode

222‧‧‧絕緣覆膜層 222‧‧‧Insulation coating

223‧‧‧透孔 223‧‧‧through hole

23‧‧‧第二電極接頭組 23‧‧‧Second electrode connector set

231‧‧‧接頭主體 231‧‧‧Connector body

2311‧‧‧穿置通道 2311‧‧‧through passage

232‧‧‧電極針頭 232‧‧‧electrode needle

233‧‧‧電源引入線 233‧‧‧Power supply line

234‧‧‧O型環 234‧‧‧O-ring

235‧‧‧封合蓋 235‧‧‧ Sealing cover

24‧‧‧第二配氣切換組 24‧‧‧Second gas distribution group

241‧‧‧配氣基座 241‧‧‧Gas base

2411‧‧‧流道 2411‧‧‧ runner

242‧‧‧快速接頭 242‧‧‧Quick joint

243‧‧‧塞頭 243‧‧‧ 塞头

244‧‧‧O型環 244‧‧‧O-ring

3‧‧‧下曲面物件 3‧‧‧ Lower curved objects

4‧‧‧上曲面物件 4‧‧‧Upper surface objects

5‧‧‧工作機台 5‧‧‧Working machine

50‧‧‧工作區間 50‧‧‧Working interval

51‧‧‧下真空腔體 51‧‧‧Low vacuum chamber

510‧‧‧腔室 510‧‧‧室

511‧‧‧高度控制器 511‧‧‧ Height controller

512‧‧‧移載座 512‧‧‧Transfer seat

5121‧‧‧線性滑軌 5121‧‧‧Linear slides

513‧‧‧第一驅動部 513‧‧‧First Drive Department

52‧‧‧上真空腔體 52‧‧‧Upper vacuum chamber

520‧‧‧腔室 520‧‧‧室

521‧‧‧高度控制器 521‧‧‧ Height controller

522‧‧‧升降座 522‧‧‧ Lifting seat

5221‧‧‧導軌 5221‧‧‧rail

523‧‧‧第二驅動部 523‧‧‧Second drive department

第一圖 係為本發明可吸附曲面物件之裝置之立體分解圖。 The first figure is an exploded perspective view of the apparatus for adsorbing curved objects of the present invention.

第二圖 係為本發明下吸附平台與上吸附平台之立體分解圖。 The second figure is an exploded view of the lower adsorption platform and the upper adsorption platform of the present invention.

第三圖 係為本發明下吸附平台與上吸附平台另一視角之立體分解圖。 The third figure is an exploded view of another view of the lower adsorption platform and the upper adsorption platform of the present invention.

第四圖 係為本發明電極接頭組之立體分解圖。 The fourth figure is an exploded perspective view of the electrode joint set of the present invention.

第五圖 係為本發明電極接頭組另一視角之立體分解圖。 The fifth figure is an exploded perspective view of another view of the electrode joint set of the present invention.

第六圖 係為本發明配氣切換組之立體分解圖。 The sixth figure is an exploded perspective view of the gas distribution switching group of the present invention.

第七圖 係為本發明配氣切換組另一視角之立體分解圖。 The seventh figure is an exploded perspective view of another view of the gas distribution switching group of the present invention.

第八圖 係為本發明可應用該裝置之貼合設備之立體外觀圖。 Figure 8 is a perspective view of a fitting apparatus to which the apparatus can be applied.

第九圖 係為本發明貼合設備進行曲面物件貼合前之前視圖。 The ninth drawing is a front view of the bonding apparatus of the present invention before the curved object is attached.

第十圖 係為本發明貼合設備進行曲面物件貼合後之前視圖。 The tenth figure is a front view of the bonding apparatus of the present invention after the curved object is attached.

為達成上述目的及功效,本發明所採用之技術手段及其構造,茲繪圖就本發明之較佳實施例詳加說明其構造與功能如下,俾利完全瞭解。 In order to achieve the above objects and effects, the technical means and constructions of the present invention will be described in detail with reference to the preferred embodiments of the present invention.

請參閱第一、二、三圖所示,係分別為本發明可吸附曲面物件之裝置之立體分解圖、下吸附平台與上吸附平台之立體分解圖及另一視角之立體分解圖,由圖中可清楚看出,本發明之可吸附曲面物件之裝置為包括有下吸附平台1及上吸附平台2,其中:該下吸附平台1為具有一下基板11,並於下基板11表面上之下吸附區110處設有曲面狀之第一定位部111,且第一定位部111上形成有連續高低起伏之凹陷狀第一曲面1111,再於第一曲面1111處設有連通至下基板11周邊處以抽放外部氣流之複數第一曲面真空孔112,而下基板11之第一定位部111處為設置有抵貼定位於第一曲面1111上之下靜電保持裝置12,並於下靜電保持裝置12包括有電極部121及包覆於電極部121上下二側表面上之複數絕緣覆膜層122,且各絕緣覆膜層122表面上設有與第一曲面真空孔112相連通之複數透孔123;另,下基板11周圍處為設有二組電性連接於下靜電保持裝置12上之第一電極接頭組13,以及可與下基板11的第一曲面真空孔112相連通之第一配氣切換組14。 Please refer to the first, second and third figures, which are respectively an exploded view of the device capable of adsorbing curved objects, an exploded view of the lower adsorption platform and the upper adsorption platform, and an exploded perspective view of another viewing angle. It can be clearly seen that the device for adsorbing curved objects of the present invention includes a lower adsorption platform 1 and an upper adsorption platform 2, wherein the lower adsorption platform 1 has a lower substrate 11 and is below the surface of the lower substrate 11. A first positioning portion 111 having a curved shape is disposed at the adsorption region 110, and the first positioning portion 111 is formed with a concave first curved surface 1111 of continuous high and low undulations, and is further connected to the periphery of the lower substrate 11 at the first curved surface 1111. The first surface of the lower surface of the lower substrate 11 is provided with an electrostatic holding device 12 disposed under the first curved surface 1111, and the lower static electricity holding device is disposed at the first positioning portion 111 of the lower substrate 11 12 includes an electrode portion 121 and a plurality of insulating coating layers 122 covering the upper and lower surfaces of the electrode portion 121, and each of the insulating coating layers 122 is provided with a plurality of through holes communicating with the first curved surface vacuum hole 112. 123; another, next A plurality of first electrode joint groups 13 electrically connected to the lower static electricity holding device 12 and two first gas switching groups 14 connectable with the first curved vacuum holes 112 of the lower substrate 11 are disposed around the plate 11. .

該上吸附平台2為具有一上基板21,並於上基板21表面上之上吸附區210處設有曲面狀之第二定位部211,且第二定位部211上形成有連續高低起伏之凸起狀第二曲面2111,再於第二曲面2111處設有連通至上基板21周邊處以抽放外部氣流之複數第二曲面真空孔212,而上基板21之第二定位部211處為設置有抵貼定位於第二曲面2111上之上靜電保持裝置22,並於上靜電保持裝置22包括有電極部221及包覆於電極部221上下二側表面上之複數絕緣覆膜層222,且各絕緣覆膜層222表面上設有與第二曲面真空孔212相連通之複數透孔223;又,上基板21周圍處為設有二組電性連接於上靜電保持裝置22上之第二電極接頭組23,以及可與上基板21的第二曲面真空孔212相連通之第二配氣切換組24。 The upper adsorption platform 2 has an upper substrate 21, and a second positioning portion 211 having a curved shape is disposed on the upper adsorption surface 210 of the upper substrate 21, and the second positioning portion 211 is formed with a continuous high and low undulation convex. The second curved surface 2111 is formed, and the second curved surface 2111 is provided with a plurality of second curved surface vacuum holes 212 connected to the periphery of the upper substrate 21 for drawing external airflow, and the second positioning portion 211 of the upper substrate 21 is provided with a damper. The electrostatic holding device 22 is disposed on the second curved surface 2111, and the upper electrostatic holding device 22 includes an electrode portion 221 and a plurality of insulating coating layers 222 covering the upper and lower surfaces of the electrode portion 221, and each insulating layer The surface of the coating layer 222 is provided with a plurality of through holes 223 communicating with the second curved surface vacuum hole 212. Further, two sets of second electrode joints electrically connected to the upper static electricity holding device 22 are disposed around the upper substrate 21. The group 23 and the second valve switching group 24 are connectable to the second curved vacuum hole 212 of the upper substrate 21.

再者,本發明之下吸附平台1與上吸附平台2因組裝及結構上大致相同,其二者結構主要僅有上下相對設置的方向不同,以及下基板11之第一定位部111及上基板21之第二定位部211形狀不同形成對應互補狀設計而己,並可依實際的應用配合下曲面物件3、上曲面物件4自由變更第一曲面1111與第二曲面2111相對應的曲面形狀,所以在以下之說明書皆一起進行說明,合予陳明。 Furthermore, in the present invention, the adsorption platform 1 and the upper adsorption platform 2 are substantially identical in assembly and structure, and the structures of the two are mainly different in the direction in which the upper and lower sides are oppositely disposed, and the first positioning portion 111 and the upper substrate of the lower substrate 11 The shape of the second positioning portion 211 of the 21 is different to form a corresponding complementary design, and the curved surface of the first curved surface 1111 and the second curved surface 2111 can be freely changed by the lower curved surface object 3 and the upper curved surface object 4 according to an actual application. Therefore, the following instructions are all explained together and combined with Chen Ming.

請搭配參閱第四、五、六、七圖所示,係分別為本發明電極接頭組之立體分解圖、另一視角之立體分解圖、配氣切換組之立體分解圖及另一視角之立體分解圖,由圖中可清楚看出,其中該下吸附平台1之第一電極接頭組13、第一配氣切換組14與上吸附平台2之第二電極接頭組23、第二配氣切換組24結構上大致相同,且因電極接頭組、配氣 切換組細部之構成亦並非本發明之創作特點,所以在以下之說明書及圖式中皆一起進行說明,而第一電極接頭組13為包括有一接頭主體131,其接頭主體131內部穿置通道1311中穿入有一端連接於電極部121上之電極針頭132,並於電極針頭132之另端垂直連接有延伸出接頭主體131外部之電源引入線133,且電極針頭132與電源引入線133上分別套設有安裝於穿置通道1311二端開口處形成密封狀態之O型環134,再於接頭主體131二相鄰外側邊上利用螺絲鎖固的方式分別結合有用以固定電極針頭132與電源引入線133來防止其脫出之封合蓋135。 Please refer to the fourth, fifth, sixth and seventh figures, which are respectively the three-dimensional exploded view of the electrode joint set of the invention, the three-dimensional exploded view of another viewing angle, the three-dimensional exploded view of the gas distribution switching group and the three-dimensional exploded view of another viewing angle. The exploded view is clearly seen in the figure, wherein the first electrode joint group 13 of the lower adsorption platform 1 , the first gas distribution group 14 and the second electrode joint group 23 of the upper adsorption platform 2, and the second gas distribution switch The structure of the group 24 is substantially the same, and the configuration of the electrode joint group and the gas distribution switching group is not the creative feature of the present invention, so it will be explained together in the following description and drawings, and the first electrode joint group 13 is The connector main body 131 includes an electrode needle 132 having an end connected to the electrode portion 121 and a power source extending from the outside of the connector body 131 at the other end of the electrode needle 132. The wire 133 is introduced, and the electrode needle 132 and the power supply lead 133 are respectively sleeved with O-rings 134 which are installed at the two end openings of the through passages 1311 to form a sealed state, and then on the adjacent outer sides of the joint body 131. The sealing cover 135, which is used to fix the electrode needle 132 and the power supply lead 133 to prevent it from coming out, is respectively coupled by screwing.

然而,上述之第一配氣切換組14為具有複數配氣基座141,其配氣基座141內部形成有流道1411,並於配氣基座141二側之流道1411開口處分別安裝有可外接於外部氣壓源之快速接頭142及塞頭143,且配氣基座141相鄰另側之其他流道1411多個開口處分別與下基板11之第一曲面真空孔112相連通,以及流道1411開口處可透過O型環144密封作為防止漏氣之設計,再由第一電極接頭組13之電源引入線133連接於外部電源,便可藉由第一電極接頭組13提供下靜電保持裝置12整體運作所需之電力。 However, the first gas distribution switching group 14 has a plurality of gas distribution bases 141, and a flow passage 1411 is formed inside the gas distribution base 141, and is installed at the opening of the flow passage 1411 on both sides of the gas distribution base 141. The quick connector 142 and the plug 143 are externally connected to the external air pressure source, and the plurality of openings 1411 adjacent to the other side of the air distribution base 141 are respectively connected to the first curved vacuum hole 112 of the lower substrate 11 . And the opening of the flow channel 1411 can be sealed through the O-ring 144 as a design for preventing air leakage, and then the power supply lead 133 of the first electrode connector group 13 is connected to the external power source, and can be provided by the first electrode connector group 13. The power required for the overall operation of the electrostatic holding device 12.

此外,第二電極接頭組23為包括有一接頭主體231,其接頭主體231內部穿置通道2311中穿入有一端連接於電極部221上之電極針頭232,並於電極針頭232之另端垂直連接有延伸出接頭主體231外部之電源引入線233,且電極針頭232與電源引入線233上分別套設有安裝於穿置通道2311二端開口處形成密封狀態之 O型環234,再於接頭主體231二相鄰外側邊上利用螺絲鎖固的方式分別結合有用以固定電極針頭232與電源引入線233來防止其鬆脫之封合蓋235,而第二配氣切換組24為具有複數配氣基座241,其配氣基座241內部形成有流道2411,並於配氣基座241二側之流道2411開口處分別安裝有可外接於外部氣壓源之快速接頭242及塞頭243,以及配氣基座241相鄰另側之其他流道2411多個開口處分別與上基板21之第二曲面真空孔212相連通,且各流道2411開口處可透過O型環244密封作為防止漏氣之設計,再由第二電極接頭組23之電源引入線233連接於外部電源以提供所需之電力。 In addition, the second electrode connector group 23 includes a connector body 231, and an electrode needle 232 having a one end connected to the electrode portion 221 and a vertical end connected to the electrode pin 232 is inserted into the internal passage 2311 of the connector body 231. There is a power supply lead 233 extending outside the connector body 231, and the electrode needle 232 and the power supply lead 233 are respectively sleeved with an O-ring 234 which is mounted on the opening of the two ends of the through passage 2311 to form a sealed state, and then is connected to the joint body. 231 two adjacent outer sides are respectively screwed together with a sealing cover 235 for fixing the electrode needle 232 and the power supply lead 233 to prevent loosening thereof, and the second gas distribution switching group 24 has a plurality of matching The air base 241 has a flow passage 2411 formed therein, and a quick joint 242 and a plug 243 which can be externally connected to an external air pressure source are respectively installed at the opening of the flow passage 2411 on both sides of the gas distribution base 241. And a plurality of openings of the other flow channels 2411 adjacent to the other side of the gas distribution base 241 are respectively connected to the second curved vacuum holes 212 of the upper substrate 21, and the openings of the respective flow channels 2411 are sealed by the O-ring 244 as Design to prevent air leaks Then the second electrode terminal group 23 of the power introducing line 233 is connected to an external power source provides power required by the.

當本發明於使用時,係先利用第一配氣切換組14之配氣基座141將下吸附平台1之下基板11與下靜電保持裝置12間之空氣經由複數第一曲面真空孔112、流道1411,以及快速接頭142外接於外部氣壓源抽出至外界,並使下基板11之下吸附區110處形成負壓狀態來吸附於下靜電保持裝置12底面處呈一定位,且上吸附平台2之上基板21亦可利用第二配氣切換組24以相同的方式來吸附於上靜電保持裝置22底面處呈一定位,使下靜電保持裝置12、上靜電保持裝置22不易脫離於第一定位部111與第二定位部211。 When the present invention is used, the air between the lower substrate 11 and the lower static electricity holding device 12 of the lower adsorption platform 1 is first passed through the plurality of first curved vacuum holes 112 by using the air distribution base 141 of the first gas distribution switch group 14 . The flow channel 1411, and the quick connector 142 are externally connected to the external air pressure source to be extracted to the outside, and a negative pressure state is formed at the adsorption region 110 under the lower substrate 11 to be adsorbed to the bottom surface of the lower static electricity holding device 12 to be positioned, and the upper adsorption platform The upper substrate 21 can also be adsorbed on the bottom surface of the upper electrostatic holding device 22 in the same manner by the second gas distribution group 24, so that the lower static electricity holding device 12 and the upper static electricity holding device 22 are not easily separated from the first The positioning unit 111 and the second positioning unit 211.

而後便可將待貼合之下曲面物件3放置於下吸附平台1之下基板11上,並利用二組第一電極接頭組13之電源引入線133分別連接於外部電源正極或負極,使下靜電保持裝置12之電極部121經由電極針頭132導通直流的高壓電流後,由於電極部121上之第一電極與第二電極產生之電荷在無法導通釋放的情況下,可使其上的絕緣覆膜層 122產生靜電力,並於電壓持續的作用下,可利用此靜電力緊密吸附於待貼合之下曲面物件3上表面,使下曲面物件3與第一定位部111之第一曲面1111可保持一致的曲面形狀,且不會產生扭曲或起皺等現象,以確保下曲面物件3良好的曲面度,同理亦可將待貼合之上曲面物件4放置於上吸附平台2之上基板21下方處,並利用二組第二電極接頭組23分別連接於外部電源正極與負極,使上靜電保持裝置22之電極部221導通直流的高壓電流後,可利用其上的絕緣覆膜層222產生之靜電力緊密吸附於待貼合之上曲面物件4下表面,且上曲面物件4與第二定位部211之第二曲面2111可保持一致的曲面形狀。 Then, the curved object 3 to be attached can be placed on the lower substrate 11 of the lower adsorption platform 1 and connected to the positive or negative external power source by the power supply lead 133 of the two sets of first electrode connector groups 13, respectively. When the electrode portion 121 of the electrostatic holding device 12 conducts a direct current high-voltage current through the electrode needle 132, the electric charge generated by the first electrode and the second electrode on the electrode portion 121 can be insulated and discharged. The film layer 122 generates an electrostatic force, and under the action of the voltage, the electrostatic force can be closely adhered to the upper surface of the curved object 3 to be bonded, so that the first curved surface of the lower curved object 3 and the first positioning portion 111 is 1111. The shape of the curved surface can be maintained without distortion or wrinkling, so as to ensure a good curved surface of the lower curved object 3, and the curved object 4 to be attached can be placed on the upper adsorption platform 2. The lower portion of the substrate 21 is connected to the external power source positive electrode and the negative electrode by the two sets of second electrode connector groups 23, and the electrode portion 221 of the upper static electricity holding device 22 is turned on by the direct current high voltage current, and the upper electrode can be utilized. Edge of the coating layer 222 generates a tightly curved shape of the electrostatic adsorption on the lower surface of the curved object 4 to be affixed on the engagement, and the object 4 and the second positioning surface portion 211 of the second surface 2111 can be consistent.

本發明之下吸附平台1與上吸附平台2可利用下靜電保持裝置12、上靜電保持裝置22導通直流的高壓電流,使其產生的靜電力緊密吸附於下曲面物件3與上曲面物件4表面上,並與下基板11之第一定位部111、上基板21之第二定位部211可保持一致的曲面形狀,以有效解決曲面物件難以穩定吸附且貼合不夠精密之問題,亦可配合下曲面物件3與上曲面物件4實際的應用自由變更下基板11之第一定位部111及上基板21之第二定位部211相對應的曲面形狀,不僅可使用於常壓環境,也可在真空環境下進行貼合製程,以改善先前技術在真空環境下無法倚靠真空吸附於曲面物件之問題,進而達到精密貼合之製程要求,並提高產品的良率,更具實用性之效果。 The adsorption platform 1 and the upper adsorption platform 2 of the present invention can utilize the lower static electricity holding device 12 and the upper static electricity holding device 22 to conduct a direct current high-voltage current, so that the electrostatic force generated by the adsorption platform 1 is closely adhered to the surface of the lower curved surface object 3 and the upper curved surface object 4. The surface of the first positioning portion 111 of the lower substrate 11 and the second positioning portion 211 of the upper substrate 21 can be maintained in a curved shape to effectively solve the problem that the curved object is difficult to be stably adsorbed and the fitting is not precise enough. The actual application of the curved object 3 and the upper curved object 4 can change the curved shape corresponding to the first positioning portion 111 of the lower substrate 11 and the second positioning portion 211 of the upper substrate 21, and can be used not only in a normal pressure environment but also in a vacuum. The bonding process is carried out under the environment to improve the problem that the prior art cannot rely on vacuum adsorption on curved objects in a vacuum environment, thereby achieving the process requirements of precision bonding, improving the yield of the product, and more practical effects.

請同時參閱第八、九、十圖所示,係分別為本發明可應用該裝置之貼合設備之立體外觀圖、貼合設備進行曲面物件貼合前之前視圖及曲面物件貼合後之前視圖,其中該下吸附平台1與上吸附平台2為分別 設置於工作機台5上,並於工作機台5包括有一下真空腔體51及與下真空腔體51形成上下相對設置之上真空腔體52,且下真空腔體51與上真空腔體52內部所具之腔室510、520分別設置有下吸附平台1及上吸附平台2,再於工作機台5之下真空腔體51與上真空腔體52之間形成有一工作區間50。 Please also refer to the eighth, ninth, and tenth drawings, which are respectively a front view of the bonding device to which the device can be applied, and a front view of the front view and the curved object before the surface object is attached. The lower adsorption platform 1 and the upper adsorption platform 2 are respectively disposed on the working machine 5, and the working machine 5 includes a lower vacuum chamber 51 and a lower and lower vacuum chamber 51 formed above and below the upper vacuum chamber The body 52, and the lower vacuum chamber 51 and the chambers 510, 520 provided inside the upper vacuum chamber 52 are respectively provided with a lower adsorption platform 1 and an upper adsorption platform 2, and then under the working machine 5, the vacuum chamber 51 and A working section 50 is formed between the upper vacuum chambers 52.

再者,下真空腔體51、上真空腔體52之腔室510、520底部為分別穿設有連結於下吸附平台1、上吸附平台2上可帶動其上下位移之複數高度控制器511、521,並於下真空腔體51之複數高度控制器511下方處設有移載座512,且移載座512底部二側處設有橫向之線性滑軌5121,以及位於二線性滑軌5121間用以帶動移載座512橫向位移調整之第一驅動部513,例如可利用馬達、氣壓缸驅動齒輪組、螺桿、伸縮桿或連桿等,而上真空腔體52之複數高度控制器521上方處則設有升降座522,並於升降座522四個角落處設有縱向之導軌5221,以及位於各二相鄰導軌5221間用以帶動升降座522縱向往復位移之第二驅動部523,例如可利用馬達、氣壓缸驅動齒輪組、螺桿、伸縮桿或連桿等,便可藉由電控系統進行相關的驅動與操作控制、即時偵測與狀態診斷等,以供整體系統正常的運作,舉凡運用本發明說明書及圖式內容所為之簡易修飾及等效結構變化,均應同理包含於本發明之專利範圍內,合予陳明。 Furthermore, the bottoms of the lower vacuum chamber 51 and the chambers 510 and 520 of the upper vacuum chamber 52 are respectively provided with a plurality of height controllers 511 connected to the lower adsorption platform 1 and the upper adsorption platform 2 for driving the upper and lower displacements thereof. 521, and a transfer base 512 is disposed below the plurality of height controllers 511 of the lower vacuum chamber 51, and a horizontal linear slide 5121 is disposed at two sides of the bottom of the transfer base 512, and is located between the two linear slides 5121. The first driving portion 513 for driving the lateral displacement adjustment of the transfer base 512 can be, for example, a motor, a pneumatic cylinder driving gear set, a screw, a telescopic rod or a connecting rod, etc., and the upper height controller 521 of the upper vacuum chamber 52 is above. A lifting base 522 is provided at the four corners of the lifting base 522, and a second driving portion 523 is disposed between the two adjacent guiding rails 5221 for driving the lifting and lowering of the lifting base 522. The motor, the pneumatic cylinder drive gear set, the screw, the telescopic rod or the connecting rod can be used to perform related driving and operation control, instant detection and status diagnosis through the electronic control system, etc., for the normal operation of the overall system. Use this Simple modifications and equivalent structures change out the specification and drawings whom content, should be included within the scope of patent empathy present invention, together to Chen.

當本發明於使用時,係先將待貼合之下曲面物件3與上曲面物件4為分別利用下吸附平台1之下靜電保持裝置12、上吸附平台2之上靜電保持裝置22通電後產生的靜電力予以吸附定位,並由工作機台 5以第二驅動部523驅動升降座522使上真空腔體52向下移動至下真空腔體51進行對位,且待上真空腔體52靠合至下真空腔體51上形成密閉狀態後,便可對下真空腔體51與上真空腔體52之工作區間50進行抽氣使腔室510、520內真空度降低至高度真空,再由複數高度控制器511、521伸長以分別帶動下吸附平台1及/或上吸附平台2相對向內位移,使下曲面物件3與上曲面物件4接觸後可更準確的對位,以及平穩的貼附而不易產生皺褶,並提高產品的良率。 When the present invention is used, the curved surface object 3 and the upper curved surface object 4 to be bonded are respectively generated by using the electrostatic holding device 12 under the lower adsorption platform 1 and the electrostatic holding device 22 above the upper adsorption platform 2 to generate electricity. The electrostatic force is adsorbed and positioned, and the lifting mechanism 523 is driven by the working machine 5 by the second driving portion 523 to move the upper vacuum chamber 52 downward to the lower vacuum chamber 51 for alignment, and the vacuum chamber 52 is to be placed. After the closed state is formed on the lower vacuum chamber 51, the working section 50 of the lower vacuum chamber 51 and the upper vacuum chamber 52 can be evacuated to reduce the vacuum in the chambers 510 and 520 to a high vacuum, and then The plurality of height controllers 511, 521 are elongated to respectively drive the lower adsorption platform 1 and/or the upper adsorption platform 2 to be relatively inwardly displaced, so that the lower curved object 3 can be more accurately aligned after being in contact with the upper curved object 4, and the smooth sticker It is not easy to produce wrinkles and improve the yield of the product.

而下曲面物件3與上曲面物件4完成精密貼合之動作後,工作機台5便會分別驅動下真空腔體51與上真空腔體52使下吸附平台1及/或上吸附平台2相對向外退回至原位,由於已貼合之下曲面物件3與上曲面物件4於下靜電保持裝置12、上靜電保持裝置22斷電後會因殘留的靜電力,使其不易脫離於下吸附平台1與上吸附平台2,便可利用第一配氣切換組14或第二配氣切換組24將外部氣流導入於下基板11之複數第一曲面真空孔112、上基板21之複數第二曲面真空孔212形成正壓狀態,使外部氣流通過下靜電保持裝置12、上靜電保持裝置22上之複數透孔123、223處,再吹向於下曲面物件3與上曲面物件4表面上,使其隨著下吸附平台1與上吸附平台2退回而逐漸脫離於下靜電保持裝置12、上靜電保持裝置22,即可方便將已貼合之下曲面物件3與上曲面物件4取下,以確保下曲面物件3與上曲面物件4完成穩定貼合的動作,進而達到提高產能及降低成本之效用。 After the lower curved object 3 and the upper curved object 4 complete the precise fitting action, the working machine 5 drives the lower vacuum chamber 51 and the upper vacuum chamber 52 respectively to make the lower adsorption platform 1 and/or the upper adsorption platform 2 opposite. Returning to the original position, the surface object 3 and the upper curved object 4 are not easily detached from the lower adsorption due to residual electrostatic force after the lower static electricity holding device 12 and the upper static electricity holding device 22 are powered off. The platform 1 and the upper adsorption platform 2 can introduce the external airflow into the plurality of first curved vacuum holes 112 and the upper substrate 21 of the lower substrate 11 by using the first gas distribution group 14 or the second gas distribution group 24 The curved vacuum hole 212 forms a positive pressure state, and the external airflow passes through the lower static electricity holding device 12, the plurality of through holes 123, 223 on the upper static electricity holding device 22, and is blown onto the surfaces of the lower curved object 3 and the upper curved object 4, When the lower adsorption platform 1 and the upper adsorption platform 2 are retracted and gradually separated from the lower static electricity holding device 12 and the upper static electricity holding device 22, the curved surface object 3 and the upper curved surface object 4 can be conveniently removed. To ensure that the lower surface object 3 and the upper curve 4 to complete the bonding object stable operation, and then to increase productivity and lower the utility costs.

是以,本發明主要為針對該下吸附平台1、上吸附平台2之下基板11、上基板21表面上為分別設置有下靜電保持裝置12及上 靜電保持裝置22,且下靜電保持裝置12、上靜電保持裝置22分別電性連接有二組第一電極接頭組13及第二電極接頭組23,便可藉由電極部121、221導通高壓電流,由於電極部121、221產生之電荷無法導通釋放,並於電壓持續的作用下,可使其上的絕緣覆膜層122、222產生靜電力而緊密吸附於待貼合之下曲面物件3與上曲面物件4,不僅可使用於吸附曲面物件保持一致的曲面形狀,也可在真空的環境下達到精密貼合之製程要求,並提高產品的良率。 Therefore, the present invention mainly provides a lower static electricity holding device 12 and an upper static electricity holding device 22, and a lower static electricity holding device 12, respectively, on the lower substrate 1, the upper substrate 11, and the upper substrate 21 of the upper adsorption platform 2. The upper electrostatic holding device 22 is electrically connected to the two sets of the first electrode connector group 13 and the second electrode connector group 23, respectively, and the high voltage current can be turned on by the electrode portions 121 and 221, and the electric charges generated by the electrode portions 121 and 221 cannot be The conduction is released, and under the action of the voltage, the insulating coating layers 122, 222 on the surface can be electrostatically attracted to the curved surface object 3 and the upper curved object 4 to be bonded, which can be used not only for the adsorption surface. The shape of the object maintains a consistent surface shape, and it can also meet the requirements of precision bonding in a vacuum environment and improve the yield of the product.

上述詳細說明為針對本發明一種較佳之可行實施例說明而已,惟該實施例並非用以限定本發明之申請專利範圍,凡其他未脫離本發明所揭示之技藝精神下所完成之均等變化與修飾變更,均應包含於本發明所涵蓋之專利範圍中。 The detailed description of the present invention is intended to be a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and other equivalents and modifications may be made without departing from the spirit of the invention. Changes are intended to be included in the scope of the patents covered by the present invention.

綜上所述,本發明上述之可吸附曲面物件之裝置及應用該裝置之貼合設備為確實能達到其功效及目的,故本發明誠為一實用性優異之發明,實符合發明專利之申請要件,爰依法提出申請,盼 審委早日賜准本案,以保障發明人之辛苦發明,倘若 鈞局有任何稽疑,請不吝來函指示,發明人定當竭力配合,實感德便。 In summary, the device for adsorbing curved surface objects and the bonding device using the same according to the present invention can truly achieve the effect and purpose, and therefore the invention is an invention with excellent practicability, and is in compliance with the application for the invention patent. In order to apply for it, I hope that the trial committee will grant the case as soon as possible to protect the inventor’s hard work. If there is any doubt in the bureau, please do not hesitate to give instructions to the inventor.

Claims (10)

一種可吸附曲面物件之裝置,係包括下吸附平台及上吸附平台,其中:該下吸附平台之下基板表面上為設有曲面狀之第一定位部,並於第一定位部上設置有用以吸附於預設下曲面物件之下靜電保持裝置,且下靜電保持裝置包括有電極部及包覆於電極部二側表面上之複數絕緣覆膜層,再由電極部電性連接有與外部電源相連接以供電極部通電後絕緣覆膜層產生靜電力之二組第一電極接頭組;該上吸附平台為與下吸附平台之下基板上下相對設置,並於上吸附平台之上基板表面上設有與第一定位部形成對應互補狀之第二定位部,且第二定位部上設置有用以吸附於預設上曲面物件與下曲面物件貼合後保持一致曲面形狀之上靜電保持裝置,而上靜電保持裝置為包括有電極部及包覆於電極部二側表面上之複數絕緣覆膜層,並由電極部電性連接有與外部電源相連接以供電極部通電後絕緣覆膜層產生靜電力之二組第二電極接頭組。  The device for adsorbing curved objects comprises a lower adsorption platform and an upper adsorption platform, wherein: a surface of the substrate below the lower adsorption platform is provided with a curved first positioning portion, and is disposed on the first positioning portion. Adsorbing the electrostatic holding device under the preset lower curved surface object, and the lower static electricity holding device comprises an electrode portion and a plurality of insulating coating layers covering the two side surfaces of the electrode portion, and the electrode portion is electrically connected to the external power source Two sets of first electrode joint groups connected to each other for energizing the insulating coating layer after the electrode portion is energized; the upper adsorption platform is disposed above and below the substrate below the lower adsorption platform, and is on the surface of the substrate above the upper adsorption platform The second positioning portion is formed in a complementary shape with the first positioning portion, and the second positioning portion is provided with an electrostatic holding device for adhering to the surface of the predetermined curved surface and the lower curved surface to maintain a uniform curved shape. The upper electrostatic holding device is a plurality of insulating coating layers including an electrode portion and a surface of the electrode portion, and is electrically connected to the external power source by the electrode portion. After the power supply pole portion generating two sets of insulating coating layer a second electrode terminal group of electrostatic forces.   如申請專利範圍第1項所述之可吸附曲面物件之裝置,其中該下基板之第一定位部上為形成有凹陷狀之第一曲面,並於第一曲面處設有複數第一曲面真空孔,且下靜電保持裝置之各絕緣覆膜層表面上設有與第一曲面真空孔相連通之複數透孔,再於下基板周圍處設有與第一曲面真空孔相連通用以將外部氣流導入通過透孔處吹向於預設下曲面物件使其脫離於下靜電保持裝置之第一配氣切換組。  The device of claim 1, wherein the first positioning portion of the lower substrate is formed with a concave first curved surface, and the first curved surface is provided with a plurality of first curved surfaces. a plurality of through holes communicating with the first curved surface vacuum hole are disposed on the surface of each of the insulating film layers of the lower electrostatic preserving device, and are further connected with the first curved surface vacuum hole at the periphery of the lower substrate to externally flow The first gas distribution switching group is introduced through the through hole to blow the preset lower curved object away from the lower static electricity holding device.   如申請專利範圍第2項所述之可吸附曲面物件之裝置,其中該第一配 氣切換組為具有複數配氣基座,其配氣基座內部形成有與第一曲面真空孔相連通之流道,並於流道開口處安裝有可外接於外部氣壓源之快速接頭及塞頭,且流道開口處係透過O型環密封。  The device of claim 2, wherein the first gas distribution group has a plurality of gas distribution bases, and the gas distribution base is internally connected with the first curved vacuum hole. The flow passage is provided with a quick joint and a plug which can be externally connected to an external air pressure source at the opening of the flow passage, and the opening of the flow passage is sealed through the O-ring.   如申請專利範圍第1項所述之可吸附曲面物件之裝置,其中該第一電極接頭組為包括有接頭主體,其接頭主體內部穿置通道穿入有一端連接於下靜電保持裝置的電極部上之電極針頭,並於電極針頭之另端連接有與外部電源正極或負極相連接之電源引入線,且電極針頭與電源引入線上分別套設有安裝於穿置通道開口處形成密封狀態之O型環,再於接頭主體二相鄰外側邊上結合有用以固定電極針頭與電源引入線來防止其脫出之封合蓋。  The device for adsorbing curved objects according to claim 1, wherein the first electrode joint group comprises a joint main body, and an inner passage passage of the joint main body penetrates an electrode portion connected to the lower static electricity holding device at one end. The upper electrode needle is connected to the other end of the electrode needle with a power supply lead connected to the positive or negative pole of the external power source, and the electrode needle and the power supply lead line are respectively sleeved and installed at the opening of the through passage to form a sealed state. The ring and the adjacent outer side of the joint body 2 are combined with a sealing cover for fixing the electrode needle and the power supply lead to prevent it from coming off.   如申請專利範圍第1項所述之可吸附曲面物件之裝置,其中該上基板之第二定位部上為形成有凸起狀之第二曲面,並於第二曲面處設有複數第二曲面真空孔,且上靜電保持裝置之各絕緣覆膜層表面上設有與第二曲面真空孔相連通之複數透孔,再於上基板周圍處設有與第二曲面真空孔相連通用以將外部氣流導入通過透孔處吹向於預設上曲面物件使其脫離於上靜電保持裝置之第二配氣切換組。  The device of claim 1, wherein the second positioning portion of the upper substrate is formed with a convex second curved surface, and the second curved surface is provided with a plurality of second curved surfaces. a vacuum hole, and a plurality of through holes communicating with the second curved vacuum hole are disposed on the surface of each of the insulating coating layers of the electrostatic holding device, and then connected to the second curved vacuum hole at the periphery of the upper substrate to be externally The airflow is introduced through the through hole to the preset upper curved object to be disengaged from the second valve switching group of the upper electrostatic holding device.   如申請專利範圍第1項所述之可吸附曲面物件之裝置,其中該第二配氣切換組為具有複數配氣基座,其配氣基座內部形成有與第二曲面真空孔相連通之流道,並於流道開口處安裝有可外接於外部氣壓源之快速接頭及塞頭,且流道開口處係透過O型環密封。  The device for adsorbing curved objects according to claim 1, wherein the second gas distribution group has a plurality of gas distribution bases, and the gas distribution base is internally connected with the second curved vacuum hole. The flow passage is provided with a quick joint and a plug which can be externally connected to an external air pressure source at the opening of the flow passage, and the opening of the flow passage is sealed through the O-ring.   如申請專利範圍第1項所述之可吸附曲面物件之裝置,其中該第二電極接頭組為包括有接頭主體,其接頭主體內部穿置通道穿入有一端連 接於上靜電保持裝置的電極部上之電極針頭,並於電極針頭之另端連接有與外部電源正極或負極相連接之電源引入線,且電極針頭與電源引入線上分別套設有安裝於穿置通道開口處形成密封狀態之O型環,再於接頭主體二相鄰外側邊上結合有用以固定電極針頭與電源引入線來防止其脫出之封合蓋。  The device for adsorbing curved objects according to claim 1, wherein the second electrode joint group comprises a joint main body, and an inner passage passage of the joint main body penetrates an electrode portion whose one end is connected to the upper electrostatic holding device. The upper electrode needle is connected to the other end of the electrode needle with a power supply lead connected to the positive or negative pole of the external power source, and the electrode needle and the power supply lead line are respectively sleeved and installed at the opening of the through passage to form a sealed state. The ring and the adjacent outer side of the joint body 2 are combined with a sealing cover for fixing the electrode needle and the power supply lead to prevent it from coming off.   一種貼合設備,係包括如申請專利範圍第1至7項中任一項所述之可吸附曲面物件之裝置及工作機台,其中:該工作機台為包括有一下真空腔體及與下真空腔體形成相對設置之上真空腔體,並於下真空腔體與上真空腔體內部腔室分別設置有下吸附平台及上吸附平台,且下真空腔體與上真空腔體底部分別穿設有連結於下吸附平台、上吸附平台上之複數高度控制器,而下真空腔體之複數高度控制器下方處為設有移載座,並於移載座上設有第一驅動部,上真空腔體之複數高度控制器上方處設有升降座,且升降座上設有第二驅動部,用以驅動上真空腔體移動靠合至下真空腔體上使預設下曲面物件與預設上曲面物件完成對位貼合。  A device for attaching an object capable of adsorbing curved surfaces according to any one of claims 1 to 7, wherein the working machine includes a vacuum chamber and a lower portion The vacuum chamber is formed opposite to the vacuum chamber, and the lower adsorption chamber and the upper adsorption platform are respectively disposed in the lower vacuum chamber and the upper chamber of the upper vacuum chamber, and the lower vacuum chamber and the bottom of the upper vacuum chamber are respectively worn. a plurality of height controllers connected to the lower adsorption platform and the upper adsorption platform are disposed, and the lower height controller of the lower vacuum chamber is provided with a transfer seat, and the first driving portion is disposed on the transfer seat. A lifting seat is arranged above the plurality of height controllers of the upper vacuum chamber, and a second driving portion is arranged on the lifting seat for driving the upper vacuum chamber to move to the lower vacuum chamber to make the preset lower curved surface object and Preset the upper surface object to complete the alignment.   如申請專利範圍第8項所述之貼合設備,其中該下真空腔體之移載座底部二側處為設有橫向之線性滑軌,並於二線性滑軌之間設有用以帶動移載座使下真空腔體作橫向位移調整之第一驅動部。  The bonding device of claim 8, wherein the lower side of the bottom of the transfer chamber of the lower vacuum chamber is provided with a horizontal linear slide rail, and is disposed between the two linear slide rails for driving The carrier drives the lower vacuum chamber to adjust the first driving portion of the lateral displacement.   如申請專利範圍第8項所述之貼合設備,其中該上真空腔體之升降座四個角落處為設有縱向之導軌,並於各二相鄰導軌之間設有用以帶動升降座使上真空腔體作縱向往復位移之第二驅動部。  The bonding device of claim 8, wherein the four corners of the lifting chamber of the upper vacuum chamber are longitudinal rails, and are arranged between the two adjacent rails to drive the lifting seat. The upper vacuum chamber is a second driving portion for longitudinal reciprocating displacement.  
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TWI752489B (en) * 2020-05-08 2022-01-11 特銓股份有限公司 Debonding equipment, automatic debonding system and debonding method for wireless electrostatic chuck

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TWI438094B (en) * 2009-07-28 2014-05-21 Hon Hai Prec Ind Co Ltd Absorbing device and bonding apparatus using the same
TWI419022B (en) * 2010-03-16 2013-12-11 Wintek Corp Touch panel and the manufacturing method thereof
CN202098072U (en) * 2011-05-03 2012-01-04 傅斌 Assembling and laminating equipment for flexible printed circuit and face plate
CN102303448B (en) * 2011-08-07 2014-06-25 南京华睿川电子科技有限公司 Great-size touch screen panel joint device and method
TW201444669A (en) * 2013-05-16 2014-12-01 Onation Corp Display device and assembling method thereof
CN105807361A (en) * 2016-04-26 2016-07-27 东旭(昆山)显示材料有限公司 Manufacturing method of light guide plate

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI752489B (en) * 2020-05-08 2022-01-11 特銓股份有限公司 Debonding equipment, automatic debonding system and debonding method for wireless electrostatic chuck

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