TW201821747A - Heating furnace for processing materials capable of widely and uniformly heating the processing material so as to solve the problem of incomplete quenching - Google Patents

Abstract

A heating furnace for processing materials includes a furnace body, a conveying passage disposed in the furnace body and provided with a conveying direction, and a plurality of warm-keeping heating pipes disposed in the furnace body and configured to correspond to the conveying passage. The furnace body has a material feed temperature-rising section and a material discharge warm-keeping section extending from the material feed temperature-rising section. Because the temperature-rising heating pipes are arranged in parallel to each other and extend along the conveying direction, the area of each temperature-rising heating pipe with the same temperature is disposed in the same segment of the material feed temperature-rising section, so that, when a processing material carrier is conveyed to pass by the material feed temperature-rising section, the material feed temperature-rising section can widely and uniformly heat the processing material, thereby solving the problem of incomplete quenching due to uneven heating in the prior art.

Description

Heating stoves for processing materials

The invention relates to a heating stove for processing materials, in particular to a heating stove which can solve the incomplete quenching of the processing materials due to uneven heating.

According to the development of modern electronic technology, the application of processing materials (such as semiconductor materials such as solar panels or wafers) has become increasingly widespread. In this regard, in order to increase the manufacturing capacity of processing materials, generally, the factory will place the processing materials to be processed in the material frame, and stack the multiple material frames for the processing device to process the processing material in large quantities, thereby increasing the overall production capacity of the processing device. Wherein, when a processing material is subjected to quenching, a conveying device will transport a material frame carrying the processing material to a heating furnace, so that the heating furnace can heat the processing material to eight degrees Celsius. the above. Then, the conveying device will convey the material frame to a quenching medium, so that the processing material falls into the quenching medium for cooling, thereby completing the quenching operation.

However, since most of the heating furnace uses a plurality of gas radiating tubes to heat the processing material and the gas radiating tubes extend from one side or two sides of the heating furnace to the conveying device. Above, so that the burners used by the gas radiant tubes to generate thermal energy will be concentrated on one or two inner walls of the heating furnace (the maximum temperature difference between the two ends of the gas radiant tubes is more than one Baidu Celsius) In addition, the processing material cannot be heated in a large area and uniformly when passing through the gas radiating tubes, so that the processing material is likely to have a problem of incomplete quenching after falling into the quenching medium.

The main object of the present invention is to solve the problem that the processed material in the conventional embodiment has incomplete quenching due to uneven heating.

In order to achieve the above object, the present invention provides a heating furnace for processing materials, which includes a furnace body, a conveying path disposed in the furnace body and conveying a processing material carrier in a conveying direction, and a plurality of heat exchangers provided in the furnace body The heating and heating pipe at the position of the conveying path, the furnace body has a feeding temperature increasing section corresponding to the conveying path and a discharging thermal insulation section extending from the feeding heating section and corresponding to the conveying path, which are characterized by: Each of the temperature increasing heating tubes is arranged in parallel with each other and extends along the conveying direction.

In one embodiment, the heating and heating tubes are parallel to each other.

In one embodiment, the heating stove has a plurality of heat-preserving heating pipes arranged at the discharge heat-preserving section, and the heat-preserving heating pipes form a ninety degree angle with the conveying direction.

In one embodiment, the heat-preserving and heating pipes are disposed on an inner wall of one side of the furnace body.

In one embodiment, the heat-preserving and heating tubes are alternately disposed on two inner walls of the furnace body.

In an embodiment, each of the temperature-heating heating tubes and each of the heat-preserving heating tubes is a gas radiating tube, and the heating stove has a ratio that adjusts the size of the combustion flames of the temperature-warming heating tubes and the heat-keeping heating tubes. A control device and a pulse control device for controlling the ignition point and the flameout point of the temperature-heating heating tubes and the heat-preserving heating tubes.

In one embodiment, each of the temperature-heating heating tubes and each of the heat-preserving heating tubes has a stainless steel outer tube, a silicon carbide inner tube disposed inside the stainless steel outer tube, and a stainless steel outer tube. A burner for heating the silicon carbide inner tube.

In an embodiment, the length of the furnace body from the feeding temperature increasing section to the discharging heat insulating section is less than eight meters.

Through the above embodiments of the present invention, it has the following characteristics compared with the conventional one:

According to the invention, each of the heating heating tubes is arranged next to each other and along the conveying direction, so that the same temperature of a heating heating tube is located in the same section of the feeding heating section, so that the processing material is The temperature increase can be performed in a wide range and uniformly through the feed temperature increasing section, thereby solving the problem of incomplete quenching due to uneven heating in the conventional embodiment.

The detailed description and technical contents of the present invention are described below with reference to the drawings:

Please refer to FIG. 1 and FIG. 2. The present invention provides a heating furnace for processing materials. The heating furnace includes a furnace body 1, a conveying path 2, and a plurality of heating heating pipes 3. The furnace body 1 has a feeding heating section 11, the conveying path 2 is arranged in the furnace body 1 and has a conveying direction 20 corresponding to the feeding heating section 11, and the heating heating pipes 3 are arranged on the furnace body 1 and is located in the feed heating section 11, and each of the heating heating tubes 3 is juxtaposed with each other and extends along the conveying direction 20. In an embodiment, the feed temperature increasing section 11 has a furnace opening 110, and the temperature increasing heating pipes 3 are parallel to each other and extend from the furnace opening 110 toward the conveying direction 20, as shown in FIG. 2. Specifically, each of the heating heating pipes 3 can be a gas radiating tube, and each of the heating heating pipes 3 has a stainless steel outer pipe 31, a silicon carbide inner pipe 32, and a burner 33. The tube 32 is disposed inside the stainless steel outer tube 31, the burner 33 is disposed in the stainless steel outer tube 31 and can heat the silicon carbide inner tube 32, and the burners 33 of each of the temperature-heating heating tubes 3 are Adjacent to the head end of the feed temperature increasing section 11. On the other hand, please refer to FIG. 1 and FIG. 2 again. The furnace body 1 further includes a discharge insulation section 12, the heating stove further includes a plurality of insulation heating tubes 4, and the insulation heating tubes 4 are located at the discharge. The heat-preserving section 12 and the heat-preserving and heating pipes 4 and the conveying direction 20 are at an angle of ninety degrees. Wherein, the length of the furnace body 1 from the feeding heating section 11 to the discharging insulation section 12 is less than eight meters, and the thermal insulation heating tubes 4 and the heating heating tubes 3 are gas radiant tubes of the same type. That is, each of the heat-preserving and heating pipes 4 also has a stainless steel outer pipe, a silicon carbide inner pipe, and a burner, respectively. Regarding the installation position of the heat insulation heating pipe 4, in one embodiment, the heat insulation heating pipes 4 are disposed on one side surface of the furnace body 1 (as shown on the left side of the discharge heat insulation section 12 in FIG. 2). In one embodiment, the heat-preserving and heating pipes 4 are alternately disposed on the inner walls of the two sides of the furnace body 1 (as shown on the right side of the discharge and heat-preservation section 12 in FIG. 2), and the two embodiments can be united according to processing requirements. Set or set at the same time (as shown in Figure 2).

From the above technical content, the detailed structure of the furnace body 1, the conveying path 2, the temperature increasing heating pipes 3, and the heat insulating heating pipes 4 can be clearly known. Here, the present invention will further target the use of the heating stove. The process is explained. When the heating stove is applied, the user first sets a processing material (for example, a semiconductor material such as a solar panel or a wafer, which is not shown in the figure) on a processing material carrier 7 and sets the processing material carrier 7 is placed on the surface of the conveying path 2 so that the conveying path 2 must convey the processing material carrier 7 toward the furnace body 1 along the conveying direction 20. When the processed material passes through the feed temperature increasing section 11, it will be heated to about eight hundred degrees Celsius, then it will pass through the discharge heat preservation section 12 to perform the heat preservation action, and finally transported through the conveying lane 2 to fall into a quenching medium. This completes the quenching operation. In detail, since each of the heating heating tubes 3 is arranged next to each other and is arranged along the conveying direction 20 (as shown in FIG. 1 and FIG. 2), the temperature of each of the heating heating tubes 3 is the same (for example : The highest temperature and the lowest temperature, etc.) are located in the same section of the feed heating section 11, so that the processed material can be heated in a wide range and uniformly through the feed heating section 11, thereby Solve the problem of incomplete quenching due to uneven heating in the conventional embodiment.

On the other hand, based on the fact that each of the heating heating tubes 3 and each of the heat-preserving heating tubes 4 can be a gas radiating tube during implementation, in an embodiment, as shown in FIG. 4, the heating stove has more A proportional control device 5 and a pulse control device 6, the proportional control device 5 and the pulse control device 6 are connected to each of the temperature increasing heating tubes 3 and each of the heat insulating heating tubes 4. The proportional control device 5 can be used to adjust the size of the combustion flames of the heating heating pipes 3 and the heat-preserving heating pipes 4, and the pulse control device 6 can be used to control the heating heating pipes 3 and the heat-preserving heating pipes 4. In this way, the present invention can use the proportional control device 5 and the pulse control device 6 interactively, so that the proportional control device 5 can solve the pulse control of the general gas radiant tube through pulse control) requires frequent switching to reduce the life and excessive energy consumption, and the pulse control device 6 is used to solve the problem of excessive temperature difference between the two ends of the general gas radiant tube through proportional control.

In summary, the heating stove for processing materials includes a furnace body, a conveying path provided in the furnace body and having a conveying direction, and a plurality of heat-preserving and heating tubes provided in the furnace body and corresponding to the conveying path. The furnace body has a feeding temperature increasing section and a discharging heat preservation section extending from the feeding temperature increasing section. During the use of the heating stove, since each of the heating heating tubes is arranged next to each other and extends along the conveying direction, the same temperature of each of the heating heating tubes is located at the same temperature in the feeding heating section. Within the section, when a processing material carrier passes the feeding temperature increasing section by the conveyance, the processing temperature can be heated in a wide range and uniformly in the feeding temperature increasing section, thereby solving the conventional implementation mode. There is a problem of incomplete quenching due to uneven heating.

The present invention has been described in detail above, but the above is only one of the preferred embodiments of the present invention. When the scope of implementation of the present invention cannot be limited by this, that is, the equality made according to the scope of patent application of the present invention Changes and modifications should still be covered by the patent of the present invention.

1‧‧‧ furnace body

11‧‧‧Feeding heating section

110‧‧‧furnace mouth

12‧‧‧Discharge insulation section

2‧‧‧ Conveyor

20‧‧‧ Conveying direction

3‧‧‧ heating tube

31‧‧‧Stainless steel outer tube

32‧‧‧Silicon Carbide Tube

33‧‧‧burner

4‧‧‧Insulation heating tube

5‧‧‧ Proportional control device

6‧‧‧Pulse control device

7‧‧‧ processing material carrier

FIG. 1 is a schematic side view of the present invention. FIG. 2 is a schematic top view of the present invention. Fig. 3 is a schematic side view of a heating tube according to the present invention. FIG. 4 is a schematic circuit diagram of the present invention.

Claims (8)

A heating stove for processing materials, comprising a furnace body, a conveying path provided in the furnace body and conveying a processing material carrier in a conveying direction, and a plurality of heat insulation heating provided in the furnace body at positions corresponding to the conveying paths. Tube, the furnace body has a feeding heating section corresponding to the conveying path and a discharging heat insulation section extending from the feeding heating section and corresponding to the conveying path, characterized in that each of the heating heating tubes is juxtaposed to each other It is extended along the conveying direction. The heating furnace for processing a material according to claim 1, wherein the heating heating tubes are parallel to each other. The heating stove for processing materials as described in claim 2, wherein the heating stove has a plurality of heat-preserving heating pipes arranged in the discharge heat-preserving section, and the heat-preserving heating pipes form a ninety degree angle with the conveying direction. The heating stove for processing materials according to claim 3, wherein the heat-preserving heating tubes are disposed on one side inner wall of the furnace body. The heating stove for processing materials according to claim 3, wherein the heat-preserving heating tubes are alternately disposed on the inner walls of the two sides of the furnace body. The heating stove for processing materials according to 4 or 5, wherein each of the heating heating pipes and each of the heat-preserving heating pipes is a gas radiating tube, and the heating stove has a regulating heating pipe and the heating pipes. A proportional control device for the size of the combustion flame of the heat-preserving heating tube and a pulse control device for controlling the ignition point and the flame-out point of the temperature-increasing heating tubes and the heat-prevention heating tubes. The heating stove for processing materials according to claim 6, wherein each of the temperature-raising heating tubes and each of the heat-preserving heating tubes has a stainless steel outer tube, a silicon carbide inner tube disposed inside the stainless steel outer tube, and a A burner provided in the stainless steel outer tube and capable of heating the silicon carbide inner tube. The heating stove for processing materials according to 2, 3, 4 or 5, wherein the length of the furnace body from the feeding temperature increasing section to the discharging heat insulating section is less than eight meters.