TW201811638A - Composite stable transfer device including two wheel seats, a plurality of wheel sets, a carrier unit and a driving unit - Google Patents

Abstract

A composite stable transfer device is configured to be mounted in a sputtering chamber, and includes two wheel seats, a plurality of wheel sets, a carrier unit and a driving unit. Some of the wheel sets are disposed in one wheel seat in a spaced manner, and the other wheel sets are disposed in the other wheel seat in a spaced manner. Each of the wheel sets includes a wheel shaft pivotally installed on the corresponding wheel seat, and a magnetic transfer wheel connected to the wheel shaft. The magnetic transfer wheel has an axial line, a wheel periphery surrounding the axial line, a magnetic track ring surrounding the axial line and disposed in the wheel periphery, and at least one elastic friction ring surroundingly disposed on an outer peripheral surface of the wheel periphery. The carrier unit abuts against the friction rings of the wheel sets and includes a carrier and two magnetic rails disposed at the carrier in a spaced manner. The driving unit can be operated for driving the wheel sets to run synchronously.

Description

Composite stable transfer device and magnetized conveying wheel

The invention relates to a transfer device, in particular to a composite stable transfer device for sputtering equipment.

A horizontal stepping sputtering device developed by the applicant and which has been applied for Taiwan Certificate No. M384399 patent, includes a plurality of corresponding sputtering chambers and is used to transport a workpiece tray between the sputtering chambers. Mobile drive unit. Each driving unit includes a transmission motor located outside the corresponding sputtering chamber, a plurality of transport rollers disposed in the corresponding sputtering chamber and driven by the transmission motor, and a plurality of transmission rollers disposed in the corresponding sputtering chamber and located in the corresponding sputtering chamber. Wait for the side rollers on both sides of the transport roller. When each driving unit drives the workpiece tray to move, the conveying rollers abut against the bottom surface of the workpiece tray, and the side rollers guide both sides of the workpiece tray, thereby achieving continuous and periodic reciprocating driving of the workpiece tray. Work pallet and precise position control of the work pallet.

However, since the workpiece tray is transferred by frictional rolling contact with the conveying rollers, when the conveying rollers stop quickly from the running state, the workpiece tray cannot immediately move with the conveying rollers due to inertial movement, thus The problem of positioning deviation is easy to occur.

The workpiece tray is often skewed when moving in or across chambers, and it needs to be guided by contacting the side rollers, which increases the complexity of the mechanism and easily generates dust pollution and workpiece vibration deviation due to collision.

In addition, the Taiwan Certificate No. I421360 patent discloses a double-sided sputtering etching substrate system. A disc carrier has a set of magnetizing wheels and is placed on a set of tracks made of permanent magnetic material. The disc carrier is driven by a linear motor. The disc carrier produces better attraction and stability by matching the set of magnetizing wheels with the set of magnetic tracks.

However, because the above-mentioned magnetizing wheels are in direct hard contact with the magnetic track, when the track surface of the group of magnetic tracks is not processed smoothly or there is a height difference between the two magnetic tracks, the disc carrier will tilt during the movement. Shaking, which affects the quality of sputter etching.

Therefore, an object of the present invention is to provide a composite stable transfer device that overcomes at least the disadvantages described in the prior art.

Therefore, the composite stable transfer device of the present invention is used to be installed in a sputtering plating cavity, and includes two wheel bases, a plurality of wheel sets, a stage unit, and a drive unit.

The wheel seats are arranged in the sputtering chamber at intervals along a horizontal direction. Each wheel seat extends in a conveying direction perpendicular to the transverse direction.

Some of the wheel sets are arranged at intervals on one of the wheel seats along the conveying direction, and the other are arranged at intervals of the other wheel seats along the conveying direction. Each wheel set includes a wheel axle and a magnetically transported wheel. The wheel axle is pivoted on the corresponding wheel seat. The magnetized conveying wheel is connected to the wheel shaft, and has an axis, a wheel peripheral portion surrounding the axis, a magnetic track ring disposed in the wheel peripheral portion around the axis, and at least one outer periphery disposed on the wheel peripheral portion. The surface and elastic friction ring has a plurality of positive magnetic areas and a plurality of negative magnetic areas arranged alternately and spaced around the axis. The magnetic poles of the positive magnetic areas are different from the magnetic poles of the negative magnetic areas.

The carrier unit is supported by the friction rings of the wheel sets, and includes a carrier and two magnetic rails spaced from the carrier along the transverse direction. Each magnetic track strip extends along the conveying direction and has a plurality of positive magnetic areas and a plurality of negative magnetic areas arranged at staggered intervals along the conveying direction. The magnetic pole of each positive magnetic zone is different from the magnetic pole of each negative magnetic zone. One of the magnetic track strips is the wheel set corresponding to one of the wheel seats, and the other of the magnetic track strips is the wheel set corresponding to the other wheel seat.

The drive unit is operable to drive the wheels to run synchronously.

The effect of the present invention lies in that the magnetic attraction between the magnetic stripe of the stage unit and the magnetic track rings of the wheel sets abutting can not only make the combination between the stage unit and the wheel sets more To improve the movement stability and positioning accuracy of the carrier unit, and to overcome the inertial displacement of the carrier unit caused by the emergency stop of the wheel units, and to prevent the carrier unit from shifting in the lateral direction relative to the wheel units, Thereby, the component arrangement of the side guide wheel mentioned in the prior art is eliminated. In addition, the elasticity of the friction rings of the wheel sets can compensate and absorb the tolerance of the stage unit and the wheel sets in the height direction, and avoid the problem of hard contact caused by the cross-cavity connection.

Referring to FIG. 1 and FIG. 2, an embodiment of the composite stable transfer device of the present invention is configured to be installed in a sputtering plating chamber 1. The composite stable transfer device includes two wheel seats 2 and sixteen wheel sets 3 , A stage unit 5, and a drive unit 6.

The wheel seats 2 are arranged in the sputtering chamber 1 along a horizontal direction X interval. Each wheel base 2 extends in a conveying direction Y perpendicular to the lateral direction X.

Eight of the wheel sets 3 are arranged on one of the wheel seats 2 along the conveying direction at Y intervals, and the other eight are arranged on the other wheel seat 2 along the conveying directions at Y intervals. Referring to FIG. 4 and FIG. 5, each wheel set 3 includes a wheel shaft 31 pivoted on a corresponding wheel seat 2, and a magnetically transported wheel 4 connected to the wheel shaft 31. The magnetized conveying wheel 4 has an axis L, a housing 41, a magnetic track ring 42, a side ring cover 43, and two friction rings 44. Each housing 41 has a wheel peripheral portion 411 surrounding the axis L, a bearing ring portion 412 located radially inside the wheel peripheral portion 411 and surrounding the axis L, and an end extending from one end of the wheel peripheral portion 411 to the The closed side portion 413 of the bearing ring portion 412 and an accommodation space 414 defined by the wheel peripheral portion 411, the bearing ring portion 412 and the closed side portion 413 and the boundary. The magnetic track ring 42 is disposed in the accommodating space 414 and is attached to the inner peripheral surface of the wheel peripheral portion 411. The magnetic track ring 42 has a plurality of positive magnetic areas 421 and a plurality of negative magnetic areas 422 arranged alternately around the axis L. The magnetic poles of the positive magnetic areas 421 of the magnetic track ring 42 are different from the magnetic poles of the negative magnetic areas 422. The side seal ring cover 43 is disposed on an end of the wheel peripheral portion 411 of the housing 41 opposite to the closed side portion 413 to close the opening of the accommodating space 414, thereby the side seal ring cover 43 and the shell are closed. The body 41 cooperates to close the magnetic track ring 42 in the accommodating space 414 and is isolated from the outside world. The friction rings 44 are arranged side by side on the outer peripheral surface of the wheel peripheral portion 411 along the axis L and have elasticity.

Referring to FIG. 2, FIG. 3 and FIG. 4, the stage unit 5 bears on the friction rings 44 of the wheel sets 3 and includes a stage 51, and two stages 51 disposed on the stage 51 in the transverse direction X at intervals. Magnetic track strip 52. The bottom surface of the stage 51 is recessed to form two embedding grooves 511 for the magnetic rail strips 52 to be embedded therein. One of the magnetic rail strips 52 is a friction ring 44 corresponding to the wheel sets 3 disposed on one of the wheel seats 2 and bears on the wheel sets 3, and the other of the magnetic rail strips 52 is provided correspondingly to The wheel sets 3 of the other wheel seat 2 bear on the friction rings 44 of the wheel sets 3. Each magnetic track strip 52 extends along the conveying direction Y and has a plurality of positive magnetic areas 521 and a plurality of negative magnetic areas 522 arranged at staggered intervals along the conveying direction Y. The magnetic poles of the positive magnetic areas 521 of each magnetic track strip 52 differ The magnetic pole of each negative magnetic region 522. In this embodiment, each magnetic rail bar 52 is first adhered to a back iron 53 and then fits into the corresponding recessed groove 511 through the back iron 53.

Referring to FIG. 2 and FIG. 4, it is defined here that two wheel sets 3 respectively disposed at the ends of the wheel seats 2 on the same side and oppositely disposed along the horizontal direction X are active wheel sets, and the remaining wheel sets 3 are defined as Driven wheel set. The driving unit 6 includes a driving member 61, a connecting shaft 62, a plurality of transmission wheels 63, two transmission groups 64, and a plurality of tension wheels 65. The driving member 61 is connected to the axle 31 of one of the driving wheels 3. The connecting shaft 62 is connected to the axles 31 of the driving wheel sets 3. The transmission wheels 63 are respectively disposed on the axles 31 of the wheel sets 3. One of the transmission sets 64 is connected to the transmission wheels 63 of the wheel set 3 provided on the one wheel seat 2, and the other transmission set 64 is to be disposed on the wheel sets 3 of the other wheel seat 2. The transmission wheels 63 are connected to enable the wheels 3 to run synchronously. Each transmission group 64 has a plurality of transmission belts 641 around the transmission wheels 63 provided on two adjacent wheel groups 3 respectively. The tension wheels 65 are respectively used to tightly connect the transmission belts 641 to the transmission wheels 63.

The above is the description of the component composition of the composite stable transfer device of the present invention. Then, the action of the present invention and the expected effect can be stated as follows:

The magnetic attraction between the magnetic rail strips 52 of the stage unit 5 and the magnetic rail rings 42 of the wheel sets 3 that are in contact with each other can make the combination of the stage unit 5 and the wheel sets 3 better. And improve the movement stability and positioning accuracy of the stage unit 5, and avoid the stage unit 5 from shifting in the lateral direction X relative to the wheel sets 3, thereby avoiding the side guide wheels mentioned in the prior art Component settings.

When the wheels 3 are stopped quickly from the running state, the magnetic attraction between the magnetic rail strips 52 of the stage unit 5 and the magnetic ring rings 42 of the wheels 3 abutted, and the wheels The friction force provided by the friction ring 44 of 3 is used to resist the inertial movement of the stage unit 5 and avoid the problem of positioning deviation.

The friction ring 44 of the wheel sets 3 is elastic and can be compressed by the carrier unit 5 to compensate for the processing tolerance or height setting tolerance between the carrier unit 5 and the wheel sets 3, This enables the stage unit 5 to maintain a certain setting level, and does not tilt and shake during the movement, and avoids the problem of hard contact caused by the cross-cavity connection.

Through the structural design of each magnetized conveying wheel 4 through its casing 41 and its side seal ring cover 43, it can cooperate to cover and close its magnetic track ring 42 to prevent the magnetic track ring 42 from being affected by sputtering and sputtering high temperature. Loss of magnetism, and the magnetic track ring 42 is enclosed and enclosed in the casing 41, so that the external dimensions of each magnetically-conveyed conveying wheel 4 are consistent with the traditional non-magnetized conveying wheels, which is beneficial to the traditional transfer device. It can be upgraded to the present invention by replacing the magnetized conveying wheel 4 of the present invention.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited in this way, any simple equivalent changes and modifications made in accordance with the scope of the patent application and the content of the patent specification of the present invention are still Within the scope of the invention patent.

1‧‧‧ sputtering chamber

2‧‧‧ wheel seat

3‧‧‧ round

31‧‧‧ Wheel

4‧‧‧Magnetized Conveyor Wheel

41‧‧‧shell

411‧‧‧ round week

412‧‧‧bearing ring

413‧‧‧ closed side

414‧‧‧accommodation space

42‧‧‧ magnetic track ring

421‧‧‧Positive Magnetic Zone

422‧‧‧Negative magnetic zone

43‧‧‧Side seal ring cover

44‧‧‧ Friction ring

5‧‧‧stage unit

51‧‧‧ carrier

52‧‧‧Track Strip

521‧‧‧Positive Magnetic Zone

522‧‧‧Negative magnetic zone

53‧‧‧ back iron

6‧‧‧Drive unit

61‧‧‧Driver

62‧‧‧Connecting shaft

63‧‧‧drive wheel

64‧‧‧Drive

641‧‧‧Drive Belt

65‧‧‧tension wheel

X‧‧‧Horizontal

Y‧‧‧ Conveying direction

L‧‧‧ axis

Other features and effects of the present invention will be clearly presented in the embodiment with reference to the drawings, wherein: FIG. 1 is a perspective view illustrating an embodiment of the composite stable transfer device of the present invention disposed in a sputtering plating chamber 2 is a perspective view of the embodiment; FIG. 3 is an exploded perspective view of a stage unit of the embodiment; FIG. 4 is an incomplete partial cross-sectional view obtained from FIG. 2 to explain the wheels of the embodiment The structural composition of the group; and FIG. 5 is an exploded perspective view of a magnetically-added transport wheel of each wheel group of the embodiment.

Claims (8)

A composite stable transfer device is used to be installed in a sputtering plating chamber, comprising: two wheel bases arranged in the sputtering chamber at intervals along a lateral direction, and each wheel base extending along a conveying direction perpendicular to the lateral direction ; A plurality of wheel sets, several of which are arranged at intervals on one of the wheel seats along the conveying direction, and the others of which are disposed at intervals of one another along the conveying direction, and each wheel set includes: a wheel shaft, pivoted on the corresponding wheel seat, And a magnetically conveyed wheel connected to the wheel shaft and having an axis, a wheel peripheral portion surrounding the axis, a magnetic track ring provided in the wheel peripheral portion around the axis, and at least one ring disposed on the wheel peripheral portion The outer circumferential surface has an elastic friction ring. The magnetic track ring has a plurality of positive magnetic areas and a plurality of negative magnetic areas arranged alternately and spaced around the axis. The magnetic poles of the positive magnetic areas are different from the magnetic poles of the negative magnetic areas. The platform unit, which bears on the friction rings of the wheel sets, includes a carrier platform and two magnetic rails spaced from the carrier platform along the transverse direction. Each magnetic rail bar extends along the conveying direction and has Staggered interval setting in conveying direction The complex positive magnetic area and the complex negative magnetic area, the magnetic poles of each positive magnetic area are different from the magnetic poles of each negative magnetic area, and one of the magnetic track strips is the wheel set corresponding to one of the wheel bases. The other of the rails is the wheel set corresponding to the other wheel seat; and a drive unit can be operated to drive the wheel sets to run synchronously. The composite stable transfer device according to claim 1, wherein each magnetized conveying wheel further has a casing and a side ring cover, the casing has the wheel periphery, and a radial position is located on the wheel periphery. A bearing ring part inside the part, a closed side part extending from one end of the wheel peripheral part to the bearing ring part, and an accommodation formed by the wheel peripheral part, the bearing ring part, and the closed side part with the definition Space, the side seal ring cover is disposed at an end of the wheel peripheral portion of the casing opposite to the closed side portion to close the opening of the accommodation space. The composite stable transfer device according to claim 1 or 2, wherein each magnetic track ring is disposed in the accommodating space of the corresponding magnetized transport wheel, and is attached to the wheel periphery of each magnetized transport wheel. The inner peripheral surface of the part. The composite stable transfer device according to claim 1, wherein the bottom surface of the carrier is recessed to form two recesses for the magnetic track strips to be embedded, and the magnetic track strips of the carrier unit are respectively supported. Friction rings on such wheels. The composite stable transfer device according to claim 1, wherein two of the wheel sets oppositely disposed along the horizontal direction are defined as driving wheel sets, and the remaining wheel sets are defined as driven wheel sets, and the driving unit includes a driving member , A connecting shaft, a plurality of transmission wheels, and two transmission groups, the driving member is connected to the wheel shaft of one of the driving wheel groups, the connecting shaft is connected to the wheels of the driving wheel groups, and the driving wheels are respectively disposed on the wheel groups One of the transmission sets is connected to the transmission wheels of the wheel sets provided on the one wheel seat, and the other of the transmission sets is to be connected to the transmission wheel phases of the wheel sets provided on the other wheel seat Connected to enable the wheels to run synchronously. A magnetically conveyed wheel includes: an axis; a wheel periphery surrounding the axis; a magnetic track ring disposed within the wheel periphery around the axis and including a plurality of positive magnetic regions and a plurality of negatives arranged alternately around the axis In the magnetic region, the magnetic poles of the positive magnetic regions are different from the magnetic poles of the negative magnetic regions; and at least one friction ring is provided around the outer peripheral surface of the wheel periphery and has elasticity. The magnetized conveying wheel according to claim 6, further comprising a casing and a side ring cover, the casing including the wheel periphery, a bearing ring portion located radially inside the wheel periphery, and a One end of the wheel peripheral portion extends to a closed side portion of the bearing ring portion, and an accommodating space defined by the wheel peripheral portion, the bearing ring portion, and the closed side portion is defined by the side ring cover. An end of the wheel peripheral portion of the casing opposite to the closed side portion is used to close the opening of the accommodation space. The magnetically conveyed wheel according to claim 6 or 7, wherein the magnetic track ring is disposed in the accommodating space and is attached to an inner peripheral surface of a peripheral portion of the wheel.