TW201814865A - Chip on film package structure - Google Patents

Chip on film package structure Download PDF

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Publication number
TW201814865A
TW201814865A TW105132194A TW105132194A TW201814865A TW 201814865 A TW201814865 A TW 201814865A TW 105132194 A TW105132194 A TW 105132194A TW 105132194 A TW105132194 A TW 105132194A TW 201814865 A TW201814865 A TW 201814865A
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Taiwan
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dummy
wafer
pattern
package structure
bumps
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TW105132194A
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Chinese (zh)
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TWI618212B (en
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陳必昌
方俊凱
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南茂科技股份有限公司
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Priority to TW105132194A priority Critical patent/TWI618212B/en
Priority to CN201611007292.7A priority patent/CN107919337A/en
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Publication of TWI618212B publication Critical patent/TWI618212B/en
Publication of TW201814865A publication Critical patent/TW201814865A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector

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  • Wire Bonding (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

A chip on film package structure includes a flexible circuit substrate and a chip. The flexible circuit substrate includes a flexible base and a circuit structure disposed on the flexible base. The flexible base includes a chip bonding area. The circuit structure includes a plurality of leads and at least one dummy lead. Each lead includes an inner lead portion, and the at least one dummy lead includes an alignment pattern in the chip bonding area. The chip includes a plurality of bumps and at least one dummy bump. The chip is disposed in the chip bonding area, and the bumps are connected to the inner lead portions. The alignment pattern of the at least one dummy lead corresponds to the at least one dummy bump, and a projection image of the alignment pattern on the chip surrounds the at least one dummy bump, and a gap G exists between the projection image and a side of the at least one dummy bump.

Description

薄膜覆晶封裝結構Film flip chip package structure

本發明是有關於一種封裝結構,且特別是有關於一種薄膜覆晶封裝結構。The present invention relates to a package structure, and more particularly to a film flip chip package structure.

隨著半導體技術的改良,使得液晶顯示器具有低的消耗電功率、薄型量輕、解析度高、色彩飽和度高、壽命長等優點,因而廣泛地應用在行動電話、筆記型電腦或桌上型電腦的液晶螢幕及液晶電視等與生活息息相關之電子產品。其中,顯示器之驅動晶片(driver IC)更是液晶顯示器不可或缺的重要元件。因應液晶顯示裝置驅動晶片各種應用之需求,一般是採用捲帶自動接合(tape automatic bonding,TAB)封裝技術進行晶片封裝,薄膜覆晶(Chip-On-Film,COF)封裝結構便是其中一種被廣泛應用的捲帶自動接合技術的封裝結構。With the improvement of semiconductor technology, liquid crystal displays have the advantages of low power consumption, light weight, high resolution, high color saturation, long life, etc., and thus are widely used in mobile phones, notebook computers or desktop computers. LCD screens and LCD TVs and other electronic products that are closely related to life. Among them, the driver IC of the display is an indispensable component of the liquid crystal display. In order to meet the needs of various applications of liquid crystal display device driving wafers, tape automatic bonding (TAB) packaging technology is generally used for chip packaging, and chip-on-film (COF) package structure is one of them. Widely used package structure for tape and tape automated bonding technology.

薄膜覆晶封裝結構是以覆晶接合方式將晶片接合至可撓性線路基板上,使晶片上的凸塊對應接合可撓性線路基板上的引腳。然而,目前在晶片和可撓性線路基板上並沒有顯著圖形或影像來供機台計算判斷晶片與可撓性線路基板之間的接合角度及位置,導致晶片與可撓性線路基板之間的接合精度較差,難以精準地將可撓性線路載板的各引腳配置於對應的凸塊的中央。甚至,還可能因為晶片偏移而導致引腳連接凸塊不完全、未連接到凸塊或是連接到錯誤的凸塊。The thin film flip chip package structure bonds the wafer to the flexible circuit substrate by flip chip bonding, and the bumps on the wafer are bonded to the pins on the flexible circuit substrate. However, there is currently no significant pattern or image on the wafer and the flexible circuit substrate for the machine to calculate the joint angle and position between the wafer and the flexible circuit substrate, resulting in a relationship between the wafer and the flexible circuit substrate. The bonding accuracy is poor, and it is difficult to accurately arrange the pins of the flexible wiring carrier in the center of the corresponding bumps. Even, it is possible that the pin connection bumps are incomplete, not connected to the bumps, or connected to the wrong bumps due to wafer offset.

本發明提供一種薄膜覆晶封裝結構,其可精準地將晶片的凸塊接合於可撓性線路載板的引腳上。The present invention provides a thin film flip chip package structure that precisely bonds bumps of a wafer to pins of a flexible wiring carrier.

本發明的一種薄膜覆晶封裝結構,包括一可撓性線路載板及一晶片。可撓性線路載板包括一可撓性基板及配置於可撓性基板上的一線路結構,可撓性基板包括一晶片接合區,其中線路結構包括多個引腳及至少一個虛引腳,其中各引腳具有位於晶片接合區內的一內引腳部,至少一個虛引腳具有位於晶片接合區內的一對位圖案。晶片包括多個凸塊及至少一個虛凸塊,晶片配置於晶片接合區內,使這些凸塊分別連接這些內引腳部,至少一個虛引腳的對位圖案對應至少一個虛凸塊,且對位圖案在晶片上的正投影環繞至少一個虛凸塊且與至少一個虛凸塊的邊緣存在一間隙G。A thin film flip chip package structure of the present invention comprises a flexible circuit carrier and a wafer. The flexible circuit carrier includes a flexible substrate and a circuit structure disposed on the flexible substrate. The flexible substrate includes a die bond region, wherein the circuit structure includes a plurality of pins and at least one dummy pin. Wherein each of the pins has an inner lead portion located within the die bond region, and at least one dummy pin has a pair of bit patterns located within the die bond region. The wafer includes a plurality of bumps and at least one dummy bump, the wafers are disposed in the wafer bonding region, and the bumps are respectively connected to the inner lead portions, and the alignment pattern of the at least one dummy pin corresponds to the at least one dummy bump, and The orthographic projection of the alignment pattern on the wafer surrounds at least one dummy bump and there is a gap G with the edge of the at least one dummy bump.

基於上述,本發明的薄膜覆晶封裝結構透過在晶片上設置虛凸塊,且在可撓性線路載板上配置虛引腳,虛引腳具有位於晶片接合區內的對位圖案,使對位圖案對應於虛凸塊,因此,在進行內引腳接合製程以將晶片接合於可撓性線路載板時,本發明的薄膜覆晶封裝結構藉由可撓性線路載板上虛引腳的對位圖案對準晶片的虛凸塊,使對位圖案在晶片上的正投影環繞虛凸塊且與虛凸塊的邊緣存在間隙G,利用對位圖案與虛凸塊之間存在的間距,可供生產設備有效計算接合角度和位置的正確性,以確認晶片接合於可撓性線路載板上正確的位置,而使晶片的凸塊能夠精準地連接於可撓性線路載板上的內引腳部。此外,現場作業人員也能因此更容易判斷引腳與凸塊之間的接合精度,有效提升接合品質。Based on the above, the film flip-chip package structure of the present invention has a dummy bump disposed on the wafer, and a dummy pin is disposed on the flexible circuit carrier, and the dummy pin has a alignment pattern located in the wafer bonding region, so that The bit pattern corresponds to the dummy bump, and therefore, the thin film flip chip package structure of the present invention is provided with a dummy pin on the flexible line carrier when the inner pin bonding process is performed to bond the wafer to the flexible line carrier. The alignment pattern is aligned with the dummy bump of the wafer such that the orthographic projection of the alignment pattern on the wafer surrounds the dummy bump and there is a gap G with the edge of the dummy bump, using the spacing between the alignment pattern and the dummy bump The production equipment can effectively calculate the correctness of the joint angle and position to confirm that the wafer is bonded to the correct position on the flexible circuit carrier, so that the bumps of the wafer can be accurately connected to the flexible circuit carrier. Inner pin section. In addition, the field operator can easily judge the joint precision between the lead and the bump, and effectively improve the joint quality.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the invention will be apparent from the following description.

圖1是依照本發明的一實施例的一種薄膜覆晶封裝結構的局部俯視示意圖。請參閱圖1,本實施例的薄膜覆晶封裝結構100包括一可撓性線路載板110及一晶片120。可撓性線路載板110包括一可撓性基板111及配置於可撓性基板111上的一線路結構113。可撓性基板111例如是一薄膜捲帶的其中一部分。可撓性基板111包括一晶片接合區112。1 is a partial top plan view of a thin film flip chip package structure in accordance with an embodiment of the invention. Referring to FIG. 1 , the thin film flip chip package structure 100 of the present embodiment includes a flexible circuit carrier 110 and a wafer 120 . The flexible circuit carrier 110 includes a flexible substrate 111 and a line structure 113 disposed on the flexible substrate 111. The flexible substrate 111 is, for example, a part of a film web. The flexible substrate 111 includes a wafer bonding region 112.

圖2是圖1的薄膜覆晶封裝結構隱藏可撓性基板的局部仰視示意圖。圖3是圖2的局部放大示意圖。為了清楚描述晶片120的凸塊與可撓性線路載板110上的引腳的連接關係,圖2特意用另一個視角繪示出晶片120的主動表面上的凸塊配置以及與可撓性線路載板110上的引腳的相對位置。2 is a partial bottom view showing the flexible substrate of the thin film flip chip package structure of FIG. 1. Fig. 3 is a partially enlarged schematic view of Fig. 2; In order to clearly describe the connection relationship between the bumps of the wafer 120 and the leads on the flexible wiring carrier 110, FIG. 2 specifically depicts the bump configuration on the active surface of the wafer 120 and the flexible lines from another perspective. The relative position of the pins on the carrier 110.

如圖1所示,線路結構113包括多個引腳。在本實施例中,可撓性線路載板110分別具有位於圖面上方的輸入端與位於圖面下方的輸出端,可撓性線路載板110上的引腳分為向圖面上方延伸的輸入端引腳114與向圖面下方延伸的輸出端引腳116。如圖2所示,各引腳具有位於晶片接合區112內的一內引腳部。因此,輸入端引腳114具有位於晶片接合區112內的輸入端內引腳部114a,且輸出端引腳116具有位於晶片接合區112內的輸出端內引腳部116a。As shown in FIG. 1, the line structure 113 includes a plurality of pins. In this embodiment, the flexible circuit carrier 110 has an input end located above the drawing surface and an output end located below the drawing surface, and the pins on the flexible circuit carrier 110 are divided to extend above the drawing surface. The input pin 114 is connected to the output pin 116 extending below the drawing. As shown in FIG. 2, each pin has an inner lead portion located within the wafer bond region 112. Thus, the input terminal pin 114 has an input internal pin portion 114a located within the wafer bond region 112, and the output terminal pin 116 has an output internal pin portion 116a located within the wafer bond region 112.

此外,線路結構113還包括至少一個虛引腳118。在本實施例中,線路結構113包括多個虛引腳118。各虛引腳118具有位於晶片接合區112內的一對位圖案119。在本實施例中,各對位圖案119為一非封閉圖案,例如是一ㄩ字型圖案。這些虛引腳118的這些對位圖案119分別位於晶片接合區112的四個角落C1、C2、C3、C4,當然,對位圖案119的形狀及虛引腳118的總數量以及配置位置並不以此為限制。In addition, the line structure 113 also includes at least one dummy pin 118. In the present embodiment, the line structure 113 includes a plurality of dummy pins 118. Each dummy pin 118 has a pair of bit patterns 119 located within the wafer bond region 112. In this embodiment, each of the alignment patterns 119 is a non-closed pattern, such as a U-shaped pattern. The alignment patterns 119 of the dummy pins 118 are respectively located at the four corners C1, C2, C3, and C4 of the wafer bonding region 112. Of course, the shape of the alignment pattern 119 and the total number and arrangement positions of the dummy pins 118 are not This is a limitation.

晶片120包括多個凸塊,晶片120配置於晶片接合區112內,這些凸塊分別連接這些內引腳部,以使晶片120能夠電性連接於可撓性線路載板110。更明確地說,在本實施例中,晶片120包括多個輸入端凸塊122與多個輸出端凸塊123,這些輸入端凸塊122分別連接這些輸入端內引腳部114a,且這些輸出端凸塊123分別連接這些輸出端內引腳部116a。The wafer 120 includes a plurality of bumps. The wafers 120 are disposed in the wafer bonding region 112. The bumps are respectively connected to the inner lead portions to electrically connect the wafer 120 to the flexible wiring carrier 110. More specifically, in the present embodiment, the wafer 120 includes a plurality of input bumps 122 and a plurality of output bumps 123. The input bumps 122 are respectively connected to the input inner lead portions 114a, and the outputs are respectively output. The end bumps 123 are respectively connected to the output terminal inner lead portions 116a.

此外,晶片120還包括至少一個虛凸塊124,在本實施例中,晶片120包括多個虛凸塊124,這些虛凸塊124分別位於晶片120的四個角落,也就是說,虛凸塊124的配置位置對應於虛引腳118的對位圖案119的配置位置。當然,虛凸塊124的數量並不以此為限,且配置位置並不以四個角落為限制。In addition, the wafer 120 further includes at least one dummy bump 124. In the embodiment, the wafer 120 includes a plurality of dummy bumps 124 respectively located at four corners of the wafer 120, that is, dummy bumps. The configuration position of 124 corresponds to the configuration position of the alignment pattern 119 of the dummy pin 118. Of course, the number of the dummy bumps 124 is not limited thereto, and the configuration position is not limited by four corners.

如圖2所示,在本實施例中,這些對位圖案119的形狀相同,但分別位於晶片接合區112的同一邊上的任兩個角落的這些對位圖案119的數量或排列方式並不相同。舉例來說,以圖2來看,位於晶片接合區112的長邊LS1上的兩個角落C1及C2的對位圖案119的數量分別是三個和兩個,兩者的數量不同。此外,位於晶片接合區112的短邊SS1上的兩個角落C2及C3的對位圖案119的數量都是兩個,但位於角落C2的對位圖案119一個是對應沿著長邊LS1排列的虛凸塊124a,一個是對應沿著短邊SS1排列的虛凸塊124b,而位於角落C3的對位圖案119兩個皆是對應沿著長邊LS2排列的虛凸塊124a,兩者的排列方式並不相同。以此類推,位於晶片接合區112的長邊LS2上的兩個角落C3及C4的對位圖案119的排列方式不相同,而位於晶片接合區112的短邊SS2上的兩個角落C1及C4的對位圖案119的數量不相同。As shown in FIG. 2, in the present embodiment, the alignment patterns 119 have the same shape, but the number or arrangement of the alignment patterns 119 at any two corners on the same side of the wafer bonding region 112 are not the same. For example, as seen in FIG. 2, the number of alignment patterns 119 of the two corners C1 and C2 on the long side LS1 of the wafer bonding region 112 is three and two, respectively, and the number of the two is different. In addition, the number of alignment patterns 119 of the two corners C2 and C3 located on the short side SS1 of the wafer bonding region 112 is two, but one of the alignment patterns 119 located at the corner C2 is correspondingly arranged along the long side LS1. The dummy bumps 124a, one is a dummy bump 124b corresponding to the short side SS1, and the alignment pattern 119 located at the corner C3 is a virtual bump 124a corresponding to the long side LS2, and the arrangement of the two The way is different. By analogy, the alignment patterns 119 of the two corners C3 and C4 on the long side LS2 of the wafer bonding region 112 are arranged differently, and the two corners C1 and C4 on the short side SS2 of the wafer bonding region 112 are located. The number of alignment patterns 119 is different.

此外,在其他實施例中,位於晶片接合區112的同一邊上的兩個角落的這些對位圖案119的形狀也可以是不相同的。藉由設置不同形狀、數量及/或排列方式的對位圖案119,可避免晶片120配置於晶片接合區112內時方向錯置。然而,本發明並不以此為限,在其他實施例中,當晶片120與可撓性線路載板110上另設置有其他預防晶片接合時方向錯置的防呆機制時,位於晶片接合區112的各個角落的這些對位圖案119的形狀、數量及/或排列方式則可以是相同的。換句話說,晶片接合區112的同一邊上的兩個角落的這些對位圖案119的數量、形狀及/或排列方式不以上述為限制。Moreover, in other embodiments, the shape of the alignment patterns 119 at the two corners on the same side of the wafer bonding region 112 may also be different. By arranging the alignment patterns 119 of different shapes, numbers, and/or arrangements, it is possible to prevent the wafers 120 from being misaligned when disposed in the wafer bonding region 112. However, the present invention is not limited thereto. In other embodiments, when the wafer 120 and the flexible circuit carrier 110 are additionally provided with other foolproof mechanisms for preventing misalignment during wafer bonding, the wafer bonding region is located. The shape, number, and/or arrangement of the alignment patterns 119 at various corners of 112 may be the same. In other words, the number, shape, and/or arrangement of the alignment patterns 119 at the two corners on the same side of the wafer bonding region 112 are not limited to the above.

請同時參閱圖2與圖3,各虛引腳118的對位圖案119對應於其所對應的虛凸塊124,且各對位圖案119在晶片120上的正投影至少局部環繞其所對應的虛凸塊124且與虛凸塊124的邊緣存在一間隙G。在本實施例中,虛凸塊124為長方形,且對位圖案119為ㄩ字型,因此各對位圖案119在晶片120上的正投影是環繞其所對應的虛凸塊124的三邊且與三邊分別存在間隙G。然而,虛凸塊124的形狀與對位圖案119的形狀並不以上述為限制,對位圖案119的形狀是順應虛凸塊124的形狀而設計,以使對位圖案119在晶片120上的正投影與其所環繞的虛凸塊124的邊緣之間維持間隙G。藉由這樣的配置,當要進行內引腳接合製程將晶片120設置於可撓性線路載板110的晶片接合區112內時,生產設備可透過確認虛引腳118的對位圖案119是否對位於晶片120的虛凸塊124,且辨識及計算對位圖案119在晶片120上的正投影是否環繞虛凸塊124的邊緣且與邊緣存在間隙G,便能夠確認晶片120是否接合於可撓性線路載板110上正確的位置。如此一來,晶片120的凸塊(輸入端凸塊122與輸出端凸塊123)便會精準地連接可撓性線路載板110上的內引腳部(輸入端內引腳部114a與輸出端內引腳部116a)。現場作業人員也能更容易地判斷內引腳與凸塊之間的接合精度,有效提升接合品質。2 and FIG. 3, the alignment pattern 119 of each dummy pin 118 corresponds to its corresponding dummy bump 124, and the orthographic projection of each alignment pattern 119 on the wafer 120 at least partially surrounds its corresponding The dummy bump 124 has a gap G with the edge of the dummy bump 124. In this embodiment, the dummy bumps 124 are rectangular, and the alignment pattern 119 is U-shaped. Therefore, the orthographic projection of each alignment pattern 119 on the wafer 120 is around three sides of the corresponding dummy bumps 124 and There is a gap G with each of the three sides. However, the shape of the dummy bump 124 and the shape of the alignment pattern 119 are not limited to the above, and the shape of the alignment pattern 119 is designed to conform to the shape of the dummy bump 124 so that the alignment pattern 119 is on the wafer 120. A gap G is maintained between the orthographic projection and the edge of the imaginary bump 124 it surrounds. With such a configuration, when the inner pin bonding process is to be performed to place the wafer 120 in the wafer bonding region 112 of the flexible wiring carrier 110, the production device can confirm whether the alignment pattern 119 of the dummy pin 118 is correct. The dummy bumps 124 located on the wafer 120, and identifying and calculating whether the orthographic projection of the alignment pattern 119 on the wafer 120 surrounds the edge of the dummy bump 124 and having a gap G with the edge, can confirm whether the wafer 120 is bonded to the flexible portion. The correct position on the line carrier 110. As a result, the bumps (input bumps 122 and output bumps 123) of the wafer 120 are accurately connected to the inner lead portions of the flexible wiring carrier 110 (input terminal inner portion 114a and output) In-terminal lead portion 116a). Field workers can also more easily determine the joint accuracy between the inner leads and the bumps, effectively improving the joint quality.

此外,晶片120上的凸塊依照不同功能需求會有不同的寬度,相應地,可撓性線路載板110上的引腳也會配合對應的凸塊而設計成不同的寬度。一般而言,如圖2與圖3所示,輸出端凸塊123的寬度會小於輸入端凸塊122的寬度,且輸出端引腳116的寬度會小於輸入端引腳114的寬度。因此,輸出端引腳116的邊緣與輸出端凸塊123的邊緣之間的距離會不同於輸入端引腳114的邊緣與輸入端凸塊122的邊緣之間的距離。In addition, the bumps on the wafer 120 have different widths according to different functional requirements. Accordingly, the pins on the flexible circuit carrier 110 are also designed to have different widths in accordance with the corresponding bumps. In general, as shown in FIGS. 2 and 3, the width of the output bump 123 may be smaller than the width of the input bump 122, and the width of the output pin 116 may be smaller than the width of the input pin 114. Thus, the distance between the edge of the output pin 116 and the edge of the output bump 123 will be different than the distance between the edge of the input pin 114 and the edge of the input bump 122.

如圖2所示,在本實施例中,各內引腳部(輸入端內引腳部114a或輸出端內引腳部116a)的邊緣與對應連接的各凸塊(輸入端凸塊122或輸出端凸塊123)的邊緣之間具有一最小距離D,這些最小距離D中的最小值Dmin 通常會位在輸出端內引腳部116a的邊緣與輸出端凸塊123的邊緣之間。在一較佳實施例中,對位圖案119在晶片120上的正投影與虛凸塊124的邊緣之間的間隙G介於這些最小距離D的最小值Dmin 的1.6至2.4倍之間(也就是1.6Dmin ≦G≦2.4Dmin )。此間隙G的範圍可使得晶片120接合於可撓性線路載板110時,內引腳部(輸入端內引腳部114a與輸出端內引腳部116a)正確連接對應的凸塊(輸入端凸塊122與輸出端凸塊123),而不至於過度偏移出接合位置,甚至於發生未連接或是連接到錯誤引腳的狀況。As shown in FIG. 2, in the present embodiment, the edges of the inner lead portions (the input inner lead portion 114a or the output inner lead portion 116a) and the correspondingly connected bumps (input bumps 122 or There is a minimum distance D between the edges of the output bumps 123), and the minimum value Dmin of these minimum distances D will typically be between the edge of the lead portion 116a and the edge of the output bump 123 in the output. In a preferred embodiment, the gap G between the orthographic projection of the alignment pattern 119 on the wafer 120 and the edge of the dummy bump 124 is between 1.6 and 2.4 times the minimum value Dmin of the minimum distances D ( That is 1.6D min ≦G≦2.4D min ). The gap G is such that when the wafer 120 is bonded to the flexible wiring carrier 110, the inner lead portion (the input inner lead portion 114a and the output inner lead portion 116a) is correctly connected to the corresponding bump (input terminal) The bump 122 and the output bump 123) are not excessively offset from the joint position, even in the case of being unconnected or connected to the wrong pin.

圖4是圖1的局部剖面示意圖。請參閱圖4,於內引腳接合製程之後,輸出端凸塊123會與輸出端內引腳部116a接觸連接,而對位圖案119的正投影則環繞虛凸塊124的邊緣且與邊緣之間存在間隙G,也就是說,虛凸塊124是位於對位圖案119所環繞出的空間內,而不會與對位圖案119接觸,且虛凸塊124的高度小於輸出端凸塊123與輸出端內引腳部116a接合後的總高度,因此,虛凸塊124也不會接觸可撓性基板111。Figure 4 is a partial cross-sectional view of Figure 1. Referring to FIG. 4, after the internal pin bonding process, the output bump 123 is in contact with the output inner pin portion 116a, and the orthographic projection of the alignment pattern 119 surrounds the edge of the dummy bump 124 and the edge. There is a gap G between them, that is, the dummy bump 124 is located in the space surrounded by the alignment pattern 119, and is not in contact with the alignment pattern 119, and the height of the dummy bump 124 is smaller than the output bump 123 and The total height of the lead portions 116a in the output end after bonding is such that the dummy bumps 124 do not contact the flexible substrate 111.

此外,在本實施例中,薄膜覆晶封裝結構100更包括一封裝膠體130,位於可撓性線路載板110與晶片120之間,封裝膠體130包覆這些引腳的這些內引腳部、虛引腳118的對位圖案119、這些凸塊以及虛凸塊124,以使晶片120可以穩固地連接於可撓性線路載板110並且保護晶片120與可撓性線路載板110之間的電性接點(這些內引腳部與凸塊)。更具體而言,為能有效防止水氣或異物侵入造成電性接點損壞或電性異常,封裝膠體130亦會包覆晶片120之四周。In addition, in the present embodiment, the thin film flip chip package structure 100 further includes an encapsulant 130 disposed between the flexible circuit carrier 110 and the wafer 120. The encapsulant 130 covers the inner leads of the pins. The alignment pattern 119 of the dummy pins 118, the bumps, and the dummy bumps 124 are such that the wafer 120 can be firmly connected to the flexible wiring carrier 110 and protect the wafer 120 from the flexible wiring carrier 110. Electrical contacts (these inner leads and bumps). More specifically, the encapsulant 130 also covers the periphery of the wafer 120 in order to effectively prevent the intrusion of moisture or foreign matter from causing electrical contact damage or electrical anomalies.

下面舉出其他種薄膜覆晶封裝結構100,需說明的是,在下面的這些實施例中,與前述實施例相同或相似的元件以相同或相似的符號表示,不再多加贅述。In the following embodiments, the same or similar elements as those of the foregoing embodiments are denoted by the same or similar symbols and will not be further described.

圖5是依照本發明的另一實施例的一種薄膜覆晶封裝結構隱藏可撓性基板的仰視示意圖。請參閱圖5,圖5與圖2的主要差異在於,在圖2中,虛凸塊124分別位於晶片120的四個角落,虛引腳118的這些對位圖案119分別位於晶片接合區112的四個角落。在本實施例中,薄膜覆晶封裝結構100a的這些虛凸塊124分別位於晶片120的對角線上的兩個角落(右上角與左下角),相應地,這些虛引腳118的這些對位圖案119分別位於晶片接合區112的對角線上的兩個角落(右上角與左下角)。然而,晶片120設置有虛凸塊124及晶片接合區112設置有對位圖案119的角落數量可根據生產設備的對位辨識機制的需求而設定,不以上述實施例為限。FIG. 5 is a bottom plan view of a thin film flip-chip package structure concealing a flexible substrate according to another embodiment of the invention. Referring to FIG. 5, the main difference between FIG. 5 and FIG. 2 is that, in FIG. 2, the dummy bumps 124 are respectively located at four corners of the wafer 120, and the alignment patterns 119 of the dummy pins 118 are respectively located at the wafer bonding region 112. Four corners. In the present embodiment, the dummy bumps 124 of the thin film flip chip package structure 100a are respectively located at two corners (upper right and lower left corners) on the diagonal of the wafer 120. Accordingly, these alignments of the dummy pins 118 are correspondingly The patterns 119 are respectively located at two corners (upper right and lower left corners) on the diagonal of the wafer bonding region 112. However, the number of corners in which the wafer 120 is provided with the dummy bumps 124 and the wafer bonding regions 112 are provided with the alignment patterns 119 can be set according to the requirements of the alignment identification mechanism of the production equipment, and is not limited to the above embodiments.

此外,虛引腳118的對位圖案119的形式並不以上述為限制。圖6至圖8分別是本發明的其他實施例的多種薄膜覆晶封裝結構隱藏可撓性基板的局部仰視示意圖。Further, the form of the alignment pattern 119 of the dummy pin 118 is not limited to the above. 6 to 8 are partial bottom views of a plurality of thin film flip-chip packages for hiding a flexible substrate according to other embodiments of the present invention.

請先參閱圖6,在本實施例中,對位圖案119b為一封閉圖案,封閉圖案例如是一口字型圖案。當然,對位圖案119b為封閉圖案的形式並不以此為限制,在其他實施例中,配合虛凸塊124的形狀,對位圖案119b也可以是封閉的環型圖案,或者其他封閉形狀的圖案,只要對位圖案在晶片120上的正投影與其所環繞的虛凸塊的邊緣之間維持間隙G即可。Please refer to FIG. 6. In this embodiment, the alignment pattern 119b is a closed pattern, and the closed pattern is, for example, a one-letter pattern. Of course, the form of the alignment pattern 119b is not limited thereto. In other embodiments, the alignment pattern 119b may also be a closed ring pattern, or other closed shape, in combination with the shape of the dummy bump 124. The pattern is such that the gap G is maintained between the orthographic projection of the alignment pattern on the wafer 120 and the edge of the dummy bump surrounded by it.

請參閱圖7,在本實施例中,對位圖案119c為一非封閉圖案,對位圖案119c例如是非封閉的一叉狀圖案。在本實施例中,對位圖案119c的叉狀圖案的開口是朝向晶片120內部。請參閱圖8,在本實施例中,對位圖案119d為呈一倒叉狀的非封閉圖案,也就是說,對位圖案119d的倒叉狀圖案的開口是朝向晶片120的邊緣。當然,上面僅是舉出數種對位圖案119、119b、119c、119d的形狀,對位圖案119、119b、119c、119d的形狀並不以上述為限制。Referring to FIG. 7, in the embodiment, the alignment pattern 119c is a non-closed pattern, and the alignment pattern 119c is, for example, a non-closed bifurcated pattern. In the present embodiment, the opening of the cross pattern of the alignment pattern 119c is toward the inside of the wafer 120. Referring to FIG. 8, in the embodiment, the alignment pattern 119d is a non-closed pattern in the shape of a inverted fork, that is, the opening of the inverted pattern of the alignment pattern 119d is toward the edge of the wafer 120. Of course, only the shapes of the plurality of alignment patterns 119, 119b, 119c, and 119d are mentioned above, and the shapes of the alignment patterns 119, 119b, 119c, and 119d are not limited to the above.

綜上所述,本發明的薄膜覆晶封裝結構透過在晶片上設置虛凸塊,且在可撓性線路載板上配置虛引腳,虛引腳具有位於晶片接合區內的對位圖案,使對位圖案對應於虛凸塊,因此,在進行內引腳接合製程以將晶片接合於可撓性線路載板時,本發明的薄膜覆晶封裝結構藉由可撓性線路載板上虛引腳的對位圖案對準晶片的虛凸塊,使對位圖案在晶片上的正投影環繞虛凸塊且與虛凸塊的邊緣存在間隙G,利用對位圖案與虛凸塊之間存在的間距,可供生產設備有效計算接合角度和位置的正確性,以確保晶片接合於可撓性線路載板上正確的位置,而使晶片上的凸塊能夠精準地連接於可撓性線路載板上的內引腳部。此外,現場作業人員也能更容易判斷引腳與凸塊之間的接合精度,有效提升接合品質。In summary, the thin film flip chip package structure of the present invention has a dummy bump disposed on the wafer, and a dummy pin is disposed on the flexible circuit carrier, and the dummy pin has a alignment pattern located in the wafer bonding region. The alignment pattern is made to correspond to the dummy bumps. Therefore, when the inner lead bonding process is performed to bond the wafer to the flexible wiring carrier, the thin film flip chip package structure of the present invention is virtualized by the flexible wiring carrier The alignment pattern of the pins is aligned with the dummy bumps of the wafer, so that the orthographic projection of the alignment pattern on the wafer surrounds the dummy bumps and there is a gap G with the edges of the dummy bumps, which exists between the alignment pattern and the dummy bumps. The spacing allows the production equipment to efficiently calculate the joint angle and position to ensure that the wafer is bonded to the correct position on the flexible circuit carrier, allowing the bumps on the wafer to be accurately connected to the flexible line. The inner lead portion of the board. In addition, field workers can more easily determine the joint accuracy between the pins and the bumps, effectively improving the joint quality.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

100、100a‧‧‧薄膜覆晶封裝結構
110‧‧‧可撓性線路載板
111‧‧‧可撓性基板
112‧‧‧晶片接合區
113‧‧‧線路結構
114‧‧‧輸入端引腳
114a‧‧‧輸入端內引腳部
116‧‧‧輸出端引腳
116a‧‧‧輸出端內引腳部
118‧‧‧虛引腳
119、119b、119c、119d‧‧‧對位圖案
120‧‧‧晶片
122‧‧‧輸入端凸塊
123‧‧‧輸出端凸塊
124、124a、124b‧‧‧虛凸塊
130‧‧‧封裝膠體
C1、C2、C3、C4‧‧‧角落
D‧‧‧最小距離
Dmin ‧‧‧最小距離的最小值
G‧‧‧間隙
LS1、LS2‧‧‧長邊
SS1、SS2‧‧‧短邊
100, 100a‧‧‧ film flip chip package structure
110‧‧‧Flexible line carrier
111‧‧‧Flexible substrate
112‧‧‧ wafer junction area
113‧‧‧Line structure
114‧‧‧Input pin
114a‧‧‧Input pin section
116‧‧‧Output pin
116a‧‧‧Output pin section
118‧‧‧virtual pins
119, 119b, 119c, 119d‧‧‧ alignment pattern
120‧‧‧ wafer
122‧‧‧Input bumps
123‧‧‧Output bumps
124, 124a, 124b‧‧‧ virtual bumps
130‧‧‧Package colloid
C1, C2, C3, C4‧‧‧ corner
D‧‧‧Minimum distance
D min ‧‧‧minimum of minimum distance
G‧‧‧ gap
LS1, LS2‧‧‧ long side
SS1, SS2‧‧‧ short side

圖1是依照本發明的一實施例的一種薄膜覆晶封裝結構的局部俯視示意圖。 圖2是圖1的薄膜覆晶封裝結構隱藏可撓性基板的局部仰視示意圖。 圖3是圖2的局部放大示意圖。 圖4是圖1的局部剖面示意圖。 圖5是依照本發明的另一實施例的一種薄膜覆晶封裝結構隱藏可撓性基板的仰視示意圖。 圖6至圖8分別是本發明的其他實施例的多種薄膜覆晶封裝結構隱藏可撓性基板的局部仰視示意圖。1 is a partial top plan view of a thin film flip chip package structure in accordance with an embodiment of the invention. 2 is a partial bottom view showing the flexible substrate of the thin film flip chip package structure of FIG. 1. Fig. 3 is a partially enlarged schematic view of Fig. 2; Figure 4 is a partial cross-sectional view of Figure 1. FIG. 5 is a bottom plan view of a thin film flip-chip package structure concealing a flexible substrate according to another embodiment of the invention. 6 to 8 are partial bottom views of a plurality of thin film flip-chip packages for hiding a flexible substrate according to other embodiments of the present invention.

Claims (11)

一種薄膜覆晶封裝結構,包括: 一可撓性線路載板,包括一可撓性基板及配置於該可撓性基板上的一線路結構,該可撓性基板包括一晶片接合區,其中該線路結構包括多個引腳及至少一個虛引腳,其中各該引腳具有位於該晶片接合區內的一內引腳部,該至少一個虛引腳具有位於該晶片接合區內的一對位圖案;以及 一晶片,包括多個凸塊及至少一個虛凸塊,該晶片配置於該晶片接合區內,使該些凸塊分別連接該些內引腳部,該至少一個虛引腳的該對位圖案對應該至少一個虛凸塊,且該對位圖案在該晶片上的正投影至少局部環繞該至少一個虛凸塊且與該至少一個虛凸塊的邊緣存在一間隙G。A film flip chip package structure comprising: a flexible circuit carrier, comprising a flexible substrate and a line structure disposed on the flexible substrate, the flexible substrate comprising a wafer bonding region, wherein the The wiring structure includes a plurality of pins and at least one dummy pin, wherein each of the pins has an inner lead portion located in the die bond region, and the at least one dummy pin has a pair of bits located in the die bond region And a wafer comprising a plurality of bumps and at least one dummy bump disposed in the wafer bonding region, wherein the bumps are respectively connected to the inner lead portions, the at least one dummy pin The alignment pattern corresponds to at least one dummy bump, and the orthographic projection of the alignment pattern on the wafer at least partially surrounds the at least one dummy bump and has a gap G with the edge of the at least one dummy bump. 如申請專利範圍第1項所述的薄膜覆晶封裝結構,其中該對位圖案在該晶片上的正投影環繞該至少一個虛凸塊的至少三邊且與該至少三邊分別存在該間隙G。The film flip-chip package structure of claim 1, wherein the orthographic projection of the alignment pattern on the wafer surrounds at least three sides of the at least one dummy bump and the gap G exists respectively with the at least three sides . 如申請專利範圍第1項所述的薄膜覆晶封裝結構,其中該至少一個虛凸塊位於該晶片的至少一個角落,該至少一個虛引腳的該對位圖案位於該晶片接合區的至少一個角落。The thin film flip chip package structure of claim 1, wherein the at least one dummy bump is located at at least one corner of the wafer, and the alignment pattern of the at least one dummy pin is located in at least one of the wafer bonding regions. corner. 如申請專利範圍第3項所述的薄膜覆晶封裝結構,其中該至少一個虛凸塊的數量為多個,該些虛凸塊分別位於該晶片的四個角落,該至少一個虛引腳的數量為多個,該些虛引腳的該些對位圖案分別位於該晶片接合區的四個角落。The thin film flip chip package structure of claim 3, wherein the number of the at least one dummy bump is plural, and the dummy bumps are respectively located at four corners of the chip, the at least one dummy pin The number is a plurality of, and the alignment patterns of the dummy pins are respectively located at four corners of the wafer bonding area. 如申請專利範圍第4項所述的薄膜覆晶封裝結構,其中分別位於該晶片接合區的同一邊上的任兩個角落的該些對位圖案的形狀、數量、排列方式或其任意組合不相同。The film flip-chip package structure according to claim 4, wherein the shape, the number, the arrangement, or any combination thereof of the alignment patterns at any two corners on the same side of the wafer bonding region are not the same. 如申請專利範圍第3項所述的薄膜覆晶封裝結構,其中該至少一個虛凸塊的數量為多個,該些虛凸塊分別位於該晶片的對角線上的兩個角落,該至少一個虛引腳的數量為多個,該些虛引腳的該些對位圖案分別位於該晶片接合區的對角線上的兩個角落。The thin film flip chip package structure of claim 3, wherein the number of the at least one dummy bump is plural, and the dummy bumps are respectively located at two corners on a diagonal of the wafer, the at least one The number of dummy pins is plural, and the alignment patterns of the dummy pins are respectively located at two corners on the diagonal of the wafer bonding region. 如申請專利範圍第1項所述的薄膜覆晶封裝結構,其中各該內引腳部的邊緣與對應連接的各該凸塊的邊緣之間具有一最小距離D,各該間隙G介於該些最小距離D的最小值Dmin 的1.6至2.4倍之間(1.6Dmin ≦G≦2.4Dmin )。The film flip-chip package structure according to claim 1, wherein an edge of each of the inner lead portions has a minimum distance D between the edges of the correspondingly connected bumps, and the gap G is between the gaps G The minimum distance D is between 1.6 and 2.4 times the minimum value D min (1.6 D min ≦ G ≦ 2.4 D min ). 如申請專利範圍第1項所述的薄膜覆晶封裝結構,其中該對位圖案為一非封閉圖案,該非封閉圖案包括一ㄩ字型圖案、一U型圖案、一叉狀圖案或一倒叉狀圖案。The film flip chip package structure according to claim 1, wherein the alignment pattern is a non-closed pattern, and the non-closed pattern comprises a U-shaped pattern, a U-shaped pattern, a crossed pattern or a inverted fork. Shaped pattern. 如申請專利範圍第1項所述的薄膜覆晶封裝結構,其中該對位圖案為一封閉圖案,該封閉圖案包括一口字型圖案或一環型圖案。The film flip chip package structure according to claim 1, wherein the alignment pattern is a closed pattern, and the closed pattern comprises a dot pattern or a ring pattern. 如申請專利範圍第1項所述的薄膜覆晶封裝結構,其中該至少一個虛凸塊不接觸對應的該對位圖案及該可撓性基板。The thin film flip chip package structure of claim 1, wherein the at least one dummy bump does not contact the corresponding alignment pattern and the flexible substrate. 如申請專利範圍第1項所述的薄膜覆晶封裝結構,更包括一封裝膠體,位於該可撓性線路載板與該晶片之間,該封裝膠體包覆該些引腳的該些內引腳部、該至少一個虛引腳的該對位圖案、該些凸塊以及該至少一個虛凸塊。The film flip chip package structure of claim 1, further comprising an encapsulant disposed between the flexible circuit carrier and the wafer, the encapsulant covering the leads of the pins a footprint, the alignment pattern of the at least one dummy pin, the bumps, and the at least one dummy bump.
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TWI833196B (en) * 2022-04-07 2024-02-21 南茂科技股份有限公司 Inner lead bonding apparatus and inner lead bonding method
TWI847422B (en) * 2022-12-13 2024-07-01 南茂科技股份有限公司 Chip on film package structure

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TWI726675B (en) * 2020-04-09 2021-05-01 南茂科技股份有限公司 Chip-on-film package structure

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TWI833196B (en) * 2022-04-07 2024-02-21 南茂科技股份有限公司 Inner lead bonding apparatus and inner lead bonding method
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