TW201821850A - Optical measurement device and method for installing optical part thereof - Google Patents
Optical measurement device and method for installing optical part thereof Download PDFInfo
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Abstract
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本發明有關一種光學量測裝置及其光學部件的安裝方法,尤其是一種可對光學部件進行調整(adjustment)的安裝方法以及採用此安裝方法的光學量測裝置。The present invention relates to an optical measuring device and a method of mounting the optical component thereof, and more particularly to an optical fiber measuring device capable of adjusting an optical component and an optical measuring device using the mounting method.
現有光學量測裝置,例如光譜儀(spectrometer),需要進行精密的組裝來製作,以使多個光學元件,例如透鏡(lens)、光柵(grating)、反射鏡(reflector)以及光感測器(photodetector),能處於適當的位置(position)與方位(orientation),讓光學量測裝置可以維持一定的準確度(accuracy)與精密度(precision)。Existing optical measuring devices, such as spectrometers, require precision assembly to make multiple optical components, such as lenses, gratings, reflectors, and photodetectors. ), can be in the appropriate position and orientation, so that the optical measuring device can maintain a certain accuracy and precision.
一般而言,在進行上述精密組裝的過程中,會啟動光學量測裝置,並調整這些光學元件的位置與方位來進行校正(calibration)。校正完畢後,這些光學元件會被固定,以使這些光學元件的佈置(arrangement)能保持不變。否則,一旦這些光學元件的配置因震動(vibration)而發生改變,將會容易造成準確度與精密度降低,導致光學量測裝置的量測結果失真。In general, during the precision assembly described above, the optical measuring device is activated and the position and orientation of the optical components are adjusted for calibration. Once the correction is complete, the optical components are fixed so that the arrangement of the optical components remains the same. Otherwise, once the configuration of these optical components changes due to vibration, it will easily cause a decrease in accuracy and precision, resulting in distortion of the measurement results of the optical measuring device.
本發明提供一種光學量測裝置,其殼體具有至少一能暴露部分光學部件的開口,其可供膠材(adhesive)塗佈,以幫助固定光學部件於殼體上。The present invention provides an optical metrology apparatus having a housing having at least one opening that exposes a portion of the optical component that is adhesively coated to assist in securing the optical component to the housing.
本發明提供一種光學部件的安裝方法,應用於上述光學量測裝置。The present invention provides a method of mounting an optical component, which is applied to the above optical measuring device.
本發明所提供的光學量測裝置,其包括一殼體以及一光學組件(optical assembly)。殼體包括壁板,而壁板具有至少一開口。光學組件配置於殼體內,並包括一光學部件。光學部件具有一背面。壁板遮蓋背面,而至少一開口暴露部分背面。光學部件可轉動地配置於殼體內,並且被限制沿著一轉軸(rotational axis)而相對壁板轉動。The optical measuring device provided by the invention comprises a casing and an optical assembly. The housing includes a wall panel and the wall panel has at least one opening. The optical component is disposed within the housing and includes an optical component. The optical component has a back side. The wall covers the back side and at least one opening exposes a portion of the back. The optical component is rotatably disposed within the housing and is constrained to rotate relative to the wall along a rotational axis.
本發明所提供的光學部件的安裝方法,其包括以下步驟。將一光學部件可轉動地配置於一殼體內,並限制光學部件沿著一轉軸而相對殼體轉動。接著,利用光學部件沿著轉軸而相對殼體的轉動來校正光學部件。在校正光學部件之後,在至少一開口中形成一連接光學部件與壁板的固化膠(cured adhesive)。A method of mounting an optical component provided by the present invention includes the following steps. An optical component is rotatably disposed in a housing and restricts rotation of the optical component relative to the housing along a rotating shaft. Next, the optical member is corrected by the rotation of the optical member relative to the housing along the rotating shaft. After correcting the optical component, a cured adhesive that connects the optical component to the wall is formed in at least one of the openings.
基於上述,由於開口暴露部分光學部件,因此固化膠可以從開口直接形成,並連接殼體與光學部件,以幫助固定光學部件於殼體上,讓光學部件與壁板之間難以產生相對運動,以幫助維持光學量測裝置的準確度與精密度。Based on the above, since the opening exposes a part of the optical component, the curing glue can be directly formed from the opening and connect the housing and the optical component to help fix the optical component on the housing, so that it is difficult to generate relative motion between the optical component and the wall panel. To help maintain the accuracy and precision of the optical measurement device.
為讓本發明的特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式,作詳細說明如下。In order to make the features and advantages of the present invention more comprehensible, the following detailed description of the embodiments and the accompanying drawings are set forth below.
圖1A是本發明一實施例的光學量測裝置的立體示意圖,而圖1B是圖1A中的光學量測裝置的俯視示意圖。請參閱圖1A與圖1B,光學量測裝置100包括殼體110與光學組件120,而光學組件120配置於殼體110內。殼體110可包括一塊蓋板(cover,未繪示),以使殼體110能包圍整個光學組件120,從而保護光學組件120以及減少外界光線對光學組件120的干擾。此外,殼體110(包含蓋板)的內表面可為黑色,或是塗有低反射率的膜層,以降低光線的反射,減少光學量測裝置100內部所產生的雜散光(stray light)。1A is a schematic perspective view of an optical measuring device according to an embodiment of the present invention, and FIG. 1B is a schematic top view of the optical measuring device of FIG. 1A. Referring to FIGS. 1A and 1B , the optical measuring device 100 includes a housing 110 and an optical component 120 , and the optical component 120 is disposed in the housing 110 . The housing 110 can include a cover (not shown) to enable the housing 110 to enclose the entire optical assembly 120, thereby protecting the optical assembly 120 and reducing external light interference with the optical assembly 120. In addition, the inner surface of the housing 110 (including the cover) may be black or coated with a low reflectivity film to reduce reflection of light and reduce stray light generated inside the optical measuring device 100. .
為了清楚呈現本實施例光學量測裝置100的構造,圖1A與圖1B所繪示的是移除蓋板之後的光學量測裝置100。關於上述蓋板,其可以是硬板(rigid plate),例如金屬板或陶瓷板,並且可以用螺鎖(screwing)或膠黏(adhering)來組裝。所以,蓋板的主要構造簡單,縱使圖式沒有繪示出蓋板,本發明所屬技術領域中具有通常知識者仍然可以知道如何據以實施上述蓋板。In order to clearly show the configuration of the optical measuring device 100 of the present embodiment, FIG. 1A and FIG. 1B illustrate the optical measuring device 100 after removing the cover. Regarding the above cover plate, it may be a rigid plate such as a metal plate or a ceramic plate, and may be assembled by screwing or adhering. Therefore, the main construction of the cover is simple, and even if the cover is not shown in the drawings, those skilled in the art can still know how to implement the cover.
光學組件120包括多個光學部件。以圖1A與圖1B為例,光學組件120包括五個光學部件121、122、123、124與125。在本實施例中,光學部件121為光輸入部,並具有擋光片(baffle)121a與狹縫(slit,未繪示)。擋光片121a具有供光線穿透的孔洞(aperture),並配置於狹縫與光學部件122之間,而擋光片121a在孔洞周圍的部分能遮擋入射角過大的光線,以降低或消除雜散光。光學部件122為反射式準直鏡(reflective collimating mirror)。光學部件123包括光柵與固定此光柵的基座,其中光柵例如是平面光柵(planar grating)。光學部件124可用來作為聚焦鏡(focusing mirror),其中光學部件122與124能反射光線。光學部件125為光感測器,其可以是感光耦合元件(Charge-coupled Device,CCD)或互補式金屬氧化物半導體(Complementary Metal–Oxide–Semiconductor,CMOS)。Optical assembly 120 includes a plurality of optical components. Taking FIG. 1A and FIG. 1B as an example, the optical assembly 120 includes five optical components 121, 122, 123, 124, and 125. In this embodiment, the optical component 121 is a light input portion and has a baffle 121a and a slit (not shown). The light blocking piece 121a has an aperture for light to pass through, and is disposed between the slit and the optical member 122, and a portion of the light blocking piece 121a around the hole can block the light having an excessive incident angle to reduce or eliminate the impurity. astigmatism. The optical component 122 is a reflective collimating mirror. The optical component 123 includes a grating and a susceptor that fixes the grating, wherein the grating is, for example, a planar grating. Optical component 124 can be used as a focusing mirror in which optical components 122 and 124 can reflect light. The optical component 125 is a photo sensor, which may be a Charge-coupled Device (CCD) or a Complementary Metal-Oxide-Semiconductor (CMOS).
在圖1A與圖1B所示的實施例中,光學量測裝置100可為光譜儀,而光學組件120包括五個光學部件121至125,但在其他實施例中,光學量測裝置100可為干涉儀(interferometer)或單光儀(monochromator),而光學組件120所包括的光學部件的數量可為至少一個,其中光學組件120可包括分光鏡(beam splitter)、光纖(fiber)及/或餘弦校正器(cosine corrector)。因此,圖1A與圖1B所示的光學量測裝置100僅供舉例說明,本發明所揭露的光學量測裝置(例如光學量測裝置100)並不限定只能是光譜儀,也不限定光學組件(例如光學組件120)所包括的光學部件的數量與種類。In the embodiment illustrated in FIGS. 1A and 1B, the optical metrology apparatus 100 can be a spectrometer, and the optical assembly 120 includes five optical components 121-125, but in other embodiments, the optical metrology apparatus 100 can be an interference. An interferometer or a monochromator, and the optical component 120 may include at least one optical component, wherein the optical component 120 may include a beam splitter, a fiber, and/or a cosine correction. (cosine corrector). Therefore, the optical measuring device 100 shown in FIG. 1A and FIG. 1B is for illustrative purposes only, and the optical measuring device (for example, the optical measuring device 100) disclosed in the present invention is not limited to a spectrometer, and is not limited to an optical component. The number and type of optical components included (e.g., optical assembly 120).
圖1C是圖1A中沿線1C-1C剖面所繪示的剖面示意圖。請參閱圖1A與圖1C,殼體110包括一塊壁板111,而壁板111具有至少一開口111h。以圖1A為例,壁板111具有兩個開口111h。壁板111遮蓋光學部件124,而這些開口111h皆暴露部分光學部件124。詳細而言,光學部件124與壁板111相鄰(adjacent to),且光學部件124具有背面242b,其中壁板111遮蓋背面242b,而這些開口111h暴露部分背面242b,如圖1C所示。1C is a schematic cross-sectional view taken along line 1C-1C of FIG. 1A. Referring to FIGS. 1A and 1C, the housing 110 includes a wall 111 and the wall 111 has at least one opening 111h. Taking FIG. 1A as an example, the wall panel 111 has two openings 111h. The wall 111 covers the optical component 124, and the openings 111h expose a portion of the optical component 124. In detail, the optical member 124 is adjacent to the wall panel 111, and the optical member 124 has a back surface 242b in which the wall panel 111 covers the back surface 242b, and these openings 111h expose a portion of the back surface 242b as shown in FIG. 1C.
請參閱圖1C,光學量測裝置100還包括至少一固化膠130,其連接壁板111與背面242b。固化膠130可由膠材固化(cured)而成,其中此膠材可為賓漢流體(Bingham fluid),所以膠材在沒固化而變成固化膠130以前,膠材可以被塗佈(applied)在表面上。由於壁板111的開口111h暴露光學部件124的背面242b,因此膠材可以容易地從開口111h塗佈在背面242b與壁板111上,並能進入背面242b與壁板111之間的縫隙。等到膠材固化之後,會形成從開口111h延伸至背面242b的固化膠130,其能固定光學部件124於壁板111上,以使光學部件124與壁板111之間不會產生相對運動(relative motion)。如此,光學部件124能被固定在適當的位置與方位上,以幫助維持光學量測裝置100的準確度與精密度。Referring to FIG. 1C, the optical measuring device 100 further includes at least one curing adhesive 130 connecting the wall plate 111 and the back surface 242b. The curing glue 130 can be cured by a glue material, wherein the glue material can be a Bingham fluid, so the glue material can be coated before it is cured and becomes the curing glue 130. On the surface. Since the opening 111h of the wall 111 exposes the back surface 242b of the optical member 124, the glue can be easily applied from the opening 111h to the back surface 242b and the wall 111, and can enter the gap between the back surface 242b and the wall 111. After the adhesive is cured, a cured adhesive 130 extending from the opening 111h to the back surface 242b is formed, which can fix the optical member 124 on the wall 111 so that relative movement between the optical member 124 and the wall 111 does not occur (relative Motion). As such, the optical component 124 can be secured in position and orientation to help maintain the accuracy and precision of the optical metrology apparatus 100.
在圖1A所示的實施例中,各個開口111h的形狀為條狀,且這些條狀的開口111h的延伸方向與形狀實質上彼此相同。例如,各個開口111h可沿著垂直方向而延伸,如圖1A所示。不過,在其他實施例中,開口111h可沿著水平方向延伸,或是沿著不平行也不垂直水平方向的傾斜方向延伸,而壁板111所具有的開口111h的數量可以僅為一個或是兩個以上。此外,開口111h的形狀也可以是圓形、矩形或三角形等幾何形狀,且這些幾何形狀的開口111h可呈陣列排列。至少兩個開口111h的形狀可以明顯不同。例如,其中一個開口111h的形狀是矩形,另一個開口111h的形狀是三角形。In the embodiment shown in FIG. 1A, the respective openings 111h are strip-shaped, and the extending directions and shapes of the strip-shaped openings 111h are substantially identical to each other. For example, each of the openings 111h may extend in the vertical direction as shown in FIG. 1A. However, in other embodiments, the opening 111h may extend in the horizontal direction or in an oblique direction that is not parallel or perpendicular to the horizontal direction, and the number of the openings 111h of the wall 111 may be only one or More than two. In addition, the shape of the opening 111h may also be a geometric shape such as a circle, a rectangle or a triangle, and the openings 111h of these geometric shapes may be arranged in an array. The shape of the at least two openings 111h can be significantly different. For example, one of the openings 111h has a rectangular shape, and the other opening 111h has a triangular shape.
圖1D是圖1A中沿線1D-1D剖面所繪示的剖面示意圖。請參閱圖1A與圖1D,光學量測裝置100還可包括至少一擋塊140。擋塊140固定於開口111h中,並遮蓋背面242b,其中擋塊140的數量可以相同於開口111h的數量。以圖1A與圖1D為例,壁板111所具有的開口111h的數量為兩個,所以光學量測裝置100所包括的擋塊140的數量也為兩個。這些擋塊140能分別固定於這些開口111h中,以使壁板111能遮蓋整面背面242b,讓外界光線無法從開口111h進入殼體110內部。1D is a schematic cross-sectional view taken along line 1D-1D of FIG. 1A. Referring to FIGS. 1A and 1D , the optical measuring device 100 may further include at least one stopper 140 . The stopper 140 is fixed in the opening 111h and covers the back surface 242b, wherein the number of the stoppers 140 may be the same as the number of the openings 111h. Taking FIG. 1A and FIG. 1D as an example, the number of the openings 111h of the wall plate 111 is two, so the number of the stoppers 140 included in the optical measuring device 100 is also two. The stoppers 140 can be respectively fixed in the openings 111h so that the wall plate 111 can cover the entire back surface 242b, so that external light cannot enter the inside of the casing 110 from the opening 111h.
如此,外界光線無法從任何一個開口111h進入殼體110內部,以降低會干擾光學部件125(光感測器)的雜散光。此外,擋塊140固定於開口111h的方法可以是膠黏、螺鎖或干涉配合(interference fit)。以膠黏為例,擋塊140可採用黑色膠材將壁板111固定於開口111h,而黑色膠材具有低反射率,並能吸收光線,從而能有效防止外界光線進入光學量測裝置100內部。Thus, external light cannot enter the inside of the casing 110 from any one of the openings 111h to reduce stray light that may interfere with the optical member 125 (photosensor). In addition, the method of fixing the stopper 140 to the opening 111h may be a glue, a screw lock or an interference fit. For example, in the case of adhesive, the stopper 140 can be fixed to the opening 111h by a black rubber material, and the black rubber material has low reflectivity and can absorb light, thereby effectively preventing external light from entering the optical measuring device 100. .
各個擋塊140可具有凸緣(flange)142,而開口111h可配合(fitting)凸緣142。具體而言,壁板111還具有外表面111a、內表面111b以及至少一凸塊111c。內表面111b相對於外表面111a,並面對光學部件124的背面242b。凸塊111c形成於開口111h中,並具有從開口111h側壁延伸的端面111e,而端面111e位於內表面111b與外表面111a之間,其中端面111e的形狀可以是環形。在這些擋塊140分別固定於這些開口111h之後,擋塊140能插設於開口111h內,並且可以埋入壁板111中,而凸緣142會抵靠凸塊111c的端面111e,如圖1D所示。Each of the stops 140 can have a flange 142 and the opening 111h can fit the flange 142. Specifically, the wall panel 111 further has an outer surface 111a, an inner surface 111b, and at least one bump 111c. The inner surface 111b is opposite the outer surface 111a and faces the back surface 242b of the optical member 124. The bump 111c is formed in the opening 111h and has an end surface 111e extending from the side wall of the opening 111h, and the end surface 111e is located between the inner surface 111b and the outer surface 111a, wherein the end surface 111e may have a ring shape. After the stoppers 140 are respectively fixed to the openings 111h, the stopper 140 can be inserted into the opening 111h and can be buried in the wall 111, and the flange 142 will abut the end surface 111e of the projection 111c, as shown in FIG. 1D. Shown.
上述凸塊111c與凸緣142之間的抵靠能阻擋從凸緣142與開口111h之間縫隙進入的外界光線,以有效阻止外界光線進入光學量測裝置100的內部,進而更能減少外界光線對光學組件120的干擾。然而,須說明的是,在其他實施例中,即使沒有凸緣142,擋塊140也能阻止大部分外界光線進入光學量測裝置100的內部,所以擋塊140不限定一定要具有凸緣142。此外,在本實施例中,固定在開口111h內的擋塊140不會接觸光學部件124。如此,當擋塊140遭到碰撞時,擋塊140不會碰觸到光學部件124而改變光學部件124原來的位置與方位,進而減少對準確度與精密度所造成的不良影響。The abutment between the protrusion 111c and the flange 142 can block external light entering from the gap between the flange 142 and the opening 111h, so as to effectively prevent external light from entering the interior of the optical measuring device 100, thereby further reducing external light. Interference with optical component 120. However, it should be noted that in other embodiments, the stopper 140 can prevent most of the external light from entering the interior of the optical measuring device 100 even without the flange 142, so the stopper 140 is not limited to have the flange 142. . Further, in the present embodiment, the stopper 140 fixed in the opening 111h does not contact the optical member 124. Thus, when the stopper 140 is collided, the stopper 140 does not touch the optical member 124 to change the original position and orientation of the optical member 124, thereby reducing the adverse effects on accuracy and precision.
值得一提的是,本實施例是利用擋塊140來遮蓋開口111h,以阻擋外界光線,但是在其他實施例中,也可利用膠帶或電路板等其他物體來遮蓋開口111h。或者,殼體110還可以包括從壁板111延伸的外牆(fence,未繪示),其中此外牆與壁板111圍繞成一塊可供其他元件(例如電路板)配置的容置區域,而此外牆也能阻擋外界光線,從而達到減少外界光線對光學組件120干擾的效果。因此,壁板111的開口111h不限定只能使用擋塊140來遮蓋。It is worth mentioning that the embodiment uses the stopper 140 to cover the opening 111h to block external light, but in other embodiments, other objects such as a tape or a circuit board may be used to cover the opening 111h. Alternatively, the housing 110 may further include an outer wall (not shown) extending from the wall panel 111, wherein the outer wall and the wall panel 111 are surrounded by a receiving area for other components (such as a circuit board). In addition, the wall can also block external light, thereby reducing the interference of external light on the optical component 120. Therefore, the opening 111h of the wall panel 111 is not limited to being covered by only the stopper 140.
光學部件124可以是包括至少兩個元件的組件(assembly)。以圖1D為例,光學部件124可包括承載件242與光學元件241,其中光學元件241固定於承載件242上。承載件242具有背面242b,並位於光學元件241與壁板111之間。此外,在本實施例中,光學元件241為聚焦鏡,其為一種反射鏡,但在其他實施例中,光學元件241的固定方式也可以應用於其他的光學元件,例如光柵或反射式準直鏡。Optical component 124 can be an assembly that includes at least two components. Taking FIG. 1D as an example, the optical component 124 can include a carrier 242 and an optical component 241, wherein the optical component 241 is secured to the carrier 242. The carrier 242 has a back surface 242b and is located between the optical element 241 and the wall 111. In addition, in the present embodiment, the optical element 241 is a focusing mirror, which is a kind of mirror, but in other embodiments, the fixing manner of the optical element 241 can also be applied to other optical elements, such as grating or reflective collimation. mirror.
圖2A至圖2E是圖1D中的光學部件的安裝方法的示意圖。以上主要描述光學量測裝置100大體上的構造,接下來將配合圖2A至圖2D詳細說明光學部件124的細部構造以及安裝方法。2A to 2E are schematic views of a method of mounting the optical component of Fig. 1D. The above is mainly described in the general configuration of the optical measuring apparatus 100, and the detailed configuration and mounting method of the optical member 124 will be described in detail below with reference to FIGS. 2A to 2D.
請參閱圖2A與圖2B,其中圖2B是圖1A中的光學量測裝置100的剖面立體示意圖,其詳細呈現光學量測裝置100的局部構造以及光學部件124,而圖2A為圖2B的爆炸示意圖。在光學部件124的安裝方法中,會將光學部件124可轉動地配置於殼體110內,並限制光學部件124沿著轉軸R1而相對壁板111轉動。也就是說,配置於殼體110內的光學部件124基本上只能沿著轉軸R1而相對壁板111轉動,不會與壁板111相對移動,也不會沿著其他轉軸而轉動。Please refer to FIG. 2A and FIG. 2B , wherein FIG. 2B is a schematic cross-sectional perspective view of the optical measuring device 100 of FIG. 1A , which shows the partial configuration of the optical measuring device 100 and the optical component 124 in detail, and FIG. 2A shows the explosion of FIG. 2B . schematic diagram. In the mounting method of the optical member 124, the optical member 124 is rotatably disposed in the housing 110, and the optical member 124 is restricted from rotating relative to the wall 111 along the rotation axis R1. That is to say, the optical member 124 disposed in the casing 110 can basically rotate only relative to the wall 111 along the rotating shaft R1, does not move relative to the wall 111, and does not rotate along the other rotating shafts.
須說明的是,在圖2B所示的實施例中,轉軸R1實質上是平行於水平面(horizontal level),但在其他實施例中,轉軸R1也可實質上垂直於水平面。所以,光學部件124可以上下轉動(如圖2B所示),或是左右轉動。此外,在其他實施例中,轉軸R1也可以不平行,也不垂直於水平面,以使光學部件124能沿著傾斜的轉軸R1而相對壁板111轉動。It should be noted that in the embodiment shown in FIG. 2B, the rotation axis R1 is substantially parallel to the horizontal level, but in other embodiments, the rotation axis R1 may also be substantially perpendicular to the horizontal plane. Therefore, the optical member 124 can be rotated up and down (as shown in FIG. 2B) or rotated left and right. In addition, in other embodiments, the rotating shaft R1 may not be parallel or perpendicular to the horizontal plane, so that the optical member 124 can rotate relative to the wall 111 along the inclined rotating shaft R1.
光學量測裝置100還包括軸桿(shaft)150,而軸桿150能使光學部件124可轉動地配置於殼體110內,並能限制光學部件124基本上只沿著轉軸R1而相對壁板111轉動。詳細而言,在將光學部件124可轉動地配置於殼體110內的過程中,可將軸桿150可轉動地插設於殼體110內,以使軸桿150能沿著轉軸R1而相對於殼體110而轉動,其中轉軸R1為軸桿150的中心軸(central axis),所以軸桿150是沿著轉軸R1而自轉(spinning)。The optical metrology apparatus 100 further includes a shaft 150 that enables the optical component 124 to be rotatably disposed within the housing 110 and that limits the optical component 124 to substantially only the wall along the rotational axis R1. 111 turns. In detail, in the process of rotatably arranging the optical component 124 in the housing 110, the shaft 150 can be rotatably inserted into the housing 110 so that the shaft 150 can be relatively along the rotating shaft R1. Rotating in the housing 110, wherein the rotating shaft R1 is the central axis of the shaft 150, the shaft 150 is rotated along the rotating shaft R1.
殼體110具有可供軸桿150插設的貫孔112h,其中軸桿150可以與貫孔112h餘隙配合(clearance fit)。如此,軸桿150得以可轉動地插設於貫孔112h。此外,殼體110還可包括塊體(block)112,而軸桿150是插設於塊體112內。塊體112具有貫孔112h,並連接壁板111,而軸桿150從貫孔112h可轉動地插設於塊體112內。接著,連接軸桿150與光學部件124,以使軸桿150與光學部件124能沿著轉軸R1而相對壁板111作同步轉動。The housing 110 has a through hole 112h into which the shaft 150 can be inserted, wherein the shaft 150 can be clearance fit with the through hole 112h. Thus, the shaft 150 is rotatably inserted into the through hole 112h. In addition, the housing 110 may further include a block 112 in which the shaft 150 is inserted. The block 112 has a through hole 112h and is connected to the wall plate 111, and the shaft 150 is rotatably inserted into the block 112 from the through hole 112h. Next, the shaft 150 and the optical member 124 are coupled to rotate the shaft 150 and the optical member 124 in synchronization with the wall 111 along the rotating shaft R1.
連接軸桿150與光學部件124的方法可以是將軸桿150螺鎖於光學部件124中。詳細而言,軸桿150可為肩螺絲(shoulder screw),並具有螺紋151,而承載件242具有螺孔C11。在光學部件124配置於殼體110內,以及軸桿150插設於貫孔112h之後,軸桿150會對準(aligning to)並可螺鎖於螺孔C11。如此,軸桿150得以連接光學部件124的承載件242,以使光學部件124可轉動地配置於殼體110內,從而限制光學部件124沿著轉軸R1而相對殼體110轉動。此外,在其他實施例中,軸桿150也可採用其他手段來連接光學部件124,例如膠黏或干涉配合。所以,軸桿150與光學部件124之間的連接方法不限定只能用螺鎖。The method of connecting the shaft 150 to the optical component 124 may be to screw the shaft 150 into the optical component 124. In detail, the shaft 150 may be a shoulder screw and has a thread 151, and the carrier 242 has a screw hole C11. After the optical component 124 is disposed in the housing 110 and the shaft 150 is inserted into the through hole 112h, the shaft 150 is aligned to and can be screwed to the screw hole C11. As such, the shaft 150 is coupled to the carrier 242 of the optical component 124 such that the optical component 124 is rotatably disposed within the housing 110, thereby restricting rotation of the optical component 124 relative to the housing 110 along the axis of rotation R1. Moreover, in other embodiments, the shaft 150 can be attached to the optical component 124 by other means, such as an adhesive or interference fit. Therefore, the connection method between the shaft 150 and the optical member 124 is not limited to the use of the screw lock.
另外,在將光學部件124可轉動地配置於殼體110內之前,可先固定光學元件241於承載件242上,完成光學部件124的組裝。承載件242包括板體P1,而光學元件241是固定於板體P1上。板體P1具有背面242b以及與背面242b相對的承載面242a,而光學元件241固定於承載面242a上,其中光學元件241可採用膠黏、螺鎖或干涉配合而固定於承載面242a上。此外,承載件242還可包括連接部C1。連接部C1連接板體P1與軸桿150,並具有螺孔C11。所以,軸桿150螺鎖於連接部C1。連接部C1可凸出於承載面242a,以使光學元件241能抵靠連接部C1,從而定位(positioning)光學元件241。In addition, before the optical component 124 is rotatably disposed in the housing 110, the optical component 241 can be fixed on the carrier 242 to complete the assembly of the optical component 124. The carrier 242 includes a plate P1, and the optical member 241 is fixed to the plate P1. The plate body P1 has a back surface 242b and a bearing surface 242a opposite to the back surface 242b, and the optical element 241 is fixed to the bearing surface 242a, wherein the optical element 241 can be fixed to the bearing surface 242a by adhesive, screw or interference fit. Further, the carrier 242 may further include a connecting portion C1. The connecting portion C1 connects the plate body P1 and the shaft 150, and has a screw hole C11. Therefore, the shaft 150 is screwed to the connecting portion C1. The connecting portion C1 may protrude from the bearing surface 242a to enable the optical member 241 to abut against the connecting portion C1 to thereby position the optical member 241.
承載件242還可包括樞轉部C2。樞轉部C2連接板體P1,並且凸出於承載面242a。樞轉部C2位於連接部C1的對面,並且可為一根凸柱,如圖2A所示,而在光學元件241固定於承載件242上之後,光學元件241會位在樞轉部C2與連接部C1之間。殼體110更具有對準樞轉部C2的樞轉孔114h,而樞轉部C2能插入於樞轉孔114h中,並與樞轉孔114h餘隙配合,以使樞轉部C2能在樞轉孔114h內轉動。此外,樞轉孔114h、螺孔C11以及貫孔112h三者是共軸(coaxial),以使樞轉部C2、連接部C1以及軸桿150都能沿著同一條轉軸R1而相對壁板111轉動。The carrier 242 can also include a pivot portion C2. The pivoting portion C2 is coupled to the plate body P1 and protrudes from the bearing surface 242a. The pivoting portion C2 is located opposite the connecting portion C1 and may be a stud as shown in FIG. 2A. After the optical component 241 is fixed on the carrier 242, the optical component 241 is positioned at the pivoting portion C2 and connected. Between C1. The housing 110 further has a pivot hole 114h aligned with the pivoting portion C2, and the pivoting portion C2 can be inserted into the pivot hole 114h and cooperate with the clearance of the pivot hole 114h to enable the pivoting portion C2 to be pivoted The inside of the hole 114h rotates. In addition, the pivot hole 114h, the screw hole C11, and the through hole 112h are coaxial, so that the pivot portion C2, the connecting portion C1, and the shaft 150 can be opposite to the wall 111 along the same rotating shaft R1. Turn.
值得一提的是,在本實施例中,光學部件124包括光學元件241與承載件(holder)242,但在其他實施例中,光學部件124可以只包括光學元件241,而不包括其他元件,例如承載件242。舉例而言,光學元件241可以具有螺孔C11,以使軸桿150能直接與光學元件241螺鎖。因此,光學部件124不限定要像圖2A般包括光學元件241與承載件242。It is worth mentioning that in the present embodiment, the optical component 124 includes the optical component 241 and the holder 242, but in other embodiments, the optical component 124 may include only the optical component 241, and does not include other components. For example, carrier 242. For example, the optical element 241 can have a threaded hole C11 to enable the shaft 150 to be directly threaded with the optical element 241. Thus, optical component 124 is not limited to include optical component 241 and carrier 242 as in FIG. 2A.
當沿著轉軸R1而相對殼體110,自轉已連接光學部件124的軸桿150時,光學部件124會沿著轉軸R1而相對殼體110轉動。如此,可以利用軸桿150的自轉來調整光學部件124的方位。因此,在將光學部件124可轉動地配置於殼體110內之後,利用光學部件124沿著轉軸R1而相對殼體110的轉動來校正光學部件124,以進行光學部件124的安裝。此外,在本實施例中,光學部件124沿著轉軸R1而相對壁板111可轉動的角度A1可小於90度,例如角度A1可以是4度、5度、10度、30度、45度或60度,但其他實施例不限定角度A1一定要小於90度。When the shaft 150 of the optical member 124 is rotated relative to the housing 110 along the rotation axis R1, the optical member 124 is rotated relative to the housing 110 along the rotation axis R1. As such, the orientation of the optical component 124 can be adjusted by the rotation of the shaft 150. Therefore, after the optical member 124 is rotatably disposed in the casing 110, the optical member 124 is corrected by the rotation of the optical member 124 along the rotation axis R1 with respect to the casing 110 to perform the mounting of the optical member 124. In addition, in the embodiment, the angle A1 of the optical component 124 that is rotatable relative to the wall 111 along the rotation axis R1 may be less than 90 degrees, for example, the angle A1 may be 4 degrees, 5 degrees, 10 degrees, 30 degrees, 45 degrees or 60 degrees, but other embodiments do not limit the angle A1 must be less than 90 degrees.
請參閱圖2C,在校正光學部件124的方法中,可根據經過光學部件124的檢測光線(measured ray)L1,監測至少一個光學參數,例如光強感度 (intensity sensitivity,單位例如是計數/秒,counts/second)、波長解析度(wavelength resolution)或波長準確度(wavelength accuracy)。也就是說,當校正光學部件124時,可以啟動光學量測裝置100,並且偵測從外部光源所提供的檢測光線L1。Referring to FIG. 2C, in the method of correcting the optical component 124, at least one optical parameter, such as intensity sensitivity, may be monitored according to a measured ray L1 passing through the optical component 124, such as a count/second. Counts/second), wavelength resolution, or wavelength accuracy. That is, when the optical component 124 is corrected, the optical measuring device 100 can be activated and the detected light L1 supplied from the external light source can be detected.
在圖2C所示的實施例中,檢測光線L1會從光學部件121進入光學量測裝置100內部。接著,檢測光線L1會依序經過光學部件122(反射式準直鏡)與光學部件123(光柵)。在檢測光線L1入射於光學部件123之後,光學部件123會將檢測光線L1色散(dispersing),以使檢測光線L1分成多條具不同波長的檢測光線L2。接著,這些檢測光線L2皆入射於光學部件124(聚焦鏡),並且被光學部件124集中反射至光學部件125(光感測器),以使光學部件125接收並量測這些檢測光線L2,進而監測光學參數。此外,殼體110還可包括鋸齒狀的雜散光消除結構113,以消除來自光學部件124的雜散光。In the embodiment shown in FIG. 2C, the detection light L1 enters the interior of the optical measurement device 100 from the optical component 121. Next, the detection light beam L1 sequentially passes through the optical member 122 (reflective collimating mirror) and the optical member 123 (grating). After the detection light L1 is incident on the optical member 123, the optical member 123 disperses the detection light L1 to divide the detection light L1 into a plurality of detection light beams L2 having different wavelengths. Then, the detection light beams L2 are incident on the optical component 124 (focusing mirror), and are collectively reflected by the optical component 124 to the optical component 125 (photosensor), so that the optical component 125 receives and measures the detection light L2, and further Monitor optical parameters. In addition, the housing 110 may also include a serrated stray light removal structure 113 to eliminate stray light from the optical component 124.
在光學部件125量測這些檢測光線L2期間,可沿著轉軸R1而相對殼體110轉動光學部件124,以改變檢測光線L2對光學部件125的照射,進而調整光學參數。所以,可以利用光學部件124沿著轉軸R1而相對殼體110的轉動,將光學參數調整在合格範圍內,以完成光學部件124的校正。當光學參數處於合格範圍內時,固定光學部件124於殼體110內,其中固定光學部件124的手段有多種,例如螺鎖及/或膠黏,而本實施例是採用固定件與固化膠130來固定。During the measurement of the detection light L2 by the optical component 125, the optical component 124 can be rotated relative to the housing 110 along the rotation axis R1 to change the illumination of the optical component 125 by the detection light L2, thereby adjusting the optical parameters. Therefore, the optical parameters can be adjusted within the acceptable range by the rotation of the optical member 124 along the rotating shaft R1 with respect to the housing 110 to complete the correction of the optical member 124. When the optical parameter is within the acceptable range, the optical component 124 is fixed in the housing 110, wherein the optical component 124 is fixed by a plurality of means, such as a screw lock and/or an adhesive. In this embodiment, the fixing component and the curing adhesive 130 are used. Come fixed.
光學量測裝置100還可包括固定件,其用以固定軸桿150,以使軸桿150不相對壁板111轉動。固定件的實施態樣有多種,例如螺絲或插銷(bolt)。在本實施例中,光學量測裝置100所包括的固定件為固定栓(fixing bolt)160。當光學參數處於合格範圍內時,可先利用固定栓160來固定光學部件124。詳細而言,插設固定栓160於殼體110內,並使固定栓160壓迫軸桿150,其中固定栓160可碰觸軸桿150的肩部152(如圖2A所示)。如此,軸桿150會被固定栓160固定,同時也固定光學部件124。殼體110塊體112具有供固定栓160插設的固定孔112p。固定孔112p與貫孔112h連通,且固定孔112p的延伸方向不平行於貫孔112h的延伸方向,以使固定栓160能壓迫到軸桿150,從而固定光學部件124。此外,固定栓160可為螺絲,而固定孔112p可為螺孔,所以插設固定栓160的方法可將固定栓160螺鎖於殼體110內。The optical metrology apparatus 100 can also include a fixture for securing the shaft 150 such that the shaft 150 does not rotate relative to the wall 111. There are many ways to implement the fastener, such as a screw or a bolt. In the present embodiment, the fixing member included in the optical measuring device 100 is a fixing bolt 160. When the optical parameters are within the acceptable range, the optical plug 124 can be secured by the retaining pin 160. In detail, the fixing bolt 160 is inserted into the housing 110, and the fixing bolt 160 is pressed against the shaft 150, wherein the fixing bolt 160 can touch the shoulder 152 of the shaft 150 (as shown in FIG. 2A). As such, the shaft 150 is secured by the retaining pin 160 while also securing the optical component 124. The housing 110 block 112 has a fixing hole 112p into which the fixing bolt 160 is inserted. The fixing hole 112p communicates with the through hole 112h, and the extending direction of the fixing hole 112p is not parallel to the extending direction of the through hole 112h, so that the fixing pin 160 can be pressed to the shaft 150, thereby fixing the optical member 124. In addition, the fixing bolt 160 can be a screw, and the fixing hole 112p can be a screw hole, so the method of inserting the fixing bolt 160 can screw the fixing bolt 160 into the housing 110.
請參閱圖2D,在固定栓160壓迫軸桿150之後,正常情況下,光學參數仍處於合格範圍內,即光學部件124的校正基本上已完成。此時,在開口111h中形成固化膠130,其連接光學部件124與殼體110。形成固化膠130的方法可包括以下步驟。首先,從開口111h塗佈膠材,其中膠材黏著光學部件124與壁板111。之後,固化此膠材以形成固化膠130,其中膠材可為熱固型樹脂或光固化樹脂(例如紫外光固化樹脂,UV-curing resin),所以固化膠材的方法可以是加熱或照光。在形成固化膠130之後,可將擋塊140插設並固定於開口111h中,以遮蓋光學部件124。Referring to FIG. 2D, after the fixing bolt 160 presses the shaft 150, the optical parameters are still within the acceptable range under normal conditions, that is, the correction of the optical component 124 is substantially completed. At this time, a curing adhesive 130 that connects the optical member 124 and the housing 110 is formed in the opening 111h. The method of forming the curing adhesive 130 may include the following steps. First, a glue is applied from the opening 111h, wherein the glue adheres the optical member 124 to the wall 111. Thereafter, the glue is cured to form a cured adhesive 130, wherein the adhesive may be a thermosetting resin or a photocurable resin (for example, a UV-curing resin), so the method of curing the adhesive may be heating or illuminating. After the curing adhesive 130 is formed, the stopper 140 may be inserted and fixed in the opening 111h to cover the optical member 124.
請參閱圖2E,其繪示光學量測裝置100在其擋塊140處的側視示意圖。在本實施例中,固化膠130可在背面242b上呈現對稱分布(symmetric distribution),例如鏡像對稱分布(reflective symmetric distribution)。以圖2E為例,背面242b具有中心線242c,其與轉軸R1平行,而固化膠130相對中心線242c而在背面242b呈鏡像對稱分布。具體而言,固定膠130可由多條均勻膠條(uniform adhesive bar)132所構成,且各條均勻膠條132的粗細均勻而具有實質上固定的外徑(constant outer diameter),其中這些均勻膠條132的質量更可實質上彼此相同。從圖2E來看,各條均勻膠條132基本上是以中心線242c作為對稱軸(symmetric axis)而鏡像對稱。此外,各條均勻膠條132的延伸方向不平行轉軸R1。Please refer to FIG. 2E , which is a side view of the optical measuring device 100 at its stop 140 . In this embodiment, the cured glue 130 can exhibit a symmetric distribution on the back side 242b, such as a reflective symmetric distribution. Taking FIG. 2E as an example, the back surface 242b has a center line 242c which is parallel to the rotation axis R1, and the curing glue 130 is mirror-symmetrically distributed on the back surface 242b with respect to the center line 242c. Specifically, the fixing glue 130 may be composed of a plurality of uniform adhesive bars 132, and each of the uniform strips 132 has a uniform thickness and a substantially constant outer diameter, wherein the uniform glues The mass of strips 132 may be substantially identical to each other. As seen in Figure 2E, each of the uniform strips 132 is substantially mirror symmetrical with the centerline 242c as the symmetric axis. In addition, the extending direction of each of the uniform strips 132 is not parallel to the rotating shaft R1.
由於固化膠130相對中心線242c而在背面242b呈鏡像對稱分布,且中心線242c與轉軸R1平行,因此當固化膠130因溫度而發生體積變化時,這些均勻膠條132的體積變化量會彼此相近,甚至幾乎相等,以至於膨脹後的固化膠130不易產生讓光學部件124轉動的力矩(torque)。因此,當光學量測裝置100處於溫度變化較大的環境時,呈鏡像對稱分布的固化膠130能幫助維持光學部件124的位置與方位不變,從而降低雜散光的產生。Since the curing adhesive 130 is mirror-symmetrically distributed on the back surface 242b with respect to the center line 242c, and the center line 242c is parallel to the rotation axis R1, when the curing glue 130 changes in volume due to temperature, the volume change of the uniform rubber strips 132 will be mutually Similar, even nearly equal, such that the expanded cured adhesive 130 does not readily produce a torque that causes the optical component 124 to rotate. Therefore, when the optical measuring device 100 is in an environment where the temperature changes greatly, the cured adhesive 130 in a mirror-symmetrical distribution can help maintain the position and orientation of the optical member 124, thereby reducing the generation of stray light.
值得一提的是,以上光學部件124的校正工作可交由下游廠商來執行。詳細而言,在光學組件120剛配置於殼體110內之後,不具有固化膠130的光學量測裝置100可以出貨販售給下游廠商,而下游廠商會執行上述光學部件124的校正,並形成固化膠130與擋塊140,以完成安裝光學部件124的工作。因此,雖然本實施例的光學量測裝置100包括固化膠130與擋塊140,但在其他實施例中,光學量測裝置100也可以不包括固化膠130與擋塊140。It is worth mentioning that the calibration work of the above optical component 124 can be performed by a downstream manufacturer. In detail, after the optical component 120 is disposed in the housing 110, the optical measuring device 100 without the curing adhesive 130 can be shipped to a downstream manufacturer, and the downstream manufacturer performs the correction of the optical component 124 described above, and The curing adhesive 130 and the stopper 140 are formed to complete the work of mounting the optical member 124. Therefore, although the optical measuring device 100 of the present embodiment includes the curing adhesive 130 and the stopper 140, in other embodiments, the optical measuring device 100 may not include the curing adhesive 130 and the stopper 140.
須說明的是,以上實施例所描述的安裝方法是以安裝光學部件124(聚焦鏡)為主,但是其他實施例的安裝方法也可以是安裝不同種類的光學部件,例如狹縫、光柵、反射式準直鏡以及分光鏡。因此,在此強調,本發明並不限制安裝方法只能用在安裝聚焦鏡(光學部件124)。也就是說,光學部件121、122、123以及125也可以選用圖2A至圖2D所揭露的安裝方法來安裝。It should be noted that the mounting method described in the above embodiments is mainly to mount the optical component 124 (focusing mirror), but the mounting method of other embodiments may also be to install different kinds of optical components, such as slits, gratings, reflections. Collimation mirror and beam splitter. Therefore, it is emphasized herein that the present invention does not limit the mounting method that can only be used to mount the focusing mirror (optical component 124). That is, the optical components 121, 122, 123, and 125 can also be mounted using the mounting method disclosed in FIGS. 2A through 2D.
綜上所述,利用殼體所具有的開口來暴露部分光學部件,以使固化膠能從開口直接形成,並連接殼體與光學部件,以幫助固定光學部件於殼體上,讓光學部件與壁板之間難以產生相對運動。如此,即使光學量測裝置遭到碰撞,固化膠也能將光學部件保持在適當的位置與方位上,以幫助維持光學量測裝置的準確度與精密度。此外,供固化膠填入的開口是形成於殼體的壁板111,所以即使光學部件與壁板之間的存有相當狹窄的縫隙(gap),仍不會影響固化膠的形成。也就是說,以上實施例所揭露的開口設計能容許光學部件緊鄰(adjacent)於壁板,以在光學部件與壁板之間形成體積狹小的縫隙,從而有助於縮小光學量測裝置的整體體積。In summary, the opening of the housing is used to expose a portion of the optical component such that the curing adhesive can be formed directly from the opening and connect the housing to the optical component to help secure the optical component to the housing, allowing the optical component to Relative movement between the panels is difficult. Thus, even if the optical measuring device is impacted, the cured adhesive can hold the optical components in the proper position and orientation to help maintain the accuracy and precision of the optical measuring device. Further, the opening for the solidified adhesive is formed in the wall 111 of the casing, so that even if there is a relatively narrow gap between the optical member and the wall, the formation of the cured adhesive is not affected. That is to say, the opening design disclosed in the above embodiments can allow the optical component to be adjoined to the wall panel to form a narrow gap between the optical component and the wall panel, thereby helping to reduce the overall optical measuring device. volume.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
100‧‧‧光學量測裝置100‧‧‧Optical measuring device
110‧‧‧殼體110‧‧‧shell
111‧‧‧壁板111‧‧‧ siding
111a‧‧‧外表面111a‧‧‧Outer surface
111b‧‧‧內表面111b‧‧‧ inner surface
111c‧‧‧凸塊111c‧‧‧Bumps
111e‧‧‧端面111e‧‧‧ end face
111h‧‧‧開口111h‧‧‧ openings
112‧‧‧塊體112‧‧‧ Block
112h‧‧‧貫孔112h‧‧‧through hole
112p‧‧‧固定孔112p‧‧‧Fixed holes
113‧‧‧雜散光消除結構113‧‧‧ Stray light elimination structure
114h‧‧‧樞轉孔114h‧‧‧ pivot hole
120‧‧‧光學組件120‧‧‧Optical components
121~125‧‧‧光學部件121~125‧‧‧Optical parts
121a‧‧‧擋光片121a‧‧‧Light blocking film
130‧‧‧固化膠130‧‧‧Curing adhesive
132‧‧‧膠條132‧‧‧strips
140‧‧‧擋塊140‧‧ ‧stop
142‧‧‧凸緣142‧‧‧Flange
150‧‧‧軸桿150‧‧‧ shaft
151‧‧‧螺紋151‧‧‧ thread
152‧‧‧肩部152‧‧‧ shoulder
160‧‧‧固定栓160‧‧‧Fixed bolt
241‧‧‧光學元件241‧‧‧Optical components
242‧‧‧承載件242‧‧‧ Carrying parts
242a‧‧‧承載面242a‧‧‧ bearing surface
242b‧‧‧背面242b‧‧‧Back
242c‧‧‧中心線242c‧‧‧ center line
A1‧‧‧角度A1‧‧‧ angle
C1‧‧‧連接部C1‧‧‧Connecting Department
C2‧‧‧樞轉部C2‧‧‧ pivoting department
C11‧‧‧螺孔C11‧‧‧ screw hole
L1、L2‧‧‧檢測光線L1, L2‧‧‧ Detecting light
P1‧‧‧板體P1‧‧‧ board
R1‧‧‧轉軸R1‧‧‧ shaft
圖1A是本發明一實施例的光學量測裝置的立體示意圖。 圖1B是圖1A中的光學量測裝置的俯視示意圖。 圖1C是圖1A中沿線1C-1C剖面所繪示的剖面示意圖。 圖1D是圖1A中沿線1D-1D剖面所繪示的剖面示意圖。 圖2A至圖2E是圖1D中的光學部件的安裝方法的示意圖。1A is a schematic perspective view of an optical measuring device according to an embodiment of the present invention. FIG. 1B is a top plan view of the optical measuring device of FIG. 1A. 1C is a schematic cross-sectional view taken along line 1C-1C of FIG. 1A. 1D is a schematic cross-sectional view taken along line 1D-1D of FIG. 1A. 2A to 2E are schematic views of a method of mounting the optical component of Fig. 1D.
Claims (26)
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